KR20220033385A - Visible parylene film for light extraction of organic light emitting diodes and manufacturing method thereof - Google Patents

Abstract

The present invention relates to a visible perylene film for light extraction of an organic light emitting diode and a film forming process thereof, and more specifically, to a method of manufacturing a visible perylene film with excellent visibility and excellent light extraction efficiency on an upper portion of the organic light emitting diode. According to the present invention, the method comprises: a vaporization step (S10) of vaporizing dimer perylene in a temperature range of 190 to 270℃ by introducing dimer perylene in powder form into a vaporization unit (10); a first transfer step (S20) of transferring the vaporized dimer perylene to a decomposition unit (30) through a first transfer pipe (20) connected to the vaporization unit (10); a first decomposition step (S30) of heating the dimer perylene vaporized through the decomposition unit (30) and convert the heated dimer perylene into monomer perylene; a second transfer step (S40) of transferring the dimer perylene and the monomer perylene from the decomposition unit (30) to a deposition chamber (50) through a second transfer pipe (40); a first deposition step (S50) of forming a first polymer film layer (210) by diffusing the dimer perylene and the monomer perylene on an upper portion of the organic light emitting diode introduced into the deposition chamber (50); and a cooling step (S60) of condensing the perylene by-product transferred after the first deposition step (S50) through a cold trap (60).

Description

Visible PARYLENE FILM FOR LIGHT EXTRACTION OF ORGANIC LIGHT EMITTING DIODES AND MANUFACTURING METHOD THEREOF

The present invention relates to a visible parallin film for light extraction of an organic light emitting device and a method for manufacturing the same, and a visible parallin film formed directly on the upper portion of the organic light emitting device to have excellent adhesion and light extraction efficiency, and a method for manufacturing the same is about

An organic light emitting diode (OLED) is a diode-structured device using an eco-friendly and inexpensive organic material. It can be applied to small, medium and large displays and surface light source lighting. It is a next-generation environmentally friendly light emitting device with excellent energy saving effect due to its high efficiency characteristics. is attracting attention as

In the structure of a general organic light emitting diode (OLED), when an anode, an organic light emitting semiconductor material layer, a cathode, etc. are inserted on a glass or plastic substrate and voltage is applied, electrons and holes from the cathode and anode are respectively injected into the organic layer, It has a structure in which light is generated through the recombination process of holes.

These organic light emitting devices (OLEDs) are attracting attention as next-generation eco-friendly lighting and display devices due to their low power consumption and high degree of freedom of shape, and accordingly, research on equipment and manufacturing technologies for organic light emitting device development is being actively conducted.

In particular, a structure for improving light extraction efficiency is required for power efficiency, and for this purpose, research on reducing light loss due to total internal reflection by adding an optical structure of an OLED is required.

Republic of Korea Registered Utility Model No. 20-0332237 (October 27, 2003)

The present invention has been devised in view of the above problems, and an object of the present invention is to form a film directly on the upper portion of the organic light emitting device to increase the light extraction efficiency, a visible ferralin film for light extraction of an organic light emitting device, and a method for manufacturing the same is to provide

In addition, another object of the present invention is the visibility for light extraction of the organic light emitting device of the organic light emitting device, which is deposited on the top of the organic light emitting device and has excellent adhesion to maintain a stable coating state on the upper portion of the organic light emitting device To provide a paraline film and a method for manufacturing the same.

According to the characteristics for achieving the above object, in the film forming process of the visible ferralin film for light extraction of the organic light emitting diode according to the present invention, dimer feralin in powder form is injected into the vaporization unit at a temperature of 190 to 270 ° C. A vaporization step of vaporizing the dimer feralin in a temperature range; a first transfer step of transferring the vaporized dimer feralin to the decomposing unit through a first transfer pipe having one side connected to the vaporization unit and the other side connected to the decomposing unit; a first decomposition step of heating the vaporized dimer feralin through the decomposition unit to convert it into monomeric feralin; a second transfer step of transferring the dimer feralin and the monomer feralin of the decomposing unit to the deposition chamber through a second transfer pipe having one side connected to the decomposition unit and the other end connected to the deposition chamber; a first deposition step of forming a first polymer film film by diffusing dimer ferralin and monomer ferralin on the organic light emitting device put into the deposition chamber; and a cooling step of condensing the paraline by-product by transferring it to a cold trap after completing the first deposition step.

And in the first decomposition step, the decomposition unit may be converted into monomer feralin by heating the dimer feralin in a temperature range of 450 to 550 ℃.

In addition, in the first decomposition step, the temperature of the decomposition part may be 650 to 750 ° C., after the first deposition step is completed, the dimer ferralin vaporized through the vaporization part is transferred to the decomposition part to a temperature of 350 to 450 ° C. A second deposition step of forming a second polymer film film on an upper surface of the first polymer film film in the deposition chamber by transferring it to the deposition chamber after performing a second decomposition step of heating in a temperature range to convert the monomer ferralin; The vaporized dimer feralin is transferred to the decomposition unit through the vaporization unit, heated in a temperature range of 650 to 750° C. to perform a third decomposition step of converting it into monomer ferralin, and then transferred to the deposition chamber and transferred to the second deposition chamber A third deposition step of forming a second polymer film film on the upper surface of the polymer film film may be further included.

At this time, the decomposition unit is composed of a first decomposition chamber and a second decomposition chamber each having one end connected to the vaporization unit and capable of independent temperature control, and the first decomposition chamber is controlled at a temperature of 650 to 750 °C, The second decomposition chamber is controlled at a temperature of 350 to 450° C., and the second decomposition step includes converting dimer feralin to monomeric feralin through the second decomposition chamber, and the first decomposition step and the third decomposition step. may convert dimer feralin into monomeric feralin through the first decomposition chamber.

In addition, the internal temperature of the first transfer tube and the second transfer tube may be made of 150 ℃ to 250 ℃.

And the visible ferralin film for light extraction of the organic light emitting diode according to the present invention is characterized in that it was manufactured by the above-described film forming process.

According to the visible ferralin film for light extraction of an organic light emitting device according to the present invention and a method for manufacturing the same, there is an effect of improving the light extraction efficiency of the organic light emitting device by forming a film directly on the organic light emitting device.

In addition, according to the present invention, there is an effect that can form a film for an organic light emitting device excellent in both light extraction efficiency and adhesion on the upper portion of the organic light emitting device by controlling the temperature of the decomposition part to the optimum condition.

And, according to the present invention, a paralin film with excellent adhesion and a paraline film with excellent visibility are formed on the upper part of the organic light emitting device in a multi-layer structure so that both light extraction efficiency and adhesion to the upper portion of the organic light emitting device are excellent. There are advantages to manufacturing.

In addition, according to the present invention, there is an advantage in that it is possible to prevent the formation of a film inside the pipe by controlling the temperature of the transfer pipe that transports the ferralin material from the vaporization unit to the decomposition unit and from the decomposition unit to the deposition chamber.

1 is a flow chart showing a manufacturing process of a visible ferralin film for light extraction of an organic light emitting diode according to the present invention;
2 is a conceptual diagram illustrating a manufacturing process of a visible parallin film for light extraction of an organic light emitting diode according to Example 1 of the present invention;
Figure 3 is an operational diagram showing the sequence of the manufacturing process of the visible paraline film for light extraction of the organic light emitting device according to Example 1 of the present invention;
4 is a conceptual diagram illustrating a visible ferrine film for light extraction of an organic light emitting device manufactured according to Example 1 of the present invention;
5 is a graph showing light extraction efficiency and adhesion according to the temperature of the decomposition part;
6 is a conceptual diagram illustrating a process for forming a visible paralin film for light extraction of an organic light emitting diode according to Example 2 of the present invention;
7 to 8 are operational diagrams showing the progress of the film forming process of the visible paraline film for light extraction of the organic light emitting device according to Example 2 of the present invention;
9 is a conceptual diagram showing a multi-layered parallin film prepared according to Example 2 of the present invention;
10 and 11 are graphs measuring the optical properties of the paralin film prepared according to the present invention.
12 is a JVL graph of an OLED on which a visible ferralin film is not coated and an OLED on which a visible ferralin film is coated according to the present invention.

The features and advantages of the present invention will be more clearly understood by the embodiments described with reference to the accompanying drawings.

The application of the present invention is not limited by the configuration and arrangement of components described in the embodiments of the present invention or shown in the drawings. The present invention may be embodied in other embodiments and may be practiced in various ways. In addition, expressions and predicates used in the embodiments with respect to terms such as the orientation of devices or elements are used only to simplify the description of the present invention, and do not indicate or imply that the related devices or elements simply have to have a specific orientation. does not For example, although terms such as "first" and "second" are used in the embodiments and claims describing the present invention, such terms are not intended to indicate or imply relative importance or spirit.

In addition, the terms or words used in the present specification and claims are not to be construed as being limited to conventional or dictionary meanings, and the inventors are in the technical spirit of the present invention in order to explain the terms and concepts of the invention in the best way. It should be interpreted as written based on the corresponding meaning and concept.

Therefore, the present invention is not limited to the presented embodiment, and within the technical spirit of the present invention and the technical equivalents described in the claims to be described below by those of ordinary skill in the art to which the present invention pertains. Various modifications and changes are possible.

[Example 1]

Next, with reference to the accompanying drawings, Example 1 will be described in detail with respect to the film-forming process of the visible paraline film for light extraction of the organic light-emitting device according to the present invention.

1 is a block diagram illustrating a method of manufacturing a visible ferralin film for light extraction of an organic light emitting device according to the present invention, and FIG. 3 is a conceptual diagram illustrating the process, and FIG. 3 is an operational diagram illustrating the process of forming a visible paraline film for light extraction of an organic light emitting diode according to Example 1 of the present invention.

As shown in FIGS. 1 to 3 , in the method for manufacturing a visible ferralin film for light extraction of an organic light emitting device according to the present invention, the visible ferralin film on the organic light emitting device 100 is optimally processed. A film forming process capable of being coated to improve light extraction efficiency of the organic light emitting device 100 is presented.

To this end, the present invention is basically a vaporization step (S10), a first transfer step (S20), a first decomposition step (S30), a second transfer step (S40), a first deposition step (S50), a cooling step (S60) ) can be included.

And as shown in FIG. 2 , the equipment for forming a visible paraline film according to the present invention is basically a vaporization unit 10 , a decomposition unit 30 , a deposition chamber 50 , a cold trap 60 , a vacuum It is configured to include a pump (70).

Looking in detail with respect to the film formation process of the paralin film for an organic light emitting device, in the vaporization step (S10), dimer paralin in powder form is introduced into the vaporization unit 10 and dimer paralin in a temperature range of 190 to 270 ° C. is the vaporization step.

Here, the vaporization unit 10 may supply vaporized dimer ferrelin to the decomposition unit 30 , which is a configuration to be described later, to which the first transfer pipe 20 is connected as a vaporization chamber.

At this time, when the vaporization unit 10 is controlled to a temperature lower than 190° C., it takes a long time for the vaporized dimer ferralin to pass through the decomposition unit 30, which is a configuration to be described later, so that the temperature of the decomposition unit 30 is lowered. There is a problem that needs to be set.

And when the vaporization unit 10 is controlled to a temperature higher than 270 ° C., since the time for the vaporized dimer feralin to pass through the decomposition unit 30, which will be described later, is made very short, the temperature of the decomposition unit 30 is further increased. There is a problem that needs to be raised.

And in the first transfer step (S20), one end is connected to the vaporization unit 10 and the other end is connected to the decomposition unit 30 through the first transfer pipe 20 connected to the vaporized dimer feralin decomposition unit 30 ) is transferred to

At this time, it is preferable that the internal temperature of the first transfer pipe 20 is controlled to 150 °C to 250 °C. Through this, it is possible to prevent the dimer feralin from sublimating and not moving to the decomposing unit 30 , and from forming a film of ferrelin, thereby preventing aggregation of the ferrelin in the first transfer tube 20 .

Next, in the first decomposition step ( S30 ), the dimer feralin vaporized through the decomposition unit 30 is heated to convert it into the monomer ferralin. Here, the decomposition part 30 is a decomposition chamber which converts dimer feralin into monomeric feralin.

In the first decomposition step (S30), it is preferable that the decomposition unit 30 heats the dimer feralin in a temperature range of 450 to 550° C. to convert it into monomer feralin, and more specifically, the decomposition unit 30 The temperature may be controlled to 490 to 510 ℃.

The temperature of the decomposition unit 30 is a temperature condition in which light extraction efficiency is high and adhesion of the organic light emitting device 100 to the substrate is excellent when applied to the manufacture of a paralin film for an organic light emitting device.

More specifically, in FIG. 5, the temperature of the vaporization unit 10 proceeds under the same conditions, but the temperature of the decomposition unit 30 is advanced to 400 to 700 ° C. The graph shows the measurement of light extraction efficiency and adhesion according to temperature conditions.

As shown in FIG. 5 , when the temperature of the decomposition part 30 is less than 450° C., there is a limit in that the adhesiveness is very low, so that the state coated on the top of the OLED cannot be stably maintained.

In addition, when the temperature of the decomposing unit 30 exceeds 550° C., the haze gradually decreases and the light extraction efficiency gradually decreases.

That is, the optimum temperature of the decomposing unit 30 that can satisfy both adhesion and light extraction efficiency with the organic light emitting device 100 is 450 to 550 °C, and more preferably 500 °C.

And in the second transfer step (S40), the dimer ferralin of the decomposing unit 30 and This is a step of transferring the monomer ferralin to the deposition chamber 50 .

At this time, the internal temperature of the second transfer pipe 40 may be 150° C. or higher, and specifically, it is preferable to be controlled to 150° C. to 250° C., and through this, the ferrelin is introduced into the interior of the second conveying pipe 30 . film formation can be prevented.

The first deposition step ( S50 ) is a step of forming a first polymer film layer 210 by diffusing dimer feralin and monomer ferralin on the organic light emitting device 100 injected into the deposition chamber 50 .

In the deposition step (S50) carried out at room temperature, the monomeric feralin diffuses well, but the dimer feralin is difficult to diffuse because the particles are heavy, so uniform diffusion of the monomeric ferralin and the dimer ferralin is difficult.

In order to prevent the non-uniform diffusion of the dimer feralin and the monomeric feralin, the deposition chamber 50 may be provided with a distributor 51 for uniformly spreading the dimer feralin and the monomeric ferralin throughout the interior space.

Next, the cooling step (S60) is a step of condensing the by-product of feralin transported after completing the first deposition step (S50) through the cold trap 60 .

The cold trap 60 may have one side connected to the deposition chamber 50 and the other side connected to the vacuum chamber so as to receive the ferrelin by-product of the deposition chamber 50, and the cold trap 60 is -283 to 0°C. Preferably, it is cooled to a temperature range of

In the cooling step (S60), since the by-product of feralin is condensed through the cold trap 60, the by-product of feralin does not flow into the vacuum pump 70.

And the vacuum pump 70 controls to maintain the vacuum of the vaporization unit 10 , the decomposition unit 30 , the deposition chamber 50 , and the cold trap 60 .

As shown in FIG. 4 , the ferrelin powder is put into the vaporization unit 10 , passes through the decomposition unit 30 , and is transferred to the deposition chamber, and the ferralin film 200 is placed on the glass or plastic of the organic light emitting device 100 . ) can be formed.

In addition, the visibility ferrulein film 200 manufactured according to the present invention has an effect of increasing the light-enhancing properties by increasing the haze without affecting the electrical properties of the organic light-emitting device to have visibility.

[Example 2]

Next, with reference to the accompanying drawings, Example 2 will be described in detail with respect to a method for manufacturing a visible ferralin film for light extraction of an organic light emitting device according to the present invention.

In the second embodiment, the same reference numerals are used for the corresponding components including the first embodiment.

6 is a conceptual diagram illustrating a process for forming a visible paralin film for light extraction of an organic light emitting device according to Example 2 of the present invention, and FIGS. 7 to 8 are visibility for light extraction of an organic light emitting device according to Example 2 of the present invention An operational diagram showing the progress of the paralin film forming process, FIG. 9 is a conceptual diagram illustrating a parallin film having a multilayer structure manufactured according to Example 2 of the present invention.

Example 1 was made of a film of a single-layer structure formed under the condition of one decomposing unit 30, but in Example 2, the temperature conditions of the decomposing unit 30 were different from each other as shown in FIGS. 6 to 9. It is composed of a multi-layered film.

To this end, in the decomposition step, the dimer feralin vaporized at 190 to 270 ° C through the vaporization unit 10 is transferred to the decomposition unit 30 and heated in a temperature range of 650 to 750 ° C. In the first decomposition step (S30), the dimer ferralin vaporized at 190 to 270 ° C through the vaporization unit 10 is transferred to the decomposition unit 30 and heated in a temperature range of 350 to 450 ° C. to form a monomer ferrule In the second decomposition step (S31) of converting to lean, dimer feralin vaporized at 190 to 270 ° C through the vaporization unit 10 is transferred to the decomposition unit 30 and heated in a temperature range of 650 to 750 ° C. and a third decomposition step (S32) of converting it into the monomer ferralin.

And the deposition step, after the first decomposition step (S30) is transferred to the deposition chamber 50 to form a first polymer film film 210 on top of the organic light emitting device 100 (S50) And, after the second decomposition step (S31) is transferred to the deposition chamber 50 to form a second polymer film film 220 on top of the first polymer film film 210 (S51) and , after performing the third decomposition step (S32), transfer to the deposition chamber 50 to form a third polymer film film 230 on the second polymer film 220 in the third deposition step (S52) can be done

That is, a first deposition step (S50) of forming a first polymer film film 210 on the organic light emitting device using dimer feralin and monomer ferralin that have passed through the decomposition unit 30 at a temperature of 650 to 750°C (S50). ), the second decomposition step of transferring the vaporized dimer ferrelin through the vaporization unit 10 to the decomposition unit 30 and heating it at a temperature range of 350 to 450 ° C. Thereafter, the second deposition step ( S51 ) of forming a second polymer film film 220 on the upper surface of the first polymer film film 210 in the deposition chamber 50 may be further performed by transferring it to the deposition chamber 50 .

And after the second deposition step (S51) is completed, the dimer ferralin vaporized through the vaporization unit 10 is transferred to the decomposition unit 30 and heated in a temperature range of 650 to 750° C. A third deposition step of forming a third polymer film film 230 on the upper surface of the second polymer film 220 in the deposition chamber 50 by transferring it to the deposition chamber 50 after performing the third decomposition step ( S52) may be further performed.

Through this, a multi-layered film film may be formed on the upper surface of the organic light emitting device 100 .

More specifically, on the upper surface of the organic light emitting device 100, the first polymer film film 210 formed by proceeding to a temperature of 650 to 750° C. in the decomposition unit 30, and a temperature of 350 in the decomposition unit 30 The second polymer film film 220 formed at a temperature of 450 to 450° C. and the third polymer film film 230 having a temperature of 650 to 750° C. in the decomposition unit 30 may be sequentially stacked from the lower side to the upper side. .

Through this, the first polymer film film 210 coated on the upper surface of the organic light emitting device has excellent adhesion, so that it is possible to stably maintain the coated state on the substrate such as glass or plastic of the organic light emitting device 100 .

In this case, the upper substrate of the organic light emitting device 100 is not limited to glass, but may be made of various substrates such as plastic.

More specifically, the decomposition step is preferably performed at 700°C for the first polymer film film 210 , 400°C for the second polymer film, and 700°C for the third polymer film film 230 .

Through this, the first polymer film film 210 can stably maintain the deposited state on the glass of the organic light emitting device 100 due to excellent adhesion, and the second polymer film film 220 can satisfy light extraction efficiency. and the third polymer film film 230 is located on the uppermost side and has excellent scratch resistance, so that it is possible to prevent scratching during the process operation.

As an example for efficiently forming a film having a multilayer structure as described above, the decomposition unit 30 may be configured in two chambers to enable independent temperature control.

More specifically, the decomposition unit 30 may include a first decomposition chamber 31 and a second decomposition chamber 32 each having one end connected to the vaporization unit 10 and capable of independent temperature control. .

At this time, the first transfer pipe 20 has a 1-1 transfer pipe 21, one end connected to the vaporization unit 10 and the other end connected to the first decomposition chamber 31, and one end connected to the vaporization unit ( 10) and the other end may be formed of a 1-1 transfer pipe 22 connected to the second decomposition chamber 32.

In addition, the second transfer pipe 40 includes a 2-1 transfer pipe 41 having one end connected to the first decomposition chamber 31 and the other end connected to the deposition chamber 50 , and one end connected to the second transfer pipe 40 . It may be composed of a 2-2 second transfer pipe 42 connected to the second decomposition chamber 32 and the other end connected to the deposition chamber 50 .

In this case, the first decomposition chamber 31 may be controlled at a temperature of 650 to 750 °C, and the second decomposition chamber 32 may be controlled at a temperature of 350 to 450 °C.

That is, the first deposition step ( S50 ) may be performed through the monomer ferralin converted in the first decomposition chamber 31 , and the second deposition step ( S51 ) is performed in the second decomposition chamber 32 . The monomeric ferralin may be supplied to the deposition chamber 50 for deposition, and the third deposition step (S52) is performed by receiving the monomeric ferralin converted in the first decomposition chamber 31 to the deposition chamber 50. , it is possible to form a film film having a multilayer structure.

In addition, it is natural that the cooling step (S60) of transferring the by-product of ferralin after the second deposition step (S51) and the third deposition step (S52) to the cold tap and condensing it can be further performed.

In addition, in the paralin film forming apparatus used for forming a paralin film in the present invention, one end is connected to a pair of first transfer tubes 20 and the other end is connected to a pair of decomposition chambers 31 and 32 to be vaporized A pair of first bypass units 80 and 80 ′ for controlling the flow of dimer ferrulein, one end is connected to the pair of second transfer pipes 40 and the other end is connected to the cold trap 60 , so that the ferrule A pair of second bypass units 90 and 90 ′ for controlling the flow of lean and monomer ferralin may be further provided.

It is possible to selectively supply dimer ferrelin from the vaporization unit 10 to the first decomposition chamber 31 and the second decomposition chamber 32 through the first bypass unit 80. 80', and The selective supply from the first decomposition chamber 31 and the second decomposition chamber 32 to the deposition chamber 50 may be made through the two bypass units 90 and 90 ′.

In the first transfer step, after the vaporization step is completed through the first bypass unit 80. 80', the vaporized dimer ferralin is selectively supplied to the first decomposition chamber 31 and the second decomposition chamber 32 A first bypass step may be further included.

In addition, in the second transfer step, after the decomposition step, the dimer ferralin transferred from the first decomposition chamber 31 or the second decomposition chamber 32 through the second bypass units 90 and 90 ′ and The method may further include a second bypass step of selectively transferring the monomer ferralin to a cooling step for condensing.

Through this second bypass step, the monomer ferralin converted in the first decomposition chamber 31 or the second decomposition chamber 32 is selectively transferred to the cold trap 60 without transferring it to the deposition chamber 50 . It is transferred to skip the deposition step and proceed to the cooling step.

That is, while simultaneously driving the first decomposition chamber 31 and the second decomposition chamber 32 is possible, selective use is possible.

When the second bypass unit 90' of the second decomposition chamber 32 is operated through the second bypass step, the monomer ferralin and the dimer ferralin of the second decomposition chamber 32 are transferred to the deposition chamber. It does not pass through 50 and is bypassed to the cold trap 60 to condense monomer ferralin and dimer feralin, and monomer ferralin and dimer ferralin generated by the materials and conditions of the first decomposition chamber 31 are can be deposited.

That is, one vaporization unit 10 is connected to the decomposition unit 20 including the first decomposition chamber 21 and the second decomposition chamber 22 and controls the flow of dimer ferralin vaporized in the vaporization unit 10 . It can be controlled and can be efficiently formed into a multi-layered parallin film.

Referring together with the drawings, as shown in FIG. 7 , only the material decomposed in the first decomposition chamber 31 may be transferred to the deposition chamber 50 , and as shown in FIG. 8 , the second decomposition chamber Only the material decomposed in (32) may be transferred to the deposition chamber (50).

As shown in FIG. 9 , the paralin film prepared according to Example 2 of the present invention may be formed in a multi-layer structure on top of the organic light emitting device, and a first polymer film film 210 on the organic light emitting device glass. , the second polymer film film 220 and the third polymer film film 230 may be sequentially stacked from the lower side to the upper side.

[ Experimental example One] Ferroline film on deposition followed organic light emitting device optical properties Measurement of electrical properties

10 is an EL spectrum of an OLED to which a paralin film formed by controlling the temperature of the decomposition unit 30 to 400°C, 450°C, and 500°C, and FIG. (at 7V), FIG. 12 is a JVL graph of an OLED not coated with a visible feralin film and an OLED coated with a visible ferralin film according to the present invention.

At this time, the OLED used in the experiment has a structure in which Aluminum (100 nm), LiF (1.2 nm), Alq ₃ (70 nm), NPB (90 nm), MoO ₃ (4 nm), ITO, GLASS, and Parylene are sequentially stacked.

10 to 12 , Reference denotes an OLED sample on which a parylene film was not coated, and with visible parylene denotes an OLED sample on which a parylene film was coated.

As shown in FIGS. 10 and 11 , the OLED coated with the ferralin film emits more light, and when measured at a driving voltage of 7V using a PR650 spectrophotometer, the ferrule film is more ferrule than the uncoated OLED. It was confirmed that the light extraction efficiency of the Lean film-coated OLED was significantly increased.

And, as shown in FIG. 12 , since the JV of the OLED on which the paralin film is not coated and the OLED on which the paralin film is coated match, the visible paralin film coated on the OLED according to the present invention has an effect on the electrical properties of the OLED. It was confirmed to increase the light-enhancing properties without affecting it.

The right of the present invention is not limited to the above-described embodiments, but is defined by the claims, and a person of ordinary skill in the art can make various modifications and adaptations within the scope of the claims. It is self-evident...

10: vaporizer 20: first transfer pipe
21: No. 1-1 transfer pipe 22: No. 1-2 transfer pipe
30: decomposition unit 31: first decomposition chamber
32: second decomposition chamber 40: second transfer pipe
41: No. 2-1 transfer tube 42: No. 2-2 transfer tube
50: deposition chamber 51: distributor
60: cold trap 70: vacuum pump
80, 80': first bypass unit 90, 90': second bypass unit
100: organic light emitting device 200: paraline film
210: first polymer film film 220: second polymer film film
230: third polymer film film

Claims (6)

A vaporization step (S10) of injecting the dimer feralin in powder form into the vaporization unit 10 to vaporize the dimer ferrelin at a temperature range of 190 to 270°C;
A first transfer step (S20) of transferring the vaporized dimer feralin through the first transfer pipe (20) to the decomposition unit (30);
a first decomposition step (S30) of heating the dimer feralin vaporized through the decomposition unit 30 to convert it into monomer feralin;
a second transfer step (S40) of transferring the dimer feralin and the monomer feralin of the decomposing unit 30 to the deposition chamber 50 through the second transfer pipe 40;
a first deposition step (S50) of forming a first polymer film film 210 by diffusing dimer paralin and monomer paralin on the organic light emitting device 100 put into the deposition chamber 50; and
A method of manufacturing a visible ferralin film for light extraction of an organic light emitting diode comprising a; cooling step (S60) of condensing the paraline by-product by transferring it to the cold trap (60) after completing the first deposition step (S50).
The method of claim 1,
In the first decomposition step (S30), the decomposition unit 30 heats the dimer ferrelin in a temperature range of 450 to 550° C. and converts it into monomer ferrelin. A method for manufacturing a lean film.
The method of claim 1,
The temperature of the decomposition unit 30 in the first decomposition step (S30) is made of 650 to 750 °C,
After the first deposition step (S50),
After carrying out the second decomposition step of transferring the vaporized dimer feralin through the vaporization unit 10 to the decomposing unit 30, heating it in a temperature range of 350 to 450° C. to convert it into monomeric feralin, the deposition chamber a second deposition step of transferring to (50) to form a second polymer film film 220 on the upper side of the first polymer film film 210 in the deposition chamber 50;
After carrying out the third decomposition step of transferring the dimer ferrelin vaporized through the vaporization unit 10 to the decomposition unit 30, heating it in a temperature range of 650 to 750° C. to convert it into monomer ferrelin, the deposition chamber The light of the organic light emitting device, characterized in that it further comprises a third deposition step of transferring to (50) and forming a third polymer film film (230) on the upper side of the second polymer film film (220) in the deposition chamber (50) A method for producing a visible ferralin film for extraction.
4. The method of claim 3,
The decomposition unit 30 is composed of a first decomposition chamber 31 and a second decomposition chamber 32 each having one end connected to the vaporization unit 10 and capable of independent temperature control,
The first decomposition chamber 31 is controlled to a temperature of 650 to 750 ℃, the second decomposition chamber 32 is controlled to a temperature of 350 to 450 ℃,
In the second decomposition step, dimer feralin is converted into monomeric feralin through the second decomposition chamber 32,
In the first decomposition step and the third decomposition step, the dimer paralin is converted into the monomer paralin through the first decomposition chamber 31 . .
The method of claim 1,
The method of manufacturing a visible parallin film for light extraction of an organic light emitting device, characterized in that the internal temperature of the first transfer tube 20 and the second transfer tube 40 is controlled to 150 ℃ to 250 ℃.
[Claim 6] Visible paraline film for light extraction of an organic light emitting device, characterized in that it is manufactured by the manufacturing method according to any one of claims 1 to 5.

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