KR20220017570A - Laser device and method for operating the same - Google Patents

Abstract

According to an embodiment of the present invention, a laser device comprises: a laser beam outputting unit; a correction unit correcting a laser beam emitted from the laser beam outputting unit; a laser scanner the laser beam corrected from the correction unit; a reflector reflecting the laser beam scanned from the laser scanner to a processing substrate; and a control unit controlling the correcting unit. The control unit may control the correction unit according to a scanning condition of the laser scanner.

Description

LASER DEVICE AND METHOD FOR OPERATING THE SAME

The present disclosure relates to a laser device and a method of operating the same.

Many efforts have been made to increase the accuracy of the laser device by adjusting the laser incident angle and the like according to the position of the substrate on which the laser is irradiated.

US Patent No. 5,087,987 discloses a color correction f-theta lens for infrared light having a wavelength of 780-890 nm. However, the f-theta lens used in the method disclosed herein is damaged by a laser using a high-power laser or ultraviolet light, thereby making it difficult to apply to an apparatus using a high-power laser or ultraviolet light.

US Patent No. 5,838,481 discloses the application of an f-theta lens and a concave mirror. However, since laser irradiation is one-dimensionally scanned along one direction, in order to scan all two-dimensional areas, the same one-dimensional scan must be repeated a plurality of times.

International Patent WO 2012/131015 discloses the use of a mirror capable of changing the waveform of a monochromatic laser beam. However, since this method also scans one-dimensionally according to the laser irradiation direction, in order to scan all of the two-dimensional area, the one-dimensional scan must be repeated a plurality of times.

According to US publication US 2008/0259425, a laser processing apparatus is disclosed in which a laser beam focusing element is positioned in a scanning head. Disclosed is a beam deflection unit for flattening field curvature while adjusting a focus of a laser beam with a scan mirror, but it is difficult to reduce a telecentric error of a laser beam over a large area.

According to US Pat. No. 8,425,496, a deformable mirror is used, but since an f-theta lens is used, it is difficult to solve the chromatic aberration problem and difficult to apply to a large area. In addition, the f-theta lens may be damaged by a laser using a high-power laser or ultraviolet light, making it difficult to apply to a device using a high-power laser or ultraviolet light.

In order to process a large-area substrate, a laser beam with a small telecentric error must be irradiated to the large-area substrate surface. In order to reduce the telecentric error, a large telecentric lens may be used. However, since such a lens is expensive and heavy, there is a problem in the manufacturing process in terms of cost.

Embodiments are to provide a laser device capable of processing a large-area substrate by controlling a laser of focused intensity to be incident on a large two-dimensional area using a high-energy laser source.

It is apparent that the object of the present invention is not limited to the above-mentioned purpose, and can be variously expanded without departing from the spirit and scope of the present invention.

The laser device according to the embodiment includes a laser beam output unit, a correction unit for correcting the laser beam emitted from the laser beam output unit, a laser scanner for scanning the laser beam corrected by the correction unit, and the laser scanner scanned from the laser scanner. and a reflector for reflecting the laser beam to the processing substrate, and a control unit for controlling the compensator, wherein the control unit may control the compensator according to a scanning condition of the laser scanner.

The compensator may include a deformable mirror.

The compensator may include at least one of a micro-membrane, a piezoelectric element, and a MEMS.

The controller may include a memory, and the memory may store shape data of the compensator according to a scanning angle of the laser scanner.

The laser scanner may include a first scanner and a second scanner, the first scanner may scan the laser beam in a first direction, and the second scanner may scan the laser beam in the first direction and in the first direction. Scanning may be performed in a second vertical direction.

A first optical body positioned between the laser scanner and the reflector may be further included, and the first optical body may be disposed closer to the laser scanner than the reflector.

The first optical body may be a spherical lens.

The reflector may be a spherical mirror.

The axis of the spherical lens and the axis of the spherical mirror may be parallel to each other.

The distance d between the laser scanner and the reflector may satisfy R/2)X0.91<d<(R/2)X1.09 with respect to the radius of curvature R of the spherical mirror.

The laser device may further include a second optical body positioned between the laser beam output unit and the compensator, and the second optical body may be a spherical lens.

A laser device processing method according to an embodiment includes determining a direction of a laser scanner according to a position where a laser beam is to be incident on a processing substrate, a control unit receiving direction information of the laser scanner, and a correction unit according to the laser scanner direction information A step of controlling the laser beam emitted from the laser beam output unit is first corrected through the correction unit, the first corrected laser beam is scanned by the laser scanner, and the scanned laser beam is applied to a reflector In some embodiments, the method may include injecting a laser beam reflected from the reflector onto the processing substrate.

The compensator may include a deformable mirror, and the controlling of the compensator may change the shape of the compensator according to the laser scanner direction information.

The control unit may include a memory, and the shape data of the compensator according to the scanning direction information of the laser scanner may be stored in the memory, and the control unit reads the shape data of the compensator from the memory. Accordingly, the shape of the correction unit may be changed.

The laser scanner may include a first scanner and a second scanner, and the scanning includes scanning the laser beam in a first direction through the first scanner and the laser beam through the second scanner may include scanning in a second direction perpendicular to the first direction.

The method may further include secondary correction of the laser beam scanned by the laser scanner, wherein the secondary correction may use a first optical body positioned between the laser scanner and the reflector. .

The secondary correction may be a step of passing the laser beam that has passed through the laser scanner through a spherical lens.

The reflector may be a spherical mirror, and the laser beam reflected from the reflector may be reflected on a surface of the spherical lens.

The axis of the spherical lens and the axis of the spherical mirror may be arranged to be parallel to each other.

The distance d between the laser scanner and the reflector may be arranged to satisfy R/2)X0.91<d<(R/2)X1.09 with respect to the radius of curvature R of the spherical mirror.

According to the laser apparatus according to the embodiments, it is possible to process a large-area substrate by controlling a laser having a constant intensity to be incident on a large two-dimensional area using a broadband laser source.

It is apparent that the effect of the present invention is not limited to the above-described effect, and can be variously expanded without departing from the spirit and scope of the present invention.

1 is a conceptual diagram of a laser device according to an embodiment.
2 is a perspective view of a laser device according to an embodiment;
3 is an enlarged perspective view of a part of a laser device according to an embodiment.
4 is a view for explaining an operation of a driving unit of a laser device according to an embodiment.
5 is an enlarged perspective view of a part of a laser device according to an embodiment.
6 is a flowchart illustrating a method of controlling a laser device according to an exemplary embodiment.
7A and 7B are diagrams showing results according to an experimental example.
8A and 8B are diagrams showing results according to an experimental example.
9 is a graph showing results according to an experimental example.
9A and 9B are conceptual diagrams for explaining the results of one experimental example.

Hereinafter, with reference to the accompanying drawings, various embodiments of the present invention will be described in detail so that those of ordinary skill in the art to which the present invention pertains can easily implement them. The present invention may be embodied in several different forms and is not limited to the embodiments described herein.

In order to clearly explain the present invention, parts irrelevant to the description are omitted, and the same reference numerals are assigned to the same or similar components throughout the specification.

In addition, since the size and thickness of each component shown in the drawings are arbitrarily indicated for convenience of description, the present invention is not necessarily limited to the illustrated bar. In order to clearly express various layers and regions in the drawings, the thicknesses are enlarged. And in the drawings, for convenience of description, the thickness of some layers and regions are exaggerated.

Further, when a part of a layer, film, region, plate, etc. is said to be “on” or “on” another part, it includes not only cases where it is “directly on” another part, but also cases where another part is in between. . Conversely, when we say that a part is "just above" another part, we mean that there is no other part in the middle. In addition, to be "on" or "on" the reference part is located above or below the reference part, and does not necessarily mean to be located "on" or "on" the opposite direction of gravity. .

In addition, throughout the specification, when a part "includes" a certain component, this means that other components may be further included, rather than excluding other components, unless otherwise stated.

In addition, throughout the specification, when referring to "planar", it means when the target part is viewed from above, and "cross-sectional" means when viewed from the side when a cross-section of the target part is vertically cut.

In addition, throughout the specification, when “connected”, this does not mean that two or more components are directly connected, but two or more components are indirectly connected through other components, physically connected In addition to being electrically connected, it may be referred to by different names depending on location or function, but may mean one thing.

A laser device according to an embodiment will be described with reference to FIG. 1 . 1 is a conceptual diagram of a laser device according to an embodiment.

Referring to FIG. 1 , the laser device according to the embodiment includes a laser beam output unit 1 , a compensating unit 3 to which a laser beam 2 output from the laser beam output unit 1 is incident and reflected, and a compensating unit ( 3), the laser beam reflected from the laser scanner (4, 5) is incident and scanned, the laser beam passing through the laser scanner (4, 5) is incident on the first optical body (6), the first optical body (6) It includes a reflector 7 through which the laser beam is incident and reflected, a second optical body 9 positioned in front of the laser beam output unit 1 , and a control unit 10 .

The laser beam output unit 1 may provide a laser pulse. The duration of the laser pulse may be less than 40 ps, and the wavelength of the laser beam may be less than about 400 nm, preferably less than about 360 nm. The bandwidth of the laser beam may be greater than 0.05 nm.

The compensator 3 may be a deformable mirror.

The compensator 3 may include at least one of a micro-membrane, a piezo-electric element, and a mems.

The compensator 3 may be deformed to have a predetermined shape by the control unit 10 .

The control unit 10 includes a memory 11 , and data on the shape of the correction unit 3 according to the position of the processing substrate 8 may be stored in the memory 11 .

The control unit 10 receives the scanning information of the laser beam from the first scanner 4 and the second scanner 5, and the correction unit 3 according to the angle of the laser scanner 4, 5 from the memory 11. The data on the shape is read and the correction unit 3 is controlled accordingly.

When the controller 10 receives the angles of the laser scanners 4 and 5 that are not stored in the memory 11 , the controller 10 may use data of two adjacent angles to correct them by an interpolation method.

The laser scanners 4 and 5 may include a first scanner 4 and a second scanner 5 , and the first scanner 4 transmits the laser beam incident from the compensator 3 in the first direction (x). ), and the second scanner 5 scans the laser beam incident from the compensator 3 along the second direction (y) forming a predetermined angle with the first direction (x) to obtain the first It can be transmitted to the optical body (6). The second direction (y) may be perpendicular to the first direction (x).

The first scanner 4 and the second scanner 5 may be mirrors capable of providing beam deflection in a certain direction to the incident laser beam, and by deflecting the incident laser beam in a certain direction, a constant The laser beam can be scanned in a direction.

The reflector 7 may be a spherical mirror.

The distance d between the laser scanners 4 and 5 and the reflector 7 may be approximately equal to one-half (1/2) of the radius of curvature R of the reflector 7 . More specifically, the distance d between the laser scanners 4 and 5 and the reflector 7 is (R/2)X0.91<d<(R), when the radius of curvature of the reflector 7 is R. /2)X1.09 can be satisfied.

The incident angle a of the laser beam incident on the reflector 7 may be about 10 degrees or more, more specifically, about 45 degrees or more.

The first optical body 6 and the second optical body 9 may be spherical lenses, and the first optical body 6 may include two spherical lenses. At least one of the laser beams passing through the first scanner 4 and the second scanner 5 may pass through the two spherical lenses, respectively.

The first optical body 6 may refract the laser beam and prevent unnecessary wide diffusion of the laser beam, thereby preventing chromatic aberration. The first optical body 6 may allow the laser beam to be incident on the reflector 7 which is a spherical lens. For example, one spherical lens of the first optical body 6 refracts a laser beam scanned through the first scanner, and the other spherical lens of the first optical body 6 is scanned through the second scanner The laser beam can be refracted.

The optical axis of the first optical body 6 may be parallel to a direction inclined with respect to the laser scanners 4 and 5 . The optical axis of the first optical body 6 may be coaxial with the reflector 7 .

The second optical body 9 is positioned between the laser beam output unit and the correction unit 3, and prevents the laser beam 2 output from the laser beam output unit 1 from being unnecessarily wide spread, thereby reducing chromatic aberration. may play a role in preventing

The second optical power fa of the second optical body 9 and the first optical power fb of the first optical body 6 may satisfy 0.1<-fb/fa<5, and more Specifically, 0.5<-fb/fa<0.9 may be satisfied.

The first optical body 6 and the second optical body 9 may be glass including at least one of fused silica, calcium fluoride, and magnesium fluoride. The first optical body 6 and the second optical body 9 may not be damaged by a laser beam having a short wavelength, for example, a laser beam in the ultraviolet region.

The field of view of the laser device according to this embodiment may be greater than 460 mmx460 mm, the spot size of the beam of the laser device may be less than 32 μm, and the laser beam telecentric angle may be less than 1.5 degrees. can

Then, with reference to FIGS. 2 to 5 together with FIG. 1 , a laser device according to an embodiment will be described in more detail. FIG. 2 is a perspective view of a laser device according to an embodiment, FIG. 3 is an enlarged perspective view of a part of the laser device according to an embodiment, and FIG. 4 is for explaining the operation of the driving unit of the laser device according to the embodiment FIG. 5 is an enlarged perspective view of a part of a laser device according to an embodiment.

First, referring to FIG. 2 together with FIG. 1 , the laser beam 2 output from the laser beam output unit 1 is corrected through the correction unit 3 and then on one plane through the laser scanners 4 and 5 . After being scanned in two different directions, it is reflected by the reflector 7 and irradiated onto the processing substrate 8 . In this case, the laser beams emitted from the laser scanners 4 and 5 may be incident on the reflector 7 by correcting chromatic aberration through the first optical body 6 . In addition, the laser beam 2 output from the laser beam output unit 1 may be incident on the correction unit 3 by correcting chromatic aberration through the second optical body 9 before being incident on the correction unit 3 . .

As shown in FIG. 2 , the laser beam reflected from the reflector 7 and incident on the processing substrate 8 may be incident to be substantially perpendicular to the surface of the processing substrate 8 irrespective of the position, and each laser beam is Corrected by the compensator 3 , the laser incident area is narrow, and energy is incident to have a focused energy spot in a narrow area, and may be used to form a fine pattern or the like.

Referring to FIG. 3 together with FIGS. 1 and 2 , the laser beam 2 output from the laser beam output unit 1 is incident on the compensator 3 , and then is corrected through the compensator 3 and laser scanner It is incident with (4, 5). In this case, the laser beam 2 output from the laser beam output unit 1 may be input to the correction unit 3 after chromatic aberration is corrected through the second optical body 9 .

The correction unit 3 corrects an aberration at an angle for scanning of the laser scanners 4 and 5 .

As described above, the control unit 10 receives the angle information for scanning the laser scanners 4 and 5, and the shape of the correction unit 3 according to the angle of the laser scanners 4 and 5 in the memory 11 Read the data for and control the correction unit 3 accordingly.

An example of the shape of the correction unit 3 according to the scanning angle of the laser scanners 4 and 5 is shown in FIG. 4 . Referring to FIG. 4 , the shape of the correction unit 3 is preset according to the scanning angle of the laser scanners 4 and 5 , and this preset value is stored in the memory 11 of the controller 10 .

The compensating unit 3 may be a deformable mirror, and the compensating unit 3 may include at least one of a micro-membrane, a piezo-electric element, and a mems. have.

The correction unit 3 may be deformed to have a preset shape by the control unit 10 .

In this case, when the controller 10 receives the angles of the laser scanners 4 and 5 that are not stored in the memory 11 , the controller 10 may use data of two adjacent angles to correct the angle using the interpolation method.

As such, the laser beam 2 output from the laser beam output unit 1 is corrected for aberration according to the scanning position of the laser scanners 4 and 5 in the correction unit 3, and then to the laser scanners 4 and 5. By being incident, it is possible to reduce the energy spot size of the laser beam. For example, when the scan area of the laser scanners 4 and 5 has a size of about 460 mmX460 mm, the energy spot size of the laser beam may be about 32 μm.

Referring to FIG. 5 together with FIGS. 1 and 2 , after the laser beam corrected by the correction unit 3 is scanned by the laser scanners 4 and 5 , the chromatic aberration is corrected through the first optical body 6 . It is incident on the rear reflector (7).

The first optical body 6 may be a spherical lens, and the first optical body 6 may include two spherical lenses 6a and 6b.

The first optical body 6 may refract the laser beam scanned by the laser scanners 4 and 5 and prevent unnecessary wide spread of the laser beam, thereby preventing chromatic aberration. The first optical body 6 may allow the laser beam to be incident on the reflector 7 which is a spherical lens. For example, one spherical lens of the first optical body 6 refracts a laser beam scanned through the first scanner, and the other spherical lens of the first optical body 6 is scanned through the second scanner The laser beam can be refracted.

Referring to FIG. 5 together with FIG. 1B , the optical axis of the first optical body 6 may be coaxial with the reflector 7 .

The laser beam reflected from the reflector 7 and incident on the processing substrate 8 may have a telecentric angle of less than about 5 degrees, and more specifically, a telecentric angle of less than 1.5 degrees.

The telecentric angle a is expressed by the formula a=d/(R/2). d is the distance between the laser scanners 4 and 5 and the reflector 7 , and R is the radius of curvature of the reflector 7 .

As described above, the distance d between the laser scanners 4 and 5 and the reflector 7 is (R/2)X0.91<d<(R/2)X0.91<d<( Since R/2)X1.09 may be satisfied, the telecentric angle a of the laser beam reflected from the reflector 7 and incident on the processing substrate 8 may be less than 1.5 degrees.

The first optical body 6 may be a spherical lens having a size smaller than 50 mm. In addition, the first optical body 6 may be glass including at least one of fused silica, calcium fluoride, and magnesium fluoride.

As described above, the wavelength of the laser beam 2 output from the laser beam output unit 1 may be about 400 nm or less, preferably less than about 360 nm, and the first optical body 6 may include fused silica, calcium fluoride, It may be glass including at least one of magnesium fluoride, and thus it can be prevented from being damaged by the first optical body 6 and the laser beam.

The size of the reflector 7 may be 500 mmX500 mm, and the first optical body 6 is disposed adjacent to the laser scanners 4 and 5, and a large size is obtained by using the small size of the first optical body 6 . The branch can correct the aberration of the laser beam incident on the reflector 7 .

According to the embodiment, by using a laser beam having high energy of a short wavelength, a correction unit capable of correcting aberration according to an incident angle of the laser beam by the controller is included, and by additionally correcting the aberration through an optical body, a wide It can be adjusted so that the laser of the focused intensity is incident on the two-dimensional area, and accordingly, it can be processed to form a fine pattern or the like on a large-area substrate.

A processing method of a laser device according to an exemplary embodiment will be described with reference to FIG. 6 along with FIGS. 1 to 5 . 6 is a flowchart illustrating a method of controlling a laser device according to an exemplary embodiment.

First, the scanning direction of the laser scanners 4 and 5 is determined according to the position of the processing substrate 8 to which the laser beam is to be incident. (S10)

The scanning direction of the laser scanners 4 and 5 is changeable according to the position at which the laser beam is to be irradiated within the area of the substrate 8 to be processed.

When the scanning direction of the laser scanners 4 and 5 is determined, the control unit 10 receives the scanning direction data. (S20)

After the control unit 10 receives the scanning direction data of the laser scanners 4 and 5, reads the data of the correction unit 3 stored in the memory 11, and if necessary, generates data through an interpolation method , using the data of the control unit 10 to control the correction unit 3 . (S30).

More specifically, the control unit 10 transforms the shape of the mirror of the correction unit 3 into a preset shape. As described above, the shape of the correction unit 3 is preset according to the scanning positions of the laser scanners 4 and 5 , and this preset value is stored in the memory 11 of the controller 10 . The compensating unit 3 may be a deformable mirror, and the compensating unit 3 may include at least one of a micro-membrane, a piezo-electric element, and a mems. and may be deformed to have a certain shape by the control unit 10 .

In this way, after the control unit 10 controls the correction unit 3 to deform the shape of the correction unit 3 , the laser beam is emitted from the laser beam output unit 1 , and the laser beam output unit 1 The emitted laser beam 2 is incident on the compensator 3 and is first corrected through the compensator 3 . (S40). The correction unit 3 corrects an aberration according to an angle for scanning of the laser scanners 4 and 5 .

The laser beam first corrected by the correction unit 3 is incident on the laser scanners 4 and 5 and is scanned.

At this time, the laser beam 2 output from the laser beam output unit 1 is pre-corrected for chromatic aberration through the second optical body 9 before being first corrected by the correction unit 3, and then the correction unit ( 3) can also be entered. The second optical body 9 may be a spherical lens.

The laser beam scanned by passing through the laser scanners 4 and 5 after being first corrected through the correction unit 3 is secondarily corrected through the first optical body 6 . (S50).

The laser beam is secondary corrected through the first optical body 6, whereby chromatic aberration is corrected.

The first optical body 6 may be a spherical lens, and the first optical body 6 may include two spherical lenses 6a and 6b. For example, a laser beam scanned through the first scanner 4 passes through one spherical lens 6a of the first optical body 6 , and the other spherical lens 6 of the first optical body 6 passes through In 6b), the laser beam scanned through the second scanner 5 is passed, so that secondary correction can be performed.

The laser beam corrected secondarily through the first optical body 6 is incident on the reflector 7 . (S60)

The reflector 7 may be a spherical mirror.

The first optical body 6 may include two spherical lenses 6a and 6b, and the axes of the spherical lenses 6a and 6b may be parallel to the axes of the spherical mirror, which is the reflector 7 .

The first optical body 6 may refract the laser beam scanned by the laser scanners 4 and 5 and prevent unnecessary wide spread of the laser beam, thereby preventing chromatic aberration. The first optical body 6 may allow the laser beam to be incident on the reflector 7 which is a spherical lens.

The first optical body 6 may be a spherical lens having a size smaller than 50 mm. Also, the first optical body 6 may be glass including at least one of fused silica, calcium fluoride, and magnesium fluoride.

As described above, the wavelength of the laser beam 2 output from the laser beam output unit 1 may be about 400 nm or less, preferably less than about 360 nm, and the first optical body 6 may include fused silica, calcium fluoride, It may be glass including at least one of magnesium fluoride, and thus it can be prevented from being damaged by the first optical body 6 and the laser beam.

The size of the reflector 7 may be 500 mmX500 mm, and the first optical body 6 is disposed adjacent to the laser scanners 4 and 5, and a large size is obtained by using the small size of the first optical body 6 . The branch can correct the aberration of the laser beam incident on the reflector 7 .

The laser beam reflected from the reflector 7 is incident on the processing substrate 8 . (S70)

At this time, the laser beam incident on the processing substrate 8 is first corrected through the correction unit 3 , is secondarily corrected through the first optical body 6 , and then reflected by the reflector 7 , and the processing substrate ( The laser beam incident to 8) may have a telecentric angle of less than about 5 degrees, and more specifically, may have a telecentric angle of less than 1.5 degrees.

The telecentric angle a is expressed by the formula a=d/(R/2). d is the distance between the laser scanners 4 and 5 and the reflector 7 , and R is the radius of curvature of the reflector 7 .

As described above, the distance d between the laser scanners 4 and 5 and the reflector 7 is (R/2)X0.91<d<(R/2)X0.91<d<( Since R/2)X1.09 may be satisfied, the telecentric angle a of the laser beam reflected from the reflector 7 and incident on the processing substrate 8 may be less than 1.5 degrees.

According to the processing method of the laser device according to the embodiment, according to the embodiment, using a laser beam having a high energy of a short wavelength, the control unit 1 By including the step of correcting the difference and the step of performing the secondary correction of additionally correcting the aberration through the optical body, it is possible to adjust the laser energy focused on the narrow area to be incident on a large two-dimensional area, and thus to the large-area substrate. It can be processed to form a fine pattern, etc.

Then, an experimental example will be described with reference to FIGS. 7A and 7A, 8A and 8B, 9, and 10A and 10B.

7A and 7A are diagrams showing results according to one experimental example, FIGS. 8A and 8B are diagrams showing results according to one experimental example, FIG. 9 is a graph showing the results of one experimental example, FIGS. 10A and 10A and 10B is a diagram illustrating a result according to an experimental example.

In this experimental example, laser spots according to positions were measured for the first case including the compensating unit 3 and the second case not including the compensating unit 3 like the laser device according to the embodiment, and the result is 6A and 6B, 7A and 7B, and 8A and 8B are shown.

7A and 7B are graphs showing laser energy spots according to positions, FIGS. 8A and 8B are images of simulation results showing laser energy distribution, and FIG. 10b is a micrograph of a laser beam measurement.

7A, 8A, and 10A show the results of the first case, and FIGS. 7B, 8B, and 10B show the results of the second case. 9 is a graph of energy distribution of a laser beam measured in the first case.

Referring to FIGS. 7B, 8B, and 10B together with FIGS. 7A, 8A, and 10A, in the first case including the compensating unit 3 as in the laser device according to the embodiment, the compensating unit 3 is not included. It was found that a laser beam having a high energy was irradiated to a narrow area compared to the second case where it is not.

More specifically, referring to FIG. 9 , in the first case, energy was concentrated at -16 μm to +16 μm, and it was found that the size of the spot where the energy of the laser beam was concentrated was 32 μm.

On the other hand, in the second case, the size of the spot where energy was concentrated was 2 mm or more.

As such, according to the second case, it can be seen that the energy distribution is distributed over a uniform area, so that the aberration of the laser beam is improved. It was found that it was difficult for the laser beam with the concentrated energy to be incident on the processing substrate.

However, according to the first case in which the laser beam is first corrected through the correction unit and then secondary corrected through the optical body as in the present embodiment, not only the chromatic aberration of the laser beam is corrected, but also the laser spot where the energy of the laser beam is concentrated. The size is relatively small and, for example, the size of the energy-focused spot is 32 μm, and thus it can be seen that a laser beam with energy-concentrated energy in a narrow area can be incident on the processing substrate. Accordingly, it was found that, according to the laser device and the laser device processing method according to the embodiment, a laser beam with improved chromatic aberration and energy concentration in a narrow area to form a fine pattern on a processing substrate may be incident.

Although the embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements by those skilled in the art using the basic concept of the present invention as defined in the following claims are also provided. is within the scope of the right.

1: Laser output unit 3: Compensation unit
4, 5: Laser scanner 6, 9: Optical body
7: reflector 8: processing substrate
10: control unit 11: memory

Claims (20)

laser beam output,
a correction unit for correcting the laser beam emitted from the laser beam output unit;
a laser scanner for scanning the laser beam corrected by the compensator;
a reflector for reflecting the laser beam scanned from the laser scanner to a processing substrate; and
A control unit for controlling the correction unit,
The control unit controls the compensator according to a scanning condition of the laser scanner.
In claim 1,
The compensator includes a deformable mirror.
In claim 2,
The compensator includes at least one of a micro-membrane, a piezoelectric element, and a MEMS.
In claim 1,
The control unit includes a memory,
The memory is a laser device for storing shape data of the correction unit according to the scanning angle of the laser scanner.
In claim 1,
The laser scanner includes a first scanner and a second scanner,
The first scanner scans the laser beam in a first direction,
The second scanner scans the laser beam in a second direction perpendicular to the first direction.
In claim 1,
Further comprising a first optical body positioned between the laser scanner and the reflector,
The first optical body is disposed closer to the laser scanner than the reflector.
In claim 6,
The first optical body is a spherical lens.
In claim 7,
The reflector is a spherical mirror.
In claim 8,
The axis of the spherical lens and the axis of the spherical mirror are parallel to each other.
In claim 8,
The distance d between the laser scanner and the reflector satisfies R/2)X0.91<d<(R/2)X1.09 with respect to the radius of curvature R of the spherical mirror.
In claim 1,
Further comprising a second optical body positioned between the laser beam output unit and the correction unit,
The second optical body is a spherical lens.
determining the direction of the laser scanner according to the position at which the laser beam is to be incident on the processing substrate;
receiving, by a control unit, direction information of the laser scanner, and controlling a correction unit according to the laser scanner direction information;
A step of primary correction through the correction unit of the laser beam emitted from the laser beam output unit;
scanning the first corrected laser beam by the laser scanner;
injecting the scanned laser beam into a reflector;
and projecting a laser beam reflected from the reflector onto the processing substrate.
In claim 12,
The compensator includes a deformable mirror,
The controlling of the compensating unit may include changing the shape of the compensating unit according to the laser scanner direction information.
In claim 13,
The control unit includes a memory,
The memory stores the shape data of the correction unit according to the scanning direction information of the laser scanner,
The control unit reads the shape data of the compensating unit from the memory and changes the shape of the compensating unit accordingly.
In claim 12,
The laser scanner includes a first scanner and a second scanner,
The scanning may include scanning the laser beam in a first direction through the first scanner and scanning the laser beam in a second direction perpendicular to the first direction through the second scanner A laser device processing method comprising a.
In claim 12,
Secondary correction of the laser beam scanned by the laser scanner,
The second correction is a laser device processing method using a first optical body positioned between the laser scanner and the reflector.
17. In claim 16,
The second correction is a laser device processing method in which the laser beam that has passed through the laser scanner is passed through a spherical lens.
In claim 17,
The reflector is a spherical mirror,
The laser beam reflected from the reflector is reflected on the surface of the spherical lens.
In claim 18,
An axis of the spherical lens and an axis of the spherical mirror are arranged to be parallel to each other.
In claim 18,
The distance d between the laser scanner and the reflector is arranged to satisfy R/2)X0.91<d<(R/2)X1.09 with respect to the radius of curvature R of the spherical mirror. Way.

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