KR20210145666A - Vibratory stimulation device and vibratory stimulation system including the same - Google Patents

Abstract

The present invention includes a vibrating element array including a first substrate, a connection band connected to both sides of the first substrate, and a plurality of vibrating elements provided on the first substrate, wherein each of the vibrating elements includes a stand provided on the first substrate, a vibrating membrane provided on the stand and in contact with the stand at an edge thereof, a vibrator provided on an upper surface or a lower surface of the vibrating membrane, and an electrode wire connected to the vibrator. The vibrating membrane includes a material which is more flexible and stretchable than the stand.

Description

Vibration stimulation device and vibration stimulation system including the same

The present invention relates to a vibration stimulation apparatus, and more particularly, to a vibration stimulation apparatus including an array of vibration elements in which vibration interference is attenuated, and a vibration stimulation system including the same.

In general, the vibration element may be an actuator element that generates and transmits vibration using an electric motor, a piezoelectric element, a capacitive element, or the like. The vibrating element can improve skin elasticity and blood circulation by giving vibration stimulation to human skin, etc., can remove waste products from pores, and allow nutrients such as drugs and moisture to be absorbed well.

An object of the present invention is to provide a vibration stimulation apparatus including a vibration element array in which vibration interference is attenuated, and a vibration stimulation system including the same.

The problem to be solved by the present invention is not limited to the above-mentioned problems, and other problems not mentioned will be clearly understood by those of ordinary skill in the art from the following description.

In order to solve the above problems, a vibration stimulation apparatus according to an embodiment of the present invention includes a first substrate, a connection band connected to both sides of the first substrate, and a plurality of vibration elements provided on the first substrate and a vibrating element array, wherein each of the vibrating elements is provided on a stand provided on the first substrate, a vibrating membrane that is provided on the stand, and is in contact with the stand at an edge, and an upper or lower surface of the vibrating membrane a vibrator, and an electrode wire connected to the vibrator, and the vibrating membrane may include a material that is more flexible and stretchable than the stand.

The vibrating membrane may include PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, elastic fiber, tape, or sponge.

The stand may include plastic, cured resin, metal, ceramic, or oxide.

The stand may have a cylindrical or polygonal column shape in which at least one of an upper portion and a lower portion is open.

The stand or the vibrating membrane may include air holes through which air freely enters and exits.

The vibrator may be an eccentric rotating mass (ERM), a linear resonator actuator (LRA), or a piezoelectric actuator configured to generate vibration according to an applied electrical signal.

At least a portion of the connection band may include a patch having Velcro or adhesive force, and the connection band may have a clothing shape that is fixed or in close contact with a body part.

Each of the vibrating elements may further include a protrusion structure provided on an upper surface of the vibrator or the vibrating membrane.

Each of the vibrating elements may further include a vibrator bag that surrounds the vibrator and is adhered to an upper or lower surface of the vibrating membrane.

A second substrate may be provided between the first substrate and the vibrating element array, wherein the second substrate may include a material that is more flexible and stretchable than the first substrate.

A protective film provided on the vibrating element array may be further included, wherein the protective film is in contact with an upper surface of the vibrator of each of the vibration elements, and the protective film may include a material that is more flexible and stretchable than that of the first substrate.

It further includes contact pads provided on the passivation layer, wherein the contact pads may include a material that is more flexible and stretchable than that of the first substrate.

It further includes fine bristles or hair-shaped ciliary pads provided on the protective film, wherein one end of each of the ciliary pads is fixed to the upper surface of the protective film, and the other end of each of the ciliary pads is freely shaken. It may be configured to move or bend.

It may further include a protruding contact pad provided on the passivation layer, wherein the protruding contact pad may include a flat pad portion and protruding portions protruding from the pad portion.

The vibration elements of the vibration element array may be arranged along a first direction and a second direction crossing the first direction on the first substrate.

In order to solve the above problems, a vibration stimulation system according to an embodiment of the present invention includes a first substrate, a connection band connected to both sides of the first substrate, and a plurality of vibration elements provided on the first substrate A vibration stimulator including an array of vibrating elements, a control unit individually connected to the vibration elements, and a power supply unit connected to the control unit and supplying electrical energy to the vibration stimulation apparatus and the control unit, wherein the vibration element each of the stand provided on the first substrate, a vibrator provided on the stand and in contact with the stand at an edge, a vibrator provided on an upper or lower surface of the vibrator, and connecting the vibrator and the control unit An electrode wire may be included, and the vibrating membrane may include a material that is more flexible and stretchable than the stand.

A second substrate may be provided between the first substrate and the vibrating element array, wherein the second substrate may include a material that is more flexible and stretchable than the first substrate.

The control unit may induce the vibration stimulation of each of the vibration elements simultaneously, sequentially, or in a pre-programmed pattern.

The control unit and the power supply unit may be provided inside or outside the first substrate.

The vibration stimulation apparatus may be provided in plurality, and the first substrates of the vibration stimulation apparatus may be connected to each other.

The vibrating membrane may include PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, elastic fiber, tape or sponge, and the stand may include plastic, cured resin, metal, ceramic, or oxide.

The vibration stimulation apparatus according to the present invention can drive and/or control vibration stimulation individually by configuring a plurality of vibration elements in an array, and thus provide vibration stimulation having various vibration patterns to hair, scalp, and skin for stimulation (eg, absorption of nutrients, improvement of blood and body fluid circulation, improvement of wrinkles, whitening, improvement of elasticity, prevention of hair loss, etc.) and improving user convenience.

In addition, the vibration stimulation apparatus according to the present invention can be implanted inside the body to deliver vibration stimulation to tissues such as the brain, blood vessels, nerves, and organs.

Furthermore, the vibration stimulation apparatus according to the present invention can be used as a product (eg, VR/AR tactile glove, tactile display, wearable vibration display device, etc.) that divides and transmits vibrotactile information for each location of a vibrating element.

1A and 2A are plan views for explaining vibration stimulation apparatuses according to embodiments of the present invention.
1b, 1c, 1d, 1e and 2b are cross-sectional views for explaining vibration stimulation devices according to embodiments of the present invention, respectively, in Figs. corresponds to
3A, 4A, 5A, 6A, 7A, and 8A are conceptual views illustrating vibration stimulation apparatuses according to embodiments of the present invention.
3B, 4B, 5B, 6B, 7B, and 8B are conceptual diagrams showing the vibration displacement at the lowest resonant frequency as a three-dimensional image when voltage is applied to the vibration stimulation devices of FIGS. 3A to 8A, respectively. admit.
9A, 10A, 11A, 12A, 13A, 14A, 15A, and 16A are cross-sectional views illustrating vibration stimulation apparatuses according to embodiments of the present invention.
9B, 10B, 11B, 12B, 13B, 14B, 15B, and 16B are graphs showing vibration displacement spectra when voltage is applied to the vibration elements of the vibration stimulation apparatuses of FIGS. 9A to 16A, respectively. admit.
17 to 26 are cross-sectional views for explaining vibration stimulation apparatuses according to embodiments of the present invention, and respectively correspond to a cross-section taken along the line I-I' in FIG. 2A.
27 is a plan view for explaining a vibration stimulation apparatus according to embodiments of the present invention.
28 is a conceptual diagram for explaining a vibration stimulation system including a vibration stimulation apparatus according to embodiments of the present invention.
29, 30 and 31 are conceptual diagrams for explaining the use of the vibration stimulation apparatus according to embodiments of the present invention.

In order to fully understand the configuration and effect of the present invention, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention is not limited to the embodiments disclosed below, but may be implemented in various forms and various modifications and changes may be made. However, it is provided in order to complete the disclosure of the present invention through the description of the present embodiment, and to fully inform those of ordinary skill in the art to which the present invention pertains to the scope of the invention. In the accompanying drawings, for convenience of explanation, the size is enlarged than the actual size, and the ratio of each component may be exaggerated or reduced.

The terminology used herein is for the purpose of describing the embodiment and is not intended to limit the present invention. Also, unless otherwise defined, terms used herein may be interpreted as meanings commonly known to those of ordinary skill in the art.

As used herein, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, 'comprises' and/or 'comprising' refers to the presence of one or more other components, steps, operations and/or elements mentioned. or addition is not excluded.

When a layer is referred to herein as being 'on' another layer, it may be formed directly on top of the other layer, or a third layer may be interposed therebetween.

Although terms such as first and second are used herein to describe various regions, layers, and the like, these regions and layers should not be limited by these terms. These terms are only used to distinguish one region or layer from another. Accordingly, a part referred to as the first part in one embodiment may be referred to as the second part in another embodiment. The embodiments described and illustrated herein also include complementary embodiments thereof. Parts indicated with like reference numerals throughout the specification indicate like elements.

Hereinafter, embodiments of a vibration stimulation apparatus and a vibration stimulation system including the same according to the present invention will be described in detail with reference to the drawings.

1A is a plan view for explaining a vibration stimulation apparatus according to embodiments of the present invention. 1B is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along the line I-I' in FIG. 1A.

1A and 1B , the vibration stimulation apparatus according to the present invention may include a substrate 100 and a vibration element array VSA on the substrate 100 . The substrate 100 may include, for example, a flexible and stretchable soft material such as PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, stretchable fiber, tape, or sponge. As another example, the substrate 100 may include a hard and rigid material such as plastic.

The substrate 100 may have various shapes, sizes, and shapes according to uses. The substrate 100 may have, for example, a hollow rectangular parallelepiped shape, but the present invention is not limited thereto. The substrate 100 may have an upper surface parallel to the first direction D1 and the second direction D2 intersecting the first direction D1. A top surface of the substrate 100 may be perpendicular to the third direction D3 . The substrate 100 may prevent or minimize the transmission of vibrations generated in the vibrator 130 to be described later to other vibrating elements (VMS; Vibrator-Membrane-Stand). Accordingly, vibration interference between the vibration elements VMS may be attenuated.

The vibration element array VSA may include a plurality of vibration elements VMS arranged along the first direction D1 . The plurality of vibration elements VMS may be spaced apart from each other in the first direction D1 .

Hereinafter, the singular vibration element VMS will be described for convenience of description, but the following description may be equally applied to other vibration elements VMS. The vibrating element VMS may include a stand 110 , a vibrating membrane 120 , a vibrator 130 , and an electrode wire 140 .

The stand 110 may be provided on the substrate 100 and may be in contact with the upper surface of the substrate 100 . The stand 110 may have, for example, a cylindrical or polygonal column shape with an open top. As another example, the stand 110 may have a cylindrical or polygonal column shape with both upper and lower portions open. That is, the stand 110 may have a cylindrical or polygonal column shape in which at least one of an upper portion and a lower portion is open. As another example, the stand 110 may include a flat plate (eg, a circular plate or a polygonal plate) and at least two or more pillars on the flat plate. As another example, the stand 110 may include a circular ring or a polygonal ring and at least two or more pillars on the ring. As another example, the stand 110 may include only at least two or more pillars without a flat plate or a ring. As another example, when the substrate 100 is hard and includes a rigid material, the stand 110 may be manufactured integrally with the substrate 100 by processing the substrate 100 ( FIG. 1D ). and FIG. 1E). The stand 110 may include, for example, various materials having hard and hard properties, such as plastics, cured resins, metals, ceramics, oxides, and the like.

The vibrating membrane 120 may be provided on the stand 110 , and may contact the stand 110 at an edge thereof. The vibrating membrane 120 may be adhered to the stand 110 through an adhesive. The vibrating membrane 120 may have a disk shape or a polygonal plate shape, for example. As another example, the vibrating membrane 120 may have a shape of a circular plate or a polygonal plate with an empty part, and the shape of the vibrating membrane 120 may vary depending on the upper surface of the stand 110 . The vibrating membrane 120 may include, for example, a flexible and stretchable soft material such as PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, elastic fiber, tape, or sponge. The elastic modulus (or Young's modulus) of the vibrating membrane 120 may be several MPa or less. The elastic modulus (or Young's modulus) of the vibrating membrane 120 may be differently selected according to a desired frequency of vibration. The vibrating membrane 120 may prevent or minimize vibration generated by the vibrator 130 from being transmitted to the stand 110 , which will be described later. Accordingly, vibration interference between the vibration elements VMS may be attenuated.

A space surrounded by the lower surface of the vibrating membrane 120 and the upper surface and inner walls of the stand 110 may be filled with air. The stand 110 and/or the vibrating membrane 120 may include air holes through which air can freely enter and exit.

The stand 110 and the vibrating membrane 120 may be integrally formed by, for example, fixing the stand 110 on the liquid PDMS and solidifying the liquid PDMS into a solid phase.

A vibrator 130 may be provided on the vibrating membrane 120 , and may adhere to or contact the upper or lower surface of the vibrating membrane 120 . The vibrator 130 may generate vibration according to an applied electrical signal. The vibrator 130 may be, for example, an eccentric rotating mass (ERM), a linear resonator actuator (LRA), or a piezoelectric actuator. The vibrator 130 may have a shape such as a cylinder, a polygonal pillar, or a rectangular parallelepiped, for example. For example, the vibrator 130 may have a multi-layered thin film structure (in the case of a piezoelectric actuator).

The electrode line 140 may be provided on the vibration membrane 120 . One end of the electrode wire 140 may be connected to the vibrator 130 . The other end of the electrode line 140 may be connected to a control unit 1100 (refer to FIG. 26 ) and/or a power supply unit 1200 (refer to FIG. 26 ) provided inside or outside the substrate 100 . When the control unit 1100 (refer to FIG. 26) and/or the power supply unit 1200 (refer to FIG. 26) is provided outside the substrate 100, the electrode wire 140 may be connected to the outside through a hole in the substrate 100. . The electrode wire 140 may transmit an electrical signal to the vibrator 130 . The electrode wire 140 may be, for example, a wire coated with an insulating material, or a wire provided on the stand 110 and/or the substrate 100 or provided inside the stand 110 and/or the substrate 100 . have.

The connection band 150 may be connected to both sides of the substrate 100 . A portion of the connecting band 150 may include a patch having Velcro or adhesive force. The connection band 150, for example, may have a costume form such as a thimble, gloves, wrist band, socks, mask, helmet, etc., and apply the vibration stimulation device according to the present invention to the skin (eg, face, head, hands, fingers, etc.) and/or help to adhere.

1c, 1d, and 1e are cross-sectional views for explaining the vibration stimulation apparatus according to embodiments of the present invention, and corresponds to the cross-section taken along the line I-I' in Fig. 1a. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A and 1B will be omitted and differences will be described in detail.

1A and 1C , at least a portion of the vibration element VMS may be recessed into the substrate 100 . More specifically, at least a portion of the stand 110 of the vibrating element VMS may be recessed into the substrate 100 .

The stand 110 is, for example, a first portion 110a positioned at a lower level than the upper surface 100t of the substrate 100 and a second portion positioned at a higher level than the upper surface 100t of the substrate 100 . (110b) may be included. However, this is merely exemplary, and the present invention is not limited thereto, and as another example, the entire stand 110 may be located at a level lower than the upper surface 100t of the substrate 100 .

The vibration element VMS, at least a part of which is recessed into the substrate 100 , may have a stronger adhesion to the substrate 100 than in the case of FIG. 1B . At least a portion of the vibration element VMS is recessed into the substrate 100 to prevent or minimize damage to the vibration element VMS due to external impact and/or contamination.

1A, 1D, and 1E, when the substrate 100 is hard and includes a rigid material, the substrate 100 is processed so that a portion of the substrate 100 serves as a stand. can make it work. The vibrating membrane 120 may be supported by a portion of the substrate 100 .

1D , the substrate 100 may have a plurality of cavities 111 under the plurality of vibration elements VMS. Each of the cavities 111 may be provided under the vibrating membrane 120 of each of the vibrating elements VMS, and the vibrating membrane 120 of each of the vibrating elements VMS is adjacent to each of the cavities 111 . It may be supported by a portion of the substrate 100 .

As shown in FIG. 1E , the substrate 100 may have one cavity 112 under the plurality of vibration elements VMS. The cavity 112 may be one space connected under the vibrating element array VSA. In other words, the vibration stimulation apparatus according to FIG. 1E may have a structure in which a plurality of cavities 111 of the vibration stimulation apparatus according to FIG. 1D are connected as one.

2A is a plan view for explaining a vibration stimulation apparatus according to embodiments of the present invention. FIG. 2b is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, and corresponds to a cross-section taken along line I-I' in FIG. 2a. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E will be omitted and differences will be described in detail.

2A and 2B , in the vibration stimulation apparatus according to the present invention, a first substrate 100 connected to a connection band 150 from both sides, a second substrate 160 on the first substrate 100, and a second 2 It may include a vibration element array VSA on the substrate 160 . The second substrate 160 may be provided between the first substrate 100 and the vibrating element array VSA.

The first substrate 100 may include, for example, a hard and hard material such as plastic, cured resin, metal, ceramic, etc., and the second substrate 160 may include, for example, PDMS, PMMA, elastomer, It may include a flexible and stretchable soft material such as silicone, urethane, rubber, polyacrylic, stretchable fiber, tape, or sponge. The first substrate 100 and the second substrate 160 may have various shapes, sizes, and shapes according to body parts to which vibration stimulation is to be transmitted. The second substrate 160 may have, for example, a hollow rectangular parallelepiped shape, but the present invention is not limited thereto. In particular, the first substrate 100 may be designed and manufactured in advance according to the shape of a body part to which the vibration stimulus is to be transmitted. The lower surface of the second substrate 160 may be completely adhered to the upper surface of the first substrate 100 , but the present invention is not limited thereto, and only a portion of the lower surface of the second substrate 160 is the upper surface of the first substrate 100 . may be fixed to

3A, 4A, 5A, 6A, 7A, and 8A are conceptual views illustrating vibration stimulation apparatuses according to embodiments of the present invention. 3B, 4B, 5B, 6B, 7B, and 8B are conceptual diagrams showing the vibration displacement at the lowest resonant frequency as a three-dimensional image when voltage is applied to the vibration stimulation devices of FIGS. 3A to 8A, respectively. admit.

More specifically, FIGS. 3B to 8B are three-dimensional images of vibration displacement at the lowest resonant frequency using a finite element analysis (FEA) method in a state where a voltage of about 100 V is applied only to the left vibrator. is shown as

3A to 8A, 3B to 8B, each of the vibrators 130 is lead zirconate titanate (Pb[Zr _x Ti _1-x ]O ₃ (0≤x≤1); PZT) It may be a piezoelectric actuator comprising a. The spacing of the vibrators 130 may be about 12 mm, and each of the vibrators 130 may have a thickness of about 2.5 mm and a diameter of about 5 mm. Hereinafter, the spacing of some components means the distance between the centers of the components.

3A and 3B , a pair of vibrators 130 may be provided on the first substrate 100 . The first substrate 100 may include polycarbonate.

The first substrate 100 may have a thickness of about 0.5 mm, a width of about 10 mm, and a length of about 37 mm.

When a voltage of about 100 V is applied only to the left vibrator among the vibrators 130 under the condition that the left and right sides of the first substrate 100 are fixed (for example, a voltage is applied between the upper and lower surfaces of the left vibrator), The lowest resonant frequency may be about 307.2 Hz.

4A and 4B , the vibrating membrane 120 may be provided on the first substrate 100 having a box shape, and a pair of vibrators 130 may be provided on the vibrating membrane 120 . can The first substrate 100 may include polycarbonate, and the vibration membrane 120 may include PDMS.

The first substrate 100 has a thickness of about 0.5 mm (thickness of the edge of the first substrate 100), a width of about 10 mm, a height of about 3 mm (the overall thickness of the first substrate 100), and about 37 It may have a length of mm. The vibrating membrane 120 may have a thickness of about 0.5 mm, a width of about 10 mm, and a length of about 37 mm.

When a voltage of about 100 V is applied only to the left vibrator among the vibrators 130 under the condition that the bottom surface of the first substrate 100 is fixed (for example, a voltage is applied between the upper and lower surfaces of the left vibrator), The lowest resonant frequency may be about 86.5 Hz.

5A and 5B , the second substrate 160 may be provided on the first substrate 100 , and a pair of vibrators 130 may be provided on the second substrate 160 . . The first substrate 100 may include polycarbonate, and the second substrate 160 may include PDMS.

The first substrate 100 may have a thickness of about 2 mm, a width of about 15 mm, and a length of about 37 mm. The second substrate 160 may have a thickness of about 5 mm, a width of about 15 mm, and a length of about 37 mm.

When a voltage of about 100 V is applied only to the left vibrator among the vibrators 130 under the condition that the left and right sides of the first substrate 100 are fixed (for example, a voltage is applied between the upper and lower surfaces of the left vibrator), The lowest resonant frequency may be about 430.7 Hz.

6A and 6B , a pair of vibration elements VMS may be provided on the second substrate 160 . Each of the vibrating elements VMS may include a stand 110 , a vibrating membrane 120 on the stand 110 , and a vibrator 130 on the vibrating membrane 120 . The second substrate 160 and the vibrating membrane 120 may include PDMS, and the stand 110 may include polycarbonate.

The second substrate 160 may have a thickness of about 5 mm, a width of about 15 mm, and a length of about 37 mm. The stand 110 may have a height of about 2.5 mm and a diameter of about 10 mm. The vibrating membrane 120 may have a thickness of about 0.5 mm.

When a voltage of about 100 V is applied only to the left vibrator among the vibrators 130 under the condition that the left and right sides of the second substrate 160 are fixed (for example, a voltage is applied between the upper and lower surfaces of the left vibrator), The lowest resonant frequency may be about 84.6 Hz.

7A and 7B , a pair of vibration elements VMS may be provided on the first substrate 100 . Each of the vibrating elements VMS may include a stand 110 , a vibrating membrane 120 on the stand 110 , and a vibrator 130 on the vibrating membrane 120 . The vibrating membrane 120 may include PDMS, and the first substrate 100 and the stand 110 may include polycarbonate.

The first substrate 100 may have a thickness of about 2 mm, a width of about 15 mm, and a length of about 37 mm. The stand 110 may have a height of about 2.5 mm and a diameter of about 10 mm. The vibrating membrane 120 may have a thickness of about 0.5 mm.

When a voltage of about 100 V is applied only to the left vibrator among the vibrators 130 under the condition that the left and right sides of the first substrate 100 are fixed (for example, a voltage is applied between the upper and lower surfaces of the left vibrator), The lowest resonant frequency may be about 132.7 Hz.

8A and 8B , the second substrate 160 may be provided on the first substrate 100 , and a pair of vibration elements VMS may be provided on the second substrate 160 . have. Each of the vibrating elements VMS may include a stand 110 , a vibrating membrane 120 on the stand 110 , and a vibrator 130 on the vibrating membrane 120 . The second substrate 160 and the vibrating membrane 120 may include PDMS, and the first substrate 100 and the stand 110 may include polycarbonate.

The first substrate 100 may have a thickness of about 2 mm, a width of about 15 mm, and a length of about 37 mm. The second substrate 160 may have a thickness of about 5 mm, a width of about 15 mm, and a length of about 37 mm. The stand 110 may have a height of about 2.5 mm and a diameter of about 10 mm. The vibrating membrane 120 may have a thickness of about 0.5 mm.

When a voltage of about 100 V is applied only to the left vibrator among the vibrators 130 under the condition that the left and right sides of the first substrate 100 are fixed (for example, a voltage is applied between the upper and lower surfaces of the left vibrator), The lowest resonant frequency may be about 132.2 Hz.

The results of FIGS. 3A, 3B, 4A, 4B, 5A, 5B, 6A, 6B, 7A, 7B, 8A and 8B are summarized in Table 1 below. In this case, R _on/off represents the ratio of the vibration displacement of the left vibrator to the vibration displacement of the right vibrator.

do Vibration displacement of the left oscillator (㎛) Vibration displacement of the right oscillator (㎛) Vibration frequency (Hz) R _on/off 3a, 3b 2715 2714 307.2 One 4a, 4b 35 439 86.5 0.08 5a, 5b 0.08 0.01 430.7 8 6a, 6b 1158 1144 84.6 One 7a, 7b 464 24 132.7 19 8a, 8b 1695 36 132.2 47

As the vibrational displacement of the left vibrator to which voltage is applied is greater than the vibrational displacement of the right vibrator to which no voltage is applied, and the magnitude of the vibrational displacement of the left vibrator is increased, the vibration interference may be well attenuated. That is, in the case of FIGS. 7A and 7B and in the case of FIGS. 8A and 8B , the vibrational interference can be more attenuated.

9A, 10A, 11A and 12A are cross-sectional views illustrating vibration stimulation apparatuses according to embodiments of the present invention. 9B, 10B, 11B, and 12B are graphs illustrating vibration displacement spectra when voltage is applied to the vibration elements of the vibration stimulation apparatuses of FIGS. 9A to 12A, respectively.

More specifically, FIGS. 9B to 12B show _{a sine wave voltage (ie, AC voltage) of about 0.5 V rms} only to the left vibrator, using a laser vibrometer at about 150 Hz to about 1 kHz These are graphs measuring the vibration displacement spectrum in units of 1.25 Hz. In this case, the measured vibration displacement may be a relative value in which the reference point is set as the surface of the vibrator 131 . The unit of the measured vibrational displacement is nm, and since the measurement result is a result of the frequency scan mode, when a pure sine wave voltage is applied, it can represent a vibrational displacement that is several tens or more times larger.

9A to 12A and 9B to 12B , each of the vibrators 131 may be a linear resonator actuator (LRA) having a resonance frequency of about 240 Hz and an operating voltage of about 0.1 to 1.9 V _rms. An interval between the vibrators 131 may be about 25 mm, and each of the vibrators 131 may have a thickness of about 2.5 mm and a diameter of about 8 mm.

Referring to FIG. 9A , a pair of vibrators 131 connected to the electrode line 140 may be provided on the first substrate 100 . The first substrate 100 may be a rigid disk-shaped plastic substrate. The first substrate 100 may have a diameter of about 147 mm.

Referring to FIG. 9B , the resonance frequency of both the left vibrator On and the right vibrator Off is about 240 Hz. The difference between the vibration displacement spectra of the left vibrator On and the right vibrator Off is not large, and the vibration displacement is also relatively small compared to the other cases. This is a result showing that the vibration interference is very large due to the vibration of the left vibrator On being transmitted to the right vibrator Off through the first substrate 100 .

Referring to FIG. 10A , the vibrating membrane 120 may be provided on the first substrate 100 , and a pair of vibrators 131 connected to the electrode wire 140 may be provided on the vibrating membrane 120 . have. The first substrate 100 may be a box-shaped rigid plastic substrate. The first substrate 100 may have a width of about 62 mm and a length of about 97 mm. The vibrating membrane 120 may include PDMS. The vibrating membrane 120 may have a width of about 62 mm, a length of about 47 mm, and a thickness of about 300 μm.

Referring to FIG. 10B , one of the resonance frequencies of the left vibrator On is about 175 Hz, and one of the resonance frequencies of the right vibrator Off is about 477 Hz. The oscillation displacement of FIG. 10B is larger than that of FIG. 9B. The vibration displacement spectrum of each of the left vibrator (On) and the right vibrator (Off) shows various vibration modes and complex spectrum. This is a result showing that the vibration interference between the vibrators 131 connected to the vibrating membrane 120 is large.

Referring to FIG. 11A , a pair of vibration elements VMS may be provided on the first substrate 100 . Each of the vibrating elements VMS may include a stand 110 , a vibrator 120 on the stand 110 , and a vibrator 131 connected to the electrode wire 140 on the vibrating membrane 120 .

The first substrate 100 may be a rigid disk-shaped plastic substrate. The first substrate 100 may have a diameter of about 147 mm. The stand 110 may include a cured resin. The stand 110 may have a height of about 5 mm and a diameter of about 20 mm. The vibrating membrane 120 may include PDMS. The vibrating membrane 120 may have a thickness of about 0.3 mm.

Referring to FIG. 11B , the resonance frequency of the left vibrator On is about 468 Hz, and one of the resonance frequencies of the right vibrator Off is about 375 Hz. At this time, the vibration displacement of the left vibrator On is greater than the vibration displacement of the right vibrator Off. This is a result showing that the vibration interference between the vibration elements VMS and the first substrate 100 and the vibration interference between the vibration elements VMS are very small.

Referring to FIG. 12A , the second substrate 160 may be provided on the first substrate 100 , and a pair of vibration elements VMS may be provided on the second substrate 160 . Each of the vibrating elements VMS may include a stand 110 , a vibrator 120 on the stand 110 , and a vibrator 131 connected to the electrode wire 140 on the vibrating membrane 120 .

The first substrate 100 may be a rigid disk-shaped plastic substrate. The first substrate 100 may have a diameter of about 147 mm. The second substrate 160 may include polyurethane. The stand 110 may include a cured resin. The stand 110 may have a height of about 5 mm and a diameter of about 20 mm. The vibrating membrane 120 may include PDMS. The vibrating membrane 120 may have a thickness of about 0.3 mm.

Referring to FIG. 12B , the resonance frequencies of the left vibrator On are about 181 Hz and about 466 Hz, and one of the resonance frequencies of the right vibrator Off is about 466 Hz. At this time, the vibration displacement of the left vibrator On is greater than the vibration displacement of the right vibrator Off. In addition, the left vibrator (On) has a very large vibration displacement (the difference from the resonant frequency (about 240 Hz) of the LRA) around 200 Hz at which a person can easily feel the vibration. This is a result showing that the vibration interference between the vibration elements VMS and the first substrate 100 and/or the second substrate 160 and the vibration interference between the vibration elements VMS are very small.

The results of FIGS. 9A, 9B, 10A, 10B, 11A, 11B, 12A and 12B are summarized in Table 2 below. At this time, the vibration displacements of the left vibrator On and the right vibrator Off are the results measured at the resonant frequency at which the vibration displacement of the left vibrator On is the largest. In this case, R _on/off represents the ratio of the vibration displacement of the left vibrator to the vibration displacement of the right vibrator.

do Vibration displacement of the left oscillator (nm) Vibration displacement of the right oscillator (nm) Vibration frequency (Hz) R _on/off 9a, 9b 5.7 3.0 240 1.9 10a, 10b 43 17 175 2.5 11a, 11b 47.7 2.4 468 19.8 12a, 12b 18.9 1.8 181 10.5

As the vibration displacement of the left vibrator On to which voltage is applied is greater than the vibration displacement of the right vibrator Off to which no voltage is applied, and the magnitude of the vibration displacement of the left vibrator On increases, the vibration interference is well attenuated. can indicate That is, in the case of FIGS. 11A and 11B and in the case of FIGS. 12A and 12B , the vibrational interference can be more attenuated. In other words, when the vibration element VMS including the vibrator 131 is provided, vibration interference between the vibration elements VMS and the first substrate 100 and/or the second substrate 160 and the vibration elements (VMS) vibration interference can be more attenuated.

13A, 14A, 15A, and 16A are cross-sectional views illustrating vibration stimulation apparatuses according to embodiments of the present invention. 13B, 14B, 15B, and 16B are graphs showing vibration displacement spectra when voltage is applied to the vibration elements of the vibration stimulation apparatuses of FIGS. 13A to 16A, respectively.

More specifically, FIGS. 13b to 16b show that the vibration displacement spectrum was measured in units of 1.25 Hz from about 80 Hz to about 1 kHz using a laser vibrometer in a state where a DC voltage of about 2.4 V was applied only to the left vibrator. are graphs. In this case, the measured vibration displacement may be a relative value in which the reference point is set as the surface of the vibrator 132 . The unit of the measured vibrational displacement is nm (or μm).

13A to 16A and 13B to 16B , each of the vibrators 132 may be an eccentric rotating mass (ERM). The spacing of the vibrators 132 may be about 25 mm, and each of the vibrators 132 may have a thickness of about 2.5 mm and a diameter of about 5 mm.

Referring to FIG. 13A , a pair of vibrators 132 connected to the electrode line 140 may be provided on the first substrate 100 . The first substrate 100 may be a rigid disk-shaped plastic substrate. The first substrate 100 may have a diameter of about 147 mm.

Referring to FIG. 13B , the resonance frequency of the left vibrator On is about 117 Hz, and the resonance frequency of the right vibrator Off is about 142 Hz. The difference between the vibration displacement spectra of the left vibrator On and the right vibrator Off is not large, and the vibration displacement is also relatively small compared to the other cases. This is a result showing that the vibration interference is very large due to the vibration of the left vibrator On being transmitted to the right vibrator Off through the first substrate 100 .

Referring to FIG. 14A , the vibrating membrane 120 may be provided on the first substrate 100 , and a pair of vibrators 132 connected to the electrode wire 140 may be provided on the vibrating membrane 120 . have. The first substrate 100 may be a box-shaped rigid plastic substrate. The first substrate 100 may have a width of about 62 mm and a length of about 97 mm. The vibrating membrane 120 may include PDMS. The vibrating membrane 120 may have a width of about 62 mm, a length of about 47 mm, and a thickness of about 300 μm.

Referring to FIG. 14B , one of the resonance frequencies of the left vibrator On is about 92 Hz, and the resonance frequencies of the right vibrator Off are about 145 Hz and about 181 Hz. The oscillation displacement of FIG. 14B is larger than that of FIG. 13B. The ratio of the largest vibration displacement is higher in the left vibrator (On) than in the right vibrator (Off). This is a result showing that there is vibration interference between the vibrators 132 connected to the vibrating membrane 120 . However, the vibration interference between the vibrators 132 connected by the vibrating membrane 120 is smaller than that of FIG. 13B .

Referring to FIG. 15A , a pair of vibration elements VMS may be provided on the first substrate 100 . Each of the vibrating elements VMS may include a stand 110 , a vibrator 120 on the stand 110 , and a vibrator 132 connected to the electrode wire 140 on the vibrating membrane 120 .

The first substrate 100 may be a rigid disk-shaped plastic substrate. The first substrate 100 may have a diameter of about 147 mm. The stand 110 may include a cured resin. The stand 110 may have a height of about 5 mm and a diameter of about 20 mm. The vibrating membrane 120 may include PDMS. The vibrating membrane 120 may have a thickness of about 0.3 mm.

Referring to FIG. 15B , the resonance frequencies of the left vibrator On are about 87 Hz and about 175 Hz, and the resonance frequencies of the right vibrator Off are about 120 Hz and about 144 Hz. At this time, the vibration displacement of the left vibrator On is greater than the vibration displacement of the right vibrator Off. This is a result showing that the vibration interference between the vibration elements VMS and the first substrate 100 and the vibration interference between the vibration elements VMS are very small.

Referring to FIG. 16A , the second substrate 160 may be provided on the first substrate 100 , and a pair of vibration elements VMS may be provided on the second substrate 160 . Each of the vibrating elements VMS may include a stand 110 , a vibrator 120 on the stand 110 , and a vibrator 132 connected to the electrode wire 140 on the vibrating membrane 120 .

The first substrate 100 may be a rigid disk-shaped plastic substrate. The first substrate 100 may have a diameter of about 147 mm. The second substrate 160 may include polyurethane. The second substrate 160 may have a thickness of about 2 mm. The stand 110 may include a cured resin. The stand 110 may have a height of about 5 mm and a diameter of about 20 mm. The vibrating membrane 120 may include PDMS. The vibrating membrane 120 may have a thickness of about 0.3 mm.

Referring to FIG. 16B , the resonance frequencies of the left vibrator On are about 85 Hz, and the resonance frequencies of the right vibrator Off are about 144 Hz and about 183 Hz. At this time, the vibration displacement of the left vibrator On is greater than the vibration displacement of the right vibrator Off. This is a result showing that the vibration interference between the vibration elements VMS and the first substrate 100 and/or the second substrate 160 and the vibration interference between the vibration elements VMS are very small.

The results of FIGS. 13A, 13B, 14A, 14B, 15A, 15B, 16A, and 16B are summarized in Table 3 below. At this time, the vibration displacements of the left vibrator On and the right vibrator Off are the results measured at the resonant frequency. In this case, R _on/off represents the ratio of the vibration displacement of the left vibrator to the vibration displacement of the right vibrator.

do Vibration displacement of left oscillator (nm) @ frequency (Hz) Vibration displacement of right oscillator (nm) @ frequency (Hz) R _on/off 13a, 13b 98 @ 117 32 @ 142 3 14a, 14b 2918 @ 92 220 @ 181 13 15a, 15b 3594 @ 87 34 @ 144 106 16a, 16b 2811 @ 85 43 @ 144 65

As the vibration displacement of the left vibrator On to which voltage is applied is greater than the vibration displacement of the right vibrator Off to which no voltage is applied, and the magnitude of the vibration displacement of the left vibrator On increases, the vibration interference is well attenuated. can indicate That is, in the case of FIGS. 15A and 15B and in the case of FIGS. 16A and 16B , the vibrational interference can be more attenuated. In other words, when the vibration element VMS including the vibrator 132 is provided, vibration interference between the vibration elements VMS and the first substrate 100 and/or the second substrate 160 and the vibration elements (VMS) vibration interference can be more attenuated.

17 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A and 2B will be omitted and differences will be described in detail.

Referring to FIG. 17 , the vibration stimulation apparatus according to the present invention may further include a protective film 170 on the vibration element array VSA. The passivation layer 170 may be in contact with the upper surface of the vibrator 130 of each of the vibrating elements VMS. The protective film 170 may have various shapes, sizes, and shapes according to body parts to which vibration stimulation is to be transmitted. The passivation layer 170 may have, for example, a mask pack shape. The protective layer 170 may include, for example, a flexible and stretchable soft material such as PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, elastic fiber, tape, or sponge. In addition, the protective layer 170 may further include a moisture gel and a nutrient component. The protective film 170 may physically, chemically, biologically, and electrically separate the body part to which the vibration stimulus is to be transmitted, the vibrator 130 , the electrode wire 140 , and the like. The protective film 170 may not only mediate the vibration stimulation to be better transmitted to the body part, but also supply moisture and nutrients to the body part.

18 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along the line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A, 2B, and 17 will be omitted and differences will be described in detail.

Referring to FIG. 18 , the second substrates 161 provided on the first substrate 100 may be arranged along the first direction D1 and may be spaced apart from each other in the first direction D1 . Each of the second substrates 161 may include, for example, a flexible and stretchable soft material such as PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, stretchable fiber, tape, or sponge. Each of the second substrates 161 may have an open cylindrical or polygonal column shape.

Hereinafter, for convenience of explanation, a single vibration element (VMS) and a single second substrate 161 will be described, but the following description will refer to other vibration elements (VMS) and other second substrates 161 . The same can be applied to The vibrating element VMS may include a second substrate 161 , a stand 110 , a vibrating membrane 120 , a vibrator 130 , and an electrode wire 140 .

The stand 110 , the vibrating membrane 120 , the vibrator 130 , and the electrode wire 140 may be provided in a space surrounded by the upper surface and inner walls of the second substrate 161 . The inner wall of the stand 110 may be aligned with a portion of the inner wall of the second substrate 161 in the third direction D3 . The vibrating membrane 120 , the vibrator 130 , and the electrode wire 140 may be provided inside the space surrounded by the upper surface and the inner wall of the stand 110 . That is, the upper surface of the vibrating membrane 120 may be located at a level lower than the uppermost surface of the stand 110 . The lower surface of the vibrator 130 may contact the upper surface of the vibrating membrane 120 . The upper surface of the vibrator 130 may be positioned at a higher level than the uppermost surface of the stand 110 , and may be substantially coplanar with the uppermost surface of the second substrate 161 . The electrode line 140 may extend in the first direction D1 between the vibrator 130 and the second substrate 161 or the stand 110 . The passivation layer 170 provided on the vibrating element array VSA may contact the upper surface of the vibrator 130 and the upper surface of the second substrate 161 .

19 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along the line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A, 2B, and 17 will be omitted and differences will be described in detail.

Referring to FIG. 19 , the vibration stimulation apparatus according to the present invention may further include contact pads 180 on the protective film 170 . The contact pads 180 may include, for example, a flexible and stretchable soft material such as PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, elastic fiber, tape or sponge. In addition, the contact pads 180 may further include a moisture gel and a nutritional component. Each of the contact pads 180 may be provided at a position overlapping each of the vibration elements VMS in the third direction D3 .

The contact pads 180 may not only mediate the vibration stimulation to be better transmitted to the body part, but also supply moisture and nutrients to the body part. In addition, the contact pads 180 may prevent or minimize vibration stimulation from being uniformly absorbed in the entire area of the body part, and provide partial vibration stimulation to a partial area of the body part.

20 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A, 2B, and 17 will be omitted and differences will be described in detail.

Referring to FIG. 20 , the vibration stimulation apparatus according to the present invention may further include ciliary pads 190 on the protective film 170 . The ciliary pads 190 may have a fine brush or hair shape. In addition, the ciliary pads 190 may further include a moisture gel and a nutrient component. One end of each of the ciliary pads 190 may be fixed to the upper surface of the passivation layer 170 , and the other end may be freely shaken or bent. The ciliary pads 190 may not only mediate the vibration stimulation to be better transmitted to the body part, but also supply moisture and nutrients to the body part.

21 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A, 2B, and 17 will be omitted and differences will be described in detail.

Referring to FIG. 21 , the vibration stimulation apparatus according to the present invention may further include a protruding contact pad 200 on the protective film 170 . The protruding contact pad 200 may include a flat pad portion and protruding portions protruding from the pad portion. The density of the protruding portions of the protruding contact pad 200 may be smaller than the density of the ciliary pads 190 described with reference to FIG. 20 .

The protruding contact pad 200 may include a soft material that is flexible and stretchable, or a hard and rigid material, according to embodiments. In addition, the protruding contact pad 200 may further include a moisture gel and a nutritional component. The composition of the protruding contact pad 200 may vary depending on the shape and location of the body part to which the vibration stimulus is to be transmitted. For example, when a vibration stimulus is to be transmitted to the scalp, the protruding contact pad 200 including a hard and hard material in consideration of hair and the like may be used.

The protruding contact pad 200 may not only mediate the vibration stimulation to be better transmitted to the body part, but also supply moisture and nutrients to the body part. In addition, the protruding contact pad 200 may prevent or minimize vibration stimulation from being uniformly absorbed in the entire body part, and may provide partial vibration stimulation to a part of the body part.

22 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A and 2B will be omitted and differences will be described in detail.

Referring to FIG. 22 , in each of the vibrating elements VMS, the vibrator 130 may be provided on the lower surface of the vibrating membrane 120 . The vibrator 130 may adhere to or contact the lower surface of the vibrating membrane 120 . The electrode wire 140 may be provided between the stand 110 and the vibrator 130 . The electrode wire 140 may be provided in a space surrounded by the lower surface of the vibrating membrane 120 and the upper surface and inner walls of the stand 110 , and may be protected from external impact and/or contamination because it is not exposed to the outside.

Each of the vibration elements VMS of the vibration stimulation apparatus according to the present invention may further include a protrusion structure 210 on the upper surface of the vibration membrane 120 . The protrusion structure 210 may transmit the vibration of the vibrator 130 to the skin or the like. The protrusion structure 210 may include a flexible and stretchable soft material, or a hard and rigid material, according to embodiments. The composition of the protrusion structure 210 may vary depending on the shape and location of the body part to which the vibration stimulus is to be transmitted. For example, when a vibration stimulus is to be transmitted to the scalp, the protrusion structure 210 including a hard and hard material in consideration of hair and the like may be used.

23 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A, 2B, and 22 will be omitted and differences will be described in detail.

Referring to FIG. 23 , at least a portion of the vibration element VMS may be recessed into the second substrate 160 . More specifically, at least a portion of the stand 110 of the vibrating element VMS may be recessed into the second substrate 160 .

The stand 110 includes a first portion 110a positioned at a lower level than the upper surface 160t of the second substrate 160 and a second portion 110a positioned at a higher level than the upper surface 160t of the second substrate 160 ( 110b) may be included. At least a portion of the vibrator 130 may be positioned at a level lower than the upper surface 160t of the second substrate 160 . That is, at least a portion of the vibrator 130 may overlap the second substrate 160 in the first direction D1 and the second direction D2 .

24 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along the line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A, 2B, 22 and 23 will be omitted and differences will be described in detail.

24 , the vibrator 130 may be provided on the upper surface of the vibrating membrane 120 , and the protrusion structure 210 may be provided on the upper surface of the vibrator 130 .

25 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along the line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A, 2B, 22 and 23 will be omitted and differences will be described in detail.

Referring to FIG. 25 , each of the vibration elements VMS of the vibration stimulation apparatus according to the present invention may further include a vibrator bag 135 surrounding the vibrator 130 . The vibrator bag 135 may surround the lower surface and sidewalls of the vibrator 130 , and may be adhered to the lower surface of the vibrating membrane 120 . In other words, the vibrator 130 may be inserted into the vibrator bag 135 . The vibrator bag 135 may protect the vibrator 130 from external impact and/or contamination.

26 is a cross-sectional view for explaining a vibration stimulation apparatus according to embodiments of the present invention, which corresponds to a cross-section taken along the line I-I' in FIG. 2A. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A, 2B, and 25 will be omitted and differences will be described in detail.

Referring to FIG. 26 , the vibrator 130 may be provided on the upper surface of the vibrating membrane 120 . The vibrator bag 135 may surround the upper surface and sidewalls of the vibrator 130 , and may be adhered to the upper surface of the vibrating membrane 120 . The protrusion structure 210 may be provided on the upper surface of the vibrator bag 135 .

27 is a plan view for explaining a vibration stimulation apparatus according to embodiments of the present invention. For convenience of description, descriptions of items substantially the same as those described with reference to FIGS. 1A to 1E, 2A and 2B will be omitted and differences will be described in detail.

Referring to FIG. 27 , the vibration element array VSA of the vibration stimulation apparatus according to the present invention may include a plurality of vibration elements VMS arranged along the first direction D1 and the second direction D2. have. That is, the vibrating element array VSA may include a plurality of columns arranged along the first direction D1 and a plurality of rows arranged along the second direction D2 . The plurality of vibration elements VMS may be spaced apart from each other in the first direction D1 and the second direction D2 . However, this is merely exemplary, and the present invention is not limited thereto, and the number, spacing, and arrangement of the vibrating elements VMS may vary according to embodiments. For example, the arrangement shape of the vibration elements VMS may have various geometric shapes, such as a triangle, a circle, a honeycomb shape, and the like.

The plurality of vibrating elements VMS may vibrate individually one by one. Also, the vibrating elements VMS corresponding to one row or one column may vibrate at the same time, and the vibrating elements VMS corresponding to adjacent rows or columns may vibrate sequentially with a time difference. Also, the vibrating elements VMS adjacent to each other in the diagonal direction (a direction that intersects both the first direction D1 and the second direction D2) or the vibrating elements VMS bundled in a block unit may vibrate at the same time. .

For example, when a vibration stimulus is to be delivered to the scalp, the order of vibrations of the vibration elements VMS may be determined in order to make blood flow well to a region where hair loss occurs first. For example, the vibration order may be determined such that the vibration elements VMS at the edge vibrate first and then the vibration elements VMS at the center vibrate last.

28 is a conceptual diagram for explaining a vibration stimulation system including a vibration stimulation apparatus according to embodiments of the present invention.

27 and 28 , the vibration stimulation system according to the present invention includes a vibration stimulation apparatus, a control unit connected to each of the vibration elements (VMS) of the vibration stimulation apparatus through a vibrator 130 and an electrode wire 140, respectively. 1100 ) and a power supply unit 1200 electrically connected to the control unit 1100 .

The controller 1100 may include a processor that stores and/or generates an electrical signal for inducing vibration stimulation. The controller 1100 may induce the vibration stimulation of each of the vibration elements VMS simultaneously, sequentially, or in a pre-programmed pattern. The power supply unit 1200 may include a battery that stores and/or supplies electric energy. The control unit 1100 and the power supply unit 1200 may be provided, for example, inside the vibration stimulation apparatus. For example, the control unit 1100 and the power supply unit 1200 may be provided inside the first substrate 100 and/or the second substrate 160 . As another example, the control unit 1100 and the power supply unit 1200 may be provided outside the vibration stimulation apparatus.

29 is a conceptual diagram for explaining the use of a vibration stimulation apparatus according to embodiments of the present invention.

Referring to FIG. 29 , the vibration stimulation apparatus 10 according to the present invention may be coupled to a person's head through a connection band 150 . As an example, the vibration stimulation apparatus 10 may have a mask shape, and may transmit vibration stimulation to facial skin. For example, the vibration stimulation apparatus 10 may include ciliary pads 190 as described with reference to FIG. 20 . The second substrate 160 supported by the hard first substrate 100 may be deformed so that the vibration elements VMS adhere to the curvature of the facial skin. The vibration stimulation apparatus 10 according to the present invention can vibrate each of the vibration elements VMS by location and/or time, and can massage the facial skin by transmitting vibrotactile information having a predetermined pattern. .

30 is a conceptual diagram for explaining the use of a vibration stimulation apparatus according to embodiments of the present invention.

Referring to FIG. 30 , a plurality of vibration stimulation devices 20 according to the present invention may be provided. The plurality of vibration stimulation devices 20 may be connected to each other. For example, the first substrates 100 of the vibration stimulation apparatuses 20 may be connected to each other. Vibration stimulation devices 20 may be coupled to a person's head through a connection band 150 . As an example, the vibration stimulation devices 20 may have a helmet shape, and may transmit vibration stimulation to the scalp. For example, the vibration stimulation devices 20 may include a protruding contact pad 200 as described with reference to FIG. 21 . The second substrate 160 supported by the rigid first substrate 100 may be deformed so that the vibration elements VMS are closely attached to the curvature of the head. The vibration stimulation apparatus 10 according to the present invention can vibrate each of the vibrating elements VMS by location and/or by time, and can massage the scalp by transmitting vibrotactile information having a predetermined pattern.

31 is a conceptual diagram for explaining the use of a vibration stimulation apparatus according to embodiments of the present invention.

Referring to FIG. 31 , the vibration stimulation apparatus 30 according to the present invention may be coupled to a person's finger F or hand or foot through the first substrate 100 and the protective film 170 . As an example, the vibration stimulation device 30 may have the form of a thimble, a band, or a glove, and may transmit vibration stimulation to the finger F or hand or foot. For example, the vibration stimulation apparatus 10 may include a protective film 170 as described with reference to FIG. 17 .

The vibration stimulation apparatus 30 that delivers the vibration stimulation to the finger F may divide the vibrational tactile information for each location of the vibration elements VMS and transmit, for example, VR or AR tactile information.

In the above, embodiments of the present invention have been described with reference to the accompanying drawings, but those of ordinary skill in the art to which the present invention pertains can practice the present invention in other specific forms without changing its technical spirit or essential features. You will understand that there is Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

100: first substrate
110: stand
120: vibrating membrane
130: vibrator
135: oscillator pouch
140: electrode wire
150: connection band
160: second substrate
170: shield
180: contact pad
190: ciliary pad
200: raised contact pad
210: protrusion structure

Claims (20)

A vibration element array comprising a first substrate, a connection band connected to both sides of the first substrate, and a plurality of vibration elements provided on the first substrate,
Each of the vibrating elements comprises:
a stand provided on the first substrate;
a vibrating membrane provided on the stand and in contact with the stand at an edge;
a vibrator provided on an upper surface or a lower surface of the vibrating membrane; and
and an electrode wire connected to the vibrator,
The vibration stimulator includes a material that is more flexible and stretchable than the stand.
The method of claim 1,
The vibration stimulator includes PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, elastic fiber, tape or sponge.
The method of claim 1,
The stand is a vibration stimulator comprising plastic, cured resin, metal, ceramic or oxide.
The method of claim 1,
The stand is a vibration stimulation device having an open cylindrical or polygonal column shape at least one of the upper and lower portions.
The method of claim 1,
The stand or the vibrating membrane includes air holes through which air freely enters and exits.
The method of claim 1,
The vibrator is an eccentric rotating mass (ERM), a linear resonator actuator (LRA), or a piezoelectric actuator configured to generate vibration according to an applied electrical signal.
The method of claim 1,
At least a portion of the connecting band includes a patch having Velcro or adhesive force,
The connection band is a vibration stimulator having a form of clothing that is fixed or in close contact with a body part.
The method of claim 1,
Each of the vibrating elements further comprises a protrusion structure provided on an upper surface of the vibrator or the vibrating membrane.
The method of claim 1,
Each of the vibrating elements surrounds the vibrator and further comprises a vibrator bag attached to an upper surface or a lower surface of the vibrating membrane.
The method of claim 1,
Further comprising a second substrate provided between the first substrate and the vibrating element array,
The second substrate is a vibration stimulator including a material that is more flexible and stretchable than the first substrate.
The method of claim 1,
Further comprising a protective film provided on the vibrating element array,
The protective film is in contact with the upper surface of the vibrator of each of the vibrating elements,
The protective film is a vibration stimulator comprising a material more flexible and stretchable than the first substrate.
12. The method of claim 11,
Further comprising contact pads provided on the protective film,
and the contact pads include a material that is softer and more stretchable than the first substrate.
12. The method of claim 11,
Further comprising a fine brush or hair-shaped cilia-type pads provided on the protective film,
One end of each of the ciliary pads is fixed to the upper surface of the protective film,
The other end of each of the ciliary pads is configured to freely swing or bend.
12. The method of claim 11,
Further comprising a protruding contact pad provided on the protective film,
The protruding contact pad includes a plate-shaped pad portion and protruding portions protruding from the pad portion.
The method of claim 1,
The vibrating elements of the vibrating element array are arranged along a first direction and a second direction crossing the first direction on the first substrate.
a vibration stimulator including a first substrate, a connection band connected to both sides of the first substrate, and a vibration element array including a plurality of vibration elements provided on the first substrate;
a control unit individually connected to the vibration elements; and
A power supply unit connected to the control unit and supplying electrical energy to the vibration stimulation device and the control unit,
Each of the vibrating elements comprises:
a stand provided on the first substrate;
a vibrating membrane provided on the stand and in contact with the stand at an edge;
a vibrator provided on an upper surface or a lower surface of the vibrating membrane; and
and an electrode wire connecting the vibrator and the control unit,
The vibrating membrane includes a material that is more flexible and stretchable than the stand.
17. The method of claim 16,
Further comprising a second substrate provided between the first substrate and the vibrating element array,
The second substrate is a vibration stimulator including a material that is more flexible and stretchable than the first substrate.
17. The method of claim 16,
The control unit induces the vibration stimulation of each of the vibration elements simultaneously, sequentially or in a pre-programmed pattern in a vibration stimulation system.
17. The method of claim 16,
The vibration stimulation device is provided in plurality,
The first substrates of the vibration stimulation devices are connected to each other.
17. The method of claim 16,
The vibrating membrane includes PDMS, PMMA, elastomer, silicone, urethane, rubber, polyacrylic, elastic fiber, tape or sponge,
The stand is a vibration stimulation system comprising plastic, cured resin, metal, ceramic or oxide.

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