KR20210094352A - Encorder moving apparatus and control method using the same - Google Patents

Abstract

An encoder moving device of an embodiment may comprise: a carrier mounted with a magnet; a sensor part comprising a plurality of sensor modules each disposed on a movement path of the magnet and comprising a plurality of Hall sensors; a signal calculation part that allows a control signal for controlling the carrier and a switching signal for correcting a phase error between the sensor module using a signal measured from the sensor part, and generates an output signal by using the control signal and the switching signal; a driving part that provides a driving force to the carrier; and a control part providing a driving signal to the driving part. Therefore, the present invention is capable of having an effect that can effectively control moving of the carrier.

Description

Encoder moving device and control method using the same

The embodiment relates to an encoder moving device.

In general, an encoder is provided on a stage such as an automated device, a semiconductor manufacturing device, or a display manufacturing device, and is used to measure a moving position or a moving distance of a transfer unit moving along the base of the stage.

Conventional encoders must be connected to cables, and there are many limitations in application to the logistics industry requiring relatively long distance installation due to the transport limit of the cable and the electrical characteristics of the cable.

In order to solve the above-mentioned problems, the embodiment aims to provide an encoder moving device for effectively transporting a transport unit regardless of environmental factors.

The encoder moving device of the embodiment includes a carrier on which a magnet is mounted, a sensor unit including a plurality of sensor modules each disposed on a movement path of the magnet and including a plurality of hall sensors, and a signal measured from the sensor unit to generate a control signal for controlling the carrier and a switching signal for correcting a phase error between the sensor module, and a signal calculating unit for generating an output signal using the control signal and the switching signal, and a driving force to the carrier It may include a driving unit that provides the driving unit, and a control unit that provides a driving signal to the driving unit.

The signal calculating unit may generate a switching signal when the signal of the hall sensor disposed at the end of the sensor module on the movement path of the carrier is turned on to off.

The signal calculating unit may correct a phase error of the output signal using a signal of the sensor module before the switching signal and a signal of the sensor module after the switching signal.

The signal calculating unit may accumulate the position of the carrier by using a constant switching signal.

The signal calculating unit may generate a U signal, a V signal, and a W signal by using the signal measured by the sensor unit, and may generate the control signal using the U signal, the V signal, and the W signal.

The signal calculating unit may output the waveform of the U signal, the V signal, and the W signal at a period of 1/3.

When the phase is 0 degrees, the signal calculating unit outputs the U signal and the W signal, when the phase is 120 degrees, the V signal is output, and when the phase is 240 degrees, the W signal is output can be

The magnet may have a plurality of N poles and S poles alternately arranged in a line.

An embodiment provides a control method performed in an encoder moving device, comprising the steps of: initializing a position of a carrier; providing a signal to an Nth motor drive and an (N+1)th motor drive using an Nth sensor module; , when the (N+1)th sensor module is turned on, turning off the signal provided to the Nth motor drive, and switching from the Nth sensor module to the (N+1)th sensor module; It may include providing a signal to the (N+1)-th motor drive and the (N+2)-th motor drive by using the +1)-th sensor module.

Initializing the position of the carrier may include selecting a reference sensor module, moving the carrier in a forward direction, and sensing an ON signal of a Hall sensor disposed at an end of a movement path among the reference sensor modules. and moving the carrier in a forward direction for a predetermined time, and moving the carrier in a reverse direction for the predetermined time.

Initializing the position of the carrier includes: selecting a reference sensor module; moving the carrier in a reverse direction at a preset first speed; Sensing an off signal, stopping the carrier, moving the carrier in a forward direction at a second speed lower than the first speed, and a hole disposed at an end of a movement path among the reference sensor modules It may include sensing an ON signal of a sensor, moving the carrier in a forward direction for a predetermined time, and moving the carrier in a reverse direction for the predetermined time.

The embodiment has the effect of effectively controlling the moving of the carrier by outputting an output signal using the switching signal and the control signal.

In addition, the embodiment has the effect of effectively grasping the location of the carrier by using the switching signal.

In addition, the embodiment by using the switching signal, it is possible to prevent the addition of a separate home and limit sensor.

1 is an overall configuration diagram showing an encoder moving apparatus according to an embodiment.
2 is a diagram illustrating a movement path of a magnet.
3 is a graph illustrating a switching signal generated from a Hall sensor.
4 is a diagram illustrating a state in which a UVW signal is converted into a control signal.
5 is a graph illustrating a switching position of a sensor unit.
6 is a graph illustrating an output signal using a switching signal and a UVW signal.
7 is a diagram illustrating a state in which a waveform is output according to a count period.
8 is a diagram illustrating a state in which a UVW signal is generated.
9 is a flowchart illustrating a control method using an encoder moving device according to an embodiment.
10 to 12 are various embodiments illustrating a step of initializing a carrier position.
13 to 17 are diagrams illustrating detailed operations of a control method using an encoder moving apparatus according to an embodiment.

Hereinafter, the embodiment will be described in detail with reference to the drawings.

1 is an overall configuration diagram showing an encoder moving device according to an embodiment, FIG. 2 is a diagram showing a movement path of a magnet, FIG. 3 is a graph showing a switching signal generated from a hall sensor, and FIG. 4 is a UVW signal It is a view showing a state of being converted into a control signal, Fig. 5 is a graph showing the switching position of the sensor unit, Fig. 6 is a graph showing how an output signal is output using a switching signal and a UVW signal, and Fig. 7 is a count cycle It is a view showing a state in which a waveform is output according to FIG. 8 is a view showing a state in which a UVW signal is generated.

Referring to FIG. 1 , an encoder moving apparatus 1000 according to an embodiment includes a carrier 100 , a sensor unit 200 disposed in a movement path of the carrier 100 , and the sensor unit 200 measured from the A signal calculating unit 300 for generating an output signal by using a signal, a driving unit 400 providing a driving force to the carrier 100, and a control unit 500 providing a driving signal to the driving unit 400. can

The carrier 100 may be a component such as sunlight, a flat panel display, or an organic light emitting diode, or a receiving member capable of mounting the component.

A magnet 110 may be disposed on at least one side of the carrier 100 . The magnet 110 may be disposed on one side or the other side of the carrier 100 . The magnet 110 may include a magnet having an N pole and a magnet having an S pole. The magnet 110 may be configured such that the magnet of the N pole and the magnet of the S pole are alternately disposed. The magnet of the N pole and the magnet of the S pole may be spaced apart from each other by a predetermined interval.

The sensor unit 200 may sense a magnetic field generated by the magnet 110 . The sensor unit 200 may include a plurality of sensor modules 210 . The plurality of sensor modules 210 may be disposed along the moving direction of the carrier 100 . The sensor modules 210 may be spaced apart from each other at regular intervals. The sensor module 210 may include a plurality of Hall sensors 211 , 212 , 213 , 214 , 215 and 216 . The Hall sensor may include six, but is not limited thereto. When there are 6 Hall sensors, the distance between the centers of the adjacent Hall sensors may be a value obtained by dividing the distance between the magnets of the S poles adjacent to each other by 6. A distance between the centers of the plurality of Hall sensors may vary depending on the number of Hall sensors.

The first Hall sensor 211 and the second Hall sensor 212 adjacent to each other may be disposed to have a phase difference of 60 degrees. Similarly, the third Hall sensor 213 , the fourth Hall sensor 214 , the fifth Hall sensor 215 , and the sixth Hall sensor 216 may be disposed to have a phase difference of 60 degrees from each other.

If the width of the magnet is 45mm, the encoder resolution may be 1um/pulse, and the distance between sensor modules may be 100mm.

The signal calculating unit 300 may generate an output signal for controlling the movement of the carrier 100 . The signal calculating unit 300 may generate an output signal by using the switching signal and the control signal measured from the sensor unit 200 .

The signal calculator 300 may generate a switching signal. The switching signal may generate a switching signal at a position where a signal of a Hall sensor disposed at an end of a movement path of the carrier 100 is turned on and off.

As shown in FIG. 2A , the carrier 100 may be disposed on the first sensor module 210 . As shown in FIG. 2B , the carrier 100 may move in a first direction (forward direction) from an upper portion of the first sensor module 210 . As shown in FIGS. 2C and 2D , the carrier 100 is disposed on the second sensor module 220 , and the carrier 100 leaves the first sensor module 210 .

As shown in FIG. 3 , it can be seen that the carrier 100 completely covers the second sensor module 220 when the sixth Hall sensor changes from 1 to 0 . Accordingly, the signal calculating unit 300 may generate a switching signal when the sixth Hall sensor is turned from on to off.

On the other hand, when the carrier 100 moves in the second direction (reverse direction), the signal calculating unit 300 generates a switching signal when the first Hall sensor disposed at the end of the movement path of the carrier 100 is turned on and off. can occur.

Returning to FIG. 1 , the signal calculating unit 300 may generate a control signal for controlling the movement of a carrier. The signal calculator 300 may generate a U signal, a V signal, and a W signal by using the values measured from the six Hall sensors.

The U signal can be measured using the values measured from the two Hall sensors. The U signal may be measured using a Hall sensor having a phase difference of 180 degrees. In an embodiment, the U signal may be measured using values measured from the first Hall sensor 211 and the fourth Hall sensor 214 . The U signal may be calculated by subtracting the value measured by the fourth Hall sensor 214 from the value measured by the first Hall sensor 211 .

The V signal can be measured using the values measured from the two Hall sensors. The V signal may be measured using a Hall sensor having a phase difference of 180 degrees. In an embodiment, the V signal may be measured using values measured from the third Hall sensor 213 and the sixth Hall sensor 216 . The V signal may be calculated by subtracting the value measured by the sixth Hall sensor 216 from the value measured by the third Hall sensor 213 .

The W signal can be measured using the values measured from the two Hall sensors. The W signal may be measured using a Hall sensor having a phase difference of 180 degrees. In an embodiment, the W signal may be measured using values measured from the fifth Hall sensor 215 and the second Hall sensor 212 . The W signal may be calculated by subtracting the value measured by the second Hall sensor 212 from the value measured by the fifth Hall sensor 215 .

The signal operation unit 300 may generate a first control signal and a second control signal by using the U, V, and W signals.

As shown in FIG. 4 , the first control signal may be generated by a difference between the V signal and the U signal. The first control signal may be a sin signal. The second control signal may be generated by a difference between the sum of the U signal and the V signal in the W signal. The second control signal may be a cosine (cos) signal.

5 , as the carrier 100 moves, signals from the first sensor module 210 , the second sensor module 220 , and the third sensor module 230 may be sequentially generated. The output signal may be generated using control signals generated from a plurality of sensor modules.

As shown in FIG. 6 , a phase error of the output signal may occur at the moment of switching between the plurality of sensor modules, for example, between the first sensor module 210 and the second sensor module 220 . Therefore, it is possible to correct the phase error of the output signal at the moment of switching between the sensor modules by using the switching signal. That is, the phase error of the output signal may be corrected by adding the signal of the first sensor module 210 before switching and the signal of the second sensor module 220 after the switching signal using the switching signal.

Also, the signal calculating unit 300 may accumulate the positions of the carriers by using the switching signal.

Meanwhile, the signal calculating unit 300 may output the UVW signal at 1/3 cycle.

As shown in FIG. 7 , when one period is 45000 Count, the U signal, V signal, and W signal may output a waveform according to 0/15000/30000 Count after dividing 45000 Count by 1/3 period.

When the phase is 0 degrees, it is possible to output a U signal and a W signal. When the phase is 60 degrees, the W signal can be turned off. When the phase is 120 degrees, a V signal may be output. When the phase is 180 degrees, the U signal can be turned off. When the phase is 240 degrees, a W signal may be output. When the phase is 300 degrees, the V signal can be turned off. If the phase is 360 degrees, one cycle can be finished.

The signal operation unit 300 may generate the U signal, the V signal, and the W signal as follows.

As shown in FIG. 8A , the signal calculating unit 300 may receive measured values sensed from six Hall sensors. As shown in FIG. 8B , the signal calculating unit 300 may convert the value measured by the Hall sensor into a digital signal by adjusting Vref using the DAC. As shown in FIG. 8D , hall sensor signals may be mapped using signals required for driving drive control of FIG. 8C . Here, the final UVW signal of FIG. 8E may be output by adding the offset signal to the mapped data using the offset signal.

1 , the driving unit 400 may include a motor drive 410 and a motor 420 . The motor drive 410 may receive a signal from the signal operation unit 300 to receive a switching signal and a UVW signal. The motor drive 410 may provide a driving signal to the motor 420 . The motor 420 may move the carrier 100 . The motor 420 may be disposed between the plurality of sensor modules. The motor 420 may be disposed between the first sensor module 210 and the second sensor module 220 . The motor 420 may be disposed between the second sensor module 220 and the third sensor module 230 . The motor 420 may be disposed between the third sensor module 230 and the fourth sensor module 240 . The motor 420 may be disposed between the fourth sensor module 240 and the fifth sensor module 250 . The motor 420 may be disposed on the other side of the fifth sensor module 250 . The arrangement structure of the motor 420 is not limited thereto.

The control unit 500 may communicate with the signal operation unit 300 . The control unit 500 may provide a driving signal to the motor drive 410 by using the output signal measured from the signal operation unit 300 .

The encoder moving apparatus according to the embodiment outputs an output signal using a switching signal and a control signal, thereby effectively controlling the moving of the carrier.

Hereinafter, a control method using the encoder moving device will be described.

9 is a flowchart illustrating a control method using an encoder moving device according to an embodiment, FIGS. 10 to 12 are various embodiments illustrating a step of initializing a carrier position, and FIGS. 13 to 17 are encoder moving according to the embodiment It is a diagram showing the detailed operation of the control method using the device.

Referring to FIG. 9 , the control method using the encoder moving device according to the embodiment includes the steps of initializing the position of the carrier ( S100 ), and driving the Nth motor and the (N+1)th motor using the Nth sensor module. Step (S200) of providing a signal to the (S200), turning off the signal provided to the Nth motor drive when the (N+1)th sensor module is turned on (S400), and (N+1) in the Nth sensor module )-th sensor module, and using the (N+1)-th sensor module to provide a signal to the (N+1)-th motor drive and the (N+2)-th motor drive (S500) can do.

Initializing the position of the carrier ( S100 ) may be performed to determine the position of the carrier when the power of the encoder moving apparatus is turned on.

Initializing the position of the carrier ( S100 ) may be performed in various ways based on the position of the carrier.

When the carrier 100 is disposed as shown in FIG. 10A , the step of selecting the reference sensor module S from the control unit may be performed. Here, the reference sensor module S may be any one of a plurality of sensor modules. Then, the carrier 100 may be moved in the forward direction (FW). Here, the carrier 100 may be moved at the second speed.

When the carrier is located above the reference sensor module (S) as shown in Figure 10b, the step of sensing the on-signal of the Hall sensor disposed at the end of the movement path of the reference sensor module (S) can be performed . Here, the sensed signal may be a switching signal.

As shown in FIG. 10C , the step of moving the carrier 100 in the forward direction FW for a predetermined time may be performed. Here, the predetermined time may be 1 second, but is not limited thereto.

As shown in FIG. 10D , the step of moving the carrier 100 in the reverse direction BW for a predetermined time may be performed. Here, the predetermined time may be 1 second, but is not limited thereto. Accordingly, the position of the carrier may be initialized.

Alternatively, if the carrier is disposed as shown in FIG. 11 , the step of initializing the position of the carrier 100 by setting the current position to the home position set by the controller may be performed.

Alternatively, when the carrier 100 is disposed as shown in FIG. 12A , the control unit may perform the step of selecting the reference sensor module S. As shown in FIG. 12B , the carrier 100 may be moved in the reverse direction BW at a first speed. The first speed may be faster than the second speed. Subsequently, the step of sensing the off signal of the Hall sensor disposed at the end of the movement path among the reference sensor module S may be performed. Here, the sensed signal may be a switching signal. Subsequently, the step of stopping the carrier 100 may be performed.

As shown in FIG. 12C , the step of moving the carrier 100 in the forward direction FW at a second speed lower than the first speed may be performed. Subsequently, the step of sensing the ON signal of the Hall sensor disposed at the end of the movement path among the reference sensor module S may be performed.

12D, the step of moving the carrier 100 in the forward direction (FW) for a predetermined time may be performed. The predetermined time may be 1 second, but is not limited thereto.

As shown in FIG. 12E , the position of the carrier 100 may be maintained at the initial position by moving the carrier 100 in the reverse direction BW for a predetermined time.

Returning to FIG. 9 , when the position of the carrier is initialized, a step ( S200 ) of providing a signal to the N-th motor drive and the (N+1)-th motor drive may be performed using the N-th sensor module. 13 , the Nth sensor module provides signals to the Nth motor drive and the (N+1)th motor drive, and the Nth motor drive and the (N+1)th motor drive communicate with the Nth motor , the (N+1)th motor can be driven.

Subsequently, when the carrier 100 moves and the (N+1)-th sensor module is turned on (S300), a step (S400) of turning off the signal provided to the N-th motor drive may be performed. 14 , the N-th sensor module may provide a signal only to the (N+1)-th motor drive.

Subsequently, when the carrier moves, a step (S500) of switching from the N-th sensor module to the (N+1)-th sensor module may be performed. In this case, a signal may be provided to the (N+1)-th motor drive and the (N+2)-th motor drive by using the (N+1)-th sensor module. 15, the (N+1)-th sensor module provides signals to the (N+1)-th motor drive and the (N+2)-th motor drive, and the (N+1)-th motor drive and ( The N+2)th motor drive may drive the (N+1)th motor and the (N+2)th motor.

Similarly, when the carrier moves, it is checked whether the signal of the (N+2)th hall sensor module is on (S600), stops the control of the (N+1)th motor, and controls the (N+2)th motor ( S700), a step of outputting a feedback to the (N+2)-th motor drive using the signal of the (N+2)-th Hall sensor module may be performed (S800). 16 and 17 , the (N+2)th motor and the (N+3)th motor may be driven using the (N+2)th sensor module. When the movement of the carrier 100 is stopped, the operation may be finished (S900).

In the embodiment, by using the switching signal, there is an effect that the position of the carrier can be effectively identified. That is, the embodiment can prevent the addition of a separate groove and limit sensor for detecting the initial position of the carrier by identifying the position of the carrier.

Although the above has been described with reference to the drawings and embodiments, it will be understood by those skilled in the art that various modifications and changes can be made to the embodiments without departing from the spirit of the embodiments described in the claims below. will be able

100: carrier
200: sensor unit
300: signal operation unit
400: driving unit
500: control

Claims (11)

Carrier with magnet;
a sensor unit including a plurality of sensor modules, each of which is disposed on a movement path of the magnet and includes a plurality of Hall sensors;
generating a control signal for controlling the carrier and a switching signal for correcting a phase error between the sensor module using the signal measured from the sensor unit, and generating an output signal using the control signal and the switching signal signal calculator;
a driving unit for providing a driving force to the carrier; and
Encoder moving apparatus including a control unit for providing a driving signal to the driving unit. According to claim 1,
The signal operation unit,
An encoder moving device for generating a switching signal when the signal of the hall sensor disposed at the end of the sensor module on the movement path of the carrier turns from on to off. According to claim 1,
The signal operation unit,
An encoder moving apparatus for correcting a phase error of the output signal by using a signal of the sensor module before the switching signal and a signal of the sensor module after the switching signal. According to claim 1,
The signal operation unit,
An encoder moving device that accumulates and stores the positions of the carriers using a constant switching signal. According to claim 1,
The signal operation unit,
An encoder moving apparatus for generating a U signal, a V signal, and a W signal using the signal measured from the sensor unit, and generating the control signal using the U signal, the V signal and the W signal. 3. The method of claim 2,
The signal operation unit,
An encoder moving device for outputting a waveform of the U signal, the V signal, and the W signal at a period of 1/3. 7. The method of claim 6,
The signal operation unit,
When the phase is 0 degrees, the U signal and the W signal are output,
When the phase is 120 degrees, the V signal is output,
When the phase is 240 degrees, the encoder moving device outputs the W signal. According to claim 1,
The magnet is an encoder moving device in which a plurality of N poles and S poles are alternately arranged in a line. In the control method performed in the encoder moving device,
initializing the position of the carrier;
providing signals to the N-th motor drive and the (N+1)-th motor drive using the N (natural number)-th sensor module;
turning off the signal provided to the Nth motor drive when the (N+1)th sensor module is turned on;
switching from the N-th sensor module to an (N+1)-th sensor module; and
and providing signals to the (N+1)-th motor drive and the (N+2)-th motor drive using the (N+1)-th sensor module. 10. The method of claim 9,
Initializing the position of the carrier comprises:
selecting a reference sensor module;
moving the carrier in a forward direction;
sensing an ON signal of a Hall sensor disposed at an end of a movement path among the reference sensor modules;
moving the carrier in a forward direction for a predetermined time; and
Control method using an encoder moving apparatus comprising the step of moving the carrier in the reverse direction for the predetermined time. 10. The method of claim 9,
Initializing the position of the carrier comprises:
selecting a reference sensor module;
moving the carrier in a reverse direction at a first preset speed;
sensing an off signal of a Hall sensor disposed at an end of a movement path among the reference sensor modules;
stopping the carrier;
moving the carrier forward at a second speed lower than the first speed;
sensing an ON signal of a Hall sensor disposed at an end of a movement path among the reference sensor modules;
moving the carrier in a forward direction for a predetermined time; and
Control method using an encoder moving apparatus comprising the step of moving the carrier in the reverse direction for the predetermined time.

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