KR20210033565A - Substrate inducing holder - Google Patents

Abstract

According to the present invention, provided is a substrate guide holder which can easily place a circular substrate on a substrate mounting tool. The substrate guide holder comprises: a substrate mounting tool having a gas penetrating unit made of a square plate near an evaporation source and extending toward the other side facing one side through one side of the square plate; a substrate accommodating tool made of a rectangle on the substrate mounting tool, and having electric terminals forming a concentric circle on an occupied area of a substrate so that when viewed from the outside, the substrate faces the evaporation source by covering the gas penetrating unit and accommodating a circular substrate, and when viewed from the inside, a plurality of capacitors are electrically configured with the substrate; and an electrostatic generation unit positioned opposite to the substrate on the substrate accommodating tool to be electrically connected to the electric terminals.

Description

Substrate guide holder {SUBSTRATE INDUCING HOLDER}

In an organic light emitting diode (OLED) deposition equipment, when a circular substrate is moved along a plurality of chambers or a substrate is placed on a crucible assembly when a deposition process is performed in an individual chamber, the deposition gas of the deposition source It relates to a substrate guide holder for exposing the substrate to.

In general, the organic light emitting diode deposition equipment is used to manufacture a display device that emits light by depositing an organic compound emitting red, green, or blue light on a substrate. Here, the organic light emitting diode deposition equipment is classified into a cluster type and an inline type.

In the organic light emitting diode deposition equipment, in the cluster type, a plurality of process chambers are arranged around the transfer chamber based on the transfer chamber, and a vacuum robot is used between the transfer chamber and the individual process chamber to control the transfer of the substrate, and in the linear type. It is configured to arrange a plurality of process chambers in a line and use a rail between the plurality of process chambers to control substrate transfer.

In addition, the organic light emitting diode deposition equipment, in the cluster type or linear type, when placing the substrate on the substrate transfer holder, by placing the adhesive on the substrate transfer holder to fix the substrate to the adhesive, or a plurality of the substrate transfer holder. A clamp of the substrate is secured to the substrate transfer holder through individual clamps to prevent dropping of the substrate from the substrate transfer holder during movement of the substrate transfer holder.

In addition, when handling a rectangular substrate, the organic light emitting diode deposition equipment easily fixes or aligns the substrate to the substrate transfer holder by appropriately using the edge of the substrate on the substrate transfer holder, but when handling a circular substrate, Since it is difficult to fix the substrate to the substrate transfer holder by using the circular shape of the substrate on the holder of the substrate, it is necessary to newly provide a substrate transfer holder corresponding to the circular substrate.

However, the use of the adhesive or clamp requires an operator's labor when separating the substrate from the substrate transfer holder. In addition, the replacement of the substrate transfer holder increases the manufacturing cost of the display device. On the other hand, the organic light-emitting diode deposition apparatus is similarly disclosed in Korean Patent Publication No. 10-2016-0044118 and Korean Patent Publication No. 10-2013-0128012 as prior art.

Korean Patent Application Publication No. 10-2016-0044118 Korean Patent Application Publication No. 10-2013-0128012

The present invention was conceived to solve the conventional problem, in an organic light emitting diode (OLED) deposition equipment, without the use of an adhesive on the substrate mounting tool and the substrate mounting while minimizing the number of times of use of the substrate fixing clamp on the substrate mounting tool Its purpose is to provide a substrate guide holder suitable for easily positioning a circular substrate on a tool.

The substrate guide holder according to the present invention moves a circular substrate along a plurality of chambers in an organic light emitting diode (OLED) deposition equipment, or positions the substrate on a crucible assembly when performing a deposition process in an individual chamber. A substrate mounting tool having a gas penetrating portion formed of a square plate near the evaporation source and extending toward the other side facing the one side of the square plate so as to expose the substrate to the deposition gas of the evaporation source. ; It is formed in a square shape on the substrate mounting tool, and when viewed externally, the gas penetrating portion is covered and the substrate is accommodated so that the substrate faces the evaporation source, and when viewed internally, a plurality of capacitors together with the substrate are electrically A substrate receiving tool having electrical terminals concentrically formed in the occupied area of the substrate to be configured as; And a static electricity generating unit positioned on the substrate receiving tool opposite to the substrate and electrically connected to the electrical terminals, wherein the static electricity generating unit allows the substrate to be in close contact with the substrate receiving tool through electrostatic attraction of individual capacitors. I can.

The substrate seating tool includes positioning members at opposite corners of the substrate seating tool around the gas through hole of the substrate seating tool, and corners of the substrate receiving tool on individual positioning members on the substrate seating tool. And exposing the substrate of the substrate receiving tool to the evaporation source through the gas through hole of the substrate mounting tool, and the substrate mounting tool may have a larger size than the substrate receiving tool.

The substrate receiving tool partially covers the gas through hole by connecting one side and the other side facing the gas through hole on the substrate mounting tool, and receiving the substrate on one side of the substrate receiving tool. A substrate insulation holder, a substrate movement prevention apparatus surrounding the substrate, and a substrate fixing clamp positioned between the substrate insulation reception apparatus and the substrate movement prevention apparatus.

The substrate receiving tool may include an insulator in contact with the substrate, and the electrical terminals may be positioned around the substrate to be individually wrapped by the insulator and electrically insulated from each other.

When viewed horizontally from the one side of the substrate receiving tool, the substrate insulation receiving table is located around the substrate movement preventing table and is depressed from the substrate receiving tool to form a circular groove, while receiving the substrate. Having the electrical terminals electrically insulated from the substrate, the electrical terminals are capable of accumulating charge of an electrical polarity opposite to the substrate during a switch-on state of the static electricity generating unit in the substrate insulation receiving table. have.

The substrate movement preventing member is positioned around an edge of each corner of the substrate receiving tool and spaced apart from both adjacent corners to surround the substrate, and when the substrate receiving tool has a conductor and an insulator, around the substrate insulating receiving table The conductor may be exposed or covered with an insulator together with the substrate insulating receiving table.

The substrate fixing clamp prevents movement of the substrate in case the total electrostatic attraction in the plurality of capacitors is less than the weight of the substrate and the deposition film deposited on the substrate as the deposition process is repeatedly performed on the substrate. The substrate may be intermittently screwed onto the substrate movement preventing table to prevent the substrate from falling from the substrate insulating receiving table.

The static electricity generation unit has a switching unit and a power supply unit to an electric pad on the substrate receiving tool, and the switching unit has first and second switching units having the same structure and through the first and second switching units. Power of the power supply unit may be applied to the electrode terminals, and the power supply unit may mount at least one battery.

The first and second switching units are alternately connected to the electric terminals in the plurality of capacitors, and are electrically connected to the (+) polarity and the (-) polarity or the (-) polarity and the (+) polarity of the battery. It is connected, and the power supply unit has a battery housing and a battery lid on the electric pad, accommodates the battery in the battery housing, and inserts the comb lid into the battery housing to transfer the battery from the outside through the battery lid. Can be shielded.

The first switching performing unit has a switch combined lid and a switch accommodation space unit coupled to each other, in the switch combined lid, a spoon-shaped multi-stage lid rotated and fixed with respect to an electric pad, and a two-pole fixed to the multi-stage lid A switch, and two electric wires connected to the two-pole switch and electrically connected to the battery together with two electrode terminals through the electric pad. In order to have a ring-shaped electric wire seating trench and a switch seating hole, hinge-couple the lower portion of the multi-stage lid to the electric pad through the electric wire seating trench, and electrically connect to the battery together with the two electrode terminals, the The two electric wires are passed through the connection hole of the electric wire seating trench and the via hole of the electric pad, and the lower portion of the multi-stage lid is inserted into the electric wire seating trench so that the upper portion of the multi-level lid is brought into contact with the seating column of the switch seating hole. I can.

In the substrate guide holder according to the present invention, in an organic light emitting diode (OLED) deposition equipment, a substrate mounting tool and a substrate receiving tool are sequentially stacked on an evaporation source, and the gas through hole of the substrate mounting tool is formed using the substrate receiving tool. Cover, have electrical terminals inside of the substrate receiving tool, have a static electricity generating unit on the substrate receiving tool, while accommodating the circular substrate under the substrate receiving tool, a plurality of capacitors are provided to the electric terminals and the substrate through the power supply of the static electricity generating unit Since it is formed electrically, it is possible to easily position the circular substrate on the substrate seating tool without the use of an adhesive on the substrate seating tool and minimizing the number of times of use of the substrate fixing clamp on the substrate seating tool.

1 is an image showing one side of a substrate guide holder according to the present invention.
2 is an image showing the other side of the substrate guide holder in FIG. 1.
3 is an enlarged image showing a positional relationship between a substrate receiving tool and a substrate in FIG. 2.
4 is an image showing the inside and outside of the substrate receiving tool in FIG. 3.
5 is an enlarged and detailed perspective view of the static electricity generating unit of FIG. 1.
6 is a schematic diagram showing an electric circuit comprising a substrate receiving tool of FIGS. 1 and 2, a static electricity generating unit, and a substrate.

For a detailed description of the present invention to be described later, reference is made to the accompanying drawings, which illustrate specific embodiments in which the present invention may be practiced. These embodiments are described in detail sufficient to enable a person skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different from each other, but need not be mutually exclusive. For example, specific shapes, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the present invention in relation to one embodiment. In addition, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Accordingly, the detailed description to be described below is not intended to be taken in a limiting sense, and the scope of the present invention, if appropriately described, is limited only by the appended claims, along with all ranges equivalent to those claimed by the claims. In the drawings, similar reference numerals refer to the same or similar functions over various aspects, and the length, area, thickness, and the like may be exaggerated and expressed for convenience.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings in order to enable those of ordinary skill in the art to easily implement the present invention.

1 is an image showing one side of a substrate guide holder according to the present invention, FIG. 2 is an image showing a substrate from the other side of the substrate guide holder of FIG. 1, and FIG. 3 is a positional relationship between the substrate receiving tool and the substrate in FIG. This is an enlarged image.

In addition, FIG. 4 is an image showing the inside and outside of the substrate receiving tool in FIG. 3, and FIG. 5 is an enlarged and detailed perspective view of the static electricity generating unit of FIG. 1, and FIG. 6 is It is a schematic diagram showing an electric circuit composed of a static electricity generating unit and a substrate.

1 to 6, the substrate guide holder 200 according to the present invention is a circular substrate (210 in FIG. 2) along a plurality of chambers in an organic light emitting diode (OLED) deposition equipment (not shown in the drawing). When moving or performing a deposition process in a separate chamber, the substrate 210 may be placed on a crucible assembly to expose the substrate 210 to the deposition gas of the deposition source.

To this end, the substrate guide holder 200 includes a substrate mounting tool 10, a substrate receiving tool 70, and a static electricity generating unit 190 as shown in FIGS. 1 and 2. Firstly, the substrate mounting tool 10 includes a gas penetrating portion 4 made of a square plate close to the evaporation source and extending toward the other side facing one side of the square plate and passing through one side of the square plate. Have it together.

Here, the substrate mounting tool 10 includes positioning members 8 at opposite corners of the substrate mounting tool 10 in the vicinity of the gas through hole 4 of the substrate mounting tool 10, respectively, as shown in FIG. 1. And, inserting the edge of the substrate receiving tool 70 on the individual positioning member 8 on the substrate mounting tool 10 as shown in FIG. 1, and receiving the substrate through the gas through hole 4 of the substrate mounting tool 10 The substrate 210 of the tool 70 is exposed to an evaporation source.

The substrate mounting tool 10 has a larger size than the substrate receiving tool 70, as shown in FIG. 1 or 2. The substrate receiving tool 70 is formed as shown in FIG. 1 in a square shape on the substrate mounting tool 10, and when viewed externally, it covers the gas penetrating part 4 and accommodates the substrate 210 so that the substrate 210 A diagram that forms a concentric circle in the occupied area of the substrate 210 so as to electrically configure a plurality of capacitors (C1, C2, C3, C4 in FIG. 6) together with the substrate 210 when viewed internally while facing the evaporation source. It has 4 electrical terminals 24, 28, 34, 38.

The substrate receiving tool 70 connects one side and the other side facing the gas through hole 4 on the substrate mounting tool 10 to partially connect the gas through hole 4 as shown in FIG. 1 or 2. Covering, on one side of the substrate receiving tool 70, a substrate insulating receiving table (44 in Fig. 4) for receiving the substrate 210, and a substrate movement preventing unit (48 in Fig. 4) surrounding the substrate 210, In addition, it has a substrate fixing clamp (60 in FIGS. 2 to 4) positioned between the substrate insulation receiving table 44 and the substrate movement preventing table 48.

The substrate receiving tool 70 includes an insulator (not shown) in contact with the substrate 210. The electrical terminals 24, 28, 34, 38 are positioned around the substrate 210, individually wrapped by an insulator, and electrically insulated from each other. When viewed horizontally from one side of the substrate receiving tool 70, the substrate insulation receiving table 44 is located around the substrate movement preventing table 48 and is depressed from the substrate receiving tool 70 to form a circular groove. ) As shown in FIG. 4.

In addition, the substrate insulation receiving table 44 has electrical terminals 24, 28, 34, 38 that are electrically insulated from the substrate 210 while receiving the substrate 210 as shown in FIG. 4. The electrical terminals 24, 28, 34, 38 are charged with an electrical polarity opposite to that of the substrate 210 during the switch-on state of the static electricity generating unit 190 in the substrate insulation receiving table 44 Accumulate.

The substrate movement stop 48 is positioned around the edge of each edge of the substrate receiving tool 70 and is spaced apart from each other as shown in FIG. 3 or 4 between adjacent edges to surround the substrate 210 as shown in FIG. 3, When the substrate receiving tool 70 has a conductor and an insulator, the conductor may be exposed around the substrate insulating receiving table 44 or covered by an insulator together with the substrate insulating receiving table 44.

As the substrate fixing clamp 60 repeatedly performs a deposition process on the substrate 210, the total electrostatic attraction force from the plurality of capacitors C1, C2, C3, C4 together with the substrate 210 is applied to the substrate 210 In case of less than the weight of the deposited film (not shown in the drawing) (W = mg (where m is the mass of the substrate 210 and the deposited film, g is the gravitational acceleration)) A screw (55 in FIG. 3) is intermittently fixed to the substrate movement preventing table 48 on the 48, as shown in FIG. 2 or 3 or 4 to prevent the substrate 210 from falling from the substrate insulating receiving table 44. .

When considering FIGS. 1 and 2, the static electricity generating unit 190 is located on the opposite side of the substrate 210 on the substrate receiving tool 70 and is electrically connected to the electrical terminals 24, 28, 34, and 38. It is connected to. The static electricity generation unit 190 makes the substrate 210 in close contact with the substrate receiving tool 70 through the electrostatic attraction of the individual capacitors C1 or C2 or C3 or C4. In more detail, the static electricity generation unit 190 has a switching execution unit 145 and a power supply unit 160 on the electric pad 180 on the substrate receiving tool 70, as shown in FIG. 5. .

The switching performing unit 145 has the first and second switching performing units 134 and 138 of the same structure, and the power supply unit 160 through the first and second switching performing units 134 and 138 Power is applied to the electrode terminals 24, 28, 34, and 38 as shown in FIG. 6. The first and second switching execution units 134 and 138 are, as shown in FIG. 6, on the electrical terminals 24, 28, 34, and 38 in a plurality of capacitors C1, C2, C3, and C4. The (+) polarity and (-) polarity or (-) polarity and (+) of the rechargeable battery (E in FIG. 6), which are connected two at a time (24 & 34, and 28 & 38) and located in the power supply 160 It is electrically connected to the polarity.

When only the first switching performing unit 134 is selected among the first and second switching performing units 134 and 138 to simplify the structure of the first and second switching performing units 134 and 138 , The first switching performing unit 134, as shown in FIG. 5, has a switch cap 100 and a switch accommodation space 120 coupled to each other.

The first switching performing unit 134, as shown in Fig. 5, in the switch lid 100, a spoon-shaped multi-stage lid 89 rotated and fixed with respect to the electric pad 180, and a multi-stage lid The two-pole switch 94 fixed to 89, and the two-pole switch 94 connected to the electric pad 180, together with the two electrode terminals 24 and 34, are electrically connected to the rechargeable battery E. It has two wires 98 connected as shown in 6.

The first switching performing unit 134, as shown in Fig. 5, in the switch accommodation space 120, as seen from the exterior, the electric pad 180, the electric wire seating trench 114 and the switch With the seating hole 118, the fitting hole 83 of the lower portion 86 of the multi-stage lid 89 is hinged to the protrusion (not shown in the drawing) of the electric pad 180 through the electric wire seating trench 114 .

In addition, the first switching performing unit 134, as shown in Figure 5, in order to electrically connect to the rechargeable battery (E) together with the two electrode terminals (24, 34), the wire mounting trench 114 The two wires 98 are passed through the connection hole 112 of the electrical pad 180 and the via hole 175 of the electric pad 180, and the lower part 86 of the multi-level lid 89 is inserted into the wire mounting trench 114 to seat the switch. The upper portion of the multi-stage lid 89 is brought into contact with the mounting column 116 of the hole 118.

On the other hand, the power supply unit 160 is equipped with at least one rechargeable battery (E). In more detail, the power supply unit 160 has a battery housing 154 and a battery lid 158 on the electric pad 180, accommodates a rechargeable battery E in the battery housing 154, and The rechargeable battery E is shielded from the outside through the battery lid 158 by inserting the battery lid 158 into the housing 154. The battery lid 158 has a handle (H) in the same way as the multi-stage lid (89).

Next, a method of using the substrate guide holder according to the present invention will be described with reference to FIGS. 1 to 6.

1 to 6, a substrate mounting tool 10, a substrate receiving tool 70, and a static electricity generating unit 190 may be prepared. The substrate mounting tool 10, the substrate receiving tool 70, and the static electricity generating unit 190 have been sufficiently described in FIGS. 1 to 6. Next, the substrate receiving tool 70 and the static electricity generating unit 190 may be sequentially stacked on the substrate mounting tool 10 to be electrically connected to each other.

Here, when the board receiving tool 70 is made of a conductor and an insulator, the insulator surrounds the electrical terminals 24, 28, 34, 38, and the static electricity generating unit 190 is an electrical terminal through a conductor and an insulator. It is electrically connected to field (24, 28, 34, 38). The substrate mounting tool 10, the substrate receiving tool 70, and the static electricity generating unit 190 may constitute the substrate guide holder 200. The static electricity generating unit 190 may or may not apply power of the rechargeable battery E to the substrate receiving tool 70 according to a switch on or off state.

Next, after separating the substrate receiving tool 70 and the static electricity generating unit 190 from the substrate mounting tool 10, the circular substrate 210 may be positioned on the substrate receiving tool 70. The substrate 210 is mounted on the substrate insulation receiving table 44 of the substrate receiving tool 70. Subsequently, when the switches of the first and second switching units in the static electricity generation unit 190 are turned "on", the static electricity generation unit 190 includes electrical terminals of the substrate receiving tool 70 ( 24, 28, 34, 38) induces an opposite charge on the substrate by accumulating charge.

That is, the electrical terminals and the substrate 210 electrically form a plurality of capacitors C1, C2, C3, C4 in the substrate receiving tool 70, and the electrical terminals 24, 28, 34, 38 and the substrate Electrostatic attraction is generated between the substrates 210 so that the substrate 210 is in close contact with the substrate insulation receiving table 44 of the substrate receiving tool 70. Thereafter, while forming a plurality of capacitors (C1, C2, C3, C4) in the substrate receiving tool 70, the substrate guide holder 200 is located on the evaporation source in the process chamber of the organic light emitting diode deposition equipment. It is possible to apply a deposition process to the substrate.

In addition, in order to form the organic light-emitting diode on the substrate 210, while the deposition process is repeatedly applied to the substrate 210, the weight of the substrate 210 is a plurality of capacitors (C1, C2, C3, C4). When greater than the total electrostatic attraction generated from ), the substrate receiving tool 70 has a plurality of substrate fixing clamps 60 around the substrate insulating receiving table 44 and insulating the substrate using the substrate fixing clamps 60. The substrate 210 may be fixed to the receiving table 44.

4; Gas penetrating portion, 8; Positioning member
10; Board seating tool, 70; Board receiving tool
190; Static electricity generating unit 200; Board guide holder

Claims (10)

In an organic light-emitting diode (OLED) deposition equipment, when a circular substrate is moved along a plurality of chambers, or when a deposition process is performed in an individual chamber, the substrate is placed on a crucible assembly, and the substrate is placed in the deposition gas of the deposition source. In the substrate guide holder exposing the substrate,
A substrate mounting tool made of a square plate close to the evaporation source and having a gas penetrating portion extending toward the other side facing the one side through one side of the square plate;
It is formed in a square shape on the substrate mounting tool, and when viewed externally, the gas penetrating portion is covered and the substrate is accommodated so that the substrate faces the evaporation source, and when viewed internally, a plurality of capacitors are electrically connected together with the substrate. A substrate receiving tool having electrical terminals concentrically formed in the occupied area of the substrate to be configured as: And
A static electricity generating unit positioned on the substrate receiving tool on the opposite side of the substrate and electrically connected to the electrical terminals,
The static electricity generation unit, the substrate guide holder for bringing the substrate into close contact with the substrate receiving tool through electrostatic attraction of individual capacitors.
The method of claim 1,
The substrate mounting tool,
Each having positioning members at opposite corners of the substrate mounting tool around the gas through hole of the substrate mounting tool,
Inserting the edge of the substrate receiving tool into an individual positioning member on the substrate seating tool,
Exposing the substrate of the substrate receiving tool to the evaporation source through the gas through hole of the substrate mounting tool,
Wherein the substrate seating tool has a larger size than the substrate receiving tool.
The method of claim 1,
The substrate receiving tool,
Partially covering the gas through hole by connecting one side and the other side facing the periphery of the gas through hole on the substrate mounting tool,
On one side of the substrate receiving tool, a substrate insulating receiving table accommodating the substrate, a substrate movement preventing unit surrounding the substrate, and a substrate fixing clamp positioned between the substrate insulating receiving unit and the substrate movement preventing unit. Eggplant, the substrate guide holder.
The method of claim 3,
The substrate receiving tool,
Comprising an insulator in contact with the substrate,
The electrical terminals are positioned around the substrate and individually wrapped by the insulator and electrically insulated from each other.
The method of claim 3,
The substrate insulation receiving table,
When viewed horizontally from the one side of the substrate receiving tool, it is located around the substrate movement prevention stand and is depressed from the substrate receiving tool to form a circular groove,
Having the electrical terminals electrically insulated from the substrate while receiving the substrate,
The electrical terminals,
A substrate guide holder that accumulates electric charges of an electric polarity opposite to the substrate during a switch-on state of the static electricity generating unit in the substrate insulation receiving table.
The method of claim 3,
The substrate movement prevention unit,
Each edge of the substrate receiving tool is positioned around an edge and spaced apart between both adjacent edges to surround the substrate,
When the substrate receiving tool has a conductor and an insulator, the conductor is exposed around the substrate insulating receiving table or covered by an insulator together with the substrate insulating receiving table.
The method of claim 3,
The substrate fixing clamp,
By repeatedly performing the deposition process on the substrate,
In case the total electrostatic attraction in the plurality of capacitors is less than the weight of the substrate and the deposition film deposited on the substrate, the substrate is intermittently screwed to the substrate movement prevention member on the substrate movement prevention table, A substrate guide holder for preventing the substrate from falling.
The method of claim 1,
The static electricity generation unit,
Having a switching performing unit and a power supply unit to an electric pad on the substrate receiving tool,
The switching performing unit,
Applying power of the power supply unit to the electrode terminals through the first and second switching performing units while having first and second switching units having the same structure,
The power supply unit,
Board guide holder for mounting at least one rechargeable battery.
The method of claim 8,
The first and second switching performing units,
Two of the plurality of capacitors are alternately connected to the electrical terminals to be electrically connected to the (+) polarity and the (-) polarity or the (-) polarity and the (+) polarity of the rechargeable battery,
The power supply unit,
Having a battery housing and a battery lid on the electric pad,
Accommodating the rechargeable battery in the battery housing,
A substrate guide holder for shielding the rechargeable battery from the outside through the battery lid by inserting the comb lid into the battery housing.
The method of claim 8,
The first switching performing unit,
It has a lid for both switches and a space for accommodating switches,
In the switch combined lid, a multi-stage lid in the shape of a spoon fixed to rotate with respect to an electric pad, and a two-pole switch fixed to the multi-stage lid, and the two electrode terminals are connected to the two-pole switch through the electric pad. It has two wires that are electrically connected to the rechargeable battery,
In the switch accommodation space zone, the electric pad has a hook-shaped electric wire seating trench and a switch seating hole in the electric pad, and the lower portion of the multi-stage lid is hinged to the electric pad through the electric wire seating trench, and the In order to electrically connect to the rechargeable battery together with two electrode terminals, the two wires are passed through a connection hole of the wire mounting trench and a via hole of the electric pad, and the lower portion of the multi-stage lid in the wire mounting trench Inserting and contacting the upper portion of the multi-stage lid to the seating column of the switch seating hole, the substrate guide holder.

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