KR20200140455A - Surface treatment unit for oil separating substrate - Google Patents

Abstract

The present invention relates to a surface treatment apparatus of an oil-water separation substrate, and to a surface treatment method of an oil-water separation substrate capable of smoothly generating a glow discharge under atmospheric pressure and improving a hydrophilic surface treatment speed. To this end, the surface treatment apparatus of an oil-water separation substrate disclosed herein comprises: a gas supply unit for mixing after receiving a plurality of different gases from a gas reservoir to supply a mixed gas; a plasma reaction gas generating unit for generating steam and a plasma reaction gas which is a mixed gas containing steam; a heater unit for heating the mixed gas containing steam to a preset temperature; and a chamber unit including first and second electrodes and modifying the surface of the oil-water separation substrate disposed therein into hydrophilic by forming glow discharge under atmospheric pressure by the mixed gas containing steam.

Description

Surface treatment unit for oil separating substrate

The present invention relates to a surface treatment apparatus for an oil-water separation substrate, and more particularly, to a method for surface treatment of an oil-water separation substrate capable of smoothly generating a glow discharge under atmospheric pressure and improving a hydrophilic surface treatment speed.

In general, in order to generate plasma glow discharge, an inert gas such as argon gas is used under a vacuum atmosphere. However, there are many difficulties when working in a vacuum atmosphere. As an example, there is a problem that the cost of equipment and auxiliary equipment increases, and the installation of equipment is complicated.

In addition, in the case of plasma treatment, it often occurs that the surface treatment is not uniformly applied to all surfaces of the substrate, and there is a need to shorten the plasma surface treatment time.

Japanese Patent Publication No. 4789700 Japanese Patent Publication No. 6102458 Japanese Patent Application Publication No. 2011-34767 Japanese Patent Publication No. 2017-210698 Korean Patent Publication No. 10-0845744 Korean Patent Publication No. 10-1096519

Accordingly, the present invention has been created to solve the above-described problems, and an object thereof is to provide an invention capable of stably generating a glow discharge under atmospheric pressure and shortening a surface treatment time.

However, the objects of the present invention are not limited to the above-mentioned objects, and other objects that are not mentioned will be clearly understood by those skilled in the art from the following description.

An object of the present invention described above is a gas supply unit for supplying a mixed gas by receiving and mixing a plurality of different gases from a gas reservoir, and a plasma reaction gas for generating a plasma reaction gas, which is a mixed gas containing water vapor. It includes a generation unit, a heater unit that heats a mixed gas containing water vapor to a preset temperature, and first and second electrodes, and separates oil and water disposed inside by forming a glow discharge under atmospheric pressure by the mixed gas containing water vapor It can be achieved by providing a surface treatment apparatus for an oil-water separation substrate comprising a chamber portion for modifying the surface of the substrate to be hydrophilic.

In addition, the gas supply unit supplies an inert gas supply unit that supplies a plurality of different inert gases, an oxide gas supply unit that supplies an oxide gas, and a gas mixture that supplies a mixed gas of a plurality of inert gases and oxide gases to the plasma reaction gas generation unit. Includes wealth.

In addition, the plasma reaction gas generating unit includes a steam generating unit for generating steam, a heater unit for controlling the amount of steam generated, and a gas and steam mixing unit for generating a mixed gas containing water vapor by mixing the steam and the mixed gas. Plasma reaction gas is uniformly reacted on the surface of the oil-water separation substrate by containing inert gas and oxide gas having different masses in water vapor to generate plasma reaction gas.

In addition, the steam generator generates ketone-containing water vapor by receiving ketone from the ketone supply unit, and the gas and water vapor mixing unit mixes the ketone-containing water vapor and the mixed gas to generate a ketone and a mixed gas containing water vapor.

The plasma reaction gas injection unit further includes a plasma reaction gas injection unit that injects the plasma reaction gas supplied from the plasma reaction gas generation unit into the plasma reaction space between the first and second electrodes at a preset speed.

In addition, it further includes a heater for heating the plasma reaction gas injected from the plasma reaction gas injection unit to a preset temperature.

In addition, it further includes a mist spraying unit including a porous portion for misting the plasma reaction gas supplied from the plasma reaction gas generating unit.

In addition, the surface of the surface of the oil-water separation substrate by rotating the oil-water separation substrate by rotating the fixed portion, and a rotating portion that is disposed inside the chamber portion, the oil-water separation substrate is fixed in the circumferential direction, and the fixed portion. Is uniformly modified to be hydrophilic.

According to the present invention as described above, it is possible to provide an invention capable of stably generating a glow discharge under atmospheric pressure and shortening a surface treatment time.

The following drawings attached to the present specification illustrate a preferred embodiment of the present invention, and serve to further understand the technical idea of the present invention together with the detailed description of the present invention, so the present invention is limited to the matters described in such drawings. It is limited and should not be interpreted.
1 is a schematic configuration diagram of a surface treatment apparatus for an oil-water separation substrate according to an embodiment of the present invention,
2 is a view showing that a rotating part is further added according to an embodiment of the present invention,
3 is a view showing that sulfur oxide gas and ketone are further added according to an embodiment of the present invention,
4 and 5 are views showing that a plasma reaction gas injection unit is further added according to an embodiment of the present invention,
6 is a view showing that a mist spraying unit is further added according to an embodiment of the present invention.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In addition, one embodiment described below does not unreasonably limit the content of the present invention described in the claims, and the entire configuration described in the present embodiment cannot be said to be essential as a solution to the present invention. In addition, descriptions of the prior art and those that are apparent to those skilled in the art may be omitted, and descriptions of such omitted components (methods) and functions may be sufficiently referenced within the scope of the technical spirit of the present invention.

The apparatus for treating the surface of an oil-water separation substrate according to an embodiment of the present invention uses plasma to modify the surface of the oil-water separation substrate 604 separating oil and water into hydrophilicity or superhydrophilicity as shown in FIGS. 1 and 6. It is a surface treatment device used. The oil-water separation substrate 604 may generally be made of a fibrous material, but plastic or metal may be used as needed. However, the type of the substrate is not limited within the scope not departing from the technical idea of the present invention.

In general, in order to generate plasma glow discharge, an inert gas such as argon gas is used under a vacuum atmosphere. However, there are many difficulties when working in a vacuum atmosphere. As an example, there is a problem that the cost of equipment and auxiliary equipment increases, and the installation of equipment is complicated. Accordingly, the present invention proposes an invention capable of stably generating a glow discharge under atmospheric pressure.

As shown in FIG. 1, the inert gas supply unit 100 according to an embodiment of the present invention supplies stored inert gases of different types. As an example, the inert gas may be argon gas 110 or helium gas 112, but is not limited thereto, and any gas or inert gas required for glow discharge may be used. As an example, nitrogen gas, neon gas, krypton gas, and the like may be used. However, as an example, in the case of using the argon gas 110 and the helium gas 112, it is preferable to mix the argon gas so that the ratio of the argon gas is relatively higher than that of the helium gas. As an example, when the argon gas is 60 to 99 parts by weight, 40 to 1 part by weight of the helium gas may be mixed. In addition, in the present invention, stable glow discharge can be caused under atmospheric pressure by mixing helium gas and argon gas, but as described later, by mixing an inert mixed gas of helium gas and argon gas with water vapor, a more stable glow discharge can be caused under atmospheric pressure. There is an advantage to be able to. At this time, in the case of generating ketone-containing water vapor, the ketone-containing water vapor and an inert gas mixture are mixed with each other, thereby generating the best glow discharge under atmospheric pressure.

The inert gas mixing unit 113 according to an embodiment of the present invention mixes inert gases of different properties supplied from the inert gas supply units 111 and 112 with each other, and converts the mixed inert gas to the plasma reaction gas generation unit 200. Discharge through piping. At this time, the discharge flow rate may be adjusted by adjustment of the first control valve unit 11. Each of the control valve units may be controlled by a control unit. The inert gas mixing unit 113 has the advantage of allowing faster mixing by inducing collision by using a mixing fan or spraying different inert gases through nozzles in different directions. This principle can be applied equally to the gas mixing unit 130 and the gas and steam mixing unit 220 to be described later.

The plasma reaction gas generation unit 200 according to an embodiment of the present invention generates an inert mixed gas containing water vapor by mixing the mixed inert gas and generated water vapor as shown in FIG. 1. The steam generator 211 generates steam. The heater unit 212 may control the amount of water vapor generated by adjusting the temperature. The gas and steam mixing unit 220 mixes the generated steam and the inert mixed gas with each other to finally generate an inert mixed gas containing steam. The inert mixed gas containing water vapor thus generated can stably cause a glow discharge under atmospheric pressure.

As an example of the plasma reaction gas generating unit 210, an inert mixed gas containing water vapor may be generated by injecting an inert mixed gas into a container in which water is stored. At this time, if the temperature of the stored container is increased by the heater, the amount of water vapor generated can be adjusted. As another example of the plasma reaction gas generating unit 210, water is compressed and sprayed into the mixing container 211 to make mist, and the mist is mixed with the inert mixed gas to generate an inert mixed gas containing water vapor.

The heater unit 500 according to an embodiment of the present invention is disposed on a gas flow path between the plasma reaction gas generation unit 200 and the chamber unit 600, and steam supplied from the plasma reaction gas generation unit 210 Adjust the temperature of the inert gas mixture containing. When the temperature of the inert gas mixture containing water vapor is raised to about 100 degrees Celsius or more, the material of the oil-water separation substrate can be used in a more variety of ways. As an example, there is an advantage in that the surface of a glass substrate can be modified to be hydrophilic by using plasma at a temperature of 100°C or higher.

The chamber part 600 according to an embodiment of the present invention is a device that modifies the surface of the oil-water separation substrate 604 to hydrophilicity by plasma glow discharge. Electrodes 601 and 602 opposite to each other are positioned inside the chamber at a predetermined interval, and a glow discharge is generated between the two electrodes by the plasma reaction gas. A dielectric 603 is disposed on an upper surface of the second electrode 602 to cause glow discharge, and an oil-water separation substrate 604 is placed on the upper surface of the dielectric 603. Accordingly, the surface of the oil-water separation substrate 604 mounted by the glow discharge is modified to be hydrophilic. On the other hand, when the substrate is a fiber, since damage may be applied to the surface of the fiber, it is preferable to maintain the distance between the substrate 604 and the electrode approximately 5 to 8 cm.

On the other hand, it is preferable to rotate the oil-water separation substrate 604 as shown in FIG. 2 in order to uniformly surface-treat the surface of the oil-water separation substrate 604. That is, as an example, when the oil-water separation substrate 604 is fixed in the outer circumferential direction of a fixing portion (not shown) having a circular or oval shape in cross section, and the fixing portion is rotated by the rotating portion 606, the oil-water separation substrate is rotated. Uniform surface treatment is possible. At this time, although not shown in the drawing, as another example, the fixing part is embodied as the first electrode 601, the oil-water separation substrate 604 is disposed and fixed in the inner circumferential direction of the first electrode 601, and the oil-water separation substrate ( By inserting and fixing the dielectric 603 and the second electrode 602 inside the 604, uniform surface treatment can be performed. In this case, the second electrode 602 may be a rotational central axis, and there is an advantage that the surface of the substrate can be modified to be hydrophilic more quickly by minimizing the distance between the first and second electrodes.

Meanwhile, in the plasma treatment region, it is difficult to form uniform hydrophilicity on the surface of the substrate because uniform plasma is not formed according to the type of the substrate or the environment inside the chamber unit 600. That is, uniform hydrophilic modification by plasma treatment may not occur in all surface areas of the substrate, and non-uniform modification may occur in the central area and the outer area. In order to prevent this, a more uniform surface treatment may be possible by rotating the oil-water separation substrate 604 and moving the substrate 604 in the horizontal direction through a horizontal moving member disposed inside the chamber part 600. . In addition, by moving the oil-water separation substrate in the vertical direction through the vertical moving member, a more uniform surface treatment may be possible by adjusting the distance between the electrode and the oil-water separation substrate. Adjustment of the vertical moving member may be further performed when the type is different for each substrate. Each of the rotating unit, the horizontal moving member, and the vertical moving member may be operated under preset conditions by a control unit (not shown). In this way, when the glow discharge occurs inside the chamber, the surface treatment is not uniformly applied to both the outer and inner regions of the substrate 604. Accordingly, a more uniform surface treatment may be performed by rotating the substrate 604 or moving it in a horizontal or vertical direction.

3 shows ketones are used to more stably generate glow discharges under atmospheric pressure, and sulfur oxide gas having good oxidizing properties is supplied to modify the hydrophilic surface more quickly. First, the sulfur oxide gas supply unit 120 supplies a sulfur oxide gas. As the sulfur oxide gas, as an example, sulfur dioxide gas or sulfur trioxide gas may be used.

The gas mixing unit 130 receives each gas from the inert gas mixing unit 113 and the sulfur oxide gas supply unit 120 and mixes them. The mixed gas in which the sulfur oxide gas and the inert gas are mixed is supplied to the plasma reaction gas generating unit 200. In this case, the sulfur oxide gas is preferably contained in an amount of 0.02 to 15 parts by weight relative to the inert mixed gas. At this time, since the sulfur oxide gas is lighter than the inert mixed gas, it does not mix well with each other. Therefore, in the present invention, there is an advantage of solving this problem by mixing the mixed gas in which the sulfur oxide gas is mixed with water vapor.

Meanwhile, as shown in FIG. 3, the ketone supply unit 300 supplies ketones. Ketones may be acetone, methyl ethyl ketone or the like as an example. A more stable glow discharge can be generated by supplying ketones. Since glow discharge does not occur easily with argon gas alone, there is an advantage of generating a more stable glow discharge by mixing helium or mixing a small amount of ketone to generate a plasma reaction gas as described above.

The ketone supplied from the ketone supply unit 300 is diluted in a small amount in water stored in a container generating water vapor. Water vapor containing ketones is generated by compressing and spraying water having a small amount of ketone diluted, or by injecting the mixed gas supplied from the gas mixing unit 130 into a container containing water having a small amount of ketone diluted. Can occur. The reaction gas generated through the plasma reaction gas generation unit 200 shown in FIG. 3 is mixed with sulfur oxide gas and further contains ketone. Therefore, it is possible to shorten the surface modification time by including a sulfur oxide gas having a high oxidizing property in addition to generating a more stable glow discharge.

On the other hand, the plasma reaction gas generated by the plasma reaction gas generating unit 200 is supplied to the chamber unit 600 after temperature adjustment through the heater unit 500. In this case, when the plasma reaction gas injection unit 410 is further disposed on the flow path of the plasma reaction gas to compress and spray the reaction gas, the reaction is actively generated inside the chamber, thereby reducing the surface treatment time. As shown in FIGS. 4 and 5, the plasma reaction gas injection unit 410 may be disposed at the front end of the heater unit 500, or may be disposed at the rear end of the heater unit 500, although not shown in the drawings.

The mist injection unit 420 according to an embodiment of the present invention is disposed on the gas flow path in front of the heater unit 500 as shown in FIG. 6. However, it may be disposed at the rear end of the heater unit 500. The mist spraying part 420 includes a porous part. The porous portion makes water droplets partially present in the reaction gas supplied from the plasma reaction gas generator 200 mist. Accordingly, a compression injection unit for compressing and spraying the reaction gas may be further disposed in front of the porous unit. When injecting the reaction gas into the porous portion, it is preferable to perform compression injection so that the contact angle becomes an acute angle. Meanwhile, the misted reaction gas is again injected into the chamber through compression injection. Accordingly, the reaction gas discharged from the plasma reaction gas generation unit 200 is compressed and injected into the porous portion by the first compression injection unit, and the reaction gas misted by the porous portion is again transferred to the inside of the chamber by the second compression injection unit. Is sprayed. Accordingly, the mist injection unit includes first and second compression injection units and a porous portion. Accordingly, the speed of surface treatment can be shortened.

In describing the present invention, descriptions of the prior art and those that are obvious to those skilled in the art may be omitted, and descriptions of these omitted components (methods) and functions will be sufficiently referenced within the scope not departing from the technical spirit of the present invention. I will be able to. In addition, the above-described components of the present invention have been described for convenience of description of the present invention, and components not described herein may be added within the scope not departing from the technical spirit of the present invention.

The descriptions of the configurations and functions of the respective parts have been described separately from each other for convenience of description, and one configuration and function may be implemented by being integrated into other components or further subdivided as necessary.

As described above, with reference to an embodiment of the present invention, the present invention is not limited thereto, and various modifications and applications are possible. That is, those skilled in the art will be able to easily understand that many modifications can be made without departing from the gist of the present invention. In addition, when it is determined that a detailed description of a known function related to the present invention and a configuration thereof or a coupling relationship for each configuration of the present invention may unnecessarily obscure the subject matter of the present invention, it should be noted that the detailed description has been omitted. something to do.

11: first control valve part
12: second control valve part
13: third control valve part
14: fourth control valve part
15: fifth control valve part
100: gas supply
110: inert gas supply unit
111: inert gas (argon)
112: inert gas (helium)
113: inert gas mixing unit
120: sulfur oxide gas supply unit
130: gas mixing unit
200: plasma reaction gas generation unit
210: steam generation unit
211: steam generator
212: heater part
220: gas and steam mixing unit
300: ketone supply unit
410: plasma reaction gas injection unit
420: mist spraying part
500: heater part
600: chamber part
601: first electrode
602: second electrode
603: dielectric
604: oil-water separation substrate
605: power supply
606: rotating part

Claims (8)

A gas supply unit that receives and mixes a plurality of different gases from a gas storage to supply a mixed gas,
A plasma reaction gas generation unit that generates water vapor and generates a plasma reaction gas that is a mixed gas containing water vapor,
A heater for heating the mixed gas containing water vapor to a preset temperature, and
An oil-water separation substrate comprising first and second electrodes, and a chamber portion for hydrophilic modification of the surface of the oil-water separation substrate disposed therein by forming a glow discharge under atmospheric pressure by the mixed gas containing water vapor Surface treatment device.
The method of claim 1,
The gas supply unit,
An inert gas supply unit for supplying a plurality of different inert gases,
An oxide gas supply unit for supplying an oxide gas, and
And a gas mixing unit for supplying a mixed gas obtained by mixing the plurality of inert gases and oxide gases to the plasma reaction gas generating unit.
The method of claim 2,
The plasma reaction gas generation unit,
A steam generator that generates steam,
A heater part for controlling the amount of water vapor generated, and
It includes a gas and steam mixing unit for generating a mixed gas containing water vapor by mixing the water vapor and the mixed gas,
The surface treatment apparatus of an oil-water separation substrate, wherein the plasma reaction gas is uniformly reacted on the surface of the oil-water separation substrate by containing the inert gas and the oxide gas having different masses in water vapor to generate a plasma reaction gas.
The method of claim 3,
The steam generator,
Ketone is supplied from the ketone supply unit to generate ketone-containing water vapor,
The gas and steam mixing unit,
An apparatus for treating a surface of an oil-water separation substrate, characterized in that a mixture gas containing ketone and a mixed gas is mixed to produce a mixed gas containing ketone and water vapor.
The method of claim 4,
Surface treatment of the oil-water separation substrate, characterized in that it further comprises a plasma reaction gas injection unit for injecting the plasma reaction gas supplied from the plasma reaction gas generating unit at a predetermined speed in the plasma reaction space between the first and second electrodes Device.
The method of claim 5,
And a heater for heating the plasma reaction gas injected from the plasma reaction gas injection unit to a preset temperature.
The method of claim 4,
And a mist spraying unit including a porous portion for misting the plasma reaction gas supplied from the plasma reaction gas generating unit.
The method of claim 4,
A fixing part disposed inside the chamber part and fixing the oil-water separation base material in the circumferential direction, and
Further comprising a rotating part for rotating the fixed part,
The surface treatment apparatus for an oil-water separation substrate, wherein the surface of the oil-water separation substrate is uniformly modified to be hydrophilic by rotating the oil-water separation substrate by rotation of the rotating portion.

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