KR20200135136A - Gate valve - Google Patents

Abstract

The gate valve of the present invention includes a valve box having a hollow portion, a first opening and a second opening that are installed to face each other with the hollow portion therebetween and communicate with each other, and are disposed in the hollow portion of the valve box. A neutral valve body capable of blocking the first opening, a valve closing position in which the neutral valve body is closed with respect to the first opening, and a valve opening in an open state in which the neutral valve body is retracted from the first opening Between positions, a rotation device comprising a rotation shaft for rotating the neutral valve body, a lock pinion for rotating the rotation shaft, and a rotation air cylinder for driving the lock pinion, and an operation of releasing blocking of the neutral valve body It has a clogging release driving unit made of a clogging release air cylinder, and a sequence circuit for sequentially enabling an operation of releasing clogging of the neutral valve body and a rotation operation of the neutral valve body. The rotary air cylinder includes a sub-detail for closing the neutral valve body, a piston capable of opening and closing, and a first pressure space that is arranged in series in an operation direction of the piston to close the piston and a second openable Has a pressure space. The sequence circuit has an air operated two-channel spool valve, and a speed control valve in which a check valve and a flow control valve are combined. The sequence circuit supplies compressed air as damper air to the first pressure space when the gate valve is opened by supply of driving compressed air of one system, and when the driving of the blocking release air cylinder ends, The first pressure is set to a non-pressurized state, the second pressure space is in a pressurized state, the opening operation of the rotary air cylinder is started, and the first pressure is immediately before the neutral valve body reaches the valve opening position. When the gate valve is closed by reducing the impact by the air in the space and releasing the supply of the driving compressed air, the first pressure space and the second pressure space are in a non-pressurized state, Immediately before the neutral valve body reaches the valve closing position by starting the closing operation of the rotary air cylinder by force, the shock is relieved by the damper air in the second pressure space, and the rotational operation of the neutral valve body At the end of this, the blocking operation of the neutral valve body by the blocking release air cylinder is started.

Description

Gate valve

The present invention relates to a gate valve suitable for a pendulum type or the like for sliding a valve body in addition to an operation of opening and closing a flow path by a valve body (valve plate). In particular, the present invention divides (closes) a flow path connecting two spaces having different pressures and a flow path connecting two spaces performing different processes in a vacuum device, etc., and divides the flow path. ) To a gate valve that opens (connects two spaces).

This application claims priority based on Japanese Patent Application No. 2018-069863 for which it applied to Japan on March 30, 2018, and uses the content here.

In a vacuum device, a gate valve is installed to divide the space between two spaces with different degrees of vacuum, such as between a chamber and a pipe, between a pipe and a pipe, or between a pipe and a pump, etc., and connect the two divided spaces. Has become. As such a gate valve, various types of valves are known.

For example, by sliding the valve plate to insert the valve plate into the valve opening/closing position of the flow path, and operating the valve plate to divide the flow path (valve closing operation), or by operating the valve plate to A structure is known in which the valve is connected (valve opening operation), the valve plate is slided, and the valve plate is retracted from the flow path to the retracted position in the valve box. As a valve having such a structure, a pendulum type, a direct acting type, a door type, and the like are known.

The pendulum-shaped slide valve includes a valve box having a first opening and a second opening constituting a flow path and having a hollow part, and a valve box fixedly installed on a rotating shaft in the hollow part and widening in a direction parallel to a plane perpendicular to the rotating shaft. It has a structure in which a support body and a valve body fixedly provided to the support body (a valve plate in the case of a structure in which a sealing plate is provided in the opening portion) are arranged. In this slide valve (gate valve), the rotation shaft is rotated, the valve body is rotated, and the valve body is inserted into the valve opening/closing position of the opening (channel), or the valve body is not provided with an opening. Evacuate to the evacuation position.

The inventors of the present invention have developed a gate valve that has a configuration capable of increasing the size of the area blocked by a slide valve driven by supply of compressed air, and has a high reliability gate operation with a simple configuration, and filed a patent application. (Patent Document 1).

In addition, as a pendulum-shaped gate valve, the sealing plate is slid in a hollow portion of the housing, a valve plate rotatable with respect to a rotation axis, a slidable sealing plate disposed in the opening of the housing, and a flange integrally formed in the housing ). A structure is known in which an actuator is installed. In this gate valve, the sealing plate is brought into contact with the valve plate, and the flow path is closed, or the sealing plate is separated from the valve plate to open the flow path (for example, , See Patent Document 2).

The actuator of this pendulum-type gate valve has a structure in which a bolt, an annular chamber (cylinder), a piston, and a spring are arranged in series in the sliding direction of the sealing plate. Accordingly, when the flow path is closed, the restoring force generated by the spring is transmitted to the sealing plate through the piston, cylinder, and bolt.

In the above-described gate valve, for example, it is known to use compressed air for rotation of the valve body.

In addition, the valve disclosed in Patent Document 3 is different from the gate valve using compressed air in that it is a valve type, but normally closed (normally closed) described in Patent Document 3, that is, supply of driving power or supply of compressed air, etc. There is a demand for a valve with high safety in which the flow path can be automatically closed when it is lost, and the valve is in a closed position.

This normal close is a state in which compressed air (pressurized air) that drives the valve body, etc. is not acting when performing the valve gate operation, and is automatically closed when the valve is in an open state, and the valve is closed. When in, it means keeping the flow path closed.

Japanese Patent No. 5727841 Japanese Patent No. 3655715 Japanese Unexamined Patent Publication No. 2013-190028

However, the slide valve described in Patent Document 1 developed by the inventors and the like did not have such a normally closed structure.

In addition, in the case of realizing a normally closed structure using a spring member in the pressure-pneumatically driven gate valve described in Patent Document 2, the operation may be stopped due to the auxiliary force of the spring member performing the normal closing operation. In some cases, a driving part or a movable part such as a valve body may come into contact with another member at a time or the like.

In recent years, with the rapid opening and closing operation of the gate valve and the increase in the area covered by the gate valve, it is insufficient to prevent the occurrence of impact caused by the operation of the gate valve, and this is the cause of particle generation has been closed. . In order to solve this problem, it is also conceivable to provide mechanical means such as a damper to the gate valve.

However, in the device/production line in which the gate valve is installed, the installation posture of the gate valve is set along the device/line in which the gate valve is used, and varies. For this reason, when manufacturing a gate valve, it is not normally possible to specify the installation posture of the gate valve. Therefore, it is not practical to install a damper on the gate valve in advance in consideration of all installation postures of the gate valve. This is because the operation direction when opening/closing the gate valve changes according to the installation posture of the gate valve.

Further, by installing a mechanical means such as a damper in the gate valve, the amount of impact due to the opening and closing operation varies, but it is necessary to set the structure, number, and performance of the mechanical means in accordance with the shock absorbing power by the mechanical means. As for the installation posture of the gate valve in the device/production line, many installation structures can be considered, but it is not practical to prepare a plurality of types of dampers accordingly.

In addition, in the slide valve described in Patent Document 1 developed by the present inventors, three systems of compressed air are used as the drive control pressure hole, but only by supplying the pressure of the compressed air for drive control of one system, that is, 1 There has been a demand to control the opening and closing operation of the slide valve only by turning on/off the pressure of the dog system.

At the same time, in order to enable the gate operation in a large area, the gate valve is enlarged, but the pressure of the control fluid (such as compressed air) supplied to the gate valve does not increase that much. For this reason, in order to drive a movable part such as a valve body having an increased weight, it may be required to increase the output of the movable part, and the volume of the parts constituting the gate valve tends to increase. However, in devices, manufacturing lines, etc. in which a gate valve is installed, space saving is always required, and there has been a demand for space saving and miniaturization of parts constituting the gate valve.

The present invention, in consideration of such a conventional situation, prevents the generation of particles due to impact caused by the operation of the gate valve, aims to save space of parts, and can operate only by supplying compressed air for driving in one system. , It is an object of the present invention to provide a gate valve having a normally closed structure capable of a gate operation with high reliability and a reduction in weight of the movable valve portion.

In order to solve the above problem, the gate valve according to the first aspect of the present invention is provided with a hollow portion and a first opening that is provided to face each other with the hollow portion interposed therebetween to form a communication passage. And a valve box having a second opening, a neutral valve body disposed in the hollow portion of the valve box and capable of blocking the first opening, and the neutral valve body. The neutral valve element between a valve closing position in a closed state with respect to the first opening and a valve opening position in an open state with the neutral valve element retracted from the first opening. Blocking release consisting of a rotating shaft rotating the rotating shaft, a rotating device composed of a lock pinion rotating the rotating shaft and a rotating air cylinder driving the lock pinion, and a blocking-releasing air cylinder performing an operation of releasing blocking of the neutral valve body It has a driving unit and a sequence circuit for sequentially activating an operation of releasing blocking of the neutral valve body and a rotation operation of the neutral valve body. The rotary air cylinder includes a sub-detail for closing the neutral valve body, a piston capable of opening and closing, and a first pressure space that is arranged in series in an operation direction of the piston to close the piston and a second openable Has a pressure space. The sequence circuit has an air operated two-channel spool valve, and a speed control valve in which a check valve and a flow control valve are combined. The sequence circuit supplies compressed air as damper air to the first pressure space when the gate valve is opened by supply of driving compressed air of one system, and when the driving of the blocking release air cylinder ends, The first pressure is set to a non-pressurized state, the second pressure space is in a pressurized state, the opening operation of the rotary air cylinder is started, and the first pressure is immediately before the neutral valve body reaches the valve opening position. When the gate valve is closed by reducing the impact by the air in the space and releasing the supply of the driving compressed air, the first pressure space and the second pressure space are in a non-pressurized state, Immediately before the neutral valve body reaches the valve closing position by starting the closing operation of the rotary air cylinder by force, the shock is relieved by the damper air in the second pressure space, and the rotational operation of the neutral valve body At the end of this, the blocking operation of the neutral valve body by the blocking release air cylinder is started.

In order to solve the above problem, the gate valve according to the second aspect of the present invention is a valve box having a hollow portion, and a first opening and a second opening that are provided to face each other with the hollow portion interposed therebetween to serve as flow paths for communication. And, a neutral valve body disposed in the hollow portion of the valve box and capable of blocking the first opening, a valve blocking position in which the neutral valve body is closed with respect to the first opening, and the neutral valve body Between the valve opening positions retracted from the first opening and in the open state, the neutral valve body functions as a position switching unit and has an axis extending in the flow path direction, and the rotation shaft is rotated. A rotation device comprising a lock pinion to allow the lock pinion and a rotary air cylinder to drive the lock pinion; a clogging release driving unit comprising a clogging release air cylinder for releasing clogging of the neutral valve body; And a sequence circuit for sequentially enabling the releasing operation and the rotational operation of the neutral valve body. The neutral valve body has a neutral valve part connected to the position switching part, and a movable valve part connected to the neutral valve part so that the position in the flow path direction can be changed. The movable valve part is installed around the movable valve part, and a seal part is provided in close contact with the inner surface of the valve box around the first opening, and the position in the flow path direction is changed with respect to the neutral valve part. It has a first movable valve part to be connected so as to be possible, and a second movable valve part slidable in the direction of the flow path with respect to the first movable valve part. The gate valve is provided with a plurality of first sub-details built into the valve box, a second sub-detail, and a third sub-detail disposed between the first movable valve part and the second movable valve part. The third sub-detail connects the first movable valve part to the neutral valve part so that its position in the flow path direction is changeable, and the first movable valve part faces a central position in the flow path direction. Apply force (付勢). The plurality of first sub-parts are driven by the blocking releasing air cylinder to apply a force to the first opening in the flow path direction to apply a force to the first movable valve part to the inner surface of the valve box around the first opening. It has a function that makes it possible to adhere to. The second sub-detail drives the first movable valve part and the second movable valve part to adjust thickness dimensions in the flow path direction. The rotary air cylinder includes a sub-detail for closing the neutral valve body, a piston capable of opening and closing, and a first pressure space that is arranged in series in an operation direction of the piston to close the piston and a second openable Has a pressure space. The sequence circuit has an air operated two-channel spool valve, and a speed control valve in which a check valve and a flow control valve are combined. The sequence circuit supplies compressed air as damper air to the first pressure space when the gate valve is opened by supply of driving compressed air of one system, and when the driving of the blocking release air cylinder ends, The first pressure is set to a non-pressurized state, the second pressure space is in a pressurized state, the opening operation of the rotary air cylinder is started, and the first pressure is immediately before the neutral valve body reaches the valve opening position. When the gate valve is closed by reducing the impact by the air in the space and releasing the supply of the driving compressed air, the first pressure space and the second pressure space are in a non-pressurized state, Immediately before the neutral valve body reaches the valve closing position by starting the closing operation of the rotary air cylinder by force, the shock is relieved by the damper air in the second pressure space, and the rotational operation of the neutral valve body At the end of this, the blocking operation of the neutral valve body by the blocking release air cylinder is started.

In order to solve the above problem, the gate valve according to the third aspect of the present invention is a valve box having a hollow portion, and a first opening and a second opening that are provided to face each other with the hollow portion therebetween to form a communication passage. And, a neutral valve body disposed in the hollow portion of the valve box and capable of blocking the first opening, a valve blocking position in which the neutral valve body is closed with respect to the first opening, and the neutral valve body Between the valve opening positions retracted from the first opening, the neutral valve body functions as a position switching unit and has an axis extending in a flow path direction, a lock pinion for rotating the rotation shaft, and the A rotating device comprising a rotating air cylinder for driving a lock pinion, and installed around the first opening so as to be slidable in the direction of the flow path, and abutting against the neutral valve body serving as the valve closing position to block the flow path. Sealing that is possible in a closed state, and in an open state in which the neutral valve body becomes the valve opening position, and an opening degree of the flow path can be adjusted, and is built in the valve box to release the blocked state of the sealing. A blocking release air cylinder, a sealing section for applying a force in a direction contacting the neutral valve body, and an operation of releasing the blocking of the neutral valve body and a rotation operation of the neutral valve body are sequentially operable. Equipped with a sequence circuit. The rotary air cylinder includes a sub-detail for closing the neutral valve body, a piston capable of opening and closing, and a first pressure space that is arranged in series in an operation direction of the piston to close the piston and a second openable Has a pressure space. The sequence circuit has an air operated two-channel spool valve, and a speed control valve in which a check valve and a flow control valve are combined. The sequence circuit supplies compressed air as damper air to the first pressure space when the gate valve is opened by supply of driving compressed air of one system, and when the driving of the blocking release air cylinder ends, When the first pressure space is set to a damper pressure state, the second pressure space is set to a pressurized state, the opening operation of the rotary air cylinder is started, and the first pressure is immediately before the neutral valve body reaches the valve opening position. When the gate valve is closed by reducing the impact by the air in the space and releasing the supply of the driving compressed air, the first pressure space is set to a damper pressure state, and the second pressure space is set to a non-pressurized state. , The closing operation of the rotary air cylinder is initiated by the biasing force of the sub-detailed portion, and the shock is relieved by the damper air of the second pressure space immediately before the neutral valve body reaches the valve closing position, and the When the rotational operation of the neutral valve body is finished, the blocking operation of the neutral valve body is started by the blocking release air cylinder.

Further, in the gate valve according to the aspect of the present invention, the sequence circuit includes a closed detection shaft (rotation operation end detection switch valve), and the neutral valve body may be operated to cancel blocking.

In the gate valve according to the aspect of the present invention, it has a normally closed structure, and the operation of releasing the blocking of the neutral valve body and the rotation operation of the neutral valve body by supplying and releasing one system of driving compressed air in the sequence circuit. It can be operated sequentially, and the impact caused by the operation of the gate valve can be alleviated by the damper air in the first pressure space, and the generation of particles can be prevented.

According to the gate valve according to the aspect of the present invention, the generation of particles due to impact caused by the operation of the gate valve is prevented, the space of parts is saved, and operation is possible only by supplying compressed air for driving of one system, and high It is possible to obtain an effect of providing a gate valve having a normally closed structure capable of achieving a reliable gate operation and reducing the weight of the movable valve portion.

1 is a cross-sectional view showing the configuration of a gate valve according to a first embodiment of the present invention.
[Fig. 2] Fig. 2 is a longitudinal sectional view showing the configuration of a gate valve according to the first embodiment of the present invention, and is a diagram showing a case where the valve body is disposed in a retractable position.
Fig. 3 is an enlarged view showing a main part of a member positioned in the vicinity of the ring-shaped air cylinder in Fig. 2.
Fig. 4 is a longitudinal sectional view showing the configuration of a gate valve according to the first embodiment of the present invention, and is a diagram showing a case where the valve body is disposed in the valve closing position.
Fig. 5 is an enlarged view showing a main part of a member located in the vicinity of the main spring in Fig. 4.
[Fig. 6] Fig. 6 is a longitudinal sectional view showing the configuration of a gate valve according to the first embodiment of the present invention, and showing a case where the valve body is disposed in the retracted position.
Fig. 7A is an enlarged view showing a main part of a member located in the vicinity of a rotation shaft and a fluid path ring in the gate valve according to the first embodiment of the present invention, and is a cross-sectional view along the radial direction of the rotation shaft.
Fig. 7B is an enlarged view showing a main portion of a member located in the vicinity of the rotation shaft and the fluid path ring in the gate valve according to the first embodiment of the present invention, and is a cross-sectional view along the axis direction of the rotation shaft.
Fig. 8 is a cross-sectional view (extended position) showing a rotation shaft drive mechanism according to the first embodiment of the present invention.
9 is a cross-sectional view (abbreviated position) showing a rotation shaft drive mechanism according to the first embodiment of the present invention.
Fig. 10 is an enlarged cross-sectional view of an essential part showing a lock member and a sliding bearing.
[Fig. 11] Fig. 11 is an enlarged cross-sectional view of an essential part showing an engaging portion of a lock member and a pinion.
[Fig. 12A] It is an enlarged view showing the main part of the engaging portion of the rotation shaft and the neutral valve body, and is a cross-sectional view along the radial direction of the rotation shaft.
[Fig. 12B] It is an enlarged view showing the main part of the engagement part of a rotation shaft and a neutral valve body, and is a sectional view along the axial direction of a rotation shaft.
[Fig. 13] It is an enlarged view showing a main part of a member located in the vicinity of a connection pin.
14 is a circuit diagram showing a drive sequence mechanism according to the first embodiment of the present invention.
Fig. 15 is a diagram showing a state of pressure in the drive sequence mechanism shown in Fig. 14;
Fig. 16 is a diagram showing a pressure state in the drive sequence mechanism shown in Fig. 14;
Fig. 17 is a diagram showing a state of pressure in the drive sequence mechanism shown in Fig. 14;
Fig. 18 is a diagram showing a pressure state in the drive sequence mechanism shown in Fig. 14;
19 is an enlarged view showing a main part of a member located in the vicinity of the fastening member according to the first embodiment of the present invention.
Fig. 20 is a cross-sectional view showing the configuration of a gate valve according to a second embodiment of the present invention.
Fig. 21 is a longitudinal sectional view showing the configuration of a gate valve according to a second embodiment of the present invention, and is a diagram showing a case where the valve body is disposed at the retractable position FREE.
[FIG. 22] It is an enlarged view showing the main part along the line segment AO in FIG. 20, and is a figure which shows the case where the valve body is arrange|positioned at the retractable operation|movement position (FREE).
Fig. 23 is an enlarged view showing the main part along the line segment BO in Fig. 20, and is a view showing a case where the valve body is disposed at the retractable position FREE.
[FIG. 24] It is an enlarged view showing the main part along the line segment CO in FIG. 20, and is a figure which shows the case where the valve body is arrange|positioned in the retractable operation possible position (FREE).
[FIG. 25] It is an enlarged view showing the main part of sub-detail C in FIG. 21, and is a figure which shows the case where the valve body is arrange|positioned in the retractable operation|movement position FREE.
26 is a longitudinal sectional view showing the configuration of a gate valve according to a second embodiment of the present invention, showing a case where the valve body is disposed in the valve closed position (positive pressure or no differential pressure) It is a drawing.
Fig. 27 is a longitudinal sectional view showing the configuration of a gate valve according to a third embodiment of the present invention.

Hereinafter, a gate valve according to a first embodiment of the present invention will be described based on the drawings.

In addition, in each drawing used for the following description, in order to make each constituent element a size recognizable on the drawing, the dimensions and ratios of each constituent element are suitably different from the actual ones.

The technical scope of the present invention is not limited to the embodiments described below, and various changes can be added without departing from the spirit of the present invention.

(First embodiment)

1 is a plan view showing the configuration of a gate valve according to the present embodiment. 2 is a longitudinal sectional view showing the configuration of a gate valve according to the first embodiment of the present invention, and is a diagram illustrating a case where the valve body is disposed in a retractable position. Fig. 3 is an enlarged view showing a main part in a region adjacent to the neutral valve part and the first movable valve part shown in Fig. 2, and in the vicinity of the first sub-detailed portion and the second sub-detailed portion. 4 is a longitudinal sectional view showing the configuration of the gate valve according to the present embodiment, and is a diagram illustrating a case where the neutral valve body is disposed at the valve closing position. FIG. 5 is an enlarged view showing a connection portion of a neutral valve portion and a first movable valve portion shown in FIG. 4, and a main portion in a region adjacent to the first sub-detail and the second sub-detail. 6 is a longitudinal sectional view showing the configuration of a gate valve according to the first embodiment of the present invention, and is a diagram showing a case where the valve body is disposed in a retracted position. Fig. 7A is an enlarged view showing a main part of a member located in the vicinity of a rotation shaft and a fluid path ring in the gate valve according to the first embodiment of the present invention, and is a cross-sectional view along the radial direction of the rotation shaft. Fig. 7B is an enlarged view showing a main part of a member located in the vicinity of a rotation shaft and a fluid path ring in the gate valve according to the first embodiment of the present invention, and is a cross-sectional view along the axial direction of the rotation shaft.

[Pendulum type gate valve]

The gate valve 1 according to the first embodiment is a pendulum-shaped slide valve, as shown in FIGS. 1 to 6.

The gate valve 1 according to the present embodiment includes a valve box 10 provided with a first opening 12a and a second opening 12b facing each other, and a switching portion passing through the valve box 10. ) As a rotation shaft 20, a connection member 91 fixed to the rotation shaft 20, a neutral valve portion 30 connected to the rotation shaft 20 through the connection member 91, and the rotation shaft 20 The movable valve part 40 connected to the neutral valve part 30 by making it movable in the axial direction and the movable valve part 40 along the thickness direction of the movable valve part 40 are applied by applying a force to the movable valve part 40 to move. The main spring (first sub-detail) 70 to increase the thickness of the valve part 40, and a drive that can be extended in the opposite direction to the direction in which the force of the main spring 70 is applied (付勢) A dragon ring-shaped air cylinder (clog release air cylinder) 80 and an auxiliary spring for position regulation (3rd sub-detail) for arranging the movable valve part 40 at a position close to the center position of the valve box 10 It has 90.

The neutral valve part 30 and the movable valve part 40 constitute the neutral valve body 5. Moreover, the movable valve part 40 is comprised by the movable valve plate part (second movable valve part) 50 and the movable valve frame (first movable valve part) 60. A flow path H is set from the first opening 12a toward the second opening 12b. In the following description, the direction along the flow path H can be referred to as the flow path direction H.

When the rotation shaft 20 rotates in the direction indicated by the symbol A1 (the direction intersecting the direction of the flow path H), the neutral valve portion fixed to the rotation shaft 20 through the connection member 91 along this rotation ( 30) Rotate along direction A1. In addition, since the movable valve part 40 is connected to the neutral valve part 30 to be slidable only in the thickness direction, the movable valve part 40 is integrated with the neutral valve part 30. Rotate.

By rotating the neutral valve part 30 in this way, the flow path consisting of a position corresponding to the first opening 12a from the retracting position E1 consisting of the hollow part 11 in which the flow path H is not installed The movable valve part 40 moves in a pendulum motion at the valve closing position E2 of (H).

And, by acting in the direction in which the main spring 70 extends, when the operation of increasing the thickness of the movable valve part 40 in the flow path H direction (valve closing operation), as described later , The seal part 61 of the movable valve frame 60 and the reaction force transmission part 59 of the movable valve plate part 50 press down the inner surface 15a and the inner surface 15b of the valve box 10, respectively. As a result, the movable valve part 40 closes the flow path H.

Conversely, by the action of the ring-shaped air cylinder (second sub-detail) 80, the pressing force of the ring-shaped air cylinder 80 is greater than that of the main spring 70, and the flow path H direction As a result, the thickness of the movable valve unit 40 is contracted. As a result, the front and rear surfaces of the movable valve portion 40 are separated from the inner surface 15a and the inner surface 15b of the valve box 10 (release operation). After that, the rotation shaft 20 rotates in the direction indicated by the symbol A2 (retract operation), and along this rotation, the neutral valve portion 30 and the movable valve portion 40 also rotate in the direction A2.

By this releasing operation and the retracting operation, the movable valve unit 40 retracts from the valve opening/closing position to the retracted position, and a valve opening operation is performed in which the movable valve unit 40 enters a valve open state.

[Valve box (10)]

The valve box 10 is constituted by a frame having a hollow portion 11. A first opening 12a is provided on the upper surface of the frame, and a second opening 12b is provided on the lower surface of the frame.

The gate valve 1 is inserted between a space in which the first opening 12a is exposed (a first space) and a space in which the second opening 12b is exposed (a second space). The gate valve 1 divides a flow path H connecting the first opening 12a and the second opening 12b, that is, a flow path H connecting the first space and the second space (closed And), opening this state of sharing (connecting the first and second spaces).

In the hollow portion 11 of the valve box 10, the rotary shaft 20, the neutral valve portion 30, the movable valve portion 40, the main spring (first sub-detail) 70, and a ring-shaped air cylinder 2 sub-details) 80 and auxiliary springs (third sub-details) 90 are installed.

[Rotation shaft (20), fluid path ring (17, 18)]

The rotation shaft 20 extends in a substantially parallel state with the flow path H, passes through the valve box 10 and is rotatably installed.

The connecting member 91 is fixed to this rotating shaft 20. This connecting member 91 is, for example, a substantially flat plate-shaped member. As shown in FIG. 7B, it is fixed to one end 20a of the rotation shaft 20 by a screw 92. A protrusion 93 is formed on one end side of the connection member 91 in the flow path direction H. In other words, the protrusion 93 is widening in a direction orthogonal to the flow path direction H, and the connecting member 91 has a substantially T-shaped cross-sectional shape.

As shown in Figs. 7A and 7B, the rotating shaft 20 passes the valve box 10 to the casing 14 fixedly installed on the valve box 10 through bearings 16A and 16B made of bearings or the like. It penetrates and is supported so that rotation is possible. The bearings 16A and 16B are arranged as far apart as possible in the direction along the axis LL of the rotation shaft 20.

The casing 14 is fixed so as to penetrate the valve box 10 in a closed state. The casing 14 is a rotating shaft through a seal casing 14A through which the rotating shaft 20 is rotated in a closed state, and bearings 16A and 16B connected to the seal casing 14A and provided on the inner circumference side thereof. It has a cylindrical casing 14B which supports (20) rotatably, and a cover casing 14C which blocks one end of the cylindrical casing 14B. The seal casing 14A, the cylindrical casing 14B, and the lid casing 14C are fixedly connected to each other. A lid 14D is provided in the lid casing 14C to close an open hole through which the rotation shaft 20 can be inserted.

In order to seal the inside of the valve box 10 in the seal casing 14A, seal portions 14Aa, 14Ab, and 14Ac, and an intermediate air chamber 14Ad, which is an atmospheric pressure space (a void), are provided.

On the inner circumferential side of the cylindrical casing 14B, the fluid path rings 17 and 18 slidably contact the outer circumferential surface 20b of the rotary shaft 20 at a position between the bearings 16A and 16B in the LL direction along the axis. ) Is fixed.

At the center position between the fluid path rings 17 and 18 on the outer circumferential surface 20b of the rotation shaft 20, a rotation shaft drive mechanism 100 (see Fig. 8) for driving (rotating) this rotation shaft 20 is configured. The pinion 21 is fixed. The pinion 21 is housed in an inner space 22h of a casing 14B that can be sealed from the outside, and a round bar-shaped lock member 22 is connected to the pinion 21. In FIG. 7B, the lock member 22 reciprocates in the direction of the depth of the paper, so that the lock member 22 rotates the rotation shaft 20 via the pinion 21.

[Rotary shaft drive mechanism 100]

8 is a cross-sectional view (extended position) showing the rotation shaft drive mechanism 100. 9 is a cross-sectional view (abbreviated position) showing the rotation shaft drive mechanism 100. 10 is an enlarged cross-sectional view of an essential part showing a lock member and a sliding bearing. Fig. 11 is an enlarged cross-sectional view of a main part showing an engaging portion of a lock member and a pinion.

The rotation shaft drive mechanism 100 for rotating the rotation shaft 20 includes a pinion 21 fixed to the rotation shaft 20, and a lock member 22 having a lock tooth 22a engaged with the pinion 21 Have.

Further, the rotation shaft drive mechanism 100 includes a rotation drive air cylinder 110 (rotary air cylinder) and a sub-detail 120 for reciprocating the lock member 22. By the rotation drive air cylinder 110 and the sub-detail 120, the lock member 22 is capable of linearly reciprocating motion along the axis (longitudinal direction) C.

As shown in Figs. 8 and 9, the lock member 22 is connected to a piston 112 that reciprocates with an axis line in a direction orthogonal to the axis line of the rotation shaft 20. The piston 112 is stored in a cylindrical cylinder body (casing) 111 and constitutes a rotationally driven air cylinder (drive means, rotary air cylinder, cylinder) 110. The lock member 22 connected to the rotational drive air cylinder 110 is compressed into an elongated pressure space (second pressure space) 113 that is the opposite side of the piston 112 with respect to the lock member 22. It expands by supplying air (driving gas). Similarly, the lock member 22 contracts when the piston 112 applied with the force by the sub-detail 120 moves.

The lock member 22 is inside a lock storage space (space) 22d, 22g, 22m installed so as to extend in a direction orthogonal to the rotation shaft 20 inside the casing 14Bb integrally with the casing 14B. It is housed so that it can move in the axial direction. These spaces 22d, 22g, and 22m have a diameter dimension larger than the diameter dimension of the lock member 22. Inside the spaces 22d, 22g, and 22m, the lock members 22 are supported so as to be reciprocally movable by sliding bearings (bearings) 115B and 115C provided so as to cover the outer circumferences of two places.

The bearings 115B and 115C are disposed on both sides of a position where the pinion 21 and the lock member 22 engage in the axial direction of the lock member 22. Both of the bearings 115B and 115C are formed integrally with the casing 14Bb and have an outer peripheral surface that is reduced so as to be smaller than the diameter dimension of the space 22g, and the bearings 115B and 115C have a lock member 22 ) Is in close contact with the outer circumferential surface.

On one side of the outer circumferential surface of the lock member 22 in the circumferential direction, a plurality of lock teeth 22a engaged with the pinion 21 are provided adjacent to each other in the axial direction. On the outer circumferential surface of the lock member 22, a communication groove 116 is provided in a position different from the location where the lock teeth 22a are provided in the circumferential direction. The communication groove 116 communicates with the space 22d and the space 22g located on both sides of the bearing 115B with respect to the axial direction of the lock member 22.

As shown in FIG. 10, the communication groove 116 communicates with the space 22g and the space 22m located on both sides of the bearing 115C with respect to the axial direction. The length of the communication groove 116 is a state of communication between the space 22d and the space 22g located on both sides of the bearing 115B even when the lock member 22 reciprocates, and the bearing 115C It is set so as to maintain a communication state in the space 22g and the space 22m located on both sides of the.

The stretching pressure space 113 is for expansion from the outside of the rotational drive air cylinder 110 through a stretching vent (supply path) 114 through a sequence circuit SQ described later. It is connected to a supply source for supplying compressed air.

In the reduced pressure space (first pressure space) 22c, a supply path 22j for supplying compressed air from the outside of the rotation drive air cylinder 110 through a sequence circuit SQ described later from a supply source is provided. It is being connected. Compressed air supplied from the supply path 22j functions as damper air that serves as a damper pressure upon contraction.

Along the path from the reduced pressure space 22c to the compressed air supply source, the supply path (reduction vent) 22j is a space 22d in which the lock member 22 is accommodated, and a reduced bearing 115B ), the communication groove 116 and the partial space corresponding to the lock tooth 22a, the space 22g expanded between the bearing 115B and the bearing 115C, and the pinion 21 are accommodated. Through the inner space 22h and the inner space 22h of the casing 14B, it is connected to the outside of the casing 14B.

The rotation shaft 20 supported against the casing 14 by the bearings 16A and 16B is driven by a lock member 22 that reciprocates by a rotation drive air cylinder (rotation drive device), and this lock member ( It rotates together with the pinion 21 engaged with 22).

In addition, during the contraction operation of the rotation drive air cylinder (drive means, rotation air cylinder) 110 and while maintaining the reduction position Pb of the lock member 22, the reduction pressure space 22c , The storage space (22d), the space (22g) in which the lock member (22) is accommodated, the communication groove (116) positioned so as to correspond to the reduced bearing (115B) and the locking position (22a) Corresponding space (22g), spaces (22d, 22g, 22m) expanding regardless of the positions of the bearings (115B) and (115C), the inner space (22h) of the casing (14B) in which the pinion (21) is accommodated The pressurized state may be maintained in any of the internal space 22h and the supply path 22j externally connected to the casing 14B.

The rotation drive air cylinder 110 causes the lock member 22 to reciprocate by expanding and contracting. The rotation drive air cylinder 110 is formed integrally with a casing 14B that houses the rotation shaft 20. The rotational drive air cylinder 110 includes a cylindrical cylinder body 111, an inner space 111b inside the cylinder body 111, and a piston 112 slidably accommodated in the inner space 111 Are doing.

In the rotational drive air cylinder 110, at a position on the opposite side of the lock member 22 of the cylinder body 111, the sub-details 120 are provided in series in the axial direction.

The sub-detailed portion 120 is formed integrally with the cylinder body 111 and includes a spring member 120s disposed outside the cylindrical cylinder body 111 with one end side 111a closed. The spring member 120s is connected to the piston 112 and the shaft 122s so as to transmit a vice force in the direction of expansion and contraction to the piston 112.

In the inner space 111b of the rotational drive air cylinder 110, it is divided into one end side 111a of the cylinder body 111 and one side side 112a of the piston 112, and the capacity by the movement of the piston 112 This variable increasing pressure space 113 is formed. Further, to the cylinder body 111, an extended vent (vent) that communicates with the stretched pressure space 113 and supplies compressed air for expansion drive to the stretched pressure space 113 through a sequence circuit (SQ) to be described later. (114) is being formed. A pump, for example, may be connected to the vent 114 as a driving pressure air supply source provided outside the gate valve 1.

The piston 112 is accommodated in the inner space 111b of the cylinder body 111 so as to be capable of reciprocating linearly along the axis (longitudinal direction) C. The piston 112 having this configuration is slidable between the extended position Pa (Fig. 8) and the reduced position Pb (Fig. 9). In the extended position Pa (FIG. 8), the extended pressure space 113 is expanded to the maximum, and the piston 112 is at a position farther from the one end 111a in the inner space 111b of the cylinder body 111 have. In the reduced position Pb (FIG. 9), the reduced pressure space 22c on the lock member 22 side of the piston 112 is expanded to the maximum, the increased pressure space 113 is reduced to the minimum, and the most end side There is a piston 112 in the position approaching (111a).

In addition, in FIG. 9, illustration of the lock member 22 is abbreviate|omitted.

Further, a protrusion 112c is formed on one side 112a (first surface) of the piston 112. On the one end side 111a of the cylinder body 111, a concave portion 111c into which the protrusion 112c is pinched when the piston 112 is in the reduced position Pb is formed. The outer diameter of the protrusion 112c and the inner diameter of the recess 111c are approximately the same, and when the outer surface of the protrusion 112c and the inner surface of the recess 111c slide, the inside of the recess 111c and the stretched pressure space 113 are airtight. The outer diameter of the protrusion part 112c and the inner diameter of the concave part 111c are set so as to be close to the state. One end side of the vent 114 is formed at a position exposed by this recessed portion 111c.

The shaft 122s is fixed to the central position of the protrusion 112c on one side 112a of the piston 112.

Further, the locking member 22 is fixed to the other surface side 112b (second surface) of the piston 112 via a protrusion (connection) 112d formed in the same manner as the protrusion 112c. The outer diameter of the connection part 112d and the inner diameter of the lock storage space 22d are approximately the same, and when the outer surface of the connection part 112d and the inner surface of the lock storage space 22d slide, the interior of the lock storage space 22d The outer diameter of the connection part 112d and the inner diameter of the lock storage space 22d are set so that the and reduction pressure space 22c may come close to the airtight state. One end side of the supply path (reduced vent) 22j may be formed at a position exposed from the lock storage space 22d.

In the protrusion 112c of the piston 112, the cross-sectional area continuously changes along the reciprocating direction of the piston 112, that is, along the axis (longitudinal direction) C, and the air in the increased pressure space 113 is vented ( A buffer groove (reduced buffer groove) 118 for gradually venting toward 114 is formed.

Specifically, the buffer groove 118 is formed in the protrusion 112c of the piston 112, and has a cross-sectional area from the one side 112a of the piston 112 toward the one end 111a of the cylinder body 111 It consists of a groove inclined with respect to the axis line (longitudinal direction) C so that it may be widened.

In the protrusion 112d of the piston 112, the cross-sectional area continuously changes along the reciprocating direction of the piston 112, that is, along the axis (longitudinal direction) C, and the air in the reduced pressure space 22c is transferred to the space ( A buffer groove (extension buffer groove) 119 for gradually ventilating toward 22g) is formed.

The buffer groove (extension buffer groove) 119 is formed in the protrusion 112d of the piston 112, similarly to the buffer groove 118, and the locking member 22 from the other surface side 112b of the piston 112 It consists of a groove inclined with respect to the axis line (length direction) C so that a cross-sectional area may become wide toward the space 22d on the side.

In the rotary drive air cylinder 110, the inner space 111b of the cylinder body 111 is through a shaft hole 111s penetrating at a central position in the radial direction in the expansion/contraction axial direction of the piston 112. It communicates with the outside of the one end side 111a of the cylinder body 111. Inside the shaft hole 111s, the shaft 122s is capable of reciprocating motion. Thereby, the cylinder 110 and the sub-detailed part 120 interlock.

The cylindrical side surfaces of the piston 112 and the inner space 111b, and the inner surfaces of the shaft 122s and the shaft hole 111s are all slidable to each other while maintaining a sealed state by a sealing member such as an O-ring. Is being sealed.

At the end of the shaft 122s that is opposite to the piston 112, an enlarged fixing portion 122 is provided. Between the outer side of the one end side 111a of the cylinder main body 111 and the other surface 122b of the fixing part 122, the spring member 120s which can be extended and contracted to act on an auxiliary force is attached.

As shown in Figs. 8, 9 and 10, the lock member 22 is formed in a circular rod shape in a cross section perpendicular to the axis (longitudinal direction) C. And, on a part of the circumferential surface of this round rod-shaped lock member 22, the lock teeth 22a are arranged in a predetermined pitch along the axis line (length direction) C.

Sliding bearings 115B and 115C for supporting the lock member 22 in a slidable manner are disposed on both sides of the engaging portion S of the pinion 21 fixed to the rotation shaft 20 and the lock tooth 22a. . In the sliding bearings 115B and 115C, as shown in Fig. 10, an inner peripheral surface 115a having a circular cross section that is slightly larger than the cross section of the lock member 22 is formed. The outer circumference of the lock member 22 is in contact with the inner circumferential surface 115a, and the inner circumferential surface 115a supports the round rod-shaped lock member 22 so as to be slidable along the axis (length direction) C.

In addition, as shown in Figs. 8 and 10, on the surface (circumferential surface) of the lock member 22, a communication groove (groove) 116, as described above, is provided with the sliding bearing 115B in the axis line (C) direction. It is formed so as to extend to both outer position sides of the sliding bearing 115C. In addition, in the casing 14B for accommodating the lock member 22, a boss (not shown) that is pinched into the communication groove 116 is formed. It is also possible to prevent the lock member 22 from rotating around the axis C by engaging the communication groove 116 and the boss. Thereby, when the lock member 22 reciprocates, it does not distort around the axis line C.

11 is an explanatory diagram showing the arrangement positions of the sliding bearings 115B and 115C. The sliding bearings 115B and 115C are the action lines (extended lines) L1 and L2 of the lock member 22 formed in the engaging portion S between the pinion 21 and the lock tooth 22a, and the lock member 22 It is preferable that it is arranged in a direction away from the engaging portion S than the intersection points P1 and P2 of the axial center (axis center line) C.

That is, the point where the action lines L1 and L2, which are the moving directions of the contact points between the two engaging teeth, the pinion 21 and the lock teeth 22a, intersect the axial center (axis center line) C of the lock member 22, respectively, is the intersection P1 When, P2, the sliding bearings 115B and 115C are arranged so that the center line Q of the sliding bearings 115B and 115C is outside the intersection points P1 and P2, respectively.

By setting the arrangement positions of the sliding bearings 115B and 115C as described above, the sliding bearings 115B and 115C are external force generated by the rotation of the pinion 21, that is, a force in the direction away from the pinion 21 There is nothing to receive. Thereby, the sliding bearing 115B, 115C prevents stress in a direction perpendicular to the axis center (axis center line) C on the contact portion between the sliding bearing 115B, 115C and the lock member 22, , By reducing the frictional force between the sliding bearings 115B and 115C and the lock member 22, it is possible to hold and hold the lock member 22 so as to be able to slide smoothly.

On the one end side 111a of the cylinder body 111, a contact type limiter switch valve (rotation end detection switch valve) cdS that operates when the piston 112 is in the reduced position Pb may be provided. . The limiter switch valve cdS may be operated, for example, by relying on the pressure supply of the blocking release air cylinder 80 in the sequence circuit SQ to the output point FR so as to be possible at the terminal position of the piston 112. .

In addition, in FIG. 9, in order to explain the operation|movement of the air cushion by the buffer groove|channel 118 etc. mentioned later, the state just before reaching the reduction position Pb is shown. For this reason, the limiter switch valve cdS did not appear as an operating state.

According to the rotation shaft drive mechanism 100 having the above configuration, for example, when the piston 112 is at the reduced position Pb shown in FIG. 9, the lock member 22 fixed to the piston 112 The rotation shaft 20 interlocked (rotated) through the pinion 21 is rotated only in the counterclockwise rotation direction in FIG. 8 in the rotation range of the rotation shaft 20. In the position of this rotation shaft 20, the movable valve part 40 is placed in the valve closed position E2 (FIG. 1) of the flow path H through the neutral valve part 30 fixed to the rotation shaft 20.

On the other hand, when moving the piston 112 from this reduced position (Pb) to the increased position (Pa) shown in FIG. 8, the inner surface of the cylinder body 111 and one side (112a) of the piston 112 Compressed air for driving is sent from the vent 114 into the interior of the increased pressure space 113.

Then, as the internal pressure of the increased pressure space 113 increases, the force generated by the internal pressure becomes greater than the sub-force of the spring member 120s, and the piston 112 moves along the axis (longitudinal direction) C, the cylinder body ( It moves (sliding) in the direction away from the one end side 111a of 111, and the stretching pressure space 113 is expanded.

At this time, the excess air inside the reduced pressure space 22c is from the reduced pressure space 22c, a communication groove disposed at a position corresponding to the space 22d for accommodating the lock 22 and the bearing 115B. Excluding the damper air through 116 and the partial space corresponding to the lock tooth 22a, the inner space 22g of the casing 14Bb, the inner space 22h of the casing 14B, and the vent 22j. It is discharged to the outside. In addition, when the movable valve part 40 approaches the retracted position E1, the air in the reduced pressure space 22c passes through the buffer groove (elongated buffer groove) 119 and the control buffer passage 119a to the space 22g. It is discharged gradually toward the direction, and an air damper effect (air cushion effect) can be obtained.

In this case, in the sub-detailed portion 120, the spring member 120s connects to the shaft 122s in a direction from the stretched position Pa shown in Fig. 8 to the reduced position Pb shown in Fig. 9 Since a force is applied to the piston 112 that has been formed, it is possible to realize a normal close in which the movable valve portion 40 becomes the valve closing position E2 (Fig. 1).

When the piston 112 moves to the extended position (Pa) in a direction away from the one end side 111a of the cylinder body 111, the lock member 22 fixed to the piston 112 matches the lock tooth 22a. The pinion 21 to be physically rotated in the clockwise rotation direction in FIG. 8. Thereby, the rotation shaft 20 is also rotated in the clockwise direction, and the movable valve part 40 is moved to the retracted position E1 of the flow path H through the neutral valve part 30 fixed to the rotation shaft 20. Move to the pendulum movement to Fig. 1).

In addition, when the piston 112 is in the extended position Pa shown in FIG. 8 and the movable valve portion 40 is at the retracted position E1 (FIG. 1) of the flow path H, this extended position ( When moving the piston 112 from Pa) (FIG. 8) to the reduced position Pb (FIG. 9), an air cushion action is caused by the residual pressure in the increased pressure space 113.

By the force of the spring member (120s), the piston (112) connected to the shaft (122s), along the axis (length direction) (C), in a direction closer to the one end (111a) of the cylinder body (111). It moves (sliding), and the pressure space 113 is reduced.

At this time, the excess air inside the increased pressure space 113 is discharged to the outside from the increased pressure space 113 through the vent 114, but when the piston 112 approaches the valve closing position E2 , Air inside the increased pressure space 113 is discharged to the outside through the buffer groove 118. Thereby, the movement of the piston 112 to the reduced position Pb is smoothly changed.

As a result, in the sub-detailed portion 120, as will be described later, the piston 112 connected to the shaft 122s in a direction from the stretched position Pa shown in Fig. 8 toward the reduced position Pb shown in Fig. 9 During this movement, the inner surface of the cylinder body 111 and the piston 112 can be prevented from violently abutting and colliding during the closing operation at the valve closing position E2 (FIG. 1).

In the reduced pressure space 22c, an inner space 22h in which the pinion 21 is accommodated from the vent 22j, an inner space 22g in which the lock 22 is accommodated, and a position corresponding to the bearing 115B. Compressed air is supplied through the space 22g and the storage space 22d corresponding to the engaging positions of the communication groove 116 and the lock teeth 22a.

At this time, since the compressed air can be sealed in a state close to blocking by the control pin 119c of the control buffer passage 119a, the interior of the communication groove 116 corresponding to the bearing 115C, the space ( 22d) is in a pressurized state lower than the pressure in the reduced pressure space 22c.

When the piston 112 moves to the reduced position Pb in the direction closer to the one end side 111a of the cylinder body 111, the lock member 22 fixed to the piston 112 is formed with the lock tooth 22a. The engaging pinion 21 is rotated in the counterclockwise rotation direction in FIG. 8. Thereby, the rotation shaft 20 is also rotated in the counterclockwise rotation direction, and the movable valve part 40 is moved to the valve closed position E2 of the flow path H through the neutral valve part 30 fixed to the rotation shaft 20. ) (Fig. 1) to move to the pendulum movement.

In this way, by varying the internal pressures of the increased pressure space 113 and the reduced pressure space 22c in the cylinder body 111 constituting the rotary shaft drive mechanism 100, by the biasing force of the spring member 120s, The piston 112 is moved linearly between the extended position Pa (Fig. 8) and the reduced position Pb (Fig. 9). Thereby, the rotation shaft 20 is rotated through the lock member 22 and the pinion 21, and the movable valve part 40 is moved to the retracted position E1 and the valve closed position E2 with respect to the flow path H. It can be moved between Figure 1).

Further, by the sub-detailed portion 120, it is possible to realize a normal close at the valve closing position E2 (Fig. 1).

In addition, in the movement between the extended position Pa and the reduced position Pb of the piston 112 as described above, the movement of the piston 112 to the reduced position Pb is smoothly changed by the buffer groove 118. . Similarly, it is possible to smoothly change the movement of the piston 112 to the extended position Pa by the buffer groove 119.

The buffer groove 118 will be described.

When moving the piston 112 from the extended position (Pa) to the reduced position (Pb), the sudden stop of the piston 112 due to the rapid contraction of the increased pressure space 113, that is, the lock member 22 and the pinion 21 ), the movement to the reduced position (Pb) of the piston 112 is smoothed by the buffer groove 118 formed in the protrusion 112c of the piston 112 so that a large stress is not applied to the engaging portion (S) of the Change.

For example, the compressed air for driving is supplied to the reduced pressure space 22c, the internal pressure of the reduced pressure space 22c is brought into a damper pressure state, and the piston 112 is further driven by the vice force of the spring member 120s. A case where) is moved toward the reduction position (Pb) will be described. In this case, when the protrusion 112c moves to a position where it is pushed into the recess 111c of the cylinder body 111, it flows into the recess 111c from the increased pressure space 113 around the protrusion 112c, and the vent 114 ) The flow of air being discharged is blocked. As a result, the internal pressure of the increased pressure space 113 widening to the periphery of the protrusion 112c suddenly increases (because the increase pressure space 113 is compressed), so that the moving speed of the piston 112 rapidly decreases. The force works.

However, by the buffer groove 118 formed in the protrusion 112c, the air in the increased pressure space 113 is guided to the ventilation hole 114 through the buffer groove 118. That is, the increased pressure space 113 communicates with the vent 114 through the buffer groove 118.

In addition, the buffer groove 118 is formed so that its cross-sectional area is widened from the one side 112a of the piston 112 toward the one end 111a of the cylinder body 111, so that the piston 112 is reduced in position ( As it approaches Pb) (Fig. 9), the cross-sectional area of the buffer groove 118, that is, the opening area, decreases. Accordingly, immediately before the piston 112 reaches the reduced position Pb, the flow rate of the air from the increased pressure space 113 to the vent 114 gradually narrows (reduces), so that the increased pressure space 113 ), the internal pressure decreases gradually. Thereby, the piston 112 can be stopped at the reduced position Pb gently. Therefore, it prevents the sudden stop of the piston 112 due to the rapid contraction of the increasing pressure space 113, and does not apply a sharply large stress to the engaging portion S (Fig. 11) of the lock member 22 and the pinion 21. It becomes possible to stop smoothly without.

In this way, by preliminarily sending the compressed air for driving as damper air and setting it to the damper pressure state, the movement of the piston 112 to the extended position Pa is smoothly changed by the buffer groove 119. Next, a case where compressed air for driving is supplied to the increased pressure space 113 and the internal pressure of the increased pressure space 113 is increased to move toward the extended position Pa of the piston 112 will be described. In this case, when the protrusion 112d moves to a position where it squeezes into the space 22d of the casing 14Bb, it flows into the space 22d from the reduced pressure space 22c around the protrusion 112d and enters the space 22h. ), and the flow of air discharged from the vent 22j is blocked. As a result, the internal pressure of the reduced pressure space 22c widening to the periphery of the protrusion 112d suddenly increases (the reduced pressure space 22c is compressed), and the moving speed of the piston 112 decreases rapidly. Force works.

However, by the buffer groove 119 formed in the protrusion 112d, the air in the reduced pressure space 22c is guided through the buffer groove 119 to the space 22d communicating with the vent 22j.

That is, the reduced pressure space 22c communicates with the space 22d through the buffer groove 119.

In addition, the buffer groove 119 is formed so that its cross-sectional area is widened from one side 112b of the piston 112 toward the other end side 14Ba of the casing 14Bb, so that the piston 112 is stretched position (Pa ) (Fig. 8), the cross-sectional area of the buffer groove 119, that is, the opening area, decreases. Thereby, just before the piston 112 reaches the extended position Pa, the flow rate of the air from the reduced pressure space 22c to the space 22d gradually narrows (reduces), so that the damper pressure is achieved. The decrease in the internal pressure of the reduced pressure space 22c gradually decreases. Thereby, the piston 112 can be stopped at the gently extended position Pa. Therefore, it prevents sudden stop of the piston 112 due to the rapid contraction of the reduced pressure space 22c, and does not apply a sharply large stress to the engaging portion S (Fig. 11) of the lock member 22 and the pinion 21. It becomes possible to stop smoothly without.

In the rotational drive air cylinder 110, in addition to the above buffer grooves 118 and 119, the piston 112 moves immediately before reaching the extended position Pa, or the piston 112 moving from the extended position Pa. A control buffer passage 119a for adjusting the moving speed of the piston 112 immediately after the start is provided.

One end of the control buffer passage 119a is opened to the space 22d at a position blocked by the protrusion 112d when the piston 112 is at the extended position Pa (FIG. 8). The other end of the control buffer passage 119a is formed of a passage 119a that is opened to the other surface side 14Ba of the casing 14Bb.

A control hole 119b is provided in the flow path 119a. The control hole 119b extends in a direction intersecting the flow path 119a, communicates with the flow path 119a, and opens to the outside of the casing 14Bb. In the inside of the control hole 119b, a control pin 119c capable of blocking the flow path 119a is provided so as to be slidable in the direction in which the control hole 119b extends.

This control buffer passage 119a is used to control the flow rate of air moving between the reduced pressure space 22c and the space 22d, similarly to the buffer groove 119. Specifically, in the control buffer passage 119a, when the control pin 119c moves inside the control hole 119b, the cross-sectional area of the passage 119a changes depending on the position. Accordingly, the flow rate of the air moving between the reduced pressure space 22c and the space 22d changes. Therefore, in the case where the control buffer passage 119a is opened in the space 22d and the protrusion 112d is pushed into the space 22d of the casing 14Bb, the control pin 119c is Depending on the position, the opening degree of the flow path 119a can be adjusted and the moving speed of the piston 112 can be controlled.

When the cross-sectional area of the flow path 119a is increased by pulling out the control pin 119c, the moving speed of the lock 22, that is, the moving speed of the pendulum motion of the movable valve body 40 (movable valve part) increases. When the cross-sectional area of the flow path 119a is reduced by inserting the control pin 119c, the moving speed of the lock 22, that is, the moving speed of the self-moving movement of the movable valve body 40 decreases.

In particular, when the piston 112 starts to move from the extended position Pa to the reduced position Pb as well as just before the piston 112 arrives at the extended position Pa, that is, the movable valve part 40 This air damper effect resides even when it begins to move in a pendulum motion at the retracted position E1 (FIG. 1) of the flow path H. Thereby, it becomes possible to start and stop the operation smoothly without applying a large stress abruptly to the engaging portion S (FIG. 11) of the lock member 22 and the pinion 21.

In such a cylinder 110, it is possible to perform the swinging operation of the neutral valve body 5 by performing expansion and contraction of the cylinder 110 by simply switching the supply of compressed air to the increased vent 114 and the reduced vent 22j. Do.

The fluid path ring 17 and the fluid path ring 18 have approximately the same inner diameter as the rotation shaft 20. The outer diameter of the fluid path ring 17 located closer to the valve box 10 than the pinion 21 is set larger than the outer diameter of the bearing 16A and smaller than the outer diameter dimension of the pinion 21. The outer diameter of the fluid path ring 18 located closer to the lid 14D than the pinion 21 is set larger than the diameter dimension of the pinion 21. When the rotation shaft 20 supported by the bearings 16A and 16B rotates, the contact position with respect to the fluid path ring 17 and the fluid path ring 18 changes in the circumferential direction.

The fluid path ring 17 is provided with a radial ring path 17c. The radial ring path 17c is a supply path for supplying a driving gas to a ring-shaped air cylinder 80 formed between the movable valve plate portion 50 and the movable valve frame 60 in the second peripheral region 40a ( 41) is a fluid path made up of a part. The radial ring path 17c extends in the radial direction of the fluid path ring 17 and opens to the outer circumferential surface 17a and the inner circumferential surface 17b of the fluid path ring 17. This radial ring path 17c communicates with a path 14Bc penetrating in the radial direction of the cylindrical casing 14B from the outer peripheral surface 17a of the fluid path ring 17.

The fluid path ring 18 is provided with a radial ring path 18c. The radial ring path 18c is connected to the intermediate waiting room 55 (see FIG. 5).

The intermediate waiting room 55 is a double seal portion provided in a ring-shaped air cylinder 80 formed between the movable valve plate portion 50 and the movable valve frame 60 in the second peripheral region 40a. It is provided on the gas supply side than the seal part 51a, 52a of. The radial ring path 18c is a fluid formed as a part of the communication path 42 that releases the driving gas toward the outside of the gate valve 1 when the single seal portions 51b and 52b are broken. It is the path. The radial ring path 18c extends in the radial direction of the fluid path ring 18 and opens to the outer peripheral surface 18a and the inner peripheral surface 18b of the fluid path ring 18. This radial ring path 18c is in communication with a path 14Cc penetrating in the radial direction of the cylindrical casing 14B from the outer peripheral surface 18a of the fluid path ring 18.

In the fluid path ring 17, a groove 17d is provided around the inner circumferential surface 17b, and the groove 17d is surrounded by the outer circumferential surface 20b of the rotation shaft 20, and the circumferential path Is forming.

In the outer circumferential surface 20b of the rotation shaft 20 formed in a position opposite to the groove 17d, a radially axial intra-axial path 27 is opened, and the radially axial intra-axial path 27 is LL along the axis of the rotating shaft 20 It communicates with the axial intraaxial path 25 extending in the direction and opening to the one end surface 20a of the rotation shaft 20.

In the fluid path ring 18, a groove 18d is provided around the inner circumferential surface 18b, and the groove 18d is surrounded by the outer circumferential surface 20b of the rotation shaft 20, and a circumferential path Is forming.

On the outer circumferential surface 20b of the rotation shaft 20 at a position opposite to the groove 18d, a radially axial intra-axial path 28 is opened, and the radially axially axial path 28 is LL along the axis of the rotating shaft 20 It communicates with the axial intraaxial path 26 extending in the direction and opening to the one end surface 20a of the rotation shaft 20.

These axial intraaxial paths 25 and 26 are parallel to each other and parallel to the axis LL. The other end 20c of the rotating shaft 20 in contact with the cover 14D is closed.

Both the axial intraaxial path 25 and the axial intraaxial path 26 are connected to the supply path 41 and the communication path 42 inside the neutral valve unit 30.

In the fluid path ring 17, a seal such as an O-ring slidably seals the opening portion and the groove 17d of the radially axial inner path 27 between the inner circumferential surface 17b and the outer circumferential surface 20b of the rotation shaft 20. Members 17h, 17j, 17k are provided around the periphery.

The fluid path ring 17 has sealing members 17e, 17f such as O-rings that seal the opening portion of the radial ring path 17c and the path 14Bc between the outer peripheral surface 17a and the inner surface of the cylindrical casing 14B. , 17g) are installed around the perimeter.

In the fluid path ring 18, seals such as an O-ring slidably seal the opening portion and the groove 18d of the radially axial inner path 27 between the inner circumferential surface 18b and the outer circumferential surface 20b of the rotary shaft 20. Members 18h, 18j, 18k are provided around.

In the fluid path ring 18, sealing members 18e, 18f such as O-rings that seal the opening portion of the radial ring path 18c and the path 14Cc between the outer peripheral surface 18a and the inner surface of the cylindrical casing 14B. , 18g) are installed around the perimeter.

With the fluid path ring 17 and the fluid path ring 18 having such a configuration, no matter what rotational position the rotating shaft 20 is, the radial direction intra-axial path 27 and the radial direction intra-axial path 28 are in communication. Since the can be maintained, sealing is also good, as will be described later, and the driving fluid can be supplied. In addition, since the supply path 41 and the communication path 42 are independently connected to each other, regardless of the rotation position of the rotary shaft 20, two systems of gases in different pressure states or different states are provided with a valve body ( It becomes possible to control without affecting the inside of 10).

At the same time, since grooves 17d and 18d serving as circumferential paths are provided around the fluid path ring 17 and the fluid path ring 18, the pressure due to the fluid in the grooves 17d and 18d is applied to the rotation shaft 20 ) Acts to round the outer peripheral surface (20b). For this reason, since the pressure acting in the radial direction can be equalized over the entire circumference, the support of the rotating shaft 20 in the bearing 16A and the bearing 16B regardless of the pressure state in such a flow path. You can prevent it from affecting the state.

At the same time, the fluid path ring 17 and the fluid path ring 18 are positioned between the bearing 16A and the bearing 16B, and the distance between the bearing 16A and the bearing 16B supporting the rotating shaft is possible. As long as you can secure. Thereby, when the rotation shaft 20 holds the moment acting on the rotation shaft in the inclined direction in the bearings 16A and 16B, the radial loads received by these bearings 16A and 16B are minimized. It is possible to do so, and thereby the durability of these bearings 16A and 16B can be improved. Alternatively, it is possible to secure the axial length of the rotation shaft 20 while maintaining the required deformation prevention function in the inclined direction of the rotation shaft 20, and the rotation driving air cylinder 110 including the rotation shaft 20 is miniaturized. In addition, the valve can be downsized.

In addition, by adopting the above configuration as the outer diameter dimensions of the bearing 16A and the bearing 16B, the fluid path ring 17, the pinion 21, and the fluid path ring 18, the component configuration is not changed, It is possible to invert the mounting surface of the rotating mechanism portion to the valve box by simply changing the assembly direction of the rotation mechanism, and assemble them to the casing 14.

In the present embodiment, compressed air for driving the air cylinder 80 is not exposed (exposed) to the hollow part 11 inside the valve box 10, and passes through the inside of the rotation shaft 20 to the neutral valve. At the same time as supplying to the sieve 5, it becomes possible to communicate the communication path 42 to the intermediate waiting chambers 55 and 56 to be described later to the outside of the valve box 10 via the inside of the rotation shaft 20.

In the rotation shaft 20, axial intraaxial paths 25 and 26 serving as the supply path 41 and the communication path 42 are provided in parallel, respectively. Further, the fluid path ring 17 and the fluid path ring 18 corresponding to the supply path 41 and the communication path 42 are provided at different positions in the direction along the axis LL of the rotation shaft 20. Thereby, the plurality of paths 25 and 26 can be communicated separately at the same time through the inside of one rotation shaft 20. For this reason, it is possible to form the supply path 41 for driving fluid of the air cylinder 80 and the communication path 42 for intermediate standby for safety only with one rotation shaft 20, and other configurations are not used. Instead, it becomes possible to arrange the supply path 41 and the communication path 42 on the rotation shaft 20.

On the inner circumferential surface 17b of the fluid path ring 17, a groove 17d communicating with the radial ring path 17c is provided between the seal member 17h and the seal member 17j, and the seal member 17j Between the and the seal member 17k, the groove 17p is provided around.

The outer circumferential surface 20b of the rotating shaft 20 facing the groove 17p forms a second intermediate air chamber, which is an atmospheric pressure space (void), and is connected to the outside of the casing by a second communication path 42A. Has become.

The seal member 17j and the seal member 17k function as double seal portions for the groove 17d serving as the supply path 41 in which the driving gas (gas) is present. In this structure, even when the seal member 17j, which is the single seal of the rotating shaft 20, is broken during the pressurization of the air cylinder 80, compressed air (driving gas) is supplied to the groove 17p and the second communication path ( 42A) to the outside of the casing 14. For this reason, compressed air is discharged from the groove 17d of the fluid path ring 17 into the inner space 22h of the pinion 21 within the casing 14B, and the groove 17d and the inner space 22h A configuration has been obtained that prevents discomfort in which the pressure state changes in between.

At the same time, the seal member 17k and the seal member 17j function as a double seal portion for the inner space 22h that becomes the pressurization space in the rotational drive air cylinder (drive means, rotary air cylinder) of the rotation shaft 20 have. In this structure, even when the seal member 17k, which is the single seal of the rotary shaft 20, is broken during the contraction of the rotary drive air cylinder, compressed air (driving gas) is supplied to the groove 17p and the second communication path 42A. ) Is placed outside of the casing 14. For this reason, compressed air is discharged from the inner space 22h into the groove 17d serving as the supply path 41 in the casing 14B, and so on, there is no pressure between the groove 17d and the inner space 22h. A configuration has been obtained that prevents the inconvenience of changing.

These grooves 17d and 22h are both pressurized spaces, but when the pressure state corresponding to the predetermined operation changes due to the destruction of the seal, the thickness of the neutral valve body 5 suddenly expands, The neutral valve body 5 is prevented from causing an unexpected operation of rotating operation.

That is, by the seal member 17k, the seal member 17j, the groove 17p, and the second communication path 42A, it is possible to prevent the gate valve 1 from being damaged due to seal breakage.

On the inner circumferential surface 18b of the fluid path ring 18, a groove 18d communicating with the radial ring path 18c is provided between the seal member 18k and the seal member 18j, and the seal member 18j Between the and the seal member 18h, the groove 18p is provided around.

The outer circumferential surface 20b of the rotation shaft 20 facing the groove 18p forms a second intermediate air chamber, which is an atmospheric pressure space (void), and is connected to the outside of the casing through a second communication path 42A. Has become.

The seal member 18j and the seal member 18h function as a double seal portion for the inner space 22h that becomes the pressurization space in the rotational drive air cylinder (drive means, rotary air cylinder) of the rotation shaft 20. . In this structure, even when the seal member 18h, which is the single seal of the rotary shaft 20, is broken during the contraction of the rotary drive air cylinder, compressed air (driving gas) is supplied to the groove 18p and the second communication path 42A. ) Is placed outside of the casing 14. For this reason, compressed air is discharged from the inner space 22h into the groove 18d serving as the communication path 42 in the casing 14B, so that a pressure state between the groove 18d and the inner space 22h is A configuration has been obtained that prevents the inconvenience of changing.

Thereby, the internal space 22h is a pressurized space, and when the pressure state corresponding to the predetermined operation changes due to the destruction of the seal part, an unexpected operation that the neutral valve body 5 rotates occurs. Prevent it.

That is, with the seal member 18h, the seal member 18j, the groove 18p, and the second communication path 42A, it is possible to prevent the gate valve 1 from being damaged due to seal breakage.

A leak flow path 14He extending in the radial direction is provided at a position near the seal casing 14A from the cylindrical casing 14B. This leak flow path 14He is in communication with the leak space 22He, as shown in FIG. 7B. The leak space 22He is formed at a position closer to the seal casing 14A than the bearing 16A, and contacts the surface 20b of the rotation shaft 20.

In the interior of the rotation shaft 20 in contact with the leak space 22He, an axial leak flow path 27He is provided. One end of this axial leak flow path 27He is opened in the leak space 22He. The other end of the axial leak flow path 27He penetrates in the axial direction from the center of the rotation shaft 20, as described later, and is for fastening the rotation shaft 20 and the neutral valve part 30 through the connection member 91. It opens toward the through hole 21A which penetrates the male screw (fastening tool) 21d.

As shown in Figs. 12A and 12B, the through hole 21A is provided in the opening 98 of the connection member 91 and the neutral valve portion 30, and a female screw (tightening tool) for screwing the male screw 21d ( 31) is in communication with the space (31He).

As will be described later, the male screw 21d penetrates the opening 98 without the screw groove to the space 31He in which the female screw 31 is fastened. The position of this space 31He close to the groove 95B is blocked by a blocking member (not shown).

In the air storage space 31He of the neutral valve part 30, at a portion close to the groove 95B located at the end of the space 31He, whether the sealing by an O-ring or the like (not shown) is broken? It is necessary to conduct a helium leak test to investigate. For this reason, the air storage space 31He communicates with the leak space 22He through the opening 98, the through hole 21A, the axial leak flow path 27He, the leak space 22He, and the leak flow path 14He. Has become. Through this portion, it is possible to supply helium for a helium leak test in which the air storage space 31He, the opening 98, and the through hole 21A are closed.

Thus, by providing the axial leak passage 27He and the leak passage 14He, a helium leak test for the air storage space 31He, the opening 98, and the through hole 21A becomes possible.

At the same time, from the leak flow path 14He, with respect to the seal portions 14Aa, 14Ab, 14Ac as sealing means along the surface 20b of the rotation shaft 20 and the intermediate atmosphere chamber 14Ad, which is an atmospheric pressure space (void), a hollow portion It becomes possible to perform the seal test to (11). In other words, it becomes possible to perform a helium leak test by supplying helium from the leak flow passage 14He to the leak space 22He and examining the leak to the hollow portion 11.

In addition, in the leak passage 14He, the sealing member 17h, 17j, 17k, the sealing member 17e, 17f, 17g, etc., the sealing is broken, and the inner space 22h which is a pressure space and the radial ring path 17c ), in the groove 17d, etc., when compressed air starts to leak into the leak space 22He, this compressed air can be released to the outside. Thereby, it is possible to prevent pressure from being applied to the seal portions 14Aa, 14Ab, and 14Ac, and prevent the leaked compressed air from flowing into the hollow portion 11.

[Neutral valve part 30, connection member 91]

12A is an enlarged view showing a main part of an engaging portion of the rotation shaft and the neutral valve body, and is a cross-sectional view along the radial direction of the rotation shaft. 12B is an enlarged view showing a main part of an engagement portion of the rotation shaft and the neutral valve body, and is a cross-sectional view along the axial direction of the rotation shaft.

The neutral valve part 30 extends in a direction orthogonal to the axis line of the rotation shaft 20 and has a surface parallel to this orthogonal direction. As shown in FIG. 1, the neutral valve part 30 has a circular part 30a overlapping with the movable valve part 40, and a rotating part 30b which rotates the circular part with rotation of the rotation shaft 20. The rotating portion 30b is located between the rotating shaft 20 and the circular portion 30a, and the width of the rotating portion 30b is gradually increasing from the rotating shaft 20 toward the circular portion 30a. These rotation shafts 20 and the neutral valve part 30 rotate with respect to the valve box 10, but are provided so as not to change their position in the flow path H direction.

At one end of the neutral valve part 30, as shown in FIG. 12B, a concave part 95 that fits with the protrusion part 93 of the connection member 91 is formed. The cross-sectional shape of the concave portion 95 has a substantially T-shape matching the cross-sectional shape of the connecting member 91. As such concave portions 95, concave portions 95A and 95B are formed on both sides of one side 30A and the other side 30B in the flow path direction H of the neutral valve unit 30, respectively.

Thereby, the rotation shaft 20 can be selectively connected to the neutral valve part 30 to either the upper side and the lower side along the flow path direction H.

Alternatively, with respect to the rotation shaft 20, the entire neutral valve body 5 can be mounted on both sides. That is, when the neutral valve body 5 is attached to the recessed portion 95A of the connecting member 91, the movable valve portion 40 is the first opening 12a when the gate valve 1 is closed. ) To block. Conversely, when the neutral valve element 5 is attached to the concave portion 95B of the connection member 91, the movable valve portion 40 closes the second opening portion 12b.

As shown in Figs. 12A and 12B, the protrusions 93 formed on the connecting member 91 and the concave portions 95 formed on the neutral valve unit 30 are fitted with each other. As shown in Fig. 12A, the connecting member 91 and the neutral valve unit 30 are widened in parallel with each other along the flow path direction H in the engaging state and separated by a first interval t1. The first parallel planes 96a and 96b of the first set and the second parallel planes of the first set separated by a second spacing t2 wider than the first spacing t1 by extending parallel to each other along the flow path direction H (97a, 97b) are in contact with each other.

The first pair of parallel surfaces 96a and 96b and the second pair of parallel surfaces 97a and 97b are arranged symmetrically with one axis L extending at right angles to the flow path direction H, respectively. . Further, the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b are disposed at positions that do not overlap each other along this one axis L.

In the protrusions 93 of the connection member 91, as shown in Figs. 12A and 12B, the first contact surfaces 93a and 93b constituting the set of first parallel surfaces 96a and 96b and the second parallel surfaces 97a are , 97b) are formed with second contact surfaces 93c and 93d. In addition, each of the first contact surfaces 93a and 93b and the second contact surfaces 93c and 93d is connected to the first inclined surfaces 93e and 93f. The protrusion 93 has a protrusion shape having a width of two stages as a whole.

The recessed portion 95 formed at one end of the neutral valve portion 30, as shown in Figs. 12A and 12B, includes third contact surfaces 95a and 95b constituting a set of first parallel surfaces 96a and 96b, and a second Fourth contact surfaces 95c and 95d constituting the parallel surfaces 97a and 97b are formed. And, each of these 3rd contact surfaces 95a, 95b and 4th contact surface 95c, 95d is connected with 2nd inclined surfaces 95e, 95f. The concave portion 95 as a whole has a groove shape having a width of two steps.

In the center of the rotation shaft 20, as shown in FIGS. 12A and 12B, a male screw (fastening tool) 21 for fastening the rotation shaft 20 and the neutral valve part 30 through the connection member 91 is passed through. Through-holes 21A are formed. In addition, in the recessed portion 95 formed at one end of the neutral valve portion 30, a male screw (fastening tool) 21 and a female screw 31 are formed. Further, in the connection member 91, an opening 98 without a threaded groove through which the male screw (fastening tool) 21 is passed is formed.

With the above configuration, the protrusion 93 formed on the connection member 91 and the concave portion 95 formed on the neutral valve portion 30 are fitted, and, from the upper end side of the rotation shaft 20, the male screw 21 Penetrates through the through hole 21A and the opening 98, and the tip portion of the male screw 21 is screwed to the female screw 31 of the neutral valve part 30. Thereby, the rotation shaft 20 and the neutral valve part 30 are fastened (fixed) via the connection member 91.

In maintenance of the neutral valve part 30, for example, when replacing the neutral valve part 30 by repeated opening and closing, when attaching the neutral valve part 30 to the connection member 91 fixed to the rotating shaft 20 , The concave portion 95 formed at one end of the neutral valve portion 30 is opposed to the protrusion portion 93 formed in the connection member 91.

Next, when the concave portion 95 of the neutral valve portion 30 is inserted into the protrusion 93, the third contact surfaces 95a and 95b of the concave portion 95 are each of the first contact surfaces 93a and 93 of the protrusion 93. 93b). Further, the fourth contact surfaces 95c and 95d of the concave portion 95 contact the second contact surfaces 93c and 93d of the protrusion 93, respectively.

The contact surface between the concave portion 95 and the protrusion 93 in this insertion process is limited to the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b, and the first inclined surface 93e of the protrusion 93 , 93f) and the second inclined surfaces 95e and 95f of the recess 95 do not contact each other. That is, in the connection direction, which is the direction indicated by arrow B1, the mounting position in the circumferential direction can be regulated at a portion at both sides of the rotation shaft 20 interposed between the axis line. For this reason, it is possible to easily improve the accuracy of the mounting position, in particular, the mounting direction of the neutral valve portion 30 around the axis of the rotation shaft 20.

At the same time, for example, even if the clearance (gap) of the contact surface (first parallel surface 96a, 96b, second parallel surface 97a, 97b) between the concave portion 95 and the protrusion 93 is set extremely small, the concave portion 95 ) To the protrusions 93, the frictional force is reduced, and the concave portions 95 and the protrusions 93 can be smoothly fitted.

Further, by bringing the first parallel surfaces 96a and 96b having different widths, and the second parallel surfaces 97a and 97b, the recesses 95, and the protrusions 93 to contact each other, the recess 95 is brought into the protrusions 93 It is possible to improve the accuracy of mounting when pushed in. In addition, by reducing the frictional force at the time of mounting, the mounting position, that is, the amount of press-fit of the recessed portion 95 to the protruding portion 93 can be easily adjusted. That is, when the concave portion 95 and the protruding portion 93 are engaged, the threaded position of the female screw 31 formed in the concave portion 95 is determined with the opening 98 formed in the protruding portion 93 of the connecting member 91. Need to match.

As in the present embodiment, by contacting the concave portion 95 and the protrusion 93 only with the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b, the threaded position of the female screw 31 and the protrusion 93 The opening 98 formed in) can be easily adjusted and matched. Thereby, the male screw (fastening tool) 21d can be easily fastened to the female screw 31 through the opening 98 through the through hole 21A of the rotary shaft 20. Further, by bringing the end face 93m into contact with the end face 95m, it is possible to position each other in the connection direction, which is the direction indicated by arrow B1 in FIG. 12.

Further, in this embodiment, the protrusion 93 is provided on the connection member 91 and the concave portion 95 is provided at one end of the neutral valve part 30, but the unevenness may be reversed. . That is, a concave portion is formed in the connection member fixed to the rotation shaft 20, and a protrusion fitted with the concave portion is formed at one end of the neutral valve portion.

[Movable valve part 40, movable valve plate part (second movable valve part) 50, movable valve frame (first movable valve part) 60]

The movable valve portion 40 has a substantially disk shape, a movable valve plate portion 50 formed in a substantially concentric circular shape with a circular portion 30a, and a substantially ring shape arranged to surround the movable valve plate portion 50 It has a movable valve frame (60). The movable valve frame 60 is slidably connected to the neutral valve part 30 in the direction of the flow path H.

Further, the movable valve plate portion 50 is fitted to the movable valve frame 60 so as to be slidable. The movable valve plate portion 50 and the movable valve frame 60 are movable while sliding in the directions indicated by reference numerals B1 and B2 (reciprocating direction) by the main spring 70 and the ring-shaped air cylinder 80. Here, the directions indicated by reference numerals B1 and B2 are the directions perpendicular to the surfaces of the movable valve plate portion 50 and the movable valve frame 60, and are the flow path H directions parallel to the axial direction of the rotation shaft 20.

In addition, an inner circumferential crank portion 50c is formed in the entire region near the outer circumference of the movable valve plate portion 50. In addition, an outer circumferential crank portion 60c is formed in all regions near the inner circumference of the movable valve frame 60.

In this embodiment, the outer circumferential crank part 60c and the inner circumferential crank part 50c are fitted with sliding surfaces 50b and 60b parallel to the flow path H direction so as to be slidable.

On the surface of the movable valve frame 60 facing (abutting) the inner surface of the valve box 10, a first ring formed in a ring shape corresponding to the shape of the first opening 12a, for example, made of an O-ring, etc. A seal portion 61 (main seal portion) is provided.

This first seal part 61 is in a state in which the movable valve part 40 covers the first opening 12a when the valve is closed, and the inner surface of the valve box 10 serving as the periphery of the first opening 12a ( 15a), and pressed by the inner surfaces of the movable valve frame 60 and the valve box 10. Thereby, the first space is reliably isolated from the second space (a division state is ensured).

[Main spring (1st sub-detail) (70)]

The main spring (first sub-detail) 70 is disposed in the first peripheral region 40b adjacent to the first peripheral region 40a serving as the outermost circumference of the movable valve portion 40. In the main spring 70, the movable valve frame 60 is pressed toward the first opening portion 12a (direction B1), and at the same time, the movable valve plate portion 50 is pressed toward the second opening portion 12b (direction B2). There is a resilience to press.

Thereby, in the valve closed state by the movable valve part 40, the main spring 70 applies a force to the movable valve plate part 50 (by applying a force), and the second opening part 12b is The movable valve plate portion 50 is pressed toward the inner surface 15b of the valve box 10 positioned around the inner surface 15b to abut the reaction force transmission portion 59 of the movable valve plate portion 50. At the same time, the main spring 70 applies a force to the movable valve frame 60 (by applying a force), and the movable valve faces the inner surface 15a of the valve box 10 located around the first opening 12a. The frame 60 is pressed and the inner surface 15a is brought into contact with the first seal part 61 of the movable valve frame 60.

In this embodiment, the main spring 70 is an elastic member (for example, a spring, rubber, a sealed air damper, etc.). The main spring 70 has a recess 50a provided in the movable valve plate 50 so as to open toward the second opening 12b, and a first opening in the movable valve frame 60 at a position opposite to the recess 50a. It is fitted and installed in the recessed part 60a provided so that it may open toward (12a).

The main spring 70 has a 1st stage and a 2nd stage. The first end is in contact with the bottom surface of the recessed portion 50a of the movable valve plate portion 50. The second stage is in contact with the ceiling surface of the recessed portion 60a of the movable valve frame 60. Further, as shown in Fig. 1, in the ring-shaped movable valve frame 60, a plurality of first sub-details 70 are provided at equal intervals along the circumferential direction.

The natural length of the elastic member constituting the main spring 70 is the seal portion 61 of the movable valve frame 60 and the reaction force transmission portion 59 of the movable valve plate portion 50, respectively, the valve box 10 The bottom surface of the recessed part 50a of the movable valve plate part 50 and the concave part of the movable valve frame 60 in a state where the maximum thickness of the movable valve part 40 pressing the inner surface 15a and the inner surface 15b of It is greater than the distance between the ceiling surfaces of (60a). For this reason, while being compressed by the bottom surface of the recessed part 50a of the movable valve plate part 50 and the ceiling surface of the recessed part 60a of the movable valve frame 60, it is disposed inside the recessed part 50a and the recessed part 60a. In the main spring 70, elastic restoring force (elongation force, sub force) is generated. When this elastic restoring force acts, the movable valve frame 60 slides in the direction B1 and at the same time, the movable valve plate 50 slides in the direction B2, and the first seal part 61 and the reaction force transmission part 59 10) Touch the inner surface and press it to close the valve.

In addition, the main spring 70 is a second peripheral region 40b close to the first seal portion 61 in order to efficiently transmit the pressing pressure to the first seal portion 61 to ensure blocking of the gate valve 1 ). Specifically, a protrusion serving as a reaction force transmission unit 59 to be described later is positioned at an outer peripheral position immediately below the first seal portion 61. On the other hand, as a position in the radial direction of the movable valve plate part 50, the main spring 70 is located at a position opposite to the protrusion (reaction force transmission part) 59 with respect to the first seal part 61. Thereby, the negative force of the main spring 70 is efficiently transmitted to the seal portion 61 of the movable valve frame 60 and the reaction force transmission portion 59 of the movable valve plate portion 50, and the first seal portion 61 It is possible to improve the reliability of the valve sealing due to the deformation of

In addition, the main spring 70 may be disposed in the second peripheral region 40b formed immediately below the first seal part 61 in order to be able to directly press the first seal part 61. In this case, in the gate valve, since the first sub-detailed portion 70 is provided on the movable valve frame 60, the first sub-detailed portion 70 can be positioned immediately below the first seal portion 61.

As described above, in the gate valve 1, as an actuator that performs a valve closing operation and a valve opening operation, the main spring 70 for performing the valve closing operation, and the valve opening operation are performed. The second sub-detailed portion 80 (described later) to be implemented is provided adjacently. In this configuration, the main spring 70 and the second sub-detailed portion 80 are in the peripheral region of the movable valve portion 40 close to the first seal portion 61 (the first peripheral region 40a and the second peripheral region ( In 40b)), they are disposed adjacent to each other in the radial direction. Moreover, the main spring 70 is located in the immediate vicinity of the 1st sealing part 61 below. In other words, the structure of the gate valve 1 is a structure in which the positional relationship of the first seal part 61, the reaction force transmission part 59, and the main spring 70 adds a moment load at which an action point and a support point exist, and is effectively sealed. It is configured to be able to do.

In addition, the direction in which the auxiliary force of the main spring 70 expands the movable valve plate part 50 and the movable valve frame 60, that is, increases the thickness of the movable valve part 40, and the seal part of the movable valve frame 60 It is set in a direction in which the reaction force transmission part 59 of the movable valve plate part 50 is pressed against the inner surfaces 15a and 15b of the valve box 10. For this reason, even when the power supply (energy supply) from the utility facility to the device including the gate valve 1 is stopped due to a power outage, etc., the gate valve 1 is reliably operated only by the mechanical force generated by the main spring 70. I can close it. For this reason, a fail-safe gate valve can be reliably realized.

On the other hand, in a gate valve having a structure in which a force to reduce the thickness of the movable valve part 40 is applied, or a gate valve having a structure in which the valve is closed by energy such as power supplied from a utility facility, the utility When the energy supply from the facility to the device is stopped, the valve closing operation may not be possible. For this reason, in such a structure, a fail-safe gate valve cannot be realized.

[Ring-shaped air cylinder (second sub-detail) (80)]

The ring-shaped air cylinder 80 is disposed in the first peripheral region 40a serving as the outermost periphery of the movable valve portion 40. In the ring-shaped air cylinder 80, when compressed air is supplied as a driving fluid to the ring-shaped air cylinder 80, the force to move the movable valve frame 60 toward the second opening portion 12b (direction B2) ( Buoyancy force, force due to compressed air) is generated. At the same time, a force (a negative force, a force due to compressed air) to move the movable valve plate portion 50 toward the first opening portion 12a (direction B1) is generated. Thereby, the force by the compressed air becomes larger than the negative force of the main spring 70, and the movable valve frame 60 is removed from the inner surface 15a of the valve box 10 located around the first opening 12a. At the same time, the movable valve plate portion 50 is separated from the inner surface 15b of the valve box 10 positioned around the second opening 12b.

Thereby, by the biasing force of the auxiliary spring (third sub-detail) 90 to be described later, the movable valve body 40 is located at the center in the thickness direction of the valve box 10 in the flow path H direction, The valve box 10 is in a rotatable state.

In addition, in the movable valve part 40, the first peripheral region 40a is inside the seal part 61 of the movable valve frame 60 and the reaction force transmission part 59 of the movable valve plate part 50 in a ring shape. Located. At the same time, in the movable valve portion 40, the second peripheral region 40b is located inside the first peripheral region 40a. That is, in the radial direction of the movable valve part 40, the main spring 70 is disposed inside the ring-shaped air cylinder 80. In other words, the ring-shaped air cylinder 80 is adjacent to the main spring 70 in a direction that intersects the movable valve plate portion 50 and the movable valve frame 60 in the sliding direction (the flow path H direction). . That is, the ring-shaped air cylinder 80 is located between the seal part 61, the reaction force transmission part 59, and the main spring 70 in the radial direction of the movable valve part 40.

In the present embodiment, the ring-shaped air cylinder 80 is one air cylinder (void) provided between the movable valve plate portion 50 and the movable valve frame 60.

Specifically, the ring-shaped air cylinder 80 is directed toward the recessed portion 60d opened toward the first opening portion 12a of the movable valve frame 60 and the second opening portion 12b of the movable valve plate portion 50. The protruding convex portions 50d are formed in an aligned state, and these annular concave portions 60d and the annular convex portions 50d are formed to slide. In addition, this ring-shaped air cylinder 80 is made of a ring-shaped space formed at the periphery of the movable valve frame 60, and a protrusion (annular convex portion) formed on the outermost periphery of the movable valve plate portion 50, 1 It functions as two toroidal cylinders (annular voids). In other words, the annular cylinder is formed so as to surround the flow path H.

When compressed air, which is a driving fluid, is supplied to the ring-shaped air cylinder 80, an expansion force (sub force) that expands the volume of the second sub-detail 80 is generated in the directions B1 and B2. When the magnitude of the expansion force is greater than the restoring force generated in the main spring 70, this expansion force is increased by the negative force of the main spring 70. As a result, the main spring 70 is compressed, the movable valve plate portion 50 slides in the direction B1 and the movable valve frame 60 slides in the direction B2, so that the size of the movable valve body 40 in the thickness direction is reduced. , The first seal part 61 is separated from the inner surface 15a of the valve box 10, and at the same time, the reaction force transmitting part 59 is separated from the inner surface 15b of the valve box 10, and the valve opens. . At this time, by sliding the ring-shaped recessed portion 60d and the convex portion 50d, the moving direction of the movable valve plate portion 50 and the movable valve frame 60 is restricted only in the flow path direction, and the movable valve plate portion 50 ) And the movable valve frame 60 are positioned so as to move in parallel from the state in which the seal portion 61 and the reaction force transmission portion 59 abut against the inner surfaces 15a and 15b of the valve box 10. That is, this ring-shaped air cylinder 80 can regulate the relative movement direction and posture of the movable valve plate portion 50 and the movable valve frame 60.

[Auxiliary spring (3rd sub-detail) (90)]

The auxiliary spring 90 is provided between the neutral valve part 30 and the movable valve frame 60. The auxiliary spring 90 is the movable valve body 40 when the thickness dimension of the movable valve body 40 is reduced with respect to the neutral valve part 30 located almost at the center of the flow path direction of the valve box 10 Is applied from the center of the valve box 10.

The auxiliary spring 90 is a rod-shaped position regulating unit connected to the movable valve frame 60 through an opening 30a provided at the outer peripheral position of the neutral valve unit 30 (the right position in Figs. 2 and 4). It is installed in (65). The auxiliary spring 90 is also an elastic member (eg, spring, rubber, sealed air damper, etc.) similarly to the main spring 70.

The auxiliary spring 90 is caught by the flange portion 30b provided in the vicinity of the first opening 12a of the neutral valve portion 30 opening 30a and the tip 65a of the position regulating portion 65 (係There is, and a force is applied in the direction toward B2 which moves the movable valve frame 60 toward the 2nd opening part 12b side.

The auxiliary spring 90 applies a force to the movable valve frame 60 located closer to the first opening 12a than the neutral valve unit 30 toward the second opening 12b. When the seal part 61 of the movable valve frame 60 abuts the inner surface 15a of the valve box 10 located around the first opening 12a, it is used for driving the ring-shaped air cylinder 80. When compressed air, which is a fluid, is supplied, the auxiliary spring 90 applies a force so that the movable valve frame 60 is separated from the inner surface 15a of the valve box 10 located around the first opening 12a. have.

Thereby, when compressed air is supplied to the ring-shaped air cylinder 80, the movable valve body 40 moves toward the almost center of the flow path direction of the valve box 10, and finally, the movable valve body 40 The posture of the movable valve body 40 is controlled so that) is located almost at the center of the flow path direction of the valve box 10. Further, the auxiliary force of the auxiliary spring 90 is much smaller than the difference between the auxiliary force of the main spring 70 and that of the ring-shaped air cylinder 80. That is, compared to the active spring for realizing the valve closed state or the main spring 70 or the ring-shaped air cylinder 80 as an actuator, the auxiliary spring 90 is good only to change the thickness dimension of the valve body. , The auxiliary spring 90 is good as an extremely small spring.

As described above, in the gate valve 1, the main spring 70 and the movable valve body 40 that perform the operation of increasing the thickness of the movable valve body 40 as an actuator that performs a valve closing operation and a valve opening operation. A ring-shaped air cylinder 80 that performs an operation of reducing the thickness, and an auxiliary spring 90 for performing posture control of the movable valve element 40 from the center position side of the valve box 10 in the flow path direction are provided.

In this configuration, the main spring 70 and the ring-shaped air cylinder 80 are arranged in parallel so as to be close to each other in a peripheral region of the movable valve portion 40 close to the first seal portion 61.

The ring-shaped air cylinder 80 constitutes one annular cylinder provided between the movable valve plate portion 50 and the movable valve frame 60. According to this configuration, if one supply path 41 for supplying compressed air to the second sub-detail 80 in one direction is provided, compressed air is supplied to the inside of the annular cylinder along the ring-shaped air cylinder 80. Can supply to Moreover, the thickness dimension of the movable valve body 40 can be expanded and contracted (valve opening operation and valve closing operation). In addition, during this operation, the auxiliary spring 90 makes it possible to easily maintain the position in the flow path direction of the movable valve body 40 accompanying the expansion and contraction of the movable valve body 40 near the center of the valve box 10. For this reason, it is possible to realize an actuator having a simple, easy and compact configuration.

In addition, since the ring-shaped air cylinder 80 is used to perform the valve opening operation, it is possible to compress the first sub-detail 70 as the magnitude (output) of the force generated by the second sub-detail 80. It is enough if there is a size (output) that there is.

In the present embodiment, since the movable valve plate portion 50 and the movable valve frame 60 constitute a movable valve portion 40 having a variable dimension in one thickness direction, it is necessary to provide two movable valve portions. No, it is possible to realize a movable valve portion having a simple and compact structure.

Further, the force of the actuator, in particular, the force applied when sealing the movable valve body 40 so as to maintain the valve closed state does not act on the neutral valve unit 30. For this reason, it is sufficient if the neutral valve part 30 has sufficient strength to swing the valve body as a pendulum valve. Further, the force of the actuator, particularly the force applied when sealing the movable valve body 40 so as to maintain the valve closed state, does not act on the rotation shaft 20. For this reason, as the pendulum valve of the rotary shaft 20, it is sufficient if there is sufficient strength to swing the valve body. At the same time, the rotational shaft 20 requires a moment for sealing the valve, whereas the output of the swinging mechanism of the movable valve body 40 can be suppressed, so that the rotational mechanism of the rotational shaft 20 can be downsized.

In this structure, in addition to the strength of the neutral valve unit 30 as rigidity, it is sufficient if there is a strength to support its own weight when rotating the movable valve unit 40 between the retracted position and the valve open/close position.

In Fig. 2, a part in which the movable valve plate part 50 and the movable valve frame 60 are fitted together, a part in which the neutral valve part 30 and the movable valve plate part 50 are fitted together, and a first sub-detail The portion 70 and the guide pin 62 are provided.

[Second seal portion (double seal portion) 51a, 51b and third seal portion (double seal portion) 52a, 52b]

The outer circumferential surface of the annular convex portion (protrusion) 50d of the movable valve plate portion 50 abuts against the inner circumferential surface of the annular concave portion 60d of the movable valve frame 60, and the movable valve plate portion 50 and the movable valve frame 60 As a double seal portion for sealing the space, ring-shaped second seal portions 51a and 51b such as an O-ring and third seal portions 52a and 52b are provided.

Specifically, the second seal portions 51a and 51b are provided on the first outer peripheral surface 50f located radially outward of the annular convex portion (protrusion) 50d of the movable valve plate portion 50.

Moreover, the 3rd seal part 52a, 52b is provided on the 2nd inner peripheral surface 50g which is the inside of the 1st outer peripheral surface 50f in the radial direction. The second seal portions 51a, 51b abut the first inner peripheral surface 60f of the movable valve frame 60, and the third seal portions 52a, 52b are the second outer peripheral surfaces 60g of the movable valve frame 60 Touches on

The second seal portions 51a and 51b divide a ring-shaped air cylinder 80, which is a space with high pressure, and a hollow portion 11 close to the first opening 12a, in a space with low pressure, etc., to secure a divided state. . Similarly, the third seal portion (52a, 52b) is divided into a ring-shaped air cylinder (80) in a space with a high pressure and a hollow portion (11) in the second opening (12b) in a space with a low pressure, etc. Secure.

The second seal portions 51a and 51b communicate with the ring-shaped air cylinder 80, which is a space having high pressure by supplying compressed air for driving, and the first opening 12a, which is a space with low pressure, for example. By blocking the first space side, this state of division can be ensured. Similarly, the third seal portion 52a, 52b divides the ring-shaped air cylinder 80, which is a space having a high pressure, and a second space side, which is close to the second opening 12b in a space having a low pressure, and maintains a divided state. Can be secured.

[Guide pin (62)]

The guide pin 62 is fixedly attached to the movable valve frame 60 and is standing in the flow path direction, and is configured as a rod-shaped body having a uniform thickness. The guide pin 62 penetrates the inside of the ring-shaped air cylinder 80 and is fitted into the hole 50h formed in the annular convex portion (protrusion) 50d of the movable valve plate portion 50.

This guide pin 62 is provided with the movable valve plate 50 and the movable valve frame 60 so that the sliding direction of the movable valve plate 50 and the movable valve frame 60 does not deviate from the directions indicated by reference numerals B1 and B2. Even when 60) slides, the position of the movable valve plate part 50 and the movable valve frame 60 is reliably guided so that the postures of the movable valve plate part 50 and the movable valve frame 60 do not change and move in parallel. do.

Thereby, the movable valve plate part 50 and the movable valve frame 60 are prevented from moving in the oblique direction with respect to the symbols B1 and B2. At the same time, the movable valve frame 60 is movable with respect to the valve closed state, that is, the state in which the seal portion 61 and the reaction force transmission portion 59 abut against the inner surfaces 15a and 15b of the valve box 10, respectively. Even when the position of the valve plate part 50 and the movable valve frame 60 in the flow path direction changes, they remain in a parallel state and move in parallel, and the movable valve plate part 50 and the movable valve frame 60 are inclined. Preventing losing.

In this structure, while the movable valve plate part 50 and the movable valve frame 60 are positioned with each other, they move relatively while maintaining a parallel state in the directions indicated by symbols B1 and B2, and the valve closing operation and the valve opening operation are performed. You can do it. Thereby, in the valve opening operation, it is possible to realize a seal structure in which a leak is suppressed in which pressure is uniformly generated in the first seal portion 61 provided in the movable valve frame 60.

Further, in the structure including the guide pin 62 as described above, when the posture in which the gate valve 1 is mounted on the vacuum device cannot be determined, that is, when the mounting direction of the gate valve 1 is free, the movable valve It is possible to prevent a load of the weight of the sieve 40 from being locally applied to the second seal portions 51a and 51b and the third seal portions 52a and 52b. For example, when the gate valve 1 is mounted so that gravity acts at a right angle to the direction in which the movable valve plate part 50 and the movable valve frame 60 slide, the movable valve plate part 50 which is a sliding member And the weight of the movable valve frame 60 is added to the guide pin 62. For this reason, the weight of the movable valve plate part 50 and the movable valve frame 60 is prevented from being directly added to the 2nd seal part 51a, 51b and the 3rd seal part 52a, 52b (O-ring). Thereby, no matter what posture the gate valve 1 is attached to, the life of the seal part is not short, and the effect of preventing leakage can be ensured and maintained.

In order to reduce the area of the sliding surface of the guide pin 62 and the hole portion 50h, and to isolate the guide pin 62 from the first space and the second space outside the gate valve 1, a guide pin 62 is arranged so as to penetrate the inside of the ring-shaped air cylinder 80.

Further, by disposing the guide pin 62 in the ring-shaped air cylinder 80 in this manner, the movable valve plate portion 50 and the movable valve frame 60 can be smoothly slid together.

In addition, if the strength of the guide pin is sufficiently obtained, the direction in which the movable valve frame 60 slides is prevented from shifting even in a gate valve having a large diameter. Further, the guide pin 62 can be applied as a gate valve having a more favorable opening/closing operation by setting the in-plane arrangement perpendicular to the flow path and appropriately distributing the load even in the movable valve portion 40 having a special shape.

[Wiper(53, 54)]

On the first outer circumferential surface 50f located radially outward of the annular convex portion (protrusion) 50d of the movable valve plate portion 50, a ring-shaped wiper 53 abutting against the inner circumferential surface of the movable valve frame 60 is installed. have. Similarly, on the second inner circumferential surface 50g, which is inside the first outer circumferential surface 50f in the radial direction of the annular convex portion (protrusion) 50d of the movable valve plate 50, a ring abutting against the outer circumferential surface of the movable valve frame 60 A shaped wiper 54 is installed.

The wipers 53 and 54 have a function of lubricating or cleaning the inner circumferential surface of the concave portion 60d of the movable valve frame 60 by a valve opening operation and a valve closing operation.

[Intermediate waiting room (55, 56)]

On the surface of the ring-shaped air cylinder 80 divided by the second seal portions 51a and 51b, an intermediate atmospheric chamber 55 serving as an atmospheric pressure space (void) is provided. Similarly, on the surface of the ring-shaped air cylinder 80 divided by the third seal portions 52a and 52b, an intermediate air chamber 56 as an atmospheric pressure space (void) is provided, and the ring-shaped air cylinder 80 Even when a single seal is broken during pressurization, a configuration is obtained in which compressed air (driving gas) is released toward the outside of the gate valve, and compressed air is prevented from being discharged into the inside of the valve box 10.

At the same time, the pressure in the intermediate waiting chambers 55 and 56 can be monitored by means of a communication path. That is, a pressure gauge is installed outside the gate valve 1 to measure the pressure in the intermediate atmosphere chambers 55 and 56 and is connected by a communication path, and the pressure is monitored by the user.

[Connection pin portion 69, supply path 41]

13 is an enlarged view showing a main part of a member located in the vicinity of a connection pin.

The gate valve 1 is provided with a supply path 41 for supplying a driving gas to the ring-shaped air cylinder 80 as shown by a chain double-dotted line in FIG. The supply path 41 is installed outside the gate valve 1 through the inside of the body of the movable valve frame 60, the inside of the body of the neutral valve part 30, and the inside of the rotation shaft 10. It is installed so as to communicate with an unused driving gas supply device.

In this supply path 41, even when the positions of the movable valve frame 60 and the neutral valve unit 30 in the flow path direction change, a driving gas between the movable valve frame 60 and the neutral valve unit 30 A connecting pin portion 69 for slidingly connected to be supplied is provided.

The connection pin portion 69 is a hole portion 38 of a circular cross section drilled in parallel to the flow path direction in the neutral valve portion 30, and a rod-shaped connection pin fitted to the hole portion 38 so as to be rotatable. It consists of (68). The inner surface 38a of the hole 38 has a smaller inner surface 38b on the bottom side than the inner surface 38a on the opening side, and correspondingly, the diameter dimension of the connection pin 68 is also the base 68a With respect to, the tip 68b is reduced in diameter. In addition, a step 38c and a step 68c are formed in the portion where the diameter dimension changes, respectively.

The connection pin portion 69 has a supply path 41 formed in the vicinity of its central axis and has a tubular shape, as shown by a two-dot chain line in Fig. 2, and the supply path 41 inside the movable valve frame 60 is It is being communicated. In addition, a supply path 41 is opened in the front end surface 68d of the connection pin 68, and a pressurization space formed in the space near the tip end surface 68d and the bottom portion 38d of the hole 38 ( The supply path 41 formed in the body of the neutral valve part 30 is in communication with 69a).

The compressed air supplied from the driving gas supply device is ejected into the space 69a through the supply path 41 inside the neutral valve part 30, and the supply path 41 inside the connection pin part 69 and It is supplied to the ring-shaped air cylinder 80 through the supply path 41 inside the movable valve frame 60.

In the connection pin part 69, the inner circumferential surface 38a of the hole 38 abuts to the outer circumferential surface 68a of the connection pin 68, and a hole 38 is formed on the outer circumferential surface 68b of the connection pin 68. The inner peripheral surface 38b of is abutting.

The connection pin 68 is provided with a double seal part.

Even when the connection pin 68 moves in the axial direction (flow path direction) within the hole 38, it is not between the front end surface 68d and the bottom surface 38d serving as a pressing surface, but on a surface serving as the sliding direction, A double seal is installed. The double seal part blocks the side of the second space communicating with the pressurized space 69a, which is a space with high pressure by supplying compressed air for driving, and the second opening 12b, which is a space with low pressure, for example. .

The seal portion can secure a state where the pressure space 69a and the hollow portion 11 are divided.

Specifically, the connection pin 68 is provided with a double seal portion that seals between the connection pin 68 and the hole portion 38. In the structure of the double seal portion, a ring-shaped thick seal portion 68f consisting of an O-ring, etc., and a main groove for burying the O-ring, etc., is provided on the outer peripheral surface 68a, and A ring-shaped small seal portion 68g composed of a main groove for embedding this O-ring or the like is provided on the outer peripheral surface 68b.

At the same time, a ring-shaped intermediate waiting room 69c formed with a step 68c and a step 38c is provided between the double seals and communicates with a communication path 42 (not shown). Accordingly, it is possible to prevent compressed air from blowing into the inside of the valve box 10 and adversely affecting the inside of the gate valve 1 and the first space and the second space.

In particular, in the above structure, the outer circumferential surface does not directly become a pressing surface and is a sliding surface and does not change the distance, rather than sealing between the front end surface 68d and the bottom surface 38d whose distance changes at the same time as the pressing surface. Sealing is performed between 68a and the inner circumferential surface 38a, and the outer circumferential surface 68b and the inner circumferential surface 38b. Thereby, it becomes possible to maintain a more reliably sealed state.

According to the configuration of the seal portions 68f and 68g, the second seal portions (double seal portions) 51a, 51b and the third seal portions (double seal portions) 52a, 52b in the ring-shaped air cylinder 80 described above And it is possible to obtain the same operating effect as the configuration of the guide pin 62.

Even when the connection pin 68 is moving or moved in the axial direction (flow path direction) in the hole 38 to change the relative position in the flow path direction, the compressed air supplied from the driving gas supply device is the neutral valve part. It is ejected into the space 69a through the supply path 41 inside the 30. The compressed air passes through the space 69a in which the volume is changed, through the supply path 41 inside the connecting pin part 69 and the supply path 41 inside the movable valve frame 60, and the ring-shaped air cylinder 80 ) Is supplied stably.

In addition, as the connection pin portion 69 positioned above the connection pin 68 in FIG. 13, a floating pin 68A (connection pin) connected to the movable valve frame 60 fits into the through hole 67 ( There is 勘合).

The connection pin portion 69 has a through hole 67 of a circular cross section drilled in parallel with the flow path direction in the movable valve frame 60, and a rod-shaped floating having a flange portion 68Aa in the through hole 67 The pin 68A can be rotated and finely moved in the radial direction, and the inclination is adjusted to a minimum.

The flange inner surface 67a of the through hole 67 corresponds to the diameter dimension of the flange portion 68Aa, and has a diameter larger than the diameter of the hole portion 38 facing the movable valve frame 60. Compared to the diameter of the flange inner surface 67a on the opening side, the diameter of the gas connection position inner surface 38b is smaller. Compared to this gas connection position inner surface 67b, the diameter of the support position inner surface 67c on the penetrating side located at the upper side in FIG. 13 is smaller. Compared to the diameter of the inner surface 67c at the supporting position, the diameter of the outer inner surface 67d on the penetrating side located at the upper side in FIG. 13 is larger.

The diameter dimension of the floating pin 68A corresponds to the diameter dimension of the through hole 67. The diameter of the gas connection portion 68Ab is smaller than the diameter of the flange portion 68Aa. The diameter of the fixed end 68Ac is smaller than the diameter of the gas connection portion 68Ab.

In the fixing end 68Ac, a fixing groove 68Ad is provided around the periphery. The fixing member 68Ae, such as a washer fitted with the fixing groove 68Ad, abuts against the outer surface 67e of the through hole 67, so that the floating pin 68A in the axial direction (channel direction) The movement in the inward direction (downward direction in the city) is regulated and the position is fixed.

The sealing surface 68Af serving as the upper side of the flange portion 68Aa and the sealing surface 68Ag serving as the upper side of the gas connection portion 68Ab are disposed between the opposing stepped surface 67f and the stepped surface 67g by an O-ring or the like. The formed sealing members 67h and 67j are provided.

The floating pin 68A fits the movable valve frame 60 in a direction opposite to the fixing member 68Ae of the fixing end 68Ac and the sealing members 67h and 67j of the sealing surface 68Af and the sealing surface 68Ag. It is fixed in a way. As a result, the floating pin 68A is fixed to the movable valve frame 60 so as not to move in the axial direction (the lengthwise direction of the through hole 67) while being pressed upward in FIG. 13.

At the same time, the floating pin 68A is deformed by pressing the seal member 67h against the seal surface 68Af and the stepped surface 67f, and at the same time, the seal member 67j is pressed against the seal surface 68Ag and the stepped surface 67g. It is supposed to be transformed.

In this way, the seal members 67h and 67j made of O-rings of the floating pin 68A are deformed by being pressed against the stepped surface 67f and the stepped surface 67g, so that the gas connection portion 68Ab and the inner surface of the connection position ( 67b) The part is sealed.

[Sequence circuit (SQ)]

14 is a circuit diagram showing a drive sequence mechanism.

In this embodiment, the gate valve 1 supplies compressed air supplied from the OP-IN port to the output point FR, the output point main-OP, and the output point main-CL, as shown in FIG. 14, and the movable valve part It has a sequence circuit (SQ) that performs an expansion and contraction (LOCK-FREE) operation of 40, an OPEN-CLOSE operation of the rotation drive air cylinder 110, and supply of air for a damper.

In the sequence circuit SQ, the output point FR is connected to the supply path 41, the output point main-OP is connected to the increased pressure space 113, and the output point main-CL is connected to the reduced pressure space 22c. Has become.

The output point FR is a single acting air cylinder composed of a ring-shaped air cylinder (second sub-detail) 80 and a main spring 70 from the supply path 41 when the closed state of the valve is released. It is connected so that compressed air for thickness contraction of the movable valve part 40 can be supplied.

The output point main-CL supplies compressed air as damper air to the reduced pressure space 22c through the supply path (reduced vent) 22j before the valve opening operation and before the movable valve part 40 contracts in thickness. , It is connected to enable the damper pressure state for the rotational drive air cylinder 110.

Here, when the valve is clogged, if the CLOSE rotation state is not maintained before the contraction of the movable valve part 40, the valve body rotation position becomes an unstable state due to the contraction of the movable valve part 40, and the movable valve part 40 Is not desirable because it is moved by its own weight.

The output point main-OP is connected to the rotation drive air cylinder 110. The output point main-OP is from the OP-IN port to the stretched pressure space 113 through the stretched vent (supply path) 114 before the thickness of the movable valve portion 40 is contracted when the closed state of the valve is released. Compressed air for expansion is supplied, and the force of the compressed air is greater than that of the auxiliary portion 120, so that the rotational drive air cylinder 110 can be expanded.

The sequence circuit SQ is a speed control valve (NC1V) in which a spool valve (air operated two-channel spool valve) (sp1V) connected to the OP-IN port and a check valve and a flow adjustment valve are combined. NC2V, NC3V).

The spool valve sp1V is operated so as to enable ON/OFF switching since the compressed air for driving is supplied from the OP-IN port to the air operated sp1V0 side.

When the signal from the OP-IN port is OFF, the spool valve (sp1V) connects the OP-IN port and the main-CL, and communicates the output point main-OP with the standby (external). When the signal from the OP-IN port is ON, the OP-IN port and the main-OP are connected, and the output point main-CL is released from the standby.

For this reason, the spool valve sp1V is a cylinder shape formed so that two flow paths from the OP-IN port and a communication hole communicating with the outside, and two flow paths connected to the output point main-OP and the output point main-CL pass through, respectively. A spool (valve body) capable of being slidable is inserted into the case, and a force is applied toward the air operated sp1V0 side by means of a spring or the like.

In the spool valve sp1V, a flow path groove corresponding to the surface of the spool (valve body) is formed. In a sliding position along the axis of the spool (valve body), it is possible to connect and cut two flow paths from the OP-IN port, a communication hole that communicates with the outside, and two flow paths connected to the output point main-OP and the output point main-CL. Done.

Further, on the air operated (sp1V0) side and the reverse side of the case (sleeve), an adjustment member capable of receiving an auxiliary force such as a spring and setting the position in the sleeve axis direction is provided so as to be adjustable.

By adjusting the position in the axial direction of fixing this adjustment member to the case, the biasing force of the spring changes, and the threshold of channel connection and cutting can be adjusted at the pressure supplied from the air operated sp1V0 side.

Accordingly, in the spool valve sp1V, the supply pressure from the OP-IN port to the air operated (sp1V0) side is set to a predetermined value in advance, and the valve does not operate even when there is a pressure fluctuation below the predetermined value. Can be set not.

Further, pressure application from the OP-IN port to the air operated sp1V0 to the spool valve sp1V can be used as a spool slide valve operation start signal. That is, it becomes possible to perform the valve operation only with a signal from the first OP-IN port.

The speed control valve NC1V is connected to a flow path branched from the flow path from the OP-IN port to the output point main-OP and the output point main-CL (the flow path connected to the spool valve sp1V). Further, the flow path from the spool valve sp1V to the output point main-OP is parallel to the flow path from the spool valve sp1V to the output point main-CL. The flow path from the speed control valve NC1V toward the air operated sp1V0 of the spool valve sp1V branches, and the branched flow path is connected to the output point FR.

In the speed control valve (NC1V), a flow control valve and a check valve are combined, and the flow of compressed air is controlled from the OP-IN port toward the air operated (sp1V0) side of the spool valve (sp1V) and the output point FR. By stopping (reverse direction in which the check valve operates in the reverse direction), the flow control valve and the check valve are connected in parallel.

The speed control valve NC2V is connected to a flow path from the spool valve sp1V to the output point main-OP.

In the speed control valve (NC2V), a flow control valve and a check valve are combined, and the flow of compressed air is permitted from the spool valve (sp1V) toward the output point mail-OP (return at the check valve).止) The flow control valve and the check valve are connected in parallel due to the forward direction), in which the function does not work.

The speed control valve NC3V is connected to a flow path from the spool valve sp1V to the output point main-CL.

In the speed control valve (NC3V), the flow control valve and the check valve are combined, allowing the flow of compressed air in the direction from the spool valve (sp1V) toward the output point mail-CL (return function in the check valve is activated). The flow control valve and the check valve are connected in parallel.

When the signal from the OP-IN port is ON, the spool valve sp1V is operated to delay the signal ON from the OP-IN port by the speed control valve NC1V.

At the same time, when the signal from the OP-IN port is ON, the air operated (sp1V0) side is compared with the flow of the output point main-OP or the output point main-CL from the OP-IN port by the speed control valve (NC1V). And the supply to the output point FR is operated to delay.

Further, when the spool valve sp1V is operated, the flow flowing out from the output point main-OP by the speed control valve NC2V is delayed from the switching by the operation of the spool valve sp1V.

As described above, when the spool valve sp1V is operated, the flow flowing out from the output point main-CL by the speed control valve NC3V is delayed from switching by the operation of the spool valve sp1V.

Next, the pressure state in the sequence circuit SQ and the air operated state will be described.

14 to 18 show the pressure state in the sequence circuit SQ, the thick line indicates the high pressure (PHi) state, the thin line indicates the low pressure (PLo) state, and the thick broken line indicates the damper pressure (Pd). have.

In addition, in Figs. 14 to 18, for explanation, a state that actually occurs simultaneously is sometimes shown in another drawing.

First, the LOCK-CLOSE state in which the gate valve 1 is blocked and sealed is referred to as the start state.

At this time, the movable valve part 40 is in the closed state (closed state) in which the thickness of the movable valve part 40 becomes maximum in the closed state at the valve closed position E2 (FIG. 1). At the same time, the piston 112 is in the reduced position Pb.

In the LOCK-CLOSE state, as the pressure state of the sequence circuit (SQ), as shown in Fig. 14, at the input side, at the input of one system supplying compressed air, compressed air is supplied to the OP-IN port for performing valve operation. It is not supplied and is made in a low pressure (PLo) state (shown by a thin line), almost equal to atmospheric pressure.

Therefore, as shown in Fig. 14, since the air operated (sp1V0) side of the spool valve sp1V is also in a low pressure (PLo) state (shown by a thin line) equal to atmospheric pressure, the signal is turned off due to a vice force by the spring. , The flow path from the OP-IN port and the flow path on the output point main-CL side are in communication. At the same time, the flow path on the output point main-OP side communicates with the atmosphere (outside).

Thereby, the output point FR, the output point main-OP, and the output point main-CL are all in a low-pressure (PLo) state (shown by a thin line) substantially equal to atmospheric pressure. For this reason, although the reduction pressure space 22c and the increase pressure space 113 of the rotation drive air cylinder 110 are not pressurized, a force is applied by the sub-details 120, so that the piston 112 is in the reduced position ( Pb). Therefore, it is possible to realize normal close.

Next, at the timing when the valve opening command is turned ON as the opening operation, as a pressure state, as shown in Fig. 15, on the input side, compressed air is supplied to the OP-IN port and the high pressure exceeding the operating threshold ( PHi) state (shown by a thick line). With this, as shown in Fig. 15, the OP-IN port is in a pressurized state, and compressed air flows into the output point main-CL. At this time, since the direction from the OP-IN port side toward the output point main-CL is forward, the speed control valve NC3V is gently pressurized.

As a result, the output point main-CL is higher than the low pressure (PLo) state (shown by a thin line) that is substantially equal to the atmospheric pressure, but the high pressure (PHi) state (shown by the thick line) is set to the operating threshold of the rotary drive air cylinder 110. The damper pressure Pd is lower than that shown in the figure (shown by a thick broken line). Similarly, the reduced pressure space 22c of the rotation drive air cylinder 110 is in a damper pressure Pd state.

At this time, the damper pressure (Pd) state in the reduced pressure space (22c) is lower than the high pressure (PHi) state, and does not reach the operating threshold of the rotary drive air cylinder (110), so the force is applied by the sub-detail (120). The applied piston 112 does not move.

At this time, by the speed control valve (NC1V) connected to the OP-IN port, the air operated (sp1V0) side of the spool valve (sp1V) is in a state in which the pressure rise is delayed, and the spool valve (sp1V) does not move. Keep in a state that doesn't.

Moreover, although the output point FR is also delayed with respect to the OP-IN port, the pressure is rising. Along with this, the pressure of the ring-shaped air cylinder 80 connected to this output point FR also increases.

Subsequently, the pressure of the output point FR also rises, and as shown in FIG. 16, when the high-pressure (PHi) state (shown by the bold line) as the OP-IN port is reached, the output point FR is also in the high-pressure (PHi) state (thick (Shown by a line) is pressed.

At this time, as the pressure of the ring-shaped air cylinder 80 rises, the force by the air cylinder is greater than that of the main spring 70, and the movable valve plate portion 50 moves in the direction B1 to the movable valve frame 60 By sliding in this direction B2, the dimension of the movable valve part 40 in the thickness direction is reduced, the block is released, and the state is called a FREE-CLOSE state.

At this time, since a force is applied by the sub-detail portion 120, the rotational operation of the movable valve portion 40 is not started, and the valve closing position (release position) E2 is maintained.

When the pressure at the output point FR rises and the same high pressure (PHi) as the OP-IN port is reached (shown by a thick line), the air operated (sp1V0) side of the spool valve (sp1V) becomes pressurized, and the threshold value When is exceeded, the force due to compressed air becomes larger than the force of the spring by the spool valve sp1V, and moves to the right in Fig. 16, and the signal is switched to the ON state.

In the switching operation to the signal ON state from the spool valve (sp1V), after the compressed air flows in until the reduced pressure space 22c reaches the damper pressure (Pd) state, the pressure on the air operated (sp1V0) side The threshold value is controlled by the speed control valve NC1V so as to rise to this predetermined value.

Then, as shown in Fig. 17, when the spool valve sp1V is switched to the signal ON state, the flow path from the OP-IN port and the flow path on the output point main-OP side communicate with each other. At the same time, the flow path on the output point main-CL side is communicated to the standby side by the spool valve sp1V.

As a result, the output point main-OP connected to the OP-IN port is pressurized to become a high-pressure (PHi) state (shown by a thick line) as in the OP-IN port. At this time, since the direction from the OP-IN port side toward the output point main-OP is forward, the speed control valve NC2V is gently pressurized.

Then, in the increased pressure space 113 of the rotary drive air cylinder 110 in communication with the output point main-OP, it becomes a high pressure (PHi) state (shown by a thick line) at an instant, and communicates with the output point main-CL. Since the reduced pressure space 22c of the rotary drive air cylinder 110 is in a lower damper pressure Pd state (shown by a thick broken line), the pressure difference between the reduced pressure space 22c and the increased pressure space 113 is reduced. Raises.

As a result, at the same time, the force by the compressed air is greater than the biasing force of the spring member 120s of the biasing portion 120, and in the rotational drive air cylinder 110, the piston 112 extends from the reduced position Pb. It starts moving toward the (Pa) side.

At this time, the output point FR, the ring-shaped air cylinder 80 maintains a high pressure (PHi) state (shown by a thick line), and maintains a state in which the dimensions of the movable valve unit 40 in the thickness direction are reduced. .

At this time, in accordance with the movement of the piston 112 due to the pressurization of the increased pressure space 113, the rotation shaft 20 and the neutral valve body 5 rotate, and the movable valve part 40 is at the valve closed position (clog release Position) From (E2) (Fig. 1), it rotates toward the retracted position (E1) (Fig. 1), and is called a FREE-OPEN state.

Here, since the switching to the signal ON state of the spool valve sp1V by the speed control valve NC1V is delayed relative to the signal ON of the OP-IN port, the rotational operation of the movable valve unit 40, that is, The movement of the piston 112 from the reduced position Pb is delayed with respect to the pressurization of the ring-shaped air cylinder 80. For this reason, it is possible to maintain a sequence of operations in which the rotational operation of the rotary shaft 20 is performed after the movable valve part 40 is reduced in size in the thickness direction, that is, after the thickness reduction operation of the movable valve body 40 is finished. Done.

At this time, since the direction from the output point main-CL toward the standby side of the speed control valve NC3V is the reverse direction, the pressure reduction of the output point main-CL is alleviated. As a result, the air previously conveyed as damper air remains in the reduced pressure space 22c. Therefore, near the end of the valve opening operation, when this air is discharged to the atmosphere side through the buffer groove 119 and the control buffer passage 119a through the interior of the communication groove 116, the space 22d, etc., The air damper effect/air cushion effect is obtained, and the movement of the piston 112 to the extended position Pa can be smoothly changed.

Finally, the output point main-CL is reduced to a state of low pressure (PLo) equal to atmospheric pressure.

In this way, when the opening operation of the slide valve 1 is ended, as shown in Fig. 17, the FREE-OPEN state of the valve opening is maintained.

Finally, the output point main-CL is reduced to a state of low pressure (PLo) equal to atmospheric pressure.

In addition, the rotational speed in the opening operation of the slide valve 1 is defined by the moving speed from the reduced position Pb of the piston 112 in the rotational drive air cylinder 110 toward the extended position Pa. .

Here, at the end of the closing operation in which the piston 112 becomes the valve closing position E2 (Fig. 1), an air cushion action is generated by the residual pressure in the increased pressure space 113, and the damper pressure state By setting it as, it is possible to prevent the inner surface of the cylinder body 111 and the piston 112 from violently abutting and colliding, and generation of particles due to impact can be prevented.

In addition, at the end of the movement of the piston 112, by the air cushion action due to the effect of the air cushion packing in the space 22d corresponding to the connection portion 112d, the same as the air damper described as the buffer groove 119 As a result, the speed at the time of reaching the stretched position Pa is alleviated, and the generation of particles due to impact can be prevented.

Next, the closing operation from the open state will be described.

As the closing operation, when the command to close the valve is ON, that is, when the pressurized state at the OP-IN port disappears and the compressed air is not supplied and the pressure becomes a low pressure (PLo) state almost equal to atmospheric pressure, as the pressure state, As shown in Fig. 18, the output point FR connected to the OP-IN port and the air operated (sp1V0) side of the spool valve (sp1V) are in a low pressure (PLo) state.

At this time, the output point FR communicates with the OP-IN port equal to the atmospheric pressure, but the speed control valve (NC1V) is in the forward direction from the output point FR to the OP-IN port, so the flow flowing out from the output point FR is , It is decompressed gently without delay.

At the same time, the spool valve sp1V moves to the left in FIG. 18 by the force of the spring, and can be switched to the signal OFF state without delay.

At the same time, the flow path on the output point main-OP side communicates with the OP-IN port equal to the atmospheric pressure, but the speed control valve (NC2V) is output because the direction from the output point main-OP toward the OP-IN port is in the reverse direction. The flow flowing out of the point main-OP is delayed from the valve closing command ON switching.

Thereby, the flow path on the output point main-OP side communicates with the atmosphere (outside), and the increased pressure space 113 of the rotary drive air cylinder 110 connected to the output point main-OP is depressurized. Then, by the biasing force of the spring member 120s in the sub-detail portion 120, the piston 112 starts to move from the extended position Pa to the reduced position Pb side.

When the air operated (sp1V0) side is in a low pressure (PLo) state, at the same time, the output point FR is also in a low pressure (PLo) state.

Here, in the speed control valve (NC1V), since the needle valve for speed control and the check valve are connected in parallel, the pressure drop at the OP-IN port is not delayed, and the air operated (sp1V0) side and the output point FR The pressure drop of it leads to the pressure drop. In other words, it is necessary to delay in the FREE operation, but not in the CLOSE state, so the configuration has no delay action.

At the same time, the flow path on the flow output point main-OP side is depressurized to a low pressure (PLo) state, and the decompression proceeds.

Along the movement of the piston 112 from the extended position (Pa) toward the reduced position (Pb), the rotation shaft 20 and the movable valve part 40 rotate, and the movable valve part 40 is the retracted position (E1) From (Fig. 1), it rotates toward the valve closed position (clog release position) (E2) (Fig. 1), and becomes a FREE-CLOSE state.

The ring-shaped air cylinder 80 is depressurized in a low pressure (PLo) state. As a result, the thickness of the movable valve portion 40 increases due to the biasing force of the main spring 70, and operates in a closed state at the valve closed position E2 (Fig. 1), and enters a LOCK-CLOSE state.

In this way, when the closing operation of the slide valve 1 is ended, as shown in FIG. 14, by the biasing force of the spring member 120s at the sub-detail 120, the closed state can be maintained at the valve closing position. .

Here, when the OP-IN port is in a depressurized state, since the dimension in the thickness direction of the movable valve unit 40 can be maintained in a state that does not decrease, the slide valve 1 does not open and the pressure air for driving Even in the absence of supply, normal close can be achieved.

The states in the above sequence circuit SQ are summarized.

<Valve open state>

lmain-OP: high voltage continuity

lmain-CL: standby conduction state

lFR: high voltage conduction condition

<During valve closing rotation>

lMain-OP: Atmospheric liberation

lMain-CL: high pressure conduction state

lFR: high pressure storage condition

<Valve closed rotation completed, valve lift operation started>

lMain-OP: Atmospheric liberation

lMain-CL: high pressure conduction state

lFR: Atmospheric Liberation

As described above, for the input consisting of one system of the OP-IN port, it is possible to control the opening and closing operation of the valve without using an electrical mechanism to determine the pressure state at the output points of FR, main-OP, and main-CL. It is possible. In addition, since the order in which such pressure conditions change is set, the blocking position, the blocking release position, and the retracting position are realized in sequence, the operation of the slide valve 1 is accelerated. In addition, it is possible to perform a normal close operation while performing safely.

As described above, in the present embodiment, the movable valve portion 40 constituted by the movable valve plate portion 50 and the movable valve frame 60 that are accessible to each other in the flow passage direction is provided, and the movable valve portion 40, A main spring 70 for applying a force to the movable valve plate portion 50 and the movable valve frame 60 toward the outside in the flow path direction is provided, and the movable valve portion 40 includes a movable valve plate portion 50 and a movable valve frame ( A ring-shaped air cylinder 80 that moves 60 toward the central position in the flow path direction of the hollow part 11 is installed, and forces the movable valve frame 60 to approach the neutral valve part 30. An auxiliary spring 90 to be applied is installed. Thereby, the movable valve plate part 50 and the movable valve frame 60 are pressed against the inner surfaces 15a and 15b of the valve box, and the sealing part 61 and the reaction force transmitting part 59 can reliably close the valve.

In addition, by moving the movable valve plate portion 50 and the movable valve frame 60 toward the central position in the flow path direction of the hollow portion 11, the movable valve body 40 is rotated so that the valve box 10 does not contact the movable valve body 40 Then, the movable valve body 40 can be moved to the retracted position by a drive mechanism that is small in size and has a small output compared to a mechanism requiring an operation other than rotation.

In this configuration, a valve body can be formed by one movable valve portion 40 and three sub-detail portions 70, 80, and 90. In addition, the movable valve plate part 50 and the movable valve frame 60 are directly pressed against the inner surface of the valve box 10 by the restoring force of the main spring 70 disposed in the surrounding area of the movable valve part 40, and The valve can be closed. Similarly, the movable valve plate part 50 and the movable valve frame 60 are connected to the valve box 10 by the action of compressed air supplied to the ring-shaped air cylinder 80 disposed in the peripheral area of the movable valve part 40. The valve can be opened in a state in which it can be rotated securely by being separated from the inner surface of the cylinder. Therefore, in the first embodiment, a slide valve having a simple structure and capable of performing a gate operation with high reliability can be realized.

[Tightening bolt (fastening member) 43]

19 is an enlarged view showing a main part of a member positioned near the fastening member in the present embodiment.

As shown in FIG. 19, the fastening bolt (fastening member) 43 has a tip portion 43a provided with a male screw on the outer circumferential surface. The distal end portion 43a is barely bonded to a screw hole 63a provided in the fastening threaded portion 63 provided in the movable valve frame 60. The fastening bolt 43 is in the thickness direction of the movable valve body 40, that is, in a direction parallel to the direction B1 or direction B2, which is the moving direction of the movable valve plate part 50 and the movable valve frame 60, the fastening bolt ( It is installed so that the axis of 43) faces.

The central portion 43b of the fastening bolt 43 has approximately the same diameter as the tip portion 43a, and moves in the axial direction to the through hole 57b provided in the fastening bare portion 63 provided in the movable valve plate portion 50 It is being penetrated by making it possible. The diameter dimension of the central part 43b is set smaller than the diameter dimension of the through hole 57b, and it is comprised so that they do not contact each other even when they move relative to the axial direction.

The base end portion 43c of the fastening bolt 43 is a bolt head, and has a diameter larger than that of the tip portion 43a and the central portion 43b. The abutment surface 43d of the tip portion 43a abuts against the abutment surface 57d on the outside of the through hole 57b in the fastening portion 57 where the tip portion 43a faces, so that the fastening bolt 43 ) And the position of the movable valve plate 50 in the flow path direction can be regulated.

In the fastening bolt 43, a locking groove 43e is provided around the circumferentially at a position at the tip of the end portion 43a than at a portion where the external thread of the tip portion 43a is screwed. A snap ring (an engagement member) 43f such as a washer is fitted to the engaging groove 43e. When the snap ring 43f comes into contact with the outer surface 63f of the screw hole 63a, the movement of the fastening bolt 43 in the axial direction (the flow path direction) in the inward direction (in the illustrated downward direction) is regulated. Even if the fastening bolt 43 rotates, the snap ring 43f is caught by the fastening bolt 43 so that the fastening bolt 43 does not come off from the movable valve frame 60.

The snap ring (engaging member) 43f is in a state in which the fastening bolt (fastening member) 43 simply does not come off, and the fastening of the movable valve plate portion 50 and the movable valve frame 60 is released, It is possible that the fastening bolt 43 is not loosened for a long time and is also held in position. That is, since the snap ring (engaging member) 43f needs to stably bear the fixed axial force, it is preferable to use an E-type snap ring or a C-type snap ring as the snap ring 43f. Further, a snap ring having a shape corresponding to the shape of the engaging groove 43e may be employed depending on the type of the snap ring. Moreover, as a locking member, a pin-shaped locking member is also adaptable. In this case, instead of the locking groove 43e, it may be fixed to a locking hole provided in the radial direction of the fastening bolt 43.

The length of the fastening bolt 43 is, even when the movable valve portion 40 is the maximum thickness with the snap ring 43f abutting the outer surface 63f, the abutting surface 43d on the front end portion 43a side is , The contact surface 43d is set to be long enough not to contact the contact surface 57d on the outside of the through hole 57b in the facing fastening portion 57. In addition, when the movable valve portion 40 has a minimum thickness, the fastening bare portion 63, the contact surface 63g opposite to the fastening bare portion 63, and the contact surface 57g come into contact with each other, The position of the valve plate portion 50 and the movable valve frame 60 is regulated. That is, with respect to the bare fastening bolt 43, the movable valve plate portion 50 is in the direction B1 to a position where the contact surface 57g abuts the contact surface 63g, and in the direction B2, the contact surface 57d ) Becomes movable to the position where it abuts against the contact surface 43d.

Therefore, by rotating the fastening bolt 43 with respect to the screw hole 63a and changing the fastening length, the moving range of the movable valve plate 50, that is, the movable valve plate 50 and the movable valve frame 60 The position in the direction of the flow path can be regulated. In particular, by the air cylinder 80, a force greater than the auxiliary force of the main spring 70 is generated, and the thickness of the movable valve portion 40 is reduced, and the contact surface 57d is the contact surface 43d. The fastening bolt rotates so that it abuts against it. Thereby, even in a state in which the drive of the air cylinder 80 is stopped, it becomes possible to maintain a state in which the thickness of the movable valve part 40 is reduced. This makes it possible to rotate freely so that the neutral valve element does not come into contact with the valve box 10 during maintenance or the like.

In addition, the fastening bolt 43 is movable when viewed from a plane in order to stably maintain a state in which the thickness of the movable valve unit 40 is reduced because the force by the air cylinder is greater than the force of the main spring 70 provided in plural. This fastening bolt 43 is arranged symmetrically with respect to the central position where the valve portion 40 is placed in the flow path direction and the plurality of main springs 70 are arranged.

Specifically, the shape of the movable valve part 40 is substantially circular when viewed from a plane in the flow path direction, and a plurality of main springs 70 are formed in the first peripheral region 40a that is the outermost circumference of the movable valve part 40. It is arranged to be located concentrically. In this case, the plurality of fastening bolts 43 are arranged to be concentric with respect to the arrangement of the plurality of main springs 70, and the spacing of the plurality of main springs 70 and the spacing of the plurality of fastening bolts 43 In order to become the same, the number of fastening bolts 43 is set equal to the number of main springs 70.

In the above configuration, as an example, a case in which all of the supporting forces of the main springs 70 are the same is mentioned. On the other hand, when the biasing force of the plurality of main springs is uneven, the uneven biasing force is efficiently received, so that the reduction width of the thickness dimension of the movable valve part 40 becomes the same throughout the surface direction of the neutral valve body, It is desirable to install fastening bolts.

In this way, for the movable valve part 40 in which the negative force of the main spring 70 is always operating, a jig for reducing the thickness of the movable valve part 40 is not separately prepared, and the neutral valve part 30 It is possible to enable the removal of the neutral valve body composed of the and movable valve portion (40).

In addition, by providing the snap ring 43f, it is possible to eliminate the risk of losing the fastening bolt 43 after removing it during maintenance.

Hereinafter, a gate valve according to a second embodiment of the present invention will be described based on the drawings.

20 is a plan view showing the configuration of a gate valve according to the present embodiment. Fig. 21 is a longitudinal sectional view showing the configuration of the gate valve according to the present embodiment, and is a diagram illustrating a case where the valve body is disposed at the retractable position FREE. 21 corresponds to the line segment B-O-C in FIG. 20.

22 to 25 are diagrams illustrating a case where the valve body is disposed at the retractable position FREE as in FIG. 21. Fig. 22 is an enlarged view showing the main part along the line segment A-O in Fig. 20, and is a view showing the structure of a member located in the vicinity of the sub-detail A built in the valve box. Fig. 23 is an enlarged view showing the main part along the line segment B-O in Fig. 20, and is a view showing the structure of a member located in the vicinity of the sub-detail B disposed between the movable valve part A and the movable valve part B. Fig. 24 is an enlarged view showing the main part along the line segment C-O in Fig. 20, and is a view showing the movable valve part A and the movable valve part B at positions where the sub-detail A and sub-detail B do not exist. 25 is an enlarged view showing a main part of sub-detail C in FIG. 20. 21 is a view of sub-detail C as viewed from the depth of the ground. Fig. 26 is a longitudinal sectional view showing the configuration of the gate valve according to the present embodiment, and is a diagram illustrating a case where the valve body is disposed in a valve closed position (positive pressure or no differential pressure). 26 corresponds to the line segment B-O-C in FIG. 20.

[Pendulum type gate valve]

The gate valve 300 according to the present embodiment is a pendulum-shaped slide valve, as shown in Figs. 20 to 25.

The gate valve 300 is a valve box having a hollow portion 311 and a first opening 312a and a second opening 312b that are provided to face each other with the hollow portion 311 interposed therebetween and serve as flow paths to communicate with each other. 310 and a neutral valve body 305 disposed in the hollow portion 311 of the valve box 310 and capable of blocking the first opening 312a.

A flow path H is set from the first opening 312a toward the second opening 312b. In the following description, the direction along the flow path H can be referred to as the flow path direction H.

The gate valve 300 retracts the neutral valve body 305 from the first opening 312a and a valve blocking position (FIG. 26) in which the neutral valve body 305 is in a closed state with respect to the first opening 312a. It functions as a position switching unit, which operates between the valve open positions in one open state (Fig. 21). Further, the gate valve 300 has a rotation shaft 320 having an axis extending in the flow path direction H.

The neutral valve body 305 can change the position of the flow path direction H with respect to the neutral valve part 330 connected to the position switching part (neutral valve body 305), and the neutral valve part 330 It is composed of a movable valve unit 340 connected to each other.

The movable valve part 340 includes a movable valve part A360 (movable valve frame) and a movable valve part B 350 (movable valve plate part). The movable valve part A 360 (movable valve frame) is a first seal part 361 provided around the movable valve part A and in close contact with the inner surface of the valve box 310 located around the first opening 312a. Is installed.

The movable valve part B 350 (movable valve plate part) is slidable in the flow path direction H with respect to the movable valve part A 360 (movable valve frame).

In the valve box 310, a plurality of sub-details A 370 (piston: equivalent to an old main spring) are incorporated. The sub-detailed portion A 370 disposed inside the valve box 310 constitutes an elevating mechanism capable of expanding and contracting that presses the movable valve portion A 360 in a direction toward the seal surface. The sub-detail A370 is driven by being connected to the output point mail-FR of the sequence circuit SQ in the first embodiment.

Thereby, the sub-detail part A 370 applies a force to the movable valve part A360 toward the first opening part 312a in the flow path direction H, and the 1st sealing part 361 is opened by the 1st opening part 312a. ) Has a function to enable close contact with the inner surface of the valve box 310 located around.

Further, in the gate valve according to the present embodiment, the movable valve part A is connected to the neutral valve part so that the position in the flow path direction can be changed, and the movable valve part A is forced toward the center position in the flow path direction. It has a sub-detail C to apply it.

In addition, the gate valve according to the present embodiment has a sub-detail A constituting an elevating mechanism that can be expanded and contracted by pressing the movable valve part A in a direction toward the sealing surface of the valve box inner surface 310A inside the valve box.

According to this configuration, the valve body is constituted by the two movable valve parts A and B and one sub-detail B, and the other sub-detail A is built in the valve box, so the weight of the sub-detail A The weight reduction of the valve body structure can be aimed at only minutes. In the gate valve according to the embodiment of the present invention, sub-detail A functions when the valve is set from the open state (Fig. 21) to the valve closed state (Fig. 26), and conversely, the valve open state (Fig. In the case of Fig. 21), the sub-detail C functions.

Between the movable valve part A360 (movable valve frame) and the movable valve part B 350 (movable valve plate part), a sub-detail part B (spring: equivalent to the old air cylinder) is disposed (movable valve It is built into wealth). The sub-detailed part B drives the thickness dimension of the movable valve part A360 (movable valve frame) and the movable valve part B (movable valve plate part) in the flow path direction H so that it may adjust.

When the rotation shaft 320 rotates in the direction indicated by the symbol R1 (the direction intersecting the direction of the flow path H), the neutral valve portion fixed to the rotation shaft 320 through a connection member (not shown) along this rotation (330) also rotates along direction R1. Further, since the movable valve unit 340 is connected to the neutral valve unit 330 in a slidable manner only in the thickness direction, the movable valve unit 340 rotates integrally with the neutral valve unit 330.

By rotating the neutral valve part 330 in this way, the valve closed position of the flow path H is formed from the retracted position formed of the hollow part 311 in which the flow path H is not installed to a position corresponding to the first opening 312a. The furnace movable valve part 40 moves in a pendulum motion.

In addition, the sub-detail A 370 built into the valve box 310 is disposed inside the valve box 310 and supplied from the output point mail-FR of the sequence circuit SQ in the first embodiment. Works by The sub-detailed part A 370 is a fixed part (cylinder) 371 that can be driven, and by this fixed part 371, it is possible to expand and contract in a direction from the fixed part 371 toward the movable valve part A 360. It is composed of a movable part (piston) 372 and a biasing member such as a spring that is disposed on the fixed part 371 and applies a force to the piston 372 toward the valve closing side.

Further, around the movable portion 372, a ring-shaped seal member (O-ring) 375 is provided at a position on the tip side of the movable portion 372. The movable part 372 is stretchable and contractible in a state where the vacuum side, which is the fixed part 371 side and the movable valve part A 360 side, is sealed.

Thereby, the sub-detail part A 370 makes the tip of the sub-detail part A 370 abut against the movable valve part A 360 by compressed air, and the movable valve part A 360 is brought into the first opening 312. It has a function to move toward ). As with the air cylinder 80 and the main spring 70 of the first embodiment, the sub-detail A 370 can be sealed by spring force and FREE (non-sealed) by pressure.

The sub-detail A (370) makes the movable valve part A (360) in contact with the inner surface of the valve box 310 by a function of moving the movable valve part A (360) toward the first opening (312a), and is movable. The valve part A (360) is pressed against the inner surface of the valve box 310, and the flow path (H) is closed (valve closing operation).

In contrast, the sub-detailed portion C 390 has a function of allowing the movable valve portion A 360 to be separated from the first opening portion 312a. The sub-detail C (390) separates the movable valve part A (360) from the inner surface of the valve box 310 by this function, and then retracts the movable valve part A (360), thereby closing the flow path (H). Open (release action).

Mechanical abutting operation by the sub-detail A (370) for bringing the movable valve part A (360) into contact with the inner surface of the valve box 310, and the movable valve part A (360) from the inner surface of the valve box 310 By the mechanical separation operation by the sub-detail C (390) separating the valve, the valve closing operation and the release operation become possible.

After this release operation, the rotation shaft 320 rotates in the direction indicated by the symbol R2 (retract operation), and along this rotation, the neutral valve part 330 and the movable valve part 340 (that is, the movable valve part A 360 ) And the movable valve part B (350) also rotate in the direction R2.

In addition, the sub-detail B for driving the movable valve part A 360 and the movable valve part B 350 so as to be able to adjust the thickness in the flow path direction H is the movable valve part A and the movable valve part B It is placed between. That is, the sub-detailed part B is incorporated in the movable valve part. Due to the presence of this sub-detail B, the movable valve part A and the movable valve part B interlock in a series of operations (valve closing operation, releasing operation, and retracting operation).

By this releasing operation and the retracting operation, the movable valve unit 340 retracts from the valve opening/closing position to the retracting position and performs a valve opening operation in which the valve is opened.

As described above, in the gate valve according to the present embodiment, the valve body is formed by the two movable valve parts A (360) and the movable valve part B (350), and the two sub-details B (380) and the sub-detail C (390). Configuration, and the other one sub-detail A can obtain a configuration built into the valve box.

That is, in this embodiment, the weight reduction of the valve body becomes possible as long as the other sub-detail A is incorporated in the valve box.

Accordingly, according to the present embodiment, it is possible to provide a gate valve capable of achieving a highly reliable gate operation, reducing the weight of the movable valve portion, and realizing a 100% back pressure cancellation rate.

[Valve box 310]

The valve box 310 is constituted by a frame having a hollow portion 311.

In Fig. 21, a first opening 312a is provided on the upper surface of the frame, and a second opening 312b is provided on the lower surface of the frame.

The gate valve 300 is inserted between a space in which the first opening 312a is exposed (a first space) and a space in which the second opening 312b is exposed (a second space). The gate valve 300 divides a flow path H connecting the first opening 312a and the second opening 312b, that is, a flow path H connecting the first space and the second space (closed And open this sharing state (connecting the first and second spaces).

In the hollow part 311 of the valve box 310, the rotation shaft 320, the neutral valve part 330, and the two movable valve parts A 360 (slide valve plate) constituting the movable valve part 340 are movable. A valve part B 350 (counter plate), two sub-details B 380 (storage and maintenance spring) and sub-detail C 90 (auxiliary spring) are provided. Inside the frame constituting the valve box 310, a sub-detail A (elevating mechanism) is provided.

[Rotation shaft 320]

The rotation shaft 320 corresponds to the rotation shaft 20 in the first embodiment, extends substantially parallel to the flow path H, penetrates the valve box 10 and is rotatably provided. The rotation shaft 320 is rotatable by the rotation shaft drive mechanism 100 and a sequence circuit SQ connected thereto in the first embodiment.

A connection member (not shown) is fixed to the rotation shaft 320. This connection member is, for example, a substantially flat plate-shaped member, and is fixed to one end of the rotation shaft 320 by screws or the like.

[Neutral valve part 330]

The neutral valve part 330 extends in a direction orthogonal to the axis of the rotation shaft 320 and is disposed to be included in a plane parallel to the orthogonal direction. The neutral valve part 330 is fixed to the rotation shaft 320 through a connection member (not shown) or directly through a connection member (not shown).

As shown in FIG. 20, the neutral valve part 330 has a circular part 330a overlapping with the movable valve part 340, and a rotating part 330b that rotates the circular part 330a with the rotation of the rotation shaft 320. ). The rotating part 330b is located between the rotating shaft 320 and the circular part 330a, and is formed in an arm shape in which two arms extend from the rotating shaft 320 toward the circular part 330a. Accordingly, the circular portion 330a is sometimes referred to as an arm portion.

These rotation shafts 20 and the neutral valve part 330 rotate with respect to the valve box 310, but are provided so as not to change their position in the flow path H direction.

The rotation shaft 320 can be selectively connected to either the upper side and the lower side along the flow path direction H with respect to the neutral valve part 330. Alternatively, the rotation shaft 320 can be attached to the entire neutral valve body 305, that is, both surfaces of the neutral valve body 305.

In this embodiment, when the gate valve is closed, the gate valve is opened or closed based on the arrangement of the gate valve in which the neutral valve body 305 moves so that the movable valve part 340 blocks the first opening 312a. The case of operation will be described.

[Movable valve part 340, movable valve part B 350 (movable valve plate part: counter plate), movable valve part A(360) (movable valve frame: slide valve plate)]

The movable valve part 340 is formed in an approximately disk shape, and the movable valve part B 350 formed in a substantially concentric shape with the circular part 330a, and the movable valve part B 350 is disposed so as to surround the movable valve part B 350. It has a ring-shaped movable valve part A (360). The movable valve part A360 is connected to the neutral valve part 330 by making it slidable in the flow path H direction. Moreover, the movable valve part B350 is slidably fitted to the movable valve part A360.

The movable valve part B 350 and the movable valve part A 360 are movable while sliding in the directions (reciprocating directions) indicated by symbols B1 and B2 (Fig. 21) by the sub-detail B 380 (storage and retaining spring). Do. Here, the directions indicated by the symbols B1 and B2 are the directions perpendicular to the planes of the movable valve part B 350 and the movable valve part A 360, and are a flow path H direction parallel to the axial direction of the rotation shaft 320. .

In addition, an inner circumferential crank portion 350c is formed in the entire region in the vicinity of the outer circumference of the movable valve portion B 350. Moreover, the outer circumferential crank part 360c is formed in the whole area|region near the inner circumference of the movable valve part A360.

In this embodiment, the outer circumferential crank part 360c has a sliding surface 360b parallel to the flow path H direction. The inner circumferential crank portion 350c has a sliding surface 350b parallel to the flow path H direction.

The outer circumferential crank portion 360c and the inner circumferential crank portion 350c are fitted so that the sliding surfaces 350b and 360b are slidable. In order to enable this sliding, a third seal portion 352 (sliding seal packing) made of an O-ring or the like is disposed between the outer circumferential crank portion 360c and the inner circumferential crank portion 350c.

On the surface of the movable valve part A 360 that faces (abuts) the inner surface of the valve box 310, it is formed in a ring shape corresponding to the shape of the first opening 312a, for example, made of an O-ring or the like. 1 Seal part 361 (valve plate seal packing) is installed.

The first seal portion 361 is a valve box of the valve box 310 serving as the periphery of the first opening 312a while the movable valve portion 340 covers the first opening 312a when the valve is closed. In contact with the inner surface 310A, it is pressed by the movable valve part A 360 and the valve box inner surface 310A of the valve box 310. Thereby, the first space is reliably isolated from the second space (a division state is ensured).

On the surface of the movable valve part B 350 facing (abutting) the valve box inner surface 310A of the valve box 310, it is formed in a ring shape corresponding to the shape of the second opening 312b, for example, O A second seal portion 351 (counter cushion) made of a ring or the like is provided.

[Detail B (380) (storage and maintenance spring)]

The sub-detail B 380 (storing and holding spring) is located between the movable valve part A and the movable valve part B, and is locally in a region where the movable valve part A 360 and the movable valve part B 350 overlap. Is placed. That is, the sub-detailed part B 380 is incorporated in the movable valve part 340 (between the movable valve part A360 and the movable valve part B350). As for the place where the sub-detail part B 380 is provided, three or more are preferable and are provided apart from each other. The arrangement of the sub-details B 380 spaced apart from each other is not limited to the arrangement at equal intervals, and a structure in which a plurality of sub-details B 380 are arranged at non-equal intervals may be employed. 20 shows a configuration example in which three sub-details B 380 are arranged at the same angular position (120 degrees) when viewed from the center O of the valve body.

The sub-detailed part B 380 controls the movement of the movable valve part B by the long axis part of the bolt-shaped guide pin 381 fixed to the movable valve part A 360 (movable valve frame: slide valve plate). It is structured to induce (regulate). The holding spring constituting the sub-detail B 380 is formed of an elastic member (eg, spring, rubber, etc.).

The sub-detailed part B380 (storage holding spring) drives the thickness dimension of the movable valve part A360 and the movable valve part B350 in the flow path direction H so that it may adjust. Thereby, the movable valve part B350 interlocks in the direction in which the movable valve part A360 moves (a direction of a code|symbol B1 or a direction of a code|symbol B2).

At that time, since the movable valve part B 50 is driven so that the thickness dimension in the flow path direction H can be adjusted, when the above-described valve is closed, the first seal part 361 of the movable valve part A 360 The impact that occurs on the gate valve when the valve contacts the inner surface 310A of the valve box 310 is alleviated.

In addition, when the valve is opened or when the pressure is reversed, the shock generated by the gate valve when the second sealing portion 351 of the movable valve portion B 350 contacts the inner surface 310B of the valve box 310 is alleviated. When this impact is received, a closed space is formed by the movable valve portion B 350, the valve box inner surface 310B and the second seal portion 351. An air vent hole 353 is provided in the movable valve part B350 to remove the gas that is applying pressure to this closed space.

[Guide pin (381)]

The guide pin 381 is fixedly provided to the movable valve portion A360 and is installed in the flow path direction H, and is configured as a rod-shaped body having a uniform thickness. The guide pin 381 ㄹ penetrates the inside of the sub-detail portion B 380 and is fitted into the hole portion 50h formed in the movable valve portion B 350.

This guide pin 381 is the movable valve part B so that the movable valve part B 350 and the movable valve part A 360 slide in a direction (the shaft represented by Q) not deviated from the directions represented by the signs B1 and B2. The position regulation of 350 and the movable valve part A360 is guided reliably. In addition, this guide pin 381 does not change the posture of the movable valve part B 350 and the movable valve part A 360 even when the movable valve part B 350 and the movable valve part A 360 slide. In order to perform parallel movement without moving, position regulation of the movable valve part B 350 and the movable valve part A 360 is reliably guided.

[Detail C (390) (auxiliary spring)]

The sub-detail C 390 (auxiliary spring) is provided between the neutral valve part 330 and the movable valve part A360. The sub-detail C 390 connects the movable valve part A 360 to the neutral valve part 330 in a flow path direction H of the valve box 310 so that the position in the flow path direction can be changed. , A force is applied to the movable valve part A toward the center position in the flow path direction. Thereby, in the present embodiment, when the gate valve changes from the valve closed state (FIG. 26) to the valve open state (FIG. 21), the sub-detail C 390 functions.

That is, the sub-detail C (390) has a structure that prompts a mechanical separation operation of separating the movable valve portion A (360) from the inner surface of the valve box 310 from the valve closed state (FIG. 26).

The sub-detail C 390 has a circular portion 330a located at an outer circumferential position of the neutral valve unit 330, is positioned at an outer circumferential position of the movable valve unit A 360, and overlaps the circular portion 330a ( It is installed in the position regulation part 365.

The sub-detail C (390) is arranged at the same angular position as the sub-detail B (380) when viewed from the center O of the valve body. 20 shows an example of a configuration in which three sub-details C 390 are arranged.

The sub-detail C 390 is also an elastic member (eg, spring, rubber, plate spring, etc.) similarly to the sub-detail B 380.

Among them, when a plate spring (Fig. 21) is used as the sub-detail C (390), the function of drawing and holding the movable valve unit A (360) toward the neutral valve unit 330 (arm) α [valve In addition to the function of prompting the mechanical separation operation from the closed state (FIG. 26)], a function β is also provided for maintaining the radial position of the movable valve part A 360 relative to the neutral valve part 330 (arm). Since it can be done, it is more preferable.

Fig. 25 is a schematic cross-sectional view showing the sub-detail C 390 when the gate valve is in the valve open state (Fig. 21).

As shown in Fig. 21, a portion close to both ends of the plate spring (detailed portion C 390) is sandwiched by ring-shaped members 392a and 392b by fixing pins 392 and 393, and the neutral valve portion 330 ) Is caught along the circumferential direction of the circular portion 330a. In addition, a portion close to the central portion of the plate spring is caught by the position control portion 365 of the movable valve portion A360 by the pull pin 391.

The plate spring in which the gate valve is in the valve open state (Fig. 21) has a curved portion 390A, so that the distance in the height direction is reduced, that is, the movable valve portion A with respect to the neutral valve portion 330 (arm) ( 360) is in a narrowed state (FIG. 25).

On the other hand, the plate spring in the case where the gate valve is in the valve closed state (Fig. 26) is a state in which the distance in the height direction has increased by removing the curved portion 390A shown in Fig. 25, that is, the neutral valve unit 330 ( The separation distance between the movable valve part A (360) with respect to the arm) is in a state of being widened.

As described above, by employing a plate spring having an extremely simple structure as the sub-detail C 390, the sub-detail C 390 in the gate valve according to the embodiment of the present invention has two functions (function α And function β) can be obtained stably.

[Detail A (370) (elevating mechanism)]

The sub-detail A 370 (elevating mechanism) is built in the valve box, and is separate from the valve body including the two movable valve parts A, the movable valve part B and the two sub-details B and the sub-detail C described above. Is being achieved.

The sub-detail A (70) is supplied from the output point mail-FR of the sequence circuit (SQ) in the first embodiment, so by the pressure applied to the fixed part 371, the tip of the movable part 372 is a movable valve part. It extends toward A(360). By this operation, a force is applied to the movable valve part A360 toward the first opening part 312a along the flow path direction H. The sub-detailed portion A 370 has a function of enabling the first seal portion 361 to be in close contact with the inner surface 310A of the valve box around the first opening 312a by the elongating operation of the movable portion 372. .

The extension operation of this movable part 372 is made to be able to operate almost simultaneously with a plurality of sub-details A 370 built in the valve box 310.

The sub-detailed part A 370, on the contrary, does not have a function of allowing the first seal part 361 to be separated from the inner surface 310A of the valve box around the first opening 312a, but itself (moving part 372 to be described later) It has a function of returning to the position where it is initially moved (the position in the fixed part 371 described later). For this reason, the sub-detail part A (370) is an elevating mechanism that can expand and contract in the direction from the sub-detail part A (370) toward the movable valve part A (360).

A plurality of sub-details A (370) having such a configuration are disposed at positions acting on the movable valve part A (360), respectively, in the valve box (310), and are installed along the movable valve part A (360). do.

In the configuration example shown in FIG. 20, the location where the sub-detail portion A 370 is provided is preferably three or more, and is provided apart from each other.

The arrangement of the sub-details A 370 spaced apart from each other is not limited to an arrangement at equal intervals, and a structure in which a plurality of sub-details A 370 are arranged at non-equal intervals may be employed. In Fig. 20, when viewed from the center O of the valve body, a configuration example in which four sub-details A 370 are arranged at the same angular position (90 degrees) is shown.

The sub-detail A 370 in this configuration example is configured so that the angular position of the sub-detail A 370 does not overlap with the angular position at which the sub-detail B 80 and the sub-detail C are arranged.

With this configuration, the sub-detailed portion A (370) makes the tip portion 372a of the movable portion 372 abut against the lower surface (360sb) of the movable valve portion A (360), and the movable valve portion A (360) is first It has two functions: a function of moving toward the opening 312 and a function of returning to a position in which the movable unit 372 is initially actuated (a position within the fixed part 371), and serves as a lifting mechanism of the valve body. In charge.

21 to 24 show that the movable valve part 340 (movable valve part A 360, movable valve part B 350) is also with the inner surfaces 310A and 310B of the valve box 310 on either side of the valve box. It shows a state not in contact. This state is referred to as a state in which the valve body is FREE. Fig. 6 is an enlarged view showing the main part of the sub-detail C in the FREE state (Fig. 21). 21 is a view of sub-detail C as viewed from the depth of the ground.

In a state in which the valve body is FREE, the movable valve part A 360 by the function of the above-described sub-detail part A 370, that is, the function of moving the movable valve part A 360 toward the first opening 312 a. Is moved until it comes into contact with the valve box inner surface 310A of the valve box 310, and the flow path H is closed by pressing the movable valve part A 360 against the valve box inner surface 310A (valve closing action).

26 shows a state in which the flow path H is closed by the valve closing operation described above.

This state is referred to as a positive pressure/no differential pressure state.

When this valve body is in a positive/no differential pressure state, the function of the above-described sub-detail C (390), that is, the movable valve part A (360) is connected to the neutral valve part 330 so that the position in the flow path direction can be changed. At the same time, the movable valve part A is separated from the inner surface of the valve box 310 by a function of applying a force toward the center position in the flow path direction, and the movable valve part A 360 By retracting the flow path H, the flow path H is opened (release operation).

In addition, the sub-detail A (370) of the gate valve according to the present embodiment is incorporated in the valve box 310, and two movable valve parts A (360), a movable valve part B (350) and two parts are provided. It forms a separate body from the neutral valve body 305 including the detail B 380 and the sub detail C 390, and these are the rotary shaft drive mechanism 100 in the first embodiment and a sequence circuit SQ connected thereto Driven by Thereby, the gate valve 300 according to the present embodiment can reduce the weight of the valve body structure by the weight of the sub-detail A370.

In this embodiment, an effect equivalent to that of the first embodiment described above can be obtained.

Hereinafter, a third embodiment of the gate valve according to the present invention will be described based on the drawings.

27 is a cross-sectional view showing a gate valve according to the present embodiment.

What is different from the first and second embodiments described above with respect to this embodiment is a point related to sealing and a point accompanying it.

The gate valve 500 according to the present embodiment is a pendulum-shaped slide valve.

As shown in FIG. 27, the gate valve 500 is provided to face each other with the hollow portion 511 and the hollow portion 511 interposed therebetween, and the first openings 512a and the second openings ( A valve box 510 having 512b), a neutral valve body (valve body) 505 disposed in the hollow portion 511 of the valve box 510 and capable of blocking the first opening 512a, and the valve body 505 Functions as a position switching unit for operating the valve body 505 between the valve closed position in which) is closed with respect to the first opening 512a and the valve opening position retracted from the first opening 512a. And, a rotation shaft drive mechanism (rotation) consisting of a rotation shaft 520 having an axis extending in the flow path direction, a lock member 522 and a pinion 521 that rotates the rotation shaft 520, and a rotation air cylinder 610 that drives the rotation shaft 520 The device) 600 and the valve body slidably installed around the first opening 512a with respect to the flow path direction H, contacting the valve body 505 as the valve blocking position to block the flow path and the valve body A sealing 540 capable of an open state in which 505 is open to the valve open position, a blocking release air cylinder 570 built in the valve box 510 to release the blocking state of the sealing 540, and a sealing 540 ) A sealing portion 590 that applies a force in the direction in contact with the valve body 505, and a sequence circuit that sequentially operates the blocking release operation of the valve body 505 and the rotation operation of the valve body 505 ( SQ).

In the present embodiment, the hollow portion 511 corresponds to the hollow portion 11 of the first embodiment described above, and the first opening portion 512a is formed in the first opening 12a of the first embodiment described above. Correspondence, the second opening 512b corresponds to the second opening 12b of the first embodiment described above, the valve box 510 corresponds to the valve box 10 of the first embodiment described above, , The rotation shaft 520 corresponds to the rotation shaft 20 of the first embodiment described above, the lock member 522 corresponds to the lock member 22 of the first embodiment described above, and the pinion 521 is , Corresponding to the pinion 21 of the first embodiment described above, the rotation shaft drive mechanism (rotation device) 600 corresponds to the rotation shaft drive mechanism (rotation device) 110 of the first embodiment described above, and rotates The air cylinder 610 corresponds to the rotary air cylinder 610 of the first embodiment described above. Regarding these, the hundredth number of symbols is replaced, and the description thereof is omitted.

The valve body 505 of the present embodiment performs a rotational operation around the rotation shaft 520, but is made of a plate body that blocks the flow path without changing its thickness.

The sealing 540 of the present embodiment is in a closed state in which a flow path is blocked by contacting the valve body 505 serving as the valve closed position, and the valve body 505 is in an open state that can be opened to the valve opening position. It is possible. The sealing 540 is provided on the periphery of the first opening 512a in the direction of the flow path (H) so as to be slidable to the cylinder portion 541 provided in the valve box 510 and from the outside of the cylinder portion 541 to the periphery. It has a flange part 542 which is being extended.

The flange portion 542 is provided outside the periphery to be a position facing (abutting) the valve body 505. On the surface of the flange portion 542 facing (abutting) the valve body 505, a first seal portion 542a formed in a ring shape corresponding to the shape of the first opening 512a, for example, made of an O-ring or the like. ) (Counter cushion) is installed.

As described above, in the outer peripheral portion of the normal portion 541, the first opening 512a of the valve box 510 and a seal portion 541a formed in a ring shape when sliding, for example, made of an O-ring or the like (counter cushion). Is being installed.

The blocking release air cylinder 570 is built in the valve box 510 and is provided in a plurality of positions on the rear surface of the flange portion 542 with respect to the first seal portion 542a, and at a peripheral position of the sealing 540.

The clog release air cylinder 570 is connected to the inner space 571 built in the valve box 510, the piston 573 slidably installed in the inner space 571, and the piston 573 to seal the front end. A movable portion 572 extending toward 540 and a sealing portion 590 as a spring member provided in the inner space 571 are provided.

The blocking release air cylinder 570 performs an operation corresponding to the sub-detailed portion A70 (elevating mechanism) of the second embodiment described above. The movable part 572 performs an operation corresponding to the movable part 72. The internal space 571 is connected to the output point FR of the sequence circuit SQ of the first embodiment described above.

In the state where there is no pressurization from the output point FR, the sealing sub-detail 590 is exerted so that the distal end of the movable part 572 is extended toward the sealing 540.

Further, in the state of being pressed from the output point FR, the pressure in the inner space 571 is increased, and the distal end of the movable portion 572 is configured to degenerate so as to be separated from the sealing 540.

Further, the piston 573 and the inner space 571, and the circumference of the movable portion 572 and the releasing air cylinder 570 are sealed by a sealing member so as to maintain mutually sealed states.

The rotation shaft drive mechanism (rotation device) 600 in this embodiment corresponds to the rotation shaft drive mechanism 100 in the first embodiment. The rotary air cylinder 610 includes a sub-detail 620 for closing and operating the valve body 505, a piston 612 that can be opened and closed by sliding in the inner space 611b of the cylinder body (casing) 611, , It is arranged in series in the operation direction of the piston 612 and has a first pressure space 522c capable of closing the piston 612 and a second pressure space 613 capable of opening operation.

The first pressure space 522c is connected to the output point main-CL of the sequence circuit SQ in the first embodiment, and the second pressure space 613 is a sequence circuit ( SQ) is connected to the output point main-OP.

The spring member 620s as the sub-detail 620 is provided in a position near the locking member 522 of the piston 612 in the inner space 611b of the cylinder body (casing) 611, and rotates air A force is applied in the direction in which the cylinder 610 is degenerate, that is, the valve body 505 is closed and operated.

The configuration of the sequence circuit SQ in this embodiment is the same as that of the sequence circuit SQ in the first embodiment. The sequence circuit SQ has an air operated two-channel spool valve sp1V and speed control valves NC1V, NC2V, and NC3V in which a check valve and a flow control valve are combined.

In the gate valve 500 according to the present embodiment, the internal space 571 of the blocking releasing air cylinder 570 connected to the output point FR, the first pressure space 522c connected to the output point main-CL, and With respect to the second pressure space 613 connected to the output point main-OP, an open-close operation can be performed by performing a sequence operation equivalent to that of the sequence circuit SQ in the first embodiment.

Thereby, during the valve closing operation, it is possible to prevent the inner surface of the cylinder body 611 and the piston 612 from violently abutting and colliding.

Industrial availability

In the present invention, in a vacuum device, etc., the use of dividing the flow path connecting two spaces having different properties such as vacuum degree, temperature, or gas atmosphere, and the state of opening the divided state, and the divided state are When it is open, it can be widely applied to a gate valve for controlling the opening degree.

One… Gate valve
5… Neutral valve body
10, 10a, 10b... Valve box
11... Hollow part
12a... First opening
12b... Second opening
17, 18... Fluid path ring
20… Rotating shaft
21... Pinion
22... Rock
26... Valve shaft
30... Neutral valve part
40… Movable valve part
41... Supply route
42... By contact
50… Movable valve plate part (2nd movable valve part)
51a, 51b... 2nd seal part
52a, 52b... 3rd seal part
53, 54... wiper
55, 56... Intermediate waiting room
60… Movable valve frame (first movable valve part)
61... 1st seal part
62... guide pin
68... Connection pin
68A... Floating pin
69... Connection pin part
70... Main spring (1st sub-detail)
80... Ring-shaped air cylinder (second sub-detail)
90… Auxiliary spring (the third sub-detail)
91... Connection member
100… Rotary shaft drive mechanism
110... Rotary drive air cylinder (cylinder)
120... Detail
120s... Absence of spring
111... Cylinder body
111b... Inner space
112... piston
122s... shaft
113... Increasing (伸) pressure space (second pressure space)
22c... Reduced pressure space (first pressure space)
114... Vent
118... Buffer groove
SQ... Sequence circuit
FR, main-OP, main-CL… Output point
sp1V... Spool valve
NC1V, NC2V, NC3V… Speed control valve
cdS… Limiter switch valve
Pa… Stretched position
E1... Evacuation position
Pb... Reduced position
E2... Valve closed position

Claims (3)

As a gate valve,
A valve box having a hollow portion and a first opening portion and a second opening portion which are provided to face each other with the hollow portion therebetween to form a communication passage;
A neutral valve body disposed in the hollow portion of the valve box and capable of blocking the first opening;
A rotation shaft for rotating the neutral valve body between a valve closed position in which the neutral valve body is closed with respect to the first opening and a valve open position in which the neutral valve body is retracted from the first opening. and,
A rotation device comprising a lock pinion that rotates the rotation shaft and a rotation air cylinder that drives the lock pinion,
A clogging release driving unit comprising a clogging release air cylinder that performs an operation of canceling clogging of the neutral valve body;
A sequence circuit for sequentially enabling an operation of releasing blocking of the neutral valve body and a rotation operation of the neutral valve body,
Have,
The rotary air cylinder,
A sub-detail for closing the neutral valve body,
A piston capable of opening and closing operation,
A first pressure space capable of closing the piston and a second pressure space capable of opening operation, which are arranged in series in the operation direction of the piston,
Have,
The sequence circuit,
Air operated 2 channel spool valve,
Speed control valve in combination with check valve and flow control valve,
Have,
The sequence circuit,
When the gate valve is opened by supply of driving compressed air of one system, compressed air is supplied as damper air to the first pressure space,
When the driving of the blocking release air cylinder is finished, the first pressure space is brought into a non-pressurized state, the second pressure space is brought into a pressurized state, the opening operation of the rotary air cylinder is started, and the valve opening position Immediately before the neutral valve body reaches, the impact is alleviated by air in the first pressure space,
When the gate valve is closed by releasing the supply of the driving compressed air, the first pressure space and the second pressure space are in a non-pressurized state, and the rotational air cylinder is closed by the biasing force of the minor portion. And immediately before the neutral valve body reaches the valve closing position, shock is alleviated by damper air in the second pressure space,
When the rotational operation of the neutral valve body ends, starting the blocking operation of the neutral valve body by the blocking release air cylinder,
Gate valve.
As a gate valve,
A valve box having a hollow portion and a first opening portion and a second opening portion which are provided to face each other with the hollow portion therebetween to form a communication passage;
A neutral valve body disposed in the hollow portion of the valve box and capable of blocking the first opening;
A position in which the neutral valve body is operated between a valve closed position in which the neutral valve body is closed with respect to the first opening and a valve open position in which the neutral valve body is retracted from the first opening. A rotating shaft that functions as a switching unit and has an axis extending in the flow path direction,
A rotation device comprising a lock pinion that rotates the rotation shaft and a rotation air cylinder that drives the lock pinion,
A clogging release driving unit comprising a clogging release air cylinder that performs an operation of canceling clogging of the neutral valve body;
A sequence circuit for sequentially enabling an operation of releasing blocking of the neutral valve body and a rotation operation of the neutral valve body,
And,
The neutral valve body has a neutral valve part connected to the position switching part, and a movable valve part connected to the neutral valve part so that the position in the flow path direction can be changed,
The movable valve unit is installed around the movable valve unit and is provided with a seal unit in close contact with the inner surface of the valve box around the first opening, and at the same time, the position in the flow path direction can be changed to the neutral valve unit. A first movable valve part and a second movable valve part slidable in the flow path direction with respect to the first movable valve part,
The gate valve includes a plurality of first sub-details built into the valve box, a second sub-detail, and a third sub-detail disposed between the first movable valve part and the second movable valve part. and,
The third sub-detail connects the first movable valve part to the neutral valve part so that its position in the flow path direction can be changed, and the first movable valve part forces the first movable valve part toward a central position in the flow path direction. And
The plurality of first sub-parts are driven by the blocking releasing air cylinder to apply a force to the first opening in the flow path direction to apply a force to the first movable valve part to the inner surface of the valve box around the first opening. It has a function that makes it possible to adhere to,
The second sub-detail drives the first movable valve part and the second movable valve part to adjust thickness dimensions in the flow path direction,
The rotary air cylinder,
A sub-detail for closing the neutral valve body,
A piston capable of opening and closing operation,
A first pressure space capable of closing the piston and a second pressure space capable of opening operation, which are arranged in series in the operation direction of the piston,
Have,
The sequence circuit,
Air operated 2 channel spool valve,
Speed control valve in combination with check valve and flow control valve,
Have,
The sequence circuit,
When the gate valve is opened by supply of driving compressed air of one system, compressed air is supplied as damper air to the first pressure space,
When the driving of the blocking release air cylinder is finished, the first pressure space is brought into a non-pressurized state, the second pressure space is put into a pressurized state, the opening operation of the rotary air cylinder is started, and the valve is at the open position. Immediately before the neutral valve body reaches, the impact is alleviated by air in the first pressure space,
When the gate valve is closed by releasing the supply of the driving compressed air, the first pressure space and the second pressure space are in a non-pressurized state, and the rotational air cylinder is closed by the biasing force of the minor portion. And immediately before the neutral valve body reaches the valve closing position, shock is alleviated by damper air in the second pressure space,
When the rotational operation of the neutral valve body ends, starting the blocking operation of the neutral valve body by the blocking release air cylinder,
Gate valve.
As a gate valve,
A valve box having a hollow portion and a first opening portion and a second opening portion which are provided to face each other with the hollow portion therebetween to form a communication passage;
A neutral valve body disposed in the hollow portion of the valve box and capable of blocking the first opening;
A position in which the neutral valve body is operated between a valve closed position in which the neutral valve body is closed with respect to the first opening and a valve open position in which the neutral valve body is retracted from the first opening. A rotating shaft that functions as a switching unit and has an axis extending in the flow path direction,
A rotation device comprising a lock pinion that rotates the rotation shaft and a rotation air cylinder that drives the lock pinion,
It is installed around the first opening so as to be slidable in the direction of the flow path, and is possible in a closed state to block the flow path by contacting the neutral valve body serving as the valve blocking position, and the neutral valve body Sealing that can be in an open state that becomes a valve open position or can adjust the opening degree of the flow path,
A blocking release air cylinder built in the valve box to release the blocking state of the sealing;
A sealing section that applies a force to the sealing in a direction contacting the neutral valve body,
A sequence circuit for sequentially enabling an operation of releasing blocking of the neutral valve body and a rotation operation of the neutral valve body,
And,
The rotary air cylinder,
A sub-detail for closing the neutral valve body,
A piston capable of opening and closing operation,
A first pressure space capable of closing the piston and a second pressure space capable of opening operation, which are arranged in series in the operation direction of the piston,
Have,
The sequence circuit,
Air operated 2 channel spool valve,
Speed control valve in combination with check valve and flow control valve,
Have,
The sequence circuit,
When the gate valve is opened by supply of driving compressed air of one system, compressed air is supplied as damper air to the first pressure space,
When the driving of the blocking release air cylinder is finished, the first pressure space is set to a damper pressure state, the second pressure space is set to a pressurized state, the opening operation of the rotary air cylinder is started, and the valve is at the open position. Immediately before the neutral valve body reaches, the impact is alleviated by air in the first pressure space,
When the gate valve is closed by releasing the supply of the driving compressed air, the first pressure space is set to a damper pressure state, the second pressure space is set to a non-pressurized state, Start the closing operation of the rotary air cylinder, and immediately before the neutral valve body reaches the valve closing position, the shock is alleviated by the damper air in the second pressure space,
When the rotational operation of the neutral valve body ends, starting the blocking operation of the neutral valve body by the blocking release air cylinder,
Gate valve.

Images