KR20200125490A - Hydraulic drive system and gate valve - Google Patents

Abstract

According to the present invention, a hydraulic drive system stretches a target to be pressed in a chamber becoming a vacuum atmosphere. The hydraulic drive system has a vacuum actuator and a hydraulic drive unit. The hydraulic drive unit includes a hydraulic pressure generation unit, a drive unit to drive the hydraulic pressure generation unit, and a power supply to supply power to the drive unit. A stretching rod can be driven by a working hydraulic pressure supplied to a fixing unit from the hydraulic drive unit. When the stretching rod moves in a separating direction from the target by the bias force of a hydraulic bias member, an inversion response unit corresponding to an inversion state of a motor is installed on the drive unit.

Description

Hydraulic drive system, gate valve {HYDRAULIC DRIVE SYSTEM AND GATE VALVE}

The present invention relates to a hydraulic drive system and a gate valve, and is particularly suitable for use in a hydraulic drive system having a vacuum actuator capable of hydraulic drive in a vacuum and capable of springback, and a pendulum type gate valve using a hydraulic drive system. It's about technology.

In a vacuum device or the like, a telescopic actuator for pressing an object in a chamber serving as a vacuum atmosphere is installed. As such an elastic actuator, a drive unit is disposed outside the chamber in a vacuum atmosphere from the viewpoint of preventing contamination in the chamber, and a configuration for driving the expansion and contraction unit in the chamber is well known.

For example, there are an electromagnetic drive type, a pressure pneumatic drive type, a hydraulic drive type, etc. as a telescopic actuator.

In contrast, the inventors of the present invention have applied for a pendulum type gate valve having a bias unit that presses a valve body against an opening of a valve box during sealing, and a hydraulically driven telescopic actuator (Patent Document 1).

Here, with regard to the supply of hydraulic pressure from the expansion/contraction actuator, a bias member such as a spring in the hydraulic pressure generator and a motor supplied from a power supply are in charge of either extension or retraction of the expansion/contraction rod.

The configuration including such a telescopic actuator and an operation of the telescopic actuator are referred to as spring back.

In addition to high reliability in closing operation in a large area, the gate valve is required to enable a normal closing operation to block the flow path in case of emergency such as loss of power supply or loss of control fluid driving pressure such as pressurization. come.

This normal closing operation is to enable an operation to block a flow path in a state in which a power source such as supply power or pressure for driving the valve body, etc. is not acting when the valve is closed, and a state in which the flow path is blocked. Means to keep.

Japanese Laid-Open Patent Publication No. 6358727

In order to realize the normal close operation in consideration of safety, it is necessary to achieve both the normal driving by hydraulic pressure generated by the motor and the emergency operation by spring back during an emergency power failure in addition to the normal power supply.

However, in the case of enabling spring back in case of power failure, when an emergency operation by a spring is performed on a hydraulic power generating motor whose power supply has been lost, there are the following problems.

First, in the case of a power failure, when the hydraulic pressure flows back from the spring back, the rotating shaft of the motor is reversed at the same time in the hydraulic pressure generator. Then, regenerative power is generated in the motor reversed in the power supply loss state.

Here, in a gate valve capable of performing a gate operation in a large area, a motor having a very large rated current is used to drive the valve body. Therefore, since the above regenerative power becomes very large, there is a possibility that the electronic components connected to the motor may be damaged. For this reason, there has been a demand to prevent damage to electronic components or the like due to regenerative power.

Further, in a gate valve capable of performing a gate operation in a large area, the weight of the valve body is large, and therefore a motor having a large torque is required to drive the valve body.

For this reason, when a motor or the like having a DC brush is used as the motor for generating hydraulic pressure, a large cogging torque may interfere with reversal of the motor for generating hydraulic pressure due to the spring during a power failure.

Therefore, there is a possibility that the reversal of the motor in the spring back is inhibited by the cogging torque.

In this case, there is a possibility that the closing operation of the valve body in the gate valve may not be performed smoothly.

Alternatively, a failure or the like may occur in the vicinity of the valve body. There has been a demand to prevent the influence of the cogging torque on the normal closing operation and to improve the operation reliability of the normal closing in the gate valve.

In addition, by using a servo motor or the like, it is possible to reduce the influence of the cogging torque on the normal close operation, but in this case, there is a problem that the power consumption in the servo motor increases, which is not preferable.

The present invention has been made in view of the above circumstances, and is intended to achieve the following objects.

1. In a hydraulic drive system capable of hydraulic drive and having a spring back mechanism, to improve operational reliability in an emergency.

2. To reduce the influence of cogging torque.

3. To reduce the influence of the motor reversing due to springback in an emergency.

4. To prevent the occurrence of defects in an emergency.

5. To reduce power consumption.

6. To extend the life of parts and reduce the need for maintenance.

The hydraulic drive system of the present invention is a hydraulic drive system having a vacuum actuator that expands and contracts so that an object can be pressed in a chamber that becomes a vacuum atmosphere, and the vacuum actuator is driven by an operating hydraulic pressure supplied from the outside, and the It has a hydraulic drive that supplies the working hydraulic pressure to the vacuum actuator.

The hydraulic drive unit includes a hydraulic pressure generator for generating an operating hydraulic pressure, a driving unit for driving the hydraulic pressure generator, and power supply to the driving unit, and a motor and a hydraulic bias member are installed in the driving unit, and the hydraulic pressure is generated. It is possible to drive the hydraulic pressure generator so as to generate operating hydraulic pressures in opposite directions from each other.

The vacuum actuator has an elastic rod that can be expanded and contracted toward the object, and a fixing part that expands and contracts the expansion and contraction rod, and the expansion and contraction rod can be driven by operating hydraulic pressure supplied from the hydraulic drive part to the fixing part.

The above problem was solved by installing a reversing counter corresponding to the reversing state of the motor when the elastic rod moves in a direction close to the object by the biasing force of the hydraulic biasing member.

In the hydraulic drive system of the present invention, an excitation brake having a brake function for stopping the rotational drive shaft of the motor in a state in which power is supplied from the power source may be installed in the reverse response unit.

In the hydraulic drive system of the present invention, it is preferable that an excitation clutch having a clutch function for disconnecting the rotational drive shaft of the motor from the hydraulic pressure generator in a state where there is no power supply from the power source is installed in the reversing counterpart.

In the hydraulic drive system of the present invention, a regenerative current processing unit is installed in the reverse response unit.

The motor may be a DC coreless brushless motor.

Further, in the hydraulic drive system of the present invention, the motor may be a motor having a DC brush.

The gate valve of the present invention is a gate valve capable of a normally closed operation, and a valve box having a hollow portion and a first opening and a second opening that are installed to face each other with the hollow portion therebetween to communicate with each other. , A valve body capable of opening and blocking the flow path and supporting the valve body so as to be rotatable between the retracting position and the valve opening blocking position in the hollow part, and extending in the flow path direction ) A rotation shaft having an axis, a rotation driving part capable of rotating the valve body, a movable valve part installed in the valve body to change its position in the flow path direction, and the valve opening installed in the valve box A valve box biasing unit that moves and closes the movable valve unit in a closed position in the flow path direction, and a hydraulic drive unit that drives the valve box bias unit by supplying and discharging hydraulic oil.

The valve box bias unit serves as the vacuum actuator in the hydraulic drive system according to any one of the above.

The hydraulic drive unit becomes the hydraulic drive unit in the hydraulic drive system according to any of the above.

The valve body can be the object in the hydraulic drive system described in any one of the above.

The hydraulic drive system of the present invention is a hydraulic drive system having a vacuum actuator that expands and contracts to be able to press an object in a chamber that becomes a vacuum atmosphere, and the vacuum actuator is driven by an operating hydraulic pressure supplied from the outside, and the vacuum actuator is operated. It has a hydraulic drive that supplies hydraulic pressure.

The hydraulic drive unit includes a hydraulic pressure generating unit for generating an operating hydraulic pressure, a driving unit for driving the hydraulic pressure generating unit, and power supplying to the driving unit, and at the same time, a motor and a hydraulic bias member are installed in the driving unit, and the hydraulic pressure It is possible to drive the hydraulic pressure generation unit so that the generation unit generates operating hydraulic pressures in opposite directions to each other.

The vacuum actuator has an elastic rod that can be expanded and contracted toward the object, and a fixing part that expands and contracts the expansion and contraction rod, and the expansion and contraction rod can be driven by operating hydraulic pressure supplied from the hydraulic drive part to the fixing part.

A reversing counter corresponding to a reversing state of the motor is provided in the driving unit when the telescopic rod moves in a direction close to the object by the biasing force of the hydraulic biasing member.

For this reason, in the hydraulic drive system, during normal power supply, the vacuum actuator is driven by the hydraulic pressure supplied by the hydraulic drive unit, and the expansion and contraction rod is retracted to release the pressure to the object. Further, in the hydraulic drive system, the expansion and contraction rod is stretched by the biasing force of the hydraulic biasing member, and the object is pressed. For this reason, it is possible to provide a hydraulic drive system having a spring back function.

Further, in the hydraulic drive system, when the power supply from the power supply to the driving unit is lost, the hydraulic pressure flows back to the vacuum actuator side by the bias force of the hydraulic bias member. In this case, in the hydraulic drive system, even if the motor of the drive unit is reversed, the reversing counter responds to the reversal of the rotating shaft generated by the motor, preventing defects such as damage to the hydraulic drive system or damage to the vacuum actuator. It becomes possible to do.

Specifically, it is possible to suppress the influence of the regenerative power generated by the motor on other parts, or to prevent reversal of the rotation shaft from occurring in the motor.

In the hydraulic drive system of the present invention, an excitation brake having a brake function for stopping the rotational drive shaft of the motor in a state in which power is supplied from the power source is installed in the reverse response unit.

For this reason, it is possible to prevent the rotation shaft of the motor from being inadvertently reversed by the excitation brake during normal power supply. In addition, when the power supply from the power supply to the driving unit is lost, the brake function by the excitation brake can be stopped. For this reason, when the hydraulic pressure flows back to the vacuum actuator by the biasing force of the hydraulic biasing member, it becomes possible to quickly reverse the motor of the drive unit and prevent the normally close function from being impeded.

In the hydraulic drive system of the present invention, an excitation clutch having a clutch function for disconnecting the rotational drive shaft of the motor from the hydraulic pressure generator is installed in the reversing counterpart in a state in which no power is supplied from the power source.

For this reason, during normal power supply, the rotational driving force of the motor is rapidly transmitted to the hydraulic generator by the excitation clutch to drive the vacuum actuator. In addition, when the power supply from the power source to the driving unit is lost, the rotational drive shaft of the motor may be disconnected from the hydraulic pressure generator. Therefore, when the hydraulic pressure flows back to the vacuum actuator by the bias force of the hydraulic bias member, the operation of the hydraulic pressure generator reversed by the bias force of the hydraulic bias member is prevented from being transmitted to the motor, and the motor is prevented from reversing. I can.

In the hydraulic drive system of the present invention, a regenerative current processing unit is provided in the reversing response unit. The motor becomes a DC coreless brushless motor.

As a result, power consumption is low and sufficient driving torque is obtained, and the effect of regenerative power generated when the motor is reversing is suppressed. It is possible to realize the function of a spring back and a sufficient countermeasure against reversal, and to operate a hydraulic drive system with a long service life in a vacuum atmosphere.

Further, in the hydraulic drive system of the present invention, the motor is a motor having a DC brush.

As a result, power consumption is low and sufficient driving torque is obtained, and the effect of regenerative power generated when the motor is reversing is suppressed. It is possible to realize the function of a spring back and a sufficient countermeasure against reversal, and to operate a hydraulic drive system with a long service life in a vacuum atmosphere.

The gate valve of the present invention is a gate valve capable of a normally closed operation, comprising a hollow portion, a valve box having a first opening and a second opening that are installed to face each other with the hollow portion therebetween to communicate with each other, and the flow path. A valve body that can be opened and closed, a rotation shaft having an axis extending in a flow path direction while supporting the valve body so as to be rotatable between a retracted position and a valve opening and closing position in the hollow portion, and the valve body is rotated A rotation driving unit capable of driving, a movable valve unit installed in the valve body and configured to change its position in the direction of the flow path, and the movable valve unit installed in the valve box and at the position of closing the valve opening are moved in the direction of the flow path. A valve box biasing unit to be closed, and a hydraulic driving unit for driving the valve box biasing unit by supplying and discharging hydraulic oil.

The valve box bias unit serves as the vacuum actuator in the hydraulic drive system according to any one of the above.

The hydraulic drive unit becomes the hydraulic drive unit in the hydraulic drive system according to any of the above.

The valve body becomes the object in the hydraulic drive system according to any one of the above.

For this reason, during normal power feeding, the vacuum actuator is driven by the hydraulic pressure supplied by the hydraulic biasing member of the hydraulic drive unit. By extending the expansion and contraction rod, the pressed valve body is closed, and the expansion and contraction rod is retracted by the drive of the drive unit, and the valve is opened by releasing the push on the valve body. For this reason, it is possible to provide a gate valve having a spring back function.

In addition, when the power supply from the power supply to the driving part is lost, when the hydraulic pressure flows back from the hydraulic pressure generator to the valve box bias part (fixed part) by the bias force of the hydraulic bias member, the motor of the driving part is reversed. I can think. In this case as well, it is possible to prevent defects such as damage to the hydraulic drive system or damage to the vacuum actuator in response to the reversal of the rotational shaft occurring in the motor by the reversing counterpart.

Specifically, it is possible to suppress the influence of the regenerative power generated by the motor on other parts, or to prevent reversal of the rotation shaft from occurring in the motor.

Moreover, it is possible to prevent the rotation shaft of the motor from being inadvertently reversed by the excitation brake during normal power supply. In addition, when the power supply from the power supply to the driving unit is lost, the brake function by the excitation brake can be stopped. For this reason, when hydraulic pressure flows back from the hydraulic pressure generating unit to the valve box bias unit (fixed unit) due to the biasing force of the hydraulic biasing member, it becomes possible to quickly reverse the motor of the drive unit and perform the normally close function without any problems. .

Alternatively, during normal power supply, the rotational driving force of the motor is rapidly transmitted to the hydraulic generator by the excitation clutch to drive the vacuum actuator. In addition, when the power supply from the power source to the driving unit is lost, the rotational drive shaft of the motor may be disconnected from the hydraulic pressure generator. For this reason, when hydraulic pressure flows back from the hydraulic pressure generation unit to the valve box bias unit (fixed portion) by the bias force of the hydraulic bias member, the operation of the hydraulic pressure generation unit reversed by the bias force of the hydraulic bias member is transmitted to the motor. And prevents the motor from reversing.

According to the present invention, it is possible to provide a hydraulic drive system and a gate valve capable of achieving the following effects.

1. To improve operation reliability in emergency in a hydraulic drive system capable of hydraulic drive and having a springback mechanism.

2. To reduce the influence of cogging torque.

3. In case of emergency, to reduce the effect of springback on motor reversal.

4. In case of emergency, to prevent the occurrence of defects.

5. To reduce power consumption.

6. To prolong the life of parts and reduce the need for maintenance.

1 is a schematic diagram showing a hydraulic drive system according to a first embodiment of the present invention.
2 is a schematic diagram showing a hydraulic drive system according to a second embodiment of the present invention.
3 is a schematic cross-sectional view taken along a flow path direction showing a gate valve according to a third embodiment of the present invention, and is a diagram illustrating a case where the valve body is disposed in a retracted position (valve open position).
4 is a schematic cross-sectional view along a flow path showing a gate valve according to a third embodiment of the present invention, and is a diagram illustrating a case where the valve body is disposed at a valve opening closing position (sliding preparation position).
5 is a schematic cross-sectional view taken along a flow path showing a gate valve according to a third embodiment of the present invention, and is a diagram illustrating a case where the valve body is disposed in the valve closed position.
Fig. 6 is a schematic explanatory view showing a hydraulic drive system in a gate valve and a hydraulic drive unit according to a fourth embodiment of the present invention.
Fig. 7 is a schematic explanatory diagram showing a hydraulic drive unit in a hydraulic drive system and a gate valve according to a fourth embodiment of the present invention.
Fig. 8 is a schematic explanatory diagram showing a hydraulic drive unit in a hydraulic drive system and a gate valve according to a fourth embodiment of the present invention.
Fig. 9 is a schematic explanatory diagram showing a vacuum actuator in a hydraulic drive system and a gate valve according to a fourth embodiment of the present invention.
10 is a schematic explanatory diagram showing a vacuum actuator in a hydraulic drive system and a gate valve according to a fourth embodiment of the present invention.
Fig. 11 is a schematic explanatory diagram showing a vacuum actuator in a hydraulic drive system and a gate valve according to a fourth embodiment of the present invention.
Fig. 12 is a schematic explanatory diagram showing a vacuum device including a hydraulic drive system according to a fifth embodiment of the present invention.
13 is a cross-sectional view orthogonal to a flow path showing a configuration of a gate valve according to a sixth embodiment of the present invention.
14 is a cross-sectional view along a flow path showing a configuration of a gate valve according to a sixth embodiment of the present invention, and is a diagram illustrating a case where the valve body is disposed in a retractable position FREE.
FIG. 15 is an enlarged cross-sectional view along a flow path showing a main portion along a line segment A-O in FIG. 13, and a view showing a case where the valve body is disposed in a retractable position FREE.
FIG. 16 is an enlarged cross-sectional view along a flow path showing a main portion along a line segment B-O-C in FIG. 13, and a diagram illustrating a case where the valve body is disposed in a retractable position FREE.
FIG. 17 is an enlarged cross-sectional view along a flow path showing a main portion of the valve case bias portion in FIG. 13, and is a diagram illustrating a case where the valve body is disposed in the retractable position FREE.
Fig. 18 is a cross-sectional view along a flow path showing a configuration of a gate valve according to a sixth embodiment of the present invention, and is a diagram showing a case where the valve body is disposed in a valve closed position (positive pressure or no differential pressure).
19 is an enlarged cross-sectional view taken along a flow path showing a main part of FIG. 18.
FIG. 20 is an enlarged cross-sectional view taken along a flow path showing a main part of FIG. 18.
FIG. 21 is an enlarged cross-sectional view taken along a flow path showing a main part of FIG. 18.
Fig. 22 is a cross-sectional view along a flow path showing a configuration of a gate valve according to a sixth embodiment of the present invention, and is a diagram showing a case where the valve body is disposed at a back pressure position.
23 is an enlarged cross-sectional view taken along a flow path showing a main part of FIG. 23.
FIG. 24 is an enlarged cross-sectional view taken along a flow path showing a main part of FIG. 23.
Fig. 25 is a perspective view showing an arrangement of a valve box bias unit in a valve box in a gate valve according to a sixth embodiment of the present invention.
Fig. 26 is a perspective view showing an arrangement of a valve box bias unit in a valve box in a gate valve according to a sixth embodiment of the present invention.

Hereinafter, a hydraulic drive system according to a first embodiment of the present invention will be described based on the drawings.

1 is a schematic diagram showing a hydraulic drive system in this embodiment, and in FIG. 1, reference numeral 700 denotes a hydraulic drive unit.

As shown in FIG. 1, the hydraulic drive system according to the present embodiment has a spring back function and includes a hydraulic drive unit 700 and a vacuum actuator 70.

The vacuum actuator 70 according to the present embodiment is a telescopic actuator capable of pressing an object in a chamber Ch serving as a vacuum atmosphere. Since the vacuum actuator 70 according to the present embodiment is controlled by hydraulic pressure, the pressing pressure can be controlled to a predetermined value.

As shown in FIG. 1, the vacuum actuator 70 according to the present embodiment includes an elastic rod (moving portion) 72, a bias member (pressing spring) 73, and a fixing portion 71.

In this embodiment, the fixing portion 71 of the vacuum actuator 70 is fixed to the wall portion, the bottom portion of the chamber of the vacuum apparatus, or the mechanism in the chamber.

In this embodiment, the movable part (expansion rod) 72 of the vacuum actuator 70 is expandable and contractable toward the inside of the chamber Ch, which became a vacuum atmosphere in the fixed part 71.

The vacuum actuator 70 is disposed so that the movable portion (extensible rod) 72 can be biased in a direction in which the biasing member (pressing spring) 73 is separated from the object.

In the vacuum actuator 70, as shown in FIG. 1, the movable part (extensible rod) 72 decompressed by the biasing force of the biasing member (pressing spring) 73 is It is separated from the object and is accommodated in the fixing part 71.

The vacuum actuator 70 is driven by hydraulic pressure (incompressible fluid) supplied from the hydraulic drive unit 700.

The hydraulic drive unit (incompressible fluid drive unit) 700 includes a hydraulic pressure generator 701, a hydraulic pipe 702, a hydraulic bias member 720, and a drive unit 705, as shown in FIG. 1.

The hydraulic pressure generator 701 generates hydraulic pressure supplied to the fixing part 71.

The hydraulic pipe 702 is connected to the hydraulic pressure generating unit 701 and the fixing unit 71 of the vacuum actuator 70.

The hydraulic drive unit 700 has a configuration capable of a normal close operation.

The hydraulic pressure generator 701 generates hydraulic pressure that becomes an operating direction or a reverse direction by driving of the driving unit 705 or the biasing force of the hydraulic bias member 720.

When the movable part (expansion rod) 72 is extended, the hydraulic pressure generator 701 generates hydraulic pressure by the biasing force of the hydraulic bias member 720 and supplies hydraulic oil to the vacuum actuator 70 to flow.

The hydraulic pressure generator 701 also maintains a hydraulic state when the operation is finished, so that the movable part (expansion rod) 72 can be maintained in an extended state. Further, it is possible to appropriately control the state of the movable portion (extensible rod) 72 in contact with the object, such as a pressing force.

The drive unit 705 has a motor 705m.

When the motor 705m retracts the movable part (expansion rod) 72, it generates a driving force greater than the biasing force of the hydraulic bias member 720, and transfers hydraulic oil from the vacuum actuator 70 to the hydraulic pressure generator 701. The hydraulic pressure generator 701 is driven so that it flows.

The motor 705m is a DC coreless brushless motor.

The drive unit 705 has an excitation brake 705b that stops the rotation of the rotation shaft of the motor 705m.

The driving unit 705 has a regenerative current processing unit 705c that processes regenerative power generated when the rotation axis of the motor 705m is reversed with respect to the driving direction.

The driving unit 705 is connected to and controlled by a control unit (controller) 706.

The driving unit 705 is connected to the power source 707, and electric power for driving the driving unit 705 is supplied.

The vacuum actuator 70 generates a driving force greater than the bias force of the bias member (pressing spring) 73 by the actuating hydraulic pressure supplied from the hydraulic driving unit 700, and drives the movable portion (expansion rod) 72.

The vacuum actuator 70 is spring-backed by the hydraulic drive unit 700.

The springback means that hydraulic oil flows from the hydraulic pressure generator 701 to the vacuum actuator 70 by the biasing force of the hydraulic bias member 720 of the hydraulic pressure generator 701, and the operation direction and the reverse direction by the motor 705m It means to drive the movable part (expansion rod) 72 as.

The driving unit 705 is provided with a reverse countermeasure. The reversing counterpart corresponds to the reversing state of the motor 705m when the movable part (extensible rod) 72 moves in a direction close to the object by the biasing force of the hydraulic bias member 720.

The excitation brake 705b and the regenerative current processing unit 705c constitute a reverse response unit.

The excitation brake 705b has a brake function of stopping the rotational drive shaft of the motor 705m in a state in which power is supplied from the power source 707.

The excitation brake 705b prevents the rotation shaft of the motor 705m from inadvertently reversing in a state in which power is supplied from the power source 707 to the driving unit 705, that is, during normal power supply.

The excitation brake 705b may stop the brake function when power is lost when the power supplied from the power source 707 to the driving unit 705 is lost.

Alternatively, the excitation brake 705b may release the brake function for the motor 705m under the control of the controller (controller) 706 during normal power supply.

In addition, a known brake is used as the excitation brake 705b, and the configuration is not limited.

When the regenerative current processing unit 705c extends the movable unit (expansion rod) 72 by a spring back, that is, when the hydraulic oil flows back from the hydraulic generator 701 to the vacuum actuator 70, the rotation shaft rotates in reverse. It is possible to use a regenerative resistance that consumes regenerative power generated by one motor 705m and suppresses the influence of another driver.

Alternatively, the regenerative current processing unit 705c may be a diode or the like that controls the current direction of the regenerative power generated by the reversely rotated motor 705m so as not to flow to the power source 707.

In addition, as the regenerative current processing unit 705c, a processing unit such as a known circuit or device is used, and the configuration is not limited.

In the hydraulic drive system according to the present embodiment, during normal power supply, the hydraulic drive unit 700 operates the hydraulic pressure generator 701 in the direction in which hydraulic oil is drawn in by the motor 705m.

For this reason, in the vacuum actuator 70, the movable part (extensible rod) 72 is retracted to the fixed part 71 by the biasing force of the internal biasing member (pressing spring) 73. For this reason, the movable part (expansion rod) 72 is released from pressing to the object.

Further, in the hydraulic drive system according to the present embodiment, the hydraulic drive unit 700 operates the hydraulic pressure generating unit 701 in a direction in which hydraulic oil is extruded by the hydraulic bias member 720. For this reason, in the vacuum actuator 70, the movable part (extensible rod) 72 extends from the fixed part 71 by the hydraulic pressure supplied to the fixed part 71. For this reason, the object is pressed by the movable part (expansion rod) 72.

In this way, the operation of pressing the object by extending the movable portion (extension rod) 72 of the vacuum actuator 70 by the hydraulic bias member 720 of the hydraulic pressure generating portion 701 becomes a springback.

During springback, when operating the movable part (expansion rod) 72, hydraulic oil flows back from the hydraulic pressure generator 701 to the vacuum actuator 70 by the biasing force of the hydraulic bias member 720.

At the same time, the rotation shaft of the motor 705m rotates reversely by the biasing force of the hydraulic biasing member 720.

The motor (705m) in which the rotating shaft rotates reversely generates regenerative power.

Here, in a state in which power is supplied from the power source 707 to the driving unit 705, that is, when a springback occurs due to the hydraulic bias member 720 during normal power supply, the control unit (controller) 706 controls the motor 705m. The excitation brake 705b of the reversing counterpart is controlled to release the brake function of the furnace.

At this time, the control unit (controller) 706 may control the power supplied from the power source 707 to the driving unit 705 and control the rotation speed so that the reversing speed of the motor 705m becomes a predetermined state. . For this reason, it is possible to suppress the generation of more than necessary regenerative power to the motor 705m.

Further, the regenerative power generated by the reverse-rotated motor 705m is consumed by the regenerative current processing unit 705c of the reversing counterpart, or the current direction is controlled. For this reason, it is suppressed that the regenerative power affects other drivers.

In addition, when the power supply from the power source 707 to the driving unit 705 is lost, that is, when the power is lost, when a springback occurs by the hydraulic bias member 720, the excitation brake 705b of the reversing counterpart from which the power supply has been lost , The brake function to the motor 705m is released.

At this time, the reversing speed of the motor 705m is large and large regenerative power is generated, but the regenerative power generated by the reversing motor 705m is consumed by the regenerative current processing unit 705c of the reversing counterpart, or current direction control do. For this reason, it is suppressed that the regenerative power affects other parts.

For this reason, the hydraulic drive system has a spring back function and at the same time rotates the reversely rotated motor 705m by the excitation brake 705b of the reversing counterpart and the regenerative current processing unit 705c. The influence can be suppressed.

For this reason, even when the spring back caused by the hydraulic bias member 720 occurs, the excitation brake 705b and the regenerative current processing unit 705c of the reversing response unit rotates in reverse response to the reversal of the drive system of the hydraulic pressure generator 701. By rotating the motor 705m, it becomes possible to prevent defects such as damage to the hydraulic drive system or damage to the vacuum actuator 70.

Accordingly, it is possible to suppress the influence of the regenerative power generated by the motor 705m on other parts. Alternatively, it is possible to prevent reversal of the rotation shaft from occurring in the motor 705m.

As a result, the power consumption is small and sufficient driving torque is obtained, and the influence of the regenerative power generated when the motor 705m is reversed is suppressed. It is possible to realize the function of a spring back and a sufficient countermeasure against reversal, and to operate a hydraulic drive system with a long service life in a vacuum atmosphere.

In addition, when the spring back caused by the hydraulic bias member 720 occurs, it is not necessary to block the hydraulic pressure flowing back from the hydraulic pressure generator 701 to the vacuum actuator 70 using a solenoid valve or the like. For this reason, it is possible to improve the operation reliability as a hydraulic drive system and to achieve a long life of parts. At the same time, it is possible to improve the reliability while reducing the number of maintenance times.

Hereinafter, a hydraulic drive system according to a second embodiment of the present invention will be described based on the drawings.

Fig. 2 is a schematic diagram showing the hydraulic drive system in the present embodiment, and in Fig. 2, reference numeral 700 denotes a hydraulic drive unit.

As shown in FIG. 2, the hydraulic drive system according to the present embodiment has a spring back function and includes a hydraulic drive unit 700 and a vacuum actuator 70.

The vacuum actuator 70 according to the present embodiment becomes a telescopic actuator capable of pressing an object in a chamber Ch that becomes a vacuum atmosphere. Since the vacuum actuator 70 according to the present embodiment is controlled by hydraulic pressure, the pressing pressure can be controlled to a predetermined value.

As shown in FIG. 2, the vacuum actuator 70 according to the present embodiment includes an elastic rod (movable portion) 72, a flange portion 773, a bias member (pressing spring) 73, and a fixed portion 71. ).

In this embodiment, the fixing portion 71 of the vacuum actuator 70 is fixed to the wall portion, the bottom portion of the chamber of the vacuum apparatus, or the mechanism in the chamber.

In this embodiment, the movable part (expansion rod) 72 of the vacuum actuator 70 is expandable and contractable toward the inside of the chamber Ch, which became a vacuum atmosphere in the fixed part 71.

The vacuum actuator 70 is disposed so that the movable portion (extensible rod) 72 can be biased in a direction in which the biasing member (pressing spring) 73 is separated from the object.

In the vacuum actuator 70, as shown in FIG. 2, the movable part (extensible rod) 72 decompressed by the biasing force of the bias member (pressing spring) 73 is separated from the object and accommodated in the fixed part 71. do.

The vacuum actuator 70 is driven by hydraulic pressure (incompressible fluid) supplied from the hydraulic drive unit 700.

The hydraulic drive unit (incompressible fluid drive unit) 700 includes a hydraulic pressure generator 701, a hydraulic pipe 702, a hydraulic bias member 720, and a drive unit 705 as shown in FIG. 2.

The hydraulic pressure generator 701 generates hydraulic pressure for supplying hydraulic pressure to the fixing part 71.

The hydraulic pipe 702 is connected to the fixing part 71 of the vacuum actuator 70 from the hydraulic pressure generating part 701.

The hydraulic drive unit 700 has a configuration capable of a normal close operation.

The hydraulic pressure generator 701 generates hydraulic pressure that becomes an operation direction or a reverse direction by driving of the driving unit 705 or the biasing force of the hydraulic biasing member 720.

When the movable part (expansion rod) 72 is extended, the hydraulic pressure generator 701 generates hydraulic pressure by a biasing force of the hydraulic bias member 720 to supply hydraulic oil to the vacuum actuator 70.

The hydraulic pressure generating unit 701 also maintains a hydraulic state at the end of the operation, thereby enabling the movable unit (expansion rod) 72 to be maintained in an extended state. Further, it is possible to appropriately control the state in which the movable portion (expansion rod) 72 is in contact with the object.

The drive unit 705 has a motor 705m.

When the motor 705m degenerates the movable part (expansion rod) 72, it generates a driving force greater than the bias force of the hydraulic bias member 720, and transfers hydraulic oil to the hydraulic pressure generator 701 from the vacuum actuator 70. The hydraulic pressure generator 701 is driven so that it flows.

The motor 705m is a motor having a DC brush.

The drive unit 705 has an excitation brake 705b that stops rotation of the rotation shaft of the motor 705m.

The drive unit 705 has an excitation clutch 705d that separates the rotation axis from the driving path of the hydraulic pressure generator 701 when the rotation axis of the motor 705m is reversed with respect to the driving direction.

The driving unit 705 is connected to and controlled by a control unit (controller) 706.

The driving unit 705 is connected to the power source 707, and electric power for driving the driving unit 705 is supplied.

The vacuum actuator 70 generates a driving force greater than the bias force of the bias member (pressing spring) 73 by the actuating hydraulic pressure supplied from the hydraulic drive unit 700, and drives the movable portion (expansion rod) 72.

The vacuum actuator 70 is spring-backed by the hydraulic drive unit 700.

The springback means that hydraulic oil flows from the hydraulic pressure generator 701 to the vacuum actuator 70 by the biasing force of the hydraulic bias member 720 of the hydraulic pressure generator 701, and the operation direction and the reverse direction by the motor 705m It means to drive the movable part (expansion rod) 72 as.

The driving unit 705 is provided with a reverse countermeasure. The reversing counterpart corresponds to the reversing state of the motor 705m when the movable part (extensible rod) 72 moves in a direction close to the object by the biasing force of the hydraulic bias member 720.

The excitation brake 705b and the excitation clutch 705d constitute a reverse counterpart.

The excitation brake 705b has a brake function of stopping the rotational drive shaft of the motor 705m in a state in which power is supplied from the power source 707. At this time, the cogging torque of the motor 705m can be used as a brake.

The excitation brake 705b prevents the rotation shaft of the motor 705m from inadvertently reversing in a state in which power is supplied from the power source 707 to the driving unit 705, that is, during normal power supply.

The excitation brake 705b may stop the brake function when power is lost when the power supplied from the power source 707 to the driving unit 705 is lost.

Alternatively, the excitation brake 705b may release the brake function for the motor 705m under the control of the controller (controller) 706 during normal power supply.

In addition, a known brake is used as the excitation brake 705b, and the configuration is not limited.

The excitation clutch 705d extends the movable portion (expansion rod) 72 by a spring back, that is, when the hydraulic oil flows back from the hydraulic generator 701 to the vacuum actuator 70, the hydraulic bias member 720 Separate the motor 705m from the drive system of the hydraulic pressure generator 701 rotated by the bias force of ).

That is, the excitation clutch 705d has a clutch function of disconnecting the rotational drive shaft 705a of the motor 705m from the drive system of the hydraulic pressure generator 701 when the hydraulic oil flows back by the biasing force of the hydraulic biasing member 720 Have.

Therefore, even when the drive system of the hydraulic pressure generator 701 rotates reversely due to the bias force of the hydraulic bias member 720, the drive system of the hydraulic pressure generator 701 transmits reverse rotation to the rotation shaft of the motor 705m. Prevent it from becoming.

The excitation clutch 705d can prevent the rotation axis of the motor 705m from reversing.

The excitation clutch 705d is in a state in which power is supplied from the power source 707 to the drive unit 705, that is, when the movable unit (expansion rod) 72 is extended by a spring back during normal power supply, the motor ( 705m) maintains a state in which the drive system of the hydraulic pressure generator 701 is connected.

The excitation clutch 705d may separate the motor 705m from the drive system of the hydraulic pressure generator 701 when power is lost when the power supplied from the power source 707 to the driving unit 705 is lost.

In addition, a known clutch is used as the excitation clutch 705d, and the configuration is not limited.

In the hydraulic drive system according to the present embodiment, during normal power supply, the hydraulic drive unit 700 operates the hydraulic pressure generator 701 in the direction in which hydraulic oil is drawn in by the motor 705m.

For this reason, in the vacuum actuator 70, the movable part (extensible rod) 72 is retracted to the fixed part 71 by the biasing force of the internal biasing member (pressing spring) 73. For this reason, the movable part (expansion rod) 72 is released from pressing to the object.

Further, in the hydraulic drive system according to the present embodiment, the hydraulic drive unit 700 operates the hydraulic pressure generating unit 701 in a direction in which hydraulic oil is extruded by the hydraulic bias member 720. For this reason, in the vacuum actuator 70, the movable part (expansion rod) 72 extends from the fixed part 71 by the hydraulic pressure supplied to the fixed part 71. For this reason, the object is pressed by the movable part (expansion rod) 72.

In this way, the operation of pressing the object by extending the movable portion (extension rod) 72 of the vacuum actuator 70 by the hydraulic bias member 720 of the hydraulic pressure generating portion 701 becomes a springback.

When the movable part (expansion rod) 72 is operated by the spring back, the hydraulic pressure flows back from the hydraulic pressure generating part 701 to the vacuum actuator 70 by the biasing force of the hydraulic biasing member 720.

At the same time, the drive system of the hydraulic pressure generating unit 701 rotates reversely by the biasing force of the hydraulic biasing member 720.

The drive system of the hydraulic pressure generator 701 rotated in reverse is transmitted to the rotating shaft of the motor 705m in that state to generate regenerative power.

Here, in a state in which power is supplied from the power source 707 to the driving unit 705, that is, during normal power supply, when a springback occurs due to the hydraulic bias member 720, the control unit (controller) 706, the motor ( The excitation brake 705b of the reversing counterpart is controlled to release the brake function to 705m).

At the same time, the control unit (controller) 706 controls the excitation clutch 705d so that the rotation shaft of the motor 705m and the drive system of the hydraulic pressure generator 701 are kept connected.

At this time, the control unit (controller) 706 may control the power supplied from the power source 707 to the driving unit 705 and control the rotation speed so that the reversing speed of the motor 705m becomes a predetermined state. . For this reason, it is possible to suppress generation of more than necessary regenerative power to the motor 705m.

In addition, in a state in which power supply from the power source 707 to the driving unit 705 is lost, that is, when the power is lost, when a spring back occurs by the hydraulic bias member 720, the excitation brake 705b of the reversing counterpart from which the power supply is lost. Releases the brake function to the motor 705m.

At the same time, the excitation clutch 705d of the reversing counterpart from which the power supply has been lost is in a state in which the rotation shaft of the motor 705m and the drive system of the hydraulic pressure generator 701 are cut off.

At this time, the reversing speed in the drive system of the hydraulic pressure generator 701 is large, but the excitation clutch 705d is cut, so the motor 705m does not rotate in reverse. Therefore, no regenerative power is generated for the motor 705m.

This prevents the regenerative power from affecting other parts.

For this reason, the hydraulic drive system has a spring back function and at the same time rotates the drive system of the hydraulic pressure generator 701 by the excitation brake 705b and the excitation clutch 705d of the reversing counterpart, thereby rotating the motor 705m in reverse. It is possible to prevent the influence by the reverse flow of the hydraulic pressure without causing it.

For this reason, even when the springback caused by the hydraulic biasing member 720 occurs, the hydraulic drive system is operated in response to the reversal of the drive system of the hydraulic pressure generator 701 by the excitation brake 705b and the excitation clutch 705d of the reversing counterpart. It becomes possible to prevent defects such as breakage or breakage occurring in the vacuum actuator 70.

Therefore, it becomes possible to prevent the reversal of the rotation shaft from occurring in the motor 705m. Alternatively, it is possible to suppress the influence of the regenerative power generated from the motor 705m on other parts.

Due to this, power consumption is low, sufficient driving torque is obtained, and when the drive system of the hydraulic pressure generator 701 is reversed by the bias force of the hydraulic bias member 720, regenerative power is not generated and applied to other parts. Suppress the influence. It is possible to realize the function of a spring back and a sufficient countermeasure against reversal, and to operate a hydraulic drive system with a long service life in a vacuum atmosphere.

In addition, when the spring back caused by the hydraulic bias member 720 occurs, there is no need to block the hydraulic pressure flowing back from the vacuum actuator 70 to the hydraulic pressure generator 701 using a solenoid valve, a spool valve, or the like. For this reason, it is possible to improve the operation reliability as a hydraulic drive system and to achieve a long life of parts. At the same time, reliability can be improved even if the number of maintenance is reduced.

In addition, since it is not necessary to have a structure for processing regenerative power, the hydraulic drive system can be made compact and the hydraulic drive system can be configured by saving space.

Although the force generated by cogging torque may be lost by using the motor 705m as a motor having a DC brush, this can be prevented. In addition, even when the motor 705m is a motor having a DC brush, when the rating is increased to increase the output of the motor 705m, the cogging torque is increased in proportion to this, but this can be prevented.

In addition, a simple component configuration can be realized by using the cogging torque of the motor 705m as a brake.

Alternatively, loss of hydraulic pressure can be reduced by using a motor whose cogging torque by the motor itself is zero or without limitation.

By changing the combination of the configuration of the reversing counterpart by the motor, a wide range of motors can be selected, and a simple configuration can be realized at low cost without complicated control.

Hereinafter, a hydraulic drive system and a gate valve according to a third embodiment of the present invention will be described based on the drawings.

3 is a schematic cross-sectional view taken along a flow path showing the retracted position (valve open position) of the gate valve in the present embodiment. Fig. 4 is a schematic cross-sectional view along a flow path showing a valve opening blocking position (sliding preparation position) of the gate valve in the present embodiment. Fig. 5 is a schematic cross-sectional view along a flow path showing the valve-closed position of the gate valve in the present embodiment.

In this embodiment, the same reference numerals are assigned to the configurations corresponding to those of the first or second embodiment described above, and the description thereof is omitted. 3 to 5, reference numeral 100 denotes a gate valve.

In the hydraulic drive system according to the present embodiment, as shown in Figs. 3 to 5, the vacuum actuator 70 is a vacuum actuator (a bias unit, a pressurization unit) that is placed in the valve closing position in the gate valve 100. ) Cylinder) (70).

Further, in the hydraulic drive system according to the present embodiment, as shown in Figs. 3 to 5, the hydraulic drive unit 700 drives a vacuum actuator (bias unit, pressing cylinder) 70 set to the valve closed position.

The gate valve 100 according to the present embodiment is a pendulum-type slide valve capable of normally closing operation. As shown in Figs. 3 to 5, the gate valve 100 according to the present embodiment includes a valve box 10, a hollow part 11, a valve body 5, a rotation shaft 20, and a rotation drive part. (21) and a hydraulic drive unit (incompressible fluid drive unit) 700.

The valve box 10 is installed to face each other with the hollow portion 11 and the hollow portion 11 interposed therebetween, and has a first opening 12a and a second opening 12b serving as a communication passage H.

The flow path H is set toward the first opening 12a from the second opening 12b.

The valve body 5 is disposed in the hollow portion 11 of the valve box 10 to open and close the flow path H.

The rotation shaft 20 has an axis extending in the direction of the flow path H.

The rotation shaft 20 supports the valve body 5 so as to be rotatable between the retracted position (valve open position) and the valve opening closed position (sliding preparation position) in the hollow portion 11.

In the retracted position (valve open position), the valve body 5 is retracted from the first opening 12a to enter an open state (Fig. 3) in which the flow path H can be communicated. In the valve opening shielding position (sliding preparation position), the valve element 5 is set to a state (FIG. 4) capable of blocking the first opening 12a.

The gate valve 100 operates between the retracted position (valve open position) and the valve closed position (FIG. 5).

The rotation driving unit 21 is capable of rotationally driving the rotation shaft 20.

The rotation driving unit 21 is capable of reciprocating the valve body 5.

The valve body 5 includes a neutral valve part 30 connected to the rotation shaft 20, a valve case 63 connected to the neutral valve part 30, and a movable valve part (movable valve) connected to the valve case 63. Plate) (54).

The neutral valve part 30 is fixed to the rotation shaft 20.

The neutral valve part 30 maintains a central position in the direction of the flow path H in the hollow part 11.

The valve case 63 is located around the movable valve part (movable valve plate part) 54. The valve case 63 is fixed to the neutral valve part 30. The valve case 63, together with the neutral valve unit 30, maintains the central position of the hollow portion 11 at the retracted position (valve open position), the valve opening-closing position (sliding ready position), and the valve closed position.

The movable valve part (movable valve plate part) 54 is slidable with respect to the valve case 63 in the direction of the flow path H.

The movable valve part (movable valve plate part) 54 can change its position in the flow path H direction with respect to the valve case 63 at the valve opening closing position (sliding preparation position) and the valve closing position.

The movable valve part (movable valve plate part) 54 maintains the central position of the hollow part 11 between the retracted position (valve open position) and the retracted position (valve open position) and the valve opening-closing position (sliding ready position). do.

The movable valve part (movable valve plate part) 54 is provided with a valve plate seal packing that is in close contact with the inner surface of the valve box 10 located around the first opening 12a.

The bias unit (pressing cylinder) 70 is embedded in the valve box 10 and installed. A plurality of bias units (pressing cylinders) 70 are disposed along the circumferential direction of the movable valve unit (movable valve plate unit) 54.

The bias unit (pressing cylinder) 70 is the vacuum actuator 70 in the first or second embodiment described above.

In addition, in the vacuum actuator 70 of the first or second embodiment described above, the chamber Ch, which becomes the vacuum side in which the expansion and contraction rod (moving part) 72 extends, is a hollow part communicating with the flow path H. Corresponds to (11).

The bias unit (pressing cylinder) 70 built in the valve box 10 is connected to a hydraulic driving unit (incompressible fluid driving unit) 700 installed on the atmosphere side, and is driven by hydraulic pressure.

The hydraulic driving unit (incompressible fluid driving unit) 700 supplies and discharges, that is, supplies and discharges the incompressible fluid (pressurized oil) to the bias unit (pressing cylinder) 70, and simultaneously drives a plurality of bias units (pressing cylinder) 70. .

The bias unit (pressing cylinder) 70 connects the movable valve unit (movable valve plate unit) 54 to the first opening 12a in the flow path (H) direction at the valve opening blocking position (sliding ready position) and the valve closed position. Bias toward The bias unit (pressing cylinder) 70 has a function of allowing the valve plate seal packing to be in close contact with the inner surface of the valve box 10 located around the first opening 12a.

The biasing portion (pressing cylinder) 70 pushes the periphery of the movable valve portion (moving valve plate portion) 54 at the valve opening closing position (sliding preparation position) in the direction of the flow path H. The bias section (pressing cylinder) 70 closes (blocks) the flow path H by the movable valve section (movable valve plate section) 54 that has moved.

In addition, in the gate valve 100 according to the present embodiment, the movable valve portion (movable valve plate portion) 54 is connected to the valve case 63 at the valve opening closing position (sliding preparation position) and the valve closing position. It is connected so that the position in the) direction can be changed.

Moreover, although not shown in the valve case 63 or the movable valve part (movable valve plate part) 54, the movable valve part (movable valve plate part) 54 is moved relative to the valve case 63 in the flow path (H) direction. It is provided with a bias portion (neutral bias portion) biasing toward the center position of the hollow portion 11 of.

For this reason, in the case where the bias part (pressing cylinder) 70 is not operated, the movable valve part (movable valve plate part) 54 is the hollow part 11 inside the valve box 10. It has a normal closing mechanism that keeps it in the center position of. By the bias part (pressing cylinder) 70 and the bias part (neutral bias part) of the valve case 63, in the direction of the flow path H of the valve case 63 and the movable valve part (movable valve plate part) 54 The thickness dimension of is adjustable.

When the rotation shaft 20 rotates in a direction intersecting in the direction of the flow path H, the neutral valve part 30 fixed to the rotation shaft 20 also rotates integrally according to this rotation. In addition, since the movable valve part (movable valve plate part) 54 is slidable only in the thickness direction to the neutral valve part 30, the movable valve part (movable valve plate part) 54 is integrated with the neutral valve part 30. Rotate with

By rotating the neutral valve part 30, the flow path H becomes a position corresponding to the first opening 12a from the retracted position (valve open position) where the flow path H is not installed, the hollow part 11 The movable valve part (movable valve plate part) 54 moves in a pendulum motion to the valve opening blocking position (sliding preparation position) which shields the.

In this embodiment, the fixing portion 71 of the vacuum actuator (pressing cylinder) 70 is incorporated in the valve box 10. The vacuum actuator (pressing cylinder) 70 is arranged so that the movable part (expansion rod) 72 can be biased in the direction in which the biasing member (pressing spring) 73 is separated from the movable valve part (movable valve plate part) 54. do.

In the vacuum actuator (pressing cylinder) 70, as shown in Figs. 2 and 3, the movable part (expansion rod) 72 decomposed by the bias member (pressing spring) 73 is a movable valve part (movable valve plate part). It is separated from 54 and is accommodated in the fixing part 71 built in the valve box 10.

Here, in the vacuum actuator (pressing cylinder) 70, the hydraulic pressure is supplied from the hydraulic driving unit (incompressible fluid driving unit) 700 by the hydraulic biasing member 720 of the hydraulic pressure generating unit 701 in the retracted state, and springback As a result, the movable portion (expansion rod) 72 is extended. At this time, the vacuum actuator (pressing cylinder) 70 moves the movable valve part (movable valve plate part) 54 toward the first opening 12a by the movable part (expansion rod) 72, and the movable valve part ( The movable valve plate part) (54) is brought into contact with the inner surface of the valve box (10). Further, the vacuum actuator (pressing cylinder) 70 closes the flow path H by pressing the movable valve part (movable valve plate part) 54 against the inner surface of the valve box 10 to close the flow path H (closed valve operation).

In the extended state of the movable part (expansion rod) 72, the vacuum actuator (pressing cylinder) 70 is supplied from the hydraulic driving part (incompressible fluid driving part) 700 by driving the motor 705m of the driving part 705. The distal end portion of the movable portion (expansion rod) 72 is retracted by release of the hydraulic pressure. At this time, the bias unit (neutral bias unit) separates the movable valve unit (movable valve plate unit) 54 from the first opening 12a.

For this reason, the movable valve part (movable valve plate part) 54 is separated from the inner surface of the valve box 10 and is retracted. The flow path H is opened (release operation) by setting the movable valve portion (movable valve plate portion) 54 to the center position of the hollow portion 11 in the flow path H direction.

In this way, the closing valve operation and the releasing operation are made possible by the mechanical abutting operation and the mechanical separation operation in the vacuum actuator (pressing cylinder) 70. Here, the mechanical abutting operation of the vacuum actuator (pressing cylinder) 70 is an operation of bringing the movable valve part (movable valve plate part) 54 into contact with the inner surface of the valve box 10. The mechanical separation operation in the vacuum actuator (pressing cylinder) 70 is an operation of separating the movable valve part (movable valve plate part) 54 from the inner surface of the valve box 10 by a bias part (neutral bias part). .

After this release operation, when the rotation shaft 20 is rotationally driven by the rotation drive unit 21 (retract operation), the neutral valve unit 30 and the movable valve unit (movable valve plate unit) 54 are also integrated according to this rotation. Meet.

The gate valve 100 retracts from the valve opening blocking position (sliding ready position) to the retracted position (valve open position) by this release operation and the retracting operation, and the valve is opened. The valve opens. The rotation driving unit 21 has a configuration capable of a normal close operation.

The vacuum actuator (pressing cylinder) 70 is driven by hydraulic pressure (incompressible fluid) supplied from the hydraulic driving unit (incompressible fluid driving unit) 700.

The hydraulic drive part (incompressible fluid drive part) 700 becomes the hydraulic drive part (incompressible fluid drive part) 700 in the 1st embodiment or 2nd embodiment mentioned above.

The hydraulic drive unit (incompressible fluid drive unit) 700 further detects that the rotation of the rotary shaft 20 is at the valve closing position and the valve opening blocking position (sliding ready position), and a switchable sensor 802 that can switch the hydraulic supply. ) May be provided.

The hydraulic drive unit (incompressible fluid drive unit) 700 is configured to enable a normal closing operation by spring back by the hydraulic bias member 720 of the hydraulic pressure generator 701.

When the hydraulic drive unit (incompressible fluid driving unit) 700 degenerates the movable unit (extensible rod) 72, hydraulic oil is generated from the vacuum actuator (pressing cylinder) 70 by the motor 705m of the driving unit 705 Move to section 701.

When the hydraulic drive unit (incompressible fluid drive unit) 700 extends the movable unit (expansion rod) 72, the hydraulic pressure by the hydraulic bias member 720 of the hydraulic pressure generator 701 is applied to the vacuum actuator (pressing cylinder) 70. ) To reflux.

The hydraulic driving unit (incompressible fluid driving unit) 700 enables the movable unit (extensible rod) 72 to maintain an expanded hydraulic state when the operation is finished.

The hydraulic drive unit (incompressible fluid drive unit) 700 can appropriately control the state in which the movable unit (extensible rod) 72 is in contact with the movable valve unit (movable valve plate unit) 54.

The hydraulic drive unit (incompressible fluid drive unit) 700 is a reverse counterpart and has an excitation brake 705b and a regenerative current processing unit 705c or an excitation clutch 705d.

The hydraulic drive unit (incompressible fluid drive unit) 700 is damaged in response to a motor (705m) rotated by a reversing countermeasure, or a vacuum actuator 70, a movable valve unit (movable valve plate unit) 54 It is possible to prevent defects such as breakage in the back.

As for the gate valve 100 in this embodiment, as shown in FIG. 3, the movable valve part (movable valve plate part) 54 is in the retracted position (valve opening position), and the flow path H is fully opened and flows. It becomes possible.

In addition, while the movable valve part (movable valve plate part) 54 is operated in closed rotation from the retracted position (valve open position) shown in FIG. 3 to the valve opening closing position (sliding preparation position) shown in FIG. (H) is partially blocked by the movable valve part (movable valve plate part) 54, and the flow path H is partially circulated.

Moreover, immediately after the movable valve part (movable valve plate part) 54 reaches the valve opening blocking position (sliding preparation position) shown in FIG. 4, the flow path H is in the movable valve part (movable valve plate part) 54. Although it is shielded by this, it is not sealed, and the flow path H is partially circulated near the periphery of the movable valve part (movable valve plate part) 54.

Further, when spring-backed by the hydraulic bias member 720 of the hydraulic pressure generator 701, the movable portion (expansion rod) 72 of the vacuum actuator (pressing cylinder) 70 is extendedly driven. For this reason, the movable valve part (movable valve plate part) 54 performs a sealing operation of changing the position in the flow path H direction. For this reason, the movable valve part (movable valve plate part) 54 slides from the valve opening blocking position (sliding preparation position) shown in FIG. 4 to the valve closing position shown in FIG. 5, and the flow path H is blocked.

Subsequently, when the motor 705m of the drive unit 705 is driven, the movable valve unit (movable valve plate unit) (a movable valve unit) is driven by the movable unit (expansion rod) 72 by the vacuum actuator (pressing cylinder) 70. 54) performs an opening operation to change its position in the direction of the flow path H. For this reason, the movable valve part (movable valve plate part) 54 slides from the valve closing position shown in FIG. 5 to the valve opening closing position shown in FIG. 4 (sliding preparation position). At this time, the flow path H is partially covered with the movable valve part (movable valve plate part) 54, and the flow path H is partially circulated.

Moreover, immediately after the movable valve part (movable valve plate part) 54 starts the sealing release operation (separating operation) by the springback at the valve closed position shown in FIG. 5, the sealing of the flow path H is released, and the flow path Part (H) can be distributed in the vicinity of the peripheral portion of the movable valve portion (movable valve plate portion) 54. At the same time, the flow path H is shielded by the movable valve portion (movable valve plate portion) 54, but is not sealed.

Moreover, while the movable valve part (movable valve plate part) 54 is operating from the valve opening blocking position (sliding preparation position) shown in FIG. 4 to the retracted position (valve open position) shown in FIG. 3, the flow path ( H) is partially covered by the movable valve part (movable valve plate part) 54, and the flow path H is partially circulating.

In addition, while the movable valve part (movable valve plate part) 54 is rotated, the vacuum actuator (pressing cylinder) 70 maintains the movable part (extensible rod) 72 in a degenerate state, and the movable part (expansion rod) 72 ) Is not performed.

With respect to this embodiment, the same effects as those of the first embodiment or the second embodiment can be achieved.

Hereinafter, a hydraulic drive system and a gate valve according to a fourth embodiment of the present invention will be described based on the drawings.

Fig. 6 is a schematic explanatory view showing a hydraulic drive system in the present embodiment and a hydraulic pressure generating unit in a pressurized state in a hydraulic drive unit of a gate valve. Fig. 7 is a schematic explanatory view showing a hydraulic drive system in the present embodiment and a hydraulic pressure generating unit in a reduced pressure state in a hydraulic drive unit of a gate valve. Fig. 8 is a schematic explanatory view showing a hydraulic drive system in the present embodiment and a hydraulic pressure generator in an overpressure state in a hydraulic drive unit of a gate valve.

9 is a cross-sectional view in the axial direction for explaining the vacuum actuator of the hydraulic drive system and the gate valve in the present embodiment. Fig. 10 is a cross-sectional view in the axial direction orthogonal to Fig. 9 for explaining a vacuum actuator in a hydraulic drive system and a gate valve in the present embodiment. Fig. 11 is an axial cross-sectional view showing an extended state for explaining a vacuum actuator in a hydraulic drive system and a gate valve in the present embodiment.

What is different from the first embodiment or the second embodiment described above with respect to this embodiment relates to the hydraulic pressure generator and the vacuum actuator, and other corresponding components are denoted by the same reference numerals, and the description thereof is omitted.

The hydraulic drive unit (incompressible fluid drive unit) 700 in this embodiment has a configuration equivalent to the hydraulic drive unit (incompressible fluid drive unit) 700 in the first or second embodiment described above.

The hydraulic pressure generator 701 includes a hydraulic cylinder 710, a hydraulic bias member 720, a cylinder drive unit 730, and a casing 750, as shown in FIGS. 6 to 8.

The hydraulic cylinder 710 pressurizes and supplies hydraulic oil, which is an incompressible fluid, to a vacuum actuator (pressing cylinder) 70. The hydraulic biasing member 720 biases the hydraulic cylinder 710 and enables a springback operation. The cylinder driving unit 730 may drive the hydraulic cylinder 710 by resisting the hydraulic bias member 720. The casing 750 accommodates these hydraulic cylinders 710, hydraulic biasing members 720, and cylinder driving units 730.

The hydraulic cylinder 710 has a cylinder body 711 in the shape of a user (有低) cylinder, and a piston 712 that is relatively movable in the axial direction inside the cylinder body 711. The piston 712 has a hydraulic flow path 713 penetrating the inside along the axis of the piston 712, and the hydraulic flow path 713 is connected to the hydraulic pipe 702. The hydraulic flow path 713 can flow in or out of the hydraulic oil (driving fluid), which is an incompressible fluid, to the hydraulic pipe 702.

The hydraulic flow path 713 of the piston 712 connected to the hydraulic pipe 702 passes through the casing 750. The end 712a of the piston 712 is sealed by an O-ring and a sealing material. The end 712a of the piston 712 is mounted and fixed to the casing 750.

The end portion 712b of the piston 712 opposite to the end portion 712a is located inside the cylinder body 711. The piston 712 is positioned coaxially with the cylinder body 711.

The end portion 711a (first end) of the cylinder body 711 is open. The end portion 712b of the piston 712 is inserted into the cylinder body 711 through the end portion 711a of the cylinder body 711.

The cylinder body 711 is movable relative to the piston 712 in the axial direction. The cylinder body 711 is movable relative to the casing 750 in the axial direction.

The end portion 711b (second stage) of the cylinder body 711 closes the inner space of the cylinder body 711. A hydraulic space 714 is formed between the bottom surface of the cylinder body 711 (the inner surface opposite to the end 711b) and the end face of the end 712b of the piston 712. The hydraulic space 714 is filled with hydraulic oil (driving fluid), which is an incompressible fluid.

The volume of the hydraulic space 714 increases or decreases when the cylinder body 711 moves relative to the piston 712 in the axial direction. As the volume of the hydraulic space 714 increases or decreases, the hydraulic oil filled in the hydraulic space 714 flows into or out of the hydraulic pipe 702 through the hydraulic flow path 713.

At the end 711a of the cylinder body 711, a flange portion 711c is provided at an outer peripheral position. The flange portion 711c is driven outward from the end portion 711a in the radial direction of the cylinder main body 711 and is hung.

Inside the casing 750, on the surface facing the end 711b of the cylinder body 711, the end 721b of the inner spring 721 constituting the hydraulic biasing member 720 and the end of the outer spring 722 ( 722b) abuts.

In the flange portion 711c, a circumferential groove 711d is formed on a surface opposite to the end portion 711a close to the outer peripheral surface of the cylinder body 711.

The end 721a of the inner spring 721 constituting the hydraulic bias member 720 abuts against the circumferential groove 711d. In the flange portion 711c, an end portion 722a of the outer spring 722 abuts at the outer peripheral position of the circumferential groove 711d.

The hydraulic biasing member (main spring) 720 has an inner spring 721 and an outer spring 722. The inner spring 721 and the outer spring 722 are coil springs. The inner spring 721 and the outer spring 722 are disposed coaxially with the cylinder body 711 and the piston 712. The inner spring 721 has an inner diameter dimension slightly larger than the diameter dimension of the outer peripheral surface of the cylinder body 711.

The outer spring 722 has an inner diameter dimension slightly larger than the outer diameter dimension of the inner spring 721. The outer spring 722 has a larger wire diameter than the inner spring 721. The outer spring 722 has a greater biasing force than the inner spring 721.

The inner spring 721 and the outer spring 722 transmit a biasing force in the stretching direction to the cylinder body 711. Both the inner spring 721 and the outer spring 722 bias the flange portion 711c of the cylinder body 711 toward the end portion 712a of the piston 712.

The end 721b of the inner spring 721 and the end 722b of the outer spring 722 abut against the casing 750. For this reason, the hydraulic biasing member 720 biases the cylinder body 711 with respect to the casing 750.

In addition, the hydraulic biasing member 720 is not limited to this configuration as long as it can bias the cylinder body 711.

A bush 711e and Y-shaped packings 711f and 711g are provided on the inner circumferential surface of the cylinder body 711 at a position close to the end 711a. The inner circumferential surface of the cylinder body 711 and the outer circumferential surface of the piston 712 are sealed to be slidable. The end 711b of the cylinder body 711 is connected so that the end 731a of the drive shaft 731 of the cylinder driving unit 730 is located coaxially.

The cylinder drive unit 730 includes a drive shaft 731 that moves the cylinder body 711 relative to the piston 712 in the axial direction, and a drive transmission unit that drives the drive shaft 731 by a drive unit 705 such as a motor. Have.

The drive shaft 731 is disposed in the casing 750 coaxially with the cylinder body 711 and the piston 712. The drive shaft 731 is movable in the axial direction. The drive shaft 731 is movable relative to the piston 712 and the casing 750 in the axial direction.

A ball screw 731c is formed on the outer peripheral surface of the drive shaft 731 at a position close to the end 731a. The length of the ball screw 731c in the axial direction of the drive shaft 731 is to be described later for all ranges (circumferential region, screw formation surface) of the ball screw 731c when the cylinder body 711 moves in the axial direction. The inner bare surface 732c is set so as to maintain the bare state.

A screw drive gear 732 is disposed coaxially at an outer peripheral position of the ball screw 731c on the outer side of the drive shaft 731 in the radial direction. The drive shaft 731 is supported with respect to the casing 750 by a screw drive gear 732.

A rotation preventing 731h, which will be described later, protrudes in the radial direction and is installed at the end 731b of the drive shaft 731, which is in a position opposite to the end 731a. The rotation prevention 731h is located inside the sliding groove 757 installed in the casing 750 and regulates the moving direction of the drive shaft 731 so that the drive shaft 731 can move in the axial direction without rotating.

The screw drive gear 732 has a cylindrical shape. The screw drive gear 732 is supported so as to be rotatable with respect to the casing 750. Ball bearings 732f and 732g are installed on the outer periphery of the screw drive gear 732. The ball bearings 732f and 732g are positioned coaxially with respect to the casing 750 and are rotatable with the drive shaft 731 to support the screw drive gear 732.

Further, the screw drive gear 732 does not move in the axial direction with respect to the casing 750. An inner bare surface 732c is formed on the inner periphery of the screw drive gear 732. The inner bare surface 732c meshes with the ball screw 731c of the drive shaft 731.

When the screw drive gear 732 rotates, a rotational force acts on the drive shaft 731 by the ball screw 731c that meshes with the inner bare surface 732c. The rotation of the drive shaft 731 is regulated by the rotation prevention 731h and the sliding groove 757. Accordingly, the drive shaft 731 moves in the direction regulated by the sliding groove 757, that is, in the axial direction of the drive shaft 731.

An outer gear 732d is formed on the outer periphery of the screw drive gear 732. The outer gear 732d is formed at a position sandwiched between the ball bearing 732f and the ball bearing 732g in the axial direction of the screw drive gear 732. In the screw drive gear 732, the outer gear 732d is located at the outermost side in the radial direction.

In addition, the screw driving gear 732 may be integrally connected with an inner screw driving gear 732a having an inner side surface 732c and an outer screw driving gear 732b having an outer gear 732d formed thereon.

The outer gear 732d meshes with the drive gear 733d (-合). The drive gear 733d has a rotation axis parallel to the axis of the drive shaft 731. The drive gear 733d is rotatably supported on a rotation shaft 734 parallel to the axis of the drive shaft 731. The rotation shaft 734 is supported by the casing 750 at a position separated from the outside in the radial direction of the drive shaft 731. The driving gear 733d is integrally formed with the driving gear 733e coaxial with the driving gear 733d. The drive gear 733e has a larger diameter than the drive gear 733d. The drive gear 733e rotates integrally with the drive gear 733d.

The drive gear 733e meshes with the drive gear 735. The drive gear 735 has a rotation axis parallel to the axis of the drive shaft 731. The drive gear 735 is rotatably supported on a rotation shaft 736 parallel to the axis of the drive shaft 731. The rotation shaft 736 is supported by the casing 750 at a position outside the drive shaft 731 in the radial direction, and at a position farther apart than the rotation shaft 734.

The drive gear 735 meshes with the drive gear 737. The drive gear 737 has a rotation axis parallel to the axis of the drive shaft 731. The drive gear 737 is fixed to the rotational drive shaft 705a of a drive unit 705 such as a motor parallel to the axis of the drive shaft 731. The rotation drive shaft 705a is disposed at a position further away from the rotation shaft 736 at a position outside the drive shaft 731 in the radial direction. The rotation drive shaft 705a is rotatably mounted to the casing 750 in a penetrating state.

Screw drive gear 732, ball bearings (732f, 732g), inner side face (732c), outer gear (732d), drive gear (733d), drive gear (733e), rotary shaft (734), drive gear (735), The rotation shaft 736 and the drive gear 737 constitute a drive transmission unit (a drive system of the hydraulic pressure generator 701).

The casing 750 includes a casing cylinder 751, a casing cover 752, a rear casing 753, a ring 754, and a cover portion 758. The casing cylinder 751 has a cylindrical shape. The casing cover 752 blocks one end of the casing barrel 751.

The rear casing 753 blocks the other end of the casing barrel 751. The ring 754 is installed between the casing cylinder 751 and the rear casing 753. The cover portion 758 blocks the other end of the rear casing 753.

The casing cylinder 751 has an inner shape extending coaxially with the cylinder body 711, the piston 712, and the drive shaft 731. The interior of the casing tube 751 forms a storage space 755.

Inside the storage space 755, the cylinder body 711, the piston 712, the inner spring 721 and the outer spring 722 constituting the hydraulic bias member 720, and the end of the drive shaft 731 ( 731a) is stored. The storage space 755 opens at an end position close to the piston 712, and this opening is closed by a casing cover 752.

A piston 712 is connected and fixed to the casing cover 752. An end portion 712a of the piston 712 passes through the casing cover 752. The storage space 755 opens at an end position close to the drive shaft 731, and this opening is closed by the rear casing 753. A drive shaft 731 passes through the rear casing 753. A ring 754 is installed in the storage space 755 at a position close to the rear casing 753.

The ring 754 is located coaxially with the drive shaft 731 and is disposed around the drive shaft 731. The inner periphery of the ring 754 and the outer periphery of the drive shaft 731 are separated. The ring 754 has an inner diameter equal to the diameter of the inner periphery of the flange portion 711c, that is, the outer periphery of the cylinder body 711. Further, the ring 754 has an outer diameter equal to the outer diameter dimension of the flange portion 711c.

The end portion 721b of the inner spring 721 constituting the hydraulic bias member 720 and the end portion 722b of the outer spring 722 abut on the surface of the ring 754 facing the casing cover 752. On the surface of the ring 754 facing the casing cover 752, a circumferential groove 754d is formed so as to correspond to the circumferential groove 711d. The end 721b of the inner spring 721 constituting the hydraulic bias member 720 abuts on the circumferential groove 754d. The end portion 722b of the outer spring 722 abuts on the surface of the ring 754 facing the casing cover 752 and located on the outer periphery of the circumferential groove 754d.

Drive system support portions 751k and 753k extending radially outward of the drive shaft 731 than the storage space 755 are provided between the casing cylinder 751 and the rear casing 753. The drive system support portions 751k and 753k are formed in a flange shape that forms part of the circumferential direction with respect to the casing cylinder 751 and the rear casing 753.

The drive system support part 751k and the drive system support part 753k are in contact with each other. Between the drive system support part 751k and the drive system support part 753k, screw drive gear 732, ball bearings 732f, 732g, inner side face 732c, outer gear 732d, drive gear 733d, drive gear 733e ), a rotation shaft 734, a drive gear 735, a rotation shaft 736, and a drive gear 737 are inserted (挾持).

Screw drive gears 732, ball bearings 732f and 732g, outer gears 732d, drive gears 733d, drive gears 733e, and rotary shafts are provided on the surfaces facing the drive system support 751k and the driveline support 753k. 734, the drive gear 735, the rotation shaft 736, and the uneven portions corresponding to the drive gear 737 are formed.

A screw drive gear 732, ball bearings 732f and 732g, a drive gear 733d, a drive gear 733e, and a rotation shaft 734 are between the surfaces of the drive system support 751k and the drive system support 753k facing each other. , The drive gear 735, the rotation shaft 736, the drive gear 737 is supported.

Further, a rotation drive shaft 705a penetrates through the drive system support 751k. A drive unit 705 having a motor 705m is attached to the drive system support unit 751k.

A ball bearing 732f is provided between the casing cylinder 751 and the outer screw drive gear 732b (screw drive gear 732). The ball bearing 732f supports the screw drive gear 732 with respect to the casing cylinder 751 so as to be rotatable. A ball bearing 732g is provided between the rear casing 753 and the outer screw drive gear 732b (screw drive gear 732). The ball bearing 732g supports the screw drive gear 732 with respect to the rear casing 753 so as to be rotatable.

A rear space 756 is formed in the rear casing 753 to avoid the end 731b of the drive shaft 731 when the drive shaft 731 moves in the axial direction. A screw driving gear 732 is disposed at a position that becomes a boundary between the rear space 756 and the storage space 755. That is, the drive shaft 731 is disposed so as to be movable in the axial direction at a position that becomes the boundary between the rear space 756 and the storage space 755.

A sliding groove 757 is formed in the rear space 756 so as to expand the diameter. The sliding groove 757 is located outside the radial direction of the drive shaft 731. The rotation prevention 731h regulates the rotation of the drive shaft 731 by sliding the inside of the sliding groove 757 and makes it possible to move the drive shaft 731 in the axial direction. The end of the rear space 756 is closed by the cover part 758.

In the rear space 756, a detection switch (detection means) 760 capable of detecting the proximity of the drive shaft 731 is provided at a position close to the lid portion 758. The detection switch (detection means) 760 is connected to the control unit 706. The detection switch (detection means) 760 may be located in the sliding groove 757.

A detection switch (detection means) 761 capable of detecting that the drive shaft 731 is close to the piston 712 is provided at a position in the rear space 756 close to the screw drive gear 732. The detection switch (detection means) 761 is connected to the control unit 706. The detection switch (detection means) 761 may be located in the sliding groove 757.

The detection switch (detection means) 760 and the detection switch (detection means) 761 detect the axial position of the drive shaft 731. The detection switch (detection means) 760 and the detection switch (detection means) 761 can be a contact type or a non-contact magnetic type.

For example, the detection switch (detection means) 760 may be a limit switch detectable when a part of the drive shaft 731 abuts, or a magnetic element installed in a part of the drive shaft 731 may be a detectable magnetic switch. .

When the drive shaft 731 moves from the storage space 755 toward the rear space 756, the detection switch (detection means) 760 moves from the detection switch (detection means) 760 in the axial direction. It detects that the specified position has been reached. In addition, the detection switch (detection means) 761 is a detection switch (detection means) 761 in the axial direction when the drive shaft 731 moves from the rear space 756 toward the storage space 755. It detects that it has reached the position specified in ).

Here, when the detection switch (detection means) 760 outputs to the control unit 706 that the drive shaft 731 has reached a predetermined position in the axial direction, the control unit 706 receiving the signal is the driving unit 705 Outputs a signal to stop the drive. For this reason, the drive unit 705 stops driving. Accordingly, the moving position of the drive shaft 731 is regulated according to the position where the detection switch (detection means) 760 is installed.

Here, the driving of the motor 705m may be stopped by stopping the power supply from the power supply 707 to stop the driving in the drive unit 705.

Further, the driving stop in the drive unit 705 may be stopped by the excitation brake 705b to stop the rotation of the rotation drive shaft 705a of the motor 705m.

Alternatively, the driving stop in the drive unit 705 may be a state in which the rotation of the rotational drive shaft 705a of the motor 705m is blocked by the excitation clutch 705d and is not transmitted to the drive shaft 731.

Alternatively, when the detection switch (detection means) 761 outputs to the control unit 706 that the drive shaft 731 has reached a predetermined position in the axial direction, the control unit 706 receiving the signal is the driving unit 705 Outputs a signal to start driving. For this reason, the drive unit 705 starts driving. Therefore, the moving position of the drive shaft 731 is regulated according to the position where the detection switch (detection means) 761 is installed.

Here, the start of driving in the drive unit 705 may start driving the motor 705m by starting power supply from the power source 707.

Incidentally, the start of driving in the drive unit 705 may release the rotation stop of the rotation drive shaft 705a of the motor 705m by the excitation brake 705b.

Further, the start of driving in the drive unit 705 may be a state in which the rotation of the rotation drive shaft 705a of the motor 705m is connected by the excitation clutch 705d and transmitted to the drive shaft 731.

In this way, the hydraulic pressure generator 701 enables switching of the driving state in the drive unit 705 by a signal from the control unit 706.

When the control unit 706 outputs a driving signal, the driving unit 705 is driven. The rotation drive shaft 705a is rotated by the driving of the drive unit 705. The drive gear 737 mounted on the rotation drive shaft 705a rotates by the rotation of the rotation drive shaft 705a. Rotation of the drive gear 737 is transmitted to the drive gear 735 meshed with the drive gear 737. The rotation of the drive gear 735 is transmitted to the drive gear 733e meshing with the drive gear 735.

The rotation of the driving gear 733e is transmitted to the driving gear 733d integrally formed with the driving gear 733e. The rotation of the driving gear 733d is transmitted to the outer gear 732d meshing with the driving gear 733d, and the screw driving gear 732 rotates. The rotation of the outer gear 732d is transmitted to the inner side surface 732c of the screw drive gear 732 integrally formed with the outer gear 732d.

Rotation of the inner side surface 732c of the screw drive gear 732 is transmitted to the ball screw 731c of the drive shaft 731 that meshes with the screw drive gear 732, and the drive shaft 731 rotates. The screw drive gear 732 is supported by ball bearings 732f and 732g. For this reason, even if the screw drive gear 732 rotates, the screw drive gear 732 does not move in the axial direction.

The drive shaft 731 is supported by the inner bare surface 732c, and the rotation preventing 731h is located inside the sliding groove 757, and the moving direction of the drive shaft 731 is regulated. For this reason, the drive shaft 731 moves in the axial direction when the screw drive gear 732 rotates. In this way, the rotational driving force of the driving unit 705 such as a motor is transmitted to the driving shaft 731 by the driving transmission unit, and the driving shaft 731 moves in the axial direction.

When the drive shaft 731 moves in the axial direction, the cylinder body 711 integrally connected to the drive shaft 731 also moves in the axial direction. At this time, since the piston 712 is fixed to the casing cover 752, it does not move. For this reason, the cylinder body 711 and the piston 712 move relatively in the axial direction.

Here, as the cylinder body 711 and the piston 712 relatively move, the volume of the hydraulic space 714 inside the cylinder body 711 is changed. According to the volume change of the hydraulic space 714, the hydraulic oil (driving fluid), which is an incompressible fluid filled in the hydraulic space 714, flows into or out of the hydraulic flow path 713.

The inner spring 721 and the outer spring 722 constituting the hydraulic biasing member 720 abutting on the flange portion 711c are applied to the cylinder body 711.

In this embodiment, the movable part (extensible rod) 72 is made expandable when the normal push, that is, the driving part 705 is not being driven. For this reason, in the hydraulic cylinder 710, the biasing force of the hydraulic biasing member 720 is generated in the direction in which the inner spring 721 and the outer spring 722 extend. That is, the biasing force applied from the hydraulic biasing member 720 to the cylinder body 711 is generated in a direction in which the cylinder body 711 is separated from the screw drive gear 732.

Accordingly, the biasing force of the hydraulic biasing member 720 is applied so that the volume of the hydraulic space 714 in the cylinder body 711 is reduced.

In addition, in this embodiment, when the normal push, that is, the drive part 705 is driven, the movable part (extension rod) 72 is made to be retractable. For this reason, in the hydraulic cylinder 710, the direction in which the drive shaft 731 moves by the drive of the drive unit 705 is opposite to the direction of the bias force of the hydraulic bias member 720. That is, the drive shaft 731 moves in a direction away from the piston 712 by the driving of the drive unit 705.

Accordingly, the drive shaft 731 moves to increase the volume of the hydraulic space 714 in the cylinder body 711 by the driving of the driving unit 705.

When the driving unit 705 is stopped, the hydraulic pressure generator 701 has a volume of the hydraulic space 714 reduced by the biasing force of the hydraulic bias member 720 as shown in FIG. 6. Due to this, the volume of the hydraulic space 714 is pressurized. For this reason, the hydraulic oil (driving fluid), which is an incompressible fluid, flows into the hydraulic pipe 702 from the hydraulic space 714 through the hydraulic flow path 713. At this time, in the vacuum actuator (pressing cylinder) 70, hydraulic pressure acts, and the distal end portion 72a of the movable portion (expansion rod) 72 extends.

In addition, when the hydraulic pressure generating unit 701 drives the driving unit 705, the volume of the hydraulic space 714 increases by the driving force of the driving unit 705 as shown in FIG. 7. Due to this, the volume of the hydraulic space 714 is reduced. The hydraulic oil (driving fluid), which is an incompressible fluid, flows into the hydraulic space 714 from the hydraulic pipe 702 through the hydraulic flow path 713. At this time, in the vacuum actuator (pressing cylinder) 70, hydraulic pressure acts and the distal end portion 72a of the movable portion (expansion rod) 72 is retracted.

Further, in the hydraulic pressure generator 701, even when the cylinder body 711 is overrun so that it approaches the casing cover 752 for some reason, as shown in Fig. 8, the flange portion 711c is the casing cover 752. The cylinder body 711 stops moving by contacting with. For this reason, the reduction of the hydraulic space 714 is limited to a predetermined range. Accordingly, the hydraulic pressure generator 701 may not introduce excess hydraulic oil (driving fluid) into the vacuum actuator (pressing cylinder) 70.

In Fig. 8, description of the detection switch (detection means) 761 is omitted.

As shown in Figs. 9 to 11, the vacuum actuator 70 according to the present embodiment includes a guide rod 771, a cylinder portion 772, an extension rod (movable portion) 72, and a flange portion 773. Wow, it has a bias member (pressing spring) 73 and a casing 774.

In the vacuum actuator 70, as shown in Figs. 9 to 11, at one end of the substantially cylindrical casing 774, an expansion and contraction rod 72 having a diameter smaller than that of the casing 774 can extend and extend. It has a configuration that can be degenerate. The vacuum actuator 70 is connected to the hydraulic pressure generator 701 through a hydraulic pipe 702.

The hydraulic pressure generator 701 supplies hydraulic pressure, which is a positive or negative pressure, to the vacuum actuator 70 when the expansion and contraction rod 72 is expanded and contracted, and at the same time, it is possible to maintain the hydraulic state at the end of the operation. Further, it is possible to appropriately control the state of the expansion and contraction rod 72 in contact with the object.

As shown in Figs. 9 to 11, the guide rod 771 has a substantially cylindrical shape, and has a through hole 771c in the axial direction capable of supplying operating hydraulic pressure from the hydraulic drive unit 700 toward the one end surface 771a. .

The guide rod 771 is installed from the cover portion 774b of the casing 774 toward the inside of the casing 774.

The guide rod 771 may be integrated with the lid portion 774b. In this embodiment, a pipe-shaped outer guide rod 771g is joined to a convex portion 774h protruding to the center position of the recessed portion 774g provided in the lid portion 774b on the guide rod 771. For this reason, centering of the outer guide rod 771g with respect to the cover part 774b is made. The through hole 771c is continuously formed inside the cover portion 774b, the convex portion 774h, and the outer guide rod 771g.

The cylinder portion 772 has a cylindrical shape with a bottom open at the other end. The cylinder portion 772 is disposed coaxially with the guide rod 771. The cylinder portion 772 is disposed so as to slidably cover the one end surface 771a of the guide rod 771. One end surface 771a of the guide rod 771 and the inner surface of the cylinder portion 772 form a driving space 777 therein.

A through hole 771c communicates with the driving space 777. As shown in Fig. 10, a hydraulic pipe 702 is connected to the through hole 771c. The driving space 777 is connected to the hydraulic pressure generator 701 through a hydraulic pipe 702.

Hydraulic oil is supplied from the hydraulic pressure generator 701 to the driving space 777 through a hydraulic pipe 702 to pressurize the driving space 777. Alternatively, the hydraulic oil returns to the hydraulic pressure generator 701 through the hydraulic pipe 702 in the driving space 777, and the driving space 777 is depressurized.

An extension rod 72 is installed at one end 772a of the cylinder portion 772 at a position serving as an upper surface in FIG. 10. The expansion and contraction rod 72 has a cylindrical shape extending outward in the axial direction of the cylinder portion 772. The telescopic rod 72 is disposed coaxially with the cylindrical cylinder portion 772. The telescopic rod 72 is coaxial with the cylindrical guide rod 771.

The expansion and contraction rod 72 is integrated with the cylinder part 772 and, in association with the sliding of the cylinder part 772 with respect to the guide rod 771, is movable so as to expand and contract in the axial direction. The diameter dimension of the telescopic rod 72 is set smaller than the diameter dimension of the cylinder portion 772.

The diameter dimension of the extension rod 72 is set smaller than the diameter dimension of the guide rod 771. The telescopic rod 72 may be integrated with the cylinder portion 772. In the expansion and contraction rod 72 of the present embodiment, the expansion and contraction rod 72 is joined to a convex portion 772h protruding from the axial center position of the cylinder part 772. For this reason, centering of the elastic rod 72 with respect to the cover part 774b is made.

A flange portion 773 is provided at the outer peripheral position of the cylinder portion 772 at the other end portion 772b.

The flange portion 773 extends radially outward to the other end portion 772b of the cylinder portion 772. The flange portion 773 has a predetermined thickness.

The flange portion 773 is formed integrally with the cylinder portion 772.

The other end of the bias member (spring) 73 abuts against the pressing surface 773a close to the elastic rod 72 on the flange portion 773.

The biasing member (spring) 73 has a spiral shape, and biases the flange portion 773 in the retraction direction of the elastic rod 72.

The bias member (spring) 73 is located on the outer periphery of the cylinder portion 772 coaxially with the cylinder portion 772. One end of the bias member (spring) 73 abuts against the casing 774.

The casing 774 includes a cylindrical portion 774c having a cylindrical shape, a cover portion 774b blocking the other end of the cylindrical portion 774c, and a vacuum side cover blocking a through hole 774m provided at one end of the cylindrical portion 774c. It has a part 774a.

The guide rod 771 is installed toward the inside of the casing 774 at the center position of the cover part 774b. The vacuum side cover part 774a has a through hole 775 through which the elastic rod 72 passes in the center of the vacuum side cover part 774a. The through hole 775 faces the vacuum side. The other end of the cylindrical portion 774c is fitted to the recessed portion 774g provided in the cover portion 774b.

A buffer space 776 is formed inside the cylindrical portion 774c, the lid portion 774b, and the vacuum side lid portion 774a.

A cylinder portion 772 and a bias member (spring) 73 are accommodated in the buffer space 776. In the buffer space 776, the cylinder portion 772 is capable of reciprocating movement. The buffer space 776 is a space for receiving (buffering) the operating hydraulic pressure before the operating hydraulic pressure leaks to the outside (chamber) Ch serving as the vacuum side when the operating hydraulic pressure leaks from the driving space 777.

A step 774d is formed on the inner surface of the cylindrical portion 774c that becomes the buffer space 776. The inner surface of the cylindrical portion 774c is enlarged at a position close to the lid portion 774b compared to a position close to the vacuum side lid portion 774a.

In the step 774d, the outer edge portion of the pressing surface 773a of the flange portion 773 abuts. The step 774d serves as a regulating portion that regulates the position when the cylinder portion 772 is extended in the moving range.

The outer peripheral surface of the flange portion 773 is not in contact with the inner surface of the cylindrical portion 774c that becomes the buffer space 776. A flange portion 773 serving as the other end portion 772b of the cylinder portion 772 abuts against the recessed portion 774g provided on the cover portion 774b. The recessed portion 774g serves as a regulating portion that regulates the position of the cylinder portion 772 on the retraction side in the moving range.

The cylindrical portion 774c and the vacuum side lid portion 774a are connected and fixed. A step 774e is formed at a position of the cylindrical portion 774c close to the vacuum side lid portion 774a. The position closer to the vacuum side cover part 774a than the step 774e of the cylindrical part 774c is further shaft diameter, and the atmosphere side buffer space having an inner diameter equal to the outer size of the cylinder part 772 ( 778) is formed.

One end of the bias member (spring) 73 is in contact with the step 774e.

The outer circumferential surface (sliding surface) 772m of the cylinder part 772 is in contact with the inner circumferential surface of the atmospheric side buffer space 778 so as to be slidable. In the air-side buffer space 778, as shown in FIG. 10, a through hole 778s communicating to the outside is formed in the radial direction of the cylindrical portion 774c. The atmosphere side buffer space 778 is communicated with the atmosphere side through a through hole (778s).

The through hole 775 has a diameter smaller than that of the atmospheric buffer space 778. The through hole 775 has a diameter that is approximately equal to the outer diameter of the telescopic rod 72.

The casing 774 and the guide rod 771 constitute a fixing portion 71.

The vacuum actuator 70 is provided with a sealing member in a multi-stage seal structure (seal means) so that oil, which is a working fluid, does not leak into the chamber Ch on the vacuum side when hydraulically driven. Specifically, from the driving space 777 inside the cylinder part 772 to which hydraulic pressure is supplied to the outside, inside the chamber Ch, which is the vacuum side in which the expansion and contraction rod 72 extends, the sealing members 77a1 to 4 stages are 77e) is installed.

Two-stage sealing members 77a1 to 77e are installed on the sliding surface 771f of the outer circumference of the guide rod 771 that slides with the inner surface of the cylinder 772.

On the sliding surface 771f of the outer periphery of the guide rod 771, an O-ring (sealing member) 77a1 and a wear ring (sealing member) 77a2 are installed in the same groove so that the driving space 777 can be sealed toward the outside. have.

The wear ring (sealing member) 77a2 is disposed outside the O-ring (sealing member) 77a1 in the radial direction.

The wear ring (sealing member) 77a2 contacts the inner surface of the cylinder part 772 and slides with the sliding surface 772f of the inner circumference of the cylinder part 772.

Furthermore, the guide rod 771 has a sliding surface 771f on the outer periphery of the wear ring (sealing member) 77a2 at a position separated from the driving space 777 and the same surface as the sliding surface 771f. A (sealing member) 77b is attached.

The O-ring (sealing member) 77a1, the wearing ring (sealing member) 77a2, and the wearing ring (sealing member) 77b form a first-stage sealing member. The wear ring (sealing member) 77b is a backup ring.

In addition, the guide rod 771, the sliding surface 771f of the outer periphery, at a position separated from the driving space 777 than the wear ring (sealing member) 77b, Y packing (sealing member) so that the surface is one with the sliding surface 771f. 77c1 and a sealing (sealing member) 77c2 are provided in the same groove.

Both the Y packing (sealing member) 77c1 and the sealing (sealing member) 77c2 are in contact with the inner surface of the cylinder portion 772. The Y packing (sealing member) 77c1 and the sealing (sealing member) 77c2 slide with the sliding surface 772f of the inner circumference of the cylinder portion 772.

The sealing (sealing member) 77c2 is disposed at a position separated from the driving space 777 than the Y packing (sealing member) 77c1.

In addition, a wear ring (sealing member) (a sealing member) on the sliding surface 771f of the outer periphery of the guide rod 771 is spaced apart from the driving space 777 than the sealing (sealing member) 77c2 so that the sliding surface 771f and the sliding surface 771f ( 77d) is insisted.

The Y packing (sealing member) 77c1, the sealing (sealing member) 77c2, and the wearing ring (sealing member) 77d form a second-stage sealing member. The wear ring (sealing member) 77d is a backup ring.

A Y packing (sealing member) 77e is provided on the inner circumferential surface of the through hole 774m provided at a position in the cylindrical portion 774c of the casing 774 close to the vacuum side cover portion 774a.

The Y packing (sealing member) 77e slides with the sliding surface 772m of the outer periphery, which is a position close to the one end surface 771a of the cylinder portion 772. The Y packing (sealing member) 77e becomes a sealing member of the third stage.

An O-ring (sealing member) 77f is provided on the inner peripheral surface of the through hole 775 in the vacuum side cover portion 774a of the casing 774.

The O-ring (sealing member) 77f slides with the outer peripheral surface (sliding surface) 72m of the elastic rod 72. The Y packing (sealing member) 77e becomes a sealing member of the fourth stage.

Further, in addition to the sealing members 77a1 to 77e, an O-ring (sealing member) 77p is disposed at the joint position between the convex portion 774h of the casing 774 and the outer guide rod 771g.

An O-ring (sealing member) 77q is disposed between the cylindrical portion 774c of the casing 774 and the concave portion 774g provided in the lid portion 774b.

An O-ring (sealing member) 77r is disposed around the through hole 775 in the vacuum-side cover portion 774a for sealing between the vacuum-side chamber (Ch) and the vacuum-side cover portion 774a. .

In the vacuum actuator 70 according to the present embodiment, the following materials are exemplified as materials constituting the sealing members 77a1 to 77r.

The wear ring (sealing member) 77a2 is made of a fluorinated resin. The wear ring (sealing member) 77b is made of HNBR (hydrogenated nitrile rubber). The Y packing (sealing member) 77c1 is made of HNBR (hydrogenated nitrile rubber). The seal ring (sealing member) 77c2 is made of a fluorinated resin. The wear ring (sealing member) 77d is made of a fluorinated resin. The Y packing (sealing member) 77e is made of HNBR (hydrogenated nitrile rubber). The O-ring (sealing member) 77f is made of HNBR (hydrogenated nitrile rubber). The O-ring (sealing member) 77p, the O-ring (sealing member) 77q, and the O-ring (sealing member) 77r are all made of HNBR (hydrogenated nitrile rubber).

Further, the telescopic rod 72 is made of stainless steel. The guide rod 771 is made of stainless steel. The cylinder part 772 is made of stainless steel. The cylindrical portion 774c, the lid portion 774b, and the vacuum side lid portion 774a of the casing 774 are all made of aluminum. In addition, the material in these configurations can be appropriately changed according to the use of the vacuum actuator 70.

In addition, the outer circumference of the guide rod 771 made of stainless steel is a sliding surface 771f of the outer circumference, the sliding surface 772f of the inner circumference of the cylinder unit 772, and a position close to the one end surface 771a of the cylinder unit 772 The sliding surface of the 772m and the sliding surface of the outer periphery of the extension rod 72 are all subjected to surface treatment such as chrome plating.

In the vacuum actuator 70 in this embodiment, the normal pull, that is, the telescopic rod 72 is decompressed in a state in which it is not operated. In this state, the flange portion 773 is biased by the biasing member (spring) 73 in the retraction direction of the elastic rod 72.

Subsequently, in the hydraulic driving unit 700, the hydraulic oil supplied from the hydraulic pressure generating unit 701 by the driving of the driving unit 705 flows into the driving space 777 through the hydraulic pipe 702. Then, the driving space 777 is pressed to generate a driving force greater than the biasing force of the bias member (spring) 73, and the cylinder portion 772 moves toward the through hole 775. At this time, the cylinder part 772 moves inside the buffer space 776.

The outer edge portion of the pressing surface 773a of the flange portion 773 abuts against the step 774d, and the movement of the cylinder portion 772 is terminated. For this reason, as shown in FIG. 11, the extension rod 72 extends, and the extension rod 72 advances toward the chamber Ch which becomes the vacuum side. The elongated elastic rod 72 presses the object. In this state, by maintaining the hydraulic pressure supplied from the hydraulic pressure generating unit 701 to the drive space 777, the expansion and contraction rod 72 can be maintained in an extended state.

In order for the expansion and contraction rod 72 to be in a degenerate state from an extended state, the hydraulic pressure supplied from the hydraulic pressure generator 701 to the driving space 777 is reduced. Alternatively, hydraulic oil is returned from the driving space 777 to the hydraulic pressure generator 701 through the hydraulic pipe 702. Then, the cylinder portion 772 moves toward the lid portion 774b by the biasing force acting as the flange portion 773 in the bias member (spring) 73. For this reason, as shown in Figs. 9 and 10, the elastic rod 72 is in a decomposed state.

Moreover, in the vacuum actuator (pressing cylinder) 70 of the present embodiment, when oil leaks from the drive space 777 to the hydraulic space 714 through the hydraulic pipe 702, the leakage of oil can be detected. I can. Specifically, when the flow rate received in the drive space 777 decreases, the volume of the hydraulic space 714 decreases due to the biasing force of the hydraulic bias member 720. For this reason, the range of the reciprocating motion of the drive shaft 731 in the axial direction moves in a direction approaching the piston 712 from the assumed position.

Accordingly, a detection signal is output from the detection switch (detection means) 761 at a faster stage in the axial movement of the drive shaft 731 compared to the assumed position. For this reason, it can be detected that the flow rate received in the drive space 777 has decreased.

In this embodiment, the same effect as the above-described embodiment can be achieved.

Hereinafter, a fifth embodiment according to the hydraulic drive system of the present invention will be described based on the drawings.

Fig. 12 is a schematic explanatory view showing a vacuum device including a hydraulic drive system in the present embodiment.

What is different from the above-described first to fourth embodiments in this embodiment relates to a vacuum device provided with a hydraulic drive system, and other corresponding components are denoted by the same reference numerals and description thereof is omitted.

The vacuum apparatus 200 in this embodiment is an apparatus that performs vacuum processing such as side sputtering sputtering.

The vacuum apparatus (sputtering apparatus) 200 in this embodiment includes a loading/unloading chamber for carrying in/out of a substantially rectangular glass substrate (substrate to be processed) G, and an example on the glass substrate G. For example, a film forming chamber (chamber) 201 having an internal pressure in which a film such as a ZnO-based or In2O3-based transparent conductive film is formed by sputtering, and a transport chamber between the film forming chamber 201 and the load/unload chamber are provided. .

In addition, only the film formation chamber 201 is shown in FIG. 12.

The chamber Ch in the first embodiment or the second embodiment becomes the film formation chamber 201 in this embodiment.

In the vacuum apparatus (sputter apparatus) 200 according to the present embodiment, as shown in FIG. 12, inside the film formation chamber (chamber) 201, a backing plate (cathode electrode) 206, a power supply 206a, and , A gas introduction device 207a (gas introduction means) and a high vacuum exhaust device 207b (high vacuum exhaust means) are provided.

The backing plate (cathode electrode) 206 is a means for supplying a film-forming material, and holds an installed target. The power source 206a applies a sputter voltage of negative potential to the backing plate 206. The gas introduction device 207a introduces gas into the film forming chamber (chamber) 201. The high vacuum exhaust device 207b is a turbo molecular pump or the like that sucks the inside of the film formation chamber 201 with high vacuum.

The backing plate 206 is installed inside the film forming chamber 201 at a position farthest from the conveying port 204a communicating with the conveying chamber. A target is fixed to the backing plate 206 on the front side that faces substantially parallel to the glass substrate G.

The backing plate (cathode electrode) 206 serves as an electrode for applying a sputtering voltage of negative potential to the target.

The backing plate 206 is connected to a power supply 206a for applying a sputtering voltage of negative potential. On the back surface of the backing plate (cathode electrode) 206, a magnetron magnetic circuit for forming a predetermined magnetic field on the target is provided.

As shown in Fig. 12, the inside of the film formation chamber 201 is a front space 201a serving as the front side of the glass substrate G during film formation, and the back side serving as the back side of the glass substrate G. ) It consists of a space (201b). A backing plate (cathode electrode) 206 to which a target is fixed is disposed in the front space 201a of the film formation chamber 201. In the rear space 201b of the film formation chamber 201, a film formation opening 204b that opens toward the front space 201a is provided. A barrier plate frame 202 is installed around the film forming opening 204b.

A substrate holding device (holding means) for holding the glass substrate G so as to be able to swing in the transverse direction so as to face the target during film formation may be provided inside the back space 201b. The substrate holding device (holding means) has a holding portion 203 that holds the glass substrate G from the rear surface.

The holding unit 203 is able to rotate between a horizontal mounting position, which is a substantially horizontal position, and a linear vertical processing position, at a position in the approximately vertical direction by rotation of the swing shaft in the axial direction by the rotation driving unit. .

A conveyance port 204a is located at an extended position on the surface of the holding portion 203 which has become a horizontal placement position, and the glass substrate G conveyed from the conveyance chamber can be placed. The surface of the holding portion 203 at the vertical processing position is positioned so as to close the film forming opening 204b, and the surface of the glass substrate G faces the cathode electrode 206 so that a film can be formed.

The holding unit 203 is a lift that protrudes upward from the holding unit 203 in a horizontal mounting position and supports the glass substrate G above the holding unit 203 when the glass substrate G is brought in or taken out. A pin and a lift pin moving portion 70 for vertically moving the lift pin are disposed.

In this embodiment, for example, the lift pin moving unit 70 becomes the vacuum actuator (lift pin moving unit) 70 in the first embodiment or the second embodiment.

Further, the lift pin is mounted on the front end of the telescopic rod 72 on the coaxial side of the telescopic rod 72.

In addition, in Fig. 12, the vacuum actuator (lift pin moving part) 70 is indicated by an arrow.

The vacuum actuator (lift pin moving part) 70 can be driven while keeping the chamber 201 sealed. With this configuration, when carrying in or carrying out the glass substrate G, it is possible to transfer the glass substrate G between the holding unit 203 and the robot hand of the transfer device.

At the vertical processing position of the holding portion 203, it has a pressing portion 70 that presses the glass substrate G against the mask 205.

In this embodiment, for example, the pressing unit 70 becomes the vacuum actuator (pressing unit) 70 in the first embodiment or the second embodiment.

The mask 205 is replaced after a predetermined number of film formation treatments, but at this time, an alignment device 70 (alignment means) for aligning the replaced mask 205 with respect to the barrier plate frame 202 is provided with the film formation opening 204b. It is installed in the lower position of ).

In this embodiment, for example, the alignment device 70 becomes the vacuum actuator (alignment means) 70 in the first embodiment. With this configuration, the vacuum actuator (alignment means) 70 can move or align the tip portion 72a of the extension rod 72 in contact with a predetermined object and press it.

Any of the vacuum actuators 70 of this embodiment can exhibit a large bias force (pressurization pressure) in a vacuum atmosphere with a smaller volume compared to other driving types. Moreover, the vacuum actuator 70 of the present embodiment is capable of varying not only the pressing pressure which has become a fixed value, but also the pressing pressure.

In this embodiment as well, each vacuum actuator 70 can press the object in a state where the possibility of oil leakage in the chamber 201 is extremely low.

In this embodiment, the same effect as the above-described embodiment can be achieved.

Hereinafter, a gate valve equipped with a vacuum actuator according to a sixth embodiment of the present invention will be described based on the drawings.

What is different from the third and fourth embodiments of the present embodiment is the point of the pendulum valve body of the gate valve, and other corresponding components are denoted by the same reference numerals, and the description thereof is omitted.

13 is a cross-sectional view orthogonal to a flow path showing the configuration of a gate valve in the present embodiment.

14 to 16 are cross-sectional views along a flow path showing the configuration of a gate valve in the present embodiment, and are diagrams illustrating a case where the valve body is disposed at the retractable position FREE. 14 corresponds to the line segment A-O-C in FIG. 13. 15 is an enlarged view showing a main part along line segments A-O in FIG. 13. 16 is an enlarged view showing a main part along the line segments B-O-C in FIG. 13. 17 is an enlarged view showing a main part of the valve case bias unit in FIG. 13.

18 to 21 are cross-sectional views along a flow path showing the configuration of the gate valve in the present embodiment, corresponding to FIGS. 14 to 17, showing a case where the valve body is disposed in the valve closed position (no positive pressure or no differential pressure) Is also.

22 to 24 are cross-sectional views along a flow path showing the configuration of the gate valve in the present embodiment, corresponding to FIGS. 14 to 16, and showing a case where the valve body is disposed in a back pressure position.

25 and 26 are perspective views showing the arrangement of the valve box bias unit in the valve box in FIG. 14.

[Pendulum type gate valve]

The gate valve 100 according to the present embodiment is a pendulum-shaped slide valve as shown in FIGS. 13 to 26.

The gate valve 100 is inserted between a first space in which the first opening 12a is exposed and a second space in which the second opening 12b is exposed. The gate valve 100 gates the flow path H connecting the first opening 12a and the second opening 12b, that is, blocks the flow path H connecting the first space and the second space. (士切)(closed), this closed state is opened (connects the first and second spaces). Accordingly, the gate valve 100 switches between a closed state and an open state in which the closed state is opened.

The gate valve 100 includes a valve box 10, a neutral valve body 5, and a rotating shaft 20. A hollow portion 11 is formed inside the valve box 10. The valve box 10 is constituted by a frame having a hollow portion 11. The valve box 10 is provided with a first opening 12a and a second opening 12b so as to face each other with a hollow portion 11 therebetween.

The first opening 12a is exposed in the first space. The second opening 12b is exposed in the second space. The first opening 12a to the second opening 12b are communicated through the hollow portion 11. A flow path H is set from the first opening 12a toward the second opening 12b. The gate valve 100 is inserted between the first space and the second space. In addition, the direction along the flow path H is referred to as the flow path H direction.

A neutral valve body 5 is disposed in the hollow part 11 of the valve box 10. The neutral valve part 30 is connected to the rotation shaft 20 as a position switching part. The rotation shaft 20 has an axis line extending substantially parallel to the direction of the flow path H. The rotation shaft 20 passes through the valve box 10. The rotation shaft 20 is rotatable by a driving device not shown. The neutral valve body 5 is fixed to one end of the rotation shaft 20 through a connection member (not shown). The rotation shaft 20 functions as a position switching part of the neutral valve body 5.

Alternatively, the neutral valve body 5 may be directly connected to the rotation shaft 20 without passing through a connection member (not shown).

The neutral valve body 5 is capable of blocking the first opening 12a and/or the second opening 12b.

In this embodiment, the first opening 12a can be closed. The neutral valve body 5 operates between the valve closed position and the valve open position. In the valve closed position, the neutral valve body 5 is in a closed state (Fig. 18) with respect to the first opening 12a. In the valve open position, the neutral valve body 5 enters an open state (Fig. 14) retracted from the first opening 12a.

The neutral valve body 5 is composed of a neutral valve part 30 and a movable valve part 40.

The neutral valve unit 30 is disposed so as to be included in a parallel surface in a direction orthogonal to the axis of the rotation shaft 20. As shown in FIG. 13, the neutral valve part 30 has a circular part 30a and a rotation part 30b. The circular portion 30a is disposed so as to overlap the movable valve portion 40 when viewed from the flow path H direction. The rotating part (arm part) 30b is formed in an arm shape in which two arms are extended toward the circular part 30a from the rotating shaft 20. The rotating part 30b rotates the circular part 30a according to the rotation of the rotating shaft 20. These rotation shafts 20 and the neutral valve unit 30 rotate with respect to the valve box 10, but do not change their position in the flow path H direction.

The movable valve portion 40 has a substantially disk shape. The movable valve portion 40 is connected to the neutral valve portion 30 so as to be slidable only in the thickness direction (the flow path H direction). The movable valve portion 40 includes two movable valve cases 60 (slide valve plate) and a movable valve plate portion 50 (counter plate).

The movable valve case 60 is substantially concentric with the circular portion 30a. The movable valve case 60 is fitted to the circular portion 30a.

The movable valve case 60 is slidable in the direction of the flow path H with respect to the neutral valve part 30. A valve case bias unit 90 (auxiliary spring) is disposed between the movable valve case 60 and the neutral valve unit 30. The movable valve case 60 is connected to the neutral valve part 30 by a valve case bias part 90 (auxiliary spring) so that the position in the flow path H direction can be changed.

The movable valve plate portion 50 becomes a plate body having a circular contour substantially concentric with the circular portion 30a. The movable valve plate part 50 is fitted to the movable valve case 60.

The movable valve case 60 is disposed so as to surround the movable valve plate portion 50. The movable valve plate portion 50 and the movable valve case 60 are connected by a valve plate bias portion 80 (holding spring).

The movable valve plate portion 50 and the movable valve case 60 can slide relative to each other in the reciprocating directions indicated by reference numerals B1 and B2 in FIG. 14. The reciprocating directions B1 and B2 are directions perpendicular to the surfaces of the movable valve plate portion 50 and the movable valve case 60. The reciprocating directions B1 and B2 are the flow path H directions parallel to the axial direction of the rotation shaft 20.

The movable valve plate portion 50 is provided with a counter cushion 51 at a position facing (abutting) the inner surface 10B of the valve box.

The counter cushion 51 becomes a seal portion made of an O-ring or the like, which is a concentric elastic body. The counter cushion 51 can be in close contact with the inner surface 10B of the valve box serving as the periphery of the second opening 12b at the time of the closing valve. The counter cushion 51 is pressed by the movable valve plate portion 50 and the inner surface 10B of the valve box. For this reason, the state is divided into a first space and a second space. The counter cushion 51 is elastically deformed when the movable valve plate portion 50 and the inner surface 10B of the valve box collide to relieve the impact.

The movable valve plate portion 50 is provided with an exhaust hole 53. When the movable valve plate part 50 and the inner surface 10B of the valve box collide, a closed space is formed by the movable valve plate part 50, the inner surface 10B of the valve box, and the counter cushion 51. The exhaust hole 53 removes gas from this closed space.

In all areas near the outer periphery of the movable valve plate portion 50, an inner periphery crank portion 50c is formed.

The inner circumferential crank portion 50c has a sliding surface 50b parallel to the flow path H direction. An outer circumferential crank portion 60c is formed in all regions near the inner circumference of the movable valve case 60. The outer circumferential crank part 60c has a sliding surface 60b parallel to the flow path H direction.

The outer circumferential crank part 60c and the inner circumferential crank part 50c are fitted. The sliding surface 50b and the sliding surface 60b are positioned in opposing states so that they can slide with each other.

A sliding seal packing 52 made of an O-ring or the like is disposed between the outer crank portion 60c and the inner crank portion 50c. The sealing state between the sliding surface 50b and the sliding surface 60b is maintained during sliding by the sliding seal packing 52.

In the movable valve case 60, a valve case seal packing 61 is provided on a surface facing (abutting) the inner surface of the valve box 10. The valve case seal packing 61 becomes a seal portion made of an annular O-ring or the like. The valve case seal packing 61 contacts the inner surface 10A of the valve box which is the periphery of the first opening 12a when the valve is closed, and is pressed by the movable valve case 60 and the inner surface 10A of the valve box. Accordingly, the first space and the second space are in a closed state.

The valve case seal packing 61 and the sliding seal packing 52 are disposed on substantially the same cylindrical surface. The valve case seal packing 61 and the sliding seal packing 52 are arranged so as to overlap with the line R shown in FIGS. 15 to 16. For this reason, a back pressure cancellation rate of about 100% is obtained.

The valve case bias unit 90 includes a circular portion 30a of the neutral valve portion 30 and a position regulating portion 65 of the movable valve case 60 overlapping with the circular portion 30a when viewed from the flow path H direction. Are placed in between. The valve case bias unit 90 biases the movable valve case 60 toward the central position in the flow path H direction with respect to the neutral valve unit 30. A plurality of valve case biasing portions 90 are disposed at equal intervals in the circumferential direction of the circular portion 30a. The valve case bias unit 90 is an elastic member and is a leaf spring. The valve case bias portion 90 (leaf spring) is disposed in a longitudinal direction along the circumferential direction of the circular portion 30a.

As shown in FIG. 17, the both ends of the valve case bias part 90 (plate spring) are caught by the circular part 30a of the neutral valve part 30 by the fixing pin 92 and the fixing pin 93. Both end portions of the valve case bias portion 90 (plate spring) are caught by the circular portion 30a with the ring-shaped member 92a and the ring-shaped member 92b interposed therebetween in the thickness direction, respectively. The central part of the valve case biasing part 90 (leaf spring) is caught by the position regulating part 65 of the movable valve case 60 by a pull pin 91.

In the open valve state of the gate valve 100 (FIG. 14), the separation distance between the neutral valve part 30 (arm) and the movable valve case 60 in the flow path H direction becomes narrow. The dimension of the valve case bias unit 90 in the height direction (thickness direction) is reduced. For this reason, in the valve case bias part 90, the curved part 90A folded in the thickness direction is formed (FIG. 17).

On the other hand, when the gate valve 100 is in a closed valve state (FIG. 18), the separation distance between the neutral valve part 30 (arm) and the movable valve case 60 in the flow path H direction increases. For this reason, the dimension in the height direction (thickness direction) of the valve case bias part 90 extends. That is, in the valve case bias portion 90, the curved portion 90A is eliminated (Fig. 21).

The valve case bias unit 90 performs a mechanical separation operation for separating the movable valve case 60 from the inner surface of the valve box 10 when changing from the closed valve state (Fig. 18) to the open valve state (Fig. 14). It has a structure to urge. In addition, the valve case bias unit 90 also has a function of maintaining the position of the movable valve case 60 in the radial direction and the circumferential direction with respect to the neutral valve unit 30 (arm).

The valve case bias unit 90 has a function of connecting the movable valve case 60 to the neutral valve unit 30 so that the position in the flow path direction can be changed, and the movable valve case 60 is connected in the flow path (H) direction. It has a function of biasing toward the center position of.

In the valve box 10, a plurality of valve box bias units 70 are built. The valve box bias unit 70 becomes the vacuum actuator 70 in the first to fourth embodiments described above. The vacuum actuator (valve box bias unit) 70 biases the movable valve case 60 in a direction close to the first opening 12a in the flow path H direction.

The vacuum actuator (valve box bias unit) 70 constitutes a lifting mechanism for pressing the movable valve case 60 in a direction toward the seal surface. The plurality of vacuum actuators (valve box biasing unit) 70 is disposed at a position capable of biasing without changing the posture of the movable valve case 60. A plurality of vacuum actuators (valve box bias portions) 70 are provided along the periphery of the second opening 12b at equal intervals.

25 and 26 show the arrangement of the valve box biasing parts 70 separated from each other. When viewed from the center O of the valve body, the four valve box biasing parts 70 are separated at the same angular position (90 degrees). An example of a configuration arranged so that When viewed from the center O, the angular position of the vacuum actuator (valve box bias unit) 70 is configured not to overlap with the angular position of the valve plate bias unit 80 and the valve case bias unit 90.

The vacuum actuator (valve box bias part) 70 has a hydraulic drive part (fixed part) 71 and an extension rod (moving part) 72. The hydraulic drive part (fixing part) 71 is embedded in the inside of the frame which becomes outer than the inner surface 10B of the valve box with respect to the hollow part 11, and is arrange|positioned. The telescopic rod (moving part) 72 is disposed to be extendable in a direction proximate from the fixing part 71 to the first opening 12a along the flow path H direction.

The vacuum actuator (valve box bias unit) 70 is connected to a hydraulic driving unit (incompressible fluid driving unit) 700 and driven by hydraulic pressure. The hydraulic drive unit (incompressible fluid drive unit) 700 becomes the hydraulic drive unit (incompressible fluid drive unit) 700 in the first to fourth embodiments described above.

When the open valve state (Fig. 14) is changed to the closed valve state (Fig. 18), the vacuum actuator (valve box bias unit) 70 extends the expansion and contraction rod (moving unit) 72 by hydraulic pressure. At this time, the vacuum actuator (valve box bias portion) 70 biases the movable valve case 60 to which the tip portion 72a abuts. For this reason, the movable valve case 60 moves toward the first opening 12a in the flow path H direction. The valve case seal packing 61 is in close contact with the inner surface 10A of the valve box around the first opening 12a. In the plurality of vacuum actuators (valve box bias unit) 70, all of the stretching operations of the expansion and contraction rod (moving unit) 72 can be operated almost simultaneously.

The valve plate bias unit 80 (holding spring) is incorporated in the movable valve unit 40. The valve plate biasing unit 80 biases the movable valve case 60 and the movable valve plate 50 to each other in a direction in which the thickness dimension in the flow path H direction decreases. The valve plate bias unit 80 interlocks the movable valve plate unit 50 in the reciprocating directions B1 and B2 in which the movable valve case 60 moves.

A plurality of valve plate bias units 80 are disposed in a region where the movable valve case 60 and the movable valve plate unit 50 overlap when viewed from the flow path H direction. The plurality of valve plate bias units 80 are arranged at equal intervals in the circumferential direction of the movable valve case 60. It is preferable that three or more places where the valve plate bias unit 80 is installed, are separated from each other.

The valve plate bias unit 80 induces (regulates) the movement of the movable valve plate unit 50 by a long shaft portion of the bolt-shaped guide pin 81. The guide pin 81 is fixed to the movable valve case 60. The holding spring constituting the valve plate bias unit 80 is formed of an elastic member such as a spring or rubber.

The guide pin 81 is composed of a rod-shaped body having a uniform thickness. The guide pin 81 passes through the valve plate bias unit 80. The guide pin 81 is installed in the direction of the flow path H and is fixedly installed in the movable valve case 60. The guide pin 81 fits into a hole portion 50h formed in the movable valve plate portion 50. The guide pin 81 guides the position regulation of the movable valve plate part 50 and the movable valve case 60.

When the movable valve plate portion 50 and the movable valve case 60 slide with each other by the valve plate bias portion 80, the sliding direction (axis indicated by the symbol Q) is maintained in the reciprocating directions B1 and B2. Further, even when the movable valve plate part 50 and the movable valve case 60 slide, the postures of the movable valve plate part 50 and the movable valve case 60 do not change, and parallel movement can be performed.

Hereinafter, the operation of the gate valve 100 according to the present embodiment will be described in detail.

First, in the gate valve 100 according to the present embodiment, a state in which the movable valve portion 40 is in the retracted position to become the hollow portion 11 in which the flow path H is not provided is considered. At this time, the movable valve portion 40 does not contact the valve box inner surface 10A and the valve box inner surface 10B. In this state, the rotation shaft 20 is rotated in the direction indicated by the symbol R1 (a direction crossing the direction of the flow path H). Then, the neutral valve unit 30 and the movable valve unit 40 rotate in a pendulum motion along the direction R1. By this rotation, the movable valve portion 40 moves from the retracted position to the valve opening shielding position (sliding preparation position) to be a position facing the first opening 12a.

In the valve opening shielding position (sliding preparation position), the vacuum actuator (valve box bias unit) 70 is in a direction that approaches the first opening 12a in the flow path H direction, the telescopic rod (movable unit) 72 ) To expand. The telescopic rod (movable part) 72 abuts against the movable valve case 60 and presses it. The movable valve case 60 moves in a direction close to the first opening 12a.

The movable valve case 60 abuts against the inner surface 10A of the valve box by the vacuum actuator (valve box bias unit) 70. At this time, the valve case seal packing 61 is in close contact with the inner surface 10A of the valve box located around the first opening 12a. For this reason, the flow path H is closed (closed valve operation).

Conversely, the vacuum actuator (valve box bias unit) 70 degenerates the telescopic rod (moving unit) 72. The biasing force from the telescopic rod (moving part) 72 to the movable valve case 60 is reduced. Then, the movable valve case 60 is separated from the inner surface of the valve box 10 by the biasing force of the valve case bias unit 90. The closed state of the movable valve case 60 and the inner surface 10A of the valve box is released. For this reason, the flow path H is opened (release operation).

The closing valve operation and release operation in the movable valve unit 40 are performed by a mechanical contact operation by the valve box bias unit 70 and a mechanical separation operation by the valve case bias unit 90.

After the releasing operation, the rotation shaft 20 is rotated in the direction indicated by the symbol R2. Then, the movable valve part 40 moves from the valve opening blocking position (sliding preparation position) to the retracting position (retracting operation).

A valve opening operation is performed to bring the movable valve portion 40 into a valve open state by this release operation and the retract operation.

In a series of operations (closing valve operation, releasing operation, and retracting operation), the valve plate bias unit 80 interlocks the movable valve case 60 and the movable valve plate unit 50.

[Valve body is in the retractable position (FREE)]

14 to 16, the movable valve part 40 (movable valve case 60, movable valve plate part 50) in the valve opening blocking position (sliding preparation position) is one of the valve boxes 10 It shows a state that is not in contact with the inner surfaces 10A, 10B either. This state is referred to as a state in which the valve body is FREE. When the valve body is FREE, the expansion and contraction rod (moving part) 72 of the vacuum actuator (valve box bias part) 70 does not protrude from the inner surface 10B of the valve box, but retracts to the inside of the valve box 10 Is in. That is, the vacuum actuator (valve box bias unit) 70 does not contact the neutral valve body 5.

Next, the vacuum actuator (valve box bias unit) 70 is driven in a state in which the valve body is FREE. Then, the distal end portion 72a of the expansion and contraction rod (movable portion) 72 abuts against the lower surface 60sb of the movable valve case 60 as indicated by arrow F1 in FIG. 15. For this reason, as shown by arrow F2 in FIG. 15, the movable valve case 60 moves toward the inner surface 10A of the valve box.

Further, a state in which the movable valve case 60 moves and the valve case seal packing 61 is in contact with the inner surface 10A of the valve box is a closed valve position state (closed valve state). At this time, the movable valve plate portion 50 moves in the same direction as the movable valve case 60 by the valve plate bias portion (holding spring) 80. At the same time, the movable valve plate portion 50 and the movable valve case 60 maintain a sliding seal state through the sliding seal packing 52.

In a state in which the valve body is FREE, the vacuum actuator (valve box bias unit) 70 contacts the movable valve case 60 to the inner surface 10A of the valve box 10 to close the flow path H (closed Valve operation).

[Valve body is in the valve closed position (no static pressure or differential pressure)]

18 to 20 show a state in which the flow path H is closed by the above closing valve operation.

This state is referred to as a valve closed state of no positive pressure/differential pressure. The valve closed state without positive pressure/differential pressure is a state in which the neutral valve body 5 is in contact with one inner surface of the valve box 10 and not in contact with the other inner surface. In other words, in the closed state of the positive pressure/no differential pressure, the neutral valve element 5 contacts the inner surface 10A of the valve box around the first opening 12a. At the same time, the neutral valve body 5 does not come into contact with the inner surface 10B of the valve box located around the second opening 12b.

In the closed state of the valve without positive or differential pressure, the vacuum actuator (valve box bias unit) 70 maintains a state in which the expansion and contraction rod (movable unit) 72 extends in the direction toward the movable valve case 60. That is, the state in which the tip portion 72a is in contact with the lower surface 60sb of the movable valve case 60 is maintained. Further, the valve case seal packing 61 is kept in contact with the valve box inner surface 10A around the first opening 12a of the valve box 10.

[Valve closed state in back pressure position]

22 to 24 show a state in which the flow path H is closed in a reverse pressure state.

This state is referred to as a back pressure valve closing state. The reverse pressure valve closed state is a state in which the neutral valve body 5 is in contact with the inner surfaces 10A and 10B of both valve boxes in the flow path H direction. That is, in the valve closed state of the reverse pressure, the neutral valve body 5 maintains a state in contact with the inner surface 10A of the valve box around the first opening 12a, while the valve box positioned around the second opening 12b It is also in contact with the inner surface 10B. Here, the back pressure is the pressure applied to the valve body in the direction from the closed valve state to the open valve state.

When the neutral valve body 5 is subjected to back pressure, the movable valve plate 50 slides with respect to the movable valve case 60 in the reciprocating direction B2 (Fig. 22) by the valve plate bias unit 80. . A sealed state is maintained between the movable valve case 60 and the movable valve plate part 50 through a sliding seal packing 52.

For this reason, the movable valve plate part 50 collides with the inner surface 10B of the valve box around the 2nd opening part 12b. At this time, the counter cushion 51 alleviates the impact caused by the collision on the movable valve plate portion 50. A mechanism for receiving the force received by the neutral valve body 5 from the valve box inner surface 10B (rear body) of the valve box 10 is a reverse pressure canceling mechanism.

Further, with no positive pressure/differential pressure, the movable valve case 60 is separated from the inner surface of the valve box 10 by the valve case bias unit 90 in this state, and the movable valve case 60 is retracted, so that the flow path H ) Open (release action).

As described above, the gate valve 100 of the present embodiment has a spring back function, and a normal closing operation is possible. The number of parts of the valve body can be reduced. A back pressure cancellation rate of about 100% is obtained. The driving force of the valve body can be suppressed. A certain blocking operation becomes possible. Operational safety can also be improved. High reliability gate operation is possible.

In addition, in each of the above-described embodiments, it is also possible to combine each configuration.

Hereinafter, an embodiment according to the present invention will be described.

Here, a performance review will be described as a specific example of the hydraulic drive system in the present invention.

<Example of combination>

First, the type of the motor 705m, the configuration of the reversing response unit required therefor, the power required at this time, and the life of the combined configuration were examined.

Here, as the motor 705m, a motor having a DC brush, a DC coreless brushless motor, and a stepping motor were examined. In addition, it was examined whether cogging torque measures in such a motor are necessary.

As a configuration of the reversing countermeasure, a solenoid valve, an excitation clutch 705d, and an excitation brake 705b for preventing drive system reversal during hydraulic reverse flow were examined. Further, it was examined whether the regenerative current processing unit 705c is necessary.

Furthermore, the electric power required for driving and the life of the combined configuration were examined.

In addition, power was compared with the size of a motor having a DC brush as 1. In the same manner, the lifespan was compared with the length (number of drives) that becomes maintenance-free in a motor having a DC brush as 1.

These examination results are shown in Table 1.

From the results shown in Table 1, when the DC coreless brushless motor in the present invention is adopted and the excitation brake 705b and the regenerative current processing unit 705c are installed, the power becomes about 1.3, but the lifespan is up to 5 times. It can be seen that it is extended.

From the results shown in Table 1, when the motor having a DC brush according to the present invention is employed and the excitation brake 705b and the excitation clutch 705d are installed, the lifespan is about 1 times, but the power is 1 times. Able to know.

[Industrial availability]

As an application example of the present invention, it can be adapted to a mechanism that performs hydraulic drive in a vacuum device or the like. In particular, it can be widely applied to a gate valve for switching between two spaces having different properties, such as a degree of vacuum or a temperature, or a gas atmosphere, blocking a flow path connected to each other and a state in which the closed state is opened.

70: vacuum actuator (pressing cylinder, valve box biasing part, lift pin moving part, alignment means, pressing part, valve box biasing part)
71: hydraulic drive unit (fixed part)
72: movable part (expansion rod)
73: bias member (pressing spring, spring)
700: hydraulic drive unit (incompressible fluid drive unit)
701: hydraulic generator
702: hydraulic pipe
705: drive unit
705a: rotary drive shaft
705b: excitation brake
705c: regenerative current processing unit
705d: women's clutch
705m: motor
706: control unit (controller)
707: power
720: hydraulic bias member
5: valve body, neutral valve body
10: valve box
11: hollow part
20: rotating shaft
30: neutral valve part
40: movable valve part
50: movable valve plate portion
54: movable valve part (movable valve plate part)
60: movable valve case
63: valve case
80: valve plate bias part (holding spring)
90: valve case bias unit
100: gate valve
200: vacuum device (sputter device)
201: tabernacle room (chamber)
H: Euro

Claims (6)

It is a hydraulic drive system having a vacuum actuator that expands and contracts so that an object can be pressed in a chamber that becomes a vacuum atmosphere.
The vacuum actuator driven by an operating hydraulic pressure supplied from the outside,
It has a hydraulic drive for supplying an operating hydraulic pressure to the vacuum actuator,
The hydraulic drive unit includes a hydraulic pressure generating unit for generating an operating hydraulic pressure, a driving unit for driving the hydraulic pressure generating unit, and power supplying to the driving unit, and at the same time, a motor and a hydraulic bias member are installed in the driving unit, and the hydraulic pressure It is possible to drive the hydraulic pressure generator so as to generate operating hydraulic pressures in opposite directions to each other in the generator,
The vacuum actuator has an elastic rod that can expand and contract toward the object, and a fixing part that expands and contracts the elastic rod, and the expansion and contraction rod can be driven by operating hydraulic pressure supplied from the hydraulic driving part to the fixing part,
A reversing counter corresponding to a reversing state of the motor is provided in the driving unit when the telescopic rod is moved in a direction away from the object by a bias force of the hydraulic biasing member,
Hydraulic drive system.
The method of claim 1,
An excitation brake having a brake function for stopping the rotational drive shaft of the motor in a state in which power is supplied from the power source is installed in the reversing counterpart,
Hydraulic drive system.
The method of claim 2,
An excitation clutch having a clutch function for disconnecting the rotational drive shaft of the motor from the hydraulic pressure generator in a state where there is no power supply from the power source is installed in the reversing counterpart,
Hydraulic drive system.
The method of claim 2,
A regenerative current processing unit is installed in the reversing response unit,
The motor becomes a DC coreless brushless motor,
Hydraulic drive system.
The method of claim 3,
The motor is a motor having a DC brush,
Hydraulic drive system.
As a gate valve capable of normally closed operation,
With the hollow part,
A valve box having a first opening and a second opening that are installed to face each other with the hollow portion therebetween and serve as flow paths to communicate with each other,
A valve body capable of opening and blocking the flow path,
A rotation shaft having an axis extending in a flow path direction while supporting the valve body so as to be rotatable between a retracted position and a valve opening shielding position in the hollow portion,
A rotation driving unit capable of rotationally driving the valve body,
A movable valve part installed on the valve body so that the position in the flow path direction can be changed,
A valve box bias unit installed in the valve box and moving in a direction of the flow path to close the movable valve unit at the valve opening shielding position;
And a hydraulic driving unit for driving the valve box bias unit by supplying and discharging hydraulic oil,
The valve box bias portion becomes the vacuum actuator in the hydraulic drive system according to any one of claims 1 to 5,
The hydraulic drive unit becomes the hydraulic drive unit in the hydraulic drive system according to any one of claims 1 to 5,
The valve body becomes the object in the hydraulic drive system according to any one of claims 1 to 5,
Gate valve.

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