JP2020183764A - Hydraulic drive system and partition valve - Google Patents

Abstract

To cope with reverse rotation of a motor due to spring back.SOLUTION: In a hydraulic drive system having a telescopic vacuum actuator 70 for pressing an object in a chamber at a vacuum atmosphere state, the vacuum actuator includes an expansion rod 72 and a fixing portion 71, and a hydraulic driving section 700 includes a hydraulic pressure generating section 701, a driving section 705 having a hydraulic energizing member 720 and a motor 705m, and a power source 707. Reverse rotation coping sections 705b-705d which cope with the reverse rotation state of the motor when the expansion rod is moved in a direction coming close to the object 5 by energizing force of the hydraulic energizing member are provided in the driving section.SELECTED DRAWING: Figure 1

Description

The present invention relates to a hydraulic drive system and a sluice valve, and more particularly to a hydraulic drive system having a vacuum actuator capable of hydraulically driving in a vacuum and springback, and a technique suitable for use in a pendulum type sluice valve using the same. ..

In a vacuum device or the like, a telescopic actuator for pressing an object in a chamber having a vacuum atmosphere is provided. From the viewpoint of preventing contamination in the chamber, most of such telescopic actuators are known to have a drive unit arranged outside the chamber, which has a vacuum atmosphere, to drive the telescopic unit in the chamber.
For example, the telescopic actuator includes an electromagnetic drive type, a compressed air drive type, a hydraulic drive type, and the like.

On the other hand, the present inventors have filed an application for a pendulum type partition valve having a hydraulically driven telescopic actuator as an urging portion for pressing the valve body against the valve box opening when the valve is sealed (Patent Document 1).

Here, in the supply of hydraulic pressure in the telescopic actuator, an urging member such as a spring in the hydraulic pressure generating portion and a motor supplied from a power source are responsible for either expansion or degeneracy of the telescopic rod.
A configuration including such a telescopic actuator and its operation are referred to as a springback.

As a partition valve, in addition to high reliability in partitioning operation in a large cross section, it enables normal closing that closes the flow path in an emergency such as loss of power supply or loss of control fluid drive pressure such as compressed air. Has been required.
This normal closing means that the flow path can be closed when the power supply that drives the valve body or the like or the power source such as compressed air is not working when the valve partitioning operation is performed. It means keeping the road closed.

Japanese Patent No. 6358727

In order to achieve normal closing in consideration of safety, it is necessary to achieve both normal drive by hydraulic pressure generated by the motor and emergency operation by springback in the event of a power failure, which is an emergency, in addition to normal power supply. is there.
However, when springback is enabled in the event of a power failure, there are the following problems when an emergency operation is performed by a spring on a motor for generating hydraulic pressure whose power supply has been lost.

First, in the event of a power failure, when the hydraulic pressure flows backward due to the springback, the rotation shaft of the motor is reversed at the same time in the hydraulic pressure generating portion. Then, regenerative power is generated in the motor that reverses in the power supply loss state.
Here, in a partition valve capable of partitioning with a large cross section, the rated current of the motor is extremely large in order to drive the valve body. Therefore, the regenerative power is extremely large, which may damage the electronic components connected to the motor. For this reason, there has been a demand for preventing damage to electronic components and the like due to regenerative power.

Further, in a partition valve capable of partitioning with a large cross section, the weight of the valve body is large, so that a motor having a large torque is required to drive the valve body.
Therefore, when a motor with a DC brush or the like is adopted as the motor for generating hydraulic pressure, a large cogging torque may hinder the reversal of the motor for generating hydraulic pressure due to the spring at the time of a power failure.
Therefore, the reversal of the motor in the springback may be hindered by the cogging torque.

In this case, the closing operation of the valve body in the partition valve may not be successful. Alternatively, a problem such as a failure near the valve body may occur. There has been a demand to prevent the influence of the cogging torque on the normal close and improve the operation certainty of the normal close in the partition valve.

Further, by using a servomotor or the like, it is possible to reduce the influence of the cogging torque on the normal closing, but in this case, there is a problem that it is not preferable because the power consumption of the servomotor becomes large.

The present invention has been made in view of the above circumstances, and an object of the present invention is to achieve the following objects.
1. 1. To improve the reliability of operation in an emergency in a hydraulic drive system that can be driven hydraulically and has a springback mechanism.
2. To reduce the effect of cogging torque.
3. 3. To reduce the effect of springback on the reverse rotation of the motor in an emergency.
4. To prevent problems from occurring in an emergency.
5. To reduce power consumption.
6. To extend the life of parts and reduce the need for maintenance.

The hydraulic drive system of the present invention is a hydraulic drive system having a vacuum actuator that expands and contracts an object so as to be pressed in a chamber having a vacuum atmosphere.
The vacuum actuator driven by the hydraulic pressure supplied from the outside and
A hydraulic drive unit that supplies operating hydraulic pressure to the vacuum actuator,
Have,
The hydraulic drive unit includes a hydraulic pressure generating unit that generates hydraulic pressure, a driving unit that drives the hydraulic pressure generating unit, and a power supply that supplies power to the driving unit, and the driving unit includes a motor and hydraulic pressure. A member is provided so that the hydraulic pressure generating unit can be driven so as to generate operating hydraulic pressures in opposite directions to each other.
The vacuum actuator has a telescopic rod that can be expanded and contracted toward the object, and a fixing portion that expands and contracts the telescopic rod, and the telescopic rod is provided by the hydraulic pressure supplied from the hydraulic drive unit to the fixing portion. Can be driven,
The problem is that the drive unit is provided with a reverse rotation corresponding portion corresponding to the reverse state of the motor when the telescopic rod moves in a direction close to the object due to the urging force of the hydraulic urging member. Was solved.
In the hydraulic drive system of the present invention, the reverse rotation corresponding portion may be provided with an excitation brake having a braking function of stopping the rotation drive shaft of the motor in a state where power is supplied from the power source.
In the hydraulic drive system of the present invention, the reverse rotation corresponding portion may be provided with an exciting clutch having a clutch function for disconnecting the rotary drive shaft of the motor from the hydraulic pressure generating portion in the absence of power supply from the power supply. preferable.
In the hydraulic drive system of the present invention, a regenerative current processing unit is provided in the reverse rotation corresponding unit.
The motor can be a DC coreless brushless motor.
Further, in the hydraulic drive system of the present invention, a means in which the motor is a DC brushed motor can also be adopted.
The sluice valve of the present invention is a sluice valve capable of normally closed operation.
Hollow part and
A valve box having a first opening and a second opening that are provided so as to face each other and serve as a communication flow path with the hollow portion sandwiched between them.
With a valve body that can open and close the flow path,
A rotating shaft that rotatably supports the valve body between the retracted position and the valve opening shielding position in the hollow portion and has an axis extending in the flow path direction.
A rotary drive unit capable of rotationally driving the valve body and
A movable valve portion provided on the valve body so that the position in the flow path direction can be changed,
A valve box urging portion provided in the valve box to move and close the movable valve portion at the valve opening shielding position in the flow path direction, and
A hydraulic drive unit that drives the valve box urging unit by supplying and discharging hydraulic oil, and
Equipped with
The valve box urging portion serves as the vacuum actuator in the hydraulic drive system according to any one of the above.
The hydraulic drive unit is the hydraulic drive unit in the hydraulic drive system according to any one of the above.
The valve body can be the object in the hydraulic drive system according to any of the above.

The hydraulic drive system of the present invention is a hydraulic drive system having a vacuum actuator that expands and contracts an object so as to be pressed in a chamber having a vacuum atmosphere.
The vacuum actuator driven by the hydraulic pressure supplied from the outside and
A hydraulic drive unit that supplies operating hydraulic pressure to the vacuum actuator,
Have,
The hydraulic drive unit includes a hydraulic pressure generating unit that generates hydraulic pressure, a driving unit that drives the hydraulic pressure generating unit, and a power supply that supplies power to the driving unit, and the driving unit includes a motor and hydraulic pressure. A member is provided so that the hydraulic pressure generating unit can be driven so as to generate operating hydraulic pressures in opposite directions to each other.
The vacuum actuator has a telescopic rod that can be expanded and contracted toward the object, and a fixing portion that expands and contracts the telescopic rod, and the telescopic rod is provided by the hydraulic pressure supplied from the hydraulic drive unit to the fixing portion. Can be driven,
The drive unit is provided with a reverse rotation corresponding portion corresponding to a reverse state of the motor when the telescopic rod moves in a direction close to the object by the urging force of the hydraulic urging member.
As a result, in the hydraulic drive system, during normal power supply, the vacuum actuator is driven by the hydraulic pressure supplied by the hydraulic drive unit to degenerate the telescopic rod, thereby releasing the pressure on the object. Further, in the hydraulic drive system, the telescopic rod is extended by the urging force of the hydraulic urging member to press the object. Thereby, it is possible to provide a hydraulic drive system having a springback function.
Further, in the hydraulic drive system, when the power supply from the power supply to the drive unit is lost and the power supply is lost, the hydraulic pressure flows back to the vacuum actuator side due to the urging force of the hydraulic urging member. At this time, in the hydraulic drive system, even if the motor of the drive unit is reversed, the hydraulic drive system is damaged or the vacuum actuator is damaged in response to the reversal of the rotating shaft generated by the reversing corresponding unit. It is possible to prevent problems such as.
Specifically, it is possible to suppress the influence of the regenerative power generated by the motor on other parts, or to prevent the reversal of the rotating shaft from occurring in the motor.

In the hydraulic drive system of the present invention, the reverse rotation corresponding portion is provided with an excitation brake having a braking function of stopping the rotation drive shaft of the motor in a state where power is supplied from the power source.
As a result, it is possible to prevent the rotating shaft of the motor from being inadvertently reversed by the exciting brake during normal power supply. Further, when the power supply from the power supply to the drive unit is exhausted and the power supply is lost, the braking function by the exciting brake can be stopped. As a result, when the hydraulic pressure flows back to the vacuum actuator due to the urging force of the hydraulic pressure urging member, the motor of the drive unit is promptly reversed, and the normally close function can be exhibited without any trouble.

In the hydraulic drive system of the present invention, the reverse rotation corresponding portion is provided with an exciting clutch having a clutch function for disconnecting the rotary drive shaft of the motor from the hydraulic pressure generating portion in the absence of power supply from the power source.
As a result, during normal power supply, the rotational driving force of the motor can be quickly transmitted to the hydraulic pressure generating unit by the exciting clutch to drive the vacuum actuator. Further, when the power supply from the power supply to the drive unit is lost and the power supply is lost, the rotary drive shaft of the motor can be disconnected from the hydraulic pressure generating unit. As a result, when the hydraulic pressure flows back to the vacuum actuator due to the urging force of the hydraulic urging member, the operation of the hydraulic pressure generating part reversed by the urging force of the hydraulic urging member is prevented from being transmitted to the motor, and the motor can be operated. It can be prevented from reversing.

In the hydraulic drive system of the present invention, a regenerative current processing unit is provided in the reverse rotation corresponding unit.
The motor is a DC coreless brushless motor.
As a result, the power consumption is low, the drive torque is sufficient, and the influence of the regenerative power generated when the motor is reversed on other parts is suppressed, so that the springback function and sufficient reversal measures are provided. It makes it possible to operate a long-life hydraulic drive system in a vacuum atmosphere.

Further, in the hydraulic drive system of the present invention, the motor is a DC brushed motor.
As a result, the power consumption is low, the drive torque is sufficient, and the influence of the regenerative power generated when the motor is reversed on other parts is suppressed, so that the springback function and sufficient reversal measures are provided. It makes it possible to operate a long-life hydraulic drive system in a vacuum atmosphere.

The sluice valve of the present invention is a sluice valve capable of normally closed operation.
Hollow part and
A valve box having a first opening and a second opening that are provided so as to face each other and serve as a communication flow path with the hollow portion sandwiched between them.
With a valve body that can open and close the flow path,
A rotating shaft that rotatably supports the valve body between the retracted position and the valve opening shielding position in the hollow portion and has an axis extending in the flow path direction.
A rotary drive unit capable of rotationally driving the valve body and
A movable valve portion provided on the valve body so that the position in the flow path direction can be changed,
A valve box urging portion provided in the valve box to move and close the movable valve portion at the valve opening shielding position in the flow path direction, and
A hydraulic drive unit that drives the valve box urging unit by supplying and discharging hydraulic oil, and
Equipped with
The valve box urging portion serves as the vacuum actuator in the hydraulic drive system according to any one of the above.
The hydraulic drive unit is the hydraulic drive unit in the hydraulic drive system according to any one of the above.
The valve body is the object in the hydraulic drive system according to any one of the above.
As a result, during normal power supply, the vacuum actuator is driven by the flood control supplied by the hydraulic urging member of the hydraulic drive unit, and the telescopic rod is extended to close the pressed valve body and drive the drive unit. The telescopic rod is retracted to release the pressure on the valve body to open the valve. Thereby, it is possible to provide a partition valve having a springback function.
In addition, when the power supply from the power supply to the drive unit is lost and the hydraulic pressure flows back from the hydraulic pressure generating unit to the valve box urging unit (fixed unit) due to the urging force of the hydraulic pressure member, the motor of the drive unit Even in the case of reverse rotation, the reverse rotation corresponding portion makes it possible to prevent problems such as damage to the hydraulic drive system or damage to the vacuum actuator in response to the reverse rotation of the rotating shaft generated by the motor.
Specifically, it is possible to suppress the influence of the regenerative power generated by the motor on other parts, or to prevent the reversal of the rotating shaft from occurring in the motor.
Further, during normal power supply, it is possible to prevent the rotating shaft of the motor from being inadvertently reversed by the exciting brake. Further, when the power supply from the power supply to the drive unit is exhausted and the power supply is lost, the braking function by the exciting brake can be stopped. As a result, when the hydraulic pressure flows back from the hydraulic pressure generating part to the valve box urging part (fixed part) due to the urging force of the hydraulic pressure urging member, the motor of the drive part is promptly reversed, and the normally close function is not hindered. It becomes possible to present.
Alternatively, during normal power supply, the rotational driving force of the motor can be quickly transmitted to the hydraulic pressure generating unit by the exciting clutch to drive the vacuum actuator. Further, when the power supply from the power supply to the drive unit is lost and the power supply is lost, the rotary drive shaft of the motor can be disconnected from the hydraulic pressure generating unit. As a result, when the hydraulic pressure flows back from the hydraulic pressure generating part to the valve box urging part (fixed part) due to the urging force of the hydraulic urging member, the operation of the hydraulic pressure generating part reversed by the urging force of the hydraulic urging member becomes the motor. It is possible to prevent the motor from being transmitted and prevent the motor from reversing.

According to the present invention, it is possible to provide a hydraulic drive system and a partition valve capable of achieving the following effects.
1. 1. To improve the reliability of operation in an emergency in a hydraulic drive system that can be driven hydraulically and has a springback mechanism.
2. To reduce the effect of cogging torque.
3. 3. To reduce the effect of springback on the reverse rotation of the motor in an emergency.
4. To prevent problems from occurring in an emergency.
5. To reduce power consumption.
6. To extend the life of parts and reduce the need for maintenance.

It is a schematic diagram which shows the 1st Embodiment of the hydraulic drive system which concerns on this invention. It is a schematic diagram which shows the 2nd Embodiment of the hydraulic drive system which concerns on this invention. It is a schematic cross-sectional view along the flow path direction which shows the 3rd Embodiment of the partition valve which concerns on this invention, and is the figure which shows the case where the valve body is arranged in the retracted position (valve open position). It is a schematic cross-sectional view along the flow path which shows the 3rd Embodiment of the partition valve which concerns on this invention, and is the figure which shows the case where the valve body is arranged at the valve opening shielding position (sliding preparation position). It is a schematic cross-sectional view along the flow path which shows the 3rd Embodiment of the partition valve which concerns on this invention, and is the figure which shows the case where the valve body is arranged at a valve closing position. It is a schematic explanatory drawing which shows the hydraulic drive part in 4th Embodiment of the hydraulic drive system and the partition valve which concerns on this invention. It is a schematic explanatory drawing which shows the hydraulic drive part in 4th Embodiment of the hydraulic drive system and the partition valve which concerns on this invention. It is a schematic explanatory drawing which shows the hydraulic drive part in 4th Embodiment of the hydraulic drive system and the partition valve which concerns on this invention. It is a schematic explanatory drawing which shows the vacuum actuator in the 4th Embodiment of the hydraulic drive system and the partition valve which concerns on this invention. It is a schematic explanatory drawing which shows the vacuum actuator in the 4th Embodiment of the hydraulic drive system and the partition valve which concerns on this invention. It is a schematic explanatory drawing which shows the vacuum actuator in the 4th Embodiment of the hydraulic drive system and the partition valve which concerns on this invention. It is a schematic explanatory drawing which shows the vacuum apparatus which provided the 5th Embodiment of the hydraulic drive system which concerns on this invention. It is sectional drawing which is orthogonal to the flow path which shows the structure of the partition valve which concerns on 6th Embodiment of this invention. It is sectional drawing along the flow path which shows the structure of the partition valve which concerns on 6th Embodiment of this invention, and is the figure which shows the case where the valve body is arranged in the retractable operation position (FREE). It is an enlarged cross-sectional view along the flow path which shows the main part along the line segment AO in FIG. 13, and is the figure which shows the case where the valve body is arranged in the retractable operation position (FREE). It is an enlarged cross-sectional view along the flow path which shows the main part along the line segment BOC in FIG. 13, and is the figure which shows the case where the valve body is arranged in the retractable operation position (FREE). FIG. 13 is an enlarged cross-sectional view taken along a flow path showing a main part of the valve frame urging portion in FIG. 13, and is a view showing a case where the valve body is arranged at a retractable operation position (FREE). It is sectional drawing along the flow path which shows the structure of the partition valve which concerns on 6th Embodiment of this invention, and is the figure which shows the case where the valve body is arranged in a valve closed position (positive pressure or no differential pressure). .. It is an enlarged cross-sectional view along the flow path which shows the main part of FIG. It is an enlarged cross-sectional view along the flow path which shows the main part of FIG. It is an enlarged cross-sectional view along the flow path which shows the main part of FIG. It is sectional drawing along the flow path which shows the structure of the partition valve which concerns on 6th Embodiment of this invention, and is the figure which shows the case where the valve body is arranged in the reverse pressure position. It is an enlarged cross-sectional view along the flow path which shows the main part of FIG. It is an enlarged cross-sectional view along the flow path which shows the main part of FIG. It is a perspective view which shows the arrangement of the valve box urging part in the valve box in the partition valve which concerns on 6th Embodiment of this invention. It is a perspective view which shows the arrangement of the valve box urging part in the valve box in the partition valve which concerns on 6th Embodiment of this invention.

Hereinafter, the first embodiment of the hydraulic drive system according to the present invention will be described with reference to the drawings.
FIG. 1 is a schematic view showing a hydraulic drive system according to the present embodiment, in which reference numeral 700 is a hydraulic drive unit.

As shown in FIG. 1, the hydraulic drive system according to the present embodiment has a springback function, and has a hydraulic drive unit 700 and a vacuum actuator 70.

The vacuum actuator 70 according to the present embodiment is a telescopic actuator capable of pressing an object in a chamber Ch having a vacuum atmosphere. Since the vacuum actuator 70 according to the present embodiment is controlled by hydraulic pressure, its pressing force can be controlled to a predetermined value.

As shown in FIG. 1, the vacuum actuator 70 according to the present embodiment has a telescopic rod (movable portion) 72, an urging member (pressing spring) 73, and a fixing portion 71.

In the present embodiment, the fixing portion 71 of the vacuum actuator 70 is fixed to a wall portion, a bottom portion, a mechanism in the chamber, or the like in the chamber of the vacuum device.
In the present embodiment, the movable portion (expandable rod) 72 of the vacuum actuator 70 can be expanded and contracted from the fixed portion 71 toward the inside of the chamber Ch having a vacuum atmosphere.

The vacuum actuator 70 is arranged so that the movable portion (expandable rod) 72 can be urged in the direction in which the urging member (pressing spring) 73 is separated from the object.
In the vacuum actuator 70, as shown in FIG. 1, the movable portion (expandable rod) 72 retracted by the urging force of the urging member (pressing spring) 73 is housed in the fixed portion 71 apart from the object. ..

The vacuum actuator 70 is driven by the hydraulic pressure (incompressible fluid) supplied from the hydraulic drive unit 700.

As shown in FIG. 1, the hydraulic drive unit (incompressible fluid drive unit) 700 includes a hydraulic pressure generation unit 701, a hydraulic pipe 702, a hydraulic pressure urging member 720, and a drive unit 705.
The hydraulic pressure generating unit 701 generates the hydraulic pressure to be supplied to the fixing unit 71.
The hydraulic pipe 702 is connected to the hydraulic pressure generating portion 701 and the fixing portion 71 of the vacuum actuator 70.
The hydraulic drive unit 700 is configured to be normally closed.

The hydraulic pressure generating unit 701 generates hydraulic pressure in the operating direction or in the opposite direction by driving the driving unit 705 or by the urging force of the hydraulic pressure urging member 720.

When the movable portion (expandable rod) 72 is extended, the hydraulic pressure generating unit 701 generates hydraulic pressure by the urging force of the hydraulic urging member 720 and supplies the hydraulic oil to the vacuum actuator 70.
The hydraulic pressure generating unit 701 is also capable of maintaining the hydraulic pressure state and maintaining the movable portion (expandable rod) 72 in the expanded / contracted state at the end of the operation. Further, it is possible to appropriately control the contact state of the movable portion (expandable rod) 72 with the object such as the pressing force.

The drive unit 705 has a motor 705 m.
When the movable portion (expandable rod) 72 is retracted and retracted, the motor 705 m overcomes the urging force of the hydraulic urging member 720 and causes the hydraulic oil to flow from the vacuum actuator 70 to the hydraulic generator 701. To drive.
The motor 705 m is a DC coreless brushless motor.
The drive unit 705 has an exciting brake 705b that stops the rotation of the rotation shaft of the motor 705 m.

The drive unit 705 has a regenerative current processing unit 705c that processes the regenerative power generated when the rotation axis of the motor 705 m is reversed with respect to the drive direction.
The drive unit 705 is connected to and controlled by the control unit (controller) 706.
The drive unit 705 is connected to the power supply 707 to supply electric power for driving the drive unit 705.

The vacuum actuator 70 is assumed to drive the movable portion (expandable rod) 72 by overcoming the urging force of the urging member (pressing spring) 73 by the hydraulic pressure supplied from the hydraulic drive portion 700.
The vacuum actuator 70 can be springbacked by the hydraulic drive unit 700.
The springback is a movable part (expandable rod) in which hydraulic oil is flowed from the hydraulic pressure generating part 701 to the vacuum actuator 70 by the urging force of the hydraulic pressure urging member 720 of the hydraulic pressure generating part 701 in the direction opposite to the operating direction by the motor 705 m. ) 72 is to be driven.

The drive unit 705 is provided with a reverse rotation corresponding unit. The reverse rotation compatible portion corresponds to the reverse rotation state of the motor 705 m at the time of springback in which the movable portion (expandable rod) 72 moves in the direction close to the object by the urging force of the hydraulic urging member 720.

The exciting brake 705b and the regenerative current processing unit 705c form a reverse rotation corresponding unit.
The exciting brake 705b has a braking function of stopping the rotary drive shaft of the motor 705 m in a state where power is supplied from the power source 707.

The exciting brake 705b prevents the rotation shaft of the motor 705 m from being inadvertently reversed when power is being supplied from the power source 707 to the drive unit 705, that is, during normal power supply.
The exciting brake 705b can stop the braking function when the power supply from the power supply 707 to the drive unit 705 is exhausted and the power supply is lost.

Alternatively, the exciting brake 705b can release the braking function for the motor 705m under the control of the control unit (controller) 706 during normal power supply.
The excitation brake 705b is known, and its configuration is not limited.

In the regenerative current processing unit 705c, the rotation shaft rotates in the reverse direction when the movable portion (expandable rod) 72 is extended by the springback, that is, when the hydraulic oil flows back from the hydraulic pressure generating portion 701 to the vacuum actuator 70. It is possible to consume the regenerative power generated by the motor 705 m to obtain a regenerative resistance that suppresses the influence on other drivers.
Alternatively, the regenerative current processing unit 705c can be a diode or the like that controls the current direction of the regenerative power generated by the reversely rotated motor 705 m so that it does not flow to the power supply 707 side.
The regenerative current processing unit 705c is known, and its configuration is not limited.

In the hydraulic drive system according to the present embodiment, during normal power supply, the hydraulic drive unit 700 operates the hydraulic pressure generating unit 701 in the direction in which the hydraulic oil is drawn by the motor 705 m. As a result, in the vacuum actuator 70, the movable portion (expandable rod) 72 is retracted to the fixed portion 71 by the urging force of the internal urging member (pressing spring) 73. As a result, the pressure on the object by the movable portion (expandable rod) 72 is released.

Further, in the hydraulic drive system according to the present embodiment, the hydraulic drive unit 700 operates the hydraulic pressure generating unit 701 in the direction in which the hydraulic oil is pushed out by the hydraulic urging member 720. As a result, in the vacuum actuator 70, the movable portion (expandable rod) 72 extends from the fixed portion 71 by the hydraulic pressure supplied to the fixed portion 71. As a result, the object is pressed by the movable portion (expandable rod) 72.
In this way, the action of extending the movable portion (expandable rod) 72 of the vacuum actuator 70 by the hydraulic pressure urging member 720 of the hydraulic pressure generating portion 701 to press the object is the springback.

At the time of springback, when the movable portion (expandable rod) 72 is operated, the hydraulic oil flows back from the hydraulic pressure generating portion 701 to the vacuum actuator 70 due to the urging force of the hydraulic pressure urging member 720.
At the same time, the urging force of the hydraulic urging member 720 causes the rotating shaft of the motor 705 m to rotate in the reverse direction.
The motor 705 m in which the rotating shaft rotates in the reverse direction generates regenerative electric power.

Here, when power is being supplied from the power supply 707 to the drive unit 705, that is, when springback occurs due to the hydraulic urging member 720 during normal power supply, the control unit (controller) 706 moves to the motor 705 m. The excitation brake 705b of the reverse rotation corresponding portion is controlled so as to release the braking function of.

At this time, the control unit (controller) 706 can control the power supplied from the power supply 707 to the drive unit 705 to suppress the rotation speed so that the reverse speed of the motor 705 m becomes a predetermined state. .. As a result, it is possible to prevent the motor 705 m from generating more regenerative power than necessary.
The regenerative power generated by the reversely rotated motor 705 m is consumed by the regenerative current processing unit 705c of the reverse rotation corresponding unit, or the current direction is controlled. This prevents the regenerative power from affecting other drivers.

Further, in a state where the power supply from the power supply 707 to the drive unit 705 is cut off, that is, when springback occurs due to the hydraulic urging member 720 when the power supply is lost, the exciting brake 705b of the reverse rotation corresponding part where the power supply is cut off is released. , Releases the braking function to the motor 705m.

At this time, the reverse speed of the motor 705 m is large and a large regenerative power is generated, but the regenerative power generated by the reverse-rotated motor 705 m is consumed by the regenerative current processing unit 705c of the reverse rotation corresponding unit or the current direction is controlled. This prevents the regenerative power from affecting other parts.

As a result, the hydraulic drive system has a springback function, and the excitation brake 705b and the regenerative current processing unit 705c of the reverse rotation corresponding portion cause the reversely rotated motor 705m to idle, and the influence of the backflow of hydraulic pressure occurs. Can be suppressed.

As a result, even when the springback is generated by the hydraulic pressure urging member 720, the excitation brake 705b and the regenerative current processing unit 705c of the reverse rotation corresponding part rotate in the reverse direction in response to the reverse rotation of the drive system of the hydraulic pressure generation part 701. By idling the motor 705 m, it is possible to prevent problems such as damage to the hydraulic drive system or damage to the vacuum actuator 70.

Therefore, it is possible to suppress the influence of the regenerative power generated by the motor 705 m on other parts. Alternatively, in the motor 705 m, it is possible to prevent the rotation axis from reversing.

As a result, the power consumption is low, the drive torque is sufficient, and the influence of the regenerative power generated at the time of reversal of the motor 705 m on other parts is suppressed, and the springback function and sufficient reversal measures are provided. It is possible to operate a long-life hydraulic drive system in a vacuum atmosphere.

Further, when the springback by the hydraulic pressure urging member 720 occurs, it is not necessary to use a solenoid valve or the like to shut off the hydraulic pressure flowing back from the hydraulic pressure generating unit 701 to the vacuum actuator 70, so that the operation as a hydraulic drive system is performed. It is possible to improve the certainty and extend the life of the parts. At the same time, reliability can be improved even if the number of maintenances is reduced.

Hereinafter, a second embodiment of the hydraulic drive system according to the present invention will be described with reference to the drawings.
FIG. 2 is a schematic view showing a hydraulic drive system according to the present embodiment, in which reference numeral 700 is a hydraulic drive unit.

As shown in FIG. 2, the hydraulic drive system according to the present embodiment has a springback function, and has a hydraulic drive unit 700 and a vacuum actuator 70.

The vacuum actuator 70 according to the present embodiment is a telescopic actuator capable of pressing an object in a chamber Ch having a vacuum atmosphere. Since the vacuum actuator 70 according to the present embodiment is controlled by hydraulic pressure, its pressing force can be controlled to a predetermined value.

As shown in FIG. 2, the vacuum actuator 70 according to the present embodiment includes a telescopic rod (movable portion) 72, a flange portion 773, an urging member (pressing spring) 73, and a fixing portion 71.

In the present embodiment, the fixing portion 71 of the vacuum actuator 70 is fixed to a wall portion, a bottom portion, a mechanism in the chamber, or the like in the chamber of the vacuum device.
In the present embodiment, the movable portion (expandable rod) 72 of the vacuum actuator 70 can be expanded and contracted from the fixed portion 71 toward the inside of the chamber Ch having a vacuum atmosphere.

The vacuum actuator 70 is arranged so that the movable portion (expandable rod) 72 can be urged in the direction in which the urging member (pressing spring) 73 is separated from the object.
In the vacuum actuator 70, as shown in FIG. 2, the movable portion (expandable rod) 72 retracted by the urging force of the urging member (pressing spring) 73 is housed in the fixed portion 71 apart from the object. ..

The vacuum actuator 70 is driven by the hydraulic pressure (incompressible fluid) supplied from the hydraulic drive unit 700.

As shown in FIG. 2, the hydraulic drive unit (incompressible fluid drive unit) 700 includes a hydraulic pressure generation unit 701, a hydraulic pipe 702, a hydraulic pressure urging member 720, and a drive unit 705.
The hydraulic pressure generating unit 701 generates hydraulic pressure that supplies hydraulic pressure to the fixing unit 71.
The hydraulic pipe 702 is connected from the hydraulic pressure generating portion 701 to the fixing portion 71 of the vacuum actuator 70.
The hydraulic drive unit 700 is configured to be normally closed.

The hydraulic pressure generating unit 701 generates hydraulic pressure in the operating direction or in the opposite direction by driving the driving unit 705 or by the urging force of the hydraulic pressure urging member 720.

When the movable portion (expandable rod) 72 is extended, the hydraulic pressure generating unit 701 generates hydraulic pressure by the urging force of the hydraulic urging member 720 and supplies the hydraulic oil to the vacuum actuator 70.
The hydraulic pressure generating unit 701 is also capable of maintaining the hydraulic pressure state and maintaining the movable portion (expandable rod) 72 in the expanded / contracted state at the end of the operation. Further, the contact state of the movable portion (expandable rod) 72 with the object can be appropriately controlled.

The drive unit 705 has a motor 705 m.
When the movable portion (expandable rod) 72 is degenerated, the motor 705 m overcomes the urging force of the hydraulic urging member 720 and causes the hydraulic oil generating portion 701 to flow from the vacuum actuator 70 to the hydraulic generating portion 701. Drive.
The motor 705 m is a motor with a DC brush.
The drive unit 705 has an exciting brake 705b that stops the rotation of the rotation shaft of the motor 705 m.

The drive unit 705 has an exciting clutch 705d that disconnects the rotation shaft from the drive path of the hydraulic pressure generating unit 701 when the rotation shaft of the motor 705 m is reversed with respect to the drive direction.
The drive unit 705 is connected to and controlled by the control unit (controller) 706.
The drive unit 705 is connected to the power supply 707 to supply electric power for driving the drive unit 705.

The vacuum actuator 70 is assumed to drive the movable portion (expandable rod) 72 by overcoming the urging force of the urging member (pressing spring) 73 by the hydraulic pressure supplied from the hydraulic drive portion 700.
The vacuum actuator 70 can be springbacked by the hydraulic drive unit 700.
The springback is a movable part (expandable rod) in which hydraulic oil is flowed from the hydraulic pressure generating part 701 to the vacuum actuator 70 by the urging force of the hydraulic pressure urging member 720 of the hydraulic pressure generating part 701 in the direction opposite to the operating direction by the motor 705 m. ) 72 is to be driven.

The drive unit 705 is provided with a reverse rotation corresponding unit. The reverse rotation compatible portion corresponds to the reverse rotation state of the motor 705 m at the time of springback in which the movable portion (expandable rod) 72 moves in the direction close to the object by the urging force of the hydraulic urging member 720.

The exciting brake 705b and the exciting clutch 705d form a reverse rotation corresponding portion.
The exciting brake 705b has a braking function of stopping the rotary drive shaft of the motor 705 m in a state where power is supplied from the power source 707. At this time, the cogging torque of the motor 705 m can be used as a brake.

The exciting brake 705b prevents the rotation shaft of the motor 705 m from being inadvertently reversed when power is being supplied from the power source 707 to the drive unit 705, that is, during normal power supply.
The exciting brake 705b can stop the braking function when the power supply from the power supply 707 to the drive unit 705 is exhausted and the power supply is lost.

Alternatively, the exciting brake 705b can release the braking function for the motor 705m under the control of the control unit (controller) 706 during normal power supply.
The excitation brake 705b is known, and its configuration is not limited.

The exciting clutch 705d has an urging force of the hydraulic urging member 720 when the movable portion (expandable rod) 72 is extended by the springback, that is, when the hydraulic oil flows back from the hydraulic pressure generating portion 701 to the vacuum actuator 70. The motor 705 m is separated from the drive system of the hydraulic pressure generating unit 701 that has been rotated in the reverse direction.
That is, the exciting clutch 705d has a clutch function of disconnecting the rotary drive shaft 705a of the motor 705 m from the drive system of the hydraulic pressure generating unit 701 when the hydraulic oil flows back due to the urging force of the hydraulic pressure member 720.

As a result, even if the drive system of the hydraulic pressure generating unit 701 rotates in the reverse direction due to the urging force of the hydraulic pressure urging member 720, the drive system of the hydraulic pressure generating unit 701 prevents the reverse rotation from being transmitted to the rotation shaft of the motor 705 m. To do.
The exciting clutch 705d can prevent the rotation axis of the motor 705m from reversing.

In the exciting clutch 705d, when power is supplied from the power supply 707 to the drive unit 705, that is, during normal power supply, when the movable portion (expandable rod) 72 is extended by the springback, the rotation shaft of the motor 705 m moves. The drive system of the oil pressure generating unit 701 is maintained in a connected state.

The exciting clutch 705d can disconnect the motor 705 m from the drive system of the hydraulic pressure generating unit 701 when the power supply from the power source 707 to the drive unit 705 is exhausted and the power supply is lost.
The exciting clutch 705d is known, and its configuration is not limited.

In the hydraulic drive system according to the present embodiment, during normal power supply, the hydraulic drive unit 700 operates the hydraulic pressure generating unit 701 in the direction in which the hydraulic oil is drawn by the motor 705 m. As a result, in the vacuum actuator 70, the movable portion (expandable rod) 72 is retracted to the fixed portion 71 by the urging force of the internal urging member (pressing spring) 73. As a result, the pressure on the object by the movable portion (expandable rod) 72 is released.

Further, in the hydraulic drive system according to the present embodiment, the hydraulic drive unit 700 operates the hydraulic pressure generating unit 701 in the direction in which the hydraulic oil is pushed out by the hydraulic urging member 720. As a result, in the vacuum actuator 70, the movable portion (expandable rod) 72 extends from the fixed portion 71 by the hydraulic pressure supplied to the fixed portion 71. As a result, the object is pressed by the movable portion (expandable rod) 72.

In this way, the action of extending the movable portion (expandable rod) 72 of the vacuum actuator 70 by the hydraulic pressure urging member 720 of the hydraulic pressure generating portion 701 to press the object is the springback.

When the movable portion (expandable rod) 72 is operated by the spring back, the urging force of the hydraulic urging member 720 causes the hydraulic pressure to flow back from the hydraulic pressure generating portion 701 to the vacuum actuator 70.
At the same time, the urging force of the hydraulic pressure urging member 720 causes the drive system of the hydraulic pressure generating unit 701 to rotate in the reverse direction.
The drive system of the hydraulic pressure generating unit 701 that has rotated in the reverse direction is transmitted to the rotating shaft of the motor 705 m as it is to generate regenerative power.

Here, when power is being supplied from the power supply 707 to the drive unit 705, that is, when springback occurs due to the hydraulic urging member 720 during normal power supply, the control unit (controller) 706 moves to the motor 705 m. The excitation brake 705b of the reverse rotation corresponding portion is controlled so as to release the braking function of.
At the same time, the control unit (controller) 706 controls the excitation clutch 705d so that the rotating shaft of the motor 705 m and the drive system of the hydraulic pressure generating unit 701 are maintained in a connected state.

At this time, the control unit (controller) 706 can control the power supplied from the power supply 707 to the drive unit 705 to suppress the rotation speed so that the reverse speed of the motor 705 m becomes a predetermined state. .. As a result, it is possible to prevent the motor 705 m from generating more regenerative power than necessary.

Further, in a state where the power supply from the power supply 707 to the drive unit 705 is cut off, that is, when a springback occurs due to the hydraulic urging member 720 when the power supply is lost, the exciting brake 705b of the reverse rotation corresponding part where the power supply is cut off is released. , Releases the braking function to the motor 705m.
At the same time, the exciting clutch 705d of the reverse rotation corresponding portion, in which the power supply is cut off, is in a state where the rotating shaft of the motor 705 m and the drive system of the hydraulic pressure generating portion 701 are disconnected.

At this time, although the reverse speed in the drive system of the hydraulic pressure generating unit 701 is large, the motor 705 m does not rotate in the reverse direction because the exciting clutch 705d is disengaged. Therefore, no regenerative power is generated in the motor 705 m.
This prevents the regenerative power from affecting other parts.

As a result, the hydraulic drive system has a springback function, and the drive system of the hydraulic pressure generating unit 701 is idled by the exciting brake 705b and the exciting clutch 705d of the reverse rotation corresponding portion, so that the motor 705 m is hydraulically driven without rotating in the reverse direction. It is possible to prevent the influence of the backflow.

As a result, even if springback occurs due to the hydraulic urging member 720, the hydraulic drive system is damaged in response to the reverse rotation of the drive system of the hydraulic pressure generating unit 701 by the exciting brake 705b and the exciting clutch 705d of the reverse rotation corresponding part. Alternatively, it is possible to prevent problems such as damage to the vacuum actuator 70.

Therefore, in the motor 705 m, it is possible to prevent the rotation axis from reversing. Alternatively, the influence of the regenerative power generated by the motor 705 m on other parts can be suppressed.

As a result, the power consumption is low, the drive torque is sufficient, and when the drive system of the hydraulic pressure generating unit 701 is reversed by the urging force of the hydraulic pressure urging member 720, the regenerative power is not generated and the other parts can be used. It is possible to operate a long-life hydraulic drive system in a vacuum atmosphere by suppressing the influence of the effect, having a springback function and sufficient reversal measures.

Further, when springback occurs due to the hydraulic pressure urging member 720, it is not necessary to use a solenoid valve, a spool valve, or the like to shut off the hydraulic pressure flowing back from the vacuum actuator 70 to the hydraulic pressure generating unit 701. It is possible to improve the operation reliability of the parts and extend the life of the parts. At the same time, reliability can be improved even if the number of maintenances is reduced.
Further, since it is not necessary to provide a configuration for processing regenerative power, the hydraulic drive system can be miniaturized and the hydraulic drive system can be configured in a space-saving manner.

By using the motor 705 m as a motor with a DC brush, there is a case where a loss of force for generating cogging torque may occur, but this can be prevented. Further, even when the motor 705 m is a motor with a DC brush, if the rating is increased in order to increase the output of the motor 705 m, the cogging torque becomes stronger in proportion to it, but this can be prevented.

Further, by using the cogging torque of the motor 705 m as a brake, a simple component configuration can be realized.
Alternatively, hydraulic loss can be reduced by using a motor in which the cogging torque of the motor itself is zero or extremely small.
By changing the combination in the configuration of the reverse rotation corresponding unit depending on the motor, it is possible to select a wide range of motors, and it is possible to realize an inexpensive and simple configuration without complicated control.

Hereinafter, a third embodiment of the hydraulic drive system and the partition valve according to the present invention will be described with reference to the drawings.

FIG. 3 is a schematic cross-sectional view along a flow path showing the retracted position (valve open position) of the partition valve in the present embodiment. FIG. 4 is a schematic cross-sectional view along a flow path showing a valve opening shielding position (sliding preparation position) of the partition valve in the present embodiment. FIG. 5 is a schematic cross-sectional view along a flow path showing the valve closing position of the partition valve in the present embodiment.
In the present embodiment, the same reference numerals are given to the configurations corresponding to the above-described first or second embodiment, and the description thereof will be omitted. In the figure, reference numeral 100 is a partition valve.

In the hydraulic drive system of the present embodiment, as shown in FIGS. 3 to 5, a vacuum actuator 70 is provided as a vacuum actuator (urging portion, pressing cylinder) 70 at the valve closing position in the partition valve 100.
Further, in the hydraulic drive system of the present embodiment, as shown in FIGS. 3 to 5, the hydraulic drive unit 700 drives the vacuum actuator (urging unit, pressing cylinder) 70 at the valve closing position.

The partition valve 100 according to the present embodiment is a pendulum type slide valve capable of normally closing operation. As shown in FIGS. 3 to 5, the partition valve 100 according to the present embodiment includes a valve box 10, a hollow portion 11, a valve body 5, a rotary shaft 20, a rotary drive unit 21, and a hydraulic drive unit ( Non-compressible fluid drive unit) 700 and.

The valve box 10 has a hollow portion 11 and a first opening 12a and a second opening 12b that are provided so as to face each other and serve as a communication flow path H that sandwiches the hollow portion 11.
The flow path H is set from the second opening 12b toward the first opening 12a.

The valve body 5 is arranged in the hollow portion 11 of the valve box 10 and can open and close the flow path H.
The rotating shaft 20 has an axis extending in the flow path H direction.
The rotating shaft 20 rotatably supports the valve body 5 between the retracted position (valve opening position) and the valve opening shielding position (sliding preparation position) in the hollow portion 11.

In the retracted position (valve open position), the valve body 5 is retracted from the first opening 12a and is in an open state (FIG. 3) capable of communicating with the flow path H. At the valve opening shielding position (sliding preparation position), the valve body 5 is in a closed state (FIG. 4) that shields the first opening 12a.

The partition valve 100 operates between the retracted position (valve open position) and the valve closed position (FIG. 5).
The rotation drive unit 21 can rotationally drive the rotation shaft 20.
The rotation drive unit 21 can reciprocally rotate the valve body 5.

The valve body 5 includes a neutral valve portion 30 connected to the rotary shaft 20, a valve frame portion 63 connected to the neutral valve portion 30, and a movable valve portion (movable valve plate portion) 54 connected to the valve frame portion 63. Consists of.
The neutral valve portion 30 is fixed to the rotating shaft 20.
The neutral valve portion 30 maintains the central position of the hollow portion 11 in the flow path H direction.

The valve frame portion 63 is located around the movable valve portion (movable valve plate portion) 54. The valve frame portion 63 is fixed to the neutral valve portion 30. The valve frame portion 63, together with the neutral valve portion 30, maintains the central position of the hollow portion 11 at the retracted position (valve opening position), the valve opening shielding position (sliding preparation position), and the valve closing position.

The movable valve portion (movable valve plate portion) 54 is slidable with respect to the valve frame portion 63 in the flow path H direction.
The position of the movable valve portion (movable valve plate portion) 54 in the flow path H direction with respect to the valve frame portion 63 can be changed between the valve opening shielding position (sliding preparation position) and the valve closing position.

The movable valve portion (movable valve plate portion) 54 holds the central position of the hollow portion 11 between the retracted position (valve open position) and retracted position (valve open position) and the valve opening shielding position (sliding preparation position). maintain.
The movable valve portion (movable valve plate portion) 54 is provided with a valve plate seal packing that is in close contact with the inner surface of the valve box 10 located around the first opening 12a.

The urging portion (pressing cylinder) 70 is provided by being embedded in the valve box 10. A plurality of urging portions (pressing cylinders) 70 are arranged along the circumferential direction of the movable valve portion (movable valve plate portion) 54.
The urging portion (pressing cylinder) 70 is the vacuum actuator 70 in the first embodiment or the second embodiment described above.

In the vacuum actuator 70 of the first embodiment or the second embodiment described above, the chamber Ch on the vacuum side where the telescopic rod (movable portion) 72 extends corresponds to the hollow portion 11 communicating with the flow path H.

The urging unit (pressing cylinder) 70 built in the valve box 10 is connected to a hydraulic drive unit (incompressible fluid drive unit) 700 provided on the atmosphere side and is driven by flood control.
The hydraulic drive unit (incompressible fluid drive unit) 700 supplies and discharges, that is, supplies and discharges the incompressible fluid (pressure oil) to the urging unit (pressing cylinder) 70, and a plurality of urging units (pressing cylinder). Cylinder) 70 is driven at the same time.

The urging portion (pressing cylinder) 70 directs the movable valve portion (movable valve plate portion) 54 toward the first opening 12a in the flow path H direction at the valve opening shielding position (sliding preparation position) and the valve closing position. Cylinder. The urging portion (pressing cylinder) 70 has a function of allowing the valve plate seal packing to be brought into close contact with the inner surface of the valve box 10 located around the first opening 12a.
The urging portion (pressing cylinder) 70 presses the periphery of the movable valve portion (movable valve plate portion) 54 at the valve opening shielding position (sliding preparation position) in the flow path H direction. The urging portion (pressing cylinder) 70 closes (closes) the flow path H by the moved movable valve portion (movable valve plate portion) 54.

Further, in the partition valve 100 according to the present embodiment, the movable valve portion (movable valve plate portion) 54 has a flow path H with respect to the valve frame portion 63 at the valve opening shielding position (sliding preparation position) and the valve closing position. The position in the direction is mutably connected.
Further, although not shown in the valve frame portion 63 or the movable valve portion (movable valve plate portion) 54, the movable valve portion (movable valve plate portion) 54 is hollow with respect to the valve frame portion 63 in the flow path H direction. An urging portion (neutral urging portion) for urging toward the central position of the portion 11 is provided.

As a result, in the partition valve 100, when the urging portion (pressing cylinder) 70 is not operating, the movable valve portion (movable valve plate portion) 54 is located at the center position of the hollow portion 11 inside the valve box 10. It has a normal closing mechanism to maintain. The thickness dimension of the valve frame portion 63 and the movable valve portion (movable valve plate portion) 54 in the flow path H direction by the urging portion (pressing cylinder) 70 and the urging portion (neutral urging portion) of the valve frame portion 63. Is adjustable.

When the rotating shaft 20 rotates in the direction intersecting the direction of the flow path H, the neutral valve portion 30 fixed to the rotating shaft 20 also rotates integrally according to this rotation. Further, since the movable valve portion (movable valve plate portion) 54 is slidable only in the thickness direction on the neutral valve portion 30, the movable valve portion (movable valve plate portion) 54 is integrated with the neutral valve portion 30. Rotate.

By rotating the neutral valve portion 30, the flow path H located at the position corresponding to the first opening 12a is shielded from the retracted position (valve opening position) which is the hollow portion 11 where the flow path H is not provided. The movable valve portion (movable valve plate portion) 54 moves by a pendulum movement to the valve opening shielding position (sliding preparation position).

In the present embodiment, the fixing portion 71 of the vacuum actuator (pressing cylinder) 70 is built in the valve box 10. The vacuum actuator (pressing cylinder) 70 is arranged so that the movable portion (expandable rod) 72 can be urged in the direction in which the urging member (pressing spring) 73 is separated from the movable valve portion (movable valve plate portion) 54.
In the vacuum actuator (pressing cylinder) 70, as shown in FIGS. 2 and 3, the movable portion (expandable rod) 72 retracted by the urging member (pressing spring) 73 is the movable valve portion (movable valve plate portion) 54. It is housed in a fixed portion 71 built in the valve box 10 apart from the valve box 10.

Here, in the vacuum actuator (pressing cylinder) 70, the hydraulic pressure is supplied from the hydraulic drive unit (incompressible fluid drive unit) 700 by the hydraulic pressure urging member 720 of the hydraulic pressure generating unit 701 from the retracted stored state, and the spring. The movable part (expandable rod) 72 is extended by the back. At this time, the vacuum actuator (pressing cylinder) 70 moves the movable valve portion (movable valve plate portion) 54 toward the first opening 12a by the movable portion (expandable rod) 72, and the movable valve portion (movable valve). The plate portion) 54 is brought into contact with the inner surface of the valve box 10. Further, the vacuum actuator (pressing cylinder) 70 presses the movable valve portion (movable valve plate portion) 54 against the inner surface of the valve box 10 to close the flow path H (valve closing operation).

From the extended state of the movable portion (expandable rod) 72, the vacuum actuator (pressing cylinder) 70 releases the oil supply supplied from the hydraulic drive unit (incompressible fluid drive unit) 700 by driving the motor 705 m of the drive unit 705. The tip of the movable portion (expandable rod) 72 is retracted. At this time, the urging portion (neutral urging portion) separates the movable valve portion (movable valve plate portion) 54 from the first opening 12a.
As a result, the movable valve portion (movable valve plate portion) 54 is pulled away from the inner surface of the valve box 10 and retracted. The flow path H is opened (release operation) by setting the movable valve portion (movable valve plate portion) 54 at the center position of the hollow portion 11 in the flow path H direction.

In this way, the valve closing operation and the releasing operation are possible by the mechanical contact operation and the mechanical separation operation in the vacuum actuator (pressing cylinder) 70. Here, the mechanical contact operation in the vacuum actuator (pressing cylinder) 70 is an operation in which the movable valve portion (movable valve plate portion) 54 is brought into contact with the inner surface of the valve box 10. The mechanical separation operation in the vacuum actuator (pressing cylinder) 70 is an operation of pulling the movable valve portion (movable valve plate portion) 54 from the inner surface of the valve box 10 by the urging portion (neutral urging portion).

After this release operation, when the rotation shaft 20 is rotationally driven by the rotation drive unit 21 (evacuation operation), the neutral valve portion 30 and the movable valve portion (movable valve plate portion) 54 also rotate integrally according to this rotation.
The partition valve 100 is in a valve open state in which the movable valve portion (movable valve plate portion) 54 retracts from the valve opening shielding position (sliding preparation position) to the retracted position (valve opening position) by the release operation and the retracting operation. The valve opening operation is performed. The rotation drive unit 21 is configured to be normally closed.

The vacuum actuator (pressing cylinder) 70 is driven by the hydraulic pressure (incompressible fluid) supplied from the hydraulic drive unit (incompressible fluid drive unit) 700.

The hydraulic drive unit (incompressible fluid drive unit) 700 is the hydraulic drive unit (incompressible fluid drive unit) 700 in the first embodiment or the second embodiment described above.

The hydraulic drive unit (incompressible fluid drive unit) 700 can further detect that the rotation of the rotating shaft 20 is in the valve closing position and the valve opening shielding position (sliding preparation position) to switch the hydraulic supply. The switching sensor 802 can also be provided.
The hydraulic drive unit (incompressible fluid drive unit) 700 is configured to be normally closed by springback by the hydraulic pressure urging member 720 of the hydraulic pressure generation unit 701.

The hydraulic drive unit (incompressible fluid drive unit) 700 uses the motor 705 m of the drive unit 705 to degenerate the movable unit (expandable rod) 72 to push hydraulic oil from the vacuum actuator (pressing cylinder) 70 to the oil pressure generator 701. Move to.
When the hydraulic drive unit (incompressible fluid drive unit) 700 extends the movable unit (expandable rod) 72, the hydraulic pressure from the hydraulic pressure urging member 720 of the hydraulic pressure generating unit 701 flows back to the vacuum actuator (pressing cylinder) 70. Let me.
The hydraulic drive unit (incompressible fluid drive unit) 700 is capable of maintaining a hydraulic state in which the movable unit (expandable rod) 72 is expanded and contracted at the end of operation.
The hydraulic drive unit (incompressible fluid drive unit) 700 can appropriately control the contact state of the movable portion (expandable rod) 72 with the movable valve portion (movable valve plate portion) 54.

The hydraulic drive unit (incompressible fluid drive unit) 700 has an exciting brake 705b and a regenerative current processing unit 705c or an exciting clutch 705d as reverse rotation corresponding units.
In the hydraulic drive unit (incompressible fluid drive unit) 700, the hydraulic drive system is damaged or the vacuum actuator 70 and the movable valve unit (movable valve plate unit) correspond to the reversely rotated motor 705 m due to the reverse rotation compatible unit. It is possible to prevent problems such as damage at 54 and the like.

In the partition valve 100 of the present embodiment, as shown in FIG. 3, the movable valve portion (movable valve plate portion) 54 is in the retracted position (valve open position), and the flow path H is fully opened so that distribution is possible. It is said that.

Further, while the movable valve portion (movable valve plate portion) 54 closes and rotates from the retracted position (valve open position) shown in FIG. 3 to the valve opening shielding position (sliding preparation position) shown in FIG. The flow path H is partially covered with a movable valve portion (movable valve plate portion) 54, and a part of the flow path H can flow.

Further, immediately after the movable valve portion (movable valve plate portion) 54 reaches the valve opening shielding position (sliding preparation position) shown in FIG. 4, the flow path H is shielded by the movable valve portion (movable valve plate portion) 54. However, it is not hermetically sealed, and a part of the flow path H can be distributed near the peripheral edge of the movable valve portion (movable valve plate portion) 54.

Further, when the hydraulic pressure urging member 720 of the hydraulic pressure generating unit 701 springs back, the movable portion (expandable rod) 72 of the vacuum actuator (pressing cylinder) 70 is extended and driven. As a result, the movable valve portion (movable valve plate portion) 54 performs a sealing operation for changing the position in the flow path H direction. As a result, the movable valve portion (movable valve plate portion) 54 slides from the valve opening shielding position (sliding preparation position) shown in FIG. 4 to the valve closing position shown in FIG. 5, and the flow path H is closed. Will be done.

Next, when the motor 705 m of the drive unit 705 is driven, the movable valve portion (movable valve plate portion) 54 is moved to the flow path H by the degenerate drive of the movable portion (expandable rod) 72 in the vacuum actuator (pressing cylinder) 70. Performs an opening operation to change the position in the direction. As a result, the movable valve portion (movable valve plate portion) 54 slides from the valve closing position shown in FIG. 5 to the valve opening shielding position (sliding preparation position) shown in FIG. At this time, the flow path H is partially covered with the movable valve portion (movable valve plate portion) 54, and the flow path H can be partially circulated.

Further, immediately after the movable valve portion (movable valve plate portion) 54 starts the sealing release operation (separation operation) by the springback from the valve closing position shown in FIG. 5, the sealing of the flow path H is released and the flow path is released. Part of H can be distributed near the peripheral edge of the movable valve portion (movable valve plate portion) 54. At the same time, the flow path H is shielded by the movable valve portion (movable valve plate portion) 54, but is not sealed.

Further, while the movable valve portion (movable valve plate portion) 54 opens and rotates from the valve opening shielding position (sliding preparation position) shown in FIG. 4 to the retracted position (valve opening position) shown in FIG. The road H is partially covered with a movable valve portion (movable valve plate portion) 54, and a part of the flow path H can flow.
During the rotational operation of the movable valve portion (movable valve plate portion) 54, the vacuum actuator (pressing cylinder) 70 maintains the degenerate state of the movable portion (expandable rod) 72, and the movable portion (expandable rod) 72 is extended. It does not drive.

In this embodiment, the same effect as that of the first embodiment or the second embodiment can be obtained.

Hereinafter, a fourth embodiment of the hydraulic drive system and the partition valve according to the present invention will be described with reference to the drawings.
FIG. 6 is a schematic explanatory view showing a hydraulic pressure generating portion in a pressurized state in the hydraulic drive system and the hydraulic drive portion of the partition valve according to the present embodiment. FIG. 7 is a schematic explanatory view showing a hydraulic pressure generating portion in a decompressed state in the hydraulic drive system and the hydraulic drive portion of the partition valve according to the present embodiment. FIG. 8 is a schematic explanatory view showing a hydraulic pressure generation unit in an overpressure state in the hydraulic pressure drive system and the hydraulic drive unit of the partition valve according to the present embodiment.

FIG. 9 is an axial sectional view for explaining the hydraulic drive system and the vacuum actuator in the partition valve according to the present embodiment. FIG. 10 is an axial sectional view orthogonal to FIG. 9 for explaining the hydraulic drive system and the vacuum actuator in the partition valve according to the present embodiment. FIG. 11 is an axial sectional view showing an extended state for explaining a vacuum actuator in a hydraulic drive system and a partition valve according to the present embodiment.
In this embodiment, the difference from the first embodiment or the second embodiment described above is that the hydraulic pressure generating unit and the vacuum actuator are related, and the other corresponding components are described with the same reference numerals. Omit.

The hydraulic drive unit (incompressible fluid drive unit) 700 in the present embodiment has the same configuration as the hydraulic drive unit (incompressible fluid drive unit) 700 in the first embodiment or the second embodiment described above.

As shown in FIGS. 6 to 8, the hydraulic pressure generating unit 701 includes a hydraulic cylinder 710, a hydraulic pressure urging member 720, a cylinder driving unit 730, and a casing 750.
The hydraulic cylinder 710 pressurizes and supplies pressure oil, which is an incompressible fluid, to the vacuum actuator (pressing cylinder) 70. The hydraulic urging member 720 urges the hydraulic cylinder 710 to enable a springback operation. The cylinder drive unit 730 can drive the hydraulic cylinder 710 against the hydraulic urging member 720. The casing 750 houses the hydraulic cylinder 710, the hydraulic urging member 720, and the cylinder drive unit 730.

The hydraulic cylinder 710 has a bottomed cylinder-shaped cylinder body 711 and a piston 712 that is relatively movable in the axial direction inside the cylinder body 711. The piston 712 has a hydraulic flow path 713 that penetrates the inside along its axis, and the hydraulic flow path 713 is connected to the hydraulic pipe 702. The hydraulic flow path 713 is capable of inflowing or outflowing pressure oil (driving fluid), which is an incompressible fluid, into the hydraulic pipe 702.

In the piston 712, the hydraulic flow path 713 connected to the hydraulic pipe 702 penetrates the casing 750. The end 712a of the piston 712 is sealed with an O-ring and a sealant. The end portion 712a of the piston 712 is attached and fixed to the casing 750.
The end 712b, which is opposite to the end 712a of the piston 712, is located coaxially inside the cylinder body 711.

The end 711a of the cylinder body 711 is open. The end portion 712b of the piston 712 is inserted into the end portion 711a of the cylinder body 711.
The cylinder body 711 can move relative to the piston 712 in the axial direction. The cylinder body 711 can move relative to the casing 750 in the axial direction.

The end 711b of the cylinder body 711 is closed. A hydraulic space 714 is formed by an inner surface close to the end portion 711b of the cylinder body 711 and an end surface of the end portion 712b of the piston 712. The hydraulic space 714 is filled with pressure oil (driving fluid) which is an incompressible fluid.

The volume of the hydraulic space 714 increases or decreases when the cylinder body 711 moves relative to the piston 712 in the axial direction. As the volume of the hydraulic space 714 increases or decreases, the pressure oil filled in the hydraulic space 714 flows in or out of the hydraulic pipe 702 via the hydraulic flow path 713. A flange portion 711c is provided at the outer peripheral position of the end portion 711a of the cylinder body 711. The flange portion 711c is provided so as to project radially outward from the end portion 711a.

The end portion 721a of the inner spring 721 and the end portion 722a of the outer spring 722, which serve as the hydraulic urging member 720, are in contact with the surface of the flange portion 711c toward the end portion 711b.
A peripheral groove 711d is provided on the surface of the flange portion 711c toward the end portion 711b in the vicinity of the outer peripheral surface of the cylinder body 711.

The peripheral groove 711d is in contact with the end portion 721a of the inner spring 721 that serves as the hydraulic urging member 720. The end portion 722a of the outer spring 722 is in contact with the surface of the flange portion 711c, which is the outer peripheral position of the peripheral groove 711d, toward the end portion 711b.

The hydraulic urging member (main spring) 720 has an inner spring 721 and an outer spring 722. The inner spring 721 and the outer spring 722 are coil springs. The inner spring 721 and the outer spring 722 are arranged coaxially with the cylinder body 711 and the piston 712. The inner spring 721 has an inner diameter dimension slightly larger than the diameter dimension of the outer peripheral surface of the cylinder body 711.

The outer spring 722 has an inner diameter dimension slightly larger than the outer diameter dimension of the inner spring 721. The outer spring 722 has a wire diameter larger than that of the inner spring 721. The outer spring 722 has a larger urging force than the inner spring 721.

The inner spring 721 and the outer spring 722 are capable of transmitting the urging force in the expansion / contraction direction to the cylinder body 711. Both the inner spring 721 and the outer spring 722 are urged to press the flange portion 711c of the cylinder body 711 toward the end portion 712a of the piston 712.

The end 721b of the inner spring 721 and the end 722b of the outer spring 722 are in contact with the casing 750. As a result, the hydraulic urging member 720 urges the cylinder body 711 with respect to the casing 750.
The hydraulic urging member 720 is not limited to this configuration as long as it can urge the cylinder body 711.

Bush 711e and Y-shaped packings 711f and 711g are provided on the inner peripheral surface of the cylinder body 711 at positions close to the end portion 711a. The inner peripheral surface of the cylinder body 711 and the outer peripheral surface of the piston 712 are slidably sealed. The end 731a of the drive shaft 731 of the cylinder drive 730 is coaxially connected to the end 711b of the cylinder body 711.

The cylinder drive unit 730 includes a drive shaft 731 that moves the cylinder body 711 relative to the piston 712 in the axial direction, and a drive transmission unit that drives the drive shaft 731 by a drive unit 705 such as a motor.

The drive shaft 731 is arranged in the casing 750 in a coaxial state with the cylinder body 711 and the piston 712. The drive shaft 731 is movable in the axial direction. The drive shaft 731 is movable relative to the piston 712 and the casing 750 in the axial direction.

A ball screw 731c is formed on the outer peripheral surface of the drive shaft 731 at a position close to the end portion 731a. The length of the ball screw 731c in the axial direction of the drive shaft 731 is set so that when the cylinder body 711 moves in the axial direction, the inner screw surface 732c described later can maintain the screwed state over the entire range. To.

On the radial outer side of the drive shaft 731, the screw drive gear 732 is coaxially arranged at the outer peripheral position of the ball screw 731c. The drive shaft 731 is supported with respect to the casing 750 by the screw drive gear 732.

A detent 731h, which will be described later, is provided so as to project in the radial direction at the end portion 731b opposite to the end portion 731a of the drive shaft 731. The detent 731h is located inside the sliding groove 757 provided in the casing 750, and regulates the moving direction so that the drive shaft 731 can move in the axial direction without rotating.

The screw drive gear 732 has a tubular shape. The screw drive gear 732 is rotatably supported with respect to the casing 750. Ball bearings 732f and 732g are provided on the outer circumference of the screw drive gear 732. The ball bearings 732f and 732g support the screw drive gear 732 so that the casing 750 can rotate coaxially with the drive shaft 731.

The screw drive gear 732 does not move in the axial direction with respect to the casing 750. An inner screw surface 732c is formed on the inner circumference of the screw drive gear 732. The inner screw surface 732c is screwed with the ball screw 731c of the drive shaft 731.

When the screw drive gear 732 rotates, a rotational force acts on the drive shaft 731 by the ball screw 731c screwed with the inner screw surface 732c. The rotation of the drive shaft 731 is regulated by the detent 731h and the sliding groove 757. Therefore, the drive shaft 731 moves in the direction regulated by the slide groove 757, that is, in the axial direction of the drive shaft 731.

An outer gear 732d is formed on the outer circumference of the screw drive gear 732. The outer gear 732d is formed at a position sandwiched between the ball bearing 732f and the ball bearing 732g in the axial direction of the screw drive gear 732. In the screw drive gear 732, the outer gear 732d is located on the outermost side in the radial direction.

In the screw drive gear 732, the internal screw drive gear 732a on which the inner screw surface 732c is formed and the external screw drive gear 732b on which the outer gear 732d is formed can be integrally connected.

The outer gear 732d meshes with the drive gear 733d. The drive gear 733d has a rotation axis parallel to the axis of the drive shaft 731. The drive gear 733d is rotatably supported by a rotating shaft 734 parallel to the axis of the drive shaft 731. The rotating shaft 734 is supported by the casing 750 as a position separated outward in the radial direction of the drive shaft 731. The drive gear 733d is integrally formed with the coaxial drive gear 733e. The drive gear 733e has a larger diameter than the drive gear 733d. The drive gear 733e rotates integrally with the drive gear 733d.

The drive gear 733e meshes with the drive gear 735. The drive gear 735 has a rotation axis parallel to the axis of the drive shaft 731. The drive gear 735 is rotatably supported by a rotating shaft 736 parallel to the axis of the drive shaft 731. The rotating shaft 736 is supported by the casing 750 at a position outside the drive shaft 731 in the radial direction and further separated from the rotating shaft 734.

The drive gear 735 meshes with the drive gear 737. The drive gear 737 has a rotation axis parallel to the axis of the drive shaft 731. The drive gear 737 is fixed to the rotary drive shaft 705a of the drive unit 705 such as a motor parallel to the axis of the drive shaft 731. The rotary drive shaft 705a is located outside the drive shaft 731 in the radial direction and is further separated from the rotary drive shaft 736. The rotary drive shaft 705a is rotatably attached to the casing 750 in a penetrating state.

Screw drive gear 732, ball bearing 732f, 732g, inner screw surface 732c, outer gear 732d, drive gear 733d, drive gear 733e, rotary shaft 734, drive gear 735, rotary shaft 736, drive gear 737 are drive transmission units (hydraulic). The drive system of the generation unit 701) is configured.

The casing 750 includes a casing cylinder 751, a casing lid 752, a rear casing 753, a ring 754, and a lid portion 758. The casing cylinder 751 has a tubular shape. The casing lid 752 closes one end of the casing cylinder 751.

The rear casing 753 closes the other end of the casing cylinder 751. The ring 754 is provided between the casing cylinder 751 and the rear casing 753. The lid 758 closes the other end of the rear casing 753.

The casing cylinder 751 has an internal shape extending coaxially with the cylinder body 711, the piston 712, and the drive shaft 731. The inside of the casing cylinder 751 forms a storage space 755.
Inside the storage space 755, a cylinder body 711, a piston 712, an inner spring 721 and an outer spring 722 serving as a hydraulic urging member 720, and an end portion 751a of the drive shaft 731 are stored. The storage space 755 is open at an end position close to the piston 712, and is closed by the casing lid 752.

A piston 712 is connected and fixed to the casing lid 752. The end portion 712a of the piston 712 penetrates the casing lid 752. The storage space 755 is open at an end position close to the drive shaft 731 and is closed by the rear casing 753. A drive shaft 731 penetrates the rear casing 753. The storage space 755 is provided with a ring 754 at a position close to the rear casing 753.

The ring 754 is arranged around the drive shaft 731 coaxially with the drive shaft 731. The inner circumference of the ring 754 and the outer circumference of the drive shaft 731 are separated from each other. The ring 754 has an inner circumference equal to the inner circumference of the flange portion 711c, that is, the diameter dimension of the outer peripheral surface of the cylinder body 711. Further, the ring 754 has an outer diameter equal to the outer diameter dimension of the flange portion 711c.

The end portion 721b of the inner spring 721 and the end portion 722b of the outer spring 722, which serve as the hydraulic urging member 720, are in contact with the surface of the ring 754 facing the casing lid 752. A peripheral groove 754d is provided on the surface of the ring 754 facing the casing lid 752 so as to correspond to the peripheral groove 711d. The peripheral groove 754d is in contact with the end portion 721b of the inner spring 721 that serves as the hydraulic urging member 720. The end portion 722b of the outer spring 722 is in contact with the surface of the ring 754 facing the casing lid 752, which is the outer peripheral position of the peripheral groove 754d.

Drive system support portions 751k and 753k extending radially outward of the drive shaft 731 from the storage space 755 are provided between the casing cylinder 751 and the rear casing 753. The drive system support portions 751k and 753k are formed in a flange shape forming a part in the circumferential direction with respect to the casing cylinder 751 and the rear casing 753.

The drive system support portion 751k and the drive system support portion 753k are in contact with each other. Between the drive system support portion 751k and the drive system support portion 753k, a screw drive gear 732, a ball bearing 732f, 732g, an inner screw surface 732c, an outer gear 732d, a drive gear 733d, a drive gear 733e, a rotary shaft 734, and a drive The gear 735, the rotating shaft 736, and the drive gear 737 are sandwiched.

On the opposite surfaces of the drive system support portion 751k and the drive system support portion 753k, a screw drive gear 732, a ball bearing 732f, 732 g, an outer gear 732d, a drive gear 733d, a drive gear 733e, a rotary shaft 734, a drive gear 735, Concavities and convexities corresponding to the rotating shaft 736 and the drive gear 737 are formed.

The drive system support portion 751k and the drive system support portion 753k include a screw drive gear 732, a ball bearing 732f, 732 g, a drive gear 733d, a drive gear 733e, a rotary shaft 734, a drive gear 735, a rotary shaft 736, and a drive gear 737. It is supported between the opposing surfaces.
Further, a rotary drive shaft 705a penetrates the drive system support portion 751k. A drive unit 705 having a motor 705 m is attached to the drive system support unit 751k.

A ball bearing 732f is provided between the casing cylinder 751 and the screw drive gear 732. The ball bearing 732f rotatably supports the screw drive gear 732 with respect to the casing cylinder 751. A ball bearing 732 g is provided between the rear casing 753 and the screw drive gear 732. The ball bearing 732g rotatably supports the screw drive gear 732 with respect to the rear casing 753.

The rear casing 753 is formed with a rear space 756 that serves as a relief for the end portion 731b of the drive shaft 731 when the drive shaft 731 moves in the axial direction. A screw drive gear 732 is arranged at a position serving as a boundary between the rear space 756 and the storage space 755. That is, the drive shaft 731 is arranged so as to be movable in the axial direction at a position serving as a boundary between the rear space 756 and the storage space 755.

A sliding groove 757 is formed in the rear space 756 so as to increase the diameter. The slide groove 757 is located on the radial outer side of the drive shaft 731. The slide groove 757 regulates the rotation of the drive shaft 731 and enables the drive shaft 731 to move in the axial direction by sliding the detent 731h inside. The end of the rear space 756 is closed by a lid 758.

A detection switch (detection means) 760 capable of detecting that the drive shaft 731 is close is provided at a position close to the lid portion 758 of the rear space 756. The detection switch (detection means) 760 is connected to the control unit 706. The detection switch (detection means) 760 may be located in the slide groove 757.

A detection switch (detection means) 761 capable of detecting that the drive shaft 731 is close to the piston 712 is provided at a position close to the screw drive gear 732 in the rear space 756. The detection switch (detection means) 761 is connected to the control unit 706. The detection switch (detection means) 761 may be located in the slide groove 757.

The detection switch (detection means) 760 and the detection switch (detection means) 761 detect the axial position of the drive shaft 731. The detection switch (detection means) 760 and the detection switch (detection means) 761 can be of a contact type or a non-contact magnetic type.
For example, the detection switch (detection means) 760 is a limiter switch that can detect when a part of the drive shaft 731 comes into contact with the detection switch, or a magnetic switch that can detect a magnetic element provided on a part of the drive shaft 731. You can also do it.

In the detection switch (detection means) 760, when the drive shaft 731 moves from the storage space 755 toward the rear space 756, the drive shaft 731 reaches the position specified by the detection switch (detection means) 760 in the axial direction. Detect that. Further, in the detection switch (detection means) 761, when the drive shaft 731 moves from the rear space 756 toward the storage space 755, the drive shaft 731 is axially moved to the position specified by the detection switch (detection means) 761. Detect that it has arrived.

Here, when the detection switch (detection means) 760 outputs to the control unit 706 that the drive shaft 731 has reached a predetermined position in the axial direction, the control unit 706 that receives the signal drives the drive unit 705. Outputs a stop signal. As a result, the drive unit 705 stops driving. Therefore, the moving position of the drive shaft 731 is regulated by the position where the detection switch (detection means) 760 is installed.

Here, as for the drive stop in the drive unit 705, the drive of the motor 705 m may be stopped by stopping the power supply from the power supply 707.
Further, for the drive stop in the drive unit 705, the rotation of the rotary drive shaft 705a of the motor 705 m may be stopped by the exciting brake 705b.
Alternatively, the drive stop in the drive unit 705 may be in a state in which the excitation clutch 705d blocks the rotation of the rotary drive shaft 705a of the motor 705 m and does not transmit the drive to the drive shaft 731.

Alternatively, when the detection switch (detection means) 761 outputs to the control unit 706 that the drive shaft 731 has reached a predetermined position in the axial direction, the control unit 706 that has received the signal starts driving the drive unit 705. Output the signal to be. As a result, the drive unit 705 starts driving. Therefore, the moving position of the drive shaft 731 is regulated by the position where the detection switch (detection means) 761 is installed.

Here, the drive of the drive unit 705 may start driving the motor 705 m by starting the power supply from the power supply 707.
Further, the drive start in the drive unit 705 may release the rotation stop of the rotation drive shaft 705a of the motor 705 m by the excitation brake 705b.
Further, the drive start in the drive unit 705 may be in a state in which the rotation of the rotary drive shaft 705a of the motor 705 m is connected by the exciting clutch 705d and transmitted to the drive shaft 731.

In this way, the hydraulic pressure generating unit 701 can switch the driving state in the driving unit 705 by the signal of the control unit 706.
When the control unit 706 outputs a drive signal, the drive unit 705 is driven. The rotary drive shaft 705a is rotated by the drive of the drive unit 705. The rotation of the rotary drive shaft 705a causes the drive gear 737 attached to the rotary drive shaft 705a to rotate. The rotation of the drive gear 737 is transmitted to the meshing drive gear 735. The rotation of the drive gear 735 is transmitted to the meshing drive gear 733e.

The rotation of the drive gear 733e is transmitted to the drive gear 733d formed as a unit. The rotation of the drive gear 733d is transmitted to the meshing outer gear 732d, and the screw drive gear 732 rotates. The rotation of the outer gear 732d is transmitted to the inner threaded surface 732c of the integrally formed screw drive gear 732.

The rotation of the inner screw surface 732c of the screw drive gear 732 is transmitted to the ball screw 731c of the meshing drive shaft 731, and the drive shaft 731 rotates. Since the screw drive gear 732 is supported by ball bearings 732f and 732g, it does not move in the axial direction even if it rotates.

The drive shaft 731 is supported by the inner screw surface 732c, and the detent 731h is located inside the sliding groove 757 to regulate the moving direction of the drive shaft 731. Therefore, the drive shaft 731 moves in the axial direction when it is rotated. In this way, the drive transmission unit transmits the rotational driving force of the drive unit 705 of the motor or the like to the drive shaft 731, and the drive shaft 731 moves in the axial direction.

When the drive shaft 731 moves in the axial direction, the cylinder body 711 connected integrally also moves in the axial direction in the same manner. At this time, the piston 712 does not move because it is fixed to the casing lid 752. As a result, the cylinder body 711 and the piston 712 move relatively in the axial direction.

Here, the relative movement of the cylinder body 711 and the piston 712 changes the volume of the hydraulic space 714 inside the cylinder body 711. The pressure oil (driving fluid), which is an incompressible fluid filled in the hydraulic space 714, flows into or out of the hydraulic flow path 713 according to the volume change of the hydraulic space 714.

An inner spring 721 and an outer spring 722, which are hydraulic urging members 720 that come into contact with the flange portion 711c, apply urging force to the cylinder body 711.

In the present embodiment, the movable portion (expandable rod) 72 can be extended by normal push, that is, when the drive portion 705 is not driven. Therefore, in the hydraulic cylinder 710, the urging force from the hydraulic urging member 720 is in the direction in which the inner spring 721 and the outer spring 722 extend. That is, the urging force applied from the hydraulic urging member 720 to the cylinder body 711 is in the direction in which the cylinder body 711 is separated from the screw drive gear 732.
Therefore, the urging force of the hydraulic urging member 720 is applied so as to reduce the volume of the hydraulic space 714 in the cylinder body 711.

Further, in the present embodiment, normal push, that is, when the drive unit 705 is driven, the movable portion (expandable rod) 72 can be retracted. Therefore, in the hydraulic cylinder 710, the direction in which the drive shaft 731 is moved by the drive of the drive unit 705 is opposite to the urging force of the hydraulic urging member 720. That is, by driving the drive unit 705, the drive shaft 731 moves in a direction away from the piston 712.
Therefore, by driving the drive unit 705, the drive shaft 731 moves so that the volume of the hydraulic space 714 in the cylinder body 711 increases.

When the drive unit 705 is stopped, the hydraulic pressure generation unit 701 reduces the volume of the hydraulic space 714 due to the urging force of the hydraulic pressure urging member 720, as shown in FIG. As a result, the hydraulic space 714 product is pressurized. As a result, pressure oil (driving fluid), which is an incompressible fluid, flows from the hydraulic space 714 into the hydraulic pipe 702 via the hydraulic flow path 713. At this time, hydraulic pressure acts on the vacuum actuator (pressing cylinder) 70 to extend the tip portion 72a of the movable portion (expandable rod) 72.

Further, when the drive unit 705 is driven by the hydraulic pressure generating unit 701, the volume of the hydraulic space 714 increases due to the driving force of the drive unit 705, as shown in FIG. 7. As a result, the hydraulic space 714 product is depressurized. Pressure oil (driving fluid), which is an incompressible fluid, flows from the hydraulic pipe 702 into the hydraulic space 714 via the hydraulic flow path 713. At this time, hydraulic pressure acts on the vacuum actuator (pressing cylinder) 70, and the tip portion 72a of the movable portion (expandable rod) 72 retracts.

Further, in the hydraulic pressure generating unit 701, even if the cylinder body 711 overruns so as to be close to the casing lid 752 for some reason, as shown in FIG. 8, the flange portion 711c comes into contact with the casing lid 752 and the cylinder The movement of the main body 711 is stopped. This limits the reduction of the hydraulic space 714 to a predetermined range. Therefore, the hydraulic pressure generating unit 701 can prevent the excess pressure oil (driving fluid) from flowing into the vacuum actuator (pressing cylinder) 70.
In FIG. 8, the description of the detection switch (detection means) 761 is omitted.

As shown in FIGS. 9 to 11, the vacuum actuator 70 according to the present embodiment includes a guide rod 771, a cylinder portion 772, a telescopic rod (movable portion) 72, a flange portion 773, and an urging member (pressing spring). ) 73 and a casing 774.

As shown in FIGS. 9 to 11, the vacuum actuator 70 has a configuration in which a telescopic rod 72 having a diameter smaller than that of the casing 774 can be extended and retracted from one end of a substantially cylindrical casing 774. The vacuum actuator 70 is connected to the hydraulic pressure generating unit 701 via the hydraulic pipe 702.

The hydraulic pressure generating unit 701 supplies the vacuum actuator 70 with a hydraulic pressure that becomes a positive pressure or a negative pressure when the telescopic rod 72 is expanded and contracted, and can maintain the hydraulic pressure state at the end of the operation. Further, the contact state of the telescopic rod 72 with the object can be appropriately controlled.

As shown in FIGS. 9 to 11, the guide rod 771 has a substantially columnar shape, and has a through hole 771c in which the hydraulic drive unit 700 can supply the hydraulic pressure to one end surface 771a in the axial direction. The guide rod 771 is erected from the lid portion 774b of the casing 774 toward the inside of the casing 774.

The guide rod 771 may be integrated with the lid portion 774b. In the present embodiment, the guide rod 771 has a pipe-shaped outer guide rod 771g screwed into a convex portion 774h protruding at the center position of the concave portion 774g provided in the lid portion 774b. As a result, the outer guide rod 771 g is centered with respect to the lid portion 774b. The through hole 771c is continuously formed inside the lid portion 774b, the convex portion 774h, and the outer guide rod 771g.

The cylinder portion 772 has a bottomed cylindrical shape with the other end open. The cylinder portion 772 is coaxial with the guide rod 771. The cylinder portion 772 is arranged so as to slidably cover one end surface 771a of the guide rod 771. One end surface 771a of the guide rod 771 and the inner surface of the cylinder portion 772 form a drive space 777 inside the one end surface 771a.

A through hole 771c communicates with the drive space 777. As shown in FIG. 10, a hydraulic pipe 702 is connected to the through hole 771c. The drive space 777 is connected to the hydraulic pressure generating unit 701 via the hydraulic pipe 702.
Hydraulic oil is supplied from the hydraulic pressure generating unit 701 to the drive space 777 via the hydraulic pipe 702, and the drive space 777 is pressurized. Alternatively, the hydraulic oil is returned to the hydraulic pressure generating unit 701 via the hydraulic pipe 702 to the drive space 777, and the drive space 777 is depressurized.

A telescopic rod 72 is provided at one end 772a of the cylinder 772 at a position on the upper surface in the drawing. The telescopic rod 72 has a columnar shape extending outward in the axial direction of the cylinder portion 772. The telescopic rod 72 is coaxial with the cylindrical cylinder portion 772. The telescopic rod 72 is coaxial with the columnar guide rod 771.

The telescopic rod 72 is integrated with the cylinder portion 772, and is movable in the axial direction as the cylinder portion 772 slides with respect to the guide rod 771. The diameter of the telescopic rod 72 is set smaller than the diameter of the cylinder portion 772.

The diameter of the telescopic rod 72 is set smaller than the diameter of the guide rod 771. The telescopic rod 72 may be integrated with the cylinder portion 772. In the telescopic rod 72 of the present embodiment, the telescopic rod 72 is screwed into the convex portion 772h protruding from the shaft center position of the cylinder portion 772. As a result, the telescopic rod 72 is centered on the lid portion 774b.

A flange portion 773 is provided around the other end portion 772b of the cylinder portion 772 at an outer peripheral position. The flange portion 773 extends radially outward to the other end portion 772b of the cylinder portion 772. The flange portion 773 has a predetermined thickness.

The flange portion 773 is formed integrally with the cylinder portion 772.
The other end of the urging member (spring) 73 comes into contact with the pressing surface 773a close to the telescopic rod 72 to the flange portion 773.

The urging member (spring) 73 has a spiral shape, and urges the flange portion 773 in the degenerate direction of the telescopic rod 72.
The urging member (spring) 73 is located on the outer periphery of the cylinder portion 772 coaxially with the cylinder portion 772. One end of the urging member (spring) 73 comes into contact with the casing 774.

The casing 774 includes a cylindrical cylindrical portion 774c, a lid portion 774b that closes the other end of the cylindrical portion 774c, and a vacuum side lid portion 774a that closes the through hole 774m provided at one end of the cylindrical portion 774c. Have.

At the center position of the lid portion 774b, a guide rod 771 is erected toward the inside of the casing 774. The vacuum side lid portion 774a has a through hole 775 through which the telescopic rod 72 penetrates in the center thereof, and faces the vacuum side. The other end of the cylindrical portion 774c is fitted into the recess 774g provided in the lid portion 774b.

A buffer space 776 is formed inside the cylindrical portion 774c, the lid portion 774b, and the vacuum side lid portion 774a.
The cylinder portion 772 and the urging member (spring) 73 are housed in the buffer space 776. In the buffer space 776, the cylinder portion 772 is reciprocally movable. The buffer space 776 is a space that cushions the hydraulic pressure when it leaks from the drive space 777 before it leaks to the outside (chamber) Ch on the vacuum side.

A step 774d is formed on the inner surface of the cylindrical portion 774c that serves as the buffer space 776. The inner surface of the cylindrical portion 774c has a larger diameter at a position closer to the lid portion 774b than at a position closer to the vacuum side lid portion 774a.
The outer edge portion of the pressing surface 773a of the flange portion 773 comes into contact with the step 774d. The step 774d is a regulating portion that regulates the position of the cylinder portion 772 when it is extended in the moving range.

The outer peripheral surface of the flange portion 773 is not in contact with the inner surface of the cylindrical portion 774c that serves as the buffer space 776. The flange portion 773, which is the other end portion 772b of the cylinder portion 772, comes into contact with the recess 774g provided in the lid portion 774b. The recess 774g is a regulating portion that regulates the position of the cylinder portion 772 on the degenerate side in the moving range.

The cylindrical portion 774c and the vacuum side lid portion 774a are connected and fixed. A step 774e is formed at a position of the cylindrical portion 774c close to the vacuum side lid portion 774a. The position closer to the vacuum side lid portion 774a than the step 774e of the cylindrical portion 774c is further reduced in diameter to form an atmospheric side buffer space 778 having an inner diameter dimension equal to the outer diameter dimension of the cylinder portion 772.
One end of the urging member (spring) 73 is in contact with the step 774e.

An outer peripheral surface (sliding surface) 772 m of the cylinder portion 772 is slidably in contact with the inner peripheral surface of the atmospheric buffer space 778. As shown in FIG. 10, a through hole 778s communicating with the outside is formed in the atmospheric side buffer space 778 in the radial direction of the cylindrical portion 774c. The atmospheric buffer space 778 communicates with the atmospheric side through through holes 778s.

The through hole 775 has a diameter smaller than that of the atmospheric buffer space 778. The through hole 775 has a diameter dimension substantially equal to the outer diameter of the telescopic rod 72.
The casing 774 and the guide rod 771 form a fixing portion 71.

The vacuum actuator 70 is provided with a sealing member as a multi-stage sealing means so that oil, which is a working fluid, does not leak to the chamber Ch on the vacuum side during hydraulic drive. Specifically, four-stage sealing members 77a1 to 77e are provided from the drive space 777 inside the cylinder portion 772 to which hydraulic pressure is supplied to the outside inside the chamber Ch on the vacuum side where the telescopic rod 72 extends. ..

Two-stage sealing members 77a1 to 77e are provided on the sliding surface 771f on the outer periphery of the guide rod 771 that slides on the inner surface of the cylinder portion 772.
An O-ring (sealing member) 77a1 and a wear ring (sealing member) 77a2 are provided around the same groove on the sliding surface 771f on the outer periphery of the guide rod 771 so as to be hermetically sealed from the drive space 777 to the outside.

The wear ring (sealing member) 77a2 is provided around the outside of the O-ring (sealing member) 77a1 in the radial direction.
The wear ring (sealing member) 77a2 is in contact with the inner surface of the cylinder portion 772 and slides on the sliding surface 772f on the inner circumference of the cylinder portion 772.

Further, on the sliding surface 771f on the outer periphery of the guide rod 771, the wear ring (sealing member) 77b is flush with the sliding surface 771f at a position separated from the drive space 777 by the wear ring (sealing member) 77a2. Is installed around.

The O-ring (sealing member) 77a1, the wear ring (sealing member) 77a2, and the wear ring (sealing member) 77b form the first-stage sealing member. The wear ring (sealing member) 77b is a backup ring.

Further, on the sliding surface 771f on the outer periphery of the guide rod 771, the Y packing (sealing member) 77c1 is located at a position separated from the drive space 777 by the wear ring (sealing member) 77b so as to be flush with the sliding surface 771f. , Sealing (sealing member) 77c2 is provided around the same groove.

Both the Y packing (sealing member) 77c1 and the sealing (sealing member) 77c2 are in contact with the inner surface of the cylinder portion 772. The Y packing (sealing member) 77c1 and the sealing (sealing member) 77c2 slide on the sliding surface 772f on the inner circumference of the cylinder portion 772.
The sealing member 77c2 is arranged at a position separated from the drive space 777 by the Y packing (sealing member) 77c1.

Further, on the sliding surface 771f on the outer periphery of the guide rod 771, a wear ring (sealing member) 77d is provided so as to be flush with the sliding surface 771f at a position separated from the drive space 777 by the sealing (sealing member) 77c2. Is installed around.
The Y packing (sealing member) 77c1, the sealing (sealing member) 77c2, and the wear ring (sealing member) 77d form a second-stage sealing member. The wear ring (sealing member) 77d is a backup ring.

A Y packing (sealing member) 77e is provided around the inner peripheral surface of the through hole 774m provided at a position close to the vacuum side lid portion 774a in the cylindrical portion 774c of the casing 774.
The Y packing (sealing member) 77e slides on the outer peripheral sliding surface 772m located close to one end surface 771a of the cylinder portion 772. The Y packing (sealing member) 77e is a third-stage sealing member.

An O-ring (sealing member) 77f is provided around the inner peripheral surface of the through hole 775 in the vacuum side lid portion 774a of the casing 774.
The O-ring (sealing member) 77f slides on the outer peripheral surface (sliding surface) 72m of the telescopic rod 72. The Y packing (sealing member) 77e is a fourth-stage sealing member.

Further, in addition to the sealing members 77a1 to 77e, an O-ring (sealing member) 77p is arranged at the screwing position between the convex portion 774h of the casing 774 and the outer guide rod 771g.
An O-ring (sealing member) 77q is arranged between the cylindrical portion 774c of the casing 774 and the recess 774g provided in the lid portion 774b.
An O-ring (sealing member) 77r is arranged around the through hole 775 in the vacuum side lid portion 774a for sealing with the chamber Ch on the vacuum side.

In the vacuum actuator 70 of the present embodiment, the sealing members 77a1 to 77r can be made of the following materials.
The wear ring (sealing member) 77a2 is made of a fluororesin. The wear ring (sealing member) 77b is made of HNBR (hydrogenated nitrile rubber). The Y packing (sealing member) 77c1 is made of HNBR (hydrogenated nitrile rubber). The sealing member 77c2 is made of a fluororesin. The wear ring (sealing member) 77d is made of a fluororesin. The Y packing (sealing member) 77e is made of HNBR (hydrogenated nitrile rubber). The O-ring (sealing member) 77f is made of HNBR (hydrogenated nitrile rubber). The O-ring (sealing member) 77p, the O-ring (sealing member) 77q, and the O-ring (sealing member) 77r are all made of HNBR (hydrogenated nitrile rubber).

The telescopic rod 72 is made of stainless steel. The guide rod 771 is made of stainless steel. The cylinder portion 772 is made of stainless steel. The cylindrical portion 774c, the lid portion 774b, and the vacuum side lid portion 774a of the casing 774 are all made of aluminum. The material in these configurations can be appropriately changed according to the application of the vacuum actuator 70.

Further, a sliding surface 771f on the outer circumference of the guide rod 771 made of stainless steel, a sliding surface 772f on the inner circumference of the cylinder portion 772, a sliding surface 772m on the outer circumference located close to one end surface 771a of the cylinder portion 772, and a telescopic rod. The sliding surfaces on the outer circumference of the 72 are all subjected to surface treatment such as chrome plating.

In the vacuum actuator 70 of the present embodiment, the telescopic rod 72 is degenerated in the normal pull, that is, in the non-operating state. In this state, the flange portion 773 is urged by the urging member (spring) 73 in the degenerate direction of the telescopic rod 72.

Next, in the hydraulic drive unit 700, the hydraulic oil supplied from the hydraulic pressure generation unit 701 by the drive of the drive unit 705 flows into the drive space 777 via the hydraulic pipe 702. Then, the drive space 777 is pressurized, and the cylinder portion 772 moves toward the through hole 775 by overcoming the urging force of the urging member (spring) 73. At this time, the cylinder portion 772 moves inside the buffer space 776.

The outer edge portion of the pressing surface 773a of the flange portion 773 comes into contact with the step 774d, and the movement of the cylinder portion 772 ends. As a result, as shown in FIG. 11, the telescopic rod 72 expands, and the telescopic rod 72 advances toward the chamber Ch on the vacuum side. The extended telescopic rod 72 presses the object. In this state, by maintaining the hydraulic pressure supplied from the hydraulic pressure generating unit 701 to the drive space 777, the telescopic rod 72 can be maintained in the extended state.

In order to change the telescopic rod 72 from the extended state to the retracted state, the hydraulic pressure supplied from the hydraulic pressure generating unit 701 to the drive space 777 is reduced. Alternatively, the hydraulic oil is returned from the drive space 777 to the hydraulic pressure generating unit 701 via the hydraulic pipe 702. Then, the cylinder portion 772 moves toward the lid portion 774b by the urging force acting on the flange portion 773 from the urging member (spring) 73. As a result, as shown in FIGS. 9 and 10, the telescopic rod 72 is in a degenerate state.

Further, in the vacuum actuator (pressing cylinder) 70 of the present embodiment, when oil leaks from the drive space 777 to the hydraulic space 714 via the hydraulic pipe 702, it can be detected. Specifically, when the amount of oil contained in the drive space 777 decreases, the volume of the hydraulic space 714 decreases due to the urging force of the hydraulic urging member 720. As a result, the reciprocating operating range of the drive shaft 731 in the axial direction moves in the direction close to the piston 712 from the assumed position.
Therefore, the detection signal is output from the detection switch (detection means) 761 at an earlier stage in the axial movement of the drive shaft 731 as compared with the assumed position. Therefore, it is possible to detect that the amount of oil contained in the drive space 777 has decreased.

In this embodiment, the same effect as that of the above-described embodiment can be obtained.

Hereinafter, a fifth embodiment of the hydraulic drive system according to the present invention will be described with reference to the drawings.
FIG. 12 is a schematic explanatory view showing a vacuum apparatus including the hydraulic drive system according to the present embodiment.
The present embodiment differs from the first to fourth embodiments described above in that it relates to a vacuum device provided with a hydraulic drive system, and the other corresponding components are described with the same reference numerals. Is omitted.

The vacuum apparatus 200 in the present embodiment is an apparatus that performs vacuum processing such as side sputtering type sputtering.
The vacuum apparatus (sputtering apparatus) 200 in the present embodiment has a load / unload chamber for carrying in / out a substantially rectangular glass substrate (processed substrate) G, and, for example, a ZnO system or an In ₂ O ₃ system on the glass substrate G. It is provided with a pressure-resistant film forming chamber (chamber) 201 for forming a film such as a transparent conductive film of the above by a sputtering method, and a transport chamber between the film forming chamber 201 and the load / unload chamber.
Note that FIG. 12 shows only the film forming chamber 201.

The chamber Ch in the first embodiment or the second embodiment is referred to as a film forming chamber 201 in this embodiment.
In the vacuum apparatus (sputtering apparatus) 200 of the present embodiment, as shown in FIG. 12, a backing plate (cathode electrode) 206, a power supply 206a, and a gas introducing means 207a are provided inside the film forming chamber (chamber) 201. , High vacuum exhaust means 207b, and so on.

The backing plate (cathode electrode) 206 holds an erected target as a means of supplying the film forming material. The power supply 206a applies a negative potential sputtering voltage to the backing plate 206. The gas introducing means 207a introduces gas into the film forming chamber (chamber) 201. The high vacuum exhaust means 207b is a turbo molecular pump or the like that draws a high vacuum inside the film forming chamber 201.

The backing plate 206 is erected inside the film forming chamber 201 at a position farthest from the transport port 204a communicating with the transport chamber. The target is fixed to the backing plate 206 on the front side facing substantially parallel to the glass substrate G.
The backing plate (cathode electrode) 206 acts as an electrode that applies a negative potential sputtering voltage to the target.

The backing plate 206 is connected to a power supply 206a that applies a negative potential sputtering voltage. A magnetron magnetic circuit for forming a predetermined magnetic field on the target is installed on the back side of the backing plate (cathode electrode) 206.

As shown in FIG. 12, the inside of the film forming chamber 201 is composed of a front space 201a which is the front surface side of the glass substrate G and a back space 201b which is the back surface side of the glass substrate G at the time of film formation. A backing plate (cathode electrode) 206 to which a target is fixed is arranged in the front space 201a of the film forming chamber 201. The back side space 201b of the film forming chamber 201 is provided with a film forming port 204b that opens toward the front space 201a. A protective plate frame 202 is provided around the film forming port 204b.

A substrate holding means (holding means) for holding the glass substrate G so as to face the target during film formation may be provided inside the back side space 201b so as to be swingable in the lateral direction. The substrate holding means (holding means) has a holding portion 203 that holds the glass substrate G from the back surface.
The holding unit 203 rotates between the horizontal mounting position, which is a substantially horizontal position, and the vertical processing position, which is raised to a substantially vertical position, due to the rotation of the swinging shaft around the axis by the rotation driving unit. It is possible.

A transport port 204a is located at an extension position on the surface of the holding portion 203, which is a horizontal mounting position, so that the glass substrate G transported from the transport chamber can be mounted. The surface of the holding portion 203, which is the vertical processing position, is positioned so as to substantially close the film forming port 204b, so that the glass substrate G surface faces the cathode electrode 206 and film formation is possible.

When the glass substrate G is carried in or out, the holding portion 203 has a lift pin that protrudes upward from the holding portion 203 that is positioned horizontally and supports the glass substrate G above the holding portion 203, and a lift pin. A lift pin moving portion 70 that moves the glass up and down is arranged.

In the present embodiment, for example, the lift pin moving portion 70 is the vacuum actuator (lift pin moving portion) 70 in the first embodiment or the second embodiment.
Further, the lift pin is coaxially attached to the tip of the telescopic rod 72.
In FIG. 12, the vacuum actuator (lift pin moving portion) 70 is shown as an arrow.

The vacuum actuator (lift pin moving portion) 70 can be driven while maintaining the hermeticity of the chamber 201. With this configuration, when the glass substrate G is carried in or out, the glass substrate G can be freely transferred between the holding unit 203 and the robot hand of the transfer device.

At the vertical processing position of the holding portion 203, there is a pressing portion 70 that presses the glass substrate G against the mask 205.
In the present embodiment, for example, the pressing portion 70 is the vacuum actuator (pressing portion) 70 in the first embodiment or the second embodiment.

The mask 205 is replaced after a predetermined number of film forming treatments, and at that time, an alignment means 70 for aligning the replaced mask 205 with the protective plate frame 202 is provided at a lower position of the film forming port 204b. ..
In the present embodiment, for example, the alignment means 70 is the vacuum actuator (alignment means) 70 in the first embodiment. With this configuration, the vacuum actuator (alignment means) 70 can bring the tip end portion 72a of the telescopic rod 72 into contact with a predetermined object and press it to move or align it.

Each of the vacuum actuators 70 of the present embodiment can exert a large urging force (pushing pressure) in a vacuum atmosphere with a smaller volume than other drive types. Further, the vacuum actuator 70 of the present embodiment can change not only the pressing force set to a fixed value but also the pressing force.
Also in this embodiment, each vacuum actuator 70 can press the object in a state where the possibility of oil leakage in the chamber 201 is extremely reduced.

In this embodiment, the same effect as that of the above-described embodiment can be obtained.

Hereinafter, a sixth embodiment of the partition valve provided with the vacuum actuator according to the present invention will be described with reference to the drawings.
In this embodiment, the difference from the third and fourth embodiments described above is that the pendulum valve body of the partition valve is used, and the other corresponding components are designated by the same reference numerals and the description thereof will be omitted. ..

FIG. 13 is a cross-sectional view orthogonal to the flow path showing the configuration of the partition valve in the present embodiment.
14 to 16 are cross-sectional views along a flow path showing the configuration of the partition valve in the present embodiment, and are views showing the case where the valve body is arranged at the retractable operation position (FREE). FIG. 14 corresponds to the line segment AOC in FIG. FIG. 15 is an enlarged view showing a main part along the line segment AO in FIG. FIG. 16 is an enlarged view showing a main part along the line segment BOC in FIG. FIG. 17 is an enlarged view showing a main part of the valve frame urging portion in FIG.

18 to 21 are cross-sectional views taken along a flow path showing the configuration of the partition valve in the present embodiment, and correspond to FIGS. 14 to 17, and the valve body is in the valve closed position (positive pressure or no differential pressure). It is a figure which shows the case which is arranged.

22 to 24 are cross-sectional views along a flow path showing the configuration of the partition valve according to the present embodiment, and are views corresponding to FIGS. 14 to 16 and showing a case where the valve body is arranged at the reverse pressure position. Is.
25 and 26 are perspective views showing the arrangement of the valve box urging portion in the valve box in FIG.

[Pendulum type partition valve]
The partition valve 100 according to the present embodiment is a pendulum type slide valve as shown in FIGS. 13 to 26.

The partition valve 100 partitions the flow path H connecting the first space and the second space, and connects the first space and the second space with the state in which the flow path H is closed and the state in which the partition state is opened. Switch between states.
The partition valve 100 includes a valve box 10, a neutral valve body 5, and a rotating shaft 20. A hollow portion 11 is formed inside the valve box 10. The valve box 10 is composed of a frame having a hollow portion 11. The valve box 10 is provided with a first opening 12a and a second opening 12b so as to face each other with the hollow portion 11 interposed therebetween.

The first opening 12a is exposed in the first space. The second opening 12b is exposed in the second space. The first opening 12a to the second opening 12b are communicated with each other via the hollow portion 11. The flow path H is set from the first opening 12a toward the second opening 12b. The partition valve 100 is inserted between the first space and the second space. The direction along the flow path H is referred to as the flow path H direction.

A neutral valve body 5 is arranged in the hollow portion 11 of the valve box 10. The neutral valve portion 30 is connected to the rotating shaft 20 as a position switching portion. The rotating shaft 20 has an axis extending substantially parallel to the flow path H direction. The rotating shaft 20 penetrates the valve box 10. The rotary shaft 20 can be rotated by a drive device (not shown). A neutral valve body 5 is fixed to one end of the rotating shaft 20 via a connecting member (not shown). The rotating shaft 20 functions as a position switching portion of the neutral valve body 5.
Alternatively, the neutral valve body 5 may be directly connected to the rotating shaft 20 without a connecting member (not shown).

The neutral valve body 5 can close the first opening 12a and / or the second opening 12b. In the present embodiment, the first opening 12a can be closed. The neutral valve body 5 operates between the valve closing position and the valve opening position. At the valve closing position, the neutral valve body 5 is closed with respect to the first opening 12a (FIG. 18). At the valve opening position, the neutral valve body 5 is in an open state (FIG. 14) retracted from the first opening 12a.
The neutral valve body 5 is composed of a neutral valve portion 30 and a movable valve portion 40.

The neutral valve portion 30 is arranged so as to be included in a plane parallel to the direction orthogonal to the axis of the rotation axis 20. As shown in FIG. 13, the neutral valve portion 30 has a circular portion 30a and a rotating portion 30b. The circular portion 30a is arranged so as to overlap the movable valve portion 40 in the direction of the flow path H. The rotating portion (arm portion) 30b is formed in an arm shape in which two arms extend from the rotating shaft 20 toward the circular portion 30a. The rotating portion 30b rotates the circular portion 30a with the rotation of the rotating shaft 20. The rotating shaft 20 and the neutral valve portion 30 rotate with respect to the valve box 10, but their positions do not change in the flow path H direction.

The movable valve portion 40 has a substantially disk shape. The movable valve portion 40 is connected to the neutral valve portion 30 so as to be slidable only in the thickness direction (flow path H direction). The movable valve portion 40 includes two movable valve frame portions 60 (slide valve plate) and a movable valve plate portion 50 (counter plate).
The movable valve frame portion 60 has a substantially annular shape that is substantially concentric with the circular portion 30a. The movable valve frame portion 60 is fitted to the circular portion 30a.

The movable valve frame portion 60 is slidable with respect to the neutral valve portion 30 in the flow path H direction. A valve frame urging portion 90 (auxiliary spring) is arranged between the movable valve frame portion 60 and the neutral valve portion 30. The movable valve frame portion 60 is connected to the neutral valve portion 30 by a valve frame urging portion 90 (auxiliary spring) so that its position in the flow path H direction can be changed.

The movable valve plate portion 50 is a plate body having a circular contour substantially concentric with the circular portion 30a. The movable valve plate portion 50 is fitted to the movable valve frame portion 60.
The movable valve frame portion 60 is arranged so as to surround the periphery of the movable valve plate portion 50. The movable valve plate portion 50 and the movable valve frame portion 60 are connected by a valve plate urging portion 80 (holding spring).

The movable valve plate portion 50 and the movable valve frame portion 60 can slide relative to each other in the reciprocating direction indicated by reference numerals B1 and B2 in FIG. The reciprocating directions B1 and B2 are directions perpendicular to the surfaces of the movable valve plate portion 50 and the movable valve frame portion 60. The reciprocating directions B1 and B2 are the flow path H directions parallel to the axial direction of the rotating shaft 20.
A counter cushion 51 is provided around the movable valve plate portion 50 at a position facing (contacting) the inner surface 10B of the valve box.

The counter cushion 51 is a sealing portion made of an O-ring or the like, which is an annular elastic body. The counter cushion 51 can be brought into close contact with the inner surface 10B of the valve box, which is the peripheral edge of the second opening 12b when the valve is closed. The counter cushion 51 is pressed by the movable valve plate portion 50 and the valve box inner surface 10B. As a result, the first space and the second space are in a partitioned state. The counter cushion 51 elastically deforms when the movable valve plate portion 50 and the valve box inner surface 10B collide with each other to alleviate the impact.
The movable valve plate portion 50 is provided with a vent hole 53. When the movable valve plate portion 50 and the valve box inner surface 10B collide with each other, a closed space is formed by the movable valve plate portion 50, the valve box inner surface 10B, and the counter cushion 51. The vent hole 53 removes gas from this enclosed space.

An inner peripheral crank portion 50c is formed in the entire region near the outer periphery of the movable valve plate portion 50. The inner peripheral crank portion 50c has a sliding surface 50b parallel to the flow path H direction. An outer peripheral crank portion 60c is formed in the entire region near the inner circumference of the movable valve frame portion 60. The outer peripheral crank portion 60c has a sliding surface 60b parallel to the flow path H direction.

The outer peripheral crank portion 60c and the inner peripheral crank portion 50c are fitted. The sliding surface 50b and the sliding surface 60b are positioned so as to be slidable with each other and face each other.
A sliding seal packing 52 made of an O-ring or the like is arranged between the outer peripheral crank portion 60c and the inner peripheral crank portion 50c. The sliding seal packing 52 maintains the sealed state of the sliding surface 50b and the sliding surface 60b during sliding.

A valve frame seal packing 61 is provided around the movable valve frame portion 60 on a surface facing (contacting) the inner surface of the valve box 10. The valve frame seal packing 61 is a seal portion including an annular O-ring or the like. The valve frame seal packing 61 comes into contact with the valve box inner surface 10A which is the peripheral edge of the first opening 12a when the valve is closed, and is pressed by the movable valve frame portion 60 and the valve box inner surface 10A. As a result, the first space and the second space are in a partitioned state.

The valve frame seal packing 61 and the sliding seal packing 52 are arranged on substantially the same cylindrical surface. The valve frame seal packing 61 and the sliding seal packing 52 are arranged so as to overlap the lines R shown in FIGS. 15 to 16. Therefore, a back pressure cancellation rate of about 100% can be obtained.

The valve frame urging portion 90 is arranged between the circular portion 30a of the neutral valve portion 30 and the position regulating portion 65 of the movable valve frame portion 60 that overlaps the circular portion 30a when viewed in the direction of the flow path H. The valve frame urging portion 90 urges the neutral valve portion 30 toward the central position in the flow path H direction of the movable valve frame portion 60. A plurality of valve frame urging portions 90 are arranged at equal intervals in the circumferential direction of the circular portion 30a. The valve frame urging portion 90 is an elastic member and is a leaf spring. The valve frame urging portion 90 (leaf spring) is arranged so that its longitudinal direction is along the circumferential direction of the circular portion 30a.

As shown in FIG. 17, both end portions of the valve frame urging portion 90 (leaf spring) are locked to the circular portion 30a of the neutral valve portion 30 by the fixing pin 92 and the fixing pin 93. Both end portions of the valve frame urging portion 90 (leaf spring) are locked to the circular portion 30a with the ring-shaped member 92a and the ring-shaped member 92b sandwiched in the thickness direction, respectively. The central portion of the valve frame urging portion 90 (leaf spring) is locked to the position regulating portion 65 of the movable valve frame portion 60 by the printing pressure pin 91.

In the valve open state (FIG. 14) of the sluice valve 100, the separation distance between the neutral valve portion 30 (arm) and the movable valve frame portion 60 in the flow path H direction becomes narrow. The valve frame urging portion 90 has a reduced dimension in the height direction (thickness direction). As a result, the valve frame urging portion 90 is formed with a curved portion 90A that bends in the thickness direction (FIG. 17).

On the other hand, when the sluice valve 100 is closed (FIG. 18), the separation distance between the neutral valve portion 30 (arm) and the movable valve frame portion 60 in the flow path H direction becomes wide. As a result, the valve frame urging portion 90 is elongated in the height direction (thickness direction). That is, in the valve frame urging portion 90, the curved portion 90A is eliminated (FIG. 21).

The valve frame urging portion 90 has a structure that promotes a mechanical separation operation that separates the movable valve frame portion 60 from the inner surface of the valve box 10 when the valve frame portion 90 changes from the valve closed state (FIG. 18) to the valve open state (FIG. 14). Has. Further, the valve frame urging portion 90 also has a function of holding the positions of the movable valve frame portion 60 in the radial direction and the circumferential direction with respect to the neutral valve portion 30 (arm).

The valve frame urging portion 90 has a function of connecting the movable valve frame portion 60 to the neutral valve portion 30 so that the position in the flow path direction can be changed, and the movable valve frame portion 60 at the central position in the flow path H direction. It has the function of urging toward.

A plurality of valve box urging portions 70 are built in the valve box 10. The valve box urging portion 70 is the vacuum actuator 70 according to the first to fourth embodiments described above. The vacuum actuator (valve box urging portion) 70 urges the movable valve frame portion 60 in the direction close to the first opening 12a in the flow path H direction.

The vacuum actuator (valve box urging portion) 70 constitutes an elevating mechanism that presses the movable valve frame portion 60 in the direction toward the seal surface. The plurality of vacuum actuators (valve box urging portions) 70 are arranged at positions where the movable valve frame portion 60 can be urged without changing its posture. The plurality of vacuum actuators (valve box urging portions) 70 are provided at equal intervals along the periphery of the second opening 12b.

In FIGS. 25 and 26, as the arrangement of the valve box urging portions 70 separated from each other, the four valve box urging portions 70 are separated from each other at the same angle position (90 degrees) when viewed from the center O of the valve body. An example of the configuration arranged in this way is shown. The angular position of the vacuum actuator (valve box urging portion) 70 when viewed from the center O is configured so as not to overlap with the angular position of the valve plate urging portion 80 and the valve frame urging portion 90.

The vacuum actuator (valve box urging portion) 70 has a hydraulic drive portion (fixed portion) 71 and a telescopic rod (movable portion) 72. The hydraulic drive unit (fixed portion) 71 is arranged to be embedded inside the frame which is outside the valve box inner surface 10B with respect to the hollow portion 11. The telescopic rod (movable portion) 72 is arranged so as to be extendable in the direction close to the first opening 12a from the fixed portion 71 along the flow path H direction.

The vacuum actuator (valve box urging unit) 70 is connected to a hydraulic drive unit (incompressible fluid drive unit) 700 and is driven by hydraulic pressure. The hydraulic drive unit (incompressible fluid drive unit) 700 is the hydraulic drive unit (incompressible fluid drive unit) 700 in the first to fourth embodiments described above.

When the valve is changed from the valve open state (FIG. 14) to the valve closed state (FIG. 18), the vacuum actuator (valve box urging portion) 70 extends the telescopic rod (movable portion) 72 by hydraulic pressure. At this time, the vacuum actuator (valve box urging portion) 70 urges the movable valve frame portion 60 in contact with the tip portion 72a. As a result, the movable valve frame portion 60 moves toward the first opening 12a in the flow path H direction. The valve frame seal packing 61 is in close contact with the inner surface 10A of the valve box around the first opening 12a. In the plurality of vacuum actuators (valve box urging portions) 70, the extension operations of the telescopic rods (movable portions) 72 can all be operated substantially at the same time.

The valve plate urging portion 80 (holding spring) is built in the movable valve portion 40. The valve plate urging portion 80 urges each other in a direction in which the thickness dimension of the movable valve frame portion 60 and the movable valve plate portion 50 in the flow path H direction becomes smaller. The valve plate urging portion 80 interlocks the movable valve plate portion 50 with the moving reciprocating directions B1 and B2 of the movable valve frame portion 60.

A plurality of valve plate urging portions 80 are arranged in a region where the movable valve frame portion 60 and the movable valve plate portion 50 overlap in the direction of the flow path H. The plurality of valve plate urging portions 80 are arranged at equal intervals in the circumferential direction of the movable valve frame portion 60. The valve plate urging portion 80 is preferably provided at three or more locations, and is provided at a distance from each other.

The valve plate urging portion 80 guides (regulates) the movement of the movable valve plate portion 50 by the long shaft portion of the bolt-shaped guide pin 81. The guide pin 81 is fixed to the movable valve frame portion 60. The holding spring forming the valve plate urging portion 80 is formed of, for example, an elastic member such as a spring or rubber.

The guide pin 81 is made of a rod-shaped body having a uniform thickness. The guide pin 81 penetrates the valve plate urging portion 80. The guide pin 81 is erected in the flow path H direction and fixed to the movable valve frame portion 60. The guide pin 81 is fitted in the hole portion 50h formed in the movable valve plate portion 50. The guide pin 81 guides the position regulation of the movable valve plate portion 50 and the movable valve frame portion 60.

When the movable valve plate portion 50 and the movable valve frame portion 60 slide with each other by the valve plate urging portion 80, the sliding directions (axises indicated by reference numerals Q) are maintained in the reciprocating directions B1 and B2. Further, even when the movable valve plate portion 50 and the movable valve frame portion 60 slide, the movable valve plate portion 50 and the movable valve frame portion 60 can be moved in parallel without changing their postures.

Hereinafter, the operation of the partition valve 100 according to the present embodiment will be described in detail.

First, in the partition valve 100 according to the present embodiment, consider a state in which the movable valve portion 40 is in a retracted position as a hollow portion 11 in which the flow path H is not provided. At this time, the movable valve portion 40 is not in contact with the valve box inner surface 10A and the valve box inner surface 10B. In this state, the rotation shaft 20 is rotated in the direction indicated by the reference numeral R1 (the direction intersecting the direction of the flow path H). Then, the neutral valve portion 30 and the movable valve portion 40 rotate and move along the direction R1 by a pendulum motion. By this rotation, the movable valve portion 40 moves from the retracted position to the valve opening shielding position (sliding preparation position) which is a position facing the first opening 12a.

At the valve opening shielding position (sliding preparation position), the vacuum actuator (valve box urging portion) 70 extends the telescopic rod (movable portion) 72 in the direction close to the first opening 12a in the flow path H direction. .. The telescopic rod (movable portion) 72 abuts on the movable valve frame portion 60 and presses it. The movable valve frame portion 60 moves in a direction close to the first opening 12a.
The movable valve frame portion 60 comes into contact with the valve box inner surface 10A by the vacuum actuator (valve box urging portion) 70. At this time, the valve frame seal packing 61 comes into close contact with the valve box inner surface 10A located around the first opening 12a. As a result, the flow path H is closed (valve closing operation).

On the contrary, the vacuum actuator (valve box urging portion) 70 retracts the telescopic rod (movable portion) 72. The urging force from the telescopic rod (movable portion) 72 to the movable valve frame portion 60 is reduced. Then, the movable valve frame portion 60 is pulled away from the inner surface of the valve box 10 by the urging force of the valve frame urging portion 90. The sealed state of the movable valve frame portion 60 and the valve box inner surface 10A is released. As a result, the flow path H is opened (release operation).
The valve closing operation and the releasing operation of the movable valve portion 40 are performed by a mechanical contact operation by the valve box urging portion 70 and a mechanical separation operation by the valve frame urging portion 90.

After the release operation, the rotation shaft 20 is rotated in the direction indicated by the reference numeral R2. Then, the movable valve portion 40 moves from the valve opening shielding position (sliding preparation position) to the retracted position (evacuated operation).
By this release operation and the retracting operation, a valve opening operation for putting the movable valve portion 40 into the valve opening state is performed.
In a series of operations (valve closing operation, releasing operation, retracting operation), the valve plate urging portion 80 links the movable valve frame portion 60 and the movable valve plate portion 50.

[State of valve body retractable position (FREE)]
In FIGS. 14 to 16, the movable valve portion 40 (movable valve frame portion 60, movable valve plate portion 50) at the valve opening shielding position (sliding preparation position) is the valve box inner surface 10A of any of the valve boxes 10. It shows a state where it is not in contact with 10B. This state is referred to as a state in which the valve body is FREE. In the state where the valve body is FREE, the telescopic rod (movable part) 72 of the vacuum actuator (valve box urging portion) 70 does not protrude from the valve box inner surface 10B and is in a state of being degenerated inside the valve box 10. That is, the vacuum actuator (valve box urging portion) 70 is not in contact with the neutral valve body 5.

Next, the vacuum actuator (valve box urging portion) 70 is driven from the state where the valve body is FREE. Then, the tip portion 72a of the telescopic rod (movable portion) 72 comes into contact with the lower surface 60sb of the movable valve frame portion 60, as shown by the arrow F1 in FIG. As a result, as shown by the arrow F2 in FIG. 15, the movable valve frame portion 60 moves toward the inner surface 10A of the valve box.

Further, the movable valve frame portion 60 is moved and the valve frame seal packing 61 is in contact with the valve box inner surface 10A, which is the state of the valve closed position (valve closed state). At this time, the movable valve plate portion 50 is moved in the same direction as the movable valve frame portion 60 by the valve plate urging portion (holding spring) 80. At the same time, the movable valve plate portion 50 and the movable valve frame portion 60 maintain the sliding seal state via the sliding seal packing 52.

In the state where the valve body is FREE, the vacuum actuator (valve box urging portion) 70 brings the movable valve frame portion 60 into contact with the valve box inner surface 10A of the valve box 10 to close the flow path H (valve closing operation).

[Valve body in valve closed position (no positive pressure or differential pressure)]
18 to 20 show a state in which the flow path H is closed by the valve closing operation.
This state is referred to as a valve closed state with no positive pressure / no differential pressure. The valve closed state with no positive pressure / differential pressure is a state in which the neutral valve body 5 is in contact with one inner surface of the valve box 10, and is not in contact with the other inner surface. That is, in the valve closed state with no positive pressure / differential pressure, the neutral valve body 5 comes into contact with the inner surface 10A of the valve box around the first opening 12a. At the same time, the neutral valve body 5 is not in contact with the valve box inner surface 10B located around the second opening 12b.

In the valve closed state with no positive pressure / differential pressure, in the vacuum actuator (valve box urging portion) 70, the telescopic rod (movable portion) 72 is maintained in a state of being extended in the direction toward the movable valve frame portion 60. That is, the state in which the tip portion 72a is in contact with the lower surface 60sb of the movable valve frame portion 60 is maintained. Further, the valve frame seal packing 61 is maintained in contact with the inner surface 10A) of the valve box around the first opening 12a of the valve box 10.

[Valve closed when the valve body is in the reverse pressure position]
22 to 24 show a state in which the flow path H is closed in a reverse pressure state.
This state is referred to as a reverse pressure valve closed state. The reverse pressure valve closed state is a state in which the neutral valve body 5 is in contact with both valve box inner surfaces 10A and 10B in the flow path H direction. That is, in the reverse pressure valve closed state, the neutral valve body 5 is kept in contact with the valve box inner surface 10A around the first opening 12a, while being on the valve box inner surface 10B located around the second opening 12b. Is also in contact. Here, the reverse pressure means that pressure is applied to the valve body in the direction from the valve closed state to the valve open state.

When the neutral valve body 5 receives a reverse pressure, the movable valve plate portion 50 moves while sliding in the reciprocating direction B2 (FIG. 22) with respect to the movable valve frame portion 60 by the valve plate urging portion 80. A sealed state is maintained between the movable valve frame portion 60 and the movable valve plate portion 50 via the sliding seal packing 52.
As a result, the movable valve plate portion 50 collides with the valve box inner surface 10B around the second opening 12b. At this time, the counter cushion 51 alleviates the impact caused by the collision at the movable valve plate portion 50. The reverse pressure canceling mechanism is a mechanism in which the force received by the neutral valve body 5 is received by the valve box inner surface 10B (back side body) of the valve box 10.

Further, positive pressure / no differential pressure is set, and in this state, the movable valve frame portion 60 is separated from the inner surface of the valve box 10 by the valve frame urging portion 90, and the movable valve frame portion 60 is retracted to retract the flow path H. Is released (release operation).

As described above, the partition valve 100 of the present embodiment has a springback function and can be normally closed. The number of parts of the valve body can be reduced. A reverse pressure cancellation rate of about 100% can be obtained. The driving force of the valve body can be suppressed. A reliable closing operation is possible. Operational safety can also be improved. Highly reliable partitioning operation is possible.

In each of the above-described embodiments, it is also possible to combine the respective configurations.

Examples of the present invention will be described below.

Here, a performance study will be described as a specific example of the hydraulic drive system in the present invention.

<Combination example>
First, the types of the motor 705 m, the configuration of the reverse rotation corresponding portion required for the motor 705 m, the power required at that time, and the life in the combined configuration were examined.

Here, as the motor 705 m, a motor with a DC brush, a DC coreless brushless motor, and a stepping motor were examined. We also examined whether it is necessary to take measures against cogging torque in these motors.
As the configuration of the reverse rotation corresponding portion, a solenoid valve, an exciting clutch 705d, and an exciting brake 705b for preventing the reverse rotation of the drive system at the time of hydraulic pressure backflow were examined. In addition, it was examined whether or not the regenerative current processing unit 705c is necessary.

Furthermore, the power required for driving and the life in the combined configuration were examined.
The electric power was compared with the magnitude of the DC brushed motor as 1. Similarly, regarding the life, the length (number of drives) of the DC brushed motor that is maintenance-free was set to 1 for comparison.
The results of these studies are shown in Table 1.

From the results shown in Table 1, when the DC coreless brushless motor of the present invention is adopted and the exciting brake 705b and the regenerative current processing unit 705c are provided, the electric power is about 1.3, but the life is extended up to 5 times. I understand.
From the results shown in Table 1, it can be seen that when the DC brushed motor of the present invention is adopted and the exciting brake 705b and the exciting clutch 705d are provided, the life is about 1 time, but the electric power is 1 time.

As an example of utilization of the present invention, it can be applied to a mechanism for hydraulically driving in a vacuum device or the like. In particular, it can be widely applied to a partition valve for switching between a state in which two spaces having different properties such as a degree of vacuum, a temperature, and a gas atmosphere are partitioned and a state in which the partitioned state is opened.

70 ... Vacuum actuator (pressing cylinder, valve box urging part, lift pin moving part, alignment means, pressing part, valve box urging part)
71 ... Hydraulic drive unit (fixed unit)
72 ... Movable part (expandable rod)
73 ... Biasing member (pressing spring, spring)
700 ... Hydraulic drive unit (incompressible fluid drive unit)
701 ... Hydraulic pressure generation unit 702 ... Hydraulic pipe 705 ... Drive unit 705a ... Rotational drive shaft 705b ... Excitation brake 705c ... Regenerative current processing unit 705d ... Excitation clutch 705m ... Motor 706 ... Control unit (controller)
707 ... Power supply 720 ... Hydraulic urging member 5 ... Valve body, neutral valve body 10 ... Valve box 11 ... Hollow part 20 ... Rotating shaft 30 ... Neutral valve part 40 ... Movable valve part 50 ... Movable valve plate part 54 ... Movable valve part (Movable valve plate)
60 ... Movable valve frame portion 63 ... Valve frame portion 80 ... Valve plate urging portion (holding spring)
90 ... Valve frame urging unit 100 ... Partition valve 200 ... Vacuum device (sputtering device)
201 ... Film formation chamber (chamber)
H ... Flow path

Claims (6)

A hydraulic drive system having a vacuum actuator that expands and contracts an object so that it can be pressed in a chamber that has a vacuum atmosphere.
The vacuum actuator driven by the hydraulic pressure supplied from the outside and
A hydraulic drive unit that supplies operating hydraulic pressure to the vacuum actuator,
Have,
The hydraulic drive unit includes a hydraulic pressure generating unit that generates hydraulic pressure, a driving unit that drives the hydraulic pressure generating unit, and a power supply that supplies power to the driving unit, and the driving unit includes a motor and hydraulic pressure. A member is provided so that the hydraulic pressure generating unit can be driven so as to generate operating hydraulic pressures in opposite directions to each other.
The vacuum actuator has a telescopic rod that can be expanded and contracted toward the object, and a fixing portion that expands and contracts the telescopic rod, and the telescopic rod is provided by the hydraulic pressure supplied from the hydraulic drive unit to the fixing portion. Can be driven,
The drive unit is characterized in that a reverse rotation corresponding portion corresponding to a reverse state of the motor is provided when the telescopic rod moves in a direction away from the object due to the urging force of the hydraulic urging member. Hydraulic drive system. The hydraulic drive system according to claim 1, wherein the reverse rotation corresponding portion is provided with an excitation brake having a braking function of stopping the rotation drive shaft of the motor in a state where power is supplied from the power source. The second aspect of the invention, wherein the reverse rotation corresponding portion is provided with an exciting clutch having a clutch function for disconnecting the rotary drive shaft of the motor from the hydraulic pressure generating portion in a state where there is no power supply from the power supply. Hydraulic drive system. A regenerative current processing unit is provided in the reverse rotation corresponding unit.
The hydraulic drive system according to claim 2, wherein the motor is a DC coreless brushless motor. The hydraulic drive system according to claim 3, wherein the motor is a DC brushed motor. A partition valve that can operate normally closed
Hollow part and
A valve box having a first opening and a second opening that are provided so as to face each other and serve as a communication flow path with the hollow portion sandwiched between them.
With a valve body that can open and close the flow path,
A rotating shaft that rotatably supports the valve body between the retracted position and the valve opening shielding position in the hollow portion and has an axis extending in the flow path direction.
A rotary drive unit capable of rotationally driving the valve body and
A movable valve portion provided on the valve body so that the position in the flow path direction can be changed,
A valve box urging portion provided in the valve box to move and close the movable valve portion at the valve opening shielding position in the flow path direction, and
A hydraulic drive unit that drives the urging unit by supplying and discharging hydraulic oil,
Equipped with
The valve box urging portion serves as the vacuum actuator in the hydraulic drive system according to any one of claims 1 to 5.
The hydraulic drive unit is the hydraulic drive unit in the hydraulic drive system according to any one of claims 1 to 5.
A partition valve, wherein the valve body is the object of the hydraulic drive system according to any one of claims 1 to 5.

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