KR20200102069A - Pressing roll apparatus for imprinting continuous process - Google Patents

Abstract

The present invention relates to a pressing roll apparatus for a continuous imprinting process, which comprises: an unwinding unit which moves a substrate; a resin spray unit which sprays an imprinting resin for forming an imprinting pattern on the substrate; an imprinting unit which continuously forms the imprinting pattern on the imprinting resin sprayed on a surface of the substrate and measures and provides current tension applied to form the imprinting pattern; a curing unit which cures the imprinting resin so that the imprinting pattern is formed; and a control unit which individually controls the unwinding unit, the resin spray unit, the imprinting unit, and the curing unit so that the imprinting pattern is continuously formed on the substrate that is moved through the unwinding unit, and controls the imprinting unit so that the current pressing force corresponding to the current tension provided from the imprinting unit is maintained within a range of the reference pressing force. Accordingly, during a continuous imprinting process, the present invention can accurately control a position of a pressing roll so as to provide uniform pressing force to the substrate moving between a mold roll and the pressing roll, such that the current pressing force is maintained within the range of the reference pressing force.

Description

Pressing roll device for continuous imprinting process {PRESSING ROLL APPARATUS FOR IMPRINTING CONTINUOUS PROCESS}

The present invention measures the current tension applied to the substrate using load cells provided at both ends of the pressing roll during the continuous imprinting process, and pressurizes the current pressing force corresponding to the measured current tension to maintain the reference pressing force range. It relates to a pressure roll device for a continuous imprinting process capable of providing a uniform pressing force to a substrate moving between a mold roll and a pressure roll by precisely controlling the position of the roll.

As is well known, in the field of precision manufacturing such as semiconductor or display manufacturing, a photolithography process is widely used as a technique for forming a fine pattern on a film or substrate, and this photolithography process requires very expensive equipment. In addition, there is a problem in that a lot of processing time is required.

Accordingly. Recently, an imprinting process has been introduced and used in place of the photolithography process.In the imprinting process, an ultraviolet curable resin is used in a state in which the opposite shape of the pattern to be formed on a substrate or film is formed on the main roll. This is a method of forming a specific pattern by pressing the main roll on a substrate or film.

Among these imprinting processes, the roll-based imprinting technology is a Roll-to-Roll method as shown in FIG. 1A and a Roll-to-Flat as shown in FIG. 1B. It can be classified as a method, but the range of use thereof is expanding, and there is an advantage that the process time can be significantly reduced.

In recent years, in order to continuously perform the above-described imprinting process, technology development for various process conditions has been continuously made.

1. Korean Patent Registration No. 10-1552935 (registered on September 08, 2015)

The present invention measures the current tension applied to the substrate using load cells provided at both ends of the pressing roll during the continuous imprinting process, and pressurizes the current pressing force corresponding to the measured current tension to maintain the reference pressing force range. By precisely controlling the position of the roll, it is intended to provide a pressure roll device for a continuous imprinting process capable of providing a uniform pressing force to a substrate moving between the mold roll and the pressing roll.

In addition, the present invention accurately controls the position of the substrate by determining whether the substrate is meandering through the photographed image after photographing both ends of the substrate during the continuous imprinting process, thereby effectively reducing the positional deviation between the substrate and the fine pattern. It is intended to provide a pressurized roll device for a continuous imprinting process.

The objects of the embodiments of the present invention are not limited to the above-mentioned objects, and other objects not mentioned will be clearly understood by those of ordinary skill in the technical field to which the present invention belongs from the following description. .

According to an embodiment of the present invention, a winding part for moving a substrate, a resin spraying part for spraying an imprinting resin to form an imprinting pattern on the substrate, and the imprinting resin sprayed on the surface of the substrate An imprinting unit that continuously forms the imprinting pattern and measures and provides a current tension applied to form the imprinting pattern, a curing unit that cures the imprinting resin to form the imprinting pattern, and the Each of the winding part, the resin spraying part, the imprinting part, and the hardening part are controlled to continuously form the imprinting pattern on the substrate moving through the winding part, and the current corresponding to the current tension provided from the imprinting part A pressure roll device for a continuous imprinting process may be provided including a control unit for controlling the imprinting unit so that the pressing force maintains a range of the reference pressing force.

In addition, according to an embodiment of the present invention, the imprinting unit includes a mold roll provided with an imprinting mold for forming the imprinting pattern, and is provided adjacent to the mold roll to provide a pressing force to the imprinting resin. Imprinting including a pressure roll, wherein the pressure roll includes a load cell provided at both ends of the pressure roll to measure the current tension, and a mono carriage that adjusts the position of the pressure roll according to the control of the controller. A pressure roll device for continuous processing may be provided.

In addition, according to an embodiment of the present invention, when the current pressing force is relatively lower than the reference pressing force, the control unit controls the pressing roll to approach the imprinting mold using the mono carriage, and the current pressing force is A pressure roll device for a continuous imprinting process may be provided for controlling the pressure roll to be separated from the imprinting mold using the mono carriage when it is relatively larger than the reference pressure.

In addition, according to an embodiment of the present invention, the pressurization roll device further includes a photographing unit provided in the moving path of the substrate to provide a photographed substrate image by photographing both sides of the substrate. A roll device may be provided.

In addition, according to an embodiment of the present invention, the control unit determines whether the substrate is meandering through the substrate image provided from the photographing unit while performing the continuous imprinting process, and determines that the substrate is meandering. If so, a pressure roll device for a continuous imprinting process may be provided for controlling a rewinding roll provided in the winding unit to correct the meandering of the substrate.

The present invention measures the current pressure applied to the substrate using load cells provided at both ends of the pressing roll during the continuous imprinting process, and pressurizes the current pressing force corresponding to the measured current pressure to maintain the reference pressing force range. By precisely controlling the position of the roll, it is possible to provide a uniform pressing force to the substrate moving between the mold roll and the pressing roll.

In addition, the present invention accurately controls the position of the substrate by determining whether or not the substrate is meandering through the photographed image while taking pictures of both ends of the substrate during the continuous imprinting process, thereby effectively reducing the positional deviation between the substrate and the fine pattern. I can.

1A and 1B are diagrams for explaining a conventional roll-based imprinting technique,
2 is a block diagram of a pressure roll device for a continuous imprinting process according to an embodiment of the present invention,
3A to 3C, 4A to 4C, 5A, and 5B are views for explaining a pressure roll device for a continuous imprinting process according to an embodiment of the present invention.

Advantages and features of the embodiments of the present invention, and a method of achieving them will become apparent with reference to the embodiments described later in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in a variety of different forms, and only these embodiments make the disclosure of the present invention complete, and are common knowledge in the technical field to which the present invention pertains. It is provided to completely inform the scope of the invention to those who have, and the invention is only defined by the scope of the claims. The same reference numerals refer to the same components throughout the specification.

In describing the embodiments of the present invention, if it is determined that a detailed description of a known function or configuration may unnecessarily obscure the subject matter of the present invention, a detailed description thereof will be omitted. In addition, terms to be described later are terms defined in consideration of functions in an embodiment of the present invention, which may vary according to the intention or custom of users or operators. Therefore, the definition should be made based on the contents throughout this specification.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a block diagram of a pressure roll device for a continuous imprinting process according to an embodiment of the present invention, and FIGS. 3A to 3C, 4A to 4C, 5A and 5B are according to an embodiment of the present invention. It is a diagram for explaining a pressure roll device for a continuous imprinting process.

2, 3A to 3C, 4A to 4C, 5A, and 5B, a pressure roll device for a continuous imprinting process according to an embodiment of the present invention includes a winding unit 110 and a resin spraying unit. 120, an imprinting unit 130, a curing unit 140, a photographing unit 150, a control unit 160, and the like.

The winding unit 110 moves the substrate 10, and the substrate 10 is supplied by unwinding the substrate 10 through an unwinding roll 111 while supplying the substrate 10 through a rewinding roll 112. The substrate 10 can be moved in a winding roll-to-roll method.

Here, the substrate 10 includes a flexible flexible substrate, and various materials such as plastic, fiber, paper, etc. may be used, and the supply speed of the unwinding roll 111 and the rewinding roll 112 The recovery (winding) speed is kept constant, so that the substrate 10 can move while maintaining a constant tension.

On the other hand, the winding unit 110 may horizontally move in the opposite direction in which the meandering occurs through an actuator that drives the rewinding roll 112 under the control of the controller 160 when the substrate 10 is meandering. , When meandering occurs in one side during movement of the substrate 10 through a roll-driven actuator connected to both sides of the rewinding roll 112 so as to move horizontally while driving rotation, it is possible to horizontally move in the direction of the other side. By horizontally moving the rewinding roll 112 through the roll drive actuator, the meandering of the substrate 10 can be effectively corrected.

The resin spraying unit 120 sprays the imprinting resin 20 to form the imprinting pattern 20a on the substrate 10, and includes a unit having a dispenser structure and filled in the imprinting unit. The solvent resin 20 may be sprayed onto a predetermined area of the upper surface of the substrate 10 at a preset speed.

Here, the imprinting resin 20 may include a thermoplastic resin, an ultraviolet (UV) curable resin, etc., such as polycarbonate (PC), polyethylene terephthalate (PET), polyethylene naphthalene (PEN), polymethyl methacrylate (PMMA) , PI (polyimide), etc. can be used.

The imprinting unit 130 continuously forms an imprinting pattern 20a on the imprinting resin 20 sprayed on the surface of the substrate 10, and measures the current tension applied to form the imprinting pattern 20a. The mold roll 131 provided with an imprinting mold for forming the imprinting pattern 20a, and a pressurization provided adjacent to the mold roll 131 to provide a pressing force to the imprinting resin 20 It may include a roll 132.

The pressure roll 132 has a load cell 133 that is provided at both ends of the pressure roll 132 to measure the current tension, and a mono carriage that adjusts the position of the pressure roll 132 under the control of the controller 160 ( 134) can be provided.

For example, the imprinting unit 130 is provided with an imprinting mold in which an imprinting pattern 20a to be formed on the imprinting resin 20 sprayed on the substrate 10 outside the mold roll 121 is formed. Such an imprinting mold may be made of materials such as PC (poly carbonate), PET (polyethylene terephthalate), PEN (polyethylene naphthalene), PMMA (polymethyl methacrylate), PI (polyimide), etc., and patterning The desired imprinting pattern 20a may be formed.

In the imprinting unit 130 as described above, the imprinting resin 20 sprayed on the upper portion of the substrate 10 using an imprinting mold provided on the outer circumferential surface of the mold roll 131 while the substrate 10 is moving. ) Can be continuously performed to form the imprinting pattern 20a by pressing), based on the mold roll 131 to form the imprinting pattern 20a during the continuous imprinting process. The position of the pressing roll 132 may be adjusted through the mono carriage 134 so as to maintain a preset pressing force range (ie, a reference pressing force range) using the pressing roll 132 whose position is controlled.

In addition, in the imprinting unit 130, the current tension generated between the mold roll 131 and the pressing roll 132 can be measured through the load cells 133 provided at both ends of the pressing roll 132, The measured current tension may be provided to the control unit 160, and when the current tension is outside the reference pressing force range, the mold roll 131 and the pressing roll 132 are controlled through the mono carriage 134 according to the control of the control unit 160. You can adjust the strength between ).

For example, in the imprinting unit 130, when the current tension is relatively smaller than the reference pressing force range, the pressure roll by a distance corresponding to the increased pressing force to be increased through the mono carriage 134 under the control of the controller 160 The position of 132 may be brought close to the mold roll 131.

In addition, in the imprinting unit 130, when the current tension is relatively larger than the reference pressing force range, the pressing roll 132 is applied by a distance corresponding to the reduced pressing force to be reduced through the mono carriage 134 under the control of the controller 160. ) May be spaced apart from the mold roll 131.

The curing unit 140 cures the imprinting resin 20 to form the imprinting pattern 20a. The mold roll 121 is applied to the imprinting resin 20 sprayed on the upper portion of the substrate 10. Through a thermal method or a UV method to form the imprinting pattern (20a) may be cured.

For example, in the thermal method, a roll provided with a heating means, a cooling means, etc. may be provided to thermally cure, and in the UV method, a UV lamp may be provided to cure in a UV method. Since such a curing method and its structure have been disclosed in various ways in the related art, a detailed description thereof will be omitted.

The photographing unit 150 is provided on the moving path of the substrate 10 to provide a photographed substrate image by photographing both sides of the substrate 10, and photographs both sides of the substrate 10 including a CCD camera, The substrate image including the edges of both sides may be provided to the control unit 160.

The control unit 160 includes a winding unit 110, a resin injection unit 120, and an imprinting unit 130 to continuously form an imprinting pattern 20a on the substrate 10 moving through the winding unit 110. And the hardening unit 140 respectively, and the imprinting unit 130 may be controlled so that the current pressing force corresponding to the current tension provided from the imprinting unit 130 maintains a range of the reference pressing force.

Here, when the current pressing force is relatively lower than the reference pressing force, the control unit 160 imprints the pressing roll 132 using the mono carriage 134 to be close to the imprinting mold provided on the outer peripheral surface of the mold roll 131. When controlling the unit 130 and the current pressing force is relatively larger than the reference pressing force, imprinting is performed so that the pressing roll 132 is separated from the imprinting mold provided on the outer circumferential surface of the mold roll 131 using the mono carriage 134 The unit 130 can be controlled.

For example, if the current pressing force is 5 N/m and the reference pressing force range is 6-8 N/m, the controller 160 allows the current pressing force to have an intermediate value (that is, 7 N/m) of the reference pressing force range. The imprinting unit (the imprinting unit) so that the pressing roll 132 moves close to the mold roll 131 through the mono carriage 134 by a position value (for example, 1 cm) corresponding to the pressing force (tension) of +2 N/m 130) can be controlled.

In addition, in the controller 160, when the current pressing force is 10 N/m and the reference pressing force range is 6-8 N/m, the current pressing force is -3 so that it has an intermediate value (ie, 7 N/m) of the reference pressing force range. The imprinting unit 130 so that the pressing roll 132 moves apart from the mold roll 131 through the mono carriage 134 by a position value (for example, 1.5 cm) corresponding to the pressing force (tension) of N/m. Can be controlled.

On the other hand, the control unit 160 determines whether the substrate 10 is meandering through the substrate image provided from the photographing unit 150 during the continuous imprinting process, and when it is determined that the substrate 10 is meandering The rewinding roll 112 provided in the winding unit 110 may be controlled to correct the meandering of the substrate 10.

For example, the control unit 160 detects the edges of both sides of the substrate 10 in the substrate image provided from the photographing unit 150, and then the reference line (that is, a straight line parallel to the traveling direction) and the edge of the substrate 10 By comparing the lines, it is possible to determine whether the edge line is in an inclined state, and accordingly, if it is out of a preset angle range (for example, around 3 degrees, etc.), it can be determined as meandering.

In addition, when it is determined that the meandering of the substrate 10 has occurred, the control unit 160 horizontally moves in the opposite direction in which the meandering occurs through an actuator that drives the rewinding roll 112 provided in the winding unit 110 It can be controlled to correct the meandering of the substrate.When meandering occurs on one side of the substrate 10, the rewinding roll 112 is controlled to horizontally move through a roll drive actuator so that it can horizontally move in the direction of the other side toward the reference line. By doing so, the meandering of the substrate 10 can be effectively corrected.

While performing the continuous imprinting process in the manner shown in FIG. 4A through the pressure roll device for the continuous imprinting process as described above, adjusting the position of the pressing roll 132 as shown in FIG. 4B In the case of correcting the substrate meandering by determining the meandering state of the substrate 10 as shown in FIG. 4C while maintaining the reference pressure in a manner, an actual imprinting process is performed on the lens using a lens replica mold as shown in FIG. 5A. As a result of the execution, it can be confirmed that a pressurization error of less than 5% occurs as shown in FIG. 5B, and there is an advantage that it can be applied to various products such as a security prevention mark in addition to the currently used use.

Therefore, the present invention measures the current pressure applied to the substrate using load cells provided at both ends of the pressing roll during the continuous imprinting process, and the current pressing force corresponding to the measured current pressure maintains the reference pressing force range. By precisely controlling the position of the pressing roll so that a uniform pressing force can be provided to the substrate moving between the mold roll and the pressing roll.

In addition, the present invention accurately controls the position of the substrate by determining whether the substrate is meandering through the photographed image after photographing both ends of the substrate during the continuous imprinting process, thereby effectively reducing the positional deviation between the substrate and the fine pattern. I can.

In the above description, various embodiments of the present invention have been presented and described, but the present invention is not necessarily limited thereto, and those of ordinary skill in the art to which the present invention pertains, within the scope of the technical spirit of the present invention. It will be easy to see that branch substitutions, modifications and changes are possible.

10: substrate
20: resin for imprinting
20a: imprinting pattern
110: winding part
120: resin injection unit
130: imprinting unit
140: hardened part
150: photographing department
160: control unit

Claims (5)

A winding part for moving the substrate,
A resin spraying part for spraying an imprinting resin to form an imprinting pattern on the substrate,
An imprinting unit that continuously forms the imprinting pattern on the imprinting resin sprayed on the surface of the substrate, and measures and provides a current tension applied to the imprinting pattern;
A curing unit for curing the imprinting resin to form the imprinting pattern,
Each of the winding part, the resin spraying part, the imprinting part, and the hardening part are controlled so as to continuously form the imprinting pattern on the substrate moving through the winding part, and corresponding to the current tension provided from the imprinting part. A control unit that controls the imprinting unit so that the current pressing force maintains the range of the reference pressing force
Pressurized roll device for a continuous imprinting process comprising a.
The method of claim 1,
The imprinting unit includes a mold roll provided with an imprinting mold for forming the imprinting pattern, and a pressing roll provided adjacent to the mold roll to provide a pressing force to the imprinting resin,
The pressure roll is a pressure roll for a continuous imprinting process including a load cell that is provided at both ends of the pressure roll to measure the current tension, and a mono carriage that adjusts the position of the pressure roll under control of the control unit Device.
The method of claim 2,
When the current pressing force is relatively lower than the reference pressing force, the control unit controls the pressing roll to be close to the imprinting mold using the mono carriage, and when the current pressing force is relatively larger than the reference pressing force, the mono A pressure roll device for a continuous imprinting process for controlling the pressure roll to be separated from the imprinting mold using a carriage.
The method according to any one of claims 1 to 3,
The pressure roll device,
A photographing unit provided in the movement path of the substrate to provide a photographed substrate image by photographing both sides of the substrate
Pressurized roll device for a continuous imprinting process comprising a further.
The method of claim 4,
The control unit determines whether or not the substrate is meandering through the substrate image provided from the photographing unit during the continuous imprinting process, and when it is determined that the substrate is meandering, the control unit may correct the meandering of the substrate. A pressure roll device for a continuous imprinting process that controls a rewinding roll provided in the winding unit.

Images