JP2022018471A - Manufacturing method and manufacturing apparatus of film structure - Google Patents

Abstract

To provide a manufacturing method of a film structure in which an amount of misalignment between the front and back of a fine shape pattern is reduced.SOLUTION: A manufacturing method of a film structure comprises: a first application step for applying a transfer material 2 onto a surface of a film 1; a first curing step in which a first transfer roll 4a on which a first transfer pattern with a first uneven pattern and a first alignment mark of two rows provided at a first width direction pitch is formed is pressurized by a first pressure roll 3a to transfer the first pattern to the film and cured thereof by an ultraviolet ray; a second application step in which the transfer material is applied to a back surface of the film; a second curing step in which a second transfer roll 4b on which a second transfer pattern with a second uneven pattern and a second alignment mark of two rows provided at a second width direction pitch is formed is pressurized by a second pressure roll 3b to transfer the second pattern to the film and cured thereof by the ultraviolet ray; a first detection step for detecting the first width direction pitch; an intermediate tension detection step of the film between the first curing step and the second curing step; a second detection step for detecting the width direction pitch; and a torque correction step of correcting a torque that drives the second pressure roll so that the second width direction pitch matches with the first width direction pitch.SELECTED DRAWING: Figure 1

Description

The present invention relates to a method and an apparatus for manufacturing a film structure using an imprint technique.

The imprint technique is a technique for forming a cured film to which a fine shape is transferred by pressing a mold having a fine shape pre-processed on the surface against a resin applied to the surface of a base material.
As an imprint method, there is a UV imprint method in which a cured film having a fine shape transferred is formed by irradiating UV light with a mold at room temperature pressed against a UV curable resin coated on the surface of a substrate. be.

When the target base material in the UV imprint method is a film such as PET, a continuously running film is coated with a UV curable resin on the surface, and then a fine shape is processed on the cylindrical surface of the roll. It passes between the transfer roll and the pressure roll that is pressed against the transfer roll with a predetermined pressure, and is exposed to UV light while sticking to the transfer roll to form a cured film to which the fine shape is transferred. There is a general method of releasing from the roll (see, for example, Patent Document 1).

Further, there is also a method of connecting two of the same steps and accurately matching the position of the fine shape pattern formed in the second step with the position of the fine shape pattern formed in the first step (see, for example, Patent Document 2). ).

Japanese Patent No. 4976868 Japanese Unexamined Patent Publication No. 2019-25718

However, in the method and apparatus disclosed in Patent Document 2, when the back surface roll of the second step performs the position correction operation, the back surface pressure rolls arranged to face each other also accelerate and decelerate in the film feed direction (MD direction). Will repeat. Then, expansion and contraction of the film occurs from the release in the first step to the arrival in the second step, and the tension fluctuates, so that the amount of misalignment between the front and back of the fine shape pattern becomes large.

In view of the above problems, the present disclosure provides a method and an apparatus for manufacturing a film structure in which the amount of misalignment between the front and back surfaces of the fine shape pattern is small in an imprint method for forming a fine shape pattern on both sides of a continuously running film. The purpose is.

The film structure manufacturing apparatus according to the present disclosure is a method for manufacturing a film structure obtained by transferring a transfer material to both sides of a continuously traveling film and curing the film structure.
The first coating step of applying a transfer material containing an ultraviolet curable resin to the surface of the film, and
A first transfer pattern is formed between a fine first concavo-convex pattern type and two rows of first alignment mark types provided along the feed direction separated in a width direction intersecting the feed direction of the film. The first transfer pattern is transferred to the transfer material applied to the surface of the film while the 1 transfer roll is pressed by the first pressure roll, and the transfer material is cured by ultraviolet rays to form a first cured film. The first curing step and
A second coating step of applying a transfer material containing an ultraviolet curable resin to the back surface of the film, and
A second transfer pattern was formed between a fine second concavo-convex pattern type and two rows of second alignment mark types provided along the feed direction at intervals in the width direction intersecting the feed direction of the film. While pressurizing the second transfer roll with the second pressure roll, the second transfer pattern is transferred to the transfer material applied to the back surface of the film, and the transfer material is cured by ultraviolet rays to form a second cured film. The second curing step to be performed and
A first detection step for detecting a pitch in the width direction, which is a distance between marks in the width direction of the first alignment mark included in the first cured film, corresponding to the first alignment mark type.
An intermediate tension detection step for detecting the tension of the film between the first curing step and the second curing step, and
A second detection step of detecting a pitch in the second width direction, which is a distance between marks in the width direction of the second alignment mark included in the second cured film, corresponding to the second alignment mark type.
A torque correction step of correcting the torque for driving the second pressurizing roll so that the pitch in the second width direction coincides with the pitch in the first width direction.
including.

In addition, the film structure manufacturing equipment according to the present disclosure is
A device for manufacturing a film structure in which a transfer material is transferred to both sides of a continuously running film and cured.
The first coating part for applying the transfer material containing the ultraviolet curable resin to the surface of the film, and
A first transfer pattern is formed between a fine first concavo-convex pattern type and two rows of first alignment mark types provided along the feed direction separated in a width direction intersecting the feed direction of the film. 1 transfer roll and
A first pressure roll that presses the first transfer pattern of the first transfer roll onto the surface of the film,
A first cured portion that forms a first cured film by curing the transfer material to which the first transfer pattern is transferred on the surface of the film with ultraviolet rays.
A second coating portion for coating a transfer material containing an ultraviolet curable resin on the back surface of the film, and a second coating portion.
A second transfer pattern is formed between the fine second concavo-convex pattern type and the two rows of second alignment mark types provided along the feed direction separated in the width direction intersecting the feed direction of the film. 2 transfer rolls and
A second pressure roll that presses the second transfer pattern of the second transfer roll on the back surface of the film,
A second cured portion that forms a second cured film by curing the transfer material to which the second transfer pattern is transferred on the back surface of the film with ultraviolet rays.
A first detection unit that detects a pitch in the width direction, which is a distance between marks in the width direction of the first alignment mark included in the first cured film, corresponding to the first alignment mark type.
An intermediate tension detection unit that detects the intermediate tension of the film between the first curing step and the second curing step,
A second detection unit that detects a pitch in the second width direction, which is a distance between marks in the width direction of the second alignment mark included in the second cured film, corresponding to the second alignment mark type.
A torque correction unit that corrects the torque for driving the second pressurizing roll so that the pitch in the second width direction coincides with the pitch in the first width direction.
To prepare for.

According to the film structure manufacturing apparatus and manufacturing method according to the present disclosure, by having the above configuration, the elastic modulus is low and even a thin film is aligned on both sides of the film substrate. Accuracy can be ensured.

It is a schematic diagram which shows the structure of the manufacturing apparatus of the film structure which concerns on Embodiment 1. FIG. It is a schematic diagram of the 1st curing step in the manufacturing method of the film structure which concerns on Embodiment 1. FIG. It is a schematic diagram of the 2nd curing step in the manufacturing method of the film structure which concerns on Embodiment 1. FIG. It is a flowchart of the intermediate tension control in the manufacturing method of the film structure which concerns on Embodiment 1. FIG. It is a system block diagram which shows the structure of the manufacturing apparatus of the film structure which concerns on Embodiment 1. FIG.

The method for producing a film structure according to the first aspect is a method for producing a film structure in which a transfer material is transferred to both sides of a continuously running film and cured.
The first coating step of applying a transfer material containing an ultraviolet curable resin to the surface of the film, and
A first transfer pattern is formed between a fine first concavo-convex pattern type and two rows of first alignment mark types provided along the feed direction separated in a width direction intersecting the feed direction of the film. The first transfer pattern is transferred to the transfer material applied to the surface of the film while the 1 transfer roll is pressed by the first pressure roll, and the transfer material is cured by ultraviolet rays to form a first cured film. The first curing step and
A second coating step of applying a transfer material containing an ultraviolet curable resin to the back surface of the film, and
A second transfer pattern was formed between a fine second concavo-convex pattern type and two rows of second alignment mark types provided along the feed direction at intervals in the width direction intersecting the feed direction of the film. While pressurizing the second transfer roll with the second pressure roll, the second transfer pattern is transferred to the transfer material applied to the back surface of the film, and the transfer material is cured by ultraviolet rays to form a second cured film. The second curing step to be performed and
A first detection step for detecting a pitch in the width direction, which is a distance between marks in the width direction of the first alignment mark included in the first cured film, corresponding to the first alignment mark type.
An intermediate tension detection step for detecting an intermediate tension of the film between the first curing step and the second curing step, and an intermediate tension detecting step.
A second detection step of detecting a pitch in the second width direction, which is a distance between marks in the width direction of the second alignment mark included in the second cured film, corresponding to the second alignment mark type.
A torque correction step of correcting the torque for driving the second pressurizing roll so that the pitch in the second width direction coincides with the pitch in the first width direction.
including.

In the method for manufacturing a film structure according to the second aspect, in the first aspect, the amount of misalignment between the first alignment mark and the second alignment mark detected in the second detection step is reduced. Further may include a position or rotation speed correction step for correcting the position or rotation speed of the second transfer roll.

The film structure manufacturing apparatus according to the third aspect is a film structure manufacturing apparatus in which a transfer material is transferred and cured on both sides of a continuously traveling film.
The first coating part for applying the transfer material containing the ultraviolet curable resin to the surface of the film, and
A first transfer pattern is formed between a fine first concavo-convex pattern type and two rows of first alignment mark types provided along the feed direction separated in a width direction intersecting the feed direction of the film. 1 transfer roll and
A first pressure roll that presses the first transfer pattern of the first transfer roll onto the surface of the film,
A first cured portion that forms a first cured film by curing the transfer material to which the first transfer pattern is transferred on the surface of the film with ultraviolet rays.
A second coating portion for coating a transfer material containing an ultraviolet curable resin on the back surface of the film, and a second coating portion.
A second transfer pattern is formed between the fine second uneven pattern type and the two rows of second alignment mark types provided along the feed direction separated in the width direction intersecting the feed direction of the film. 2 transfer rolls and
A second pressure roll that presses the second transfer pattern of the second transfer roll on the back surface of the film,
A second cured portion that forms a second cured film by curing the transfer material to which the second transfer pattern is transferred on the back surface of the film with ultraviolet rays.
A first detection unit that detects a pitch in the width direction, which is a distance between marks in the width direction of the first alignment mark included in the first cured film, corresponding to the first alignment mark type.
An intermediate tension detection unit that detects the intermediate tension of the film between the first curing step and the second curing step,
A second detection unit that detects a pitch in the second width direction, which is a distance between marks in the width direction of the second alignment mark included in the second cured film, corresponding to the second alignment mark type.
A torque correction unit that corrects the torque for driving the second pressurizing roll so that the pitch in the second width direction coincides with the pitch in the first width direction.
To prepare for.

Hereinafter, the film structure manufacturing apparatus and manufacturing method according to the embodiment will be described with reference to the accompanying drawings.

(Embodiment 1)
<Film structure manufacturing equipment>
First, the configuration of the film structure manufacturing apparatus 110 according to the first embodiment will be described with reference to FIGS. 1 and 5 together with its operation. FIG. 1 is a schematic view showing the configuration of the film structure manufacturing apparatus 110 according to the embodiment. FIG. 5 is a system configuration diagram showing the configuration of the film structure manufacturing apparatus 110 according to the first embodiment.

As shown in FIG. 1, the film structure manufacturing apparatus 110 according to the first embodiment applies the transfer material 2 to both surfaces of the continuously traveling film 1, transfers a mold shape having a fine uneven pattern, and then transfers the mold shape. This is a roll-to-roll type film structure manufacturing device that forms a cured film. The film 1 is a transparent material having a thickness of 100 um or less, and for example, a PET film is used. The transfer material 2 is a material containing an ultraviolet curable resin, which flows before curing but adheres to the film 1 after curing.

The film structure manufacturing apparatus 110 according to the first embodiment includes the unwinding roll 11, the free rolls 12, 13, and 14, the unwinding tension roll 91, the first coating nozzle 15a, and the first transfer roll 4a. , The first pressure roll 3a, the first UV light source 16a, the first release roll 17a, the free rolls 18, 19, 20, 21, the intermediate tension roll 92, the first detection camera 101, and the second. The coating nozzle 15b, the second transfer roll 4b, the second pressure roll 3b, the second UV light source 16b, the second release roll 17b, the free rolls 22, 23, 24, 25, 26, 27, and the second 2 The detection camera 102, the take-up roll 27, and the take-up tension roll 93 are included.

The unwinding roll 11 feeds out the film 1 from the original fabric in which the film 1 is wound in a roll shape.
The free rolls 12, 13, and 14 guide the running of the film 1 to the first pressure roll 3a, which will be described later.
The unwinding tension roll 91 is arranged between the free rolls 12 and 13 and detects the unwinding tension of the film 1.
The first coating nozzle 15a coats the transfer material 2 directly above the free roll 14.
The first transfer roll 4a has a fine uneven pattern on the cylindrical surface. The unevenness pattern includes, for example, a first unevenness pattern type and a first alignment mark type, which will be described later. Further, the first transfer roll 4a has a motor and an encoder.
The first pressure roll 3a presses the transfer material 2 against the first transfer roll 4a via the film 1. It is desirable that the cylindrical surface of the first pressure roll 3a is covered with an elastic body such as rubber.

The first UV light source 16a cures the transfer material 2 pressed against the first transfer roll 4a.
The first release roll 17a separates the first cured film 5a adhered to the surface of the film 1 from the first transfer roll 4a. The first cured film 5a has, for example, a first uneven pattern and a first alignment mark, which will be described later.
The free rolls 18, 19, 20, and 21 guide the running of the film 1 up to the second pressure roll 3b, which will be described later.

The intermediate tension roll 92 is arranged between the free rolls 19 and 20 to detect the intermediate tension of the film 1.
The first detection camera 101 detects the first alignment mark arranged on the upstream side surface of the free roll 21 and formed in the first curing step. Therefore, the freeroll 21 is also referred to as a freeroll for the first detection camera.
The second coating nozzle 15b coats the transfer material 2 directly above the free roll 21.
The second transfer roll 4b has a fine uneven pattern on the cylindrical surface. The unevenness pattern includes, for example, a second unevenness pattern type and a second alignment mark type, which will be described later. Further, the second transfer roll 4b has a motor, an encoder, a position correction mechanism, and a speed correction mechanism.
The second pressure roll 3b presses the transfer material 2 against the second transfer roll 4b via the film 1. It is desirable that the cylindrical surface of the second pressure roll 3b is covered with an elastic body such as rubber. Further, the second pressurizing roll 3b has a motor for driving and a torque correction mechanism for correcting the driving torque.

The second UV light source 16b cures the transfer material 2 pressed against the second transfer roll 4b.
The second release roll 17b separates the second cured film 5b adhered to the back surface of the film 1 from the second transfer roll 4b. The second cured film 5b has, for example, a second uneven pattern and a second alignment mark, which will be described later.
The free rolls 22, 23, 24, 25, 26, and 27 guide the running of the film 1 up to the take-up roll 28 described later.
The second detection camera 102 is arranged directly below the free roll 22 and detects the second alignment mark formed in the second curing step. Therefore, the freeroll 22 is also referred to as a freeroll for the second detection camera.

The control unit 29 calculates the pitch in the width direction of the first alignment mark on the surface of the film 1 based on the information of the first detection camera 101. Further, the control unit 29 calculates the pitch in the width direction of the second alignment mark on the back surface of the film 1 based on the information of the second detection camera 102. Then, the control unit 29 has a first alignment mark formed in the first curing step and a first alignment mark based on the width pitch of the first alignment mark and the width direction pitch of the second alignment mark on the front and back surfaces of the film 1. 2 Calculate the amount of misalignment with the second alignment mark formed in the curing step.

The take-up roll 27 winds up the film 1 having the cured film formed on both sides.
The take-up tension roll 93 is arranged between the free rolls 26 and 27, and detects the take-up tension of the film 1.

<Manufacturing method of film structure>
Next, a method for manufacturing the film structure according to the first embodiment will be described with reference to FIGS. 2 and 3. FIG. 2 is a schematic diagram of a first curing step in the method for manufacturing a film structure according to the first embodiment. FIG. 3 is a schematic diagram of a second curing step in the method for manufacturing a film structure according to the first embodiment.

<First curing step>
First, the first curing step will be described.
(1) First, the transfer material 2 is ejected from the first coating nozzle 15a onto the surface of the continuously traveling film 1.
(2) Next, the transfer material 2 discharged onto the surface of the film 1 is pressed against the first transfer roll 4a by the first pressure roll 3a. The first transfer roll 4a has a first uneven pattern type 41a arranged in the center of the cylindrical surface and a first alignment mark type 42a arranged at both ends of the first uneven pattern type 41a. Therefore, the transfer material 2 is filled in the recesses of the first uneven pattern type 41a and the first alignment mark type 42a without any gap.

The first transfer roll 4a is rotated at a constant speed by a motor (not shown) connected to the drive side (on the right side when facing FIG. 2).
The first pressurizing roll 3a is a free roll having no drive source, and rotates at the same speed while pressurizing the first transfer roll 4a with an air cylinder or the like.

(3) Next, the filled transfer material 2 is cured by the ultraviolet rays emitted from the first UV light source 16a. As a result, the first cured film 5a on which the transfer material 2 is cured adheres to the surface of the film 1.
(4) Finally, the fixed transfer material 2 is separated from the first transfer roll 4a with the first release roll 17a as a fulcrum.

The first cured film 5a formed on the surface of the film 1 has a first concavo-convex pattern 51a having a fine concavo-convex shape corresponding to the first concavo-convex pattern type 41a and a first alignment mark 52a corresponding to the first alignment mark type 42a. And include. In the present embodiment, the distance between the mark center points of the first alignment mark 52a is defined as the first width direction pitch 53a.
Further, the tension applied to the film 1 when forming the first cured film 5a is detected by the unwinding tension roll 91 described above, and is controlled by a torque for braking the unwinding roll 11.
By the first curing step described above, the first cured film 5a is formed on the surface of the film 1.

<Second curing process>
Next, the second curing step will be described.
(5) First, among the first alignment marks 52a formed on the surface of the film 1, the first detection camera 101 is on the operation side (right side when facing FIG. 3) and the drive side (left side when facing FIG. 3). Recognize two first alignment marks. The control unit 29 calculates the pitch 53a in the first width direction by obtaining the center positions of the two first alignment marks by image processing.
(6) Next, the transfer material 2 is ejected from the second coating nozzle 15b onto the back surface of the continuously traveling film 1.

(7) Next, the transfer material 2 discharged to the back surface of the film 1 is pressed against the second transfer roll 4b by the second pressure roll 3b. The second transfer roll 4b has a second uneven pattern type 41b arranged in the center of the cylindrical surface and a second alignment mark type 42b arranged at both ends of the second uneven pattern type 41b. Therefore, the transfer material 2 is filled in the recesses of the second uneven pattern type 41b and the second alignment mark type 42b without any gap.

The second transfer roll 4b is rotated by a motor (not shown) connected to the drive side (left side when facing FIG. 3). The second transfer roll 4b is attached with an encoder and rotates while accelerating and decelerating in synchronization with the angle signal of the first transfer roll 4a while outputting an angle signal during rotation.
The torque of the second pressurizing roll 3b is controlled by a motor connected to the drive side. The second pressurizing roll 3b is usually rotated by a command from the control unit 29 to keep the intermediate tension at a constant value. Therefore, although the second pressure roll 3b rotates while being pressurized by the second transfer roll 4b, it does not accelerate or decelerate following the second transfer roll 4b and is independent of the second transfer roll 4b. Then, the film 1 is rotated while accelerating and decelerating so as to run at a constant tension and speed.

(8) Next, the filled transfer material 2 is cured by the ultraviolet rays emitted from the second UV light source 16b. As a result, the second cured film 5b on which the transfer material 2 is cured is fixed to the back surface of the film 1.
(9) Next, the fixed transfer material 2 is separated from the second transfer roll 4b with the second release roll 17b as a fulcrum.

The second cured film 5b formed on the back surface of the film 1 has a second uneven pattern 51b having a fine uneven shape corresponding to the second uneven pattern type 41b and a second alignment mark 52b corresponding to the second alignment mark type 42b. And include. In the present embodiment, the distance between the mark center points of the second alignment mark 52b is defined as the second width direction pitch 53b.

(10) Next, the second detection camera 102 has the operation side (right side when facing FIG. 3) and the drive side (left side when facing FIG. 3) among the second alignment marks 52b formed on the back surface of the film 1. Recognize the two alignment marks.

The control unit 29 calculates the second width direction pitch 53b by obtaining the center positions of the two alignment marks by image processing. Further, the control unit 29 has the alignment mark 52a formed in the first curing step and the alignment formed in the second curing step based on the widthwise pitches 53a and 53b of the alignment marks on the front and back surfaces of the film 1. The amount of misalignment with the mark 52b is calculated.

The second transfer roll 4b is equipped with a position correction mechanism for moving the rotation axis in the width direction and the height direction, and operates while changing the positions in the width direction and the height direction during rotation.
The position correction mechanism is, for example, a load cell. The position correction mechanism changes the position of the second transfer roll 4b based on the amount of misalignment between the first alignment mark 52a and the second alignment mark 52b. Further, the speed correction mechanism corrects the rotation speed of the second transfer roll 4b.

The second cured film 5b is formed on the back surface of the film 1 by the second curing step described above.
In this way, the film structure is manufactured by the method for manufacturing the film structure according to the present embodiment.

<Method of controlling intermediate tension>
Next, the method of controlling the intermediate tension in the method of manufacturing the film structure according to the present embodiment will be described in detail with reference to FIG. FIG. 4 is a flowchart of intermediate tension control in the method for manufacturing a film structure according to the first embodiment. In the present embodiment, the command output from the control unit is secondly pressurized so that the intermediate tension detected by the intermediate tension roll 92 becomes the same value as the unwinding tension detected by the unwinding tension roll 91. It feeds back to the torque correction mechanism of the roll 3b.

The intermediate tension detected after forming the first cured film 5a is controlled by the following flow.
(A) First, the control unit 29 determines whether the unwinding tension and the intermediate tension have the same value (S401). For this purpose, the intermediate tension detected by the intermediate tension roll 92 and the unwinding tension detected by the unwinding tension roll 91 are used.
When the unwinding tension and the intermediate tension are the same value, the control unit 29 does not perform the intermediate tension control and ends the process.
When it is assumed that the intermediate tension control is performed in real time in the manufacturing process, it is desirable to start from S401 again after a certain period of time.
(B) When the unwinding tension and the intermediate tension are not the same value, the control unit 29 detects the first width direction pitch 53a (S402). Specifically, before forming the second cured film 5b, the first detection camera 101 is used to detect the first alignment mark 52a, and the control unit 29 calculates the first width direction pitch 53a.

(C) Further, the control unit 29 detects the second width direction pitch 53b (S403). Specifically, after the second cured film 5b is formed, the second alignment mark 52b is detected by using the second detection camera 102, and the control unit 29 calculates the second width direction pitch 53b.
(D) Next, the control unit 29 compares the magnitude of the pitch 53a in the first width direction and the pitch 53b in the second width direction (S404).
When the first width direction pitch 53a and the second width direction pitch 53b have the same value, that is, when there is no misalignment amount on the front and back surfaces of the film structure, the control unit 29 ends the intermediate tension control.

(E) When the first width direction pitch 53a is smaller than the second width direction pitch 53b (53a <53b), the control unit 29 determines the difference between the first width direction pitch 53a and the second width direction pitch 53b. The pitch difference Sa, which is an absolute value, is obtained, and the magnitude of the pitch difference and the predetermined target value T is compared (S405). This makes it possible to evaluate the current deviation amount with respect to the target value T corresponding to the allowable deviation amount. The target value T may be arbitrarily set by the user, for example.
When the pitch difference Sa is equal to or less than the target value T (Sa ≦ T), the control unit 29 does not perform the intermediate tension control, but performs processing from S402 again.

(F) When the pitch difference Sa is larger than the target value T (Sa> T), the control unit 29 subtracts the tension corresponding to the pitch difference Sa with respect to the intermediate tension (S406).
(G) The second pressurizing roll 3b is driven by a connected motor with a torque corresponding to the tension obtained by the control unit 29. That is, the intermediate tension is set to be lower than the unwinding tension (S407). This makes it possible to bring the second width direction pitch 53b closer to the first width direction pitch 53a. Then, the control unit 29 performs processing from S402 again.

(H) When the first width direction pitch 53a is a value larger than the second width direction pitch 53b (53a> 53b), the control unit 29 determines the difference between the first width direction pitch 53a and the second width direction pitch 53b. The pitch difference Sa, which is an absolute value, is obtained, and the magnitude of the pitch difference Sa and the predetermined target value T is compared (S408).
When the pitch difference Sa is equal to or less than the target value T (Sa ≦ T), the control unit 29 does not perform the intermediate tension control, but performs processing from S402 again.

(I) When the pitch difference Sa is larger than the target value T (Sa> T), the control unit 29 adds the tension corresponding to the pitch difference Sa with respect to the intermediate tension (S409).
(J) The second pressurizing roll 3b is driven by a connected motor with a torque corresponding to the tension obtained by the control unit 29. That is, the intermediate tension is set higher than the unwinding tension (S410). This makes it possible to bring the second width direction pitch 53b closer to the first width direction pitch 53a. Then, the control unit 29 performs processing from S402 again.
In this way, the intermediate tension control in the method for manufacturing the film structure according to the present embodiment is performed.

The first feature in the method for manufacturing a film structure according to the present embodiment is to control the intermediate tension by the pitch difference in the width direction of the first alignment mark.
Normally, the torque for braking the unwinding roll and the torque for driving the second pressurized roll so that the unwinding tension before forming the first cured film and the intermediate tension before forming the second cured film match. And is in control. However, in this case, since the film having a low elastic modulus is very easy to expand and contract, the film to which the first cured film is fixed expands and contracts before forming the second cured film, and the pitch in the first width direction fluctuates greatly. Resulting in. A method of reducing the overall tension is conceivable in order to avoid expansion and contraction of the film, but there is a minimum tension required to stably unwind a wide and thin film without sagging.

Therefore, in the present disclosure, the intermediate tension is changed based on the pitch difference in the width direction between the first alignment mark and the second alignment mark while the unwinding tension is fixed. Specifically, the torque corresponding to the pitch difference is added or subtracted to correct the torque for driving the second pressurizing roll. As a result, it is possible to obtain a film structure in which the fine shape pattern of the cured film formed on both sides of the film is easy to stretch and the position of the fine shape pattern is small.
The difference in intermediate tension obtained by converting from the pitch difference in the width direction between the first alignment mark and the second alignment mark utilizes the property that the pitch in the width direction of the first alignment mark changes due to the expansion and contraction of the film. , Calculated from the correlation between the pitch in the width direction and the tension measured in advance. Specifically, the torque for driving the second pressure roll is controlled to control the intermediate tension of the film 1.

The second feature in the method for manufacturing the film structure according to the present embodiment is that the second pressure roll has a drive.
In a roll-to-roll type double-sided imprint device, it is common that the pressure roll on the back surface is also a free roll that does not have a drive. However, when high alignment accuracy of the front and back patterns is required, in order to realize this method, it is necessary to improve the processing accuracy and mounting accuracy of the transfer roll to eliminate the change in the rotation speed of the transfer roll on the back surface and the roll movement operation. Is indispensable. That is, it is not realistic to make the pressure roll on the back surface a free roll in order to realize high alignment accuracy. Actually, a certain amount of rotation speed change and roll movement operation are required, but it is difficult to suppress the fluctuation of the film distance between the first step and the second step with the free roll that operates in conjunction with it. ..

Therefore, in the present disclosure, the motor is directly connected to the second pressurizing roll to control the torque. This causes the film to be pulled by the frictional force on the surface of the second pressure roll, and it becomes easy to keep the distance of the film between the first step and the second step constant.
That is, by giving the second pressure roll a drive, stable film running that is not affected by the change in the rotation speed of the transfer roll or the moving operation can be realized.

According to such a configuration, it is possible to obtain a film structure having a high-quality cured film having a low elastic modulus and a cured film pattern alignment accuracy in which fine shapes on both sides are transferred even with a thin film.

According to the method for manufacturing a film structure according to the present invention, fine shape patterns on both sides of a film substrate can be formed with high accuracy, which is useful in the fields of, for example, optical parts and semiconductor parts.

1 Film 2 Transfer material 3a 1st pressure roll 4a 1st transfer roll 5a 1st cured film 11 Unwinding roll 12, 13, 14 Free roll 15a 1st coating nozzle 16a 1st UV light source 17a 1st release roll 3b 2nd Pressurized roll 4b 2nd transfer roll 5b 2nd cured film 15b 2nd coating nozzle 16b 2nd UV light source 17b 2nd release roll 18, 19, 20 Free roll 21, 22 Free roll for detection camera 23, 24, 25, 26 , 27 Free roll 28 Winding roll 29 Control unit 41a 1st uneven pattern type 42a 1st alignment mark type 51a 1st uneven pattern 52a 1st alignment mark 53a 1st width direction pitch 41b 2nd uneven pattern type 42b 2nd alignment mark Mold 51b 2nd uneven pattern 52b 2nd alignment mark 53b 2nd width direction pitch 91 Unwinding tension roll 92 Intermediate tension roll 93 Winding tension roll 101 1st detection camera 102 2nd detection camera 110 Manufacturing method of film structure

Claims (3)

It is a method for manufacturing a film structure in which a transfer material is transferred to both sides of a continuously running film and cured.
The first coating step of applying a transfer material containing an ultraviolet curable resin to the surface of the film, and
A first transfer pattern is formed between a fine first concavo-convex pattern type and two rows of first alignment mark types provided along the feed direction separated in a width direction intersecting the feed direction of the film. The first transfer pattern is transferred to the transfer material applied to the surface of the film while the 1 transfer roll is pressed by the first pressure roll, and the transfer material is cured by ultraviolet rays to form a first cured film. The first curing step and
A second coating step of applying a transfer material containing an ultraviolet curable resin to the back surface of the film, and
A second transfer pattern was formed between a fine second concavo-convex pattern type and two rows of second alignment mark types provided along the feed direction at intervals in the width direction intersecting the feed direction of the film. While pressurizing the second transfer roll with the second pressure roll, the second transfer pattern is transferred to the transfer material applied to the back surface of the film, and the transfer material is cured by ultraviolet rays to form a second cured film. The second curing step to be performed and
A first detection step for detecting a pitch in the width direction, which is a distance between marks in the width direction of the first alignment mark included in the first cured film, corresponding to the first alignment mark type.
An intermediate tension detection step for detecting an intermediate tension of the film between the first curing step and the second curing step, and an intermediate tension detecting step.
A second detection step of detecting a pitch in the second width direction, which is a distance between marks in the width direction of the second alignment mark included in the second cured film, corresponding to the second alignment mark type.
A torque correction step of correcting the torque for driving the second pressurizing roll so that the pitch in the second width direction coincides with the pitch in the first width direction.
A method for manufacturing a film structure, including. A position or rotation speed correction step for correcting the position or rotation speed of the second transfer roll so that the amount of misalignment between the first alignment mark and the second alignment mark detected in the second detection step is reduced. The method for producing a film structure according to claim 1, further comprising. A film structure manufacturing device in which a transfer material is transferred to and cured on both sides of a continuously running film.
The first coating part for applying the transfer material containing the ultraviolet curable resin to the surface of the film, and
A first transfer pattern is formed between a fine first concavo-convex pattern type and two rows of first alignment mark types provided along the feed direction separated in a width direction intersecting the feed direction of the film. 1 transfer roll and
A first pressure roll that presses the first transfer pattern of the first transfer roll onto the surface of the film,
A first cured portion that forms a first cured film by curing the transfer material to which the first transfer pattern is transferred on the surface of the film with ultraviolet rays.
A second coating portion for coating a transfer material containing an ultraviolet curable resin on the back surface of the film, and a second coating portion.
A second transfer pattern is formed between the fine second uneven pattern type and the two rows of second alignment mark types provided along the feed direction separated in the width direction intersecting the feed direction of the film. 2 transfer rolls and
A second pressure roll that presses the second transfer pattern of the second transfer roll on the back surface of the film,
A second cured portion that forms a second cured film by curing the transfer material to which the second transfer pattern is transferred on the back surface of the film with ultraviolet rays.
A first detection unit that detects a pitch in the width direction, which is a distance between marks in the width direction of the first alignment mark included in the first cured film, corresponding to the first alignment mark type.
An intermediate tension detection unit that detects the intermediate tension of the film between the first curing step and the second curing step,
A second detection unit that detects a pitch in the second width direction, which is a distance between marks in the width direction of the second alignment mark included in the second cured film, corresponding to the second alignment mark type.
A torque correction unit that corrects the torque for driving the second pressurizing roll so that the pitch in the second width direction coincides with the pitch in the first width direction.
A device for manufacturing a film structure.

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