KR20200094921A - Conductance Adjustable Gasket Unit and Method of Adjusting Conductance Using the Gasket Unit - Google Patents

Abstract

The present invention discloses a gasket capable of adjusting conductance capable of adjusting the conductance of a gas flowing through a gas line and capable of easily adjusting the conductance of gas flowing through a gas line and preventing eddy currents generated around the gasket, and a conductance control method using the gasket. A gasket unit is used to block the empty space of a gland to prevent eddy currents occurring at a gas line connection, and, the gasket unit serves as a key way to prevent a sealing problem caused by a conventional gasket mounting error when the gasket is mounted on the gland. In addition, since only the gasket unit needs to be changed without replacing a separate processed product when replacing the gas line according to the change of condensation, thereby reducing work time and cost and improving work efficiency according to replacement.

Description

Conductance Adjustable Gasket Unit and Method of Adjusting Conductance Using the Gasket Unit {Conductance Adjustable Gasket Unit and Method of Adjusting Conductance Using the Gasket Unit}

The present invention relates to a conductance-adjustable gasket and a conductance control method using the gasket.More specifically, the conductance of the gas flowing in the gas line can be easily adjusted, and the conductance can be adjusted to prevent eddy currents generated around the gasket. It relates to a gasket and a conductance control method using the gasket.

Semiconductor manufacturing facilities are generally made of various processes, such as a thin film deposition process, an etching process, a diffusion process, and a cleaning process. For these processes, semiconductor manufacturing facilities such as chemical vapor deposition equipment and etching equipment are used.

A semiconductor manufacturing facility includes an external supply device for storing various process gases necessary for performing each process, a gas line for receiving process gas from the external supply device, and a nozzle for injecting gas into the facility through the gas line.

In this case, the gas lines may be connected to each other using a gas line connector to extend the gas line according to the installation environment and structure of the workplace or to change the conductance of the gas flowing through the gas line.

1 is a view showing a conventional gas line connection.

2 is a view showing a gas flow of a gas line connection portion equipped with a conventional gasket.

Referring to FIGS. 1 and 2, the conventional gas line connection part 100 includes two glands 110 and 120, a female screw nut 130, a male screw nut 140, and a gasket 150.

That is, the grounds 110 and 120 are respectively fired to the connected gas line, and the gasket 150 is mounted between the gland 110 and the gland 120, and then gas is supplied by using the female screw nut 130 and the male screw nut 140. The lines are connected to each other.

At this time, the gasket 150 is compressed and mounted between the gland 110 and the gland 120 to prevent gas leakage, and the more toxic gas is, the greater the importance of sealing.

However, when the gasket 150 is used to connect the gland 110 and the gland 120, as shown in FIG. 2, the gasket 150 and the gland 110,120 are formed by the structure of the gland 110,120. ), an empty space is formed. Therefore, when gas is moved, a vortex phenomenon occurs in an empty space, which affects the flow velocity of the gas flowing through the gas line, or, in the case of a temperature-sensitive gas, it is cured at the corresponding portion due to the vortex phenomenon, thereby generating particles.

In addition, when the gas line is replaced in order to change the conductance of the gas in the gas line, since the gas line connection part and the surrounding gas line must all be replaced, the work time and cost are consumed.

Korean Patent Registration 10-1007640

The technical problem to be achieved by the present invention is to provide a gasket capable of adjusting conductance that can easily control the conductance of gas flowing through a gas line and prevent eddy currents generated around the gasket, and a conductance control method using the gasket.

In order to solve the above-described problems, the gasket unit capable of adjusting conductance of the present invention is mounted to maintain gas tightness at a connection part connecting gas lines through which noxious gas flows to each other, and has an inner diameter formed so that noxious gas flows in the center. And a gasket of, an insert mounted on the gasket to change the size of the inner diameter, and a fixing member that fixes the insert and the gasket and has an annular shape.

The insert may include an annular protrusion inserted into an inner diameter of the gasket, and a head portion positioned above the protrusion and formed in an annular shape to fix the inserted protrusion.

The protrusion center may include a through hole communicating with the head, and the through hole may have a size smaller than the inner diameter of the gasket.

The outer diameter of the head portion and the outer diameter of the fixing member may have the same size, but may have a size larger than the inner diameter of the gas line.

In order to solve the above-described problems, the conductance control method using the gasket unit of the present invention includes the steps of disassembling a gas line connection mounted on an individual gas line branching from the main gas line, and conforming to the conductance changed in the disassembled gas line connection And mounting the gasket unit and mounting the gas line connection portion on which the gasket unit is mounted to the individual gas line.

The gasket unit is mounted to maintain gas tightness at a connection portion connecting gas lines through which noxious gas flows to each other, and an annular gasket having an inner diameter formed so that noxious gas flows in the center, and to change the size of the inner diameter It may include an insert mounted on the gasket and a fixing member that fixes the insert and the gasket and has an annular shape.

The insert may include an annular protrusion inserted into an inner diameter of the gasket, and a head portion positioned above the protrusion and formed in an annular shape to fix the inserted protrusion.

In the step of mounting the gasket unit, the step of mounting the insert suitable for the changed conductance to the gasket and fixing the insert using the fixing member so as to be fixed to the gasket may be further included.

In the step of mounting the gasket unit, the step of inserting the gasket unit into a gland may be further included, and when the gasket unit is inserted into the gland, the protrusion and the fixing member may serve as key grooves.

In the step of mounting the gasket unit, the step of mounting an exhaust gas line suitable for conductance changed after mounting the gasket unit may be further included.

According to the present invention described above, by using the gasket unit to block the empty space of the gland, it is possible to prevent eddy currents occurring in the gas line connection part.

In addition, since only the gasket unit needs to be changed without replacing a separate processed product when replacing the gas line according to the change in condensation, it is possible to save working time and cost, thereby improving work efficiency according to the replacement.

Furthermore, when the gasket is mounted on the gland, the gasket unit can serve as a keyway, thereby preventing a sealing problem caused by a conventional mounting error of the gasket.

The technical effects of the present invention are not limited to those mentioned above, and other technical effects not mentioned will be clearly understood by those skilled in the art from the following description.

1 is a view showing a conventional gas line connection.
2 is a view showing a gas flow of a gas line connection portion equipped with a conventional gasket.
3 is an exploded perspective view showing a gas line connection to which the gasket unit of the present invention is applied.
Figure 4 is a cross-sectional view showing a gas line connection to which the gasket unit of the present invention is mounted.
5 is a perspective view showing a gasket unit of the present invention.
6 is a rear view showing the gasket unit of the present invention.
7 is a view showing an embodiment of a conventional method for replacing a gas line connection according to a change in conductance.
8 is a view showing a method of replacing a gas line connection according to a change in conductance of the present invention.
9 is a view showing a gas flow of a gas line connection portion equipped with a gasket unit of the present invention.
10 is a view showing an example of mounting a gasket in a conventional gas line connection.
11 is a view showing an example of mounting a gasket in the gas line connection portion of the present invention.

The present invention can be applied to a variety of transformations and may have various embodiments, and specific embodiments will be illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and should be understood to include all conversions, equivalents, and substitutes included in the spirit and scope of the present invention. In the description of the present invention, when it is determined that a detailed description of known technologies related to the present invention may obscure the subject matter of the present invention, the detailed description will be omitted.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings, and in describing with reference to the accompanying drawings, identical or corresponding components are assigned the same reference numbers, and redundant description thereof will be omitted. Shall be

3 is an exploded perspective view showing a gas line connection to which the gasket unit of the present invention is applied.

Figure 4 is a cross-sectional view showing a gas line connection to which the gasket unit of the present invention is mounted.

3 and 4, the gas line connection part 200 to which the gasket unit according to the present invention is applied includes a first gland 210, a second gland 220, a female screw nut 230, and a male screw nut. 240) and a gasket unit 300.

The first ground 210 is connected to a gas supply source that supplies process gas to semiconductor manufacturing equipment, and is connected through a gas supply line 10, and the second ground 220 is a semiconductor through which gas supplied from the gas supply source is injected. It is connected to the manufacturing equipment, it is connected through the gas discharge line (20). In addition, the first ground 210 and the second ground 220 may be connected to each other so that the gas supplied from the gas supply source is discharged to the semiconductor manufacturing equipment through the gas line connector 200.

The female screw nut 230 and the male screw nut 240 are fastened to each other so that the first gland 210 and the second gland 220 are in close contact with each other and fixed to each other. That is, the female screw nut 230 is connected to the gas supply line 10 to which the first gland 210 is connected, and the male screw nut 240 is connected to the gas discharge line 20 to which the second gland 220 is connected, The first ground 210 and the second ground 220 are in close contact with each other by fastening the female screw nut 230 and the male screw nut 240 together in a state in which the first ground 210 and the second ground 220 are in close contact. Can be fixed. Here, the female screw nut 230 and the male screw nut 240 connected to the first ground 210 and the second ground 220, respectively, may be connected in opposite directions to each other.

The gasket unit 300 may be disposed between the first ground 210 and the second ground 220. That is, the gasket unit 300 is connected between the first gland 210 and the second gland 220 to perform a sealing role to prevent the process gas supplied from the gas supply source from leaking from the gas line connection unit 200. have.

5 is a perspective view showing a gasket unit of the present invention.

6 is a rear view showing the gasket unit of the present invention.

5 and 6, the gasket unit 300 according to the present invention includes a gasket 310, an insert 320, and a fixing member 330.

The gasket 310 is formed in an annular shape in which an inner diameter is formed so that noxious gas flows at the center, and a fixing part 311 is formed around the annular shape so that the gasket 310 can be compressed and fixed to the ground. In addition, since the gasket 310 is a portion in contact with a harmful gas required for a semiconductor manufacturing process, it is preferable to be formed of a metallic material to prevent external damage due to corrosion caused by the contact. As a metallic material, for example, it may be formed of any one of stainless steel (SUS), zinc, copper, or nickel.

The insert 320 is inserted into the inner diameter of the gasket 310 to change the size of the inner diameter of the gasket 310 through which the process gas flows. That is, the conductance of the gas flowing through the inner diameter of the gasket 310 can be changed by the insert 320.

In addition, the insert 320 may include an annular protrusion 321 inserted into an inner diameter and a head portion 322 positioned above the protrusion 321 and formed in an annular shape to fix the protrusion 321.

That is, in the insert 320, when the protrusion 321 is inserted into the inner diameter of the gasket 310 by a predetermined length, the head part 322 is in close contact with the outer surface of the gasket 310 to fix the protrusion 321 . Accordingly, it is preferable that the outer diameter of the head portion 322 is formed larger than the outer diameter of the protrusion portion 321. In addition, the inserted protrusion 321 is fixed by an annular fixing member 330 mounted on the inner surface of the gasket 310 so that the insert 320 and the gasket 310 may be fixed to each other.

Here, at the centers of the protrusion 321 and the head 322, a through hole 323 is formed so that a gas suitable for the conductance to be changed flows. That is, in order to change the conductance of the process gas flowing through the gas line, as in the prior art, without the need to replace the gasket 310 suitable for the conductance, the insert 320 having the through hole 323 suitable for the conductance is installed in the existing gasket ( By mounting on 310), it is possible to easily replace the gas line connection part 200 by changing the conductance. Here, it is preferable that the size of the through hole 323 is smaller than the inner diameter of the gasket 310. Accordingly, the changed conductance has a conductance value smaller than the conductance before the change.

7 is a view showing an embodiment of a conventional method for replacing a gas line connection according to a change in conductance.

8 is a view showing a method of replacing a gas line connection according to a change in conductance of the present invention.

First, referring to FIG. 7, FIG. 7 (a) shows that the supply gas supplied from the gas supply source by the main gas line 30 is branched into three individual gas lines 10 and connected to the gas line connection part 200, respectively. It shows the structure that becomes. Here, the individual gas lines 10 branched respectively have the individual gas lines 10 branched so that the same conductance flows, and the gas line connection portions 200 having the same inner diameter of the gasket 310.

At this time, in the case of maintaining the first gas line (line1) and the third gas line (line3) among the individual gas lines (10) and changing the conductance of the second gas line (line2), the conventional replacement method is shown in FIG. As shown in (b), the branch line 40 to which the main gas line 30 and the individual gas line 10 are connected, a gasket 310 suitable for a conductance whose inner diameter is changed, and a gasket 310 to be changed Both the fitting gas line connection 200 and the exhaust gas line 20 must be replaced. Therefore, it has a disadvantage in that it takes a lot of work time during the replacement and the cost of the processed product to be replaced.

However, the replacement method according to the conductance change of the present invention, as shown in Fig.8(b), maintains the gas line connection part 200 as before, and only the gasket unit 300 suitable for the changed conductance is the gas line connection part. Replace it at (200).

That is, in the conventional replacement method in which all the gas line connection part 200 suitable for the changed conductance and the branch line 40 suitable for the changed gas line connection part 200 are reprocessed, and all gas lines are disassembled to mount them. In contrast, the replacement method according to the present invention maintains both the main gas line 30 and the individual gas line 10, and only the gas line connection part 200 is disassembled in the individual gas line 10, and an insert suitable for the changed conductance ( 320) and the exhaust gas line 20 only need to be replaced after being installed at the gas line connection part 200.

Therefore, compared to the conventional replacement method, it is possible to reduce the cost and working time consumed for the additional processed product, and thus, the work efficiency may be improved.

9 is a view showing a gas flow of a gas line connection portion equipped with a gasket unit of the present invention.

2 and 9, in the case of connecting between the gland 110 and the gland 120 using a conventional gasket 150, as shown in FIG. 2, between the gasket 150 and the gland 110, 120 An empty space is formed in the. That is, in the structure of the grand (110, 120), the size of the expansion holes (112, 122) formed on one surface of the grand (110, 120) and communicated with the inner surface of the grand (110, 120) than the size of the inner diameter (111, 121) formed in the grand (110, 120) Since it has a larger structure, when the gasket 150 is mounted between the first gland 110 and the second gland 120, the expansion holes 112 and 122 of the first gland 110 and the second gland 120 An empty space is formed.

Accordingly, the gas introduced into the grounds 110 and 120 through the gas line has a disadvantage in that a vortex phenomenon occurs in the empty spaces of the grounds 110 and 120 when the gas is moved, thereby reducing the flow velocity of the gas flowing through the gas line. In addition, in the case of a gas sensitive to temperature, particles are generated by curing at the corresponding portion due to the above-described vortex phenomenon. These particles accumulate inside the gas line over time and act as a factor that hinders smooth gas flow.

However, as shown in FIG. 9, the gasket unit 300 of the present invention is mounted on the gas line connection part 200 by the insert 320 and the fixing member 330 inserted into the gasket 310. ) Can be filled. That is, the empty space formed by the first gland 210 can be filled by the fixing member 330, and the second gland 220 is formed by the head portion 322 of the insert 320 inserted into the gasket 310. It can fill the empty space formed by Therefore, the process gas introduced through the first gland 210 does not flow in the direction of the expansion holes 212 and 222 of the grounds 210 and 220, but into the second gland 220 through the through hole 323 of the insert 320. Since it is discharged, it is possible to prevent eddy currents generated in the empty spaces of the grounds 210 and 220 when the gas is moved within the gas line connection part 200, and it is possible to solve the particle problem due to the vortex prevention.

Here, in order to fill the empty spaces of the grounds 210 and 220 by the head portion 322 and the fixing member 330, the outer diameter of the head portion 322 and the outer diameter of the fixing member 330 have the same size, but the gas line It is preferable to form the inner diameter of (10, 20) to have a size larger than the inner diameters (211,221) of the ground (210, 220).

In addition, the insert 320 and the fixing member 330 may function as a keyway so that the gasket 310 is not shifted and is normally mounted when the gasket unit 300 is mounted on the ground 220.

10 is a view showing an example of mounting a gasket in a conventional gas line connection.

2 and 10, when the gasket 150 is mounted in the conventional gas line connection part 100, as in FIG. 2, the gland 120 is completely sealed between the gland 110 and the gland 120. ) When the gasket 150 is mounted, the gasket 150 is positioned on the gland 120, and the gasket 150 is compressed by applying a force in the gland 120 direction, thereby providing a gap between the gasket 150 and the gland 120. It should be fixed so that there is no.

However, when the gasket 150 is pressed in the direction of the gland 120, when the force direction is not applied in the direction of the center of the gland 120 but is applied at an angle in one direction, as shown in FIG. 10, the gasket 150 is inclined. It is fixed to the ground 120 in a true state. Such gasket 150 mounting error occurs in many cases because the gasket 150 must be crimped using only the operator's finger force when the gasket 150 is mounted, and the direction and magnitude of the force applied to the gasket 150 are different for each operator. do.

In addition, as described above, the gasket 150 is not normally mounted on the gland 120, and if the gasket 150 is mounted at an angle, the sealing by the gasket 150 is not properly performed, so that gas flowing through the gas line may leak to the outside. In general, since most of the process gases for the semiconductor manufacturing process are harmful gases that are harmful to the human body, leakage of gas may lead to a large-scale personal accident. Therefore, the work of mounting and sealing the gasket 150 occupies an important part.

11 is a view showing an example of mounting a gasket in the gas line connection portion of the present invention.

Referring to FIG. 11, the insert 320 and the fixing member 330 of the gasket unit 300 according to the present invention in order to prevent the sealing problem due to the mounting error of the gasket 150 in the related art When the gasket 310 is mounted on the ground 220, an error in mounting of the gasket 310 may be prevented by serving as a keyway.

That is, when the gasket 310 is mounted on the gland 220, as shown in FIG. 11, the protrusion 321 of the insert 320 is in the direction of the inner diameter 221 of the gland 220, and the fixing member 330 is Since it can serve as a keyway for guiding the gland 220 in the direction of the expansion hole 222, the gasket unit 300 can be normally mounted in the direction of the gland in which the operator applies a force.

In addition, when applying a force to mount the gasket unit 300, the operator applies the force to the head portion 322 of the insert 320 protruding from the gasket 310, so that the applied force is not distributed and the gasket 310 It can transmit the force in the direction of the center of. Therefore, the applied force is biased to one side, so that the gasket 310 is tilted in one direction to prevent a mounting error.

The gasket 310 generated in the prior art by the head portion 322 of the insert 320 that prevents the protrusion 321 and the fixing member 330 of the insert 320 from distributing the applied force and the role of the keyway It can prevent the problem of harmful gas leakage due to the installation error of

As described above, the gasket unit 300 capable of adjusting conductance according to the present invention and the conductance adjustment method using the gasket unit 300 are provided by using the gasket unit 300 to block the empty space of the gland. ), the eddy current can be prevented. In addition, since only the gasket unit 300 needs to be changed without replacing a separate processed product when replacing a gas line according to a change in conductance, it is possible to reduce working time and cost, thereby improving work efficiency according to the replacement. Furthermore, when the gasket 310 is mounted on the gland, the gasket unit 300 may serve as a keyway, so that a sealing problem caused by a conventional mounting error of the gasket 150 may be prevented.

On the other hand, the embodiments of the present invention disclosed in the specification and drawings are merely presented as specific examples to aid understanding, and are not intended to limit the scope of the present invention. It is apparent to those skilled in the art to which the present invention pertains that other modified examples based on the technical idea of the present invention can be implemented in addition to the embodiments disclosed herein.

210: first grand 220: second grand
230: female nut 240: male nut
300: gasket unit 310: gasket
320: insert 321: protrusion
322: head

Claims (10)

An annular gasket mounted to maintain gas tightness at a connection portion connecting gas lines through which noxious gas flows to each other, and having an inner diameter formed so that noxious gas flows in the center;
An insert mounted on the gasket to change the size of the inner diameter; And
A gasket unit capable of adjusting conductance comprising a fixing member formed in an annular shape to fix the insert and the gasket. The method of claim 1, wherein the insert,
An annular protrusion inserted into the inner diameter of the gasket; And
A gasket unit capable of adjusting conductance, comprising a head portion positioned above the protrusion and fixing the inserted protrusion in an annular shape. According to claim 2,
In the center of the protrusion includes a through hole communicating with the head,
The size of the through hole is a gasket unit capable of adjusting conductance having a size smaller than the size of the inner diameter of the gasket. The method of claim 1,
The outer diameter of the head portion and the outer diameter of the fixing member have the same size,
A gasket unit capable of adjusting conductance having a size larger than the inner diameter of the gas line. Disassembling a gas line connection unit mounted on an individual gas line branching from the main gas line;
Mounting a gasket unit suitable for a changed conductance to the disassembled gas line connection portion; And
A method for adjusting conductance using a gasket unit, comprising the step of mounting the gas line connection part on which the gasket unit is mounted to the individual gas line. The method of claim 5, wherein the gasket unit,
An annular gasket mounted to maintain gas tightness at a connection portion connecting gas lines through which noxious gas flows to each other, and having an inner diameter formed so that noxious gas flows in the center;
An insert mounted on the gasket to change the size of the inner diameter; And
A method for adjusting conductance using a gasket unit that fixes the insert and the gasket and includes a fixing member formed in an annular shape. The method of claim 6, wherein the insert,
An annular protrusion inserted into the inner diameter of the gasket; And
A gasket unit capable of adjusting conductance, comprising a head portion positioned above the protrusion and fixing the inserted protrusion in an annular shape. The method of claim 7, wherein in the step of mounting the gasket unit,
A method for adjusting conductance using a gasket unit, further comprising: mounting the insert suitable for the change in conductance to the gasket, and fixing the insert to the gasket using the fixing member. The method of claim 7, wherein in the step of mounting the gasket unit,
Further comprising the step of inserting the gasket unit into a gland,
When the gasket unit is inserted into the gland, the protrusion and the fixing member serve as a keyway. A method of adjusting conductance using a gasket unit. The method of claim 5, wherein in the step of mounting the gasket unit,
Conductance adjustment method using a gasket unit further comprising the step of mounting an exhaust gas line suitable for conductance changed after mounting the gasket unit.

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