KR20200094562A - Clamp for gas piping with gas sensing unit - Google Patents

Abstract

The present invention relates to a gas piping clamp having a gas detection unit that connects pipes to each other and detects toxic gas flowing out through a pipe joint. The gas piping clamp configured to surround and connect a pair of pipes provided with a flange portion includes: the first and second clamp bodies connected by at least one hinge portion; a locking means provided on the other side of the hinge portion to prevent the first and second clamp bodies from being opened by rotating around the hinge portion, and locking the first and second clamp bodies by applying a tightening force; a gas detection unit that is located between a plurality of through-holes penetrating the circumference of the first and second clamp bodies and is visually displayed to the outside according to the detected gas.

Description

Clamp for gas piping with gas detection unit{CLAMP FOR GAS PIPING WITH GAS SENSING UNIT}

The present invention relates to a clamp for a gas pipe that connects the pipes to each other, but is provided with a gas detector for detecting toxic gas flowing out through the pipe joint.

In general, various fluids and gases are used in various industrial sites such as a semiconductor business site, and such fluids and gases are guided and moved along a pipe.

Moreover, the process of producing semiconductor devices is performed by a series of processes that selectively perform processes such as exposure, etching, diffusion, and deposition, and semiconductor manufacturing equipment for producing them is in strict conditions to improve the precision and cleanliness of the process. It is used under.

The process of semiconductor manufacturing equipment used for etching, diffusion and deposition is mainly performed by injecting process gas from a high-vacuum process chamber. Gas lines using piping are connected to supply process gas to the process chamber.

In addition, an exhaust line is connected to the process chamber using piping to control the air pressure in the process chamber and exhaust the process gas or reaction gas remaining after reacting in the process chamber.

In addition, since the gas line or the exhaust line inevitably includes a connection portion, a pipe connection portion is formed in the connection portion, and it is common to use a pipe binding clamp to fix the pipe connection portion.

Conventionally, in order to check whether the gas leaks from the pipe by checking the leaked gas in the pipe, a method of auditoryly checking whether sound is generated due to the gas leak in the pipe, is harmless to the human body, or has a peculiar smell A method has been used to check whether there is smell due to a gas leak in a piping facility for transporting gas, or a method of checking whether gas is leaked by including soapy water or the like in the pipe.

In addition, in recent years, development of a sensing sensor capable of detecting whether a specific gas leaks is accelerating, and leaks of pipe joints are carried while carrying a separate mobile device equipped with the sensing sensor to detect whether each gas leaks. Was to check whether.

In the case of gas piping, it is necessary to be able to quickly determine whether gas is leaking to stabilize the working environment, as it can harm the human body and cause environmental pollution.

Korean Registered Patent Publication No. 1495784

The present invention is to provide a gas pipe clamp having a gas detection unit for detecting a gas leak with a pipe binding clamp used in a semiconductor business or the like.

In addition, the present invention is to provide a clamp for a gas pipe having a gas sensing unit for detecting leaking gas and displaying it so that an operator can easily visually judge it.

The technical problems to be achieved by the present invention are not limited to the technical problems mentioned above, and other technical problems that are not mentioned will be clearly understood by those skilled in the art from the following description. Will be able to.

Gas piping clamp having a gas detection unit of the present invention for achieving the above object, in the clamp for piping configured to surround and connect a pair of pipes provided with a flange, the first and the first connected to at least one hinge portion 2 clamp body; Locking means provided on the other side of the hinge portion so that the first and second clamp bodies do not open by rotating around the hinge portion, and lock the first and second clamp bodies by applying a tightening force; And a gas detection unit visually displayed externally according to the gas detected by being located between a plurality of through holes formed through the circumference of the first and second clamp bodies.

In addition, the gas sensing unit is characterized in that it is a sensing sensor that detects the gas and changes color by the detected gas.

In addition, the gas detection unit detects the gas and a sensor that changes color by the detected gas; And a cover housing accommodated therein and coupled to the through-hole to protect the sensor.

In addition, the sensor is characterized in that the color changes when reacting with a fluorine-based gas containing a hydrogenated transition metal oxide.

In addition, the transition metal oxide is characterized in that it comprises tungsten oxide, molybdenum oxide, and niobium oxide.

In addition, the cover housing is formed into a mesh-shaped mesh portion to allow gas to flow into the clamp body, and a transparent glass-shaped glass portion exposed to the color of the sensing portion outside the clamp body. do.

In addition, the cover housing is fitted to the through-hole, it is characterized in that the coupling portion is further formed to be fixed.

In addition, the coupling portion is characterized in that the screw portion is formed by fastening to a nut portion formed on the inner periphery of the through hole, or by forming a locking portion and fastening with the clamp body portion by screws.

In addition, the sensing sensor is fitted to the through-hole, it is characterized in that it further forms a direct coupling portion to be fixedly coupled.

In addition, the direct coupling portion is characterized in that the screw portion is formed by fastening to the nut portion formed on the inner periphery of the through hole, or the engaging portion is formed by engaging the screw with the clamp body portion.

In addition, it is installed on one side of the first and second clamp bodies to prevent loosening so that the locking state of the locking device is not released, but interlocks with the fixing lever installed to protrude so as to be rotated. It is installed so as to be locked and released according to the rotation direction of the fixing lever fixing device for a locking means; And a stopper configured to fix rotation of the fixing device.

As explained above,

The present invention has the effect that the operator can easily and visually check in real time the poisonous gas leaking between the pipe and the pipe to which the worker is coupled, thereby facilitating gas leak detection.

In addition, the present invention has an effect of increasing the work efficiency of the operator because the operator does not have to separately perform gas leak inspection on a regular basis.

1 is a perspective view showing a gas pipe clamp having a gas sensing unit according to an embodiment of the present invention.
2 is a cross-sectional view showing a gas pipe clamp having a gas sensing unit according to an embodiment of the present invention.
3 and 4 are views showing a combination of a gas sensing unit and a clamp body of a gas pipe clamp having a gas sensing unit according to a first embodiment of the present invention.
5 is an exploded perspective view showing a gas detection unit of a gas pipe clamp having a gas detection unit according to a second embodiment of the present invention.
6 and 7 are views showing a combination of a gas detection unit and a clamp body of a gas pipe clamp having a gas detection unit according to a second embodiment of the present invention.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings.

In addition, the size or shape of the components shown in the drawings may be exaggerated for clarity and convenience of description, and terms specifically defined in consideration of the configuration and operation of the present invention may vary depending on the intention or custom of the user or operator And definitions of these terms should be made based on the contents throughout this specification.

1 and 2 are views showing a gas pipe clamp having a gas detection unit according to an embodiment of the present invention, the gas detection pipe clamp 1000 includes a first clamp body 110, a second clamp body 120 ), the hinge 130, the locking means 140, and the gas detection unit 200.

The present invention gas detection pipe clamp (1000) is made to surround the flange portions (1a, 2a) formed in the pipes (1, 2), and is connected to at least one hinge portion 130 to enable opening And the second clamp body (110, 120), is provided on the other side of the hinge portion 130 so that the first and second clamp bodies (110, 120) is rotated around the hinge portion 130 so as not to open A gas detection unit for detecting gas in the first and second clamp bodies 110 and 120 to detect the gas leaking between the locking means 140 and the pipe 1 and the pipe 2 configured to apply a tightening force ( 200).

The first and second clamp bodies 110 and 120 are provided with insertion grooves 111 and 121 for each of the flange portions so that the flange portions 1a and 2a formed in the pipes 1 and 2 are received inside. The pipes 1 and 2 are connected to the grooves 111 and 121 so that the flange portions 1a and 2a are accommodated.

At least one end portion of the first and second clamp bodies 110 and 120 is hinged so as to easily accommodate the flange portions 1a and 2a formed in the pipes 1 and 2 inside, so that they can be opened on both sides. It has the above hinge portion 130.

The first and second clamp bodies 110 and 120 are prevented from being opened by rotating around the hinge portion 130 on the other side where the hinge portion 130 is formed, and by applying a tightening force, the first and second clamp bodies 110 , 120).

That is, one end of the first clamp body 110 is provided so that a locking screw shaft (not shown) of the locking means 140 is configured to rotate around the hinge shaft 141, and the second clamp body At one end of 120, an inserting portion into which the spline nut 142 for locking is inserted and a locking end to which the spline nut 142 for locking is formed are locked by the spline nut 142.

The locking means 140 secures the first and second clamp bodies 110 and 120 connected to the hinge part 130 from rotating around the hinge part 130 so as not to be opened, while being tightened to the inside to tighten. Is to be able to connect the pipes (1, 2) firmly.

It is additionally installed on one side of the first and second clamp bodies 110 and 120 to prevent loosening of the locking spline nut 142 of the locking means 140 so as not to be released, so that it can be rotated. It is installed to interlock with the fixing device 143 for the locking means installed protrudingly, and the fixing device 143. Locking and loosening is performed according to the rotational direction of the fixing device 143, and the rotation of the fixing device 143 can be fixed. It further comprises a stopper 144 made to.

Fixing device 143 is a locking portion (not shown) extending to penetrate the second clamp body 120 serves as a locking jaw to prevent the spline nut 142 from being released.

The gas detector 200 is positioned between the plurality of through holes 112 and 122 formed through the circumference of the first and second clamp bodies 110 and 120 to visually display the gas according to the detected gas. have.

The gas detection unit 200 may be a chemical detection sensor 210 that detects gas by itself and changes color by the detected gas.

At this time, the sensing sensor 210 is fitted into the through holes 112 and 122 formed in the first and second clamp bodies 110 and 120, but as shown in FIGS. 3 and 4, it is directly coupled to be fixedly coupled. 3, a screw portion 211 is formed at one end of the sensing sensor 210 to fasten the nut portion 212 formed at the inner periphery of the through holes 112 and 122. As shown in FIG. 4, the locking part 213 may be formed at one end of the sensing sensor 210 to be coupled with the first and second clamp bodies 110 and 120 with screws 214.

Here, the sensing sensor 210 changes color when it reacts with a fluorine-based gas including a hydrogenated transition metal oxide, and the transition metal oxide includes tungsten oxide, molybdenum oxide, and niobium oxide.

These transition metal oxides can be colored by the insertion of hydrogen ions.

For example, when hydrogen is doped with tungsten trioxide (WO3) having a bright and transparent blue color, a color change occurs to a royal blue color, and when hydrogen is doped with transparent colorless molybdenum trioxide (MoO3), a color change occurs to blue, and light When hydrogen is doped with blue-colored niobium pentoxide (Nb2O5), color change may occur in yellow.

This color change causes electrons injected into the transition metal oxide due to doping of hydrogen to reduce transition metal ions as well as form a polaron inside the solid transition metal oxide to cause a change in the Fermi energy level, resulting in near infrared or visible light. It occurs because the absorption amount of the line increases.

That is, the sensing sensor 210 injects hydrogen to the transition metal oxide through UV irradiation, and causes the color change of the transition metal due to the injected hydrogen to be visually displayed.

One side of the sensing sensor 210 may be provided with a substrate of various materials and structures, this form is not limited.

In addition, the material of the substrate may be made of any one of paper, fiber, polymer, ceramic, glass, and metal.

In the first embodiment of the present invention, when the sensing sensor is directly coupled to the first and second clamp bodies 110 and 120, a direct coupling portion is further formed on the sensing sensor 210, but a substrate is formed on the sensing sensor 210. When possible, it is preferable that the direct bonding portion may be formed and bonded to the substrate.

In another embodiment, the gas detection unit 200 detects the gas and receives therein to protect the detection sensor 210 and the detection sensor 210 whose color is changed by the detected gas, and through-hole 112 , It may be formed of a cover housing 220 coupled to 122.

Here, the sensing sensor 210 is as described above, and as shown in FIGS. 5 to 7, the cover housing 220 allows gas to flow into the first and second clamp bodies 110 and 120. The mesh-shaped mesh portion 221 is formed.

At this time, the gas leaked through the mash unit 221 flows into the cover housing 220 so as to directly contact the detection sensor 21.

In addition, the color of the sensor 210 is exposed outside the first and second clamp bodies 110 and 120 to be formed of a glass part 222 in the form of a transparent glass so that it can be displayed externally.

In addition, as shown in FIG. 5, the cover housing 220 is fitted into the through holes 112 and 122 formed in the first and second clamp bodies 110 and 120, and further forms a coupling portion to be fixed and coupled. do.

Here, as shown in FIG. 6, the nut portion 212' formed on the inner periphery of the through holes 112 and 122 by forming a screw portion 211' at one end of the glass portion 222 of the cover housing 220. ), or as shown in FIG. 7, to form a locking portion 213' at one end of the glass portion 222, the locking portion 213' and the first and second clamp bodies 110 and 120 ) To form a screw hole to combine the two components with a screw 214'.

Therefore, the present invention has an effect of facilitating the detection of gas leakage because the operator can visually check the poisonous gas leaking between the pipe and the pipe to which the operator is coupled in real time.

In addition, the present invention has an effect of increasing the work efficiency of the operator because the operator does not have to separately perform gas leak inspection on a regular basis.

Although the embodiments according to the present invention have been described above, they are merely exemplary, and those skilled in the art will understand that various modifications and equivalent ranges of the embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be defined by the following claims.

1, 2...Piping
1a, 2a...flange part
1000...Pipe clamp for gas detection
100...clamp body
110...first clamp body
111, 121...insertion groove
112, 122...through hole
120...second clamp body
130...Hinge
140...lock
141...Hinge axis
142...spline nut
143...Fixing device
144...Stopper
200...gas detector
210...sensor
211, 211'...screw
212, 212'... Nut part
213, 213'...
214, 214'...screw
220...cover housing
221...mash part
222...glass part

Claims (11)

In the clamp for piping made to wrap and connect a pair of pipes provided with a flange,
First and second clamp bodies connected to at least one hinge portion;
Locking means provided on the other side of the hinge portion so that the first and second clamp bodies do not open by rotating around the hinge portion, and lock the first and second clamp bodies by applying a tightening force; And
Gas having a gas detection unit comprising a; gas detection unit visually displayed externally according to the gas detected and located between a plurality of through-holes formed through the circumference of the first and second clamp bodies Clamp for plumbing. The method according to claim 1,
The gas detection unit is a gas pipe clamp having a gas detection unit, characterized in that the sensor for detecting the gas and the color is changed by the detected gas. The method according to claim 1,
The gas detection unit detects the gas, and a sensor that changes color by the detected gas; And a cover housing accommodated therein to protect the sensor and coupled to the through hole; a gas pipe clamp having a gas detector. The method according to claim 2 or claim 3,
The detection sensor includes a hydrogenated transition metal oxide, the gas pipe clamp having a gas detection unit characterized in that the color changes when reacting with a fluorine-based gas. The method according to claim 4,
The transition metal oxide is a tungsten oxide, molybdenum oxide, and a gas piping clamp having a gas detector, characterized in that it comprises niobium oxide. The method according to claim 3,
The cover housing is formed into a mesh-shaped mesh part to allow gas to flow into the clamp body, and a transparent glass-shaped glass part exposed to the color of the sensing part outside the clamp body; Clamp for gas piping with sensing part. The method according to claim 3
The cover housing is fitted to the through-hole, the gas pipe clamp having a gas detection unit characterized in that it further comprises a coupling portion for fixed coupling. The method according to claim 7,
The coupling portion is a gas pipe clamp having a gas detection unit characterized in that the screw portion is formed by fastening to the nut portion formed on the inner periphery of the through-hole, or by forming a locking portion to be coupled by screwing with the clamp body portion. The method according to claim 2,
The detection sensor is fitted to the through-hole, the gas pipe clamp having a gas detection unit characterized in that it further forms a direct coupling to be fixed. The method according to claim 9,
The direct coupling portion is a gas pipe clamp having a gas sensing unit characterized in that the screw portion is formed by fastening to a nut portion formed on the inner periphery of the through-hole, or a locking portion is coupled to the clamp body portion by screws. The method according to claim 1,
It is installed on one side of the first and second clamp bodies to prevent loosening so that the locking state of the locking device is not released, but is installed to interlock with the fixing lever and the fixing lever installed to protrude so as to be rotated. And a locking device for locking means that is locked and released according to the rotational direction of the fixing lever; And
Clamp for a gas pipe having a gas detection unit, characterized in that it further comprises a; stopper (Stopper) made to fix the rotation of the fixing device.

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