KR20200049618A - Photosensitive resin composition for partition wall, cured product thereof, and production method thereof - Google Patents
Photosensitive resin composition for partition wall, cured product thereof, and production method thereof Download PDFInfo
- Publication number
- KR20200049618A KR20200049618A KR1020190134306A KR20190134306A KR20200049618A KR 20200049618 A KR20200049618 A KR 20200049618A KR 1020190134306 A KR1020190134306 A KR 1020190134306A KR 20190134306 A KR20190134306 A KR 20190134306A KR 20200049618 A KR20200049618 A KR 20200049618A
- Authority
- KR
- South Korea
- Prior art keywords
- photosensitive resin
- resin composition
- meth
- acid
- group
- Prior art date
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- 238000005192 partition Methods 0.000 title claims abstract description 63
- 239000011342 resin composition Substances 0.000 title claims abstract description 59
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 229920005989 resin Polymers 0.000 claims abstract description 38
- 239000011347 resin Substances 0.000 claims abstract description 38
- 239000000412 dendrimer Substances 0.000 claims abstract description 31
- 229920000736 dendritic polymer Polymers 0.000 claims abstract description 31
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 239000003999 initiator Substances 0.000 claims abstract description 13
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 64
- -1 mercapto compound Chemical class 0.000 claims description 52
- 150000001875 compounds Chemical class 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 34
- 239000000049 pigment Substances 0.000 claims description 31
- 239000011248 coating agent Substances 0.000 claims description 27
- 238000000576 coating method Methods 0.000 claims description 27
- 230000002940 repellent Effects 0.000 claims description 23
- 239000005871 repellent Substances 0.000 claims description 23
- 239000004593 Epoxy Substances 0.000 claims description 20
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 15
- 239000003086 colorant Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 12
- 229930185605 Bisphenol Natural products 0.000 claims description 10
- 239000003513 alkali Substances 0.000 claims description 10
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 8
- 125000004432 carbon atom Chemical group C* 0.000 claims description 8
- 239000011203 carbon fibre reinforced carbon Substances 0.000 claims description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 239000012860 organic pigment Substances 0.000 claims description 7
- 150000005846 sugar alcohols Polymers 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 6
- 239000004215 Carbon black (E152) Substances 0.000 claims description 5
- 230000004888 barrier function Effects 0.000 claims description 5
- 229930195733 hydrocarbon Natural products 0.000 claims description 5
- 150000008064 anhydrides Chemical class 0.000 claims description 3
- 150000001735 carboxylic acids Chemical class 0.000 claims description 3
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical group C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 239000012463 white pigment Substances 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 claims description 2
- 125000005843 halogen group Chemical group 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
- 239000000376 reactant Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 44
- 239000002253 acid Substances 0.000 description 30
- 239000003795 chemical substances by application Substances 0.000 description 20
- 238000011161 development Methods 0.000 description 20
- 238000006243 chemical reaction Methods 0.000 description 17
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 16
- 239000002904 solvent Substances 0.000 description 16
- 238000011156 evaluation Methods 0.000 description 15
- 239000002270 dispersing agent Substances 0.000 description 14
- 239000007787 solid Substances 0.000 description 14
- 239000000243 solution Substances 0.000 description 14
- 150000003628 tricarboxylic acids Chemical class 0.000 description 13
- 229910052731 fluorine Inorganic materials 0.000 description 12
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000003786 synthesis reaction Methods 0.000 description 11
- 230000037303 wrinkles Effects 0.000 description 11
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 10
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- 150000008065 acid anhydrides Chemical class 0.000 description 9
- 239000011737 fluorine Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 125000001183 hydrocarbyl group Chemical group 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 9
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 8
- 238000001723 curing Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 7
- 125000006159 dianhydride group Chemical group 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 7
- 125000001424 substituent group Chemical group 0.000 description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000000178 monomer Substances 0.000 description 6
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 5
- 125000003118 aryl group Chemical group 0.000 description 5
- 238000013329 compounding Methods 0.000 description 5
- 238000004132 cross linking Methods 0.000 description 5
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- 238000005227 gel permeation chromatography Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 239000004094 surface-active agent Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 4
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- 239000003112 inhibitor Substances 0.000 description 4
- 238000000016 photochemical curing Methods 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 4
- 125000003396 thiol group Chemical group [H]S* 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- PMNLUUOXGOOLSP-UHFFFAOYSA-M 2-sulfanylpropanoate Chemical compound CC(S)C([O-])=O PMNLUUOXGOOLSP-UHFFFAOYSA-M 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
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- 238000006845 Michael addition reaction Methods 0.000 description 3
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- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
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- 238000003491 array Methods 0.000 description 3
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- 235000010354 butylated hydroxytoluene Nutrition 0.000 description 3
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 3
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
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- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
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- HWCKGOZZJDHMNC-UHFFFAOYSA-M tetraethylammonium bromide Chemical compound [Br-].CC[N+](CC)(CC)CC HWCKGOZZJDHMNC-UHFFFAOYSA-M 0.000 description 3
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- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 2
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- YWFPGFJLYRKYJZ-UHFFFAOYSA-N 9,9-bis(4-hydroxyphenyl)fluorene Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 YWFPGFJLYRKYJZ-UHFFFAOYSA-N 0.000 description 2
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- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 2
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- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical compound C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 1
- 125000000168 pyrrolyl group Chemical group 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
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- JOUDBUYBGJYFFP-FOCLMDBBSA-N thioindigo Chemical compound S\1C2=CC=CC=C2C(=O)C/1=C1/C(=O)C2=CC=CC=C2S1 JOUDBUYBGJYFFP-FOCLMDBBSA-N 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- 125000004055 thiomethyl group Chemical group [H]SC([H])([H])* 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- 238000004448 titration Methods 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
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- 239000000080 wetting agent Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Epoxy Resins (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Optical Filters (AREA)
- Electroluminescent Light Sources (AREA)
- Polymerisation Methods In General (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
Abstract
Description
본 발명은 격벽용 감광성 수지 조성물 및 상기 수지 조성물을 경화해서 이루어지는 경화물 및 그 제조 방법에 관한 것이다.The present invention relates to a photosensitive resin composition for bulkheads, a cured product obtained by curing the resin composition, and a method for manufacturing the same.
최근, 유기 EL 소자, 양자점 디스플레이, TFT 어레이 및 파장 변환 소자 등을 포함하는 컬러필터의 제조에 있어서는 노광이 불필요하고, 필요한 부분에만 착색 재료를 도포하는 것이 가능한 잉크젯 방식에 의해, 화소 등의 유기층을 패턴 인쇄하는 잉크젯법이 채용되고 있다. 여기에서, 잉크젯법은 유리, 플라스틱 시트 등의 투명 기판 상에 격벽을 형성한 후, 상기 형성된 격벽에 둘러싸인 영역 내에 소정량의 유기층의 재료를 포함하는 잉크를 주입하는 방법이다.In recent years, in the manufacture of color filters including organic EL elements, quantum dot displays, TFT arrays, and wavelength conversion elements, exposure is unnecessary, and organic layers such as pixels are formed by an inkjet method capable of applying a coloring material only to necessary portions. The inkjet method for pattern printing is employed. Here, the inkjet method is a method of forming a partition on a transparent substrate such as a glass or plastic sheet, and then injecting ink containing a predetermined amount of an organic layer material into an area surrounded by the formed partition.
잉크젯 방식의 경우에는 격벽에 둘러싸인 영역 내에 잉크를 주입할 때에, 인접하는 영역 내에 잉크가 도입되는 것, 및 격벽에 잉크가 부착되는 것을 억제하기 위해서 격벽에 발(撥)잉크성을 부여하는 것이 필요하다. 또한, 격벽 내에 잉크를 유지하기 위해서, 격벽은 두꺼운 막인 것이 요구된다. 그러나, 격벽을 두껍게 함에 따라서, 노광된 부분에서의 막 두께 방향에 대한 가교 밀도의 차가 확대되기 때문에, 주름이 없고 양호한 형상의 격막을 얻는 것이 어렵다.In the case of the inkjet method, when ink is injected into an area surrounded by the partition wall, it is necessary to impart ink repellency to the partition wall in order to suppress the introduction of ink into the adjacent area and the adhesion of ink to the partition wall. Do. In addition, in order to retain ink in the partition wall, it is required that the partition wall is a thick film. However, since the difference in crosslinking density with respect to the film thickness direction in the exposed portion is enlarged as the partition wall is thickened, it is difficult to obtain a membrane having no wrinkles and a good shape.
특허문헌 1에서는 알칼리 가용성 수지로서 아크릴 공중합체를 첨가한 블랙 레지스트가 두께 1㎛ 이상의 두꺼운 막에 있어서, 주름의 발생을 억제하는 것이 개시되어 있다.Patent Document 1 discloses that a black resist to which an acrylic copolymer is added as an alkali-soluble resin suppresses the occurrence of wrinkles in a thick film having a thickness of 1 µm or more.
특허문헌 2에서는 다관능 아크릴레이트에, 다관능 아크릴레이트가 갖는 에틸렌성 이중결합에 대하여 소량의 다가 메르캅토 화합물을 마이클 부가시킨 수지상 폴리머가 개시되어 있다. 이에 따라, 굽힘에 대한 유연성과 내찰상성을 구비한 다분기 폴리머를 포함하는 수지 조성물을 제공할 수 있다고 한다. 여기에서, 수지상 폴리머는 덴드리머 또는 다분기 폴리머라고도 칭해진다.Patent Document 2 discloses a dendritic polymer in which a small amount of a polyhydric mercapto compound is added to the polyfunctional acrylate with respect to the ethylenic double bond of the polyfunctional acrylate. Accordingly, it is said that it is possible to provide a resin composition comprising a multi-branched polymer having flexibility and scratch resistance against bending. Here, the dendritic polymer is also referred to as a dendrimer or a multi-branched polymer.
특허문헌 1에서는 두꺼운 막이어도 주름을 억제할 수 있는 수지 조성물을, 특허문헌 2에서는 유연성, 내찰상성이 우수한 수지 조성물을 제공할 수 있다고 한다. 그러나, 본 발명자들의 검토에 의하면, 특허문헌 1, 2에 기재된 수지 조성물로 격벽을 형성한 경우에, 소망하는 광학 농도, 소망하는 단면 형상 및 경화했을 때에 수축차가 생기지 않는다는 모든 조건을 만족시키는 격벽은 얻어지지 않았다.In Patent Document 1, it is said that a resin composition capable of suppressing wrinkles even with a thick film, and Patent Document 2 can provide a resin composition excellent in flexibility and scratch resistance. However, according to the examination of the present inventors, when the partition wall is formed of the resin composition described in Patent Documents 1 and 2, the partition wall that satisfies all the conditions that a desired optical density, a desired cross-sectional shape, and no shrinkage difference when cured does not occur Was not obtained.
본 발명의 목적은 이러한 점을 감안하여 이루어진 것이고, 소망하는 광학 농도, 소망하는 단면 형상 및 경화했을 때에 수축차가 생기지 않는 격벽용 수지 조성물 및 그 경화물을 제공하는 것이다. 또한, 본 발명의 목적은 상기 수지 조성물을 사용한 격벽의 제조 방법을 제공하는 것이다.The object of the present invention has been achieved in view of these points, and it is to provide a resin composition for a barrier rib and a cured product thereof that do not cause a difference in shrinkage when cured and a desired optical density and desired cross-sectional shape. In addition, an object of the present invention is to provide a method for producing a partition wall using the resin composition.
본 발명에 따른 격벽용 감광성 수지 조성물은 (A) 불포화기 함유 감광성 수지와, (B) 2개 이상의 에틸렌성의 중합성 기를 말단에 갖는 수지상 폴리머와, (C) 광중합 개시제를 포함하는 격벽용 감광성 수지 조성물이다.The photosensitive resin composition for bulkheads according to the present invention comprises: (A) an unsaturated group-containing photosensitive resin, (B) a dendritic polymer having two or more ethylenically polymerizable groups at the ends, and (C) a photopolymerization initiator for a bulkhead comprising a photopolymerization initiator. It is a composition.
본 발명에 따른 경화물은 상기 격벽용 감광성 수지 조성물을 경화시켜 이루어지는 경화물이다.The cured product according to the present invention is a cured product obtained by curing the photosensitive resin composition for partition walls.
본 발명에 따른 격벽의 제조 방법은 (E) 성분이 흑색 안료 또는 혼색 유기 안료인 상기 격벽용 감광성 수지 조성물을 기판 상에 도포해서 도막을 형성하고, 상기 도막을 건조시키는 공정, 상기 도막을 자외선 노광 장치로 노광하는 공정과, 상기 도막을 알칼리 수용액으로 현상하고 열소성하는 공정을 갖는다. 상기 격벽의 광학 농도(OD)는 0.2∼4.0/㎛이다.The method for manufacturing a partition wall according to the present invention comprises the step of forming a coating film by applying the photosensitive resin composition for the partition wall, wherein the component (E) is a black pigment or a mixed organic pigment, on a substrate, and drying the coating film, and exposing the coating film to ultraviolet light. It has a process of exposing with a device and a process of developing and thermally baking the coating film with an aqueous alkali solution. The optical density (OD) of the partition wall is 0.2 to 4.0 / µm.
또한, 본 발명에 따른 격벽의 제조 방법은 (E) 성분이 백색 안료인 상기 격벽용 감광성 수지 조성물을 기판 상에 도포해서 도막을 형성하고, 상기 도막을 건조시키는 공정과, 상기 도막을 자외선 노광 장치로 노광하는 공정과, 상기 도막을 알칼리 수용액으로 현상하고 열소성하는 공정을 갖는다. 상기 격벽의 광학 농도(OD)는 0.1∼0.3/㎛이다.In addition, the method for manufacturing a partition wall according to the present invention comprises the step of forming a coating film by coating the photosensitive resin composition for the partition wall, wherein the component (E) is a white pigment, on a substrate, and drying the coating film, and the coating film is exposed to a UV light exposure device. It has a process of exposing to, and a process of developing the coating film with an aqueous alkali solution and thermally calcining it. The partition wall has an optical density (OD) of 0.1 to 0.3 / µm.
(발명의 효과)(Effects of the Invention)
본 발명에 의하면, 차광성이 우수하고, 표면 외관 및 패턴 형상이 양호하고, 또한 표면 발잉크성이 우수한 격벽용 수지 조성물 및 그 경화물을 제공할 수 있다. 또한, 본 발명의 목적은 상기 수지 조성물을 사용한 격벽의 제조 방법을 제공할 수 있다.ADVANTAGE OF THE INVENTION According to this invention, the resin composition for partition walls and its hardened | cured material which are excellent in light-shielding property, favorable surface appearance and pattern shape, and excellent surface ink repellency can be provided. In addition, an object of the present invention can provide a method for producing a partition wall using the resin composition.
이하, 본 발명에 대해서 상세하게 설명한다. 본 발명의 격벽용 감광성 수지 조성물(이하, 감광성 수지 조성물이라고 약칭하는 경우가 있음)은 (A)∼(E) 성분을 함유한다. 이하, (A)∼(E) 성분에 대해서 설명한다.Hereinafter, the present invention will be described in detail. The photosensitive resin composition for partition walls of the present invention (hereinafter may be abbreviated as a photosensitive resin composition) contains components (A) to (E). The components (A) to (E) will be described below.
((A) 성분)(Component (A))
(A) 성분인 불포화기 함유 감광성 수지는 1분자 중에 중합성 불포화기와, 알칼리 가용성을 발현하기 위한 산성기를 갖고 있는 것이 바람직하고, 중합성 불포화기와 카르복실기의 양방을 함유하고 있는 것이 보다 바람직하다. 상기 수지이면, 특별히 한정되지 않고 널리 사용할 수 있다.(A) It is preferable that the photosensitive resin containing an unsaturated group which is a component has a polymerizable unsaturated group in one molecule, and an acidic group for expressing alkali solubility, and more preferably contains both a polymerizable unsaturated group and a carboxyl group. The resin is not particularly limited and can be widely used.
상기 불포화기 함유 감광성 수지의 예로는 비스페놀류로부터 유도되는 2개의 글리시딜에테르기를 갖는 에폭시 화합물(이하, 「비스페놀형 에폭시 화합물」이라고 칭함)에, (메타)아크릴산을 반응시켜 얻어진 히드록시기를 갖는 화합물에 다염기 카르복실산 또는 그 무수물을 반응시켜 얻어지는 에폭시 (메타)아크릴레이트 산부가물이 있다. 비스페놀류로부터 유도되는 에폭시 화합물이란 비스페놀류와 에피할로히드린을 반응시켜 얻어지는 에폭시 화합물 또는 이와 동등물을 의미한다. (A) 성분인 불포화기 함유 감광성 수지는 에틸렌성 불포화 이중결합과 카르복실기를 겸비하기 위해서, 감광성 수지 조성물로서 우수한 광경화성, 양호 현상성, 패터닝 특성을 주어 차광막의 물성 향상을 초래할 수 있다. 특히, 상기 수지를 사용한 패터닝성에 대해서는 예를 들면 20㎛ 개구의 네거티브형 포토마스크를 사용한 경우에 형성되는 굵은선의 화소 패턴뿐만 아니라, 5㎛ 개구의 네거티브형 포토마스크를 사용한 경우에 형성되는 세선의 화소 패턴에 대해서도 양호한 패터닝성을 가질 수 있다. 또한, 「(메타)아크릴산」이란 아크릴산 및 메타크릴산의 총칭이고, 이들의 일방 또는 양방을 의미한다.Examples of the photosensitive resin containing an unsaturated group include a compound having a hydroxyl group obtained by reacting (meth) acrylic acid with an epoxy compound having two glycidyl ether groups derived from bisphenols (hereinafter referred to as "bisphenol type epoxy compound"). There are epoxy (meth) acrylate acid adducts obtained by reacting polybasic carboxylic acids or anhydrides thereof. The epoxy compound derived from bisphenols means an epoxy compound obtained by reacting bisphenols with epihalohydrin or an equivalent thereof. (A) The photosensitive resin containing an unsaturated group as a component, in order to have an ethylenically unsaturated double bond and a carboxyl group, may provide excellent photocurability, good developability, and patterning properties as a photosensitive resin composition, resulting in improvement in physical properties of the light-shielding film. Particularly, the patterning property using the resin is not only a pixel pattern of a thick line formed when, for example, a negative photomask with a 20 μm aperture is used, but also a thin line pixel formed when a negative photomask with a 5 μm aperture is used. Patterns can also have good patterning properties. In addition, "(meth) acrylic acid" is a generic term for acrylic acid and methacrylic acid, and means one or both of them.
(A) 성분인 불포화기 함유 감광성 수지는 일반식(1)으로 나타내어지는 비스페놀형 에폭시 화합물인 것이 바람직하다.It is preferable that the photosensitive resin containing the unsaturated group which is (A) component is a bisphenol type epoxy compound represented by general formula (1).
일반식(1)에 있어서, R1, R2, R3 및 R4는 각각 독립적으로 수소원자, 탄소수 1∼5개의 알킬기 또는 할로겐 원자 중 어느 하나이고, X는 -CO-, -SO2-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -O-, 식(2)으로 나타내어지는 플루오렌-9,9-디일기 또는 단결합을 나타내고, l은 0∼10의 정수이다.In the general formula (1), R 1 , R 2 , R 3 and R 4 are each independently a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X is -CO-, -SO 2- , -C (CF 3 ) 2- , -Si (CH 3 ) 2- , -CH 2- , -C (CH 3 ) 2- , -O-, fluorene-9,9 represented by formula (2) -Represents a diyl group or a single bond, and l is an integer from 0 to 10.
일반식(1)으로 나타내어지는 비스페놀형 에폭시 화합물은 비스페놀류와 에피클로로히드린을 반응시켜 얻어지는 2개의 글리시딜에테르기를 갖는 에폭시 화합물이다. 이 반응시에는 일반적으로 디글리시딜에테르 화합물의 올리고머화를 수반하기 때문에, 비스페놀 골격을 2개 이상 포함하는 에폭시 화합물을 포함하고 있다.The bisphenol-type epoxy compound represented by the general formula (1) is an epoxy compound having two glycidyl ether groups obtained by reacting bisphenols with epichlorohydrin. Since the reaction generally involves oligomerization of the diglycidyl ether compound, an epoxy compound containing two or more bisphenol skeletons is included.
이 반응에 사용되는 비스페놀류의 예로는 비스(4-히드록시페닐)케톤, 비스(4-히드록시-3,5-디메틸페닐)케톤, 비스(4-히드록시-3,5-디클로로페닐)케톤, 비스(4-히드록시페닐)술폰, 비스(4-히드록시-3,5-디메틸페닐)술폰, 비스(4-히드록시-3,5-디클로로페닐)술폰, 비스(4-히드록시페닐)헥사플루오로프로판, 비스(4-히드록시-3,5-디메틸페닐)헥사플루오로프로판, 비스(4-히드록시-3,5-디클로로페닐)헥사플루오로프로판, 비스(4-히드록시페닐)디메틸실란, 비스(4-히드록시-3,5-디메틸페닐)디메틸실란, 비스(4-히드록시-3,5-디클로로페닐)디메틸실란, 비스(4-히드록시페닐)메탄, 비스(4-히드록시-3,5-디클로로페닐)메탄, 비스(4-히드록시-3,5-디브로모페닐)메탄, 2,2-비스(4-히드록시페닐)프로판, 2,2-비스(4-히드록시-3,5-디메틸페닐)프로판, 2,2-비스(4-히드록시-3,5-디클로로페닐)프로판, 2,2-비스(4-히드록시-3-메틸페닐)프로판, 2,2-비스(4-히드록시-3-클로로페닐)프로판, 비스(4-히드록시페닐)에테르, 비스(4-히드록시-3,5-디메틸페닐)에테르, 비스(4-히드록시-3,5-디클로로페닐)에테르, 9,9-비스(4-히드록시페닐)플루오렌, 9,9-비스(4-히드록시-3-메틸페닐)플루오렌, 9,9-비스(4-히드록시-3-클로로페닐)플루오렌, 9,9-비스(4-히드록시-3-브로모페닐)플루오렌, 9,9-비스(4-히드록시-3-플루오로페닐)플루오렌, 9,9-비스(4-히드록시-3-메톡시페닐)플루오렌, 9,9-비스(4-히드록시-3,5-디메틸페닐)플루오렌, 9,9-비스(4-히드록시-3,5-디클로로페닐)플루오렌, 9,9-비스(4-히드록시-3,5-디브로모페닐)플루오렌, 4,4'-비페놀, 3,3'-비페놀 등이 포함된다. 이 중에서도, 플루오렌-9,9-디일기를 갖는 비스페놀류가 바람직하다.Examples of bisphenols used in this reaction include bis (4-hydroxyphenyl) ketone, bis (4-hydroxy-3,5-dimethylphenyl) ketone, and bis (4-hydroxy-3,5-dichlorophenyl). Ketone, bis (4-hydroxyphenyl) sulfone, bis (4-hydroxy-3,5-dimethylphenyl) sulfone, bis (4-hydroxy-3,5-dichlorophenyl) sulfone, bis (4-hydroxy Phenyl) hexafluoropropane, bis (4-hydroxy-3,5-dimethylphenyl) hexafluoropropane, bis (4-hydroxy-3,5-dichlorophenyl) hexafluoropropane, bis (4-hydroxy Hydroxyphenyl) dimethylsilane, bis (4-hydroxy-3,5-dimethylphenyl) dimethylsilane, bis (4-hydroxy-3,5-dichlorophenyl) dimethylsilane, bis (4-hydroxyphenyl) methane, Bis (4-hydroxy-3,5-dichlorophenyl) methane, bis (4-hydroxy-3,5-dibromophenyl) methane, 2,2-bis (4-hydroxyphenyl) propane, 2, 2-bis (4-hydroxy-3,5-dimethylphenyl) propane, 2,2-bis (4-hydroxy-3,5-dichlorophenyl) prop , 2,2-bis (4-hydroxy-3-methylphenyl) propane, 2,2-bis (4-hydroxy-3-chlorophenyl) propane, bis (4-hydroxyphenyl) ether, bis (4- Hydroxy-3,5-dimethylphenyl) ether, bis (4-hydroxy-3,5-dichlorophenyl) ether, 9,9-bis (4-hydroxyphenyl) fluorene, 9,9-bis (4 -Hydroxy-3-methylphenyl) fluorene, 9,9-bis (4-hydroxy-3-chlorophenyl) fluorene, 9,9-bis (4-hydroxy-3-bromophenyl) fluorene, 9,9-bis (4-hydroxy-3-fluorophenyl) fluorene, 9,9-bis (4-hydroxy-3-methoxyphenyl) fluorene, 9,9-bis (4-hydroxy -3,5-dimethylphenyl) fluorene, 9,9-bis (4-hydroxy-3,5-dichlorophenyl) fluorene, 9,9-bis (4-hydroxy-3,5-dibromo Phenyl) fluorene, 4,4'-biphenol, 3,3'-biphenol, and the like. Among these, bisphenols having a fluorene-9,9-diyl group are preferable.
또한, 이러한 에폭시 화합물과 (메타)아크릴산을 반응시켜 얻어진 에폭시(메타)아크릴레이트 분자 중의 히드록시기와 반응시키는 (a) 디카르복실산 또는 트리카르복실산의 산 일무수물의 예로는 쇄식 탄화수소 디카르복실산 또는 트리카르복실산의 산 일무수물, 지환식 디카르복실산 또는 트리카르복실산의 산 일무수물, 방향족 디카르복실산 또는 트리카르복실산의 산 일무수물 등이 포함된다. 여기에서, 쇄식 탄화수소 디카르복실산 또는 트리카르복실산의 산 일무수물의 예로는 숙신산, 아세틸 숙신산, 말레산, 아디프산, 이타콘산, 아젤라산, 시트라말산, 말론산, 글루타르산, 시트르산, 주석산, 옥소글루타르산, 피멜산, 세바신산, 수베르산, 디글리콜산 등의 산 일무수물이 포함된다. 또한, 임의의 치환기가 도입된 디카르복실산 또는 트리카르복실산의 산 일무수물 등이 포함된다. 또한, 지환식 디카르복실산 또는 트리카르복실산의 산 일무수물의 예로는 시클로부탄 디카르복실산, 시클로펜탄 디카르복실산, 헥사히드로프탈산, 테트라히드로프탈산, 노르보르난 디카르복실산 등의 산 일무수물이 포함된다. 또한, 임의의 치환기가 도입된 디카르복실산 또는 트리카르복실산의 산 일무수물 등도 포함된다. 또한, 방향족 디카르복실산 또는 트리카르복실산의 산 일무수물의 예로는 프탈산, 이소프탈산, 트리멜리트산 등의 산 일무수물이 포함된다. 또한, 임의의 치환기가 도입된 디카르복실산 또는 트리카르복실산의 산 일무수물이 포함된다.Further, examples of the acid anhydride of (a) dicarboxylic acid or tricarboxylic acid reacting with a hydroxyl group in an epoxy (meth) acrylate molecule obtained by reacting such an epoxy compound with (meth) acrylic acid is a chain hydrocarbon dicarboxyl. Acid anhydrides of acids or tricarboxylic acids, alicyclic dicarboxylic acids or acid monohydrates of tricarboxylic acids, acid dihydrates of aromatic dicarboxylic acids or tricarboxylic acids, and the like. Here, examples of the acid anhydride of the chain hydrocarbon dicarboxylic acid or tricarboxylic acid are succinic acid, acetyl succinic acid, maleic acid, adipic acid, itaconic acid, azelaic acid, citramalic acid, malonic acid, glutaric acid, Acid anhydrides such as citric acid, tartaric acid, oxoglutaric acid, pimelic acid, sebacic acid, suberic acid, and diglycolic acid. In addition, acid anhydrides of dicarboxylic acid or tricarboxylic acid in which an optional substituent is introduced, and the like are included. Further, examples of the acid anhydride of an alicyclic dicarboxylic acid or tricarboxylic acid include cyclobutane dicarboxylic acid, cyclopentane dicarboxylic acid, hexahydrophthalic acid, tetrahydrophthalic acid, norbornane dicarboxylic acid, etc. Contains acid anhydride of. Moreover, the acid anhydride of dicarboxylic acid or tricarboxylic acid in which the arbitrary substituent was introduced, etc. are also included. Further, examples of the acid monohydride of the aromatic dicarboxylic acid or tricarboxylic acid include acid monohydrides such as phthalic acid, isophthalic acid, trimellitic acid. Also included are acid dianhydrides of dicarboxylic acids or tricarboxylic acids in which optional substituents have been introduced.
또한, 이러한 에폭시 화합물과 (메타)아크릴산을 반응시켜 얻어진 에폭시 (메타)아크릴레이트 분자 중의 히드록시기와 반응시키는 (b) 테트라카르복실산의 산 이무수물의 예로는 쇄식 탄화수소 테트라카르복실산의 산 이무수물, 지환식 테트라카르복실산의 산 이무수물 또는 방향족 테트라카르복실산의 산 이무수물이 포함된다. 여기에서, 쇄식 탄화수소 테트라카르복실산의 산 이무수물의 예로는 부탄 테트라카르복실산, 펜탄 테트라카르복실산, 헥산 테트라카르복실산 등의 산 이무수물이 포함되고, 또한 임의의 치환기가 도입된 테트라카르복실산의 산 이무수물이 포함된다. 또한, 지환식 테트라카르복실산의 산 이무수물의 예로는 시클로부탄 테트라카르복실산, 시클로펜탄 테트라카르복실산, 시클로헥산 테트라카르복실산, 시클로헵탄 테트라카르복실산, 노르보르난 테트라카르복실산 등의 산 이무수물이 포함되고, 또한 임의의 치환기의 도입된 테트라카르복실산의 산 이무수물이 포함된다. 또한, 방향족 테트라카르복실산의 산 이무수물의 예로는 피로멜리트산, 벤조페논 테트라카르복실산, 비페닐 테트라카르복실산, 비페닐에테르 테트라카르복실산 등의 산 이무수물이 포함되고, 또한 임의의 치환기의 도입된 테트라카르복실산의 산 이무수물이 포함된다.Further, examples of the acid dianhydride of (b) tetracarboxylic acid to react with a hydroxyl group in the epoxy (meth) acrylate molecule obtained by reacting such an epoxy compound with (meth) acrylic acid, acid dianhydride of chain hydrocarbon tetracarboxylic acid, Acid dianhydrides of alicyclic tetracarboxylic acids or acid dianhydrides of aromatic tetracarboxylic acids. Here, examples of the acid dianhydride of the chain hydrocarbon tetracarboxylic acid include acid dianhydrides such as butane tetracarboxylic acid, pentane tetracarboxylic acid, and hexane tetracarboxylic acid, and tetracar in which an optional substituent is introduced Acid dianhydrides of carboxylic acids are included. Further, examples of the acid dianhydride of the alicyclic tetracarboxylic acid include cyclobutane tetracarboxylic acid, cyclopentane tetracarboxylic acid, cyclohexane tetracarboxylic acid, cycloheptane tetracarboxylic acid, norbornane tetracarboxylic acid, etc. The acid dianhydride of is included, and also the acid dianhydride of the introduced tetracarboxylic acid of any substituent is included. Further, examples of the acid dianhydride of the aromatic tetracarboxylic acid include acid dianhydrides such as pyromellitic acid, benzophenone tetracarboxylic acid, biphenyl tetracarboxylic acid, and biphenyl ether tetracarboxylic acid, and any Acid dianhydrides of the introduced tetracarboxylic acids of the substituents are included.
에폭시 (메타)아크릴레이트에 반응시키는 (a) 디카르복실산 또는 트리카르복실산의 산무수물과 (b) 테트라카르복실산의 산 이무수물의 몰비 (a)/(b)는 0.01∼10.0인 것이 바람직하고, 0.02 이상 3.0 미만인 것이 보다 바람직하다. 몰비 (a)/(b)가 상기 범위를 일탈하면, 양호한 광 패터닝성을 갖는 감광성 수지 조성물로 하기 위한 최적 분자량을 얻을 수 없기 때문에, 바람직하지 않다. 또한, 몰비 (a)/(b)가 작을수록 분자량은 커지고, 알칼리 용해성은 저하하는 경향이 있다.The molar ratio of (a) dicarboxylic acid or tricarboxylic acid anhydride reacted with epoxy (meth) acrylate to (b) tetracarboxylic acid dianhydride (a) / (b) is 0.01 to 10.0 It is preferable, and it is more preferable that it is 0.02 or more and less than 3.0. When the molar ratio (a) / (b) deviates from the above range, it is not preferable because the optimum molecular weight for obtaining a photosensitive resin composition having good light patterning properties cannot be obtained. In addition, the smaller the molar ratio (a) / (b), the larger the molecular weight, and the alkali solubility tends to decrease.
또한, 에폭시 화합물과 (메타)아크릴산의 반응, 및 이 반응에서 얻어진 에폭시 (메타)아크릴레이트와 다염기산 또는 그 산무수물의 반응은 특별히 한정되지 않고, 공지의 방법을 채용할 수 있다. 또한, 상기 반응에서 합성되는 불포화기 함유 감광성 수지는 그 중량 평균 분자량(Mw)은 2000∼10000이 바람직하고, 산가는 30∼200mg/KOH인 것이 바람직하다.Moreover, reaction of an epoxy compound and (meth) acrylic acid, and the reaction of the epoxy (meth) acrylate obtained by this reaction with polybasic acid, or its acid anhydride are not specifically limited, A well-known method can be employ | adopted. In addition, the weight average molecular weight (Mw) of the unsaturated group-containing photosensitive resin synthesized in the above reaction is preferably 2000 to 10000, and the acid value is preferably 30 to 200 mg / KOH.
(A) 성분인 불포화기 함유 감광성 수지로서 바람직한 수지의 다른 예로는 (메타)아크릴산, (메타)아크릴산 에스테르 등의 공중합체이고, (메타)아크릴기 및 카르복실기를 갖는 수지가 포함된다. 상기 수지의 예로는 글리시딜 (메타)아크릴레이트를 포함하는 (메타)아크릴산 에스테르류를 용제 중에서 공중합시켜 얻어진 공중합체에, (메타)아크릴산을 반응시켜 최후에 디카르복실산 또는 트리카르복실산의 무수물을 반응시켜 얻어지는 중합성 불포화기 함유 알칼리 가용성 수지가 포함된다. 상기 공중합체는 일본 특허 공개 2014-111722호 공보에 나타내어져 있는, 양단의 수산기를 (메타)아크릴산으로 에스테르화된 디에스테르 글리세롤에 유래하는 반복 단위 20∼90mol%, 및 이것과 공중합 가능한 1종 이상의 중합성 불포화 화합물에 유래하는 반복 단위 10∼80mol%로 구성되고, 수 평균 분자량이 2000∼2만 또한 산가가 35∼120㎎KOH/g인 공중합체, 및 일본 특허 공개 2018-141968호 공보에 나타내어져 있는, (메타)아크릴산 에스테르 화합물에 유래하는 유닛과, (메타)아크릴로일 기 및 디 또는 트리카르복실산 잔기를 갖는 유닛을 포함하는 중량 평균 분자량(Mw) 3000∼50000, 산가 30∼200mg/KOH인 중합체인 중합성 불포화기 함유 알칼리 가용성 수지를 참고할 수 있다.(A) As another example of the resin preferable as a photosensitive resin containing an unsaturated group which is a component, copolymers, such as (meth) acrylic acid and (meth) acrylic acid ester, include resins having (meth) acrylic groups and carboxyl groups. As an example of the resin, (meth) acrylic acid is reacted with a copolymer obtained by copolymerizing (meth) acrylic acid esters containing glycidyl (meth) acrylate in a solvent, and dicarboxylic acid or tricarboxylic acid is finally reacted. A polymerizable unsaturated group-containing alkali-soluble resin obtained by reacting an anhydride of the above is included. The copolymer is 20 to 90 mol% of a repeating unit derived from a diester glycerol esterified with (meth) acrylic acid with hydroxyl groups at both ends, as shown in Japanese Patent Laid-Open No. 2014-111722, and at least one copolymerizable therewith. A copolymer composed of 10 to 80 mol% of repeating units derived from a polymerizable unsaturated compound, and having a number average molecular weight of 2000 to 20,000 and an acid value of 35 to 120 mgKOH / g, and Japanese Patent Publication No. 2018-141968 Weight average molecular weight (Mw) 3000-50000, acid value 30-200 mg including the unit derived from the (meth) acrylic acid ester compound, and the unit having a (meth) acryloyl group and a di or tricarboxylic acid residue. Reference may be made to alkali-soluble resins containing a polymerizable unsaturated group, which is a polymer of / KOH.
(A) 성분의 불포화기 함유 감광성 수지에 대해서는 1종류만을 단독으로 사용해도 좋고, 2종 이상을 병용해도 좋다.About the photosensitive resin containing the unsaturated group of the component (A), only 1 type may be used individually and 2 or more types may be used together.
((B) 성분)(Component (B))
(B) 성분인 수지상 폴리머는 2개 이상의 에틸렌성의 중합성 기를 말단에 갖는 다분기형의 폴리머이다. 에틸렌성의 중합성 기는 (메타)아크릴레이트에 유래하는 것이 바람직하다. 여기에서, 에틸렌성의 중합성 기는 탄소-탄소 이중결합을 갖는 기이고, 이 탄소-탄소 이중결합에 카르보닐기가 결합한 α,β-불포화 카르보닐화합물과 같은 공역한 화합물에 있어서는 메르캅토 화합물과 같은 구핵제와의 상호작용이 가장 강한 비닐기로 마이클 부가 반응이 일어나는 것이 알려져 있다. 따라서, α,β-불포화 카르보닐 화합물과 같은 복수의 에틸렌성의 중합성 기를 갖는 화합물과, 다가 메르캅토 화합물과 같은 복수의 구핵성기를 갖는 화합물을 반응시킴으로써 카르보닐기에 대하여 β위치의 탄소에 부가 반응이 생긴다. 여기에서, 부가 반응이 생기는 기가 복수인 경우에는 많은 분기가 생겨서 수지상 폴리머가 된다. 이러한 수지상 폴리머는 특허문헌 2 등에 의해 공지되어 있고, 이러한 문헌에 기재된 방법에 의해 얻을 수 있다.The dendritic polymer as component (B) is a multi-branched polymer having two or more ethylenically polymerizable groups at the ends. It is preferable that the ethylenic polymerizable group is derived from (meth) acrylate. Here, the ethylenically polymerizable group is a group having a carbon-carbon double bond, and a nucleating agent such as a mercapto compound in a conjugated compound such as an α, β-unsaturated carbonyl compound having a carbonyl group bonded to the carbon-carbon double bond. It is known that Michael addition reaction occurs with the vinyl group having the strongest interaction with. Therefore, by reacting a compound having a plurality of ethylenically polymerizable groups, such as an α, β-unsaturated carbonyl compound, and a compound having a plurality of nucleophilic groups, such as a polyvalent mercapto compound, an addition reaction to the carbon at the β position with respect to the carbonyl group is performed. Occurs. Here, when there are a plurality of groups in which an addition reaction occurs, many branches are formed to become a dendritic polymer. Such dendritic polymers are known from Patent Literature 2 and the like, and can be obtained by the methods described in these documents.
(B) 성분인 수지상 폴리머의 예로는 일반식(3)으로 나타내어지는 다관능 (메타)아크릴레이트와 일반식(4)으로 나타내어지는 다가 메르캅토 화합물이 마이클 부가(카르보닐기에 관해 β위치의 탄소-탄소 이중결합에의 부가)에 의해 중합한 것이 포함된다.(B) As an example of the dendritic polymer which is a component, the polyfunctional (meth) acrylate represented by general formula (3) and the polyhydric mercapto compound represented by general formula (4) are added by Michael (carbon at the β-position with respect to the carbonyl group- Polymerized by addition to a carbon double bond).
여기에서, 일반식(3)으로 나타내어지는 다관능 (메타)아크릴레이트에의 일반식(4)으로 나타내어지는 다가 메르캅토 화합물의 마이클 부가는 얻어지는 수지상 폴리머가 그 후에도 더욱 탄소-탄소 이중결합에 근거하는 방사선 중합을 행할 수 있도록, 일반식(3)으로 나타내어지는 화합물이 갖는 탄소-탄소 이중결합의 전체량을 100mol%로 했을 때, 탄소-탄소 이중결합이 0.1∼50mol%의 범위에서 잔존하도록 행해지는 것이 바람직하다.Here, the Michael addition of the polyvalent mercapto compound represented by the general formula (4) to the polyfunctional (meth) acrylate represented by the general formula (3) is based on the carbon-carbon double bond even after the resulting dendritic polymer is obtained. When the total amount of carbon-carbon double bonds of the compound represented by the general formula (3) is 100 mol%, the carbon-carbon double bonds remain in the range of 0.1 to 50 mol% so that radiation polymerization can be performed. It is preferred.
예를 들면, 일반식(4)으로 나타내어지는 다가 메르캅토 화합물의 메르캅토기와, 일반식(3)으로 나타내어지는 다관능 (메타)아크릴레이트의 탄소-탄소 이중결합(일반식(3)에 있어서, CH2=C(R5)-로 나타내어지는 이중결합을 하고, 몰비의 계산의 경우에는 이중결합으로 함)과의 부가의 비율은 메르캅토기/이중결합의 몰비가 1/100∼1/3인 것이 바람직하고, 1/50∼1/5인 것이 보다 바람직하고, 1/20∼1/8인 것이 특히 바람직하다.For example, the mercapto group of the polyvalent mercapto compound represented by the general formula (4) and the carbon-carbon double bond of the polyfunctional (meth) acrylate represented by the general formula (3) (to the general formula (3)) In addition, the ratio of addition with CH 2 = C (R 5 )-is double bond, and in the case of calculation of the molar ratio, the ratio of mercapto group / double bond molar ratio is 1/100 to 1 It is preferably / 3, more preferably 1/50 to 1/5, and particularly preferably 1/20 to 1/8.
또한, 상기 수지상 폴리머는 방사선 중합을 위한 충분한 양의 관능기를 갖는 것이 바람직하다. 이 때문에, 수지상 폴리머의 분자량에 있어서, 탄소-탄소 이중결합 1mol당 분자량은 100∼10000의 범위에 있는 것이 바람직하다. 또한, 수지상 폴리머의 중량 평균 분자량(Mw)은 1000∼20000의 범위에 있는 것이 바람직하고, 8000∼15000의 범위에 있는 것이 보다 바람직하다.Further, it is preferable that the dendritic polymer has a sufficient amount of functional groups for radiation polymerization. For this reason, in the molecular weight of the dendritic polymer, the molecular weight per 1 mol of carbon-carbon double bond is preferably in the range of 100 to 10000. Further, the weight average molecular weight (Mw) of the dendritic polymer is preferably in the range of 1000 to 20,000, more preferably in the range of 8000 to 15000.
상기 일반식(3)에 있어서, R5는 수소 또는 탄소수 1∼4개의 알킬기이고, R6은 다가 알코올 R7(OH)m의 m개의 히드록실기 중 n개의 히드록실기를 일반식(3) 중의 에스테르 결합에 공여한 나머지 부분이다. R7(OH)m은 탄소수 2∼8개의 비방향족의 직쇄 또는 분기쇄의 탄화수소 골격에 근거하는 다가 알코올이거나, 다가 알코올의 복수 분자가 알코올의 탈수 축합에 의해 에테르 결합을 통해서 연결하여 이루어지는 다가 알코올 에테르이거나, 또는 이들의 다가 알코올 또는 다가 알코올 에테르와 히드록시산의 에스테르이다. 일반식(3)에 있어서, m은 2∼20의 정수를 나타내고, n은 2∼20의 정수를 나타내지만, m≥n이다.In the general formula (3), R 5 is hydrogen or an alkyl group having 1 to 4 carbon atoms, and R 6 is n hydroxyl group among m hydroxyl groups of the polyhydric alcohol R 7 (OH) m . ). R 7 (OH) m is a polyhydric alcohol based on a non-aromatic straight-chain or branched-chain hydrocarbon skeleton having 2 to 8 carbon atoms, or a polyhydric alcohol formed by linking multiple molecules of polyhydric alcohols through ether bonding by dehydration condensation of the alcohol Ethers, or their polyhydric alcohols or esters of polyhydric alcohol ethers and hydroxy acids. In general formula (3), m represents the integer of 2-20, n represents the integer of 2-20, but m≥n.
일반식(3)으로 나타내어지는 다관능 (메타)아크릴레이트의 예로는 에틸렌글리콜 디(메타)아크릴레이트, 디에틸렌글리콜 디(메타)아크릴레이트, 트리에틸렌글리콜 디(메타)아크릴레이트, 테트라에틸렌글리콜 디(메타)아크릴레이트, 테트라메틸렌글리콜 디(메타)아크릴레이트, 트리메틸올프로판 트리(메타)아크릴레이트, 에틸렌옥사이드 변성 트리메틸올프로판 트리(메타)아크릴레이트, 프로필렌옥사이드 변성 트리메틸올프로판 트리(메타)아크릴레이트, 트리메틸올에탄 트리(메타)아크릴레이트, 펜타에리스리톨 디(메타)아크릴레이트, 펜타에리스리톨 트리(메타)아크릴레이트, 펜타에리스리톨 테트라(메타)아크릴레이트, 디펜타에리스리톨 펜타(메타)아크릴레이트, 디펜타에리스리톨 헥사(메타)아크릴레이트, 트리펜타에리스리톨 옥타(메타)아크릴레이트, 트리펜타에리스리톨 헵타(메타)아크릴레이트, 카프로락톤 변성 펜타에리스리톨 트리(메타)아크릴레이트, 카프로락톤 변성 펜타에리스리톨 테트라(메타)아크릴레이트, 카프로락톤 변성 디펜타에리스리톨 헥사(메타)아크릴레이트, 에피클로로히드린 변성 헥사히드로프탈산 디(메타)아크릴레이트, 히드록시피발산네오펜틸글리콜 디(메타)아크릴레이트, 네오펜틸글리콜 디(메타)아크릴레이트, 에틸렌옥사이드 변성 네오펜틸글리콜 디(메타)아크릴레이트, 프로필렌옥사이드 변성 네오펜틸글리콜 디(메타)아크릴레이트, 에틸렌옥사이드 변성 트리메틸올프로판 트리(메타)아크릴레이트, 프로필렌옥사이드 변성 트리메틸올프로판 트리(메타)아크릴레이트, 트리메틸올프로판 벤조에이트 (메타)아크릴레이트, 트리스((메타)아크릴옥시에틸)이소시아누레이트, 알콕시 변성 트리메틸올프로판 트리(메타)아크릴레이트, 디펜타에리스리톨 폴리(메타)아크릴레이트, 알킬 변성 디펜타에리스리톨 트리(메타)아크릴레이트, 디메틸올프로판 테트라(메타)아크릴레이트 등의 (메타)아크릴산 에스테르가 포함된다. 이들의 화합물은 그 1종만을 단독으로 사용해도 좋고, 2종 이상을 병용해도 좋다.Examples of the polyfunctional (meth) acrylate represented by the general formula (3) are ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, tetraethylene glycol Di (meth) acrylate, tetramethylene glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, ethylene oxide modified trimethylolpropane tri (meth) acrylate, propylene oxide modified trimethylolpropane tri (meth) Acrylate, trimethylolethane tri (meth) acrylate, pentaerythritol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, Dipentaerythritol hexa (meth) acrylate, tripentaerythritol octa (meth) acrylate Tri, pentaerythritol hepta (meth) acrylate, caprolactone modified pentaerythritol tri (meth) acrylate, caprolactone modified pentaerythritol tetra (meth) acrylate, caprolactone modified dipentaerythritol hexa (meth) acrylate, epi Chlorohydrin-modified hexahydrophthalic acid di (meth) acrylate, hydroxypivalic acid neopentyl glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, ethylene oxide-modified neopentyl glycol di (meth) acrylate , Propylene oxide-modified neopentyl glycol di (meth) acrylate, ethylene oxide-modified trimethylolpropane tri (meth) acrylate, propylene oxide-modified trimethylolpropane tri (meth) acrylate, trimethylolpropane benzoate (meth) acrylate , Tris ((meth) acryloxyethyl) isocyanure (Meth) such as yttrium, alkoxy-modified trimethylolpropane tri (meth) acrylate, dipentaerythritol poly (meth) acrylate, alkyl-modified dipentaerythritol tri (meth) acrylate, and dimethylolpropane tetra (meth) acrylate Acrylic esters. These compounds may be used alone or in combination of two or more.
상기 일반식(4)에 있어서, R8은 단결합 또는 2∼6가의 탄소수 1∼6개의 탄화수소기 함유기이고, p는 R8이 단결합일 때에는 2이고, R8이 2∼6가의 기일 때에는 2∼6의 정수를 나타낸다. 여기에서, R8은 단결합 또는 치환기를 가져도 좋고, 탄소수 1∼6개의 탄화수소기 또는 탄화수소기의 골격 중에 산소원자를 더욱 포함하고 있어도 좋다. 이들의 탄화수소기는 직쇄 또는 분기쇄이어도 좋다. 또한, 이들의 탄화수소기 함유기는 또한 일반식(4) 중에 나타내어지는 티오메틸기(HSCH2-)의 일부와 결합하는 카르보닐옥시기를 가져도 좋다. 또한, 탄화수소기의 골격 중에 산소원자를 포함하는 경우에는 양단은 탄화수소기인 것이 바람직하다. 여기에서, p는 2∼6의 정수를 나타내고, R8의 가수에 대응한다. 따라서, R8이 단결합일 때에는 p는 2이고, R8의 탄소수가 1일 때에는 p는 2∼4이고, R8의 탄소수가 2∼6일 때에는 p는 2∼6이다.Wherein in the formula (4), R 8 is a single bond or a 2 to 6-valent group having 1 to 6 carbon atoms of a hydrocarbon group-containing group, p is unity when R 8 is unity 2, R 8 is 2 to 6 valent when date It represents the integer of 2-6. Here, R 8 may have a single bond or a substituent, and may further contain an oxygen atom in the skeleton of a hydrocarbon group having 1 to 6 carbon atoms or a hydrocarbon group. These hydrocarbon groups may be straight chain or branched chain. In addition, these hydrocarbon group-containing groups may also have a carbonyloxy group bonded to a part of the thiomethyl group (HSCH 2- ) represented in the general formula (4). Moreover, when an oxygen atom is contained in the skeleton of a hydrocarbon group, it is preferable that both ends are a hydrocarbon group. Here, p represents an integer of 2 to 6, and corresponds to the valence of R 8. Therefore, when R 8 is a single bond, p is 2, when R 8 has 1 carbon, p is 2 to 4, and when R 8 has 2 to 6 carbons, p is 2 to 6.
일반식(4)으로 나타내어지는 다가 메르캅토 화합물의 예로는 1,2-디메르캅토에탄, 1,3-디메르캅토프로판, 1,4-디메르캅토부탄, 비스디메르캅토에탄티올, 트리메틸올프로판 트리(메르캅토아세테이트), 트리메틸올프로판 트리(메르캅토프로피오네이트), 펜타에리스리톨 테트라(메르캅토아세테이트), 펜타에리스리톨 트리(메르캅토아세테이트), 펜타에리스리톨 테트라(메르캅토프로피오네이트), 디펜타에리스리톨 헥사(메르캅토아세테이트), 디펜타에리스리톨 헥사(메르캅토프로피오네이트) 등이 포함된다.Examples of the polyvalent mercapto compound represented by the general formula (4) are 1,2-dimercaptoethane, 1,3-dimercaptopropane, 1,4-dimercaptobutane, bisdimercaptoethanethiol, and trimethyl Allpropane tri (mercaptoacetate), trimethylolpropane tri (mercaptopropionate), pentaerythritol tetra (mercaptoacetate), pentaerythritol tree (mercaptoacetate), pentaerythritol tetra (mercaptopropionate), Dipentaerythritol hexa (mercaptoacetate), dipentaerythritol hexa (mercaptopropionate), and the like.
상기 (B) 성분인 수지상 폴리머의 합성시에는 필요에 따라서 중합방지제를 가해도 좋다. 중합방지제의 예로는 히드로퀴논계 화합물, 페놀계 화합물이 포함된다. 이들의 구체예로는 하이드로퀴논, 메톡시하이드로퀴논, 카테콜, p-tert-부틸카테콜, 크레졸, 디부틸히드록시톨루엔, 2,4,6-트리-tert-부틸페놀(BHT) 등이 포함된다.When synthesize | combining the dendritic polymer which is said (B) component, you may add a polymerization inhibitor as needed. Examples of the polymerization inhibitor include hydroquinone-based compounds and phenol-based compounds. Specific examples of these include hydroquinone, methoxyhydroquinone, catechol, p-tert-butyl catechol, cresol, dibutylhydroxytoluene, 2,4,6-tri-tert-butylphenol (BHT), and the like. Is included.
(B) 성분인 수지상 폴리머의 합성의 완료의 확인은 액체 크로마토그래피, 겔 여과 크로마토그래피, 기타 일반적인 분석기기에 의해 확인할 수 있다.(B) Confirmation of the completion of synthesis of the component dendritic polymer can be confirmed by liquid chromatography, gel filtration chromatography, or other general analyzer.
(B) 성분인 수지상 폴리머를 합성할 때, 일반식(4)으로 나타내어지는 다가 메르캅토 화합물이 일반식(3)으로 나타내어지는 다관능 (메타)아크릴레이트의 이중결합에 부가되는 마이클 부가반응이 생긴다. 이 반응은 다관능 (메타)아크릴레이트와 다가 메르캅토 화합물을 혼합하고, 실온∼100℃에서 염기성 촉매를 첨가함으로써 행할 수 있다. 반응 시간은, 통상 30분간∼20시간이 바람직하고, 6∼12시간이 보다 바람직하다.(B) When synthesizing a dendritic polymer as a component, the Michael addition reaction in which the polyvalent mercapto compound represented by the general formula (4) is added to the double bond of the polyfunctional (meth) acrylate represented by the general formula (3) Occurs. This reaction can be performed by mixing a polyfunctional (meth) acrylate and a polyvalent mercapto compound and adding a basic catalyst at room temperature to 100 ° C. The reaction time is usually 30 minutes to 20 hours, and more preferably 6 to 12 hours.
(B) 성분인 수지상 폴리머가 감광성 수지 조성물로서 우수한 특성을 갖는 것의 상세 메커니즘은 확실하지는 않다. 그러나, 일반적으로 티올과 아크릴레이트를 사용한 수지상 폴리머는 그 독특한 구조상, 라디칼 중합에 있어서 산소나 용제에 의한 반응 저해를 받기 어렵고 저에너지에서 경화하는 것, 경화 수축이 적은 것, 도막의 표면 조도의 악화가 억제되는 점에서, 예를 들면 차광막으로 한 경우에 특히 우수한 특성을 갖는 것으로 생각된다.The detailed mechanism of that the component (B) dendritic polymer having excellent properties as a photosensitive resin composition is not certain. However, in general, the dendritic polymer using thiol and acrylate has a unique structure, which is less susceptible to reaction inhibition by oxygen or solvent in radical polymerization, cures at low energy, has little curing shrinkage, and deteriorates the surface roughness of the coating film. From the viewpoint of being suppressed, it is considered to have particularly excellent properties, for example, in the case of a light shielding film.
또한, (A) 및 (B) 성분의 함유량의 비율은 95/5∼40/60이 바람직하고, 60/40∼50/50이 보다 바람직하다. (A) 및 (B) 성분의 함유량의 비율을 바람직한 범위 내로 함으로써 박리 감소를 억제할 수 있고, 표면 주름도 억제할 수 있는 적정한 패터닝을 할 수 있다. 또한 보다 바람직한 범위 내로 함으로써, 격벽에서 필요로 되는 5∼25㎛로 한 두꺼운 막의 패터닝을 적정한 현상 시간으로 패턴 형상, 패턴 표면 성상이 우수한 경화막 패턴을 얻을 수 있다.In addition, the ratio of the content of the components (A) and (B) is preferably 95/5 to 40/60, more preferably 60/40 to 50/50. By setting the ratio of the content of the components (A) and (B) within a preferred range, it is possible to suppress peeling reduction and to perform appropriate patterning to suppress surface wrinkles. Further, by setting it within a more preferable range, it is possible to obtain a cured film pattern excellent in pattern shape and pattern surface properties with appropriate development time by patterning a thick film having a thickness of 5 to 25 μm required for the partition wall.
(A) 성분의 비율이 상기 범위보다 적은 경우에는 광경화 반응 후의 경화물이 물러지기 쉽다. 반대로, (A) 성분의 배합 비율이 상기 범위보다 많은 경우에는 미노광부의 알칼리 현상액에 대한 용해 속도를 크게 하는 것이 어렵다. 따라서, (A) 성분의 배합 성분이 상기 범위보다 많은 경우에는, 컬러필터용으로서 통상 형성되는 2㎛ 이하의 막 두께의 패터닝을 할 때에는 적정한 현상 속도로 제어하는 것이 가능하지만, 5㎛ 이상의 막 두께의 패터닝을 할 때에는 적정한 현상 속도 및 패턴 형상을 제어하는 것이 어려워진다.When the proportion of the component (A) is less than the above range, the cured product after the photocuring reaction tends to be fragile. Conversely, when the mixing ratio of the component (A) is more than the above range, it is difficult to increase the dissolution rate in the alkali developing solution of the unexposed portion. Therefore, when the blending component of the component (A) is more than the above range, it is possible to control at an appropriate developing speed when patterning a film thickness of 2 µm or less, which is usually formed for color filters, but it is possible to control the film thickness to 5 µm or more. When it is patterned, it becomes difficult to control an appropriate developing speed and pattern shape.
(기타 광중합성 모노머)(Other photopolymerizable monomers)
광경화성을 제어하기 위해서, (A) 성분과 (B) 성분에 추가해서, 적어도 2개의 에틸렌성 불포화 결합을 갖는 광중합성 모노머(B' 성분)를 병용할 수 있다. 상기 광중합성 모노머의 예로는 에틸렌글리콜 디(메타)아크릴레이트, 디에틸렌글리콜 디(메타)아크릴레이트, 트리에틸렌글리콜 디(메타)아크릴레이트, 테트라에틸렌글리콜 디(메타)아크릴레이트, 테트라메틸렌글리콜 디(메타)아크릴레이트, 글리세롤 디(메타)아크릴레이트, 트리메틸올프로판 트리(메타)아크릴레이트, 트리메틸올에탄 트리(메타)아크릴레이트, 펜타에리스리톨 디(메타)아크릴레이트, 펜타에리스리톨 트리(메타)아크릴레이트, 펜타에리스리톨 테트라(메타)아크릴레이트, 디펜타에리스리톨 테트라(메타)아크릴레이트, 글리세롤 트리(메타)아크릴레이트, 소르비톨 펜타(메타)아크릴레이트, 디펜타에리스리톨 펜타(메타)아크릴레이트, 디펜타에리스리톨 헥사(메타)아크릴레이트, 소르비톨 헥사(메타)아크릴레이트, 포스파젠의 알킬렌 옥사이드 변성 헥사(메타)아크릴레이트, 카프로락톤 변성 디펜타에리스리톨 헥사(메타)아크릴레이트 등의 (메타)아크릴산 에스테르류 등이 포함된다. 이들의 광중합성 모노머는 그 1종만을 단독으로 사용해도 좋고, 2종 이상을 병용해도 좋다.In order to control the photocurability, in addition to the component (A) and the component (B), a photopolymerizable monomer having at least two ethylenically unsaturated bonds (component B ') can be used in combination. Examples of the photopolymerizable monomer are ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, tetramethylene glycol di (Meth) acrylate, glycerol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, trimethylolethane tri (meth) acrylate, pentaerythritol di (meth) acrylate, pentaerythritol tri (meth) acrylic Late, pentaerythritol tetra (meth) acrylate, dipentaerythritol tetra (meth) acrylate, glycerol tri (meth) acrylate, sorbitol penta (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol Hexa (meth) acrylate, sorbitol hexa (meth) acrylate, phosphazene, alkylene oxa And (meth) acrylic acid esters such as id-modified hexa (meth) acrylate and caprolactone-modified dipentaerythritol hexa (meth) acrylate. These photopolymerizable monomers may be used alone or in combination of two or more.
((C) 성분)(Component (C))
(C) 광중합 개시제의 예로는 아세토페논, 2,2-디에톡시아세토페논, p-디메틸아세토페논, p-디메틸아미노프로피오페논, 디클로로아세토페논, 트리클로로아세토페논, p-tert-부틸아세토페논 등의 아세토페논류, 벤조페논, 2-클로로벤조페논, p,p'-비스디메틸아미노벤조페논 등의 벤조페논류; 벤질, 벤조인, 벤조인 메틸에테르, 벤조인 이소프로필에테르, 벤조인 이소부틸에테르 등의 벤조인 에테르류; 2-(o-클로로페닐)-4,5-페닐비이미다졸, 2-(o-클로로페닐)-4,5-디(m-메톡시페닐)비이미다졸, 2-(o-플루오로페닐)-4,5-디페닐비이미다졸, 2-(o-메톡시페닐)-4,5-디페닐 비이미다졸, 2,4,5-트리아릴비이미다졸 등의 비이미다졸계 화합물류; 2-트리클로로메틸-5-스티릴-1,3,4-옥사디아졸, 2-트리클로로메틸-5-(p-시아노스티릴)-1,3,4-옥사디아졸, 2-트리클로로메틸-5-(p-메톡시스티릴)-1,3,4-옥사디아졸 등의 할로메틸티아졸 화합물류; 2,4,6-트리스(트리클로로메틸)-1,3,5-트리아진, 2-메틸-4,6-비스(트리클로로메틸)-1,3,5-트리아진, 2-페닐-4,6-비스(트리클로로메틸)-1,3,5-트리아진, 2-(4-클로로페닐)-4,6-비스(트리클로로메틸-1,3,5-트리아진, 2-(4-메톡시페닐)-4,6-비스(트리클로로메틸)-1,3,5-트리아진, 2-(4-메톡시나프틸)-4,6-비스(트리클로로메틸)-1,3,5-트리아진, 2-(4-메톡시스티릴)-4,6-비스(트리클로로메틸)-1,3,5-트리아진, 2-(3,4,5-트리메톡시스티릴)-4,6-비스(트리클로로메틸)-1,3,5-트리아진, 2-(4-메틸티오스티릴)-4,6-비스(트리클로로메틸)-1,3,5-트리아진 등의 할로메틸-S-트리아진계 화합물류; 1,2-옥탄디온, 1-[4-(페닐티오)페닐]-, 2-(O-벤조일옥심), 1-(4-페닐술파닐페닐)부탄-1,2-디온-2-옥심-O-벤조에이트, 1-(4-메틸술파닐페닐)부탄-1,2-디온-2-옥심-O-아세테이트, 1-(4-메틸술파닐페닐)부탄-1-온-옥심-O-아세테이트 등의 O-아실옥심계 화합물류; 벤질디메틸케탈, 티오크산톤, 2-클로로티오크산톤, 2,4-디에틸티오크산톤, 2-메틸티오크산톤, 2-이소프로필티오크산톤 등의 황 화합물; 2-에틸안트라퀴논, 옥타메틸안트라퀴논, 1,2-벤즈안트라퀴논, 2,3-디페닐안트라퀴논 등의 안트라퀴논류; 아조비스이소부틸니트릴, 벤조일퍼옥사이드, 쿠멘 퍼옥사이드 등의 유기 과산화물; 2-메르캅토벤조이미다졸, 2-메르캅토벤조옥사졸, 2-메르캅토벤조티아졸 등의 티올 화합물, 트리에탄올아민, 트리에틸아민 등의 제3급 아민 등이 포함된다. 이들의 광중합 개시제는 그 1종만을 단독으로 사용해도 좋고, 2종 이상을 병용해도 좋다.(C) Examples of the photopolymerization initiator include acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, and p-tert-butylacetophenone Benzophenones such as acetophenones, benzophenone, 2-chlorobenzophenone, and p, p'-bisdimethylaminobenzophenone; Benzoin ethers such as benzyl, benzoin, benzoin methyl ether, benzoin isopropyl ether, and benzoin isobutyl ether; 2- (o-chlorophenyl) -4,5-phenylbiimidazole, 2- (o-chlorophenyl) -4,5-di (m-methoxyphenyl) biimidazole, 2- (o-fluoro Biimidazole type such as phenyl) -4,5-diphenylbiimidazole, 2- (o-methoxyphenyl) -4,5-diphenyl biimidazole, 2,4,5-triarylbiimidazole Compounds; 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloromethyl-5- (p-cyanostyryl) -1,3,4-oxadiazole, 2-triclo Halomethylthiazole compounds such as romethyl-5- (p-methoxystyryl) -1,3,4-oxadiazole; 2,4,6-tris (trichloromethyl) -1,3,5-triazine, 2-methyl-4,6-bis (trichloromethyl) -1,3,5-triazine, 2-phenyl- 4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-chlorophenyl) -4,6-bis (trichloromethyl-1,3,5-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxynaphthyl) -4,6-bis (trichloromethyl)- 1,3,5-triazine, 2- (4-methoxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (3,4,5-tri Methoxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methylthiostyryl) -4,6-bis (trichloromethyl) -1, Halomethyl-S-triazine compounds such as 3,5-triazine; 1,2-octanedione, 1- [4- (phenylthio) phenyl]-, 2- (O-benzoyloxime), 1- ( 4-phenylsulfanylphenyl) butane-1,2-dione-2-oxime-O-benzoate, 1- (4-methylsulfanylphenyl) butane-1,2-dione-2-oxime-O-acetate, 1- (4-methylsulfanylphenyl) butan-1-one-oxime-O-acetate, etc. O-acyloxime-based compounds such as benzyl dimethyl ketal, thioxanthone, 2-chlorothioxanthone, 2,4-diethylthioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, etc. Sulfur compounds; anthraquinones such as 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzanthraquinone, and 2,3-diphenylanthraquinone; azobisisobutylnitrile, benzoyl peroxide, cumene peroxide, etc. Organic peroxides of; thiol compounds such as 2-mercaptobenzoimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, tertiary amines such as triethanolamine and triethylamine, and the like. The photopolymerization initiator may be used alone or in combination of two or more.
특히, 착색제를 포함하는 감광성 수지 조성물로 하는 경우에는 O-아실옥심계 화합물류(케토옥심을 포함)를 사용하는 것이 바람직하다. 또한, 착색제를 고안료 농도로 사용하는 경우 및 차광막 패턴을 형성하는 경우에는 365㎚에 있어서의 몰흡광계수가 10000 이상인 O-아실옥심계 광중합 개시제를 사용하는 것이 바람직하다. 그 구체적 화합물군으로서는 일반식(5)으로 나타내어지는 O-아실옥심계 광중합 개시제가 있다. 또한, 본 발명에서 말하는 「광중합 개시제」란 증감제를 포함하는 의미로 사용된다.In particular, when using a photosensitive resin composition containing a colorant, it is preferable to use O-acyloxime compounds (including ketooxime). In addition, when a coloring agent is used at a high concentration of a paint and when forming a light-shielding film pattern, it is preferable to use an O-acyloxime-based photopolymerization initiator having a molar extinction coefficient at 365 nm of 10000 or more. As the specific compound group, there is an O-acyloxime-based photopolymerization initiator represented by the general formula (5). In addition, the term "photopolymerization initiator" used in the present invention is used to mean a sensitizer.
(식(5) 중, R9, R10은 각각 독립적으로 C1∼C15의 알킬기, C6∼C18의 아릴기, C7∼C20의 아릴알킬기 또는 C4∼C12의 복소환기를 나타내고, R11은 C1∼C15의 알킬기, C6∼C18의 아릴기, C7∼C20의 아릴알킬기를 나타낸다. 여기에서, 알킬기 및 아릴기는 C1∼C10의 알킬기, C1∼C10의 알콕시기, C1∼C10의 알카노일기, 할로겐으로 치환되어 있어도 좋고, 알킬렌 부분은 불포화 결합, 에테르 결합, 티오에테르 결합, 에스테르 결합을 함유하고 있어도 좋다. 또한, 알킬기는 직쇄, 분기, 또는 환상 중 어느 알킬기이어도 좋다.(In formula (5), R 9 and R 10 each independently represent a C1 to C15 alkyl group, a C6 to C18 aryl group, a C7 to C20 arylalkyl group, or a C4 to C12 heterocyclic group, and R 11 is C1 to C1 to It represents an alkyl group of C15, an aryl group of C6 to C18, an arylalkyl group of C7 to C20, wherein the alkyl group and the aryl group are C1 to C10 alkyl group, C1 to C10 alkoxy group, C1 to C10 alkanoyl group, halogen It may be substituted, and the alkylene portion may contain an unsaturated bond, an ether bond, a thioether bond, or an ester bond, and the alkyl group may be a straight chain, branched or cyclic alkyl group.
(C) 성분의 광중합 개시제의 사용량은 (A) 및 (B)의 각 성분의 합계 100중량부를 기준으로서 3∼30중량부가 바람직하고, 5∼20중량부가 보다 바람직하다. (C) 성분의 배합 비율이 3중량부 미만인 경우에는 감도가 저하하고, 광중합의 속도가 늦어져버린다. 그것에 대해서, (C) 성분의 배합 비율이 30중량부를 초과하는 경우에는 감도가 너무 강해서, 소망하는 패턴 선폭 및 소망하는 패턴 에지를 얻을 수 없을 우려가 있다.The amount of the photopolymerization initiator used in the component (C) is preferably 3 to 30 parts by weight, more preferably 5 to 20 parts by weight, based on 100 parts by weight of the total of each component in the components (A) and (B). When the compounding ratio of the component (C) is less than 3 parts by weight, the sensitivity decreases, and the rate of photopolymerization becomes slow. On the other hand, when the compounding ratio of component (C) exceeds 30 parts by weight, the sensitivity is too strong, and there is a fear that a desired pattern line width and a desired pattern edge cannot be obtained.
((D) 성분)(Component (D))
(D) 성분의 발잉크제는 격벽에 잉크에 대한 발잉크성을 부여하는 것이다. 격벽에 둘러싸인 영역 내에 소정량의 유기층의 재료를 포함하는 잉크를 주입하는 경우에는 발잉크제를 함유하는 것이 바람직하다. 인접하는 격벽 내에 잉크가 도입하는 것, 및 격벽에 잉크가 부착되는 것을 억제할 수 있기 때문이다.The ink repellent agent of component (D) imparts ink repellency to the ink on the partition wall. When injecting ink containing a predetermined amount of the organic layer material into the region surrounded by the partition wall, it is preferable to contain an ink repellent agent. This is because the introduction of ink into adjacent partition walls and the adhesion of ink to the partition walls can be suppressed.
(D) 성분의 발잉크제의 예로는 실리콘 함유 화합물이나 불소계 화합물이 포함된다. 본 발명에서는 (D) 성분의 발잉크제는 불소계 화합물인 것이 바람직하고, 가교기를 함유하는 불소계 화합물인 것이 보다 바람직하다. 발잉크제로서 불소계 화합물을 사용한 경우에는 상기 불소원자를 갖는 기가 격벽의 표면에 배향함으로써 잉크의 번짐이나 혼색을 억제하기 때문이다. 또한, 상기 기가 잉크를 튕김으로써 인접하는 격벽의 영역 내에 진입하는 것을 억제할 수 있기 때문이다. 또한, 가교기를 함유하는 불소계 화합물을 사용함으로써, 형성한 도포막을 노광할 때에 그 표면에서의 가교 반응을 가속할 수 있다. 이에 따라, 현상 처리에 있어서 도포막으로부터 발잉크제가 유출하기 어려워지므로, 높은 발잉크성을 갖는 격벽을 얻을 수 있다.Examples of the ink repellent agent of component (D) include silicone-containing compounds and fluorine-based compounds. In the present invention, the ink repellent agent of component (D) is preferably a fluorine-based compound, and more preferably a fluorine-based compound containing a crosslinking group. This is because when a fluorine-based compound is used as the ink repellent, the group having the fluorine atom is oriented on the surface of the partition wall, thereby suppressing ink bleeding and color mixing. In addition, it is because it is possible to suppress the group from entering the region of the adjacent partition wall by repelling the ink. In addition, by using a fluorine-based compound containing a crosslinking group, the crosslinking reaction on the surface can be accelerated when exposing the formed coating film. This makes it difficult for the ink repellent agent to flow out of the coating film in the development process, so that a partition wall having high ink repellency can be obtained.
상기 가교기로서는 에폭시기 또는 에틸렌성 불포화기가 바람직하고, 격벽으로부터 발잉크제의 유출 억제의 관점에서는 에틸렌성 불포화기가 바람직하다. 여기에서, 에틸렌성 불포화기를 갖는 불소계 화합물의 예로는 퍼플루오로알킬술폰산, 퍼플루오로알킬카르복실산, 퍼플루오로알킬알킬렌옥사이드 부가물, 퍼플루오로알킬트리알킬암모늄염, 퍼플루오로알킬기와 친수기를 포함하는 올리고머, 퍼플루오로알킬기와 친유기를 포함하는 올리고머, 퍼플루오로알킬기와 친수기와 신유기를 포함하는 올리고머, 퍼플루오로알킬과 친수기를 포함하는 우레탄, 퍼플루오로알킬에스테르, 퍼플루오로알킬인산 에스테르 등의 불소 함유 유기 화합물 등이 포함된다.An epoxy group or an ethylenically unsaturated group is preferable as the crosslinking group, and an ethylenically unsaturated group is preferred from the viewpoint of suppressing spillage of the ink repellent agent from the partition wall. Here, examples of the fluorine-based compound having an ethylenically unsaturated group include perfluoroalkylsulfonic acid, perfluoroalkylcarboxylic acid, perfluoroalkylalkylene oxide adduct, perfluoroalkyltrialkylammonium salt, and perfluoroalkyl group Oligomers containing hydrophilic groups, oligomers containing perfluoroalkyl groups and lipophilic groups, oligomers containing perfluoroalkyl groups and hydrophilic groups and new organic groups, urethanes containing perfluoroalkyl and hydrophilic groups, perfluoroalkyl esters, perfluoro And fluorine-containing organic compounds such as alkyl phosphate esters.
본 발명에서 사용하는 (D) 성분의 발잉크제의 분자량은 특별히 한정되지 않고, 작아도, 커도 좋다. 여기에서, 분자량이 큰 발잉크제를 사용함으로써, 소성에 의한 발잉크제의 유동성이 억제되어 격벽에서 발잉크제의 유출을 억제할 수 있기 때문에 바람직하다. 또한, 발잉크제의 중량 평균 분자량(Mw)은 100∼200,000의 범위에 있는 것이 바람직하고, 1,000∼150,000의 범위에 있는 것이 보다 바람직하고, 10,000∼130,000의 범위에 있는 것이 특히 바람직하다. 질량 평균 분자량(Mw)이 하한값(Mw: 100) 이상이면, 네거티브형 감광성 수지 조성물을 이용하여 경화막을 형성할 때에 발잉크제가 상면 이행하기 쉽다. 또한, 상한치(Mw: 200,000) 이하이면 개구부 잔류물이 적어지기 때문에 바람직하다.The molecular weight of the ink repellent agent of the component (D) used in the present invention is not particularly limited, and may be small or large. Here, the use of an ink repellent having a large molecular weight is preferable because the fluidity of the ink repellent by firing can be suppressed and the flow of the ink repellent from the partition can be suppressed. In addition, the weight average molecular weight (Mw) of the ink repellent agent is preferably in the range of 100 to 200,000, more preferably in the range of 1,000 to 150,000, and particularly preferably in the range of 10,000 to 130,000. When the mass average molecular weight (Mw) is at least the lower limit value (Mw: 100), the ink repellent agent tends to migrate to the upper surface when forming a cured film using a negative photosensitive resin composition. Moreover, since it is less than the upper limit (Mw: 200,000), the opening residue is less, which is preferable.
본 발명의 감광성 수지 조성물 중의 (D) 성분의 발잉크제의 함유량은 전체 고형분에 대하여 0.01질량% 이상 10질량% 이하인 것이 바람직하고, 0.05질량% 이상 8질량% 이하인 것이 보다 바람직하고, 0.1질량% 이상 6질량% 이하인 것이 특히 바람직하다. 여기에서, 발잉크제의 함유량을 0.01질량% 이상으로 함으로써 높은 발잉크성을 갖고, 10질량% 이하로 함으로써 화소부에의 유출을 억제할 수 있다.The content of the ink repellent agent of the component (D) in the photosensitive resin composition of the present invention is preferably 0.01% by mass or more and 10% by mass or less, more preferably 0.05% by mass or more and 8% by mass or less, and more preferably 0.1% by mass, based on the total solid content. It is especially preferable that it is 6 mass% or more. Here, by making the content of the ink repellent agent 0.01% by mass or more, it has high ink repellency, and by setting the content of the ink repellent agent to 10% by mass or less, leakage to the pixel portion can be suppressed.
발잉크제의 예로는 주쇄가 탄화수소 쇄이고, 측쇄에 불소원자를 포함하는 화합물로 이루어지는 발잉크제가 포함된다. 또한, 발잉크제에는 불소원자를 갖는 가수분해성 실란 화합물을 포함하는 가수분해성 실란 화합물의 부분 가수분해 축합물로 이루어지는 발잉크제를 사용해도 좋다. 발잉크제는 그 1종만을 단독으로 사용해도 좋고, 2종 이상을 병용해도 좋다.Examples of the ink repellent agent include a ink repellent agent composed of a compound whose main chain is a hydrocarbon chain and a fluorine atom in the side chain. In addition, an ink repellent composed of a partially hydrolyzed condensate of a hydrolyzable silane compound containing a hydrolyzable silane compound having a fluorine atom may be used as the ink repellent agent. The ink repellent agent may be used alone or in combination of two or more.
((E) 성분)((E) component)
본 발명에서 사용할 수 있는 (E) 성분의 흑색 안료, 혼색 유기 안료 및 백색 안료의 착색제는 1∼1000㎚의 평균 입경(레이저 회절·산란법 입경 분포계 또는 동적 광산란법 입경 분포계 측정된 평균 입경)으로 분산되어진 것이면, 공지의 착색제를 특별히 제한 없이 사용할 수 있다.The colorant of the black pigment, mixed color organic pigment, and white pigment of the component (E) that can be used in the present invention has an average particle diameter of 1 to 1000 nm (laser diffraction / scattering method particle size distribution system or dynamic light scattering method particle size distribution system). ), A known colorant can be used without particular limitation.
여기에서, 흑색 안료의 예로는 페릴렌 블랙, 시아닌 블랙, 아닐린 블랙, 카본 블랙, 티타늄 블랙 등이 포함된다. 혼색 유기 안료의 예로는 아조 안료, 축합 아조 안료, 아조메틴 안료, 프탈로시아닌 안료, 퀴나크리돈 안료, 이소인도리논 안료, 이소인돌린 안료, 디옥사진 안료, 스렌 안료, 페릴렌 안료, 페리논 안료, 퀴노프탈론 안료, 디케토피롤로피롤 안료, 티오인디고 안료 등의 유기 안료로부터 선택되는 적어도 2색이 혼합된 안료가 포함된다. 백색 안료의 예로는 산화티탄 안료, 복합 산화물 안료; 규산칼슘, 탄산마그네슘, 탄산칼슘, 황산칼슘, 황산바륨 등의 무기 필러가 포함된다. 이들의 (E) 성분은 목적으로 하는 감광성 수지 조성물의 기능에 따라, 그 1종만을 단독으로 사용해도 좋고, 2종 이상을 병용해도 좋다.Here, examples of the black pigment include perylene black, cyanine black, aniline black, carbon black, titanium black, and the like. Examples of mixed organic pigments include azo pigments, condensed azo pigments, azomethine pigments, phthalocyanine pigments, quinacridone pigments, isoindolinone pigments, isoindolin pigments, dioxazine pigments, styrene pigments, perylene pigments, and perinone pigments , A pigment mixed with at least two colors selected from organic pigments such as quinophthalone pigment, diketopyrrolopyrrole pigment, and thioindigo pigment. Examples of white pigments include titanium oxide pigments and composite oxide pigments; And inorganic fillers such as calcium silicate, magnesium carbonate, calcium carbonate, calcium sulfate, and barium sulfate. These (E) components may be used alone or in combination of two or more depending on the function of the target photosensitive resin composition.
또한, (E) 성분으로서 사용 가능한 유기 안료의 예로는 컬러인덱스명으로 이하의 넘버의 것이 포함되지만, 이것에 한정되지 않는다.Moreover, as an example of the organic pigment which can be used as a component (E), the thing of the following numbers is included in the color index name, but it is not limited to this.
피그먼트·레드 2, 3, 4, 5, 9, 12, 14, 22, 23, 31, 38, 112, 122, 144, 146, 147, 149, 166, 168, 170, 175, 176, 177, 178, 179, 184, 185, 187, 188, 202, 207, 208, 209, 210, 213, 214, 220, 221, 242, 247, 253, 254, 255, 256, 257, 262, 264, 266, 272, 279 등Pigment Red 2, 3, 4, 5, 9, 12, 14, 22, 23, 31, 38, 112, 122, 144, 146, 147, 149, 166, 168, 170, 175, 176, 177, 178, 179, 184, 185, 187, 188, 202, 207, 208, 209, 210, 213, 214, 220, 221, 242, 247, 253, 254, 255, 256, 257, 262, 264, 266, 272, 279, etc.
피그먼트·오렌지 5, 13, 16, 34, 36, 38, 43, 61, 62, 64, 67, 68, 71, 72, 73, 74, 81 등Pigment Orange 5, 13, 16, 34, 36, 38, 43, 61, 62, 64, 67, 68, 71, 72, 73, 74, 81, etc.
피그먼트·옐로우 1, 3, 12, 13, 14, 16, 17, 55, 73, 74, 81, 83, 93, 95, 97, 109, 110, 111, 117, 120, 126, 127, 128, 129, 130, 136, 138, 139, 150, 151, 153, 154, 155, 173, 174, 175, 176, 180, 181, 183, 185, 191, 194, 199, 213, 214 등Pigment Yellow 1, 3, 12, 13, 14, 16, 17, 55, 73, 74, 81, 83, 93, 95, 97, 109, 110, 111, 117, 120, 126, 127, 128, 129, 130, 136, 138, 139, 150, 151, 153, 154, 155, 173, 174, 175, 176, 180, 181, 183, 185, 191, 194, 199, 213, 214, etc.
피그먼트·그린 7, 36, 58 등Pigment Green 7, 36, 58, etc.
피그먼트·블루 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 60, 80 등Pigment Blue 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 60, 80, etc.
피그먼트·바이올렛 19, 23, 37 등Pigment Violet 19, 23, 37, etc.
(E) 성분의 착색제의 배합 비율에 대해서는 소망의 차광도에 의해 임의로 정할 수 있지만, 감광성 수지 조성물 중의 고형 성분에 대하여 1∼80질량%인 것이 바람직하다. 여기에서, 흑색의 격벽을 형성하는 경우에는 3∼50질량%인 것이 보다 바람직하고, 백색의 격벽을 형성하는 경우에는 10∼80질량%인 것이 보다 바람직하다.Although the mixing ratio of the colorant of the component (E) can be arbitrarily determined by a desired light-shielding degree, it is preferably 1 to 80% by mass relative to the solid component in the photosensitive resin composition. Here, when forming a black partition, it is more preferably 3 to 50% by mass, and when forming a white partition, it is more preferably 10 to 80% by mass.
상기 (E) 성분은 용제에 분산시킨 착색제 분산체로서 다른 배합 성분과 혼합하는 것이 통상이고, 이 때에는 분산제(E' 성분)를 첨가할 수 있다. 분산제는 안료(착색제) 분산에 사용되고 있는 공지의 화합물(분산제, 분산 습윤제, 분산 촉진제 등의 명칭으로 시판되고 있는 화합물 등) 등을 특별히 제한없이 사용할 수 있다. 분산제의 예로는 양이온성 고분자계 분산제, 음이온성 고분자계 분산제, 비이온성 고분자계 분산제, 안료 유도체형 분산제(분산 조제)가 포함된다. 특히, 분산제는 착색제에의 흡착점으로서 이미다졸릴기, 피롤릴기, 피리딜기, 1급, 2급 또는 3급의 아미노기 등의 양이온성의 관능기를 갖고, 아민가가 1∼100㎎KOH/g, 수 평균 분자량이 1000∼10만의 범위에 있는 양이온성 고분자계 분산제인 것이 바람직하다. 이 분산제의 배합량은 착색제에 대하여 1∼35질량%인 것이 바람직하고, 2∼25질량%인 것이 보다 바람직하다. 또한, 수지류와 같은 고점도 물질은 일반적으로 분산을 안정시키는 작용을 갖지만, 분산 촉진능을 갖지 않는 것은 분산제로서 취급하지 않는다. 그러나, 분산을 안정시키는 목적으로 사용하는 것을 제한하는 것은 아니다.The component (E) is a colorant dispersion dispersed in a solvent, and is usually mixed with other compounding components. At this time, a dispersant (component E ') can be added. The dispersant may be a known compound (dispersant, dispersant wetting agent, compound sold under the names of dispersing accelerators, etc.) used for dispersing pigments (colorants), etc., without particular limitation. Examples of the dispersant include cationic polymer-based dispersants, anionic polymer-based dispersants, nonionic polymer-based dispersants, and pigment derivative-type dispersants (dispersing aids). In particular, the dispersant has cationic functional groups such as imidazolyl groups, pyrrolyl groups, pyridyl groups, primary, secondary or tertiary amino groups as adsorption points to colorants, and has an amine value of 1 to 100 mgKOH / g, water. It is preferable that the average molecular weight is a cationic polymer-based dispersant in the range of 10 to 100,000. It is preferable that the compounding quantity of this dispersing agent is 1 to 35 mass% with respect to a coloring agent, and it is more preferable that it is 2 to 25 mass%. In addition, high-viscosity materials such as resins generally have a function of stabilizing dispersion, but those that do not have a dispersion promoting ability are not treated as dispersants. However, it is not limited to use for the purpose of stabilizing dispersion.
적절한 방법으로 상기 (A)∼(E) 성분을 혼합해서 분산시킴으로써, 본 발명의 감광 수지 조성물을 조제할 수 있다.The photosensitive resin composition of this invention can be prepared by mixing and dispersing the said (A)-(E) component by an appropriate method.
(용제)(solvent)
본 발명의 감광성 수지 조성물에는 (A)∼(E)의 성분 이외에 (F) 성분인 용제를 사용하는 것이 바람직하다. 용제의 예로는 메탄올, 에탄올, n-프로판올, 이소프로판올, 에틸렌글리콜, 프로필렌글리콜 등의 알코올류; α- 또는 β-테르피네올 등의 테르펜류; 아세톤, 메틸에틸케톤, 시클로헥산온, N-메틸-2-피롤리돈 등의 케톤류; 톨루엔, 크실렌, 테트라메틸벤젠 등의 방향족 탄화수소류; 셀로솔브, 메틸셀로솔브, 에틸셀로솔브, 카르비톨, 메틸카르비톨, 에틸카르비톨, 부틸카르비톨, 프로필렌글리콜모노메틸에테르, 프로필렌글리콜모노에틸에테르, 디프로필렌글리콜모노메틸에테르, 디프로필렌글리콜모노에틸에테르, 트리에틸렌글리콜모노메틸에테르, 트리에틸렌글리콜모노에틸에테르 등의 글리콜에테르류; 아세트산 에틸, 아세트산 부틸, 셀로솔브 아세테이트, 에틸셀로솔브 아세테이트, 부틸셀로솔브 아세테이트, 카르비톨 아세테이트, 에틸카르비톨 아세테이트, 부틸카르비톨 아세테이트, 프로필렌글리콜모노메틸에테르 아세테이트, 프로필렌글리콜모노에틸에테르 아세테이트 등의 아세트산 에스테르류가 포함된다. 이들을 단독 또는 2종류 이상을 병용해서 용해, 혼합시킴으로써 균일한 용액상의 조성물로 할 수 있다.It is preferable to use the solvent which is a component (F) other than the components of (A)-(E) for the photosensitive resin composition of this invention. Examples of the solvent include alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol, and propylene glycol; terpenes such as α- or β-terpineol; Ketones such as acetone, methyl ethyl ketone, cyclohexanone and N-methyl-2-pyrrolidone; Aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; Cellosolve, methylcellosolve, ethylcellosolve, carbitol, methylcarbitol, ethylcarbitol, butylcarbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol Glycol ethers such as monoethyl ether, triethylene glycol monomethyl ether, and triethylene glycol monoethyl ether; Ethyl acetate, butyl acetate, cellosolve acetate, ethylcellosolve acetate, butylcellosolve acetate, carbitol acetate, ethylcarbitol acetate, butylcarbitol acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, etc. The acetic acid esters of are included. These can be used alone or in combination of two or more of them to dissolve and mix to obtain a uniform solution phase composition.
또한, 본 발명의 감광성 수지 조성물에는 필요에 따라서 에폭시 수지 등의 (A) 성분 이외의 수지, 경화제, 경화촉진제, 열중합금지제 및 산화방지제, 가소제, 충전재, 레벨링제, 소포제, 계면활성제, 커플링제 등의 첨가제를 배합할 수 있다. 여기에서, 열중합금지제 및 산화방지제의 예로는 하이드로퀴논, 하이드로퀴논 모노메틸에테르, 피로갈롤, tert-부틸카테콜, 페노티아진, 힌다드페놀계 화합물 등이 포함된다. 가소제의 예로는 디부틸프탈레이트, 디옥틸프탈레이트, 인산 트리크레실 등이 포함된다. 충전재의 예로는 유리 섬유, 실리카, 마이카, 알루미나 등이 포함된다. 소포제나 레벨링제의 예로는 실리콘계, 불소계, 아크릴계의 화합물이 포함된다. 계면활성제의 예로는 불소계 계면활성제, 실리콘계 계면활성제 등이 포함된다. 커플링제의 예로는 3-(글리시딜옥시)프로필 트리메톡시실란, 3-아크릴옥시프로필 트리메톡시실란, 3-이소시아나토프로필 트리에톡시실란, 3-우레이도프로필 트리에톡시실란 등이 포함된다.Further, in the photosensitive resin composition of the present invention, if necessary, resins other than (A) components such as epoxy resins, curing agents, curing accelerators, thermal polymerization inhibitors and antioxidants, plasticizers, fillers, leveling agents, antifoaming agents, surfactants, coupling agents Additives, such as, can be blended. Here, examples of the thermal polymerization inhibitor and antioxidant include hydroquinone, hydroquinone monomethyl ether, pyrogallol, tert-butyl catechol, phenothiazine, and a hindered phenol compound. Examples of plasticizers include dibutylphthalate, dioctylphthalate, tricresyl phosphate, and the like. Examples of fillers include glass fibers, silica, mica, alumina, and the like. Examples of the antifoaming agent or leveling agent include silicone-based, fluorine-based, and acrylic-based compounds. Examples of surfactants include fluorine-based surfactants, silicone-based surfactants, and the like. Examples of the coupling agent include 3- (glycidyloxy) propyl trimethoxysilane, 3-acryloxypropyl trimethoxysilane, 3-isocyanatopropyl triethoxysilane, 3-ureidopropyl triethoxysilane, etc. This is included.
본 발명의 감광성 수지 조성물은 용제를 제외한 고형분(고형분에는 경화 후에 고형분이 되는 모노머를 포함) 중에, (A) 성분인 불포화기 함유 감광성 수지와, (B) 성분인 수지상 폴리머와, (C) 성분인 광중합 개시제와, (D) 성분인 발잉크제와, (E) 착색제가 합계로 80질량% 이상, 바람직하게는 90질량% 이상 포함되는 것이 바람직하다. 용제의 양은 목표로 하는 점도에 의해 변화되지만, 전체량에 대하여 40∼90질량%인 것이 바람직하다.The photosensitive resin composition of the present invention includes (A) an unsaturated group-containing photosensitive resin as component (A), a dendritic polymer as component (B), and (C) component as a solid component (a solid component includes a monomer that becomes a solid component after curing) excluding a solvent. It is preferable that the phosphorus photopolymerization initiator, the ink repellent agent (D), and the coloring agent (E) in total are 80% by mass or more, preferably 90% by mass or more. The amount of the solvent varies depending on the target viscosity, but is preferably 40 to 90% by mass relative to the total amount.
또한, 본 발명의 감광성 수지 조성물을 경화시켜 이루어지는 경화물(격벽)은 예를 들면 감광성 수지 조성물의 용액을 기판 등에 도포하고, 용제를 건조하고, 광(자외선, 방사선 등을 포함)을 조사해서 경화시킴으로써 얻어진다. 포토마스크 등을 사용해서 광이 닿는 부분과 닿지 않은 부분을 형성하고, 광이 닿는 부분만을 경화시켜 다른 부분을 알칼리 용액으로 용해시키면 소망의 패턴의 격벽이 얻어진다.In addition, the cured product (bulk wall) obtained by curing the photosensitive resin composition of the present invention is cured by, for example, applying a solution of the photosensitive resin composition to a substrate, drying the solvent, and irradiating light (including ultraviolet rays, radiation, etc.). It is obtained by. A photomask or the like is used to form a portion that does not and does not touch the light, and only the portion that the light touches is cured to dissolve the other portion with an alkali solution, whereby a desired pattern of barrier ribs is obtained.
감광성 수지 조성물의 도포·건조에 의한 성막 방법의 각 공정에 대해서, 구체적으로 예시한다.Each process of the film-forming method by application | coating and drying of a photosensitive resin composition is illustrated concretely.
감광성 수지 조성물을 기판에 도포하는 방법으로서는 공지의 용액 침지법, 스프레이법, 롤러 코터기, 랜드 코터기, 슬릿 코트기나 스피너기를 사용하는 방법 등의 어느 방법도 채용할 수 있다. 이들의 방법에 의해, 소망의 두께로 도포한 후 용제를 제거(프리베이킹)함으로써 피막이 형성된다. 프리베이킹는 오븐, 핫플레이트 등에 의한 가열, 진공 건조 또는 이들 조합함으로써 행해진다. 프리베이킹에 있어서의 가열 온도 및 가열 시간은 사용하는 용제에 따라 적당히 선택될 수 있지만, 예를 들면 80∼120℃에서 1∼10분간 행해지는 것이 바람직하다.As a method of applying the photosensitive resin composition to the substrate, any method such as a known solution immersion method, a spray method, a roller coater, a land coater, a slit coater or a spinner can be used. By these methods, a film is formed by applying a desired thickness and then removing the solvent (pre-baking). Pre-baking is performed by heating with an oven, a hot plate, or the like, vacuum drying, or a combination thereof. The heating temperature and the heating time in pre-baking can be appropriately selected depending on the solvent used, but is preferably performed at 80 to 120 ° C for 1 to 10 minutes, for example.
노광에 사용되는 방사선으로서는, 예를 들면 가시광선, 자외선, 원자외선, 전자선, X선 등을 사용할 수 있지만, 방사선의 파장의 범위는 250∼450㎚인 것이 바람직하다. 또한 이 알칼리 현상에 적합한 현상액으로서는, 예를 들면 탄산나트륨, 탄산칼륨, 수산화칼륨, 디에탄올아민, 테트라메틸암모늄히드록시드 등의 수용액을 사용할 수 있다. 이들의 현상액은 수지층의 특성에 맞춰서 적당히 선택될 수 있지만, 필요에 따라서 계면활성제를 첨가하는 것도 유효하다. 현상 온도는 20∼35℃인 것이 바람직하고, 시판의 현상기나 초음파 세정기 등을 사용하여 미세한 화상을 정밀하게 형성할 수 있다. 또한 알칼리 현상 후에는, 통상 수세된다. 현상 처리법으로서는 샤워 현상법, 스프레이 현상법, 딥(침지) 현상법, 패들(액 성장) 현상법 등을 적용할 수 있다.As the radiation used for exposure, for example, visible light, ultraviolet light, far ultraviolet light, electron beam, X-ray, or the like can be used, but the wavelength range of the radiation is preferably 250 to 450 nm. Moreover, as a developing solution suitable for this alkali development, aqueous solutions, such as sodium carbonate, potassium carbonate, potassium hydroxide, diethanolamine, and tetramethylammonium hydroxide, can be used, for example. These developer solutions can be appropriately selected in accordance with the properties of the resin layer, but it is also effective to add a surfactant if necessary. The developing temperature is preferably 20 to 35 ° C, and a fine image can be precisely formed using a commercially available developer or ultrasonic cleaner. Moreover, after alkali development, it is washed with water normally. As the developing treatment method, a shower developing method, a spray developing method, a dip (immersion) developing method, a paddle (liquid growth) developing method, or the like can be applied.
이와 같이 하여 현상한 후, 180∼250℃에서 20∼100분간, 열처리(포스트베이킹)가 행해진다. 단, 제막하는 기판 등의 내열성이 낮은 경우에는 80∼180℃에서 30∼100분간의 포스트베이킹 조건으로 할 수 있도록 조성물의 배합을 설계할 수도 있다. 이 포스트베이킹은 패터닝된 도막과 기판의 밀착성을 높이기 위해서 등의 목적으로 행해진다. 이것은 프리베이킹와 마찬가지로, 오븐, 핫플레이트 등에 의해 가열함으로써 행해진다.After developing in this way, heat treatment (post baking) is performed at 180 to 250 ° C for 20 to 100 minutes. However, when the heat resistance of the substrate to be formed is low, the composition may be designed so that the post-baking conditions at 80 to 180 ° C for 30 to 100 minutes can be performed. This post-baking is performed for the purpose of increasing the adhesion between the patterned coating film and the substrate. This is done by heating with an oven, hot plate or the like, similar to prebaking.
이상으로부터, 본 발명에서는 광학 농도(OD)가 0.2∼4.0/㎛이고, 테이퍼 각이 21° 이상인 흑색의 격벽 및 광학 농도(OD)가 0.1∼0.3/㎛이고, 테이퍼 각이 21° 이상인 백색의 격벽을 얻을 수 있다. 또한 광학 농도(OD)가 0.2∼4.0/㎛이고, 테이퍼 각이 51° 이상인 흑색의 격벽 및 광학 농도(OD)가 0.1∼0.3/㎛이고, 테이퍼 각이 51° 이상인 백색의 격벽을 얻을 수 있다.From the above, in the present invention, in the present invention, the optical density (OD) is 0.2 to 4.0 / µm, the black partition wall with a taper angle of 21 ° or more, and the optical density (OD) is 0.1 to 0.3 / µm, and the taper angle of white is 21 ° or more. Bulkhead can be obtained. Further, a black partition wall with an optical density (OD) of 0.2 to 4.0 / µm, a taper angle of 51 ° or more, and a white partition wall with an optical density (OD) of 0.1 to 0.3 / µm and a taper angle of 51 ° or more can be obtained. .
본 발명의 감광성 수지 조성물은 유기 EL 소자, 양자점 디스플레이, TFT 어레이 및 파장 변환 소자 등을 포함하는 컬러필터의 제조에 사용할 수 있다.The photosensitive resin composition of the present invention can be used for the production of color filters including organic EL elements, quantum dot displays, TFT arrays and wavelength conversion elements.
(실시예)(Example)
이하, 실시예 및 비교예에 의거하여 본 발명을 상세하게 설명하지만, 본 발명은 이들에 한정되는 것은 아니다. 또한, (A) 성분인 불포화기 함유 감광성 수지 및 (B) 성분인 수지상 폴리머의 합성예를 나타낸다. 또한, 본 발명은 이들의 실시예 등에 의해 그 범위를 한정되는 것은 아니다.Hereinafter, the present invention will be described in detail based on Examples and Comparative Examples, but the present invention is not limited to these. Moreover, the synthesis example of the photosensitive resin containing the unsaturated group which is (A) component, and the dendritic polymer which is (B) component is shown. In addition, the scope of the present invention is not limited by these examples.
합성예 1∼3에서 사용하는 약호는 다음과 같다.The symbols used in Synthesis Examples 1 to 3 are as follows.
BPFE: 비스페놀 플루오렌형 에폭시 화합물(9,9-비스(4-히드록시페닐)플루오렌과 클로로메틸옥시란의 반응물(에폭시 당량 250g/eq).BPFE: Bisphenol fluorene-type epoxy compound (9,9-bis (4-hydroxyphenyl) fluorene reacted with chloromethyloxyran (epoxy equivalent: 250 g / eq).
AA: 아크릴산AA: acrylic acid
PGMEA: 프로필렌글리콜모노메틸에테르 아세테이트PGMEA: Propylene glycol monomethyl ether acetate
TEAB: 브롬화 테트라에틸암모늄TEAB: tetraethylammonium bromide
BPDA: 3,3',4,4'-비페닐테트라카르복실산 이무수물BPDA: 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride
THPA: 테트라히드로 무수 프탈산THPA: Tetrahydrophthalic anhydride
MAA: 메타크릴산MAA: methacrylic acid
MMA: 메타크릴산 메틸MMA: methyl methacrylate
CHMA: 메타크릴산 시클로헥실CHMA: cyclohexyl methacrylate
AIBN: 아조비스이소부틸로니트릴AIBN: Azobisisobutylonitrile
GMA: 글리시딜 메타크릴레이트GMA: glycidyl methacrylate
TPP: 트리페닐포스핀TPP: triphenylphosphine
TBPC: 2,6-디-tert-부틸-p-크레졸TBPC: 2,6-di-tert-butyl-p-cresol
PTMA: 펜타에리스리톨 테트라(메르캅토아세테이트)PTMA: pentaerythritol tetra (mercaptoacetate)
DPHA: 디펜타에리스리톨 펜타아크릴레이트와 헥사아크릴레이트의 혼합물DPHA: mixture of dipentaerythritol pentaacrylate and hexaacrylate
HQ: 하이드로퀴논HQ: Hydroquinone
BzDMA: 벤질디메틸아민BzDMA: benzyldimethylamine
[합성예 1][Synthesis Example 1]
환류 냉각기 부착 500ml 4구 플라스크 중에, BPFE(114.4g(0.23mol), AA(33.2g(0.46mol)), PGMEA(157g) 및 TEAB(0.48g)를 투입하고, 100∼105℃에서 20시간 교반해서 반응시켰다. 이어서, 플라스크 내에 BPDA(35.3g(0.12mol)), THPA(18.3g(0.12mol))를 투입하고, 120∼125℃에서 6시간 교반하여 불포화기 함유 감광성 수지 (A)-1을 얻었다. 얻어진 수지 용액의 고형분 농도는 56.1질량%이고, 산가(고형분 환산)는 103㎎KOH/g이고, GPC 분석에 의해 Mw는 3600이었다.In a 500 ml four-neck flask with a reflux cooler, BPFE (114.4 g (0.23 mol), AA (33.2 g (0.46 mol)), PGMEA (157 g) and TEAB (0.48 g)) were added and stirred at 100 to 105 ° C. for 20 hours. Subsequently, BPDA (35.3 g (0.12 mol)) and THPA (18.3 g (0.12 mol)) were added into the flask, and stirred at 120 to 125 ° C for 6 hours to prepare an unsaturated group-containing photosensitive resin (A) -1. The obtained resin solution had a solid content concentration of 56.1 mass%, an acid value (in terms of solid content) of 103 mgKOH / g, and Mw of 3600 by GPC analysis.
[합성예 2][Synthesis Example 2]
질소 도입관 및 환류관 부착 1000ml 4구 플라스크 중에, MAA(51.65g(0.60mol)), MMA(36.04g(0.36mol)), CHMA(40.38g(0.24mol)), AIBN(5.91g), 및 PGMEA(360g)를 투입하고, 질소 기류하 80∼85℃에서 8시간 교반하여 중합시켰다. 또한, 플라스크 내에 GMA(61.41g(0.43mol)), TPP(2.27g) 및 TBPC(0.086g)를 투입하고, 80∼85℃에서 16시간 교반하여 불포화기 함유 감광성 수지 (A)-2를 얻었다. 얻어진 수지 용액의 고형분 농도는 35.7질량%이고, 산가(고형분 환산)는 50㎎KOH/g이고, GPC 분석에 의한 Mw는 19600이었다.In a 1000 ml four-necked flask with nitrogen inlet and reflux tubes, MAA (51.65 g (0.60 mol)), MMA (36.04 g (0.36 mol)), CHMA (40.38 g (0.24 mol)), AIBN (5.91 g), and PGMEA (360 g) was added, and the mixture was polymerized by stirring for 8 hours at 80 to 85 ° C under a nitrogen stream. Further, GMA (61.41 g (0.43 mol)), TPP (2.27 g) and TBPC (0.086 g) were added into the flask, and stirred at 80 to 85 ° C. for 16 hours to obtain an unsaturated group-containing photosensitive resin (A) -2. . The obtained resin solution had a solid content concentration of 35.7 mass%, an acid value (in terms of solid content) of 50 mgKOH / g, and Mw of GPC analysis of 19600.
[합성예 3][Synthesis Example 3]
1L의 4구 플라스크 내에, PTMA(20g(메르캅토기: 0.19mol)), DPHA(212g(아크릴기: 2.12mol)), PGMEA(58g), HQ(0.1g), 및 BzDMA(0.01g)를 투입하고, 60℃에서 12시간 교반해서 중합시켜 수지상 폴리머 (B)를 얻었다. 얻어진 수지상 폴리머의 고형분 농도는 80질량%이고, GPC 분석에 의한 Mw는 10000이었다. 상기 수지상 폴리머는 아이오딘 적정법으로 메르캅토기의 소실이 확인되었다.In a 1 L 4-neck flask, PTMA (20 g (mercapto group: 0.19 mol)), DPHA (212 g (acrylic group: 2.12 mol)), PGMEA (58 g), HQ (0.1 g), and BzDMA (0.01 g) It injected | threw-in and stirred at 60 degreeC for 12 hours, and superposed | polymerized, and the dendritic polymer (B) was obtained. The concentration of solid content of the obtained dendritic polymer was 80% by mass, and Mw by GPC analysis was 10000. In the dendritic polymer, disappearance of mercapto groups was confirmed by the iodine titration method.
합성예 1∼3에서 얻어진 불포화기 함유 감광성 수지 및 수지상 폴리머의 고형분 농도, 산가 및 분자량은 이하의 방법에 의해 구했다.The solid content concentration, acid value and molecular weight of the unsaturated group-containing photosensitive resin and the dendritic polymer obtained in Synthesis Examples 1 to 3 were determined by the following method.
[고형분 농도][Solid content concentration]
합성예 중에서 얻어진 수지 용액 1g을 유리 필터〔중량: W0(g)〕에 함침시켜 칭량하고〔W1(g)〕, 160℃에서 2시간 가열한 후의 중량〔W2(g)〕으로부터 다음식에 의해 구했다.1 g of the resin solution obtained in the Synthesis Example was impregnated into a glass filter [weight: W0 (g)], weighed [W1 (g)], and heated at 160 ° C for 2 hours from the weight [W2 (g)] by the following equation. I got it.
고형분 농도(중량%)=100×(W2-W0)/(W1-W0)Solid content concentration (% by weight) = 100 × (W2-W0) / (W1-W0)
[산가][Acid value]
수지 용액을 디옥산에 용해시키고, 전위차 적정 장치〔Hiranuma Inc.제, 상품명 COM-1600〕를 사용해서 1/10N-KOH 수용액으로 적정하여 구했다.The resin solution was dissolved in dioxane and titrated with a 1/10 N-KOH aqueous solution using a potentiometric titration apparatus (Hiranuma Inc., trade name COM-1600).
[분자량][Molecular Weight]
겔 투과 크로마토그래피(GPC)[Tosoh Corporation제, 상품명: HLC-8220GPC, 용매: 테트라히드로푸란, 컬럼: TSKgelSuper-H-2000(2개)+TSKgelSuperH-3000(1개)+TSKgelSuperH-4000(1개)+TSKgelSuper-H5000(1개)〔Tosoh Corporation제〕, 온도: 40℃, 속도: 0.6ml/min]로 측정하고, 표준 폴리스티렌〔Tosoh Corporation제, PS-올리고머 키트〕 환산치로서 중량 평균 분자량(Mw)을 구했다.Gel permeation chromatography (GPC) [manufactured by Tosoh Corporation, trade name: HLC-8220GPC, solvent: tetrahydrofuran, column: TSKgelSuper-H-2000 (2 pcs.) + TSKgelSuperH-3000 (1 pc.) + TSKgelSuperH-4000 (1 pc.) ) + TSKgelSuper-H5000 (1 pc.) [Tosoh Corporation], temperature: 40 ° C., rate: 0.6 ml / min], and measured as standard polystyrene [Tosoh Corporation, PS-Oligomer Kit] weight average molecular weight (in terms of conversion) Mw).
실시예 1∼17 및 비교예 1의 격벽용 감광성 수지 조성물의 각 성분 및 그 배합량을 표 1 및 2에 나타낸다. 또한, 표 1 및 2 중의 (A)∼(E)의 각 성분은 용제 이외의 고형분의 분량이고, 수지 용액, 착색 분산액의 용제의 양은 용제(F)에 합산해서 나타내고 있다. 또한, (A)∼(F)로 나타내어지는 성분을 이하에 기재했다.Tables 1 and 2 show the respective components of the photosensitive resin composition for partition walls of Examples 1 to 17 and Comparative Example 1 and their blending amounts. In addition, each component of (A)-(E) in Tables 1 and 2 is a quantity of solid content other than a solvent, and the amount of the solvent of a resin solution and a colored dispersion liquid is shown by adding to the solvent (F). In addition, the components represented by (A)-(F) were described below.
표 1 및 표 2로 나타내어지는 실시예 및 비교예에서 사용하는 기호는 다음과 같다.Symbols used in Examples and Comparative Examples shown in Tables 1 and 2 are as follows.
(A) 불포화기 함유 감광성 수지(A) Photosensitive resin containing an unsaturated group
(A)-1: 합성예 1에서 얻어진 수지(A) -1: Resin obtained in Synthesis Example 1
(A)-2: 합성예 2에서 얻어진 수지(A) -2: Resin obtained in Synthesis Example 2
(B) 수지상 폴리머: 합성예 3에서 얻어진 수지상 폴리머(B) dendritic polymer: dendritic polymer obtained in Synthesis Example 3
(B') 광중합성 모노머: 디펜타에리스리톨 펜타아크릴레이트와 헥사아크릴레이트의 혼합물(DPHA, Nippon Kayaku Co., Ltd.제)(B ') Photopolymerizable monomer: a mixture of dipentaerythritol pentaacrylate and hexaacrylate (DPHA, manufactured by Nippon Kayaku Co., Ltd.)
(C) 광중합 개시제: 옥심 에스테르계 광중합 개시제(ADEKA ARKLS NCI-831, ADEKA Corporation제, 「아데카 아크루즈」는 동사의 등록상표)(C) Photopolymerization initiator: oxime ester-based photopolymerization initiator (ADEKA ARKLS NCI-831, manufactured by ADEKA Corporation, "Adeka Acrouz" is a registered trademark of the company)
(D) 발잉크제: (MAGAFACE RS-72-K, DIC Corporation, 「메가팩」은 동사의 등록상표)(D) Ink ink: (MAGAFACE RS-72-K, DIC Corporation, `` Megapack '' is a registered trademark of the company)
(E) 착색제(E) Coloring agent
(E)-1: 카본 블랙(E) -1: Carbon black
(E)-2: 락탐 블랙(E) -2: lactam black
(E)-3: 산화티탄(E) -3: titanium oxide
(E') 분산제(E ') Dispersant
(F) 용제: PGMEA(F) Solvent: PGMEA
[실시예 1][Example 1]
(A)∼(F)까지의 각 성분을 표 1에 기재된 비율로 배합하고, 균일하게 혼합 함으로써 실시예 1에 따른 격벽용 감광성 수지 조성물을 얻었다.Each component from (A) to (F) was blended at the ratios shown in Table 1, and uniformly mixed to obtain a photosensitive resin composition for partition walls according to Example 1.
실시예 1에서 얻어진 격벽용 감광성 수지 조성물을 사용하여 이하의 평가를 행했다.The following evaluation was performed using the photosensitive resin composition for partition walls obtained in Example 1.
[광학 농도(OD)][Optical concentration (OD)]
상기 격벽용 감광성 수지 조성물을, 스핀코터를 사용하여 125㎜×125㎜의 유리판(EAGLE XG, Corning Incorporated제, 「EAGLE XG」은 동사의 등록상표) 상에 포스트베이킹 후의 막 두께가 1㎛가 되도록 도포하고 90℃에서 1분간 프리베이킹했다. 열풍 건조기를 사용하여 230℃, 30분간 열 포스트베이킹한 후 맥베스 투과 농도계를 사용하여 측정을 행하고, 광학 농도(OD)를 평가했다.The photosensitive resin composition for bulkheads was coated on a 125 mm × 125 mm glass plate using a spin coater (EAGLE XG, manufactured by Corning Incorporated, “EAGLE XG” is a registered trademark of the company) so that the film thickness after post-baking is 1 μm. It was applied and prebaked at 90 ° C for 1 minute. After heat post-baking at 230 ° C for 30 minutes using a hot air dryer, measurement was performed using a Macbeth transmission densitometer, and optical density (OD) was evaluated.
광학 농도(OD)는 다음 식(1)으로 산출했다.The optical density (OD) was calculated by the following equation (1).
광학 농도(OD)=-log10T (1)Optical density (OD) =-log 10 T (1)
(T는 투과율을 나타낸다)(T represents transmittance)
[현상 시간(막 두께: 10㎛)][Development time (film thickness: 10 µm)]
상기 격벽용 감광성 수지 조성물을, 스핀코터를 사용하여 125㎜×125㎜의 유리판(EAGLE XG, Corning Incorporated제) 상에 포스트베이킹 후의 막 두께가 10㎛가 되도록 도포하고 90℃에서 1분간 프리베이킹했다. 건조 도막 상에, 20㎛ 개구의 네거티브형 포토마스크를 노광 갭 100㎛으로 조정해서 덮고, i선 조도 30mW/㎠의 초고압 수은 램프로 80mJ/㎠의 자외선을 조사하여 감광 부분의 광경화 반응을 행했다. 이어서, 이 노광 완료된 도판을 25℃, 0.05% 수산화칼륨 수용액을 사용하여 1㎏f/㎠의 샤워 현상압으로 패턴이 드러나기 시작하는 현상 시간을 평가했다.The photosensitive resin composition for partition walls was coated on a 125 mm × 125 mm glass plate (EAGLE XG, manufactured by Corning Incorporated) using a spin coater so that the film thickness after post-baking was 10 μm and pre-baked at 90 ° C. for 1 minute. . On the dry coating film, a negative photomask with a 20 µm opening was covered with an exposure gap of 100 µm, and an ultraviolet ray of 80 mJ / cm 2 was irradiated with an ultra-high pressure mercury lamp having an i-line illumination of 30 mW / cm 2 to perform a photocuring reaction of the photosensitive portion. . Subsequently, the development time at which the pattern began to appear at a shower developing pressure of 1 kgf / cm 2 was evaluated for this exposed plate using 25 ° C. and a 0.05% potassium hydroxide aqueous solution.
막 두께가 10㎛일 때의 현상 시간은 아래와 같이 평가했다.The development time when the film thickness was 10 µm was evaluated as follows.
(평가)(evaluation)
○: 패턴이 드러나기 시작하는 현상 시간이 2분 미만○: The development time that the pattern starts to appear is less than 2 minutes.
△: 패턴이 드러나기 시작하는 현상 시간이 2분 이상 3분 미만△: The development time at which the pattern starts to appear is 2 minutes or more and less than 3 minutes.
×: 패턴이 드러나기 시작하는 현상 시간이 3분 이상×: The development time at which the pattern starts to appear is 3 minutes or more
[현상 시간(막 두께: 2㎛)][Development time (film thickness: 2 μm)]
포스트베이킹 후의 막 두께가 2㎛가 되도록 한 것 이외에는 상기 막 두께(10㎛)의 현상 시간의 조작과 마찬가지로 평가를 행했다.Evaluation was performed in the same manner as the operation of the development time of the film thickness (10 μm) except that the film thickness after post-baking was 2 μm.
막 두께가 2㎛일 때의 현상 시간은 아래와 같이 평가했다.The development time when the film thickness was 2 µm was evaluated as follows.
(평가)(evaluation)
○: 패턴이 드러나기 시작하는 현상 시간이 20초 이상○: The development time at which the pattern starts to appear is 20 seconds or more.
△: 패턴이 드러나기 시작하는 현상 시간이 20초 미만△: Development time at which the pattern starts to appear is less than 20 seconds.
×: 패턴이 드러나기 시작하는 현상 시간이 5초 미만×: development time at which the pattern starts to appear is less than 5 seconds
[세선의 패터닝성(막 두께: 5㎛)][Patternability of thin wire (film thickness: 5 µm)]
상기 격벽용 감광성 수지 조성물을, 스핀코터를 사용하여 125㎜×125㎜의 유리판(EAGLE XG, Corning Incorporated제) 상에 포스트베이킹 후의 막 두께가 10㎛가 되도록 도포하고 90℃에서 1분간 프리베이킹했다. 건조 도막 상에, 5㎛ 개구의 네거티브형 포토마스크를 노광 갭 100㎛로 조정하여 덮고, i선 조도 30mW/㎠의 초고압 수은 램프로 80mJ/㎠의 자외선을 조사하여 감광 부분의 광경화 반응을 행했다. 이어서, 이 노광 완료된 도판을 25℃, 0.05% 수산화칼륨 수용액을 사용하여 1㎏f/㎠의 샤워 현상압으로 패턴이 드러나기 시작하는 현상 시간으로부터, 또한 10초 경과 후의 현상 후 5㎏f/㎠압의 스프레이 수세를 행하여 도막의 미노광부를 제거하고, 유리 기판 상에 화소 패턴이 형성되는지의 여부를 확인했다.The photosensitive resin composition for partition walls was coated on a 125 mm × 125 mm glass plate (EAGLE XG, manufactured by Corning Incorporated) using a spin coater so that the film thickness after post-baking was 10 μm and pre-baked at 90 ° C. for 1 minute. . On a dry coating film, a negative photomask with a 5 µm opening was covered with an exposure gap of 100 µm, and an ultraviolet ray of 80 mJ / cm 2 was irradiated with an ultra-high pressure mercury lamp with an i-line illumination of 30 mW / cm 2 to perform a photocuring reaction of the photosensitive portion. . Subsequently, this exposure-finished plate was 5 kgf / cm 2 pressure after development after 10 seconds elapsed from the development time at which the pattern began to appear at a developing pressure of 1 kgf / cm 2 using a 25 ° C., 0.05% aqueous potassium hydroxide solution. By spray washing with water, the unexposed portion of the coating film was removed, and it was confirmed whether or not a pixel pattern was formed on the glass substrate.
[굵은선의 패터닝성(막 두께: 20㎛)][Patternability of thick line (film thickness: 20㎛)]
네거티브형 포토마스크의 개구를 5㎛에서 20㎛로 변경한 것 이외에는 상기 세선의 패터닝성과 마찬가지로 유리 기판 상에 화소 패턴이 형성되는지의 여부를 확인했다.It was confirmed whether or not a pixel pattern was formed on the glass substrate as in the patterning property of the thin wire except that the opening of the negative photomask was changed from 5 µm to 20 µm.
세선 및 굵은선의 패터닝 특성의 평가는 아래와 같이 평가했다.The evaluation of the patterning characteristics of thin and thick lines was evaluated as follows.
(평가)(evaluation)
○: 패턴이 형성된다○: pattern is formed
△: 패턴이 형성되지만 일부에 박리가 보인다(Triangle | delta): Although a pattern is formed, peeling is seen in part
×: 패턴이 형성되지 않는다×: No pattern is formed
[테이퍼 각도][Taper angle]
상기 격벽용 감광성 수지 조성물을, 스핀코터를 사용하여 125㎜×125㎜의 유리판(EAGLE XG, Corning Incorporated제) 상에 포스트베이킹 후의 막 두께가 10㎛가 되도록 도포하고 90℃에서 1분간 프리베이킹했다. 건조 도막 상에, 20㎛ 개구의 네거티브형 포토마스크를 노광 갭 100㎛으로 조정해서 덮고, i선 조도 30mW/㎠의 초고압 수은 램프로 80mJ/㎠의 자외선을 조사하여 감광 부분의 광경화 반응을 행했다. 이어서, 이 노광 완료된 도판을 25℃, 0.05% 수산화칼륨 수용액을 사용하여 1㎏f/㎠의 샤워 현상압으로 패턴이 드러나기 시작하는 현상 시간으로부터, 또한 10초 경과 후의 현상 후 5㎏f/㎠압의 스프레이 수세를 행하여 도막의 미노광부를 제거하고, 유리 기판 상에 화소 패턴을 형성했다. 형성한 화소 패턴(격자상의 격벽)을 절단하여 단면 관찰용 샘플을 제작하고, 주사형 전자 현미경(Keyence Corporation제)을 사용하여 격벽의 단면 형상을 관찰하고, 그 테이퍼 각도를 측정했다.The photosensitive resin composition for partition walls was coated on a 125 mm × 125 mm glass plate (EAGLE XG, manufactured by Corning Incorporated) using a spin coater so that the film thickness after post-baking was 10 μm and pre-baked at 90 ° C. for 1 minute. . On the dry coating film, a negative photomask with a 20 µm opening was covered with an exposure gap of 100 µm, and an ultraviolet ray of 80 mJ / cm 2 was irradiated with an ultra-high pressure mercury lamp having an i-line illumination of 30 mW / cm 2 to perform a photocuring reaction of the photosensitive portion. . Subsequently, this exposure-finished plate was 5 kgf / cm 2 pressure after development after 10 seconds elapsed from the development time at which the pattern began to appear at a developing pressure of 1 kgf / cm 2 using a 25 ° C., 0.05% aqueous potassium hydroxide solution. By spray washing with water, the unexposed portion of the coating film was removed, and a pixel pattern was formed on the glass substrate. The formed pixel pattern (lattice-shaped partition wall) was cut to prepare a sample for cross-section observation, and the cross-sectional shape of the partition wall was observed using a scanning electron microscope (manufactured by Keyence Corporation) to measure the taper angle.
테이퍼 각도의 평가는 아래와 같이 평가했다.The evaluation of the taper angle was evaluated as follows.
(평가)(evaluation)
◎: 테이퍼 각도가 51∼90°◎: taper angle is 51 to 90 °
○: 테이퍼 각도가 21∼50°○: taper angle is 21-50 °
×: 테이퍼 각도가 5∼20°×: taper angle is 5 to 20 °
(표면 주름의 평가)(Evaluation of surface wrinkles)
테이퍼 각도 평가용 샘플에 대해서, 형성한 화소 패턴의 표면을 광학 현미경으로 관찰하여 주름의 유무를 평가했다.For the taper angle evaluation sample, the surface of the formed pixel pattern was observed with an optical microscope to evaluate the presence or absence of wrinkles.
표면 주름의 평가는 아래와 같이 평가했다.Evaluation of surface wrinkles was evaluated as follows.
(평가)(evaluation)
○: 표면에 주름이 없다○: No wrinkles on the surface
△: 다음 공정에 영향을 미치지 않을 정도의 주름이 있다△: There are wrinkles that do not affect the next process.
×: 표면에 주름이 있다×: surface has wrinkles
[실시예 2∼17 및 비교예 1][Examples 2 to 17 and Comparative Example 1]
실시예 1과 마찬가지로, 실시예 2∼17 및 비교예 1에 대해서도 (A)∼(F)까지의 각 성분을 표 1에 기재된 비율로 배합하고 균일하게 혼합함으로써, 실시예 2∼17 및 비교예 1에 따른 격벽용 감광성 수지 조성물을 얻었다. 실시예 2∼17 및 비교예 1에 영향을 미치는 격벽용 감광성 수지 조성물의 각 평가는 실시예 1과 마찬가지로 행했다.Similarly to Example 1, Examples 2 to 17 and Comparative Examples 1 were also blended with the components from (A) to (F) at the ratios shown in Table 1, and uniformly mixed to obtain Examples 2 to 17 and Comparative Examples. The photosensitive resin composition for partition walls according to 1 was obtained. Each evaluation of the photosensitive resin composition for partition walls affecting Examples 2 to 17 and Comparative Example 1 was performed in the same manner as in Example 1.
실시예 1∼17 및 비교예 1의 평가 결과를 표 3 및 4에 나타낸다.The evaluation results of Examples 1 to 17 and Comparative Example 1 are shown in Tables 3 and 4.
표 3 및 표 4에 나타내는 평가 결과로부터, 불포화기 함유 감광성 수지(A)와 수지상 폴리머(B)를 병용함으로써, 경화 후의 화소 패턴에 표면에 주름이 생기지 않는 것을 확인할 수 있었다. 따라서, 수지상 폴리머(B)는 격벽용 감광성 수지 조성물이 경화했을 때의 수축차의 억제에 유효하다.From the evaluation results shown in Tables 3 and 4, it was confirmed that wrinkles were not formed on the surface of the pixel pattern after curing by using the unsaturated group-containing photosensitive resin (A) and the dendritic polymer (B) together. Therefore, the dendritic polymer (B) is effective in suppressing the shrinkage difference when the photosensitive resin composition for partition walls is cured.
또한, 불포화기 함유 감광성 수지(A)의 배합량과 수지상 폴리머(B)의 배합량을 조정함으로써, 2㎛와 같은 박막으로부터 10㎛와 같은 두꺼운 막까지 적용 가능한 격벽용 감광성 수지 조성물을 제공할 수 있다.In addition, by adjusting the compounding amount of the unsaturated group-containing photosensitive resin (A) and the blending amount of the dendritic polymer (B), it is possible to provide a photosensitive resin composition for partition walls that can be applied from a thin film such as 2 μm to a thick film such as 10 μm.
또한, 비스페놀형 에폭시 화합물로부터 유도되는 에폭시아크릴레이트 산부가물(예를 들면, (A)-1)을 불포화기 함유 감광성 수지로서 사용함으로써, 굵은선뿐만아니라 세선에 있어서도 양호한 패터닝성을 얻을 수 있는 것을 알았다.Further, by using an epoxy acrylate acid adduct derived from a bisphenol-type epoxy compound (for example, (A) -1) as an unsaturated group-containing photosensitive resin, good patterning property can be obtained not only in the thick line but also in the fine line. I knew that.
본 발명의 감광성 수지 조성물은 유기 EL 소자, 양자점 디스플레이, TFT 어레이 및 파장 변환 소자 등을 포함하는 컬러필터의 제조에 매우 유용하다. 또한, 두꺼운 막 격벽에 특화한 조성물이기도 하기 때문에, 미니 LED나 마이크로 LED의 격벽 등 강한 광원체의 혼색 방지재로서도 유용하다고 생각된다.The photosensitive resin composition of the present invention is very useful for the production of color filters including organic EL elements, quantum dot displays, TFT arrays and wavelength conversion elements. In addition, since it is also a composition specialized for thick film partition walls, it is considered to be useful as a color mixing preventing material for strong light source bodies such as mini LED and micro LED partition walls.
Claims (8)
(B) 2개 이상의 에틸렌성의 중합성 기를 말단에 갖는 수지상 폴리머와,
(C) 광중합 개시제를 포함하는 격벽용 감광성 수지 조성물.(A) a photosensitive resin containing an unsaturated group,
(B) a dendritic polymer having two or more ethylenically polymerizable groups at the ends,
(C) Photosensitive resin composition for partition walls containing photopolymerization initiator.
상기 (A) 성분은 일반식(1)으로 나타내어지는 비스페놀류로부터 유도되는 2개의 글리시딜에테르기를 갖는 에폭시 화합물과 (메타)아크릴산의 반응물을 다염기 카르복실산 또는 그 무수물과 더 반응시켜 얻어진 불포화기 함유 감광성 수지인 것을 특징으로 하는 격벽용 감광성 수지 조성물.
[식(1) 중, R1, R2, R3 및 R4는 각각 독립적으로 수소원자, 탄소수 1∼5개의 알킬기 또는 할로겐원자 중 어느 하나이고, X는 -CO-, -SO2-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -O-, 일반식(2)으로 나타내어지는 플루오렌-9,9-디일 기 또는 단결합을 나타내고, l은 0∼10의 정수이다]
In accordance with paragraph 1,
The component (A) is obtained by further reacting a reactant of an epoxy compound having two glycidyl ether groups derived from bisphenols represented by the general formula (1) with (meth) acrylic acid with a polybasic carboxylic acid or anhydride thereof. A photosensitive resin composition for bulkheads, characterized in that it is an unsaturated group-containing photosensitive resin.
[In formula (1), R 1 , R 2 , R 3 and R 4 are each independently a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X is -CO-, -SO 2- , -C (CF 3 ) 2- , -Si (CH 3 ) 2- , -CH 2- , -C (CH 3 ) 2- , -O-, fluorene-9,9 represented by the general formula (2) -Represents a diyl group or a single bond, and l is an integer from 0 to 10]
상기 (B) 성분은 일반식(3)으로 나타내어지는 다관능 (메타)아크릴레이트의 (메타)아크릴로일기 중의 탄소-탄소 이중결합의 일부에, 일반식(4)으로 나타내어지는 다가 메르캅토 화합물을 부가시켜 얻어지는 수지상 폴리머인 것을 특징으로 하는 격벽용 감광성 수지 조성물.
[식(3) 중, R5는 수소 또는 탄소수 1∼4개의 알킬기를 나타내고, R6은 다가 알코올 R7(OH)m의 m개의 히드록실기 중 n개의 히드록실기를 일반식(3) 중의 에스테르 결합에 공여한 나머지 부분을 나타내고, m은 2∼20의 정수를 나타내고, n은 2∼20의 정수를 나타내지만, m≥n이다]
[식(4) 중, R8은 단결합 또는 2∼6가의 탄소수 1∼6개의 탄화수소기 함유기이고, p는 R8이 단결합일 때에는 2이고, R8이 2∼6가의 기일 때에는 2∼6의 정수를 나타낸다]The method of claim 1 or 2,
The component (B) is a polyvalent mercapto compound represented by the general formula (4), to a part of the carbon-carbon double bond in the (meth) acryloyl group of the polyfunctional (meth) acrylate represented by the general formula (3) It is a dendritic polymer obtained by adding a photosensitive resin composition for a partition wall.
[In formula (3), R 5 represents hydrogen or an alkyl group having 1 to 4 carbon atoms, and R 6 represents n hydroxyl groups among m hydroxyl groups of the polyhydric alcohol R 7 (OH) m . Represents the rest of the donation to the ester bond in the m, m represents an integer from 2 to 20, n represents an integer from 2 to 20, but m≥n]
[Equation (4) of, R 8 is a single bond or a group containing 2 to 6-valent group having 1 to 6 carbon atoms of a hydrocarbon, p is unity when R 8 is unity 2, R 8 is 2 to 6 valent when 2 to date Represents an integer of 6]
상기 격벽용 감광성 수지 조성물은 (D) 성분으로서 발잉크제를 포함하는 것을 특징으로 하는 격벽용 감광성 수지 조성물.The method according to any one of claims 1 to 3,
The photosensitive resin composition for bulkheads comprises a ink repellent as a component (D), the photosensitive resin composition for bulkheads.
상기 격벽용 감광성 수지 조성물은 (E) 성분으로서 흑색 안료, 혼색 유기 안료 및 백색 안료로부터 선택된 적어도 1종의 착색제를 포함하는 것을 특징으로 하는 격벽용 감광성 수지 조성물.The method according to any one of claims 1 to 4,
The photosensitive resin composition for bulkheads comprises at least one colorant selected from black pigments, mixed organic pigments, and white pigments as component (E), and the photosensitive resin composition for bulkheads.
상기 도막을 자외선 노광 장치로 노광하는 공정과,
상기 도막을 알칼리 수용액으로 현상하고 열소성하는 공정을 갖는 격벽의 제조 방법으로서,
상기 격벽의 광학 농도(OD)는 0.2∼4.0/㎛인 것을 특징으로 하는 격벽의 제조 방법.(E) The step of forming a coating film by applying the photosensitive resin composition for partitions according to any one of claims 1 to 4, wherein the component is a black pigment or a mixed organic pigment on a substrate, and drying the coating film.
A step of exposing the coating film with an ultraviolet exposure apparatus,
A method for producing a barrier rib having a step of developing and thermally firing the coating film with an aqueous alkali solution,
The method of manufacturing a partition wall, characterized in that the optical density (OD) of the partition wall is 0.2 to 4.0 / ㎛.
상기 도막을 자외선 노광 장치로 노광하는 공정과,
상기 도막을 알칼리 수용액으로 현상하고 열소성하는 공정을 갖는 격벽의 제조 방법으로서,
상기 격벽의 광학 농도(OD)는 0.1∼0.3/㎛인 것을 특징으로 하는 격벽의 제조 방법.(E) The step of applying a photosensitive resin composition for a barrier rib according to any one of claims 1 to 4, wherein the component is a white pigment, onto a substrate to form a coating film, and drying the coating film.
A step of exposing the coating film with an ultraviolet exposure apparatus,
A method for producing a barrier rib having a step of developing and thermally firing the coating film with an aqueous alkali solution,
The method of manufacturing a partition wall, characterized in that the optical density (OD) of the partition wall is 0.1 to 0.3 / ㎛.
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