KR20200048984A - Hybrid plasma generator - Google Patents

Abstract

The present invention relates to a hybrid plasma generator capable of generating large-capacity radicals such as an ozone gas, a cleaning gas, or a process gas. The hybrid plasma generator may comprise: a reaction body including first and second panels so that capacitively coupled plasma (CCP) may be generated in the reaction body; and a magnetic core coupled to the reaction body so that transformer coupled plasma (TCP) may be generated in the reaction body using primary winding.

Description

Hybrid plasma generator

The present invention relates to a hybrid plasma generating device, and more particularly, to a hybrid plasma generating device capable of generating large-capacity radicals such as ozone gas, cleaning gas, and process gas.

Plasma discharge is used for gas excitation to generate an active gas containing ions, free radicals, atoms, and molecules. The active gas is widely used in various fields, and is typically used in various ways, such as etching, deposition, cleaning, and ashing of semiconductor manufacturing processes.

In recent years, wafers or LCD glass substrates for the manufacture of semiconductor devices are becoming larger. Accordingly, there is a need for a plasma source having a high control ability for plasma ion energy and easy scalability with a large area processing ability.

The use of remote plasma in semiconductor manufacturing processes using plasma is known to be very useful. For example, it is useful in cleaning process chambers or ashing processes for photoresist strips. However, the volume of the process chamber is also increased with the increase in the size of the substrate to be processed, and a plasma source capable of sufficiently supplying a high-density active gas remotely is required.

On the other hand, the remote plasma reactor (or remote plasma generator) uses a transformer coupled plasma source and an inductively coupled plasma source and a capacitively coupled plasma source. There is one.

Among them, a remote plasma reactor using a transformer-coupled plasma source has a structure in which a magnetic core having a primary winding coil is mounted on a reactor body of a toroidal structure.

In addition, a remote plasma reactor using a capacitively coupled plasma source has a structure in which two panels for generating a potential value are mounted.

In the case of a remote plasma reactor having a transformer-coupled plasma source, it is difficult to maintain plasma ignition or ignited plasma in a low pressure atmosphere because it operates in a relatively high pressure atmosphere due to its characteristics. In addition, in the case of a remote plasma reactor having an inductively coupled plasma source and a capacitively coupled plasma plasma source, it is possible to operate in a relatively low pressure atmosphere due to its characteristics, but in order to operate in a high pressure atmosphere, the supply power must be increased, and in this case, the inside of the reactor body is an arc. It may be damaged by ion bombardment.

Recently, a remote plasma reactor that efficiently operates at low or high pressure is required according to various demands of a semiconductor manufacturing process, but a conventional remote plasma reactor employing either a transformer-coupled plasma source or an inductively-coupled plasma source can respond appropriately. There was not.

Conventionally, in order to respond to this demand, as described in Korean Patent Registration No. 10-1364578, a hybrid plasma reactor in which a transformer coupled plasma source and an inductively coupled plasma source are combined has been developed.

However, such a conventional hybrid plasma reactor is to separately form a second plasma chamber connected to an annular first plasma chamber (reaction body) space to apply a hybrid source, and energy efficiency is not high because a region of the reaction body cannot be used. There was a problem in that cooling was not smooth because thermal energy was concentrated in the second plasma chamber structurally.

On the other hand, among conventional ozone generators, an ozone generator using plasma is a device for ozoneizing oxygen by exposing oxygen to a plasma environment, and mainly generates ozone using a capacitively coupled plasma.

However, these ozone generators also have problems in that ozone generation performance is poor because they cannot operate efficiently at low pressure or high pressure.

The idea of the present invention is to solve these problems, it is possible to generate a combination of a transformer-coupled plasma and a capacitively coupled plasma, can be operated in a wide range of operation, and easily generates and maintains plasma ignition even in a low-pressure region Disclosed is a hybrid plasma generator capable of generating a large-capacity plasma without damaging the reactor even in a high-pressure region, and being applied to an ozone generator to generate large-capacity ozone with high efficiency. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

A hybrid plasma generating apparatus according to the spirit of the present invention for solving the above problems includes a reaction body including a first panel and a second panel so that a capacitively coupled plasma (CCP) can be generated therein; And a magnetic core coupled to the reaction body to generate a transformer coupled plasma (TCP) inside the reaction body using a primary winding.

In addition, according to the present invention, the reaction body includes: at least one first panel in which a first through portion is formed; At least one second panel formed with a second through portion and spaced apart from the first panel at a constant distance; And an inlet port is formed on one side, an outlet port is formed on the other side, and an edge portion of the first panel and an edge portion of the second panel are formed so that a plasma generation space is formed between the first panel and the second panel. It may include; at least one insulating wall portion installed on.

In addition, according to the present invention, the first panel and the second panel may be filled with an insulating portion in an opening formed on one side to form a C-shape as a whole.

In addition, the hybrid plasma generating apparatus according to the present invention, the inlet pipe is installed in the inlet of the insulating wall portion; And a discharge pipe installed at the outlet of the insulating wall portion.

Further, according to the present invention, protrusions or protrusions may be formed on the opposite surfaces of the first panel and the second panel, which are disposed to be offset from each other.

Further, according to the present invention, the first panel is installed in a shape in which a plurality of layers are spaced apart from each other, and the second panel is installed in a shape in which a plurality of layers are stacked between the first panels, and the first panel Connection circuits may be formed so that the first panel and the second panel are electrically connected to each other, and the second panels or the second panel and the first panel are electrically connected to each other.

Further, according to the present invention, the magnetic core passes through the first through portion of the first panel and the second through portion of the second panel, and is wound around a portion of the first panel and the second panel. At least one first core; And at least one second core passing through the first through portion of the first panel and the second through portion of the second panel, and wound around the other portions of the first panel and the second panel. Can be.

Further, according to the present invention, a plurality of the first cores are disposed on a portion of the first panel and the second panel, and a plurality of the second cores are disposed on other portions of the first panel and the second panel. Can be.

Further, according to the present invention, the first core may be wound in a shape surrounding a portion of the plurality of first panels and a portion of the plurality of second panels.

Further, according to the present invention, gas introduced through the inlet pipe is branched to a plurality of the inlets, and the gas discharged through the plurality of outlets can be combined and discharged through the outlet pipe.

In addition, the hybrid plasma generating apparatus according to the present invention, a first power supply for applying power to the reaction body; And a second power source that applies power to the primary winding of the magnetic core.

In addition, according to the present invention, the reaction body may be for generating ozone in which oxygen is introduced into the inlet and ozone is discharged through the outlet.

According to some embodiments of the present invention made as described above, a transformer-coupled plasma and a capacitively-coupled plasma that can be easily expanded with a large-area processing capability can be generated in a complex manner, and a wide range of operations from a low pressure region to a high pressure region It can be operated as an area, and it can easily generate and maintain plasma ignition even in a low-pressure area, and can generate a large-capacity plasma without damaging the reactor even in a high-pressure area, and can be applied to an ozone generator to generate large-capacity ozone with high efficiency. It has an effect. Of course, the scope of the present invention is not limited by these effects.

1 is an external perspective view showing a hybrid plasma generating device according to some embodiments of the present invention.
2 is an exploded perspective view of a component of the hybrid plasma generator of FIG. 1.
3 is a cross-sectional view of the hybrid plasma generator of FIG. 1.
4 is a longitudinal sectional view showing an example of the hybrid plasma generator of FIG. 1.
5 is a longitudinal sectional view showing another example of the hybrid plasma generator of FIG. 1.
6 is a longitudinal sectional view showing still another example of the hybrid plasma generator of FIG. 1.
7 is a longitudinal sectional view showing still another example of the hybrid plasma generator of FIG. 1.
8 is an exploded perspective view of a component showing a hybrid plasma generator according to some other embodiments of the present invention.
9 is a longitudinal sectional view showing still another example of the hybrid plasma generator of FIG. 1.
10 is an exploded perspective view of a part showing a hybrid plasma generating device according to some other embodiments of the present invention.
11 is an exploded perspective view showing a part of a hybrid plasma generating apparatus according to some other embodiments of the present invention.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully describe the present invention to those skilled in the art, and the following embodiments may be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the Examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to fully convey the spirit of the present invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity of explanation.

The terms used in this specification are used to describe specific embodiments, and are not intended to limit the present invention. As used herein, singular forms may include plural forms unless the context clearly indicates otherwise. Also, as used herein, “comprise” and / or “comprising” specifies the shapes, numbers, steps, actions, elements, elements and / or the presence of these groups. And does not exclude the presence or addition of one or more other shapes, numbers, actions, elements, elements and / or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, for example, depending on the manufacturing technology and / or tolerance, deformations of the illustrated shape can be expected. Therefore, embodiments of the inventive concept should not be interpreted as being limited to a specific shape of the region shown in this specification, but should include, for example, a change in shape resulting from manufacturing.

Hereinafter, a hybrid plasma generating apparatus 100, 200, 300 according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 is an external perspective view showing a hybrid plasma generating apparatus 100 according to some embodiments of the present invention, FIG. 2 is an exploded perspective view of a component of the hybrid plasma generating apparatus 100 of FIG. 1, and FIG. 3 is a perspective view of FIG. 1. 4 is a cross-sectional view of the hybrid plasma generator 100, and FIG. 4 is a longitudinal sectional view showing an example of the hybrid plasma generator 100 of FIG.

First, as illustrated in FIGS. 1 to 4, the hybrid plasma generating apparatus 100 according to some embodiments of the present invention may largely include a reaction body 10 and a magnetic core 20.

For example, as shown in FIGS. 1 to 4, the reaction body 10 includes a first panel 11 and a second panel 12 so that a capacitively coupled plasma (CCP) can be generated therein. ).

More specifically, for example, as illustrated in FIGS. 1 to 4, the reaction body 10 includes at least one of the first panel 11 and the second panel 11 through which the first through portion W1 is formed. A through portion (W2) is formed, at least one second panel (12) and an inlet (13a) is formed on one side, which is installed to be spaced apart from the first panel (11), and the outlet (13b) on the other side ) Is formed, so that a plasma generating space (A) is formed between the first panel 11 and the second panel 12, the edge portion of the first panel 11 and the second panel 12 ) May include at least one insulating wall portion 13 installed between the edge portions.

Here, the hybrid plasma generating apparatus 100 according to some embodiments of the present invention may further include a first power source E1 that applies electric power to the reaction body 10.

The first power source E1 may generate a capacitively coupled plasma (CCP) in the plasma generation space A between the first panel 11 and the second panel 12. It may be a power supply device capable of generating high-frequency power such as RF power or microwaves that create a potential difference.

Accordingly, the amount of charge Q between the first panel 11 and the second panel 12 may be expressed as a product of the electrostatic capacity C and the potential difference V, and thereby the first panel 11 A capacitively coupled plasma may be generated by an electromagnetic field between and the second panel 12.

At this time, the first panel 11 and the second panel 12 may be replaced by a plate shape parallel to each other by the above-described insulating wall portion 13, whereby the plasma density is uniform over all regions. Can be formed.

In addition, for example, the first panel 11 and the second panel 12 have an insulating portion 16 on an opening formed on one side to form a C-shape as a whole so that high-frequency power can be uniformly flowed through a constant pass. Can be charged.

Therefore, for example, when power is applied to a large area, it is possible to prevent a power concentration phenomenon that is concentrated on only one portion and realize a uniform plasma density as a whole.

In addition, as shown in Figures 1 and 3, the hybrid plasma generating apparatus 100 according to some embodiments of the present invention, the inlet pipe 14 is installed in the inlet 13a of the insulating wall 13 And an outlet pipe 15 installed in the outlet 13b of the insulating wall portion 13.

The inlet pipe 14 and the outlet pipe 15 may be made of an insulating material or coated with an insulating material so as not to affect the electromagnetic field when the above-mentioned high frequency power is applied.

At the same time, for example, as shown in FIGS. 1 to 4, the reaction body 10 may use a remote plasma generator (RPG) of a toroidal type, that is, a transformer-coupled type, It can be made in the form of a hollow tube as a whole so that a plasma generation space can be formed therein.

More specifically, for example, as shown in Figures 1 to 4, the reaction body 10 is hollow, branched so that the annular plasma discharge loops are formed on the left and right or on the upper and lower sides, respectively. Organs can form.

In addition, for example, as shown in FIG. 1, the reaction body 10 is formed in a first part (upper part) formed in a part of the reaction body 10 and the other part of the reaction body 10. , A second part (lower part) formed to correspond to the first part so that an ignition electromotive force is formed.

Here, the reason for forming the reaction body 10 in the above-described first part and the second part, that is, two pieces, plasma discharge between the first part and the second part of the reaction body 10 It can be to ignite and form an ignition electromotive force or a maintenance electromotive force to maintain it.

That is, the first portion may be an upper branch pipe formed on the upper portion of the reaction body 10, and the second portion may be a lower lamination pipe formed on the lower portion of the reaction body 10. Although not shown, a separate insulating member or a sealing member may be installed between the upper branch pipe and the lower branch pipe.

Accordingly, process gas or cleaning gas may be introduced into the reaction body 10 through the inlet of the first portion, and plasma ionized inside the reaction body 10 to be discharged through the outlet of the second portion. .

That is, the reaction body 10 of the hybrid plasma generating apparatus 100 of the present invention may be used for ozone generation, in which oxygen is introduced into the inlet 13a and ozone is discharged through the outlet 13b. However, the present invention is not necessarily limited thereto, and may be used for cleaning the process chamber, or may be used for supplying the process gas.

In addition, the hybrid plasma generator 100 of the present invention is capable of generating various radicals, and is not necessarily limited thereto.

On the other hand, for example, as shown in Figures 1 to 4, the magnetic core 20, a transformer coupled plasma (TCP: Transformer Coupled Plasma) inside the reaction body 10 using the primary winding 23 It can be coupled to the reaction body 10 so that it can be generated to form an induced electromotive force for generating a transformer-coupled plasma that can be combined with the above-described capacitively coupled plasma.

More specifically, for example, as illustrated in FIGS. 1 to 3, the magnetic core 20 may include the first through portion W1 and the second panel 12 of the first panel 11. At least one first core 21 and the first panel 11 wound through a portion of the first panel 11 and the second panel 12, passing through the second through portion W2 of the Penetrates the first through portion W1 and the second through portion W2 of the second panel 12, and is wound around the other portions of the first panel 11 and the second panel 12 It may include at least one second core (22).

Here, the hybrid plasma generating apparatus 100 according to some embodiments of the present invention may further include a second power source E2 that applies power to the magnetic core 20.

The second power source (E2) is an RF power or microwave that generates an induced electromotive force so that a transformer coupled plasma (TCP) can be generated in the plasma generation space (A) of the reaction body (10). It may be a power supply that can generate high-frequency power, such as.

Therefore, when describing the operation process of the hybrid plasma generating apparatus 100 according to some embodiments of the present invention, as described above, the first panel 11 and the second panel of the reaction body 10 ( 12) At the same time, a capacitively coupled plasma is generated, and an induced electromotive force is formed in the magnetic core 20 by the primary winding 21, thereby generating an annular plasma discharge loop in the reaction body 10, thereby Therefore, two types of plasma may be generated inside the reaction body 10 in a merged form. Here, a separate oxygen gas or other cleaning gas or reaction gas may be supplied into the reaction body 10.

That is, when oxygen gas is supplied to the reaction body 10, high-density ozone gas can be generated with high efficiency due to the hybrid plasma, and when the cleaning gas or process gas is supplied to the reaction body 10, When plasma energy is applied, the plasma is excited to be supplied to various process chambers.

For example, the process chamber may be a wafer or a glass substrate, such as a substrate W, and may be, for example, an ashing chamber for removing photoresist, and CVD configured to deposit an insulating film. It may be a (Chemical Vapor Deposition) chamber, or an etch chamber configured to etch apertures or openings in an insulating film to form interconnect structures. Or it may be a PVD chamber configured to deposit a barrier film, or a PVD chamber configured to deposit a metal film.

Therefore, a transformer-coupled plasma and a capacitively-coupled plasma that can be easily expanded with a large-area processing capability can be generated in a complex manner, and can be operated in a wide range of operation from a low pressure region to a high pressure region, and easily ignite plasma even in a low pressure region. Can generate and maintain, and generate a large-capacity plasma without damaging the reactor even in a high-pressure region, and can be applied to an ozone generator to generate large-capacity ozone with high efficiency.

5 is a longitudinal sectional view showing another example of the hybrid plasma generator of FIG. 1, FIG. 6 is a longitudinal sectional view showing another example of the hybrid plasma generator of FIG. 1, and FIG. 7 is a hybrid plasma generator of FIG. It is a longitudinal cross-sectional view showing another example.

5 to 7, the protrusions T of FIG. 6 or the protruding plates of FIGS. 5 and 7 disposed to be offset from each other on opposite surfaces of the first panel 11 and the second panel 12 (P) may be formed.

Therefore, it is possible to further improve the plasma density by increasing the surface area of the first panel 11 and the second panel 12, and it is possible to generate a large capacity of various radicals such as ozone gas, cleaning gas and process gas.

8 is an exploded perspective view of a component showing a hybrid plasma generator 200 according to some other embodiments of the present invention.

7 and 8, the hybrid plasma generating apparatus 200 according to some other embodiments of the present invention, the first panel 11 is installed in a shape in which a plurality of them are stacked apart from each other, The second panel 12 is installed in a shape in which a plurality of layers are spaced apart from each other between the first panels 11, the first panels 11 are electrically connected to each other, and the second panel ( Each of the connection circuits C may be formed so that 12) can be electrically connected to each other.

For example, as shown in FIGS. 7 and 8, the first panel 11 is composed of a 1-1 panel 11-1 and a 1-2 panel 11-2, and the second panel (12) is composed of a 2-1 panel (12-1) and a 2-2 panel (12-2), the connection circuit (C), the 1-1 panel (11-1) and the A first connection circuit (C1) for electrically connecting the 1-2 panels (11-2) and the 2-1 panel (12-1) and the 2-2 panel (12-2) are electrically connected. It may include a second connection circuit (C2).

Accordingly, a first plasma generation space is formed between the 1-1 panel 11-1 and the 2-1 panel 12-1, and the 2-1 panel 12-1 and the first A second plasma generating space is formed between the 1-2 panels 11-2, and a third plasma generating space is formed between the 1-2 panels 11-2 and the 2-2 panels 12-2. It can be formed.

That is, as shown in Figure 8, the gas introduced through the inlet pipe 14 is branched into a plurality (three in the drawing) of the inlet 13a, a plurality (three in the drawing) of the outlet The gas discharged through (13b) may be combined and discharged through the discharge pipe (15).

In addition, for example, in this case, as shown in FIG. 7, the first core 21 includes a plurality of the first panels 11, that is, the first-1 panel 11-1 and the first A portion of the 1-2 panel 11-2 and a plurality of the second panels 12, that is, a portion of the 2-1 panel 12-1 and the 2-2 panel 12-2. It can be wound in a wrapping shape.

9 is a longitudinal cross-sectional view illustrating another example of the hybrid plasma generator of FIG. 1, and FIG. 10 is an exploded perspective view of a component of the hybrid plasma generator 300 according to some other embodiments of the present invention.

For example, as illustrated in FIGS. 9 and 10, the first panel 11 is composed of a 1-1 panel 11-1 and a 1-2 panel 11-2, and the second panel (12) is another connection method when the 2-1 panel (12-1) and the 2-2 panel (12-2) are made, and the connection circuit (C) is the 1-1 panel ( 11-1) and a third connection circuit (C3) connecting the 2-1 panel (12-1), the 2-1 panel (12-1) and the 1-2 panel (11-2) And a fourth connection circuit (C4) for electrically connecting and a fifth connection circuit (C5) for electrically connecting the first and second panels (11-2) and the second and second panels (12-2). Can be.

Accordingly, by using the third connection circuit C3, the fourth connection circuit C4, and the fifth connection circuit C5, a kind of swirling coil current is formed to form a plasma generation space. It is also possible. However, these connection circuits are not limited to the drawings and can be formed in a wide variety of ways.

However, it is not necessarily limited to this, and the connection circuit may be omitted.

11 is an exploded perspective view showing a part of a hybrid plasma generator 400 according to some other embodiments of the present invention.

As shown in FIG. 11, a plurality of first cores 21 are formed on the left side of the first panel 11 and the second panel 12, that is, the annular reaction body 10 (in the drawing). 3) may be disposed at an isometric angle, and the second core 22 may be disposed on the right side of the other portions of the first panel 11 and the second panel 12, that is, the annular reaction body 10. A plurality (three in the drawing) may be disposed at an isometric angle.

Therefore, according to the technical idea of the present invention, as described above, it is possible to easily increase the strength and strength of the capacitively coupled plasma by increasing the number of stacked panels, while simultaneously increasing the strength and intensity of the transformer coupled plasma by increasing the number of magnetic cores. It can also be easily increased, and the hybrid merging of these plasmas can generate large-scale radicals.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

10: reaction body
11: 1st panel
11-1: 1-1 panel
11-2: Panel 1-2
12: second panel
12-1: 2-1 panel
12-2: 2-2 panel
13: Insulation wall
13a: inlet
13b: outlet
A: plasma generation space
14: inlet pipe
15: discharge pipe
16: Insulation
T: Turn
P: protrusion plate
20: magnetic core
21: first core
22: Second core
W1: first penetration
W2: second penetration
C: Connection circuit
C1: first connection circuit
C2: 2nd connection circuit
C3: 3rd connection circuit
C4: 4th connection circuit
C5: 5th connection circuit
E1: first power
E2: Second power
100, 200, 300, 400: hybrid plasma generator

Claims (12)

A reaction body including a first panel and a second panel so that a capacitively coupled plasma (CCP) can be generated therein; And
A magnetic core coupled to the reaction body to generate a transformer coupled plasma (TCP) inside the reaction body using a primary winding;
A hybrid plasma generating device comprising a. According to claim 1,
The reaction body,
At least one first panel on which a first through portion is formed;
At least one second panel formed with a second through portion and spaced apart from the first panel at a constant distance; And
An inlet port is formed on one side, an outlet port is formed on the other side, and an edge portion of the first panel and an edge portion of the second panel are formed so that a plasma generation space is formed between the first panel and the second panel. At least one insulating wall portion to be installed;
A hybrid plasma generating device comprising a. According to claim 2,
The first panel and the second panel is a hybrid plasma generator, the insulating portion is filled in the opening formed on one side to form a C-shape as a whole. According to claim 2,
An inlet pipe installed at the inlet of the insulating wall portion; And
A discharge pipe installed at the outlet of the insulating wall portion;
Further comprising, a hybrid plasma generating device. According to claim 2,
A hybrid plasma generating device in which projections or protrusions disposed on the opposite surfaces of the first panel and the second panel are disposed to be offset from each other. According to claim 2,
The first panel is installed in a shape in which a plurality of layers are spaced apart from each other, and the second panel is installed in a shape in which a plurality of layers are stacked between the first panels,
A connection circuit is formed so that the first panels or the first panel and the second panel are electrically connected to each other, and the second panels or the second panel and the first panels are electrically connected to each other. , Hybrid plasma generator. According to claim 2,
The magnetic core,
At least one first core passing through the first through portion of the first panel and the second through portion of the second panel, and wound around a portion of the first panel and the second panel; And
At least one second core passing through the first through portion of the first panel and the second through portion of the second panel, and wound around the other portions of the first panel and the second panel;
A hybrid plasma generating device comprising a. The method of claim 7,
A hybrid plasma generating apparatus in which a plurality of the first cores are disposed on a portion of the first panel and the second panel, and a plurality of the second cores are disposed on other portions of the first panel and the second panel. The method of claim 7,
The first core, the hybrid plasma generating apparatus is wound in a shape surrounding a portion of the plurality of the first panel and a portion of the plurality of the second panel. The method of claim 9,
A hybrid plasma generating apparatus in which gas introduced through the inlet pipe is branched into a plurality of the inlets, and the gas discharged through the plurality of outlets is combined and discharged through the outlet pipe. According to claim 1,
A first power source for applying electric power to the reaction body; And
A second power source that applies electric power to the primary winding of the magnetic core;
Further comprising, a hybrid plasma generating device. According to claim 1,
The reaction body is a hybrid plasma generator for ozone generation, in which oxygen is introduced into the inlet and ozone is discharged through the outlet.

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