KR20200044556A - Digital x-ray detector and x-ray image system including the same - Google Patents

Abstract

The present invention is to provide a digital X-ray detecting apparatus capable of providing X-ray images displaying various target objects having different densities, and an X-ray image system including the same. The digital X-ray detecting apparatus according to one embodiment of the present invention comprises: a first detection panel outputting a first detection signal corresponding to X-rays of a first energy band; a second detection panel for outputting a second detection signal corresponding to X-rays of a second energy band different from the first energy band; and a metal plate disposed between the first and second detection panels.

Description

DIGITAL X-RAY DETECTOR AND X-RAY IMAGE SYSTEM INCLUDING THE SAME

The present invention relates to a digital X-ray detector (DXD) for detecting the amount of X-ray (radiation) transmission and an X-ray imaging system including the same.

X-ray (radiation) is an electromagnetic wave having transparency. The transmission amount of the X-rays corresponds to the density inside the object. Accordingly, X-ray images are widely used in fields such as medical, security, and industry. In particular, X-ray imaging is frequently used as a basic diagnostic tool in the medical field.

Existing X-ray images were provided as a process of preparing a film made of a photosensitive material, exposing the film to X-rays passing through the object, and then transferring the image of the film to the photo paper. In this case, there is a problem that it is impossible to provide image information in real time due to the printing process, and there is a problem that image information is easily lost due to long-term storage and preservation of the film.

Recently, due to the development of image processing technology and semiconductor technology, a digital panel X-ray detection device having a flat panel structure capable of replacing a film has been proposed.

A general digital X-ray detection apparatus generates a detection signal of each detection pixel area corresponding to the amount of X-ray transmission by using a light detection element that generates electrons corresponding to the amount of light, and converts the detection signal of each detection pixel area into an image signal, Provide X-ray images.

On the other hand, the X-ray image displays the density inside the target object by using the transmittance of X-rays different depending on the hardness (or density) of the target object. However, when the irradiation intensity of the X-ray for generating the X-ray image does not correspond to the target object, there is a problem that the identification of the X-ray image is lowered. That is, since the X-ray image displays the difference in density for each region, it is necessary to set the irradiation intensity of the X-ray so that the difference in density between the target object and the surroundings can be identified as the amount of X-ray transmission.

Therefore, in the case of a general digital X-ray detection apparatus, if the irradiation intensity of X-rays is set, it is difficult to provide X-ray images displaying various target objects having different densities.

The present invention is to provide a digital X-ray detection apparatus capable of providing X-ray images displaying various target objects having different densities, and an X-ray imaging system including the same.

The objects of the present invention are not limited to the objects mentioned above, and other objects and advantages of the present invention not mentioned can be understood by the following description, and will be more clearly understood by the embodiments of the present invention. In addition, it will be readily appreciated that the objects and advantages of the present invention can be realized by means of the appended claims and combinations thereof.

An example of the present invention is a first detection panel for outputting a first detection signal corresponding to X-rays of a first energy band, disposed under the first detection panel, and applied to X-rays of a second energy band different from the first energy band. It provides a digital X-ray detection apparatus including a second detection panel for outputting a corresponding second detection signal, and a metal plate disposed between the first and second detection panels.

The digital X-ray detection device further includes a panel driver disposed under the second detection panel and connected to the first and second detection panels.

The panel driver generates a first band image signal based on the first detection signal, a second band image signal based on the second detection signal, and combines the first and second band image signals. Generates an X-ray image signal.

The first detection panel includes a first substrate disposed on the metal plate, a first element array disposed on the first substrate and including a plurality of first photosensitive elements, and a first scintilla disposed on the first element array. A second element array including a radar, the second detection panel disposed under the metal plate, and a second element array including a plurality of second photosensitive elements disposed under the second substrate, and the second element And a second scintillator disposed under the array, wherein the first substrate and the second substrate face each other with the metal plate interposed therebetween.

The first scintillator outputs visible light to the first device array in response to X-rays of the first energy band, and the second scintillator responds to X-rays of the second energy band to transmit visible light to the second. Output to device array.

Each of the first and second scintillator has a columnar structure, and the diameter of the columnar structure of the first scintillator is smaller than the diameter of the columnar structure of the second scintillator.

The thickness of the first scintillator is smaller than the thickness of the second scintillator.

The digital X-ray detection apparatus may further include a reflector disposed under the second scintillator of the second detection panel.

The metal plate is made of a material containing at least one of tungsten, aluminum and cooper.

Another example of the present invention is to face the digital X-ray detection device with the digital X-ray detection device and a predetermined target object therebetween, and to irradiate the target object with X-rays including the first and second energy bands. An x-ray imaging system including a light source device is provided.

The digital X-ray detection apparatus according to an embodiment of the present invention includes a first detection panel that outputs a first detection signal corresponding to X-rays of a first energy band, and a second X-ray of a second energy band higher than the first energy. It includes a second detection panel for outputting a second detection signal, and a metal plate disposed between the first and second detection panels.

Here, the second detection panel is disposed below the first detection panel. Accordingly, when irradiating X-rays including the first and second energy bands, the first detection panel absorbs the X-rays of the first energy band having higher intensity than the X-rays of the second energy band to detect the first. Output a signal. Since the intensity of the X-rays of the first energy band is lowered by the metal plate between the first detection panel and the first and second detection panels, after the X-rays penetrate the first detection panel and the metal plate, the second energy band The intensity is higher than that of the first energy band. Accordingly, the second detection panel may absorb X-rays of the second energy band and output a second detection signal.

Therefore, since the first detection panel may generate a first detection signal corresponding to X-rays of the first energy band having a relatively high intensity, a first band image signal displaying a relatively high-density target object such as bone may be generated. Can be obtained. In addition, since the second detection panel may generate a second detection signal corresponding to X-rays of the second energy band having a strength lower than that of the first energy band, relatively, such as soft tissue and organs, can be generated. A second band image signal indicating a low density target object may be obtained. Accordingly, an X-ray image signal that simultaneously displays a high-density target object and a low-density target object through subtraction of the first and second band image signals may be provided. Therefore, since the target object does not need to be exposed to X-ray irradiation several times, there is an advantage that the exposure amount of the target object can be reduced, and an X-ray image signal is provided by displaying the high-density target object and the low-density target object together. There is an advantage that the usefulness of the image can be improved.

The metal plate not only supports the first and second detection panels, but also partially blocks X-rays in the first energy band, thereby protecting the second detection panel and the second detection signal therefrom from X-rays in the first energy band. In addition, since X-rays of the first and second energy bands are absorbed or blocked by the first detection panel, the metal plate, and the second detection panel, damage to the panel driver disposed under the second detection panel may be minimized by X-rays. have.

In addition, as the first and second detection panels are connected to one panel driving unit, the advantage that reliability for the synchronization of the first and second detection signals by the first and second detection panels can be improved, and the manufacturing cost There is an advantage that can be reduced.

1 is a view showing an X-ray imaging system according to an embodiment of the present invention.
2 is a view showing a digital X-ray detection apparatus according to an embodiment of the present invention.
FIG. 3 is a view showing an example of a first device array and a panel driver of the first detection panel of FIG. 2.
FIG. 4 is a view showing region I of FIG. 2.
5 is a view showing area II of FIG. 4.
6 is a view showing an example of the intensity of X-rays incident on the first detection panel and the intensity of X-rays incident on the second detection panel.
FIG. 7 is a diagram illustrating an example of X-rays of first and second energy bands sensed by the first and second detection panels of FIG. 2.
8 is a view showing an example of a first band image signal corresponding to a first detection signal by the first detection panel.
9 is a view showing an example of a second band image signal corresponding to the second detection signal by the second detection panel.
10 is a view showing a digital X-ray detection apparatus according to another embodiment of the present invention.
11 is a view showing a method of manufacturing a digital X-ray detection apparatus according to an embodiment of the present invention.

The above-described objects, features, and advantages will be described in detail below with reference to the accompanying drawings, and accordingly, a person skilled in the art to which the present invention pertains can easily implement the technical spirit of the present invention. In describing the present invention, when it is determined that the detailed description of the known technology related to the present invention may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to indicate the same or similar components.

Hereinafter, an X-ray imaging apparatus and a driving method according to each embodiment of the present invention will be described in detail with reference to the accompanying drawings.

First, referring to FIGS. 1 to 9, an X-ray imaging system and a digital X-ray detection apparatus provided therein according to an embodiment of the present invention will be described.

1 is a view showing an X-ray imaging system according to an embodiment of the present invention.

2 is a view showing a digital X-ray detection apparatus according to an embodiment of the present invention. FIG. 3 is a view showing an example of a first device array and a panel driver of the first detection panel of FIG. 2. FIG. 4 is a view showing region I of FIG. 2. 5 is a view showing area II of FIG. 4.

6 is a view showing an example of the intensity of X-rays incident on the first detection panel and the intensity of X-rays incident on the second detection panel. FIG. 7 is a diagram illustrating an example of X-rays of first and second energy bands sensed by the first and second detection panels of FIG. 2. 8 is a view showing an example of a first band image signal corresponding to a first detection signal by the first detection panel. 9 is a view showing an example of a second band image signal corresponding to the second detection signal by the second detection panel.

As shown in FIG. 1, the X-ray imaging apparatus 10 according to an embodiment of the present invention includes a digital X-ray detection apparatus 100 that detects an amount of X-ray transmission, and a digital X-ray with a predetermined target object 20 therebetween. It includes a light source device 200 facing the detection device 100, and a main controller 300 for controlling the digital X-ray detection device 100 and the light source device 200.

The X-ray imaging system is to provide an X-ray image representing the inside of the target object 20 through the amount of X-rays transmitted to the target object 20. Here, the target object 20 may be a part of the body of the test target. Alternatively, although not shown in FIG. 1, the target object 20 may be an output of an industrial process.

The main controller 300 is to provide a user interface for X-ray imaging. For example, the main controller 300 has a function of displaying an X-ray image signal by the digital X-ray imaging apparatus 100 to a user, a function of holding a pre-recorded X-ray image signal, and a light source device 200 based on a user's input. It may include a function for controlling the intensity of irradiation of the X-ray by, and a function for setting the sensitivity of the digital X-ray detection apparatus 100.

The light source device 200 irradiates the target object 20 with X-rays including the first and second energy bands based on the control signal of the main controller 300.

The digital X-ray detection apparatus 100 includes a flat panel type detection panel and a panel driving unit for driving the detection panel. The detection panel defines a plurality of pixel regions in the detection region for detecting the amount of X-ray transmission, and detects the amount of X-ray incident on each pixel region, thereby generating a detection signal.

According to an embodiment of the present invention, the digital X-ray detection apparatus 100 includes first and second detection panels that face each other with a metal plate interposed therebetween.

As shown in FIG. 2, the digital X-ray detection apparatus 100 according to an embodiment of the present invention includes a first detection panel 110 and a second detection panel 120 disposed under the first detection panel 110. , And a metal plate 130 disposed between the first and second detection panels 110 and 120.

In addition, the digital X-ray detection apparatus 100 further includes a panel driver 140 disposed under the second detection panel 120.

The first detection panel 110 includes a first substrate 111 disposed on a metal plate 130, a first device array 112 disposed on the first substrate 111 and including a plurality of first photosensitive devices, And a first scintillator 113 disposed on the first device array. In addition, the first detection panel 110 is disposed on the first substrate 111 and a first connection unit to which a first cable 141 for connection between the first element array 112 and the panel driving unit 140 is connected. It may further include (114).

The second detection panel 120 includes a second substrate array 121 disposed under the metal fan 130 and a second element array 122 disposed under the second substrate 121 and including a plurality of second photosensitive elements. ), And a second scintillator 123 disposed under the second device array. In addition, the second detection panel 120 is disposed under the second substrate 121 and a second connection part to which a second cable 142 for connection between the second device array 122 and the panel driving part 140 is connected. It may further include (124).

The first and second substrates 111 and 121 are attached to the metal film 130 through the first and second adhesive layers 131 and 132. The first and second substrates 111 and 121 may be made of a flexible material such as PI.

The first scintillator 113 of the first detection panel 110 outputs visible light to the first device array 112 in response to X-rays of the first energy band.

The second scintillator 123 of the second detection panel 120 outputs visible light to the second device array 122 in response to X-rays of the second energy band higher than the first energy band.

To this end, each of the first and second scintillator 113 and 123 may have a columnar structure. For example, the first and second scintillator 113 and 123 may be made of CsI: Tl (Cesium iodide: Talluim doped).

In this case, the diameter of the columnar structure of the first scintillator 113 may be smaller than the diameter of the columnar structure of the second scintillator 123.

Alternatively, the thickness of the first scintillator 113 may be smaller than the thickness of the second scintillator 123.

As described above, the first and second scintillator 113 and 123 may be provided to react to X-rays of different energy bands by being formed with different diameters or different thicknesses of columnar structures.

The metal film 130 is adhered to the first and second detection panels 110 and 120 through the first and second adhesive films 131 and 132 and supports the first and second detection panels 110 and 120. .

In addition, the metal film 130 minimizes the incidence of relatively high-intensity X-rays of the first energy band into the second detection panel 120 and the panel driving unit 140 disposed below it. To this end, the metal film 130 may be made of at least one single layer or multiple layers of tungsten, aluminum, and copper. Alternatively, although not separately illustrated, the metal film 130 may include a material having an atomic number higher than that of tungsten, aluminum, and copper.

In addition, the thickness of the metal film 130 may range from 0.1 mm to 1.0 mm. However, this is only an example, and the thickness, material, and structure of the metal film 130 may be changed according to the strength of the first energy band.

The first detection panel 110 outputs a first detection signal corresponding to X-rays of the first energy band by the first scintillator 113 and the first device array 112.

In addition, the second detection panel 120 outputs a second detection signal corresponding to X-rays of the second energy band having a lower intensity than the first energy band by the second scintillator 123 and the second device array 122. do.

The panel driver 140 is connected to the first and second detection panels 110 and 120, and transmits an X-ray image signal based on the first and second detection signals by the first and second detection panels 110 and 120. to provide.

That is, the panel driving unit 140 generates a first band image signal based on the first detection signal and a second band image signal based on the second detection signal. In addition, the panel driver 140 subtracts the first and second band image signals to generate an X-ray image signal.

At this time, the first band image signal represents a high-density target object corresponding to the X-ray of the first energy band having a relatively high intensity, and the second band image signal indicates a low-density target object corresponding to the X-ray of the second energy band having a relatively low intensity. Shows. Therefore, the X-ray image signal composed of the combination of the first and second band image signals can display a high-density target object and a low-density target object together.

The panel driving unit 140 is disposed under the second detection panel 120. At this time, the X-rays incident on the digital X-ray detection apparatus 100 are attenuated by the first and second detection panels 110 and 120 and the metal plate 130, so that the X-rays transmitted to the panel driving unit 140 have low intensity. . Therefore, it can be minimized or delayed that various parts or elements provided in the panel driving unit 140 are damaged by X-rays.

As illustrated in FIG. 3, the first device array 112 includes a plurality of pixel areas (PAs) arranged in a matrix in a detection area (DA) for detecting the amount of X-ray transmission. Since the first and second device arrays 112 and 122 have the same structure, a description of the second device array 122 will be omitted below.

Each pixel area PA includes a first photodetector (PD1).

Alternatively, each pixel area PA may further include a first switching transistor (ST1) disposed between the first photodetector (PD1) and a data line (DL). In this case, when the light source device 200 irradiates X-rays, the first photodetector element PD1 of each pixel area PA is biased with a signal of a bias line (BL), and each pixel area PA ) To generate a first detection signal corresponding to the amount of light incident. Then, when the switching transistor ST1 is turned on based on the signal of the gate line (GL), the switching transistor ST1 transfers the first detection signal of the first photodetector PD1 to the data line DL.

The panel driving unit 140 includes a bias driving unit (B-DR) connected to the bias lines BL of the first and second device arrays 112 and 122, and first and second device arrays 112 and 122. ), A gate driver (G-DR) connected to the gate line GL, and a data driver (D-DR) connected to the data lines DL of the first and second device arrays 112 and 122; It may include a data line driver (D-DR), an image processing unit (IP) connected to a data driving unit (D-DR), and a timing controller (TC).

The timing controller TC controls driving timings of the gate driving unit G-DR and the data driving unit D-DR.

That is, the timing controller TC supplies a start signal STV and a clock signal CPV for driving timing control of the gate driver G-DR to the gate driver G-DR. The timing controller TC supplies a readout control signal ROC and a readout clock signal CLK for driving timing control of the data driver D-DR to the data driver D-DR.

The gate driver G-DR sequentially supplies gate signals for the turn-on operation of the switching transistor ST1 to the gate lines GL of the first and second device arrays 112 and 122.

The bias driving unit B-DR applies bias signals for applying a predetermined bias voltage to the light sensing elements PD1 of each pixel area PA, and bias lines BL of the first and second device arrays 112 and 122. ). In this case, the bias driving unit B-DR may selectively supply a bias signal for reverse bias operation or a bias signal for forward bias operation.

The data driver D-DR receives the first and second detection signals through the data lines DL of the first and second device arrays 112 and 122. Then, the data detection unit D-DR amplifies the first and second detection signals based on a predetermined gain.

The image processing unit IP generates a first band image signal based on the first detection signal, a second band image signal based on the second detection signal, and X-rays based on the first and second band image signals. Generate video signals.

Here, the image processing unit IP may perform a process of correcting an average luminance difference between the first and second band image signals while generating the X-ray image signal.

Meanwhile, although not illustrated in FIG. 3, the first device array 112 may include at least one of a gate driving unit G-DR, a bias driving unit B-DR, and a data driving unit D-DR.

As illustrated in FIG. 4, the plurality of pixel areas PA of the first element array 112 and the plurality of pixel areas PA of the second element array 122 face each other within a predetermined alignment error range. It is arranged to. That is, the first and second photosensitive elements PD1 and PD2 corresponding to each pixel area PA face each other. In other words, the plurality of first photo-sensing elements PD1 and the plurality of second photo-sensing elements PD2 face each other.

In this way, there is an advantage in that the resolutions of the first and second band video signals can be equal to each other.

Also, each pixel region of the first band image signal may match a portion of the same target object as each pixel region of the second band image signal. Accordingly, there is an advantage in that the combination of the first and second band video signals can be facilitated.

The first device array 112 of the first detection panel 110 is disposed on the first substrate 111 and includes a first switching transistor ST1 and a first switching transistor ST1 corresponding to each pixel area PA. A first interlayer insulating film 112a, a first photodetector element PD1 disposed on the first interlayer insulating film 112a and corresponding to each pixel area PA, and a first passivation layer covering the first photodetector element PD1 ( 112b).

Here, each first photodetector element PD1 may be connected to the first switching transistor ST1 through a contact hole passing through the first interlayer insulating film 112a.

Likewise, the second device array 122 of the second detection panel 120 is disposed under the second substrate 122 and corresponds to the second switching transistor ST2 and the second switching transistor ST2 corresponding to each pixel area PA. ST2) is disposed under the second interlayer insulating film 122a, the second interlayer insulating film 122a, and covers the second photodetector element PD2 and the second photodetector element PD2 corresponding to each pixel area PA. A second passivation layer 122b may be included.

For example, as illustrated in FIG. 5, the first switching transistor ST1 may have a bottom gate structure. In this case, the first switching transistor ST1 includes a gate electrode GE disposed on the first substrate 111, a gate insulating layer GI covering the gate electrode GE, and an active layer disposed on the gate insulating layer GI ( ACT), and a source electrode SE and a drain electrode DE disposed on the gate insulating layer GI and contacting both sides of the active layer ACT. The first switching transistor ST1 is covered with the first interlayer insulating film 112a.

However, this is only an example, and the first switching transistor ST1 may have a top gate structure or a dual gate structure.

The first photodetector PD1 is disposed on the first interlayer insulating film 112a and is connected to the first switching transistor ST1, the first device electrode DE1, and the first device electrode DE1 PIN layer (PIN) ) And a second device electrode DE disposed on the PIN layer.

The PIN layer of the first photodetector PD1 generates electron-hole pairs in response to visible light supplied from the first scintillator 113, and electrons and holes of the electron-hole pairs are first and second device electrodes Move to (DE1, DE2). Thus, a first detection signal of the first photodetecting element PD1 is generated.

The second device electrode DE2 is covered with the first passivation layer 112b.

The bias line BL is disposed on the first passivation layer 112b and is connected to the second device electrode DE2 through a contact hole passing through the first passivation layer 112b.

The bias line BL is covered with the first passivation layer 112c and the first overcoat layer 112d sequentially stacked.

Then, the first scintillator 113 is disposed on the first overcoat film 112d.

In addition, except that the second switching transistor ST2 and the second photodetector PD2 of the second device array 122 are vertically inverted structures, the first switching transistor ST1 of the first device array 112 is And since it is the same as the first photodetecting element PD1, a duplicate description is omitted below.

The first switching transistor ST1 and the first photodetector PD1 shown in FIG. 5 are only examples, and may be changed according to a designer's intention.

As illustrated in FIG. 6, the X-rays irradiated by the light source device 200 have a first energy band EB1 having a relatively high intensity and a second energy band EB2 having a lower intensity than the first energy band EB1. ).

Accordingly, X-rays incident on the first detection panel 110 include first and second energy bands EB1 and EB2.

As illustrated in FIG. 7, the first detection panel 110 generates a first detection signal in response to X-rays of the first energy band EB1, and the second detection panel 120 generates a second energy band EB2. ) To generate a second detection signal.

6, in the X-ray incident to the first detection panel 110, the intensity of the first energy band EB1 is higher than that of the second energy band EB2.

When such X-rays are incident on the first detection panel 110, at least a portion of the X-rays of the first energy band EB1 is absorbed by the first scintillator 113 of the first detection panel 110. And, by the metal plate 130 between the first and second detection panels (110, 120), the intensity of X-rays is lowered.

Accordingly, after the X-rays pass through the first detection panel 110 and the metal plate 130, the X-rays of the first energy band EB1 are attenuated, so that the intensity of the first energy band EB1 is lowered.

Therefore, as shown in the dotted line graph of FIG. 6, in the X-ray incident to the second detection panel 120, the intensity of the second energy band EB2 is higher than that of the first energy band EB1. Accordingly, the accuracy of the second detection signal by the second detection panel 120 can be improved.

As shown in FIG. 8, since the first energy band EB1 is made of high intensity, the first detection signal corresponding to the first energy band EB1 may indicate a high-density target object such as a bone.

On the other hand, as shown in FIG. 9, since the second energy band EB2 is formed with a lower intensity than the first energy band EB2, the second detection signal corresponding to the second energy band EB2 is an organ. ) And tissues, etc., to indicate a low-density target object.

As described above, the digital X-ray imaging apparatus according to an embodiment of the present invention includes first and second detection panels 110 and 120 generating first and second detection signals corresponding to X-rays of different energy bands. By doing so, it is possible to provide an X-ray image signal displaying both a high-density target object and a low-density target object.

Further, by further including a metal plate 130 disposed between the first and second detection panels 110 and 120, the intensity of X-rays incident on the second detection panel 120 can be easily adjusted. Accordingly, damage to the second detection panel 120 and the panel driving unit 140 disposed below the delay may be delayed.

In addition, since the first and second detection panels 110 and 120 are connected to one panel driving unit 140, concurrency of the first and second detection signals may be improved. Accordingly, reliability and accuracy of an X-ray image signal displaying both a high-density object object and a low-density object object may be improved.

Meanwhile, according to another embodiment of the present invention, the digital X-ray detection apparatus 100 may further include a reflector for improving the absorption efficiency of X-rays.

10 is a view showing a digital X-ray detection apparatus according to another embodiment of the present invention.

As shown in FIG. 10, the digital X-ray detection apparatus according to another embodiment of the present invention is illustrated in FIGS. 2 to 2, except that it further includes a reflector 150 disposed under the second detection panel 120. Since it is the same as the embodiment shown in 7, the redundant description is omitted below.

The X-rays transmitted through the second detection panel 120 may be reflected by the reflector 150 so as to be directed toward the second scintillator 123, so that the light efficiency can be improved.

Next, a manufacturing method of the digital X-ray detection apparatus 100 according to an embodiment of the present invention will be described with reference to FIG. 11.

11 is a view showing a method of manufacturing a digital X-ray detection apparatus according to an embodiment of the present invention.

As shown in FIG. 11, in the manufacturing method of the digital X-ray detection apparatus, a first substrate 111 is provided using a predetermined transfer substrate, and the first device array 112 is disposed on one surface of the first substrate 111. Step (S11), separating the transfer substrate from the first substrate 111 on which the first device array 112 is disposed (S12), the first scintillator 113 on the first device array 112 Arrangement (S13), preparing a second substrate 121 using a predetermined transfer substrate, and placing the second device array 122 on one surface of the second substrate 121 (S21), second device Separating the transfer substrate from the second substrate 121 on which the array 122 is disposed (S22), disposing the second scintillator 123 on the second element array 122 (S23), the first Placing the first adhesive layer 131 on the other surface of the substrate 111 and attaching the metal plate 130 (S31), disposing the second adhesive layer 132 on the other surface of the second substrate 121,And a step (S32), and the first and second element arrays step (S33) for connecting the panel-drive section 140 to 112 and 122 to attach the sokpan 130.

As described above, the digital X-ray detection apparatus 100 according to an embodiment of the present invention is provided with first and second detection panels 110 and 120 separately (S11, S12, S13) (S21, S22, S23), It may be manufactured through the process (S31, S32) of attaching the first and second detection panels (110, 120) to the metal plate (130). Therefore, there is an advantage in that it is easy to utilize existing manufacturing equipment.

The present invention described above is not limited to the above-described embodiments and the accompanying drawings, and various substitutions, modifications and changes are possible within the scope of the present invention without departing from the technical spirit of the present invention. It will be clear to those who have the knowledge of

10: X-ray imaging system 20: Object
100: digital X-ray detection device 200: light source device
300: main controller
110: first detection panel 120: second detection panel
130: metal plate 140: panel driving unit

Claims (15)

A first detection panel for outputting a first detection signal corresponding to X-rays of the first energy band;
A second detection panel disposed under the first detection panel and outputting a second detection signal corresponding to X-rays of a second energy band different from the first energy band; And
A digital X-ray detection apparatus including a metal plate disposed between the first and second detection panels.
According to claim 1,
A digital X-ray detection apparatus disposed under the second detection panel and further comprising a panel driver connected to the first and second detection panels.
According to claim 2,
The panel driving unit
A first band image signal is generated based on the first detection signal,
A second band image signal is generated based on the second detection signal,
A digital X-ray detection apparatus for generating an X-ray image signal by combining the first and second band image signals.
According to claim 1,
The first detection panel includes a first substrate disposed on the metal plate, a first element array disposed on the first substrate and including a plurality of first photosensitive elements, and a first scintilla disposed on the first element array. Including a rater,
The second detection panel is a second device array disposed under the metal plate, a second device array disposed under the second substrate and including a plurality of second photosensitive devices, and disposed under the second device array. A second scintillator,
The first substrate and the second substrate is a digital X-ray detection device that faces each other with the metal plate therebetween.
The method of claim 4,
The plurality of first photo-sensing elements and the plurality of second photo-sensing elements are digital X-ray detection devices that face each other.
The method of claim 4,
The first scintillator outputs visible light to the first device array in response to X-rays of the first energy band,
The second scintillator is a digital X-ray detection device that outputs visible light to the second device array in response to X-rays of the second energy band.
The method of claim 6,
Each of the first and second scintillator has a columnar structure,
The diameter of the columnar structure of the first scintillator is smaller than the diameter of the columnar structure of the second scintillator.
The method of claim 7,
Each of the first and second scintillators is a digital x-ray detection device composed of Ti (Talluim) doped CsI (Cesium Iodide).
The method of claim 6,
The thickness of the first scintillator is a digital X-ray detection device smaller than the thickness of the second scintillator.
The method of claim 4,
A first adhesive film disposed between the first substrate and the metal plate; And
And a second adhesive film disposed between the second substrate and the metal plate.
The method of claim 4,
Each of the first and second substrates is a digital X-ray detection device made of a flexible material.
The method of claim 4,
And a reflector disposed under the second scintillator of the second detection panel.
According to claim 1,
The metal plate is a digital x-ray detection device made of a material containing at least one of tungsten, aluminum and cooper.
The method of claim 13,
The thickness of the metal plate is a digital X-ray detection device in the range of 0.1mm ~ 1mm.
A digital X-ray detection apparatus according to any one of claims 1 to 14; And
An X-ray imaging system including a light source device that faces the digital X-ray detection device with a predetermined target object therebetween and irradiates X-rays including the first and second energy bands to the target object.

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