KR20200036273A - A sterilizing apparatus and a method for measuring concentration of hydrogen peroxide of the sterilizing apparatus - Google Patents

Abstract

The present invention relates to a sterilization apparatus comprising a sterilization chamber, and a method of measuring a hydrogen peroxide concentration of the sterilization apparatus, wherein the sterilization apparatus comprises a sampling unit located in a certain area outside the sterilization chamber. The sampling unit comprises: a hydrogen peroxide steam decomposition apparatus; and a storage unit for storing water vapors and oxygen decomposed from the hydrogen peroxide steam decomposition apparatus. The storage unit comprises an oxygen sensor. In particular, the concentration of hydrogen peroxide steam inside the sterilization chamber can be calculated by detecting a first relative humidity of gas inside the sterilization chamber by means of a first humidity sensor, and then deriving a ratio of relative humidity exerted by hydrogen peroxide steam in the first relative humidity from an oxygen sensor measurement value as measured by the oxygen sensor of the sampling unit located outside the sterilization chamber.

Description

Sterilization device and method for measuring hydrogen peroxide concentration of the sterilization device {A STERILIZING APPARATUS AND A METHOD FOR MEASURING CONCENTRATION OF HYDROGEN PEROXIDE OF THE STERILIZING APPARATUS}

The present invention relates to a sterilization device and a method for measuring the hydrogen peroxide concentration of the sterilization device, and more specifically, to a sterilization device capable of accurately detecting the concentration of hydrogen peroxide vapor and a method for measuring the hydrogen peroxide concentration of the sterilization device by a simple method. will be.

Medical instruments are usually sterilized by high pressure steam sterilization method using saturated water vapor under high pressure or by ethylene oxide gas sterilization method using chemical substances such as ethylene oxide that do not damage heat-sensitive instruments or materials.

However, because the high-pressure steam sterilizer sterilizes at a high temperature of 120 degrees or higher, recently developed medical devices made of synthetic resin are deformed, and the medical devices made of steel are dull with delicate blades, and are much shorter than the existing lifespan. . In particular, the high-pressure steam sterilization method may be an unsuitable sterilization method because expensive medical devices, devices, and devices, which are increasing due to the development of the latest surgical technology, are sensitive to heat or moisture and may be damaged in a sterilization reprocessing process.

Ethylene oxide gas sterilizers that can minimize damage to these devices can be sterilized at low temperatures, but carcinogens and toxic substances can be generated due to residual ethylene oxide in the sterilized material or the reaction product resulting in ventilation. Time is required. In addition, it has been reported that ethylene oxide gas itself has a high risk of explosion and can act as a mutagenic genetic toxic substance, and is prescribed as a carcinogen, which requires much attention in its use.

On the other hand, the sterilization method using hydrogen peroxide steam is a short sterilization time within 30-60 minutes at a temperature of 40-50 degrees, and the substances discharged to the atmosphere after sterilization to be harmless to the human body or the environment are water and oxygen, so the disadvantages of high pressure steam sterilizers and ethylene oxide gas Various disadvantages of the sterilizer can be compensated.

However, in the hydrogen peroxide aqueous solution used for generating hydrogen peroxide vapor, water vaporizes and diffuses before hydrogen peroxide in the vaporization process, making it difficult to sufficiently diffuse hydrogen peroxide. This is because water vaporizes more rapidly because the vapor pressure is higher than that of hydrogen peroxide, and water vapor is diffused into the gas phase more quickly than hydrogen peroxide vapor because the molecular weight of water is lower than that of hydrogen peroxide.

 Because of these properties, when an aqueous hydrogen peroxide solution is evaporated in a space surrounding a product to be sterilized, water reaches the product to be sterilized at a higher concentration before hydrogen peroxide.

Water vapor diffuses more quickly into diffusion limited spaces such as small crevices or long, narrow lumens to suppress the permeation of hydrogen peroxide vapor. That is, water reaches the sterilized product before hydrogen peroxide, and sterilization is not properly performed.

For effective sterilization, it is preferable to use a more concentrated aqueous hydrogen peroxide solution, but when the concentration of the aqueous hydrogen peroxide solution is 60% by weight or more, it is practically difficult to handle transportation, storage, and the like.

For this reason, it is common to use an aqueous hydrogen peroxide solution having a concentration that can be handled at 60% by weight or less through a step-by-step concentration process, for example, by concentrating it to a high concentration of hydrogen peroxide at a concentration of 95% by weight or more as a sterilizing agent. The sterilization effect can be improved.

In this case, the concentration of the hydrogen peroxide in the sterilization chamber of the sterilization device is not easy in using the hydrogen peroxide solution as a sterilizing agent by concentrating it with a high concentration of hydrogen peroxide water.

In particular, since the high concentration hydrogen peroxide gas is easily condensed, the means for directly measuring the concentration is not common, and the gas concentration is usually measured by the absorption bottle method.

However, in this case, there was a problem that it is not possible to grasp the change in gas concentration in a short time or to continuously monitor the gas concentration.

In addition, in many cases, as a means for continuously monitoring the gas quality of the sterilizing device, it is a complex monitoring of the supply state (temperature, quantity, pressure, etc.) of hot air and hydrogen peroxide for generating gas to determine whether gas quality is good or bad. In general, this method is also complicated and lacks reliability.

Korea Patent Publication 10-2006-52161

The problem to be solved by the present invention is that the present invention has been developed to solve the problems as described above, and avoids the enlargement or complexity of the sterilization device, and by a simple method, a sterilization device capable of accurately detecting the concentration of hydrogen peroxide vapor and It is to provide a method for measuring the hydrogen peroxide concentration of the sterilization device.

The objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

In order to solve the above-mentioned problems, the present invention includes a sterilization apparatus including a sterilization chamber, comprising a sampling portion located in a predetermined area outside the sterilization chamber, the sampling portion comprising: a hydrogen peroxide vapor decomposition apparatus; And a storage unit for storing water vapor and oxygen decomposed from the hydrogen peroxide vapor decomposition apparatus, and the storage unit provides a sterilization apparatus including an oxygen sensor.

In addition, the present invention provides a sterilization device, characterized in that the sterilization chamber further comprises a first humidity sensor located in a certain area inside the sterilization chamber.

In addition, in the present invention, the first humidity sensor detects the first relative humidity by the amount of hydrogen peroxide vapor and the amount of water vapor, and the oxygen sensor measures the oxygen sensor measurement value by oxygen decomposed from the hydrogen peroxide vapor decomposition device. It provides a sterilization device characterized in that the calculation.

In addition, the present invention comprises the steps of detecting the first relative humidity of the gas inside the sterilization chamber by the first humidity sensor; Calculating an oxygen sensor measurement value by oxygen formed by decomposition of hydrogen peroxide vapor in a gas inside the sterilization chamber through an oxygen sensor of a sampling unit located in an area outside the sterilization chamber; Deriving a ratio of the relative humidity exerted by the hydrogen peroxide vapor at the first relative humidity through the measured oxygen sensor; And calculating the concentration of hydrogen peroxide vapor in the sterilization chamber through the ratio of relative humidity exerted by the hydrogen peroxide vapor at the first relative humidity.

In addition, the present invention, the sampling unit, hydrogen peroxide steam cracking apparatus; And a storage unit for storing water vapor and oxygen decomposed from the hydrogen peroxide vapor decomposition apparatus, the storage unit including the oxygen sensor, and the oxygen sensor measurement value is the following equation (1). Concentration measurement method is provided.

…… 수학식(1)

… … Equation (1)

In addition, in the present invention, the oxygen pressure (Po ₂ ) in the storage unit in Equation (1) means the atmospheric pressure of oxygen generated by the decomposition of the hydrogen peroxide vapor introduced from the sterilization chamber, and the total atmospheric pressure of the storage unit. (Pc) corresponds to the sum of the oxygen pressure in the storage portion (Po ₂ ) and the atmospheric pressure of the water vapor in the storage portion (P _H2O ), and the atmospheric pressure of the water vapor in the storage portion (P _H2O ) is, "The sterilization chamber It provides a method for measuring the concentration of hydrogen peroxide, characterized in that it corresponds to the sum of the "atmospheric pressure of water vapor in the body" and "the pressure of water vapor generated by decomposition of hydrogen peroxide vapor introduced from the sterilization chamber."

In addition, the present invention comprises the steps of calculating the oxygen sensor measurement value by oxygen formed by the decomposition of hydrogen peroxide vapor in the gas inside the sterilization chamber through the oxygen sensor of the sampling unit located in the region outside the sterilization chamber; And calculating the concentration of hydrogen peroxide vapor in the sterilization chamber through the measurement of the oxygen sensor.

In addition, the present invention, the pressure value by the water vapor inside the sterilization chamber is "a", the pressure value by hydrogen peroxide vapor is "b", the pressure value inside the sterilization chamber is "P", the oxygen sensor measurement value is " When C ", P = a + b, the b value provides a method for measuring the concentration of hydrogen peroxide, characterized in that the following equation (3).

…… 수학식 (3)

… … Equation (3)

According to the present invention as described above, the first relative humidity of the gas inside the sterilization chamber is detected by the first humidity sensor, and the oxygen sensor measured value measured by the oxygen sensor of the sampling unit located outside the sterilization chamber. Through, by deriving the ratio of the relative humidity exerted by the hydrogen peroxide vapor at the first relative humidity, it is possible to calculate the concentration of the hydrogen peroxide vapor in the sterilization chamber.

1 is a schematic perspective view showing a sterilizing device using an aqueous solution of a sterilizing agent according to the present invention, and FIG. 2 is a schematic configuration diagram showing a sterilizing device using an aqueous solution of a sterilizing agent according to the present invention.
Figure 3 is a flow chart showing a sterilization method of a sterilizing device using an aqueous solution of a sterilizing agent according to the present invention.
4 is a graph showing the reaction of the capacitive humidity sensor in the sterilization device.
5 is a flow chart for explaining a method for measuring hydrogen peroxide concentration according to a first embodiment of the present invention.
6 is a flow chart for explaining a method for measuring hydrogen peroxide concentration according to a second embodiment of the present invention.

Advantages and features of the present invention, and methods for achieving them will be clarified with reference to embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various different forms, and only the present embodiments allow the disclosure of the present invention to be complete, and the ordinary knowledge in the technical field to which the present invention pertains. It is provided to fully inform the holder of the scope of the invention, and the invention is only defined by the scope of the claims.

Hereinafter, specific contents for carrying out the present invention will be described in detail with reference to the accompanying drawings. The same reference numerals refer to the same components regardless of the drawings, and "and / or" includes each and every combination of one or more of the mentioned items.

Although the first, second, etc. are used to describe various components, it goes without saying that these components are not limited by these terms. These terms are only used to distinguish one component from another component. Therefore, it goes without saying that the first component mentioned below may be the second component within the technical spirit of the present invention.

The terminology used herein is for describing the embodiments and is not intended to limit the present invention. In this specification, the singular form also includes the plural form unless otherwise specified in the phrase. As used herein, “comprises” and / or “comprising” does not exclude the presence or addition of one or more other components other than the components mentioned.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used as meanings commonly understood by those skilled in the art to which the present invention pertains. In addition, terms defined in the commonly used dictionary are not ideally or excessively interpreted unless specifically defined.

The spatially relative terms “below”, “beneath”, “lower”, “above”, “upper”, etc., are as shown in the figure. It can be used to easily describe a correlation between a component and other components. The spatially relative terms should be understood as terms including different directions of components in use or operation in addition to the directions shown in the drawings. For example, when a component shown in the drawing is turned over, a component described as "below" or "beneath" of another component will be placed "above" another component. You can. Thus, the exemplary term “below” can include both the directions below and above. Components can also be oriented in different directions, and thus spatially relative terms can be interpreted according to orientation.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic perspective view showing a sterilizing device using an aqueous solution of a sterilizing agent according to the present invention, and FIG. 2 is a schematic configuration diagram showing a sterilizing device using an aqueous solution of a sterilizing agent according to the present invention.

However, in the present invention, the sterilizing agent may be hydrogen peroxide, and the sterilizing agent aqueous solution may be hydrogen peroxide. Hereinafter, for convenience of description, the sterilizing agent will be described as hydrogen peroxide, and the sterilizing agent aqueous solution will be described as hydrogen peroxide. do.

1 and 2, the sterilization apparatus 100 using hydrogen peroxide water according to the present invention includes a sterilization chamber 110.

The sterilization chamber 110 represents a container that can be sterilized, such as medical instruments or surgical instruments to be sterilized. At this time, one side of the sterilization chamber 110 may include a door for entry and exit of the sterilized material.

In addition, it includes a vacuum pump 120 connected to one side of the sterilization chamber 110, the vacuum pump 120 may draw a gas inside the sterilization chamber 110 to form a vacuum. At this time, a vacuum valve 121 that can control the operation of the vacuum pump 120 is connected between the sterilization chamber 110 and the vacuum pump 120.

1 and 2, the sterilization apparatus 100 using hydrogen peroxide water according to the present invention is connected to the other side of the sterilization chamber 110 to supply hydrogen peroxide vapor to the sterilization chamber 110. It includes a vaporizer 130 (or may be referred to as an evaporator) and a hydrogen peroxide supply device 150 for supplying hydrogen peroxide to the vaporizer 130.

At this time, a vaporization valve 131 may be included between the sterilization chamber 110 and the vaporizer 130.

In addition, the sterilization apparatus 100 using hydrogen peroxide water according to the first embodiment of the present invention is connected to the vaporizer 130 on one side and the sterilization chamber 110 on the other side, to the vaporizer 130 And a collector 140 (or may be referred to as a collector vaporizer) for concentrating the supplied hydrogen peroxide.

At this time, between the sterilization chamber 110 and the collector 140 may include a vaporization valve (131).

In addition, a collection valve 141 may be included between the sterilization chamber 110 and the collector 140.

That is, the vaporization valve 131 and the collection valve 141 may be connected in parallel between the sterilization chamber 110 and the collector 140.

On the other hand, as described above, between the sterilization chamber 110 and the vaporizer 130 may include a vaporization valve 131, that is, the vaporization valve 130 is one side of the sterilization chamber 110 and The other side may be connected in parallel with the vaporizer 130 and the collector 140.

1 and 2, the sterilization apparatus 100 using hydrogen peroxide water according to the present invention includes a first connection pipe 142 and the vaporization connecting the collector 140 and the vaporization valve 131 A valve 131 and a second connection pipe 133 connecting the sterilization chamber 110 may be included.

In addition, a third connection pipe 143 connecting the collector 140 and the collection valve 141 and a fourth connection pipe 144 connecting the collection valve 141 and the sterilization chamber 110 are included. can do.

At this time, in the drawing, the fourth connection pipe 144 is connected to the second connection pipe 133, and the vaporization valve 131 and the collection valve 141 are disposed between the sterilization chamber 110 and the collector 140. Although shown to be connected in parallel, unlike this, the fourth connection pipe 144 is directly connected to the sterilization chamber 110, the vaporization valve 131 between the sterilization chamber 110 and the collector 140 And the collection valve 141 may be connected in parallel.

In addition, a fifth connection pipe 132 connecting the vaporizer 130 and the vaporization valve 131 may be included. In this case, in the drawing, the fifth connection pipe 132 may include the first connection pipe 142. ), The vaporization valve 130 is shown in parallel with the vaporizer 130 and the collector 140, but, unlike this, the fifth connection pipe 132 is directly connected to the vaporization valve 131 The vaporization valve 130 may be connected to the vaporizer 130 and the collector 140 in parallel.

At this time, the vaporization valve 131 and the collection valve 141 can control the flow of fluid in the first connection pipe 142 to the fifth connection pipe 132 by an open / close operation. The open / close operation of the vaporization valve 131 and the collection valve 141 may be controlled by separate control units.

In addition, as shown in the drawing, the first connection pipe 142 connecting the collector 140 and the vaporization valve 131 and the second connection pipe 133 connecting the vaporization valve 131 and the sterilization chamber 110 ) May have a larger inner diameter than other connecting pipes, that is, the third connecting pipe 143 to the fifth connecting pipe 132, for example, the third connecting pipe 143 to the fifth connecting pipe 132 In the case of a 1/4 inch pipe, the first connection pipe 142 and the second connection pipe 133 may be 1 inch pipe. This will be described later.

On the other hand, although not shown in the drawing, may include a temperature control means for controlling the temperature of the sterilization chamber 110, vaporizer 130 and collector 140, the temperature control means may be a heater, which Since it is obvious in the art, a detailed description thereof will be omitted.

In addition, in the case of the collector 140, a cooling means may be further included as a temperature control means, and the cooling means may include suitable means such as direct cooling using cooling water or a thermoelectric element or air cooling through blowing of a heat exchanger. .

Hereinafter, a sterilization method using a sterilization device according to the present invention will be described.

Figure 3 is a flow chart showing a sterilization method of a sterilizing device using an aqueous solution of a sterilizing agent according to the present invention.

However, in the present invention, the sterilizing agent may be hydrogen peroxide, and the sterilizing agent aqueous solution may be hydrogen peroxide, for convenience of description below, the sterilizing agent will be described as hydrogen peroxide, and the sterilizing agent aqueous solution will be hydrogen peroxide. do.

On the other hand, the sterilization method described below will be described with reference to the reference numerals of the sterilization apparatus of FIGS. 1 and 2 described above.

Referring to FIG. 3, the sterilization method of the sterilization apparatus using hydrogen peroxide water according to the present invention includes the step of evacuating the sterilization chamber 110 (or may be referred to as a sterilization chamber) and the vaporizer 130 ( S110).

The step of evacuating the sterilization chamber 110 and the vaporizer 130 may be performed by evacuating the vacuum pump 120 by operating (on state) and opening the vacuum valve 121.

On the other hand, step S110, that is, the step of evacuating the sterilization chamber and the vaporizer may be continued until step S160, which will be described later, when the sterilization chamber reaches a predetermined set pressure and the hydrogen peroxide liquid from which moisture has been removed is collected in the collector. This step can be completed.

In addition, in order to evacuate the vaporizer 130, the vaporization valve 131 between the sterilization chamber 110 and the vaporizer 130, or between the sterilization chamber 110 and the collector 140 The collection valve 141 is in an open state, is in communication with the sterilization chamber during vacuum release so that the pressure is below atmospheric pressure, and is closed in the next step.

On the other hand, at the same time as the step of evacuating the sterilization chamber 110 and the vaporizer 130, the sterilization chamber and the vaporizer may be maintained at a temperature set by the above-described temperature control means.

Next, the step of introducing a first concentration of hydrogen peroxide water to the vaporizer 130 of the first temperature and the first pressure (S120).

Injecting the hydrogen peroxide water may be input through the hydrogen peroxide supply device 150 for storing the first concentration of hydrogen peroxide water. Meanwhile, although not shown in FIGS. 1 and 2, the vaporizer 130 and the hydrogen peroxide supply An appropriate amount of hydrogen peroxide water can be supplied by including a hydrogen peroxide water supply control valve (not shown) between the devices 150.

At this time, the first concentration of the hydrogen peroxide water may be 60% by weight or less.

As described above, the concentration of the hydrogen peroxide solution in the hydrogen peroxide solution, that is, the hydrogen peroxide solution is limited to 60% by weight or less, so it is practically difficult to use a higher concentration of hydrogen peroxide as a sterilizing agent.

That is, in the present invention, the first concentration of the hydrogen peroxide water indicates the concentration of the hydrogen peroxide water that can be handled, and does not have an important meaning in understanding the gist of the present invention.

Further, the first temperature may be 60 to 70 ° C, and the first pressure may be 800 mb (mil bar) to atmospheric pressure.

At this time, in step S120, while the first concentration of hydrogen peroxide water is input to the vaporizer 130, the vaporization valve 131 and the collection valve 141 may correspond to a close state, but open according to the supply device. It can be in a state.

Meanwhile, in step S120, the pressure of the sterilization chamber 110 is 600 mb to atmospheric pressure, the temperature may be 45 to 55 ° C, and the pressure of the collector 140 is 800 mb to atmospheric pressure, and the temperature is 38 to 42 ° C.

At this time, in the present invention, the first temperature is characterized in that it is higher than the temperature of the sterilization chamber.

In the case of the first temperature, it corresponds to the temperature of the vaporizer in the process of vaporizing more water from the hydrogen peroxide, and the vaporization process of the water vapor causes a very strong endothermic reaction to suppress the vaporization rate very strongly.

At this time, in order to increase the vaporization rate, there is a method of increasing the vacuum degree by lowering the pressure of the vaporizer, but the vaporization rate of hydrogen peroxide can also be increased, thereby increasing the consumption of hydrogen peroxide, and in addition, when the temperature is low, the amount of heat required for vaporization Therefore, since it is difficult to supply smoothly, it is preferable that the first temperature is at least higher than that of the sterilization chamber.

Next, a step of vaporizing the hydrogen peroxide solution at the first concentration to form a hydrogen peroxide solution at the second concentration is included (S130).

That is, the first concentration of hydrogen peroxide water that is introduced into the vaporizer 130 is vaporized (ie, water is removed) to form a second concentration of hydrogen peroxide water.

The second concentration of the hydrogen peroxide water may be 75% to 85% by weight, and in step S130, hydrogen peroxide to form hydrogen peroxide water having a concentration of 75% to 85% by weight by vaporizing moisture in the hydrogen peroxide water of 60% by weight or less. It may be a first concentration step.

In general, at the same temperature and pressure, water evaporates more quickly because it has a higher vapor pressure than hydrogen peroxide, and water diffuses into the gas phase more quickly than hydrogen peroxide because the molecular weight of water is lower than that of hydrogen peroxide.

Therefore, under the same temperature and pressure conditions, water (i.e., water) evaporates and diffuses faster than hydrogen peroxide, so that water in hydrogen peroxide evaporates / diffuses before hydrogen peroxide, so that a second concentration of hydrogen peroxide water can be formed.

At this time, the evaporated water is evacuated through the vacuum pump via the sterilization chamber 110, and thus, the operation of the vacuum pump 120 in step S130 (on state), the vacuum valve 121 and the vaporization valve (131) corresponds to the open state.

On the other hand, in step S130, the temperature of the vaporizer 130 is temporarily lowered by the endothermic reaction of the vaporization process, it is in the range of 55 to 65 ℃, the pressure may be 30 to 800 mb (Milibar) have.

In addition, while the evaporated water is evacuated through the vacuum pump through the sterilization chamber 110, the pressure of the sterilization chamber 110 is in the range of 10 to 600 mb, and the temperature may be 45 to 55 ° C. In addition, the pressure of the collector 140 is in the range of 20 to 500 mb, and the temperature may be 35 to 40 ° C.

Next, a step of introducing the second concentration of hydrogen peroxide water into the collector of the second temperature and the second pressure (S140).

In order to input the hydrogen peroxide solution of the second concentration to the collector 140 of the second temperature and the second pressure, the vacuum pump 120 is operated (on state), and the vacuum valve 121 is opened, The vaporization valve 131 may be controlled in a close state and the collection valve 141 in an on state.

At this time, the second temperature may be 35 to 42 ° C, and the second pressure may be 8 to 50 mb.

In addition, while the hydrogen peroxide water of the second concentration is moved from the vaporizer 130 to the collector 140, the pressure of the vaporizer 130 is 10 to 60 mb, the temperature may be 55 to 60 ° C, and the second The concentration of hydrogen peroxide water can be moved from the vaporizer 130 to the collector 140 via the fifth connection pipe 132 and the first connection pipe 142.

On the other hand, even in step S140, the sterilization chamber 110 is continuously evacuated, the pressure of the sterilization chamber 110 is 1 to 10 mb, the temperature may be 45 to 55 ℃.

At this time, in the present invention, the second temperature is characterized in that it is lower than the temperature of the sterilization chamber.

In the case of the second temperature, when the hydrogen peroxide vapor saturated from the vaporizer is higher than the temperature of the chamber in the process of passing through the collector, hydrogen peroxide vapor cannot be condensed into the collector. It can be exhausted through the chamber.

Even if the hydrogen peroxide vapor is partially condensed at the beginning of the step S140 / S150 where the pressure is somewhat high, if the collector is higher than the temperature of the chamber in the stage where the vacuum pressure is continuously imposed on the exhaust chamber, hydrogen peroxide evaporation heat is lower than that of water vapor, so it is easily regasified. Since it becomes impossible to remain in the collector, and in the end, step S170, which will be described later, cannot be performed. Therefore, it is preferable that the second temperature is at least lower than the temperature of the sterilization chamber.

As can be seen from the above, in the present invention, after the step S130, that is, the step of forming a second concentration of hydrogen peroxide by vaporizing the first concentration of hydrogen peroxide water, step S140, that is, the second temperature and the second A step of introducing the second concentration of hydrogen peroxide water into a collector at 2 pressure is performed.

For example, it is possible to consider performing step S140 without step S130, and immediately adding the hydrogen peroxide solution of the first concentration to the collector, but it is not preferable for the following reasons.

Table 1 below shows an example of the vaporization rate of hydrogen peroxide vapor by concentration of hydrogen peroxide water.

Referring to Table 1, it can be seen that the higher the concentration of hydrogen peroxide water, and the higher the set temperature, the higher the vaporization rate of the hydrogen peroxide vapor compared to water vapor.

For example, at 50 ° C., the vaporization rate of hydrogen peroxide vapor in hydrogen peroxide water at a concentration of 60% by weight is 13%, which means that the remaining 87% is water vapor, and the vaporization rate of hydrogen peroxide vapor in hydrogen peroxide water at 80% by weight concentration Is 40%, which means that the remaining 60% is water vapor.

In other words, performing step S140 without step S130 may mean, for example, adding 60% by weight hydrogen peroxide to the collector, and performing step S140 after performing step S130 is 80% by weight concentration It can be the meaning of putting hydrogen peroxide water in the collector.

At this time, in the case of performing step S140 without step S130, the ratio of water vapor passing through the collector in the initial stage is relatively high compared to the case of performing step S140 after performing step S130.

When the ratio of water vapor is input to the collector in a state relatively high than that of hydrogen peroxide vapor, water vapor enters the collector under high pressure of the collector (saturated water vapor pressure is higher than 75mb when the temperature of the collector is 40 degrees). It can also be condensed in the collector.

The fact that water vapor is also condensed in the collector means that there is a limit to the concentration of concentrated hydrogen peroxide water by the amount of condensed water vapor.

Therefore, in the present invention, in order to prevent the water vapor is first condensed in the collector and the concentration of the concentrated hydrogen peroxide water is limited, step S130, that is, the hydrogen peroxide solution at the second concentration is vaporized at the second concentration. After passing through the step of forming, step S140, that is, the step of introducing the hydrogen peroxide solution of the second concentration to the second temperature and the second pressure collector.

Next, hydrogen peroxide vapor in the second concentration of hydrogen peroxide water is condensed in the collector, and water vapor is exhausted from the collector (S150). As described above, water is faster than hydrogen peroxide because it has a higher vapor pressure. Because it is evaporated and the molecular weight of water is lower than that of hydrogen peroxide, water diffuses into the gas phase more quickly than hydrogen peroxide. Therefore, water (ie, moisture) evaporates and diffuses more quickly than hydrogen peroxide at the same temperature and pressure conditions. Since the water of evaporates / spreads before hydrogen peroxide, hydrogen peroxide vapor condenses in the collector, and water vapor is exhausted from the collector, so that a third concentration of hydrogen peroxide water can be formed.

That is, water has a higher vapor pressure than hydrogen peroxide, and thus, in the vapor state, hydrogen peroxide condenses more easily than water. Therefore, the hydrogen peroxide condensed in the collector can include hydrogen peroxide at a concentration higher than that of the input second concentration of hydrogen peroxide.

On the other hand, in step S140, the pipes through which hydrogen peroxide vapor and water vapor pass are moved in the order of the fifth connection pipe, the first connection pipe, the third connection pipe, and the fourth connection pipe, wherein the pipe having a small inner diameter among these connection pipes The temperature of the collector 140 should be higher than the temperature.

This can remain condensed in the piping first if the pipe temperature in the stage before and after the hydrogen peroxide vapor reaches the collector is lower than the collector, and the hydrogen peroxide vapor condensed in the pipe having a small inner diameter is at a higher temperature when vaporized in step S170. This is because the content of water vapor due to decomposition may increase during exposure and entering the chamber.

In addition, as shown in Table 1, once the concentration is high (less than 85% by weight), the vapor ratio of water and hydrogen peroxide becomes similar, and concentration by vaporization ratio decreases the concentration efficiency.

The gaseous hydrogen peroxide vapor and water vapor have a different temperature at which they can condense at the same pressure. For example, at 35 degrees, hydrogen peroxide condenses at 5 mb or more, and water vapor condenses at 55 mb or more.

Thus, this difference can be caused, for example, when the collector temperature under vacuum evacuation through the collection valve is 35, when the pressure is in the range of 5 mb to 55 mb, hydrogen peroxide vapor condenses and water vapor can be exhausted from the collector.

At this time, the third concentration of the hydrogen peroxide water may be 90% by weight to 95% by weight, and step S150 by vaporizing moisture in 75% by weight to 85% by weight of hydrogen peroxide, 90% by weight to 95% by weight of hydrogen peroxide It may be a second concentration step of hydrogen peroxide to form water.

On the other hand, in the above, the step of injecting the second concentration of hydrogen peroxide water into the second temperature and second pressure collector of step S140 and the hydrogen peroxide vapor in the second concentration of hydrogen peroxide water of step S150 is condensed into the collector, water vapor Although it has been described that the steps of evacuating from the collector are sequentially performed, unlike this, steps S140 and S150 may be simultaneous steps.

That is, while introducing the second concentration of hydrogen peroxide water to the collector at the second temperature and the second pressure, at the same time, the hydrogen peroxide vapor in the second concentration of hydrogen peroxide water is condensed in the collector, and water vapor is exhausted from the collector. You can.

At this time, the evaporated water is evacuated through a vacuum pump, therefore, in step S150, the vacuum pump 120 is operated (on state), and the vacuum valve 121 can be opened to evacuate the vacuum. In order for the evaporated water to be evacuated through a vacuum pump, the collection valve 141 corresponds to an open state.

Next, the step of lowering to a predetermined pressure in the sterilization chamber and the step of concentrating the hydrogen peroxide solution of the third concentration to the hydrogen peroxide solution of the fourth concentration (S160).

At this time, the constant pressure should be a set pressure for sterilization in a sterilization chamber, and also, if the sterilizing agent is hydrogen peroxide vapor, it should be a vacuum degree for easy diffusion.

Accordingly, the set pressure may be 0.5 to 1.3 mb, and the temperature of the sterilization chamber may be 45 to 55 ° C.

In addition, the fourth concentration of the hydrogen peroxide water may be 95% by weight or more, and the third concentration of hydrogen peroxide water to form hydrogen peroxide water of 95% by weight or more by vaporizing moisture in the hydrogen peroxide solution at a concentration of 90% to 95% by weight in step S160. It can be a step.

At this time, the evaporated water is evacuated through a vacuum pump, and thus, in step S160, the vacuum pump 120 is operated (on state) and the vacuum valve 121 can be opened to evacuate.

Meanwhile, in step S160, the collection valve 141 may repeat the open state and the close state.

That is, in concentrating the third concentration of hydrogen peroxide water to the fourth concentration of hydrogen peroxide water, the higher the concentration of hydrogen peroxide water, the lower the pressure at which the liquid hydrogen peroxide water can be evaporated.

For example, under the same temperature condition of 45 ° C., hydrogen peroxide evaporates at a pressure of about 20 mb or less in 80% by weight hydrogen peroxide, but hydrogen peroxide evaporates at a pressure of about 11 mb or less in 90% by weight hydrogen peroxide. Is done.

This is because in the concentration of the hydrogen peroxide solution at the third concentration to the hydrogen peroxide solution at the fourth concentration, not only water is vaporized, but hydrogen peroxide is also vaporized, so it may be difficult to concentrate the hydrogen peroxide solution to a predetermined concentration.

That is, the decomposition reaction of the hydrogen peroxide at a high concentration may continue, and moisture generated in the decomposition process lowers the concentration of the hydrogen peroxide.

Therefore, in order to remove such a small amount of impurities, it is possible to effectively remove moisture while suppressing the removal of vaporized hydrogen peroxide when the pressure rise / fall is repeated in a variation range of 0.1 to 2 mb.

This method of removing water takes a very long time in a low concentration step, but is effective in removing a small amount of water in a high concentration step, and can be said to be effective in maintaining at least a high concentration.

Therefore, to prevent the hydrogen peroxide from evaporating at a lower pressure because the pressure of the collector 140 containing the third concentration of hydrogen peroxide is continuously lowered by lowering the pressure to a predetermined pressure in the sterilization chamber. The valve 141 may prevent the pressure of the collector 140 from continuously lowering by repeating the open state and the close state.

At this time, the pressure of the collector 140 is 5 to 10 mb, the temperature may be 35 to 40 ℃, the pressure of the vaporizer 130 is 7 to 10 mb, the temperature may be 60 to 70 ℃.

On the other hand, in step S160, since the aqueous solution of the vaporizer is completely exhausted, the temperature is recovered in a vacuum state, and the collector is collected with high concentration of hydrogen peroxide to remove a small amount of moisture, or stays in the collector while maintaining an appropriate pressure.

At this time, the collector can be lowered to a lower temperature by means of temperature control to prevent excessive exhaustion of hydrogen peroxide.

Next, the step of introducing a hydrogen peroxide vapor of the hydrogen peroxide concentration of the fourth concentration into the sterilization chamber, and sterilizing the object to be treated (S170).

In step S170, the vaporization valve 131 is in an open state and the collection valve corresponds to an open or close state in order to inject the hydrogen peroxide vapor of the fourth concentration of hydrogen peroxide located in the collector 140 into the sterilization chamber 110. .

That is, the hydrogen peroxide vapor moving from the collector 140 to the sterilization chamber 110 may be moved through the first connection pipe 142 and the second connection pipe 133.

At this time, as described above, in the present invention, the first connection pipe 142 connecting the collector 140 and the vaporization valve 131 and the second connection pipe connecting the vaporization valve 131 and the sterilization chamber 110 ( 133) may have a larger inner diameter than other connecting pipes, that is, the third connecting pipe 143 to the fifth connecting pipe 132, for example, the third connecting pipe 143 to the fifth connecting pipe 132 In the case of this 1/4 inch pipe, the first connection pipe 142 and the second connection pipe 133 may be 1 inch pipe.

This means that hydrogen peroxide vapor flows from the collector 140 to the sterilization chamber 110 through the first connection pipe 142 and the second connection pipe 133, whereby the hydrogen peroxide vapor flows into the fifth connection pipe 132. For prevention, hydrogen peroxide vapor may be introduced into the first connection pipe 142 having a relatively large inner diameter, and hydrogen peroxide vapor may not be introduced into the fifth connection pipe 132 having a relatively small inner diameter.

In addition, in the present invention, the hydrogen peroxide vapor is introduced into the sterilization chamber, and in sterilizing the object to be treated, it is preferable that the temperature of the hydrogen peroxide vapor is not high.

When the temperature of the hydrogen peroxide vapor vaporized in the collector is higher than the temperature of the sterilization chamber before the hydrogen peroxide vapor is sufficiently saturated in the sterilization chamber, the density of the hydrogen peroxide vapor is excessively condensed in the entry path and condensed easily. In the gaseous state, the absolute amount of diffusion into the sterilization chamber is reduced, and the diffusion effect for sterilization can be adversely affected.

At this time, in the present invention, the piping of the path between the collector 140 and the sterilization chamber 110 may have a larger inner diameter than the piping of the other path. The larger the inner diameter of the piping means that the amount of gas movement is large. When the inner diameter is large, as the amount of gas movement increases, the vaporization driving force by the vacuum degree rises strongly to prevent the temperature of the hydrogen peroxide vapor in the gaseous state from rising.

That is, when the amount of gas movement is small, the time in which the hydrogen peroxide vapor stays in the collector increases as much, and the decomposition reaction rate of the hydrogen peroxide vapor increases in the collector requiring temperature rise for vaporization and movement of hydrogen peroxide, which is a decomposition byproduct. The concentration of water vapor and oxygen gas increases. This may reduce the sterilization performance because the purpose of the previous step to minimize the amount of water vapor, which is an obstacle to diffusion of hydrogen peroxide, is lost in the vaporization step.

Therefore, in the present invention, the pipe of the path between the collector 140 and the sterilization chamber 110 has a larger inner diameter than the pipes of other paths, so that the temperature of the hydrogen peroxide vapor can be introduced into the sterilization chamber, depending on the temperature. As the decomposition reaction is minimized, the hydrogen peroxide vapor is easily accessible to the sterilized material through sufficient diffusion into the gas phase, and thus a good sterilization effect can be obtained.

On the other hand, when the hydrogen peroxide vapor of the fourth concentration of hydrogen peroxide is introduced into the sterilization chamber, the hydrogen peroxide is vaporized and diffused into the sterilization chamber. Most of the hydrogen peroxide vaporization occurs before the temperature of the collector 140 reaches the temperature of the sterilization chamber. The heating rate of the collector 140 can be controlled to be completed.

That is, in order to promote the vaporization of hydrogen peroxide, the collector 140 may be heated by a temperature control means. In heating the collector, hydrogen peroxide is vaporized before the temperature of the collector reaches the temperature of the sterilization chamber. The heating rate can be controlled to complete more than 80%.

At this time, the pressure of the sterilization chamber 110 may be 0.5 to 15 mb, the temperature may be 45 to 55 ℃.

In addition, the pressure of the collector 140 is 0.5 to 15 mb, the temperature may be 30 to 70 ℃, the pressure of the vaporizer 130 is 0.5 to 15 mb, the temperature may be 60 to 70 ℃ or more.

The pressure and temperature conditions in each step are summarized in Table 2 below.

In addition, the states of the vacuum pumps and valves at each stage are summarized in Table 3 below.

As described above, in order to improve sterilization performance, it is preferable to use a more concentrated hydrogen peroxide solution, and using a more concentrated hydrogen peroxide solution has a concentration of the hydrogen peroxide solution of 60% by weight or less in handling the hydrogen peroxide solution. Since it is limited to, it is difficult to use a high concentration of hydrogen peroxide as a sterilizer.

However, in the present invention, 95% by weight or more of hydrogen peroxide water can be used as a sterilizing agent through each step of concentration, and thus, the sterilization effect can be greatly improved while the diffusion obstacle caused by water vapor is reduced.

In addition, after preparing the aqueous solution of hydrogen peroxide at the second concentration by removing water from the first supplied hydrogen peroxide solution of the first concentration, which is the step S130 described above, by proceeding to steps S140 and S150 described above, moisture is brought into contact with the collector. You can reduce the likelihood of doing it.

In addition, in introducing hydrogen peroxide water into the collector, the pressure of the hydrogen peroxide water and the saturated water vapor pressure, ie, vaporization / condensation boundary pressure of the water according to the temperature of the collector, are lowered, thereby preventing condensation even if moisture contacts the collector. This can be done.

In the present invention, the object can be sterilized by the sterilization device as described above and a sterilization method using the same, but the above-described sterilization device and the sterilization method using the same are only examples, and in the present invention, the basic sterilization device configuration and The sterilization method used is not limited.

Hereinafter, a sterilization apparatus capable of measuring the hydrogen peroxide concentration according to the present invention and a method for measuring the hydrogen peroxide concentration of the sterilization apparatus will be described.

As described above, in order to improve sterilization performance, it is preferable to use a more concentrated hydrogen peroxide solution, and using a more concentrated hydrogen peroxide solution has a concentration of the hydrogen peroxide solution of 60% by weight or less in handling the hydrogen peroxide solution. Since it is limited to, it is difficult to use a high concentration of hydrogen peroxide as a sterilizer.

For this reason, it is common to use an aqueous hydrogen peroxide solution having a concentration that can be handled at 60% by weight or less through a step-by-step concentration process, for example, as a high concentration of hydrogen peroxide at a concentration of at least 95% by weight, and use it as a sterilizing agent. It is not easy to measure the concentration of the hydrogen peroxide in the sterilization chamber of the sterilization device when using it as a sterilizing agent by concentration with hydrogen peroxide water.

Accordingly, the present invention is to provide a sterilization apparatus capable of accurately detecting the concentration of hydrogen peroxide in hydrogen peroxide water and a method for measuring the hydrogen peroxide concentration of the sterilization apparatus, by avoiding the enlargement or complexity of the sterilization apparatus, and by a simple method. As follows.

As described above, referring to FIGS. 1 and 2, the sterilization device according to the present invention includes a sterilization chamber; A vacuum pump connected to one side of the sterilization chamber; A vaporizer connected to the other side of the sterilization chamber; And a collector connected to the vaporizer on one side and connected to the sterilization chamber on the other side.

At this time, the sterilization device according to the present invention includes a first humidity sensor 111 located in an internal predetermined area of the sterilization chamber 110 and a sampling unit 200 located in an external constant area of the sterilization chamber 110. do.

The sampling unit 200 samples a certain amount of the gas inside the sterilization chamber 110, that is, water vapor and hydrogen peroxide vapor, decomposes the hydrogen peroxide vapor, and then measures the concentration of oxygen from the decomposed hydrogen peroxide vapor. It corresponds to the area for.

At this time, the sampling unit 200 includes a hydrogen peroxide vapor decomposition device 210 for decomposing the hydrogen peroxide vapor; And a storage unit 220 for storing water vapor (H ₂ O) and oxygen (O ₂ ) decomposed from the hydrogen peroxide vapor decomposition device, and the storage unit 220 includes an oxygen sensor 230.

More specifically, first, a certain amount of gas inside the sterilization chamber 110 made of water vapor and hydrogen peroxide vapor is moved to the sampling unit 200.

Next, in the process of moving a certain amount of the gas, by the hydrogen peroxide vapor decomposition apparatus 210 of the sampling unit 200, the hydrogen peroxide vapor (H ₂ O ₂ ) is water vapor (H ₂ O) and oxygen (O ₂ ).

Next, water vapor (H ₂ O) and oxygen (O ₂ ) decomposed from the hydrogen peroxide vapor decomposition device are stored in the storage unit 220.

Next, the oxygen sensor 230 of the storage unit 220 measures the concentration of the oxygen (O ₂ ), in the present invention, through the concentration of the oxygen (O ₂ ) measured in this way, hydrogen peroxide inside the sterilization chamber You want to measure the concentration of steam.

That is, in the present invention, through the first humidity sensor 111 and the oxygen sensor 230, to measure the concentration of hydrogen peroxide inside the sterilization chamber 110.

At this time, the oxygen sensor 230 may use an oxygen sensor in the manner shown in Table 4 below, but the type of the oxygen sensor is not limited in the present invention.

On the other hand, by the hydrogen peroxide vapor decomposition device 210, the hydrogen peroxide vapor (H ₂ O ₂ ) is decomposed into water vapor (H ₂ O) and oxygen (O ₂ ), can be easily decomposed using a known catalyst. For example, reference may be made to Korean Patent Application No. 10-2016-0148320, which is obvious in the art, and thus detailed description will be omitted.

At this time, the hydrogen peroxide vapor (H ₂ O ₂ ) is decomposed into water vapor (H ₂ O) and oxygen (O ₂ ) is decomposed by the following reaction formula 1.

2H ₂ O ₂ → 2H ₂ O + O ₂ … … … Scheme (1)

This will be described later.

Subsequently, referring to FIGS. 1 and 2, in the present invention, the first humidity sensor 111 corresponds to a sensor whose relative humidity is determined by the amount of water vapor and the amount of hydrogen peroxide.

More specifically, the first humidity sensor may be a moisture absorption type humidity sensor, a saturation type humidity sensor or an absorption type humidity sensor, and more specifically, the moisture absorption type humidity sensor may be capacitive. Humidity sensor, resistance change type humidity sensor, hair hygrometer, carbon film hygrometer, electric hygrometer, color hygrometer, and the humidity sensor by the saturation method may be a dew point hygrometer, a lithium chloride dew point hygrometer, and also by an absorption method. The humidity sensor may be a volume-type hygrometer, an electrolysis-type hygrometer, and a weight-type hygrometer.

Meanwhile, as described above, in the present invention, the first humidity sensor 111 is a sensor whose relative humidity is determined by the amount of water vapor and the amount of hydrogen peroxide.

At this time, the principle of measuring the concentration of hydrogen peroxide using a sensor for measuring the relative humidity of water, such as the above-described first humidity sensor, VHP (highly concentrated hydrogen peroxide vapor) vapor pressure to the measurement sensor as the principle of measuring the relative humidity of the water It is measured by the degree of damping, etc.

In particular, it is very important to use a capacitive humidity sensor that the relative dielectric constant has the same value of water and hydrogen peroxide, so it can be directly substituted for use.

That is, since the method of measuring the relative humidity of the water and the method of measuring the relative saturation of the VHP are the same, the first humidity sensor, such as the capacitive humidity sensor, can determine the relative humidity by the amount of water vapor and the amount of hydrogen peroxide. will be.

On the other hand, in general, a humidity sensor is a sensor that detects humidity in an object, and the concept of the humidity includes well-known relative humidity and absolute humidity.

More specifically, absolute humidity refers to the mass of actual water vapor contained in 1 ℓ of air, and relative humidity is the percentage of the actual water vapor contained in the air divided by the maximum amount of water vapor the air can contain under a given temperature and air pressure. to be.

For example, 1 m 3 of air at 37 ° C. at 1 atm can contain 44 g of water vapor. If air with the same air pressure and temperature currently has 11 g of water vapor, the relative humidity is 25% (11 g. / 44g × 100).

That is, such a humidity sensor is well known as a sensor that detects the amount of water vapor contained in air.

At this time, the typical types of humidity sensors include capacitive humidity sensors and resistance change humidity sensors.

First, the resistance change type humidity sensor uses a characteristic in which the resistance changes according to the amount of moisture in the moisture absorbing film in response to the change in humidity to obtain a change signal by applying an alternating current. Can be classified.

For example, in the case of a polymer type in which the moisture absorbent is a polymer, moisture and polymer are combined in air to generate ions, and electrical conductivity occurs. In the case of a ceramic type in which the moisture absorbent is ceramic, moisture adsorbed on the porous surface of the moisture absorbent material The ruler separates the ions and creates electrical conductivity.

That is, the concentration of ions is changed according to the change in the relative humidity, which is measured by the change in the impedance of the sensor element to detect the relative humidity, and the conversion circuit that obtains the electrical signal from the sensor is simple, thereby miniaturizing and costly. .

Since the resistance change type humidity sensor is a well-known humidity sensor, a detailed description will be omitted below, for example, Korean Utility Model Application No. 20-1998-0026410 and Korean Patent Application No. 10-2010-0000557 And the like.

For example, the resistance change type humidity sensor may be formed by sputtering a platinum (Pt) thin film on an upper surface of a sintered alumina substrate to form a pattern in an electrode shape, and applying a moisture-sensitive polymer to the upper surface of the platinum thin film pattern.

Next, the capacitive humidity sensor has a lower electrode on the substrate, and a polymer moisture absorber is uniformly applied to the upper portion of the lower electrode, and the upper electrode has a property that humidity can be introduced to the upper portion of the moisture absorber. It is composed.

Generally, an Au electrode and a moisture-resistant material are used for a glass or ceramic substrate, and the hygroscopic material applied to the sensor includes a cellulose ester compound such as cellulose acetone or a polymer material such as polyvinyl alcohol, polyacrylic, and polyvinyl pyridine. Is used.

The principle of detecting humidity in the capacitive humidity sensor is as follows.

That is, the relative dielectric constant of the polymer material is about 3 in a dry state, while absorbing water molecules (dielectric constant 80) in the air, the relative dielectric constant changes high, and through the change in the relative dielectric constant, the amount of water vapor in the air is reduced. Can be detected.

Since these capacitive humidity sensors are generally well-known humidity sensors, detailed descriptions thereof will be omitted, for example, Korean Patent Application No. 10-2007-0135890 and Korean Patent Application No. 10-2012-0027010. You can refer to

For example, the capacitive humidity sensor includes: a lower electrode formed on a substrate; A moisture absorbing layer applied on the lower electrode to adsorb and desorb moisture; And it may include a plurality of upper electrodes formed on the moisture-sensitive layer.

As described above, the humidity sensor, that is, the capacitive type humidity sensor and the resistance change type humidity sensor are well known as sensors for detecting the amount of water vapor contained in air.

However, the applicant has confirmed that in the case of the capacitive humidity sensor, the numerical value detected is changed not only by the amount of water vapor, but also by the amount of hydrogen peroxide, and in view of this, the first humidity sensor 111 and the oxygen concentration Through the measurement sensor 230, a method for measuring the concentration of hydrogen peroxide inside the sterilization chamber 110 was developed.

In the case of the capacitive humidity sensor, the value detected not only by the amount of water vapor but also by the amount of hydrogen peroxide is changed as follows.

4 is a graph showing the reaction of the capacitive humidity sensor in the sterilization device.

That is, in the present invention, in order to confirm that the concentration of hydrogen peroxide can be measured through the capacitive humidity sensor, the reaction of the capacitive humidity sensor in the process of sterilization in the sterilization device was measured.

Referring to FIG. 4, a process of concentrating hydrogen peroxide water while evaporating hydrogen peroxide water through a concentration module while evacuating the chamber was performed. (50 sec to 300 sec)

Thereafter, it can be seen that as the hydrogen peroxide concentrated at a high concentration diffuses into the sterilization chamber, the pressure in the sterilization chamber is increasing, and the relative humidity of the capacitive humidity sensor is measured near 100% in proportion to this. (300 sec to 450 sec)

At this time, when the temperature of the vacuumed sterilization chamber is 50 ° C, in order to achieve a relative humidity of 100%, the pressure of only water vapor must exceed 120 mb, but the pressure of the sterilization chamber injected only with hydrogen peroxide vapor (VHP) is 12 Corresponds to ~ 15mb.

That is, for example, in order for the relative humidity of the capacitive humidity sensor to be 100%, in the situation where the temperature of the sterilization chamber is 50 ° C, the pressure value inside the sterilization chamber must exceed 120mb even with the pressure of only water vapor. However, in reality, it was only 12 to 15 mb of the sterilization chamber.

After all, since the relative humidity of the capacitive humidity sensor is 100%, it can be confirmed that the relative humidity was not determined by the amount of water vapor, but other factors, that is, the amount of hydrogen peroxide, influenced the determination of the relative humidity. , Therefore, it can be confirmed that the relative humidity is determined not only by the amount of water vapor, but also by the amount of hydrogen peroxide.

Therefore, it can be confirmed that the relative humidity detected by the capacitive humidity sensor was determined by the amount of water vapor and the amount of hydrogen peroxide.

Hereinafter, the method for measuring the concentration of hydrogen peroxide according to the present invention is as follows.

5 is a flow chart for explaining a method for measuring hydrogen peroxide concentration according to a first embodiment of the present invention.

At this time, the method for measuring the concentration of hydrogen peroxide according to the first embodiment of the present invention corresponds to a method for measuring the concentration of hydrogen peroxide when a separate oxygen is contained as an external gas inside the sterilization chamber, as will be described later. In the inside, when the oxygen is not included as an external gas or when the content of the oxygen contained separately is negligible, the hydrogen peroxide concentration can be measured through the second embodiment.

Referring to FIG. 5, the method for measuring the concentration of hydrogen peroxide according to the first embodiment of the present invention includes detecting the first relative humidity of the gas inside the sterilization chamber by the first humidity sensor (S210).

At this time, the first humidity sensor may be typically a capacitive humidity sensor, and the gas inside the sterilization chamber is hydrogen peroxide vapor and water vapor, as described above, the capacitive humidity sensor has an amount of water vapor and hydrogen peroxide. The relative humidity is determined according to the amount of, and thus, the first relative humidity corresponds to the relative humidity according to the amount of water vapor and the amount of hydrogen peroxide.

Next, in the method for measuring the concentration of hydrogen peroxide according to the first embodiment of the present invention, through the oxygen sensor 230 of the sampling unit 200 located in the region outside the sterilization chamber, hydrogen peroxide vapor in the gas inside the sterilization chamber is And calculating the oxygen sensor measurement value by the decomposed and formed oxygen (S220).

More specifically, as described above, the sampling unit 200 includes a hydrogen peroxide vapor decomposition device 210 for decomposing the hydrogen peroxide vapor; And a storage unit 220 for storing water vapor (H ₂ O) and oxygen (O ₂ ) decomposed from the hydrogen peroxide vapor decomposition device, and the storage unit 220 includes an oxygen sensor 230.

At this time, the process of calculating the oxygen sensor measurement value is as follows.

(1) A certain amount of gas inside the sterilization chamber 110, which is composed of steam and hydrogen peroxide vapor, is moved to the sampling unit 200.

(2) In the process of moving a certain amount of the gas, by the hydrogen peroxide vapor decomposition device 210 of the sampling unit 200, the hydrogen peroxide vapor (H ₂ O ₂ ) is water vapor (H ₂ O) and oxygen (O ₂ ).

(3) Water vapor (H ₂ O) and oxygen (O ₂ ) decomposed from the hydrogen peroxide vapor decomposition device are stored in the storage unit 220.

(4), the oxygen sensor 230 of the storage unit 220 calculates the oxygen sensor measurement value by the oxygen (O ₂ ).

In the present invention, the concentration of the hydrogen peroxide vapor in the sterilization chamber is measured through the oxygen sensor measurement value calculated through the oxygen sensor 230.

Next, the method for measuring the concentration of hydrogen peroxide according to the first embodiment of the present invention includes deriving a ratio of the relative humidity exerted by the hydrogen peroxide vapor at the first relative humidity through the measured oxygen sensor (230) ).

That is, in the present invention, the ratio of the relative humidity exerted by the hydrogen peroxide vapor at the first relative humidity is derived through the oxygen sensor measurement value calculated through the oxygen sensor 230, and finally, the hydrogen peroxide vapor inside the sterilization chamber. The concentration of can be measured.

On the other hand, the measured value measured by the oxygen sensor 230 is measured as a ratio of the total air pressure of the storage unit 220 to the oxygen pressure in the storage unit 220, that is, the following equation (1) Can be expressed.

…… 수학식(1)

… … Equation (1)

On the other hand, as described above, the hydrogen peroxide vapor (H ₂ O ₂ ) is decomposed into water vapor (H ₂ O) and oxygen (O ₂ ) is decomposed by the following Reaction Scheme 1.

2H ₂ O ₂ → 2H ₂ O + O ₂ … … … Scheme (1)

At this time, a certain amount of the gas inside the sterilization chamber 110, which is made of water vapor and hydrogen peroxide vapor, moves to the sampling unit 200, so that the hydrogen peroxide vapor is decomposed into water vapor and oxygen, and thus, the storage unit In 220, an amount of water vapor that is larger than the amount of water vapor that has moved to the sampling unit is stored, and oxygen present in which hydrogen peroxide vapor is decomposed is stored.

If this is numerically explained, it is as follows.

Table 5 below shows the saturated vapor pressure according to the temperature.

In this situation, it is assumed that the atmospheric temperature in the sterilization chamber is 45 ° C, and the first relative humidity of the gas inside the sterilization chamber detected by the first humidity sensor is assumed to be 80%.

At this time, since the relative humidity is determined according to the amount of water vapor and the amount of hydrogen peroxide vapor, in the assumption that the first relative humidity is 80%, what is the ratio of relative humidity exerted by water vapor, and hydrogen peroxide vapor It is not possible to confirm the ratio of the relative humidity exerted by, and in the present invention, it is intended to confirm the ratio of the relative humidity exerted by the hydrogen peroxide vapor in the proportion of the first relative humidity through the above-described oxygen sensor. .

However, for convenience of description, it is assumed that the ratio of relative humidity caused by water vapor: the relative humidity caused by hydrogen peroxide vapor is 30%: 50%.

At this time, since the ratio of the relative humidity exerted by water vapor is 30%, the saturated water vapor pressure at a temperature of 45 ° C. in the sterilization chamber is 95.6 mb, so the pressure due to water vapor is 28.7 mb (95.6 mb * 0.3). it means.

In addition, since the relative humidity ratio caused by the hydrogen peroxide vapor is 30%, the pressure of the hydrogen peroxide vapor is 4.9mb (9.8mb * 0.5) because the saturated hydrogen peroxide pressure at the atmospheric temperature in the sterilization chamber is 45 ° C is 9.8mb. ).

When the gas in the sterilization chamber under such conditions, that is, water vapor and hydrogen peroxide vapor moves to the sampling unit, and the hydrogen peroxide vapor decomposes, the pressure due to water vapor and the pressure due to oxygen in the sampling unit changes as follows.

division Before disassembly After disassembly Pressure by water vapor 28.7mb 33.6mb Pressure by hydrogen peroxide vapor 4.9mb - Oxygen pressure - 2.45mb

In the above table, pre-decomposition means pressure by gas in the sterilization chamber, and post-decomposition means pressure in the storage portion of the sampling unit.

As can be seen from Table 6, before the decomposition, the pressure of the hydrogen peroxide vapor was 4,9 mb, but the hydrogen peroxide vapor was decomposed as shown in the following reaction formula (1) while moving to the storage of the sampling section. There is no pressure by steam.

2H ₂ O ₂ → 2H ₂ O + O ₂ … … … Scheme (1)

In addition, according to the reaction formula (1), as the hydrogen peroxide vapor decomposes, the content of water vapor (H ₂ O) increases, and at this time, 2 mol of hydrogen peroxide vapor becomes 2 mol of water vapor, so the pressure by hydrogen peroxide vapor is 4.9 mb. As much as possible, the pressure due to water vapor increases, and thus, the pressure due to water vapor after decomposition corresponds to 33.6 mb (28.7 mb + 4.9 mb).

In addition, according to the reaction formula (1), as the hydrogen peroxide vapor decomposes, oxygen (O ₂ ) is generated, and at this time, 2 mol of hydrogen peroxide vapor becomes 1 mol of oxygen, so the pressure of hydrogen peroxide vapor is 4.9 mb 1 / As much as 2, the pressure caused by oxygen is generated, and thus, the pressure caused by oxygen after decomposition corresponds to 2.45mb (4.9mb * 1/2).

At this time, as described above, the measured value measured by the oxygen sensor 230 is measured as a ratio of the total atmospheric pressure of the storage unit 220 to the oxygen pressure in the storage unit 220, that is, the following mathematical It can be expressed by equation (1).

…… 수학식(1)

… … Equation (1)

That is, since the oxygen pressure (Po ₂ ) in the storage section is 2.45 mb, and the total air pressure (Pc) in the storage section is 36.05 mb (33.6 mb + 2.45 mb), the measured value (Mo) measured by the oxygen sensor is 6.8%. Corresponds to

At this time, since the measured value (Mo) measured by the oxygen sensor corresponds to the measured value, in the end, if this process is calculated in reverse, the ratio of the relative humidity exerted by water vapor, which was a presumed condition: by hydrogen peroxide vapor A relative humidity ratio of 30%: 50% can be derived. Therefore, in the assumption that the first relative humidity is 80%, what is the ratio of relative humidity exerted by water vapor and relative exerted by hydrogen peroxide vapor? You can see what the percentage of humidity is.

As a result, when the first relative humidity is 80%, the relative humidity ratio exerted by the hydrogen peroxide vapor corresponds to 50%, so that the concentration of the hydrogen peroxide vapor can be measured.

On the other hand, according to the above contents, in the above-described equation (1), the oxygen pressure (Po ₂ ) in the storage means the atmospheric pressure of oxygen generated by the decomposition of hydrogen peroxide vapor introduced from the sterilization chamber, In Equation (1), the total air pressure Pc of the storage unit corresponds to the sum of the oxygen pressure Po ₂ in the storage unit and the air pressure of the water vapor in the storage unit (P _H2O ).

In addition, the air pressure (P _H2O ) of the water vapor in the storage unit corresponds to the sum of "the air pressure of the water vapor in the sterilization chamber" and the "air pressure of the water vapor generated by decomposition of the hydrogen peroxide vapor flowing in the sterilization chamber".

As described above, in the present invention, the ratio of the relative humidity exerted by the hydrogen peroxide vapor in the first relative humidity can be derived through the measured value of the oxygen sensor.

Next, the method for measuring the concentration of hydrogen peroxide according to the first embodiment of the present invention includes calculating the concentration of hydrogen peroxide vapor in the sterilization chamber through a ratio of relative humidity exerted by hydrogen peroxide vapor at the first relative humidity. (S240).

Referring to the step of calculating the concentration of hydrogen peroxide vapor in the sterilization chamber, first, the first relative humidity detected by the first humidity sensor is 80%, and at this time, the first relative humidity derived through step S230. It is assumed that the ratio of relative humidity exerted by hydrogen peroxide vapor is 50%.

In addition, it is assumed that the temperature in the sterilization chamber is 45 ° C, the air pressure is 1000mb, and the volume of the sterilization chamber is 1000L.

At this time, since the ratio of the relative humidity exerted by the hydrogen peroxide vapor in the first relative humidity is 50%, the ratio of the 50% corresponds to the ratio of the relative humidity determined by the amount of the hydrogen peroxide vapor.

That is, the relative humidity reacted by the hydrogen peroxide vapor in the air in the sterilization chamber corresponds to 50%.

At this time, since the temperature in the sterilization chamber is 45 ° C, referring to Table 5 above, the saturated vapor pressure of hydrogen peroxide at a temperature of 45 ° C corresponds to 9.8mb.

On the other hand, in general, relative humidity (%) = (current water vapor pressure / saturated water vapor pressure) x 100, therefore, the hydrogen peroxide vapor pressure x in the sterilization chamber is 50% = (x mb / 9.8mb) x 100%, so hydrogen peroxide It corresponds to the vapor pressure x = 4.9mb.

At this time, since the air pressure in the sterilization chamber is 1000 mb, the gas concentration of the hydrogen peroxide vapor corresponds to (4.9mb / 1000mb) x 100% = 0.49%.

In terms of weight per volume, the ideal gas volume at 45 ° C. corresponds to (22.4L / mol (at 273k) × (273 + 45)) / 273 = 26.09 L / mol.

Therefore, dividing the gas concentration of the hydrogen peroxide vapor by 0.49% by the ideal gas volume at the corresponding temperature, that is, corresponds to 0.49% / 26.09 (L / mol) = 0.0188 mol%, thus, the hydrogen peroxide vapor in the 1000L volume sterilization chamber Present at 0.000188 mol / L.

At this time, since the molecular weight of hydrogen peroxide is 34 g / mol, it can be expressed as a concentration of 6.4 mg / L.

In the manner described above, the concentration of hydrogen peroxide vapor in the sterilization chamber can be calculated.

As described above, in concentrating hydrogen peroxide water with high concentration hydrogen peroxide water and using it as a sterilizing agent, it is not easy to measure the concentration of the hydrogen peroxide in the sterilization chamber of the sterilization apparatus.

However, in the present invention, the first relative humidity of the gas inside the sterilization chamber is detected by the first humidity sensor, and measured by the oxygen sensor measured by the oxygen sensor of the sampling unit located outside the sterilization chamber. By deriving the ratio of the relative humidity exerted by the hydrogen peroxide vapor at the first relative humidity, the concentration of the hydrogen peroxide vapor in the sterilization chamber can be calculated.

On the other hand, as described above, the method for measuring hydrogen peroxide concentration according to the first embodiment of the present invention corresponds to a method for measuring the concentration of hydrogen peroxide when a separate oxygen is contained as an external gas inside the sterilization chamber.

That is, in the present invention, the concentration of the hydrogen peroxide vapor is calculated through the concentration of oxygen. Since it is not possible to determine how much extra oxygen is contained as an external gas in the interior of the sterilization chamber, through the first humidity sensor, the first A process for measuring relative humidity was necessary.

However, when oxygen is not included in the inside of the sterilization chamber or when the content of oxygen contained in the sterilization chamber is negligibly small, the concentration of hydrogen peroxide vapor can be measured directly through the oxygen sensor measurement value. Essay will explain how to do this.

That is, in the second embodiment of the present invention, the concentration of the hydrogen peroxide vapor can be calculated without the first humidity sensor 111 of FIG. 2 described above.

6 is a flow chart for explaining a method for measuring hydrogen peroxide concentration according to a second embodiment of the present invention.

At this time, as described above, the hydrogen peroxide concentration measurement method according to the second embodiment of the present invention, the inside of the sterilization chamber, when the external gas does not contain a separate oxygen or the content of oxygen contained separately may be negligible As a method for measuring the hydrogen peroxide concentration in the case of a very small amount, when the oxygen is not contained in the inside of the sterilization chamber or as an external gas or when the content of oxygen contained separately is negligible, the sterilization chamber By vacuum exhaust, it may mean a case where the vacuum degree of the sterilization chamber is lowered to 10 torr or less.

Referring to FIG. 6, the method for measuring the concentration of hydrogen peroxide according to the second embodiment of the present invention, through the oxygen sensor 230 of the sampling unit 200 located in the area outside the sterilization chamber, hydrogen peroxide in the gas inside the sterilization chamber And calculating an oxygen sensor measurement value by oxygen formed by the decomposition of the steam (S310).

More specifically, as described above, the sampling unit 200 includes a hydrogen peroxide vapor decomposition device 210 for decomposing the hydrogen peroxide vapor; And a storage unit 220 for storing water vapor (H ₂ O) and oxygen (O ₂ ) decomposed from the hydrogen peroxide vapor decomposition device, and the storage unit 220 includes an oxygen sensor 230.

At this time, the process of calculating the oxygen sensor measurement value is as follows.

(1) A certain amount of gas inside the sterilization chamber 110, which is composed of steam and hydrogen peroxide vapor, is moved to the sampling unit 200.

(2) In the process of moving a certain amount of the gas, by the hydrogen peroxide vapor decomposition device 210 of the sampling unit 200, the hydrogen peroxide vapor (H ₂ O ₂ ) is water vapor (H ₂ O) and oxygen (O ₂ ).

(3) Water vapor (H ₂ O) and oxygen (O ₂ ) decomposed from the hydrogen peroxide vapor decomposition device are stored in the storage unit 220.

(4), the oxygen sensor 230 of the storage unit 220 calculates the oxygen sensor measurement value by the oxygen (O ₂ ).

In the present invention, the concentration of the hydrogen peroxide vapor in the sterilization chamber is measured through the oxygen sensor measurement value calculated through the oxygen sensor 230.

Next, the method for measuring the concentration of hydrogen peroxide according to the second embodiment of the present invention includes calculating the concentration of hydrogen peroxide vapor in the sterilization chamber through the measured value of the oxygen sensor (S320).

That is, in the present invention, the concentration of the hydrogen peroxide vapor in the sterilization chamber may be measured through the oxygen sensor measurement value calculated through the oxygen sensor 230.

On the other hand, the measured value measured by the oxygen sensor 230 is measured as a ratio of the total air pressure of the storage unit 220 to the oxygen pressure in the storage unit 220, that is, the following equation (1) Can be expressed.

…… 수학식(1)

… … Equation (1)

On the other hand, as described above, the hydrogen peroxide vapor (H ₂ O ₂ ) is decomposed into water vapor (H ₂ O) and oxygen (O ₂ ) is decomposed by the following Reaction Scheme 1.

2H ₂ O ₂ → 2H ₂ O + O ₂ … … … Scheme (1)

At this time, a certain amount of the gas inside the sterilization chamber 110, which is made of water vapor and hydrogen peroxide vapor, moves to the sampling unit 200, so that the hydrogen peroxide vapor is decomposed into water vapor and oxygen, and thus, the storage unit In 220, an amount of water vapor that is larger than the amount of water vapor that has moved to the sampling unit is stored, and oxygen present in which hydrogen peroxide vapor is decomposed is stored.

Since this is the same as the first embodiment described above, a detailed description will be omitted below.

In this situation, when the gas in the sterilization chamber, that is, water vapor and hydrogen peroxide vapor moves to the sampling unit, and the hydrogen peroxide vapor decomposes, the pressure by the water vapor and the pressure by oxygen in the sampling unit are the same as in Table 6 above. As in Table 7 below, it will change.

division Before disassembly After disassembly Pressure by water vapor 28.7mb 33.6mb Pressure by hydrogen peroxide vapor 4.9mb - Oxygen pressure - 2.45mb

In the above table, pre-decomposition means pressure by gas in the sterilization chamber, and post-decomposition means pressure in the storage portion of the sampling unit.

As can be seen from Table 7, the pressure due to the hydrogen peroxide vapor before decomposition was 4,9 mb, but the hydrogen peroxide vapor was all decomposed as shown in the following reaction formula (1) as it moved to the storage of the sampling section. There is no pressure by steam.

2H ₂ O ₂ → 2H ₂ O + O ₂ … … … Scheme (1)

In addition, according to the reaction formula (1), as the hydrogen peroxide vapor decomposes, the content of water vapor (H ₂ O) increases, and at this time, 2 mol of hydrogen peroxide vapor becomes 2 mol of water vapor, so the pressure by hydrogen peroxide vapor is 4.9 mb. As much as possible, the pressure due to water vapor increases, and thus, the pressure due to water vapor after decomposition corresponds to 33.6 mb (28.7 mb + 4.9 mb).

In addition, according to the reaction formula (1), as the hydrogen peroxide vapor decomposes, oxygen (O ₂ ) is generated, and at this time, 2 mol of hydrogen peroxide vapor becomes 1 mol of oxygen, so the pressure of hydrogen peroxide vapor is 4.9 mb 1 / As much as 2, the pressure caused by oxygen is generated, and thus, the pressure caused by oxygen after decomposition corresponds to 2.45mb (4.9mb * 1/2).

On the other hand, as described above, in the second embodiment of the present invention, since it is assumed that the case where the separate oxygen is not included in the inside of the sterilization chamber or the content of the separately contained oxygen is negligibly small, According to the reaction formula (1), since the pressure generated by oxygen corresponds to the pressure due to the decomposition of the hydrogen peroxide vapor, eventually, it can be determined that twice the pressure value generated by oxygen is the pressure value caused by hydrogen peroxide vapor. have.

Therefore, in the second embodiment of the present invention, the concentration of the hydrogen peroxide vapor can be calculated through the measured value measured by the oxygen sensor 230 without the first humidity sensor 111 of FIG. 2 described above. .

For convenience of explanation, assuming that the pressure value by water vapor in the sterilization chamber is “a”, and the pressure value by hydrogen peroxide vapor is “b”, assuming that the pressure value in the sterilization chamber is “P”, P = a + b, which corresponds to a measurable value.

That is, as in Table 7 above, P = 28.7 + 4.9 = 33.6 mb.

In addition, in the above equation (1), assuming that the oxygen sensor measurement value is “C”, according to the above equation (1), the oxygen pressure in the storage unit corresponds to b / 2.

The total atmospheric pressure of the storage unit corresponds to the sum of the oxygen pressure in the storage unit (Po ₂ ) and the atmospheric pressure of the water vapor in the storage unit (P _H2O ). At this time, the atmospheric pressure of the water vapor in the storage unit (P _H2O ) is, "In the sterilization chamber Since it corresponds to the sum of the "atmospheric pressure of water vapor" and the "atmospheric pressure of water vapor generated by the decomposition of hydrogen peroxide vapor introduced from the sterilization chamber", the air pressure (P _H2O ) of the water vapor in the storage section corresponds to "a + b". .

Therefore, in the above equation (1), the oxygen sensor measurement value “C” can be expressed as the following equation (2).

…… 수학식 (2)

… … Equation (2)

At this time, as described above, since P = a + b, it corresponds to a = P-b, and substituting this into Equation (2) to arrange the b values, it is as shown in Equation (3) below.

…… 수학식 (3)

… … Equation (3)

Meanwhile, as described above, the oxygen sensor measurement value C is a measured value, and the pressure value “P” inside the sterilization chamber corresponds to a measurable value. Therefore, in the present invention, the oxygen sensor measurement value , b value, the pressure value by hydrogen peroxide vapor can be calculated.

For example, when the oxygen sensor measurement value C is 6.8% (0.068), and as shown in Table 7 above, when P = 28.7 + 4.9 = 33.6 mb, the b value (hydrogen peroxide vapor pressure) corresponds to 4.92mb. .

At this time, assuming that the air pressure in the sterilization chamber is 1000mb, the gas concentration of the hydrogen peroxide vapor corresponds to (4.9mb / 1000mb) × 100% = 0.49%.

In terms of weight per volume, the ideal gas volume at 45 ° C. corresponds to (22.4L / mol (at 273k) × (273 + 45)) / 273 = 26.09 L / mol.

Therefore, dividing the gas concentration of the hydrogen peroxide vapor by 0.49% by the ideal gas volume at the corresponding temperature, that is, corresponds to 0.49% / 26.09 (L / mol) = 0.0188 mol%, thus, the hydrogen peroxide vapor in the 1000L volume sterilization chamber Present at 0.000188 mol / L.

At this time, since the molecular weight of hydrogen peroxide is 34 g / mol, it can be expressed as a concentration of 6.4 mg / L.

In the manner described above, the concentration of hydrogen peroxide vapor in the sterilization chamber can be calculated.

As described above, in concentrating hydrogen peroxide water with high concentration hydrogen peroxide water and using it as a sterilizing agent, it is not easy to measure the concentration of the hydrogen peroxide in the sterilization chamber of the sterilization apparatus.

However, in the present invention, the concentration of the hydrogen peroxide vapor can be measured directly through the measured oxygen sensor when the oxygen content of the separately contained oxygen is not included in the inside of the sterilization chamber or is negligible. You can.

Although the embodiments of the present invention have been described with reference to the above and the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can implement the present invention in other specific forms without changing its technical spirit or essential features. You will understand that there is. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

Claims (8)

In the sterilization apparatus including a sterilization chamber,
It includes a sampling portion located in a certain area outside of the sterilization chamber,
The sampling unit, hydrogen peroxide steam decomposition device; And a storage unit for storing water vapor and oxygen decomposed from the hydrogen peroxide steam decomposition apparatus,
The storage unit sterilization apparatus comprising an oxygen sensor. According to claim 1,
The sterilization chamber, the sterilization apparatus further comprises a first humidity sensor located in a certain area inside the sterilization chamber. According to claim 2,
The first humidity sensor detects the first relative humidity by the amount of hydrogen peroxide vapor and the amount of water vapor, and the oxygen sensor calculates an oxygen sensor measurement value by oxygen decomposed from the hydrogen peroxide vapor decomposition device. Sterilization device Detecting a first relative humidity of the gas inside the sterilization chamber by the first humidity sensor;
Calculating an oxygen sensor measurement value by oxygen formed by decomposition of hydrogen peroxide vapor in a gas inside the sterilization chamber through an oxygen sensor of a sampling unit located in an area outside the sterilization chamber;
Deriving a ratio of the relative humidity exerted by the hydrogen peroxide vapor at the first relative humidity through the measured oxygen sensor; And
And calculating the concentration of hydrogen peroxide vapor in the sterilization chamber through the ratio of relative humidity exerted by the hydrogen peroxide vapor at the first relative humidity. The method of claim 4,
The sampling unit, hydrogen peroxide steam decomposition device; And a storage unit for storing water vapor and oxygen decomposed from the hydrogen peroxide vapor decomposition apparatus, and the storage unit includes the oxygen sensor,
The oxygen sensor measurement value, hydrogen peroxide concentration measurement method, characterized in that the following equation (1).

… … Equation (1) The method of claim 5,
In the equation (1), the oxygen pressure (Po ₂ ) in the storage unit means the atmospheric pressure of oxygen generated by the decomposition of the hydrogen peroxide vapor introduced from the sterilization chamber, and the total atmospheric pressure (Pc) of the storage unit is the Corresponds to the sum of the oxygen pressure (Po ₂ ) in the storage unit and the air pressure (P H _{2 O} ) of water vapor in the storage unit,
The air pressure (P _H2O ) of the water vapor in the storage unit corresponds to a sum of the values of "air pressure of water vapor in the sterilization chamber" and "air pressure of water vapor generated by decomposition of the hydrogen peroxide vapor introduced from the sterilization chamber". Hydrogen peroxide concentration measurement method. Calculating an oxygen sensor measurement value by oxygen formed by decomposing hydrogen peroxide vapor in a gas inside the sterilization chamber through an oxygen sensor of a sampling unit located in an area outside the sterilization chamber; And
And calculating the concentration of hydrogen peroxide vapor in the sterilization chamber through the measurement of the oxygen sensor. The method of claim 7,
The pressure value by water vapor in the sterilization chamber is "a", the pressure value by hydrogen peroxide vapor is "b", the pressure value inside the sterilization chamber is "P", the oxygen sensor measurement value is "C", P = When a + b, the b value is a hydrogen peroxide concentration measurement method, characterized in that the following equation (3).

… … Equation (3)

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