KR102438554B1 - A sterilizing apparatus and a method for measuring concentration of hydrogen peroxide of the sterilizing apparatus - Google Patents

Abstract

The present invention provides a sterilization apparatus including a sterilization chamber, wherein the sterilization chamber includes a humidity sensor unit fastened to a predetermined area of the sterilization chamber, and the humidity sensor unit includes: a body case; a sensing unit located in one direction of the body case; and a cover case covering the sensing unit, wherein the sensing unit includes: a sensing element unit including a humidity sensor; and a temperature sensor positioned adjacent to the sensing element part or positioned in the sensing element part, wherein the humidity sensor part further comprises a heating element part for controlling the temperature of the sensing part area It relates to a sterilization apparatus that, in the process of the operation of the humidity sensor unit, the temperature of the humidity sensor unit, more specifically, the temperature of the sensing unit region is controlled to be higher than the temperature of the sterilization chamber, whereby the sensing element unit of the humidity sensor unit It can prevent moisture from adsorbing.

Description

A sterilization apparatus and a method for measuring the concentration of hydrogen peroxide in the sterilization apparatus

The present invention relates to a sterilization apparatus and a method for measuring the concentration of hydrogen peroxide in the sterilization apparatus, and more particularly, a sterilization apparatus capable of accurately detecting the concentration of hydrogen peroxide in hydrogen peroxide solution by a simple method, and measurement of the concentration of hydrogen peroxide in the sterilization apparatus it's about how

Medical devices are usually sterilized by high pressure steam sterilization using saturated steam under high pressure or ethylene oxide gas sterilization using chemical substances such as ethylene oxide that do not damage devices or materials weak to heat.

However, since the high-pressure steam sterilizer sterilizes at a high temperature of 120 degrees or more, the medical instruments made of synthetic resin that are being developed recently are deformed, and the medical instruments made of steel become blunt and their lifespan is greatly shortened. . In particular, high-priced medical devices, instruments, and devices, which are increasing due to the development of the latest surgical technology, are sensitive to heat or moisture and may be damaged during sterilization and reprocessing, so autoclaving may be an unsuitable sterilization method.

Ethylene oxide gas sterilizer that can minimize such equipment damage can be sterilized at low temperature, but ethylene oxide remains in the object to be sterilized or carcinogenic and toxic substances can be generated due to reaction products resulting from it, so ventilation for at least 12 hours after sterilization time is required In addition, there is a report that ethylene oxide gas itself has a high risk of explosion and can act as a genetically toxic substance that can cause mutation, and it is regulated as a carcinogen, so its use requires a lot of attention.

On the other hand, the sterilization method using hydrogen peroxide steam has a short sterilization time of 30 to 60 minutes at a temperature of 40 to 50 degrees Celsius, and the substances discharged to the atmosphere after sterilization are water and oxygen so that it is harmless to the human body or the environment. Various disadvantages of the sterilizer can be supplemented.

However, in the aqueous hydrogen peroxide solution used to generate hydrogen peroxide vapor, water vaporizes and diffuses before hydrogen peroxide in the vaporization process, making it difficult to sufficiently diffuse the hydrogen peroxide. This is because water evaporates more quickly because of its higher vapor pressure than hydrogen peroxide, and because the molecular weight of water is lower than that of hydrogen peroxide, water vapor diffuses into the gas phase faster than hydrogen peroxide vapor.

Due to these characteristics, when the aqueous hydrogen peroxide solution is evaporated in the space surrounding the product to be sterilized, the water reaches the product to be sterilized at a higher concentration than the hydrogen peroxide.

Water vapor diffuses more rapidly into diffusion-constrained spaces, such as small crevices or long, narrow lumens, inhibiting the permeation of hydrogen peroxide vapor. That is, water reaches the product to be sterilized before hydrogen peroxide, and sterilization is not performed properly.

For effective sterilization, it is preferable to use a more concentrated aqueous hydrogen peroxide solution, but when the concentration of the aqueous hydrogen peroxide solution is 60% by weight or more, it is practically difficult to handle, such as transportation, storage, etc.

For this reason, it is common to use an aqueous solution of hydrogen peroxide having a handleable concentration of 60% by weight or less as a sterilizing agent by concentrating an aqueous solution of hydrogen peroxide with a high concentration of 95% by weight or more through each step concentration process, for example, with a high concentration of 95% by weight or more. The sterilization effect can be improved.

At this time, in using the hydrogen peroxide solution as a sterilizing agent by concentrating the hydrogen peroxide solution with a high concentration hydrogen peroxide solution, it is not easy to measure the concentration of the hydrogen peroxide in the sterilization chamber of the sterilization apparatus.

In particular, since high-concentration hydrogen peroxide gas easily condenses, a means for directly measuring the concentration is not common, and the gas concentration is usually measured by the absorption bottle method.

However, in this case, there is a problem that it cannot be used as a means to grasp a change in the gas concentration in a short time or to continuously monitor the gas concentration.

Also, in many cases, as a means of continuously monitoring the gas quality of the sterilization device, it is necessary to complexly monitor the supply status (temperature, amount, pressure, etc.) of hot air for gas generation and hydrogen peroxide water to determine the quality of the gas. In general, this method is also complicated and lacks reliability.

Korean Patent Publication No. 10-2006-52161

The problem to be solved by the present invention is that the present invention was developed to solve the above problems, and it is possible to accurately detect the concentration of hydrogen peroxide in hydrogen peroxide solution by a simple method without oversize or complexity of the sterilization apparatus. To provide a sterilization apparatus and a method for measuring the concentration of hydrogen peroxide in the sterilization apparatus.

Objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

In order to solve the above-mentioned problems, the present invention provides a sterilization apparatus including a sterilization chamber, wherein the sterilization chamber includes a humidity sensor unit fastened to a predetermined area of the sterilization chamber, and the humidity sensor unit includes: a body case; a sensing unit located in one direction of the body case; and a cover case covering the sensing unit, wherein the sensing unit includes: a sensing element unit including a humidity sensor; and a temperature sensor positioned adjacent to the sensing element part or positioned in the sensing element part, wherein the humidity sensor part further comprises a heating element part for controlling the temperature of the sensing part area A sterilization device is provided.

In the present invention, the sterilization chamber includes a humidity sensor part fastening part to which the humidity sensor part is fastened, and the humidity sensor part fastening part penetrates into the interior of the sterilization chamber, and the sensing part of the humidity sensor part is inserted. It provides a sterilization device including a secondary insertion hole.

In addition, the present invention provides a sterilization apparatus characterized in that the sensing unit is inserted into the sensing unit insertion hole, located inside the sterilization chamber, and one end of the cover case is also located inside the sterilization chamber. do.

In addition, the present invention, the humidity sensor unit, further comprising a first flange portion located at one end of the body case, the humidity sensor unit fastening portion, extending from the sensing portion insertion hole, to the outside of the sterilization chamber protruding piping; and a second flange portion positioned at the other end of the pipe, wherein the sterilization chamber further comprises a rubber ring positioned between the first flange portion and the second flange portion. provide the device.

In addition, the present invention comprises the steps of controlling the temperature of the sensing unit region of the humidity sensor unit higher than that of the sterilization chamber; and calculating the hydrogen peroxide concentration through the humidity sensor unit.

In the present invention, the humidity sensor unit includes a first humidity sensor unit and a second humidity sensor unit, and the step of controlling the temperature of the sensing unit area of the humidity sensor unit to be higher than that of the sterilization chamber includes the first humidity sensor unit first controlling the temperature of the sensing unit region to be higher than the temperature of the sterilization chamber; and controlling the temperature of the second sensing unit region of the second humidity sensor unit to be higher than the temperature of the sterilization chamber, and calculating the hydrogen peroxide concentration through the humidity sensor unit includes the first relative by the first humidity sensor unit. detecting humidity; detecting a second relative humidity by the second humidity sensor unit; deriving a difference value between the first relative humidity and the second relative humidity; and calculating the concentration of hydrogen peroxide through the difference value.

In addition, the present invention, the step of controlling the temperature of the first sensing unit region of the first humidity sensor unit to be higher than the temperature of the sterilization chamber, through the first temperature sensor, measuring the temperature of the first sensing unit region; comparing the temperature of the first sensing unit region with the temperature of the sterilization chamber; When the temperature of the first sensing unit region is lower than the temperature of the sterilization chamber, by heating the first humidity sensor unit through the first heating element unit, the temperature of the first sensing unit region is higher than the temperature of the sterilization chamber The step of controlling the temperature of the second sensing unit region of the second humidity sensor unit to be higher than the temperature of the sterilization chamber may include: measuring the temperature of the second sensing unit region through a second temperature sensor; comparing the temperature of the second sensing region with the temperature of the sterilization chamber; When the temperature of the second sensing part region is lower than the temperature of the sterilization chamber, by heating the second humidity sensor part through the second heating element part, the temperature of the second sensing part region is higher than the temperature of the sterilization chamber It provides a method for measuring the concentration of hydrogen peroxide, characterized in that the step of controlling.

According to the present invention as described above, by including a first humidity sensor and a second humidity sensor in the sterilization chamber, the relative humidity is detected by each of these sensors, and the concentration of hydrogen peroxide is determined by the difference in these relative humidity. can be easily measured.

In addition, in the present invention, in the process of the operation of the humidity sensor unit, the temperature of the humidity sensor unit, more specifically, the temperature of the sensing unit region is controlled to be higher than the temperature of the sterilization chamber, whereby the humidity sensor unit the sensing element unit Adsorption of moisture can be prevented.

In addition, in the present invention, by preventing moisture from adsorbing to the sensing element portion of the humidity sensor portion, it is possible to prevent a decrease in the reaction speed and accuracy of the humidity sensor portion.

1 is a schematic perspective view showing a sterilizing apparatus using an aqueous sterilizing solution according to the present invention, and FIG. 2 is a schematic configuration diagram showing a sterilizing apparatus using an aqueous sterilizing solution according to the present invention.
3 is a flowchart illustrating a sterilization method of a sterilization apparatus using an aqueous sterilizing agent solution according to the present invention.
4 is a graph showing the response of the capacitive humidity sensor in the sterilization apparatus.
5 is a flowchart for explaining a method for measuring a concentration of hydrogen peroxide according to the present invention.
6 is a schematic view for explaining the sterilization chamber and the humidity sensor unit according to the present invention.
7 is a schematic separated view showing a part of the humidity sensor unit according to the present invention, FIG. 8 is an enlarged view showing the separation state of the sterilization chamber and the humidity sensor unit of FIG. 6, and FIG. 9 is the sterilization chamber and humidity of FIG. It is an enlarged view showing the coupling state of the sensor part.

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims.

Detailed contents for carrying out the present invention will be described in detail with reference to the accompanying drawings below. Irrespective of the drawings, like reference numbers refer to like elements, and "and/or" includes each and every combination of one or more of the recited items.

Although the first, second, etc. are used to describe various elements, these elements are not limited by these terms, of course. These terms are only used to distinguish one component from another. Therefore, it goes without saying that the first component mentioned below may be the second component within the spirit of the present invention.

The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. In this specification, the singular also includes the plural, unless specifically stated otherwise in the phrase. As used herein, “comprises” and/or “comprising” does not exclude the presence or addition of one or more other components in addition to the stated components.

Unless otherwise defined, all terms (including technical and scientific terms) used herein may be used with the meaning commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not to be interpreted ideally or excessively unless clearly defined in particular.

Spatially relative terms "below", "beneath", "lower", "above", "upper", etc. It can be used to easily describe the correlation between a component and other components. A spatially relative term should be understood as a term that includes different directions of components during use or operation in addition to the directions shown in the drawings. For example, when a component shown in the drawing is turned over, a component described as “beneath” or “beneath” of another component may be placed “above” of the other component. can Accordingly, the exemplary term “below” may include both directions below and above. Components may also be oriented in other orientations, and thus spatially relative terms may be interpreted according to orientation.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic perspective view showing a sterilizing apparatus using an aqueous sterilizing solution according to the present invention, and FIG. 2 is a schematic configuration diagram showing a sterilizing apparatus using an aqueous sterilizing solution according to the present invention.

However, in the present invention, the sterilizing agent may be hydrogen peroxide, and the sterilant aqueous solution may be hydrogen peroxide. do.

1 and 2 , the sterilization apparatus 100 using hydrogen peroxide solution according to the present invention includes a sterilization chamber 110 .

The sterilization chamber 110 represents a container into which an object to be sterilized, such as a medical instrument or surgical instrument to be sterilized, can be placed. In this case, one side of the sterilization chamber 110 may include a door for the entry and exit of the object to be sterilized.

In addition, it includes a vacuum pump 120 connected to one side of the sterilization chamber 110, the vacuum pump 120 can form a vacuum state by drawing out the gas inside the sterilization chamber (110). At this time, a vacuum valve 121 capable of controlling the operation of the vacuum pump 120 is connected between the sterilization chamber 110 and the vacuum pump 120 .

1 and 2, the sterilization apparatus 100 using hydrogen peroxide solution according to the present invention is connected to the other side of the sterilization chamber 110, to supply hydrogen peroxide vapor to the sterilization chamber 110. It includes a vaporizer 130 for (or may be referred to as an evaporator) and a hydrogen peroxide supply device 150 for supplying hydrogen peroxide to the vaporizer 130 .

In this case, a vaporization valve 131 may be included between the sterilization chamber 110 and the vaporizer 130 .

In addition, the sterilization apparatus 100 using hydrogen peroxide according to the first embodiment of the present invention has one side connected to the vaporizer 130 , and the other end connected to the sterilization chamber 110 , to the vaporizer 130 . and a collector 140 (or may be referred to as a collector vaporizer) for concentrating the supplied hydrogen peroxide.

At this time, a vaporization valve 131 may be included between the sterilization chamber 110 and the collector 140 .

In addition, a collection valve 141 may be included between the sterilization chamber 110 and the collector 140 .

That is, a vaporization valve 131 and a collection valve 141 may be connected in parallel between the sterilization chamber 110 and the collector 140 .

Meanwhile, as described above, a vaporization valve 131 may be included between the sterilization chamber 110 and the vaporizer 130 , that is, the vaporization valve 130 has one side of the sterilization chamber 110 and connected, and the other end may be connected in parallel with the vaporizer 130 and the collector 140 .

1 and 2, the sterilization apparatus 100 using hydrogen peroxide according to the present invention is a first connection pipe 142 connecting the collector 140 and the vaporization valve 131 and the vaporization A second connection pipe 133 for connecting the valve 131 and the sterilization chamber 110 may be included.

In addition, a third connection pipe 143 connecting the collector 140 and the collection valve 141 and a fourth connection pipe 144 connecting the collection valve 141 and the sterilization chamber 110 are included. can do.

At this time, in the drawing, the fourth connection pipe 144 is connected to the second connection pipe 133 , and the vaporization valve 131 and the collection valve 141 are connected between the sterilization chamber 110 and the collector 140 . Although shown to be connected in parallel, unlike this, the fourth connection pipe 144 is directly connected to the sterilization chamber 110, and a vaporization valve 131 between the sterilization chamber 110 and the collector 140. and the collection valve 141 may be connected in parallel.

In addition, it may include a fifth connection pipe 132 for connecting the vaporizer 130 and the vaporization valve 131, in this case, in the drawing, the fifth connection pipe 132 is the first connection pipe 142 ) and the vaporization valve 130 is shown to be connected in parallel with the vaporizer 130 and the collector 140, unlike this, the fifth connection pipe 132 is directly connected to the vaporization valve 131 Thus, the vaporization valve 130 may be connected in parallel with the vaporizer 130 and the collector 140 .

At this time, the vaporization valve 131 and the collection valve 141 may control the flow of the fluid in the first connection pipe 142 to the fifth connection pipe 132 by an open/close operation, and also , the vaporization valve 131 and the collection valve 141 may be open/close operation controlled by a separate control unit.

In addition, as shown in the drawing, a first connection pipe 142 connecting the collector 140 and the vaporization valve 131 and a second connection pipe 133 connecting the vaporization valve 131 and the sterilization chamber 110 . ) may have a larger inner diameter than other connecting pipes, that is, the third connecting pipe 143 to the fifth connecting pipe 132, for example, the third connecting pipe 143 to the fifth connecting pipe 132. In the case of a 1/4 inch pipe, the first connecting pipe 142 and the second connecting pipe 133 may be a 1 inch pipe. This will be described later.

On the other hand, although not shown in the drawings, it may include a temperature control means for controlling the temperature of the sterilization chamber 110, the vaporizer 130 and the collector 140, the temperature control means may be a heater, which Since it is obvious in the art, a detailed description thereof will be omitted.

In addition, in the case of the collector 140, a cooling means may be further included as a temperature control means, and the cooling means may use an appropriate means such as direct cooling using cooling water or a thermoelectric element, or air cooling through blowing of a heat exchanger. .

Hereinafter, a sterilization method using the sterilization apparatus according to the present invention will be described.

3 is a flowchart illustrating a sterilization method of a sterilization apparatus using an aqueous sterilizing agent solution according to the present invention.

However, in the present invention, the sterilizing agent may be hydrogen peroxide, and the sterilant aqueous solution may be hydrogen peroxide. do.

On the other hand, the sterilization method described below will be described with reference to the reference numerals of the sterilization apparatus of FIGS. 1 and 2 described above.

Referring to FIG. 3, the sterilization method of the sterilization apparatus using hydrogen peroxide solution according to the present invention includes the step of evacuating the sterilization chamber 110 (or may be referred to as a sterilization chamber) and the vaporizer 130 ( S110).

The step of evacuating the sterilization chamber 110 and the vaporizer 130 may be performed by operating the vacuum pump 120 (on state) and opening the vacuum valve 121 to evacuate the vacuum.

On the other hand, step S110, that is, the step of evacuating the sterilization chamber and the vaporizer may continue until step S160 to be described later, when the sterilization chamber reaches a predetermined set pressure, and the hydrogen peroxide liquid from which moisture is removed is collected in the collector This step may be completed.

In addition, in order to evacuate the vaporizer 130, the vaporization valve 131 between the sterilization chamber 110 and the vaporizer 130, or between the sterilization chamber 110 and the collector 140 The collection valve 141 is in an open state, communicates with the sterilization chamber being evacuated to a pressure below atmospheric pressure, and is closed in the next step.

On the other hand, at the same time as the step of evacuating the sterilization chamber 110 and the vaporizer 130, the sterilization chamber and the vaporizer may be maintained at a temperature set by the above-described temperature control means.

Next, it includes the step of introducing a hydrogen peroxide solution of a first concentration to the vaporizer 130 of the first temperature and the first pressure (S120).

The hydrogen peroxide solution may be fed through the hydrogen peroxide supply device 150 for storing the hydrogen peroxide solution of a first concentration, and on the other hand, although not shown in FIGS. 1 and 2, the vaporizer 130 and the hydrogen peroxide supply An appropriate amount of hydrogen peroxide may be supplied by including a hydrogen peroxide water supply control valve (not shown) between the devices 150 .

In this case, the first concentration of the hydrogen peroxide solution may be 60% by weight or less.

As described above, in handling the hydrogen peroxide solution, that is, the hydrogen peroxide solution, the concentration of the hydrogen peroxide solution is limited to 60% by weight or less, so it is practically difficult to use a high concentration of hydrogen peroxide as a sterilant.

That is, in the present invention, the first concentration of the hydrogen peroxide solution indicates the concentration of the hydrogen peroxide solution that can be handled, and does not have an important meaning in understanding the meaning of the present invention.

In addition, the first temperature may be 60 to 70 ℃, the first pressure may be 800 mb (mbar) to atmospheric pressure.

At this time, in step S120, while the hydrogen peroxide solution of the first concentration is input to the vaporizer 130, the vaporization valve 131 and the collection valve 141 may correspond to a close state, however, depending on the supply device, open state can be

On the other hand, in step S120, the pressure of the sterilization chamber 110 is 600 mb to atmospheric pressure, and the temperature may be 45 to 55 ° C. In addition, the pressure of the collector 140 is 800 mb to atmospheric pressure, and the temperature is 38 to 42°C.

At this time, the first temperature in the present invention is characterized in that higher than the temperature of the sterilization chamber.

In the case of the first temperature, it corresponds to the temperature of the vaporizer in the process of vaporizing more water vapor from the hydrogen peroxide solution, and the vaporization process of water vapor causes a very strong endothermic reaction to very strongly suppress the vaporization rate.

At this time, in order to increase the vaporization rate, there is a method to increase the vacuum by lowering the pressure of the vaporizer, but the vaporization rate of hydrogen peroxide can also be increased, so that the consumption of hydrogen peroxide increases. Since it is difficult to supply smoothly, therefore, it is preferable that the first temperature is at least higher than the temperature of the sterilization chamber.

Next, it includes the step of vaporizing the hydrogen peroxide solution of the first concentration to form the hydrogen peroxide solution of the second concentration (S130).

That is, the hydrogen peroxide solution of the first concentration injected into the vaporizer 130 is vaporized (ie, water is removed) to form the hydrogen peroxide solution of the second concentration.

The second concentration of the hydrogen peroxide solution may be 75 wt% to 85 wt%, and in step S130, by vaporizing water in the hydrogen peroxide solution of 60 wt% or less, hydrogen peroxide to form a hydrogen peroxide solution having a concentration of 75 wt% to 85 wt% It may be a water first concentration step.

In general, at the same temperature and pressure, water evaporates more quickly because of its higher vapor pressure than hydrogen peroxide, and water diffuses into the gas phase faster than hydrogen peroxide because its molecular weight is lower than that of hydrogen peroxide.

Therefore, since water (i.e., moisture) evaporates and diffuses faster than hydrogen peroxide under the same temperature and pressure conditions, water in hydrogen peroxide water evaporates / diffuses before hydrogen peroxide, so that a second concentration of hydrogen peroxide water can be formed.

At this time, the evaporated water is evacuated through the vacuum pump via the sterilization chamber 110, and thus, the vacuum pump 120 is operated (on state) in step S130, and the vacuum valve 121 and the vaporization valve (131) corresponds to the open state.

On the other hand, in step S130, the temperature of the vaporizer 130 is temporarily lowered by the endothermic reaction of the vaporization process, and is in the range of 55 to 65 ° C., and the pressure can be 30 to 800 mb (millibar). have.

In addition, while the evaporated water is evacuated through the sterilization chamber 110 through a vacuum pump, the pressure of the sterilization chamber 110 is in the range of 10 to 600 mb, and the temperature may be 45 to 55 ℃, , In addition, the pressure of the collector 140 is in the range of 20 to 500 mb, the temperature may be 35 to 40 ℃.

Next, it includes the step of introducing the hydrogen peroxide solution of the second concentration to the collector of the second temperature and the second pressure (S140).

In order to inject the hydrogen peroxide solution of the second concentration into the collector 140 of the second temperature and the second pressure, the vacuum pump 120 is operated (on state), the vacuum valve 121 is opened, The vaporization valve 131 may be controlled in a close state, and the collection valve 141 is in an on state.

In this case, the second temperature may be 35 to 42 ℃, the second pressure may be 8 to 50 mb.

In addition, while the hydrogen peroxide solution of the second concentration moves from the vaporizer 130 to the collector 140, the pressure of the vaporizer 130 is 10 to 60 mb, and the temperature may be 55 to 60° C., the second The concentration of hydrogen peroxide water may move from the vaporizer 130 to the collector 140 via the fifth connecting pipe 132 and the first connecting pipe 142 .

On the other hand, even in step S140, the sterilization chamber 110 is continuously evacuated, the pressure of the sterilization chamber 110 is 1 to 10 mb, the temperature may be 45 to 55 ℃.

At this time, the second temperature in the present invention is characterized in that lower than the temperature of the sterilization chamber.

In the case of the second temperature, it corresponds to the temperature of the collector at which the hydrogen peroxide water of the second concentration is collected, and when the saturated hydrogen peroxide vapor from the vaporizer is higher than the temperature of the chamber in the process of passing through the collector, the hydrogen peroxide vapor is not condensed in the collector and all It may be evacuated through the chamber.

Even if the hydrogen peroxide vapor is partially condensed at the beginning of the S140/S150 step, where the pressure is rather high, if the collector is higher than the temperature of the chamber in the step where the vacuum pressure is continuously applied to the exhaust chamber, the heat of evaporation of hydrogen peroxide is low compared to the water vapor, so it is easily regasified It becomes impossible to remain in the collector, and eventually, it is impossible to perform step S170 to be described later. Therefore, it is preferable that the second temperature is at least lower than the temperature of the sterilization chamber.

As can be seen from the above, in the present invention, after the step S130, that is, the step of vaporizing the hydrogen peroxide solution of the first concentration to form the hydrogen peroxide solution of the second concentration, the step S140, that is, the second temperature and the second The step of introducing the second concentration of the hydrogen peroxide solution to the collector of 2 pressure is performed.

For example, it may be considered to perform step S140 without step S130, and to directly inject the hydrogen peroxide solution of the first concentration into the collector, but it is not preferable for the following reasons.

Table 1 below shows an example of the vaporization ratio of hydrogen peroxide vapor for each concentration of hydrogen peroxide solution.

Referring to Table 1, it can be seen that the higher the concentration of the hydrogen peroxide solution and the higher the set temperature, the higher the vaporization rate of the hydrogen peroxide vapor is relatively higher than that of the water vapor.

For example, at 50° C., the vaporization rate of hydrogen peroxide vapor in 60% by weight hydrogen peroxide solution is 13%, meaning that the remaining 87% is water vapor, and the vaporization rate of hydrogen peroxide vapor in 80% by weight hydrogen peroxide water is 40%, meaning that the remaining 60% is water vapor.

That is, performing step S140 without step S130 may mean, for example, inputting 60 wt% of hydrogen peroxide to the collector, and performing step S140 after performing step S130 means 80 wt% concentration. It may mean putting the hydrogen peroxide solution in the collector.

In this case, when step S140 is performed without step S130, the ratio of water vapor passing through the collector in the initial step is relatively higher than when step S140 is performed after step S130 is performed.

If the ratio of water vapor is relatively higher than that of the hydrogen peroxide vapor, when it is input to the collector, the pressure of the collector is high (if the temperature of the collector is 40 degrees, the saturated vapor pressure is 75mb, so the pressure is higher). It may also condense in the collector.

The fact that water vapor is also condensed in the collector means that there is a limit to the concentration of the concentrated hydrogen peroxide solution as much as the amount of condensed water vapor.

Therefore, in the present invention, in order to prevent the water vapor from being condensed in the collector first, and from generating a limit to the concentration of the concentrated hydrogen peroxide solution, step S130, that is, the first concentration of the hydrogen peroxide solution is vaporized to a second concentration of hydrogen peroxide solution After going through the step of forming, step S140, that is, the step of adding the hydrogen peroxide solution of the second concentration to the collector of the second temperature and the second pressure is performed.

Next, the hydrogen peroxide vapor in the hydrogen peroxide solution of the second concentration is condensed in the collector, and the water vapor is exhausted from the collector (S150). As described above, water has a higher vapor pressure than hydrogen peroxide, so it is faster than hydrogen peroxide. Since the molecular weight of water is lower than that of hydrogen peroxide, water diffuses into the gas phase more rapidly than hydrogen peroxide. Since the water of the hydrogen peroxide evaporates / diffuses before the hydrogen peroxide vapor is condensed in the collector, and the water vapor is exhausted from the collector, a third concentration of hydrogen peroxide water can be formed.

That is, water has a higher vapor pressure than hydrogen peroxide, and therefore, in the vapor state, hydrogen peroxide condenses more easily than water. Accordingly, the hydrogen peroxide solution condensed in the collector may include a higher concentration of hydrogen peroxide than the second concentration of the hydrogen peroxide solution added.

On the other hand, in step S140, the pipe through which the hydrogen peroxide vapor and water vapor pass moves in the order of the fifth connecting pipe, the first connecting pipe, the third connecting pipe, and the fourth connecting pipe. The temperature of should be higher than the temperature of the collector (140).

This means that if the temperature of the pipe before and after the hydrogen peroxide vapor reaches the collector is lower than that of the collector, it may remain condensed in the pipe first, and the hydrogen peroxide vapor condensed in the pipe with a small inner diameter is at a higher temperature than when vaporized in step S170. This is because the water vapor content due to decomposition may increase during exposure and entering the chamber.

In addition, as shown in Table 1, once the concentration is increased (less than 85% by weight), the vapor ratio of water and hydrogen peroxide becomes similar, and the concentration by the vaporization ratio lowers the concentration efficiency.

The gaseous hydrogen peroxide vapor and water vapor have a different condensable temperature at the same pressure. For example, at 35 degrees, hydrogen peroxide is condensed at 5mb or more, and water vapor is condensed at 55mb or more.

Therefore, this difference is, for example, when the collector temperature being evacuated through the collection valve is 35, when the pressure is in the range of 5mb to 55mb, the hydrogen peroxide vapor is condensed, and the water vapor can be exhausted from the collector.

At this time, the third concentration of the hydrogen peroxide solution may be 90 wt% to 95 wt%, step S150 by vaporizing water in 75 wt% to 85 wt% of the hydrogen peroxide solution, 90 wt% to 95 wt% of hydrogen peroxide It may be a second concentration step of hydrogen peroxide solution to form water.

On the other hand, in the step of adding the hydrogen peroxide solution of the second concentration to the collector of the second temperature and the second pressure of step S140 and the hydrogen peroxide vapor of the hydrogen peroxide solution of the second concentration of step S150 is condensed in the collector, and water vapor has been described that the step of evacuating from the collector is sequentially performed, otherwise, steps S140 and S150 may be steps occurring simultaneously.

That is, while injecting the hydrogen peroxide solution of the second concentration into the collector of the second temperature and the second pressure, at the same time, the hydrogen peroxide vapor in the hydrogen peroxide solution of the second concentration is condensed in the collector, and the water vapor is to be exhausted from the collector can

At this time, the evaporated water is vacuum exhausted through the vacuum pump, and thus, in step S150, the vacuum pump 120 is operated (on state), and the vacuum valve 121 is opened to exhaust the vacuum, and also, In order for the evaporated water to be evacuated through the vacuum pump, the collection valve 141 corresponds to an open state.

Next, the step of lowering the pressure of the sterilization chamber to a certain level and the step of concentrating the hydrogen peroxide solution of the third concentration with the hydrogen peroxide solution of the fourth concentration (S160).

At this time, the constant pressure should be a set pressure for sterilization in the sterilization chamber, and also, when the sterilizing agent is hydrogen peroxide vapor, it should be a vacuum degree for easy diffusion.

Accordingly, the set pressure may be 0.5 to 1.3 mb, and the temperature of the sterilization chamber may be 45 to 55 ℃.

In addition, the fourth concentration of the hydrogen peroxide solution may be 95% by weight or more, and by vaporizing water in the hydrogen peroxide solution having a concentration of 90% to 95% by weight in step S160, the third concentration of hydrogen peroxide to form 95% by weight or more of the hydrogen peroxide solution may be a step.

At this time, the evaporated water is evacuated through the vacuum pump, and thus, in step S160, the vacuum pump 120 is operated (on state), and the vacuum valve 121 is opened to evacuate the vacuum.

On the other hand, in step S160, the collection valve 141 may repeat the open state and the close state.

That is, in concentrating the hydrogen peroxide solution of the third concentration with the hydrogen peroxide solution of the fourth concentration, the higher the concentration of the hydrogen peroxide solution, the lower the pressure at which the liquid hydrogen peroxide can be evaporated.

For example, under the same temperature condition of 45°C, hydrogen peroxide evaporates at a pressure of about 20mb or less in 80% by weight hydrogen peroxide solution, but at a pressure of about 11mb or less in 90% by weight hydrogen peroxide solution, hydrogen peroxide evaporates will do

This is because in concentrating the hydrogen peroxide solution of the third concentration with the hydrogen peroxide solution of the fourth concentration, not only the water is vaporized, but also the hydrogen peroxide is vaporized, so it may be difficult to concentrate the hydrogen peroxide solution to a predetermined concentration.

That is, a high concentration of hydrogen peroxide can continue the decomposition reaction, and the moisture generated in the decomposition process lowers the concentration of hydrogen peroxide.

Therefore, in order to remove such a small amount of impurity, moisture, when the pressure is repeatedly raised/lowered in a fluctuation range of 0.1 to 2 mb, it is possible to effectively remove moisture while suppressing the removal of vaporized hydrogen peroxide.

Although this water removal method takes a very long time in the low concentration step, it is effective to remove a small amount of water in the high concentration step, and at least it can be said to be effective in maintaining a high concentration.

Therefore, by lowering the pressure of the sterilization chamber to a certain level, the pressure of the collector 140 containing the hydrogen peroxide solution of the third concentration is continuously lowered to prevent the hydrogen peroxide from evaporating at a lower pressure, the collection The valve 141 may prevent the pressure of the collector 140 from continuously lowering by repeating the open state and the close state.

At this time, the pressure of the collector 140 may be 5 to 10 mb, the temperature may be 35 to 40 ℃, the pressure of the vaporizer 130 may be 7 to 10 mb, and the temperature may be 60 to 70 ℃.

On the other hand, in the step S160, since the aqueous solution of the vaporizer is completely exhausted, the temperature is restored in a vacuum state, and the collector stays in the collector while highly concentrated hydrogen peroxide is collected and a small amount of moisture is removed, or while maintaining an appropriate pressure.

At this time, the collector may be lowered to a lower temperature by a temperature control means to prevent excessive exhaustion of hydrogen peroxide.

Next, by injecting the hydrogen peroxide vapor of the hydrogen peroxide solution of the fourth concentration into the sterilization chamber, it includes the step of sterilizing the object (S170).

In step S170, in order to inject the hydrogen peroxide vapor of the fourth concentration of hydrogen peroxide solution located in the collector 140 into the sterilization chamber 110, the vaporization valve 131 is in an open state, and the collection valve corresponds to an open or close state. .

That is, the movement of hydrogen peroxide vapor from the collector 140 to the sterilization chamber 110 may move through the first connection pipe 142 and the second connection pipe 133 .

At this time, as described above, in the present invention, the first connecting pipe 142 connecting the collector 140 and the vaporization valve 131 and the second connecting pipe connecting the vaporization valve 131 and the sterilization chamber 110 ( 133) may have a larger inner diameter than other connecting pipes, that is, the third connecting pipe 143 to the fifth connecting pipe 132, for example, the third connecting pipe 143 to the fifth connecting pipe 132. In the case of this 1/4 inch pipe, the first connecting pipe 142 and the second connecting pipe 133 may be 1 inch pipe.

This is when the hydrogen peroxide vapor moves from the collector 140 to the sterilization chamber 110 through the first connecting pipe 142 and the second connecting pipe 133, the hydrogen peroxide vapor is introduced into the fifth connecting pipe 132. To prevent this, hydrogen peroxide vapor may be introduced into the first connecting pipe 142 having a relatively large inner diameter, and hydrogen peroxide vapor may not be introduced into the fifth connecting pipe 132 having a relatively small inner diameter.

In addition, in the present invention, hydrogen peroxide vapor is introduced into the sterilization chamber, and in sterilizing the object to be treated, it is preferable that the hydrogen peroxide vapor is injected in a state where the temperature of the vapor is not high.

If the temperature of the hydrogen peroxide vapor vaporized in the collector is higher than the temperature of the sterilization chamber before the hydrogen peroxide vapor is sufficiently saturated in the sterilization chamber, the density of the hydrogen peroxide vapor in the entry path becomes excessive and it is easy to condense, It reduces the absolute amount of diffusion into the sterilization chamber in a gaseous state and may adversely affect the diffusion effect for sterilization.

At this time, in the present invention, the pipe of the path between the collector 140 and the sterilization chamber 110 may have a larger inner diameter than the pipe of another path. If the inner diameter is large, as the amount of movement of the gas increases, the vaporization driving force by the degree of vacuum is strongly increased, thereby preventing the temperature increase of the gaseous hydrogen peroxide vapor.

That is, when the amount of movement of the gas is small, the time the hydrogen peroxide vapor stays in the collector increases that much, and the decomposition reaction rate of the hydrogen peroxide vapor in the collector, which requires a temperature increase for vaporization and movement of hydrogen peroxide, increases. The concentration of water vapor and oxygen gas increases. This may weaken the sterilization performance because the purpose of the previous step of minimizing the amount of water vapor, which is a hindrance to the diffusion of hydrogen peroxide, is lost in the vaporization step.

Therefore, in the present invention, by making the inner diameter of the pipe of the path between the collector 140 and the sterilization chamber 110 larger than that of the pipe of the other path, it can be put into the sterilization chamber in a state where the temperature of the hydrogen peroxide vapor is not high, and according to the temperature Since the hydrogen peroxide vapor can easily access the object to be sterilized through sufficient diffusion into the gas phase while the decomposition reaction is minimized, a good sterilization effect can be obtained.

On the other hand, in injecting the hydrogen peroxide vapor of the hydrogen peroxide solution of the fourth concentration into the sterilization chamber, the hydrogen peroxide is vaporized and diffused into the sterilization chamber. It is possible to control the temperature increase rate of the collector 140 to be completed.

That is, in order to promote the vaporization of hydrogen peroxide, the collector 140 may be heated by a temperature control means. Heating the collector is the vaporization of hydrogen peroxide before the temperature of the collector reaches the temperature of the sterilization chamber. It is possible to control the temperature increase rate so that 80% or more is completed.

At this time, the pressure of the sterilization chamber 110 may be 0.5 to 15 mb, the temperature may be 45 to 55 ℃.

In addition, the pressure of the collector 140 may be 0.5 to 15 mb, the temperature may be 30 to 70 ℃, the pressure of the vaporizer 130 is 0.5 to 15 mb, and the temperature may be 60 to 70 ℃ or more.

The pressure and temperature conditions in each step are summarized in Table 2 below.

In addition, the state of the vacuum pump and the valve in each step is summarized in Table 3 below.

As described above, in order to improve the sterilization performance, it is preferable to use a more concentrated hydrogen peroxide solution, and using a more concentrated hydrogen peroxide solution, the concentration of the hydrogen peroxide solution in handling the hydrogen peroxide solution is 60% by weight or less There is a difficulty in using a high concentration of hydrogen peroxide as a sterilant because it is limited to

However, in the present invention, 95% by weight or more of hydrogen peroxide water can be used as a sterilizing agent through each step of the concentration process, and thus, the sterilization effect can be greatly improved while reducing the factor impeding diffusion by water vapor.

In addition, after the above-described step S130, the first concentration of the hydrogen peroxide aqueous solution supplied initially to prepare a second concentration of hydrogen peroxide aqueous solution, the above-described step S140 and S150 is performed. may reduce the likelihood of doing so.

In addition, in introducing the hydrogen peroxide water into the collector, the saturated water vapor pressure of water according to the pressure of the hydrogen peroxide water collector and the temperature of the collector, that is, by lowering the vaporization/condensation boundary pressure, even if the water contacts the collector, it cannot be condensed can make this

In the present invention, the object can be sterilized by the sterilization apparatus and the sterilization method using the same as described above. However, the above-described sterilization apparatus and the sterilization method using the same are only examples, and in the present invention, the configuration of the basic sterilization apparatus and its The sterilization method used is not limited.

Hereinafter, a sterilization apparatus capable of measuring the concentration of hydrogen peroxide according to the present invention and a method for measuring the concentration of hydrogen peroxide in the sterilization apparatus will be described.

As described above, in order to improve the sterilization performance, it is preferable to use a more concentrated hydrogen peroxide solution, and using a more concentrated hydrogen peroxide solution, the concentration of the hydrogen peroxide solution in handling the hydrogen peroxide solution is 60% by weight or less There is a difficulty in using a high concentration of hydrogen peroxide as a sterilant because it is limited to

For this reason, it is common to use an aqueous hydrogen peroxide solution having a handleable concentration of 60% by weight or less as a sterilizing agent by concentrating an aqueous solution of hydrogen peroxide with a high concentration of 95% by weight or more through each step of concentration process, for example, the high concentration of the hydrogen peroxide solution It is not easy to measure the concentration of the hydrogen peroxide in the sterilization chamber of the sterilization apparatus in using it as a sterilizing agent by concentrating the hydrogen peroxide solution.

Therefore, in the present invention, it is intended to provide a sterilization apparatus capable of accurately detecting the concentration of hydrogen peroxide in hydrogen peroxide solution and a method for measuring the concentration of hydrogen peroxide in the sterilization apparatus by a simple method, avoiding the enlargement or complexity of the sterilization apparatus, which As follows.

As described above, referring to Figures 1 and 2, the sterilization apparatus according to the present invention is a sterilization chamber; a vacuum pump connected to one side of the sterilization chamber; a vaporizer connected to the other side of the sterilization chamber; And one side is connected to the vaporizer, the other side includes a collector connected to the sterilization chamber.

At this time, the sterilization apparatus according to the present invention is a first humidity sensor 111 positioned in a predetermined area inside the sterilization chamber 110 and a second humidity sensor 112 positioned adjacent to the first humidity sensor 111 . includes

That is, in the present invention, the concentration of hydrogen peroxide inside the sterilization chamber 110 is measured through the first humidity sensor 111 and the second humidity sensor 112 .

On the other hand, the sterilization chamber corresponds to the target space for measuring the concentration of hydrogen peroxide, and the target space may be the sterilization chamber as described above. Alternatively, it may be an operating room requiring aseptic conditions or a sterile room requiring aseptic breeding. have.

That is, the target space may be a chamber, an operating room, or a clean room, however, the type of the target space is not limited in the present invention.

At this time, in the present invention, the first humidity sensor 111 is a sensor whose relative humidity is determined by the amount of water vapor and the amount of hydrogen peroxide, and the second humidity sensor 112 is a sensor whose relative humidity is determined only by the amount of water vapor corresponds to the sensor.

In addition, in the present invention, that the second humidity sensor 112 determines the relative humidity only by the amount of water vapor is when the second humidity sensor directly measures the relative humidity with respect to the amount of water vapor, or the second humidity The sensor measures absolute humidity with respect to the amount of water vapor and converts the absolute humidity into relative humidity.

Since the conversion of water vapor from absolute humidity to relative humidity is obvious in the art, a detailed description thereof will be omitted.

More specifically, the first humidity sensor may be a moisture absorption type humidity sensor, a saturation type humidity sensor or an absorption type humidity sensor, and more specifically, the moisture absorption type humidity sensor is a capacitive type It may be a humidity sensor, a resistance-variable humidity sensor, a hair hygrometer, a carbon film hygrometer, an electric hygrometer, and a color hygrometer, and the humidity sensor by the saturation method may be a dew point hygrometer, a lithium chloride dew point hygrometer, and also by an absorption method The humidity sensor may be a volume hygrometer, an electrolysis hygrometer, or a gravimetric hygrometer.

Meanwhile, as described above, in the present invention, the first humidity sensor 111 is a sensor whose relative humidity is determined by the amount of water vapor and the amount of hydrogen peroxide.

At this time, the principle of measuring the hydrogen peroxide concentration using a sensor for measuring the relative humidity of water, such as the above-described first humidity sensor, is the same as the principle of measuring the relative humidity of water by VHP (highly concentrated hydrogen peroxide vapor) vapor pressure. It is measured by the degree of dampening, etc.

In particular, the use of a capacitive humidity sensor corresponds to a very important principle that the relative permittivity is almost the same as water and hydrogen peroxide, so that it can be directly substituted.

That is, since the method of measuring the relative humidity of water and the method of measuring the relative saturation of the VHP are the same, the first humidity sensor, such as a capacitive humidity sensor, can determine the relative humidity by the amount of water vapor and the amount of hydrogen peroxide. will be.

In addition, the second humidity sensor 112 may be a humidity sensor by a spectroscopic method, and the humidity sensor by the spectroscopic method may be a non-dispersive infrared (NDIR) hygrometer or a near-infrared hygrometer.

As described above, in the case of the first humidity sensor, the relative humidity may be determined by the amount of water vapor and the amount of hydrogen peroxide.

However, the second humidity sensor of the spectroscopic method corresponds to a sensor whose relative humidity is determined only by the amount of water vapor.

For example, since the non-dispersive infrared hygrometer is a method of calculating the absorption degree for selective IR of 6.1um, which is the absorption spectrum of water in the IR region, hydrogen peroxide (H ₂ O ₂ ) ( It corresponds to a hygrometer with very high selectivity to 2.93um).

Meanwhile, in general, a humidity sensor is a sensor that detects humidity in an object, and the concept of humidity includes well-known relative humidity and absolute humidity.

More specifically, absolute humidity refers to the mass of actual water vapor contained in 1 liter of air, and relative humidity is the percentage of the actual amount of water vapor contained in the air divided by the maximum amount of water vapor that air can contain at a given temperature and pressure. to be.

For example, 1 liter of air with a temperature of 37°C at 1 atmospheric pressure can contain as much as 44 g of water vapor. 44g × 100).

That is, such a humidity sensor is well known as a sensor for detecting the amount of water vapor contained in the air.

At this time, as such typical types of humidity sensors, there are a capacitive humidity sensor and a resistance change humidity sensor.

First, the resistance change type humidity sensor uses the characteristic that the resistance changes according to the amount of moisture in the moisture-sensitive film in response to the humidity change, and obtains a change signal by applying an alternating current. can be classified.

For example, in the case of a polymer type in which the moisture-sensitive material is a polymer, water and polymer combine to form ions in the air, and electrical conductivity is generated. The magnets are separated to form ions, which in turn generate electrical conductivity.

That is, the concentration of ions changes according to the change in relative humidity, which is measured by the change in the impedance of the sensor element to detect the relative humidity. The conversion circuit for obtaining an electrical signal from the sensor is simple, which has advantages of miniaturization and price. .

Since such a resistance-variable humidity sensor is a generally well-known humidity sensor, a detailed description thereof will be omitted, for example, Korean Utility Model Application No. 20-1998-0026410 and Korean Patent Application No. 10-2010-0000557 etc. can be referred to.

For example, the resistance variable humidity sensor may be formed by sputtering and depositing a platinum (Pt) thin film on the upper surface of a sintered alumina substrate to form a pattern in the shape of an electrode, and applying a moisture-sensitive polymer to the upper surface of the platinum thin film-type pattern.

Next, the capacitive humidity sensor has a lower electrode on a substrate, a polymeric moisture-sensitive material is uniformly applied to the upper portion of the lower electrode, and an upper electrode having a property that humidity can be injected on the upper portion of the moisture-sensitive material. is composed

In general, Au electrodes and moisture-resistant materials are used for glass or ceramic substrates, and the moisture-sensitive material applied to the sensor is a cellulose ester compound such as cellulose acetone or a polymer material such as polyvinyl alcohol, polyacrylic, or polyvinylpyride. used

The principle of detecting humidity in such a capacitive humidity sensor is as follows.

That is, the relative dielectric constant of the polymer material is about 3 in a dry state, and the relative dielectric constant changes high while absorbing water molecules (relative dielectric constant 80) in the air. can be detected.

Since these capacitive humidity sensors are generally well-known humidity sensors, detailed descriptions thereof will be omitted, for example, Korean Patent Application Nos. 10-2007-0135890 and Korean Patent Application No. 10-2012-0027010 can refer to

For example, the capacitive humidity sensor may include a lower electrode formed on a substrate; a moisture-sensitive layer applied on the lower electrode to adsorb and desorb moisture; and a plurality of upper electrodes formed on the moisture-sensitive layer.

As described above, the humidity sensor, ie, a capacitive humidity sensor and a resistance change type humidity sensor, is well known as a sensor for detecting the amount of water vapor contained in air.

However, the present applicant has confirmed that, in the case of the capacitive humidity sensor, the detected value is changed not only by the amount of water vapor but also by the amount of hydrogen peroxide, and paying attention to this, the first humidity sensor 111 and the second Through the humidity sensor 112, a method for measuring the concentration of hydrogen peroxide inside the sterilization chamber 110 was developed.

In the case of the capacitive humidity sensor, the value detected by the amount of hydrogen peroxide as well as the amount of water vapor is changed as follows.

4 is a graph showing the response of the capacitive humidity sensor in the sterilization apparatus.

That is, in the present invention, in order to confirm that the concentration of hydrogen peroxide can be measured through the capacitive humidity sensor, the reaction of the capacitive humidity sensor in the process of the sterilization process in the sterilization apparatus was measured.

Referring to FIG. 4 , while evacuating the chamber, a process of concentrating the hydrogen peroxide solution was performed while evaporating the hydrogen peroxide solution through the concentration module. (50 sec to 300 sec)

Thereafter, as the highly concentrated hydrogen peroxide diffuses into the sterilization chamber, the pressure in the sterilization chamber increases, and it can be seen that the relative humidity of the capacitive humidity sensor is measured at around 100% in proportion to this. (300 sec to 450 sec)

At this time, when the temperature of the vacuumed sterilization chamber is 50°C, in order for the relative humidity to be 100%, even the pressure of water vapor alone should exceed 120mb, but the pressure of the sterilization chamber injected only with hydrogen peroxide vapor (VHP) is actually 12 It corresponds to ~15mb.

That is, for example, in order for the relative humidity of the capacitive humidity sensor to be 100%, in a situation where the temperature of the sterilization chamber is 50°C, the value of the pressure inside the sterilization chamber must exceed 120mb even with the pressure of only water vapor. However, in reality, it was only 12 to 15mb of the sterilization chamber.

As a result, when the relative humidity of the capacitive humidity sensor becomes 100%, it can be confirmed that the relative humidity is not determined by the amount of water vapor, but other factors, that is, the amount of hydrogen peroxide, affect the determination of the relative humidity. , Therefore, it can be confirmed that the relative humidity is determined by the amount of hydrogen peroxide as well as the amount of water vapor in the capacitive humidity sensor.

Therefore, it can be confirmed that the relative humidity detected by the capacitive humidity sensor is determined by the amount of water vapor and the amount of hydrogen peroxide.

At this time, in the humidity sensor by the spectroscopic method, the relative humidity is determined only according to the amount of water vapor, unlike the capacitive humidity sensor.

That is, in the case of the capacitive humidity sensor, which is the first humidity sensor, the relative humidity is determined by the amount of water vapor and the amount of hydrogen peroxide, but in the case of the spectroscopic humidity sensor as the second humidity sensor, only water vapor Relative humidity is determined by the quantity.

Therefore, if the difference between the relative humidity detected by the first humidity sensor and the relative humidity detected by the second humidity sensor is calculated, the ratio of the relative humidity determined by the amount of hydrogen peroxide can be calculated.

Meanwhile, as described above, in the present invention, that the second humidity sensor 112 determines the relative humidity only by the amount of water vapor is when the second humidity sensor directly measures the relative humidity with respect to the amount of water vapor or , the second humidity sensor measures absolute humidity with respect to the amount of water vapor and converts the absolute humidity into relative humidity.

That is, it is possible to measure the absolute humidity of the target space through the second humidity sensor, convert the absolute humidity into relative humidity, and detect the second relative humidity of the target space through the second humidity sensor.

The method for measuring the concentration of hydrogen peroxide according to the present invention is as follows.

5 is a flowchart for explaining a method for measuring a concentration of hydrogen peroxide according to the present invention.

Referring to FIG. 5 , the method for measuring the concentration of hydrogen peroxide according to the present invention includes detecting a first relative humidity by a first humidity sensor (S210).

At this time, the first humidity sensor may typically be a capacitive humidity sensor, and as described above, in the capacitive humidity sensor, the relative humidity is determined according to the amount of water vapor and the amount of hydrogen peroxide. 1 Relative humidity corresponds to the relative humidity according to the amount of water vapor and the amount of hydrogen peroxide.

Next, the method for measuring the concentration of hydrogen peroxide according to the present invention includes the step of detecting a second relative humidity by a second humidity sensor (S220).

At this time, the second humidity sensor may typically be a non-dispersive infrared humidity sensor, and as described above, the non-dispersive infrared humidity sensor determines the relative humidity only by the amount of water vapor, and thus, the second relative humidity is It corresponds to the relative humidity according to the amount of water vapor.

Next, the method for measuring the concentration of hydrogen peroxide according to the present invention includes deriving a difference value between the first relative humidity and the second relative humidity (S230).

In the case of the first humidity sensor, the relative humidity is determined by the amount of water vapor and the amount of hydrogen peroxide, but in the case of the second humidity sensor, the relative humidity is determined only by the amount of water vapor.

Accordingly, by calculating the difference between the first relative humidity detected by the first humidity sensor and the second relative humidity detected by the second humidity sensor, the ratio of the relative humidity determined by the amount of hydrogen peroxide can be calculated.

Next, the method for measuring the concentration of hydrogen peroxide according to the present invention includes calculating the concentration of hydrogen peroxide through the difference value (S240).

On the other hand, as described above, measuring the concentration of hydrogen peroxide vapor in the present invention corresponds to the principle of measuring the ratio of saturated water vapor pressure. When the temperature of the humidity sensor exists at a temperature lower than the measurement target space, the supersaturated hydrogen peroxide vapor is condensed in the humidity sensor and may be measured to be lower than the concentration actually present.

Therefore, in the present invention, the temperature of the first humidity sensor and the second humidity sensor is preferably controlled to be higher than the measurement target space, that is, a chamber, an operating room, or a clean room.

Hereinafter, a method of measuring the hydrogen peroxide concentration by the first humidity sensor and the second humidity sensor will be described.

However, the following method is only an example, and does not limit the following measuring method in the present invention.

Table 4 below shows the saturated vapor pressure according to the temperature.

That is, Table 4 shows examples of saturated vapor pressure and hydrogen peroxide saturated vapor pressure according to each temperature.

First, it is assumed that the first relative humidity detected by the first humidity sensor is 80%, and the second relative humidity detected by the second humidity sensor is 30%.

At this time, as described above, assuming that the second relative humidity detected by the second humidity sensor is 30% is when the second humidity sensor directly measures the relative humidity with respect to the amount of water vapor, or 2 The humidity sensor measures absolute humidity with respect to the amount of water vapor and converts the absolute humidity into relative humidity.

Accordingly, the assumption that the second relative humidity is 30% may be a case in which the absolute humidity measured by the second humidity sensor is converted.

In addition, it is assumed that the temperature in the sterilization chamber is 45° C., the atmospheric pressure is 1000 mb, and the volume of the sterilization chamber is 1000 L.

At this time, the difference between the first relative humidity and the second relative humidity is 50%, and therefore, the difference value of the first relative humidity and the second relative humidity of 50% corresponds to the ratio of the relative humidity determined by the amount of hydrogen peroxide do.

That is, the relative humidity reacted by the hydrogen peroxide vapor in the air in the sterilization chamber corresponds to 50%.

At this time, since the temperature in the sterilization chamber is 45°C, referring to Table 4 above, the saturated vapor pressure of hydrogen peroxide at a temperature of 45°C corresponds to 9.8mb.

On the other hand, in general, relative humidity (%) = (current water vapor pressure / saturated vapor pressure) × 100, therefore, hydrogen peroxide vapor pressure x in the sterilization chamber is 50% = (x mb/9.8 mb) × 100%, so hydrogen peroxide It corresponds to vapor pressure x = 4.9 mb.

At this time, since the atmospheric pressure in the sterilization chamber is 1000mb, the gas concentration of the hydrogen peroxide vapor corresponds to (4.9mb/1000mb)×100%=0.49%.

Converting this to weight per volume, the ideal gas volume at 45°C corresponds to (22.4L/mol(at 273k)×(273+45))/273=26.09 L/mol.

Therefore, dividing the gas concentration of 0.49% of hydrogen peroxide vapor by the ideal gas volume at that temperature, that is, 0.49% / 26.09 (L/mol) = 0.0188 mol%, therefore, hydrogen peroxide vapor in a sterilization chamber of 1000L volume is present at 0.000188 mol/L.

At this time, since the molecular weight of hydrogen peroxide is 34 g/mol, it may be expressed as a concentration of 6.4 mg/L.

As described above, the hydrogen peroxide concentration may be measured by the first humidity sensor and the second humidity sensor.

On the other hand, as described above, the sterilization apparatus according to the present invention is a first humidity sensor 111 positioned in a predetermined area inside the sterilization chamber 110 and a second humidity sensor 111 positioned adjacent to the first humidity sensor 111 . It includes a humidity sensor 112, through the first humidity sensor 111 and the second humidity sensor 112, it is possible to measure the concentration of hydrogen peroxide inside the sterilization chamber (110).

At this time, in general, a humidity sensor is a sensor for detecting humidity in an object, and such a humidity sensor is well known as a sensor for detecting the amount of water vapor contained in air.

In the case of such a general humidity sensor, a sensing unit for detecting humidity is included, but when moisture is adsorbed to the sensing unit, the reaction speed and accuracy of the humidity sensor are deteriorated.

Therefore, in the present invention, in order to improve the reaction speed and accuracy of the above-described humidity sensor, the sterilization apparatus according to the present invention as described above has the following structure.

However, the sterilization apparatus according to the present invention to be described later may be the same as described above, except for the humidity sensor, which will be described later.

6 is a schematic view for explaining the sterilization chamber and the humidity sensor unit according to the present invention.

At this time, in FIG. 6 for convenience of explanation, only the sterilization chamber area is shown in the sterilization apparatus of FIGS. 1 and 2 described above, however, as described above, the sterilization apparatus according to the present invention to be described below is, Except as described below, reference may be made to the sterilization apparatus of FIGS. 1 and 2 described above.

Referring to FIG. 6 , the sterilization apparatus according to the present invention may include a humidity sensor unit 200 that is fastened to a predetermined area of the sterilization chamber 110 .

A detailed configuration of the humidity sensor unit 200 will be described later.

At this time, in FIG. 6 , the region to which the humidity sensor unit 200 is fastened is shown as the upper end of the sterilization chamber 110 , but in the present invention, the humidity sensor unit 200 is located in the sterilization chamber 110 . It does not limit the area to be fastened.

In addition, for convenience of explanation, in FIG. 6 , the number of the humidity sensor units is illustrated as one, but, unlike this, one or more humidity sensor units may be configured according to the user's needs.

For example, as in FIG. 2 described above, the humidity sensor includes a first humidity sensor; and a second humidity sensor positioned adjacent to the first humidity sensor, the number of the humidity sensor parts may be two, however, the number of the humidity sensor parts is not limited in the present invention.

After all, in the present invention, the detailed configuration of the humidity sensor unit and the fastening relationship between the humidity sensor unit and the sterilization chamber are the main features of the present invention. For this reason, in the present invention, the number of the humidity sensor unit is limited it is not doing

Continuingly, referring to FIG. 6 , the sterilization chamber 110 includes a humidity sensor part fastening part 300 , and at this time, the humidity sensor part 200 is fastened to the humidity sensor part fastening part 300 . can be

A detailed configuration of the humidity sensor coupling part 300 will be described later.

Meanwhile, reference numeral 400 in FIG. 6 corresponds to a rubber ring, and the rubber ring 400 will be described later.

Hereinafter, the sterilization chamber and the humidity sensor unit according to the present invention will be described in more detail.

7 is a schematic separated view showing a part of the humidity sensor unit according to the present invention, FIG. 8 is an enlarged view showing the separation state of the sterilization chamber and the humidity sensor unit of FIG. 6, and FIG. 9 is the sterilization chamber and humidity of FIG. It is an enlarged view showing the coupling state of the sensor part.

First, referring to FIG. 7 , the humidity sensor unit 200 according to the present invention includes a body case 210 ; a sensing unit 220 positioned on one side of the body case 210; and a cover case 230 that covers the sensing unit 220 .

More specifically, the body case 210 may have a cylindrical shape, but the shape of the body case 210 is not limited in the present invention.

In this case, the body case 210 is preferably made of a metal material having excellent thermal conductivity, for example, at least one material selected from the group consisting of aluminum, stainless steel, nickel, iron, silver, and alloys thereof. can be made with This will be described later.

In addition, the sensing unit 220 includes a sensing element unit 221; and a wiring unit 222 connected to the sensing element unit 221 . In the present invention, the sensing element unit 221 includes a humidity sensor.

That is, the humidity in the object can be detected through the sensing element unit 221 including the humidity sensor, and the detected humidity value is transmitted through the wiring unit 222, for example, the main controller ( not shown), which corresponds to a matter obvious in the art, and thus a detailed description thereof will be omitted.

Meanwhile, the sensing unit 220 includes a temperature sensor located adjacent to the sensing element unit 221 or located at the sensing element unit 221 .

The temperature sensor is for measuring the temperature of the sensing unit 220 region. In the present invention, the temperature sensor is located in the sensing element unit 221 to measure the temperature of the sensing element unit 221 region. Alternatively, the temperature of the sensing element unit 221 region may be measured by direct measurement or alternatively, the temperature sensor is positioned adjacent to the sensing element unit 221 .

At this time, in the present invention, in order to measure the accurate temperature of the sensing unit 220 region, the temperature sensor is preferably located in the sensing element unit 221 , that is, the sensing element unit 221 according to the present invention. ) preferably includes a humidity sensor and a temperature sensor.

In the present invention, the configuration of such a temperature sensor is essential. Therefore, in the present invention, the humidity sensor unit 200 is a temperature sensor for measuring the temperature of the sensing unit 220 region of the humidity sensor unit 200 . can be defined as including, and, as described above, in order to measure the accurate temperature of the region of the sensing unit 220 , the temperature sensor is preferably located in the sensing element unit 221 .

At this time, the temperature sensor measures the temperature of the sensing unit 220 region, and the measured temperature value may be transmitted to, for example, the main controller (not shown) through the wiring unit 222, , which corresponds to a matter obvious in the art, a detailed description below will be omitted.

The role of such a temperature sensor will be described later.

Continuingly, referring to FIG. 7 , in the humidity sensor unit 200 according to the present invention, the cover case 230 covering the sensing unit 220 is fastened to the main body case 210 , in the present invention , through the cover case 230 , the sensing unit 220 may be protected.

More specifically, the cover case 230 may include a through hole 231 positioned in a certain area of the cover case 230, and the figure shows that the through hole 231 is one. , the number of the through-holes 231 is not limited in the present invention.

At this time, through the through hole 231, the hydrogen peroxide or hydrogen peroxide water in the sterilization chamber 110, by flowing into the cover case 230, the humidity sensor unit 200, the cover case 230 is introduced into the The concentration of hydrogen peroxide can be measured.

Meanwhile, the cover case 230 according to the present invention may have a cylindrical shape, but the shape of the cover case 230 is not limited in the present invention.

At this time, the cover case 230 is preferably made of a hydrophobic material, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polycarbonate (PC), polystyrene (PS), polypropylene (PP) ), polyimide (PI), polyethylene sulfonate (PES), polyoxymethylene (POM), polyether ether ketone (PEEK), polyether sulfone (PES) and any one selected from the group consisting of polyether imide (PEI) It is preferable that it is a single plastic material. This will be described later.

Continuingly, referring to FIG. 7 , the humidity sensor unit 200 according to the present invention may further include a first flange unit 240 positioned at one end of the body case 210 , and the first The flange part 240 is configured to be fastened with the second flange part (330 in FIGS. 8 and 9) of the humidity sensor part fastening part 300 to be described later, and through the first flange part 240, the present invention According to the humidity sensor unit may be fastened to the humidity sensor unit fastening unit 300 .

Next, referring to FIGS. 8 and 9 , the humidity sensor unit 200 according to the present invention further includes a heating element unit 250 for controlling the temperature of the sensing unit region.

More specifically, the heating element part 250 is for controlling the temperature of the sensing part region to be higher than the temperature of the sterilization chamber, and as shown in FIGS. 8 and 9 , the heating element part 250 is It may be located in a predetermined area of the main body case 210 .

The heating element unit 250 may be a known heating element such as a heating coil, and the temperature of the main body case 210 may be controlled by the heating element unit 250 , and through this, the main body case It is possible to control the temperature of the region of the sensing unit 220 located in one direction of the.

Meanwhile, although not shown in the drawings, the heating element unit 250 may be located adjacent to the sensing element unit 221 , or located at the sensing element unit 221 .

That is, the heating element unit is for controlling the temperature of the sensing unit 220 region, and in the present invention, the heating element unit is located in the sensing element unit 221, The temperature of the sensing element unit 221 region may be controlled by directly controlling the temperature or, alternatively, by positioning the heating element unit adjacent to the sensing element unit 221 .

However, in the present invention, the position of the heating element is not limited.

The role of the heating element unit 250 will be described later.

In addition, referring to FIGS. 8 and 9 , the humidity sensor unit 200 according to the present invention further includes an insulator unit 260 covering the heating element unit 250 of the body case 210 .

That is, as described above, the humidity sensor unit 200 according to the present invention may include a heating element unit 250 positioned in a predetermined area of the body case 210, in this case, the insulator unit ( By covering the heating element part 250 through the 260), it is possible to prevent the user from being injured by the heating element part 250 as well as to reduce the loss of heat generated by the heating element part 250. can be prevented

Subsequently, with reference to FIGS. 8 and 9 , the humidity sensor part fastening part 300 according to the present invention penetrates into the interior of the sterilization chamber 110, and the sensing part of the humidity sensor part 200 ( a sensing part insertion hole 310 into which 220 is inserted; It includes a pipe 320 extending from the sensing part insertion hole 310 and protruding to the outside of the sterilization chamber 110 , and a second flange part 330 positioned at the other end of the pipe 320 .

More specifically, the sensing unit 220 of FIG. 7 as described above is inserted into the sensing unit insertion hole 310 to be positioned inside the sterilization chamber 110 or adjacent to the interior of the sterilization chamber, At this time, one end of the cover case 230 that covers the sensing unit 220 is also located inside the sterilization chamber 110 together with the sensing unit 220 or located adjacent to the inside of the sterilization chamber. can do.

In addition, as described above, the cover case 230 may include a through hole 231 positioned in a predetermined area of the cover case 230 , and in this case, the through hole 231 is the cover case ( By being located at one end region of the 230, the through hole 231 is also located inside the sterilization chamber 110 together with the sensing unit 220 or is located adjacent to the interior of the sterilization chamber.

Thus, through the through hole 231, hydrogen peroxide or hydrogen peroxide water in the sterilization chamber 110, by flowing into the cover case 230, the sensing unit 220 of the humidity sensor unit 200, the The concentration of hydrogen peroxide introduced into the cover case 230 may be measured.

On the other hand, as described above, in the present invention, the sensing unit 220 is located inside the sterilization chamber 110, or is located adjacent to the interior of the sterilization chamber, more specifically, the The sensing element unit 221 of the sensing unit 220 is located inside the sterilization chamber 110, or is located adjacent to the interior of the sterilization chamber.

At this time, based on the direction from the inner wall of the sterilization chamber to the inside of the sterilization chamber, one end of the sensing element part 221 is located in the range of +0.5 cm to -2 cm from the inner wall of the sterilization chamber. desirable.

One end of the sensing element unit 221 means an end opposite to the region where the wiring unit 222 is located.

More specifically, in the present invention, the sensing element unit 221 of the sensing unit 220 is located inside the sterilization chamber 110 or is located adjacent to the interior of the sterilization chamber, the sensing When the element part 221 is located inside the sterilization chamber 110, one end of the sensing element part 2221 is based on the direction from the inner wall of the sterilization chamber to the inside of the sterilization chamber, the It may be located in the range of 0 to +0.5 cm from the inner wall of the sterilization chamber.

In addition, when the sensing element part 221 is located adjacent to the inside of the sterilization chamber, one end of the sensing element part 2221 is based on the direction from the inner wall of the sterilization chamber to the inside of the sterilization chamber. As a result, it may be located in a range of -2.0 cm or less from the inner wall of the sterilization chamber.

That is, when the sensing element part 221 according to the present invention is located inside the sterilization chamber 110, the sensing element part 221 is the direction from the inner wall of the sterilization chamber to the inside of the sterilization chamber. When located in a certain area, or when the sensing element unit 221 is located adjacent to the inside of the sterilization chamber, the sensing element unit 221 moves from the inner wall of the sterilization chamber to the outside of the sterilization chamber. It may be located in a certain area of the direction.

On the other hand, when the sensing element part 221 is positioned adjacent to the inside of the sterilization chamber, one end of the sensing element part 221 is located in excess of -2.0 cm from the inner wall of the sterilization chamber. , for example, when one end of the sensing element part 221 is located in a region of -3.0 cm from the inner wall of the sterilization chamber, the sensing efficiency of the sensing element part 221 is significantly lowered, therefore, this In the present invention, based on the direction from the inner wall of the sterilization chamber to the inside of the sterilization chamber, one end of the sensing element part 221 is located in the range of +0.5 cm to -2 cm from the inner wall of the sterilization chamber. it is preferable

Continuingly, referring to FIGS. 8 and 9 , the rubber ring 400 according to the present invention includes a rubber ring body 410 ; and a cover case insertion hole 420 penetrating through the rubber ring body 410 , that is, the cover case 230 of the humidity sensor unit 200 is the rubber ring 400 . It may be inserted into the cover case insertion hole 420 .

More specifically, for example, as shown in FIG. 9 , the cover case 230 of the humidity sensor unit 200 is inserted into the cover case insertion hole 420 of the rubber ring 400 . In this state, the sensing unit 220 is inserted into the sensing unit insertion hole 310 to be positioned inside the sterilization chamber 110 , and also a cover case 230 that covers the sensing unit 220 . ) may also be located at one end of the sterilization chamber 110 together with the sensing unit 220 .

At this time, the first flange portion 240 positioned at one end of the body case 210 and the second flange portion 330 of the humidity sensor portion fastening portion 300 are fastened to each other, so that the humidity sensor portion 200 ) may be fastened to the humidity sensor part fastening part 300 .

In addition, in the present invention, in a state where the rubber ring 400 is positioned between the first flange part 240 and the second flange part 330 , the humidity sensor part 200 is the humidity sensor part fastening part. By being fastened to 300 , the state of the humidity sensor unit 200 and the humidity sensor unit fastening unit 300 can be closely maintained.

However, in the present invention, the method of fastening the humidity sensor part to the humidity sensor part fastening part is not limited.

Meanwhile, as described above, according to the present invention, the sensing unit 220 includes a temperature sensor located adjacent to the sensing element unit 221 or located at the sensing element unit 221 . .

The temperature sensor is for measuring the temperature of the sensing unit 220 region. In the present invention, the temperature sensor is located in the sensing element unit 221 to measure the temperature of the sensing element unit 221 region. Alternatively, the temperature of the sensing element unit 221 region may be measured by direct measurement or alternatively, the temperature sensor is positioned adjacent to the sensing element unit 221 .

In addition, as described above, the humidity sensor unit 200 according to the present invention further includes a heating element unit 250 for controlling the temperature of the sensing unit region, and more specifically, the heating element unit (250) may control the temperature of the sensing unit region higher than the temperature of the sterilization chamber.

Hereinafter, the roles of the temperature sensor and the heating element unit 250 according to the present invention will be described.

As shown in Table 2 above, the sterilization chamber according to the present invention is set at a constant temperature for each step, for example, it may be set in the range of 45 to 55 ℃. However, in the present invention, the temperature of the sterilization chamber is merely exemplary, and the temperature of the sterilization chamber is not limited in the present invention.

At this time, in the present invention, the humidity sensor unit 200 may include, for example, a first humidity sensor and a second humidity sensor positioned adjacent to the first humidity sensor, and as described above, the second humidity sensor The first humidity sensor may detect the first relative humidity based on the amount of hydrogen peroxide and the amount of water vapor, and the second humidity sensor may detect the second relative humidity based on the amount of water vapor.

That is, the humidity sensor unit according to the present invention measures the humidity of the sterilization chamber. When moisture is adsorbed to the sensing element unit 221 of the humidity sensor unit 200, the sensing element unit 221 Responsiveness and accuracy are significantly reduced.

More specifically, the present invention is to accurately detect the concentration of hydrogen peroxide in the hydrogen peroxide solution in the sterilization chamber through the humidity sensor unit. As described above, when moisture is adsorbed to the sensing element unit 221, When the reaction speed and accuracy of the sensing element unit 221 are significantly reduced, the speed of measuring the concentration of hydrogen peroxide by the humidity sensor unit is lowered, and in particular, the measurement value for the concentration of hydrogen peroxide is very inaccurate. .

Therefore, in the present invention, through the temperature sensor and the heating element unit 250, it is intended to prevent a decrease in the reaction speed and accuracy of the humidity sensor unit.

More specifically, in the present invention, in order to prevent moisture from adsorbing to the sensing element unit 221 of the humidity sensor unit 200, the temperature of the sensing unit 220 region is higher than the temperature of the sterilization chamber. should be controlled

That is, in the process of the operation of the humidity sensor unit, the temperature of the humidity sensor unit, more specifically, the temperature of the sensing unit 220 region is controlled to be higher than the temperature of the sterilization chamber, whereby the humidity sensor unit 200 is It is possible to prevent moisture from adsorbing to the sensing element unit 221 .

Therefore, the method for measuring the concentration of hydrogen peroxide in the present invention comprises the steps of controlling the temperature of the first humidity sensor, more specifically, the temperature of the first sensing unit region of the first humidity sensor to be higher than the temperature of the sterilization chamber; and controlling the temperature of the second sensing unit region of the second humidity sensor to be higher than the temperature of the sterilization chamber, and thereafter, detecting the first relative humidity by the first humidity sensor; detecting a second relative humidity by a second humidity sensor; deriving a difference value between the first relative humidity and the second relative humidity; And it is possible to measure the concentration of hydrogen peroxide through the step of calculating the concentration of hydrogen peroxide through the difference value.

At this time, controlling the temperature of the sensing unit 220 region to be higher than the temperature of the sterilization chamber, through the temperature sensor, measuring the temperature of the sensing unit 220 region; comparing the temperature of the sensing region with the temperature of the sterilization chamber; When the temperature of the sensing unit region is lower than the temperature of the sterilization chamber, by heating the humidity sensor unit, more specifically, the body case 210 through the heating element unit, the temperature of the sensing unit region is sterilized and controlling it to be higher than the temperature of the chamber.

When this is applied to the above-described method for measuring the concentration of hydrogen peroxide, the step of controlling the temperature of the first sensing unit region of the first humidity sensor to be higher than the temperature of the sterilization chamber is, through the first temperature sensor, of the first sensing unit region. measuring the temperature; comparing the temperature of the first sensing unit region with the temperature of the sterilization chamber; When the temperature of the first sensing unit region is lower than the temperature of the sterilization chamber, by heating the first humidity sensor unit through the first heating element unit, the temperature of the first sensing unit region is lower than the temperature of the sterilization chamber. It can be defined as a stage of high control.

In addition, the step of controlling the temperature of the second sensing unit region of the second humidity sensor to be higher than the temperature of the sterilization chamber, through the second temperature sensor, measuring the temperature of the second sensing unit region; comparing the temperature of the second sensing region with the temperature of the sterilization chamber; When the temperature of the second sensing unit region is lower than the temperature of the sterilization chamber, by heating the second humidity sensor unit through the second heating element unit, the temperature of the second sensing unit region is lower than the temperature of the sterilization chamber. It can be defined as a stage of high control.

That is, in the present invention, in the process of the operation of the humidity sensor unit, the temperature of the humidity sensor unit, more specifically, the temperature of the sensing unit 220 region is controlled to be higher than the temperature of the sterilization chamber, so that the humidity sensor unit ( 200), it is possible to prevent moisture from adsorbing to the sensing element unit 221, and thereby, it is possible to prevent a decrease in the reaction speed and accuracy of the humidity sensor unit.

Meanwhile, as described above, the humidity sensor unit 200 according to the present invention includes a cover case 230 that covers the sensing unit 220 , and the cover case 230 is preferably made of a hydrophobic material. do.

In the present invention, making the cover case 230 a hydrophobic material is similar to the above-described role of the temperature sensor and the heating element part. In the present invention, by making the material of the cover case 230 a hydrophobic material, the cover case It is possible to prevent moisture from adsorbing to the 230 .

More specifically, in the case of a metal material, when the cover case 230 is made of a metal material corresponding to hydrophilicity, moisture is adsorbed to the cover case 230 , so that it is located inside the cover case 230 . The reaction speed and accuracy of the sensing unit 220 are deteriorated.

Therefore, in the present invention, the material of the cover case is a hydrophobic material, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polycarbonate (PC), polystyrene (PS), polypropylene (PP), Any one selected from the group consisting of polyimide (PI), polyethylene sulfonate (PES), polyoxymethylene (POM), polyether ether ketone (PEEK), polyether sulfone (PES) and polyether imide (PEI) By using the plastic material, it is possible to prevent moisture from adsorbing to the cover case 230 , and thereby, it is possible to prevent a decrease in the reaction speed and accuracy of the humidity sensor unit.

As described above, it is not easy to measure the concentration of hydrogen peroxide in the sterilization chamber of the sterilization apparatus in using the concentrated hydrogen peroxide solution as a sterilizing agent.

However, in the present invention, a first humidity sensor and a second humidity sensor are included in the target space, such as a sterilization chamber, and the relative humidity is detected by each of these sensors, and the concentration of hydrogen peroxide by the difference in these relative humidity can be easily measured.

On the other hand, in the case of such a general humidity sensor, a sensing unit for detecting humidity is included, but when moisture is adsorbed to the sensing unit, the reaction speed and accuracy of the humidity sensor are deteriorated.

However, in the present invention, in the process of the operation of the humidity sensor unit, the temperature of the humidity sensor unit, more specifically, the temperature of the sensing unit region is controlled to be higher than the temperature of the sterilization chamber, whereby the sensing element unit of the humidity sensor unit It can prevent moisture from adsorbing.

In addition, in the present invention, by preventing moisture from adsorbing to the sensing element portion of the humidity sensor portion, it is possible to prevent a decrease in the reaction speed and accuracy of the humidity sensor portion.

Although the embodiments of the present invention have been described with reference to the above and the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can practice the present invention in other specific forms without changing its technical spirit or essential features. You will understand that there is Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive.

Claims (7)

In the sterilization apparatus comprising a sterilization chamber,
The sterilization chamber includes a humidity sensor unit fastened to a predetermined area of the sterilization chamber,
The humidity sensor unit, the body case; a sensing unit located in one direction of the body case; and a cover case covering the sensing unit,
The sensing unit may include: a sensing element unit including a humidity sensor; and a temperature sensor located adjacent to the sensing element unit, or located in the sensing element unit,
The humidity sensor unit further comprises a heating element for controlling the temperature of the sensing unit,
The temperature sensor measures the temperature of the sensing element part, and after comparing the temperature of the sensing element part and the temperature of the sterilization chamber,
When the temperature of the sensing element part is lower than the temperature of the sterilization chamber, by heating the sensing part through the heating element part, the temperature of the sensing element part is controlled to be higher than the temperature of the sterilization chamber,
The material of the cover case is a hydrophobic material,
The hydrophobic material is polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polycarbonate (PC), polystyrene (PS), polypropylene (PP), polyimide (PI), polyethylene sulfonate (PES), poly It is characterized in that it is made of any one plastic material selected from the group consisting of oxymethylene (POM), polyetheretherketone (PEEK), polyethersulfone (PES) and polyetherimide (PEI),
The sterilization apparatus, characterized in that by configuring the material of the cover case with a hydrophobic material to prevent moisture adsorption to the cover case. The method of claim 1,
The sterilization chamber includes a humidity sensor part fastening part to which the humidity sensor part is fastened,
The humidity sensor part fastening part is penetrated into the interior of the sterilization chamber, the sterilization apparatus including a sensing part insertion hole into which the sensing part of the humidity sensor part is inserted. 3. The method of claim 2,
The sensing unit is inserted into the sensing unit insertion hole, located inside the sterilization chamber, and one end of the cover case is also located inside the sterilization chamber. 3. The method of claim 2,
The humidity sensor unit further comprises a first flange portion located at one end of the body case,
The humidity sensor fastening part, a pipe extending from the sensing part insertion hole, and protruding to the outside of the sterilization chamber; and a second flange portion located at the other end of the pipe,
The sterilization chamber, sterilization apparatus, characterized in that it further comprises a rubber ring positioned between the first flange portion and the second flange portion. delete delete delete

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