KR20200033076A - Air spraying device coated by nitride or oxynitride and coating method of the same - Google Patents

Abstract

The present invention relates to a gas injector coated with nitride or oxynitride. More specifically, provided is the gas injector coated with nitride or oxynitride, wherein nitride or oxynitride is coated on the gas injector, so that the wettability of a molten metal on the surface of the gas injector is lowered and a contact angle is increased to prevent a solidified metal from remaining in the gas injector, thereby reducing human and material factors that are input to remove the solidified metal.

Description

Gas sprayer and coating method coated with nitride or oxynitride {Air spraying device coated by nitride or oxynitride and coating method of the same}

The present invention relates to a gas injector and a coating method coated with nitride or oxynitride, and more specifically, by coating the gas injector with nitride or oxynitride, the wettability of molten metal on the surface of the gas injector is lowered. The gas sprayer and coating method coated with nitride or oxynitride are used to increase the contact angle so that the solidified metal hardly remains in the gas injector, thus reducing the human and physical factors input to remove the solidified metal. to provide.

In order to improve the corrosion resistance of the steel sheet, domestic and foreign steel makers are applying a plating process to form a second metal layer (zinc, aluminum) on the surface of the steel sheet. As the range of use is broadened as a material for home appliances or automobiles where surface quality is important, the plating quality of steel sheets is becoming increasingly important. Among the plating methods of a steel sheet, a representative continuous galvanizing line is generally used, and this is a method of passing a steel sheet through a plating bath filled with molten zinc and molten aluminum by a plating method using a hot dip bath. The gas injector, which is a key part in the continuous hot-dip plating line, plays a role of adjusting the target plating thickness by spraying high-pressure air. The material of this gas injector is made of metal, such as sus, inconel, titanium, etc. When the molten zinc and molten aluminum splash in the gas injector during the process of injecting high-pressure air, the passage through which the air is injected is blocked or narrowed so that the air There is a problem in controlling the plating thickness by spraying non-uniformly. In order to solve this problem, zinc and aluminum attached to the gas injector are removed by using a gas injector cleaner, but it is not easy to remove because of the high wettability of molten zinc and molten aluminum attached to the gas injector made of metal. Since molten zinc and molten aluminum exist, it takes a lot of time and manpower to remove them later, or in some cases, there is a problem that a gas injector itself needs to be replaced to cause loss.

In this regard, in Korean Patent Registration No. 10-1694443, an induction heating unit disposed on an outer surface of a gas injector and applying a magnetic flux fluctuating with time to a lip of the gas injector to induce heating the lip; And a source unit for applying an alternating current to the induction heating unit, to prevent the accumulation of molten metal at the gas ejector outlet.

However, the technology has to be equipped with a separate induction heating unit, a source unit, etc., so there is a burden on additional equipment.

Korea Registered Patent No. 10-1694443

The present invention has been devised to solve the problems of the prior art as described above, and the present invention is to prevent the molten metal delivered to the gas injector during the plating process from being wet due to the surface coating layer of the gas injector represented by nitride or oxynitride. The purpose of the present invention is to provide a gas sprayer coated with nitride or oxynitride that is simple in the process because it prevents various problems caused by the accumulation of molten metal in the injector and accumulates, and there is no need to construct additional facilities to remove the solidified metal. Is done.

In addition, another object of the present invention is to provide a method for generating a dense coating layer, although it is not easy to create such a coating layer on a gas injector.

In order to achieve the above object, the present invention forms a nitride or oxynitride coating layer on a gas injector to impart low wettability to the surface of the gas injector, wherein the coating layer is formed by a low temperature spray coating at room temperature or low temperature. Alternatively, an oxynitride coated gas injector is provided.

It is preferable that the oxide is silicon nitride or aluminum nitride, and the oxynitride is sialon.

In addition, the present invention is a method for forming a nitride or oxynitride coating layer on a gas injector to impart low wettability to the surface of the gas injector, the method comprising: a raw material supply unit 10 for supplying a raw material that is an oxide or an oxynitride; A transport gas supply unit 20 for supplying transport gas for transporting the raw materials; An acceleration gas supply unit 30 for supplying an acceleration gas for accelerating the raw material and the transport gas; The raw material supplied from the raw material supply unit 10 and the transfer pipe 111 through which the transfer gas supplied from the transfer gas supply unit 20 flows in and is transferred, and the accelerated gas supplied from the acceleration gas supply unit 30 flows in. A supply nozzle unit 60 including an accelerating gas supply pipe 130; An injection nozzle unit 70 for receiving raw materials, transport gas, and acceleration gas from the supply nozzle unit 60 and spraying the raw materials into the substrate installed in the chamber 80; A chamber 80 for providing a space in which a raw material sprayed from the spray nozzle unit 70 collides with a substrate and a coating layer is formed; And a pump 90 for allowing the raw material supplied from the injection nozzle unit 70 to be accelerated and transferred into the chamber 80 and pumping the transfer gas and the acceleration gas in the chamber 80 to be discharged to the outside. Included, the raw material supplied from the raw material supply unit 10 and the feed gas supplied from the feed gas supply unit 20 are mixed by mixing in the transfer pipe 111, the raw material and the transfer gas through the transfer pipe 111 Is transported in a mixed state, the raw material and the transport gas are transported in a mixed state, and then the acceleration gas transported through the accelerator gas supply pipe 130 is accelerated to flow into the injection nozzle unit 70, and accelerated. The end of the gas supply pipe 130 is installed to be inserted more toward the injection nozzle portion 70 than the end of the transfer pipe 111, and the chamber is maintained in a vacuum by a vacuum pump before and after injection of the transfer gas and accelerated gas.It is performed by a low speed on the spray coating device, comprising the steps of: supplying with an oxide or an oxynitride of material and a transporting gas; Supplying an additional acceleration gas to the transport gas to cause the transport gas and the acceleration gas to converge and mix; And injecting the mixed transport gas and the accelerating gas into a gas injector. The present invention provides a method of coating nitride or oxynitride in a gas injector.

It is preferable that the feed pipe 111 of the raw material and the conveying gas is provided downward in a vertical direction with respect to a horizontal plane so that the raw material and the conveying gas are incident vertically toward the center of the confluence pipe 135.

It is preferable that the feed pipe 111 of the raw material and the conveying gas is inclined downward with respect to a horizontal surface so that the raw material and the conveying gas are incident obliquely toward the center of the confluence pipe 135.

It is preferable that the flow rate of the acceleration gas flowing through the acceleration gas supply pipe 130 is greater than the flow rate of the transport gas.

The transport gas is supplied at a flow rate of 0.1 to 5 slm, and the acceleration gas is preferably supplied at a flow rate of 10 to 400 slm.

It is preferable that a plurality of holes are provided at the ends of the accelerator gas supply pipe 130, and the acceleration gas is ejected through the plurality of holes, and at least some of the holes are inclined.

The inclined angle of the inclined hole is 5 to 20 °, and it is preferable that the inclined hole forms a radial shape with respect to the center.

The injection nozzle portion 70 is preferably provided with a nozzle of a type in which the inner diameter decreases from the inlet from which the raw material is introduced, and then the inner diameter increases from a certain portion to the outlet.

Preferably, the substrate includes a ceramic substrate, a metal substrate, a metal alloy substrate, or a polymer substrate.

According to the present invention as described above, various problems caused by molten metal solidifying and accumulating in the gas injector are prevented by preventing the molten metal delivered to the gas injector during the plating process from getting wet due to the surface coating layer of the gas injector represented by nitride or oxynitride. In order to prevent and remove the solidified metal, there is no need to additionally construct a facility, so a simple effect is expected in the process.

Further, according to the present invention, although it is not easy to generate such a coating layer on a gas injector, it is possible to produce a dense coating layer.

1 is a configuration diagram showing an example of a low temperature spray coating apparatus according to a preferred embodiment of the present invention.
2 is a view showing a supply nozzle unit according to various examples.

In the present invention, the coating object is a gas injector, wherein the gas injector is composed of two upper and lower plates and side plates, and the upper and lower two plates are not completely sealed to constitute an injection hole, so that slits are provided between the plates.

In the present invention, a low-temperature low-speed spray coating device was used to form a uniform and dense coating layer on a gas injector. If the device is used, it can be sprayed without backflow of raw materials such as oxides or oxynitrides, thereby suppressing the backflow of raw materials. It is possible to increase the flowability and coating efficiency of the raw material, and since the raw material is sprayed at a low temperature to form a coating layer, the raw materials do not react with each other and the structure of the coating layer does not fluctuate, and the coating material (raw material) or between the substrate and the coating material It is possible to prevent a phenomenon such as high temperature diffusion or fusion.

In addition, by coating the particles with the kinetic energy of particles by accelerating the particles in a vacuum without using thermal energy, there is no need for a nozzle and piping and cooling system made of materials that can be used at high temperature and high pressure, and various types of nozzles , Piping can be applied.

In addition, since the gas is not heated and the injection speed is slow, there is almost no reflux of the gas, and thus the coating is smooth because the specific gravity or minute particles maintain the initial particle flow rate as much as possible. The coating can be made smoothly even though the injection speed is slower than 400 m / s compared to the case of the prior art in which the injection speed is higher than 400 m / s using gas.

In addition, the coating can be smoothly and densely performed without separately treating the surface of the coated material by blasting or the like, and can maintain high bonding strength.

In addition, since the coating layer does not have a separate directionality, there is no physical property difference or property change according to the directionality, and a dense coating layer having a low porosity can be obtained.

In addition, since the high-temperature melt is not sprayed or the high-temperature gas is used, it is not necessary to consider the heat resistance of the substrate material, and thus selectivity of the substrate material can be increased.

In addition, as the size of the coating material is tens of nm or more, the selection of the coating material size can be widened as compared to the prior arts having a size of 1 micrometer or more. That is, the coating property of the fine particles is not reduced due to the reverse flow of the high-speed gas generated when the gas is used.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the following embodiments are provided to those of ordinary skill in the art to fully understand the present invention and may be modified in various other forms, and the scope of the present invention is limited to the embodiments described below. It does not work. The same reference numerals in the drawings refer to the same elements.

Hereinafter, "low temperature" is used to mean a temperature lower than the temperature at which the coating layer is formed by a melt spray coating method (thermal coating method, thermal spray coating).

In addition, "low speed" means that the injection speed is lower than that of a conventional cold spray coating. According to the cold spray coating, the particle speed is at least 400 m / sec.

The present invention is to form a nitride or oxynitride coating layer on a gas injector to impart low wettability to the surface of the gas injector, wherein the coating layer is a gas injector coated with nitride or oxynitride, characterized in that the coating layer is formed by low-temperature spray coating at room temperature or low temperature. Provides It is preferable that the oxide is silicon nitride or aluminum nitride, and the oxynitride is sialon.

As can be seen from the table below, nitrides and oxynitrides exhibit low wettability to molten metals. Therefore, in the present invention, it was decided to apply nitride and oxynitride as a coating layer.

(Source: Wettability of silicon nitride based ceramic by liquid metals, Trans.JWRI, Vol. 30 (2001) (top)

Behavior of the wettability of a SiAlON-base ceramic by molten steel, Journal of the European Ceramic Society 25 (2005) 1041-1048 (bottom)

As a method of coating nitride and oxynitride, CVD and PVD methods are known. In the case of the CVD process, the gas temperature of the metal material may be deformed due to the high process temperature of approximately 1000 ° C, and the PVD process is difficult to control the dense crystal structure, and thus, the bonding property is low and the penetration property is undesirable.

On the other hand, the low-temperature spray coating method is a method capable of dense coating while preserving the characteristics of the raw material at room temperature, and there is no deformation of the gas injector, and excellent bonding properties, which is realized by the device devised by the present invention. , This will be described later.

In the case of the nitride or oxynitride used in the present invention, powder or agglomerates are used, but powders of a certain size or less (for example, 250 µm for powders and 150 µm for aggregates) are used through a sieve.

According to this, it is possible to secure the low wettability of the surface of the gas injector, and it is possible to realize high bonding strength by using the following coating device.

In order to form the nitride or oxynitride coating layer of the present invention, the following low temperature spray coating device is used, which will be described.

The low temperature spray coating apparatus according to a preferred embodiment of the present invention includes a raw material supply unit 10 for supplying raw materials, a transfer gas supply unit 20 for supplying a transport gas for transporting the raw materials, the raw material and the Acceleration gas supply unit 30 for supplying an acceleration gas for accelerating the transfer gas, and a transfer pipe through which the feed gas supplied from the raw material supply unit 10 and the transfer gas supplied from the transfer gas supply unit 20 are introduced and transferred (111) and the supply nozzle unit 60 including the acceleration gas supply pipe 130 through which the acceleration gas supplied from the acceleration gas supply unit 30 is introduced and transferred, and the raw material and transport gas from the supply nozzle unit 60 And a space in which a coating layer is formed by a jet nozzle 70 for spraying raw materials to a substrate installed in the chamber 80 receiving the acceleration gas, and a raw material sprayed from the jet nozzle 70 colliding with the substrate. To provide the chamber 80 and the raw material supplied from the injection nozzle unit 70 to be accelerated and transferred into the chamber 80 and pumping the transfer gas and the acceleration gas in the chamber 80 to be discharged to the outside. It includes a pump 90 for doing.

The raw material supplied from the raw material supply unit 10 and the conveying gas supplied from the conveying gas supply unit 20 are mixed and mixed in the conveying pipe 111, and the raw material and conveying gas are mixed through the conveying pipe 111. It is transferred to the state, and the raw material and the transport gas are transported in a mixed state, and then the acceleration gas transported through the accelerator gas supply pipe 130 is accelerated while flowing into the injection nozzle unit 70, and the accelerator gas supply pipe ( 130) It is preferable that the end is installed to be inserted more toward the injection nozzle portion 70 than the end of the transfer pipe 111.

Since the present invention uses the suction power by vacuum as energy, a vacuum is applied to the chamber 80 before supplying the raw material, the transfer gas, and the acceleration gas to the chamber 80. In addition, after the transport gas and the acceleration gas are supplied and the residual gas is discharged, air venting is performed again to maintain the vacuum state.

On the other hand, according to an embodiment of the present invention, the feed pipe 111 of the raw material and the conveying gas is provided facing downward in a vertical direction with respect to the horizontal plane so that the raw material and the conveying gas form the central portion of the confluence pipe 135. Can be incident vertically.

According to another embodiment, the feed pipe 111 of the raw material and the conveying gas is provided to be inclined downward with respect to the horizontal surface so that the raw material and the conveying gas can be incident obliquely toward the center of the confluence pipe 135. .

It is preferable that the flow rate of the acceleration gas flowing through the acceleration gas supply pipe 130 is greater than the flow rate of the transport gas.

The transport gas is supplied at a flow rate of 0.1 to 5 slm, and the acceleration gas is preferably supplied at a flow rate of 10 to 400 slm.

It is preferable that a plurality of holes are provided at the end of the accelerator gas supply pipe 130, and the acceleration gas is ejected through the plurality of holes, and at least some of the holes are inclined.

The inclination angle of the inclined hole is 5 to 20 °, and it is preferable that the inclined hole forms a radial shape with respect to the center.

The injection nozzle portion 70 is preferably provided with a nozzle of a type in which the inner diameter decreases from the inlet from which the raw material flows in, and the inner diameter increases from a certain portion to the outlet.

The substrate may include a ceramic substrate, a metal substrate, a metal alloy substrate, or a polymer substrate.

The raw material may include metal powder, oxide powder, fluoride powder, nitride powder, carbide powder or mixtures thereof.

Hereinafter, a cold spray coating apparatus according to a preferred embodiment of the present invention will be described in more detail.

1 is a configuration diagram showing an example of a low temperature spray coating apparatus according to a preferred embodiment of the present invention. 2 is a view showing a supply nozzle unit according to various embodiments.

1 and 2, the low-temperature spray coating apparatus according to a preferred embodiment of the present invention includes a raw material supply unit 10 for supplying raw materials, and a transport gas supply unit 20 for supplying a transport gas for transporting raw materials. ), An acceleration gas supply unit 30 for supplying an acceleration gas for accelerating the raw material and the transport gas, and a feed gas supplied from the feed gas supply unit 20 and the raw material supplied from the raw material supply unit 10 A supply nozzle unit 60 and an supply nozzle unit 60 including an acceleration gas supply pipe 130 through which the acceleration gas supplied from the acceleration pipe supply unit 111 and the acceleration gas supply unit 30 are introduced and transferred. The spraying nozzle unit 70 for spraying the raw material, the transfer gas and the acceleration gas from the substrate to the substrate installed in the chamber 80 and the raw material sprayed from the spray nozzle unit 70 collide with the substrate to form a coating layer. Formed The chamber 80 providing space and the raw material supplied from the injection nozzle unit 70 are accelerated and transferred into the chamber 80 and pumped to the outside by pumping the transfer gas and the acceleration gas in the chamber 80 And a pump 90 to allow discharge.

A coating layer may be obtained by cold spray coating the raw material powder on the surface of the substrate through the low temperature spray coating device.

The raw material supply unit 10 serves to supply the raw material powder. The raw material may be metal powder, oxide powder, fluoride powder, nitride powder, carbide powder or a mixture thereof. Examples of the metal powder include aluminum (Al), copper (Cu), nickel (Ni), zinc (Zn), and tin (Sn). The oxide powder is a powder containing elements such as magnesium (Mg), yttrium (Y), aluminum (Al), calcium (Ca), gadolinium (Gd), and oxygen (O), MgO, Y ₂ O ₃ , Examples of the oxides include Al ₂ O ₃ , CaO, and Gd ₂ O ₃ . The fluoride powder is a powder containing elements such as magnesium (Mg), yttrium (Y), and calcium (Ca) and a fluorine (F) component. Examples of the fluoride include MgF ₂ , AlF ₃ , YF ₃ , and CaF ₂ . Can be lifted. Examples of the nitride powder include AlN and Si ₃ N ₄ . Examples of the carbide powder include SiC. It is preferable that the raw material powder is made of particles having a size (eg, 10 nm to 9.9 µm) within a few µm in consideration of the point that the powder should be injected through the injection nozzle portion 70 and the like.

The transfer gas supply unit 20 serves to supply a transfer gas for the transfer of raw materials. The transport gas may be air (Air), nitrogen (N ₂ ), argon (Ar), helium (He), or a mixture thereof. The transport gas serves to push to transport the raw materials. It is preferable to supply the transport gas at a flow rate of 0.1 to 5 slm. If it exceeds the lower limit of the flow rate range, the powder will not be transferred from the powder supply device, and if it exceeds the upper limit of the flow rate range, the powder will not flow smoothly due to vortex inside the powder supply device, and the powder supply amount is also irregular. Since it causes a decrease in coating uniformity and coating speed, the flow rate of the transport gas has a critical significance in the above range.

The acceleration gas supply unit 30 serves to supply a gas for accelerating the raw material and the transport gas. The acceleration gas may be air (Air), nitrogen (N ₂ ), argon (Ar), helium (He), or a mixture thereof. The accelerator gas serves to increase the kinetic energy of the powder when it collides with the substrate inside the chamber 80 by accelerating the movement of the raw material. The coating is possible by using only the transport gas without using the acceleration gas, but there is a problem in that the coating efficiency is lowered. The acceleration gas is preferably supplied at a flow rate of 10 to 400 slm. When the acceleration gas is outside the lower limit, the injection speed of the powder is lowered to cause the powder to aggregate on the substrate, and if it exceeds the upper limit, the coating layer formed on the substrate is dropped or the substrate is damaged. Accelerated gas has a critical significance in the above range. Here, the flow rate of the acceleration gas should be greater than the flow rate of the transport gas to achieve the original purpose of the acceleration gas.

The supply nozzle unit 60 is supplied from the feed tube 111 and the accelerated gas supply unit 30 through which the feedstock supplied from the raw material supply unit 10 and the transfer gas supplied from the transfer gas supply unit 20 are introduced and transferred. It includes an accelerator gas supply pipe 130 to which the supplied accelerator gas is introduced and transferred. It is preferable that a plurality of holes are provided at the end of the accelerator gas supply pipe 130, and it is preferable that the acceleration gas is ejected through the plurality of holes, and at least some of the holes are preferably inclined. If the accelerated gas ejection port is a specific part, it is not coated uniformly due to the powder tipping phenomenon, and is partially over-coated or aggregated to a specific part. Therefore, it is very important for uniform coating to accelerate gas in various directions.

In addition, the inclination angle of the inclined hole 62 is preferably about 5 to 20 °, more preferably about 7 to 15 °, which is for uniformly spraying the powder, and the inclination angle exceeds the lower limit. In the case, it is difficult to uniformly spray the powder, and if it exceeds the upper limit, vortices are generated inside the nozzle and do not function as an accelerating gas. Also, the powder collides on the side of the accessory and aggregates inside, so the nozzle during the process is in progress. Since this can cause clogging or falling into a lump, an inclination angle has a critical significance in the above range.

That is, it is preferable that the inclined hole 62 is formed radially with respect to the center.

The raw material supplied from the raw material supply unit 10 and the conveyed gas supplied from the conveying gas supply unit 20 are merged and transported in the conveying pipe 111, and then the accelerating gas introduced through the accelerating gas supply pipe 130 is joined. It flows into the injection nozzle portion (70). The raw material and the conveying gas are mixed at a certain ratio by joining the conveying pipe 111, and are transferred in a state in which the raw material and the conveying gas are mixed through the conveying pipe 111, and then accelerated after being conveyed in a mixed state of the conveying gas Acceleration gas transferred through the gas supply pipe 130 is accelerated as it merges and flows into the injection nozzle unit 70.

As shown in FIG. 3, the feed pipe 111 of the raw material and the conveying gas is directed downwardly in a vertical direction with respect to the horizontal plane so that it is vertically incident toward the center of the confluence pipe 135 of the raw material, the conveying gas and the accelerating gas. 4, the feed pipe 111 of the raw material and the transfer gas is formed to be inclined downward with respect to the horizontal plane, so that the raw material and the transfer gas are incident obliquely toward the center of the confluence pipe 135. You may.

When the transfer pipe is in front of the accelerator pipe, the supply of powder by the accelerator gas is not smooth, and in some cases, a phenomenon in which the powder flows countercurrently occurs. Accordingly, it is advantageous to be located behind the accelerator pipe. In addition, by preventing the transfer pipe from being inclined downward in the horizontal plane, the phenomenon of powder agglomeration inside the accessory is prevented, and when horizontal, the powder is agglomerated inside as mentioned above, causing problems.

The feed pipe 111 and the accelerating gas supply pipe 130 of the raw material and the transfer gas are configured to be merged into one in the confluence pipe 135 so that the raw material, the transfer gas, and the acceleration gas can be introduced together into the injection nozzle unit 70, 3 and 4, the end of the acceleration gas supply pipe 130 is installed to be inserted more toward the injection nozzle portion 70 than the end of the feed pipe 111 of the raw material and the transfer gas, and accordingly, the acceleration gas supply pipe 130, the feed pipe 111 of the raw material and the transport gas is combined, it has the advantage that can be injected into the injection nozzle unit 70 without backflow of the raw material by meeting in one confluence pipe 135, the flow performance of the raw material Coating efficiency can be improved. As shown in Figure 2, the end of the accelerator gas supply pipe 130 based on the injection nozzle unit 70 is joined or injected from the confluence pipe 135 at the same position as the feed pipe 111 end of the raw material and the transport gas. The end of the acceleration gas supply pipe 130 based on the nozzle portion 70 is farther away based on the injection nozzle portion 70 than the end of the feed pipe 111 of the raw material and transfer gas, so that the end of the acceleration gas supply pipe 130 and the raw material When the transport pipe 111 of the transport gas is joined at the confluence pipe 135, the flow of the original flow may be prevented, and even a raw material may be reversed. In consideration of this point, the end of the accelerator gas supply pipe 130 is inserted more toward the injection nozzle portion 70 than the end of the feed pipe 111 of the raw material and the transfer gas, so that the end of the accelerator gas supply pipe 130 is the injection nozzle portion 70 It is preferable to install so that the distance is closer than the end of the feed pipe 111 of the raw material and the transfer gas. In addition, when the flow rate of the conveying gas is greater than the flow rate of the accelerating gas, it is preferable that the flow rate of the accelerating gas is greater than the flow rate of the conveying gas, since the raw material may not flow properly toward the injection nozzle unit 70 and reverse flow may occur. Do.

The injection nozzle unit 70 serves to receive raw materials, transfer gas, and acceleration gas from the supply nozzle unit 60 to inject raw materials into the substrate installed in the chamber 80. The injection nozzle unit 70 is preferably used in the form of a nozzle in which the inner diameter decreases from the inlet from which the raw material flows in, and the inner diameter increases from a certain portion to the outlet, that is, a supersonic nozzle such as a de Laval nozzle.

The spray nozzle unit 70 may be moved left and right and up and down while reciprocating to form a coating film on a large area of the raw material on the substrate.

The chamber 80 provides a space in which a raw material sprayed from the spray nozzle unit 70 collides with the substrate to form a coating layer. The raw material that has been rapidly introduced into the chamber 80 is collided while being accelerated to the substrate installed in the chamber 80 by the acceleration gas and pumping by the pump 90. The raw material sprayed from the spray nozzle portion 70 is sprayed while being accelerated to the surface of the substrate to form a coating layer by collision energy.

The pump 90 serves to allow the raw material supplied from the injection nozzle unit 70 to be accelerated and transported into the chamber 80 and pump the transport gas and the acceleration gas in the chamber 80 to be discharged to the outside. Do it. By the pumping by the pump 90, the interior of the chamber 80 is in a vacuum state lower than atmospheric pressure, and accordingly, the raw material can be further accelerated from the spray nozzle unit 70 to the substrate as compared to the atmospheric pressure state. A pumping valve (not shown) may be provided between the chamber 80 and the pump 90 to block pumping. Pumping can be controlled through the opening and closing of the pumping valve.

The substrate may be a ceramic substrate such as alumina (Al ₂ O ₃ ), aluminum nitride (AlN), quartz (SiO ₂ ), a metal substrate, a metal alloy substrate, or a polymer substrate, but is not limited thereto.

When using the low temperature spray coating device, the film coated on the substrate has an advantage in that it can be formed to a desired thickness (for example, 1 to 300 μm).

In the case of using the low temperature spray coating device, since the coating layer is formed by spraying at a low temperature, the raw materials do not react with each other and the structure of the coating layer does not fluctuate, such as high temperature diffusion or fusion between the coating material (raw material) or between the substrate and the coating material. The phenomenon does not occur.

As described above, the preferred embodiments of the present invention have been described in detail, but the present invention is not limited to the above embodiments, and various modifications are made by those skilled in the art within the scope of the technical spirit of the present invention. This is possible.

10: raw material supply unit
20: transfer gas supply
30: acceleration gas supply
70: spray nozzle unit
80: chamber
90: pump
100: supply nozzle unit
110: supply nozzle
111: transfer pipe
130: acceleration gas supply pipe
135: confluence

Claims (11)

A nitride or oxynitride coating layer is formed on the gas sprayer to impart low wettability to the surface of the gas sprayer,
The coating layer is a gas sprayer coated with nitride or oxynitride, characterized in that formed by low-speed spray coating at room temperature or low temperature. According to claim 1,
The oxide is silicon nitride or aluminum nitride, the oxynitride is a gas injector coated with nitride or oxynitride, characterized in that sialon. In the method of forming a nitride or oxynitride coating layer on a gas injector to impart low wettability to the surface of the gas injector,
The above method,
A raw material supply unit 10 for supplying an oxide or an oxynitride raw material; A transport gas supply unit 20 for supplying transport gas for transporting the raw materials; An acceleration gas supply unit 30 for supplying an acceleration gas for accelerating the raw material and the transport gas; The raw material supplied from the raw material supply unit 10 and the transfer pipe 111 through which the transfer gas supplied from the transfer gas supply unit 20 flows in and is transferred, and the accelerated gas supplied from the acceleration gas supply unit 30 flows in. A supply nozzle unit 60 including an accelerating gas supply pipe 130; An injection nozzle unit 70 for receiving raw material, transport gas, and acceleration gas from the supply nozzle unit 60 and spraying the raw material to the substrate installed in the chamber 80; A chamber 80 for providing a space in which a raw material sprayed from the spray nozzle unit 70 collides with a substrate and a coating layer is formed; And a pump 90 for allowing the raw material supplied from the injection nozzle unit 70 to be accelerated and transferred into the chamber 80 and pumping the transfer gas and the acceleration gas in the chamber 80 to be discharged to the outside. Included, the raw material supplied from the raw material supply unit 10 and the feed gas supplied from the feed gas supply unit 20 are mixed by mixing in the transfer pipe 111, the raw material and the transfer gas through the transfer pipe 111 Is transferred in a mixed state, the raw material and the transport gas are transported in a mixed state, and then the acceleration gas transported through the accelerator gas supply pipe 130 is accelerated to flow into the injection nozzle unit 70, and accelerates. The end of the gas supply pipe 130 is installed to be inserted more toward the injection nozzle portion 70 than the end of the transfer pipe 111, and the chamber is maintained in a vacuum by a vacuum pump before and after injection of the transfer gas and accelerated gas. Is carried out by spray coating on the low speed of the apparatus,
Supplying a raw material that is an oxide or an oxynitride together with a transport gas;
Supplying an additional acceleration gas to the transport gas to cause the transport gas and the acceleration gas to converge and mix; And
Injecting the mixed feed gas and accelerated gas into a gas injector;
Method for coating a nitride or oxynitride in a gas injector, characterized in that comprises a. According to claim 3,
A gas injector characterized in that the feed pipe 111 of the raw material and the conveying gas is provided downward in a vertical direction with respect to a horizontal plane, and the raw material and the conveying gas are incident vertically toward the center of the confluence pipe 135. How to coat nitride or oxynitride. According to claim 3,
Nitride to the gas injector, characterized in that the feed pipe (111) of the raw material and the conveying gas is provided to be inclined downward with respect to the horizontal plane so that the raw material and the conveying gas are inclined toward the center of the confluence pipe (135). Or a method of coating an oxynitride. According to claim 3,
Method for coating nitride or oxynitride in a gas injector, characterized in that the flow rate of the acceleration gas flowing through the acceleration gas supply pipe 130 is greater than the flow rate of the transport gas. The method of claim 6,
The transfer gas is supplied at a flow rate of 0.1 ~ 5slm, the acceleration gas is a method of coating nitride or oxynitride in a gas injector, characterized in that is supplied at a flow rate of 10 ~ 400slm. According to claim 3,
Nitrogen or acid in a gas injector, characterized in that a plurality of holes are provided at the ends of the accelerator gas supply pipe 130, and the accelerator gas is ejected through the plurality of holes, and at least some of the holes are inclined. Method of coating nitride. The method of claim 8,
A method of coating nitride or oxynitride in a gas injector, characterized in that the inclined angle of the inclined hole is 5 to 20 °, and the inclined hole is formed radially with respect to the center. According to claim 3,
The injection nozzle unit 70 is a method of coating a nitride or oxynitride in a gas injector, characterized in that the inner diameter decreases from the inlet from which the raw material flows in, and is provided with a nozzle with an increase in inner diameter from a certain portion to the outlet. According to claim 3,
The substrate is a method of coating a nitride or oxynitride in a gas injector, characterized in that it comprises a ceramic substrate, a metal substrate, a metal alloy substrate or a polymer substrate.

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