KR20200027845A - Manufacturing method of aluminum nitride sintered body - Google Patents
Manufacturing method of aluminum nitride sintered body Download PDFInfo
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- KR20200027845A KR20200027845A KR1020180106164A KR20180106164A KR20200027845A KR 20200027845 A KR20200027845 A KR 20200027845A KR 1020180106164 A KR1020180106164 A KR 1020180106164A KR 20180106164 A KR20180106164 A KR 20180106164A KR 20200027845 A KR20200027845 A KR 20200027845A
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000011521 glass Substances 0.000 claims abstract description 50
- 238000005245 sintering Methods 0.000 claims abstract description 44
- 239000000843 powder Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000008188 pellet Substances 0.000 claims abstract description 14
- 238000002156 mixing Methods 0.000 claims abstract description 6
- 239000011812 mixed powder Substances 0.000 claims description 11
- 238000009694 cold isostatic pressing Methods 0.000 claims description 10
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 8
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 8
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 7
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 239000000155 melt Substances 0.000 claims description 5
- 239000011324 bead Substances 0.000 claims description 4
- 238000010791 quenching Methods 0.000 claims description 4
- 230000000171 quenching effect Effects 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000007580 dry-mixing Methods 0.000 claims description 2
- 238000000227 grinding Methods 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 238000010079 rubber tapping Methods 0.000 claims description 2
- 230000001747 exhibiting effect Effects 0.000 abstract description 3
- 230000000052 comparative effect Effects 0.000 description 12
- 239000000203 mixture Substances 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000001739 density measurement Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000498 ball milling Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- -1 greases Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000001291 vacuum drying Methods 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- VCUFZILGIRCDQQ-KRWDZBQOSA-N N-[[(5S)-2-oxo-3-(2-oxo-3H-1,3-benzoxazol-6-yl)-1,3-oxazolidin-5-yl]methyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C1O[C@H](CN1C1=CC2=C(NC(O2)=O)C=C1)CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F VCUFZILGIRCDQQ-KRWDZBQOSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 125000005234 alkyl aluminium group Chemical group 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical compound [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005262 decarbonization Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000006060 molten glass Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/16—Silica-free oxide glass compositions containing phosphorus
- C03C3/17—Silica-free oxide glass compositions containing phosphorus containing aluminium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/02—Frit compositions, i.e. in a powdered or comminuted form
- C03C8/08—Frit compositions, i.e. in a powdered or comminuted form containing phosphorus
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/10—Melting processes
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/36—Glass starting materials for making ceramics, e.g. silica glass
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Ceramic Products (AREA)
Abstract
Description
본 발명은 특정 조성의 유리 분말로부터 얻어진 글래스 프릿을 사용함으로써, 소결 공정 온도를 낮출 수 있고, 일반 소결조제를 사용하는 경우보다 동등 이상의 고밀도 및 고전도율을 나타낼 수 있는 질화알루미늄 소결체의 제조방법에 관한 것이다.The present invention relates to a method for producing an aluminum nitride sintered compact that can lower the sintering process temperature and exhibit a higher density and higher conductivity than the case of using a general sintering aid by using a glass frit obtained from a glass powder having a specific composition. will be.
질화알루미늄은 전기 절연성이 우수하며 고열전도성을 갖기 때문에, 질화알루미늄의 소결체 또는 분말을 충전시킨 수지, 그리스, 접착제, 도료 등의 재료는 높은 열전도성을 갖는 방열 재료로서 기대된다. 이러한 방열 재료의 열전도율을 향상시키기 위해서는, 수지 등의 매트릭스 중에 고열전도성을 가진 충전재를 고충전시키는 것이 중요하다. 그 때문에, 충전제는 구상이며, 입경이 수 ㎛ 내지 수십 ㎛ 정도인 질화알루미늄이 강하게 요망되고 있다.Since aluminum nitride has excellent electrical insulation properties and high thermal conductivity, materials such as resins, greases, adhesives, and paints filled with sintered aluminum nitride powders or powders are expected to be heat-radiating materials with high thermal conductivity. In order to improve the thermal conductivity of such a heat dissipation material, it is important to highly charge a filler having high thermal conductivity in a matrix such as a resin. For this reason, the filler is spherical, and aluminum nitride having a particle size of several µm to several tens of µm is strongly desired.
일반적으로, 질화알루미늄의 제조 방법에는 알루미나와 카본의 조성물을 환원 질화시키는 알루미나 환원 질화법(열탄소 환원법), 알루미늄과 질소를 직접 반응시키는 직접 질화법, 알킬알루미늄과 암모니아를 반응시킨 후 가열하는 기상법 등이 알려져 있다.In general, the method of manufacturing aluminum nitride includes alumina-reducing nitriding (reducing carbon-carbon) to alumina-carbon and reducing the composition of carbon, a direct nitriding method of directly reacting aluminum and nitrogen, and a gas-phase method of heating after reacting alkylaluminum with ammonia. Etc. are known.
그런데, 상기 질화알루미늄은 강한 공유결합의 특성으로 소결이 어렵고 치밀한 소결체를 얻기 위해서는 2,000℃ 이상에서 가압소결이 필요하다.However, the aluminum nitride is hard to sinter due to the strong covalent bond characteristics, and pressurized sintering is required at 2,000 ° C or higher to obtain a dense sintered body.
상기 질화알루미늄은 난소결성 세라믹으로 고밀도의 소결체 제조와 소결온도를 낮추기 위하여 산화이트륨(Y2O3)과 같은 희토류 금속산화물을 소결조제로 혼합 사용하고 있지만, 소결온도가 약 1,800℃ 이상의 고온이 필요하다.The aluminum nitride is a sintering-resistant ceramic, and a rare earth metal oxide such as yttrium oxide (Y 2 O 3 ) is mixed and used as a sintering aid in order to manufacture a high-density sintered body and lower the sintering temperature. Do.
따라서, 소결 온도를 낮출 수 있으면서, 고밀도 및 고열전도율을 갖는 질화알루미늄 소결체의 개발이 요구된다.Therefore, development of an aluminum nitride sintered body having a high density and high thermal conductivity while being able to lower the sintering temperature is required.
본 발명은 특정 조성의 유리 분말로부터 얻어진 글래스 프릿을 사용함으로써 1700도 이하의 온도에서 소결이 가능한 동시에, 소결 조제를 사용하는 경우와 비교하여 동등 수준 이상의 고밀도 및 고열전도율 특성을 나타내는 질화알루미늄 소결체의 제조방법을 제공하기 위한 것이다. The present invention is capable of sintering at a temperature of 1700 degrees or less by using a glass frit obtained from a glass powder of a specific composition, and at the same time, the production of an aluminum nitride sintered body exhibiting high density and high thermal conductivity characteristics equal to or higher than when using a sintering aid. It is to provide a method.
발명의 일 구현예에 따르면, Y2O3-Al2O3-P2O5 유리분말을 이용하여 글래스 프릿을 제조하는 제1 단계; 질화알루미늄 및 상기 글래스 프릿을 혼합하여 분체를 제조하는 제2 단계; 및 상기 분체를 이용하여 펠렛을 제조하고 소결하는 제3 단계;를 포함하는 질화알루미늄 소결체의 제조방법을 제공한다.According to one embodiment of the invention, the first step of producing a glass frit using Y 2 O 3 -Al 2 O 3 -P 2 O 5 glass powder; A second step of preparing powder by mixing aluminum nitride and the glass frit; And a third step of manufacturing and sintering pellets using the powder.
이하 발명의 구체적인 구현예에 따른 질화알루미늄 소결체의 제조 방법에 관하여 보다 상세하게 설명하기로 한다.Hereinafter, a method of manufacturing an aluminum nitride sintered body according to a specific embodiment of the present invention will be described in more detail.
본 발명은 1,700℃ 이하의 온도에서 소결이 가능한 동시에 기존 대비 동등 이상의 고밀도, 고열전도도 특성을 가지는 질화알루미늄 소결체의 제조방법에 관한 것이다.The present invention relates to a method of manufacturing an aluminum nitride sintered compact having sintering at a temperature of 1,700 ° C. or lower, and having high density and high thermal conductivity characteristics equal to or higher than the existing one.
즉, 기존의 방식인 질화알루미늄과 알카리토류 금속 산화물 또는 희토류 금속 산화물을 소결조제로 첨가하는 방식과 다르게, 본 발명은 Y2O3 -Al2O3-P2O5 glass frit을 사용하여 저온에서 소결이 가능할 뿐만 아니라 특성이 우수한 질화알루미늄 소결체를 얻을 수 있다.That is, unlike the conventional method of adding aluminum nitride and alkaline earth metal oxide or rare earth metal oxide as a sintering aid, the present invention uses Y 2 O 3 -Al 2 O 3 -P 2 O 5 glass frit at low temperature. In addition, it is possible to obtain an aluminum nitride sintered body having excellent properties as well as sintering.
이러한 본 발명의 바람직한 일 구현예에 따르면, Y2O3-Al2O3-P2O5를 유리분말을 이용하여 글래스 프릿을 제조하는 제1 단계; 질화알루미늄 및 상기 글래스 프릿을 혼합하여 분체를 제조하는 제2 단계; 및 상기 분체를 이용하여 펠렛을 제조하고 소결하는 제3 단계;를 포함하는 질화알루미늄 소결체의 제조방법이 제공될 수 있다.According to one preferred embodiment of the present invention, Y 2 O 3 -Al 2 O 3 -P 2 O 5 The first step of producing a glass frit using a glass powder; A second step of preparing powder by mixing aluminum nitride and the glass frit; And a third step of manufacturing and sintering the pellets using the powder. A method of manufacturing an aluminum nitride sintered body may be provided.
상기 제1단계에서 글래스 프릿은 산화이트륨, 알루미나 및 P2O5 분말을 건식 혼합하여 혼합 분말을 제조하는 단계; 상기 혼합 분말을 질소 분위기 하에서 열처리하여 용융액을 제조하는 단계; 상기 용융액을 이용하여 유리 분말을 제조하는 단계; 및 상기 유리 분말 및 지르코니아 비즈를 혼합하고 볼밀에 의해 분쇄하는 단계;를 포함하여 제조될 수 있다.In the first step, the glass frit is prepared by dry mixing yttrium oxide, alumina and P 2 O 5 powder to prepare a mixed powder; Preparing a melt by heat-treating the mixed powder under a nitrogen atmosphere; Preparing a glass powder using the melt; And mixing the glass powder and zirconia beads and grinding with a ball mill.
상기 혼합 분말은 산화이트륨 13 내지 19 중량%, 알루미나 1 내지 10 중량% 및 P2O5 75 내지 85 중량%를 포함할 수 있다.The mixed powder may include 13 to 19% by weight of yttrium oxide, 1 to 10% by weight of alumina, and 75 to 85% by weight of P 2 O 5 .
상기 산화이트륨의 함량이 13 중량% 이하이면 소결 온도를 낮추는 소결조제로서의 효과가 부족하며, 19 중량%를 이상이면 유리가 제작되지 않을 수 있다. 상기 알루미나의 함량이 10 중량% 이상이면 유리가 제작되지 않는 문제가 있고, 1 중량% 이하이면 소결온도를 낮추는 소결조제로서의 효과가 부족한 문제가 있다. 상기 P2O5의 함량이 75 중량% 이하이면 유리가 제작되지 않고, 85 중량% 이상이면 소결 온도를 낮추는 소결조제로서의 효과가 부족한 문제가 있다.If the content of yttrium oxide is 13% by weight or less, the effect as a sintering aid for lowering the sintering temperature is insufficient, and if it is more than 19% by weight, glass may not be produced. If the content of the alumina is 10% by weight or more, there is a problem that the glass is not produced, and if it is 1% by weight or less, there is a problem that the effect as a sintering aid to lower the sintering temperature is insufficient. If the content of P 2 O 5 is 75% by weight or less, no glass is produced, and if it is 85% by weight or more, there is a problem that the effect as a sintering aid for lowering the sintering temperature is insufficient.
상기 열처리는 1,600 내지 1,700℃의 온도에서 1시간 내지 2시간 동안 수행할 수 있다.The heat treatment may be performed for 1 hour to 2 hours at a temperature of 1,600 to 1,700 ° C.
또한, 상기 글래스 프릿을 제조하는데 사용되는 지르코니아 비즈의 함량은 크게 한정되지 않으나, 상기 유리분말 대비 부피비로 50% 내지 100%로 사용할 수 있다.In addition, the content of zirconia beads used to prepare the glass frit is not particularly limited, but may be used in a volume ratio of 50% to 100% compared to the glass powder.
상기 유리 분말은 용융액을 물어 부어 급냉 방법으로 제조할 수 있다. 즉, 융용된 유리 분말이 급냉 방법으로 냉각되면, 글라스 플레이크 분말 상태로 얻어질 수 있다.The glass powder may be prepared by quenching the molten liquid. That is, when the molten glass powder is cooled by the quenching method, it can be obtained in the form of a glass flake powder.
상기 제2 단계에서 상기 글래스 프릿은 질화알루미늄 및 글래스 프릿의 혼합 분체의 총 중량을 기준으로 4 내지 20 중량%를 사용할 수 있다. 바람직하게, 상기 글래스 프릿은 질화알루미늄 및 글래스 프릿의 혼합 분체의 총 중량을 기준으로 5 내지 15 중량%를 사용할 수 있다. 상기 글래스 프릿의 함량이 4 중량% 이하이면 소결 온도를 낮추는 소결조제로 부족한 문제가 있고 20 중량% 이상이면 열전도도가 감소하는 문제가 있다.In the second step, the glass frit may use 4 to 20% by weight based on the total weight of the mixed powder of aluminum nitride and glass frit. Preferably, the glass frit may use 5 to 15% by weight based on the total weight of the mixed powder of aluminum nitride and glass frit. If the content of the glass frit is 4% by weight or less, there is a problem that the sintering aid for lowering the sintering temperature is insufficient, and if it is 20% by weight or more, there is a problem that the thermal conductivity decreases.
상기 혼합물에 사용되는 글래스 프릿은 d50 기준으로 0.5㎛ 내지 1.0 ㎛의 크기를 나타낼 수 있다The glass frit used in the mixture may exhibit a size of 0.5 μm to 1.0 μm based on d50.
또한, 상기 제3 단계는 질화알루미늄과 상술한 글래스 프릿의 혼합물의 성형체를 소결하는 공정으로서, 상기 공정에 의해 고밀도를 갖는 질화알루미늄 소결체가 제공될 수 있다.In addition, the third step is a process of sintering the molded body of a mixture of aluminum nitride and the above-mentioned glass frit, and the aluminum nitride sintered body having a high density can be provided by the above process.
이러한 제3 단계는 질소 분위기 하에 1,600 내지 1,700 ℃의 온도에서 3시간 내지 6시간 동안 펠렛을 소결하는 단계를 포함하는 것이 바람직하다.It is preferable that the third step includes sintering the pellet for 3 to 6 hours at a temperature of 1,600 to 1,700 ° C. under a nitrogen atmosphere.
또한, 상기 펠렛 제조시 성형 방법은 크게 제한되지 않으며, 이 분야에 잘 알려진 방법이 사용될 수 있다. 예를 들면, 상기 펠렛은 냉간 등방압 가압법(Cold Isostatic Pressing, CIP), 유압 프레스 및 탭핑 장치로 이루어진 군에서 선택된 가압법을 사용할 수 있고, 바람직하게 CIP를 이용할 수 있다.In addition, the method of forming the pellets is not particularly limited, and methods well known in the art may be used. For example, the pellet may use a pressing method selected from the group consisting of cold isostatic pressing (CIP), a hydraulic press, and a tapping device, and preferably CIP.
또한, 상기 펠렛 제조시, 가압 압력은 100 내지 200MPa가 될 수 있고, 펠렛의 직경은 10 내지 50mm가 되도록 할 수 있다.In addition, when preparing the pellet, the pressurization pressure may be 100 to 200 MPa, and the diameter of the pellet may be 10 to 50 mm.
이상과 같이 본 발명에 따라 얻어진 상기 질화알루미늄 소결체는 170 내지 180 (W/mK)의 열전도율을 나타낼 수 있다. The aluminum nitride sintered body obtained according to the present invention as described above may exhibit a thermal conductivity of 170 to 180 (W / mK).
또한, 상기 질화알루미늄 소결체는 아르키메데스 법에 의해 측정된 소결 상대밀도가 99 내지 99.9%일 수 있다.In addition, the aluminum nitride sintered body may have a relative sintering density of 99 to 99.9% measured by Archimedes method.
본 발명에 따른 질화알루미늄 소결체의 제조방법에 따르면, 특정하게 Y2O3 -Al2O3-P2O5 유리분말을 이용하여 얻은 글래스 프릿을 사용함으로써, 기존 소결조제를 단순 첨가하는 방법에 비해 소결온도를 1,700℃ 이하로 낮출 수 있고, 종래보다 상대적으로 동등 이상의 고밀도 및 고열전도율 특성을 나타내는 질화알루미늄 소결체를 얻을 수 있다.According to the manufacturing method of the aluminum nitride sintered body according to the present invention, specifically, by using a glass frit obtained using Y 2 O 3 -Al 2 O 3 -P 2 O 5 glass powder, to a method of simply adding an existing sintering aid Compared, the sintering temperature can be lowered to 1,700 ° C or lower, and an aluminum nitride sintered body exhibiting relatively high or higher density and high thermal conductivity characteristics than the conventional one can be obtained.
발명을 하기의 실시예에서 보다 상세하게 설명한다. 단, 하기의 실시예는 본 발명을 예시하는 것일 뿐, 본 발명의 내용이 하기의 실시예에 의하여 한정되는 것은 아니다. The invention is described in more detail in the following examples. However, the following examples are only illustrative of the present invention, and the contents of the present invention are not limited by the following examples.
비교예 1 내지 5Comparative Examples 1 to 5
1.0㎛의 평균입도를 갖는 알루미늄 분말 100g을 환원제인 카본블랙 40g과 혼합하였다.100 g of aluminum powder having an average particle size of 1.0 μm was mixed with 40 g of carbon black as a reducing agent.
상기 혼합 분체를 이용하여, 일반적인 열탄소환원법에 의해 1500℃ 질소분위기에서 질화알루미늄(AlN) 합성을 실시하였다.Using the mixed powder, aluminum nitride (AlN) synthesis was performed in a nitrogen atmosphere at 1500 ° C. by a general thermal carbon reduction method.
<열탄소 환원 조건><Thermocarbon reduction conditions>
* N2 flow rate - 0.5 L/min, 5℃/min 승온, 3hrs 유지* N 2 flow rate-0.5 L / min, 5 ℃ / min temperature increase, 3hrs maintenance
* 탈탄소 공정 - 700℃, 2hrs* Decarbonization process-700 ℃, 2hrs
상기 합성을 통해 얻어진 질화알루미늄 100 중량부와 하기 표 1의 함량에 따른 소결 조제(Y2O3)를 볼밀 공정을 통해 혼합하였다.100 parts by weight of aluminum nitride obtained through the synthesis and the sintering aid (Y 2 O 3 ) according to the contents of Table 1 were mixed through a ball mill process.
상기 볼밀 공정을 통해 얻은 분체를 CIP를 이용하여 펠렛 형태로 성형을 실시하고, 질소분위기 하에 1,600 내지 1,700℃에서 열처리를 실시하여 질화알루미늄 소결체를 제조하였다.The powder obtained through the ball mill process was molded into pellets using CIP, and heat-treated at 1,600 to 1,700 ° C under a nitrogen atmosphere to prepare an aluminum nitride sintered body.
<CIP 조건><CIP conditions>
* 직경 15mm(밀도 측정용)/ 직경 20mm(열전도율 측정용), 두께 2mm로 성형체 제조* Diameter 15mm (for density measurement) / diameter 20mm (for thermal conductivity measurement), thickness 2mm manufacture
* 가압시 150MPa, 10min 유지 조건으로 CIP 후 진공 건조* Vacuum drying after CIP with 150MPa, 10min maintenance condition when pressurized
실시예 1 내지 4Examples 1 to 4
산화 이트륨(Y2O3), 알루미나 (Al2O3) 및 P2O5 분말을 15:5:80 중량비로 준비한 후 건식 혼합기를 이용하여 혼합을 실시하였다.Yttrium oxide (Y 2 O 3 ), alumina (Al 2 O 3 ) and P 2 O 5 powders were prepared in a weight ratio of 15: 5: 80 and then mixed using a dry mixer.
상기에서 혼합된 분말을 1,700℃ 질소분위기에서 3시간 용융시켜 용융액을 제조하였다. 상기 용융액을 물에 부어 유리를 제작하였다.(유리화를 위한 급냉 과정) The mixed powder was melted in a nitrogen atmosphere at 1,700 ° C. for 3 hours to prepare a melt. The molten solution was poured into water to prepare a glass. (Quenching process for vitrification)
상기에서 제작된 유리분말을 동일한 부피의 지르코니아 비즈를 사용하여 볼밀을 실시하여 입도를 1um 이하로 제어하여 글래스 프릿을 제조하였다.The glass powder prepared above was subjected to a ball mill using the same volume of zirconia beads to control the particle size to 1 μm or less to prepare a glass frit.
하기 표 2의 함량으로 상기 글래스 프릿을 건식 혼합기를 이용하여 질화알루미늄과 혼합하여 분체를 제조하였다.To the content of Table 2, the glass frit was mixed with aluminum nitride using a dry mixer to prepare a powder.
상기 분체를 CIP를 이용하여 펠렛 형태로 성형을 실시하고, 상기 펠렛을 질소 분위기 하에 1,600 내지 1,700 ℃ 온도에서 하기 조건으로 소결하여 실시예 1 내지 4의 질화알루미늄 소결체를 제조하였다.The powder was molded into pellets using CIP, and the pellets were sintered at a temperature of 1,600 to 1,700 ° C. under a nitrogen atmosphere under the following conditions to prepare sintered aluminum nitrides of Examples 1 to 4.
<CIP 조건><CIP conditions>
* 직경 15mm(밀도 측정용)/ 직경 20mm(열전도율 측정용), 두께 2mm로 성형체 제조* Diameter 15mm (for density measurement) / diameter 20mm (for thermal conductivity measurement), thickness 2mm manufacture
* 가압시 150MPa, 10min 유지 조건으로 CIP(cold isostatic pressing)후 진공 건조* Vacuum drying after CIP (cold isostatic pressing) with 150MPa, 10min maintenance condition when pressurized
<소결 조건><Sintering conditions>
* N2 flow rate - 0.5 L/min, 5℃/min 승온, 3hrs 유지* N 2 flow rate-0.5 L / min, 5 ℃ / min temperature increase, 3hrs maintenance
실험예Experimental example
실시예 1 내지 4 및 비교예 1 내지 5의 질화알루미늄 소결체에 대해 소결 상대밀도 및 열전도율을 측정하고 그 결과를 표 1 및 2에 나타내었다.The sintered relative density and thermal conductivity of the aluminum nitride sintered bodies of Examples 1 to 4 and Comparative Examples 1 to 5 were measured and the results are shown in Tables 1 and 2.
* 열전도율: LFA (Laser Flash Analyser)로 측정* Thermal conductivity: Measured by LFA (Laser Flash Analyser)
* 소결 상대밀도: 아르키메데스 법을 이용한 밀도 측정* Relative density of sintering: Density measurement using Archimedes method
(중량부)Y 2 O 3 content added as sintering aid
(Parts by weight)
(℃)Sintering temperature
(℃)
(%)Relative density of sintering
(%)
(W/mK)Thermal conductivity
(W / mK)
투입량 (중량%)Glass frit
Input (% by weight)
(℃)Sintering temperature
(℃)
(%)Relative density of sintering
(%)
(W/mK)Thermal conductivity
(W / mK)
표 1 및 2의 결과에서, 실시예 1 내지 4는 소결 상대밀도가 비교예 1 내지 5에 비해 동등 이상으로 우수하였으며, 열전도율도 개선되었음을 알 수 있다.From the results of Tables 1 and 2, it can be seen that Examples 1 to 4 were superior in sintering relative density to equal or higher than Comparative Examples 1 to 5, and the thermal conductivity was also improved.
특히, Y2O3 -Al2O3-P2O5 글래스 프릿을 10 중량% 및 15 중량%를 첨가한 실시예 2 및 4의 경우 1,600℃ 온도에서도 모두 소결이 가능하였다. 또한, 본 발명에 따른 글래스 프릿을 10 중량% 첨가한 실시예 1 및 2의 경우, 비교예 1 및 2의 소결조제를 사용하지 않거나 Y2O3 를 5 중량% 첨가한 비교예 3 및 4 보다, 소결 상대밀도 및 열전도율이 모두 우수하였다.In particular, in the case of Examples 2 and 4 in which 10 wt% and 15 wt% of the Y 2 O 3 -Al 2 O 3 -P 2 O 5 glass frit was added, sintering was possible even at a temperature of 1,600 ° C. In addition, in the case of Examples 1 and 2 in which 10% by weight of the glass frit according to the present invention was added, the sintering aids of Comparative Examples 1 and 2 were not used, or compared to Comparative Examples 3 and 4 in which 5% by weight of Y 2 O 3 was added. , Sintered relative density and thermal conductivity were all excellent.
반면, 비교예 1 내지 5 경우, 소결 조제를 단순 첨가하는 방법을 사용하기 때문에, 소결온도를 본원과 같이 1,700℃ 이하로 낮추더라도, 본원보다 상대적으로 낮은 소결 상대밀도 및 열전도율을 나타내었다. 이때, 비교예 1 및 2는 열전도율 측정이 불가할 뿐 아니라, 소결 상대밀도가 매우 낮아서, 방열 재료로 사용하기에 적합하지 않음을 확인할 수 있다.On the other hand, in Comparative Examples 1 to 5, since the method of simply adding the sintering aid was used, even if the sintering temperature was lowered to 1,700 ° C or less as described herein, the sintering relative density and thermal conductivity were relatively lower than those of the present application. At this time, it can be seen that Comparative Examples 1 and 2 are not only capable of measuring the thermal conductivity, but also have a relatively low sintered relative density, and are not suitable for use as a heat dissipation material.
Claims (10)
질화알루미늄 및 상기 글래스 프릿을 혼합하여 분체를 제조하는 제2 단계; 및
상기 분체를 이용하여 펠렛을 제조하고 소결하는 제3 단계;
를 포함하는 질화알루미늄 소결체의 제조방법.
A first step of preparing a glass frit using Y 2 O 3 -Al 2 O 3 -P 2 O 5 glass powder;
A second step of preparing powder by mixing aluminum nitride and the glass frit; And
A third step of manufacturing and sintering pellets using the powder;
Method of manufacturing an aluminum nitride sintered body comprising a.
산화이트륨, 알루미나 및 P2O5 분말을 건식 혼합하여 혼합 분말을 제조하는 단계;
상기 혼합 분말을 질소 분위기 하에서 열처리하여 용융액을 제조하는 단계;
상기 용융액을 이용하여 유리 분말을 제조하는 단계; 및
상기 유리 분말 및 지르코니아 비즈를 혼합하고 볼밀에 의해 분쇄하는 단계;를 포함하여 제조되는 질화알루미늄 소결체의 제조방법.
According to claim 1, In the first step, the glass frit
Dry mixing of yttrium oxide, alumina and P 2 O 5 powder to prepare a mixed powder;
Preparing a melt by heat-treating the mixed powder under a nitrogen atmosphere;
Preparing a glass powder using the melt; And
Method of producing a sintered aluminum nitride, including; mixing the glass powder and zirconia beads and grinding by a ball mill.
상기 혼합 분말은 산화이트륨 13 내지 19 중량%, 알루미나 1 내지 10 중량% 및 P2O5 75 내지 85 중량%를 포함하는 질화알루미늄 소결체의 제조방법.
According to claim 2,
The mixed powder is 13 to 19% by weight of yttrium oxide, 1 to 10% by weight of alumina and P 2 O 5 75 to 85% by weight of the method for producing a sintered aluminum nitride.
The method of claim 2, wherein the heat treatment is performed for 1 hour to 2 hours at a temperature of 1,600 to 1,700 ° C.
The method for manufacturing an aluminum nitride sintered body according to claim 2, wherein the glass powder is prepared by quenching with a molten solution.
상기 제2 단계에서 상기 글래스 프릿은 질화알루미늄 및 글래스 프릿의 혼합 분체의 총 중량을 기준으로 4 내지 20중량%를 사용하는 질화알루미늄 소결체의 제조방법.
According to claim 1,
In the second step, the glass frit is a method of manufacturing an aluminum nitride sintered body using 4 to 20% by weight based on the total weight of the mixed powder of aluminum nitride and glass frit.
상기 글래스 프릿은 0.5㎛ 내지 1.0 ㎛의 크기를 나타내는 질화알루미늄 소결체의 제조방법.
According to claim 1,
The glass frit is a method of manufacturing a sintered aluminum nitride body showing a size of 0.5㎛ to 1.0㎛.
상기 제3 단계는 질소 분위기 하에 1,600 내지 1,700 ℃의 온도에서 3시간 내지 6시간 동안 펠렛을 소결하는 단계를 포함하는 질화알루미늄 소결체의 제조방법.
According to claim 1,
The third step is a method of manufacturing an aluminum nitride sintered body comprising the step of sintering the pellet for 3 hours to 6 hours at a temperature of 1,600 to 1,700 ℃ under a nitrogen atmosphere.
The method of claim 1, wherein the pellet is manufactured using a cold isostatic pressing (CIP), a hydraulic press, and a pressing method selected from the group consisting of tapping devices.
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| JP2587854B2 (en) * | 1988-03-24 | 1997-03-05 | 日清製粉株式会社 | Method for producing aluminum nitride sintered body with improved thermal conductivity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220102183A (en) | 2021-01-11 | 2022-07-20 | 이광호 | Dissipative Ceramic Composition Of Electro Static Discharge And Method For Manufacturing The Same |
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| KR102599515B1 (en) | 2023-11-06 |
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