KR20200024503A - Transparent gas sensor comprising free-standing nanofibers and fabrication method thereof - Google Patents

Abstract

The present invention relates to a transparent gas sensor including a free-standing nanowire structure which has high transparency and sensitivity at the same time, and a manufacturing method thereof. The transparent gas sensor comprises: a support frame; a plurality of transparent electrodes formed on the support frame, and arranged in parallel with each other; and a sensing unit including a plurality of free-standing nanowire structures which are arranged between the plurality of electrodes and electrically connect the plurality of transparent electrodes. The free-standing nanowire structures are porous and/or hollow.

Description

Transparent gas sensor including self-supporting nanowire structure and method for manufacturing the same {TRANSPARENT GAS SENSOR COMPRISING FREE-STANDING NANOFIBERS AND FABRICATION METHOD THEREOF}

The present invention relates to a transparent gas sensor including a self-supporting nanowire structure and a method of manufacturing the same.

Gas sensors that detect toxic gases, explosive gases, and environmentally harmful gases are becoming increasingly important in many related industries, such as healthcare, defense, terrorism and the environment. At present, research on such a gas sensor is continuously conducted, and in particular, the interest of a semiconductor gas sensor using a metal oxide thin film as a gas sensitive material is increasing.

The semiconductor gas sensor has a simple operation principle, a small volume, and a low manufacturing cost, which can replace an existing electrochemical or optical gas sensor, and is a transparent semiconductor with high power consumption and low response to the gas to be detected. If a gas sensor can be manufactured, it can be mounted on a mobile device such as a mobile phone, thereby adding not only the function of the mobile device but also attaching transparent electronic products such as a transparent display and a transparent mobile phone, and attaching it to a windshield or a window of a car Various studies are underway to implement advanced sensor systems that are compatible with (IoT).

In order to realize such a transparent electronic product and an advanced sensor system, a gas sensor having both high sensitivity and transparency is required. However, in order to obtain high sensitivity, a thin film type oxide must be used. There is a technical difficulty in the development of the sensor.

The present invention provides a transparent gas sensor including a self-supporting nanowire structure having high transparency and sensitivity at the same time.

This invention provides the manufacturing method of the transparent gas sensor by this invention.

The problem to be solved by the present invention is not limited to the above-mentioned problem, another task that is not mentioned will be clearly understood by those skilled in the art from the following description.

According to one embodiment of the invention, the support frame; A plurality of transparent electrodes formed on the support frame and disposed to be parallel to each other; And a sensing unit arranged between the plurality of electrodes and including a plurality of free-standing nanowire structures electrically connecting the plurality of transparent electrodes. It includes, the self-supporting nanowire structure, porous, hollow or both, it relates to a transparent gas sensor.

According to an embodiment of the present invention, the support frame is open, and includes a transparent material, and the transparent material may include one or more selected from the group consisting of glass, silicon, sapphire and transparent polymer. .

According to an embodiment of the present invention, the support frame may further include a conductive metal layer.

According to one embodiment of the invention, the transparent electrode, the transparent electrode material, the transparent electrode material, indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), aluminum Zinc oxide (AZO), Gallium zinc oxide (GZO), Florin tin oxide (FTO), Indium tin oxide-Silver-Indium tin oxide (ITO-Ag-ITO), Indium zinc oxide-Silver-Indium zinc oxide (IZO-Ag -IZO), indium zinc tin oxide-silver-indium zinc tin oxide (IZTO-Ag-IZTO) and aluminum zinc oxide-silver-aluminum zinc oxide (AZO-Ag-AZO) at least one selected from the group consisting of Can be.

According to an embodiment of the present invention, the self-supporting nanowire structure may include a transparent electrode material that is the same as or different from the transparent electrode.

According to one embodiment of the invention, the self-supporting nanowire structure may have an outer diameter of 1 nm to 500 nm and an inner diameter of 1 nm to 500 nm, the outer diameter to inner diameter of 1: 1 to 1: 100 It may have a diameter ratio.

According to one embodiment of the invention, the self-supporting nanowire structure may be arranged to be spaced apart from each other.

According to one embodiment of the present invention, the self-supporting nanowire structure may be arranged in a line, a lattice pattern or a random form.

According to one embodiment of the invention, the transparent gas sensor, sulfur dioxide (SO ₂ ), ammonia (NH ₃ ), formaldehyde (HCHO), chlorine (Cl ₂ ), hydrofluoric acid (HF), hydrazine (N ₂ H ₄ ), methylamine (CH ₃ NH ₂ ), strong acid (HCl) and trimethylamine ((CH ₃ ) ₃ N) and nitrogen dioxide (NO ₂ ) It may be to detect at least one selected from the group consisting of.

According to one embodiment of the invention, the step of contacting the transparent gas sensor and the analysis target according to the present invention; And detecting and analyzing the signal; It relates to a gas detection method using a transparent gas sensor.

According to one embodiment of the invention, preparing a support frame; Forming a plurality of transparent electrodes arranged parallel to each other on at least a portion of the upper surface of the support frame; Spinning polymer fibers to arrange polymer fibers between the plurality of electrodes; Coating the polymer fibers with a transparent electrode material to form a transparent electrode material-polymer fiber composite; And heat treating the transparent electrode material-polymer fiber composite to remove at least a portion of the polymer fibers. It relates to a method of manufacturing a transparent gas sensor.

According to an embodiment of the present invention, the forming of the transparent electrode material-polymer fiber composite may be depositing a transparent electrode material.

According to one embodiment of the invention, the polymer material, polyvinylpyrrolidone (PVP), polyvinyl alcohol (PVA), polyethylene oxide (PEO), carboxymethyl cellulose (CMC), starch (starch), Polyacrylic acid (PA), hyaluronic acid (Hyaluronic acid), polymethyl methacrylate (PMMA), polyacrylonitrile (PAN), polyvinylacetate (PVAc) and PVC (polyvinyl chloride) Can be.

According to one embodiment of the invention, the step of arranging the polymer fibers, may be to electrospun the polymer fibers.

According to one embodiment of the invention, the step of removing the polymer fibers, may be a heat treatment at a temperature of 200 ℃ or more.

The present invention, by applying a self-supporting nano-structure to ensure high transparency and high sensitivity at the same time, compatible with transparent electronic products such as transparent electronic circuits, optoelectronic devices, transparent displays, and compatible with the Internet of Things (IoT) It is possible to provide a transparent gas sensor capable of implementing an advanced sensor system.

According to the present invention, a transparent gas sensor having a hollow self-supporting nanostructure can be manufactured using a polymer fiber as a "template" by a simple method, and the transparency and sensitivity are significantly improved compared to the conventional thin film oxide. A method for manufacturing a transparent gas sensor capable of manufacturing a transparent gas sensor can be provided.

1A is a diagram showing the configuration of a transparent gas sensor according to the present invention according to an embodiment of the present invention.
1B exemplarily shows a configuration of a transparent gas sensor according to the present invention according to another embodiment of the present invention.
2 exemplarily illustrates a flowchart of a method of manufacturing a transparent gas sensor according to an embodiment of the present invention.
3 exemplarily shows a process of the method for manufacturing a transparent gas sensor according to the present invention according to an embodiment of the present invention.
4 shows (a) optical image, (b) SEM image, (c) UV- of a gas sensor according to the density of IZO and self-supporting hollow AZO nanofiber structures over time, according to an embodiment of the invention. The optical image is shown after attachment to the Vis spectrum and the glass panes.
5 is a high resolution core level XPS spectra of a self-supporting hollow AZO nanofiber structure according to an embodiment of the present invention, (a) O1s, (b) Zn2p, (c) Al2p, and (d) shows C1s peak.
Figure 6 is, according to an embodiment of the present invention, (a) IV characteristic curve according to the density of the self-supported hollow AZO nanofiber structure, (b) self-supported hollow AZO nano in 0.5 ppm NO ₂ gas at room temperature Reaction and recovery characteristics according to the density of the fiber structure, (c) gas reaction curves of the self-supporting hollow AZO nanofiber structure in units of NO ₂ concentration (0.5-10 ppm) at 250 ° C., and (d) self-supporting The sensing response of 0.5 ppm NO ₂ versus operating temperature of the hollow AZO nanofiber structure is shown.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the present invention, when it is determined that detailed descriptions of related known functions or configurations may unnecessarily obscure the gist of the present invention, the detailed description thereof will be omitted. In addition, terms used in the present specification are terms used to properly express preferred embodiments of the present invention, which may vary according to a user, an operator's intention, or customs in the field to which the present invention belongs. Therefore, the definitions of the terms should be made based on the contents throughout the specification. Like reference numerals in the drawings denote like elements.

Throughout the specification, when a part is said to "include" a certain component, it means that it may further include other components, except to exclude other components unless specifically stated otherwise.

The present invention relates to a transparent gas sensor including a self-supporting nanowire structure, and according to an embodiment of the present invention, by applying a self-supporting nanowire structure arranged between transparent electrodes, It is possible to provide a transparent gas sensor having a high sensitivity to a sensing object.

The transparent gas sensor according to the present invention will be described with reference to FIG. 1, and FIG. 1 exemplarily shows the configuration of the transparent gas sensor according to the present invention. In Figure 1, the transparent gas sensor, the support frame (110); Transparent electrode 120; And a sensing unit 130.

The support frame 110 may support the transparent electrode or at least a portion of the transparent electrode, and may be an open frame having an empty central portion. The support frame may be circular, oval or multi-rigid in shape, and the height of the support frame 110 may be adjusted to allow for proper attachment and compatibility to various devices.

The support frame 110 may be in the form of a film, sheet, thin film, plate, or the like.

The support frame 110 may include a transparent material, and may include, for example, a transparent insulating material such as a metal, an oxide, or a polymer resin. More specifically, glass; silicon; Sapphire; It contains at least one selected from the group consisting of polyimide, polycarbonate, polyethylene terephthalate, polyethylene naphthalate, polyether sulfone, polycarbonate and polyvinyl alcohol transparent polymer, flexible by controlling the curing, components, etc. of the polymer resin It can exhibit transparent properties.

The support frame 110 may further include a conductive metal layer on at least a portion of the top, and may include, for example, (Ag), copper (Cu), gold (Au), chromium (Cr), aluminum (Al), and tungsten. (W), zinc (Zn), nickel (Ni), iron (Fe), platinum (Pt) and may include one or more selected from the group consisting of lead (Pb). The conductive metal layer is 1 nm or more; 1 nm to 1000 nm; Or 1 nm to 10 μm;

The transparent electrode 120 may be formed on at least a portion of the support frame and may be a plurality of transparent electrodes disposed to be parallel to each other. The plurality of transparent electrodes 120 may be formed at upper ends of the surfaces facing each other in the support frame 110. The transparent electrode 120 may be formed of a deposition layer including a transparent electrode material or adhered to a film, a sheet, or the like, and preferably, the deposition layer.

The transparent electrode material may include a metal, a metal oxide, or the like. For example, silver (Ag), copper (Cu), gold (Au), chromium (Cr), aluminum (Al), tungsten (W) , Zinc (Zn), nickel (Ni), iron (Fe), platinum (Pt), lead (Pb), indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), aluminum zinc Oxide (AZO), Gallium Zinc Oxide (GZO), Florin Tin Oxide (FTO), Indium Tin Oxide-Silver-Indium Tin Oxide (ITO-Ag-ITO), Indium Zinc Oxide-Silver-Indium Zinc Oxide (IZO-Ag- IZO), indium zinc tin oxide-silver-indium zinc tin oxide (IZTO-Ag-IZTO), and aluminum zinc oxide-silver-aluminum zinc oxide (AZO-Ag-AZO). have. The transparent electrode material may include various shapes such as nanotubes, nanowires, nanorods, nanoneedles, nanoparticles, and the like.

The transparent electrode 120 is 1 nm or more; 1 nm to 1000 nm; 1 nm to 500 μm; Or 10 nm to 10 mm, preferably 1 nm to 500 μm, and included within the thickness range can improve the sensitivity of the sensor while exhibiting high transparency.

The detector 130 may include a plurality of free-standing nanowire structures, and the nanowire structures may be disposed between the plurality of transparent electrodes 120 arranged to be parallel to each other. To form. That is, since both ends of the nanowire structure are disposed in contact with each other on the transparent electrodes 120 parallel to each other, the transparent electrodes may be electrically connected to each other, and the self-supporting nanostructure may be formed as an open area of the support frame 110. In addition to being exposed, the gas contact and collision of the self-supporting nanostructures by the hollow structure, and the detectable area are increased to improve the sensitivity and performance of the gas sensor while having high transparency.

The free-standing nanowire structure may be configured to adjust the number density of the gas sensor according to the arrangement interval, the diameter of the nanowire structure, the number of nanowire structures, and the like when arranged between the transparent electrodes 120. Transparency and electrical properties can be improved. For example, the plurality of self-supporting nanowire structures may be arranged in a line, lattice form or random shape. In addition, they may be arranged to be spaced apart from each other at predetermined intervals, and by controlling the number density, the transparency of the nanowire structure may be prevented from decreasing, and the electrical properties may be prevented from decreasing due to the increase in electrical resistance. Can be.

The self-supporting nanowire structure may have an outer diameter of 1 nm to 500 nm and an inner diameter of 1 nm to 500 nm, and the outer diameter to inner diameter may have a diameter ratio of 1: 1 to 1: 100. When included in the above range, there is a restriction on the inflow of gas into the hollow when the outer diameter is larger than the inner diameter, and the sensitivity of the gas sensor due to the reduction of the contact and collision area of the gas on the inner surface can be prevented from being lowered. .

 The self-supporting nanowire structure may have a porous, hollow or both, and preferably may form a hollow structure having a porosity. The hollow structure may consist of a single or multiple layers of shells. The plurality of layers of shells may comprise the same or different materials. For example, the plurality of shells may be composed of a double layer consisting of an inner layer comprising a first material and an outer layer consisting of a second material. In addition, the inner layer may exhibit higher porosity than the outer layer due to the removal of the polymer during the firing process. The first material and the second material may be the same or different.

The self-supporting nanowire structure may be porous, at least 10% of the total area of the structure; At least 30%; Or 50% or more.

The self-supporting nanowire structure may include a transparent electrode material that is the same as or different from that of the transparent electrode, and may include, for example, a metal, a metal oxide, and more specifically, silver (Ag), Copper (Cu), Gold (Au), Chromium (Cr), Aluminum (Al), Tungsten (W), Cobalt (Co), Zinc (Zn), Nickel (Ni), Iron (Fe), Platinum (Pt), Lead (Pb), ZnO, SnO ₂ , WO ₃ , Fe ₂ O ₃ , Fe ₃ O ₄ , NiO, TiO ₂ , CuO, In ₂ O ₃ , Zn ₂ SnO ₄ , Co ₃ O ₄ , PdO, LaCoO ₃ , NiCo ₂ O ₄ , V ₂ O ₅ , RuO ₂ , IrO ₂ , MnO ₂ , InTaO ₄ , InTaO ₄ , Indium Tin Oxide (ITO), Indium Zinc Oxide (IZO), Indium Zinc Tin Oxide (IZTO), Aluminum Zinc Oxide (AZO), Gallium Zinc Oxide (GZO), Florin Tin Oxide (FTO), Indium Tin Oxide-Silver-Indium Tin Oxide (ITO-Ag-ITO), Indium Zinc Oxide-Silver-Indium Zinc Oxide (IZO-Ag-IZO) ), Indium zinc tin oxide-silver-indium zinc tin oxide (IZTO-Ag-IZTO) and aluminum zinc oxide-silver-al Minyum from the group consisting of zinc oxide (AZO-AZO-Ag) it may be one containing at least one selected. The transparent electrode material may include various shapes such as nanotubes, nanowires, nanorods, nanoneedles, nanoparticles, and the like.

According to one embodiment of the invention, the transparent gas sensor, at least 75% for light in the wavelength range of 300 nm to 1000 nm; At least 80%; Transmittance of greater than or equal to 85%.

According to an embodiment of the present invention, the room temperature driven gas sensor may exhibit high selectivity and high sensitivity for a sensing object at a temperature of room temperature or room temperature to 100 ° C. and a low concentration of gas at a concentration of 0.5 ppm or less.

According to one embodiment of the invention, the transparent gas sensor, as shown in Figure 1b, may further include a configuration for gas detection and driving, may be assembled with a variety of substrate, case 150, etc. . For example, the driving unit 140 for supplying current, an analysis unit (not shown) for detecting a current signal, and an inlet and an outlet through which analytical sample is injected and discharged may be included. Can be applied.

According to one embodiment of the invention, the transparent gas sensor, for detecting harmful gases, for example, sulfur dioxide (SO ₂ ), ammonia (NH ₃ ), formaldehyde (HCHO), chlorine (Cl ₂ ) , At least one of hydrofluoric acid (HF), hydrazine (N ₂ H ₄ ), methylamine (CH ₃ NH ₂ ), strong acid (HCl) and trimethylamine ((CH ₃ ) ₃ N), and nitrogen dioxide (NO ₂ ) , Preferably nitrogen dioxide (NO ₂ ).

According to the present invention, the room temperature driving type gas sense according to the present invention may be attached to various substrates and products such as transparent electronic products, windows, windows, etc. to provide a function of a gas sensor. For example, the transparent electronic product may be a transparent display, a transparent solar cell, a transparent mobile phone, a smart watch, or the like. For example, it is possible to reduce the power consumption by the room temperature driving and to reduce the battery consumption, it can be applied to IoT sensors and wearable devices.

The present invention relates to a gas detection method using a transparent gas sensor according to the present invention, in accordance with an embodiment of the present invention, the step of contacting the transparent gas sensor and the object; And detecting and analyzing the signal. In the gas sensing method, a quantitative and qualitative analysis of a desired gas may be performed by using an electrical signal such as an electrical resistance change. The sensing object is as mentioned above.

The present invention relates to a method for manufacturing a transparent gas sensor according to the present invention. According to an embodiment of the present invention, the method includes preparing 210 a support frame; Forming a transparent electrode (220); Arranging 230 the polymer fibers; Forming a transparent electrode material-polymer fiber composite (240); And removing the polymer fiber by heat treatment (250).

Preparing 220 a support frame is a step of preparing the above-mentioned support frame according to the use of the sensor.

The forming of the transparent electrode 230 is a step of forming a plurality of transparent electrodes arranged parallel to each other on at least a portion of the upper surface of the support frame. The transparent electrode may be formed by attaching, coating, or depositing a transparent electrode sheet, a film, a thin film, or the like. The coating may use at least one selected from the group consisting of dip coating, spin coating, roll coating, bar coating, and spray coating.

The deposition is sputtering, pulsed laser deposition (PLD), thermal evaporation (Thermal Evaporation), electron beam evaporation (E-beam Evaporation), chemical vapor deposition (Chemical Vapor Deposition), atomic layer deposition (Atomic Layer) Deposition), at least one selected from the group consisting of Inductively Coupled Plasma-Chemical Vapor Deposition and Plasma Enhanced Chemical Vapor Deposition may be used. The deposition may be carried out at a temperature above room temperature.

Arranging 230 of the polymer fibers is a step of arranging polymer fibers arranged between the plurality of electrodes by spinning the polymer fibers. Arranging the polymer fibers, using a spinning solution comprising a polymer resin and a solvent, the spinning solution may further comprise a transparent electrode material and / or a precursor of the transparent electrode material. For example, the first spinning solution including the polymer resin and the solvent and the second spinning solution including the polymer resin, the transparent electrode material, and / or the precursor and the solvent of the transparent electrode material may be simultaneously or alternately radiated. .

The transparent electrode material is as mentioned above, and is 0.1 nm or more; 1 nm or more; 10 nm or more; 300 nm or more; It has a particle size of 500 nm or more (or diameter, length or thickness depending on shape), nanotubes, nanowires, nanorods, nanoneedles, nanoparticles, etc. It may have a form. The precursor may be formed of metal oxide, acetate, carbonyl, metal carbonate, nitrate, sulfate, phosphate and chloride to form the transparent electrode material. halide) and the like.

The polymer material may be polyvinylpyrrolidone (PVP), polyvinyl alcohol (PVA), polyethylene oxide (PEO), carboxymethyl cellulose (CMC), starch, polyacrylic acid (PA), hyaluronic acid ( Hyaluronic acid), polymethyl methacrylate (PMMA), polyacrylonitrile (PAN), polyvinylacetate (PVAc) and PVC (polyvinylchloride), polyethylene terephthalate (PET), polyethylene sulfone (PES), polyethylene Phthalate (PEN), Polycarbonate (PC), Polyimide (PI), Ethylene Vinyl Acetate (EVA), Amorphous Polyethylene Terephthalate (APET), Polypropylene Terephthalate (PPT), Polyethylene Terephthalate Glycerol (PETG), Poly Cyclohexylenedimethylene terephthalate (PCTG), modified triacetylcellulose (TAC), cycloolefin polymer (COP), cycloolefin copolymer (COC), dicyclopentadiene polymer (DCPD), cyclopentadiene polymer (CPD) , Polyarylate (PAR), polyetherimide (PEI), polydimethylsiloncene (PDMS), silicone resin, fluorine resin and modified epoxy resin may include at least one selected from the group consisting of.

The polymer resin and / or the transparent electrode material and the precursor thereof may be 0.01 parts by weight or more based on 100 parts by weight of the spinning solution; 0.1 parts by weight to 60 parts by weight; Alternatively 1 part by weight to 90 parts by weight; It may be included as.

The solvent may be dissolved and / or dispersed of a polymer resin; And dissolving and / or dispersing the transparent electrode material and / or precursor to prepare a spinning solution, for example, water, methanol, ethanol, propanol, isopropanol, 1-methoxy-2-propanol, 1-meth Methoxy-2-propyl acetate, acetone, methyl ethyl ketone, methyl isobutyl ketone, methoxy propyl acetate, ethyl lactate, ethyl acetate, acetonitrile, tetrahydrofuran, dimethylformamide, chloroform, toluene and the like. Do not. In addition, the spinning solution may further include a dispersant if necessary.

Arranging the polymer fibers may include electrospinning, melt spinning, electro-blowing, melt-blowing (compound spinning, split yarn), spun-bone At least one selected from the group consisting of spun-bonded, air laid and wet laid methods may be used, and may be preferably electrospinning. The electrospinning can control the thickness of the fiber being spun by varying the size of the electric field and the concentration of the spinning solution.

After the step of arranging the polymer fibers may further comprise a step of drying, at least one minute at room temperature to 200 ℃; Or dry for 1 to 20 hours.

Forming the transparent electrode material-polymer fiber composite 230 is coating the polymer fibers with a transparent electrode material to form a transparent electrode material-polymer fiber composite. The transparent electrode material may be coated on the surface of the polymer fiber to form a coating layer having a predetermined thickness.

The forming 230 of the transparent electrode material-polymer fiber composite may use a coating method, a deposition method, or both, and preferably, a deposition method.

The step 240 of removing the polymer fibers by heat treatment may include removing at least a portion of the polymer fibers by heat treating the transparent electrode material-polymer fiber composite. That is, the polymer fiber is applied as a template for forming the hollow nanowire structure, 90% or more; Or the whole can be removed. The polymer fibers may be removed to form a hollow, porous or self-supporting nanofiber structure having both. The self-supporting nanofiber structure may be arranged between the transparent electrodes arranged in parallel with each other, thereby providing an electrical connection of the transparent electrodes and an excellent sensing function for gas. For example, the outer layer (or surface layer) of the self-supporting nanofiber structure may be made of a transparent electrode material, and the inner layer surrounding the hollow may have higher porosity because pores are developed than the outer layer.

Heat treatment step 240 of removing the polymer fibers is carried out in an atmosphere of at least one of air, oxygen and inert gas, 200 ℃ or more; 300 ° C. or higher; It may be carried out at 400 to 1000 ° C. More than 10 minutes; At least 30 minutes; At least 1 hour; It may be carried out for 1 to 20 hours.

Example

As shown in the process of FIG. 2, a glass made copper frame prepared by a wet etching process was prepared. Next, the IZO electrode was sputter deposited (IZO (2% In, ITASCO, 99.99%), 100 W RF power, distance 15 cm, 5 mTorr working pressure, RT.). Next, after the electrospinning solution (PVP (1.6g) and Propanol (25ml)) was prepared by stirring at 750 rpm for 1 hour at 40 ℃, electrospinning (Electrospinning, -9.5 kV, Feeding rate = 0.8ml / h , distance 15 cm, 26-gauge needle) to spin the nanofibers. Sputtering deposition of AZO (AZO (2 wt%, 99.999% pure), 50W RF power, distance 15 cm, 5mTorr working pressure, RT.) On the spun nanofibers to form a coating layer, heat treatment at 400 ℃ for 1 hour To remove the polymer to prepare a gas sensor. Electrospinning was performed for 1 minute to 1 hour each.

SEM images were measured according to the spinning time of the electrospun nanofibers and are shown in FIG. 4. In Figure 4 it can be seen that the spinning time is increased to increase the density of the nanofibers. The UV-Vis spectrum was measured according to the spinning time of the nanofibers, and the image was measured after adhering to the glass window and is shown in FIG. 4. Referring to FIG. 4, as the number of electrospun nanowires increases, the transmittance decreases, and it can be seen that there is a change in transmittance.

After the heat treatment, XPS of the hollow nanostructure having the AZO shell was measured and shown in FIG. 5. In the XPS of Figure 5 it can be seen that the AZO nanostructures are formed without damage. The electrical and sensing characteristics of the manufactured gas sensor were evaluated and shown in FIG. 6. In FIG. 6A, since the linear IV characteristics are shown and the number of nanowires increases, the resistance is lowered. Therefore, the electrical characteristics may be further improved. 6 (b) and (c) it can be seen that the detection performance for the low concentration of NO ₂ is changed, it can provide excellent detection performance. 6 (d) it can be seen that maintaining the permeability even at a low concentration of the transparent gas sensor having transparency and provides a sensing function from room temperature to high temperature for the low concentration of NO ₂ .

 Although the embodiments have been described with reference to the accompanying drawings, those skilled in the art may apply various technical modifications and variations based on the above. For example, the described techniques may be performed in a different order than the described method, and / or components of the described systems, structures, devices, circuits, etc. may be combined or combined in a different form than the described method, or other components. Or even by substitution or replacement by equivalents, an appropriate result can be achieved.

Therefore, other implementations, other embodiments, and equivalents to the claims are within the scope of the following claims.

Claims (14)

Support frame;
A plurality of transparent electrodes formed on the support frame and disposed to be parallel to each other; And
A sensing unit arranged between the plurality of electrodes, the sensing unit including a plurality of free-standing nanowire structures electrically connecting the plurality of transparent electrodes;
Including,
The self-supporting nanowire structure, will have a porous, hollow or both,
Clear gas sensor.
The method of claim 1,
The support frame is open, and comprises a transparent material,
Wherein the transparent material, glass, silicon, sapphire and transparent polymer containing one or more selected from the group consisting of,
Clear gas sensor.
The method of claim 1,
The support frame further comprises a conductive metal layer,
Clear gas sensor.
The method of claim 1,
The transparent electrode includes a transparent electrode material,
The transparent electrode material is indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide (IZTO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), florin tin oxide (FTO), indium Tin oxide-silver-indium tin oxide (ITO-Ag-ITO), indium zinc oxide-silver-indium zinc oxide (IZO-Ag-IZO), indium zinc tin oxide-silver-indium zinc tin oxide (IZTO-Ag-IZTO And aluminum zinc oxide-silver-aluminum zinc oxide (AZO-Ag-AZO), including at least one selected from the group consisting of
Clear gas sensor.
The method of claim 1,
The self-supporting nanowire structure includes a transparent electrode material that is the same as or different from that of the transparent electrode.
Clear gas sensor.
The method of claim 1,
The self-supporting nanowire structure is to be spaced apart from each other,
Clear gas sensor.
The method of claim 1,
The self-supporting nanowire structure is arranged in a line, lattice pattern or random form,
Clear gas sensor.
The method of claim 1,
The transparent gas sensor is sulfur dioxide (SO ₂ ), ammonia (NH ₃ ), formaldehyde (HCHO), chlorine (Cl ₂ ), hydrofluoric acid (HF), hydrazine (N ₂ H ₄ ), methylamine (CH ₃ NH ₂ ), to detect at least one selected from the group consisting of strong acid (HCl) and trimethylamine ((CH ₃ ) ₃ N) and nitrogen dioxide (NO ₂ ),
Clear gas sensor.
Contacting the transparent gas sensor of claim 1 with an object to be analyzed; And
Detecting and analyzing the signal;
Containing,
Gas detection method using transparent gas sensor.
Preparing a support frame;
Forming a plurality of transparent electrodes arranged parallel to each other on at least a portion of the upper surface of the support frame;
Spinning polymer fibers to arrange polymer fibers between the plurality of electrodes;
Coating the polymer fibers with a transparent electrode material to form a transparent electrode material-polymer fiber composite; And
Heat treating the transparent electrode material-polymer fiber composite to remove at least a portion of polymer fibers;
Containing,
Method for manufacturing a transparent gas sensor.
The method of claim 10,
Forming the transparent electrode material-polymer fiber composite is to deposit a transparent electrode material,
Method of manufacturing a transparent gas sensor.
The method of claim 10,
The polymer material may be polyvinylpyrrolidone (PVP), polyvinyl alcohol (PVA), polyethylene oxide (PEO), carboxymethyl cellulose (CMC), starch, polyacrylic acid (PA), hyaluronic acid ( Hyaluronic acid), polymethyl methacrylate (PMMA), polyacrylonitrile (PAN), polyvinylacetate (PVAc) and PVC (polyvinyl chloride),
Method of manufacturing a transparent gas sensor.
The method of claim 10,
Arranging the polymer fibers, the electrospun polymer fibers,
Method of manufacturing a transparent gas sensor.
The method of claim 10,
Removing the polymer fibers, the heat treatment at a temperature of 200 ℃ or more,
Method of manufacturing a transparent gas sensor.

Images