KR20200021845A - Device for generation of electricity using triboelectic - Google Patents

Abstract

The present invention relates to a power generation element configured to generate power from a magnetic field formed by AC power source flowing through a power line. The power generation element comprises: a permanent magnet placed in a magnetic field and configured to receive magnetic force of which a direction changes according to alternation of the magnetic field; a substrate including one end formed as a free end and the other end formed as a fixed end, having the permanent magnet attached to the free end, equipped with a certain amount of elasticity, and configured to receive bending force by the magnetic force that the permanent magnet receives; first and second charging members including surfaces facing each other and provided with polarities which are differently charged through friction by a mutual displacement of the surfaces facing each other; and a frame on which the permanent magnet, the substrate, and the first and second charging members are supported. The first charging member is fixed to the frame and the second charging member is fixed to the substrate. As the substrate vibrates by the bending force, a displacement occurs on a surface facing the first charging member so that the first and second charging members are charged. By a wire which connects the first and second charging members with each other, a charge flows between the first and second charging members to generate power.

Description

Power generation device using triboelectric charges {DEVICE FOR GENERATION OF ELECTRICITY USING TRIBOELECTIC}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a power generation device using triboelectric charging, in particular, a device that generates power by being placed by alternating alternating magnetic fields using the principle of triboelectric charging in which static electricity is generated by friction between two objects facing each other. It is about.

In the implementation of the Internet of Things, it is very important to continuously supply power to elements such as sensor elements scattered and installed.

In particular, when wireless sensor nodes are installed in various facilities such as factories, roads, buildings, ports, and the like and receive various measurement signals therefrom, the power necessary for the operation of the sensor nodes is often provided through a battery. The replacement of is not only time consuming and expensive, but battery replacement may not be possible if the sensor node is placed in a location that is inaccessible to humans.

If an electronic device, such as a wireless sensor node, needs to be powered from a nearby power line, then branching the wire from the power line and having a module for converting current and voltage suitable for the operation of the electronic device This can be very costly and adds significantly to the size and cost of the device.

Accordingly, the importance of energy harvesting technology for harvesting and supplying energy to an electronic device such as a sensor required for implementing the IoT is being increased.

Such energy harvesting technology uses a permanent magnet or magnetostrictive material to induce mechanical deformation or motion by using a magnetic force or magnetostrictive effect in an alternating magnetic field, and converts it into electrical energy using a piezoelectric effect. It is becoming.

However, piezoelectric elements that are essential for power generation using such piezoelectric effects are difficult to commercialize because they are very expensive and require a long time in manufacturing.

United States Patent Application Publication US2017 / 0359001 A1

An object of the present invention is to provide a power generating element capable of generating electric power from an alternating magnetic field formed on a power line of alternating current.

In particular, the present invention is to provide a power generation device that can be manufactured at a low cost while having a relatively simple configuration utilizing the triboelectric charging characteristics.

In addition, the present invention is to provide a power generation device that can generate the maximum power by utilizing the triboelectric charging characteristics.

The inventors of the present invention have noted the use of triboelectric properties as an effective means of generating power under alternating magnetic fields.

By placing two materials charged by mutual displacement between two objects placed close together and displacing the materials mutually by using force applied from the outside, the static electricity generated between the materials is transferred through the conductor attached to the materials. Research has been conducted on a triboelectric power generation device that generates power by induction to the outside.

1 is a view showing the principle of power generation by triboelectric charging.

The triboelectric power generation device shown in FIG. 1 attaches a polyimide film and a polymethyl methacrylate (PMMA) film named 'CAPTON' to a conductor electrode plate and faces them to each other, thereby being spaced apart from each other. From (I) to the state (II) in which both films are brought close to each other by an external force, a negative charge is charged to the polyimide film and a positive charge is charged to the PMMA film by the charging phenomenon, and the two objects start to be separated from each other from the proximity state. In (III), when current is generated by the flow of charge through the external conductor to balance the charge, and when the proximity starts again in the separated state (IV), the accumulated charge disappears while the accumulated charge disappears. Current is generated in the opposite direction.

As the two objects charged in this way are approached and spaced apart, and the conductors are disposed between the two objects, alternating currents in which currents in opposite directions flow through the close and spaced repetitive motions are generated.

The study on the generation of electric current by frictional charging is mainly to place the charging material in an environment where a large external force is applied, such as a wearable device, so that it can be applied as a device operating under a very weak magnetic field generated by commercial AC power. Inappropriate.

The inventors of the present invention generate several mW of power suitable for supplying devices that operate adjacent to a small alternating magnetic field formed around a wire through which commercial AC power flows and that consume small levels of power, such as sensor devices. As a result of continuing research into the device, the power generation device according to the present invention described below has been devised.

The present invention relates to a power generation device for generating power from a magnetic field formed by an AC power supply flowing in a power line,

A permanent magnet placed in a magnetic field and receiving a magnetic force which is changed in direction according to an alternating magnetic field; A substrate having one end formed at a free end and the other end formed at a fixed end, and having a permanent magnet attached to the free end, the substrate having a predetermined elasticity and receiving a bending force by a magnetic force received by the permanent magnet; First and second charging members having surfaces that face each other and whose friction polarity is different from each other by mutual displacement of the surfaces facing each other; And a frame on which the permanent magnet, the substrate, the first and second charging members are supported,

The first charging member is fixed to the frame and the second charging member is fixed to the substrate so that the first and second charging members are charged by causing displacement on the surface facing the first charging member as the substrate vibrates by the bending force. And electric charges are generated between the first and second charging members by conducting wires connecting the first and second charging members to each other.

In the power generating device of this configuration, the permanent magnet is placed in an alternating magnetic field formed around the power line through which the alternating current flows, and the substrate is placed perpendicular to the alternating magnetic field.

As a result, the permanent magnet applies a vertical load in which the directions are alternated by the magnetic force in which the directions are alternated, and the substrate is subjected to the bending load by using the fixed end as a supporting point.

The bending load is alternating and the substrate vibrates, the substrate and the permanent magnet vibrate at alternating frequencies of the alternating magnetic field, whereby the second charging member fixed to the substrate approaches the first charging member fixed to the frame. Alternatively, the displacement is repeatedly largely generated between the surfaces facing each other between the first charging member and the second charging member, which are spaced from the contact.

The first charging member and the second charging member are connected to an external electronic device and electrically connected to each other through an external electronic device to generate alternating current, that is, alternating current therebetween.

Thus, according to the configuration and operation of the present invention, by arranging two members to be frictionally charged facing each other and attaching one member to the cantilever-shaped substrate resonating by the bending force received by the permanent magnet by an alternating magnetic field, AC power is generated.

Since the triboelectrically charged member, the permanent magnet and the substrate can be obtained cheaper than the magnetostrictive material or the piezoelectric material, the power generating element can be configured at low cost and simple.

In addition, such a power generating device of the present invention can be harvested simply by installing a branch line in the power supply line without changing the power supply line or other surrounding facilities if the power supply line is located.

In particular, unlike the power generation device used in the wearable device, the power generation device according to the present invention is required for an electronic device requiring power from the power generation device even when the displacement between the two members that are frictionally charged is not large. To provide power.

As an additional feature of the present invention, the bending force applied by the permanent magnet in accordance with the alternating magnetic field may be altered so that the resonance of the central portion is maximized and the free end portion is minimized in the substrate.

According to this configuration, the substrate is resonated by the bending force applied by the permanent magnet, but the resonance is performed so that the central portion of the longitudinal direction is deformed to the maximum and the deformation of both ends is minimized. The mutual displacement of is maximized.

Thus, when the mutual displacement between a 1st charging member and a 2nd charging member becomes the maximum, the electric power generating element can obtain the maximum electric power.

On the other hand, in the power generation device of the present invention, the substrate is controlled by adjusting any one or more of the thickness, width, length from the fixed end to the position where the permanent magnet is attached, and elastic modulus and mass of the permanent magnet according to the frequency of the magnetic field. In this case, the resonance of the center portion is maximized and the free end portion is minimized.

Therefore, maximum power can be obtained by a simple and inexpensive method of adjusting the size, mass or elastic modulus of the substrate or permanent magnet in accordance with the frequency of the power line at the position where the power generating element of the present invention is placed.

As one of the embodiments of the present invention,

The first charging member is made of a thin film of metal that is positively charged, the second charging member is made of a resin panel that is charged with negative charge, and the second charging member is electrically connected to the back surface of the surface facing the first charging member. A thin film made of a conductive material is attached to the thin film, and a conductive wire can be connected to the thin film.

In this manner, the power generation device can be made of inexpensive materials.

As another embodiment of the present invention, in contrast to the previous embodiment, the first charging member is composed of a resin panel which is negatively charged and the second charging member is composed of a thin metal film that is positively charged. It may be.

On the other hand, as an additional feature of the present invention,

The first charging member or the second charging member may be made of a panel made of a resin that is charged with negative charge, and may be configured to have fine unevenness formed on a surface facing the first charging member.

As the charging surface on which the static charge is accumulated by the fine unevenness is expanded, more power can be obtained.

In addition, such fine unevenness may be formed by dissolving the water-soluble powder in water after spraying the water-soluble powder on the surface facing the first charging member. Therefore, a very fine concavo-convex structure can be formed by a very simple method.

1 is a view for explaining the schematic configuration and operation of the power generating device according to the triboelectric charging principle.
2 is a perspective view showing the configuration of a power generating device according to an embodiment of the present invention. Power generating device according to an embodiment of the present invention
3 is a diagram illustrating a state in which a power generating device operates according to an embodiment of the present invention.
4 is a view showing the principle of generating power in the power generating device according to an embodiment of the present invention.
5 is a view showing a resonance mode of a substrate in a power generating device according to an embodiment and a comparative example of the present invention.
6 and 7 are graphs illustrating resonance modes of substrates and voltages of powers generated in power generation devices according to comparative examples and embodiments of the present invention, respectively.
FIG. 8 is a view illustrating a process of forming fine concavo-convex on a PFA film of a power generating device according to an embodiment of the present invention.
FIG. 9 is a graph showing a comparison between a voltage and a current of power according to the presence or absence of fine unevenness of the PFA film in the power generation device according to the exemplary embodiment of the present invention.

Hereinafter, the configuration and operation of the power generation device according to an embodiment of the present invention as a specific content for practicing the present invention.

2 is a diagram schematically illustrating a configuration of a power generation device according to an exemplary embodiment of the present invention, and the configuration of the power generation device will be described with reference to this drawing.

The power generating element 10 of this embodiment is a 15 μm thick aluminum foil 11 as a first charging member that is charged by contact, and a 50 μm thick PFA (Perfluoroalkozy alkane) film 12 that is a Teflon resin as a second charging member. ). In the PFA film 12, nanoscale fine irregularities are formed on the charging surface 121 facing the aluminum foil 11, and the surface area thereof is enlarged.

The PFA film 12 is supported on the substrate 13, and the substrate 13 is formed of a 300 μm thick titanium (Ti) material panel, and one end of the substrate 13 is one end of the frame (not shown). Is fixed to the fixed end 131 and the other end to the free end 132 which is not fixed to form a cantilever beam as a whole of the substrate 13.

Between the substrate 13 and the PFA film 12, a gold thin film layer 14 having a thickness of 100 nm is formed on the back surface of the PFA film 12 as a conductive electrode by sputtering, and the gold thin film layer 14 and the substrate 13 are formed. The adhesive layer 15 is provided in between, and the PFA film 12 and the gold thin film layer 14 are fixed to the board | substrate 13.

On the other hand, seven neodymium (Nd) magnets each having a mass of 1.5 g as the permanent magnet 16 are fixed to both sides of the substrate at the free end 132 of the substrate 13. Neodymium magnet is a kind of rare earth magnet, and is made by alloying neodymium (Nd), iron (Fe) and boron (B) by a powder metallurgy at a ratio of 2: 14: 1.

Both ends of the aluminum foil 11 are fixed to a frame (not shown), and the PFA film 12 is attached to the substrate 13, and is disposed in a substantially parallel state without an external force applied thereto.

Meanwhile, the aluminum foil 11, the PFA film 12, the gold thin film layer 14, and the adhesive layer 15 are all 20 mm wide and 50 mm long, and the substrate 13 is 20 mm wide and 80 mm long. The PFA film 12, the gold thin film layer 14, and the adhesive layer 15 are not attached to the longitudinal end portions 131 and 132.

The size, width, thickness, and mass of the permanent magnet of each thin film or film defined above are numerical values set to satisfy the resonance conditions defined in the following embodiment when the permanent magnet 16 is placed under an alternating magnetic field of 143.2 Hz. This is just one example, and the thickness, length, width and modulus of elasticity of the substrate and the mass of the permanent magnet may be adjusted to satisfy the resonance conditions defined in this embodiment in accordance with the magnitude and frequency conditions of the alternating magnetic field.

In addition, in the present embodiment, aluminum foil 11 and PFA film 12 are used as the first charging member and the second charging member respectively charged by mutual displacement, and aluminum foil and Teflon resin can be used at low cost. As a material, the cost of a power generating device using these materials can be greatly reduced, and as will be described later, Teflon resin has an advantage of increasing power generated by the power generating device by expanding its charging surface area through a simple process. .

However, the present invention is not limited to this material, and as a material to be charged with an anode, a metal thin film or panel other than aluminum, or a panel made of a material such as glass, mica or silica can be used. As the material to be charged, a resin material such as polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC), or PTEE (Polytetrafluorethylene) may be used.

In the present embodiment, although the gold thin film layer 14 is formed on the PFA film 12, a thin film of a material having electrical conductivity other than gold may be formed.

The power generating element 10 having the above configuration is operated in a state schematically shown in FIG. 3.

First, in the power generating element 10 of the present embodiment, the permanent magnet 16 is placed in an alternating magnetic field.

The power generating element 10 of this embodiment is disposed around the power line 20 through which an alternating current flows.

The alternating current (B) is formed around the power line by alternating current flowing through the power line (20), and the permanent magnet (16) of the power generating element (10) is placed in the alternating magnetic field (B). , So that the direction of the magnetic field B is perpendicular to the plane of the surface of the substrate 13.

Since the strength of the alternating magnetic field is inversely proportional to the distance from the power line 20, it is advantageous for the permanent magnet 16 to be disposed as close to the power line 20 as possible without interference with the power line 20.

According to this arrangement, the permanent magnets 16 are subjected to alternating magnetic fields by alternating magnetic fields, and the permanent magnets 16 are attached to the free ends of the substrates 13 constituting the cantilever, so that the substrate 13 Is subjected to a bending load acting in the direction perpendicular to the plane of the surface at its free end 132, which is alternating in direction as the alternating magnetic field changes.

Accordingly, the substrate 13 is vibrated by an alternating load applied by the permanent magnet 16, which is a mass attached to the free end 132, with the fixed end 131 as a point.

By vibrating movement, the PFA film 12 as the second charging member attached to the substrate 13 moves up and down, and is close to the aluminum foil 11 as the first charging member fixed at a predetermined position. And the spaced apart movement will be repeated.

AC power is generated by the proximity and the separation of the aluminum foil 11 and the PFA film 12 as described above with reference to FIG. 1, and FIG. 4 schematically illustrates the principle of power generation. .

Referring to Figure 4 looks at the principle that the current is generated in the power generating device of this embodiment.

In the initial state in which the aluminum foil 11 and the PFA film 12 are spaced apart from each other, when the PFA film 12 approaches the aluminum foil 11 by the vibration of the substrate 13 (state ii), The positive phenomenon is charged to the aluminum foil 11 and the negative charge to the PFA film 12 by the charging phenomenon.

When the PFA film 12 starts to be spaced apart from the proximity state (ii) (state ⅲ), a current is generated by the flow of charge through an external conductor for balancing charges, and then close again in the spaced state ⅳ. At the beginning (state ⅴ), the accumulated charge disappears, creating a current in the opposite direction to state ⅲ.

In this manner, in the power generating element 10 of the present embodiment, an alternating current is generated according to the principle of current generation by triboelectric charging.

Referring back to FIG. 3, the conductors 17 and 18 are connected to the aluminum foil 11 and the PFA film 12, respectively, and the conductors 17 and 18 are connected to the sensor element 30 to supply an alternating current. Done.

The conductive wire 17 is directly connected to the aluminum foil 11, and the conductive wire 18 is connected to the PFA film 12 through the gold thin film layer 14 to transfer charges between the aluminum foil 11 and the PFA film 12. It becomes a passage, that is, a passage through which an electric current flows.

The sensor element 30 is operated by the power generated by the power generating element 10 of the present embodiment, and rectification module and secondary battery or capacitor for rectifying the alternating current from the power generating element 10 according to its use. Equipped with a power storage element such as to store the power generated by the power generating element 10 and converts it to the voltage and current required by the sensor element 30 to be used.

The sensor element 30 is provided with a wireless communication means such as a Wi-Fi module, but is not accessible to a person, but is provided at a position where the power line 20 is disposed to operate by using an alternating current from the power generating element 10 to a remote location. The measured information is transmitted to an information device such as a server 40 or an administrator's smartphone 40.

On the other hand, the power generation device 10 of the present embodiment was tested for the conditions that can generate the maximum power.

The power generating element 10 of this embodiment was placed in a Helmholtz coil to apply an alternating magnetic field, and the vibration mode of the substrate and the voltage of the generated current were measured.

Helmholtz coils have a diameter of 140 mm and apply an alternating magnetic field with a magnetic strength of 7 Oe. The alternating frequency of the alternating magnetic fields is zero by arranging the permanent magnets 10 of the power generating element to lie in the alternating magnetic fields of the Helmholtz coil. The vibration mode of the substrate 13 and the voltage of the power generated by the power generating element were measured while increasing from.

FIG. 5 shows the resonance states appearing in the substrate 13 according to the frequency of the magnetic field of the Helmholtz coil.

The resonant state appears in three modes as the frequency increases, and moves in a rotational manner around the fixed end 131 of the substrate, as shown in (a), sequentially from the lower frequencies as the frequency increases. A first bending resonance mode in which the free end 131 to which the permanent magnet 16 is attached has a maximum amplitude, a torsion resonance mode in which the substrate 13 twists and resonates with respect to the longitudinal axis as shown in (b). As shown in (c), the maximum amplitude appears in the central portion of the substrate 13 and the free end 132 exhibits a second bending resonance mode with little displacement.

FIG. 6 shows the displacement and generated voltage in the first bend resonance mode, which occurs when a 15 Hz alternating magnetic field is applied in a Helmholtz coil, opening up to 130 V peak to peak. A current with a voltage was generated.

FIG. 7 shows the displacement and generated voltage in the second bending resonance mode, which occurs when an alternating magnetic field of 143.2 Hz is applied in a Helmholtz coil, with power having a peak-to-peak open voltage of up to 703 V. FIG. Generated.

As shown in FIG. 6, in the torsion resonance mode, since there is little vertical displacement of the substrate 13, no current is generated.

When the same excitation force is given, the amplitude is maximized under the condition in which resonance occurs, and in the power generating element according to the present embodiment, the substrate to which the second charging member with displacement of proximity and separation is attached is a permanent magnet at its free end. When the bending vibration occurs due to the alternating magnetic force in the up and down direction, the maximum displacement occurs due to resonance, and the maximum displacement generates the maximum displacement between the first charging member and the second charging member. Can be maximized.

In particular, as in the experimental results described above, the resonance occurs in various modes, the maximum displacement due to the resonance occurs in the center of the substrate 13, both ends of the substrate generates a maximum power in the resonance condition that does not occur displacement It turns out that this is possible.

The above experimental results confirm that the second bending resonance mode in which the center of the substrate vibrates up and down when the alternating magnetic field of 143.2 Hz is applied to the power generating device of the present embodiment is generated, and the maximum power is generated in the resonance mode. As a variation of the present embodiment, when the length of the substrate is set to 95 mm and 12 permanent magnets are attached and all other conditions are the same as those of the embodiment, the power generating element is constructed at a frequency of 60 Hz, which is the frequency of commercial AC power. It was confirmed that resonance occurs in accordance with the second bending resonance mode and maximum power was generated.

In addition, an experiment was performed to generate electric power by supplying the electric power generating element of the modified example configured as described above to a commercial AC power line.

In this experiment, a resistor is connected to a power line supplied with a commercial power source having a voltage of 220 V and a frequency of 60 Hz so that a current of 5.0 A and 9.2 A flows, respectively. The permanent magnets were placed 14 mm apart.

If a current of 5.0 A flows. At the position where the permanent magnet is placed, it is calculated that an alternating magnetic field having a maximum size of 1.3 Oe is formed, and a resonance occurs according to the second bending resonance mode in the power generating element, and the frequency to frequency 60 Hz, peak to peak open voltage of 151 V, 11.7 Power with a short circuit current of μA was generated.

In the case where a current of 9.2 A flows. At the position where the permanent magnets are placed, an AC magnetic field with a maximum size of 0.7 Oe was calculated, and a resonance occurred according to the second bending resonance mode in the power generating element. Power with a short circuit current of μA was generated.

The condition that the power generating element having the configuration according to the present invention has a resonance mode in which the longitudinal center of the substrate vibrates up and down is the size, thickness, elasticity of the substrate constituting the power generating element or the first and second charging elements. Depending on the modulus and the mass of the permanent magnet, the conditions under which such a second resonant mode occurs can be set by one of ordinary skill in the art as described herein through repeated experiments.

On the other hand, according to the principle of triboelectric charging, two objects charged according to mutual displacement such as mutual contact and separation can have a higher voltage of current generated as the amount of charged charge increases according to their opposing surface areas.

In the power generation device 10 of the present embodiment, the nano-scale fine irregularities are formed on the charging surface 121 facing the aluminum foil 11 so that the surface area is maximized.

FIG. 8 schematically illustrates a process of forming nanoscale fine irregularities on the surface of the PFA film 12 in the power generating element 10 of the present embodiment.

First, an unprocessed PFA film 12 'serving as a raw material is prepared, and sodium chloride powder 2 having a nano particle size is sprayed at a high pressure gas on one surface by a high pressure gas at a high speed (process) A).

Although the injected sodium chloride powder collides with the surface of the PFA film 12 'and bounces off, a large number of powders are embedded in the surface of the PFA film 12'.

Following this process, the PFA film 12 'containing the sodium chloride powder is immersed in water (step B). Thus, the water-soluble sodium chloride powder is dissolved in water and separated from the PFA film 12 '.

Subsequently, when the PFA film 12 is taken out of water and dried, a fine concavo-convex structure is formed on the charging surface 121 as shown in (C). Although the figure is exaggeratedly large in order to show the unevenness, the size of the unevenness depends on the particle size of the sodium chloride powder, and when using the nanoscale sodium chloride powder, a PFA film having nanoscale unevenness on the surface is obtained.

On the other hand, although sodium chloride powder was sprayed onto the PFA film in this embodiment, potassium chloride or other water-soluble powders may be used in addition to the sodium chloride powder.

FIG. 9 is a graph showing voltage and current with respect to a configuration in which the power generation device 10 according to the present embodiment is formed with or without nanoscale fine irregularities by the above-described process as the PFA film.

As can be seen from this graph, it can be seen that in the configuration in which nanoscale fine irregularities are formed on the PFA film 12, the voltage and current of generated power are greatly increased as compared with the case where there is no fine irregularities.

On the other hand, in the present embodiment, the charging area was enlarged by forming a fine concavo-convex structure on the PFA film. In this case, a higher power generation effect can be obtained.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, these embodiments are merely exemplary, and various modifications and changes and additions of components are possible by those skilled in the art within the scope of the claims, and such modifications are possible. Configurations with additions, changes, and components are within the scope of the present invention.

10: power generating element 11: aluminum foil
12: PFA film 13: substrate
14: gold thin film layer 15: adhesive layer

Claims (7)

A power generating element for generating electric power from a magnetic field formed by an AC power supply flowing in a power line,
A permanent magnet placed in a magnetic field and receiving a magnetic force which is changed in direction according to an alternating magnetic field;
A substrate having one end formed at a free end and the other end formed at a fixed end, the permanent magnet being attached to the free end, and having a predetermined elasticity and receiving a bending force by a magnetic force received by the permanent magnet;
First and second charging members having surfaces that face each other and whose friction polarity is different from each other by mutual displacement of the surfaces facing each other; And
Frame on which permanent magnet, substrate, first and second charging members are supported
Including,
The first charging member is fixed to the frame and the second charging member is fixed to the substrate so that the first and second charging members are charged by causing displacement on the surface facing the first charging member as the substrate vibrates due to the bending force. And electric power is generated by electric charge flowing between the first and second charging members by a conducting wire interconnecting the first and second charging members. The method according to claim 1,
The first charging member is made of a thin metal film that is positively charged, the second charging member is made of a resin panel which is charged with negative charge, and the second charging member is electrically conductive on the back surface of the surface facing the first charging member. A power generating device, wherein a thin film of material is attached to which a conductive wire is connected. The method according to claim 1,
The first charging member is made of a resin panel which is charged with negative charge, and a thin film of an electrically conductive material is attached to the first charging member on the rear surface of the surface facing the second charging member, and the conductive wire is connected to the thin film. 2 The charging member is a power generating device comprising a thin film made of metal charged with positive charge. The method according to any one of claims 1 to 3,
The first charging member or the second charging member is made of a panel made of a resin that is charged with negative charge, and the electric power generating device, fine unevenness is formed on the surface facing the first charging member. The method according to claim 4,
The fine unevenness is formed by dissolving the water-soluble powder in water after spraying the water-soluble powder on the surface facing the first charging member. The method according to any one of claims 1 to 5,
The alternating direction of the bending force exerted by the permanent magnets in accordance with the alternating magnetic field is configured to make the resonance of the central portion in the substrate to maximize the deformation and the deformation of the free end to the minimum. The method according to claim 6,
At least one of the thickness, width of the substrate, the length from the fixed end to the position where the permanent magnet is attached, and the modulus of elasticity and the mass of the permanent magnet has a maximum deformation at the center of the substrate and a deformation at the free end according to the frequency of the magnetic field. And a power generating device which is adapted to make this minimum resonance.

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