KR20200001090A - Manufacturing method of roll mold for imprinting and roll mold for imprinting - Google Patents

Abstract

The present invention relates to a manufacturing method of a roll mold for imprinting with excellent durability by forming an amorphous metal layer having a pattern portion on a flexible substrate.

Description

Manufacturing method of roll mold for imprinting and roll mold for imprinting {MANUFACTURING METHOD OF ROLL MOLD FOR IMPRINTING AND ROLL MOLD FOR IMPRINTING}

The present invention relates to an imprinting roll mold having excellent mechanical properties and a method of manufacturing the same.

In order to manufacture a semiconductor element, an electronic element, an optoelectronic element, a magnetic element, a display element, etc., the functional film with a pattern is used. In particular, as the interest in display devices for implementing Augmented Reality (AR), Mixed Reality (MR), or Virtual Reality (VR) grows, research into display devices for implementing the same has been actively conducted. The trend is losing. A display unit for implementing augmented reality, mixed reality, or virtual reality includes a film element that performs an optical role using a diffraction phenomenon based on the wave property of light as a functional film. Such an optical film element includes a diffraction grating pattern capable of internally reflecting or totally internally reflecting light incident on the film element to guide the light incident on the film element to one point.

Using an imprinting process using a master mold in which a diffraction grating pattern is engraved, an optical film element including a diffraction grating pattern as a functional film was manufactured. However, the master mold had a problem that the production time and production cost are high. Accordingly, an optical film device was manufactured by using a replica mold manufactured by transferring a lattice pattern of a master mold to a polyethylene terephthalate (PET) substrate having relatively low manufacturing cost and manufacturing time. However, a replication mold based on a substrate such as PET has a problem in that durability is not good, so that it may be damaged or the imprinting efficiency may be drastically reduced when the repetitive imprinting process is performed.

Moreover, in order to improve the manufacturing efficiency of an optical film element, the research which manufactures the roll type replica mold is advanced. However, due to the constraints on the mechanical properties of the replica mold, it is difficult to manufacture a roll type replica mold.

Accordingly, there is a need for a technology capable of manufacturing an imprinting mold of a roll type that can improve durability of an imprinting mold and improve manufacturing efficiency of a functional film including a pattern.

Accordingly, the present invention is to provide a method and a roll mold for imprinting which can easily produce a roll type imprinting mold having excellent mechanical properties.

However, the problem to be solved by the present invention is not limited to the above-mentioned problem, another task that is not mentioned will be clearly understood by those skilled in the art from the following description.

One embodiment of the present invention, by depositing at least one amorphous metal on the flexible substrate, to form an amorphous metal layer; Thermally imprinting a stamp with a pattern on one surface of the amorphous metal layer to manufacture an imprinting mold including the amorphous metal layer with a pattern portion; And bending the imprinting mold by making the amorphous metal layer outward, and connecting one side and the other side of the imprinting mold to produce a roll-type imprinting mold. It provides a manufacturing method.

In addition, another embodiment of the present invention is a flexible substrate; And an imprinting mold provided on the flexible substrate and having a pattern portion formed on one surface thereof, wherein the imprinting mold is bent with the amorphous metal layer outside. Provided is a roll mold for imprinting a roll in which one side and the other side of the mold are connected.

The method of manufacturing an imprinting roll mold according to an exemplary embodiment of the present invention can easily prepare an imprinting mold having a roll shape having excellent durability.

According to one embodiment of the present invention, it is possible to provide an imprinting roll mold having excellent durability.

The effects of the present invention are not limited to the above-described effects, and effects that are not mentioned will be clearly understood by those skilled in the art from the present specification and the accompanying drawings.

1 is a view showing a manufacturing process of an imprinting roll mold according to an exemplary embodiment of the present invention.
2 is a view illustrating a process of thermal imprinting on one surface of an amorphous metal layer according to an exemplary embodiment of the present invention.
3 is a view schematically showing a process of manufacturing a roll mold for printing using a base roller according to an embodiment of the present invention.
4 is a view schematically showing a process of manufacturing a functional film through a roll to roll method using a roll mold for imprinting according to an exemplary embodiment of the present invention.
FIG. 5 is a view schematically showing a process of manufacturing a functional film through a roll to plate method using a roll mold for imprinting according to an exemplary embodiment of the present invention.
6a to 6f schematically illustrate a process of manufacturing a functional film through a roll to plate method using a roll type imprinting mold according to an exemplary embodiment of the present invention.
7 is a scanning electron microscope (SEM) photograph of a cross section of a pattern portion of an amorphous metal layer and a cross section of a stamp of an imprinting mold manufactured in Example 1, Comparative Example 1, and Reference Example 1 of the present invention.
FIG. 8 is a diagram illustrating an X-ray diffraction spectroscopy (XRD) analysis result of an amorphous metal layer included in an imprinting mold prepared in Examples 1 to 3 of the present invention.
9 is a phase diagram illustrating a composition range of an amorphous metal layer included in an imprinting mold manufactured in Examples 1 to 3 of the present invention.
10 is a view showing a DSC analysis result of an amorphous metal layer included in the imprinting mold prepared in Example 1 of the present invention.
FIG. 11 is a diagram illustrating an XRD analysis result before and after thermal imprinting of an amorphous metal layer included in an imprinting mold prepared in Example 1;
12 is a scanning electron microscope (SEM) photograph of the imprinting roll mold surface prepared in Example 1 and the specimen surface prepared in Comparative Example 2. FIG.
FIG. 13 is a scanning electron microscope (SEM) photograph of a resin surface subjected to imprinting using the imprinting mold prepared in Example 2 of the present invention. FIG.
FIG. 14 is a scanning electron microscope (SEM) photograph of a resin surface on which an imprinting is performed using an imprinting mold prepared in Comparative Example 3. FIG.

Throughout this specification, when a part is said to "include" a certain component, it means that it may further include other components, without excluding the other components unless otherwise stated.

Throughout this specification, when a member is located "on" another member, this includes not only when one member is in contact with another member but also when another member exists between the two members.

As used throughout this specification, the term "step of" or "step of" as used does not mean "step for".

Throughout this specification, the unit "wt%" means the weight ratio of components included in the member to the total weight of the member.

Throughout this specification, the unit "at%" means the percentage of the atom relative to the total number of atoms included in the member.

Throughout this specification, an amorphous metal refers to a metal capable of implementing amorphous physical properties. Specifically, the amorphous metal itself may have amorphous properties, or the alloy of amorphous metal may have amorphous properties.

Hereinafter, this specification is demonstrated in detail.

One embodiment of the present invention, by depositing at least one amorphous metal on the flexible substrate, to form an amorphous metal layer; Thermally imprinting a stamp with a pattern on one surface of the amorphous metal layer to manufacture an imprinting mold including the amorphous metal layer with a pattern portion; And bending the imprinting mold by making the amorphous metal layer outward, and connecting one side and the other side of the imprinting mold to produce a roll-type imprinting mold. It provides a manufacturing method.

The method of manufacturing an imprinting roll mold according to an exemplary embodiment of the present invention can easily prepare an imprinting mold having a roll shape having excellent durability. Specifically, by forming the amorphous metal layer on the flexible substrate, it is possible to improve the durability of the imprinting mold to produce an imprinting roll mold having an extended life. In addition, due to the excellent mechanical properties of the amorphous metal layer, even when the imprinting mold is processed into a roll shape, it is possible to suppress the occurrence of breakage in the imprinting mold.

1 is a view showing a manufacturing process of an imprinting roll mold according to an exemplary embodiment of the present invention. Specifically, FIG. 1A illustrates that the amorphous metal layer 20 is formed by depositing at least one metal on the flexible substrate 10, and FIG. 1B illustrates a pattern through a thermal imprinting process. It is shown to form the amorphous metal layer 20 with the addition, Figure 1 (c) shows the manufacturing of the imprinting roll mold 200 by processing the prepared imprinting mold 100.

According to one embodiment of the present invention, the flexible base material used in the art as the flexible base material can be used without limitation. Specifically, a flexible substrate capable of pressurizing at a high temperature or a flexible substrate having excellent heat resistance can be used. For example, a polymer substrate such as fiber-reinforced plastic (FRP), polyimide (PI), and polynorbornene (PNB) may be used as the flexible substrate.

According to one embodiment of the present invention, the thickness of the flexible substrate may be 50 μm or more and 250 μm or less. Specifically, the thickness of the flexible substrate is 75 μm or more and 225 μm or less, 90 μm or more and 200 μm or less, 125 μm or more and 180 μm or less, 55 μm or more and 90 μm or less, 110 μm or more and 160 μm or less, or 180 μm or more and 210 μm or less. It may be: By adjusting the thickness of the flexible base material in the above-mentioned range, the durability of the roll mold for imprinting manufactured can be improved more. In addition, when the thickness of the flexible substrate is in the above-described range, in the process of processing the imprinting mold including the flexible substrate and the amorphous metal layer in the form of a roll, breakage of the flexible substrate can be suppressed, and the roll more easily. It can be processed into forms.

According to an exemplary embodiment of the present invention, the deposition of the amorphous metal may be performed by any one of sputtering, electron beam deposition, thermal deposition, plasma chemical vapor deposition, and low pressure chemical vapor deposition. Specifically, by depositing at least one amorphous metal using a sputtering method, an amorphous metal layer having a homogeneous composition can be formed on the flexible substrate. In addition, when using the sputtering method, by adjusting the sputtering power, the angle and distance between the sputtering target and the flexible substrate, there is an advantage that the composition of the amorphous metal layer and the thickness of the amorphous metal layer can be easily adjusted. Specifically, by controlling the angle and distance between the sputtering target and the flexible substrate, it is possible to manufacture an amorphous metal layer having a thickness gradient.

According to an exemplary embodiment of the present invention, the amorphous metal includes any one of magnesium, copper, yttrium, iron, cobalt, lanthanum, aluminum, nickel, zirconium, titanium, beryllium, cerium, and gallium, and may implement amorphous properties. have. For example, by sputtering and depositing magnesium, copper, and yttrium, respectively, on the flexible substrate, an amorphous metal layer can be formed on the flexible substrate. In addition, an alloy target including magnesium, copper and yttrium may be sputtered to form an amorphous metal layer.

According to one embodiment of the present invention, an amorphous alloy may be deposited to form the amorphous metal layer. In addition, the amorphous alloy, the metal layer is a La-Al-Cu-based alloy, La-Al-Ni-based alloy, La-Al-Ni-Co-Cu-based alloy, Mg-Al-Cu-based alloy, Mg-Cu-Y-based Alloy, Mg-Al-Ni alloy, Zr-Al-Cu alloy, Zr-Al-Ni alloy, Zr-Cu-Al-Ni alloy, Zr-Ti-Al-Cu alloy, Zr-Ti- Al-Ni-based alloys, Zr-Ti-Al-Cu-Ni-based alloys, Zr-Ti-Cu-Be-based alloys, Zr-Ti-Ni-Be-based alloys, Zr-Ti-Ni-Cu-Be-based alloys, Fe-Al-P alloy, Fe-Al-C alloy, Fe-Al-B alloy, Fe-Al-Si alloy, Fe-Ga-P alloy, Fe-Ga-C alloy, Fe- Ga-B alloy, Fe-Ga-Si alloy, Pd-Cu-Ni-P alloy, Pd-Ni-P alloy, Fe-Co-Zr-B alloy, Fe-Co-Hf-B alloy Alloy, Fe-Co-Nb-B alloy, Fe-Ni-Zr-B alloy, Fe-Ni-Hf-B alloy, Fe-Ni-Nb-B alloy, Ce-Al-Cu alloy, It may include at least one of the Ca-Mg-Zn-based alloy, and Ti-Ni-Cu-Sn-based alloy.

According to one embodiment of the present invention, the thickness of the amorphous metal layer may be 100 nm or more and 2,000 μm or less. Specifically, the thickness of the amorphous metal layer is 500 nm or more and 1,800 μm or less, 1,000 nm or more and 1,500 μm or less, 2,000 nm or more and 1,000 μm or less, 4,000 nm or more and 800 μm or less, 7,500 nm or more and 500 μm or less, 10 μm or more and 500 μm or less , 25 µm or more and 350 µm or less, 50 µm or more and 200 µm or less, or 75 µm or more and 150 µm or less. More specifically, the thickness of the amorphous metal layer is 200 nm or more and 8 μm or less, 500 nm or more and 5 μm or less, 1 μm or more and 3 μm or less, 350 nm or more and 950 nm or less, 1.5 μm or more and 4.5 μm or less, or 6 μm or more 9 It may be up to μm. By adjusting the thickness of the amorphous metal layer in the above-described range, the mold for imprinting can be more easily processed into a roll form. In addition, when the thickness of the amorphous metal layer is within the above-described range, the amorphous metal layer may have excellent mechanical properties and at the same time have relatively reduced brittleness. Through this, in the process of processing the imprinting mold in the form of a roll, it is possible to effectively suppress the breakage of the amorphous metal layer.

According to an exemplary embodiment of the present invention, in the manufacturing of the imprinting mold, thermally imprinting a stamp having a pattern on one surface of the amorphous metal layer may form a pattern portion on one surface of the amorphous metal layer.

According to one embodiment of the present invention, the imprinting mold may be a replication mold. Specifically, the imprinting mold may be a replica mold of a master mold. The master mold may be used as a stamp, and the pattern of the stamp may have a form corresponding to the pattern portion of the amorphous metal layer. For example, when an intaglio pattern is formed on one surface of the stamp, the pattern portion of the amorphous metal layer formed by thermally imprinting the stamp may have an embossed shape corresponding to the intaglio pattern.

Therefore, the method of manufacturing an imprinting roll mold according to an exemplary embodiment of the present invention may provide a replica mold capable of replacing a master mold which is time-consuming and expensive to manufacture. By using the imprinting roll mold, which is a duplicate mold of the master mold, it is possible to save time and cost for manufacturing the master mold, and to effectively reduce the imprinting process cost. Furthermore, the imprinting roll mold includes an amorphous metal layer having a pattern portion, thereby effectively overcoming a problem of low durability, which is a disadvantage of the replica mold.

According to an exemplary embodiment of the present invention, by using a thermal imprinting method used in the art, a pattern portion may be formed on one surface of the amorphous metal layer. For example, a pattern portion may be formed on the amorphous metal layer by applying heat to the laminate including the amorphous metal layer and the flexible substrate and pressing the heated stamp onto one surface of the amorphous metal layer.

2 is a view illustrating a process of thermal imprinting on one surface of an amorphous metal layer according to an exemplary embodiment of the present invention. Specifically, FIG. 2 illustrates a process of pressing the heated stamp 30 on one surface of the amorphous metal layer 20.

According to one embodiment of the present invention, the thermal imprinting may be performed at a temperature of 50 ° C. or more and 300 ° C. or less. Specifically, the temperature may be performed at a temperature of 70 ° C. or higher and 280 ° C. or lower, or 100 ° C. or higher and 250 ° C. or lower. More specifically, the thermal imprinting process may be performed at a temperature of 120 ° C. to 230 ° C., a temperature of 130 ° C. to 195 ° C., a temperature of 150 ° C. to 180 ° C., or a temperature of 175 ° C. to 200 ° C. . That is, the manufacturing method of the imprinting roll mold according to the exemplary embodiment of the present invention has an advantage in the process of performing thermal imprinting at a relatively low temperature.

In addition, the temperature at which the thermal imprinting process is performed may be set in consideration of a temperature range in which amorphous properties of the amorphous metal layer are maintained. For example, when the crystallization temperature (T _c ) of the amorphous metal layer formed on the flexible substrate is 210 ° C or more and 240 ° C or less, the thermal imprinting process is performed at a temperature condition that does not reach the crystallization temperature of the amorphous metal layer. As a result, the amorphous physical properties of the amorphous metal layer can be maintained. The crystallization temperature of the amorphous metal layer may be controlled by adjusting the type of amorphous metal and the content of the amorphous metal included in the amorphous metal layer. In this case, it may be desirable to control the crystallization temperature of the amorphous metal layer to be low.

Therefore, according to the exemplary embodiment of the present invention, by controlling the temperature at which the thermal imprinting process is performed, it is possible to easily maintain the amorphous physical properties of the amorphous metal layer and to easily form a pattern portion on one surface of the amorphous metal layer.

According to one embodiment of the present invention, by controlling the degree of pressing the stamp on the amorphous metal layer, it is possible to control the shape of the pattern portion formed in the amorphous metal layer. Specifically, in the thermal imprinting process, the stamp may be pressurized to 5 MPa or more. More specifically, the stamp is 5 MPa or more and 50 MPa or less, 10 MPa or more and 40 MPa or less, 15 MPa or more and 35 MPa or less, 20 MPa or more and 30 MPa or less, 7 MPa or more and 25 MPa or less, or 10 MPa or more and 20 MPa or less Can be pressurized. By adjusting the degree to which the stamp is pressed, the pattern of the stamp can be effectively transferred onto one surface of the amorphous metal layer. In addition, by adjusting the degree of pressing the stamp, it is possible to control the height, width, spacing, etc. of the pattern portion formed in the amorphous metal layer. In addition, the degree of pressing the stamp may be set in consideration of the kind of metal included in the amorphous metal layer, the content of the metal, and the like. Furthermore, the degree of pressurization of the stamp to form the size of the desired pattern portion can be inferred through methods known in the art. For example, reference may be made to the contents described in “Nano Lett., 2015, 15 (2), pp 963-968”.

According to an exemplary embodiment of the present invention, the pattern portion of the amorphous metal layer may include a plurality of pattern units having an embossed or engraved shape. In addition, the pattern unit may be a nanometer size. For example, the pattern unit may have a height of 10 nm or more and 250 nm or less, a width of 100 nm or more and 300 nm or less, and may be provided at intervals of 50 nm or more and 200 nm or less. However, the shape of the pattern unit is not limited to the above, and may be controlled by adjusting the size of the embossed or intaglio pattern of the stamp, the degree of pressurization during the thermal imprinting process.

The height, width, and spacing of the pattern units may mean average height, average width, and average spacing of the pattern units. In addition, the height, width, and spacing of the pattern unit may be measured by photographing a cross section of the pattern portion with a scanning electron microscope (SEM).

Therefore, according to the exemplary embodiment of the present invention, the nanometer-sized pattern portion may be easily formed on the amorphous metal layer. In addition, the amorphous metal layer may have excellent durability even when the nanometer size pattern portion is formed due to excellent mechanical properties.

The pattern unit may include an inclined pattern unit, and the plurality of pattern units included in the pattern unit may be different from each other.

According to one embodiment of the present invention, by bending the imprinting mold with the amorphous metal layer on the outside to contact one side and the other side of the imprinting mold, by connecting one side and the other side of the imprinting mold, The roll mold for printing can be manufactured. By connecting one side and the other side of the imprinting mold in the art can be used without limitation the process of joining the members. For example, one side and the other side of the imprinting mold may be connected by using an adhesive or a bonding film. In addition, the flexible substrate of the imprinting mold may be attached along the outer circumferential surface of the base roller to manufacture a roll mold for imprinting.

3 is a view schematically showing a process of manufacturing a roll mold for printing using a base roller according to an embodiment of the present invention. Specifically, FIG. 3A illustrates that the amorphous metal layer 20 is formed by depositing at least one metal on the flexible substrate 10, and FIG. 3B illustrates a pattern through a thermal imprinting process. 3 shows an example of forming an amorphous metal layer 20 having an additional portion. In FIG. 3C, the imprinting roll 100 is formed by winding the imprinting mold 100 on the outer circumferential surface of the base roller 40. It is shown to prepare.

One embodiment of the present invention, by depositing at least one amorphous metal on the flexible substrate, to form an amorphous metal layer; Thermally imprinting a stamp with a pattern on one surface of the amorphous metal layer to manufacture an imprinting mold including the amorphous metal layer with a pattern portion; And winding the imprinting mold to produce a roll-type imprinting mold. Provides a method of manufacturing a roll-type imprinting mold comprising a.

Another embodiment of the present invention is a flexible substrate; And an imprinting mold provided on the flexible substrate and having a pattern portion formed on one surface thereof, wherein the imprinting mold is bent with the amorphous metal layer outside. Provided is a roll mold for imprinting a roll in which one side and the other side of the mold are connected.

According to one embodiment of the present invention, it is possible to provide an imprinting roll mold having excellent durability. Specifically, since the working surface of the imprinting roll mold is formed of an amorphous metal layer having excellent mechanical properties, the life of the imprinting roll mold may be further extended.

The flexible substrate and the amorphous metal layer included in the roll mold for imprinting according to the exemplary embodiment of the present invention may be the same as the flexible substrate and the amorphous metal layer of the method for manufacturing the roll mold for imprinting. In addition, the imprinting roll mold according to the exemplary embodiment of the present invention may be manufactured through the manufacturing method of the above-mentioned imprinting roll mold.

According to an exemplary embodiment of the present invention, the amorphous metal layer may include any one metal of magnesium, copper, yttrium, iron, cobalt, lanthanum, aluminum, nickel, zirconium, titanium, beryllium, cerium, and gallium. Specifically, the amorphous metal layer may be an amorphous alloy layer. In addition, the amorphous metal layer may include a nonmetal in addition to the amorphous metal. For example, the base metal may include at least one of carbon, phosphorus, boron, tin, and silicon, but the type of the base metal is not limited.

According to one embodiment of the present invention, the amorphous metal layer is a La-Al-Cu-based alloy, La-Al-Ni-based alloy, La-Al-Ni-Co-Cu-based alloy, Mg-Al-Cu-based alloy, Mg -Cu-Y alloy, Mg-Al-Ni alloy, Zr-Al-Cu alloy, Zr-Al-Ni alloy, Zr-Cu-Al-Ni alloy, Zr-Ti-Al-Cu alloy , Zr-Ti-Al-Ni-based alloy, Zr-Ti-Al-Cu-Ni-based alloy, Zr-Ti-Cu-Be-based alloy, Zr-Ti-Ni-Be-based alloy, Zr-Ti-Ni-Cu -Be alloy, Fe-Al-P alloy, Fe-Al-C alloy, Fe-Al-B alloy, Fe-Al-Si alloy, Fe-Ga-P alloy, Fe-Ga-C Alloy, Fe-Ga-B alloy, Fe-Ga-Si alloy, Pd-Cu-Ni-P alloy, Pd-Ni-P alloy, Fe-Co-Zr-B alloy, Fe-Co -Hf-B alloy, Fe-Co-Nb-B alloy, Fe-Ni-Zr-B alloy, Fe-Ni-Hf-B alloy, Fe-Ni-Nb-B alloy, Ce-Al It may include at least one of -Cu-based alloys, Ca-Mg-Zn-based alloys, and Ti-Ni-Cu-Sn-based alloys.

In addition, the alloy layer may have amorphous physical properties by controlling the type of atoms and the content of atoms included in the alloy layer.

According to an exemplary embodiment of the present invention, the amorphous metal layer includes magnesium, copper, and yttrium, the magnesium content is 60 at% or more and 80 at% or less, and the copper content is 15 at% or more and 30 at% or less The yttrium content may be 1 at% or more and 20 at% or less. Specifically, the magnesium content may be 70 at% or more and 78 at% or less, the copper content may be 20 at% or more and 25 at% or less, and the yttrium content may be 1 at% or more and 10 at% or less. The alloy layer containing magnesium, copper, and yttrium in the aforementioned ranges may have amorphous properties.

According to an exemplary embodiment of the present invention, the modulus of the imprinting mold may be 2.5 GPa or more and 3.5 GPa or less. Specifically, the modulus of the imprinting mold including the amorphous metal layer and the flexible substrate provided with the pattern portion is 2.5 GPa or more and 3.5 GPa or less, 2.7 GPa or more and 3.3 GPa or less, 2.9 GPa or more and 3.1 GPa or less and 2.6 GPa at 25 ° C. Or more than 2.8 GPa, or 3.0 GPa or more and 3.3 GPa or less. The modulus of the imprinting mold can be measured using an apparatus and method for measuring the modulus of the mold in the art. For example, using a dynamic mechanical analyzer (DMA 800, TA Instruments, Inc.), after fixing the both ends of the sample of the imprinting mold prepared according to JIS-K6251-1 standard in a direction perpendicular to the thickness direction of the sample By applying a force, the stress per unit area according to the tensile rate may be measured, and the ratio of the stress to the measured tensile rate may be calculated to measure the modulus of the imprinting mold. In addition, the modulus of the imprinting mold may be controlled by adjusting the type of the flexible substrate included in the imprinting mold and the metal type included in the amorphous metal layer.

According to an exemplary embodiment of the present invention, the imprinting mold having the modulus in the above-described range is excellent in durability, even when a plurality of imprinting is performed by using the roll mold for imprinting. The fall can be prevented effectively. When the imprinting mold has a low modulus, as the imprinting process is repeatedly performed, the durability of the imprinting roll mold is sharply lowered, so that the imprinting roll mold is damaged or the imprinting efficiency is reduced. Can be generated. On the other hand, an imprinting roll mold including the imprinting mold having a modulus in the above-described range has an advantage of performing a greater number of imprinting processes. In addition, the imprinting mold having a modulus in the above-described range may be easily processed into a roll form.

According to an exemplary embodiment of the present invention, the tensile strength of the imprinting mold may be 10 MPa or more and 300 MPa or less. Specifically, the tensile strength of the imprinting mold including the amorphous metal layer and the flexible substrate provided with a pattern portion is 20 MPa or more, 280 MPa or less, 40 MPa or more, 250 MPa or less, 75 MPa or more and 200 MPa or less at 25 ° C. It may be 100 MPa or more and 150 MPa or less. More specifically, the tensile strength of the imprinting mold at 25 ℃, 100 MPa or more 250 MPa or less, 125 MPa or more 220 MPa or less, 150 MPa or more 200 MPa or less, 110 MPa or more 160 MPa or less, or 180 MPa or more 240 It may be less than or equal to MPa. The tensile strength of the imprinting mold can be measured using an apparatus and method for measuring the tensile strength of the mold in the art. For example, a dynamic mechanical analyzer (DMA 800, TA Instruments, Inc.) may be used to apply a tensile load to an imprinting mold, and measure the maximum stress until the imprinting mold is broken. In addition, the tensile strength of the mold for imprinting may be controlled by adjusting the kind of the flexible substrate included in the mold for imprinting and the kind of metal included in the amorphous metal layer.

According to one embodiment of the present invention, the imprinting mold having the above-described tensile strength is excellent in durability, even when the imprinting process is performed a large number of times using the roll mold for imprinting. The fall of efficiency can be prevented effectively. In addition, the imprinting mold having a tensile strength in the above-described range can be easily processed in the form of a roll.

According to an exemplary embodiment of the present invention, the toughness of the imprinting mold may be 10 MPa or more and 300 MPa or less. Specifically, the toughness of the imprinting mold including the amorphous metal layer and the flexible substrate provided with a pattern portion is at least 25 MPa, at least 270 MPa, at least 60 MPa, at most 230 MPa, at least 80 MPa, at most 200 MPa, or at 110 ° C. It may be greater than or equal to MPa and less than or equal to 150 MPa. More specifically, the toughness of the imprinting mold may be 100 MPa or more and 200 MPa or less, 110 MPa or more and 190 MPa or less, or 130 MPa or more and 175 MPa or less at 25 ° C. The imprinting roll mold including the imprinting mold having the toughness in the above-described range may be excellent in durability. The toughness of the imprinting mold can be measured using an apparatus and method for measuring the toughness of the mold in the art. For example, using a dynamic mechanical analyzer (DMA 800, TA Instruments, Inc.), after fixing the both ends of the sample of the imprinting mold prepared according to JIS-K6251-1 standard in a direction perpendicular to the thickness direction of the sample Toughness of the imprinting mold can be obtained by applying a force to measure stress per unit area according to a tensile rate, and calculating an integral value of a function derived from the measured tensile rate and stress. . In addition, the toughness of the imprinting mold may be controlled by adjusting the kind of the flexible substrate included in the imprinting mold and the kind of metal included in the amorphous metal layer.

According to one embodiment of the present invention, the radius of the imprinting roll mold may be 10 mm or more and 2,000 mm or less. For example, the flexible base material of the said imprinting mold can be affixed along the outer peripheral surface of the base roller whose radius is 10 mm or more and 2,000 mm or less, and the imprinting roll mold can be manufactured. Further, the radius of the imprinting roll mold is 20 mm or more and 1,800 mm or less, 40 mm or more and 1,500 mm or less, 100 mm or more and 1,300 mm or less, 150 mm or more and 1,000 mm or less, 250 mm or more and 800 mm or less, 400 mm or more and 600 It may be at most 10 mm, at least 100 mm, at least 120 mm, at most 500 mm, at least 750 mm, at most 1,000 mm, at least 1,100 mm, at most 1,500 mm, or at least 1,600 mm. Imprinting mold that satisfies the above mechanical properties can be easily processed into a roll form, it can be easily implemented for the imprinting roll mold having the radius.

One embodiment of the invention the flexible substrate; And an amorphous metal layer provided on the flexible substrate and having a pattern portion formed on one surface thereof. The mold for imprinting includes a roll type imprinting mold.

An exemplary embodiment of the present invention provides a method of manufacturing a functional film including a pattern using the roll mold for imprinting. Specifically, a resin composition may be applied onto a substrate, and a pattern may be formed on the surface of the resin composition by using the roll mold for imprinting. Thereafter, the resin composition in which the pattern is formed may be cured to manufacture a functional film including the pattern. The functional film including the pattern may be used in various fields including the manufacture of an optical product. For example, the functional film including the pattern may be a diffraction light guide plate.

According to an exemplary embodiment of the present invention, a functional film including a pattern may be manufactured by a roll to roll method using the roll mold for imprinting. For example, a resin composition is applied onto a substrate extending in the longitudinal direction, and a pattern is formed on the surface of the resin composition by using the mould for imprinting, the resin composition on which the pattern is formed is cured, and It can be cut to the size of to manufacture an optical film element.

4 is a view schematically showing a process of manufacturing a functional film through a roll to roll method using a roll mold for imprinting according to an exemplary embodiment of the present invention. Referring to FIG. 4, the resin composition (C) may be applied onto the base film (F) extended in the longitudinal direction by using the compressor 300 filled with the resin composition (C). Thereafter, the imprinting mould mold 200 is moved along the longitudinal direction of the base film F, a pattern is formed on the surface of the resin composition C, and the resin composition C having the pattern is formed using UV. It can be cured. Through this, it is possible to manufacture an optical film element provided with a pattern.

According to an exemplary embodiment of the present invention, a functional film including a pattern may be manufactured through a roll to plate method using the roll mold for imprinting. For example, a resin composition is coated on a substrate having a predetermined size, a pattern is formed on the surface of the resin composition using the imprinting mould, and the patterned resin composition is cured to form a diffraction light guide plate. It can manufacture.

FIG. 5 is a view schematically showing a process of manufacturing a functional film through a roll to plate method using a roll mold for imprinting according to an exemplary embodiment of the present invention. Referring to FIG. 5, the resin composition (C) is applied onto the base film (F) in the form of a plate by using the compressor 300 filled with the resin composition (C), and an imprinting roll mold 200 is used. Thus, a pattern can be formed on the surface of the resin composition (C). Thereafter, the resin composition (C) on which the pattern is formed can be cured using UV. Through this, it is possible to manufacture a diffraction light guide plate that is a functional film provided with a pattern.

According to an exemplary embodiment of the present invention, a functional film including a pattern may be manufactured through a roll to plate method using a roll type imprinting mold in which the imprinting mold is wound.

6a to 6f schematically illustrate a process of manufacturing a functional film through a roll to plate method using a roll type imprinting mold according to an exemplary embodiment of the present invention. Figure 6a is unrolled roll-type imprinting mold 400, the one side is connected to the winding roller 510, the resin composition between the amorphous metal layer 20 and the jig 530 of the imprinting mold It shows that the base film F to which (C) was apply | coated was located. FIG. 6B illustrates fixing the positions of the imprinting mold and the jig 530 by using the clamp 520, and FIG. 6C illustrates the pattern of the amorphous metal layer 20 by using the pressure roller 550. It shows transferring to the resin composition (C) apply | coated to F). 6D to 6F illustrate a process of separating the imprinting mold from the base film F to which the resin composition (C) is applied by moving the peeling roller 560. Through the tension of the imprinting mold can be controlled. In addition, after a predetermined number of imprinting processes, the winding roller may be rotated to move the position of the imprinting mold, the resin composition may be applied to a new base film, and the imprinting process may be performed in the same manner as the above method. Through this, a continuous imprinting process can be performed.

Hereinafter, the present invention will be described in detail with reference to Examples. However, the embodiments according to the present invention may be modified in various other forms, and the scope of the present invention is not interpreted to be limited to the embodiments described below. The embodiments of the present specification are provided to more completely explain the present invention to those skilled in the art.

Example  One

A polyimide (PI) film having a thickness of 100 μm was prepared as the flexible substrate. In addition, an alloy deposition target including magnesium, copper, and yttrium was prepared. The magnesium content included in the alloy deposition target was 50 at%, the copper content was 35 at%, and the yttrium content was 15 at%. In addition, a quartz substrate having a nanometer size pattern formed on its surface was prepared as a stamp.

Thereafter, the output of the DC sputtering apparatus was set to 100 W and the alloy deposition target was sputtered to prepare a laminate in which an amorphous metal layer was formed on the flexible substrate. At this time, the thickness of the amorphous metal layer was about 330 nm. Thereafter, the prepared laminate and the stamp were heated to about 195 ° C., and a pressure of about 10 MPa was applied to the stamp for 5 minutes to perform a thermal imprinting process on the amorphous metal layer. Through this, an imprinting mold including an amorphous metal layer having a pattern portion and a flexible substrate was prepared.

Thereafter, the imprinting mold was bent with the amorphous metal layer outside, and one side and the other side of the imprinting mold were connected with an adhesive to prepare an imprinting roll mold.

Example  2 to Example  3

In Example 2, an imprinting roll mold was manufactured in the same manner as in Example 1, except that the output of the DC sputtering apparatus was set to 200 W and the output of the DC sputtering apparatus was set to 300 W. It was.

Reference Example  One

An imprinting mold was manufactured in the same manner as in Example 1, except that the stamp was pressed at a pressure of 6 MPa.

Comparative example  One

In Comparative Example 1, an imprinting mold was manufactured in the same manner as in Example 1, except that the stamp was pressed at a pressure of 4 MPa.

Comparative example  2

A specimen was prepared by forming a metal layer and performing a thermal imprinting process in the same manner as in Example 1, except that only copper was used as the sputtering target.

Comparative example  3

The same flexible substrate as in Example 1 was prepared, a PFPE (Perfluoropolyether) resin composition was applied onto the flexible substrate, and the pattern was transferred to the resin composition using a separate stamp similar to Example 4. Thereafter, the resin composition on which the pattern was formed was cured by using a UV lamp having a wavelength value of 200 nm or more and 450 nm or less to prepare a mold for imprinting.

Amorphous Metal layer Pattern part  observe

The cross section of the pattern portion of the amorphous metal layer of the imprinting molds prepared in Example 1, Comparative Example 1 and Reference Example 1 was observed with a scanning electron microscope (SU8020, HITACHI Co., Ltd.), and SEM pictures were taken. Moreover, the pattern cross section of the stamp was observed with the scanning electron microscope, and SEM photograph was taken.

7 is a scanning electron microscope (SEM) photograph of a cross section of a pattern portion of an amorphous metal layer and a cross section of a stamp of an imprinting mold manufactured in Example 1, Comparative Example 1, and Reference Example 1 of the present invention.

Referring to FIG. 7, in Example 1 in which the stamp was pressed at 10 MPa, it was confirmed that the pattern shape of the stamp was effectively transferred to the amorphous metal layer. On the other hand, in Comparative Example 1 in which the stamp was pressed to 4 MPa, it was confirmed that the pattern shape of the stamp was hardly transferred to the amorphous metal layer. Further, in the case of Reference Example 1 in which the stamp was pressed at 6 MPa, it was confirmed that most of the pattern shape of the stamp was transferred to the amorphous metal layer.

Amorphous Metal layer  Property measurement

An amorphous metal layer included in the imprinting molds prepared in Examples 1 to 3 of the present invention was analyzed by X-ray diffraction spectroscopy (XRD) using an X-ray diffractometer (D4 endeavor, Bruker). Through XRD analysis, the contents of magnesium, copper, and yttrium included in the amorphous metal layer included in the imprinting molds prepared in Examples 1 to 3 of the present invention are shown in Table 1 below.

Mg
(at%) Cu
(at%) Y
(at%) Example 1 72 20 8 Example 2 77 21 2 Example 3 76 22 2

FIG. 8 is a diagram illustrating an XRD (X-ray Diffraction Spectroscopy) analysis result of an amorphous metal layer included in an imprinting mold manufactured in Examples 1 to 3 of the present invention.

9 is a phase diagram illustrating a composition range of an amorphous metal layer included in an imprinting mold manufactured in Examples 1 to 3 of the present invention. Specifically, FIG. 9 is a diagram illustrating three-element phase diagrams of magnesium, copper, and yttrium, and illustrates amorphous and crystalline regions according to contents of magnesium, copper, and yttrium. More specifically, FIG. 9 is a view showing that the regions corresponding to the contents of magnesium, copper, and yttrium of the amorphous metal layer included in the imprinting molds prepared in Examples 1 to 3 of the present invention are included in the amorphous regions. to be.

Referring to Table 1, Figure 8 and Figure 9, it can be seen that the amorphous metal layer included in the imprinting mold prepared in Examples 1 to 3 of the present invention is in a state without crystallinity.

Amorphous Metal layer  Physical property measurement (heat Imprinting  relation)

Differential scanning calorimetry (DSC) analysis was performed on the amorphous metal layer included in the imprinting mold prepared in Example 1 of the present invention using a differential scanning calorimeter (DSC 2910, TA Instruments).

10 is a view showing a DSC analysis result of an amorphous metal layer included in the imprinting mold prepared in Example 1 of the present invention. Referring to FIG. 10, it was confirmed that the crystallization temperature (T _c ) of the amorphous metal layer included in the imprinting mold prepared in Example 1 was about 210 ° C.

In addition, before and after thermal imprinting of the amorphous metal layer included in the imprinting mold prepared in Example 1, X-ray diffraction spectroscopy (XRD) using an X-ray diffractometer (D4 endeavor, Bruker) Analyzed.

FIG. 11 is a diagram illustrating an XRD analysis result before and after thermal imprinting of an amorphous metal layer included in an imprinting mold prepared in Example 1; Referring to FIG. 11, it was confirmed that the amorphous physical property of the amorphous metal layer was maintained even after thermal imprinting by performing thermal imprinting at a temperature of about 195 ° C., which is about 210 ° C. or less, which is the crystallization temperature of the amorphous metal layer in Example 1.

For imprinting Of mold  Mechanical property measurement

An imprinting mold and a PI substrate prepared according to Example 1 of the present invention were prepared. Thereafter, the prepared imprinting mold and the PI substrate were cut into 10 mm and 60 mm lengths to prepare a sample, and both ends of the sample were fixed by using a dynamic mechanical analyzer (Zwick / Roell Z010 UTM), and then The stress per unit area according to the strain was measured by applying a force in a direction perpendicular to the thickness direction of. Then, using the measured tensile rate and stress, the modulus, tensile strength and toughness of the imprinting mold and PI substrate sample prepared according to Example 1 of the present invention are shown in Table 2 below.

Example 1 PI base Modulus (GPa) 3.0 2.3 Tensile Strength (MPa) 220 170 Toughness (MPa) 175 75

Referring to Table 2, it can be seen that the value of modulus, tensile strength and toughness of the imprinting mold with an amorphous metal layer according to Example 1 of the present invention is larger than the PI substrate without the amorphous metal layer. In addition, the imprinting mold comprising an amorphous metal layer satisfying the modulus, tensile strength, and toughness values was found to be easily processed into a roll form.

Therefore, according to the exemplary embodiment of the present invention, it can be seen that an imprinting roll mold having improved durability can be manufactured by using an imprinting mold including an amorphous metal layer having a pattern portion.

For imprinting  role Of mold  observe

The surface of the imprinting roll mold prepared in Example 1 and Comparative Example 2 of the present invention was observed with a scanning electron microscope (SU8020, HITACHI Co., Ltd.), and SEM pictures were taken.

12 is a scanning electron microscope (SEM) photograph of the imprinting roll mold surface prepared in Example 1 and the specimen surface prepared in Comparative Example 2. FIG. Referring to FIG. 12, it was confirmed that cracks did not occur in the amorphous metal layer of the roll mold for imprinting prepared in Example 1. Through this, it can be seen that the precise imprinting process can be performed using the roll mold for imprinting.

On the other hand, it was confirmed that a number of cracks were generated on the surface of the specimen prepared in Comparative Example 2, and even though the thermal imprinting process was performed, the pattern formation was not easy.

For imprinting Of mold Imprinting  Observe pattern formation

The urethane acrylate type photocurable resin composition was apply | coated on PET base material, and the pattern of the amorphous metal layer was transferred to the surface of the resin composition using the imprinting mold manufactured in Example 2 and Comparative Example 3 of this invention. Thereafter, the resin composition on which the pattern was formed was cured using a UV lamp having a wavelength value of 200 nm or more and 450 nm or less.

FIG. 13 is a scanning electron microscope (SEM) photograph of a resin surface on which an imprinting is performed using an imprinting mold prepared in Example 2 of the present invention. FIG. Specifically, FIG. 13 is a photograph taken with a scanning electron microscope (SU8020, HITACHI Co., Ltd.) of the surface of the resin imprinted using the imprinting mold prepared in Example 2. FIG.

Referring to FIG. 13, the pattern of the resin surface manufactured by using the imprinting mold prepared in Example 2 was confirmed that the pattern of the imprinting mold prepared in Example 2 is transferred without being crushed.

FIG. 14 is a scanning electron microscope (SEM) photograph of a resin surface on which an imprinting is performed using an imprinting mold prepared in Comparative Example 3. FIG. Referring to (A) and (B) of FIG. 14, distortion occurs in the pattern of the resin surface manufactured using the imprinting mold manufactured in Comparative Example 3, and the pattern provided in the imprinting mold is deformed. , The transfer efficiency of the pattern was confirmed to be very inferior.

10: flexible base material
20: amorphous metal layer
30: stamp
40: base roller
100: imprinting mold
200: roll mold for imprinting
300: extruder
400: roll type imprinting mold
510: winding roller
520: clamp
530: jig
540: tensioning roller
550: pressure roller
560: peeling roller

Claims (12)

Depositing at least one amorphous metal on the flexible substrate to form an amorphous metal layer;
Thermally imprinting a stamp with a pattern on one surface of the amorphous metal layer to manufacture an imprinting mold including the amorphous metal layer with a pattern portion; And
Manufacturing the imprinting roll mold; comprising bending the imprinting mold with the amorphous metal layer outside, and connecting one side and the other side of the imprinting mold to produce a roll-type imprinting mold. Way.
The method according to claim 1,
The deposition of the amorphous metal is a method of manufacturing an imprinting roll mold is carried out by any one of sputtering, electron beam deposition, thermal deposition, plasma chemical vapor deposition and low pressure chemical vapor deposition.
The method according to claim 1,
The amorphous metal is magnesium, copper, yttrium, iron, cobalt, lanthanum, aluminum, nickel, zirconium, titanium, beryllium, cerium and gallium any one of the manufacturing method of the imprinting roll mold.
The method according to claim 1,
The amorphous metal layer has a thickness of 100 nm or more and 2,000 µm or less.
The method according to claim 1,
The thermal imprinting method of manufacturing a roll mold for imprinting is carried out at a temperature of 50 ℃ to 300 ℃.
The method according to claim 1,
The thermal imprinting method of manufacturing a roll mold for imprinting is performed by pressing the stamp at a pressure of 5 Mpa or more and 50 Mpa or less.
Flexible substrate; And
Including an imprinting mold provided on the flexible substrate, including an amorphous metal layer having a pattern portion formed on one surface,
Roll forming imprinting roll mold in which the one side and the other side of the imprinting mold is connected in a state in which the imprinting mold is bent with the amorphous metal layer outside.
The method according to claim 7,
The amorphous metal layer is imprinting roll mold containing any one of magnesium, copper, yttrium, iron, cobalt, lanthanum, aluminum, nickel, zirconium, titanium, beryllium, cerium and gallium.
The method according to claim 7,
The amorphous metal layer comprises magnesium, copper and yttrium,
The magnesium content is 60 at% or more and 80 at% or less,
The copper content is 15 at% or more and 30 at% or less,
The yttrium content is at least 1 at% 20 at% or less of the imprinting roll mold.
The method according to claim 7,
The imprinting mold of the imprinting mold is 2.5 GPa or more and 3.5 GPa or less.
The method according to claim 7,
The tensile strength of the imprinting mold is an imprinting roll mold of 10 MPa or more and 300 MPa or less.
The method according to claim 7,
The imprinting roll mold for toughness of the imprinting mold is 10 MPa or more and 300 MPa or less.

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