KR20190129485A - Electrostatic precipitation device for particle removal in explosive gases - Google Patents

Abstract

The present invention relates to an electrostatic removing device of explosive exhaust gas particles. According to the present invention, the electrostatic removing device of explosive exhaust gas particles comprises: a charge unit which unipolar-charges particulate matters in explosive exhaust gases; and a dust collecting unit which collects unipolar-charged particulate matters. The charge unit comprises: a first chamber which is grounded and has a flow path of explosive exhaust gases; a second chamber which is placed in an inner space of the first chamber and has a plurality of communication holes; a discharging unit which receives a high voltage applied inside the second chamber to generate unipolar ions; an air supply unit which supplies high-pressure air into the second chamber; an electrostatic induction unit which is placed in an outer circumferential surface of the second chamber, has a high voltage identical to ions generated in the discharging unit applied thereto, and forms an electric field with the first chamber; and an insulation layer which is interposed between the electrostatic induction unit and the second chamber. Accordingly, the present invention does not perform direct discharge to explosive exhaust gases comprising particulate matters, thereby preventing explosion caused by discharges.

Description

Electrostatic elimination device for explosive exhaust particles {ELECTROSTATIC PRECIPITATION DEVICE FOR PARTICLE REMOVAL IN EXPLOSIVE GASES}

The present invention relates to an apparatus for removing static electricity of explosive exhaust gas particles, and more particularly, to completely remove particulate matter while preventing the explosion risk by charging to a single electrode without directly generating an explosive exhaust gas containing particulate matter. The present invention relates to an apparatus for removing static electricity of explosive exhaust gas particles, which can easily remove collected particles.

Gaseous emissions from the manufacture of semiconductor materials, devices, articles of manufacture and memory devices are used in process equipment and involve a wide range of chemical compounds produced therein. These compounds include inorganic and organic compounds, precipitates of photo-resist and other reactants, and various other gases that must be removed from the waste gas before being released to the atmosphere from the process equipment.

In the semiconductor manufacturing process, exhaust gas containing harmful toxic substances is generated, and it is forbidden to release the exhaust gas as it is from the viewpoint of pollution prevention.

In addition, in the semiconductor manufacturing process, explosive gases are generated as exhaust gases, and it is not allowed to discharge exhaust gases containing harmful components or dusts into the atmosphere as they are, and it is required to discharge them as safe and clean gases through various treatments. It is becoming.

Therefore, conventionally, a hazardous substance treatment device for decomposing harmful substances contained in exhaust gas with a catalyst, adsorbing and removing harmful substances or dusts with an adsorbent, or inducing harmless, and inducing exhaust gases from a semiconductor manufacturing apparatus to a hazardous substance removing apparatus. An exhaust gas treatment apparatus having an exhaust passage, which guides the exhaust gas of the semiconductor manufacturing apparatus to the hazardous substance treatment apparatus through the exhaust passage, and makes the hazardous substance chemically harmless or physically The method of removing and releasing to air is adopted.

As a typical method for treating explosive gas in such a conventional exhaust gas, a method such as a scrubber, a hepa filter, or an electrostatic precipitator was used.

However, the scrubber had a problem of wastewater treatment and ultra-fine particle removal performance is significantly low, the HEPA filter had a problem causing a change in the process pressure according to the back pressure change, the electrostatic precipitating method discharges due to the characteristics of the explosive gas There was a problem that an explosion occurs.

In addition, a particulate matter such as SiO ₂ has a problem that cannot be completely removed by a method such as a scrubber, a HEPA filter, or an electrostatic precipitating method.

Patent Document 1. Republic of Korea Patent No. 10-1039281 (2010.04.29)

Accordingly, an object of the present invention is to solve such a conventional problem, and does not directly discharge to the explosive exhaust gas containing particulate matter, the electrostatic removal device of the explosive exhaust gas particles that can prevent explosion by discharge In providing.

In addition, the present invention provides an apparatus for removing static electricity of explosive exhaust gas particles that can easily collect and remove explosive exhaust gas particles by charging explosive exhaust gas particles to a single electrode.

In addition, the first chamber and the second chamber is configured to have a cylindrical shape having a different diameter, respectively, to provide an apparatus for removing static electricity of the explosive exhaust gas particles that can improve the charge rate of the explosive exhaust gas.

In addition, the unipolar ions generated and discharged inside the second chamber by the electric field acting between the first chamber and the second chamber can be moved toward the inner circumferential surface of the first chamber by the electric field. An electrostatic removal device is provided.

The above object is, according to the present invention, a charging unit for monopolar charging particulate matter in explosive exhaust gas; And a dust collector configured to collect monopolar charged particulate matter, wherein the charged portion is disposed in a first chamber that is grounded and forms a flow path of explosive exhaust gas, and is disposed in an inner space of the first chamber, and a plurality of communication holes are provided. A second chamber formed therein, a discharge unit for generating a single pole of ions by applying a high voltage inside the second chamber, an air supply unit for supplying high pressure air into the second chamber, and an outer circumferential surface of the second chamber. An explosive structure including an electrostatic induction part disposed and an insulating layer interposed between the electrostatic induction part and the second chamber, to which a high voltage having the same polarity as the ions generated by the discharge part is applied to form an electric field between the first chamber and the first chamber; Achieved by an electrostatic removal device of the exhaust gas particles.

Here, the supply pressure of the high pressure air supplied through the air supply unit is preferably set relatively higher than the supply pressure of the explosive exhaust gas supplied into the first chamber.

In addition, the first chamber and the second chamber is made of a cylindrical chamber having a different diameter, the central axis of the first chamber and the second chamber is preferably arranged on the same axis.

In addition, the discharge unit preferably includes a conductive part disposed along the central axis of the second chamber, and a plurality of discharge electrodes disposed radially around the conductive part.

In addition, the communication hole is preferably disposed at a position corresponding to the front end of the discharge electrode.

In addition, a plurality of radially disposed discharge electrodes may be provided and spaced apart along the flow direction of the explosive exhaust gas.

In addition, the communication hole of the second chamber is preferably made of a slit form extending in the first direction.

In addition, the distance in the first direction of the discharge electrode is preferably formed longer than the distance between the discharge electrode and the inner peripheral surface of the first chamber.

In addition, it is preferable that an insulating material is provided in the spaces between the plurality of discharge electrodes.

In addition, the discharge electrode is preferably assembled detachably to the conducting unit.

In addition, the insulating layer is preferably electrically separated from the electrostatic induction part and the second chamber so that the high voltage applied to the discharge part and the high voltage applied to the electrostatic induction part do not affect each other.

In addition, the dust collecting unit may include a dust collecting chamber into which the unipolar charged explosive exhaust gas discharged from the first chamber of the charging unit flows, a high voltage applying plate installed inside the dust collecting chamber, and the dust collecting chamber. It is preferable to include a collecting plate which is disposed and spaced apart from the high voltage applying plate for dust collection in the interior of the, and the water film forming portion for forming a water film on the plate surface of the collecting plate.

According to the present invention, since there is no direct discharge to the explosive exhaust gas containing particulate matter, there is provided an apparatus for removing static electricity of explosive exhaust gas particles that can prevent explosion by discharge.

Further, there is provided an apparatus for removing static electricity of explosive exhaust gas particles, which can easily collect and remove explosive exhaust gas particles by charging explosive exhaust gas particles to a single electrode.

In addition, by configuring the first chamber and the second chamber in a cylindrical shape having a different diameter, there is provided an apparatus for removing static electricity of explosive exhaust gas particles that can improve the charge rate of explosive exhaust gas.

In addition, the unipolar ions generated and discharged inside the second chamber by the electric field acting between the first chamber and the second chamber can be moved toward the inner circumferential surface of the first chamber by the electric field. An electrostatic removal device is provided.

1 is a schematic perspective view of an apparatus for removing static electricity of explosive exhaust gas particles of the present invention;
Figure 2 is a front sectional view showing the charged portion of Figure 1,
Figure 3 is a side cross-sectional view showing the charge portion of FIG.
4 is a side cross-sectional view showing the dust collecting part of FIG. 1,
5 to 7 is an operating state diagram of the electrostatic removal device of the explosive exhaust gas particles of the present invention,
8 to 11 are views showing a modification of the electrostatic removal device of the explosive exhaust gas particles of the present invention.

Prior to the description, in the various embodiments, components having the same configuration will be representatively described in the first embodiment using the same reference numerals, and in other embodiments, different configurations from the first embodiment will be described. do.

Hereinafter, an electrostatic elimination device for explosive exhaust gas particles according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

In the accompanying drawings, Figure 1 is a schematic perspective view of the electrostatic removal device of the explosive exhaust gas particles of the present invention, Figure 2 is a front sectional view showing a charge portion of Figure 1, Figure 3 is a side cross-sectional view showing a charge portion of Figure 1, It is a side sectional view which shows the dust collector of FIG.

1 to 4, the apparatus for removing static electricity of explosive exhaust gas particles according to the present invention includes a charged portion 100 and a dust collector 200.

As shown in FIGS. 1 to 3, the charging unit 100 includes a first chamber 110, a second chamber 120, a discharge unit 130, an air supply unit 140, an electrostatic induction unit 150, The insulating layer 160 and the insulating material 170 is included.

1 illustrates a state in which a part of the first chamber 110, the second chamber 120, the electrostatic induction part 150, and the insulating layer 160 constituting the charged part 100 is cut out. The insulating material 170 disposed between the second chamber 120 and the discharge part 130 is omitted so that the relationship between the chamber 120 and the discharge part 130 can be more clearly shown.

The first chamber 110 is provided in a cylindrical shape extending in the first direction, the inlet 111 and outlet 112 are formed at both ends. The explosive exhaust gas containing particulate matter such as SiO ₂ introduced through the inlet 111 may move in the first axis direction along the inner space of the first chamber 110 and be discharged through the outlet 112. .

The second chamber 120 is formed of a cylindrical chamber having a smaller diameter than the first chamber 110, and the central axis of the second chamber 120 is the same as the central axis of the first chamber 110. Disposed on the axis. The outer circumferential surface of the second chamber 120 is formed with a plurality of communication holes 121 connecting the inner space of the second chamber 120 and the inner space of the first chamber 110, the second chamber 120 The outer circumferential surface is spaced parallel to the inner circumferential surface of the first chamber 110.

Meanwhile, in the present embodiment, the first chamber 110 and the second chamber 120 have been described, for example, as having a circular cross section. However, the first chamber 110 and the second chamber 120 may have an ellipse or the same polygonal cross section, depending on the design environment.

In addition, the cylindrical portion of the first chamber 110 and the second chamber 120 is made of a conductor, and the end portion of the cylinder is preferably made of an insulator.

The discharge unit 130 is disposed inside the second chamber 120, and a high voltage is applied to generate a corona discharge at a position adjacent to the communication hole 121 of the grounded second chamber 120. The discharge unit 130 may include a current collector 131 disposed along a central axis of the second chamber 120, a discharge electrode having a sharp tip portion, and disposed radially around the current collector 131. 132).

In the present embodiment, for example, eight discharge electrodes 132 are disposed radially around the conducting unit 131, but the present invention is not limited thereto. The discharge electrodes 132 may have more or less than eight discharge electrodes 132. It is also possible to arrange in this rotationally symmetrical form.

In addition, it is preferable that an insulating material 150 is disposed between the radially disposed discharge electrodes 132 to prevent electrical interference between adjacent discharge electrodes. Meanwhile, in the present embodiment, for example, the plurality of insulating materials 150 are respectively disposed between the discharge electrodes 132, but the plurality of insulating electrodes 150 may be accommodated in the cylindrical insulating material 150. It will also be possible to form and assemble a groove.

The discharge electrodes 132 may be spaced apart from each other along the longitudinal direction of the current collector 131 to improve the electrostatic dust collection efficiency. In this case, in order to charge the entire explosive exhaust gas with minimal ion generation, the first direction intervals between the discharge electrodes 132 spaced along the longitudinal direction of the energization part 131 may be moved into the first chamber 110. It is preferable that the ions provided are set in a range where they do not overlap.

The first direction spacing D1 of the discharge electrode 132 is formed to be longer than the distance D2 between the discharge electrode 132 and the inner circumferential surface of the first chamber 110, so that the discharge electrodes are disposed adjacent to each other in the first direction. It is desirable to prevent electrical interference between 132. In addition, the insulating material 150 may be disposed in the space between the discharge electrodes 132 spaced apart in the first direction.

Meanwhile, in the drawings of the present embodiment, the conductive part 131 and the discharge electrode 132 are illustrated as being integrally formed, but the conductive part 131 and the discharge electrode 132 are separated from each other, and the discharge electrode 132 is formed. ) May be configured to be detachable to the energizing unit 131.

That is, in the state where the insulating material 150 is assembled in the inner space of the second chamber 120, since the discharging unit 130 is not easily assembled, the conducting unit 131 of the discharging unit 130 is moved in the first direction. And the discharge electrode 132 may be inserted through the communication hole 121 of the second chamber 120 so that the discharge electrode 132 may be assembled to the conducting unit 131.

In detail, as shown in FIG. 8, when the discharge electrode 132 is inserted into the communication hole 121 of the second chamber 120, the second coupling part 132a of the discharge electrode 132 is provided with an energization part ( It may be assembled to the first coupling portion (131a) of the 131. Here, the first coupling portion 131a may be formed in the shape of a groove, and the second coupling portion 132a may be formed of an elastic member elastically in close contact with the inside of the first coupling portion 131a.

On the other hand, in addition to such a coupling structure, the assembly structure of the first coupling portion 131a and the second coupling portion 132a may be made of various types of structures that can be electrically connected while preventing any separation. .

On the other hand, the communication hole 121 of the second chamber 120, the ions generated during the corona discharge from the discharge electrode 132 is discharged to the internal space of the first chamber 110 through the communication hole 121. In order to be able to do so, the discharge electrodes 132 may be disposed at positions corresponding to the front end portions, respectively.

In addition, in the present embodiment, the discharge unit 130 has been described so as to generate corona discharge, but the discharge unit 130 may generate carbon discharge using metal fibers or the like at the ends.

The air supply unit 140 supplies high pressure air into the second chamber 120, and the high pressure air supplied into the second chamber 120 is connected to the first chamber through the communication hole 121. It is discharged to the interior space of 110).

In this case, the supply pressure of the high pressure air supplied to the inside of the second chamber 120 through the air supply unit 140 is relatively higher than the supply pressure of the explosive exhaust gas supplied into the first chamber 110. Since it is set high, the explosive exhaust gas introduced into the internal space of the first chamber 110 may be prevented from entering the internal space of the second chamber 120 in which corona discharge occurs. The air supply unit 140 may be configured as a blower connected to the second chamber 120 through an insulated pipe, and the high pressure air introduced through the air supply unit 140 is argon (Ar), neon (Ne). , Helium (He), nitrogen (N2), carbon dioxide (CO2) and the like can be composed of an inert gas.

The electrostatic induction unit 150 is disposed on the outer circumferential surface of the second chamber 120 and is applied with a high voltage having the same polarity as the ions generated by the discharge unit 130 and according to a potential difference with the grounded first chamber 110. An electric field is formed in a second direction crossing the first direction.

Therefore, the ions discharged through the communication hole 121 of the second chamber 120 is moved toward the inner wall surface of the first chamber 110 by the electric field acting in the second direction, the first direction It is possible to improve the charge rate of the explosive exhaust gas moving to.

In addition, in order to maximize the charge rate, the distance between the discharge electrodes 132 and the distance between the electrostatic induction unit 150 and the first chamber 110 may be appropriately disposed.

The insulating layer 160 is interposed between the electrostatic induction unit 150 and the second chamber 120 to electrically separate the discharge unit 130 and the electrostatic induction unit 150. Therefore, since the high voltage applied to the discharge unit 120 and the high voltage applied to the electrostatic induction unit 150 do not affect each other, the control of the discharge unit 130 for generating the monopolar ions and the monopolar ions are performed in the first chamber ( Control of the electrostatic induction unit 150 to move toward 110 may be made independently of each other.

According to the charging unit 100 of the present embodiment, the internal space of the second chamber 120 where monopolar ions are generated by corona discharge and the first chamber 110 in which particulate matter in explosive exhaust gas is charged by monopolar ions. The inner spaces of the second chamber 120 are separated from each other, and high pressure air is supplied to the inner space of the second chamber 120 to prevent the explosive exhaust gas of the first chamber 110 from being introduced into the inner space of the second chamber 120. Therefore, it is possible to safely charge the particles in the explosive exhaust gas by using the monopolar ions generated by the corona discharge.

On the other hand, both ends of the second chamber 120 may be provided with a cradle 122 for supporting both ends of the energizing portion 131 in an insulating state. The cradle 122 may be formed in the form of a groove into which the end of the energization portion 131 is inserted. In addition, the holder 122 is in the form of a polygonal groove so that the ends of the current conduction portion 131 may be inserted into the holder 122 and the positions of the discharge electrode 132 and the communication hole 121 may be aligned with each other. Is made of, the end of the energizing portion 131 may be made of a polygonal projection corresponding to the shape of the cradle (122). For example, when eight discharge electrodes 132 are disposed radially around the conducting portion 131, as shown in FIG. 9, the holder 122 is formed of an octagonal groove, and the conducting portion 131 is formed. The end of may be in the form of an octagonal protrusion.

In addition, the length of the first direction of the current-carrying portion 131 is set to a length that can be stably supported by the mounting portion 122 located at both ends of the second chamber 120, the discharge electrode 132 The first direction position of the communication hole 121 is preferably set to be aligned with each other in a state in which both ends of the energizing portion 131 is inserted into the mounting portion 122 of the second chamber 120.

In addition, in the present exemplary embodiment, the communication hole 121 of the second chamber 120 is formed in the form of a hole having a predetermined diameter and disposed at positions corresponding to the discharge electrodes 132, for example. However, as shown in FIG. 10, it is also possible to have a slit extending in the first direction. That is, when the communication hole 121 of the second chamber 120 is formed in a slit shape, the discharge electrode 132 and the communication hole 1210 do not have to be aligned with each other in the first direction position. Since monopolar ions generated therein are discharged to the outside of the second chamber 120 through the slit-shaped communication hole 121, the charge rate of particles in the explosive exhaust gas passing through the interior of the first chamber 110 is improved. You can.

On the other hand, the discharge electrode 132, a plurality of projections (132a) are formed at the front end portion as shown in Figure 11, the communication hole 121 of the second chamber 120, the sleeve surrounding the discharge electrode 132 ( 121a) may be formed. In this case, since the corona discharge area generated between the discharge electrode 132 and the second chamber 120 increases, the amount of generated ions can be greatly increased. Meanwhile, since the distance L1 between the protrusion 132a and the inner wall of the sleeve 121a is set smaller than the distance L2 between the protrusion 132a and the electrostatic induction part 150, the high voltage applied to the discharge electrode 132. The high voltage applied to the electrostatic induction unit 150 may be prevented from interfering with each other.

The dust collecting unit 200 collects the monopolar charged particulate matter in the explosive exhaust gas discharged from the first chamber 110, and includes a dust collecting chamber 210, a high voltage applying plate, a collecting plate 230, and a water film forming unit. And 240.

The dust collecting chamber 210 may be provided in a substantially rectangular parallelepiped or a cube shape, and one side of the dust collecting chamber 210 may be connected to an outlet 112 of the first chamber 110 and discharged from the first chamber 110. A discharge passage of the exhaust gas is formed.

The high voltage applying plate is installed in the longitudinal direction on one side inside the dust collecting chamber 210, a high voltage is applied.

The collecting plate 230 is installed on the other side of the dust collecting chamber 210 in parallel with the dust collecting high voltage applying plate 220, and is grounded.

Here, the collecting plate 230 may be provided by hydrophilic surface treatment using a surface treatment method for forming a hydrophilic surface such as ball blasting. Specifically, when the ball-shaped metal particles or the like is strongly sprayed on the collecting plate 230 by compressed air or other method, a number of finely recessed portions are formed on the surface of the collecting plate 230. By this treatment, the plate surface of the collecting plate 230 can be made hydrophilic.

The water film forming unit 240 forms a water film on a plate surface of the collecting plate 230 facing the dust collecting high voltage applying plate 220, and includes an injection member and a cleaning liquid supply unit.

The injection member is disposed along the transverse direction adjacent to the top or top of the collecting plate 230. Here, the injection member is provided with a pipe formed with a plurality of injection nozzles along the longitudinal direction. In addition, the cleaning solution supply unit is connected to the injection member is installed to supply the cleaning solution.

When the cleaning liquid is sprayed onto the surface of the collecting plate 230 through the water film forming unit 240, the cleaning liquid falls downward along the surface of the collecting plate 230, and particles and dirt collected on the surface of the collecting plate 230. You can wash them. That is, by forming the water film through the water film forming unit 240, it is possible to extend the cleaning cycle or replacement cycle of the collecting plate 230.

Meanwhile, in the present embodiment, for example, the first chamber 110 and the second chamber 120 have been described as having a cylindrical shape, but the first chamber 110 and the second, such as an ellipse or a polygon, in addition to a circular shape, are described. It is also possible to configure the chamber 120 to have cross-sectional shapes of shapes corresponding to each other.

The operation of the apparatus for removing static electricity of explosive exhaust gas particles according to the first embodiment of the present invention described above will now be described.

5 to 7 are operational state diagrams of the apparatus for removing static electricity of the explosive exhaust gas particles of the present invention.

Referring to FIG. 5, an explosive exhaust gas is first introduced through an inlet 111 of the first chamber 110. At this time, when a high voltage of the positive pole is applied to the electrostatic induction unit 150, the first chamber 110, which is electrically grounded, becomes a relatively negative pole, and thus the electrostatic induction unit 150 and the first chamber 110 are connected. An electric field is formed between them.

In addition, a positive electrode having the same polarity as that of the high voltage of the single pole applied to the high voltage application plate for discharge is applied to the discharge part 130 to generate cations in the second chamber 120, and the generated cations are air. The high pressure air supplied into the second chamber 120 through the supply unit 140 moves along the fluid flow formed toward the first chamber 110 to move into the first chamber 110.

Since the force pushed to the inner wall surface side of the first chamber 110 by the repulsive force with the electrostatic induction unit 150 which is a (+) pole to the cation injected into the first chamber 110, the second chamber 120 It is moved in a direction away from, and then attracted toward the inner wall surface of the first chamber 110 by the attraction force with the first chamber 110 which is a (-) pole.

At this time, some of the cations charge the single electrode to the (+) pole of the explosive exhaust gas particles, and the other part is collected in the first chamber 110. Through this, particles of the explosive exhaust gas that are monopolar charged to the positive electrode are discharged toward the dust collecting chamber 210 through the outlet 112 of the first chamber 110.

Here, the particles of the explosive exhaust gas monopolarly charged to the (+) pole may be a particulate matter such as SiO ₂ or the like.

In particular, since the first chamber 110 and the second chamber 120 are disposed on the same axis and are formed in a cylindrical shape having different diameters, the outer circumferential surface of the second chamber 120 and the inner circumferential surface of the first chamber 110 are provided. Have the same spacing. That is, the second chamber 120 located in the center of the circle generates ions and discharges through the communication hole 121 of the outer circumferential surface, the particles of the explosive exhaust gas passing through the first chamber 110 located outside the center of the circle The charge rate of the explosive exhaust gas passing through the inside of the first chamber 110 can be improved by allowing the to be charged by the ions discharged from the second chamber 120.

In addition, since the high pressure air is provided by the air supply unit 140 inside the second chamber 120, the high pressure air forms the airflow discharged through the communication hole 121, and thus, the first chamber 110 of the first chamber 110. The explosive exhaust gas passing through the inner space may be prevented from flowing into the inner space of the second chamber 120 in which the discharge unit 130 is located.

7 and 8, when a high voltage is applied to the high voltage applying plate 220 for dust collection in the dust collecting chamber 210, an electric field is formed between the high voltage applying plate 220 for collecting dust and the collecting plate 230. The water film is formed on the surface of the collecting plate 230 by the water film forming unit 240.

 At this time, the positive polarity of the high voltage applied to the high voltage applying plate 220 for dust collection is applied, and thus, the collecting plate 230 becomes a (−) pole.

In addition, a water film is formed on the surface of the collecting plate 230 by the water film forming unit 240. In this case, the water film may be generated by rapidly falling downward along the surface of the collecting plate 230 after the cleaning liquid sprayed by the injection member is sprayed on the surface of the collecting plate 230. The drop speed at the surface of the collecting plate 230 is further improved by the hydrophilic surface treatment of the collecting plate 230.

In this state, the explosive exhaust gas monopolarly charged to the positive electrode introduced into the chamber 210 for collecting dust, in particular the monopolar charged particulate material to the positive electrode, moves toward the collecting plate 230 along the electric field and is collected. It is collected on the surface of the plate 230.

At this time, the explosive exhaust gas particles that are monopolar charged to the (+) pole collected by the collecting plate 230 fall down along the water film to be washed off or collected on the water film forming unit 240 before being collected by the collecting plate 230. It can be washed down by falling downward together with the water film formed by it.

As described above, when the electrostatic elimination device for the explosive exhaust gas particles according to the present invention is used, the explosion risk due to the discharge may be prevented by not directly discharging the explosive exhaust gas containing the particulate matter.

In addition, particulate matter such as SiO ₂ contained in the explosive exhaust gas can be completely collected and removed through unipolar charging.

The scope of the present invention is not limited to the above-described embodiment, but may be embodied in various forms of embodiments within the scope of the appended claims. Without departing from the gist of the invention claimed in the claims, it is intended that any person skilled in the art to which the present invention pertains falls within the scope of the claims described in the present invention to various extents which can be modified.

100: charged part, 110: first chamber, 111: inlet,
112: outlet, 120: second chamber, 121: communication hole,
130: discharge portion, 131: current transfer portion, 132: discharge electrode,
140: air supply unit, 150: electrostatic induction unit, 160: insulating layer,
170: insulating material, 200: dust collecting part, 210: dust collecting chamber,
220: high voltage permitting plate for dust collection, 230: collecting plate,
240: water film forming portion

Claims (12)

A charging unit for monopolar charging particulate matter in explosive exhaust gas; And a dust collecting unit collecting the monopolar charged particulate matter.
The charge portion,
A first chamber that is grounded and forms a flow path for explosive exhaust gas,
A second chamber disposed in an inner space of the first chamber and having a plurality of communication holes;
A discharge unit configured to generate a single pole of ions by applying a high voltage inside the second chamber;
An air supply unit supplying high pressure air into the second chamber;
An electrostatic induction part disposed on an outer circumferential surface of the second chamber and applied with a high voltage having the same polarity as the ions generated by the discharge part to form an electric field between the first chamber and the first chamber;
Electrostatic removal device of the explosive exhaust gas particles comprising an insulating layer interposed between the electrostatic induction portion and the second chamber. The method of claim 1,
Supply pressure of the high-pressure air supplied through the air supply, the electrostatic removal device of the explosive exhaust particles, characterized in that the relatively high setting compared to the supply pressure of the explosive exhaust gas supplied into the first chamber. The method of claim 1,
The first chamber and the second chamber is formed of a cylindrical chamber having a different diameter, the central axis of the first chamber and the second chamber is disposed on the same axis, the electrostatic removal apparatus of the explosive exhaust gas particles. The method of claim 3,
And the discharge part includes an energization part disposed along a central axis of the second chamber, and a plurality of discharge electrodes disposed radially around the energization part. The method of claim 4, wherein
The communication hole is the electrostatic removal device of the explosive exhaust gas particles, characterized in that disposed at positions corresponding to the front end of the discharge electrode, respectively. The method of claim 4, wherein
The radially arranged plurality of discharge electrodes are provided, the electrostatic removal device of the explosive exhaust gas particles, characterized in that spaced apart along the flow direction of the explosive exhaust gas. The method of claim 6,
The communication hole of the second chamber is electrostatic removal device of the explosive exhaust gas particles, characterized in that formed in the form of a slit extending in the first direction. The method of claim 6,
The first direction separation interval of the discharge electrode, the electrostatic removal device of the explosive exhaust gas particles, characterized in that formed longer than the interval between the discharge electrode and the inner peripheral surface of the first chamber. The method of claim 4, wherein
An apparatus for removing static electricity of explosive exhaust gas particles, characterized in that an insulating material is provided in the spaces between the plurality of discharge electrodes. The method of claim 4, wherein
The discharge electrode is an electrostatic removal device of the explosive exhaust gas particles, characterized in that detachably assembled to the energized portion. The method of claim 1,
The insulating layer electrically separates the electrostatic induction part from the second chamber so that the high voltage applied to the discharge part and the high voltage applied to the electrostatic induction part do not affect each other. Removal device. The method of claim 1,
The dust collecting unit,
A dust collecting chamber into which the unipolar charged explosive exhaust gas discharged from the first chamber of the charged portion flows;
A high voltage applying plate for collecting dust installed in the chamber for collecting dust,
A collecting plate disposed in the dust collecting chamber and spaced apart from the high voltage applying plate for dust collection;
And a water film forming part for forming a water film on the plate surface of the collecting plate.

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