KR20190064193A - Surface treating apparatus of metal formed product and surface treating method thereof - Google Patents

Abstract

The present invention relates to an apparatus for treating the surface of a metal product and, more specifically, to an apparatus for treating the surface of a metal product, capable of improving the surface profile of the outer and inner surfaces of a product having a complex shape such as a mesh or hollow shape by including a rotary part to rotate the product and using inductive coupling plasma to the product being rotated. The apparatus for treating the surface of a metal product includes: a chamber part having a hollow space formed therein and having an open upper part; a product placed in the chamber part and formed in a three-dimensional shape; a support part connected from one side of the chamber part to one side of the product, and connected from the other side of the product to the other side of the chamber part to enable the product to be fixedly supported from the chamber part to be rotatable; a coil part installed in the upper part of the chamber part to receive high-frequency power supplied from a high-frequency power part; a gas injection part installed on one side of the chamber part to inject mixture gas into the chamber part to improve the surface profile of the product by generating inductive coupling plasma through the coil part; a window part installed in a plate shape between the coil part and the product to be used as a dielectric; and a cover part closing the open upper part of the chamber part and combined with the upper part of the chamber part to enable the upper part to be opened if necessary.

Description

TECHNICAL FIELD [0001] The present invention relates to a surface treating apparatus for a metal molded article,

The present invention relates to a surface treatment apparatus for a metal molded article, and more particularly, to a surface treatment apparatus for a metal mold product which can uniformly improve the surface roughness of the outer surface and the inner surface of a metal formed article formed into a complicated shape.

Generally, in the case of a product manufactured by metal lamination molding using 3D printing, surface roughness of the product is high because metal powder is attached on the surface. Therefore, in order to improve the surface roughness of such products, wet surface treatment using hydrofluoric acid or the like is often used for surface treatment of products. However, such a wet surface treatment method has problems such as environmental pollution and contamination treatment of products after surface treatment, and instead, electrolytic polishing is used as an environmentally friendly technology. This electrolytic polishing improves the surface roughness of the metal product by dissolving the surface of the metal product by passing electricity through the metal product to be treated as an anode while immersing it in the solution as opposed to the electroplating method.

However, such electrolytic polishing has a difficulty in obtaining a desired surface roughness since a chemical reaction occurs between the anode and the cathode, so that the reaction of the inner surface does not occur properly.

Therefore, there is a need for a surface treatment apparatus and a surface treatment method capable of uniformly improving surface roughness of an outer surface and an inner surface, preventing environmental pollution, and improving the surface roughness of a metal product by a dry method.

Japanese Patent Application Laid-Open No. 10-2004-0071381 (2004.08.12)

An object of the present invention is to provide an apparatus for surface treatment of metal moldings, which can improve the surface roughness of outer and inner surfaces of complicated shapes such as a mesh or a hollow shape by using inductively coupled plasma.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. There will be.

According to an aspect of the present invention, there is provided a surface treating apparatus for a metal mold product, the apparatus comprising: a chamber portion having a hollow space formed therein and having an open top; a workpiece formed in the chamber portion, A support portion connected to one side of the workpiece from one side of the chamber portion and connected to the other side of the chamber portion at the other side of the workpiece to rotatably support the workpiece from the chamber portion, A coil part for receiving the high frequency power supplied from the high frequency power part, an inductively coupled plasma generated by the coil part for injecting the mixed gas into the chamber part so as to improve the surface roughness of the work part, A gas injection part provided on one side, a gas injection part provided between the coil part and the workpiece, And a cover portion coupled to an upper end of the chamber portion so that the upper end of the opened chamber portion can be closed and opened as needed.

In an embodiment of the present invention, the gas injection unit may be injected with a mixed gas in which oxygen gas and argon gas are mixed with chlorine-based gas or fluorine-based gas.

In the embodiment of the present invention, the fluorine series may be selected from among CF ₄ , C ₄ F ₈ and C ₄ F ₆ , and the chlorine series may be selected from one of Cl ₂ and BCl ₃ .

In an embodiment of the present invention, a discharge unit may be provided at a lower end of the chamber unit, and a turbo pump may be provided to guide the inductively coupled plasma formed at the upper end of the chamber unit to the discharge unit.

In the embodiment of the present invention, the discharge portion may be provided to discharge by-products generated after reacting with the surface of the workpiece to improve the surface roughness of the workpiece.

In one embodiment of the present invention, the supporting part may include a workpiece rotating part that rotates the supporting part 360 degrees so as to uniformly improve the surface roughness of the workpiece fixedly supported by the supporting part.

In the embodiment of the present invention, the support gear may be provided at one side of the support portion, and the support gear may be coupled with the motor gear of the motor shaft provided at one side of the workpiece rotation portion to drive the support gear .

In the embodiment of the present invention, the workpiece is formed in a mesh or hollow shape, and the inductively coupled plasma is uniformly reacted to the outer surface and the inner surface of the workpiece to improve the overall surface roughness of the workpiece.

In an embodiment of the present invention, the discharge unit may be configured to discharge by-products generated after reacting with the surface of the workpiece to improve the surface roughness of the workpiece, and the turbo pump may be provided to assist in discharging the by- have.

According to an aspect of the present invention, there is provided a method for surface treatment of a metal object, comprising the steps of: installing a workpiece inside a chamber through a support; rotating the workpiece through a workpiece rotation unit to rotate the support; Generating an inductively coupled plasma from a mixed gas by an electric field, improving the surface roughness of the work through the generated inductively coupled plasma, And stopping the generation of the inductively coupled plasma.

In an embodiment of the present invention, at the stage where the inductively coupled plasma is generated,

And discharging the reacted inductively coupled plasma and the byproduct of the reacted workpiece through the discharge portion.

According to an embodiment of the present invention, a support gear may be provided at one side of the support portion, and the support gear may be coupled to a motor gear of a motor shaft provided at one side of the workpiece rotation portion to drive the support gear.

In the embodiment of the present invention, in the step of improving the surface roughness of the work,

And reacting the workpiece with the inductively coupled plasma until the surface roughness of the workpiece is 0.1 탆 or less.

In an embodiment of the present invention, the mixed gas may be a gas in which a chlorine-based gas or a fluorine-based gas is mixed with oxygen gas and argon gas.

In the embodiment of the present invention, the fluorine series may be selected from among CF ₄ , C ₄ F ₈ and C ₄ F ₆ , and the chlorine series may be selected from one of Cl ₂ and BCl ₃ .

In an embodiment of the present invention, it may be a workpiece in which surface treatment is performed to improve the surface roughness through the surface treatment apparatus of the metal moldings and the surface treatment method of the metal moldings.

According to the embodiment of the present invention, the surface treatment apparatus for a metal molded article is provided with a rotation unit for rotating a workpiece, and by using the inductively coupled plasma for the workpiece to be rotated, the surface of the workpiece having a complex shape such as a mesh or a hollow shape The surface roughness of the inner surface can be improved.

It should be understood that the effects of the present invention are not limited to the above effects and include all effects that can be deduced from the detailed description of the present invention or the configuration of the invention described in the claims.

1 is a cross-sectional view of a surface treatment apparatus for a metal molded article according to an embodiment of the present invention.
2 is a front view showing a latch gear and a stopper coupled to a support according to an embodiment of the present invention.
Fig. 3 is a flowchart of a surface treatment method of a metal molded article according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

Throughout the specification, when a part is referred to as being "connected" (connected, connected, coupled) with another part, it is not only the case where it is "directly connected" "Is included. Also, when an element is referred to as "comprising ", it means that it can include other elements, not excluding other elements unless specifically stated otherwise.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view of a surface treatment apparatus for a metal object according to an embodiment of the present invention, and FIG. 2 is a front view showing a latch gear and a stopper coupled to a support according to an embodiment of the present invention.

Referring to FIGS. 1 and 2, the surface treatment apparatus 100 of the metal moldings according to the present embodiment includes a chamber portion 110.

In more detail, the chamber part 110 is formed to have an empty space therein and an upper open wall. Inside the chamber part 110, a workpiece 120 having a three-dimensional shape is formed . The chamber 110 may have various shapes, but it is preferably formed of a rectangular wall. The workpiece 120 is a 3D printing product manufactured through metal lamination molding by a powder bed melting method. The workpiece 120 may be formed in various shapes, and may be formed into a complex shape such as a mesh or a hollow shape.

In addition, the chamber part 110 is provided with a support part 130 for fixing and supporting the workpiece 120.

More specifically, one side of the workpiece 120 is connected to one side of the chamber part 110, and a supporting part (not shown) connected to the other side of the chamber part 110 from the other side of the workpiece 120 130, and the workpiece 120 is coupled to the support portion 130 and fixed to be rotatable. That is, the chamber part 110 is formed in a rectangular shape, and a workpiece 120 is disposed therein. A bar-shaped support part 130 penetrating from one side to the other side of the chamber part 110 is coupled, The supporting part 130 is provided at the center thereof to fix the workpiece 120 disposed inside the chamber part 110. Therefore, the workpiece 120 can be stably placed in the chamber part 110 due to the support part 130.

A coil section 140 is provided at the upper end of the chamber section 110 to receive high frequency power from a radio frequency (RF) power section P.

More specifically, the coil part 140 receives high-frequency power through the high-frequency power part P and allows the gas injected into the chamber part 110 to be converted into plasma.

A window portion 160 is provided between the coil portion 140 and the workpiece 120 in a plate shape.

More specifically, the window part 160 is provided in a plate-like shape between the coil part 140 and the workpiece 120, and transmits a high frequency electric field according to the dielectric constant as a dielectric. That is, plasma can be generated in the chamber 110 in an optimum state by using the state where the high-frequency power P is transferred to the gas injected into the chamber 110.

The surface treatment apparatus according to the present invention includes a gas injection unit 150 for injecting a mixed gas into the chamber 110 to generate plasma by the coil unit 140.

The gas injection unit 150 is coupled to the lower end of the window unit 160 and a gas mixture is injected into the chamber unit 110 through the gas injection unit 150. At this time, a mixed gas selected from fluorine-based + O ₂ + Ar, chlorine-based + O ₂ + Ar, fluorine-based + chlorine-based + O ₂ + Ar is injected into the mixed gas. At this time, the fluorine-based gas is CF ₄ , C ₄ F ₈ , and C ₄ F ₆ , The chlorine-based gas is selected from the group consisting of Cl ₂ and BCl ₃ . Therefore, the workpiece 120 or the mixed gas can be selected according to the situation by changing the mixed gas according to the material of the workpiece 120.

In addition, a discharge part 170 is provided at the lower end of the chamber part 110 to discharge various kinds of by-products.

More specifically, byproducts generated after reacting with the plasma to improve surface roughness of the workpiece 120 are generated at the lower end of the chamber part 110, and the discharge part 170 . At this time, the discharge part 170 may be provided with a turbo pump to facilitate the discharge, so that the discharge can be easily performed.

In addition, the inductively coupled plasma generated from the mixed gas may be discharged to the discharge unit 170. The inductively coupled plasma reacts with the workpiece 120 and is discharged to the discharge portion 170 together with the by-products generated by the reaction. At this time, the discharge unit 170 is equipped with a turbo pump to assist the discharge, and the turbo pump is operated to discharge the plasma and the by-products after the reaction to the outside.

On one side of the support part 130, a workpiece rotation part 180 is included to rotate the support part 130.

More specifically, a support gear 131 is coupled to one side of the support 130 exposed through the chamber 110 and exposed to the outside, and a motor 181 is provided to rotate the support gear 131 do. That is, a motor 181 is provided on one side of the chamber part 110, and a motor gear 182 is coupled to an end of the shaft of the motor 181. The motor gear 182 is meshed with a support gear 131 coupled to one side of the support 130 exposed through the chamber 110 and driven by the motor gear 182 to rotate the support gear 131 Is rotated. Accordingly, the support portion 130 is rotated by the rotation of the support gear 131, and the workpiece 120 fixedly coupled to the support portion 130 is rotated.

The above-described structure allows the inductively coupled plasma to uniformly contact the surface of the workpiece 120 by rotating the workpiece 120 about the support portion 130, and to uniformly react to the outer surface and the inner surface of the workpiece 120 .

That is, the inductively coupled plasma is generated near the coil part 140, and the amount of the inductively coupled plasma decreases toward the discharge part 170. Therefore, the surface roughness of the workpiece 120 can be uniformly improved by rotating the workpiece 120 by the workpiece rotating unit 180 to bring the workpiece 120 into contact with the inductively coupled plasma uniformly. In this figure, the shaft of the motor is disposed parallel to the support portion, but the arrangement of the motor is not limited in its arrangement as long as the support portion can be stably rotated.

The cover unit 190 is coupled to the upper end of the chamber unit 110 so as to be openable and closable.

More specifically, the upper end of the chamber part 110 is formed in an open rectangular shape, and the upper end of the chamber part 110 can be opened and closed for operations such as the replacement of the workpiece 120, the coil part 140 and the window part 160 The cover portion 190 is engaged. Therefore, the cover unit 190 is provided to open the inside of the chamber unit 110 when necessary, and can perform operations such as inspection inside the chamber unit 110, replacement of parts, and the like.

A sensor unit 111 for sensing surface roughness of the workpiece is provided in the chamber 110.

More specifically, the workpiece reacts with the inner surface of the chamber part 110 due to the inductively coupled plasma to perform the surface treatment. At this time, the sensor part 111 is coupled to the inner surface of the chamber part 110 to sense that the surface treatment is performed until the surface roughness of the workpiece reaches an appropriate level. The sensor measures the level of surface roughness of the workpiece by measuring a laser of white light with a non-contact type optical sensor, thereby rotating the workpiece until the surface roughness of the workpiece is less than 0.1 탆.

A latch gear 132 may be coupled to one side of the support gear 131.

A support gear 130 is coupled to one side of the chamber 110 and a support gear 131 is coupled to an outer side wall of the chamber 110. A latch gear 132 is coupled do. That is, the support gear 131 and the latch gear 132 have a structure in which the support gear 131 is coupled to the outside and the latch gear 132 is coupled to the inside of the chamber gear 110, to be.

At this time, a stopper 133 is provided to be engaged with the latch gear 132, and the latch gear 132 can be rotated in only one direction by the stopper 133. That is, the stopper 133 is elastically and rotatably supported at one side by the spring portion 134 supported by the protrusion 135 formed on the inner wall of the chamber portion 110, Lt; / RTI > When the latch gear 132 rotates to the other side, the stopper 133 is rotated while the stopper 133 is moved to one side when the latch gear 132 rotates in one direction. However, when the latch gear 132 rotates to the other side, Is not rotated by the shape biased toward the other side of the latch gear 132. Accordingly, when the workpiece rotates the support portion 130 by gravity, the rotation is stopped by the latch gear 132 and the stopper 133. [

Fig. 3 is a flowchart of a surface treatment method of a metal molded article according to an embodiment of the present invention.

Referring to FIGS. 1 to 3, a method for surface treatment of a metal object according to the present invention includes a step S210 of installing a workpiece 120 inside a chamber part 110 through a support part 130.

More specifically, the operator inserts the workpiece 120 by passing the support part 130 from one side of the chamber part 110 so as to fix the workpiece 120 inside the chamber part 110, And is exposed through the other side of the chamber part 110. Accordingly, the support part 130 is coupled through the chamber part 110 and the workpiece 120.

Also, the work 120 may be rotated through the workpiece rotating unit 180 to rotate the support unit 130 (S220).

More specifically, a support gear 131 is coupled to one side of the support part 130 provided through the chamber part 110 and the workpiece 120, And a motor gear 182 is provided on one side. Therefore, the worker can rotate the workpiece 120 disposed inside the chamber part 110 by driving the motor 181 and rotating the support part 130.

Meanwhile, a step S230 of receiving a high frequency electric power and generating an electric field is included in the coil.

More specifically, a coil part 140 is provided at an upper end of the chamber part 110. An operator receives high frequency power by a high frequency power connected to the coil part 140, Thereby generating an electric field.

Further, a step S240 of generating an inductively coupled plasma from the mixed gas by the electric field is included.

More specifically, an operator generates an inductively coupled plasma in the mixed gas filled in the chamber part 110 through an electric field generated by the coil part 140. That is, the high frequency current is accelerated by the electric field generated when the high frequency current flows to the coil part 140, collides with the surrounding mixed gas, and the mixed gas is ionized to generate the inductively coupled plasma.

Meanwhile, a step S250 of improving the surface roughness of the workpiece 120 through the inductively coupled plasma may be included.

More specifically, the operator guides the inductively coupled plasma generated through the mixed gas to the workpiece 120, and rotates the workpiece 120 to uniformly react with the inductively coupled plasma. At this time, the workpiece 120 may react with the inductively coupled plasma and elute to improve the surface roughness of the workpiece 120.

In addition, the step S260 may include stopping the generation of the inductively coupled plasma by interrupting the high-frequency power.

More specifically, the workpiece 120 reacts with the inductively coupled plasma to improve the surface roughness of the workpiece 120. At this time, if the surface roughness of the workpiece 120 is 0.1 탆 or more, it is continuously reacted with the inductively coupled plasma, and if it is 0.1 탆 or less, the high frequency power received by the coil part 140 is cut off, Stop. Therefore, the surface roughness of the work 120 can be controlled by controlling the high frequency power received by the coil portion 140.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

100: Apparatus for surface treatment of metal moldings
110: chamber part
111:
120: workpiece
130: Support
131: Support gear
132: latch gear
133: Stopper
134: spring portion
135: protrusion
140:
150: gas injection part
160: Window portion
170:
180:
181: Motor
182: Motor gear
190: Cover part
P: high frequency power section

Claims (18)

A chamber part having an empty space inside and having an open upper end;
A workpiece disposed in the chamber portion and formed in a three-dimensional shape;
A support portion connected to one side of the workpiece from one side of the chamber portion and connected to the other side of the chamber portion on the other side of the workpiece to rotatably support the workpiece from the chamber portion;
A coil part provided at the upper end of the chamber part to receive high frequency power supplied from the high frequency power part;
A gas injection unit provided at one side of the chamber unit to inject a mixed gas into the chamber unit to generate an inductively coupled plasma by the coil unit to improve the surface roughness of the workpiece;
A window portion provided in a plate-like shape between the coil portion and the workpiece and used as a dielectric;
A cover portion coupled to an upper end of the chamber portion so as to close the upper end of the opened chamber portion and open as necessary;
And a surface treatment device for treating the surface of the metal molded article. [2] The apparatus according to claim 1, wherein the gas injection unit is injected with a mixed gas in which oxygen gas and argon gas are mixed with chlorine-based gas or fluorine-based gas. The method according to claim 2, wherein the fluorine-based gas is selected from CF ₄ , C ₄ F ₈ and C ₄ F ₆ , and the chlorine-based gas is selected from Cl ₂ and BCl ₃ . Device. 4. The metal mold according to claim 3, wherein a discharge port is provided at a lower end of the chamber part, and a turbo pump is provided to guide the inductively coupled plasma formed at the upper end of the chamber part to the discharge part Processing device. 5. The surface treatment apparatus of claim 4, wherein the discharge unit discharges by-products generated after reacting with the surface of the workpiece to improve the surface roughness of the workpiece. The surface treating apparatus for a metal molded article according to claim 5, wherein the supporting portion includes a workpiece rotating portion for rotating the supporting portion 360 degrees so as to uniformly improve the surface roughness of the workpiece fixedly supported by the supporting portion . 7. The apparatus according to claim 6, wherein a support gear is provided at one side of the support portion, and the support gear is driven by being coupled with a motor gear of a motor shaft provided at one side of the workpiece rotation portion to drive the support gear. Apparatus for surface treatment of molded articles. The metal molded article according to claim 7, wherein the workpiece is formed in a mesh or hollow shape, and the inductively coupled plasma is uniformly reacted to the outer surface and the inner surface of the workpiece to improve the overall surface roughness of the workpiece Surface treatment apparatus. 9. The surface of the metal mold article as set forth in claim 8, wherein a sensor part for sensing the surface roughness of the workpiece is provided on one side of the chamber part so as to rotate the workpiece until the surface roughness of the workpiece is 0.1 [ Processing device. 10. The method of claim 9, wherein the discharge portion is configured to discharge by-products generated after reacting with the surface of the workpiece to improve the surface roughness of the workpiece, and the turbo pump is provided to assist in discharging the by- Apparatus for surface treatment of metal moldings. 11. The apparatus according to claim 10, wherein a latch gear is further coupled to one side of the support gear so as to prevent the workpiece from being rotated by gravity against the direction of rotation of the motor gear. A surface treating method for a metal molded article using a surface treating apparatus of a metal molded article,
Installing a workpiece inside the chamber portion through the support;
Rotating the workpiece through a workpiece rotation portion to rotate the support portion;
Generating a magnetic field by receiving high frequency power in a coil part;
Generating an inductively coupled plasma from the mixed gas by a magnetic field;
Improving the surface roughness of the workpiece through the generated inductively coupled plasma;
Stopping the generation of the inductively coupled plasma by interrupting the high frequency power;
And a surface treatment method of the metal molded article. 13. The method of claim 12, wherein in the step of generating the inductively coupled plasma,
And discharging the reacted inductively coupled plasma and the byproduct of the reacted workpiece through the discharge portion. 14. The metal molded article according to claim 13, wherein a support gear is provided at one side of the support portion, and the support gear is coupled to a motor gear of a motor shaft provided at one side of the workpiece rotation portion to drive the support gear Surface treatment method. 15. The method according to claim 14, wherein, in the step of improving the surface roughness of the work,
Wherein the inductively coupled plasma and the workpiece are allowed to react with each other until the surface roughness of the workpiece is 0.1 탆 or less. 16. The method according to claim 15, wherein the mixed gas is a gas in which a chlorine-based gas or a fluorine-based gas is mixed with oxygen gas and argon gas. The method of claim 16, wherein the fluorine-based gas is selected from one of CF ₄ , C ₄ F ₈ and C ₄ F ₆ , and the chlorine-based gas is selected from one of Cl ₂ and BCl ₃ . Way. A three-dimensional printing metal molded article according to any one of claims 1 to 17, characterized in that the surface treatment is performed so as to improve the surface roughness of the work product through the surface treatment apparatus of the metal mold article and the surface treatment method of the metal mold article.

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