KR20190058776A - Insertion-type wireless tensile sensor, method of manufacturing the same, and measurement method using the same - Google Patents

Abstract

One embodiment of the present invention provides a complete insertion-type wireless tensile sensor comprising a sensor unit directly attached to an organ to measure motility of the organ, having flexibility, and reflecting an oscillation frequency, and an external transmission/reception unit transmitting in the frequency of a wide band from a low frequency to a high frequency to the sensor unit and capturing the oscillation frequency reflected from the sensor unit among the transmitted frequencies. According to the present invention, a partition of the sensor unit directly attached to the organ is changed by a tensile change in accordance with movement of the organ, inductance is changed thereby to be converted into an oscillation frequency by an LC oscillation principle, and a tensile change value is measured through a relation formula between the tensile change and the oscillation frequency by using an oscillation frequency value, thereby measuring the tensile change as a change in the oscillation frequency. Moreover, due to flexibility differences from each portion of an organ, each sensor unit is attached to each portion, thereby measuring the tensile change for each portion, wherein the sensor units attached to each portion do not cause interference therebetween.

Description

TECHNICAL FIELD [0001] The present invention relates to a fully inserted type wireless tensile sensor, a manufacturing method thereof, and a measurement method using the same. [0002]

TECHNICAL FIELD The present invention relates to a fully inserted wireless tensile sensor, and more particularly, to a sensor unit having a stretchability and a method of directly measuring a mobility of an organ by using the sensor.

Recently, to measure the motility of organs, indirect measurements were made using signals or images using electromagnetic fields or x-ray equipment.

However, the conventional long-term measurement equipment has a problem that the equipment volume is large, it is expensive, and continuous measurement is impossible.

In addition, conventional measurement equipment has difficulty in moving measurement equipment because it requires a power supply to connect to the power source and a wired device to connect.

Such conventional long-term measurement equipment has a problem that it is inconvenient to move due to a large volume of equipment, can not be monitored 24 hours, or is difficult to measure wirelessly.

Conventional measurement equipment uses indirect measurement rather than direct measurement of organ motility.

Korean Patent No. 10-1693306 discloses an inductance-based tension sensor, a bio-signal measuring sensor using the inductance-based tension sensor, and a garment and a conductive member of the inductance-based tension sensor. , The conductive member is fixed in a predetermined pattern on the elastic material, but the conductive member pattern is directly changed in response to the change in the volume or length of the measurement object, and the inductance value thereof is also changed so that the tension can be accurately measured while the volume is minimized. The present invention provides a bio-signal measurement sensor structure that realizes a convenient and accurate measurement of a bio-signal on a daily basis by implementing a sensor, and discloses a garment and a conductive member to which such a bio-signal measurement sensor is applied.

Korean Patent No. 10-1693306

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and provide a fully inserted type wireless tensile sensor capable of measuring long term mobility by attaching directly to an organ using a sensor part having elasticity and a sensor part thereof.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. There will be.

According to an aspect of the present invention, there is provided a magnetic resonance imaging apparatus comprising: at least one sensor unit that is attached directly to an organ, measures its mobility, and can reflect a specific resonance frequency; And an external transmitting and receiving unit transmitting a wide frequency band from a low frequency to a high frequency to the sensor unit and receiving the specific resonance frequency to which the sensor unit is reflected, wherein at least one of the sensor units has mutually non- The present invention is characterized in that different patterns are provided so as to have different frequency bands so that different signals measured at various portions of one organ attached to the sensor unit are detected.

In an embodiment of the present invention, the sensor unit may be formed using a biocompatible material formed to cover an upper surface of a predetermined pattern and having elasticity.

In the embodiment of the present invention, a material of which the pattern of the sensor portion is elongated and kept electrically connected can be used.

In the embodiment of the present invention, the pattern of the sensor portion is formed in a spiral shape and can be configured as an element of the LC resonance circuit.

In the embodiment of the present invention, the inductance of the sensor unit may change corresponding to a change in tensile force of an organ due to a long-term exercise.

In an embodiment of the present invention, the pattern of the sensor portion has a capacitance, and the pattern having the capacitance may be configured as an element of the LC resonance circuit.

In an embodiment of the present invention, the sensor unit may include a first integrated circuit storing unique ID information for distinguishing the sensor unit.

In an embodiment of the present invention, the sensor unit may sense the change in tension of the organ without using the internal power source.

In the embodiment of the present invention, the external transceiver may include: a transmitter capable of transmitting from a low frequency to a high frequency; a receiver capable of receiving the specific resonance frequency reflected by the sensor unit; A reception signal analyzer capable of processing the specific resonance frequency reflected by the sensor unit, and a display capable of displaying information processed by the reception signal analyzer on the screen.

According to an aspect of the present invention, there is provided a method of manufacturing a sensor, comprising: i) attaching the sensor unit to an organ; Ii) a stage where a tensile change occurs due to long-term exercise; Iii) generating a tensile change of the sensor unit by a change in tensile force according to the long-term motion; Iv) changing the inductance due to a change in tension of the sensor unit; (V) changing a resonance frequency due to the change in inductance; (Vi) transmitting a frequency from the transmitter of the external transceiver unit to the sensor unit; (E) reflecting the resonance frequency at the sensor unit; (E) measuring the resonance frequency at a receiver of the external transceiver; Calculating a tensile change value using the resonance frequency in a received signal analyzer of the external transceiver; X) outputting the tensile change value to a display of the external transceiver unit.

According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising the steps of: a) stacking a sacrificial layer such as metal or paralin, such as gold, b) applying a material such as polydimethylsiloxane (PDMS), which is capable of covering the pattern and has elasticity and satisfies the biocompatibility, to a thickness of about 150 μm; c) advancing a surface treatment to peel off the mask layer to produce a pattern in a later step h); d) coating a mask layer to produce a pattern in a later step h) (which is a material that can be uniformly coated or applied to the surface, such as paralin); e) Performing an exposure process for forming a pattern on the mask layer; f) performing an etch process to form a pattern in the mask layer in step d); g) applying a material to the surface, such as a nanowire, which is stretched and remains electrically connected; H) removing the mask layer to leave only the pattern on the surface; i) attaching a multi-layer structure for making an electrically closed loop to create an LC resonant circuit; j) applying the stretchable material used in the step b) on the pattern; k) removing the finished sensor from the sacrificial layer deposited in step a).

The effect of the present invention according to the above-described configuration is that the organism can continuously and quantitatively monitor the organism in a wireless manner.

Further, the effect of the present invention is that the measurement sensor is small, the portability is good, and the cost is relatively low as compared with the existing measurement equipment.

The effect of the present invention is that various parts can be monitored by attaching sensors to various parts.

It should be understood that the effects of the present invention are not limited to the above effects and include all effects that can be deduced from the detailed description of the present invention or the configuration of the invention described in the claims.

1 is a diagram illustrating a relationship between a sensor unit and an external transceiver according to an embodiment of the present invention.
FIG. 2 is a block diagram of a sensor according to an exemplary embodiment of the present invention. Referring to FIG.
3 is a configuration diagram of a sensor unit in which a capacitor is inserted into a device according to an embodiment of the present invention.
4 is a block diagram of an external transmitting / receiving unit according to an embodiment of the present invention.
FIG. 5 is a diagram illustrating an example of attachment of a sensor part or organ according to an embodiment of the present invention. FIG.
FIG. 6 is a conceptual diagram for measuring a change in a long-term tensile force of a sensor unit according to an embodiment of the present invention.
FIG. 7 is a flowchart illustrating a measurement of a change in long-term tensile force of a sensor unit according to an embodiment of the present invention.
8 is a view showing a process of manufacturing the sensor unit according to an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

Throughout the specification, when a part is referred to as being "connected" (connected, connected, coupled) with another part, it is not only the case where it is "directly connected" "Is included. Also, when an element is referred to as " comprising ", it means that it can include other elements, not excluding other elements unless specifically stated otherwise.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is a diagram showing a relationship between a sensor unit 10 and an external transceiver unit 20 according to an embodiment of the present invention.

As shown in FIG. 1, the fully inserted type wireless tensile sensor of the present invention includes a sensor unit 10 that can directly measure a mobility of organs attached to an organ, and has elasticity and can reflect a resonance frequency; And an external transceiver 20 transmitting a wide frequency band from a low frequency to a high frequency to the sensor unit 10 and detecting a specific resonance frequency of the sensor unit 10 reflected therefrom.

The present invention discloses a method of measuring mobility by directly attaching to a organ using a sensor part 10 having elasticity and a sensor part 10 thereof.

The sensor unit 10 proposed by the present invention changes the pattern of the sensor unit 10 due to a change in tensile force due to a long-term movement, thereby changing the inductance, which changes the resonance frequency by the LC resonance principle.

Through this relationship, it becomes possible to measure the tensile change by the change of the resonance frequency. The measurement principle is that the transmitter 21 of the external transceiver 20 transmits a wide band signal from a low frequency to a high frequency and transmits a specific resonance frequency reflected by the sensor unit 10 to a receiver of the external transceiver 20 22, and the long-term tensile change value is measured through a relational expression between the tensile and the resonance frequency of the sensor unit 10 by using the specific resonance frequency value.

In addition, since the elongation of the organs is different depending on each part of the organs, a tensile measuring sensor for each region is required. Therefore, various patterns having frequency bands which can be attached to various parts and do not cause interference between the sensor parts 10, The invention also includes the invention.

In order to measure the tensile change due to the long-term exercise, the tensile change is measured for each organ part by attaching the sensor part 10 to each part, and the interference between the sensor parts 10 attached to each organ part And a plurality of patterns having a frequency band that does not cause a distortion.

Conventional techniques for measuring the change in tension of organs used a method of observing long-term motility by measuring electrical signals that cause long-term muscle movement.

In addition, a method of observing long-term motility by measuring a magnetic field caused by an electrical signal causing muscle motion was used.

After injecting the contrast agent, a method of observing the long-term motility by observing the movement of the organ by X-ray was also used.

However, the above-described method of measuring electrical signals can only be measured by a wire, or continuous measurement is not possible.

Also, the method of measuring the magnetic field and the method of observing the motility of organs with X-rays after injecting the contrast agent have problems in that the measurement equipment is large or the measurement cost is high.

The fully inserted wireless tensile sensor of the present invention can continuously and quantitatively monitor long term mobility by wireless.

The external transmitting / receiving unit 20 that receives the resonance frequency of the sensor unit 10 is small, has good portability and portability, and can be used at a relatively low cost as compared with the measuring apparatus of the related art, as compared with the measuring apparatus of the related art Do.

The sensor unit 10 can sense a change in the tension of the organ without an internal power source. Electromagnetic waves transmitted from the outside are transmitted to the sensor unit 10, and electricity can flow into the sensor unit 10 by the transmitted electromagnetic waves. The inductance and the capacitance of the sensor unit 10 can form a resonance frequency by using the generated electricity. The tension change of the organ can be measured without an internal power source of the sensor unit 10.

Further, by attaching the sensor unit 10 to various parts of organs, various parts of the organ can be monitored.

2 and 3 disclose various embodiments of the configuration of the sensor unit 10 of the present invention.

FIG. 2 is a configuration diagram of a sensor unit 10 in which a capacitor is implemented as a pattern, according to an embodiment of the sensor unit 10 of the present invention.

As shown in FIG. 2, the sensor unit 10 can use a biocompatible material 11 that can cover an upper surface of a previously formed pattern while having elasticity.

The biocompatible material 11 may be selected from the group consisting of polyvinyl chloride, polyethylene, polystyrene, polyamide, latex, cellulose, acrylonitrile polymer, natural rubber, silicone rubber, various silicone polymers, polypropylene, metal, polyester, polytetrafluoroethylene , Polyurethane, acrylic polymer, PHEMA, PDMS (polydimethylsiloxane), nylon, polyamino acid, PAN (polyacrylonitrile), PGA, polyethylene terephthalate, chitosan, alginic acid and high density polyethylene.

The pattern of the sensor unit 10 can be made of a material 12 having elasticity and maintaining electrical connection.

The sensor unit 10 may be made of a material 12 such as silver nanowires that maintain elasticity and maintain electrical connection to maintain electrical connection. Silver nanowires were made of thin silver nanoscale thin sections with a diameter of silver cross section. Not only is it excellent in conductivity, but it is flexible and suitable for flexible electrodes. Especially, it can be produced by solution process, which enables mass production.

The pattern of the sensor unit 10 having a spiral shape and having an inductance may be configured as an element of the LC resonance circuit. In order for the sensor unit 10 to reflect a specific resonance frequency, an LC resonance circuit should be formed. For this purpose, the sensor unit 10 may include a pattern 15 having a spiral inductance.

The pattern 15 having an inductance is not limited to a spiral shape and may have various shapes.

The pattern of the sensor portion 10 has a capacitance, and the pattern 16 having a capacitance can be configured as an element of the LC resonance circuit.

The sensor unit 10 may be stretched or shrunk due to a change in the tension of the organ due to the long-term movement and the pattern 15 having the inductance of the sensor unit 10 may be increased or decreased so that the inductance of the sensor unit 10 may be changed .

The change in inductance of the sensor unit 10 leads to a change in the resonance frequency of the sensor unit 10 and the change in tension of the organ can be measured using the change in the resonance frequency.

The sensor unit 10 may include a first integrated circuit 13 storing unique ID information for distinguishing the sensor unit 10.

The first integrated circuit 13 may be an electronic device such as various kinds of sensors. For example, the first integrated circuit 13 may be a radio frequency identification (RFID) chip or a Bluetooth chip, and may be connected to various sensors used in electronic and medical devices, Can be used.

3 is a block diagram of a sensor unit 10 in which a capacitor is inserted into a device according to another embodiment of the configuration of the sensor unit 10 of the present invention.

The sensor unit 10 shown in Fig. 3 has elasticity, which is used for the patterns of the sensor unit 10 and the biocompatible material 11 having elasticity, which can cover the upper surface of the previously formed pattern, And a pattern 15 having an inductance in the form of a spiral.

However, the sensor unit 10 shown in Fig. 3 includes the second integrated circuit 14 and the capacitor element 17.

3 shows a sensor portion 10 in which the capacitor element 17 is provided together with the second integrated circuit 14 without applying the pattern 16 having a capacitance.

The second integrated circuit 14 may store unique ID information for distinguishing the sensor unit 10. The second integrated circuit 14 may be an electronic device such as various kinds of sensors. For example, the second integrated circuit 14 may be a radio frequency identification (RFID) chip or a Bluetooth chip, and may be connected to various sensors used in electronic and medical devices, Can be used.

4 is a block diagram of an external transmitting / receiving unit 20 according to an embodiment of the present invention.

As shown in FIG. 4, the external transceiver 20 includes a transmitter 21 capable of transmitting from a low frequency to a high frequency, a receiver 22 capable of receiving a specific resonance frequency reflected by the sensor unit, A controller 23 capable of transmitting in a unit 10 a reception signal analyzer 24 capable of processing a specific resonance frequency reflected by the sensor unit and a reception signal analyzer 24 capable of displaying information processed by the reception signal analyzer 24 on the screen And a display 25.

The transmitter 21 can transmit a wide frequency band from the low frequency to the high frequency to the sensor unit 10. [

For example, the frequency range of the transmitter 21 can transmit a frequency of 1 MHz to less than 100 MHz to the sensor unit 10. [ This is for broader catching, including the frequency range typically employed by RFID technology.

The receiver 22 can receive a specific resonance frequency at which the sensor unit 10 reflects the frequency transmitted from the transmitter 21 to the sensor unit 10. [

The controller 23 determines the frequency that the transmitter 21 can transmit to the sensor unit 10 among the frequencies of 1 MHz to less than 100 MHz and transmits the specific resonance frequency reflected by the sensor unit 10 to the receiver 22 It can transmit it to the received signal analyzer 24. In addition, the received signal analyzer 24 can transmit the processed information to the display 25.

In the sensor unit 10, the sensor pattern changes due to the change in tensile force due to the long-term movement, thereby changing the inductance, which changes the resonance frequency by the LC resonance principle. Through this relationship, it becomes possible to measure the tensile change by the change of the resonance frequency. The measurement principle is that the transmission section 21 transmits a wide band signal from a low frequency to a high frequency and a specific resonance frequency reflected by the sensor section 10 is received by the receiver 22, To the received signal analyzer (24), the specific resonance frequency value reflected by the antenna (10).

The received signal analyzer 24 can measure and calculate a tensile change value through a relational expression between a tensile and a resonant frequency using the specific resonant frequency reflected from the sensor unit 10,

The processed information via the received signal analyzer 24 may be transmitted to the display 25 via the controller 23. The display 25 can convert the information received from the received signal analyzer 24 into an image, a graph and a table, and display the image, the graph and the table on the screen of the external transceiver 20.

The external transceiver 20 may be a device dedicated to an external transceiver 20 having a display capable of displaying information converted into images, graphs and tables, a smartphone, a tablet, a laptop, a desktop PC and a smart device have.

FIG. 5 is a diagram illustrating an example of attachment of the sensor unit 10 according to an embodiment of the present invention.

As shown in Fig. 5, since the organs have different elongated points at each site, it is necessary to measure them by attaching them to various parts of organs. For this, the sensor unit 10 may be designed and manufactured to have different ID values or have different resonance frequencies.

FIG. 6 is a conceptual view illustrating a measurement of a change in a long-term tensile force of the sensor unit 10 according to an embodiment of the present invention.

As shown in Fig. 6, the sensor unit 10 is attached to the organ. Since tensile changes are different for each organ part, a plurality of sensor parts 10 can be attached.

And transmits the frequency of 1 MHz to less than 100 MHz to the sensor unit 10 in the external transmission / reception unit 20.

If there is no change in the elongation of the elongation, reflection occurs at a specific resonance frequency in the sensor section 10 having no change in tension.

When there is a change in the elongation of the elongation, the inductance changes due to a tensile change applied to the sensor unit 10 due to the long-term exercise, and a change occurs in the resonance frequency. The sensor unit 10 is reflected at the changed resonance frequency.

And transmits the specific resonance frequency reflected by the sensor unit 10 received by the receiver 22 to the received signal analyzer 24 through the controller 23 to calculate and process the tensile value.

And transmits the tensile value processed by the received signal analyzer 24 to the display 25 through the controller 23. [

The display 25 converts the processed tension value received through the controller 23 into an image, a graph and a table, and outputs the image, the graph and the table to the screen of the external transceiver 20.

7 is a flowchart showing a measurement of a change in a long-term tensile force of the sensor unit 10 according to an embodiment of the present invention.

As shown in FIG. 7, there is shown a procedure for measuring the change in the long-term tensile force of the sensor unit. Hereinafter, a method for measuring a change in the long-term tensile force of the sensor unit 10 of the present invention including the sensor unit 10 will be described.

In the first step S1, the sensor part 10 can be directly attached to each part of the organ in order to measure the motility of the organ. Since the sensor unit 10 is directly attached to organs to measure long-term motility, the sensor unit 10 should be made of a material having elasticity and biocompatibility.

In the second step (S2), an elongation change of the organ due to the long-term exercise may occur.

In the third step (S3), when the organ is exercised, a change in the tension of the organ occurs, and the sensor unit 10 directly attached to the organ also undergoes tensile change at the same time.

In the fourth step S4, the sensor unit 10 directly attached to the organ can also undergo a tensile change at the same time in accordance with the change in the long-term tensile force. The pattern provided on the surface of the sensor unit 10 changes due to the change in the tensile force of the sensor unit 10, thereby changing the inductance.

In the fifth step S5, the resonance frequency of the inductance changed by the pattern change of the sensor unit 10 may be changed due to the LC resonance principle. Through this relationship, it is possible to measure the change in long-term tension due to long-term motion by the change in resonant frequency.

In the sixth step S6, the transmitter 21 of the external transceiver 20 can transmit a wide frequency band from the low frequency to the high frequency to the sensor unit 10. More specifically, the transmitter 21 of the external transmission / reception unit 20 can transmit a frequency of 1 MHz to less than 100 MHz to the sensor unit 10. [

In the seventh step S7, the sensor unit 10 may reflect a specific resonance frequency of a wide frequency band from the low frequency to the high frequency transmitted from the transmitter 21 of the external transmitting and receiving unit 20. [

In the eighth step S8, the receiver 22 of the external transceiver 20 can receive the specific resonance frequency reflected by the wireless tensile sensor 10.

The specific resonance frequency reflected by the wireless tensile sensor 10 is received by the receiver 22 of the external transmitting and receiving section 20 and transmitted to the receiving signal analyzer 24 of the external transmitting and receiving section 20 in the ninth step S9 And the received signal analyzer 24 of the external transceiver unit 20 can calculate and process a tensile change value of the organ using the received specific resonance frequency.

The tensile change value of the organ calculated and processed by the received signal analyzer 24 of the external transceiver 20 can be output to the display 25 of the external transceiver 20 in a tenth step S10.

8 is a view illustrating a process of manufacturing the sensor unit according to an embodiment of the present invention.

As shown in FIG. 8, the manufacturing process sequence of the sensor unit is shown. Hereinafter, a method of manufacturing the sensor unit 10 including the sensor unit 10 will be described.

In the first step (a), a sacrificial layer, such as gold or paralin, may be deposited on the silicon wafer so that the wireless tensile sensor 10 can be detached from the silicon wafer at a later time.

The paralel can be vapor-deposited and polymer coated on the object in a micro-thickness unit regardless of the shape of the object in the form of a gas in a vacuum state at room temperature.

Paralin is polycyclic, linear, and lacks affinity for water, so it does not cause extreme chemical reactions.

In the second step (b), a material such as polydimethylsiloxane (PDMS), which can cover a predetermined pattern on the sensor unit 10 and is transparent, stretchable, durable and biocompatible, It can be applied to the upper surface of the sacrificial layer such as paralin with a thickness of about 150 μm.

In the third step (c), the surface treatment can be performed so that the mask layer can be peeled off in order to generate the pattern of the sensor unit 10 in the eighth step (h).

In the fourth step (d), the mask layer may be coated to produce the pattern in the eighth step (h). It may be a material that can be uniformly coated or applied to the surface, such as paralin.

In the fifth step (e), an exposure process for forming the pattern of the sensor unit 10 may be performed on the mask layer of the fourth step (d) in order to generate the pattern of the sensor unit 10.

In the sixth step (f), an etching process for forming a pattern in the mask layer of the fourth step (d) may be performed.

In the seventh step (g), a silver nanowire can be applied to the surface of a material that is stretched but remains electrically connected. It can be applied by spraying or by other methods.

In the eighth step (h), only the pattern of the sensor portion 10 can be left on the surface by removing the mask layer.

In the ninth step (i), a multilayer structure can be attached to make an electrically closed loop to create an LC resonant circuit.

In the tenth step (j), it is possible to cover the predetermined pattern on the sensor unit 10, such as Polydimethylsiloxane (PDMS) used in the second step (b), to have transparency, stretchability, durability and biocompatibility Can be applied onto the pattern of the sensor section 10. [0050]

In the eleventh step (k), the sensor of the sensor part 10 completed from the sacrificial layer such as metal or paralin, which is accumulated in the first step (a), can be removed.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

10: Sensor unit
11: Biocompatible material
12: Electrical connection material
13: 1st integrated circuit
14: 2nd integrated circuit
15: Pattern with inductance
16: Pattern with capacitance
17: Capacitor element
20: External transmission /
21: Transmitter
22: Receiver
23:
24: Receiver signal analyzer
25: Display

Claims (11)

One or more sensor parts directly attached to the organ to measure its mobility and reflect a specific resonance frequency; And
And an external transmitting and receiving unit transmitting a wide frequency band from a low frequency to a high frequency to the sensor unit and receiving the specific resonance frequency reflected by the sensor unit,
Wherein at least one of the sensor units is provided with various patterns so as to have different frequency bands that do not cause mutual interference so that different signals measured at various portions of one organs with the sensor unit are detected Insertion type wireless tensile sensor.
The method according to claim 1,
Wherein the sensor unit is formed to cover a predetermined upper surface of the sensor unit pattern and is formed using a biocompatible material having elasticity.
The method according to claim 1,
Wherein the pattern of the sensor unit is formed of a material that is electrically connected while being stretched.
The method according to claim 1,
Wherein the pattern of the sensor portion is in the form of a spiral and is configured as an element of an LC resonant circuit.
The method of claim 4,
Wherein the sensor unit changes its inductance in response to a change in an elongation of the organ due to a long-term movement.
The method according to claim 1,
Wherein the pattern of the sensor portion has a capacitance and the pattern having the capacitance is configured as an element of an LC resonant circuit.
The method according to claim 1,
Wherein the sensor unit includes a first integrated circuit storing unique ID information for distinguishing the sensor unit.
The method according to claim 1,
Wherein the sensor unit is capable of detecting a tensile change of the organ without using an internal power source.
The method according to claim 1,
The external transmitting /
A transmitter capable of transmitting from a low frequency to a high frequency,
A receiver capable of receiving the specific resonance frequency reflected by the sensor unit,
A controller capable of transmitting the specific resonance frequency in the external transceiver,
A reception signal analyzer capable of processing the specific resonance frequency reflected by the sensor unit,
And a display capable of displaying information processed by the received signal analyzer on a screen.
The measuring method using the fully inserted type wireless tensile sensor of claim 1,
I) attaching the sensor unit to an organ;
Ii) a stage where a tensile change occurs due to long-term exercise;
Iii) generating a tensile change of the sensor unit by a change in tensile force according to the long-term motion;
Iv) changing the inductance due to a change in tension of the sensor unit;
(V) changing a resonance frequency due to the change in inductance;
(Vi) transmitting a frequency from the transmitter of the external transceiver unit to the sensor unit;
(E) reflecting the resonance frequency at the sensor unit;
(E) measuring the resonance frequency at a receiver of the external transceiver;
Calculating a tensile change value using the resonance frequency in a received signal analyzer of the external transceiver;
X) outputting the tensile change value to a display of the external transceiver;
And a measuring unit for measuring a measurement result using the fully inserted type wireless tensile sensor.
The method of manufacturing a fully inserted wireless tensile sensor of claim 1,
a) stacking a sacrificial layer, such as metal or paralin, on the silicon wafer, such as gold, which can later be stripped of the sensor;
b) applying a material such as polydimethylsiloxane (PDMS), which is capable of covering the pattern and has elasticity and satisfies the biocompatibility, to a thickness of about 150 μm;
c) advancing a surface treatment to peel off the mask layer to produce a pattern in a later step h);
d) coating a mask layer to produce a pattern in a later step h) (which is a material that can be uniformly coated or applied to the surface, such as paralin)
e) performing an exposure process to create a pattern in the mask layer of step d) to produce a pattern;
f) performing an etching process for forming a pattern in the mask layer in the step d)
g) applying to the surface a substance that is stretched like a nanowire and yet maintains an electrical connection (which can be applied by spraying or otherwise applied)
h) removing the mask layer to leave only the pattern on the surface;
i) attaching a multi-layer structure for making an electrically closed loop to create an LC resonant circuit;
j) applying the stretchable material used in the step b) on the pattern;
k) removing the finished sensor from the sacrificial layer deposited in step a);
The method comprising the steps of:

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