KR20190047321A - Apparatus for treating substrate - Google Patents

Abstract

Provided by the present invention is a photomask processing device capable of processing a photomask moved to various kinds of containers. The mask processing device includes: a loading area which receives a container having a photomask stored therein and exposes the photomask by opening the container; an inspection area which is connected to the loading area, leads information related to the exposed photomask, and determines the type of the photomask; and a control module which controls the loading area and the inspection area. The control module: checks if the container corresponds to a first type or a second type; opens the container by a first order when the container is a first type; and controls the container to be opened by a second order different from the first order when the container is a second type.

Description

[0001] Apparatus for treating substrate [0002]

The present invention relates to a photomask processing apparatus.

A photomask (or a lithography mask, a reticle) is used to transfer the photoresist pattern. When such a photomask moves between a lithography station, a processing station and a storage station, the photomask is stored and transported in a container (or carrier, cassette).

Meanwhile, the information related to the photomask (i.e., identification information) is displayed in a machine readable type in the photomask itself. Here, the machine readable form may be barcode, OCR, and the like. Therefore, in order to identify the photomask, vision inspection of the photomask should be performed. The mask sorter system opens the container to take out the photomask and performs such vision inspection.

On the other hand, the photomask can be stored and moved by various kinds of containers. For example, RSP (Reticle SMIF POD) or EUV reticle pods. Accordingly, it is necessary to develop a photomask processing apparatus (mask sorter system) capable of performing vision inspection corresponding to photomasks moved to various kinds of containers.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a photomask processing apparatus capable of processing a photomask moved to various types of containers.

The problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided a photomask processing apparatus comprising: a loading region which is provided with a container in which a photomask is stored and exposes the photomask by opening the container; An inspection area connected to the loading area and reading information related to the exposed photomask to determine the type of the photomask; And a control module for controlling the loading area and the inspection area, wherein the control module checks whether the container corresponds to the first kind or the second kind, and when the container is the first kind, And opening the container according to a second order different from the first order when the container is of the second kind.

The loading area includes a plate on which the container is placed and a sensor module installed on the plate to check the size of the container. The control module checks the type of the container through the size of the container .

Wherein the loading area further comprises a first antenna and a second antenna spaced apart from each other, wherein the first antenna communicates with a first tag installed in the first type of container, and the second antenna communicates with the second type And the control module checks the type of the container according to the communication result of the first antenna and the first tag or the communication result of the second antenna and the second tag .

Wherein the first type of container includes a first outer base, a first outer cover, an inner base, and an inner cover, wherein the first inner base and the inner cover define a first storage space defined by the first outer base and the first outer cover, And the inner cover and the photomask are stored in the inner base and the inner cover, and the second type of container includes a second outer base and a second outer cover, wherein the second outer base and the second outer cover The photomask is stored in the second storage space defined by the outer cover.

The loading area includes a movable plate, a first gripper for gripping the outer cover of the container, and a second gripper for gripping the inner cover of the container.

Exposing the photomask by opening the outer cover and the inner cover using the first gripper and the second gripper when the container is of the first type and when the container is of the second kind, By using a gripper and disposing the second gripper, the photomask is exposed by opening the outer cover.

Wherein the first type of container includes a first outer base, a first outer cover, an inner base, and an inner cover, wherein the first order is set such that when the plate on which the container is placed is in the first position, The gripper grips the first outer cover, and the plate is moved from the first position to a second position lower than the first position to open the first outer cover, and the plate is moved to the second position The second gripper grips the inner cover and moves the plate from the second position to a third position lower than the second position to open the inner cover to expose the photomask .

Wherein the loading region further comprises a third gripper for gripping the exposed photomask, wherein the first order is selected such that the plate is held in the third position and the third gripper grips the exposed photomask gripping the exposed photomask after the third gripper grips the exposed photomask and moving the plate to a fourth position lower than the third position.

Wherein the second type of container includes a second outer base and a second outer cover, and the second order is such that when the plate on which the container is mounted is in the first position, The cover is held and the plate is moved from the first position to the third position lower than the first position so that the second outer cover is opened to expose the photomask and after the photomask is exposed , A third gripper grips the exposed photomask, and after the third gripper grips the exposed photomask, the plate moves to a fourth position lower than the third position.

Wherein the inspection area comprises a transfer robot for transferring the exposed photomask, an aligner for rotating the direction of the transferred photomask, an inversion module for inverting the transferred photomask, and a controller for acquiring information from the transferred photomask Or a vision module for inspection.

The vision module generates an image of the photomask, and the control module includes examining the type of the photomask through an image of the photomask.

The photomask may be a photomask provided with a pellicle frame.

According to another aspect of the present invention, there is provided a photomask processing apparatus comprising: a loading region provided with a container in which a photomask is stored and exposing the photomask by opening the container; An inspection area connected to the loading area and reading information related to the exposed photomask to determine the type of the photomask; And a control module for controlling the loading area and the inspection area, wherein the loading area includes: a plate on which the container is mounted, the plate being movable up and down; a first panel formed around the moving space of the plate; A second panel provided below the first panel and formed on the periphery of the moving space of the first panel, a first gripper installed on the first panel and gripping the outer cover, And a third gripper provided on the second panel and provided below the second gripper for gripping the photomask.

The control module determines whether or not the second gripper is used according to the type of the photomask.

The loading area further includes a first antenna and a second antenna disposed on both sides of the moving space in the first direction on the first panel and communicating with a tag embedded in the container.

The first gripper is provided on both sides of the first panel in the second direction around the moving space.

Wherein the second gripper is provided on both sides of the moving space in the first direction on the second panel so as to grip both sides of the inner cover in the first direction and the third gripper grips the second On both sides of the moving space in the first direction on the panel to grip both sides of the photomask in the first direction.

Wherein the second panel includes a first portion extending lengthwise in the first direction and a second portion branched at the first portion and elongated in the second direction, A first extending portion branched from the mounting portion and elongated in the second direction; and a first contact portion provided in the first extending portion and contacting the inner cover, 3 gripper includes a second extension portion provided on the second portion and extended in the second direction and a second contact portion provided below the second extension portion and contacting the photomask.

The vertical distance between the second contact portion and the first contact portion is longer than the vertical distance between the second extending portion and the first extending portion.

Wherein the loading area comprises a first sensor module mounted on the plate and including a pair of first sensors disposed at a first distance to ensure that the container is of a first size, And a second sensor module including a pair of second sensors disposed at a second interval to determine whether the container is of a second size.

The details of other embodiments are included in the detailed description and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is an exemplary perspective, plan view, and block diagram of a photomask processing apparatus in accordance with some embodiments of the present invention.
4 and 5 are a perspective view and an exploded perspective view for explaining a first type of container (EUV reticle pod), respectively.
6 and 7 are a perspective view and a plan view for explaining a container RSP of the second kind, respectively.
FIG. 8 is a view for explaining a loading area of the photomask processing apparatus shown in FIG. 2. FIG.
9 is a view for explaining an elevating unit.
Figs. 10 and 11 are a conceptual diagram and a flowchart for explaining a first procedure for opening a first type of container. Fig.
12 and 13 are a conceptual diagram and a flowchart for explaining a second procedure for opening a container of the second kind.
14 and 15 are views for explaining a loading area used in a photomask processing apparatus according to some embodiments of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

It is to be understood that when an element or layer is referred to as being " on " or " on " of another element or layer, All included. On the other hand, a device being referred to as " directly on " or " directly above " indicates that no other device or layer is interposed in between.

The terms spatially relative, "below", "beneath", "lower", "above", "upper" May be used to readily describe a device or a relationship of components to other devices or components. Spatially relative terms should be understood to include, in addition to the orientation shown in the drawings, terms that include different orientations of the device during use or operation. For example, when inverting an element shown in the figures, an element described as "below" or "beneath" of another element may be placed "above" another element. Thus, the exemplary term " below " can include both downward and upward directions. The elements can also be oriented in different directions, so that spatially relative terms can be interpreted according to orientation.

Although the first, second, etc. are used to describe various elements, components and / or sections, it is needless to say that these elements, components and / or sections are not limited by these terms. These terms are only used to distinguish one element, element or section from another element, element or section. Therefore, it goes without saying that the first element, the first element or the first section mentioned below may be the second element, the second element or the second section within the technical spirit of the present invention.

The terminology used herein is for the purpose of illustrating embodiments and is not intended to be limiting of the present invention. In this specification, the singular forms include plural forms unless otherwise specified in the text. It is noted that the terms "comprises" and / or "comprising" used in the specification are intended to be inclusive in a manner similar to the components, steps, operations, and / Or additions.

Unless defined otherwise, all terms (including technical and scientific terms) used herein may be used in a sense commonly understood by one of ordinary skill in the art to which this invention belongs. Also, commonly used predefined terms are not ideally or excessively interpreted unless explicitly defined otherwise.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the like elements throughout. A description thereof will be omitted. 1100 when designating a first type of container, 1200 when designating a second type of container, and 1001 when referring to a container regardless of the type.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is an exemplary perspective, plan view, and block diagram of a photomask processing apparatus in accordance with some embodiments of the present invention.

1 to 3, a photomask processing apparatus according to some embodiments of the present invention includes a loading area I, an inspection area II, and a control module 600 and the like.

The loading area I is formed to extend in the first direction X, for example. As shown, a plurality of load ports 100, 101 (e.g., two load ports) may be disposed in the loading area I, for example, in the first direction X. [

The loading region I is provided with a container 1001 through which a photomask PM is stored through a plurality of load ports 100 and 101 Receive. The loading area I then recognizes the information contained in the container 1001 and reads information related to the container 1001 and / or the photomask PM. For example, in the loading area I, it is possible to check whether the container 1001 corresponds to the first kind or the second kind. If the types of the containers 1001 are different, the types of the photomasks PM in the container 1001 may also be different from each other. Here, the loading area I can use various kinds of reading methods so that information can be recognized from a plurality of containers 1001 of different kinds. Alternatively, one type of lead method may be used over a plurality of times.

The container 1001 that may be used may be, for example, a Reticle Standard Mechanical Interface Pod (RSP), an EUV reticle pod, or the like. A specific description of the container 1001 will be described later with reference to Figs. The photomask (i.e., the RSP photomask) stored in the RSP and the photomask (i.e., the EUV photomask) stored in the EUV reticle pod may be different.

After recognizing the information related to the container 1001 and / or the photomask PM through the above-described read operation, the loading area I can open the container 1001 in a different order according to the recognized information . The container 1001 can move in the third direction Z (i.e., up and down direction) by the elevating units 110 and 111. [ The container 1001 may be moved down by the elevating units 110 and 111 and the opening process of the container 1001 may proceed. When the container 1001 is opened, an internal photomask PM is exposed. For example, when the container (see 1100 in FIG. 4) is the first kind, it opens in the first order, and when the container (see 1200 in FIG. 6) You can open it accordingly. The specific procedure will be described later with reference to Figs. 10 to 13. Fig.

The loading area I and the inspection area II may be arranged to contact with each other in the second direction Y. [ The inspection region II may be formed to extend in the first direction X, for example.

The inspection area II may include a transfer robot 200, an aligner (or a rotator) 300, an inversion module 400, and a vision module 500. Here, the transfer robot 200, the aligner 300, the inversion module 400, the vision module 500, and the like can be used regardless of the type of the photomask PM.

The transfer robot 200 grips the photomask PM to transfer the photomask PM from the loading area I into the inspection area II or conversely transfers the photomask PM to the inspection area II II) to the loading area (I). Alternatively, the transfer robot 200 can be used to transfer the photomask (PM) in the inspection area II. The transfer robot 200 includes a plurality of links and can rotate individually for each link. Therefore, within the allowable reach range, the transfer robot 200 can move in all directions and be capable of multi-angle control.

The aligner 300 receives the photomask PM from the transfer robot 200 and rotates to align the direction of the photomask PM in the forward direction. For example, since the photomask PM is not stored in the forward direction in the container 1001, the aligner 300 can receive the photomask PM that is not in the forward direction. In this case, the aligner 300 rotates so that the photomask PM becomes positive. The aligner 300 may, for example, rotate 90 degrees, 180 degrees, 270 degrees, but the angle of rotation is not limited thereto. The aligner 300 can hold the photomask PM in an air chuck manner. The aligner 300 can move in the third direction Z (i.e., up and down).

The inversion module 400 inverts the photomask PM. That is, the inversion module 400 can reverse the photomask PM with the back side facing up, so that the front side faces up. The inversion module 400 can hold the photomask PM in an air chuck manner.

The vision module 500 captures a photomask PM to acquire or check information from the photomask PM. For example, the type of the photomask (PM) is checked or the position (direction) of the photomask (PM) is inspected.

Specifically, when the photomask PM is placed on the aligner 300, the vision module 500 photographs the photomask PM, and the control module 600 photographs the photographed image (including the still image and the moving image) Check whether the mask PM is arranged in the forward direction. If not disposed in the forward direction, the aligner 300 rotates the photomask PM. Thereafter, the vision module 500 re-captures the photomask PM to confirm the forward placement again.

Or when the vision module 500 photographs the photomask PM and the control module 600 determines that the back side of the photomask PM is facing up from the photographed image, ). After inverting, the vision module 500 may retake the photomask PM, or may not retake the photomask PM.

Alternatively, the vision module 500 photographs the photomask PM, and the control module 600 can obtain information (i.e., identification information) related to the photomask from the photographed image. The identification information may be, for example, a tracking number, a type classification, or a lithography tool classification. Such identification information is displayed in a machine readable type in the photomask (PM) itself. Here, the machine readable form may be barcode, OCR, and the like. For example, the control module 600 recognizes the barcode, the alignment mark, and the like of the RSP photomask from the image of the RSP photomask. In addition, the control module 600 can recognize the common shading of the EUV photomask from the image of the EUV photomask.

Information related to the photomask (PM) is stored in the control module 600 or in the memory connected to the control module 600. In the memory, for example, a photomask (PM) is classified into 36 types, and the characteristics of each type are stored. Therefore, the control module 600 can acquire information from the photographed image of the photomask, compare the acquired information with the information stored in the memory, and determine the type of the photomask. The type of the photomask (PM) thus determined may be a photomask provided with a pellicle frame.

In addition, the control module 600 controls the loading area I and the inspection area II. The control module 600 may be installed inside the inspection area II. Also, it can be connected to the control server wirelessly or by wire. The control server is an upper system that has information on the whole process for facility automation. Accordingly, the control server can issue an operation command to the control module 600 based on this information.

The photomask processing apparatus can operate in various operation modes. For example, there may be an auto mode, a semi auto mode, a manual mode, and the like.

For example, in the AUTO mode, the control module 600 receives an instruction from the control server and can control the loading area I and the inspection area II in accordance with the instruction.

Also, in the manual mode, the control module 600 can be directly instructed by the operator. In other words, the operator can give a specific instruction through the control panel 660. The control panel 660 may be in the form of a display panel installed on one side of the photomask processing apparatus 1 as shown in FIG. For example, the control panel 660 may be detachable from the photomask processing apparatus, and may be connected to the control module 600 through wired or wireless communication.

1, when the container 1001 is transported by the Overhead Hoist Transport (OHT), the loading area I is provided with a container inlet / 800 are installed.

When loading / unloading the container 1001, the overhead carrying robot must be precisely aligned with the load port 100 or 101. To this end, the pins of the overhead carrying robot are docked into the guide holes 180a, 181a of the guide assemblies 180, 181.

4 to 7, a container for moving the photomask will be described. Here, although the EUV reticle pod and the RSP are described respectively, it is apparent to those skilled in the art that other kinds of containers can be used.

4 and 5 are a perspective view and an exploded perspective view for explaining a first type of container (EUV reticle pod), respectively.

4 and 5, the first type of container 1100 is designed in the form of a dual pod, which can protect the photomask by a double-layered shell 1110a, 1112a . The outer shell 1110a includes a first outer base 1110 and a first outer cover 1120 and the inner shell 1112a includes an inner base 1112 and an inner cover 1122. [ The inner base 1112 and the inner cover 1122 are disposed in the first storage space defined by the first outer base 1110 and the first outer cover 1120. [ A photomask is stored in the inner base 1112 and the inner cover 1122. Since the photomask is protected by a double-layered shell, the contamination probability of the photomask is lowered. On the other hand, in order to remove the photomask from the first type of container 1100 in the photomask processing apparatus 1, the two-fold shell must be removed.

On the other hand, a first tag 1130 (for example, an RFID tag) is installed on one side of the container 1100 of the first kind. The photomask processing apparatus 1 can check the type of the container 1100 by communicating with the first tag 1130. [

6 and 7 are a perspective view and a plan view for explaining a container RSP of the second kind, respectively.

Referring to FIGS. 6 and 7, the second type of container 1200 includes a second outer base 1210 and a second outer cover 1220. The photomask is stored in the second storage space defined by the second outer base 1210 and the second outer cover 1220. [ That is, the second type of container 1200 is designed in the form of a single pod and does not include a separate inner shell. In order for the photomask processing apparatus 1 to take out the photomask from the second type of container 1200, it is sufficient to remove the one-folded shell.

On the other hand, a second tag 1230 (for example, an RFID tag) is provided on the other side of the container 1200 of the second kind. The photomask processing apparatus 1 can check the type of the container 1200 by communicating with the second tag 1230. [

4 and 7, the first tag 1130 is installed on one side (for example, the left side) of the container 1100 of the first type while the second tag 1230 is installed on one side And is installed on the other side (for example, the right side) of the container 1200.

FIG. 8 is a view for explaining a loading area of the photomask processing apparatus shown in FIG. 2. FIG. 9 is a view for explaining an elevating unit. 8 shows a first load port, and Fig. 9 shows an elevating unit for moving the plate 150 shown in Fig. 8 in the third direction Z (up and down).

8 and 9, the first load port 100 includes a plate 150, a lift unit 110, a multi-layered panel 3100 (see 3200 in FIG. 15), a plurality of grippers 161, The unlock unit 151, the first sensor modules 156a and 156b, the second sensor modules 155a and 155b, the third sensor modules 152 and 153, 1 antenna 158, a second antenna 159, and the like.

The plate 150 is an area where the container 1001 is seated, and the plate 150 can be moved up and down by the elevation unit 110. [

The unloading unit 151, the first sensor modules 156a and 156b, the second sensor modules 155a and 155b, and the third sensor modules 152 and 153 may be disposed on the plate 150. [

When the container 1001 is placed on the plate 150, the unlocking unit 151 engages with the lower portion of the container 1001 and rotates. Accordingly, the outer cover (for example, 1120 and 1220) of the container 1001 can be opened.

The third sensor modules 152 and 153 are for confirming whether the container 1001 is seated on the plate 150 (that is, whether or not the container 1001 is present). For example, one of the third sensor modules 152 and 153 may sense a vertical direction and the other sensor 153 may sense a non-vertical inclined direction.

The first sensor modules 156a and 156b and the second sensor modules 155a and 155b are for checking the size of the container 1001 placed on the plate 150. [ The control module 600 can check the type of the container 1001 through the size of the container 1001 thus confirmed (i.e., first check). For example, the first sensor module 156a, 156b identifies a first type of container (e.g., an EUV reticle pod) and the second sensor module 155a, 155b identifies a second type of container For example, RSP). That is, each of the sensor modules 156a, 156b, 155a, and 155b may be a dedicated module for identifying a corresponding container, but is not limited thereto. The first sensor modules 156a and 156b may include a pair of first sensors 156a and 156b arranged at a first interval to check whether the container 1001 is of the first size (i.e., the first type of container 1100) , 156b. The second sensor modules 155a and 155b may be a pair of sensors disposed at a second interval different from the first interval in order to confirm whether the container 1001 is the second size And second sensors 155a and 155b.

In addition, a first panel 3100 is formed around the plate 150 (i.e., around the moving space of the plate 150). In the periphery of the moving space of the plate 150, a multi-layered panel 3100 (see 3200 in Fig. 15) is disposed.

And further includes a first antenna 158 and a second antenna 159 disposed on the periphery of the plate 150 and spaced apart from each other on the first panel 3100. Specifically, the first antenna 158 and the second antenna 159 are installed on both sides of the first panel 3100 in the first direction X about the moving space of the plate 150. The first antenna 158 is disposed on one side of the first direction X (that is, on the left side in the drawing) about the moving space of the plate 150 and the second antenna 159 is disposed on the moving space (I.e., the right side in the figure) of the first direction X about the center of the first direction X.

As shown in FIG. 4, a first tag 1130 (for example, an RFID tag) is provided on one side of the container 1100 of the first kind. Thus, the first antenna 158 can communicate with the first tag 1130 of the container 1100 of the first kind. As shown in Fig. 7, a second tag 1230 (for example, an RFID tag) is provided on the other side of the container 1200 of the second kind. Thus, the second antenna 159 can communicate with the second tag 1230 of the second type of container 1200. That is, if the container 1001 to be placed on the plate 150 is of the first type, communication with the first antenna 158 can be performed. If the container 1001 is of the second type, communication with the second antenna 159 can be performed. As a result, the control module 600 determines whether the container 1001 is connected to the first tag 1530 or not, based on the communication result of the first antenna 158 and the first tag 1130 or the communication result of the second antenna 159 and the second tag 1230 Check the type (that is, check second).

Through such two checks (the first check by the sensor module and the second check by the tag / antenna communication), the control module 600 determines whether the container 1001 corresponds to the first type or the second type Check. On the basis of the check result, the control module 600 determines the open order of the container 1001. With reference to Figs. 10 to 13, the open order of the container 1001 will be described in detail later.

9, the lifting unit 110 moves the plate 150 up and down, thereby positioning the plate 150 at a plurality of positions. For example, the lifting unit 110 can move the plate 150 from top to bottom in a first position P1, a second position P2, a third position P3, and a fourth position P4 have.

The first gripper 161 is disposed on the first panel 3100 so as to be movable in the second direction Y on both sides of the plate 150 (i.e., Respectively. The first gripper 161 grips the outer cover (for example, 1120 and 1220) and is used to open the outer covers 1120 and 1220.

A second gripper 162 used for opening the inner cover 1122 is disposed below the first gripper 161 and a photomask PM exposed at the lower portion of the second gripper 162 And a third gripper 163 for gripping is arranged (see Fig. 15).

Figs. 10 and 11 are a conceptual diagram and a flowchart for explaining a first procedure for opening a first type of container. Fig.

4, 5, 10, and 11, as described above, the first type of container 1100 is designed as a dual-pod type and may include two-ply shells 1110a and 1112a . The first type of container 1100 includes a first outer base 1110, a first outer cover 1120, an inner base 1112, and an inner cover 1122.

The first sequence is as follows.

When the plate 150 on which the container 1100 is mounted is in the first position Pl, the unlocking unit (see 151 in Fig. 8) engages with the lower portion of the container 1100 and rotates. The first outer cover 1120 is unlocked. The first gripper 161 grips the first outer cover 1120 (see GR1) (S810).

The plate 150 is moved from the first position P1 to the second position P2 lower than the first position P1 so that the first outer cover 1120 is opened (S820). That is, the first outer cover 1120 and the first outer base 1110 are separated from each other.

When the plate 150 is in the second position P2, the second gripper 162 grips the inner cover 1122 (see GR2) (S830).

The plate 150 is moved from the second position P2 to the third position P3 lower than the second position P2 so that the inner cover 1122 is opened to expose the photomask PM (S840) . That is, the inner cover 1122 and the inner base 1112 are separated from each other.

The plate 150 grips the photomask PM on which the third gripper 163 is exposed at the third position P3 (see GR3) (S850).

After the third gripper 163 grips the exposed photomask PM, the plate 150 moves along with the first outer base 1110 and the inner base 1112 to the fourth position P3, which is lower than the third position P3. And moves to the position P4 (S860). As a result, the photomask PM is completely separated from the two-ply shell.

The transfer robot 200 receives the photomask PM from the third gripper 163 and provides the photomask PM to the aligner 300.

12 and 13 are a conceptual diagram and a flowchart for explaining a second procedure for opening a container of the second kind.

Referring to Figures 6, 7, 12 and 13, as described above, the second type of container 1200 is designed in the form of a single pod.

The second sequence is as follows.

The unlock unit (see 151 in Fig. 8) is engaged with the lower portion of the container 1001 and rotates when the plate 150 on which the container 1200 is mounted is in the first position Pl. The second outer cover 1220 is unlocked. The first gripper 161 grips the second outer cover 1220 (see GR1) (S811).

The plate 150 is moved from the first position P1 to the third position P3 lower than the first position P1 so that the second outer cover 1220 is opened (S841). That is, the second outer cover 1220 and the second outer base 1210 are separated from each other. In particular, the plate 150 skips the second position P2 and moves to the third position P3. This is because it is not necessary to use the second gripper 162 because the second kind of container 1200 does not include an inner shell. The control module 600 determines whether to use the second gripper 162 according to the type of the photomask PM.

At the third position P3, the plate 150 grips the photomask PM on which the third gripper 163 is exposed (see GR3) (S851).

After the third gripper 163 grips the exposed photomask PM the plate 150 moves with the second outer base 1210 to the fourth position P4 which is lower than the third position P3 (S861). As a result, the photomask PM is completely separated from the one-ply shell.

The transfer robot 200 receives the photomask PM from the third gripper 163 and provides the photomask PM to the aligner 300.

14 and 15 are views for explaining a loading area used in a photomask processing apparatus according to some embodiments of the present invention. Figs. 14 and 15 are specific implementations for executing the first and second procedures described with reference to Figs. 10 to 13. Fig.

14 and 15, the loading region I is provided with a plurality of layers of panels 3100 and 3200 around the moving space MA of the plate 150. [ The multi-layer panels 3100 and 3200 include a first panel 3100 and a second panel 3200 disposed under the first panel 3100.

As described above, the first panel 3100 is provided with the first antenna 158 and the second antenna 159 on both sides of the first direction X about the moving space MA, and the moving space MA The first gripper 161 is installed on both sides in the second direction Y. [ The first gripper 161 grips the first outer cover 1120 and the second outer cover 1220.

The second panel 3200 includes a second gripper 162 that grips the inner cover and a third gripper 163 that is provided below the second gripper 162 and that grips the photomask PM. (I.e., the second gripper 162 and the third gripper 163) are installed on one panel (i.e., the second panel 3200) in order to efficiently use the space.

Specifically, the second gripper 162 is disposed on the second panel 3200 on both sides in the first direction X about the moving space and is provided on both sides of the inner cover 1122 in the first direction X .

The second panel 3200 includes a first portion 3201 extending in the first direction X and a second portion 3202 branched from the first portion 3201 and extending in the second direction Y, .

The second gripper 162 includes a mounting portion 162a for mounting the first portion 3201 and a first extending portion 162b branched from the mounting portion 162a and elongated in the second direction Y, And a first contact portion 162c provided on the first extension portion 162b and in contact with the inner cover 1122. [

 The third gripper 163 is provided on the second panel 3200 on both sides in the first direction X about the moving space MA and is provided on both sides of the photomask PM in the first direction X .

 The third gripper 163 includes a second extension portion 163a which is installed on the second portion 3202 and extends in the second direction Y and a second extension portion 163b which is provided on the lower portion of the second extension portion 163a, And a second contact portion 163b in contact with the PM.

The vertical distance G1 between the second contact portion 163b and the first contact portion 162c is longer than the vertical distance G2 between the second extended portion 163a and the first extended portion 162b. As described above, in order to use the space efficiently, the second panel 3200 is provided with the second gripper 162 and the third gripper 163. In this structure, it is possible to ensure the stable operation of the second gripper 162 and the third gripper 163 by securing the vertical distance G1 sufficiently.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It will be understood. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

I: Loading area II: Inspection area
100: first load port 101: second load port
156a, 156b: first sensor module 155a, 155b: second sensor module
152, 153: third sensor module 158: first antenna
159: second antenna 161: first gripper
162: second gripper 163: third gripper
200: transfer robot 300: aligner
400: inverting module 500: vision module
600: control module

Claims (19)

A loading region provided with a container in which a photomask is stored and exposing the photomask by opening the container;
An inspection area connected to the loading area and reading information related to the exposed photomask to determine the type of the photomask; And
And a control module for controlling the loading area and the inspection area,
The control module includes:
Whether the container corresponds to the first kind or the second kind,
Opening the container according to a first order when the container is a first kind and controlling the container to open according to a second order different from the first order when the container is a second kind, Mask processing device. 2. The apparatus of claim 1,
A plate on which the container is seated,
And a sensor module installed on the plate for checking the size of the container,
Wherein the control module checks the type of the container through the size of the container. 2. The apparatus of claim 1,
Wherein the first antenna and the second antenna are spaced apart from each other and the first antenna communicates with a first tag installed in the container of the first type and the second antenna is installed in the container of the second type Communicating with a second tag,
Wherein the control module checks the type of the container according to a communication result of the first antenna and the first tag or a communication result of the second antenna and the second tag. The method according to claim 1,
Wherein the first type of container includes a first outer base, a first outer cover, an inner base, and an inner cover, wherein the first inner base and the inner cover define a first storage space defined by the first outer base and the first outer cover, And the inner cover are disposed, and the photomask is stored in the inner base and the inner cover,
Wherein the second type of container includes a second outer base and a second outer cover, wherein the photomask is stored in a second storage space defined by the second outer base and the second outer cover. 2. The apparatus of claim 1,
The container is seated, a movable plate,
A first gripper for gripping the outer cover of the container,
And a second gripper for gripping the inner cover of the container. 6. The method of claim 5,
Exposing the photomask by opening the outer cover and the inner cover using the first gripper and the second gripper when the container is the first type,
And exposing the photomask by opening the outer cover by using the first gripper and the second gripper when the container is of the second type. 6. The method of claim 5,
Wherein the first type of container includes a first outer base, a first outer cover, an inner base, and an inner cover,
Wherein the first order comprises:
The first gripper grips the first outer cover when the plate on which the container is mounted is in the first position,
The plate is moved from the first position to a second position lower than the first position to open the first outer cover,
When the plate is in the second position, the second gripper grips the inner cover,
Exposing the photomask by opening the inner cover by moving the plate from the second position to a third position lower than the second position. 8. The method of claim 7,
2. The apparatus of claim 1,
Further comprising a third gripper for gripping the exposed photomask,
Wherein the first order comprises:
The plate grips the exposed photomask in the third position, and the third gripper grips the exposed photomask,
Further comprising moving the plate to a fourth position lower than the third position after the third gripper grips the exposed photomask. 6. The method of claim 5,
Wherein the second type of container includes a second outer base and a second outer cover,
The second order may include:
When the plate on which the container is mounted is in the first position, the first gripper holds the second outer cover,
The plate is moved from the first position to the third position lower than the first position to open the second outer cover to expose the photomask,
After the photomask is exposed, a third gripper grips the exposed photomask,
The third gripper gripping the exposed photomask and then moving the plate to a fourth position lower than the third position. The apparatus of claim 1,
A transfer robot for transferring the exposed photomask,
An aligner for rotating the direction of the transferred photomask,
A reversing module for reversing the transferred photomask,
And a vision module for acquiring or inspecting information from the transferred photomask. 11. The method of claim 10,
Wherein the vision module generates an image of the photomask,
Wherein the control module includes inspecting the type of the photomask through an image of the photomask. 12. The method of claim 11,
Wherein the photomask is a photomask provided with a pellicle frame. A loading region provided with a container in which a photomask is stored and exposing the photomask by opening the container;
An inspection area connected to the loading area and reading information related to the exposed photomask to determine the type of the photomask; And
And a control module for controlling the loading area and the inspection area,
Wherein the loading region comprises:
A plate on which the container is seated,
A first panel formed around the moving space of the plate,
A second panel formed around the moving space of the plate and provided below the first panel,
A first gripper installed on the first panel to grip the outer cover,
A second gripper installed on the second panel to grip the inner cover,
And a third gripper provided on the second panel and provided below the second gripper and gripping the photomask. 14. The method of claim 13,
Wherein the control module determines whether to use the second gripper according to the type of the photomask. 14. The apparatus of claim 13,
Further comprising a first antenna and a second antenna disposed on the first panel on both sides in a first direction around the moving space and for communicating with a tag embedded in the container. 16. The method of claim 15,
Wherein the first gripper is provided on both sides of the first panel in a second direction around the moving space. 17. The method of claim 16,
The second gripper is provided on both sides of the moving panel in the first direction on the second panel so as to grip both sides of the inner cover in the first direction
And the third gripper is provided on the second panel on both sides in the first direction around the moving space to grip both sides of the photomask in the first direction. 18. The method of claim 17,
Wherein the second panel includes a first portion extending in the first direction and a second portion branched in the first portion and extending in the second direction,
The second gripper includes a mounting portion for mounting the first portion, a first extending portion branched from the mounting portion and extending in the second direction, and a second extending portion provided on the first extending portion, And a second contact portion which contacts the first contact portion,
The third gripper may include a second extension portion provided at the second portion and extended in the second direction and a second contact portion provided at a lower portion of the second extension portion and contacting the photomask,
Wherein a vertical distance between the second contact portion and the first contact portion is longer than a vertical distance between the second extending portion and the first extending portion. 14. The apparatus of claim 13,
A first sensor module installed on the plate and including a pair of first sensors disposed at a first interval to check whether the container is the first size,
And a second sensor module mounted on the plate, the second sensor module including a pair of second sensors disposed at a second interval to ensure that the container is of a second size.

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