KR20190027600A - Gasket - Google Patents

Abstract

The present invention relates to a gasket, and more specifically, to a gasket provided with first and second recessed parts on an upper plane, second and fourth recessed parts on a lower plane, and an outer ring unit on the outside. According to the present invention, air tightness within a pipe is guaranteed by resilience of the recessed parts. Moreover, compressing force is increased due to an end part in an arc shape or a sawtooth shape formed at the second recessed part and the fourth recessed part, thereby guaranteeing air tightness even in a high temperature, and superior resilience. Furthermore, wear resistance of the gasket is increased through a graphite coating, thereby prolonging the lifespan of the gasket for a long-time use thereof.

Description

Gasket {GASKET}

The present invention relates to a gasket. More particularly, the present invention relates to a gasket improved in airtightness by being disposed between a flange and a flange so as to maintain airtightness in the inside of the pipe but to have a cross-sectional shape.

A gasket is a static seal that is positioned between a pipe and a pipe or between a flange and a flange to prevent fluid flowing inside the pipe from escaping to the outside. Gaskets are evolving into various materials and forms in consideration of the various types of fluids being used depending on industrial developments today. Further, in the case of a gasket which is positioned between the flange and the flange and maintains the airtightness, maintenance, maintenance and management are not easy since the flange and the gasket must be separated from each other for management after installation. Therefore, the gasket must satisfy both the airtightness that the fluid in the tube does not leak to the outside, and the lifetime that the gasket can perform its function in various conditions and environments. For example, when a high-temperature and low-temperature or low-pressure and high-pressure fluid flow through a pipe, various shapes and properties of the pipe may be affected, such as expansion or contraction due to the state of the fluid. Confidentiality must be maintained, and further, yield point and resilience should be high. Further, since the gasket is not integrally molded with the flange, a guiding means is required to position the gasket at the correct position of the flange during installation.

Korean Registered Utility Model No. 20-0410284 (Registered on February 27, 2006)

The technical problem of the present invention is to solve the above problems.

Specifically, it is intended to provide a gasket having a high yield point and resilience even under various conditions and environments, such as shrinkage, expansion or deformation, and thus has a high life.

Another object of the present invention is to provide a gasket which is disposed at an accurate position and is more airtight and tightly sealed.

According to an aspect of the present invention, there is provided an apparatus for manufacturing a semiconductor device, the apparatus comprising: a semiconductor substrate having an annular shape and having a first concave portion formed at a first predetermined height along a circumferential direction on a top surface thereof and a second concave portion formed at a second predetermined height, A third concave portion formed at a first predetermined height along the circumferential direction and a fourth concave portion formed at a second predetermined height are formed in an intersection so that a cross section of the second concave portion and the fourth concave portion is arc- A gasket including an outer ring portion formed on an outer side, the gasket having a curvature or a plurality of bends.

According to the present invention, airtightness is ensured in the tube through the first concave portion and the second concave portion formed so as to intersect with each other.

Further, the sealing member exhibits excellent sealing performance due to the high restoring force due to the first recessed portion and the third recessed portion formed at the first predetermined height, the second recessed portion formed at the second predetermined height, and the fourth recessed portion.

The first concave portion is formed on the top and bottom surfaces at a first predetermined height, the fourth concave portion is formed at a second predetermined height, the third concave portion is formed at a first predetermined height, and the third concave portion is formed at a second predetermined height 2 concave portions are formed to intersect with each other and have high compressibility and elasticity.

Further, the second concave portion and the fourth concave portion can be provided with a serrated end having a sealing function, so that sealing can be performed more effectively.

Further, it is easy to provide the outer ring portion on the outer side of the gasket so that the gasket is positioned at the correct position.

Further, the surface of the gasket can be graphitically coated to provide a gasket which can be used for a long time under various conditions and environments.

Accordingly, it is possible to provide a gasket that maintains airtightness even in various forms and properties and can be used for a long time, thereby increasing efficiency.

Finally, there is an effect that the production amount for the gasket of the present invention can be increased.

1 is a cross-sectional view illustrating a gasket installed in a tube according to an embodiment of the present invention.
2 is a partially cutaway perspective view showing a gasket according to an embodiment of the present invention.
3 is a cross-sectional view of a gasket according to a first embodiment of the present invention.
4 is a cross-sectional view showing a gasket according to a second embodiment of the present invention.
5 is a cross-sectional view showing a gasket according to a third embodiment of the present invention.
6 is a cross-sectional view showing a gasket according to a fourth embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Also, in order to clearly illustrate the present invention in the drawings, portions not related to the present invention are omitted, and the same or similar reference numerals denote the same or similar components.

The objects and effects of the present invention can be understood or clarified naturally by the following description, and the objects and effects of the present invention are not limited only by the following description.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 and 2, a gasket according to the present invention is disposed between a flange 2 and a flange 2 'and serves to maintain airtightness in the tube 1, 1, a circle, an ellipse, a square, or a hexagon. In the present invention, a circular gasket will be described as an example. The gasket to be described later may be made of various materials such as rubber, silicone, and metal, but it is preferable that the gasket is made of a material capable of maintaining excellent compression and restoring force under high pressure and high temperature conditions. According to one embodiment, it may be made of a material such as stainless steel or Inconel. In detail, it may be made of stainless steel 347 or Inconel 825 or the like. Further, the surface of the gasket may be coated with graphite.

In the drawing, IN indicates the inner direction of the gasket, and OUT indicates the outer direction when the cross section of the gasket is viewed.

The gasket of the present invention may have a first concave portion 110 and a second concave portion 120 on an upper surface thereof and a third concave portion 210 and a fourth concave portion 220 on a lower surface thereof .

Hereinafter, a gasket according to an embodiment of the present invention will be described in detail with reference to FIGS. 3 to 6. FIG.

3 is a cross-sectional view of a gasket according to a first embodiment of the present invention.

The gasket 100 according to the first embodiment of the present invention is formed in a ring shape and has a first recess 110 and a second recess 120 on the upper surface with respect to a center line M when viewed in cross section, And a third concave portion 210 and a fourth concave portion 220 on the lower surface.

The gasket 100 may be provided in the size and shape corresponding to the flanges 2, 2 'since it is located between the flange 2 and the flange 2' and is airtight. In detail, the gasket 100 may be provided in an annular shape. More specifically, the gasket 100 may be provided in a shape such as a circular ring, a ring, or a rim.

The gasket 100 has an annular shape and includes a first recess 110 and a second recess 120 on an upper surface thereof and a third recess 210 and a fourth recess 220 on a lower surface thereof. And may be formed to be offset from each other. Specifically, the gasket 100 has a first concave portion 110 forming an arc of a first predetermined height T1 and a second concave portion 120 forming an arc of a second predetermined height T2 on an upper surface thereof, And a fourth recess 220 forming an arc between the third recess 210 forming the arc of the first predetermined height T1 and the second predetermined height T2 is formed in the circumferential direction . More specifically, the first predetermined height T1 is greater than the second predetermined height T2, and the first concave portion 110 formed on the upper surface and the fourth concave portion 220 formed on the lower surface correspond to each other, And the third concave portion 210 formed on the bottom surface of the second concave portion 120 are formed to correspond to each other. More specifically, the center of the arc of the fourth concave portion 220 formed at the midpoint of the arc of the first concave portion 110 formed on the upper surface of the gasket 100 and the center of the arc of the second concave portion 120, 3 The center of the arc of the recess 210 can be formed at a position orthogonal to the center line M with respect to the center.

The arcs of the first concave portion 110, the second concave portion 120, the third concave portion 210 and the fourth concave portion 220 may have a circular arc shape or an arc shape of an ellipse . The second concave portion 120 and the fourth concave portion 220 may have a flat shape having a second predetermined height T2 of zero.

Therefore, the gasket 100 is inserted through the first recess 110, the second recess 120, the third recess 210, and the fourth recess 220, respectively, of the flanges 2, 2 ' It is more airtight by concentrating the load. The first recess 110 and the fourth recess 220 correspond to the upper and lower surfaces respectively and the second recess 120 and the third recess 210 correspond to the upper and lower surfaces of the flange 2 , 210 ', and 220', which are distorted by the upper and lower pressures, are excellent in sealing performance with a high restoring force for maintaining the original state of each other. The pressing force on the surfaces of the flanges 2 and 2 'can be increased by the arc shape of the second predetermined height T2 of the second concave portion 120 and the fourth concave portion 220. [ Therefore, the pressure of the fluid flowing in the flange 2, 2 'or the pipe 1 can prevent the gasket 110 from being moved or deformed out of the flanges 2, 2'. In detail, since the first concave portion 110 and the second concave portion 120 are formed on the upper surface, and the third concave portion 210 and the fourth concave portion 220 are formed on the lower surface, When the fluid in the relatively high-pressure pipe 1 escapes to the outside, the airtightness in the pipe 1 is excellent due to the restoring force and the pressing force of the recesses 110, 120, 210 and 220, 210, and 220 are not moved or deformed due to the fluid, the lifetime of the gasket 100 may increase.

4 is a cross-sectional view of a gasket according to a second embodiment of the present invention.

The gasket 100 according to the second embodiment of the present invention may further include the outer ring part 300 on the outer circumferential surface of the gasket 100 of the first embodiment. The outer ring portion 300 is formed along the outer circumferential surface of the gasket 100 and may be formed in an annular shape. In detail, the outer ring portion 300 is formed to protrude along the outer circumferential surface of the gasket 100 and may be provided in the form of a ring, a ring, or a frame. The outer ring portion 300 serves to guide the gasket 100 positioned between the flange 2 and the flange 2 'to be positioned at an accurate position. In detail, the flange 2 and the flange 2 'can be fastened to each other with bolts and nuts arranged along the circumferential direction of the flanges 2, 2'. Here, the outer surface of the outer ring portion 300 is brought into contact with the inner surface of the bolt passing through the flange 2 and the flange 2 'so that the outer surface of the flange 2 and the flange 2' (100). The outer ring portion 300 may be formed to have a saw-tooth shape in the cross section of the upper surface and the lower surface. However, in the present invention, the upper surface and the lower surface of the outer ring portion 300 will be described as an example. In another example, the outer ring portion 300 may be formed such that a groove through which the bolt can be passed is formed so that the bolt is passed through the groove, thereby guiding the gasket 100 to the correct position of the flange 2, 2 '. As another example, the outer ring portion 300 may have flanges 2, 2 'by locating the outer surface of the bolt passing through the flanges 2, 2' on the side of the semicircular or arcuate shape, So that the gasket 100 is guided to the correct position of the gasket 100. Therefore, the gasket 100 can be fixed at the correct position without departing from the sealing position by the outer ring portion 300.

5 is a cross-sectional view of a gasket according to a third embodiment of the present invention.

The gasket 100 according to the third embodiment of the present invention is formed in a ring shape and has a first concave portion 110 and a second concave portion 120 on an upper surface with respect to a center line M, And the third concave portion 210 and the fourth concave portion 220 are provided on the lower surface and the sawtooth ends 121 and 221 are formed on the second concave portion 120 and the fourth concave portion 220 As shown in FIG.

The end portions 121 and 221 may be formed along the circumferential surface of the gasket 100 in the second recess 120 and the fourth recess 220 located on the upper and lower surfaces and may be formed in an annular shape. In detail, the end portions 121 and 221 may be formed to have a plurality of serrations in one second recess 120 and the fourth recess 220, and the plurality of second recesses 120 and Or may be formed in the entirety of the fourth recess 220 or only a part of the second recess 120 and the fourth recess 220. More specifically, the end portions 121 and 221 are provided in a plurality of saw-teeth shapes, and each of the mountain portions of the teeth has a sealing function, so that the sealing force and airtightness of the gasket 100 can be increased. The end portions 121 and 221 increase the adhesion force and the frictional force between the flanges 2 and 2 'so that the gasket 100 can be fixed at the correct position have.

6 is a cross-sectional view of a gasket according to a fourth embodiment of the present invention.

The gasket 100 according to the fourth embodiment of the present invention may further include the outer ring portion 300 on the outer circumferential surface of the gasket 100 of the third embodiment. The outer ring portion 300 may be formed along the outer circumferential surface of the gasket 100 and may have an annular shape. In detail, the outer ring portion 300 is formed to protrude along the outer circumferential surface of the gasket 100 and may be provided in the form of a ring, a ring, or a frame. The outer ring portion 300 serves to guide the gasket 100 positioned between the flange 2 and the flange 2 'to be positioned at an accurate position. In detail, the flange 2 and the flange 2 'can be fastened to each other with bolts and nuts arranged along the circumferential direction of the flanges 2, 2'. Here, the outer surface of the outer ring portion 300 is brought into contact with the inner surface of the bolt passing through the flange 2 and the flange 2 'so that the outer surface of the flange 2 and the flange 2' (100). In another example, the outer ring portion 300 may be formed such that a groove through which the bolt can be passed is formed so that the bolt is passed through the groove, thereby guiding the gasket 100 to the correct position of the flange 2, 2 '. As another example, the outer ring portion 300 may have flanges 2, 2 'by locating the outer surface of the bolt passing through the flanges 2, 2' on the side of the semicircular or arcuate shape, So that the gasket 100 is guided to the correct position of the gasket 100. Therefore, the gasket 100 can be fixed at the correct position without departing from the sealing position by the outer ring portion 300.

The gasket 100 according to each embodiment of the present invention may be formed by graphite coating the surface. The graphite is a carbon fiber which is once again placed at a high temperature and can be prevented from being rusted or discolored due to rust generated by the fluid flowing inside the pipe 1 through the graphite coating. In detail, by performing graphite coating on the gasket 100, it is possible to prevent the gasket 100 from being broken or deformed, and the gasket 100 having excellent abrasion resistance can be manufactured. Therefore, it is possible to provide the gasket 100 which can be used for a long time.

It will be apparent to those skilled in the art that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. It should be understood that the present invention belongs to the scope of the claims.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. But is not limited thereto.

1: tube 2, 2 ': flange
100: gasket 110: first recess
120: second concave portion 121: second end
210: third concave portion 220: fourth concave portion
221: fourth end portion M: center line

Claims (1)

Shaped,
A first concave portion formed on the upper surface at a first predetermined height along the circumferential direction; And a second concave portion formed at a second predetermined height,
A third concave portion formed at a bottom surface at a first predetermined height along a circumferential direction; And a fourth concave portion formed at a second predetermined height,
The second concave portion and the fourth concave portion may be arcuate and may have a predetermined curvature or a plurality of curvatures,
And an outer ring portion formed on the outer side of the gasket.

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