KR20190018957A - Solution providing system - Google Patents

Abstract

A solution providing system comprises: a step of identifying a problem; a step of investigating a solution; a step of inputting the solution; a step of storing the solution; and a step of outputting the solution. The solution providing system solves the problems through a previously stored solution information or the newly inputted solution information after identifying the problem through each step.

Description

Solution Providing System {SOLUTION PROVIDING SYSTEM}

The present invention relates to a system that automatically provides a corresponding optimized solution when a problem occurs.

There are skilled workers in each industry to solve the given problem. The skilled workforce solves problems with the knowledge and know-how they have acquired when problems arise in their field.

This knowledge and know-how is often not delivered to younger people, and many skilled workers are leaving the company. In this case, there is a considerable loss for the company.

It is an object of the present invention to provide a database of information on a process for solving a problem by a user of the apparatus and to provide an optimized solution when the problem subsequently occurs.

The solution providing system according to an embodiment of the present invention may include an input device, an output device, a communication device, and a storage device in which solution information is stored.

Wherein the solution providing system includes: a problem identifying step of receiving first problem information including information on a problem occurring in an external apparatus through the communication apparatus; a step of determining whether there is solution information corresponding to the first problem information among the solution information A solution input step of inputting solution information corresponding to the first problem information through the input device when the solution information corresponding to the first problem information is not stored in the storage device; And a first solution output step of outputting first output information corresponding to the solution information additionally stored in the solution storing step through the output device .

The solution providing system according to an embodiment of the present invention is characterized in that when the solution information corresponding to the first problem information is stored in the storage device, the second output information corresponding to the stored solution information And a second solution output step of outputting the second solution.

The input device may be a means for the user of the external device to solve the problem.

The solution input step may include an automatic conversion step of converting the process of solving the problem by the user into the solution information corresponding to the first problem information in real time.

The external device may be a semiconductor production device.

The solution providing system according to an embodiment of the present invention receives second problem information including information on a problem occurred in the external device through the communication device in the problem identification step, The method comprising: determining whether there is solution information corresponding to the second problem information among the first problem information and the second problem information, and when the solution information corresponding to the second problem information is stored in the storage device, Can receive the additional solution information corresponding to the additional solution information.

The solution providing system according to an embodiment of the present invention may further include a solution comparing step of comparing certain elements to determine which of the existing solution information and the additional solution information is more suitable for solving the second problem information .

The specific elements may include information on the time, cost, number of work steps, or the result of resolving the second problem information.

The solution providing system according to an embodiment of the present invention may include a step of starting a operation of a device by a user, a step of providing a plurality of operation manuals corresponding to each of a plurality of operation steps for operating the device to the user, Determining whether the user complies with the plurality of business manuals, and providing feedback to the user if the user does not comply with at least one of the plurality of business manuals.

In one embodiment of the invention, the feedback may be to provide a warning message to the user.

In an embodiment of the invention, the feedback may be to stop the operation of the device.

The plurality of operation manuals may be updated in real time according to the details of the operation of the device by the user or other users using the device.

According to an embodiment of the present invention, even a novice can solve the problem as efficiently as a skilled man solves the problem.

1 is a perspective view of a semiconductor manufacturing facility including a substrate processing apparatus according to the related art.
2 is a plan view of the semiconductor manufacturing facility shown in Fig.
3 illustrates operation of a solution providing system according to an embodiment of the present invention.
4 illustrates a solution providing system according to an embodiment of the present invention.
5 is a flowchart illustrating a solution providing method of a solution providing system according to an embodiment of the present invention.
6 is a flowchart illustrating a solution providing method of a solution providing system according to an embodiment of the present invention.
7 is a flowchart illustrating a solution providing method of a solution providing system according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

In the drawings, the proportions and dimensions of the components are exaggerated for an effective explanation of the technical content. "And / or" include all combinations of one or more of which the associated configurations can define.

Means that a feature, number, step, operation, element, component, or combination thereof is intended to designate the presence of stated features, integers, steps, operations, Elements or parts thereof, or combinations thereof, without departing from the spirit and scope of the invention.

FIG. 1 is a perspective view of a semiconductor manufacturing facility 10 according to one example of the related art of the present invention, and FIG. 2 is a plan view of the semiconductor manufacturing facility 10 shown in FIG. Prior to the description of the solution supply system according to the embodiment of the present invention, a semiconductor manufacturing facility 10 that can be applied to the embodiment of the present invention will be described with reference to Figs. That is, the semiconductor manufacturing equipment 10 described in FIGS. 1 and 2 is related to the technology for assisting the understanding of the present invention. 1 and 2 illustrate a semiconductor manufacturing facility as an example of an external device 10 to which a solution providing system SS according to an embodiment of the present invention can be applied, but the present invention is not limited thereto.

1 and 2, the semiconductor manufacturing facility 10 is a facility for performing a photolithography process on a substrate. The semiconductor manufacturing facility 10 includes a storage unit 600, a process processing unit 200, a substrate transfer unit 700 ), And an exposure unit 800.

The storage unit 600 may include a plurality of load ports 610, an index robot 620, and a first buffer 630. The load port 610 accommodates the substrate and the substrate accommodated in the load port 610 is transferred to the first buffer 630 side by the index robot 620. The index robot 620 moves along the feed rail.

The process processing unit 200 may include a plurality of processing units 210, 220, and 230 that perform a predetermined process on the substrate.

The transfer robot 300 transfers the substrate between the first buffer 630 and the processing unit or between the processing units.

The plurality of processing units include a coating unit 210 for performing a coating process of applying a photosensitive liquid such as a photoresist on a substrate, a developing unit 220 for performing a developing process on the substrate on which the exposure process is completed, And a bake unit 230 for performing the bake unit 230.

The application unit 210 and the development unit 220 have a spin head that supports and rotates the substrate and a nozzle that discharges the chemical solution toward the substrate supported on the spin head. Therefore, after the development unit 220 supports the substrate on the spin head, the development process is performed on the substrate by supplying the developer to the substrate side. The coating unit 210 supports the substrate on the spin head, To perform a coating process on the substrate.

Each of the bake units 230 has a bake plate 231 and a cooling plate 232. The bake plate 231 heats the substrate, and the cooling plate 232 cools the substrate heated at the bake plate 231 to an appropriate temperature.

The transfer robot 300 receives the substrate from the first buffer 630 and transfers the substrate to the processing units constituting the process processing unit 200. The transfer robot 300 transfers the substrate along the loader 310.

The substrate transfer unit 700 includes a second buffer 710. [ The second buffer 710 transfers the substrate on which the photoresist film is formed by the coating unit 210 to the exposure unit 800. The exposure unit 800 includes a plurality of exposure units (not shown) for performing an exposure process. The substrate having been exposed in the exposure unit 800 is again transferred to the second buffer 710 and the substrate transferred to the second buffer 710 is transferred by the transfer robot 300 to the bake unit 230 and the developing unit 220 side.

As described, the transfer robot 300 puts the substrate into the processing units 210, 220, and 230. Each processing unit 210, 220, 230 processes the loaded substrate based on the process recipe of each substrate, and the transfer robot 300 takes out the processed substrate from the processing units 210, 220, 230.

The maintenance target unit among the processing units 210, 220, and 230 may be set to the restricted mode. In one embodiment, the maintenance target unit is set to the first restriction mode or the second restriction mode depending on the presence or absence of the substrate in the unit. The processing units 210, 220, and 230 are limited in whether the substrates can be loaded and unloaded according to the set mode.

Various problems may arise in various parts during the processing of the semiconductor manufacturing equipment 10 using such a method. When a problem occurs, the system for controlling the facility 10 must solve the above-mentioned problem on its own, or the manager of the semiconductor manufacturing facility 10 must take measures to solve the above-mentioned problem.

When a skilled administrator solves the above-mentioned problem, it can be solved efficiently.

On the other hand, when the novice administrator tries to solve the above-mentioned problem, it often fails to solve the problem efficiently. For example, it can take a lot of time to solve a problem, cost a lot, or fail to solve a problem.

In this way, when a problem occurs in the semiconductor manufacturing facility 10 or the like, the solution providing system SS according to an embodiment of the present invention can receive information on the problem.

FIG. 3 illustrates the operation of the solution providing system SS according to an embodiment of the present invention. FIG. 4 illustrates a solution providing system SS according to an embodiment of the present invention.

When a problem occurs from the external apparatus 10 or the semiconductor manufacturing facility, the solution providing system SS receives the problem information IF-P including information on the problem, P) corresponding to the solution information (IF-S).

The solution providing system SS may include a communication device CM, a memory device MM, an input device IU, an output device OU, and a control device CC.

The communication device (CM) can receive information from an external device or transmit information to an external device by a wired communication method or a wireless communication method. In one embodiment of the present invention, the solution provision system SS may receive problem information IF-P via the communication device CM. Further, in one embodiment of the present invention, the solution providing system SS can transmit the solution information IF-S corresponding to the problem information IF-P via the communication device CM.

The wired communication method may include a communication method using a cable. The wireless communication method may include Bluetooth, Bluetooth, Wi-Fi, RF communication, Wideband Code Division Multiple Access (WCDMA), or a digital cellular telephone method according to the IMT-2000 standard. In one embodiment of the present invention, the communication device (CM) may be a modem.

The memory device (MM) may include volatile memory or non-volatile memory. The volatile memory may include DRAM, SRAM, flash memory, or FeRAM. The non-volatile memory may include an SSD or HDD.

Solution information (IF-S) is stored in the storage device (MM). The solution information (IF-S) may contain information that can solve various problems that may arise from the external device 10.

The input device IU may include a keyboard, a mouse, a microphone, or a camcorder. However, the present invention is not limited to this, and the input device IU may include all devices in which the user of the solution providing system SS inputs information to solve a problem.

While the user solves the problem via the input device IU, the solution providing system SS may store information corresponding to how the user solves the problem in the storage device MM. The storing process may be performed automatically or in real time.

The output device (OU) may include a display device or a speaker or the like. However, the present invention is not limited to this, and an output unit (OU) may be configured such that a user of the solution providing system (SS) grasps information on the problem, checks the situation while solving the problem, May include all means of verifying that this has been done.

The control device CC can control the operations of the communication device CM, the storage device MM, the input device IU, and the output device OU. For example, the control device CC may include a central processing unit (CPU).

5 is a flowchart illustrating a solution providing method (S10) of a solution providing system (SS) according to an embodiment of the present invention.

The solution providing method (S10) according to an embodiment of the present invention includes a problem determination step S100, a solution search step S200, a solution input step S300, a solution storage step S400, and a solution output step S510, S520).

It is possible to receive problem information IF-P including information on a problem occurring in the external device 10 via the communication device CM in the problem identification step S100.

It is possible to determine whether there is solution information corresponding to the received problem information IF-P among the solution information IF-S stored in the storage device MM in the solution search step S200.

If it is determined in the solution search step S200 that the solution information IF-S corresponding to the received problem information IF-P is not stored in the storage device MM, in the solution input step S300 And receives solution information (IF-S) corresponding to the received problem information (IF-P) from the user through the input device IU.

In the solution storage step S400, the input solution information IF-S may be additionally stored in the storage MM.

In the first solution output step (S510), the first output information corresponding to the further input or stored solution information (IF-S) may be output through the output unit (OU). The first output information may be provided to the user or to an external device 10. [

If it is determined in the solution search step S200 that the solution information IF-S corresponding to the received problem information IF-P is stored in the storage MM, the second solution output step S520, The second output information corresponding to the stored solution information IF-S may be output through the output unit OU. The second output information may be provided to the user or to an external device 10. [

In one embodiment of the present invention, the solution input step S300 may include an automatic conversion step. In the automatic conversion step, the process by which the user solves the problem can be converted into the solution information IF-S in real time. The automatic conversion step can be controlled by a control device (CC) or the like.

6 is a flowchart showing a solution providing method (S20) of a solution providing system (SS) according to an embodiment of the present invention.

The solution providing method S20 includes a problem identification step S101, a solution search step S201, a solution input step S301 and S302, a solution storing step S401, a solution comparison step S402, and a solution output step S501 , S502).

It is possible to receive problem information IF-P including information on a problem occurring in the external device 10 via the communication device CM in the problem identification step S101.

It is possible to determine whether there is solution information corresponding to the received problem information IF-P among the solution information IF-S stored in the storage MM in the solution search step S201.

If it is determined in the solution search step S201 that the solution information IF-S corresponding to the received problem information IF-P is not stored in the storage MM, the first solution input step S301 (IF-S) corresponding to the received problem information IF-P from the user through the input device IU.

In the solution storage step S401, the input solution information IF-S may be additionally stored in the storage MM.

In the first solution output step S501, the first output information corresponding to the further input or stored solution information IF-S may be outputted through the output unit OU. The first output information may be provided to the user or to an external device 10. [

If it is determined in the solution search step S201 that the solution information IF-S corresponding to the received problem information IF-P is stored in the storage device MM, the second solution input step S302, (IF-S) corresponding to the received problem information IF-P through the input device IU from the user. In an embodiment of the present invention, the second solution input step S302 may be substantially the same as the first solution input step S301.

In the solution comparison step S402, specific elements are compared between the solution information IF-S input in the second solution input step S302 and the solution information IF-S stored in the storage device MM do. The particular elements may include time, cost, number of work steps, or resolution results, etc. to solve the problem. Therefore, it is possible to compare and determine which of the existing solution information (IF-S) and the newly inputted solution information (IF-S) is more suitable for problem solving through the solution comparing step (S402).

In the second solution output step S502, the second output information including the more appropriate solution information IF-S among the compared solution information IF-S may be outputted through the output device OU. The second output information may be provided to the user or to an external device 10. [

The solution providing system SS according to an embodiment of the present invention can perform a process navigation function in the course of work. Therefore, even the novice or untrained person performing the task for the first time can work efficiently.

For a more detailed description of the present invention, the present invention is compared with a navigation system for a vehicle as shown in Table 1 below.

division Car Navigation In the present invention (business navigation) Base Maps on terrain, roads The process corresponding to each task Rule Traffic law Business rule option Highway availability, intermediate way, fast way, short way Work time, number of work steps, work cost, process rate Decision body The driver himself company purpose Safety, fast route guidance, traffic regulations Uniform quality, maximum production

FIG. 7 is a flowchart illustrating a solution providing method (S30) of a solution providing system (SS) according to an embodiment of the present invention.

The solution providing method S30 may include a start step S1000, a business manual providing step S2000, a conformance check step S3000, a current state maintenance step S4100, and a feedback providing step S4200.

In the start step S1000, the user can start operation of the apparatus.

In the job manual providing step S2000, the solution providing system SS may provide a plurality of job manuals corresponding to each of a plurality of job steps for operating the apparatus.

In the compliance checking step (S3000), the solution providing system (SS) can confirm that the user complies with the provided business manuals.

If it is determined in step S3000 that the user observes the provided business manuals, the current state can be maintained (S4100).

On the other hand, if it is determined in step S3000 that the user does not comply with the provided business manuals, the process may proceed to the feedback providing step S4200.

In the feedback providing step S4200, if the user does not comply with at least one of the manuals provided for use, the user can be provided with feedback.

The feedback provided in the feedback providing step S4200 may be a warning message displayed on the monitor, a warning message provided through the speaker, or a warning sound. Also, the feedback may be that the operation of the device is automatically stopped.

The business manuals provided by the solution providing system (SS) can be updated in real time according to the details of the operation of the device by the user. That is, the solution providing system (SS) can remember the result of operating the device by the user, compare it with the previous data, and update it automatically if there is a point in time, cost, efficiency, or effectiveness.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined in the following claims There will be. In addition, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, and all technical ideas which fall within the scope of the following claims and equivalents thereof should be interpreted as being included in the scope of the present invention .

SS: Solution providing system CM: Communication device
MM: storage device IU: input device
OU: Output device CC: Control device

Claims (12)

A solution providing system including an input device, an output device, a communication device, and a storage device storing solution information,
A problem determination step of receiving first problem information including information on a problem occurring in an external device through the communication device;
A solution searching step of determining whether there is solution information corresponding to the first problem information among the solution information;
A solution input step of receiving solution information corresponding to the first problem information through the input device when the solution information corresponding to the first problem information is not stored in the storage device;
A solution storing step of additionally storing the inputted solution information in the storage device; And
And a first solution output step of outputting first output information corresponding to the solution information additionally stored in the solution storing step through the output device. The method according to claim 1,
And a second solution output step of outputting second output information corresponding to the stored solution information through the output device when the solution information corresponding to the first problem information is stored in the storage device Delivery system. 3. The method of claim 2,
Wherein the input device is a means for the user of the external device to solve the problem. The method of claim 3,
Wherein the solution input step includes an automatic conversion step of converting the solution of the problem by the user into the solution information corresponding to the first problem information in real time. The method according to claim 1,
Wherein the external device is a semiconductor production device. The method according to claim 1,
Receiving second problem information including information on a problem occurring in the external device through the communication device in the problem identification step,
Determining whether there is solution information corresponding to the second problem information among the solution information in the solution searching step,
Wherein the solution information input step further receives additional solution information corresponding to the second problem information when the existing solution information corresponding to the second problem information is stored in the storage device. The method according to claim 6,
Further comprising a solution comparison step of comparing specific elements to determine which of the existing solution information and the additional solution information is more suitable for solving the second problem information. 8. The method of claim 7,
Wherein the specific elements include information on time, cost, number of job steps, or resolution result of resolving the second problem information. The user starting operation of the apparatus;
Providing a plurality of task manuals corresponding to each of a plurality of task steps for operating the device to the user;
Confirming that the user complies with the plurality of business manuals; And
And providing feedback to the user if the user does not comply with at least one of the plurality of business manuals. 9. The method of claim 8,
Wherein the feedback provides an alert message to the user. 9. The method of claim 8,
Wherein the feedback stops the operation of the device. 9. The method of claim 8,
Wherein the plurality of business manuals can be updated in real time according to a history of the user or other users using the device operating the device.

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