KR20180124237A - Micro Mirror Array and Manufacturing Method Thereof - Google Patents

Abstract

The present invention relates to a micromirror array for a floating display without image distortion, and a manufacturing method thereof. The method according to an aspect of the present invention comprises the steps of: forming a mirror surface on a hard substrate; laminating a soft substrate to the hard substrate having a mirror surface formed thereon; bonding a plurality of substrates on which the hard substrate and the soft substrate are laminated; cutting the bonded substrates to manufacture a primary micromirror array; forming an additional mirror surface on the manufactured primary micromirror array; bonding a plurality of primary micromirror arrays having the additional mirror surfaces formed thereon; and cutting the bonded primary micromirror arrays.

Description

[0001] Micro-mirror array and manufacturing method thereof [0002]

The present invention relates to a micromirror array and a method of manufacturing the same, and more particularly, to a micromirror array used in a floating display and a method of manufacturing the same.

With the development of the information society, the demand for display devices is increasing in various forms with the increase of multimedia contents consumption.

In addition, research on digital signage that uses a display device for various purposes such as marketing, advertisement, broadcasting, and information provision from the outside is increasing.

On the other hand, studies on the similar hologram method, which has a similar effect to a hologram for viewing a three-dimensional image using a semi-transmissive screen and a multi-view image, are increasing.

As one of such pseudo hologram systems, a half mirror system has been proposed.

FIG. 1 schematically shows an example of a half-mirror type display, and shows an example applied to a performance stage.

Referring to FIG. 1, a half mirror type display provides a stereoscopic image by using a half mirror that transmits a part of light and reflects a part of the light.

Half mirrors arranged at an angle of 45 degrees reflect the image displayed on the display, and a virtual image formed behind the half mirror can be perceived as being displayed on the front of the user.

However, the anti-mirror method has a problem that it is impossible to perform user interaction with the back-lift image and can be applied only to a limited use scene such as a performance stage with a low stereoscopic effect.

In addition, there is a problem that the stereoscopic feeling is felt only when the virtual image inside the mirror is lowered to the actual sensation level and the backstage is distant from the actual level.

Figure 2 illustrates a conceptual diagram of a floating display.

2, the floating display includes a display 150 for displaying an image and a micro mirror array 100 (not shown) for reflecting the image displayed on the display 150 in a direction opposite to the direction in which the display 150 is disposed. ).

Unlike displays, which are typically placed vertically with respect to the floor or the ground, table-top displays are horizontally oriented with respect to the floor or the ground, Can be implemented.

In addition, the micro mirror array 100 may be arranged in the horizontal direction. The micromirror array 100 can reflect the image displayed on the display 150 disposed on the lower side to the upper side in the direction opposite to the direction in which the display 150 is disposed to implement a folating image 170 have.

The micro mirror array 100 may reflect an original image displayed on the display 150 and image a floating image 170 on a virtual surface symmetrical with respect to the micro mirror array 100 .

The Half Mirror described with reference to FIG. 1 can not be interacted with the user due to the back-lift image, and can be applied only in a situation limited to a low stereoscopic effect.

However, the floating system according to an embodiment of the present invention has an effect of realizing a high level of realism of an image because the image is actually formed in the space, and a three-dimensional effect can be felt only by its own image even though it is 2D. Also, it is possible to interact with the user through the front flotation image.

Therefore, it can be expanded to use scenes in the form of a digital signage area and a table-top area.

Figs. 3 and 4 are the drawings referred to in the description of the floating display.

3 is a diagram referred to explain the principle of reflex reflection, which is one of the principles used in a floating display.

Referring to FIG. 3, light incident on an optical element such as a mirror cube is reflected on three planes and returns to a position where light originally originated.

This phenomenon is called Retro-Reflecting.

This technology is also used in retroreflectors to reflect traffic lights at automobile headlights at night and to identify traffic signs without additional illumination.

Floating display can generate images in space by applying and implementing a retro-reflection phenomenon with an optical component such as a micro mirror array (Micro Mirror Array).

Particularly, when a floating display is implemented by using the characteristics of a mirror, there is an advantage that a picture quality is good since a lens or a mirror is not used. In addition, it is easy to implement the table-top method, and it is possible to cope with 1: 1 video.

Conventionally, a square hole is formed in a wafer and a mirror is formed in the wall of the hole. Alternatively, a micro mirror array necessary for realizing a floating image is constructed by cutting a thin glass mirror to a very narrow width and combining the same again.

4 illustrates a micro-mirror array in the form of a micro-hole.

4 illustrates a micromirror array in which a microhole is formed on a wafer and a mirror surface is formed on a wall surface of a microhole. As shown in FIG. 4, When a micro mirror array using reflection of two planes other than microcubes is used, an image can be imaged at a symmetrical position of the original image based on the micro mirror array. By doing this, you can float the image in an empty space.

In consideration of the resolution of an image to be formed, a micro-mirror array in the form of a microhole of FIG. 4 must have a plurality of square microholes at a level of several hundreds of micrometers.

In this case, it is necessary to make a mirror surface of a level that can form a clear image in a hole, but it is very difficult to obtain such a quality.

In addition, fabrication using various semiconductor processes has been tried, but the yield is so low that it can not cope with a large size and a low price.

Further, in order to stably form a microhole, a predetermined gap is required between the microholes. For example, a space almost equal to the size of a microhole is required between an adjacent microhole and a microhole. Therefore, a region where a mirror surface can not be formed occurs between microholes, and when reflection occurs in this region, a loss occurs and efficiency is reduced.

5A to 5C are diagrams referred to the description of a method of manufacturing a two-layer type micro mirror array in such a manner that thin glass mirrors are cut into very narrow widths and then combined again.

5A, aluminum (Al) is coated on a glass 500 having a thickness of several hundreds of micrometers to form a mirror surface 510, which is cut along a cutting line 511 to a width of several hundreds of um.

Thereafter, as shown in FIG. 5B, the plate is rotated by 90 degrees and then bonded to produce a plate. That is, the pieces are cut and joined together to produce a plate.

As shown in FIG. 5C, the two plate plates 540 and 550 are crossed at 90 degrees with respect to each other to arrange a two-layered micromirror array.

Such a two-layer type micromirror array can produce the same effect as the micro-mirror array of the microhole type of FIG.

In this structure, it is possible to obtain a relatively improved yield relative to the structure of the microhole. However, in order to cope with the mass production, the yield is low, and it is proved that it is not suitable for a large-sized and low-priced product.

In addition, while using two plates 540 and 550, there is a problem in that the ratio of light loss is increased and the light efficiency is reduced to less than half.

For example, the light that is incident on the surface of the first layer plate 540 where the mirror surface is formed in the first direction is not reflected to the mirror surface.

In addition, the light entering the surface of the second layer plate 550 on which the mirror surface is not formed in the second direction is not reflected on the mirror surface.

Thus, a two-layered micro mirror array in which two plates 540 and 550 are crossed at 90 degrees with each other is formed on the mirror surface in each of two plates 540 and 550 Light which is not reflected is generated, and thus efficiency may be lowered.

In order to improve the two-layer micromirror array illustrated in FIG. 5C, a film formed by laminating films having a mirror surface on one side of a transparent polymer film and cutting the film repeatedly twice is applied A method of implementing a one-layer type micro mirror array has been proposed.

In the process of manufacturing such a one-layer type micromirror array, a transparent transparent substrate that is transparent and easy to cut should be applied for the vertical cutting process.

However, such a soft substrate can be cut, but the flatness is reduced and there is irregularity on the surface, and the curvature and unevenness of such a surface are projected on the mirror surface to cause deformation of the image when the image is reflected, Thereby deteriorating image quality.

FIG. 6 is a diagram referred to for explanation of image distortion that may occur in a one-layer type micro mirror array. FIG.

FIG. 6A illustrates a case where there is no image distortion, and FIG. 6B illustrates a case where image distortion occurs due to minute concave and convex on the substrate during the fine cutting process.

In order to obtain a flat and uneven surface, a hard material such as PET should be applied. However, when such a material is used, it is difficult to cut the material due to the nature of fragile hard materials, .

The present invention relates to a mirror-type floating image, and a micromirror array suitable for high yield, large size, and low price, and a manufacturing method thereof are proposed.

It is an object of the present invention to provide a microarray for a floating display without image distortion and a manufacturing method thereof.

It is another object of the present invention to provide a microarray having a reduced manufacturing cost and a high yield, and a method of manufacturing the same.

According to an aspect of the present invention, there is provided a method of manufacturing a micro mirror array, comprising: forming a mirror surface on a rigid substrate; joining a soft substrate to a rigid substrate having a mirror surface formed thereon; Forming a first micro mirror array by cutting the bonded substrates to form a first micro mirror array; forming additional micro mirror arrays in the fabricated first micro mirror array; Attaching a plurality of primary micromirror arrays, and cutting the stapled primary micromirror arrays.

According to an aspect of the present invention, there is provided a method of manufacturing a micro mirror array, including: forming a prism pattern on a substrate; forming a mirror surface on the prism pattern surface; Stacking the plurality of substrates, and cutting the stacked substrates in the vertical direction.

According to one aspect of the present invention, there is provided a micromirror array including a first transparent substrate, a first prism pattern formed on the first transparent substrate, a first mirror surface formed on the first prism pattern, And a second substrate including a second transparent substrate, a second prism pattern formed on the second transparent substrate, and a second mirror surface formed on the second prism pattern, wherein the second substrate is stacked on the first substrate, .

According to at least one of the embodiments of the present invention, it is possible to manufacture a micromirror array with high yield and high efficiency at low cost.

In addition, according to at least one of the embodiments of the present invention, a microarray for a floating display without image distortion can be manufactured.

Meanwhile, various other effects will be directly or implicitly disclosed in the detailed description according to the embodiment of the present invention to be described later.

1 schematically shows an example of a half mirror type display.
Figure 2 illustrates a conceptual diagram of a floating display.
Figures 3 and 4 are views referenced in the description of a floating display.
5A to 5C are views referred to the description of a method of manufacturing a two-layered micro mirror array.
FIG. 6 is a diagram referred to for explanation of image distortion that may occur in a one-layer type micro mirror array. FIG.
7 is a flowchart of a method of manufacturing a micro mirror array according to an embodiment of the present invention.
8 to 12 are views referred to the description of a method of manufacturing a micromirror array according to various embodiments of the present invention.
13 is a view illustrating a micro mirror array according to an embodiment of the present invention.
14 is a flowchart of a method of manufacturing a micro mirror array according to an embodiment of the present invention.
FIGS. 15A through 15D are views referred to the description of a method of manufacturing a micro mirror array according to various embodiments of the present invention.
16 to 20 are views illustrating a micro mirror array according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it is needless to say that the present invention is not limited to these embodiments and can be modified into various forms.

In the drawings, the same reference numerals are used for the same or similar parts throughout the specification.

FIG. 7 is a flowchart illustrating a method of fabricating a micromirror array according to an embodiment of the present invention, and FIGS. 8 to 12 are views referencing a method of fabricating a micromirror array according to an embodiment of the present invention.

Referring to FIGS. 8A and 8B, a mirror surface 810 can be formed on a rigid substrate 801 (S710).

Here, the hard substrate 801 may be any one of polyethylene terephthalate (PET), polycarbonate (PC), and cycloolefin resin (COP). Alternatively, transparent hard substrates other than PET, PC, and COP may be used.

In addition, the mirror surface forming step S710 may form the mirror surface 810 by coating the hard substrate 801 with a metal material.

The metal material may be a material having a high reflectivity. For example, the metal material may be any one of aluminum, lead, silver, zinc, and tin.

Meanwhile, the soft substrate 802 may be joined to the rigid substrate 801 on which the mirror surface 810 is formed (S720).

Referring to FIG. 8A, the flexible substrate 802 may be joined to the mirror surface 810 side of the rigid substrate 801 on which the mirror surface 810 is formed.

Alternatively, referring to FIG. 8B, the soft substrate 802 may be joined to the rigid substrate 801 side of the rigid substrate 801 on which the mirror surface 810 is formed.

Meanwhile, the soft substrate may be any one of polyvinyl chloride (PVC), polyethylene (PE), and ethylene vinyl acetate (EVA). Alternatively, a transparent soft substrate such as urethane or acrylic may be used.

9 shows a sectional structure of a substrate (reflective film) for a micro mirror array proposed in the present invention.

9A, a substrate on which the hard substrate 801 and the soft substrate 802 are laminated is formed of a soft transparent substrate 802, a hard transparent substrate 801, and a mirror surface 810 in this order It may have a laminated structure.

9B, the substrate on which the hard substrate 801 and the soft substrate 802 are laminated is formed of a soft transparent substrate 802, a mirror surface 810, and a hard transparent substrate 801 in this order It may have a laminated structure.

As illustrated in FIGS. 8 and 9, the mirror surface 810 is formed on a thin rigid substrate 801, which is a hard material, to realize a mirror image on a flat surface without bending and unevenness, To the substrate 802.

At this time, the mirror surface 810 may be laminated so as to be positioned on the upper surface of the outermost hard substrate 801, or may be interposed between the rigid substrate 801 and the soft substrate 802.

It is also possible to form the mirror surface 810 after the rigid substrate 801 and the soft substrate 802 are aligned.

If the hard substrate 801 is too thick compared to the soft substrate 802, it is difficult to process the hard substrate 801. If the hard substrate 801 is too thin compared to the soft substrate 802, it is difficult to obtain a flat surface, It is possible to cause a problem that the defect rate increases.

For this reason, the thickness of the rigid substrate 801 is preferably 5 to 50 μm, and the thickness of the flexible substrate 802 is preferably 25 to 500 μm.

Referring to FIG. 10, a plurality of substrates 800 having the rigid substrate 801 and the soft substrate 802 bonded together may be attached (S730).

For example, it is possible to stack a plurality of substrates 800 on which the rigid substrate 801 having the structure illustrated in FIG. 9A or FIG. 9B is laminated with the soft substrate 802, have.

In operation S730, the hard substrate 801 and the flexible substrate 802 are joined together. In operation S730, the rigid substrate 801 and the flexible substrate 802 are connected to each other The substrates 800 may be bonded by optical bonding.

An air gap may be generated between the substrates 800 during the cementation, and the air gap may cause reflection of the incident light to cause a loss in the optical characteristics, but may cause distortion.

Thus, by bonding the substrates 800 by optical bonding, it is possible to prevent optical property loss and distortion due to the adhesion process.

The present invention can be applied to various optical bonding currently being studied. For example, an optical bonding resin may be applied to the substrate 800, a pattern may be formed, and then cured by ultraviolet rays or heat, and then cemented with another polymer film.

Referring to FIGS. 10 and 11, the primary micro mirror array 1000 can be manufactured by cutting the bonded substrates 800 (S740).

As shown in FIG. 10, the first micro mirror array 1000 can be manufactured by vertically cutting the bonded substrates 800 along a cutting line 811. The shape of all the primary micromirror arrays 1000 can be made uniform when the primary micromirror array 1000 is fabricated by repetitive vertical cutting.

Referring to FIG. 11, the primary micromirror array 1000 may include a mirror surface 1010 in the form of a stripe within the polymer film.

12, an additional mirror surface 1020 may be formed on the fabricated primary micromirror array 1000 (S750). For example, the additional mirror surface 1020 may be formed on a vertical cut surface along the cutting line 811 or on a surface corresponding to the opposite side of the vertical cut surface.

Meanwhile, a plurality of primary micromirror arrays 1000 formed with the additional mirror surface 1020 may be attached (S760). For example, one surface of a plurality of primary micromirror arrays 1000 may be coated with aluminum (Al), and aluminum (Al) coated primary micromirror arrays 1000 may be stacked and cemented.

Also in this case, a plurality of primary micromirror arrays 1000 formed with the additional mirror surface 1020 may be bonded by optical bonding.

Referring to FIG. 12, the micro-mirror array can be completed by cutting the bonded primary micro-mirror arrays 1000 along a cutting line 1021 (S770).

More preferably, the combined primary micromirror arrays 1000 may be cut perpendicularly along the cutting line 1021 to complete the micromirror array.

The method of manufacturing a micromirror array according to an embodiment of the present invention proceeds only with a well-known and high-yield process such as coating, stacking, cementing, and cutting on a hard transparent substrate and a soft transparent substrate.

Therefore, it is possible to relatively easily form a mirror grating surface of a tetragonal shape in the micromirror array, which is suitable for enlargement and cost reduction.

Further, by using a rigid transparent substrate and a soft transparent substrate in combination, both workability and image quality can be improved.

13 is a view illustrating a micro mirror array according to an embodiment of the present invention.

13 (a) and 13 (b), a micromirror array according to an embodiment of the present invention includes a transparent substrate portion 1300 and a transparent substrate portion 1300 formed on one layer of the transparent substrate portion 1300 Includes a plurality of mirror surfaces 1310 and 1320, and the plurality of mirror surfaces 1310 and 1320 may be in a lattice shape.

According to an embodiment, the plurality of mirror surfaces 1310 and 1320 may include a first surface 1310 and a second surface 1320 formed to be perpendicular to each other.

In addition, the micro mirror array may include a plurality of first surfaces 1310 formed parallel to one another.

In addition, the micro mirror array may include a plurality of second surfaces 1320 formed parallel to each other.

Accordingly, as shown in Fig. 13A, the lattice shape may be composed of a plurality of rectangles.

Meanwhile, it is preferable that the transparent substrate portion 1300 is formed in one layer. That is, the transparent substrate portion 1300 is formed as one layer, and mirror surfaces may be formed on the entire one of the layers.

13A to 13C, the micromirror array may be divided into a plurality of unit areas 1301 by a plurality of first surfaces 1310 and a plurality of second surfaces 1320.

One unit area 1301 may form two side surfaces 1310 and two side surfaces 1320.

Therefore, light incident on any one of the first surfaces 1310 as shown in (c) of FIG. 13 can be reflected on any one of the second surfaces 1320. [ Also, the reflected light may be reflected back on the second side 1320.

Alternatively, the light incident on any one of the second surfaces 1320 may be reflected on any one of the first surfaces 1310. Also, the reflected light may be reflected back on the first side 1310.

Therefore, in one unit area 1301, all of the four mirror surfaces 1310 and 1320 can be a mirror surface that first reflects light, and can be a mirror surface that reflects a second time, thereby increasing the efficiency .

That is, when the light emitted from the display is incident on any one of the two first surfaces 1310 and the two second surfaces 1320, the light-incident mirror surface can reflect light to the other mirror surface.

A mirror surface on which light is incident from any one of the mirror surfaces can reflect light to the outside of the micro mirror array.

Accordingly, the micromirror array can reflect light in a direction opposite to the direction in which the display is disposed, thereby realizing a floating image.

Therefore, by using two reflections on the two surfaces 1310 and 1320, an image can be imaged at a symmetrical position of the original image with reference to the micro mirror array. Accordingly, it is possible to float an image in an empty space. In addition, all the space can be used without a space left in the micromirror array, and the light efficiency can be increased because only one layer is used.

Hereinafter, a micromirror array of another embodiment and a method of manufacturing the same will be described in order to solve the difficulty of increasing the unit price and increasing the size due to the complicated process which was a problem of the conventional invention.

FIG. 14 is a flowchart illustrating a method of fabricating a micromirror array according to an embodiment of the present invention, and FIGS. 15A to 15D are views referencing a method of manufacturing a micromirror array according to various embodiments of the present invention.

In order to realize a floating image, it is necessary to form two mirror surfaces perpendicular to each other.

Referring to the drawings, a prism pattern 1502 may be formed on a substrate 1501 (S1410). The material of the substrate 1501 and the prism pattern 1502 may be the same or different. It is also possible to generate the substrate 1501 having the prism pattern 1502 at a time.

On the other hand, the substrate 1501 is a thermoplastic resin having good transmittance, balanced mechanical properties (particularly, impact resistance), heat resistance and electrical properties such as polyethylene terephthalate (PET), polycarbonate (PC) PE) or the like.

The prism pattern 1502 has a triangular cross section and may be formed on one side of the substrate 1501 with an ultraviolet (UV) curing resin or the like.

When a prism pattern 1502 is formed by pressing a curable resin applied in various manners such as a method of applying a UV curable resin to a predetermined thickness on the substrate 1501 and using a roller having a predetermined pattern, A prism pattern 1502 may be formed on the substrate 1501.

Referring to FIG. 15A, the prism pattern 1502 may be formed such that a plurality of linear prisms are arranged adjacent to each other in parallel in one direction. More preferably, a prism pattern 1502 having a vertex angle of 90 degrees can be formed on the substrate 1501.

Referring to FIG. 15B, a mirror surface 1510 may be formed on the surface of the prism pattern 1502 (S1420). The substrate 1500 having the mirror surface 1510 formed on the surface of the prism pattern 1502 may be referred to as a prism substrate 1500.

In the mirror surface formation step S1420, a metal material may be coated on the surface of the prism pattern 1502 to form the mirror surface 1510. [ The metal material may be a material having a high reflectivity. For example, the metal material may be any one of aluminum, lead, silver, zinc, and tin.

 In addition, the mirror surface forming step S1420 may be applied in various ways such as vapor deposition, coating, and coating of a material capable of generating a mirror reflection.

15C, the prism substrates 1500 having the mirror surface 1510 formed on the surface of the prism pattern 1502 may be stacked (S1430).

When the prism substrates 1500 are laminated (S1430), the relative positions of the prism patterns 1502 of the upper and lower prism substrates 1500 need not coincide with each other. For example, it is possible that the apex at which the apex angle of the prism pattern is formed is not aligned or aligned in a straight line in the vertical direction.

The step of stacking the plurality of prism substrates 1500 having the mirror surface 1510 formed thereon may be performed by filling the spaces between the plurality of prism substrates 1500 with an adhesive, It is possible to apply the adhesive to the tip of the prism pattern 1502 formed on the substrate.

15D, the micro mirror array can be fabricated by cutting the stacked prism substrates 1500 in the vertical direction along the cutting line 1520 (S1440).

The micromirror array formed in this manner has two mirror planes perpendicular to each other formed in a direction perpendicular to the substrate surface.

Meanwhile, according to the embodiment, a black layer (not shown) may be formed on the prism pattern 1502 to block afterglow.

That is, an embodiment of the present invention can coat a black colored layer on a mirror surface so that a residual image or a blurred image signal can be removed by absorbing light.

The micromirror array fabricated through this process can prevent image degradation caused by the insufficient reflectance of the mirror.

Alternatively, a black layer may be formed on the mirror surface 1510. In this case, an additional mirror surface may be formed on the black layer so as to reflect light in either direction.

16 to 20 are views illustrating a micro mirror array according to an embodiment of the present invention.

FIGS. 16 and 17 illustrate cross-sectional views of micro-mirror arrays produced by vertical cutting after laminating a plurality of substrates using an adhesive.

16 and 17, a micromirror array according to an embodiment of the present invention includes a first transparent substrate 1501a, a first prism pattern 1502a formed on the first transparent substrate 1501a, A second prism pattern 1502b formed on the second transparent substrate 1501b and a second prism pattern 1502b formed on the first prism pattern 1502a and a first substrate 1500a including a first mirror surface 1510a formed on the first prism pattern 1502a, And a second substrate 1500b including a second mirror surface 1510b formed on the second prism pattern 1502b.

In this case, the first substrate 1500a may be stacked on the second substrate 1500b.

The micromirror array includes a third transparent substrate 1501c, a third prism pattern 1502c formed on the third transparent substrate 1501c, and a third mirror surface 1510c formed on the third prism pattern 1502c. , And the second substrate 1500b may be stacked on the third substrate 1500c.

16, a micro mirror array according to an embodiment of the present invention includes an adhesive 1601 (FIG. 16) filled between a second mirror surface 1510b of the second substrate 1500b and the first transparent substrate 1501a, ).

That is, the plurality of substrates 1500a, 1500b, and 1500c may be stacked and then vertically cut by filling the spaces between the plurality of substrates 1500a, 1500b, and 1500c with an adhesive.

Referring to FIG. 17, the micromirror array according to an embodiment of the present invention may further include an adhesive 1602 applied to the tip of the second prism pattern 1502b.

That is, the adhesive 1602 may be applied to the tips of the prism patterns 1502b and 1502c formed on the plurality of substrates 1500a, 1500b, and 1500c and stacked, and then vertically cut.

It is preferable that some of the portions that contact the mirror surfaces 1510a, 1510b, and 1510c of the substrates 1500a, 1500b, and 1500c are made of a transparent material.

For example, as shown in FIG. 16, if the adhesive 1601 or another material is mixed to fill the portion that contacts the mirror surfaces 1510b and 1510c, the prism patterns 1502a, 1502b, and 1502c may be transparent, The adhesive 1601 contacting the mirror surfaces 1510b and 1510c should be transparent or both portions 1502a, 1502b and 1502c must be transparent when stacked.

17, when the adhesive 1602 is applied only to the tips of the prism patterns 1502b and 1502c to perform lamination, the prism portions 1502b and 1502c may not be transparent or transparent.

Even if a mirror surface is formed, when a part does not reflect light 100% by a mirror surface, a ghost image in which an undesirable image is seen may appear, or a deterioration in image quality in which a plurality of boundaries of an image are displayed.

In order to prevent this, in the present invention, a colored ink having a high light blocking property is coated on the rear surface of a surface not used as a mirror surface, or another material having good light shielding property is formed by vapor deposition, coating, The blocking rate can be increased.

18 to 20 show various examples of a micro mirror array further comprising a black layer.

Referring to FIG. 18, the micro mirror array according to an embodiment of the present invention may further include a black layer 1801 formed on the first prism pattern 1502a and the second prism pattern 1502b.

19, the micro mirror array according to an embodiment of the present invention may further include a black layer 1802 formed on the first mirror surface 1510a and the second mirror surface 1510b have.

20, a micro mirror array according to an embodiment of the present invention includes a black layer 1803 formed on the first mirror surface 1510a and the second mirror surface 1510b, And a further mirror surface 1804 formed on the surface 1510a and the black layer 1803 formed on the second mirror surface 1510b.

When the gap between the prism and the substrate is filled with an adhesive, it is possible to increase the blocking rate of light by using an adhesive having a high light blocking rate or an adhesive having a good light blocking property. It is possible to improve the ghost image or image quality degradation.

The micromirror array and the fabrication method thereof according to the present invention are not limited to the configurations and the methods of the embodiments described above, but the embodiments can be applied to all or some of the embodiments May be selectively combined.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It should be understood that various modifications may be made by those skilled in the art without departing from the spirit and scope of the present invention.

Hard transparent substrate: 801
Soft transparent substrate: 802
Mirror surface: 810, 1510
Substrate: 1501
Prism pattern: 1502

Claims (20)

Forming a mirror surface on the rigid substrate;
Bonding the soft substrate to the rigid substrate having the mirror surface formed thereon;
Attaching a plurality of substrates on which the hard substrate and the soft substrate are laminated;
Cutting the bonded substrates to produce a primary micromirror array;
Forming an additional mirror surface on the fabricated primary micromirror array;
Attaching a plurality of primary micromirror arrays having the additional mirror surface formed therein; And
And cutting the bonded primary micromirror arrays. The method according to claim 1,
Wherein the mirror surface forming step comprises coating the hard substrate with a metal material to form the mirror surface. The method according to claim 1,
Wherein the hard substrate is any one of polyethylene terephthalate (PET), polycarbonate (PC), and cycloolefin resin (COP). The method according to claim 1,
Wherein the soft substrate is any one of polyvinyl chloride (PVC), polyethylene (PE), and ethylene vinyl acetate (EVA). The method according to claim 1,
Wherein the primary micromirror array is fabricated by vertically cutting the bonded substrates to fabricate the primary micromirror array. The method according to claim 1,
Wherein the step of attaching the plurality of substrates, on which the rigid substrate and the soft substrate are joined,
Wherein the hard substrate and the flexible substrate are bonded to each other by optical bonding. Forming a prism pattern on the substrate;
Forming a mirror surface on the prism pattern surface;
Stacking a plurality of substrates on which the mirror surface is formed;
And cutting the stacked substrates in a vertical direction. 8. The method of claim 7,
Wherein the mirror surface forming step forms a mirror surface by coating a metal material on the surface of the prism pattern. 8. The method of claim 7,
Wherein the step of stacking the plurality of substrates having the mirror surface is filled with an adhesive agent between the plurality of substrates. 8. The method of claim 7,
Wherein the step of stacking the plurality of substrates having the mirror surface is performed by applying an adhesive to a tip of a prism pattern formed on the plurality of substrates. 8. The method of claim 7,
And forming a black layer on the prism pattern. 8. The method of claim 7,
And forming a black layer on the mirror surface. 13. The method of claim 12,
And forming an additional mirror surface on the black layer. The first transparent substrate,
A first prism pattern formed on the first transparent substrate,
A first substrate including a first mirror surface formed on the first prism pattern; And
A second transparent substrate,
A second prism pattern formed on the second transparent substrate,
And a second substrate including a second mirror surface formed on the second prism pattern,
Wherein the first substrate is stacked on the second substrate. 15. The method of claim 14,
And an adhesive filled between the second mirror surface and the first transparent substrate. 15. The method of claim 14,
And an adhesive applied to a tip of the second prism pattern. 15. The method of claim 14,
And a black layer formed on the first prism pattern and the second prism pattern. 15. The method of claim 14,
And a black layer formed on the first mirror surface and the second mirror surface. 19. The method of claim 18,
And an additional mirror surface formed on the first mirror surface and the black layer formed on the second mirror surface. 15. The method of claim 14,
A third transparent substrate,
A third prism pattern formed on the third transparent substrate,
And a third substrate including a third mirror surface formed on the third prism pattern,
Wherein the second substrate is stacked on the third substrate.

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