KR20180111658A - Copper sulfate, copper sulfate solution, plating solution, method of manufacturing copper sulfate, method of manufacturing semiconductor circuit board, and method of manufacturing electronic device - Google Patents
Copper sulfate, copper sulfate solution, plating solution, method of manufacturing copper sulfate, method of manufacturing semiconductor circuit board, and method of manufacturing electronic device Download PDFInfo
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- KR20180111658A KR20180111658A KR1020180036817A KR20180036817A KR20180111658A KR 20180111658 A KR20180111658 A KR 20180111658A KR 1020180036817 A KR1020180036817 A KR 1020180036817A KR 20180036817 A KR20180036817 A KR 20180036817A KR 20180111658 A KR20180111658 A KR 20180111658A
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- 229910000365 copper sulfate Inorganic materials 0.000 title claims abstract description 229
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 title claims abstract description 229
- 238000007747 plating Methods 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 239000010949 copper Substances 0.000 claims description 56
- 229910052802 copper Inorganic materials 0.000 claims description 49
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 34
- 239000002994 raw material Substances 0.000 claims description 31
- 238000001816 cooling Methods 0.000 claims description 19
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 19
- 239000012535 impurity Substances 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 230000001376 precipitating effect Effects 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 abstract description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 5
- 239000000243 solution Substances 0.000 description 62
- 239000000523 sample Substances 0.000 description 49
- 239000007864 aqueous solution Substances 0.000 description 42
- 229910021642 ultra pure water Inorganic materials 0.000 description 37
- 239000012498 ultrapure water Substances 0.000 description 37
- 238000005259 measurement Methods 0.000 description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 229910052738 indium Inorganic materials 0.000 description 13
- 229910052709 silver Inorganic materials 0.000 description 13
- 229910052718 tin Inorganic materials 0.000 description 13
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 12
- 239000007788 liquid Substances 0.000 description 12
- 238000009713 electroplating Methods 0.000 description 11
- 239000011734 sodium Substances 0.000 description 11
- 229910052716 thallium Inorganic materials 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 229910052791 calcium Inorganic materials 0.000 description 9
- 229910052742 iron Inorganic materials 0.000 description 9
- 229910052749 magnesium Inorganic materials 0.000 description 9
- 229910052719 titanium Inorganic materials 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 8
- 239000002244 precipitate Substances 0.000 description 8
- 229910052708 sodium Inorganic materials 0.000 description 8
- 238000004458 analytical method Methods 0.000 description 7
- 229910052785 arsenic Inorganic materials 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 7
- CYKLGTUKGYURDP-UHFFFAOYSA-L copper;hydrogen sulfate;hydroxide Chemical compound O.[Cu+2].[O-]S([O-])(=O)=O CYKLGTUKGYURDP-UHFFFAOYSA-L 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 7
- 229910052793 cadmium Inorganic materials 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910052700 potassium Inorganic materials 0.000 description 6
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 6
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 6
- 235000019345 sodium thiosulphate Nutrition 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 229910052725 zinc Inorganic materials 0.000 description 6
- JZCCFEFSEZPSOG-UHFFFAOYSA-L copper(II) sulfate pentahydrate Chemical compound O.O.O.O.O.[Cu+2].[O-]S([O-])(=O)=O JZCCFEFSEZPSOG-UHFFFAOYSA-L 0.000 description 5
- 229910052745 lead Inorganic materials 0.000 description 5
- 229910052748 manganese Inorganic materials 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 238000004448 titration Methods 0.000 description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- 235000011114 ammonium hydroxide Nutrition 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000004255 ion exchange chromatography Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910001867 inorganic solvent Inorganic materials 0.000 description 3
- 239000003049 inorganic solvent Substances 0.000 description 3
- 239000002917 insecticide Substances 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- HNSDLXPSAYFUHK-UHFFFAOYSA-N 1,4-bis(2-ethylhexyl) sulfosuccinate Chemical compound CCCCC(CC)COC(=O)CC(S(O)(=O)=O)C(=O)OCC(CC)CCCC HNSDLXPSAYFUHK-UHFFFAOYSA-N 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 2
- 229910052740 iodine Inorganic materials 0.000 description 2
- 239000011630 iodine Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000003755 preservative agent Substances 0.000 description 2
- 230000002335 preservative effect Effects 0.000 description 2
- 239000012488 sample solution Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000012086 standard solution Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- LMPMFQXUJXPWSL-UHFFFAOYSA-N 3-(3-sulfopropyldisulfanyl)propane-1-sulfonic acid Chemical compound OS(=O)(=O)CCCSSCCCS(O)(=O)=O LMPMFQXUJXPWSL-UHFFFAOYSA-N 0.000 description 1
- VZCCTDLWCKUBGD-UHFFFAOYSA-N 8-[[4-(dimethylamino)phenyl]diazenyl]-10-phenylphenazin-10-ium-2-amine;chloride Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1N=NC1=CC=C(N=C2C(C=C(N)C=C2)=[N+]2C=3C=CC=CC=3)C2=C1 VZCCTDLWCKUBGD-UHFFFAOYSA-N 0.000 description 1
- 208000024827 Alzheimer disease Diseases 0.000 description 1
- 229910020851 La(NO3)3.6H2O Inorganic materials 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- -1 ammonium ions Chemical class 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 230000002421 anti-septic effect Effects 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- LBJNMUFDOHXDFG-UHFFFAOYSA-N copper;hydrate Chemical compound O.[Cu].[Cu] LBJNMUFDOHXDFG-UHFFFAOYSA-N 0.000 description 1
- XRZJYOVMWCUNER-UHFFFAOYSA-L copper;sulfate;trihydrate Chemical compound O.O.O.[Cu+2].[O-]S([O-])(=O)=O XRZJYOVMWCUNER-UHFFFAOYSA-L 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 125000000753 cycloalkyl group Chemical group 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 150000004677 hydrates Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- GJKFIJKSBFYMQK-UHFFFAOYSA-N lanthanum(3+);trinitrate;hexahydrate Chemical compound O.O.O.O.O.O.[La+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O GJKFIJKSBFYMQK-UHFFFAOYSA-N 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G3/00—Compounds of copper
- C01G3/10—Sulfates
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/80—Compositional purity
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Description
본 발명은 황산구리, 황산구리 용액, 도금액, 황산구리의 제조 방법, 반도체 회로 기판의 제조 방법 및 전자기기의 제조 방법에 관한 것이다.The present invention relates to copper sulfate, a copper sulfate solution, a plating solution, a process for producing copper sulfate, a process for producing a semiconductor circuit board, and a process for producing electronic equipment.
황산구리는 전해액, 안료, 살충제, 방부제, 매염제, 전지용 재료, 의약, 반도체 장치 등의 전자 부품의 전기 도금액의 원료 등에 널리 이용되고 있다.Copper sulfate is widely used as an electrolytic solution, a pigment, an insecticide, an antiseptic, a mordant, a material for a battery, a material for an electroplating solution for an electronic part such as a medicine or a semiconductor device, and the like.
예를 들면, 전해액, 안료, 살충제, 방부제, 매염제, 전지용 재료, 의약, 반도체 장치 등의 전자 부품의 전기 도금액 원료 등에 사용 가능한 황산구리로서, 일본 특허공보 제3987069호(특허문헌 1)에는 순도 99.99wt%로, Fe, Cr, Ni 등의 전이 금속이 3wtppm 이하인 고순도 황산구리가 기재되어 있다. 또한, 일본 특허공보 제3943583호(특허문헌 2)에는 순도 99.999wt% 이상의 순도를 갖는 고순도 황산구리가 기재되어 있다.For example, Japanese Patent Publication No. 3987069 (Patent Document 1) discloses copper sulfate which can be used for an electrolytic solution, a pigment, an insecticide, a preservative, a mordant, a battery material, a medicine, %, And high-purity copper sulfate having a transition metal such as Fe, Cr, Ni or the like at 3 wtppm or less. Further, Japanese Patent Publication No. 3943583 (Patent Document 2) describes a high purity copper sulfate having a purity of 99.999 wt% or more in purity.
그러나 최근의 다양한 요구에 의해서, 특허문헌 1 및 특허문헌 2에 기재되는 고순도 황산구리보다 더욱 불순물을 저감시킨 황산구리에 대한 수요가 높아지고 있다.However, due to various recent demands, there is a growing demand for copper sulfate, which is more impurity-reduced than the high-purity copper sulfate described in Patent Document 1 and Patent Document 2.
예를 들면, 황산구리를 구리 도금욕의 원료로 사용한 경우, 배선 미세화에 수반하여, 구리 도금욕의 원료인 황산구리 중에 알루미늄이 함유됨으로써, 구리 피막 중에 알루미늄이 석출되어 도전성을 저하시키는 문제가 있다.For example, when copper sulfate is used as a raw material for a copper plating bath, aluminum is contained in copper sulfate, which is a raw material of a copper plating bath, due to wire refinement, thereby causing aluminum to precipitate in the copper film, thereby deteriorating conductivity.
상기 과제에 비추어, 본 발명은 알루미늄 농도를 저감한 황산구리, 황산구리 용액, 도금액, 황산구리의 제조 방법, 반도체 회로 기판의 제조 방법 및 전자기기의 제조 방법을 제공하는 것을 목적으로 한다.In view of the above-described problems, it is an object of the present invention to provide copper sulfate, a copper sulfate solution, a plating solution, a method of producing copper sulfate, a method of manufacturing a semiconductor circuit board, and a method of manufacturing electronic equipment.
본 발명의 실시형태와 관련되는 황산구리는 일 측면에 있어서, Al 농도가 0.08질량ppm 이하이다.In one aspect of the copper sulfate according to the embodiment of the present invention, the Al concentration is 0.08 mass ppm or less.
본 발명의 실시형태와 관련되는 황산구리 용액은 일 측면에 있어서, 상기 황산구리를 이용하여 액상화 한 황산구리 용액이다.The copper sulfate solution according to the embodiment of the present invention is, in one aspect, a copper sulfate solution liquefied using the copper sulfate.
본 발명의 실시형태와 관련되는 황산구리 용액은 일 측면에 있어서, Al 농도가 0.019질량ppm 이하이다.In one aspect of the copper sulfate solution according to the embodiment of the present invention, the Al concentration is 0.019 mass ppm or less.
본 발명의 실시형태와 관련되는 황산구리 용액은 다른 일 측면에 있어서, Al 농도가 0.016질량ppm 이하이다.In another aspect of the copper sulfate solution according to the embodiment of the present invention, the Al concentration is 0.016 mass ppm or less.
본 발명의 실시형태와 관련되는 황산구리 용액은 또 다른 일 측면에 있어서, Al 농도가 0.012질량ppm 이하이다.In another aspect of the copper sulfate solution according to the embodiment of the present invention, the Al concentration is 0.012 mass ppm or less.
본 발명의 실시형태와 관련되는 황산구리의 제조 방법은 일 측면에 있어서, 구리 원료를 진한 황산에 용해시켜서 얻어지는 황산구리 원료 용액을 가열하여 농축하고, 가열 농축 후의 황산구리 원료 용액의 온도가 25℃가 될 때까지, 냉각 속도 15℃／hr 이하로 냉각해서, 황산구리오수화물의 결정을 석출시키는 것을 포함한다.In one aspect of the method for producing copper sulfate according to the embodiment of the present invention, the copper sulfate raw material solution obtained by dissolving the copper raw material in concentrated sulfuric acid is heated and concentrated. When the temperature of the copper sulfate raw material solution after heating and condensation reaches 25 캜 , And cooling at a cooling rate of 15 DEG C / hr or lower to precipitate crystals of the copper sulfate hydrate.
본 발명의 실시형태와 관련되는 도금액은 일 측면에 있어서, Al 농도가 0.018질량ppm 이하이다.In one aspect of the plating liquid according to the embodiment of the present invention, the Al concentration is 0.018 mass ppm or less.
본 발명의 실시형태와 관련되는 도금액은 다른 일 측면에 있어서, Al 농도가 0.012질량ppm 이하이다.In another aspect of the plating liquid according to the embodiment of the present invention, the Al concentration is 0.012 mass ppm or less.
본 발명의 실시형태와 관련되는 반도체 회로 기판의 제조 방법은 일 측면에 있어서, 상기 도금액을 이용하여, 구리 도금을 실시하는 것을 포함한다.In one aspect of the method of manufacturing a semiconductor circuit board according to the embodiment of the present invention, copper plating is performed using the plating liquid.
본 발명의 실시형태와 관련되는 전자기기의 제조 방법은 일 측면에 있어서, 상기 반도체 회로 기판의 제조 방법으로 제조한 반도체 회로 기판을 이용하여, 전자기기를 제조한다.In one aspect of the method of manufacturing an electronic device according to the embodiment of the present invention, an electronic device is manufactured by using a semiconductor circuit board manufactured by the method for manufacturing a semiconductor circuit board.
본 발명에 의하면, 알루미늄 농도를 저감한 황산구리, 황산구리 용액, 도금액, 황산구리의 제조 방법, 반도체 회로 기판의 제조 방법 및 전자기기의 제조 방법을 제공할 수 있다.According to the present invention, it is possible to provide a copper sulfate, a copper sulfate solution, a plating solution, a method of producing copper sulfate, a method of manufacturing a semiconductor circuit board, and a method of manufacturing an electronic device.
본 발명의 실시형태와 관련되는 황산구리에 대해서 이하에 자세하게 설명한다.The copper sulfate according to the embodiment of the present invention will be described in detail below.
본 발명의 실시형태와 관련되는 황산구리는, Al 농도가 0.08질량ppm 이하이고, 바람직하게는 Al 농도가 0.05질량ppm 이하인 황산구리이다. 황산구리 중의 Al 농도를 0.08질량ppm 이하로 함으로써, 예를 들면, 본 발명의 실시형태와 관련되는 황산구리를 구리 도금액의 원료로 이용한 경우, 구리 피막 중의 Al의 석출이나, Al의 석출로 인해 생기는 구리 결정의 결함이 형성되는 것을 억제할 수 있다. 그 결과, 이 구리 피막이 형성된 반도체 웨이퍼, 프린트 기판, 반도체 회로 기판 혹은 이것들을 이용한 반도체 집적회로나 전자기기 등의 전기적 특성을 향상시킬 수 있다. 또한, 본 실시형태와 관련되는 황산구리는 전해액, 안료, 살충제, 방부제, 매염제, 전지용 재료 등에도 이용할 수 있고, 의약 등에 이용한 경우에도 알츠하이머 병의 발병 리스크를 저감할 수 있는 효과를 얻을 수 있을 가능성이 있다.The copper sulfate according to the embodiment of the present invention is a copper sulfate having an Al concentration of 0.08 mass ppm or less, and preferably an Al concentration of 0.05 mass ppm or less. When the copper concentration in the copper sulfate is 0.08 mass ppm or less, for example, when the copper sulfate according to the embodiment of the present invention is used as a raw material for the copper plating solution, the precipitation of Al in the copper film or the precipitation of Al Can be prevented from being formed. As a result, it is possible to improve the electrical characteristics of the semiconductor wafer, the printed circuit board, the semiconductor circuit board, or the semiconductor integrated circuit or the electronic device using the copper wafer. In addition, the copper sulfate according to the present embodiment can be used for electrolytic solution, pigment, insecticide, preservative, mordant, battery material, etc., and it is possible to obtain an effect of reducing the onset risk of Alzheimer's disease have.
본 발명의 실시형태와 관련되는 황산구리는 추가로, 이하의 (3－1)~(3－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시키는 황산구리이다：The copper sulfate according to the embodiment of the present invention is further copper sulfate satisfying any one, two, three or four of the following (3-1) to (3-4):
(3－1) In 농도가 1.0질량ppm 이하이다,(3-1) the In concentration is 1.0 mass ppm or less,
(3－2) Tl 농도가 0.05질량ppm 이하이다,(3-2) the Tl concentration is 0.05 mass ppm or less,
(3－3) Sn 농도가 1.0질량ppm 이하이다,(3-3) the Sn concentration is not more than 1.0 mass ppm,
(3－4) Ag 농도가 1.0질량ppm 이하이다.(3-4) Ag concentration is 1.0 mass ppm or less.
본 발명의 실시형태와 관련되는 황산구리는 추가로 또 이하의 (4－1)~(4－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시키는 황산구리이다：The copper sulfate according to the embodiment of the present invention is further copper sulfate which satisfies any one, two, three or four of the following (4-1) to (4-4):
(4－1) In 농도가 0.5질량ppm 이하이다,(4-1) the concentration of In is not more than 0.5 mass ppm,
(4－2) Tl 농도가 0.05질량ppm 이하이다,(4-2) the Tl concentration is 0.05 mass ppm or less,
(4－3) Sn 농도가 0.5질량ppm 이하이다,(4-3) Sn concentration is 0.5 mass ppm or less,
(4－4) Ag 농도가 0.8질량ppm 이하이다.(4-4) Ag concentration is 0.8 mass ppm or less.
본 발명의 실시형태와 관련되는 황산구리는 추가로 또 이하의 (5－1)~(5－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시키는 황산구리이다：The copper sulfate according to the embodiment of the present invention is further copper sulfate which satisfies any one, two, three or four of the following (5-1) to (5-4):
(5－1) In 농도가 0.2질량ppm 이하이다,(5-1) the In concentration is 0.2 mass ppm or less,
(5－2) Tl 농도가 0.05질량ppm 이하이다,(5-2) the Tl concentration is 0.05 mass ppm or less,
(5－3) Sn 농도가 0.2질량ppm 이하이다,(5-3) Sn concentration is 0.2 mass ppm or less,
(5－4) Ag 농도가 0.3질량ppm 이하이다.(5-4) Ag concentration is 0.3 mass ppm or less.
본 발명의 실시형태와 관련되는 황산구리의 각 원소 농도는 이하의 방법에 따라 측정했다.The concentration of each element of copper sulfate according to the embodiment of the present invention was measured by the following method.
(Al, Na, K, Co, Cr, Ni, Zn, Ca, Mg, Cd, Mn, Pb의 농도 분석)(Concentration analysis of Al, Na, K, Co, Cr, Ni, Zn, Ca, Mg, Cd,
황산구리 중의 Al, Na, K, Co, Cr, Ni, Zn, Ca, Mg, Cd, Mn, Pb의 농도 분석을, 전해법에 의해 구리를 제거한 후에, 원자 흡광법에 의해 측정했다. 측정 장치에는 프레임리스 원자 흡광 장치 Varian사제(Agilent사제) AA280Z / GTA120(제만 원자 흡광 분광 광도계)를 사용했다.The analysis of the concentrations of Al, Na, K, Co, Cr, Ni, Zn, Ca, Mg, Cd, Mn and Pb in copper sulfate was carried out by atomic absorption spectrometry after copper was removed by electrolysis. As the measuring apparatus, a frameless atomic absorption apparatus AA280Z / GTA120 (manufactured by Agilent) (manufactured by Agilent Co., Ltd.) (Zeeman atomic absorption spectrophotometer) was used.
미리 황산구리 샘플 1g과 초순수를 10mL의 메스 플라스크에 넣고, 샘플을 초순수에 용해시켰다. 그 후, 초순수에서 상술한 메스 플라스크를 메스 업(메스 플라스크의 표선과 메스 플라스크 속 액의 요철면의 바닥부가 일치할 때까지, 메스 플라스크에 초순수를 더하는 조작)하여, 10mL의 황산구리 수용액을 제작했다. 그 후, 얻어진 황산구리 수용액을, 음극 및 양극(2전극식)에 Pt 전극(Pt 농도가 99.95질량% 이상)을 이용하여 4시간 정전위 분극해서, 상술한 황산구리 수용액으로부터 구리를 제외했다. 그 후, Al, Na, K, Co, Cr, Ni, Zn, Ca, Mg, Cd, Mn, Pb의 각 농도를 상술한 심리스 원자 흡광 장치를 이용하여 측정했다. 여기서, 상술한 초순수는 전기 전도율이 0.05882μS/㎝ 이하(전기 저항율(비저항)이 17.0MΩ·㎝ 이상)인 물로 했다. 황산구리 샘플의 질량 측정에 사용한 정밀 천칭은, 소수점 이하 4자리까지 측정 가능한 것을 이용했다. 측정치는 4자리째까지 사용했다. 또한, 각 원소의 프레임리스 원자 흡광 장치의 표준액 농도는 1질량ppb로 했다. 또한, 상술한 4시간 정전위 분극은 전류를 0.1A로 설정해서 30분간 실시한 후에, 전류를 0.15A로 설정하여 60분간 실시하고, 그 후, 전류를 0.25A로 설정해서 150분간 실시했다.1 g of a sample of sulfuric acid and ultrapure water were placed in a 10 ml volumetric flask, and the sample was dissolved in ultrapure water. Thereafter, the above-mentioned measuring flask was superimposed on the ultrapure water (operation of adding ultrapure water to the measuring flask until the bottom line of the concave / convex surface of the measuring flask of the measuring flask and the bottom of the measuring flask of the measuring flask became equal) to prepare 10 mL of an aqueous solution of copper sulfate . Thereafter, the resulting aqueous copper sulfate solution was electrostatically polarized for 4 hours by using a Pt electrode (Pt concentration: 99.95% by mass or more) in a negative electrode and a positive electrode (two electrode type), and copper was removed from the above described aqueous solution of copper sulfate. Then, the respective concentrations of Al, Na, K, Co, Cr, Ni, Zn, Ca, Mg, Cd, Mn and Pb were measured using the above-described seamless atomic absorption device. The above-mentioned ultrapure water was water having an electric conductivity of 0.05882 占 / / cm or less (electric resistivity (specific resistance) of 17.0 M? 占 이상 m or more). The precision balance used for the mass measurement of the copper sulfate sample was one capable of measuring up to four decimal places. The measured values were used up to the fourth digit. The concentration of the standard solution in the frame-less atomic absorption apparatus of each element was 1 mass ppb. The above-mentioned 4-hour electrostatic potential polarization was performed for 30 minutes by setting the current to 0.1 A and then for 60 minutes by setting the current to 0.15 A and then setting the current to 0.25 A for 150 minutes.
각 원소 농도는 이하의 계산식으로 산출했다.The concentration of each element was calculated by the following equation.
소정의 원소의 농도(질량ppm)=황산구리 수용액 중의 소정의 원소 농도(질량ppb)×채취한 황산구리 수용액 샘플을 용해시킨 수용액의 질량(g)/채취한 황산구리 샘플의 질량(g)×10-3(질량ppm/질량ppb)=황산구리 수용액 중의 원소 농도(질량ppb)×10(g)/1(g)×10-3(질량ppm/질량ppb)Concentration of a predetermined element (mass ppm) = concentration of a predetermined element (mass ppb) in an aqueous solution of copper sulfate × mass (g) of an aqueous solution in which a sampled aqueous solution of an aqueous solution of copper sulfate is dissolved / mass (g) of sampled copper sulfate sample × 10 -3 (Mass ppm / mass ppb) = element concentration in mass of copper sulfate aqueous solution (mass ppb) × 10 (g) / 1 (g) × 10 -3 (mass ppm / mass ppb)
또한, 상술한 계산식의 황산구리 샘플 질량에는, 정밀 천칭으로 측정한 값을 이용했다. 채취한 황산구리 샘플을 용해시킨 수용액의 질량은 10g으로 했다.In addition, the mass of the sample of copper sulfate used in the above calculation formula was a value measured with a precision balance. The mass of the aqueous solution in which the sampled copper sulfate sample was dissolved was 10 g.
(Sn 및 As의 농도 분석)(Concentration analysis of Sn and As)
황산구리중의 Sn 및 As의 농도 분석은, 이하의 공침법에 따라 Sn 및 As를 구리와 분리한 후, 원자 흡광법에 의해 측정을 실시했다. 측정 장치에는 프레임리스 원자 흡광 장치 Varian사제(Agilent사제) AA280Z / GTA120(제만 원자 흡광 분광 광도계)를 사용했다.The concentrations of Sn and As in copper sulfate were determined by atomic absorption spectroscopy after separating Sn and As from copper according to the following coprecipitation method. As the measuring apparatus, a frameless atomic absorption apparatus AA280Z / GTA120 (manufactured by Agilent) (manufactured by Agilent Co., Ltd.) (Zeeman atomic absorption spectrophotometer) was used.
미리 황산구리 샘플 2g과 초순수와 5질량%의 질산란탄육수화물(La(NO3)3·6H2O) 수용액 1mL를 혼합해서 황산구리를 용해시켜서 황산구리 수용액을 제작했다. 그리고 황산구리 수용액에 암모니아수를 첨가하여 상기 황산구리 수용액의 pH를 10~11로 했다. 암모니아수의 첨가에 의해 발생하는 구리의 수산화물에 암모니아수를 너무 많이 더함으로써 구리와 암모늄 이온의 착체로 용해하였다. 상술한 암모니아수를 첨가함으로써 란탄은 수산화물이 되어, Sn 및 As와 함께 침전한다. 그 후, 여과지를 이용해서 발생한 침전물을 액으로부터 분리했다. 얻어진 침전물에 50vol%의 질산 수용액(농질산 부피：초순수 부피=1：1, 온도 50~80℃)을 더하여 침전물을 용해한 후, 건고(乾固)시켰다. 그 후, 건고해서 얻어진 것을 초순수와 염산으로 만든 묽은 염산(진한 염산 부피：초순수 부피=1：9)으로 용해하여, 얻어진 용액을 20mL의 메스 플라스크에 넣었다. 또한, 상술한 진한 염산으로서 염화수소 농도가 36질량%인 진한 염산을 이용했다. 그리고 상술한 메스 플라스크를 메스 업(메스 플라스크의 표선과 메스 플라스크 속 액의 요철면 바닥부가 일치할 때까지, 메스 플라스크에 초순수를 더하는 조작)하여, 20mL의 측정용 용액을 제작했다. 그 후, 얻어진 측정용 용액을 이용해서, Sn 및 As의 각 농도를 상술한 프레임리스 원자 흡광 장치를 이용하여 측정했다. 여기서, 상술한 초순수는 전기 전도율이 0.05882μS/㎝ 이하(전기 저항율(비저항)이 17.0MΩ·㎝ 이상)의 물로 했다. 황산구리의 질량 측정에 사용한 정밀 천칭은, 소수점 이하 4자리까지 측정 가능한 것을 이용했다. 측정치는 4번째 자리까지 사용했다. 각 원소의 프레임리스 원자 흡광 장치의 표준액의 농도는 50 질량ppb로 했다.2 g of a sample of copper sulfate and 1 mL of an aqueous solution of ultrapure water and 5 mass% of lanthanum nitrate hexahydrate (La (NO 3 ) 3 .6H 2 O) were mixed in advance to dissolve copper sulfate to prepare an aqueous copper sulfate solution. Ammonia water was added to the aqueous solution of copper sulfate to adjust the pH of the aqueous solution of copper sulfate to 10 to 11. Ammonia water was added to the hydroxides of copper generated by the addition of ammonia water to dissolve the complexes of copper and ammonium ions. By adding the above-mentioned ammonia water, lanthanum becomes hydroxide and precipitates together with Sn and As. Thereafter, the precipitate formed by using the filter paper was separated from the liquid. A 50 vol% nitric acid aqueous solution (nitric acid volume: ultra pure water volume = 1: 1, temperature: 50 to 80 ° C) was added to the obtained precipitate to dissolve the precipitate and dry. Thereafter, the resultant solution was dissolved in dilute hydrochloric acid (concentrated hydrochloric acid volume: ultrapure water volume = 1: 9) made of ultrapure water and hydrochloric acid, and the obtained solution was placed in a 20 mL volumetric flask. Further, concentrated hydrochloric acid having a hydrogen chloride concentration of 36% by mass was used as the above concentrated hydrochloric acid. Then, the above-mentioned measuring flask was meshed (operation of adding ultrapure water to the measuring flask until the bottom of the concave / convex surface of the measuring flask of the measuring flask was in agreement with the mark of the measuring flask). Then, using the obtained measurement solution, the respective concentrations of Sn and As were measured using the above-described frame-less atomic absorption apparatus. Here, the above-mentioned ultrapure water was water having an electric conductivity of 0.05882 μS / cm or less (electric resistivity (specific resistance) of 17.0 MΩ · cm or more). The precision balance used for the measurement of the copper sulfate mass was one capable of measuring up to four decimal places. The measurement was used up to the fourth digit. The concentration of the standard solution of the frameless atomic absorption apparatus of each element was 50 mass ppb.
각 원소 농도는 이하의 계산식으로 산출했다.The concentration of each element was calculated by the following equation.
소정의 원소 농도(질량ppm)=측정용 용액 중의 소정의 원소 농도(질량ppb)×측정용 용액의 질량(g)/황산구리의 샘플 질량(g)×10-3(질량ppm/질량ppb)=측정용 용액 중의 소정의 원소 농도(질량ppb)×20(g)/2(g)×10-3(질량ppm/질량ppb)(Mass ppb) = mass of measurement solution (g) / sample weight of copper sulfate (g) x 10 -3 (mass ppm / mass ppb) = (Mass ppb) x 20 (g) / 2 (g) x 10 < -3 > (mass ppm / mass ppb)
또한, 상술한 계산식의 황산구리의 샘플 질량에는 정밀 천칭으로 측정한 값을 이용했다. 측정용 용액의 질량은 20g으로 했다.In addition, the sample mass of the copper sulfate of the above-mentioned formula was measured with a precision balance. The mass of the measurement solution was 20 g.
(Fe, In, Tl, Ag, Ti의 농도 분석)(Concentration analysis of Fe, In, Tl, Ag and Ti)
황산구리 중의 Fe, In, Tl, Ag, Ti의 농도 분석은 ICP－MS법에 따라서 실시할 수 있다. 구체적으로는, 황산구리의 샘플을 500배의 초순수로 희석하여 SII 나노테크놀로지사제, ICP 질량 분석 장치(SPW9700)로 측정한 결과를 나타낸다.The concentration of Fe, In, Tl, Ag, and Ti in copper sulfate can be analyzed by the ICP-MS method. Concretely, the sample of copper sulfate was diluted with 500 times of ultrapure water and measured with an ICP mass spectrometer (SPW9700) manufactured by SII Nanotechnology.
상술한 ICP－MS법에 따른 황산구리 중의 Fe, In, Tl, Ag, Ti의 농도 분석은 이하의 방법에 따라서 실시할 수 있다.The concentrations of Fe, In, Tl, Ag and Ti in copper sulfate according to the ICP-MS method described above can be analyzed according to the following method.
(1) 황산구리의 샘플을 1(g) 채취한다. 또한, 황산구리의 질량 측정에 사용한 정밀 천칭은, 소수점 이하 4자리 수까지 측정 가능한 것을 이용했다. 측정치는 4번째 자리까지 사용했다.(1) Take 1 g of copper sulfate sample. The precision balance used for the measurement of the copper sulfate mass was one capable of measuring up to 4 decimal places. The measurement was used up to the fourth digit.
(2) 상술한 (1)의 황산구리 샘플과 초순수를 500mL의 메스 플라스크에 넣고, 그 후 초순수(필요에 따라서 묽은 질산을 포함한다)로 칭량선까지 메스 업하여, 황산구리 수용액을 제작한다. 여기서, 상술한 초순수는 전기 전도율이 0.05882μS/㎝ 이하(전기 저항율(비저항)이 17.0MΩ·㎝ 이상)인 물로 했다. 또한, 상술한 물의 전기 전도율은, JIS K0552(1994)에 근거하여 측정할 수 있다. 또한, 상술한 초순수는 예를 들면, 아드반테크 도요 주식회사제의 초순수 제조 장치 RFU400 시리즈 등 시판하는 초순수 제조 장치를 이용하여 제조하는 것이 가능하다.(2) The copper sulfate sample (1) and ultrapure water described above are placed in a 500 mL volumetric flask, and then the ultrapure water (including dilute nitric acid if necessary) is massaged up to the weighing line to prepare an aqueous solution of copper sulfate. The above-mentioned ultrapure water was water having an electric conductivity of 0.05882 占 / / cm or less (electric resistivity (specific resistance) of 17.0 M? 占 이상 m or more). The electrical conductivity of the above-mentioned water can be measured based on JIS K0552 (1994). The above-mentioned ultrapure water can be produced by using a commercially available ultrapure water producing device such as an ultrapure water producing device RFU400 series manufactured by Advan Tech Co., Ltd., for example.
(3) (2)에서 제작한 황산구리 수용액 중의 Fe, In, Tl, Ag, Ti 농도를, SII 나노테크놀로지사제, ICP 질량 분석 장치(SPW9700) 등 ICP 질량 분석 장치로 측정한다. 얻어진 황산구리 수용액 중의 Fe, In, Tl, Ag, Ti 농도를 각각 CFe(질량ppb), CIn(질량ppb), CTl(질량ppb), CAg(질량ppb), CTi(질량ppb)로 한다.(3) The concentrations of Fe, In, Tl, Ag, and Ti in the aqueous solution of copper sulfate produced in (2) are measured by an ICP mass spectrometer such as ICP mass spectrometer (SPW9700) manufactured by SII Nanotechnology. The concentrations of Fe, In, Tl, Ag and Ti in the obtained aqueous solution of copper sulfate are set as CFe (mass ppb), CIn (mass ppb), CTl (mass ppb), CAg (mass ppb), and CTi (mass ppb).
이하의 식에 따라서 황산구리 중의 Fe, In, Tl, Ag, Ti 농도를 산출했다.The concentrations of Fe, In, Tl, Ag, and Ti in the copper sulfate were calculated according to the following equations.
Fe 농도(질량ppm)=채취한 황산구리 샘플의 수용액 중의 Fe 농도(질량ppb)×채취한 황산구리 샘플 수용액의 질량(g)/채취한 황산구리 샘플의 질량(g)×10-3(질량ppm/질량ppb)=CFe(질량ppb)×(500(g))×10-3(질량ppm/질량ppb)/1(g)=0.500×CFe(질량ppm)Fe concentration (mass ppm) = Fe concentration (mass ppb) in aqueous solution of sampled copper sulfate sample × mass of sampled aqueous solution of copper sulfate sample (g) / mass of sampled copper sulfate sample (g) × 10 -3 (mass ppm / mass ppb) = CFe (mass ppb) x 500 (g) 占10-3 (mass ppm / mass ppb) / 1 (g) = 0.500 占 CFe (mass ppm)
In 농도(질량ppm)=채취한 황산구리 샘플의 수용액 중의 In 농도(질량ppb)×채취한 황산구리 샘플 수용액의 질량(g)/채취한 황산구리 샘플의 질량(g)×10-3(질량ppm/질량ppb)=CIn(질량ppb)×(500(g))×10-3(질량ppm/질량ppb)/1(g)=0.500×CIn(질량ppm)In concentration (mass ppm) = In concentration (mass ppb) in aqueous solution of sampled copper sulfate sample × mass of aqueous sampled copper sulfate sample solution (g) / mass of sampled copper sulfate sample × 10 -3 (mass ppm / mass ppb) = CIn (mass ppb) x 500 (g) 占10-3 (mass ppm / mass ppb) / 1 (g) = 0.500 占 CIn (mass ppm)
Tl 농도(질량ppm)=채취한 황산구리 샘플의 수용액 중의 Tl 농도(질량ppb)×채취한 황산구리 샘플 수용액의 질량(g)/채취한 황산구리 샘플의 질량(g)×10-3(질량ppm/질량ppb)=CTl(질량ppb)×(500(g))×10-3(질량ppm/질량ppb)/1(g)=0.500×CTl(질량ppm)Tg concentration (mass ppm) = Tl concentration (mass ppb) in aqueous solution of sampled copper sulfate sample × mass (g) of sampled aqueous solution of copper sulfate sample / mass (g) of sampled copper sulfate sample × 10 -3 (mass ppm / mass ppb) = CTl (mass ppb) x (500 (g)) 10 -3 (mass ppm / mass ppb) / 1 (g) = 0.500 x CTl (mass ppm)
Ag 농도(질량ppm)=채취한 황산구리 샘플의 수용액 중의 Ag 농도(질량ppb)×채취한 황산구리 샘플 수용액의 질량(g)/채취한 황산구리 샘플의 질량(g)×10-3(질량ppm/질량ppb)=CAg(질량ppb)×(500(g))×10-3(질량ppm/질량ppb)/1(g)=0.500×CAg(질량ppm)Ag concentration (mass ppm) = Ag concentration (mass ppb) in aqueous solution of sampled copper sulfate sample × mass of sampled aqueous solution of copper sulfate sample (g) / mass of sampled copper sulfate sample (g) × 10 -3 (mass ppm / mass ppb) = CAg (weight ppb) × (500 (g) ) × 10 -3 ( mass ppm / mass ppb) / 1 (g) = 0.500 × CAg (ppm by weight)
Ti 농도(질량ppm)=채취한 황산구리 샘플의 수용액 중의 Ti 농도(질량ppb)×채취한 황산구리 샘플 수용액의 질량(g)/채취한 황산구리 샘플의 질량(g)×10-3(질량ppm/질량ppb)=CTi(질량ppb)×(500(g))×10-3(질량ppm/질량ppb)/1(g)=0.500×CTi(질량ppm)Ti concentration (mass ppm) = Ti concentration (mass ppb) in aqueous solution of sampled copper sulfate sample × mass (g) of sampled aqueous solution of copper sulfate sample / mass (g) of sampled copper sulfate sample × 10 -3 (mass ppm / mass ppb) = CTi (mass ppb) x 500 (g) 占10-3 (mass ppm / mass ppb) / 1 (g) = 0.500 占 CTi (mass ppm)
또한, 상술한 계산식의 황산구리 샘플 질량에는, 정밀 천칭으로 측정한 값을 이용했다. 측정용 용액의 질량은 500g으로 했다.In addition, the mass of the sample of copper sulfate used in the above calculation formula was a value measured with a precision balance. The mass of the solution for measurement was 500 g.
(Cl의 농도 분석)(Cl concentration analysis)
Cl 농도(염화물 이온 농도)에 대해서는 이온 크로마토그래피를 이용해서 측정했다. 구체적으로는, Dionex사제 이온 크로마토그래피(ICS-1500형)를 이용해서 측정했다.Cl concentration (chloride ion concentration) was measured by ion chromatography. Specifically, the measurement was carried out using ion chromatography (ICS-1500 type) manufactured by Dionex.
상술한 이온 크로마토그래피에 의한 황산구리 중의 Cl의 농도 분석은 이하의 방법에 따라서 실시할 수 있다.The concentration of Cl in the copper sulfate by ion chromatography described above can be analyzed according to the following method.
(1) 황산구리의 샘플을 1(g) 채취한다. 또한, 황산구리의 질량 측정에 사용한 정밀 천칭은, 소수점 이하 4자리까지 측정 가능한 것을 이용했다. 측정치는 4번째 자리까지 사용했다.(1) Take 1 g of copper sulfate sample. In addition, a precision balance used for mass measurement of copper sulfate was used, which can measure up to four decimal places. The measurement was used up to the fourth digit.
(2) 상술한 (1)의 황산구리 샘플과 초순수를 100mL의 메스 플라스크에 넣고, 그 후 초순수로 칭량선까지 메스 업 하여, 황산구리 수용액을 제작한다. 여기서, 상술한 초순수는 전기 전도율이 0.05882μS/㎝ 이하(전기 저항율(비저항)이 17.0MΩ·㎝ 이상)인 물로 했다. 또한, 상술한 물의 전기 전도율은 JIS K0552(1994)에 근거해서 측정 가능하다. 또한, 상술한 초순수는 예를 들면, 아드반테크 도요 주식회사제 초순수 제조 장치 RFU400 시리즈 등의 시판하는 초순수 제조 장치를 이용하여 제조하는 것이 가능하다.(2) The copper sulfate sample (1) and ultrapure water described above are placed in a 100 mL volumetric flask, and then the ultrapure water is massaged up to a weighing line to prepare an aqueous solution of copper sulfate. The above-mentioned ultrapure water was water having an electric conductivity of 0.05882 占 / / cm or less (electric resistivity (specific resistance) of 17.0 M? 占 이상 m or more). The electrical conductivity of the above-mentioned water can be measured based on JIS K0552 (1994). The above-mentioned ultrapure water can be manufactured using a commercially available ultrapure water producing device such as, for example, RFU400 series of ultrapure water production equipment manufactured by Advan Tech Co., Ltd.
(3) (2)에서 제작한 황산구리 수용액 중의 Cl의 농도를, Dionex사제 이온 크로마토그래피(ICS-1500형)를 이용하여 측정한다. 얻어진 황산구리 수용액 중의 Cl의 농도를 CCl(질량ppb)로 한다.(3) The concentration of Cl in the aqueous solution of copper sulfate prepared in (2) is measured using ion chromatography (ICS-1500 type) manufactured by Dionex. The concentration of Cl in the resulting aqueous solution of copper sulfate is defined as CCl (mass ppb).
이하의 식에 따라서 황산구리 중의 Cl 농도를 산출했다.The Cl concentration in copper sulfate was calculated according to the following formula.
Cl 농도(질량ppm)=채취한 황산구리 샘플의 수용액 중의 Cl 농도(질량ppb)×채취한 황산구리 샘플 수용액의 질량(g)/채취한 황산구리 샘플의 질량(g)×10-3(질량ppm/질량ppb)=CCl(질량ppb)×(100(g))×10-3(질량ppm/질량ppb)/1(g)=0.100×CCl(질량ppm)Cl concentration (mass ppm) = Cl concentration (mass ppb) in aqueous solution of sampled copper sulfate sample × mass of aqueous sampled copper sulfate sample solution (g) / mass of sampled copper sulfate sample × 10 -3 mass ppm / mass ppb) = CCl (mass ppb) x (100 (g)) x 10-3 (mass ppm / mass ppb) / 1 (g) = 0.100 x CCl (mass ppm)
또한, 상술한 계산식의 황산구리 샘플 질량에는, 정밀 천칭으로 측정한 값을 이용했다. 측정용 용액의 질량은 100g으로 했다.In addition, the mass of the sample of copper sulfate used in the above calculation formula was a value measured with a precision balance. The mass of the measurement solution was 100 g.
본 실시형태와 관련되는 황산구리는, Cu 이외의 금속 불순물의 농도 합계가 30질량ppm 이하이고, 일 실시형태에서는 합계가 25질량ppm 이하이며, 다른 일 실시형태에서는 합계가 20질량ppm 이하이고, 또 다른 일 실시형태에서는 합계가 15질량ppm 이하이다.The copper sulfate according to the present embodiment has a total concentration of metal impurities other than Cu of 30 mass ppm or less in total and 25 mass ppm or less in total in one embodiment and 20 mass ppm or less in total in another embodiment, In another embodiment, the total amount is 15 mass ppm or less.
본 실시형태에서 「Cu 이외의 금속 불순물의 농도 합계」는, Na, K, Co, Cr, Ni, Zn, Al, Ca, Mg, Cd, Mn, Pb, Sn, As, Cl, Fe, Ag, Tl, Ti, In을 분석 대상으로 하고, 분석한 결과 얻어진 각 원소의 농도 합계를 Cu 이외의 금속 불순물의 농도의 합계로 했다.In the present embodiment, " the total concentration of metal impurities other than Cu " means the sum of the concentrations of metal impurities other than Cu, such as Na, K, Co, Cr, Ni, Zn, Al, Ca, Mg, Cd, Mn, Pb, Sn, Tl, Ti, and In were analyzed, and the total concentration of each element obtained as a result of the analysis was regarded as the sum of concentrations of metal impurities other than Cu.
황산구리 중의 Al, In, Tl, Ag, Sn 농도(질량ppm)에 대해서는, 상술한 바와 같은 방법으로 측정했다. 또한, 상술한 것 외의 원소도 상술한 것과 동일하게 측정했다.The Al, In, Tl, Ag, and Sn concentrations (mass ppm) in copper sulfate were measured by the methods described above. Elements other than those described above were also measured in the same manner as described above.
황산구리 중의 전유기 탄소(Total Organic Carbon; TOC) 농도는 10질량ppm 이하인 것이 바람직하고, 5질량ppm 이하가 바람직하며, 1질량ppm 이하가 바람직하고, 0.1질량ppm 이하가 더욱 바람직하다. 황산구리 중의 TOC 농도는, 시마즈 제작소제, 전유기 탄소계(TOC－V)를 이용해서 측정했다. 또한, 전유기 탄소의 측정은 황산구리 수용액 중의 구리 농도가 25~50g/L가 되도록, 황산구리 샘플을 초순수(전기 저항율(비저항)이 17.0MΩ·㎝ 이상의 물)에 용해시켜 얻어진 황산구리 수용액을 이용하여 실시했다. 또한, 황산구리 중의 전유기 탄소(TOC) 농도는 이하의 식으로 산출했다.The total organic carbon (TOC) concentration in the copper sulfate is preferably 10 mass ppm or less, more preferably 5 mass ppm or less, more preferably 1 mass ppm or less, and further preferably 0.1 mass ppm or less. The TOC concentration in the copper sulfate was measured using a total organic carbon system (TOC-V) manufactured by Shimadzu Corporation. The measurement of total organic carbon was carried out using an aqueous copper sulfate solution obtained by dissolving a copper sulfate sample in ultrapure water (water having an electrical resistivity (specific resistance) of 17.0 M? 占 ㎝ m or more) so that the copper concentration in the aqueous copper sulfate solution was 25 to 50 g / did. The total organic carbon (TOC) concentration in copper sulfate was calculated by the following equation.
전유기 탄소 농도(질량ppm)=채취한 황산구리 샘플의 수용액 중 전유기 탄소 농도(질량ppb)×채취한 황산구리 샘플의 수용액 질량(g)/채취한 황산구리 샘플의 질량(g)×10-3(질량ppm/질량ppb)Total organic carbon concentration (mass ppm) = Total organic carbon concentration (mass ppb) in aqueous solution of sampled copper sulfate sample × Mass of aqueous solution of sampled copper sulfate sample (g) / Mass of sampled copper sulfate sample (g) × 10 -3 Mass ppm / mass ppb)
본 발명의 실시형태와 관련되는 황산구리는, 황산구리의 무수물 및/또는 황산구리의 수화물을 포함할 수 있다. 황산구리의 수화물로서는, 황산구리일수화물, 황산구리삼수화물, 황산구리오수화물 등을 들 수 있다. 또한, 본 발명의 실시형태와 관련되는 황산구리는, 공지의 황산구리의 수화물을 포함해도 좋다. 또한, 본원 명세서, 특허청구의 범위, 요약에서 「황산구리」라는 문언을 사용한 경우에는, 상기 「황산구리」는 황산구리의 무수물 및 황산구리의 수화물을 포함하는 개념인 것으로 한다.The copper sulfate according to the embodiment of the present invention may include an anhydride of copper sulfate and / or a hydrate of copper sulfate. Examples of hydrates of copper sulfate include copper sulfate monohydrate, copper sulfate trihydrate, and copper sulfate hydrate. The copper sulfate according to the embodiment of the present invention may contain a known hydrate of copper sulfate. In the specification, claims and summary of the present application, when the word "copper sulfate" is used, "copper sulfate" is a concept including anhydrous copper sulfate and hydrate of copper sulfate.
또한, 본 실시형태와 관련되는 황산구리는, 황산구리의 농도(황산구리가 모두 오수화물이 되었다고 가정한 경우의 황산구리오수화물의 농도)가 99.9질량% 이상 99.999질량% 이하이고, 일 실시형태에서는 99.9질량% 이상 99.995질량% 이하이며, 다른 일 실시형태에서는 99.9질량% 이상 99.992질량% 이하이고, 또 다른 일 실시형태에서는, 99.9질량% 이상 99.99질량% 이하이며, 또 다른 일 실시형태에서는 99.9질량% 이상 99.99질량% 미만이다.The copper sulfate according to the present embodiment is 99.9% by mass or more and 99.999% by mass or less in the concentration of copper sulfate (assuming that all the copper sulfate becomes a pentafluoride) and is 99.9% by mass or less in one embodiment, Or more and 99.995 mass% or less, in another embodiment, 99.9 mass% or more and 99.992 mass% or less, in another embodiment, 99.9 mass% or more and 99.99 mass% or less, and in another embodiment, 99.9 mass% or more and 99.99 mass% % By mass.
황산구리의 농도는 이하의 식에 따라서 평가한 결과를 나타낸다.The concentration of copper sulfate indicates the result of evaluation according to the following formula.
황산구리 샘플 중의 구리 농도의 측정 티오 황산나트륨 적정법에 따라서 측정했다.Measurement of Copper Concentration in Sulfuric Acid Samples The measurement was carried out according to the titration method of sodium thiosulfate.
구리 농도의 측정 방법(티오 황산나트륨 적정법)에 대해서는 하기와 같이 했다.The copper concentration measurement method (sodium thiosulfate titration method) was performed as follows.
소정량의 황산구리 샘플을 채취해서 초순수에 용해하여, 황산구리의 농도가 255g/L인 황산구리 수용액을 제작한다. 황산구리 샘플의 질량 측정에 사용한 정밀 천칭은, 소수점 이하 4자리까지 측정 가능한 것을 이용했다. 여기서, 상술한 초순수는 전기 전도율이 0.05882μS/㎝ 이하(전기 저항율(비저항)이 17.0MΩ·㎝ 이상)의 물로 했다. 측정치는 4번째 자리까지 사용했다. 그 후, 이하 (1), (2)의 조작을 실시했다.A predetermined amount of a sample of copper sulfate is sampled and dissolved in ultrapure water to prepare an aqueous copper sulfate solution having a copper sulfate concentration of 255 g / L. The precision balance used for the mass measurement of the copper sulfate sample was one capable of measuring up to four decimal places. Here, the above-mentioned ultrapure water was water having an electric conductivity of 0.05882 μS / cm or less (electric resistivity (specific resistance) of 17.0 MΩ · cm or more). The measurement was used up to the fourth digit. Thereafter, the following operations (1) and (2) were carried out.
(1) 상술한 황산구리 수용액을 2mL 채취하여, 과잉의 요오드화 칼륨을 첨가한다.(1) Take 2 mL of the aqueous solution of copper sulfate described above, and add excess potassium iodide.
황산구리 수용액에 요오드화 칼륨을 첨가함으로써 이하의 반응을 진행한다.The following reaction proceeds by adding potassium iodide to an aqueous solution of copper sulfate.
2Cu2 + ＋ 4KI → 2CuI ＋ I2 ＋ 4K+ 2Cu 2 + + 4KI → 2CuI + I 2 + 4K +
(2) 티오황산나트륨으로 (1)의 반응에서 발생한 I2량을 적정하여 측정했다. 구체적으로는 요오드의 보라색이 사라지고 백탁액이 될 때까지 적정했다. 그리고 적정에 사용한 티오 황산나트륨의 물질량(몰)을 산출했다.(2) The amount of I 2 generated in the reaction of (1) with sodium thiosulfate was measured by titration. Specifically, the purple color of iodine disappeared and titrated until it became a cloudy solution. Then, the amount (moles) of the substance of sodium thiosulfate used in the titration was calculated.
I2 ＋ 2Na2S2O3 → Na2S4O6 ＋ 2NaII 2 + 2 Na 2 S 2 O 3 ? Na 2 S 4 O 6 + 2 NaI
적하한 티오황산나트륨과 같은 양의 물질량(몰)을 황산구리 샘플 중에 포함되는 구리의 물질량으로 했다.The amount (moles) of the same amount of sodium thiosulfate as the added drop was regarded as the amount of copper contained in the copper sulfate sample.
구리 농도는 이하의 식에 따라서 측정했다.The copper concentration was measured according to the following equation.
황산구리 샘플 중에 포함되는 구리의 질량(g)=황산구리 샘플 중에 포함되는 구리의 물질량(mol)×구리의 원자량(g/mol)=요오드(I2)의 적정에 필요했던 티오황산나트륨의 물질량(mol)×구리의 원자량(g/mol)(G) = amount of copper contained in copper sulfate sample (mol) x amount of copper (g / mol) = amount of substance (mol) of sodium thiosulfate necessary for titration of iodine (I 2 ) × atomic weight of copper (g / mol)
황산구리 샘플 중에 포함되는 황산구리오수화물의 질량(g)=황산구리 샘플 중에 포함되는 구리의 질량(g)×3.9292009Mass of copper sulfate pentahydrate contained in copper sulfate sample (g) = mass of copper contained in copper sulfate sample (g) x 3.9292009
(황산구리가 모두 황산구리오수화물이 되었다고 가정했다. )(Assuming that all copper sulfate has become copper sulfate pentahydrate).
황산구리의 농도(질량%)=황산구리 샘플 중에 포함되는 황산구리오수화물의 질량(g)/황산구리 샘플의 질량(g)×100(%)=황산구리 샘플 중의 구리의 질량(g)×3.9292009/황산구리 샘플의 질량(g)×100(%)(G) of the copper sulfate hydrate contained in the copper sulfate sample / mass of copper sulfate sample (g) x 100 (%) = mass of copper in the copper sulfate sample (g) x 3.9292009 / Mass (g) x 100 (%)
본 발명의 실시형태와 관련되는 황산구리의 제조 방법에 대해서 설명한다.A method for producing copper sulfate according to an embodiment of the present invention will be described.
우선, 구리를 포함하는 원료와 진한 황산 수용액을 반응조 내에서 교반하면서 가열함으로써, 진한 황산 수용액 중에 구리를 포함하는 원료를 용해시켜서 황산구리 원료 용액을 얻는다. 교반 수단은 특별히 제한되지 않지만, 예를 들면 공기를 불어 넣어 교반할 수 있다.First, a raw material containing copper and a concentrated sulfuric acid aqueous solution are heated while stirring in a reaction tank to dissolve the copper-containing raw material in the concentrated sulfuric acid aqueous solution to obtain a copper sulfate raw material solution. The stirring means is not particularly limited, but it can be stirred by, for example, blowing air.
구리를 포함하는 원료로는, 시판하는 황산구리 결정(농도 95~99.9질량%)을 이용할 수 있다. 이 황산구리 결정에는, Na, Mg, Al, Ca, In, Sn, Ag 등의 불순물이 포함되어 있다. 혹은, 순도 99.99% 이상의 전기 구리를 진한 황산 수용액으로 용해시킨 용액을, 구리를 포함하는 원료로서 사용할 수 있다. 진한 황산으로서는, 시판하는 진한 황산(황산 농도 95~99.9질량%)을 이용할 수 있다. 진한 황산의 수용액에 이용하는 물은 초순수인 것이 바람직하다. 상술한 초순수의 전기 저항율은 15MΩ·㎝ 이상인 것이 바람직하다. 전기 저항율이 15MΩ·㎝ 이상인 초순수를 이용함으로써, 진한 황산의 수용액 중 상술한 Na, Mg, Al, Ca, In, Sn, Ag 등의 불순물을 저감할 수 있는 경우가 있고, 얻어지는 황산구리 중의 Al 등의 원소 농도를 보다 저감할 수 있는 경우가 있기 때문이다. 상술한 초순수의 전기 저항율은 15.5MΩ·㎝ 이상인 것이 보다 바람직하고, 16.0MΩ·㎝ 이상인 것이 보다 바람직하고, 16.5MΩ·㎝ 이상인 것이 보다 바람직하며, 17.0MΩ·㎝ 이상인 것이 보다 바람직하다.Commercially available copper sulfate crystals (concentration 95 to 99.9 mass%) can be used as a raw material containing copper. This copper sulfate crystal contains impurities such as Na, Mg, Al, Ca, In, Sn, and Ag. Alternatively, a solution obtained by dissolving copper having a purity of 99.99% or more in a concentrated sulfuric acid aqueous solution can be used as a raw material containing copper. As the concentrated sulfuric acid, commercially available concentrated sulfuric acid (sulfuric acid concentration: 95 to 99.9 mass%) can be used. The water used for the aqueous solution of concentrated sulfuric acid is preferably ultra-pure water. The electrical resistivity of the above-mentioned ultrapure water is preferably 15 MΩ · cm or more. Impurities such as Na, Mg, Al, Ca, In, Sn and Ag in the aqueous solution of concentrated sulfuric acid can be reduced by using the ultra pure water having an electric resistivity of 15 MΩ · cm or more. This is because the element concentration can be further reduced. The electrical resistivity of the above-mentioned ultrapure water is more preferably 15.5 M? 占 ㎝ m or more, more preferably 16.0 M? 占 ㎝ m or more, more preferably 16.5 M? 占 ㎝ m or more, and more preferably 17.0 M? 占 ㎝ m or more.
그 다음, 황산구리 원료 용액을, 예를 들면 40~100℃, 바람직하게는 약 100℃로 가열하면서 황산구리 원료 용액 중의 수분을 증발시키고, 황산구리 원료 용액의 구리 농도가 예를 들면 100~250g/L가 될 때까지 농축한다. 농축된 황산구리 원료 용액을 반응조 내에서 서서히 냉각함으로써, 황산구리(예를 들면, 황산구리오수화물)의 결정을 석출시킬 수 있다.Then, the copper sulfate raw material solution is heated to a temperature of, for example, 40 to 100 ° C, preferably about 100 ° C to evaporate water in the copper sulfate raw material solution, and the copper concentration of the copper sulfate raw material solution is, for example, 100 to 250 g / Concentrate until ready. Crystals of copper sulfate (for example, copper sulfate hydrate) can be precipitated by gradually cooling the concentrated copper sulfate raw material solution in the reaction tank.
냉각 공정에서는, 가열 농축 후의 황산구리 원료 용액의 온도가 25℃가 될 때까지의 냉각 온도를 적정한 속도로 제어하는 것이 중요하다. 즉, 냉각 속도가 느릴수록 평형에 가까운 조건이 되고, 불순물은 석출하는 황산구리 중에는 잘 포함되지 않게 되어, 불순물이 황산구리 원료 용액 중에 잔존하는 경향을 보인다. 이 때문에, 냉각 속도를 느리게 할수록 석출하는 황산구리 중의 알루미늄 등의 황산구리오수화물을 구성하는 원소(Cu, S, O, H) 이외의 원소의 농도를 낮게 할 수 있다.In the cooling step, it is important to control the cooling temperature until the temperature of the copper sulfate raw material solution after heating and condensation reaches 25 캜 at an appropriate rate. That is, the closer the cooling rate is, the closer to equilibrium, and the impurities tend not to be contained in the precipitated copper sulfate, and the impurities tend to remain in the copper sulfate raw material solution. Therefore, the lower the cooling rate, the lower the concentrations of the elements other than the elements (Cu, S, O, H) constituting the copper sulfate hydrate of aluminum or the like in the precipitated copper sulfate.
구체적으로는, 황산구리 원료 용액의 온도가 가열 농축할 때의 온도(예를 들면 100℃)부터 25℃가 될 때까지의 황산구리 원료 용액의 냉각 속도(황산구리 원료 용액의 온도가 저하하는 속도)를 15℃／hr 이하로 하고, 보다 바람직하게는 10℃／hr 이하로 하며, 더욱 바람직하게는 7℃／hr 이하로 하고, 더욱 바람직하게는 5℃／hr 이하로 한다. 냉각 수단은 특별히 한정되지 않지만, 예를 들면, 수냉, 서냉, 공냉, 열교환기를 이용한 냉각 등의 냉각 방법을 이용할 수 있다.Specifically, the cooling rate of the copper sulfate raw material solution (the rate at which the temperature of the copper sulfate raw material solution is lowered) until the temperature of the copper sulfate raw material solution is increased from the temperature (for example, 100 占 폚) ° C / hr or less, more preferably 10 ° C / hr or less, further preferably 7 ° C / hr or less, and further preferably 5 ° C / hr or less. The cooling means is not particularly limited. For example, cooling methods such as water cooling, slow cooling, air cooling, and cooling using a heat exchanger can be used.
냉각 공정에 의해서, 황산구리 원료 용액으로부터 황산구리의 석출물을 얻을 수 있다. 얻어진 황산구리는 그 주성분이 황산구리오수화물인 경우가 많다. 얻어진 황산구리의 석출물을 고액 분리하고, 건조 후, 기류 반송하여 개별적으로 포장함으로써, 본 실시형태와 관련되는 황산구리(결정 제품)를 얻을 수 있다.By the cooling step, a precipitate of copper sulfate can be obtained from the copper sulfate raw material solution. The obtained copper sulfate is often composed mainly of copper sulfate pentahydrate. The obtained precipitates of copper sulfate are subjected to solid-liquid separation, dried, air-conditioned, and individually packed to obtain copper sulfate (crystal product) according to the present embodiment.
본 실시형태와 관련되는 황산구리(결정 제품)에 초순수 등의 용매를 더하여, 용매에 상술한 황산구리를 용해시킴으로써, 본 실시형태와 관련되는 황산구리 용액을 얻을 수 있다. 황산구리를 용해하기 위한 용매로서는, 물, 하나 혹은 복수의 유기용매, 하나 혹은 복수의 무기 용매, 또는, 물, 하나 혹은 복수의 유기용매 및 하나 혹은 복수의 무기 용매로 이루어지는 군으로부터 선택되는 1종 이상을 포함하는 용매를 들 수 있다. 유기용매로서는, 알코올, 방향족 탄화수소, 지방산, 사슬식 탄화수소, 환식 탄화수소, 유기산을 이용할 수 있다. 또한, 무기 용매로서 황산, 염산, 질산, 불화 수소산 등의 무기산 등을 이용할 수 있다. 또한, 용매로서 물을 이용한 경우에는 황산구리 수용액을 얻을 수 있다.The copper sulfate solution according to the present embodiment can be obtained by adding a solvent such as ultrapure water to the copper sulfate (crystal product) according to the present embodiment and dissolving the above described copper sulfate in the solvent. Examples of the solvent for dissolving copper sulfate include water, one or more organic solvents, one or more inorganic solvents, or at least one selected from the group consisting of water, one or more organic solvents, and one or more inorganic solvents And the like. As the organic solvent, alcohols, aromatic hydrocarbons, fatty acids, chain hydrocarbons, cyclic hydrocarbons, and organic acids can be used. As the inorganic solvent, inorganic acids such as sulfuric acid, hydrochloric acid, nitric acid, hydrofluoric acid and the like can be used. When water is used as a solvent, an aqueous solution of copper sulfate can be obtained.
상술한 황산구리 수용액을 이용할 때에 사용하는 초순수의 전기 저항율은 15.0MΩ·㎝ 이상인 것이 바람직하고, 15.5MΩ·㎝ 이상인 것이 보다 바람직하며, 16.0MΩ·㎝ 이상인 것이 보다 바람직하고, 16.5MΩ·㎝ 이상인 것이 보다 바람직하며, 17.0MΩ·㎝ 이상인 것이 더욱 바람직하다. 전기 저항율이 15MΩ·㎝ 이상인 초순수를 이용함으로써, 황산구리 수용액 중의 Na, Mg, Al, Ca, In, Sn, Ag 등의 불순물 농도를 저감할 수 있는 경우가 있기 때문이다.The electrical resistivity of the ultrapure water used in the above-mentioned aqueous solution of copper sulfate is preferably 15.0 MΩ · cm or more, more preferably 15.5 MΩ · cm or more, more preferably 16.0 MΩ · cm or more, and more preferably 16.5 MΩ · cm or more And more preferably not less than 17.0 M? 占. M. This is because impurity concentrations of Na, Mg, Al, Ca, In, Sn and Ag in an aqueous solution of copper sulfate can be reduced by using ultra pure water having an electric resistivity of 15 MΩ · cm or more.
상술한 황산구리 용액은 구리 농도가 50~100g/L 정도이다. 또한, 상술한 황산구리 용액 중의 Al 농도는 0.019질량ppm 이하인 것이 바람직하고, 0.016질량ppm 이하인 것이 보다 바람직하며, 0.012질량ppm 이하인 것이 더욱 바람직하다. 또한, 상술한 황산 구리 용액 중의 TOC 농도는 1.10질량ppm 이하인 것이 바람직하다. 상술한 황산구리 용액 중의 TOC 농도는, 0.9질량ppm 이하가 더욱 바람직하고, 0.7질량ppm 이하가 더욱 바람직하며, 0.15질량ppm 이하가 더욱 바람직하다.The above copper sulfate solution has a copper concentration of about 50 to 100 g / L. The Al concentration in the above-described copper sulfate solution is preferably 0.019 mass ppm or less, more preferably 0.016 mass ppm or less, and further preferably 0.012 mass ppm or less. The TOC concentration in the above copper sulfate solution is preferably 1.10 mass ppm or less. The TOC concentration in the above described copper sulfate solution is more preferably 0.9 mass ppm or less, more preferably 0.7 mass ppm or less, and further preferably 0.15 mass ppm or less.
상술한 황산구리 또는 황산구리 용액을 이용해서 도금액을 작성할 수 있다. 본 실시형태와 관련되는 도금액은, Al 농도가 0.018질량ppm 이하이고, 바람직하게는 0.012질량ppm 이하이다.The plating solution can be prepared using the copper sulfate or copper sulfate solution described above. The plating solution according to the present embodiment has an Al concentration of 0.018 mass ppm or less, preferably 0.012 mass ppm or less.
본 실시형태와 관련되는 도금액은, 추가로 이하 (20－1)~(20－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시킨다.The plating liquid according to this embodiment further satisfies any one, two, three or four of the following (20-1) to (20-4).
(20－1) In 농도가, 0.23질량ppm 이하이다,(20-1) the In concentration is 0.23 mass ppm or less,
(20－2) Tl 농도가, 0.01질량ppm 이하이다,(20-2) the Tl concentration is not more than 0.01 mass ppm,
(20－3) Sn 농도가, 0.23질량ppm 이하이다,(20-3) The Sn concentration is 0.23 mass ppm or less,
(20－4) Ag 농도가, 0.23질량ppm 이하이다.(20-4) The Ag concentration is 0.23 mass ppm or less.
본 실시형태와 관련되는 도금액은, 추가로 이하 (21－1)~(21－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시킨다.The plating liquid according to the present embodiment further satisfies any one, two, three or four of the following (21-1) to (21-4).
(21－1) In 농도가, 0.01질량ppm 이하이다,(21-1) the concentration of In is 0.01 mass ppm or less,
(21－2) Tl 농도가, 0.01질량ppm 이하이다,(21-2) the Tl concentration is 0.01 mass ppm or less,
(21－3) Sn 농도가, 0.01질량ppm 이하이다,(21-3) Sn concentration is 0.01 mass ppm or less,
(21－4) Ag 농도가, 0.01질량ppm 이하이다.(21-4) Ag concentration is 0.01 mass ppm or less.
또한, 구리 농도가 50~100g/L인 것이 바람직하다. 더욱 바람직하게는, 구리 농도가 50~90g/L이다.The copper concentration is preferably 50 to 100 g / L. More preferably, the copper concentration is 50 to 90 g / L.
본 실시형태와 관련되는 도금액은, 상술한 농도가 99.9질량% 이상 99.999질량% 이하인 황산구리를 이용하여 조제할 수 있고, 상기 도금액을 이용해서 구리 도금을 실시함으로써 반도체 회로 기판을 제조할 수 있다. 본 실시형태의 일 실시형태에 있어서는, 상기 도금액을 이용해서 구리 도금을 실시한 반도체 회로 기판을 이용하여 전자기기를 제조할 수 있다.The plating solution according to the present embodiment can be prepared using copper sulfate having the above-described concentration of 99.9 mass% or more and 99.999 mass% or less, and copper plating is performed using the plating solution, whereby a semiconductor circuit board can be manufactured. In an embodiment of the present embodiment, an electronic device can be manufactured by using a semiconductor circuit board on which copper plating is performed using the plating liquid.
[실시예][Example]
이하에 본 발명의 실시예를 비교예와 함께 나타내지만, 이들 실시예는 본 발명 및 그 이점을 보다 잘 이해하기 위해서 제공하는 것으로서, 발명이 한정되는 것을 의도하는 것은 아니다.Examples of the present invention will be described below with reference to comparative examples. However, these examples are provided for better understanding of the present invention and its advantages, and are not intended to limit the invention.
구리 원료로서 시판하는 황산구리(Cu：99% 이상, Na：10ppm, Mg：1.5ppm, Al：4.5ppm, Ca：3.9ppm, In：5.6ppm, Sn：10ppm, Ag：3.5ppm)를 전기 저항율이 15MΩ·㎝ 이상인 초순수와 혼합하고, 100℃에서 가열 교반하여 황산구리 원료 용액을 제작했다. 그 후, 상술한 황산구리 원료 용액을 농축조로 옮기고 온도 100℃에서 2~10시간 유지함으로써, 황산구리 원료 용액 중의 수분을 증발시켜서 구리 농도가 150~250g/L가 될 때까지 농축했다. 가열 농축 후의 황산구리 원료 용액을 정출조로 옮기고, 정출조에서 황산구리 원료 용액이 25℃가 될 때까지, 표 1에 나타내는 냉각 속도로 냉각했다. 냉각 후의 처리물을 고액 분리 장치에 공급하여 고액 분리함으로써 황산구리(황산구리오수화물)의 석출물을 얻었다. 황산구리의 석출물을 건조시켜서, 실시예 1~3 및 비교예 1과 관련되는 황산구리의 결정 제품을 얻었다.(Copper: 99% or more, Na: 10 ppm, Mg: 1.5 ppm, Al: 4.5 ppm, Ca: 3.9 ppm, In: 5.6 ppm, Sn: 10 ppm, and Ag: 3.5 ppm) Mixed with ultrapure water of 15 M? 占 이상 m or more and heated and stirred at 100 占 폚 to prepare a copper sulfate raw material solution. Thereafter, the above-described copper sulfate raw material solution was transferred to a concentration tank and maintained at a temperature of 100 DEG C for 2 to 10 hours to evaporate moisture in the copper sulfate raw material solution and concentrate until the copper concentration reached 150 to 250 g / L. The copper sulfate raw material solution after the heating and concentration was transferred to the crystallization tank and cooled at the cooling rate shown in Table 1 until the copper sulfate raw material solution reached 25 캜 in the fixing tank. The treated product after cooling was supplied to a solid-liquid separator to be subjected to solid-liquid separation to obtain a precipitate of copper sulfate (hydrous copper sulfate hydrate). The precipitate of copper sulfate was dried to obtain a crystal product of copper sulfate related to Examples 1 to 3 and Comparative Example 1.
실시예 1~3 및 비교예 1~3과 관련되는 황산구리에 대해서, 상술한 측정 방법에 따라, 황산구리 중의 Na, K, Co, Cr, Ni, Zn, Al, Ca, Mg, Cd, Mn, Pb, Sn, As, Cl, Fe, Ag, Tl, Ti 및 In의 농도와 황산구리의 농도를 측정했다. 황산구리 중의 불순물 원소를 Na, K, Co, Cr, Ni, Zn, Al, Ca, Mg, Cd, Mn, Pb, Sn, As, Cl, Fe, Ag, Tl, Ti 및 In로 하고, 이것들의 농도 분석 결과의 합계를 Cu 이외의 불순물의 합계 농도로 했다. 실시예 1~3 및 비교예 1~3과 관련되는 황산구리 중의 Al, In, Tl, Sn, Ag의 농도, 불순물의 합계 농도, 전유기 탄소(TOC) 농도의 측정 결과를 표 1에 나타낸다.K, Co, Cr, Ni, Zn, Al, Ca, Mg, Cd, Mn, and Pb in the copper sulfate were measured for copper sulfate in Examples 1 to 3 and Comparative Examples 1 to 3 , Sn, As, Cl, Fe, Ag, Tl, Ti and In and the concentrations of copper sulfate were measured. Wherein the impurity element in the copper sulfate is Na, K, Co, Cr, Ni, Zn, Al, Ca, Mg, Cd, Mn, Pb, Sn, As, Cl, Fe, Ag, Tl, Ti, The total of the analysis results was made the total concentration of the impurities other than Cu. Table 1 shows the measurement results of the concentrations of Al, In, Tl, Sn and Ag, the total concentration of impurities, and the total organic carbon (TOC) concentration in copper sulfate in Examples 1 to 3 and Comparative Examples 1 to 3.
실시예 1~3 및 비교예 1~3과 관련되는 황산구리를 이용하여 황산구리 수용액을 제작하고, 하기에 나타내는 소정의 첨가제를 더해서 전기 도금액을 제작했다. 실리콘 웨이퍼 상에 화학 증착(CVD)법을 이용하여 SiO2막을 퇴적시켰다. 이 SiO2막의 표면에 배리어층인 Ta층을 스퍼터링에 의해 마련했다. 그리고 다시 Ta층 위에 두께 80nm의 Cu 시드층을 스퍼터링에 의해 형성한 후, 전기 구리 도금으로 두께 30㎛의 구리 피막을 형성했다. 또한, 실시예 1~3 및 비교예 1~3과 관련되는 황산구리에 대해서 각각 45g의 샘플을 채취하고, 초순수(전기 저항율은 15MΩ·㎝ 이상)에 상기 샘플을 용해하여 200mL의 황산구리 수용액으로 했다(하기 전기 도금욕과 황산구리와, 그 밖의 액의 비율을 동일하게 하고 있다.). 그리고 상술한 측정 방법에서 황산구리 샘플을 상기 황산구리 수용액으로 바꿔 읽어서 상술한 방법에 따라서 황산구리 수용액 중의 Al 농도와 전유기 탄소 농도를 측정했다. 그 결과를 표에 나타낸다.An aqueous copper sulfate solution was prepared using the copper sulfate associated with Examples 1 to 3 and Comparative Examples 1 to 3, and the following prescribed additives were added to prepare an electroplating solution. An SiO 2 film was deposited on a silicon wafer by chemical vapor deposition (CVD). A Ta layer, which is a barrier layer, was formed on the surface of this SiO 2 film by sputtering. Then, a Cu seed layer having a thickness of 80 nm was formed on the Ta layer by sputtering, and then a copper film having a thickness of 30 탆 was formed by electroplating. A sample of 45 g each of copper sulfate related to Examples 1 to 3 and Comparative Examples 1 to 3 was sampled and the sample was dissolved in ultrapure water (electrical resistivity of 15 M? 占 이상 m or more) to obtain 200 ml of an aqueous copper sulfate solution The ratio of the electroplating bath, the copper sulfate, and the other liquids are the same). In the measurement method described above, the sample of copper sulfate was replaced with the aqueous solution of copper sulfate, and the Al concentration and the total organic carbon concentration in the aqueous solution of copper sulfate were measured according to the above-described method. The results are shown in the table.
전기 도금욕 및 전기 도금 조건은 이하와 같다.The electroplating bath and electroplating conditions are as follows.
(전기 도금욕 및 전기 도금 조건)(Electroplating bath and electroplating conditions)
·전기 도금욕· Electroplating bath
전기 도금욕으로서 이하의 조성의 도금욕을 이용했다.As the electroplating bath, a plating bath having the following composition was used.
황산구리(황산구리오수화물로서 첨가, 구리：57.3g/L) 농도：225g/LCopper sulfate (added as copper sulfate pentahydrate, copper: 57.3 g / L) Concentration: 225 g / L
황산 농도：55g/LSulfuric acid concentration: 55 g / L
염화물 이온：60ppmChloride ion: 60 ppm
폴리에틸렌 글리콜(평균 분자량 10000) 농도：500mg/LPolyethylene glycol (average molecular weight 10,000) Concentration: 500 mg / L
비스(3－술포프로필)디술피드(SPS) 농도：20mg/LBis (3-sulfopropyl) disulfide (SPS) concentration: 20 mg / L
야누스 그린 농도：1mg/LJanus green concentration: 1 mg / L
용매에는 초순수(전기 저항율은 15MΩ·㎝ 이상)를 이용했다.Ultrapure water (electric resistivity: 15 MΩ · cm or more) was used as the solvent.
·전기 도금 조건· Electroplating conditions
도금 조건은 도금욕 온도 40℃, 음극 전류 밀도 2.0A/d㎡, 양극 전류 밀도 2.0A/d㎡, 도금 시간：70~90분간으로 했다.The plating conditions were a plating bath temperature of 40 캜, a cathode current density of 2.0 A / dm 2, a cathode current density of 2.0 A / dm 2, and a plating time of 70 to 90 minutes.
이 구리 피막에 대해서, 4탐침법으로 전기 저항값을 측정하여 도금성을 평가했다. 도금성의 평가는, 전기 저항값이 0.020×10- 4Ω／㎝ 미만인 경우를 ◎, 0.020×10-4Ω／㎝ 이상, 0.040×10- 4Ω／㎝ 미만인 경우를 ○, 0.040×10- 4Ω／㎝ 이상인 경우를 ×로 평가했다. 결과를 표 1에 나타낸다.The copper coating was subjected to the 4-probe method to measure the electrical resistance value to evaluate the plating ability. Evaluation of plating, the electric resistance value is 0.020 × 10 - 4 Ω / ㎝ the ◎, 0.020 × 10 -4 Ω / ㎝ or more, 0.040 × 10 is less than - a 4 Ω / ㎝ less than ○, 0.040 × 10 - 4 Cm < 2 > The results are shown in Table 1.
[표 1][Table 1]
황산구리 원료 용액으로부터 황산구리오수화물을 석출시킬 때의 냉각 속도를 적정한 속도로 조정한 실시예 1~3에서는, Al 농도를 0.08질량ppm 이하로 저감할 수 있고, 도금성도 양호했다. 또한, 황산구리 용액의 Al 농도를 0.019질량ppm 이하로 함에 따라서, 도금성도 양호했다. 한편, 냉각 속도가 너무 빠른 비교예 1에서는, Al을 저감시키지 못하여, 도금성도 양호하지 않았다. 비교예 2는 일본 특허공보 제3987069호, 비교예 3은 일본 특허공보 제3943583호에 기재된 고순도 황산구리의 제조 방법에 준해서 제조한 황산구리를 이용하고, 실시예 1과 동일한 조건으로 구리 피막을 형성한 것이다. 비교예 2 및 3 모두 황산구리 농도는 높지만, 실시예 1~3에 비해서 알루미늄 농도가 높기 때문에 구리 피막의 전기 저항값이 높아지고, 실시예 1~3에 비해서 도금성이 떨어지는 결과가 되었다.In Examples 1 to 3 in which the cooling rate at the time of precipitating copper sulfate pentahydrate from the copper sulfate raw material solution was adjusted at a proper rate, the Al concentration could be reduced to 0.08 mass ppm or less and the plating ability was also good. Also, as the Al concentration of the copper sulfate solution was 0.019 mass ppm or less, the plating performance was also good. On the other hand, in Comparative Example 1 in which the cooling rate was too high, the Al could not be reduced and the plating performance was not good. Comparative Example 2 was made in accordance with Japanese Patent Publication No. 3987069 and Comparative Example 3 was made in accordance with the method for producing high purity copper sulfate described in Japanese Patent Publication No. 3943583 and a copper film was formed under the same conditions as in Example 1 will be. In Comparative Examples 2 and 3, although the copper sulfate concentration was high, the electrical resistance value of the copper coating was higher because the aluminum concentration was higher than those of Examples 1 to 3, and the plating performance was lower than in Examples 1 to 3.
또한, 상술한 조성의 도금액을 이용하여 반도체 웨이퍼, 그 중에서도 관통 실리콘 비어를 가지는 반도체 웨이퍼의 배선을 형성할 수 있다. 또한, 상술한 조성 이외에, 예를 들면, 일본 특허공보 제5388191호에 기재한 조성 등, 이미 알려진 조성의 도금액을 이용해서 반도체 웨이퍼의 배선이나 반도체 회로 기판상의 회로를 형성할 수 있다. 즉, 상술한 조성의 도금액에 의해서, 집적회로나, 상기 집적회로를 탑재한 패키지 기판 등의 반도체 회로 기판을 형성할 수 있다.In addition, wirings of semiconductor wafers, among them semiconductor wafers having penetrated silicon vias, can be formed by using the plating solution of the above-mentioned composition. In addition to the above-described composition, wiring of a semiconductor wafer or a circuit on a semiconductor circuit board can be formed by using a plating solution of a known composition such as the composition described in Japanese Patent Publication No. 5388191, for example. That is, a semiconductor circuit substrate such as an integrated circuit or a package substrate on which the integrated circuit is mounted can be formed by the plating liquid having the above-described composition.
Claims (25)
이하의 (3－1)~(3－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시키는 황산구리：
(3－1) In 농도가 1.0질량ppm 이하이다,
(3－2) Tl 농도가 0.05질량ppm 이하이다,
(3－3) Sn 농도가 1.0질량ppm 이하이다,
(3－4) Ag 농도가 1.0질량ppm 이하이다.The method according to claim 1,
Copper sulfate which satisfies any one, two, three or four of the following (3-1) to (3-4)
(3-1) the In concentration is 1.0 mass ppm or less,
(3-2) the Tl concentration is 0.05 mass ppm or less,
(3-3) the Sn concentration is not more than 1.0 mass ppm,
(3-4) Ag concentration is 1.0 mass ppm or less.
이하의 (4－1)~(4－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시키는 황산구리：
(4－1) In 농도가 0.5질량ppm 이하이다,
(4－2) Tl 농도가 0.05질량ppm 이하이다,
(4－3) Sn 농도가 0.5질량ppm 이하이다,
(4－4) Ag 농도가 0.8질량ppm 이하이다.The method according to claim 1,
Copper sulfate which satisfies any one, two, three or four of the following (4-1) to (4-4)
(4-1) the concentration of In is not more than 0.5 mass ppm,
(4-2) the Tl concentration is 0.05 mass ppm or less,
(4-3) Sn concentration is 0.5 mass ppm or less,
(4-4) Ag concentration is 0.8 mass ppm or less.
이하의 (5－1)~(5－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시키는 황산구리：
(5－1) In 농도가 0.2질량ppm 이하이다,
(5－2) Tl 농도가 0.05질량ppm 이하이다,
(5－3) Sn 농도가 0.2질량ppm 이하이다,
(5－4) Ag 농도가 0.3질량ppm 이하이다.The method according to claim 1,
Copper sulfate satisfying any one, two, three or four of the following (5-1) to (5-4):
(5-1) the In concentration is 0.2 mass ppm or less,
(5-2) the Tl concentration is 0.05 mass ppm or less,
(5-3) Sn concentration is 0.2 mass ppm or less,
(5-4) Ag concentration is 0.3 mass ppm or less.
황산구리의 농도가 99.9질량% 이상 99.999질량% 이하인 황산구리.5. The method according to any one of claims 1 to 4,
A copper sulfate having a copper sulfate concentration of 99.9 mass% or more and 99.999 mass% or less.
황산구리의 농도가 99.995질량% 이하인 황산구리.6. The method of claim 5,
A copper sulfate having a copper sulfate concentration of 99.995 mass% or less.
황산구리의 농도가 99.9질량% 이상 99.992질량% 이하인 황산구리.5. The method according to any one of claims 1 to 4,
A copper sulfate having a copper sulfate concentration of 99.9% by mass or more and 99.992% by mass or less.
황산구리의 농도가 99.9질량% 이상 99.99질량% 이하인 황산구리.5. The method according to any one of claims 1 to 4,
A copper sulfate having a copper sulfate concentration of 99.9 mass% or more and 99.99 mass% or less.
황산구리의 농도가 99.9질량% 이상 99.99질량% 이하이고, Cu 이외의 금속 불순물의 농도의 합계가 30질량ppm 이하인 황산구리.5. The method according to any one of claims 1 to 4,
Wherein the concentration of copper sulfate is 99.9 mass% or more and 99.99 mass% or less, and the sum of concentrations of metal impurities other than Cu is 30 mass ppm or less.
전유기 탄소 농도가 10질량ppm 이하인 황산구리.The method according to claim 1,
Copper sulfate with a total organic carbon concentration of 10 mass ppm or less.
전유기 탄소 농도가 10질량ppm 이하인 황산구리.5. The method of claim 4,
Copper sulfate with a total organic carbon concentration of 10 mass ppm or less.
전유기 탄소 농도가 10질량ppm 이하인 황산구리.10. The method of claim 9,
Copper sulfate with a total organic carbon concentration of 10 mass ppm or less.
전유기 탄소 농도가 1.10질량ppm 이하인 황산구리 용액.15. The method of claim 14,
A copper sulfate solution having a total organic carbon concentration of 1.10 mass ppm or less.
이하의 (20－1)~(20－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시키는 도금액.
(20－1) In 농도가, 0.23질량ppm 이하이다,
(20－2) Tl 농도가, 0.01질량ppm 이하이다,
(20－3) Sn 농도가, 0.23질량ppm 이하이다,
(20－4) Ag 농도가, 0.23질량ppm 이하이다.18. The method of claim 17,
The plating solution satisfies any one, two, three or four of the following (20-1) to (20-4).
(20-1) the In concentration is 0.23 mass ppm or less,
(20-2) the Tl concentration is not more than 0.01 mass ppm,
(20-3) The Sn concentration is 0.23 mass ppm or less,
(20-4) The Ag concentration is 0.23 mass ppm or less.
이하의 (21－1)~(21－4) 중 어느 1개, 2개, 3개 또는 4개를 만족시키는 도금액.
(21－1) In 농도가, 0.01질량ppm 이하이다,
(21－2) Tl 농도가, 0.01질량ppm 이하이다,
(21－3) Sn 농도가, 0.01질량ppm 이하이다,
(21－4) Ag 농도가, 0.01질량ppm 이하이다.18. The method of claim 17,
The plating solution satisfies any one, two, three or four of the following (21-1) to (21-4).
(21-1) the concentration of In is 0.01 mass ppm or less,
(21-2) the Tl concentration is 0.01 mass ppm or less,
(21-3) Sn concentration is 0.01 mass ppm or less,
(21-4) Ag concentration is 0.01 mass ppm or less.
구리 농도가 50~100g/L인 도금액.18. The method of claim 17,
A plating solution having a copper concentration of 50 to 100 g / L.
구리 농도가 50~100g/L인 도금액.20. The method of claim 19,
A plating solution having a copper concentration of 50 to 100 g / L.
구리 농도가 50~90g/L인 도금액.18. The method of claim 17,
A plating solution having a copper concentration of 50 to 90 g / L.
구리 농도가 50~90g/L인 도금액.20. The method of claim 19,
A plating solution having a copper concentration of 50 to 90 g / L.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| JP2017076786 | 2017-04-07 | ||
| JP2018019613A JP2018172265A (en) | 2017-03-31 | 2018-02-06 | Copper sulfate, copper sulfate solution, plating solution, method for producing copper sulfate, method for producing semiconductor circuit board, and method for producing electronic apparatus |
| JPJP-P-2018-019613 | 2018-02-06 |
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| JP6649303B2 (en) | 2017-02-28 | 2020-02-19 | 国立大学法人茨城大学 | Copper wiring and method of manufacturing the same |
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