KR20180110442A - ignition-reinforced plasma torch device - Google Patents

Abstract

The present invention is a technique for performing efficient ignition even with the application of a low voltage in a plasma torch. The present invention is a technique for efficiently generating an electric spark for ignition with the application of a low voltage by narrowly adjusting a gap between a cathode and an anode and sufficiently securing the inflow of nitrogen gas from the outside for ignition. In particular, the present invention relates to a technique for causing a flame generated from ignition to induce a uniform temperature distribution over a large area in a plasma torch as nitrogen gas flowing into the cathode and the anode is swollen. According to the present invention, it is possible to significantly reduce the wear and corrosion of a part where ignition occurs due to the application of a low voltage, thereby prolonging the life of the plasma torch. An ignition-reinforced plasma torch device includes: a first torch block; a second torch block; and an ignition enhancement ring.

Description

Ignition-reinforced plasma torch device {

The present invention relates to a technique for performing efficient ignition even with application of a low voltage in a plasma torch.

More particularly, the present invention relates to a method of controlling the distance between the cathode and the anode by narrowly adjusting the gap between the cathode and the anode so as to efficiently generate an electrical spark for the ignition even with the application of a low voltage and to sufficiently secure the inflow amount of nitrogen gas from the outside for ignition Technology.

In particular, the present invention relates to a technique for causing a flame arising from an ignition to induce a uniform temperature distribution over a large area in a plasma torch as the nitrogen gas flowing into the cathode and the anode portion is swollen.

In general, since waste gas used as a semiconductor process gas contains harmful components, the harmful components are filtered through the scrubber before being discharged to the outside.

At this time, there is a method of exposing a flame as a means for filtering the waste gas in the scrubber. That is, a plasma torch is provided in a position where the waste gas passes through the scrubber so that the waste gas is exposed to the flame of the plasma torch so that the harmful component is filtered.

Here, the plasma torch generates an electrical spark between the cathode and the anode, which is included in the plasma torch, to generate the flame, and the flame is generated by injecting nitrogen gas from the outside into the portion where the electrical spark occurs.

However, if electrical sparks are repeatedly generated between the cathode and the anode, if foreign substances are deposited on the gap between the cathode and the anode, or if the gap between the cathode and the anode is worn by wear or corrosion, .

As such, if a high voltage is applied to the cathode and the anode to generate an electrical spark, the strength of the abrasion or corrosion is increased at the portion, and the life of the plasma torch is shortened.

If the gap between the cathode and the anode is narrowed as much as possible, it is possible to generate an electrical spark by applying a low voltage to the cathode and the anode. .

However, if the gap between the cathode and the anode is narrowed as much as possible, there arises a problem that it is difficult to secure a sufficient flow rate and a flow path of the nitrogen gas to flow into the portion where the electrical spark occurs.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an ignition reinforced type plasma torch device capable of improving ignition with a low voltage while ensuring a flow rate of nitrogen gas flowing into a plasma torch.

It is another object of the present invention to provide an ignition reinforced type plasma torch device capable of generating a flame having a uniform temperature distribution over a wide area within a plasma torch.

It is another object of the present invention to provide an ignition reinforced type plasma torch device capable of drastically improving the service life of a plasma torch.

It is another object of the present invention to provide an ignition reinforced type plasma torch device capable of adjusting the gap between the cathode and the anode which generates ignition.

In order to achieve the above object, the present invention provides a plasma display panel comprising: a first torch block which is charged by a power source supplied from the outside, taking charge of one of a cathode and an anode (hereinafter, referred to as a 'first electrode'); A second torch block, one end of which is disposed close to the one end of the first torch block and is charged by a power source supplied from the outside by taking charge of a second electrode opposite to the first one of the cathode and the anode; The one end portion of the first torch block adjacent to the second torch block is charged with the first electrode and is adjacent to the second torch block, And a plurality of fluid guide grooves arranged intermittently along the outer surface rim of the first guide block and the second torch block in the direction of connecting the first and second torch blocks, And an ignition reinforcing ring for allowing the nitrogen gas supplied from the outside to reach the gap with the second torch block via the fluid guide groove.

Here, the fluid guide groove may be formed such that the nitrogen gas introduced from the outside is inclined obliquely with respect to the direction connecting the first and second torch blocks so as to generate a swirl between the ignition reinforcement ring and the second torch block.

In addition, since at least one gas injection hole is formed to surround the outer surface of the ignition enhancing ring with an inner diameter relatively larger than the outer diameter of the ignition reinforcement ring, the nitrogen gas supplied from the outside is injected into the gas injection hole And a swirl reinforcing ring for allowing the fluid guide groove to sequentially reach the gap with the second torch block.

It is preferable that the gas injection hole is formed so as to be in a forward direction with respect to an inclining direction of the fluid guide groove so as to reinforce the swirl of the nitrogen gas through the fluid guide groove.

An ignition adjusting block fixed on an outer surface of the first torch block in a state connected to the ignition reinforcement ring and moving along an outer surface of the first torch block to adjust a distance between the ignition reinforcement ring and the second torch block; As shown in FIG.

Since the ignition strengthening ring is provided between the first and second torch blocks, the efficiency of the ignition can be remarkably improved despite the low voltage applied to the electric spark.

In addition, the present invention has the advantage that the wear and corrosion of the portion where the ignition occurs due to application of a low voltage can be remarkably reduced.

In addition, the present invention provides a plurality of fluid guide grooves on the outer surface of the ignition reinforcing ring, thereby ensuring a sufficient flow rate of the nitrogen gas flowing from the outside while maintaining high efficiency of the ignition.

In addition, since the fluid guide groove is inclined obliquely with respect to the direction connecting the first and second torch blocks, nitrogen gas introduced from the outside causes a swirl between the ignition reinforcing ring and the two torch blocks, Shows the advantage of generating a flame having a uniform temperature distribution over a large area.

Further, the present invention has an advantage that the gap between the cathode and the anode for generating ignition is freely adjusted by providing the ignition adjusting block integrally connected to the ignition reinforcement ring.

1 is a cross-sectional view of an ignition-enhanced type plasma torch device according to the present invention,
[Fig. 2] is an enlarged view of a portion of [Fig. 1]
3 is a top plan view of the first torch block, the ignition adjustment block, the ignition reinforcement ring, and the swirl reinforcement ring in FIG. 1,
4 is a bottom perspective view of Fig. 3, Fig.
[Fig. 5] is an assembled perspective view of [Fig. 4]
FIG. 6 is an enlarged view of an ignition reinforcing ring according to the present invention. FIG.

Hereinafter, the present invention will be described in detail with reference to the drawings.

FIG. 1 is a cross-sectional view of an ignition reinforcement type plasma torch apparatus according to the present invention, and FIG. 2 is an enlarged view of a part of FIG.

Referring to FIG. 1 and FIG. 2, the ignition-enhanced type plasma torch apparatus according to the present invention generates electrical sparks and eventually generates flames by ignition.

Specifically, a flame can be generated by injecting air (for example, nitrogen gas) from the outside into a portion where electrical sparks are generated. At this time, flame patterns due to ignition can be expressed in various patterns according to flow direction, flow rate, and flow rate of nitrogen gas injected from the outside.

In the present invention, as in the case of the plasma torch device, the first torch block 100 and the second torch block 100 are formed as an example of a cathode electrode to generate electrical sparks from an external power source, 200 are provided.

In this case, the first torch block 100 and the second torch block 200 generate electrical sparks at their closest positions, wherein the present invention is characterized in that the first torch block 100 and the second torch block 200, As the block 200 is brought as close as possible, an effective electric spark is generated even at a low voltage charge, and a flow channel for supplying a sufficient flow rate of nitrogen gas is secured in a portion where the electric spark occurs.

To this end, according to the present invention, the ignition strengthening ring 300, the swirl strengthening ring 400, and the ignition adjusting block are disposed at positions where the first torch block 100 and the second torch block 200 are close to each other, And the components of the system will be described in detail below.

FIG. 3 is a top perspective view of the first torch block, the ignition adjustment block, the ignition reinforcing ring, and the swirl strengthening ring separated from each other in FIG. 1, and FIG. 4 is a bottom perspective view of FIG. [Fig. 5] is a combined perspective view of [Fig. 4].

5, the ignition reinforced type plasma torch device according to the present invention includes a first torch block 100, a second torch block 200, an ignition reinforcement ring 300, a swirl reinforcement ring (not shown) 400, and an ignition adjustment block.

The first torch block 100 takes charge of one of a cathode and an anode (hereinafter referred to as a 'first electrode') and is charged by a power source supplied from the outside.

The ignition enhancer ring 300 is connected to one end of the first torch block 100 adjacent to the second torch block 200 so that the ignition reinforcement ring 300 is identical to the first torch block 100 And is charged to have the first electrode.

The second torch block 200 includes a first torch block 100 and a second torch block 200. The first torch block 200 includes a first torch block 100 and a second torch block 200, do.

As a result, an electric spark is generated between the ignition reinforcement ring 300 and the second torch block 200 by a power source supplied from the outside to the first torch block 100 and the second torch block 200.

Here, in order to effectively generate electric sparks even when a low voltage is applied to the first torch block 100 and the second torch block 200, the ignition reinforcement ring 300 and the second torch block 200 are maximally It is preferable to form a gap in the excited state in the vicinity.

In this case, a sufficient amount of nitrogen gas is injected into the portion where the electric spark is generated to generate a flame. Since a narrow gap is provided for efficient generation of electric spark between the ignition enhancing ring 300 and the second torch block 200, There is a problem in which a sufficient amount of nitrogen gas is injected into the narrow gap.

3 and 4, a plurality of fluid guide grooves 310 that are intermittently disposed along the outer surface of the inner wall of the inner ring 300 are inserted into the first and second torch blocks 100 and 200 ).

The nitrogen gas injected from the outside can be sufficiently transmitted to the electric spark generating portion between the ignition reinforcement ring 300 and the second torch block 200 via the fluid guide groove 310 of the ignition reinforcement ring 300 have.

3 and 4, the fluid guide groove 310 is preferably formed to be inclined obliquely with respect to a direction connecting the first torch block 100 and the second torch block 200 .

As a result, the nitrogen gas introduced from the outside generates a swirl along the inclined direction of the fluid guide groove 310, and the swirl is transmitted to the electric spark generating portion between the ignition enhancing ring 300 and the second torch block 200 The flame injected through the flame hole 210 of the second torch block 200 has a uniform temperature distribution over a large area in the plasma torch device adjacent to the flame hole 210. [

Meanwhile, the swell reinforcing ring 400 is arranged in such a manner as to surround the outer surface of the ignition reinforcing ring 300 with an inner diameter relatively larger than the outer diameter of the ignition reinforcing ring 300, as shown in FIGS. 3 to 5 . Here, the swirl enhancing ring 400 may be provided with at least one gas injection hole 410 penetrating its side wall.

At this time, the gas injection hole 410 allows the nitrogen gas supplied from the outside to sequentially reach the gap with the second torch block 200 via the fluid guide groove 310 itself.

That is, the nitrogen gas flowing through the gas injection hole 410 from outside through the fluid guide groove 310 can be controlled as it is, thereby effectively controlling the flow pattern of the nitrogen gas.

The gas injection hole 410 may be formed at an angle to the direction of inclination of the fluid guide groove 310 so as to reinforce the swirl of the nitrogen gas through the fluid guide groove 310.

That is, when the nitrogen gas supplied from the outside is injected into the gas injection hole 410 of the swirl enhancing ring 400, the nitrogen gas injected from the gas injection hole 410 onto the outer surface of the ignition enhancer ring 300 passes through the fluid guide So that the nitrogen gas enters the electric spark generating portion while forming an effective swirl pattern.

The ignition adjustment block (not shown) is fixed to the outer surface of the first torch block 100 in a state of being connected to the ignition enhancing ring 300, and moves along the lower outer surface of the first torch block 100, The distance between the ring 300 and the second torch block 200 is adjusted.

Here, due to the generation of a large number of electric sparks between the ignition enhancer ring 300 and the second torch block 200, deposits may accumulate on the surface of the ignition enhancer ring 300 and the surface of the second torch block 200, There is a change in the mutual clearance, and the electric spark may eventually become defective.

It is necessary to adjust the clearance between the ignition reinforcement ring 300 and the second torch block 200 in order to solve the problem of the electric spark.

On the other hand, the insulating ring 500 is fixed to the outer surface of the first torch block 100 while being fastened to the upper portion of the ignition reinforcement ring 300, as shown in FIGS. 3 to 5, And electrically isolates the torch block 100 from the second torch block 200.

Here, the insulating ring 500 may further include a fastening hole 510 and a fastening groove 520 as shown in FIGS. 4 and 5.

The fastening hole 510 is formed in the center of the body of the insulating ring 500 so that the fastening hole 510 is fixed to the projecting rib 340 of the ignition reinforcing ring 300. The upper end of the swirl reinforcing ring 400 is fixed to the lower surface of the body of the insulating ring 500 in correspondence with the shape of the upper end of the swirl reinforcement ring 400, .

FIG. 6 is an enlarged view of an ignition reinforcing ring according to the present invention. FIG. 6, the ignition reinforcing ring 300 may further include a fitting hole 320, a gas inlet hole 330, and a protruding rib 340.

The fitting hole 320 is formed in the inner surface of the first torch block 100 in a direction facing the second torch block 200 so as to be fitted in the outer surface of the first torch block 100 in an excited state as shown in FIGS. And the central portion is formed through.

The gas inlet / outlet hole 330 penetrates the inside and the outside of the fitting hole 320 to communicate with the gas injection hole 410, as shown in FIGS. 3 to 6, To be inserted into the fitting hole 320.

The protruding rib 340 protrudes from one end of the fitting hole 320 to the outer periphery of the ignition reinforcement 300 as shown in FIG. 6 and is inserted into the fastening hole 510 of the insulating ring 500 The ignition strengthening ring 300 and the insulating ring 500 are integrally fixed.

Referring to FIG. 1 and FIG. 2, the second torch block 200 includes a flame hole 210 formed in a hollow shape along the longitudinal direction of the body.

Here, the electric spark generated between the ignition reinforcing ring 300 and the second torch block 200 comes into contact with the nitrogen gas injected from the outside, and a flame is generated in the longitudinal direction of the second torch block 200 And is then injected into the interior of the plasma torch device.

100: first torch block
200: second torch block
210: Flame hole
300: Ignition strengthening ring
310: fluid guide groove
320: Through-hole
330: Gas inlet and outlet
340: protruding rib
400: swirl reinforcement ring
410: gas injection
500: Insulation ring
510: fastening hole
520: fastening groove

Claims (5)

A first torch block 100 which is charged by a power source supplied from the outside by taking charge of one of a cathode and an anode (hereinafter referred to as a 'first electrode');
A second torch block (200) having one end facing the one end of the first torch block and being charged by a power source supplied from the outside to take charge of a second electrode of the cathode and the anode opposite to the first electrode;
The one end of the one end of the first torch block adjacent to the second torch block is charged by the first electrode and is adjacent to the second torch block, And a plurality of fluid guide grooves 310 intermittently disposed along the outer surface of the first torch block 310 and the first and second torch blocks 310, An ignition reinforcing ring (300) for allowing nitrogen gas supplied from the outside to pass through the fluid guide groove to reach the gap with the second torch block as it is cut inward in a direction connecting the two torch blocks;
Wherein the plasma torch is a plasma torch.
The method according to claim 1,
The fluid guide groove 310 is inclined obliquely with respect to a direction connecting the first and second torch blocks so that nitrogen gas introduced from the outside generates a swirl between the ignition enhancing ring and the second torch block Ignition enhanced type plasma torch device.
The method according to claim 1,
Wherein at least one gas injection hole (410) is formed to surround the outer surface of the ignition enhancer ring with an inner diameter relatively larger than an outer diameter of the ignition enhancer ring, A swirl enhancing ring (400) for sequentially passing through the gas injection hole and the fluid guide groove to reach the gap with the second torch block;
Wherein the plasma torch is a plasma torch.
The method of claim 2,
Wherein the gas injection hole (410) is formed at an oblique angle with respect to an inclined direction of the fluid guide groove to reinforce the swirl of the nitrogen gas through the fluid guide groove.
The method according to any one of claims 1 to 4,
An ignition adjustment unit fixed to an outer surface of the first torch block in a state of being connected to the ignition reinforcing ring and moving along the outer surface of the first torch block to adjust a distance between the ignition reinforcement ring and the second torch block, block;
Wherein the plasma torch is a plasma torch.

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