KR20180101876A - No pulsation pump - Google Patents

Abstract

The present invention relates to a technique for quantitatively supplying a fluid, which is supplied through a conduit, to a pump, and more particularly, to a pulsation-free metering pump for pumping a fluid such as a UV resin used for optical coating of various displays with a predetermined pressure without an additional pressure compensation device for canceling pulsation. To this end, according to the present invention, the metering pump for pumping the fluid includes: a main body (100) formed therein with an operation space (111), coupled with a motor (120) such that a driving shaft (121) of the motor (120) is inserted into the operation space (111), and formed at a lateral side thereof with an inlet (112) through which the fluid is introduced and an outlet (113) through which the introduced fluid is discharged; a cam mechanism (200) for transmitting an eccentric rotational force to a connection rod (230) by using a constant velocity cam (220) connected to the driving shaft (121); and a diaphragm (300) in which the eccentric rotational force is transmitted to allow a barrier (330) to reciprocate linearly while the barrier (330) is connected to the connection rod (230), the barrier (330) forms a pumping space (321) by sealing a space between the inlet (112) and the outlet (113), and a suction force and a discharge force are repeatedly applied to the pumping space (321) through an operation of the barrier (330) so as to pump the fluid by sucking the fluid through the inlet (112) and discharging the fluid through the outlet (113).

Description

No pulsation pump

The present invention supplies a fluid to be connected to a pump through a conduit in a predetermined amount. In particular, a fluid such as a UV resin used for optical coating of various displays is fed by a constant pressure without an additional pressure compensating device for canceling pulsation Pulsation metering pump which enables the pump to be operated.

In general, a metering pump is used for pushing and is used in various industrial fields. In the optical field such as the display industry and the semiconductor industry, a thin film coating of a few microns (μ) thickness is usually performed, There is a demand for a metering pump in which there is no fluctuation of the supply pressure of the fluid at the same time as supplying the fluid.

In accordance with this demand, optics uses gear pumps, diaphragm pumps, tube pumps, etc., which meet certain conditions for pressurization without fluctuating the correct supply and supply pressure of the fluid.

The gear pump is a pump which meshes the gears and transmits the fluid confined in the space of the gears along the inner surface of the casing by the rotation of the gear. The diaphragm pump is suitable for feeding the fluid of high viscosity. A tube pump is a flexible tube that uses a stretchable tube, in which the roller, which is rotated by the motor, pushes between the tubes and the pressure difference caused by the fluid causes the fluid To be transferred.

However, technological problems to be improved have been exposed in the past.

Conventionally, the gear pump is suitable for precise, quantitative and pulsatile pressurization. However, due to the UV resin property that is gelled by the frictional heat of the bearing water when the UV resin is pressed for the thin film coating operation of the display, There is a problem that the surface of the display thin film coating is defective.

In addition, the diaphragm pump is intermittently supplied with the fluid due to structural limitations due to the suction and discharge action of the diaphragm, so that the pressure fluctuates in the same cycle as the continuous operation of suction and discharge, There is a problem that a poor coating interval may occur due to a pulsating waveform in the display thin film coating.

In addition, since the tube pump generates backward flow in the tube in the state where it is pressed back between the tubes, there is pulsation due to the pressure deviation in the fluid press-feeding process, and this may also cause a poor coating interval in the display thin- There was a problem.

Korean Patent Registration No. 10-1030794 (registered on Apr. 15, 2011) is presented.

DISCLOSURE Technical Problem The present invention has been made to solve the conventional problems, and it is an object of the present invention to provide a display device such as a UV resin or the like, which prevents generation of gel in the form of a pump in the course of feeding fluid for semiconductor thin film coating, Since it is possible to supply continuous fluid of precise, constant and constant pressure by realizing pulse-free structure with supplyable structure, pump optimized for thin film coating of display and semiconductor equipment by UV resin can prevent coating defect according to ripple waveform It has its purpose.

In order to achieve the above object,

As a metering pump for feeding fluid,

A main body having a working space inside, a motor coupled to the working space for inserting the driving shaft of the motor, and an inlet through which the fluid flows in the side and an outlet through which the inflow fluid is discharged;

A cam mechanism for transmitting eccentric rotational force to the connecting rod using a constant velocity cam connected to the driving shaft;

The diaphragm is linearly reciprocated by the diaphragm connected to the connection rod so that eccentric rotation force is transmitted to the diaphragm to linearly reciprocate the diaphragm while the diaphragm is closed in space between the inlet and the outlet to form a pressure feeding space, And a diaphragm for repeatedly actuating the suction force and the discharge force to discharge the fluid at the inlet to the outlet and discharge the fluid.

According to the present invention, since the suction and discharge sections of the diaphragms arranged on the circumference are overlapped with each other, the pulsation of continuous fluid and the supply of fluid at uniform pressure are realized, thereby improving the structure. It is possible to prevent the generation of gel in the pump during the process of pressurizing fluid for display and semiconductor thin film coating, and it is possible to pressurize continuous fluid of precise, quantitative and positive pressure in fluid pressurization. So that it is possible to prevent coating defects according to the ripple waveform.

FIG. 1 and FIG. 2 are diagrams showing the components of a pulsating flow rate metering pump according to a first embodiment of the present invention; FIG.
FIGS. 3 to 4 are operation states of a pulsating pump according to each embodiment of the present invention. FIG.
FIG. 5 is a structural view of each part of a pulsatile metering pump according to a second embodiment of the present invention; FIG.

The pulsatile metering pump according to the present invention will be understood from the following detailed description with reference to the accompanying drawings.

In the following description of the exemplary embodiments of the present invention, a detailed description of components that are widely known and used in the art to which the present invention belongs is omitted, and unnecessary explanations thereof are omitted. It is to communicate the point more clearly.

FIGS. 1 to 5 are views illustrating a pulsating pump according to each embodiment of the present invention.

The metering pump 1 includes a main body 100 having an inlet 112 through which fluid flows and an outlet 113 through which fluid is discharged, respectively; A cam mechanism (200) for transmitting an eccentric rotational force; And a diaphragm 300 for sucking the fluid in the inlet 112 and discharging the fluid to the outlet 113 to supply the fluid in a fixed amount.

Hereinafter, as a basic constitution of the present invention, the constitution of each part for a pulsating flow rate metering pump according to the first embodiment will be described in detail with reference to Fig. 1 to Fig. Fig. 1 is a front sectional view of the metering pump, and Fig. 2 is a plan sectional view of the metering pump.

First, the main body 100 includes:

The motor 120 is coupled to the operation space 111 so that the drive shaft 121 of the motor 120 is inserted into the operation space 111. An inlet 112 through which the fluid flows sideways, And an outlet 113 through which the fluid is discharged are provided, respectively, for providing a flow path for supplying a fixed amount of fluid.

The main body 100 according to the basic embodiment of the present invention includes: A housing 110, and a motor 120.

For example, the body () comprises: Further includes a housing 110 formed with an operating space 111 of the cam mechanism 200 and an inlet 112 through which the fluid flows sideways and an outlet 113 through which the flowing fluid is discharged.

The housing 110 is formed in a cylindrical shape and has a space such that the cam mechanism 200 can eccentrically rotate inside the housing 110. The housing 110 has an outlet 113 and an inlet 112 Respectively, so that the fluid flows in and out.

At this time, the fluid introduced into the housing 110 may be a UV resin for thin film coating of a display in the optical field, or may be sulfuric acid or acetic acid medicine.

The main body 100 includes a plurality of diaphragms 300 arranged at equal intervals on a circumference and includes at least one mounting hole 116 which is laterally inserted into the operating space 111,

The one or more mounting holes 116 are each formed in both directions to allow fluid to be pumped from the inlet 112 to the outlet 113. A plurality of diaphragms 300 are disposed on the circumference of the diaphragm 300, And further includes a first branch path 114 and a second branch path 115.

The mounting hole 116 is connected to the operating space 111 while being pierced to the side of the housing 110. Although five mounting holes 116 are shown in the drawing, four to six mounting holes 116 So that the diaphragm 300 is installed.

The first branch path 114 and the second branch path 115 are formed such that a first branch path 114 is formed in a circular groove below the inner circumference of the housing 110, The first branch path 114 and the second branch path 115 are connected to each other through a plurality of mounting holes 116 provided in the housing 110, The first branch passage 114 is connected to the inlet 112 and the second branch passage 115 is connected to the outlet 113 and the second branch passage 115 is connected to the outlet 113, do.

A plurality of pillars may be provided at a lower portion of the housing 110 to allow the metering pump 1 of the present invention to be installed at an arbitrary position. In the center of the operating space 111, And has a through hole through which the shaft 210 of the motor 120 is inserted while allowing the shaft 210 to be axially vertically coupled.

In addition, the main body 100 includes: And a motor 120 coupled to an upper portion of the housing 110 to insert a driving shaft 121 into the operating space 111 to transmit rotational power to the cam mechanism 200.

The motor 120 is an electric motor and is fixed to the upper portion of the housing 110 with bolts and the drive shaft 121 is inserted into the operation space 111 to thereby drive the cam shaft 210 of the cam mechanism 200 So that rotational power can be transmitted to the camshaft 210. [ A key structure for shaft coupling may be provided at a coupling portion between the camshaft 210 and the drive shaft 121.

And the cam mechanism (200) comprises:

The eccentric rotational force is transmitted to the connecting rod 230 by using the constant velocity cam 220 connected to the driving shaft 121 and the diaphragm 330 of the diaphragm 300 is repeatedly operated.

The cam mechanism 200 according to the basic embodiment of the present invention includes: A cam shaft 210, a constant velocity cam 220, and a connecting rod 230.

For example, the cam mechanism 200 further includes a camshaft 210 connected to the drive shaft 121 to convert concentric rotation into eccentric rotation.

The cam shaft 210 is formed as a shaft and is axially vertically coupled to the center of the housing 110 so as to be rotated in place and inserted into the upper portion of the cam shaft 210 coupled to the housing 110, Is axially coupled. The shaft coupling portion of the camshaft 210 may be provided with a plurality of bearings for rotation.

At this time, the cam shaft 210 is formed so that a portion where the constant velocity cam 220 is coupled to the center is formed to have an eccentricity with respect to a portion where the constant velocity cam 220 is coupled to the drive shaft 121, (Not shown).

In addition, the cam mechanism (200) comprises: And a constant velocity cam 220 connected to the camshaft 210 to perform eccentric operation in a circumferential shape in place.

The constant velocity cam 220 is formed in a cylindrical shape in which an eccentric portion of the camshaft 210 is axially centered. A bearing is provided as an axially coupled portion of the camshaft 210, and the camshaft 210 is idle The eccentric rotational force is transmitted to cause the constant velocity cam 220 to perform eccentric operation in place.

At this time, at least one groove into which the connecting rod 230 is inserted is provided around the constant velocity cam 220, and a hinge for engaging the connecting rod 230 is formed in a vertical Lt; / RTI >

In addition, the cam mechanism (200) comprises: And is connected to diaphragm 330 of the diaphragm 300 arranged on the circumference of the main body 116 in a plurality of circumferences, respectively, so that a plurality of And a connection rod 230 for sequentially operating the diaphragm 330 of FIG.

The connecting rod 230 is inserted into the diaphragm 300 through the diaphragm 300 and inserted into the diaphragm 300 while being hinged around the constant velocity cam 220. The connecting rod 230 is screwed into the joint 231, And an assembling screw 232 to be assembled.

The joint 231 has a hinge connection structure and a screw hole for screwing the assembly screw 232 on the outside thereof. The assembly screw 232 is made of a screw having a step 232a on one side. When the assembly screw 232 is inserted through the diaphragm 330, the step 232a is engaged with one side of the diaphragm 330 to fix the diaphragm 330 and a nut for fixing the diaphragm 330 to the opposite side of the step 232a Can be combined.

At this time, the step 232a is formed with a fitting groove 232b for pressing the first fitting part 331 protruding from the coupling part of the diaphragm 330 inward to maintain airtightness.

The fitting groove 232b is formed by a round groove corresponding to the shape of the first fitting portion 331.

The diaphragm 300 includes:

The eccentric rotational force is transmitted to the connection rod 230 while the diaphragm 330 is connected to the diaphragm 330. The diaphragm 330 reciprocates linearly between the inlet 112 and the outlet 113, And the fluid in the inlet 112 is sucked into the outlet 113 through the operation of the diaphragm 330 by repeatedly operating the suction force and the discharge power in the pressure conveying space 321 And discharges the fluid.

The diaphragm 300 according to the basic embodiment of the present invention includes: A flange 310, a cover 320, and a diaphragm 330.

For example, the diaphragm 300 may include: A first valve 311 and a second valve 312 inserted into the mounting holes 116 of the main body 100 and respectively connected to the first and second branch passages 114.115 provided on both sides of the main body 100, And a flange 310 for preventing the water discharged into the outlet 113 from flowing back to the outlet 113 while preventing the water from flowing backward.

The flange 310 is formed as a hollow circular plate and has a hole with a step so that the flange 310 can be engaged when the cover 320 is inserted into the center. The first valve 311 is inserted and the second valve 312 is inserted into the upper side.

At this time, the insertion side of the first valve 311 and the second valve 312 is formed as a through hole through which the fluid can flow, and the first valve 311 and the second valve 312 are provided with through- And a spring that blocks the through hole through which the fluid flows and blocks the ball. Since the ball and the spring are represented in the drawings, the reference numerals are omitted. The first valve (311) and the second valve (312) are opened when a fluid is introduced and a pressure is formed. When the fluid is discharged and the pressure is lower than the elastic force of the spring, the first valve (311) and the second valve (312)

Also, the diaphragm 300 includes: The diaphragm 300 is attached to a center of a flange 310 inserted into a mounting hole 116 of the main body 100 so as to cover the mounting hole 116 and further include a cover 320 having an open space therein .

The cover 320 is made of a plate material having a size enough to be inserted into the central through hole of the flange 310 so that the cover 320 can be inserted into the through hole of the flange 310, The diaphragm 330 described later closes the inner open space of the cover 320 so that the pressure feeding space 321 is formed.

The first connection path 321 is connected to the first valve 311 and the second connection path 321 is connected to the second connection path 321. The first connection path 321 is connected to the first valve 311, 322 are connected to the second valve 312. A first connection path 321 is formed on the lower side of the cover 320 and a second connection path 322 is formed on the upper side of the cover 320 with reference to FIG.

The cover 320 can be fastened to the flange 310 in a detachable manner so that the cover 330 can be easily replaced by separating the cover 320 from the flange 310 when the diaphragm 330 is broken and used for a long time .

Also, the diaphragm 300 includes: The pressure transmitting space 321 is closed by inserting a space between the cover 320 and the flange 310 so that the space is opened to the inside of the cover 320. The pressure transmitting space 321 is communicated through the cam mechanism 200 And a diaphragm 330 which elastically deforms the pressure conveying space 321 by a linear reciprocating operation so that a suction force and a folding output are repeatedly applied.

The diaphragm 330 is formed of a concave plate of an E-DEM or Teflon material and is fitted between the cover 320 and the flange 310. The diaphragm 330 covers a space open to the inside of the cover 320, And is preferably made of ethylene propylene non-conjugated diene and has a through hole for coupling the connecting rod 230 at the center. The cover 320 and the flange 330 are formed around the diaphragm 330, The second fitting portion 332 is pressed and integrally protruded to maintain airtightness.

The first fitting portion 331 is inserted into the fitting groove 232b of the connecting rod 230 so as to maintain the airtightness when the connecting rod 230 is fitted into the connecting rod 230. [ Are integrally protruded.

A plurality of diaphragms 300 arranged at regular intervals on the circumference of the main body 100 through the mounting holes 116 perform sequential suction and discharge operations through the constant velocity cam 220. The diaphragms 300, When the diaphragm 300 located at the previous position among the plurality of diaphragms 300 discharges the diaphragm 300, the diaphragm 300 located at the rear of the diaphragm 300 starts the suction operation, It is possible to perform the continuous feeding of the fluid.

Therefore, since the suction and discharge sections of the diaphragm 300 arranged on the circumference of the main body 100 are overlapped with each other, pulsation can be realized in which continuous fluid feeding and uniform fluid supply are performed, It is suitable to pressurize liquid such as UV resin for display thin film coating in the field and prevents accumulation of gel-like particles in the process of feeding fluid such as UV resin to prevent defective display surface coating do.

In addition, since the metering pump 1 realizing pulsating pulsation can be provided, since the waveform curve of the time according to the pressure feeding and pressure of the fluid is formed in a straight line, it is possible to continuously pressurize the fluid without intermittent fluid flow, Resin coatings on display thin films prevent coating defects due to the ripple waveform of the pump.

3 to 4 are views showing an operation state of the pulsating pump according to each embodiment of the present invention.

3, the pulsating pump 1 having the above-described structure is configured such that the driving shaft 121 rotates in accordance with the operation of the motor 120 to transmit the rotational power to the cam mechanism 200, The constant velocity cam 220 rotates eccentrically through the eccentric rotational force of the camshaft 210 of the constant velocity cam 220 so that the plurality of connection rods 230 connected to the constant velocity cam 220 are linearly reciprocated simultaneously, At this time, since the eccentric force is transmitted to each of the plurality of connection rods 230, the time when the connection rod 230 turns the rotation linearly operates differently.

At this time, the diaphragm 330 of the diaphragm 300 is elastically deformed in the forward and backward directions corresponding to the linear reciprocation operation of the connection rod 230, and the pressure and space of the pressure transmission space 321, which is a space sealed through the diaphragm 330, And then discharges the fluid in the inlet 112 connected to the pressure conveying space 321 to the outlet 113 and then performs a basic pressure conveying operation.

Particularly, according to the present invention, as shown in the following Table 1, since a plurality of diaphragms 300 equidistantly arranged on the circumference of the main body 100 are linearly operated at different points on the connecting rod 230 according to the eccentric operation, The diaphragm 300 of the plurality of diaphragms 300 connected to the connection rod 230 of the diaphragm 300 sequentially performs suction and discharge operations and the diaphragm 300 located at the previous one of the plurality of diaphragms 300 performs the discharge operation The diaphragm 300 is driven by the suction force and the diaphragm 300 in accordance with the eccentric angle of the constant velocity cam 220. In this case, And each section overlaps with each other.

At this time, as the suction and discharge sections of the diaphragms 300 overlap with each other according to the organic operation of the metering pump 1 as described above, the waveform curve of the time according to the fluid pressure feeding and the pressure is formed as a straight line as shown in FIG. Pulsation can be realized.

On the other hand, as another constitution of the present invention, the constitution of each part for a pulsating flow rate metering pump according to the second embodiment will be described in detail with reference to Fig. FIG. 5 is a sectional view showing a main part of a pulsating flow rate metering pump according to a second embodiment.

According to this structure, the diaphragm 300 of the metering pump 1 has the structure described above; And is supported by the diaphragm 330 while being fixed to the connection rod 230 of the cam mechanism 200 so that the operation space 111 is communicated with the diaphragm 330 And an auxiliary film 340 which is partitioned and sealed with the auxiliary film 340.

The auxiliary film 340 is made of rubber or urethane and has the same size as that of the flange 310. The auxiliary film 340 is inserted into the housing 110 through the flange 310, And the diaphragm 330, so that airtightness is maintained in the portion where the auxiliary film 340 is fitted.

Therefore, according to the present invention, even if the diaphragm 330 is broken due to long-term use, the fluid introduced into the pressure-feeding space 321 can be prevented from flowing into the working space 111, It is possible to prevent the mechanical elements such as the cam mechanism 200 and the like in the internal space 111 from being damaged through the inflow fluid and to prevent foreign foreign substances from flowing into the operation space 111 in the process of replacing the diaphragm 330 .

As described above. While the present invention has been particularly shown and described with reference to certain preferred embodiments thereof, it is to be understood that the terminology used herein is for the purpose of describing the present invention only and is not intended to limit the scope of the claims. But is not intended to,

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It will be easy for anyone to know.

One; A metering pump 100; main body
110; A housing 120; motor
200; Cam mechanism 210; Camshaft
220; Constant velocity cam 230; Connection load
300; Diaphragm 310; flange
320; A cover 330; Diaphragm

Claims (5)

As a metering pump for feeding fluid,
The motor 120 is coupled to the operation space 111 so that the drive shaft 121 of the motor 120 is inserted into the operation space 111. An inlet 112 through which the fluid flows sideways, A main body 100 provided with an outlet 113 through which fluid is discharged;
A cam mechanism 200 for transmitting eccentric rotational force to the connection rod 230 by using a constant velocity cam 220 connected to the driving shaft 121;
The eccentric rotational force is transmitted to the connection rod 230 while the diaphragm 330 is connected to the diaphragm 330. The diaphragm 330 reciprocates linearly between the inlet 112 and the outlet 113, And the fluid in the inlet 112 is sucked into the outlet 113 through the operation of the diaphragm 330 by repeatedly operating the suction force and the discharge power in the pressure conveying space 321 And a diaphragm (300) for discharging the fluid and for feeding the fluid. 2. The apparatus according to claim 1, wherein the main body (100)
A plurality of diaphragms 300 are arranged on the circumference at equal intervals, at least one mounting hole 116 is formed in the operating space 111,
The one or more mounting holes 116 are each formed in both directions to allow fluid to be pumped from the inlet 112 to the outlet 113. A plurality of diaphragms 300 are disposed on the circumference of the diaphragm 300, Further comprising a first branch path (114) and a second branch path (115)
A plurality of diaphragms 300 disposed on the circumference of the diaphragm 300 through the mounting holes 116 sequentially perform suction and discharge operations through the constant velocity cam 220. Among the plurality of diaphragms 300, When the diaphragm 300 is operated to discharge the diaphragm 300, the diaphragm 300 located at the rear of the diaphragm 300 starts the suction operation, and the suction and discharge sections of the diaphragm 300 arranged on the circumference of the diaphragm 300 are overlapped, And the pump is stopped. The method according to claim 1,
The diaphragm 300 includes a first valve 311 inserted into the mounting hole 116 of the main body 100 and connected to the first and second branch passages 114.115 provided on both sides of the main body 100, And a flange (310) provided with a second valve (312) to prevent water flowing into the inlet (112) and water discharged to the outlet (113) from flowing backward. The method according to claim 1,
The diaphragm 300 includes a cover 320 fitted in the center of a flange 310 inserted into the mounting hole 116 of the main body 100 and covering the mounting hole 116 and having an open space therein,
The pressure transmitting space 321 is closed by inserting a space between the cover 320 and the flange 310 so that the space is opened to the inside of the cover 320. The pressure transmitting space 321 is communicated through the cam mechanism 200 Further comprising a diaphragm (330) for elastically deforming the pressure conveying space (321) by a linear reciprocating operation so that a suction force and a folding output are repeatedly operated. The cam mechanism (200) according to claim 1, wherein the cam mechanism (200)
A camshaft 210 connected to the drive shaft 121 and configured to convert concentric rotation into eccentric rotation;
A constant velocity cam 220 connected to the camshaft 210 to perform eccentric operation in a circumferential shape in place;
And is connected to diaphragm 330 of the diaphragm 300 arranged on the circumference of the main body 116 in a plurality of circumferences, respectively, so that a plurality of And a connecting rod (230) for sequentially operating the diaphragm (330) of the pump.

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