KR102155310B1 - High precision diaphragm type pulseless metering pump using face cam - Google Patents

Abstract

Disclosed is a high-precision diaphragm type pulseless metering pump using a flat cam. The high-precision diaphragm type pulseless metering pump using the flat cam comprises: a drive motor installed in a pump body; the flat cam connected to a drive shaft of the drive motor to rotate and having a driving groove formed along the outer circumference of a connecting unit to which the drive shaft is connected; a first slider in which a first roller bearing in rotational contact with the inner wall surface of the driving groove is installed at one end and which is slidably installed on the pump body; a second slider in which a second roller bearing in rotational contact with the inner wall surface of the driving groove is installed at one end and which is slidably installed on the pump body; a first pump head; and a second pump head. The first pump head includes: a first diaphragm installed in a first operating space formed between a first suction passage and a first discharge passage and deformed by a pressure by the other end of the first slider to provide suction and discharge of a fluid; and a first backup diaphragm installed between the inner wall surface of the first operating space and the first diaphragm and connected to the other end of the first slider. The second pump head includes: a second diaphragm installed in a second operating space formed between a second suction passage and a second discharge passage and deformed by a pressure by the other end of the second slider to provide suction and discharge of the fluid; and a second backup diaphragm installed between the inner wall surface of the second operating space and the second diaphragm and connected to the other end of the second slider.

Description

High precision diaphragm type pulseless metering pump using flat cam {HIGH PRECISION DIAPHRAGM TYPE PULSELESS METERING PUMP USING FACE CAM}

The present invention relates to a high-precision diaphragm-type pulseless metering pump using a flat cam, which is easy to check for damage to the diaphragm and improves durability.

In general, a metering pump refers to a pump capable of producing high pressure at a low speed and capable of accurately discharging a flow rate per unit time by reciprocating a piston, a diaphragm, etc. through a camshaft.

The diaphragm metering pump is a pump made to withstand highly corrosive liquids such as sulfuric acid and hydrochloric acid.

With the advancement of the industry, quantitative and pulsating chemical liquid transfer has been required in production process lines, etc., and a conventional non-pulsating metering pump using a constant velocity cam has been introduced, but with the development of technology, a high-performance pulsating metering pump is gradually required. .

However, in the conventional diaphragm type non-pulsating metering pump, it was difficult to obtain a satisfactory pulsation rate due to the deformation of the diaphragm due to the discharge pressure, and when the fluid leaked due to the damage of the diaphragm, the detection sensor was damaged, and the replacement cost of the detection sensor There is a problem that occurs.

In addition, there is a problem in that the diaphragm is damaged due to excessive vacuum pressure when the high-viscosity liquid that requires high vacuum suction in the field is damaged, thereby reducing the flow rate or increasing the pulsation rate.

According to an embodiment of the present invention, a high-viscosity liquid can be transported stably using a flat cam, and a pulsating discharge operation is stably performed, and sensor damage does not occur even when the fluid leaks due to damage to the diaphragm, and is stable even in high vacuum. It is intended to provide a high-precision diaphragm type pulseless metering pump using a flat cam that can be operated.

An embodiment of the present invention includes a drive motor installed in a pump body, a flat cam in which a drive groove is formed along an outer circumference of a connecting portion to which the drive shaft is connected and rotated and connected to a drive shaft of the drive motor, and an inner wall surface of the drive groove. A first roller bearing in rotational contact is installed at one end, and a first slider slidably installed on the pump body and a second roller bearing in rotational contact with the inner wall surface of the drive groove are installed at one end and slidably installed on the pump body. The first diaphragm and the first operation are installed in the first operating space formed between the second slider and the first suction passage and the first discharge passage, and are pressurized and deformed by the other end of the first slider to provide suction and discharge of the fluid. A first pump head including a first backup diaphragm installed at a position between the inner wall surface of the space and the first diaphragm and connected to the other end of the first slider, and a first pump head formed between the second suction passage and the second discharge passage. 2 It is installed in the operating space and is installed at a position between the second diaphragm and the second diaphragm and the second diaphragm that is pressurized and deformed by the other end of the second slider to provide suction and discharge of fluid, and the other end of the second slider. And a second pump head including a second backup diaphragm connected to.

The first diaphragm and the second diaphragm may be installed in a sealed state between the inner wall surface of the first operating space and the inner wall surface of the second operating space.

The first backup diaphragm may be installed in the first operating space in a state in which a part of the first operating space is divided into a first sensing space and a first sensor space.

Each edge of the first backup diaphragm and the first diaphragm may be inserted into the first pump head in the first operating space.

A first fixing member for fixing a state in which the first backup diaphragm and the edge portions of the first diaphragm are inserted into the inside of the first pump head may be inserted into the first pump head.

The second backup diaphragm may be installed in the second operating space in a state in which a part of the second operating space is divided into a second sensing space and a second sensor space.

Each edge of the second backup diaphragm and the second diaphragm may be inserted into the interior of the second pump head in the second operating space.

A second fixing member for fixing a state in which the second backup diaphragm and the edge of the second diaphragm are inserted into the inside of the second pump head may be inserted into the second pump head.

A first sensor may be installed in the first sensor space to sense an outflow state of a fluid into the first sensing space.

A second sensor may be installed in the second sensor space to sense an outflow state of the fluid into the second sensing space.

The first sensor and the second sensor may be capacitive sensors that sense a variation of the electrostatic voltage in the first sensing space and the second sensing space.

It may further include a vacuum pressure relief unit installed on the first pump head and the second pump head to relieve the vacuum pressure of the operating space.

The vacuum pressure relief unit includes a body portion installed in communication with the operating space and formed with an opening on the side surface, a ball seat formed inside the body portion and having a communication hole communicating with the operating space, a spring member installed on the ball seat, It may include a ball member seated on the spring member to close the opening when the vacuum pressure is not applied, and compress the spring member to open the opening when the vacuum pressure is applied above the set pressure.

A plurality of buffer protrusions may protrude from the surfaces of the first backup diaphragm and the second backup diaphragm.

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According to an embodiment of the present invention, it is possible to stably transfer the high viscosity liquid and to stably perform the pulsating discharge operation by the crank-type configuration of the flat cam, the first slider, and the second slider.

According to an embodiment of the present invention, it is possible to appropriately correct and manufacture the flat cam so that the pulsating discharge action is stably performed.

According to an embodiment of the present invention, it is possible to easily check the damaged state of the diaphragm using a sensor, so that the diaphragm can be quickly replaced, thereby extending the service life of the metering pump.

According to an embodiment of the present invention, it is possible to improve durability by preventing excessive vacuum pressure from being applied to the metering pump, preventing damage to the diaphragm due to excessive vacuum pressure.

1 is a cross-sectional view schematically illustrating a high-precision diaphragm type pulseless metering pump using a flat cam equipped with a flat cam according to a first embodiment of the present invention.
FIG. 2 is a cross-sectional view schematically illustrating a state in which a first backup diaphragm and a first diaphragm are connected to the first slider of FIG. 1 and a vacuum pressure relief unit is installed.
3 is a side view schematically showing a state in which a buffer protrusion protrudes from the first/second backup diaphragm according to the second embodiment of the present invention.
4 is a cross-sectional view schematically illustrating a state in which a buffer protrusion protrudes from the first backup diaphragm of FIG. 3.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those of ordinary skill in the art may easily implement the present invention. However, the present invention may be implemented in various different forms and is not limited to the embodiments described herein. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and the same reference numerals are assigned to the same or similar components throughout the specification.

1 is a cross-sectional view schematically illustrating a high-precision diaphragm type pulseless metering pump using a flat cam equipped with a flat cam according to a first embodiment of the present invention, and FIG. 2 is a first backup diaphragm in the first slider of FIG. It is a cross-sectional view schematically showing a state in which the and the first diaphragm are connected and the vacuum pressure relief unit is installed.

1 and 2, a high-precision diaphragm-type non-pulsating metering pump 100 using a flat cam according to the first embodiment of the present invention includes a driving motor installed in the pump body 10 and a driving motor. A flat cam 20 with a driving groove 23 formed along the outer circumference of the connecting portion to which the driving shaft is connected and rotated, and a first roller bearing 31 in rotational contact with the inner wall surface of the driving groove 23 A first slider 30 installed at one end and slidably installed on the pump body 10, and a second roller bearing 41 in rotational contact with the inner wall surface of the driving groove 23 are installed at one end, and the pump body It is installed in the second slider 40 that is slidably installed in the 10 and the first operating space 55 formed between the first suction flow path 51 and the first discharge flow path 53, and is installed in the first slider ( The first diaphragm 52 is pressurized and deformed by the other end of 30) to provide suction and discharge of fluid, and the first slider is installed at a position between the inner wall surface of the first operating space 55 and the first diaphragm 52 A first pump head 50 including a first backup diaphragm 54 connected to the other end of 30, and a second operating space formed between the second suction passage 61 and the second discharge passage 63 A second diaphragm 62 that is installed in 65 and is pressurized and deformed by the other end of the second slider 40 to provide suction and discharge of fluid, and the inner wall surface of the second operating space 65 and the second diaphragm 62 ) And a second pump head 60 including a second backup diaphragm 64 connected to the other end of the second slider 40.

The metering pump described below refers to a pump capable of producing a high pressure at a low speed and accurately discharging a flow rate per unit time according to an operation of a diaphragm. This will be described in detail below.

A driving motor (not shown) may be installed on the pump body 10 to transmit a driving force. Such a drive motor may be driven and controlled by a motor controller (not shown).

The inside of the pump body 10 may be installed with a flat cam 20 that is connected to a drive shaft of a driving motor and is rotated by receiving a driving force.

The flat cam 20 is installed to convert a rotational motion into a linear motion, and a connection part 21 to which a driving shaft is fixed may be formed at a central position.

The connection part 21 is formed at a rotational center position of the flat cam 20, and a key groove 22 for fixing may be formed in a state in which the driving shaft of the driving motor is inserted.

A driving groove 23 may be formed outside of the connection part 21.

The driving groove 23 is formed to provide a driving force to the diaphragm, and may be formed along the circumference of the connection part 21.

The driving groove 23 may be formed in a state of being inserted into the inside of the flat cam 20 along the circumference of the connection part 21.

The driving groove 23 has a cam-shaped inner wall surface, and the first roller bearing 31 and the second roller bearing 41 are provided to provide driving force to the first diaphragm 52 and the second diaphragm 62. It can be inserted rotatably inside.

The first roller bearing 31 and the second roller bearing 41 are rotatably installed at the ends of the first slider 30 and the second slider 40, respectively, and the rotational driving force of the driving motor is converted into a linear driving force. Can be delivered. This will be described in more detail below.

On the other hand, the driving groove 23 is formed along the circumference of the connection portion 21 of the flat cam 20, from the first inner wall surface 23a and the first inner wall surface 23a formed outside the connection portion 21 It may be formed between the spaced second inner wall surfaces 23b.

The first inner wall surface 23a and the second inner wall surface 23b forming the driving groove 23 may be formed in a cam shape for driving the metering pump.

More specifically, the first inner wall surface 23a is formed to protrude in a cam shape along the outer circumference of the connection part 21, and the first roller bearing 31 and the first roller bearing 31 are provided on the first inner wall surface 23a. The second roller bearing 41 may rotatably contact.

Therefore, in the plane cam 20, the first inner wall surface 23a protruding in a cam shape in the process of being rotated by transmitting the driving force of the driving motor makes the first roller bearing 31 and the second roller bearing 41 a phase difference. It is possible to put and pressurize sequentially.

Accordingly, the sliding operating pressure of the first slider 30 on which the first roller bearing 31 is installed and the second slider 40 on which the second roller bearing 41 is installed is transmitted to the diaphragm so that the first diaphragm 52 It is possible to make the deformation operation of.

The second inner wall surface 23b is formed in a state that is separated from the first inner wall surface 23a and is inserted into the interior of the flat cam 20, and the driving groove ( 23) can be formed.

The second inner wall surface 23b may be formed in a round shape along the outer circumference of the first inner wall surface 23a. The second inner wall surface 23b may be formed in a circular shape in this embodiment.

The first roller bearing 31 and the second roller bearing 41 may be in rotational contact with the second inner wall surface 23b while the flat cam 20 rotates according to the driving force of the driving motor.

On the other hand, the first roller bearing 31 and the second roller bearing 41 are installed in a state of being inserted to face the driving groove 23 around the connection part 21 of the flat cam 20, the first slider It may be installed rotatably at the ends of 30 and the second slider 40, respectively.

The first slider 30 may be installed at one end so as to be slidably installed on the pump body 10 by installing a first roller bearing 31 in rotational contact with the inner wall surface of the driving groove 23.

The other end of the first slider 30 may be installed to pressurize and deform the first diaphragm 52 to provide suction and discharge of the fluid.

The second slider 40 may be installed at one end with a second roller bearing 41 that is in rotational contact with the inner wall surface of the driving groove 23 so as to be slidably installed on the pump body 10. The second slider 40 may be installed to be slidable at an opposite position with the flat cam 20 interposed therebetween.

As such, the first slider 30 and the second slider 40 may be installed to be slidable on opposite sides with the flat cam 20 interposed therebetween.

The first slider 30 is installed in a long length in the direction of the first pump and operated to pressurize and deform the first diaphragm 52, and the second slider 40 is installed in a long length in the direction of the second pump red. 2 Can be operated to pressurize the diaphragm 62.

The first pump head 50 is installed in the first operating space 55 formed between the first suction flow path 51 and the first discharge flow path 53, and is pressurized and deformed by the other end of the first slider 30. It is installed at a position between the first diaphragm 52 to provide suction and discharge of the fluid, the inner wall surface of the first operating space 55 and the first diaphragm 52, and connected to the other end of the first slider 30. It may include a first backup diaphragm 54.

The first diaphragm 52 may be installed inside the first operating space 55 of the first pump head 50 to provide a fluid discharge pressure by being pressurized by the other end of the first slider 30.

The first backup diaphragm 54 may be installed between the first diaphragm 52 and the inner wall surface of the first operating space 55 in the first operating space 55.

That is, the first backup diaphragm 54 is fixed to the first pump head 50 inside the first operating space 55 at a position where the edge portion is spaced apart from the first diaphragm 52, and the center portion is the first slider It may be installed in a fixed state to the first diaphragm 52 by 30.

In more detail, edges of the first backup diaphragm 54 and the first diaphragm 52 may be inserted into the first pump head 50 from the first operating space 55.

In the first pump head 50, the first backup diaphragm 54 and the first fixing member 56 fixing the edge portions of the first diaphragm 52 are inserted into the inside of the first pump head 50. Can be installed.

As described above, the first fixing member 56 is inserted into the first pump head 50 and the edges of the first backup diaphragm 54 and the first diaphragm 52 are connected to the first pump head 50. It can be installed to fix pressure.

As described above, when the first backup diaphragm 54 is installed on the side of the first diaphragm 52 inside the first operating space 55, the first diaphragm 52 senses the damaged state of the first diaphragm 52. This is to install the sensor 57.

That is, the first backup diaphragm 54 is installed in the first operating space 55 in a state in which a part of the first operating space 55 is divided into a first sensing space 55a and a first sensor space 55b. Can be. Here, the first sensing space 55a is a space between the first diaphragm 52 and the first backup diaphragm 54, and the first sensor space 55b is the first backup diaphragm 54 and the first operating space It refers to the space between the inner wall of (55).

The first sensor 57 is installed on the inner wall surface of the first operating space 55 in the first sensor space 55b, and the first diaphragm 52 is damaged and the fluid flows into the first sensing space 55a. It can be installed to sense the status.

More specifically, the first sensor 57 can be applied as a capacitive sensor in this embodiment.

Therefore, when the first sensor 57 is applied as a capacitive sensor and the fluid flows into the first sensing space 55a due to the damage of the first diaphragm 52, the first sensing space ( 55a) can be installed to sense the changed static voltage.

In this way, the first sensor 57 senses the changed electrostatic voltage in the first sensing space 55a to stably sense the damaged state of the first diaphragm 52, so that the first diaphragm 52 can be quickly replaced. You can make it possible.

Here, the first sensor space 55b is sealed by the first backup diaphragm 54 while the first diaphragm 52 is damaged and flows into the first sensing space 55a. It is possible to prevent contact with the sensor 57.

Accordingly, when the first diaphragm 52 is damaged, the first sensor 57 can stably sense the damaged state of the first diaphragm 52 without causing damage due to contact of the introduced fluid. Accordingly, even if the first diaphragm 52 is damaged, the first sensor 57 is not damaged, so that the first sensor 57 can be replaced alone and the first diaphragm 52 can be replaced alone. Cost reduction is possible at

The first backup diaphragm 54 is formed of a corrosion-resistant rubber material to seal the first sensor space 55b while preventing damage due to contact with the introduced fluid due to damage to the first diaphragm 52. I can.

Since the first sensor 57 is applied as a capacitive sensor, it is necessary to properly set a distance from the first diaphragm 52 in the initial installation process. The separation distance between the first sensor 57 and the first diaphragm 52 may be set to an appropriate distance through repeated experiments for stable sensing of the electrostatic voltage .

here, The separation distance between the first sensor 57 and the first backup diaphragm 54 is 6 mm or less, preferably 3 mm. That is, if the distance between the first sensor 57 and the first backup diaphragm 54 exceeds 6 mm, it is difficult to detect the fluid flowing into the sensing space due to damage of the diaphragm, and if it is closer to less than 3 mm, the first backup diaphragm A malfunction in which the first sensor 57 senses the deformation caused by the operation process of 54 may occur.

The second pump head 60 is installed in the second operating space 65 formed between the second suction passage 61 and the second discharge passage 63, and is pressurized and deformed by the other end of the second slider 40. Is installed at a position between the second diaphragm 62 and the inner wall surface of the second operating space 65 and the second diaphragm 62 to provide suction and discharge of the fluid, and connected to the other end of the second slider 40. It may include a second backup diaphragm 64.

The second diaphragm 62 may be installed inside the second operating space 65 of the second pump head 60 to provide a fluid discharge pressure by being pressurized and deformed by the other end of the second slider 40.

The second backup diaphragm 64 may be installed between the second diaphragm 62 and the inner wall surface of the second operating space 65 in the second operating space 65.

That is, the second backup diaphragm 64 is fixed to the second pump head 60 inside the second operating space 65 at a position where the edge portion is spaced apart from the second diaphragm 62, and the center portion is the second slider It may be installed in a fixed state to the second diaphragm 62 by 40.

In more detail, each edge of the second backup diaphragm 64 and the second diaphragm 62 may be inserted into the second pump head 60 from the second operating space 65.

In the second pump head 60, the second backup diaphragm 64 and the second fixing member 66 for fixing the edge portions of the second diaphragm 62 are inserted into the inside of the second pump head 60. Can be installed.

As described above, the second fixing member 66 is inserted into the second pump head 60 and the edges of the second backup diaphragm 64 and the second diaphragm 62 are connected to the second pump head 60. It can be installed to fix pressure.

As described above, when the second backup diaphragm 64 is installed on the side of the second diaphragm 62 in the second operating space 65, the second diaphragm 62 senses the damaged state of the second diaphragm 62. This is to install the sensor 67.

That is, the second backup diaphragm 64 is installed in the second operating space 65 in a state in which a part of the second operating space 65 is divided into a second sensing space 65a and a second sensor space 65b. Can be. Here, the second sensing space 65a is a space between the second diaphragm 62 and the second backup diaphragm 64, and the second sensor space 65b is the second backup diaphragm 64 and the second operating space. It refers to the space between the inner wall of (65).

The second sensor 67 is installed on the inner wall of the second operating space 65 in the second sensor space 65b, and the second diaphragm 62 is damaged and fluid flows into the second sensing space 65a. It can be installed to sense the status. The second sensor 67 is the same as the first sensor 57 and a detailed description thereof will be omitted.

here, The separation distance between the second sensor 67 and the second backup diaphragm 64 is 6 mm or less, preferably 3 mm. That is, if the distance between the first sensor 57 and the second backup diaphragm 64 exceeds 6 mm, it is difficult to detect the fluid flowing into the sensing space due to damage to the diaphragm, and if it is closer to less than 3 mm, the second backup diaphragm A malfunction in which the second sensor 67 senses the deformation caused by the operation process of 64 may occur.

The second backup diaphragm 64 may be formed of a corrosion-resistant rubber material so as to seal the second sensor space 65b while preventing damage from the second diaphragm 62 from being damaged by contact with the introduced fluid. have.

On the other hand, the first pump head 50 and the second pump head 60 may be provided with a vacuum pressure relief unit 70 to relieve the vacuum pressure in the operating space.

The vacuum pressure relief unit 70 is installed to prevent excessive vacuum pressure from being applied to the operating space of the first pump head 50 and the second pump head 60, as shown in FIG. 2. It may be installed to prevent damage to the first diaphragm 52 and the second diaphragm 62 by vacuum pressure.

More specifically, the vacuum pressure relief unit 70 is installed in communication with the operating space and is formed in the body portion 71 having an opening 71a formed on the side surface and the body portion 71, and is formed in the operating space. The ball seat 73 in which the communication hole is formed, the spring member 75 installed in the ball seat 73, and the spring member 75 are seated to close the opening 71a when vacuum pressure is not applied, When the pneumatic pressure is applied above the set pressure, it may include a ball member 77 that compresses the spring member 75 to open the opening 71a.

The body portion 71 is installed to communicate with the operating space of the first pump head 50 and the second pump head 60, and is formed in the first pump head 50 and the second pump head 60 It may be installed in a state in communication with the hole 72 and protruding from each side of the first pump head 50 and the second pump head 60.

The body portion 71 may be installed in a state in which the lower portion is in communication with the through hole 72, and an opening 71a in the upper portion thereof in communication with the atmosphere may be formed.

A ball seat 73 for seating the ball member 77 may be formed inside the body part 71.

The ball seat 73 is formed inside the body portion 71, and a communication hole communicating with the through hole 72 is formed, and the opening and closing operation of the communication hole may be performed according to the selective seating of the ball member 77. .

A spring member 75 may be installed in the communication hole position of the ball seat 73.

A part of the spring member 75 is inserted into the communication hole, and the other part is installed to protrude outside the communication hole, and the ball member 77 may be installed at the protruding end.

The ball member 77 has a diameter larger than the opened diameter of the opening 71a and is seated on the spring member 75 inside the body part 71 and is installed so as to be able to rise or fall according to the applied pressure of the vacuum pressure. I can.

In this way, in a state in which the ball member 77 is seated on the spring member 75 inside the body part 71, it is possible to rise or fall while overcoming the elastic force of the spring member 75 according to the applied magnitude of the vacuum pressure. As provided, it may be installed so that the vacuum pressure relief operation is performed when the vacuum pressure is excessively applied to the inside of the operating space.

In other words, when the user operates with the suction valve closed due to the user's carelessness during the operation of the metering pump, or when the strainer or pipe is blocked, excessive vacuum pressure is applied and the Teflon attached to the diaphragm surface is peeled off. This can cause damage.

Therefore, the vacuum pressure relief unit 70 of this embodiment, when an abnormal excessive vacuum pressure is applied to the inside of the first pump head 50 and the second pump head 60, the ball member 77 is a spring member ( 75) is moved in the direction of the through hole 72 formed in the first pump head 50 and the second pump head 60 by a certain distance to open the opening 71a formed in the body part 71 to the atmosphere. It can work.

Therefore, the abnormal vacuum pressure applied to the inside of the first pump head 50 and the second pump head 60 waits through the opening 71a of the body part 71 according to the movement of the ball member 77. As a result, it is possible to effectively prevent damage to the diaphragm caused by abnormal vacuum pressure.

As described above, the high-precision diaphragm type non-pulsating metering pump 100 using the flat cam of the present embodiment can easily check the damaged state of the diaphragm using a sensor, so that the diaphragm can be quickly replaced, It is possible to extend the service life.

In addition, it is possible to improve durability by preventing excessive vacuum pressure from being applied to the metering pump, preventing damage to the diaphragm by excessive vacuum pressure.

3 is a side view schematically showing a state in which a buffer protrusion protrudes from the first/second backup diaphragm according to the second embodiment of the present invention, and FIG. 4 is a side view schematically showing a state in which the buffer protrusion protrudes from the first backup diaphragm of FIG. It is a cross-sectional view of the main part schematically showing the state. The same reference numerals as in FIGS. 1 and 2 refer to the same or similar members having the same or similar function. Hereinafter, detailed descriptions of the same reference numbers will be omitted.

3 and 4, the surfaces of the first backup diaphragm 54 and the second backup diaphragm 64 of the high-precision diaphragm type pulseless metering pump using the flat cam according to the second embodiment of the present invention A plurality of buffer protrusions 110 may protrude.

The shock absorbing protrusions 110 may protrude in plural from the surfaces of the first and second backup diaphragms 54 and 64 facing the first and second diaphragms 52 and 62.

Therefore, when the shock absorbing protrusion 110 contacts the respective surfaces of the first backup diaphragm 54 and the second backup diaphragm 64 by deformation of the first diaphragm 52 and the second diaphragm 62, the contact It can be protruded to absorb the cushioning accordingly.

Accordingly, the shock absorbing protrusion 110 prevents contact damage between the first backup diaphragm 54 and the second backup diaphragm 64, thereby improving durability and extending the service life.

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Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and it is possible to implement various modifications within the scope of the claims, the detailed description of the invention, and the accompanying drawings. It is natural to fall within the scope of

10...Pump body 20...Flat cam
21...connection 22...keyway
23...Drive groove 23a..first inner wall surface
23b..2nd inner wall surface 30...1st slider
31...first roller bearing 40...second slider
41...2nd roller bearing 50...1st pump head
51...1st suction flow path 52...1st diaphragm
53...1st discharge flow path 54...1st backup diaphragm
56...first fixing member 57...first sensor
60...2nd pump head 61...2nd suction flow path
62...2nd diaphragm 63...2nd discharge passage
64...2nd backup diaphragm 66...2nd fixing member
67...2nd sensor 70...vacuum pressure relief part
71...body part 72...through hole
73...ball seat 75...spring member
77...Ball member 110..Shock bump

Claims (13)

A drive motor installed in the pump body;
A flat cam connected to the driving shaft of the driving motor and rotating, and having a driving groove formed along an outer circumference of the connecting portion to which the driving shaft is connected;
A first slider having a first roller bearing in rotational contact with an inner wall surface of the driving groove installed at one end and slidably installed on the pump body;
A second slider having a second roller bearing at one end installed in rotational contact with the inner wall surface of the driving groove and slidably installed on the pump body;
A first diaphragm installed in a first operating space formed between the first suction flow path and the first discharge flow path and pressurized and deformed by the other end of the first slider to provide suction and discharge of fluid, and the interior of the first operating space. A first pump head including a first backup diaphragm installed at a position between the wall surface and the first diaphragm and connected to the other end of the first slider; And
A second diaphragm installed in a second operating space formed between the second suction passage and the second discharge passage and deformed by pressure by the other end of the second slider to provide suction and discharge of fluid, and the interior of the second operation space. A second pump head including a second backup diaphragm installed at a position between the wall surface and the second diaphragm and connected to the other end of the second slider;
Including,
The first backup diaphragm is installed in the first operating space in a state in which a part of the first operating space is divided into a first sensing space and a first sensor space,
The second backup diaphragm is installed in the second operating space in a state in which a part of the second operating space is divided into a second sensing space and a second sensor space,
A first sensor is installed in the first sensor space to sense a state of fluid outflow into the first sensing space, and a second sensor is installed in the second sensor space to sense a state of fluid outflow into the second sensing space High-precision diaphragm type pulseless metering pump using a flat cam. The method of claim 1,
The first diaphragm and the second diaphragm are installed in a sealed state between the inner wall surface of the first operating space and the inner wall surface of the second operating space, respectively, a high-precision diaphragm type pulseless metering pump using a flat cam. delete The method of claim 1,
Each edge of the first backup diaphragm and the first diaphragm is inserted into the first pump head in the first operating space,
In the first pump head, a high-precision diaphragm type using a flat cam is inserted into the first backup diaphragm and a first fixing member that fixes a state in which the edge portion of the first diaphragm is inserted into the first pump head. Pulsed metering pump. delete The method of claim 1,
Each edge of the second backup diaphragm and the second diaphragm is inserted into the second pump head in the second operating space,
In the second pump head, a high-precision diaphragm-type non-pulsating motion using a flat cam is inserted into the second pump head with a second fixing member that fixes a state in which the second backup diaphragm and the edge of the second diaphragm are inserted into the inside of the second pump head. Metering pump. delete delete The method of claim 1,
The first sensor and the second sensor are capacitive sensors for sensing a change amount of the electrostatic voltage in the first sensing space and the second sensing space, a high-precision diaphragm type pulseless metering pump using a flat cam. The method of claim 1,
A high-precision diaphragm type non-pulsating metering pump using a flat cam, further comprising a vacuum pressure relief unit installed on the first pump head and the second pump head to relieve vacuum pressure in the operating space. The method of claim 10,
The vacuum pressure relief unit,
A body portion installed in communication with the operating space and having an opening formed at a side thereof;
A ball seat formed in the body portion and having a communication hole communicating with the operating space;
A spring member installed on the ball seat; And
A ball member seated on the spring member to close the opening when a vacuum pressure is not applied, and compress the spring member to open the opening when a vacuum pressure is applied above a set pressure;
Containing, high-precision diaphragm type pulseless metering pump using a flat cam. The method of claim 1,
A high-precision diaphragm-type non-pulsating metering pump using a flat cam, wherein a plurality of buffer projections protrude from the surfaces of the first and second backup diaphragms.
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