KR20180092012A - Titanium amorphos alloys for high performance solid film lubrication - Google Patents

Abstract

The present invention relates to a target made of amorphous alloy and the amorphous alloy capable of reducing friction resistance and improving abrasion resistance, and a compressor including an alloy layer as a lubricant layer. The present invention controls microstructure with an amorphous phase by using Ti-Cu-X amorphous alloy further containing a third element (X) capable of forming a Ti-Cu-X ternary process system including Ti and Cu. Accordingly, the present invention secures high hardness and a low elastic modulus of the lubricant layer, and as a result, it is possible to prevent the lubricant layer from being peeled or broken from a base, thereby improving reliability or durability of the compressor.

Description

Title: TITANIUM AMORPHOS ALLOYS FOR HIGH PERFORMANCE SOLID FILM LUBRICATION

The present invention relates to a sputtering target for forming a lubricating layer composed of an amorphous alloy and an amorphous alloy capable of reducing friction resistance and improving abrasion resistance, and a compressor including the lubricating layer.

Generally, air conditioners such as air conditioners and refrigerators generally include mechanical devices such as compressors. Such a compressor utilizes a principle of applying mechanical energy to a fluid by compressing the fluid, so that reciprocating motion or rotational motion is essential for compressing the fluid.

The operation of such compressors necessarily involves friction or vibration between the mechanical components of the compressor. For example, in a compressor that operates based on rotation, such as a rotary compressor or a scroll compressor, friction of the rotary shaft can not be avoided.

In general, to improve friction in a compressor, first use a separate mechanical component, such as a bearing, to reduce frictional resistance. Further, a lubricating layer is formed to reduce frictional resistance between the rotating shaft and the bearing.

Conventionally, a lubricating film of a liquid phase is mainly used as a lubricating layer. However, in recent years efforts have been made to reduce friction and / or wear, primarily by using solid lubricant films as coating bearings.

As a method of applying such a solid lubricant film, a solid material having excellent friction and abrasion characteristics is coated on one or both of the components, which are in contact with each other and are relatively moving, and on one side or both sides of the friction surface to form a friction surface tribology ) Properties are known.

Examples of the components of the solid lubricant film include solid lubricants such as PTFE, MoS ₂ , WS ₂ and graphite, ceramic fillers, and organic material-based lubricants including a mixed material such as a silane coupling material Based coating composition comprising a carbide or nitride such as cBN, TiC, TiN or the like, or a lubricating coating composition based on a low melting point metal such as Sn-Bi alloy, or a lubricating coating composition based on a lubrite layer A composite lubricating coating composition comprising a solid lubricant such as PTFE, MoS ₂ , WS ₂ , and graphite impregnated on the surface of the base material, or a carbon-based lubricating coating composition such as DLC (Diamond like carbon).

On the other hand, in recent years, as the size of home appliances has become smaller, compressors are rapidly increasing in speed and miniaturization. The miniaturization and speeding up of the compressor means that the conditions under which the compressor is operated become increasingly severe. In particular, a compressor designed for high-speed and small-sized conditions must not deteriorate under severe operating conditions in order to exhibit efficiency equal to or higher than that of a large-sized compressor. Therefore, friction and wear reduction methods using solid lubricant films are becoming more important.

However, the conventional solid lubricant film components have technical limitations because they are used in compact and high-speed compressors. For example, the manganese-based coating has a low friction property due to self-exhaustion, and thus has limitations in improving reliability and efficiency in abrasion resistance under severe operating conditions. In addition, DLC has been reported to have improved abrasion loss in comparison with the Lubrite coating, but it lacks affinity with the additives of the oil used in the compressor, so there is a limit to the improvement of characteristics at low speed operation.

Therefore, there is a growing demand for a new solid lubricant film that can replace the conventional solid lubricant film and a compressor using the same.

A related prior art is Korean Patent Laid-Open Publication No. 10-2014-0145219, which discloses a Zr-based amorphous alloy composition having amorphous forming ability.

An object of the present invention is to provide a lubricating layer having a new component and a microstructure in a lubricating layer used in a compressor of an air-conditioning equipment such as an air conditioner and a refrigerator, in order to improve friction characteristics and wear resistance of the lubricating layer.

More specifically, the present invention aims to provide a lubricating layer with a new amorphous coating that provides a specific composition range of Ti-Cu-X alloys as a new lubricant layer, thereby reducing frictional resistance between the components making up the compressor .

It is another object of the present invention to provide a crystalline sputtering target comprising a Ti-Cu-X alloy having a specific composition range having amorphous ability to form the amorphous coating layer and having thermal stability remarkably superior to amorphous.

In addition, it is an object of the present invention to provide a compressor having a lubricating layer of improved frictional resistance, wear resistance, and tame characteristics than conventional ones by forming a lubricating layer using the sputtering target.

According to an aspect of the present invention, there is provided a method of manufacturing a Ti-Cu-X ternary process system, comprising the steps of: -Cu-X amorphous alloy may be provided.

Preferably, the third element (X) is a Ti-Cu-X amorphous alloy of Ni or Co.

At this time, the alloy is a Ti-Cu-X amorphous alloy having a composition range of 65 to 73.2% Ti, 9.1 to 20% of Cu, and 10 to 21.8% of Ni in terms of atomic%.

The alloy is a Ti-Cu-X amorphous alloy having a composition range of 67.5-70% Ti, 10-17.5% Cu, and 15-20% Co in terms of atomic%.

Preferably, the third element X is a Ti-Cu-X amorphous alloy which improves the stability of the liquid phase relative to the Ti-Cu binary alloy and forms an intermetallic compound between the Ti and the second element.

At this time, the intermetallic compound is a Ti-Cu-X amorphous alloy of Ti ₂ Ni or Ti ₂ Co.

(A) Ti: 60 to 85%, Cu: 6 to 20%, X: 9 to 23%, (b) Ti: 65 to 73.2%, Cu: Wherein the sputtering target has a composition of 20 to 20%, Ni to 10 to 21.8%, and (c) Ti to 67.5 to 70%, Cu to 10 to 17.5% and Co to 15 to 20%.

Preferably, the target microstructure is a crystalline sputtering target.

Preferably, the average grain size of the target is in the range of 0.1 to 10 mu m.

According to another aspect of the present invention, there is provided a compressor comprising a solid lubricant layer of any one of the Ti-Cu-X amorphous alloys.

Preferably, the lubricating layer is a compressor coated on a base material comprising at least one of a steel material, a cast alloy, an alloy containing aluminum, and an alloy containing magnesium.

According to the present invention, since the composition of the Ti-Cu-X alloy has excellent amorphous forming ability, it may contain amorphous or further nanostructured microstructure having amorphous as a main phase. As a result, the amorphous microstructure can secure relatively high hardness and low elastic modulus as compared with general crystalline microstructure.

Further, the Ti-Cu-X ternary amorphous alloy of the present invention has an amorphous forming ability in a composition region where the Ti composition is higher than that of the conventional Ti-Cu binary amorphous alloy, and as a result, the Ti content is relatively high An intermetallic compound can be formed to improve the friction resistance and the durability.

In addition, the sputtering target of the present invention significantly improves the thermal / mechanical stability of the target, so that the destruction of the target during the sputtering process can be significantly suppressed, and the stabilization of the sputtering process can be improved. In addition, since it has a very uniform microstructure, the compositional deviation between the target composition and the thin film composition, which may be caused by the difference in the sputtering yield of each component derived from the ternary multi-component constituting the target, .

Further, the compressor of the present invention has an amorphous lubricating layer coated with the alloy of the ternary composition. As a result, it is possible to obtain an advantageous effect on the wear resistance and the friction characteristics of the compressor from the relatively high hardness of the amorphous microstructure. In addition, since the modulus of elasticity of the amorphous microstructure is similar to that of the matrix metal, it is possible to prevent the lubricating layer from being peeled or broken from the matrix, thereby improving the reliability or durability of the compressor.

1 is a conceptual diagram for explaining an amorphous alloy or solid lubricant layer of the present invention having an amorphous structure and a nanocrystalline structure.
2 is a stress-strain curve diagram comparing an amorphous metal with a metal nitride and a crystalline metal.
3 is a phase balance diagram of a binary alloy of Ti and Cu.
Fig. 4 is a phase diagram of binary alloys of Ti and Ni. Fig.
5 is a phase balance diagram of binary alloys of Ti and Co.
6 is a Gibbs triangle showing the composition of the amorphous Ti-Cu-Ni ternary alloys tested in the present invention.
FIG. 7 shows XRD patterns showing amorphous formability of alloys having a composition range of Ti 75% -Cu x% -Ni y% (x + y = 25).
8 is XRD patterns showing the amorphous formability of alloys in the composition range of 70% -Cu x% -Ni y% (x + y = 30) of Ti.
9 is an XRD pattern showing an amorphous forming ability of an alloy having a composition range of Ti 65% -Cu 15% -Ni 20%.
FIG. 10 is a Gibbs triangle showing the compositions of the liquidus lines of a Ti-Cu-Co ternary alloy and the compositions tested for amorphous formability in the present invention.
11 is XRD patterns showing the amorphous formability of alloys having a composition range of 70% -Cu x% -Co y% (x + y = 30) of Ti.
12 shows the results of differential thermal analysis of Ti 70% -Cu 10% -Ni 20% alloy.
13 shows the XRD results showing the amorphous forming ability of the composition region of the irradiation line 2 along the liquid phase line of the Ti-Cu-Co ternary alloy in Fig.
Fig. 14 shows a compressor 10 of any type, using a rotating shaft 11 and bearings 12, 13, to which the solid lubricant layer of the present invention is applied.

Hereinafter, a titanium amorphous alloy according to a preferred embodiment of the present invention, a sputtering target for forming a lubricating layer made of the amorphous alloy, and a compressor including the lubricating layer will be described in detail with reference to the accompanying drawings.

It is to be understood that the present invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, It is provided to inform. Also, for convenience of explanation, the components may be exaggerated or reduced in size.

Most solid materials are aggregates of microcrystals. In the three-dimensional space, each atom has a long range translational periodicity and is located in a defined crystal lattice. Alternatively, the liquid material has a disordered structure that lacks translational periodicity due to thermal vibrations.

In terms of atomic structure, the amorphous metal is a crystalline solid in that it does not have long-range order patterns, which are typical atomic structures of crystalline alloys, and is a solid that exists in a disordered state with a liquid structure. It is a concept compared with alloy.

In the present invention, the term amorphous refers generally to an amorphous structure in which the general concept of the amorphous structure is a microstructure and the X-ray diffraction pattern is a diffuse halo, Lt; RTI ID = 0.0 > amorphous < / RTI >

Furthermore, in the present invention, the term amorphous refers not only to the case where the composition of the composition is 100% amorphous, but also to the case where the amorphous state exists in the main phase and does not lose the property of the amorphous state, . Concretely, the present invention includes the case where a part of the amorphous structure is present as crystalline (or nanocrystalline), a part of nitride and / or carbide precipitates are present, or some intermetallic compound exists. Here, the nanocrystalline means a metal alloy having an average size of crystal grains of nano size (when it is several hundreds nm or less).

The glass forming ability (GFA) in the present invention indicates how easily an alloy of a specific composition can be amorphized. Generally, the amorphous formability of metals and / or alloys depends largely on their composition, and this ability to form amorphous from continuous cooling transformation diagrams or time-temperature-transformation diagrams The critical cooling rate (hereinafter referred to as Rc), which can be measured, can be directly evaluated. However, in reality, it is not easy to obtain Rc by experiments or calculations because the physical properties such as melt viscosity and latent heat of fusion are different depending on the composition of each alloy.

In order to form amorphous alloys through the most common and common method of casting, a higher cooling rate above a certain level of Rc is required. If a casting method in which the solidification rate is relatively slow (for example, a mold casting method) is used, the composition range of the amorphous formation is reduced. Alternatively, the rapid solidification method, such as melt spinning, in which a molten alloy is dropped on a rotating copper roll to solidify the alloy with a ribbon or wire rod, is usually carried out using a maximized cooling rate of 10 ⁴ to 10 ⁶ K / sec or more An amorphous ribbon having a thickness of several tens of micrometers can be obtained, thereby widening the composition range capable of forming amorphous. Therefore, the evaluation of the degree of amorphous formability of a particular composition is generally characterized by a relative value depending on the cooling rate of a given cooling process.

In consideration of the relative characteristics of amorphous forming ability, the alloy having amorphous forming ability in the present invention means an alloy capable of obtaining an amorphous ribbon when casting using a melt spinning method.

The amorphous alloy of the present invention can be applied to a compressor, more specifically, a lubricating layer formed at a friction portion of a rotating shaft or a rotating shaft and a bearing. The lubricating layer in the present invention can improve the durability, the low friction property, the heat resistance, and the tame property.

1 is a conceptual diagram for explaining an amorphous alloy or solid lubricant layer of the present invention.

The solid lubricant layer in the present invention shown in Fig. 1 shows an example formed at the friction portion between the rotating shaft and the bearing. 1 shows the lubrication layer 20 and the base materials 11, 12 and 13 on which the lubricating layer 20 is formed. The base material 11, 12, 13 to which the lubricating layer 20 is coated may comprise any material that can be used as a structural material. However, metals are more preferable than other materials because rapid cooling due to inherent high thermal conductivity of the metal is possible, which can promote amorphous formation of the lubricating layer 20. [

The lubricating layer 20 in the present invention may be composed of only the amorphous material 21 or may have a composite structure in which the main phase is amorphous or the amorphous material 21 and the nano-sized crystalline material 22 are mixed.

FIG. 2 is a stress-strain curve obtained by comparing an amorphous metal with a metal nitride and a crystalline metal. Here, the stress refers to the resistance generated in the material when an external force is applied to the material. Strain rate refers to the ratio of deformation to material and the original length of material. The slope in the stress-strain curve corresponds to the modulus of elasticity.

In general, the durability (reliability against abrasion resistance) of the lubricating layer can be evaluated by the ratio (H / E) between the hardness (H) and the elastic modulus (E). The relatively large value of the ratio of hardness to elastic modulus means that the durability of the lubricating layer is high and the possibility of peeling or fracture is low.

12 and 13 due to the influence of residual stress during deformation when the interface elasticity characteristics (or mechanical characteristics) between the base materials 11, 12 and 13 and the lubricating layer 20 are not similar, Or the lubricant layer 20 may be broken. The fact that the elastic characteristics do not coincide means that the elastic modulus difference between the base material 11, 12, 13 and the lubricating layer 20 is large. Conventional lubricating materials generally have a high modulus of elasticity due to the high hardness ceramic phase. Accordingly, even though the conventional lubricating materials deposit a soft crystalline phase, since they have a large elastic modulus difference with the base materials 11, 12 and 13, they exhibit low interfacial stability even when the initial lubrication performance is excellent. As a result, conventional lubricant materials are not readily sustainable because they are easily peeled or broken from the base material. The occurrence of peeling or fracture of the lubricating layer 20 means that the durability (reliability against abrasion resistance) of the lubricating layer 20 is low.

The metal nitride has a very high hardness. However, the metal nitride has a high modulus of elasticity, as can be seen from the slope of the graph shown in Fig. Also, the metal nitride has a low elastic strain of 0.5% or less. As a result, the metal nitride can form a hardness lubricating layer due to its relatively high hardness, but it is difficult to secure durability due to a relatively high elastic modulus.

On the other hand, the crystalline metal has a very low modulus of elasticity, as can be seen from the slope of the graph shown in Fig. However, the crystalline metal has a low elastic strain of 0.5% or less like a metal nitride. The elastic strain of the crystalline metal is so small that a plastic deformation typically occurs from a strain of 0.2% or more (0.2% Offset yield strain). Further, the hardness of the crystalline metal has a much lower hardness than the metal nitride. As a result, it is difficult to form a high hardness lubricant layer due to the relatively low hardness, while the crystalline metal has a certain degree of durability of the lubricant layer due to a low elastic modulus.

On the other hand, as can be seen from the above results of the metal nitride and the crystalline metal, the elastic modulus tends to increase as the hardness increases. On the contrary, when the elastic modulus is lowered, the hardness also tends to be lowered. Therefore, it is difficult to simultaneously improve the ratio of the hardness and the elastic modulus. This means that it is difficult to ensure the durability of the high hardness lubricant layer through high hardness and low modulus of elasticity.

However, the present invention can achieve high hardness and low elastic modulus through the microstructure of a composite structure composed of amorphous and nanocrystalline. The hardness of the amorphous metal is lower than that of the metal nitride, but has a higher hardness than the crystalline metal. Referring to FIG. 2, the modulus of elasticity of the amorphous metal is much lower than that of the crystalline metal or metal nitride. In addition, the elastic strain limit of the amorphous metal is more than 1.5%, and the amorphous metal exhibits a wide elastic limit, thereby acting as a buffer between the lubricating layer and the friction material.

Therefore, unlike the general tendency in the metal materials described above, the amorphous metal has a high hardness, a low elastic modulus and a large elastic strain. Accordingly, the ratio (H / E) between the hardness of the amorphous metal and the modulus of elasticity is larger than that of the crystalline metal or the metal nitride.

As a result, the lubricating layer utilizing the amorphous metal has an advantage that it has not only abrasion resistance caused by amorphous hardness but also reliability (durability). More specifically, since the lubricating layer 20 of the present invention shown in FIG. 1 is made of a material and composition having amorphous (21) forming ability, it is possible to form a composite structure composed of amorphous material 21 and nanocrystal material 22 . As described above, peeling or fracture of the lubricating layer 20 occurs due to mismatch of the interface elastic properties (or mechanical properties) between the base materials 11, 12, 13 and the lubricating layer 20. However, since the lubricating layer 20 including the amorphous material 21 according to the present invention has a hardness and a low elastic modulus value as compared with the crystalline alloy, the lubricating layer 20 containing a nitride and / or a carbide precipitation phase and / The peeling or fracture of the lubricating layer 20 can be minimized. Accordingly, the lubricating layer 20 of the present invention has higher durability (reliability against abrasion resistance) than conventional lubricating materials.

The amorphous alloy in the present invention further includes a third element (X) capable of forming a Ti-Cu-X ternary system. The reason why the Ti-Cu-X ternary alloy based on Ti is used in the present invention is that it is a metal which can form an intermetallic compound which is advantageous for realizing the ultrahigh hardness characteristic and another alloy element to which Ti is added Because it is an element. However, even if it has a high hardness, if there is a discrepancy in interfacial elasticity properties with the base material, breakage or peeling of the lubricating layer may occur. Accordingly, in the present invention, a Ti-Cu-X ternary alloy is designed to have an amorphous microstructure capable of forming amorphous microstructure to have similar elastic properties of a base material and a lubricant layer.

Similar to common metals, Ti alloys are generally made of crystalline alloys in general compositions and manufacturing processes, so that compositions with amorphous forming ability generally have a narrow range. However, an excessively narrow composition range may not have sufficient amorphous forming ability, but also limits the improvement of various characteristics depending on the composition.

Therefore, in the present invention, in order to develop an alloy having amorphous forming ability over a wide composition range, it is possible to lower the melting point based on a conventional binary Ti alloy, and further to lower the melting point of Ti-Cu- X 3-element alloy was designed.

First, in the present invention, a composition range having amorphous forming ability of various Ti-based binary alloys is investigated. Investigation of Ti-based binary alloys to determine the amorphous formability of Ti-Cu-X ternary alloys must be preceded. This is because Ti-Cu, Ti-X and Cu-X phase diagrams and amorphous properties must first be obtained in order to know the liquid phase and microstructure of Ti-based ternary alloys. This is because it is necessary to know the interaction between the three-component elements when the three components are alloyed, so that a Ti-Cu-X ternary alloy can be designed.

3 is a state diagram of Ti and Cu for explaining a composition range having an amorphous forming ability of a Ti-Cu binary alloy made of Ti and Cu.

A composition having an amorphous forming ability in a binary alloy can be determined in a composition range including an eutectic point, as in a ternary alloy. As the term "eutectic" indicates, the process point refers to the temperature at which an alloy can maintain a liquid phase at the lowest temperature in an alloy system.

In general, the transfer phenomenon of materials is classified into thermal activation process, both convection in the liquid phase and diffusion in the solid phase. Therefore, as the melting point is lower, the liquid phase may be present at a low temperature, and therefore, when the liquid phase is phase-transformed into a solid phase, the movement of the material is slowed, so that the possibility of formation of an equilibrium crystal is further lowered.

And the phase transformation from liquid phase to solid phase always requires under-cooling due to the energy barrier of solid-liquid interface energy generated in the nucleation process of solid phase. This means that the liquid phase is also present at a temperature substantially lower than the equilibrium temperature, which is thermodynamic.

As the term eutectic indicates, the process point is the temperature at which the liquid phase can be maintained at the lowest temperature in any alloy system. As a result, the composition near the process point corresponds to a composition that can exist at the lowest temperature of the liquid phase in terms of thermodynamics, and in addition, in terms of kinetics, undercooling occurs in nucleation, It is the most advantageous composition capable of securing amorphous forming ability in a ternary alloy.

On the other hand, in FIG. 3, a region where the value of? T * indicating the relative melting point drop of the alloy is 0.2 or more is shaded. ΔT * represents the difference between the predicted melting point and the actual melting point based on the melting point of each element in the alloy and the mixing ratio corresponding to the composition in a specific composition at the same ratio as in the following equation.

(here,

As shown in FIG. 3, the Ti-Cu binary alloy has process points of 43% Cu and 73% Cu at atomic% (hereinafter, the compositional percentages are all atomic% in the present invention) And the composition range of 0.2 or more was found to be 30 to 78% Cu. However, the composition area which was confirmed to be amorphous by the actual melt spinning method was 35 ~ 40% Cu area.

4 is a state diagram of Ti and Ni for explaining a composition range having an amorphous forming ability of a Ti-Ni binary alloy made of Ti and Ni. As shown in the state diagram of FIG. 4, the Ti-Ni binary alloy has a process point at 24% Ni and 61% Ni in terms of atomic%, and a composition region having ΔT * of 0.2 or more is 18 ~ 40% Ni and 61% Ni Respectively.

5 is a state diagram of Ti and Co for explaining a composition range having an amorphous forming ability of a Ti-Co binary alloy made of Ti and Co. As shown in the state diagram of FIG. 5, the Ti-Co binary alloy has a process point of 23.2% Co and 75.8% Co in terms of atomic percentage, and a composition region in which the ΔT * is 0.2 or more is 17 ~ 40% Co and 75.8% Co Respectively.

On the other hand, Cu-Ni binary alloys are known to form a highly solid solution in both liquid and solid phases. Cu-Co does not form an eutectic system.

3 to 5 and a state diagram of Cu-Ni and Cu-Co alloy system, it can be seen that the binary alloy composed of Ti and Cu has the broadest composition range of amorphous forming ability. Therefore, in the present invention, a ternary Ti-Cu-X ternary system process system including Ni and Co as a third element capable of forming a ternary process system capable of further lowering the liquid phase composition based on the Ti-Cu binary system alloy Alloy.

The production of the amorphous alloy and the evaluation method of the amorphous forming ability in the present invention are as follows.

First, the Ti-based amorphous alloy composition of the desired component is implemented with an amorphous alloy casting material, an amorphous alloy powder, and an amorphous alloy ribbon in the form of a foil. Methods for implementing this method are widely known in the art to which the present invention belongs, and examples thereof include a rapid solidification method, a die casting method, a high-pressure casting method, an atomizing method, and a melt spinning method.

In the present invention, first, an alloy button having a desired composition is prepared using a vacuum arc remelting method. The alloy of the button shape was then re-dissolved again to prepare an alloy melt, and the molten alloy was injected into the surface of a copper roll rotating at a high speed through a nozzle to rapidly solidify the alloy melt.

Whether or not the ribbon-like amorphous body produced by the melt spinning method as described above is discriminated by X-ray diffraction (XRD) method widely known in the art to which the present invention belongs.

1st Example

Figs. 6 to 9 show compositions and XRD results in which an amorphous phase can be formed in a Ti-Cu-Ni ternary alloy.

First, as shown in FIG. 6, there are two ternary process points of Ti-Cu-Ni. First, there is a Ti-9.1% Cu-17.7% Ni process point indicated by E4 and a Ti-12.9% Cu-21.8% Ni process point indicated by E5.

Of course, there is an additional processing point in the Ti-Cu-Ni ternary alloy. However, in the present invention, in addition to the effect of low elastic modulus (E) through the amorphous alloy, Ti rich Area alloy.

First, the Ti-Cu-Ni ternary alloy with the Ti content fixed to 75% and the Cu and Ni adjusted within the remaining 25% range did not show amorphous formation ability in the irradiated region (FIG. 7). Rather, local or partial amorphous formability was observed in the Ti-25% Ni binary alloy (FIG. 7), which is believed to be due to the presence of process points in the Ti-Ni binary system at about 24% Ni (FIG.

On the contrary, the Ti-Cu-Ni ternary alloy having the Ti content of 70% and the remaining 30% of Cu and Ni in the range has a composition region showing amorphous formation ability in the irradiated region. Respectively. It can be seen from the XRD results that the main phase is amorphous in a composition region where the content of Cu + Ni is 30%, the content of Cu is 20 to 10% and the content of Ni is 10 to 20%. Furthermore, when the Ni content in the composition range is increased from 10% to 20%, weak diffraction peaks on Ti ₂ Ni are observed in the XRD results. This means that the Ti-10% Cu-20% Ni ternary alloy has a complex microstructure in which a high-hardness Ti ₂ Ni phase coexists in an amorphous matrix. The alloy has a low modulus of elasticity (E) and (H) which contains all of the advantages Ti ₂ Ni.

On the other hand, a Ti-Cu-Ni ternary alloy having a Ti content reduced to 65% also had a composition region having an amorphous forming ability. In particular, the Ti-15% Cu-20% Ni ternary alloy near the Ti-Cu-Ni ternary system showed the same XRD peak as the other Ti-Cu-Ni ternary alloy showing amorphous ability ( 9).

From the above XRD results, it was confirmed that the Ti-Cu-Ni ternary alloy system of the present invention had an amorphous forming ability in a composition range of Ti: 65 to 73.2%, Cu: 9.1 to 20%, and Ni: 10 to 21.8% .

On the other hand, the above-mentioned composition range having an amorphous forming ability in the Ti-Cu-Ni ternary alloy has a composition range of amorphous ternary performance when compared with the 35 to 40% Cu composition range in which the amorphous forming ability is confirmed in the Ti-Cu binary alloy It can be seen that it has been greatly expanded. This means that the Ti-Cu-Ni ternary alloy of the present invention has a stable ability to form amorphous and enhance the property improvement compared with a binary alloy such as Ti-Cu.

Second Example

FIGS. 10 to 13 show X-ray diffraction (XRD) and differential scanning calorimetry (DSC) results obtained by confirming the liquidus line projection and the amorphous formability in the Ti-Cu-Co ternary alloy, respectively.

First, as shown in Fig. 10, there exists a ternary process point of the Ti-Cu-Co ternary system in the present invention. In the present invention, first, the composition of Ti is first fixed to 70%, and then the composition of the area of the investigation line 1 in which Cu and Ni are adjusted within the remaining 30% range and the composition area of the irradiation line 2 along the liquid- Amorphous formability was investigated.

As shown in FIG. 11, it can be seen that a Ti-Cu-Co ternary alloy in the irradiation line 1 composition region having a Ti content of 70% has a composition region exhibiting amorphous forming ability in the irradiated region. Especially, in the composition region where the Cu content is 12.5 ~ 10% and the Co content is 17.5 ~ 20%, it is confirmed from the XRD result that the main phase is amorphous. In addition, a weak diffraction peak of the Ti ₂ Co phase is observed in the XRD results in the amorphous composition region. This means that the Ti- (12.5 ~ 10)% Cu- (17.5 ~ 20)% Co ternary alloy has a complex microstructure in which a high-hardness Ti ₂ Co phase coexists in an amorphous matrix, It includes both the elastic modulus (E) properties and the high degree of consolidation (H) of the Ti ₂ Co phase.

12 is a result of analysis of a Ti-10% Cu-20% Co alloy showing an amorphous forming ability in an XRD analysis by a differential scanning calorimeter (DSC). The alloy of the above composition exhibited a sharp increase in the amount of heat near 700K when heated by DSC. The crystallization temperature of the Ti-10% Cu-20% Co alloy was analyzed to be about 675 K as a result of differential thermal analysis as a typical peak indicating the crystallization of an amorphous metal.

On the other hand, as can be seen from the liquidus lines in Fig. 10, the direction of the arrow in the irradiation line 2 almost coincides with the direction in which the composition of the liquid phase changes as the temperature of the Ti-Cu- This means that the liquid phase can be present at a lower temperature as it proceeds in the direction of the arrow, that is, the more Cu is advanced to the side. Therefore, in the composition range of the irradiation line 2, the amorphous formability is expected to increase more as the liquid phase is maintained at a lower temperature as the Cu content increases.

13 is an XRD result obtained by examining the amorphous forming ability of the composition region of the irradiation line 2 along the liquid phase line of the Ti-Cu-Co ternary alloy. The result in FIG. 13 exactly coincides with the above prediction. First, in the irradiation line 2, Ti-7.5% Cu-20% Co alloy, which is a region having a small amount of Cu, has all of crystalline without amorphous. However, the Ti-12.5% Cu-17.5% Co alloy with a larger amount of Cu is more amorphous and the local Ti ₂ Co phase exists. Finally, the Ti-17.5% Cu-15% Co alloy, where Cu is further increased, shows the XRD results of almost all of the microstructure in an amorphous phase.

From the above XRD and DSC results, the Ti-Cu-Co ternary alloy system of the present invention has an amorphous forming ability in the composition range of Ti: 67.5 to 70%, Cu: 10 to 17.5% and Co: 15 to 20% Respectively.

On the other hand, the above composition range having the amorphous forming ability in the Ti-Cu-Co ternary alloy has a composition range of the amorphous ternary performance when compared with the 35 to 40% Cu composition range in which the amorphous forming ability is confirmed in the Ti-Cu binary alloy It can be seen that it has been greatly expanded. This means that the Ti-Cu-Co ternary alloy of the present invention has a stable ability to form amorphous and enhance the property improvement compared with a binary alloy such as Ti-Cu.

Sputtering target

Hereinafter, the sputtering target proposed in the present invention will be described.

The sputtering process is widely used in semiconductor manufacturing fields, microelectronic devices such as MEMS, and motors, and coatings for improving wear resistance in compressors and the like.

When a thin film of amorphous phase or a complex amorphous thin film containing nanocrystalline is produced using a sputtering process, the sputtering target to be used may be a crystalline or amorphous target. However, in amorphous targets, the target surface is locally increased in temperature due to the collision of plasma ions during the sputtering process, and this temperature increase can again cause microstructure change of the target surface.

More specifically, since amorphous is a thermodynamically unstable phase, an increase in the temperature of the target causes crystallization that transforms the thermodynamically unstable amorphous material to the thermodynamically stable crystalline material at the target surface. However, such localized crystallization can lead to volume change and structural relaxation of the target, which increases the brittleness of the target, resulting in even extreme results in which the target is destroyed during the sputtering process.

Therefore, in order to improve the thermal stability of the sputtering target and the process reliability of the sputtering process, a sputtering target having a microstructure in a composition range having amorphous forming ability was produced. More specifically, a sputtering target having a crystalline microstructure was produced using a ternary Ti amorphous alloy having the composition of the example of the present invention.

First, in the present invention, a Ti-Cu-Ni ternary alloy and a Ti-Cu-Co ternary alloy having a composition which is found to have an amorphous forming ability in the above embodiments are dissolved by vacuum arc melting and then melt- Or amorphous alloy in the form of a foil (Foil). Then, after the ribbons are laminated in a plurality of layers, the crystallization starting temperature (which is easily apparent to those skilled in the art from the DSC analysis in Fig. 12) is higher than the crystallization initiation temperature A sputtering target having a crystalline quality can be obtained.

The amorphous alloy ribbons during the heat pressing process are crystallized by progress of bonding due to interdiffusion among the ribbons, and grain growth also occurs when the time of holding the heat pressure after crystallization is prolonged. Also in this process, the lamination interface between the deposited alloy ribbons can be destroyed by interdiffusion of atoms.

It is preferable that the grain size of the sputtering target of the microstructure finally crystallized or grain-grown has a range of 0.1 to 10 탆. When the grain size is smaller than 0.1 탆, sufficient crystallization can not be ensured, which is not preferable from the viewpoint of ensuring the thermal stability of the target. On the other hand, when the grain size is larger than 10 탆, crystallization can be sufficiently secured, but it is disadvantageous in terms of stability and uniformity of the plasma process and uniformity of the composition of the final coating layer.

Meanwhile, as another method, a crystalline sputtering target can be produced using an amorphous alloy powder having an example composition. In this case, a crystalline sputtering target can be produced by bonding aggregates of amorphous alloy powders produced by atomization or the like by high-temperature sintering or high-temperature sintering. In this case, the sintering temperature is higher than the crystallization start temperature in the composition of the alloy powder and is lower than the melting temperature.

As another example, a molten metal is injected into a copper mold through a nozzle and rapidly solidified in a mold such as copper having a high cooling ability such as a copper mold casting method using a pressure difference between the inside and the outside of the mold, Of the amorphous alloy casting material can be produced. Thereafter, a crystalline alloy target may be obtained through annealing.

Lubricating layer  Compressor including

Hereinafter, the solid lubricant layer proposed in the present invention and a compressor including the solid lubricant layer will be described.

The lubricant layer of the present invention is applicable to all moving parts or components, but in the present invention, as a simplest example, a compressor having a structure utilizing the rotation of the rotating shaft is illustrated.

14 is a partial cross-sectional view of a compressor according to the present invention. Fig. 14 shows a compressor 100 of any type using a rotary shaft 111 and bearings 112, 113. Fig.

The rotating shaft 111 rotates to compress the gas during the operation of the compressor 100. The bearings 112 and 113 are configured so as to surround at least a part of the rotating shaft 111. The bearings 112 and 113 are fixed to rotate relative to the rotary shaft 111. [ The bearings 112 and 113 may include a main bearing 112 (or a first bearing) and a sub bearing 113 (or a second bearing).

When the compressor 100 operates, gas flows from one side of the rotating shaft 111 while the rotating shaft 111 rotates. And a reaction force F is formed in a direction opposite to the gas force G due to the introduced gas. Therefore, the rotating shaft 111 is in constant contact with the bearings 112 and 113 while the rotating shaft 111 rotates.

The lubricant layer is formed in the friction portions 112a and 113a of the rotating shaft 111 and the bearings 112 and 113 to realize wear resistance and low friction. The lubricant layer may be deposited on at least one of the rotating shaft 111 and the bearings 112, 113. Here, the lubricating layer is a Ti-Cu-X ternary alloy having the amorphous forming ability described in Examples of the present invention and the like.

The lubricant layer in the present invention is not applied only to the contact portion of the rotating shaft 111 and the bearings 112 and 113. [ For example, it may be applied to other components that the rotating shaft can contact, for example, a contact portion with a frame or a subframe. The lubrication layer of the present invention can also be applied to compressor components other than the rotating shaft and the bearing. For example, it can be applied to a friction portion of a cylinder, a rolling piston, a vane, and the like in a rotary compressor. Finally, the lubricant layer of the present invention can be applied to all parts, tools, and apparatuses other than the compressor in which friction or abrasion may occur.

On the other hand, the base material of the lubricating layer, such as the rotating shaft on which the lubricating layer is formed, is not particularly limited. However, it is preferable to include at least any one of steel, cast iron, aluminum-containing alloy, and magnesium-containing alloy, which are currently commercially available and widely used. This is because metals such as the above-mentioned steels, castings, aluminum-containing alloys, magnesium-containing alloys and the like have a side effect of promoting the amorphous forming ability of the lubricating layer due to high heat conduction.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the invention is not limited to the disclosed exemplary embodiments. It is obvious that a transformation can be made. Although the embodiments of the present invention have been described in detail above, the effects of the present invention are not explicitly described and described, but it is needless to say that the effects that can be predicted by the configurations should also be recognized.

Claims (11)

A Ti-Cu-X amorphous alloy, further comprising a third element (X) which comprises Ti and Cu and is capable of forming a Ti-Cu-X ternary system.
The method according to claim 1,
Wherein the third element (X) is Ni or Co.
3. The method of claim 2,
Wherein the alloy has a composition range of 65 to 73.2% Ti, 9.1 to 20% of Cu, and 10 to 21.8% of Ni in terms of atomic%.
3. The method of claim 2,
A Ti-Cu-X amorphous alloy characterized in that the alloy has a composition range of 67.5 to 70% Ti, 10 to 17.5% Cu, and 15 to 20% Co in atomic%.
The method according to claim 1,
Wherein the third element (X) forms an intermetallic compound with Ti. ≪ RTI ID = 0.0 > 11. < / RTI >
6. The method of claim 5,
Wherein the intermetallic compound is Ti ₂ Ni or Ti ₂ Co.
A sputtering target comprising the Ti-Cu-X composition of any one of claims 1-6.
8. The sputtering target according to claim 7, wherein the microstructure of the target is crystalline.
The sputtering target according to claim 8, wherein an average grain size of the target ranges from 0.1 to 10 mu m.
Characterized in that it comprises a lubricating layer of the Ti-Cu-X amorphous alloy of any one of claims 1 to 6.
11. The method of claim 10,
Wherein the lubricating layer is coated on a base material comprising at least one of a steel material, a cast alloy, an alloy containing aluminum, and an alloy containing magnesium.

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