KR20180084944A - 카본막의 성막 방법 - Google Patents

카본막의 성막 방법 Download PDF

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Publication number
KR20180084944A
KR20180084944A KR1020187017347A KR20187017347A KR20180084944A KR 20180084944 A KR20180084944 A KR 20180084944A KR 1020187017347 A KR1020187017347 A KR 1020187017347A KR 20187017347 A KR20187017347 A KR 20187017347A KR 20180084944 A KR20180084944 A KR 20180084944A
Authority
KR
South Korea
Prior art keywords
carbon film
forming carbon
forming
film
carbon
Prior art date
Application number
KR1020187017347A
Other languages
English (en)
Inventor
신지 코하리
주니치 이토
카즈시 후세
미츠노리 헨미
Original Assignee
가부시키가이샤 알박
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 알박 filed Critical 가부시키가이샤 알박
Publication of KR20180084944A publication Critical patent/KR20180084944A/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
KR1020187017347A 2015-11-20 2016-08-22 카본막의 성막 방법 KR20180084944A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2015-228097 2015-11-20
JP2015228097 2015-11-20
PCT/JP2016/003800 WO2017085898A1 (ja) 2015-11-20 2016-08-22 カーボン膜の成膜方法

Publications (1)

Publication Number Publication Date
KR20180084944A true KR20180084944A (ko) 2018-07-25

Family

ID=58718557

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187017347A KR20180084944A (ko) 2015-11-20 2016-08-22 카본막의 성막 방법

Country Status (6)

Country Link
US (1) US20180305807A1 (ko)
JP (1) JP6641382B2 (ko)
KR (1) KR20180084944A (ko)
CN (1) CN108350568A (ko)
TW (1) TWI686488B (ko)
WO (1) WO2017085898A1 (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0831573A (ja) 1994-07-13 1996-02-02 Matsushita Electric Ind Co Ltd 有機薄膜ｅｌ素子およびその製造方法
JP2015122159A (ja) 2013-12-20 2015-07-02 トヨタ自動車株式会社 リチウムイオン二次電池

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63210006A (ja) * 1987-02-25 1988-08-31 Meidensha Electric Mfg Co Ltd アモルフアスカ−ボン薄膜の形成方法
JP2003098306A (ja) * 2001-09-19 2003-04-03 Sumitomo Metal Mining Co Ltd 反射防止フィルム
EP1803142A1 (en) * 2004-09-24 2007-07-04 Zond, Inc. Apparatus for generating high-current electrical discharges
US8460519B2 (en) * 2005-10-28 2013-06-11 Applied Materials Inc. Protective offset sputtering
US8114256B2 (en) * 2007-11-30 2012-02-14 Applied Materials, Inc. Control of arbitrary scan path of a rotating magnetron

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0831573A (ja) 1994-07-13 1996-02-02 Matsushita Electric Ind Co Ltd 有機薄膜ｅｌ素子およびその製造方法
JP2015122159A (ja) 2013-12-20 2015-07-02 トヨタ自動車株式会社 リチウムイオン二次電池

Also Published As

Publication number Publication date
TWI686488B (zh) 2020-03-01
TW201734232A (zh) 2017-10-01
JP6641382B2 (ja) 2020-02-05
JPWO2017085898A1 (ja) 2018-09-06
CN108350568A (zh) 2018-07-31
WO2017085898A1 (ja) 2017-05-26
US20180305807A1 (en) 2018-10-25

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application