KR20180084456A - 펄스 플라스마 모니터링이 가능한 펄스 플라스마 발생 장치 - Google Patents

펄스 플라스마 모니터링이 가능한 펄스 플라스마 발생 장치 Download PDF

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Publication number
KR20180084456A
KR20180084456A KR1020170008080A KR20170008080A KR20180084456A KR 20180084456 A KR20180084456 A KR 20180084456A KR 1020170008080 A KR1020170008080 A KR 1020170008080A KR 20170008080 A KR20170008080 A KR 20170008080A KR 20180084456 A KR20180084456 A KR 20180084456A
Authority
KR
South Korea
Prior art keywords
pulse plasma
monitoring
generating apparatus
reaction space
pulse
Prior art date
Application number
KR1020170008080A
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English (en)
Inventor
정진욱
김동환
Original Assignee
한양대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한양대학교 산학협력단 filed Critical 한양대학교 산학협력단
Priority to KR1020170008080A priority Critical patent/KR20180084456A/ko
Publication of KR20180084456A publication Critical patent/KR20180084456A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/4446—Type of detector
    • G01J2001/446—Photodiode

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)

Abstract

펄스 플라스마 발생 장치가 개시된다. 펄스 플라스마 발생 장치는 반응공간이 내부에 형성되고, 뷰 포트를 갖는 반응 챔버; 상기 반응공간에 전계를 형성하는 안테나; 상기 안테나에 펄스 전력을 인가하는 전력 발생부; 상기 뷰 포트를 통해 상기 반응공간에서 발생되는 펄스 플라스마로부터 광 신호를 추출하는 포토 다이오드; 상기 전력 발생부에서 발생되는 트리거 신호와 상기 포토 다이오드로부터 추출된 상기 광 신호로부터 상기 반응공간 내 펄스 플라스마 발생을 모니터링하는 모니터링부를 포함한다.
KR1020170008080A 2017-01-17 2017-01-17 펄스 플라스마 모니터링이 가능한 펄스 플라스마 발생 장치 KR20180084456A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020170008080A KR20180084456A (ko) 2017-01-17 2017-01-17 펄스 플라스마 모니터링이 가능한 펄스 플라스마 발생 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020170008080A KR20180084456A (ko) 2017-01-17 2017-01-17 펄스 플라스마 모니터링이 가능한 펄스 플라스마 발생 장치

Publications (1)

Publication Number Publication Date
KR20180084456A true KR20180084456A (ko) 2018-07-25

Family

ID=63058885

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170008080A KR20180084456A (ko) 2017-01-17 2017-01-17 펄스 플라스마 모니터링이 가능한 펄스 플라스마 발생 장치

Country Status (1)

Country Link
KR (1) KR20180084456A (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114942100A (zh) * 2021-12-31 2022-08-26 西安交通大学 一种用于真空开关真空度检测的装置及方法
US11996275B2 (en) 2021-12-17 2024-05-28 Samsung Electronics Co., Ltd. Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11996275B2 (en) 2021-12-17 2024-05-28 Samsung Electronics Co., Ltd. Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof
CN114942100A (zh) * 2021-12-31 2022-08-26 西安交通大学 一种用于真空开关真空度检测的装置及方法

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