KR20180073953A - Contaminant and dust collecting facility - Google Patents

Abstract

The present invention relates to a contaminant and dust collection facility, which controls the flow rate, the speed, and a moving path of gas transferring a specimen so as to effectively remove contaminant and foreign matters generated from the specimen. According to one embodiment of the present invention, the contaminant and dust collection facility comprises: a jig formed on the upper part of a processing device in a plate shape; a blowing unit disposed on one side of the upper part of the jig to discharge gas to the other side; a suction unit disposed on the other side of the upper part of the jig to suck the gas and the foreign matters; and a gripper to fix the specimen disposed between the blowing unit and the suction unit in the jig. The blowing unit comprises gas discharge units disposed from a relatively lower position than that of the specimen to a high position to be spaced apart from each other.

Description

{CONTAMINANT AND DUST COLLECTING FACILITY}

Disclosure of the Invention The present disclosure relates to a pollutant collecting apparatus for sucking pollutants generated in a laser processing apparatus.

Unless otherwise indicated herein, the description set forth in this identification section is not prior art to the claims of this application and is not to be construed as prior art as described in this identification section.

2. Description of the Related Art [0002] In recent years, a semiconductor device and a substrate have become highly integrated, and a machining method using a laser machining apparatus has been widely used. However, there is a disadvantage that dust or fine dust is generated during processing of a specimen disposed on a stage of various laser machining apparatuses.

In addition, impurities including dust, fine particles, smoke, polluting gas, and odor generated from the specimen are dissolved again by the laser during the processing process to lower the processing quality, And it is difficult to move it to a specific position after it is detached and to discharge it.

Korean Patent Laid-Open No. 10-2000-0050098 discloses a laser processing machine pollutant collecting apparatus for collecting harmful gas generated during laser processing, and Korean Utility Model Registration No. 20-0380212 discloses a laser processing machine And a pollutant collecting facility of a routing router.

 However, the prior art does not disclose an invention that effectively removes foreign matter generated during processing of a specimen from a specimen and sucks and discharges the specimen to the outside. In order to solve this problem, there is a need for an invention for desorbing and removing foreign matters generated in a specimen .

The present invention provides a pollutant collecting apparatus that effectively removes foreign materials generated in a specimen by controlling a flow rate, a velocity, and a moving path of a gas moving the specimen.

Further, it is obvious that the present invention is not limited to the above-described technical problems, and another technical problem may be derived from the following description.

According to an embodiment of the present invention, the pollutant collecting facility includes a jig formed in a plate shape on the upper portion of the processing apparatus, a blowing unit disposed on one side of the jig and discharging the gas to the other side, And a gripper for fixing the specimen disposed between the blowing unit and the suction unit to the jig, wherein the blowing unit is disposed to be spaced apart from a relatively low position to a high position relative to the specimen And gas discharge portions.

The gas is mixed with the foreign matter passing through the upper surface of the specimen and may be sucked into each of the gas suction portions formed in the suction portion in a mixed state and arranged on the same horizontal plane as each of the gas discharge portions .

According to an embodiment of the present disclosure, the pollutant collecting facility sets the velocity of discharged gas differently according to the position where the gas is discharged, generates lift force around the specimen, effectively removes foreign matter generated from the specimen .

In addition, if the amount of suction of the gas is increased relatively higher than the amount of gas discharged to the specimen, the gas passing through the specimen can be effectively sucked into the suction part, thereby improving the specimen processing environment.

In addition, it is possible to effectively generate the lift at the position where the specimen is positioned by disposing the lift portion at the position where the specimen and the gas are discharged, and to control the position of the lift portion, thereby effectively removing foreign matters generated in various sizes and types of specimens .

It is also possible to have other effects besides the enumerated effects including the foreign body removal and aspiration functions described above.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a pollutant collecting facility in accordance with an embodiment of the disclosure herein.
FIG. 2 is a perspective view of the pollutant collecting device of FIG. 1 viewed from another direction; FIG.
FIGS. 3 and 4 are graphs showing the results of the flow analysis of the gas moving between the blowing part and the suction part of FIG. 1. FIG.
5 is a perspective view showing a pollutant dust collecting apparatus according to another embodiment of the present invention;
6 is a perspective view showing a pollutant dust collecting apparatus according to another embodiment of the present invention;
Figures 7 and 8 are cross-sectional views taken along line I-I 'of the pollutant collection facility of Figure 6;

Hereinafter, the configuration, operation, and effects of the pollutant dust collecting apparatus according to the preferred embodiment will be described with reference to the accompanying drawings. For reference, in the following drawings, each component is omitted or schematically shown for convenience and clarity, and the size of each component does not reflect the actual size, and the same reference numerals denote the same components throughout the specification. And reference numerals for the same components in individual drawings are omitted.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 shows a perspective view of a pollutant collection facility in accordance with an embodiment of the disclosure herein.

FIG. 2 shows a perspective view of the pollutant collecting facility of FIG. 1 taken in another direction.

1 and 2, the pollutant dust collecting apparatus 100 includes a jig 200, a gripper 300, a blowing unit 400, and a suction unit 500.

The pollutant collecting apparatus 100 is a device for removing foreign matter generated from a specimen while a specimen processing apparatus including a laser scanner processing apparatus is driven and pressurizes and discharges the gas toward the other side of the specimen, Incorporate foreign matter with the gas from the other side.

A jig 200 is formed in the form of a plate on the upper part of the processing apparatus and a specimen 10 to be processed by laser is disposed on the jig 200. A laser 20 is reflected on the specimen 10 A galvanometer mirror 40 for guiding a laser beam toward the specimen 10, a scanner lens 50 through which the laser beam 20 reflected by the galvanometer mirror 40 passes, The head 30 is disposed.

The gripper 300 is disposed on both sides of the specimen 10 to fix the specimen 10 disposed on the upper portion of the jig 200 and the blowing portion 400 is disposed on one side of the upper portion of the jig 200, And pressurized toward the other side.

The suction part 500 is disposed on the other side of the upper part of the jig 200. When the gas reaches the position adjacent to the specimen 10 with the foreign matter 60, the suction part 500 sucks the gas and the foreign matter 60 together, .

The blowing unit 400 includes a cover frame 410, a first gas discharging unit 420, and a second gas discharging unit 430.

The cover frame 410 is formed in a rectangular parallelepiped shape so as to intersect the upper surface of one side of the jig 200. The first gas discharging portion 420 is arranged on the horizontal line relatively lower than the upper surface of the specimen 10 And the second gas discharging portion 430 is disposed toward the other side on a horizontal line relatively higher than the upper surface of the specimen 10. [

In addition to the first and second gas discharging units 420 and 430, the blowing unit 400 may further include a gas discharging unit, depending on the size of the test piece 10, in addition to the upper and lower surfaces of the first and second gas discharging units 420 and 430 As shown in FIG.

Each of the first and second gas discharging units 420 and 430 includes first and second gas discharging holes 421 and 431 spaced from each other along the other side of the blowing unit 400 on the same horizontal line And the size of the gas discharge holes can be adjusted according to the size of the specimen 10.

The suction part 500 includes a cover frame 510, a first gas suction part 520 and a second gas suction part 530.

The cover frame 510 is formed in a rectangular parallelepiped shape on the upper surface of the other side of the jig 200 and each of the first and second gas sucking portions 520 and 530 includes a specimen 10 Respectively.

The first gas suction part 520 is disposed on the same horizontal line as the first gas discharge part 420 and the second gas suction part 530 is disposed on the same horizontal line as the second gas discharge part 430, So that the moving path of the jig 200 and the test piece 10 are aligned with each other.

Each of the first and second gas sucking portions 520 and 530 is formed so as to be disposed on the same horizontal line as each of the first gas discharging hole 421 and the second gas discharging hole 431, The gas discharged from each of the gas suction units 520 and 530 moves toward the first gas discharge hole 421 and the second gas discharge holes 431, respectively.

Therefore, when gas is discharged toward the test piece 10 from the first and second gas discharging portions 420 and 430 of the blowing part 400 in the course of processing the test piece 10 by the laser 20, Is sucked into each of the first and second gas sucking portions 520 and 530 together with the foreign matter 60 generated in the specimen 10 to improve the laser processing environment and the foreign matter 60 during the processing of the specimen 10, The quality of the specimen 10 to be processed is improved.

FIGS. 3 and 4 are graphs showing the flow analysis results of the gas moving between the blowing unit and the suction unit of FIG. 1. FIG.

As shown in FIGS. 3 and 4, the graphs are 3D flow simulation simulation models analyzed through the computational flow analysis technique of Anflux Co., 1 and the second gas discharging holes 421 and 431 move through the specimen 10 to the suction unit 500.

 The closer to the red color the faster the speed is, the closer the color to the blue color as the speed is relatively decreased, and the gases are discharged at the rate of 50 m / s at the first and second gas discharge portions 420 and 430 The speed decreases to 15 m / s while reaching the specimen 10, and the speed significantly decreases at a position adjacent to the suction portion 500.

3, when the flow rate of the gas sucked by the suction unit 500 is 1.5 times the flow rate of the gas discharged from the blowing unit 400, the gas having the reduced speed is sucked into the suction unit 500, A part of the water is not sucked into the suction part 500 along the release gas path 73 but moves around the suction part 500.

4, when the suction flow rate of the suction section 500 is set to be three times the discharge flow rate of the blowing section 400, the path of the gas deviating to the vicinity of the suction section 500 is not recognized, Indicating that the gas is sucked into the suction unit 500.

Therefore, the blowing unit 400 discharges the gas toward the test piece 10 at a speed of 50 m / s or more, and the suction unit 500 discharges the suction flow rate 3 times or more of the discharge flow rate of the gas discharged from the blowing unit 400 So that the foreign substances 60 generated in the test piece 10 can be effectively removed.

5 shows a perspective view of a pollutant collecting facility according to another embodiment of the present invention.

The pollutant collecting facility 120 according to the present embodiment is substantially the same as the pollutant collecting facility 100 shown in FIG. 1 except for the location of the specimen 10, and therefore, the same reference numerals and names are used, Is omitted.

5, the specimen 10 of the pollutant collecting apparatus 120 is moved upward through the gripper 300 and is disposed to be spaced apart from the jig 200 at a predetermined interval in parallel to each other.

A through hole 80 is formed between the jig 200 and the specimen 10 so that the gas can move from the blowing unit 400 to the suction unit 500. The first and second gas discharging units 420 and 430 Each of the gases discharged from each of them moves along a first gas movement path 71 passing through the through hole 80 and a second gas movement path 72 moving above the specimen 10. [

In this case, when the laser 20 forms the holes passing through the upper and lower portions of the specimen 10 by processing the specimen 10, the foreign material 60 moves through the holes to the lower portion and the upper portion of the specimen 10, It is possible to effectively remove the foreign matter 60 through the gas moving at the upper and lower portions of the body 10.

When the gas discharging speed of the second gas discharging part 430 is relatively lower than the speed of the first gas discharging part 420, lift is generated toward the upper part according to the Bernoulli principle, 10 and moves to the suction part 500 along the second gas moving path 72. [

On the contrary, if the gas discharge speed of the first gas discharge portion 420 is set to be lower than the gas discharge speed of the second gas discharge portion 430, lifting force and gravity are generated toward the lower portion, Is sucked into the suction part (500) along the first gas moving path (71).

Therefore, it is possible to adjust the speed of the first gas discharging part 420 and the second gas discharging part 430 so as to adjust the divergence direction of the foreign substance 60 and effectively suck it, and the first and second gas discharging parts 420, and 430 by adjusting the speed of each of the first and second gas discharge holes 421 and 431, respectively, to precisely adjust the movement path of the gas and adjust the suction path of the foreign matter 60.

6 shows a perspective view of a pollutant collecting facility according to another embodiment of the present invention.

Figures 7 and 8 show cross-sectional views of the pollutant collection facility of Figure 6 taken along line I-I '.

The pollutant collecting facility 140 according to the present embodiment is substantially the same as the pollutant collecting facility 120 of FIG. 4 except for the lifting unit 600 and the lifting unit gripper 610, And redundant description is omitted.

6 to 8, the pollutant collecting facility 140 further includes a lifting unit 600 and a lifting unit gripper 610. As shown in FIG.

The lifting unit 600 is disposed between the blowing unit 400 and the specimen 10 and has one end in close contact with the specimen 10 and the other end extending to increase in thickness toward the blowing unit 400, A lifting unit gripper 610 for fixing the lifting unit 600 and adjusting the distance between the jig 200 and lifting unit 600 is formed.

The lower surface of the lift part 600 extends toward the blowing part 400 so as to maintain the same horizontal line as that of the lower surface of the specimen 10 and the upper surface extends from the upper surface of the specimen 10 to the blowing part 400 As shown in FIG.

The gas discharged from the blowing unit 400 through the lifting unit 600 moves along the upper surface of the lifting unit 600 while being closely attached to the upper surface of the test piece 10, And can be effectively sucked in the suction part (500) by mixing with the foreign material (60) while being in close contact with the upper surface.

The velocity of the gas discharged from the first gas discharging portion 420 toward the test piece 10 is discharged at a relatively lower rate than the gas discharged toward the test piece 10 from the second gas discharging portion 430, The foreign matter 60 generated in the test piece 10 is effectively detached from the test piece 10 by lifting force because the velocity of the gas moving on the upper surface of the test piece 10 is relatively fast.

Accordingly, the pollutant collecting facility 140 adjusts the flow path of the gas through the lifting unit 600 to increase the flow rate of the gas moving along the upper surface of the specimen 10, effectively transferring the foreign material 60 to the specimen 10).

6, the blowing unit 400 and the suction unit 500 are additionally disposed on the upper portion of each of the blowing unit 400 and the suction unit 500 to move the gas moving on the upper portion of the specimen 10 The velocity of the gas discharged from the first and second gas discharging portions 420 and 430 can be controlled and the position of the lift acting on the specimen 10 can be controlled Or stop the generation of lift.

7 and 8, the gas discharged from the first gas discharging portion 420 moves to the through hole 80 formed in the lower portion of the lifting portion 600 along the third gas moving path 73, The gas discharged from the second gas discharging portion 430 moves along the fourth gas moving path 74 in close contact with the upper surface of the lifting portion 600 and then to the upper surface of the specimen 10 again.

The gas is moved in close contact with the upper surface and the lower surface of the specimen 10 through the lift portion 600 and the velocity of the gas moving along the fourth gas movement path 74 is increased along the third gas movement path 73 The foreign matter 60 generated in the hole 11 formed during the machining of the test piece 10 can be easily detached through the upward force acting on the upper part.

The desorbed foreign matter 60 moves to the upper part or the lower part of the hole 11 and moves to the suction part 500 along the third and fourth gas movement paths 73 and 74 while being mixed with the gas, .

Therefore, the lifting portion 600 can guide the gas to the upper surface of the specimen 10 to effectively generate lifting force on the specimen 10, and the lift portion 600 coupled to the lifting portion gripper 610 By moving one end to the upper and lower parts and adjusting the moving path of the gas, the foreign matter 60 generated at various positions can be efficiently removed depending on the type and size of the specimen.

The lifting unit 600 coupled to the lifting unit gripper 610 may be moved upward or downward to adjust the size of the space formed between the lifting unit 600 and the jig 200, The velocity of the gas moving to the upper and lower portions of the specimen 10 can be conveniently adjusted according to the size of the specimen 10 and the position of the lift can be changed.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken in conjunction with the present invention. It is to be understood that various equivalents and modifications may be substituted for those at the time of the present application. It is to be understood, therefore, that the above description is intended to be illustrative, and not restrictive, and that the scope of the present invention will be defined by the appended claims rather than by the foregoing description, All changes or modifications that come within the scope of the equivalent concept are to be construed as being included within the scope of the present invention.

100, 120, 140: pollutant collecting facility 200: jig
300: gripper 400: blowing part
500: Suction part 600: Lifting part

Claims (9)

A pollutant collecting apparatus for removing foreign substances generated by processing a specimen,
A jig formed in the form of a plate on the upper portion of the processing apparatus;
A blowing unit disposed at one side of the jig and discharging gas to the other side;
A suction unit disposed on the other side of the upper portion of the jig and sucking the gas and foreign matter;
And a gripper for fixing the specimen disposed between the blowing unit and the suction unit to the jig,
Wherein the blowing part includes gas discharging parts arranged to be spaced apart from a relatively lower position to a higher position than the specimen.
The method according to claim 1,
The gas is mixed with the foreign matter passing through the upper surface of the specimen and is sucked into each of the gas suction portions formed on the suction portion in a mixed state and arranged on the same horizontal plane as each of the gas discharge portions Pollutant collection facilities.
3. The fuel cell system according to claim 2,
And gas discharge holes arranged on the same horizontal line so as to be spaced apart from each other along the other side of the blowing unit.
The suction device according to claim 2,
Wherein the suction flow rate for sucking the gas and the foreign matter is set to three times or more of the discharge flow rate for discharging the gas of the blowing unit.
The gripper according to claim 1,
Wherein a part of both sides of the specimen is fixed to separate the specimen and the jig, thereby forming a through hole.
6. The method of claim 5,
Wherein the gas discharged from the blowing portion is sucked into the suction portion together with the foreign substances rising toward the upper portion while moving the upper portion of the specimen at a flow rate relatively higher than the flow rate flowing through the through hole. Dust collection facility.
The method according to claim 6,
Further comprising a lifting portion disposed between the blowing portion and the specimen, the lifting portion having one end in close contact with the specimen and the other end extending to increase in thickness toward the blowing portion.
8. The apparatus according to claim 7,
Wherein the lower surface extends toward the other end so as to maintain the same horizontal line as the lower surface of the specimen and the upper surface extends obliquely toward the upper end of the specimen.
9. The method of claim 8,
Wherein the foreign matter generated in the holes passing through the upper and lower portions of the specimen moves upward by the upward movement of the through hole and the upper portion of the specimen and the foreign matter and gas are sucked into the suction portion. Material collection facility.

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