KR20180029984A - Method for making liquid for antistatic treatment - Google Patents

Abstract

The present invention relates to a preparation method of an antistatic coating liquid, the antistatic coating liquid, an antistatic treatment method, and a working stage having an antistatic surface by the antistatic treatment method. An objective of the present invention is to provide the preparation method of the antistatic coating liquid, which minimizes the generation of static electricity in a surface that encounters a substrate of the stage, reduces preparation costs of the antistatic coating liquid, enables an operation to be performed even at room temperature, and is able to perform the operation in a state that the stage is mounted on equipment. The preparation method according to a preferred embodiment of the present invention comprises dispersing carbon nanotubes (CNTs), an inorganic sol-containing binder, and an auxiliary coating material in a solvent to prepare the antistatic coating liquid, wherein the auxiliary coating material includes at least one selected from zirconium acetate, zirconium chloride, methacryloxy silane, methacryloxypropyltrimethoxysilane, methacryloxypropyl triethoxysilane, N-(3-methacryloxy hydroxypropyl)-3-aminopropyltriethoxysilane, methacryloyloxypropyl tris(trimethylsilyloxy)silane, vinyltris(2-methoxyethoxy)silane, methyl methacrylate, ethyl methacrylate, propyl methacrylate, and n-butyl methacrylate.

Description

TECHNICAL FIELD [0001] The present invention relates to a method for producing an antistatic coating liquid,

The present invention relates to a method for producing an antistatic coating liquid, an antistatic coating liquid, an antistatic treatment method, and a work stage having an antistatic surface, and more particularly, An antistatic coating liquid prepared by the above method, a method of coating the coating liquid on a work stage, and a work stage whose surface is antistatic-treated.

A work stage used in a semiconductor manufacturing apparatus is usually made of a metal and a ceramic material, on which a wafer substrate is placed. In the semiconductor manufacturing apparatus using the work stage, a friction static is generated between the work stage and the wafer substrate when the handler moves the wafer substrate to the work stage and then places the wafer substrate on the work stage.

In addition, a work stage used in a PRC (Photo Resist Coater), an exposure apparatus (Lithography), a tester, and a dispenser, which is a manufacturing apparatus for FPD (Flat Panel Display), usually adsorbs a display substrate by a vacuum method. In this case, the work stage is also usually made of a metallic or ceramic material, and when the display substrate is adsorbed on the work stage or when the adsorbed and fixed display substrate is peeled from the work stage, And is charged on the display substrate. In recent years, as the display substrate becomes larger, the charge amount increases, and the problem of electrostatic charging tends to increase.

A plurality of electronic components such as semiconductor elements are disposed on the wafer substrate and the display substrate. Accordingly, when static electricity is generated, it can be applied to the electronic component and transmitted to the internal circuit. This results in a serious damage to the reliability of the electronic component. Particles may adhere to the substrate due to static electricity, or the substrate may break when the substrate is lifted up.

Conventionally, in order to prevent the static electricity from being charged, an ionizer is installed on a work stage to neutralize the electrification potential. However, in this case, lift-up is not possible and the ion wind of the ionizer does not reach. Even if the lift-up is performed, static electricity generated between the work stage and the substrate occurs momentarily The problem of peeling can not be solved.

To solve this problem, fluororesin coating (aka, Teflon coating) can be applied to prevent static electricity in the work stage. Since the fluororesin has a small adsorption energy with other substances, is excellent in non-tackiness, and has a small coefficient of friction, the correlation with the glass substrate becomes small and the amount of static electricity generated by peeling becomes small.

In this case, since the usual fluorine component has insulating properties, the Teflon coating contains a chargeable material in the fluorine component. That is, by performing Teflon coating on the work stage, static electricity is prevented from being generated in the work stage.

However, the Teflon coating method has a relatively high manufacturing cost. Particularly, in the case of a dispenser, as the size of the display substrate increases, the size of the work stage also increases, so that the manufacturing cost becomes more expensive.

In addition, since the hardness of fluorine itself is low, the hardness of the coating film made of fluorine is low, and scratches easily occur. As a result, it is difficult to maintain the flatness of the portion where scratches occur, and this is a cause of generation of particles.

In addition, since fluorine has an insulating property, it is required to add a conductive filler such as carbon black or a conductive polymer to have anti-static sheet resistance. In the case of carbon black, there is a problem that dust is generated as a spherical shape. When a conductive polymer is used, There is a problem in that it is difficult to form a thin film because of a weak formability and an excessive amount of binder.

The above methods require the antistatic treatment in a state where the stage is not equipped with equipment. Therefore, the stage must first be antistatic and then mounted on the equipment. In recent years, as the equipment becomes larger and the internal structure becomes complicated, it becomes difficult to separate the stage. Therefore, when the antistatic effect is reduced in the stage, further antistatic treatment and repair are difficult.

In order to solve such a problem, there is a problem that a part of the stage is partly repaired for antistatic strengthening, but in this case, a process of heat treatment is generally required, which causes equipment damage of the work stage and peripheral parts . In addition, in the case of repair using a general antistatic agent, conductive ink, paint, maca, etc., there is a problem in that the durability is poor.

Korean Patent No. 10-1171316

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to minimize the generation of static electricity on the surface of the stage contacting with the substrate, reduce the manufacturing cost thereof, And an object of the present invention is to provide an antistatic coating liquid, an antistatic treatment method, and a work stage whose surface is prevented from being electrified by the above method.

Another object of the present invention is to provide an antistatic treatment method capable of repairing even if the antistatic property is poor due to long-term use of the equipment, and a work stage whose surface is antistatic by the above method.

Accordingly, a method for manufacturing an antistatic coating solution according to a preferred embodiment of the present invention is a method for preparing an antistatic coating solution by mixing a carbon nanotube (CNT), a binder including an inorganic sol, . In this case, the coating aid may be selected from the group consisting of zirconium acetate, zirconium chloride, methacryloxy silane, methacryloxypropyltrimethoxysilane, methacryloxypropyltriethoxysilane, N- (3-methacryloxyhydroxypropyl) Methacryloxypropyltrimethylsilyloxysilane, vinyltris (2-methoxyethoxy) silane, methyl methacrylate, ethyl methacrylate, propyl methacrylate, n- Butyl methacrylate, and butyl methacrylate.

The binder may be at least one selected from among alumina sol, titania sol, ZnO sol, CeO2 sol, MgO sol and silica sol. In this case, the coating aid may be added in a weight ratio of 0.05 g to 2 g per 1 g of the inorganic sol.

The solvent may be an organic solvent such as water or an alcohol.

Meanwhile, the carbon nanotubes are dispersed in the solvent, and then the inorganic sol binder and the coating auxiliary material are mixed and stirred. And ultrasonic treatment of the mixed solution for 5 minutes to 20 minutes.

In another aspect of the present invention, there is provided an antistatic coating solution prepared by the method for producing an antistatic coating solution.

According to another aspect of the present invention, there is provided an antistatic coating method comprising the steps of wetting an antistatic coating solution on a sponge roll, contacting the sponge on the upper surface of a work stage of a metal and a ceramic material, ⁶ ? /? To 10 ⁹ ? / ?.

The sponge roll is made of at least one of a polyolefin, a polyurethane, a polyvinyl alcohol, and a polyvinyl chloride, and has a pore size of 5 탆 to 100 탆, and a density of 0.01 g / cm 3 to 0.5 g / have.

In another aspect of the present invention, there is provided a work stage in which a workpiece capable of being electrified with the metal or ceramics is transferred to an upper surface of the work stage, the work stage being made of a metal or a ceramic material, Antistatic coating liquid having an apparent specific gravity of 10 ⁶ Ω / □ to 10 ⁹ Ω / □ is coated.

According to the present invention, antistatic treatment can be performed at room temperature without a heat treatment process. Therefore, it is possible to work in a state in which the work stage is mounted on the equipment, so that repair work can be carried out immediately on site and damage to peripheral parts can be prevented.

In addition, the antistatic treatment using the sponge roll does not cause scattering problems due to the spray coating, so that work can be performed even in a space with a narrow space.

1 is a flowchart of an antistatic treatment method of a surface of a stage according to a preferred embodiment of the present invention.
FIG. 2 is a cross-sectional view illustrating an antistatic work stage according to a preferred embodiment of the present invention. FIG.
Figure 3 is a magnitude vs. voltage plot of a work stage in which the present invention is applied.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a flow chart showing each step of an antistatic treatment method according to a preferred embodiment of the present invention.

As shown in FIG. 1, the antistatic treatment method of the present invention includes a step (S10) of preparing an antistatic coating liquid, a step S20 of wetting an antistatic coating liquid on a sponge roll, (S30) of bringing the roll into contact with the work stage, and drying (S40) the work stage.

Step S10 of preparing an antistatic coating liquid is performed by dispersing carbon nanotubes (CNTs) in a solvent, followed by mixing an inorganic sol binder and a coating auxiliary material.

The solvent can be water or an organic solvent such as alcohol.

Carbon nanotubes (CNTs) have a unique carbon-nanotube (CNT) structure that combines carbon atoms with other carbon atoms into hexagonal honeycomb patterns, and the diameter of the tube is extremely small to the nanometer level.

Carbon nanotubes have excellent mechanical properties, electrical selectivity, and excellent field emission properties. When such a carbon nanotube is formed of a thin conductive film on a work stage, it has antistatic effect because it has high conductivity. In addition, since the carbon nanotubes are formed in a tube shape rather than a spherical shape, they are less likely to be dusted and have excellent moisture resistance.

The carbon nanotubes may be selected from single wall carbon nanotubes, double wall carbon nanotubes, multiwall carbon nanotubes, and multiple carbon nanotubes, and combinations thereof.

Carbon nanotubes whose surface has been modified by acid treatment or carbon nanotubes having different properties such as metallicity and semiconductivity can be selected.

The binder includes an inorganic sol. The inorganic sol may include at least one selected from alumina sol, titania sol, ZnO sol, CeO ₂ sol, MgO sol and silica sol.

When the inorganic sol is coated on a work stage, it can be cured with an inorganic gel. The inorganic gel imparts corrosion resistance to the antistatic film. Further, the inorganic gel is not broken by ultraviolet rays.

Coating aids allow coating at room temperature. The coating aid may be selected from the group consisting of zirconium acetate, zirconium chloride, methacryloxy silane, methacryloxypropyltrimethoxysilane, methacryloxypropyltriethoxysilane, N- (3-methacryloxyhydroxypropyl) Vinyltris (2-methoxyethoxy) silane, methyl methacrylate, ethyl methacrylate, propyl methacrylate, n-butyl methacrylate, n-butyl methacrylate, Rate of at least one selected from the group. These are cured on the surface of the work stage and combined with the moisture at room temperature, so that the carbon nanotubes and the inorganic gel combined with the coating aid material are coated on the work stage together.

The coating aid is preferably added in a weight ratio of 0.05 g to 2 g per g of the inorganic sol. When the weight ratio of the coating-aid material is less than 0.05 g, the non-uniformity of the thin film may occur or the durability may be deteriorated. In addition, when the coating auxiliary material has a weight ratio exceeding 2 g, the antistatic effect is rapidly deteriorated.

On the other hand, the inorganic sol preferably has a weight portion of 5 wt% to 30 wt% with respect to the total amount of the antistatic coating solution. If the content of the inorganic sol is less than 5 parts by weight based on the total amount of the antistatic coating liquid, the corrosion resistance is lowered and the durability against ultraviolet (UV) is lowered. If the content of the inorganic sol is 30 parts by weight or more based on the total amount of the antistatic coating solution, the anticorrosion property is improved but the antistatic effect is deteriorated and a fine crack may be generated on the surface of the thin layer.

Thereafter, a dispersion solution in which CNT is dispersed in an organic solvent such as water or alcohol, an inorganic sol binder, and a coating auxiliary material are mixed and the mixture solution is stirred and sonicated for 5 minutes to 20 minutes to complete an antistatic coating solution . Through the ultrasonic process, the components constituting the solution are sufficiently mixed to be modified so as to be coated at room temperature.

Thereafter, the antistatic coating liquid is wetted on a sponge roll (S20). In this step, the sponge roll is made of a sponge made of at least one of polyolefin, polyurethane, polyvinyl alcohol and polyvinyl chloride, and has a pore size of 5 to 100 탆, a density of 0.01 to 3 g / 0.5 g / cm < 3 >.

If the pore size is smaller than 5 탆, the carbon nanotubes in the adsorbed antistatic coating liquid can not escape from the sponge roll. If the pore size exceeds 100 탆, too much of the carbon nanotube is coated to contaminate the periphery of the stage And it is difficult to control sheet resistance.

Thereafter, the sponge roll is brought into contact with the work stage to form an antistatic coating layer (S30).

The sponge roll may be a continuously porous porous roller made of polyolefin (PO) or polyurethane (PU). By using such a roller, it becomes possible to uniformly coat the surface of the work stage.

According to the present invention, the surface of the work stage can be coated at room temperature, and a separate heat treatment step is unnecessary. Therefore, even if the place is narrow due to peripheral parts and mechanical devices, the above operation is possible. In addition, when damage occurs on the surface of the work stage due to the old usage, it is possible to repair the work stage without separating it from the equipment, and it is possible to repair work through the entire surface of the work stage, Can be maintained.

Thereafter, when the substrate is dried for 30 to 60 minutes, the surface of the work stage is electrified (S40).

In this case, the surface resistance of the work stage surface can be adjusted to 10 ⁶ to 10 ⁹ / □. The sheet resistance is a reasonable level for preventing the generation of static electricity in the working stage. If the sheet resistance is more than 10 ⁹ / □, the electric conductivity is not excellent and the effect of discharging the static electricity on the stage is small. If the sheet resistance is less than 10 ⁶ / □, the electric conductivity of itself is too large It may affect adjacent electronic components.

2 is a cross-sectional view illustrating an antistatic work stage 100 according to an embodiment of the present invention. 2, the antistatic work stage 100 of the present invention includes a work stage body 110 and an antistatic layer 200.

The work stage body 110 is made of a metal or a ceramic material. Therefore, the metal material of the present invention may be any one of aluminum (Al), magnesium (Mg), zinc (Zn), and titanium (Ti). The ceramic material may be any one of silicon carbide, silicon nitride, alumina, and zirconia.

The antistatic layer 200 is formed on the surface of the work stage body 110 and includes inorganic gel 220, carbon nanotubes 210 and a coating auxiliary material 230.

The inorganic gel 220 is formed by curing the inorganic sol, and imparts corrosion resistance to the antistatic film. Further, the inorganic gel is not broken by ultraviolet rays.

Coating aids allow room temperature coating and improve durability.

Carbon nanotubes are antistatic. In this case, it is preferable that the carbon nanotubes are mixed so that the antistatic layer 200 has a sheet resistance of 10 ⁶ to 10 ⁹ / □.

Figure 3 is a magnitude vs. voltage plot of a work stage in which the present invention is applied. In this case, the work stage material was anodized aluminum, the solvent was alcohol, the inorganic sol was titania sol, and the coating aid material was zirconium acetate. Further, the binder was added in a weight ratio of 20 wt% with respect to the total antistatic coating liquid, and the coating auxiliary material was added at 0.1 g per 1 g of the inorganic sol.

As shown in Fig. 3, it can be seen that the charging voltage is rapidly lowered after the charging treatment as in the present invention.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It can be understood that

100: Operation stage
110: work stage body
200: antistatic layer
210: Carbon nanotubes
220: inorganic gel
230: Coating aid

Claims (1)

A method for producing an antistatic coating solution by mixing carbon nanotubes (Carbon Nano Tube, CNT) dispersed in a solvent, a binder containing an inorganic sol, and a coating auxiliary material,
The coating aid may be selected from the group consisting of zirconium acetate, zirconium chloride, methacryloxy silane, methacryloxypropyltrimethoxysilane, methacryloxypropyltriethoxysilane, N- (3-methacryloxyhydroxypropyl) Vinyltris (2-methoxyethoxy) silane, methyl methacrylate, ethyl methacrylate, propyl methacrylate, n-butyl methacrylate, n-butyl methacrylate, Wherein the coating solution contains at least one selected from the group consisting of an alkali metal salt and a potassium salt.

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