KR20170103169A - Dual Thermistor Sensing Circuit for high Accuracy Temperature - Google Patents

Dual Thermistor Sensing Circuit for high Accuracy Temperature Download PDF

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Publication number
KR20170103169A
KR20170103169A KR1020160025580A KR20160025580A KR20170103169A KR 20170103169 A KR20170103169 A KR 20170103169A KR 1020160025580 A KR1020160025580 A KR 1020160025580A KR 20160025580 A KR20160025580 A KR 20160025580A KR 20170103169 A KR20170103169 A KR 20170103169A
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KR
South Korea
Prior art keywords
temperature
voltage value
voltage
temperature sensor
value
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KR1020160025580A
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Korean (ko)
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KR101889780B1 (en
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최병환
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(주)세종코리아지능화시스템
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Priority to KR1020160025580A priority Critical patent/KR101889780B1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/20—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
    • G01K7/21—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit for modifying the output characteristic, e.g. linearising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
    • G01K7/24—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor in a specially-adapted circuit, e.g. bridge circuit
    • G01K7/25—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor in a specially-adapted circuit, e.g. bridge circuit for modifying the output characteristic, e.g. linearising

Abstract

The present invention relates to a dual-temperature sensor sensing circuit for determining a fine temperature, which measures a voltage value outputted from a temperature sensor to determine a temperature, and comprises: a first temperature sensor device connected to a temperature measurement target, and outputting a voltage value varied according to a change in resistance value depending on a temperature; a first amplifying part for amplifying the voltage value varied by the first temperature sensor device; a first input part for inputting the voltage value amplified by the first amplifying part; a voltage output part for outputting a voltage value corresponding to the voltage value when the voltage value inputted from the first input part corresponds to a preset voltage range; a second temperature sensor device connected to the voltage output part, and changing a voltage value varied according to a change in a resistance value depending on a temperature into the inputted voltage value according to the voltage value outputted from the voltage output part; a second amplifying part for amplifying the voltage value changed by the second temperature sensor device; a second input part for inputting the voltage value amplified by the second amplifying part; and a temperature value converting output part for converting a temperature value on the basis of the voltage value inputted from the second input part. According to the present invention, provided is a dual-temperature sensing circuit for determining a fine temperature to improve precision by additionally forming a circuit for improving precision in a specific temperature range to a general temperature sensing circuit by considering that a temperature range requiring precision differs in accordance with each process in the industrial field.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a dual temperature sensing circuit,

The present invention relates to a duplicated temperature sensing circuit for determining a fine temperature, and more particularly, to a circuit for precise operation in a specific measurement temperature range in an existing circuit to improve the accuracy of a current output type temperature sensor And to a redundant temperature sensing circuit for determining a fine temperature for improving accuracy.

The present invention relates to a redundancy circuit.

Semiconductor process is required to control the operating temperature and humidity required by equipment in order to control the precise working environment due to high defect rate when fine deformation occurs due to shrinkage and expansion due to changes in ambient temperature and humidity for fine processing. , And ultra-precision sensors are required. These equipment may have different temperature conditions depending on the characteristics of the industry (semiconductor, chemical process, pharmaceutical process, etc.). In particular, equipment used in semiconductor processing requires precision in the vicinity of 25 ° C +/- 0.2 ° C, and as a product having a measurement range (-10 ~ 60 ° C +/- 0.5 ° C) of the existing temperature sensor, It is not suitable for precise temperature control of the process.

In order to accurately maintain 25 ° C, which is a precisely required working environment in semiconductor processing, it is necessary to use an ultra-precise temperature sensor capable of detecting a change in temperature up to about 0.1 ° C, which has a small error range. It is necessary to have a more precise sensor in a specific temperature range required for various industrial fields such as microbial culture (suitable temperature 37 DEG C) and temperature control of environment.

The present invention has been made to solve the above-mentioned problems, and it is an object of the present invention to solve the above-mentioned problems, and it is an object of the present invention to provide a temperature- The error range can be detected up to 0.4 ℃. However, in the semiconductor process, precise temperature measurement is required at about 0.1 ℃ in the range of 25 ℃ and precise temperature measurement at 37 ℃ is required in the microbiological culture process. This is to provide a redundant temperature sensor sensing circuit for judging a minute temperature which can maximize accuracy by adding circuits capable of precise temperature sensing in a specific temperature range in parallel with a region where temperature measurement is required.

According to an aspect of the present invention, there is provided a redundancy circuit for determining a temperature by measuring a voltage value output from a temperature sensor, the redundancy circuit comprising: A first temperature sensor element for outputting a variable voltage value according to a change of the first temperature sensor element; A first amplifier for amplifying a variable voltage value in the first temperature sensor element; A first input unit for inputting a voltage value amplified by the first amplifying unit; A voltage output unit for outputting a preset voltage value corresponding to a specific voltage range when the voltage value output from the first input unit corresponds to a preset voltage range; A second temperature sensor connected to the voltage output unit and configured to output a voltage value varying according to a voltage value output from the voltage output unit and a resistance value according to temperature; A second amplifier for amplifying a variable voltage value in the second temperature sensor element; A second input unit for inputting a voltage value amplified by the second amplifying unit; And a temperature value conversion unit for converting a temperature value through a voltage value input from the second input unit.

The voltage output unit may receive a first voltage value corresponding to the first voltage range when the voltage value input from the first input unit corresponds to the first voltage range, And two voltage values corresponding to the second voltage range are input

As described above, according to the present invention, the conventional temperature sensor does not improve the error range of the temperature sensor element and the circuit by sensing a wide temperature range (-10 to 60 ° C. + -. 0.5 ° C) Precise temperature control in each field is not required in all bands but is required only in a specific temperature range. Therefore, the present invention provides a function of an ultra-precise temperature sensor using a circuit operating in a precise temperature sensing area required by industry, It is possible to provide a redundant temperature sensor sensing circuit for determining a micro temperature which can be utilized in various industrial fields such as chemical processes requiring temperature control, semiconductor processing, and pharmaceutical and microbial culture.

FIG. 1 is a circuit diagram showing a redundant temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention.
FIG. 2 is a circuit diagram of a first-order amplifying circuit for firstly amplifying a voltage value through a first temperature sensor element of a redundant temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention
FIG. 3 is a circuit diagram of a second-order amplification circuit for amplifying a voltage value through a second temperature sensor element of a redundant temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention.
FIG. 4 is a graph showing the resistance of a temperature sensor element according to temperature of a dual temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention,
5 is a graph showing output signals of a redundant temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings.

The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. To fully disclose the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout the specification.

Hereinafter, the present invention will be described with reference to the drawings for explaining a redundant temperature sensing circuit for determining a fine temperature according to embodiments of the present invention.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a redundancy circuit for determining a temperature by measuring a voltage value output from a temperature sensor.

FIG. 1 is a circuit diagram showing a redundant temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention. FIG. 2 is a circuit diagram of a redundant temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention. FIG. 3 is a circuit diagram of a primary amplification circuit for amplifying a voltage value through a secondary temperature sensor element of a redundant temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention, FIG. 4 is a diagram illustrating a resistance and voltage variation according to temperature of a temperature sensor element of a redundant temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention. FIG. FIG. 2 is a graph illustrating output signals of a dual temperature sensing circuit for determining a fine temperature according to an embodiment of the present invention. FIG.

1 to 5, a dual temperature sensing circuit for determining a fine temperature according to the present invention includes a first temperature sensor element 110, a first amplifier 120, a first input 130, a voltage output unit 210, a second temperature sensor element 220, a second amplification unit 230, a second input unit 240, and a temperature-converted output unit 310.

Here, the first temperature sensor element 110 and the first amplifier unit 120 are preferably included in the first amplification circuit, and the second temperature sensor element 220 and the second amplification unit are included in the second amplification circuit .

The first input unit 130, the second input unit, and the temperature-converted value output unit 310 may be included in a microprocessor unit (MPU).

The first temperature sensor element 110 is connected to the temperature-sensing object, and outputs a voltage value varying in accordance with the change of the resistance value according to the temperature.

The first amplifying unit 120 amplifies the variable voltage value in the first temperature sensor element 110.

The first input unit 130 receives the amplified voltage value from the first amplification unit 120.

The primary amplification circuit is a general temperature sensor. To detect a wide range of temperature changes, the voltage fluctuation width according to the temperature of the temperature sensor element (PT-1000) is divided into OPAMP-1 122 and OPAMP- (0.728-0.606 = 0.122mV) of the voltage V1 is amplified about 20 times, and the output -A signal is outputted as 0.07-2.4V as shown by the slope A in FIG. 5, and the analog input terminal A (-10 to 60 degrees) as shown in FIG. 5 in the MPU 300 and outputs the output signal of the MPU 300 as an output terminal A-out Temperature converted output 310) and outputs a current value (4 to 20 mA) according to the temperature value to the power supply terminal 340 through the current control circuit 330.

The voltage output unit 210 outputs a predetermined voltage value corresponding to a specific voltage range when the voltage value output from the first input unit 130 corresponds to a preset voltage range.

That is, the voltage output unit 210 preferably outputs a voltage suitable for the voltage value input from the first input unit 130 when the voltage value corresponds to a preset voltage or temperature range.

The suitable voltage is 0.60 V when the temperature is from -10 ° C to 0 ° C, 0.62V when the temperature is from 0 ° C to 10 ° C, 0.64V when the image is from 10 ° C to 20 ° C, 0.66V when the image is from 20 ° C to 30 ° C, It is 0.67 V when the image is from 40 degrees to 40 degrees, 0.69 V when the image is from 40 degrees to 50 degrees, 0.71 V when the image is from 50 degrees to 60 degrees, and 0.72 V when the image is from 60 degrees to 70 degrees.

It is also possible that the voltage output unit 210 sets a voltage output value according to the temperature range and the temperature range according to the user's setting.

Here, it is preferable that the preset voltage range is the first voltage range and the second voltage range.

The voltage output unit may be configured to input a first voltage value corresponding to the first voltage range when the voltage value output from the first input unit corresponds to the first voltage range, The second voltage value corresponding to the second voltage range is input.

The second temperature sensor element 220 is connected to the voltage output unit 210 and outputs a voltage value varying according to a voltage value output from the voltage output unit 210 and a resistance value according to temperature .

The second amplifying unit 230 amplifies the variable voltage value in the second temperature sensor element 220.

The second input unit 240 receives the amplified voltage value from the second amplifying unit 230.

The temperature value conversion output unit 310 recognizes the voltage value input from the first input unit 130 and the second input unit 240 in the MPU 300 and converts the voltage value into a temperature value.

Here, if the voltage value input from the first input unit 130 is determined to be a temperature range required for precise temperature measurement, the voltage value of V6 may be output through the voltage output unit 210 to vary the voltage value of V6 To perform precise temperature measurement through the second amplifier circuit.

That is, when the voltage value input from the first input unit 130 is within the first voltage range, the first voltage corresponding to the first voltage range is output. If the voltage value is within the second voltage range, It is preferable to output a voltage value corresponding to each voltage range by forming a voltage range for each temperature required for precise temperature measurement.

Here, the first voltage range is preferably a case where the temperature converted from the voltage value is 20 degrees to 30 degrees and the second voltage range is 40 degrees to 50 degrees.

3, the MPU analogue output terminal A-out (voltage output section 210) is connected to the MPU analogue output terminal A-out (voltage output section 210) when the temperature sensed by the primary amplifying circuit is 20 degrees, (0.661V), which is the voltage V7 applied to the PT-1000, is 0.66V, which is amplified by about 100 times in the OPAMP-4 (234) The output signal change (0.3 to 2.3 V) according to the temperature change at about 2.0 V is obtained.

That is, when the temperature sensed by the primary amplification circuit is 20 degrees to 30 degrees, the voltage output unit 210 preferably outputs a voltage value corresponding to 0.66 V

This is because the output change (1.2 ~ 1.7V) in the first amplification circuit of the existing circuit, which is 20 ~ 30 degrees, senses about 4 times the temperature change as about 0.5V, The second amplification circuit can detect up to 0.1 degree compared with about 0.4 degree provided by the second amplification circuit.

In order to improve the accuracy in another temperature range of 40 to 50 degrees, the output voltage of the A-out (voltage output unit 210) of the MPU is 0.69 V, which is the V7 voltage value of 40 degrees in FIG. 4, The output voltage of OPAMP-4 (234), which is about 100 times amplification circuit, is changed from 0.02 to 2.0 V in the range of output voltage of 40 to 50 degrees, 1.98V, it is possible to improve the accuracy by sensing the temperature change about 4 times as compared with about 0.5V of the output voltage range (1.8 ~ 2.3V) at 40 ~ 50 degrees in the conventional circuit.

That is, when the temperature sensed by the primary amplification circuit is 40 to 50 degrees, the voltage output unit 210 preferably outputs a voltage value corresponding to 0.69 V

It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the foregoing detailed description, and all changes or modifications derived from the meaning and scope of the claims and the equivalents thereof are included in the scope of the present invention Should be interpreted.

110: first temperature sensor element 120: first temperature sensor element
122: OPAMP-1 124: OPAMP-2
130: first input unit 210: voltage output unit
220: second temperature sensor element 230: second amplifier section
232: OPAMP-3 234: OPAMP-4
240: second input unit 300: MPU
310: temperature value conversion output unit 320: power supply circuit
330: current control circuit 340: power terminal

Claims (2)

A duplicating circuit for determining a temperature by measuring a voltage value output from a temperature sensor,
A first temperature sensor element connected to the temperature sensing object and outputting a voltage value varying according to a change in resistance value according to temperature;
A first amplifier for amplifying a variable voltage value in the first temperature sensor element;
A first input unit for inputting a voltage value amplified by the first amplifying unit;
A voltage output unit for outputting a preset voltage value corresponding to a specific voltage range when the voltage value output from the first input unit corresponds to a preset voltage range;
A second temperature sensor connected to the voltage output unit and configured to output a voltage value varying according to a voltage value output from the voltage output unit and a resistance value according to temperature;
A second amplifier for amplifying a variable voltage value in the second temperature sensor element;
A second input unit for inputting a voltage value amplified by the second amplifying unit; And
And a temperature-converted value output unit for converting a temperature value through a voltage value input from the second input unit. The voltage output unit according to claim 1,
A first voltage value corresponding to the first voltage range is input when the voltage value inputted from the first input unit corresponds to the first voltage range and a second voltage range corresponding to the second voltage range when the voltage value inputted from the first input unit corresponds to the first voltage range, 2 voltage value is input to the temperature detection circuit.
KR1020160025580A 2016-03-03 2016-03-03 Dual Thermistor Sensing Circuit for high Accuracy Temperature KR101889780B1 (en)

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KR101889780B1 KR101889780B1 (en) 2018-09-28

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JP5786571B2 (en) * 2011-09-07 2015-09-30 富士電機株式会社 Power semiconductor device temperature measurement device

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