KR20170081872A - Manufacturing Method for A Multi Layered Piezoelectric or electrostrictive Polymer Actuator using Roll-to-Roll process and The Actuator manufactured by the same method - Google Patents

Manufacturing Method for A Multi Layered Piezoelectric or electrostrictive Polymer Actuator using Roll-to-Roll process and The Actuator manufactured by the same method Download PDF

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KR20170081872A
KR20170081872A KR1020160000848A KR20160000848A KR20170081872A KR 20170081872 A KR20170081872 A KR 20170081872A KR 1020160000848 A KR1020160000848 A KR 1020160000848A KR 20160000848 A KR20160000848 A KR 20160000848A KR 20170081872 A KR20170081872 A KR 20170081872A
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piezoelectric
electrostrictive polymer
electrode
polymer film
electrostrictive
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KR101854513B1 (en
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최승태
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울산대학교 산학협력단
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Abstract

The present invention relates to a stacked piezoelectric or electrostrictive polymer actuator and a manufacturing method thereof and a manufacturing method of a stacked piezoelectric or electrostrictive polymer actuator according to an embodiment of the present invention uses a roll- And the layered piezoelectric or electrostrictive polymer actuator according to the embodiment of the present invention can improve the degree of alignment of the stacked electrodes, thereby providing a laminated piezoelectric or electrostrictive polymer actuator having easy connection between the electrodes.

Description

TECHNICAL FIELD [0001] The present invention relates to a method of manufacturing a laminated piezoelectric or electrostrictive polymer actuator using a roll-to-roll method, and a driver manufactured by the method. }

The present invention relates to a stacked piezoelectric or electrostrictive polymer actuator and a manufacturing method thereof. More particularly, the present invention relates to a stacked piezoelectric / electrostrictive piezoelectric actuator capable of stacking electrodes and a piezoelectric or electrostrictive polymer film using a roll-to- A method of manufacturing an electrostriction polymer actuator, and a driver manufactured by the method.

EAP (Electroactive Polymer) is a promising material that can attain strain tens of tens of times greater than the strain (maximum 0.2%) that can be obtained from conventional ferroelectric ceramics under electrical stimulation. In addition, as with many polymer materials, EAP can easily be manufactured in various forms and is attracting much attention as various sensors and actuators.

In particular, the lightweight and flexible nature of EAP increases the likelihood of future use as a detector and driver in flexible electronics.

It is also called artificial muscle because it can simulate a biological muscle with high fracture toughness, large strain, and high vibration damping characteristics. It is also called a biomimetic robot robot) have been studied in various fields.

EAP can be classified into electronic EAP and ionic EAP according to the driving method. Ionic EAP has a disadvantage in that it is deformed by the movement of ions due to the applied current, so that the driving voltage is low but the response speed is slow. In addition, ionic EAP mainly uses electrolytes, and it is not easy to increase the response speed due to the physical limitations on diffusion and migration speed of ions in the electrolyte. Since electrolyte sealing is required, reliability improvement should be preceded.

On the other hand, Electronic EAP has a disadvantage in that the driving speed is high, but the driving voltage is high, by using the force received by the electrons under an electric field. Typical electric EAP actuators include dielectric elastomer actuators and PVDF-based ferroelectric polymer actuators. To commercialize such electric EAP detectors and actuators, it is necessary to lower the operating voltage.

In particular, a relaxed ferroelectric polymer actuator using P (VDF-TrFE-CFE) or poly (vinylidene fluoride-trifluoroethylene-chlorotrifluoroethylene) ferroelectric polymer actuators cause strains of up to 5 to 7% under an electric field of 20 to 150 V / μm.

Therefore, even if the electrostrictive polymer material such as the piezoelectric polymer or the relaxed ferroelectric polymer has a thickness of only 10 m, the voltage required for driving reaches 200 to 1500V. Therefore, in order to lower the driving voltage of the piezoelectric or electrostrictive polymer material to a usable level, it is necessary to make the thickness of the polymer film as thin as possible, and to achieve a desired level of power, a laminated polymer actuator having multiple layers of piezoelectric or electrostrictive polymer films It should be developed. At this time, a positive electrode and a negative electrode must be stacked alternately between the polymer layers.

The PVDF-based ferroelectric polymer is produced mainly by high-temperature extrusion or solution casting. However, the PVDF-based ferroelectric polymer film with a thickness of 10 μm or less can not be produced by the high-temperature extrusion method.

In addition, the solution casting method mainly produces a PVDF-based ferroelectric polymer film on a glass substrate. According to Korean Patent Laid-Open Publication No. 10-2013-0101833 entitled " PVDF polymer film production method and method for manufacturing a laminate type polymer actuator using the same, A PVDF-based ferroelectric polymer film having a thickness of 1 μm can be manufactured.

However, the conventional technique has a problem that it is not suitable for mass production because a thin film is manufactured on a glass plate.

In addition, since the stacked piezoelectric or electrostrictive polymer actuators according to the prior art are manufactured by separate lamination processes, there is a problem that it is difficult to connect the electrodes because the electrodes are exposed with difficulty.

It is an object of the present invention to provide a method of manufacturing a piezoelectric or electrostrictive polymer actuator in which the manufacturing process and time are shortened.

Another object of the present invention is to provide a laminated piezoelectric or electrostrictive polymer actuator having easy connection between electrodes.

According to an aspect of the present invention, there is provided a method of manufacturing a laminated piezoelectric or electrostrictive polymer actuator, including: providing a support film and a piezoelectric or electrostrictive polymer film formed on the support film between first and second rolls; Forming an electrode on the piezoelectric or electrostrictive polymer film; and separating and laminating the electrode and the piezoelectric or electrostrictive polymer film by separating the electrode and the electrostrictive polymer film from the support film while rotating the third roll.

The providing step may include a coating step of applying a piezoelectric or electrostrictive polymer solution on the support film, a film forming step of volatilizing the solvent of the solution to form a piezoelectric or electrostrictive polymer film, and a step of forming the piezoelectric or electrostrictive polymer film And an annealing step of annealing to a temperature.

In addition, the piezoelectric or electrostrictive polymer film may include a PVDF (polyvinylidene fluoride) -based polymer.

The electrodes may be formed at predetermined intervals along the direction in which the piezoelectric or electrostrictive polymer film advances by the rotation of the first and second rolls.

Further, the interval can satisfy the condition of Equation (1).

[Equation 1]

Figure pat00001

Here, D_min = minimum interval, t = thickness of the piezoelectric or electrostrictive polymer film, and N = number of stacked piezoelectric or electrostrictive polymer actuators.

In addition, the electrode forming step may alternately extend a predetermined distance every 2? (R + tN) from the position where the formation of the electrode starts.

Here, R = radius of the third roll.

Also, in the electrode forming step, the electrodes may be formed with the same interval between the electrodes on the same laminated surface, and the electrode may be formed at intervals of 2? TN plus 2? (R + tN) apart.

The surface temperature of the third roll may be in the range of 50 캜 to the melting point of the piezoelectric or electrostrictive polymer film.

Also, the separating step may alternately stack the upper layer electrode and the lower layer electrode alternately arranged so that one region is overlapped and the other region is not overlapped.

Further, the method may further include a producing film providing step of providing the first and second piezoelectric or electrostrictive polymer films produced by the providing step and the electrode forming step, and a bonding step of bonding the first and second piezoelectric or electrostrictive polymer films can do.

In the bonding step, the electrode on the piezoelectric or electrostrictive polymer film and the electrode on the first piezoelectric or electrostrictive polymer film may be staggered so that one area is overlapped and the other area is not overlapped.

The separating step may further include cutting the piezoelectric or electrostrictive polymer film so that both ends of the electrode are exposed.

The cutting step may further include an etching step of removing a piezoelectric or electrostrictive polymer film at both end regions of the electrode using an etching process.

In the electrode forming step, the electrode 140 is formed by extending or shortening the electrode 140 by a predetermined length so that the laminated cross-sectional shape of the electrode 140 is a trapezoid, and the cutting step is performed by forming the electrode 140 having the trapezoidal cross- 140 to expose both ends of the piezoelectric or electrostrictive polymer film.

A stacked piezoelectric or electrostrictive polymer actuator according to an embodiment of the present invention includes at least two electrodes stacked, at least one piezoelectric or electrostrictive polymer film stacked between the electrodes, an active region in which an upper electrode and a lower electrode overlap each other, And an inactive region where the upper layer electrode and the lower layer electrode do not overlap with each other.

In addition, the inactive region may remove one region of the piezoelectric or electrostrictive polymer film.

Also, the cross section may be formed in a trapezoidal shape.

The method of manufacturing a laminated piezoelectric or electrostrictive polymer actuator according to an embodiment of the present invention can reduce the manufacturing process and time by using the roll-to-roll process.

In addition, the stacked piezoelectric or electrostrictive polymer actuator according to the embodiment of the present invention can improve the degree of alignment of stacked electrodes, thereby providing a laminated piezoelectric or electrostrictive polymer actuator having easy connection between electrodes.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a flowchart showing a method of manufacturing a laminated piezoelectric or electrostrictive polymer actuator according to an embodiment of the present invention; FIG.
FIG. 2A is a view showing a providing step according to an embodiment of the present invention, FIG. 2B is a view showing an electrode forming step, and FIG. 2C is a view showing a separating lamination step.
FIG. 3A is a cross-sectional view of a piezoelectric or electrostrictive polymer film and electrodes laminated on a third roll according to an embodiment of the present invention, and FIG. 3B is a plan view in which electrodes are spaced apart from each other on a piezoelectric or electrostrictive polymer film Fig.
FIG. 4A is a view showing a production film providing step, and FIG. 4B is a view showing a bonding step.
5A and 5B are cross-sectional views of a stacked piezoelectric or electrostrictive polymer actuator according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

FIG. 1 is a flowchart showing a method of manufacturing a laminated piezoelectric or electrostrictive polymer actuator 100 (see FIG. 3A) according to an embodiment of the present invention.

1, a method of manufacturing a stacked piezoelectric or electrostrictive polymer actuator 100 according to an embodiment of the present invention includes a support film 120 (see FIG. 2A) and a piezoelectric or electrostrictive polymer A providing step S100 of providing a film 130 (see FIG. 2A) between the first and second rolls 111 and 112 (see FIG. 2A) Separating the electrode 140 and the piezoelectric or electrostrictive polymer film 130 from the support film 120 by stacking and laminating the electrode 140 and the third roll 113 (see FIG. 2C) And a stacking step S300. A method of manufacturing a stacked piezoelectric or electrostrictive polymer actuator 100 according to an exemplary embodiment of the present invention includes a step of cutting a piezoelectric or electrostrictive polymer film 130 so as to expose both ends of an electrode 140 ).

A concrete description of each of the manufacturing steps (S100-S300) will be described with reference to FIGS. 2A to 2D.

First, a detailed description will be made of the providing step S100 with reference to FIG. 2A.

2A is a diagram illustrating a providing step S100 according to an embodiment of the present invention.

2A, in a providing step S100, a support film 120 is disposed between the first roll 111 and the second roll 112, and a piezoelectric or electrostrictive polymer thin film So that the piezoelectric or electrostrictive polymer film 130 can be formed.

In the providing step S100, a piezoelectric or electrostrictive polymer solution based on PVDF (polyvinylidene fluoride) is applied on the supporting film 120 to form a piezoelectric or electrostrictive polymer film 130 on the supporting film 120, The solvent of the piezoelectric or electrostrictive polymer solution is volatilized to obtain a piezoelectric or electrostrictive polymer film 130 in which only the piezoelectric or electrostrictive polymeric material remains on the support film 120. In this case, the solvent is volatilized, and the residual solvent of the formed piezoelectric or electrostrictive polymer film 130 is removed and maintained at a predetermined temperature to improve the crystallinity of the piezoelectric or electrostrictive polymer film 130, followed by annealing annealing process can be performed. Accordingly, the providing step S100 may include a coating step of applying a piezoelectric or electrostrictive polymer solution on the supporting film 120, a film forming step of volatilizing the solvent of the solution to form a piezoelectric or electrostrictive polymer film 130, Or an annealing step of annealing the electrostrictive polymer film 130 to a predetermined temperature.

At this time, since the support film 120 moves while the first roll 111 and the second roll 112 rotate, the application step and the film formation step can be continuously performed.

Next, the electrode forming step S200 will be described in detail with reference to FIG. 2B.

FIG. 2B is a view illustrating an electrode forming step (S200) according to an embodiment of the present invention.

2B, in the electrode forming step S200, the electrode 140 is rotated along the direction in which the piezoelectric or electrostrictive polymer film 130 advances by the rotation of the first and second rolls 111 and 112 And can be formed at a predetermined spacing. The electrode 140 may be formed of any one of conductive polymer electrodes such as poly (3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT: PSS), silver nanowires, and metal electrodes.

The electrode 140 may be laminated together with the piezoelectric or electrostrictive polymer film 130, and the upper layer electrode and the lower layer electrode may be spaced such that at least some regions overlap. The specific intervals at which the electrodes 140 are formed will be described later with reference to FIGS. 3A and 3B.

Next, with reference to FIG. 2C, a detailed description will be given of the separation and lamination step S300.

2C is a view showing a separation lamination step S300 according to an embodiment of the present invention.

As shown in FIG. 2C, the third roll 113 rotates to separate the electrode 140 and the piezoelectric or electrostrictive polymer film 130 from the supporting film 120 in the separating lamination step S300. At this time, the electrode 140 and the piezoelectric or electrostrictive polymer film 130 may be laminated while being wound on the third roll 113.

The third roll 113 can be separated from the support film 120 by laminating the piezoelectric or electrostrictive polymer film 130 without an adhesive by maintaining a constant temperature. The temperature of the third roll 113 for laminating the piezoelectric or electrostrictive polymer film 130 may be in the range of 50 캜 to the melting point of the piezoelectric or electrostrictive polymer film 130, 130), and has a value close to the melting point.

The separating lamination step S300 according to the embodiment of the present invention applied to the PVDF-based relaxed ferroelectric film may be performed by maintaining the temperature of the third roll 113 at about 115 캜, It was confirmed that the electrostrictive polymer film 130 could be efficiently stacked.

In the separate lamination step S300 according to the embodiment of the present invention, the upper electrode 140 and the lower electrode 140 alternately stacked so that one region is overlapped and the other region is not overlapped. The electrode 140 formed at a predetermined interval in the electrode forming step S200 is laminated while the piezoelectric or electrostrictive polymer film 130 is wound along the circumferential surface of the third roll 113. The gap between the electrodes 140 The electrode 140 may be staggered such that one region overlaps the upper layer and the lower layer due to the diameter of the third roll 113 and the other regions do not overlap.

A specific process of stacking the electrodes 140 will be described with reference to FIGS. 3A and 3B, which are enlarged views of the region (A) of FIG. 2C.

3A is a sectional view of a piezoelectric or electrostrictive polymer film 130 and an electrode 140 laminated on a third roll 113 according to an embodiment of the present invention and FIG. And a plan view of the polymer film 130 spaced apart from each other by a predetermined distance.

More than one electrode 140 and at least one piezoelectric or electrostrictive polymer film 130 may be stacked along the circumferential surface of the third roll 113 as shown in FIG. The upper electrode 140 and the lower electrode 140 may overlap one region to form an active region B and other regions may not overlap to form an inactive region C . In addition, the electrodes 140 formed on the same lamination surface are spaced apart by a distance (D), so that a plurality of stacked piezoelectric or electrostrictive polymer actuators 100 can be formed along the circumferential surface of the third roll 113.

Since the piezoelectric or electrostrictive polymer film 130 is provided between the upper electrode 140 and the lower electrode 140 in the active region B, when the electric field is applied by the electrode 140, have. The inactive region C may be disposed with only the same electrode so that the upper electrode 140 and the lower electrode 140 are separated from each other and electrically connected to an external power source.

The length of the inactive region C is intended to prevent damage to the active region B due to a process error while exposing the electrode 140 through the cutting step S400. .

As the distance D between the electrodes 140 on the same laminate surface becomes smaller, more laminated piezoelectric or electrostrictive polymer actuator 100 can be manufactured on the circumferential surface of the defined third roll 113. However, since the electrode 140 and the piezoelectric or electrostrictive polymer film 130 are laminated along the circumferential surface of the third roll 113, the perimeter of the laminated layer becomes longer as the number of laminated layers N increases, The electrode 140 moves laterally and is stacked. The electrodes 140 stacked on the upper part of the stacked piezoelectric or electrostrictive polymer actuator 100 may be overlapped with the electrodes 140 of the adjacent stacked piezoelectric or electrostrictive polymer actuator 100. FIG.

Therefore, in order to prevent overlapping with the electrode 140 of the adjacent stacked piezoelectric or electrostrictive polymer actuator 100, the gap D between the electrodes 140 on the same stacked surface preferably satisfies the following equation (1).

Figure pat00002

From here,

D_min = minimum interval,

t = thickness of the piezoelectric or electrostrictive polymer film,

N = number of laminated piezoelectric or electrostrictive polymer actuators,

to be.

In order to form the inactive region C, the electrode 140 may be alternately extended or shortened by a predetermined distance C from a position where the electrode 140 starts to be formed at a distance of 2? (R + tN).

Here, R is the radius of the third roll 113.

The lower layer electrode 140 and the upper layer electrode 140 are staggered by a predetermined distance C so that the inactive region C is formed and the upper layer electrode 140 is separated from the third roll 113 ) And the circumference of the magnetically layered piezoelectric or electrostrictive polymer film 130. Thus, the upper electrode 140 is stacked on the same circumference plane at every point 2? (R + tN) from the point where the electrode 140 starts to be formed.

In the electrode formation step S200, the lower electrode 140 and the upper electrode 140 are overlapped with one another so that the predetermined intervals are alternately adjusted at every 2? (R + tN) (C) can be formed.

3B, the electrode 140 at a position 2? R from the point where the formation of the electrode 140 is started may be formed at a point extended by a predetermined distance C to form the inactive region C . Then, the electrode 140 at a position separated by 2? (R + t) may be formed at a predetermined position. The electrodes 140 are alternately extended by a predetermined distance C every 2? (R + tN) apart from each other, so that the upper electrode 140 and the lower electrode 140 overlap each other. So that it can be staggered. FIG. 3B shows a process of extending by a predetermined distance C. Alternatively, the same effect can be obtained by alternately shortening by a predetermined distance C. FIG.

Also, in the electrode forming step S200 according to the embodiment of the present invention, the spacing D of the electrodes 140 on the same laminated surface is formed to be the same, and 2? TN is added at intervals of 2? (R + can do.

As the number of stacked layers N increases, the circumference increases and the position at which the electrode 140 is formed can be moved. Therefore, the spacing D of the electrodes 140 on the same layer can be increased by an increment of the circumference have. By stacking the interval D of the electrodes 140 on the same laminate surface by 2? TN every 2? (R + tN) apart, the lamination points of the upper electrode 140 are aligned on the same plane as the lower electrode 140 .

The electrodes 140 may be spaced apart from each other by a predetermined distance in a direction perpendicular to the direction in which the rolls 111 and 112 move. By forming the electrodes 140 in the vertical direction, there is an advantage that a plurality of drivers can be manufactured in one step.

In addition, the electrodes 140 of the same layer may be connected to the distribution electrode 141 at one side of the inactive region. In this way, the distribution electrodes 141 are formed in only one layer, so that a plurality of drivers can be connected in parallel, and the number of connections between the interlayer electrodes can be reduced by forming the distribution electrodes 141 on a plurality of stacked surfaces.

In this case, since the positive electrode and the negative electrode are alternately stacked between the lamination surfaces of the piezoelectric or electrostrictive polymer film 130, the electrode 140 is connected to the common electrode 142 on the upper or lower laminate surface have.

As described above, the manufacturing method of the laminated piezoelectric or electrostrictive polymer actuator 100 according to the embodiment of the present invention can perform the continuous manufacturing process by using the roll-to-roll method, and by performing a series of processes, It is possible to produce the electrostriction polymer actuator 100. The mass production of the stacked piezoelectric or electrostrictive polymer actuator 100 is possible in this way, which can significantly reduce the manufacturing cost.

A method of manufacturing a stacked piezoelectric or electrostrictive polymer actuator 100 according to an exemplary embodiment of the present invention includes first and second piezoelectric or electrostrictive polymer films 130 and 230 manufactured by a providing step S100 and an electrode forming step S200 And a bonding step of bonding the first and second piezoelectric or electrostrictive polymer films 130 and 230 to each other.

4A is a view showing a production film providing step according to an embodiment of the present invention.

4A, the manufacturing film providing step may include providing the second piezoelectric or electrostrictive polymer film 230 and the second electrode 240 manufactured by the providing step S100 and the electrode forming step S200 to the second And moving the support film 220 to the second movable support film 221. The second piezoelectric or electrostrictive polymer film 230 and the second electrode 240 are bonded to the first piezoelectric or electrostrictive polymer film 130 and the first electrode 140 on the opposite side Is preferably bonded to the second moving support film 221.

4B is a view illustrating a bonding step according to an embodiment of the present invention.

4B, the bonding step may include bonding the second electrode 240 and the second piezoelectric or electrostrictive polymer film 230 on the second moving support film 221 to the first electrode 230 on the first support film 120, (140) and the first piezoelectric or electrostrictive polymer film (130) to each other. In this case, the first electrode 140 and the second electrode 240 may be arranged in a staggered manner so that one region overlaps the planar region and the other region does not overlap. The active region B and the inactive region C can be formed by disposing the first electrode 140 and the second electrode 240 in a staggered arrangement.

5A and 5B are cross-sectional views of a stacked piezoelectric or electrostrictive polymer actuator 300 according to an embodiment of the present invention.

5A, a stacked piezoelectric or electrostrictive polymer actuator 300 according to an embodiment of the present invention includes at least two stacked electrodes 140, one or more piezoelectric or electrostrictive devices 140 stacked between the electrodes 140, An active region 301 in which the polymer film 130 and the upper electrode 140 are overlapped with the lower electrode 140 and an inactive region 302 where the upper electrode 140 and the lower electrode 140 are not overlapped, region.

In the stacked piezoelectric or electrostrictive polymer actuator 300 according to the embodiment of the present invention, one or more electrodes 140 exposed on one side and one or more electrodes 140 exposed on the other side may be alternately stacked . When a power of the first polarity is applied to the electrode 140 exposed on one side surface and a power of the second polarity is applied to the electrode 140 exposed on the other side, A voltage equal to the difference between the first polarity voltage and the second polarity voltage may be applied to the electrostrictive polymer film 130 to cause deformation.

That is, the laminated piezoelectric or electrostrictive polymer actuator 300 according to the embodiment of the present invention is formed by stacking a thin piezoelectric or electrostrictive polymer film 140 and forming the electrode 140 between the laminated surfaces thereof, The driving force can be ensured.

5B, the piezoelectric or electrostrictive polymer actuator 300 according to another embodiment of the present invention is formed by removing the piezoelectric or electrostrictive polymer film 140 formed in one region of the inactive region 302, Section.

In order to manufacture the polymer actuator 300 having a trapezoidal cross section, the electrode 140 may be extended or shortened by a predetermined length each time it is stacked. The electrodes 140 may be extended or shortened by a predetermined length to have a trapezoidal cross-section in which the electrodes 140 are laminated without a separate cutting process for the electrodes 140.

The piezoelectric or electrostrictive polymer film 130 of the inactive region 302 may be removed by further including an etching step of removing the piezoelectric or electrostrictive polymer film at both end regions of the electrode using an etching process in the cutting step S400.

In this case, in the cutting step S400, when the electrode 140 has a trapezoidal shape in cross section, the piezoelectric or electrostrictive polymer film 130 is etched so that both ends of the electrode 140 are exposed, It can also be removed.

In the stacked piezoelectric or electrostrictive polymer actuator 300 according to the present embodiment, the piezoelectric or electrostrictive polymer film 130 of the inactive region 302 is removed, thereby facilitating connection of the same electrodes.

In addition, since the electrode 140 has a longer length when the external power source is connected to the upper portion when the external power source is connected to the upper portion, the connection to the external power source can be facilitated.

The features, structures, effects and the like described in the foregoing embodiments are included in at least one embodiment of the present invention and are not necessarily limited to one embodiment. Further, the features, structures, effects, and the like illustrated in the embodiments may be combined or modified in other embodiments by those skilled in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the present invention. It can be seen that various modifications and applications are possible. For example, each component specifically shown in the embodiments may be modified and implemented. It is to be understood that the present invention may be embodied in many other specific forms without departing from the spirit or essential characteristics thereof.

100, 300: stacked piezoelectric or electrostrictive polymer actuator
111, 112, 113: first, second and third rolls
120: Support film
130: Piezoelectric or electrostrictive polymer film
140: electrode

Claims (17)

Providing a support film and a piezoelectric or electrostrictive polymer film formed on the support film between the first and second rolls;
An electrode forming step of forming an electrode on the piezoelectric or electrostrictive polymer film; And
And separating and laminating the electrode and the piezoelectric or electrostrictive polymer film separated from the supporting film while rotating the third roll.
The method according to claim 1,
Wherein the providing step comprises:
Applying a piezoelectric or electrostrictive polymer solution on the support film;
A film forming step of volatilizing the solvent of the solution to form a piezoelectric or electrostrictive polymer film; And
And an annealing step of annealing the piezoelectric or electrostrictive polymer film to a predetermined temperature. The method for manufacturing a piezoelectric / electrostrictive polymer actuator according to claim 1,
The method according to claim 1,
Wherein the piezoelectric or electrostrictive polymer film comprises a PVDF (polyvinylidene fluoride) -based polymer.
The method according to claim 1,
Wherein the electrodes are formed at predetermined intervals along the direction in which the piezoelectric or electrostrictive polymer film advances by rotation of the first and second rolls.
5. The method of claim 4,
Wherein the gap satisfies the condition of Equation (1). ≪ EMI ID = 1.0 >
[Equation 1]
Figure pat00003

From here,
D_min = minimum gap between electrodes,
t = thickness of the piezoelectric or electrostrictive polymer film,
N = number of laminated piezoelectric or electrostrictive polymer actuators.
The method according to claim 1,
The electrode forming step may include:
(R + tN) from a position at which the formation of the electrode is started alternately by a predetermined distance.
From here,
R = radius of the third roll,
t = thickness of the piezoelectric or electrostrictive polymer film,
N = number of laminated piezoelectric or electrostrictive polymer actuators.
The method according to claim 1,
The electrode forming step may include:
Wherein the electrodes are formed at equal intervals by adding 2? TN for every 2? (R + tN) spaced apart from each other on the same laminated surface.
From here,
R = radius of the third roll,
t = thickness of the piezoelectric or electrostrictive polymer film,
N = number of laminated piezoelectric or electrostrictive polymer actuators.
The method according to claim 1,
Wherein the surface temperature of the third roll is within a range of 50 占 폚 to the melting point of the piezoelectric or electrostrictive polymer film.
The method according to claim 1,
Wherein the separating and laminating step comprises:
A method of fabricating a stacked piezoelectric or electrostrictive polymer actuator in which an upper electrode and a lower electrode are alternately stacked so that one region overlaps and the other region does not overlap.
The method according to claim 1,
Providing a first and a second piezoelectric or electrostrictive polymer film produced by the providing step and the electrode forming step; And
And a bonding step of bonding the first and second piezoelectric or electrostrictive polymer films to each other.
11. The method of claim 10,
In the joining step,
Wherein the electrodes on the piezoelectric or electrostrictive polymer film and the electrodes on the first piezoelectric or electrostrictive polymer film are overlapped in one area so that other areas do not overlap with each other.
The method according to claim 1,
And cutting the laminated piezoelectric or electrostrictive polymer film so that both ends of the electrode are exposed.
13. The method of claim 12,
Wherein the cutting step further comprises an etching step of removing a piezoelectric or electrostrictive polymer film at both end regions of the electrode using an etching process.
13. The method of claim 12,
The electrode 140 may be formed by extending or shortening the electrode 140 by a predetermined length so that the electrode 140 has a trapezoidal cross-sectional shape,
Wherein the cutting step includes an etching step of removing the piezoelectric or electrostrictive polymer film such that both ends of the electrode (140) having a trapezoidal cross section are exposed.
Two or more stacked electrodes;
At least one piezoelectric or electrostrictive polymeric film laminated between the electrodes;
An active region in which the upper layer electrode and the lower layer electrode overlap; And
And an inactive region in which the upper layer electrode and the lower layer electrode are not overlapped with each other.
16. The method of claim 15,
The inactive region is a laminated piezoelectric or electrostrictive polymer actuator in which one region of the piezoelectric or electrostrictive polymer film is removed.
16. The method of claim 15,
A laminated piezoelectric or electrostrictive polymer actuator having a cross-section in the shape of a trapezoid.
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WO2019108933A1 (en) * 2017-11-30 2019-06-06 Jabil Inc. Apparatus, system and method for manufacturing piezoelectronics
CN111542936A (en) * 2017-11-30 2020-08-14 捷普有限公司 Apparatus, system, and method for manufacturing piezoelectric body
CN111542936B (en) * 2017-11-30 2023-08-25 捷普有限公司 Apparatus, system and method for manufacturing piezoelectric body

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