KR20170075910A - A hybrid touch sensor and a method for manufacturing the same - Google Patents

A hybrid touch sensor and a method for manufacturing the same Download PDF

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Publication number
KR20170075910A
KR20170075910A KR1020150185392A KR20150185392A KR20170075910A KR 20170075910 A KR20170075910 A KR 20170075910A KR 1020150185392 A KR1020150185392 A KR 1020150185392A KR 20150185392 A KR20150185392 A KR 20150185392A KR 20170075910 A KR20170075910 A KR 20170075910A
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KR
South Korea
Prior art keywords
electrode
touch sensor
ito
sensing electrode
driving electrode
Prior art date
Application number
KR1020150185392A
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Korean (ko)
Inventor
이재열
이민재
Original Assignee
희성전자 주식회사
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Priority to KR1020150185392A priority Critical patent/KR20170075910A/en
Publication of KR20170075910A publication Critical patent/KR20170075910A/en

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112—Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material

Abstract

A hybrid touch sensor and a manufacturing method thereof are provided. One embodiment of the touch sensor according to the present invention includes a sensing electrode and a driving electrode disposed at upper and lower sides, the sensing electrode is made of silver nano wire (AgNw), and the driving electrode is made of ITO (Indium Tin Oxide). According to the present invention, it is possible to provide a touch sensor which can be advantageously applied to a medium-sized or larger-sized area.

Description

TECHNICAL FIELD [0001] The present invention relates to a hybrid touch sensor and a method of manufacturing the hybrid touch sensor.

The present invention relates to a touch sensor of a touch screen panel, and more particularly, to a driving electrode and a sensing electrode formed on a touch sensor.

2. Description of the Related Art Generally, a touch screen panel is an input device that recognizes a touch position when a user touches a screen of the screen with a finger or the like and transmits the recognized touch position to the system. Touch screen panels are classified into resistive type, capacitive type, SAW (Surface Acoustic Wave), infrared (IR), and optical type depending on the touch sensing method. A capacitance method is used.

In the capacitance type, a driving electrode (Tx electrode) and a sensing electrode (Rx electrode) are patterned on an ITO layer of an ITO film in which an ITO (Indium Tin Oxide) layer is coated on a transparent base substrate (PET or other transparent film or glass) And a touch position is calculated by detecting a change in the minute capacitance caused when a finger touches the surface of the touch screen.

A touch electrode is formed on the ITO film in a capacitive touch screen panel, in which a driving electrode pattern and a sensing electrode pattern for recognizing the touch of a finger are formed. The driving electrode pattern and the sensing electrode pattern are disposed in a view area that will be a central portion of the touch screen panel in the ITO film. The electrode pattern composed of the driving electrode and the sensing electrode is generally in the form of rhombus, but may be manufactured in various other shapes.

A wiring electrode is further formed in the touch sensor. The wiring electrodes are arranged in a bezel area which will be the edge of the touch screen panel in the ITO film. The wiring electrode is made of metal to have high electrical conductivity and is opaque. The wiring electrode is electrically connected to the driving electrode and the sensing electrode to transmit the contact signal of the electrode.

GF2 method, GFF method, and the like can be used as the touch sensor by patterning the driving electrode and the sensing electrode on the ITO film. In the GF2 method, a driving electrode and a sensing electrode are patterned on both sides of a single-sided ITO film. In the GFF method, a driving electrode and a sensing electrode are separately patterned on two single-sided ITO films, and are bonded together with an OCA (Optical Clear Adhesive) .

The ITO film (s) produced in this manner are attached to a top plate made of tempered glass or PMMA window. The capacitive type touch screen panel attaches a control IC to the ITO film (s) attached to the top plate so that when the user's hand touches the ITO film (s), a change in the minute charge amount is detected and operated.

1 is a process diagram of a conventional method for manufacturing a touch sensor. Referring to FIG. 1, a conventional method for manufacturing a touch sensor is performed simultaneously on both sides of a double-sided ITO film on which an ITO layer 120 is coated on both sides of a transparent base substrate 110.

A conventional method of manufacturing a touch sensor includes a step of annealing an ITO layer 120 of a double-sided ITO film (step a), a step of depositing a metal on the ITO layer 120 by sputtering or the like to form a metal layer 140, The first DFR 150 is exposed and developed so as to form a pattern on the first DFR 150, and then the first DFR 150 is patterned. (D) etching the ITO layer 120 according to the pattern of the first DFR 150, etching the metal layer 140 according to the pattern of the first DFR 150, (Step e), laminating the second DFR 160 on both sides of the double-sided ITO film (step f), exposing the second DFR 160 (step g), removing the second DFR 160 To form a pattern on the second DFR 160. The metal layer 140 is etched according to the pattern of the second DFR 160 and then the second DFR 160 is stripped to form the touch sensor 100 (Step h), the AOI (Au (step i) of performing tomatic optical inspection.

A transparent sensing electrode 170-1 made of ITO and a wiring electrode 180-1 made of metal are formed on the touch sensor 100. A transparent driving electrode 170 made of ITO is formed under the touch sensor 100 -2 and a wiring electrode 180-2 made of a metal are formed. The upper sensing electrode 170-1 and the lower driving electrode 170-2 cross each other.

In the conventional touch sensor 100, since the sensing electrode 170-1 and the driving electrode 170-2 are made of ITO, the sensitivity of the sensing electrode 170-1 is lowered due to the resistance of the ITO itself, and thus the touch sensor 100 can not be applied to a large area.

Therefore, in the conventional large-sized touch module, a sensing electrode and a driving electrode are formed by a metal mesh or a silver nano wire (AgNw).

However, when the sensing electrode and the driving electrode are formed of a metal mesh, a regular arrangement of the electrodes is overlapped and a Moire phenomenon appears on the screen depending on the viewing angle, resulting in a deterioration in image quality. In addition, when the sensing electrode and the driving electrode are formed of silver nano wires (AgNw), the light transmittance of the touch sensor is lowered.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a touch sensor capable of avoiding moire phenomenon and a decrease in light transmittance while reducing the resistance of an electrode, and a manufacturing method thereof.

According to an aspect of the present invention, there is provided a touch sensor including a sensing electrode and a driving electrode arranged in a vertical direction, the sensing electrode being made of silver nano wire (AgNw) Indium Tin Oxide).

Preferably, the sensing electrode is patterned on one side of the transparent base substrate, and the driving electrode is patterned on the other side of the transparent base substrate. Alternatively, the sensing electrode may be patterned on one side of the first transparent base substrate and the driving electrode may be patterned on one side of the second transparent base substrate.

As in the case of the former case, the sensing electrode and the driving electrode are patterned on both sides of one transparent base substrate, and the sensing electrode and the driving electrode are separately patterned on the two transparent base substrates as in the latter case Corresponds to the GFF scheme.

A method of manufacturing a touch sensor according to an embodiment of the present invention includes laminating a silver nano wire (AgNw) layer on the other surface of a transparent base substrate having an ITO (Indium Tin Oxide) layer laminated on one surface thereof, Patterning the electrode and patterning the driving electrode in the ITO layer. According to this method, a GF2 type touch sensor is manufactured.

In another embodiment of the method of manufacturing a touch sensor according to the present invention, a sensing electrode is patterned on the silver nano wire (AgNw) layer of a first film in which a silver wire layer is laminated on one surface of a first transparent base substrate, Patterning a driving electrode on the ITO layer of a second film on which an ITO (Indium Tin Oxide) layer is laminated on one surface of the ITO layer, and laminating the first film and the second film. According to this method, a touch sensor of the GFF type is manufactured.

According to the present invention, since the driving electrode made of ITO and the sensing electrode made of silver nano wire are used in parallel in the touch sensor, the resistance of the electrode is reduced compared to the touch sensor in which both the driving electrode and the sensing electrode are made of ITO, The Moire phenomenon is avoided as compared with the touch sensor in which both the driving electrode and the sensing electrode are formed of the metal mesh and the light transmittance is increased as compared with the touch sensor in which the driving electrode and the sensing electrode are both formed of silver nano wires. Accordingly, it is possible to provide a touch sensor that can be advantageously applied to a medium-sized or larger-sized area.

Since the sensing electrode which is one of the electrodes of the touch sensor is formed of silver nano wire and the resistance of the silver nano wire is small, the electrode resistance of the touch sensor is reduced to increase the sensing sensitivity and the driving electrode, Since the ITO is formed of ITO having a relatively wide line width and the ITO has a relatively high resistance, the electrical noise from the display can be blocked by the driving electrode.

In addition, since the silver nano wire layer is laminated at the time of manufacturing the touch sensor according to the present invention, existing processes in which the driving electrode and the sensing electrode are both formed of ITO can be applied, so that it is possible to manufacture using the existing infrastructure.

1 is a process diagram of a conventional method for manufacturing a touch sensor.
2 is a vertical sectional view of an embodiment of a touch sensor according to the present invention.
3 is a flowchart of an embodiment of a method of manufacturing a touch sensor according to the present invention.
4 is a process diagram of the touch sensor manufacturing method of Fig.
5 is a flowchart of another embodiment of a method of manufacturing a touch sensor according to the present invention.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to be illustrative of the present invention and not to limit the scope of the invention. Should be interpreted to include modifications or variations that do not depart from the spirit of the invention.

Although the terms used in the present invention have been selected in consideration of the functions of the present invention, they are generally used in general terms. However, the present invention is not limited to the intention of the person skilled in the art to which the present invention belongs . However, if a specific term is defined as an arbitrary meaning, the meaning of the term will be described separately. Accordingly, the terms used herein should be interpreted based on the actual meaning of the term rather than on the name of the term, and on the content throughout the description.

The drawings attached hereto are intended to illustrate the present invention easily, and the shapes shown in the drawings may be exaggerated and displayed as necessary in order to facilitate understanding of the present invention, and thus the present invention is not limited to the drawings.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a detailed description of known configurations or functions related to the present invention will be omitted when it is determined that the gist of the present invention may be obscured.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a vertical sectional view of an embodiment of a touch sensor according to the present invention. 2, the touch sensor 200 includes a transparent base substrate 210, a sensing electrode (Rx electrode) 270-1, a driving electrode (Tx electrode) 270-2, and wiring electrodes 280-1 , 280-2).

The transparent base substrate 210 is made of a transparent film such as PET or glass. The sensing electrode 270-1 is patterned on the upper surface of the transparent base substrate 210. The driving electrode 270-2 is patterned on the lower surface of the transparent base substrate 210. The upper sensing electrode 270-1 And the lower driving electrode 270-2 cross each other.

The upper sensing electrode 270-1 is opposed to the upper plate made of tempered glass or PMMA window and the lower driving electrode 270-2 is opposed to a display such as an LCD. The sensing electrode 270-1 and the driving electrode 270-2 are disposed in a view area that is a center portion of the touch screen panel in the transparent base substrate 210. [

The sensing electrode 270-1 is made of silver nano wire AgNw. Generally, a nanowire refers to a wire structure having a size in the nanometer scale. It is generally referred to as nanowires with diameters of less than 10 nm, nanowires of several hundreds of nm in diameter, and there is no particular limitation in the length direction. There are many types of nanowires that are metallic, semiconductor, and insulating. Silver nanowires are nanowires formed of silver (Ag).

When the sensing electrode is made of silver (Ag) itself, transparency of the sensing electrode is deteriorated. However, since the sensing electrode 270-1 is formed of silver nano wire in the touch sensor 200 according to the present invention, Can be secured.

Since the sensing electrode 270-1 is formed of silver nano wire and the resistance of the silver nano wire is smaller than the resistance of the ITO, the electrode resistance of the touch sensor 200 becomes smaller than that of the case where both the sensing electrode and the driving electrode are made of ITO . Accordingly, the sensing sensitivity of the touch sensor 200 is increased compared with the case where both the sensing electrode and the driving electrode are made of ITO.

The driving electrode 270-2 is made of ITO (Indium Tin Oxide). ITO is a mixture of indium oxide (In 2 O 3 ) and tin oxide (SnO 2 ), which is transparent and colorless in a thin layer state.

Since the driving electrode 270-2 which is opposed to the display such as the LCD is formed of ITO having a relatively wide line width as compared with the silver nano wire and ITO has a relatively high resistance as compared with the silver nano wire, Can be blocked by the driving electrode 270-2.

Since the touch sensor 200 uses the sensing electrode 270-1 made of silver nano wire and the driving electrode 270-2 made of ITO in parallel to each other, Compared with a touch sensor in which a driving electrode and a sensing electrode are both formed of a metal mesh while a moiré phenomenon is avoided and a sensing electrode is formed of a silver wire in both of them, The light transmittance increases. Accordingly, the touch sensor 200 can be advantageously applied to a large-sized or larger-sized area.

The wiring electrodes 280-1 and 280-2 are arranged in a bezel area to be the edge of the touch screen panel in the transparent base substrate 210. [ The wiring electrodes 280-1 and 280-2 are made of metal to have high electrical conductivity and are opaque.

The wiring electrodes 280-1 and 280-2 are electrically connected to the sensing electrodes 270-1 and 270-2 to transmit contact signals of the electrodes. The wiring electrode 280-1 connected to the sensing electrode 270-1 may be formed by printing silver (Ag), or may be formed by metal deposition and photolithography.

3 is a flowchart of an embodiment of a method of manufacturing a touch sensor according to the present invention. Referring to FIG. 3, a method of manufacturing a touch sensor includes a step S310 of laminating a silver nano wire layer on a single-sided ITO film. The single-sided ITO film is a film in which an ITO layer is coated on one side of a transparent base substrate. The transparent base substrate is made of a transparent film such as PET or glass.

In the touch sensor manufacturing apparatus, a silver wire layer is laminated on a surface of a single-sided ITO film on which the ITO layer is not coated. Such a lamination can be achieved by coating a liquid material in which silver nano wires are dispersed on a transparent base substrate by a method such as spin coating or slip coating.

Next, in the touch sensor manufacturing apparatus, the sensing electrode is patterned in the silver wire layer and the driving electrode is patterned in the ITO layer (S320). The sensing electrode and the driving electrode may be patterned by dry etching or wet etching.

4 is a process diagram of the touch sensor manufacturing method of Fig. Referring to FIG. 3, a touch sensor manufacturing apparatus includes a silver nano wire layer 230 laminated on a second surface of a transparent base substrate 210 having an ITO layer 220 coated on one surface thereof (step a).

The touch sensor manufacturing apparatus includes a metal layer 240 formed by depositing a metal on the ITO layer 220 and the silver wire layer 230 by sputtering or the like and then a first dry film resist (DFR) ) 250 is laminated (step b).

The touch sensor manufacturing apparatus exposes and develops the first DFR 250 to form a pattern on the first DFR 250 and then etches the metal layer 240 according to the pattern of the first DFR 250 ).

In the pattern of the first DFR 250, a portion where a wiring electrode is to be formed and a portion where a driving electrode or a sensing electrode is to be formed are covered in a transparent base substrate in which the metal layer 240 is laminated, and the remaining portion is exposed.

Then, the touch sensor manufacturing apparatus etches the ITO layer 220 and the silver wire layer 230 according to the pattern of the first DFR 250 (step d), and peels off the first DFR 250 (step e) . After the first DFR 250 is peeled off, a wiring electrode made of a metal is formed in the transparent base substrate 210, and driving electrodes and sensing electrodes are formed in the view region.

In order to make the incomplete driving electrode and the sensing electrode complete the driving electrode and the sensing electrode, it is necessary to remove the deposited metal on the ITO from the incomplete driving electrode and to remove the deposited metal on the silver electrode from the incomplete sensing electrode.

To this end, the touch sensor manufacturing apparatus includes a second DFR 260 laminated on both sides of a transparent base substrate on which wiring electrodes made of metal, incomplete driving electrodes and sensing electrodes are formed (step f), and a second DFR 260 (Step g), the second DFR 260 is developed to form a pattern on the second DFR 260 and the metal layer 240 is etched according to the pattern of the second DFR 260, and then the second DFR 260 Is peeled off to form the touch sensor 200 (step h).

In the pattern of the second DFR 260, a bezel region in which a wiring electrode is formed in a wiring base electrode made of metal, a transparent base substrate having an incomplete driving electrode and a sensing electrode is formed in a view The area is exposed.

A sensing electrode 270-1 formed of silver nano wire is formed in a view area above the touch sensor 200 and a wiring electrode 280-1 formed of metal is formed in a bezel area. A driving electrode 270-2 made of ITO is formed in the view region and a wiring electrode 280-2 made of metal is formed in the bezel region. The upper sensing electrode 170-1 and the lower driving electrode 170-2 cross each other.

Then, the touch sensor manufacturing apparatus performs Automatic Optical Inspection (AOI) on the formed touch sensor 200 (step i).

In the manufacturing process described above, conventional processes in which both the driving electrode and the sensing electrode are formed of ITO are applied after the silver nano wire layer is laminated. Accordingly, the touch sensor 200 according to the present invention can be manufactured using an existing infrastructure.

In the above description, the case where the touch sensor according to the present invention is the GF2 type has been described. However, the touch sensor according to the present invention may be a GFF type. Even when the touch sensor according to the present invention is of the GFF type, the sensing electrode is made of silver nano wire, the driving electrode is made of ITO, and the sensing electrode and the driving electrode are arranged vertically. However, the sensing electrode is patterned on one side of the first transparent base substrate, and the driving electrode is patterned on one side of the second transparent base substrate.

FIG. 5 is a flow chart of another embodiment of a method of manufacturing a touch sensor according to the present invention, showing a method of manufacturing a touch sensor of the GFF type. Referring to FIG. 5, the touch sensor manufacturing apparatus patterning sensing electrodes on the silver wire layer of the first film and patterning the driving electrodes on the ITO layer of the second film (S510).

The first film is a film in which a silver wire layer is laminated on one side of a first transparent base substrate and the second film is a cross-sectional ITO film in which ITO is laminated on one side of a second transparent base substrate.

The method of laminating the silver wire layer on the first transparent base substrate is as described above. Patterning of the sensing electrode and patterning of the driving electrode can be performed by applying the processes of FIG. 4 only to one side of the transparent base substrate.

The touch sensor manufacturing apparatus forms a GFF-type touch sensor by joining a second film having a driving electrode formed under the first film on which the sensing electrode is formed (S520). In the thus manufactured GFF type touch sensor, excellent effects exhibited by the above-mentioned GF2 type touch sensor are exhibited.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments of the present invention described above can be implemented separately or in combination.

Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

100: touch sensor 110: transparent base substrate
120: ITO layer 140: metal layer
150: first DFR 160: second DFR
170-1: sensing electrode 170-2: driving electrode
180-1: wiring electrode 180-2: wiring electrode
200: touch sensor 210: transparent base substrate
220: ITO layer 230: silver nano wire layer
240: metal layer 250: first DFR
260: second DFR 270-1: sensing electrode
270-2: driving electrode 280-1: wiring electrode
280-2: wiring electrode

Claims (5)

A touch sensor including a sensing electrode and a driving electrode arranged in an upper and lower direction,
Wherein the sensing electrode is made of silver nano wire (AgNw), and the driving electrode is made of indium tin oxide (ITO).
The method according to claim 1,
Wherein the sensing electrode is patterned on one side of the transparent base substrate and the driving electrode is patterned on the other side of the transparent base substrate.
The method according to claim 1,
Wherein the sensing electrode is patterned on one surface of the first transparent base substrate and the driving electrode is patterned on one surface of the second transparent base substrate.
Stacking a silver nano wire (AgNw) layer on the other surface of a transparent base substrate having an ITO (Indium Tin Oxide) layer stacked on one surface thereof; And
Patterning a sensing electrode on the silver nanowire layer and patterning a driving electrode on the ITO layer.
A sensing electrode is patterned on the silver nano wire (AgNw) layer of a first film on which a silver wire layer is laminated on one surface of a first transparent base substrate, and an ITO (Indium Tin Oxide) layer is formed on one surface of a second transparent base substrate 2 patterning a driving electrode on the ITO layer of the film; And
And bonding the first film and the second film to each other.
KR1020150185392A 2015-12-23 2015-12-23 A hybrid touch sensor and a method for manufacturing the same KR20170075910A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220114905A (en) * 2021-02-09 2022-08-17 유아이엘 주식회사 Strain gauge sensor and thereof manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220114905A (en) * 2021-02-09 2022-08-17 유아이엘 주식회사 Strain gauge sensor and thereof manufacturing method

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