KR20170071814A - MEMS Scanner Package - Google Patents

Abstract

A MEMS scanner package according to an embodiment of the present invention includes a MEMS scanner including a mirror for reflecting light, an inner magnet disposed opposite to a rear surface of the mirror, A black layer is formed on the surface of the inner magnet facing the MEMS scanner, including an outer magnet, so that the inner reflection in the package can be removed.

Description

[0001] MEMS SCANNER PACKAGE [0002]

The present invention relates to a MEMS scanner package. And more particularly, to a MEMS scanner package used in a scanning projector that projects an image.

In recent years, with the increase in the consumption of high-quality, large-capacity multimedia contents, it is required to increase the size and quality of the display screen.

Among the display devices, a projector is a device for projecting an image, and can be used for presentation of a conference room, a projector of a theater, a home theater of a home, and the like.

The scanning projector has a merit that a large screen can be implemented more easily than other display devices by implementing an image by scanning light on a screen using a scanner.

On the other hand, in a scanning projector, light passing through various optical components such as an optical system including a light source, a filter, a mirror or a lens, a scanner, a distortion correction lens, and the like is projected onto a screen.

At this time, if one optical component can not accurately reflect or transmit light in accordance with the designed specifications, the quality of the image may be degraded or displayed incorrectly.

Therefore, research has been conducted on techniques that can reduce or eliminate the effects of inaccurate operation of each optical component of a scanning projector, a technique for preventing unintended phenomenon, an incorrect or unintended operation, or a phenomenon.

SUMMARY OF THE INVENTION An object of the present invention is to provide a MEMS scanner package structure capable of eliminating the reflection of a mist in a scanner package.

SUMMARY OF THE INVENTION An object of the present invention is to provide a structure of a MEMS scanner package capable of preventing noise caused by driving of a scanner.

An object of the present invention is to provide a MEMS scanner package structure capable of reducing a noise while realizing a wide screen.

In order to achieve the above and other objects, a MEMS scanner package according to an aspect of the present invention may prevent an internal erroneous reflection in a package by forming a black layer on a surface of the inner magnet facing the MEMS scanner .

According to at least one of the embodiments of the present invention, high-quality images can be realized by eliminating the internal reflection in the MEMS scanner package.

In addition, there is an advantage that a MEMS scanner structure capable of realizing a wide screen and a high resolution screen can be provided.

 In addition, according to at least one of the embodiments of the present invention, it is possible to prevent noise caused by the driving of the scanner.

In addition, it is possible to provide a MEMS scanner structure capable of reducing a noise while realizing a wide screen and a high-resolution screen.

Meanwhile, various other effects will be directly or implicitly disclosed in the detailed description according to the embodiment of the present invention to be described later.

Fig. 1 is a diagram referred to in explanation of the screen non-penetration noise.
Fig. 2 is a view referred to the explanation on the internal reflection of the MEMS scanner package. Fig.
3 illustrates a conceptual diagram of a scanning projector.
Fig. 4 is a diagram referred to the description on driving the scanner of the scanning projector.
5 to 7 are views referred to the description of the MEMS scanner package according to the embodiment of the present invention.
FIGS. 8 through 10 are views referred to the description of the operation of the MEMS scanner package according to various embodiments of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it is needless to say that the present invention is not limited to these embodiments and can be modified into various forms.

In the drawings, the same reference numerals are used for the same or similar parts throughout the specification.

The suffix "module" and " part "for components used in the following description are given merely for convenience of description and do not give special significance or role in themselves. Accordingly, the terms "module" and "part" may be used interchangeably.

FIG. 1 is a diagram referred to the description of the screen non-penetrating noise, and FIG. 2 is a diagram referred to the explanation about the internal reflection of the MEMS scanner package.

1 illustrates a video screen 10 transmitted from a source device such as a PC and a screen implemented on the screen 20 by a scanning projector.

The scanning projector projects light onto a screen through various optical components such as an optical system including a light source, a filter, a mirror or a lens, a scanner, a distortion correction lens, and the like.

At this time, if one optical component can not accurately reflect or transmit light in accordance with the designed specifications, the quality of the image may be degraded or displayed incorrectly.

For example, a noise image may be generated in which the image to be implemented is displayed at a position other than the desired position on the screen.

Referring to FIG. 1, a screen 10 including an oval image 11 at a left end of a long screen in a horizontal direction in a source device may be transmitted to a display device.

The display device including the scanning projector can project the image on the screen 20 by driving the MEMS scanner based on the input data.

However, a non-intrusive noise image may be generated that is displayed at a position other than the desired position on the screen due to unintended reflection inside the scanning projector, especially the MEMS scanner package.

1, an image 21 to be originally displayed on the screen 20 is also displayed, and a non-intrusive noise image 29, which is generated when an image 21 to be originally displayed is imaged in an incomplete form, .

In the central portion of the screen, an internal non-image may be generated according to an image (image), and the degree of an internal non-image may become stronger as the brightness of the image (image) becomes brighter.

One of the causes of the non-intrusive noise image 29 may be unintended reflection inside the MEMS scanner package.

Referring to FIG. 2, the MEMS scanner package includes a mirror 211 that reflects light. The light output from the light source enters the mirror 211 via the optical system, is reflected, and is output to the outside of the projector.

At this time, since the mirror 211 moves according to the driving of the MEMS scanner, light can be reflected in a direction other than the intended direction of the mirror 211. Such incorrectly reflected light can be reflected from components such as the magnet 220 inside the package of the MEMS scanner and output to the outside of the projector.

Or the mirror 211 may be reflected by a component inside the photomask scanner package that is not incident on the mirror and output to the outside of the projector.

Light output to the outside of the projector is projected on a screen to realize an image, and unintended output light may cause non-contact noise.

3 illustrates a conceptual diagram of a scanning projector.

Referring to FIG. 3, the scanner 140 in the scanning projector sequentially and repeatedly performs the first direction scanning and the second direction scanning to output the inputted light to the outside projection area.

Meanwhile, the scanner 140 may be a scanner package including a magnetic body or the like for providing an electromagnetic force to the scanner 140.

3 illustrates that a projection image based on visible light (RGB) is output from a scanning projector to the projection area of the screen 102. [

3, the scanning projector may include a plurality of light sources 110r, 110g, and 110b, a light reflection unit 123, light wavelength separation units 124 and 125, and a scanner 140. FIG.

On the other hand, in the light sources 110r, 110g, and 110b, the collimation of light is important for an external object to project light. For this purpose, a laser diode can be used.

The light sources 110r, 110g and 110b include a blue laser diode 110b for outputting a single blue light, a green laser diode 110g for outputting a single green light, a red laser diode 110r for outputting a single red light, . ≪ / RTI >

3 illustrates that a blue laser diode 110b having a shorter wavelength is arranged farthest from the scanner 140 and a green laser diode 110g and a red laser diode 110r are sequentially disposed.

As shown in FIG. 3, the scanning projector may include three light sources 110r, 110g, and 110b, and it is possible to use various other light sources.

In addition, the arrangement order and position of the light source and the optical components can be implemented in various ways depending on the design.

For example, the light output from the predetermined light source 110b may be reflected by the light reflection unit 123, transmitted by the light wavelength separation unit 124, and incident on the scanner 140. [

The light output from the predetermined light source 110g may be reflected by the light wavelength separator 124 and transmitted through the light wavelength separator 125 to be incident on the scanner 140. [

The light output from the predetermined light source 110r may be reflected by the light wavelength separator 125 and may be incident on the scanner 140. [

The light-wavelength separators 124 and 125 are capable of being reflected or transmitted for each wavelength of light, and can be implemented, for example, as a dichroic mirror.

On the other hand, when the wavelength of any one of the light sources is shorter than the wavelength of the other light source, the light wavelength separators 124 and 125 can transmit light of a shorter wavelength and reflect light of a longer wavelength.

3, which is composed of the light reflection part 123 and the light wavelength separation parts 124 and 125, may be configured in various ways.

On the other hand, the scanner 140 receives the output light from the light sources 110r, 110g, and 110b, and sequentially performs the first direction scanning and the second direction scanning sequentially and repeatedly.

The scanner 140 receives the light synthesized by the optical system 120 and can project the light in the horizontal direction and the vertical direction. For example, the scanner 140 projects (horizontally scans) the light synthesized in the horizontal direction with respect to the first line, and vertically moves (vertically scans) to the second line below the first line. Thereafter, the synthesized light in the horizontal direction with respect to the second line can be projected (horizontally scanned). In this manner, the scanner 140 can project an image to be displayed on the entire area of the screen 102. [

As shown in the figure, the scanner 140 performs horizontal scanning from left to right, vertical scanning from top to bottom, scanning from the right to the left again, and vertical scanning from bottom to back Can be performed. Such a scanning operation can be repeatedly performed for the entire projection area.

Meanwhile, the scanner 140 may be a MEMS (micro electro mechanical system) scanner. The scanner 140 has a magnetic field formed by a magnet and a coil in a magnetic manner, and is horizontally / vertically driven according to resolution and system conditions, and can reflect light.

Fig. 4 is a diagram referred to the description on driving the scanner of the scanning projector.

In the case of a scanning projector using a MEMS scanner, there is a growing need to implement a wide screen and a high resolution screen such as 16: 9 and 24: 1.

On the other hand, in order to realize a wide screen and a high resolution screen, the horizontal driving angle of the MEMS scanner is increased, and the amount of mirror amplitude is increased.

As the mechanical angle of the MEMS scanner increases, the amplitude of the mirror of the MEMS scanner increases. As a result, the movement of the mirror increases and the light may not be reflected. .

In this case, if there is a scanner horizontal resonance frequency in the audible frequency range band (10 to 20 kHz) according to the resolution change, unpleasant noise such as high-frequency noise can be generated.

Referring to FIG. 4, the mirror 211 of the MEMS scanner is rotated at a larger angle to implement a wider screen than the conventional screen on the screen 202.

In this case, the distance between the mirror 211 and the magnetic body 220 for forming a magnetic field decreases during driving. In addition, the pressure between the mirror 211 and the magnetic body 220 increases.

In addition, when a sufficient distance can not be secured between the mirror 211 and the magnetic body 220, a situation may occur in which the mirror 211 is interfered with the magnetic body 220 during operation.

Meanwhile, as the screen resolution changes, the horizontal resonance frequency of the MEMS scanner is determined.

For example, the horizontal resonant frequency can be calculated according to the following equation.

F_horizontal = N / 2 * (active + blank) * F_vertical

F_horizontal = horizontal frequency (Hz)

N = vertical resolution

active = video active section

Blank = video off section

F_vertical = Vertical frequency (Hz)

For example, assuming that active = 1, blank = 0.1 and the vertical frequency (F_vertical) is 60 Hz, when the resolution is 1280 x 720p, the horizontal frequency becomes 25,920 Hz as follows.

F_horizontal = 720/2 * (1 + 0.1) * 60 = 25,920 Hz

On the other hand, a scanning projector can be used in various fields because it can simultaneously realize miniaturization and high-quality image realization. Accordingly, various resolutions and aspect ratios may be required. For example, in the case of a wide screen with a resolution of 3840x160, the horizontal frequency is 5,280 Hz as follows:

F_horizontal = 160/2 * (1 + 0.1) * 60 = 5,280 Hz

5,280 Hz is the audible frequency range that a person can perceive and the user will recognize the noise.

Therefore, in order to meet a wide range of customers' needs, it is necessary to reduce the false reflection of light and noise by mirror driving in order to realize a wide screen and a high resolution screen.

5 to 7 are views referred to the description of the MEMS scanner package according to the embodiment of the present invention.

5 and 6A, a MEMS scanner package according to an embodiment of the present invention includes a MEMS scanner including a mirror 511 for reflecting light, 510, an inner magnet 520 disposed to face the rear surface of the mirror 511, and an outer magnet 530 disposed outside the inner magnet 520 .

The inner magnet 520 and the outer magnet 530 can be positioned at a predetermined distance from the rear surface of the mirror 511 and can act to induce electromagnetic force.

In addition, the MEMS scanner 510 can be driven horizontally / vertically by an electromagnetic force.

A circuit board (not shown) such as a flexible printed circuit board (FPCB) or a printed circuit board (PCB) may be connected to the MEMS scanner 510.

Meanwhile, the mirror 511 can rotate in the first direction and the second direction.

That is, the mirror 511 is rotatable in two directions and can reflect light while rotating in two directions. Accordingly, the MEMS scanner 510 can scan in the vertical direction and the horizontal direction.

The present invention can be configured to have a black matte color in order to remove internal reflection inside the MEMS scanner package.

On the other hand, a black layer may be formed on the surface of the inner magnet 520 facing the MEMS scanner 510.

More preferably, a black layer may be formed on the surface of the external magnet 530 facing the MEMS scanner 510.

The black layer formed on the surfaces of the inner magnet 520 and the outer magnet 530 may be coated with a black material such as PTFE (polytetrafluoroethylene) or an epoxy material, Attached or colored in black.

7 shows a conventional MEMS scanner structure (a) and a MEMS scanner structure (b) according to an embodiment of the present invention.

7, the MEMS scanner includes mirrors 710a and 710b for reflecting light and first elastic members 711a and 712b for rotating the mirrors 710a and 710b in a first direction, for example, 752b, 751a, and 752b for rotating the mirrors 710a and 710b in the second direction, for example, the vertical direction, and the second elastic members 751a, 752b, 751a, and 752b for rotating the mirrors 710a and 710b Gimbals 761a, 762b, 761a, 762b for separating the direction and the horizontal rotation.

Meanwhile, the upper cases 740a and 740b may include apertures of a predetermined size for outputting light reflected from the mirrors 710a and 710b to the outside.

Unlike the inner magnets 720a and the outer magnets 730a of the conventional MEMS scanner, the inner magnet 720b and / or the outer magnet 730b of the MEMS scanner package according to the embodiment of the present invention has a front surface of black (black) matte color.

Thus, the internal reflection of the scanner scanner package can be eliminated.

The gimbals 761a, 762b, 761a, and 762b may include first gimbals 761a and 761b connected to the mirrors 710a and 710b through the first elastic bodies 711a, 712a, 711b, and 712b, And second gimbals 762a and 762b connected to the second elastic bodies 751a, 752b, 751a, and 752b.

On the other hand, according to the embodiment, the MEMS scanner includes a frame connected to the second elastic members 751a, 752b, 751a, and 752b and / or the second gimbals 732a and 732b, An electrode array (not shown) may be disposed.

Alternatively, a pair of electrode arrays on both sides of the mirror 710a and 710b may be disposed symmetrically with respect to each other.

Meanwhile, the electrode array may be electrically connected to an FPCB, a PCB, or the like.

Referring to FIGS. 5 and 6A, a groove 521 having a predetermined volume may be formed in the inner magnet 520 according to an embodiment of the present invention.

According to an embodiment, as shown in FIG. 6B, a hole 522 having a predetermined volume may be formed in the inner magnet 520.

The MEMS scanner package illustrated in FIGS. 6A and 6B has substantially the same structure except that grooves 521 and holes 522 are formed in the inner magnet 520, respectively.

That is, in the MEMS scanner package according to the embodiment of the present invention, a groove 521 or a hole 522 having a predetermined volume is formed in the shape of the inner magnet 520 for noise reduction .

The inner magnet 520 and the outer magnet 530 may be spaced from the back surface of the MEMS scanner 510 and the mirror 511 by a predetermined distance.

In addition, the height of the top surface of the inner magnet 520 and the height of the top surface of the outer magnet 530 may be substantially the same.

More preferably, the upper surface of the inner magnet 520 on which the grooves are not formed and the upper surface of the outer magnet 530 are substantially separated from the surface parallel to the back surface of the MEMS scanner 510 and the mirror 511 They can be spaced apart by the same distance.

The size of the groove 521 or the hole 522 may be larger than the size of the mirror 511.

As described with reference to FIG. 4, air-borne noise may occur due to the motion of the mirror 511 when the MEMS scanner 510 is driven.

The pressure (noise) generated in the air between the mirror 511 and the magnets 520 and 530 can be locally transmitted to the air inside the groove 521 or the hole 522 formed in the inner magnet 520. [

Here, the energy of the pressure transferred to the air inside the groove 521 or the hole 522 formed in the inner magnet 520 is consumed, so that the noise level can be reduced.

Further, the level of pressure (or noise) generated according to the shape of the groove or the hole can be minimized.

In addition, the grooves or holes can reduce the noise generated by the pressure difference between the high pressure area and the low pressure area generated by the driving of the mirror in the MEMS scanner package.

On the other hand, the shape of the groove 521 or the hole 522 may correspond to the shape of the mirror 511. For example, when the mirror 511 is circular, the groove 521 or the hole 522 may have a circular shape, and when the mirror 511 is rectangular, the shape of the groove 521 or the hole 522 It can also be a square.

5, a MEMS scanner package according to an embodiment of the present invention includes an upper case (not shown) which forms a storage space for storing the MEMS scanner 510, the inner magnet 520 and the outer magnet 530, (540) and a lower case (550).

The upper case 540 and the lower case 550 may serve to fix and support the MEMS scanner 510, the inner magnet 520, and the outer magnet 530.

In addition, the MEMS scanner package according to the embodiment of the present invention may further include a yoke 560. The yoke 560 may be a path of a magnetic flux formed when a current is applied.

The shape of the yoke 560 may correspond to the shape of the magnet and may be formed of a soft magnetic material.

Meanwhile, the MEMS scanner of the MEMS scanner package according to the embodiment of the present invention includes a gimbal which is provided around the mirror and supports the mirror through the first elastic body, and a supporting part that supports the gimbal through the second elastic body. As shown in FIG.

In this case, the mirror rotates about the first elastic body, and the gimbals can rotate about the second elastic body.

Meanwhile, according to an embodiment, the gimbals may include an inner first gimbals and an outer second gimbals.

FIGS. 8 through 10 are views referred to the description of the operation of the MEMS scanner package according to various embodiments of the present invention.

8, the MEMS scanner includes a mirror 810 for reflecting light, first elastic members 821 and 822 for rotating the mirror 810 in a first direction, for example, a horizontal direction, A second elastic body 841 and 842 for rotating the mirror 810 in a second direction such as a vertical direction and a gimbals 830 for separating the vertical direction and the horizontal rotation of the mirror 810 .

Meanwhile. The second elastic bodies 841 and 842 may be connected to and supported by the support portions 851 and 852, respectively.

The mirror 810 is rotated in the vertical direction and the horizontal direction through the first elastic members 821 and 822 and the second elastic members 841 and 842 so that the incident light is projected onto a screen, Respectively.

On the other hand, when a current is applied to the mirror, a magnetic field is generated by the magnetic body, and the MEMS scanner using the electromagnetic force can be driven in accordance with the Lorentz driving force generated by the magnetic field.

The mirror 810 may rotate in a first direction and a second direction, and the number of rotational frequencies in the first direction may be different from the number of rotational frequencies in the second direction.

9 illustrates an inner / outer magnet structure according to an embodiment of the present invention.

9, the MEMS scanner package according to an embodiment of the present invention may include an inner magnet 920 as a magnetic body and an outer magnet 930 disposed outside the inner magnet 920.

That is, the MEMS scanner package may include a columnar inner magnet 920 having a predetermined cross-sectional shape and an outer magnet 930 in the form of a tube surrounding the inner magnet 920.

A black layer may be formed on the surfaces of the inner magnet 920 and / or the outer magnet 930 according to an embodiment of the present invention to eliminate internal reflection.

In addition, the inner magnet 920 according to an embodiment of the present invention may have a groove 921 having a predetermined volume.

According to an embodiment, a hole having a predetermined volume may be formed in the inner magnet 920.

Meanwhile, the MEMS scanner package according to the embodiment of the present invention may further include a yoke 960. The yoke 960 may be a path of a magnetic flux formed when a current is applied. The shape of the yoke 960 may correspond to the shape of the magnet, and may be formed of a material such as iron.

As shown in FIG. 9, a magnetic field may be formed by the magnetic substance, that is, the inner magnet 920 and the outer magnet 930, and the MEMS scanner according to the embodiment of the present invention may interact with the magnetic field to rotate the gimbals And may include windings for flowing current.

Depending on the embodiment, the winding may be formed in the gimbal. The winding may be formed to draw a circle in the small intestinal section.

When a current is applied to the winding, a current flowing through the winding can generate an electromagnetic force acting on the winding through interaction with a magnetic field formed by the inner magnet 920 and the outer magnet 930.

Depending on the embodiment, a 2I current may be applied to the winding and may be diverted to I currents. Further, depending on the embodiment, the windings may include two or more windings.

On the other hand, when a current flows through the winding, the winding interacts with the magnetic field and acts on the Lorentz force in the vertical direction, whereby the torque T acts. The gimbals can perform the rotational motion by acting as the torque T by the generated electromagnetic force.

FIG. 10 illustrates an example of a MEMS scanner package according to an embodiment of the present invention.

10, a MEMS scanner package according to an embodiment of the present invention may include a MEMS scanner 1010 including a mirror 1011 that reflects light, an inner magnet 1020 and an outer magnet 1030 have.

A black layer may be formed on the surface of the inner magnet 1020 and / or the outer magnet 1030 according to an embodiment of the present invention to eliminate internal reflection.

In addition, the inner magnet 1020 according to an embodiment of the present invention may have a groove 1021 having a predetermined volume.

Alternatively, a hole having a predetermined volume may be formed in the inner magnet 1020.

Meanwhile, the MEMS scanner 1010 may be disposed adjacent to the inner magnet 1020 and the outer magnet 1030. The inner magnet 1020 and the outer magnet 1030 may be disposed at a predetermined distance from the rear surface of the MEMS scanner 1010.

More preferably, the upper surface of the inner magnet 1020 on which the grooves are not formed and the upper surface of the outer magnet 1030 are substantially perpendicular to the surface parallel to the back surface of the MEMS scanner 1010 and the mirror 1011 They can be spaced apart by the same distance.

In addition, the height of the top surface of the inner magnet 1020 and the height of the top surface of the outer magnet 1030 may be substantially the same.

The size and area of the groove 1021 or hole may be larger than the size and area of the mirror 1011.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limiting the scope of the invention as defined by the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention.

MEMS Scanner: 510
Mirror: 511
Inside magnet: 520
Outside Magnets: 530
Upper Case: 540
Lower case: 550

Claims (15)

A MEMS scanner including a mirror for reflecting light;
An inner magnet disposed to face the rear surface of the mirror; And
And an outer magnet disposed outside the inner magnet,
Wherein a black layer is formed on a surface of the inner magnet facing the MEMS scanner. The method according to claim 1,
Wherein the black layer is formed by coating a black material with PTFE (Polytetrafluoroethylene) or epoxy based material, or attaching a black film or colored with black. The method according to claim 1,
Wherein a black layer is formed on a surface of the external magnet facing the MEMS scanner. The method of claim 3,
Wherein the black layer is formed by coating a black material with PTFE (Polytetrafluoroethylene) or epoxy based material, or attaching a black film or colored with black. The method according to claim 1,
Wherein a groove or a hole is formed in the inner magnet. 6. The method of claim 5,
Wherein the upper surface height of the inner magnet and the upper surface height of the outer magnet are the same. 6. The method of claim 5,
And the size of the groove or hole is larger than the size of the mirror. The method according to claim 1,
And the shape of the groove or the hole corresponds to the shape of the mirror. The method according to claim 1,
Wherein the mirror is rotatable in a first direction and in a second direction. The method according to claim 1,
And an upper case and a lower case which form a storage space for storing the mirror, the inner magnet, and the outer magnet. The method according to claim 1,
The MEMS scanner further includes: a first elastic body; and a second elastic body,
Wherein the mirror rotates about the first elastic body, and the gimbals rotate about the second elastic body. 12. The method of claim 11,
And a gimbal disposed around the mirror and supporting the mirror through the first elastic body. 13. The method of claim 12,
Wherein the gimbal includes an inner first gimbal and an outer second gimbal. The method according to claim 1,
Wherein the upper surface height of the inner magnet and the upper surface height of the outer magnet are the same. The method according to claim 1,
Wherein the inner magnet and the outer magnet are disposed at a predetermined distance from the rear surface of the mirror.

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