KR20170038550A - Leakage test apparatus - Google Patents

Leakage test apparatus Download PDF

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Publication number
KR20170038550A
KR20170038550A KR1020150138072A KR20150138072A KR20170038550A KR 20170038550 A KR20170038550 A KR 20170038550A KR 1020150138072 A KR1020150138072 A KR 1020150138072A KR 20150138072 A KR20150138072 A KR 20150138072A KR 20170038550 A KR20170038550 A KR 20170038550A
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South Korea
Prior art keywords
loading plate
pressure
vacuum box
plate
vacuum
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KR1020150138072A
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Korean (ko)
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KR101823011B1 (en
Inventor
양락운
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양락운
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Priority to KR1020150138072A priority Critical patent/KR101823011B1/en
Publication of KR20170038550A publication Critical patent/KR20170038550A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
    • G01M3/34—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by testing the possibility of maintaining the vacuum in containers, e.g. in can-testing machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

Provided is a leakage test apparatus using low pressure close to a vacuum. The leakage test apparatus comprises: a vacuum box inside which a low pressure chamber is provided and which has a communicating hole on at least one side; a vacuum pump which reduces an internal pressure of the vacuum box to a set pressure by forcibly removing air inside the vacuum box; a loading plate provided in front of the side where the communication hole is formed, is able to slide in a horizontal direction along the side of the vacuum box where the communicating hole is formed, and includes an object insertion hole for allowing an object to be tested be placed inside; and a pressurizing member capable of sliding in the horizontal direction in front of the loading plate, pressurizing the loading plate toward the side of the vacuum box where the communicating hole is formed. According to the present invention, since the loading plate slides, the object is able to easily be placed in a test position; and is possible to test an airtightness of the object safely and effectively at low pressures by reducing the internal pressure of the vacuum box.

Description

[0001] Leakage test apparatus [

The present invention relates to an airtightness inspection apparatus using a low pressure close to a vacuum.

The inside of the chamber of the tube facility for generating the laser is in a state of high pressure due to the introduction of the gas and in order to smoothly generate the laser, leakage of the gas should be prevented so that the pressure inside the chamber is not destroyed.

On the other hand, in the tube installation, a mount equipped with a lens is mounted to amplify the laser generated in the chamber, and the laser is amplified while passing through the lens.

When a mount is mounted on a tube installation, if a leak occurs between the mounting portion of the tube installation and the mount or between the lens and the body of the mount, the pressure inside the chamber is destroyed, Can cause industrial accidents.

However, in order to inspect the leakage of the mount under the same pressurization condition before mounting the mount to the tube installation, a chamber is required which can form a high pressure, so that a large cost is incurred, and use of a high pressure gas is good for safety There is a problem.

On the other hand, if the mount is not checked for leakage before mounting the mount on the tube installation, if a poor quality mount is attached to the tube installation, if the leak is detected during operation, the installation must be stopped and the mount replaced.

Stopping the plant for replacement of the mount can result in reduced productivity and safety problems due to leakage of gas during operation of the plant.

SUMMARY OF THE INVENTION An object of the present invention is to provide an airtightness inspection apparatus capable of safely and effectively checking whether leakage of an inspection object requiring airtightness between constituent members occurs at a low pressure.

According to an aspect of the present invention, there is provided a vacuum inspecting apparatus comprising:

A vacuum box in which a low-pressure chamber is formed, and a communication hole is formed on at least one surface of the vacuum box; A vacuum pump for forcibly sucking air inside the vacuum box to lower the pressure inside the vacuum box to a set pressure; A loading plate provided in front of a surface of the vacuum box in which the communication hole is formed and slidable in a horizontal direction along a surface of the vacuum box in which the communication hole is formed, ; And a pressing member which is provided so as to be slidable in a horizontal direction in front of the loading plate and which presses the loading plate toward the surface of the vacuum box in which the communication hole is formed.

 And a cylinder unit connected to the pressure member and providing power for movement of the pressure member.

The back surface of the pressing member is formed to be inclined so as to form an angle smaller than 90 degrees with the front surface of the pressing member. The pressing member is formed to horizontally move in a direction parallel to the front surface of the pressing member, The surface of the vacuum box is formed parallel to the back surface of the pressing member.

In the state that the loading plate is moved to the inspection position for inspecting the airtight state of the inspection object, the center of the insertion port of the object and the center of the communication hole are on the same line.

The loading plate may include a plate body and a movement restricting portion protruding from the upper surface of the plate body to limit a sliding distance of the loading plate, and the movement restricting portion may protrude from one side edge of the plate body An insertion restricting portion for restricting the movement of the loading plate so that the loading plate stops at a correct inspection position and a withdrawing portion protruding from the other side edge of the plate body to limit a maximum distance at which the loading plate is spaced from the inspection position Quot;

The apparatus further includes a movement restricting member disposed between the insertion restricting portion and the withdrawal restricting portion, and the cylinder unit is seated on the upper surface of the movement restricting member.

Further, at the back surface of the pressing member, at least one depression for guiding outside air is provided.

The vacuum gauge further includes a vacuum gauge disposed at one side of the vacuum box for measuring a pressure of the low-pressure chamber.

The apparatus further includes an alarm member provided at one side of the vacuum box, for indicating at least one of the failure of the inspection object or the operation of the vacuum pump based on the pressure value measured by the vacuum gauge.

According to the airtightness testing apparatus of the present invention, the loading plate is provided with an object insertion port connected to the communication hole of the vacuum box at a predetermined position, and when the pressing member presses the loading plate in a state where the inspection object is inserted into the object insertion port The vacuum box is in a hermetically closed state, so that it can be brought into a low-pressure state in which the inside of the low-pressure chamber is intended to be driven by driving a vacuum pump communicating with the low-pressure chamber.

Therefore, the air suction force is generated inside the vacuum box due to the difference in pressure between the outside and the inside of the vacuum box, and it is possible to check whether or not the outside air flows into the low-pressure chamber through the communication holes and between the components of the inspection object. It is possible to carry out the inspection safely and easily under the inspection conditions of FIG.

Further, the loading plate is provided so as to be slidable, and the loading plate is slid so that the front and rear surfaces of the object insertion port can be exposed, so that the examination subject can be easily attached or inserted, and workability is improved.

Further, since the pressing member presses the loading plate, the vacuum box becomes in a hermetically closed state, so that the hermetically sealed state of the vacuum box can be easily released by releasing the pressing of the pressing member after the inspection is completed.

The pressing member is horizontally moved in a direction parallel to the front surface of the pressing member and the surface of the pressing member and the communication hole are formed. The planes are formed in parallel.

Therefore, the pressing member moves laterally and presses the loading plate. That is, in a state of being close to the front surface of the loading plate, the loading plate is slowly pressed while being moved along the front surface of the loading plate, thereby minimizing the occurrence of impact between the pressing member and the loading plate. It is possible to minimize the gap between the plate and the pressing member, thereby preventing the operator from being injured during the operation.

Also, since a vacuum gauge for measuring the atmospheric pressure inside the vacuum box is provided outside the vacuum box and the measured air pressure is displayed so as to be recognizable by the user, the user can easily check the inside air pressure in the low pressure chamber, It is possible to confirm the sealing state of the test object by checking the atmospheric pressure fluctuation.

In addition, an alarm member for informing the operation state of the airtightness inspection apparatus or the inspection result of the inspection object is provided outside the vacuum box, so that the user can easily grasp the operation state of the airtightness inspection apparatus and the inspection result of the inspection object.

1 is a perspective view showing a structure of an airtightness inspection apparatus according to an embodiment of the present invention before operation.
2 is an exploded perspective view showing a detailed configuration of the airtightness inspection apparatus according to the present invention;
3 is a longitudinal sectional view showing a cross-sectional structure cut along the line III-III in FIG.
4 is a perspective view showing a rear surface of a pressure plate;
5 is a perspective view of a loading plate longitudinal section incision along V-V in Fig.
FIG. 6 is a plan view of the initial state before operation of the airtightness testing apparatus of FIG. 1 viewed from above; FIG.
Fig. 7 is a partially enlarged view showing a structure in which A is enlarged in Fig. 6; Fig.
Fig. 8 is a cross-sectional incisional view cut along VIII-VIII of Fig. 1; Fig.
9 is a perspective view showing the structure of the airtightness inspection apparatus according to the present invention in a state ready for inspection.
10 is a plan view of the structure of the airtightness inspection apparatus of Fig.
11 is a partially enlarged view showing a structure in which B is enlarged in Fig.
Fig. 12 is a cross-sectional incisional view taken along the line XII-XII in Fig. 9; Fig.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings. However, it should be understood that the present invention is not limited to the embodiment shown in the drawings, and that other embodiments falling within the spirit and scope of the present invention may be easily devised by adding, .

Hereinafter, for the convenience of explanation and understanding, the two surfaces on which the inspection object 50 is mounted will be described as the front and back surfaces of the airtightness inspection apparatus. It is noted that the inspection object 50 may be located on the left and right sides of the airtightness testing apparatus.

FIG. 1 is a perspective view showing a structure of an airtightness inspection apparatus according to an embodiment of the present invention before operation, and FIG. 2 is an exploded perspective view showing a detailed configuration of a airtightness inspection apparatus according to the present invention.

Referring to FIGS. 1 and 2, the airtightness testing apparatus 10 includes a support plate 11 provided in a quadrangular plate shape to support the respective members, and a substantially hexahedron positioned centrally on the upper surface of the support plate 11 And may include a vacuum box 200 having a box shape.

The external shape of the vacuum box 200 includes a box top surface 210 and a box bottom surface 260 (see FIG. 8) and a box front surface 220 forming a circumferential surface, a box left surface 230, 8), and a box rear surface 250 (see FIG. 8).

A low pressure chamber 270 (see FIG. 3), which is maintained at a pressure lower than atmospheric pressure, is formed in the vacuum box 200, and communication holes 221 are formed on both surfaces facing each other. The outside air of the low-pressure chamber 270 can be introduced into the low-pressure chamber 270 through the communication hole 221, and the inspection object 50 is positioned in the communication hole 221.

The airtightness testing device 10 further includes a loading plate 14 for mounting an inspection object 50 to inspect the airtightness. In detail, the loading plate 14 is slidable in the lateral direction from the outside of the surface of the vacuum box 200 where the communication holes 221 are formed.

The airtightness inspection apparatus 10 further includes a pressing member 400 that presses the loading plate 14 toward the vacuum box 200. The pressing member 400 is disposed on the loading plate 14, As shown in FIG.

The airtightness inspection apparatus 10 includes a plate-shaped movement restricting plate 17 protruding in a direction in which the loading plate 14 is positioned, and the movement restricting plate 17 is provided on the upper surface 210 of the box And may be provided at an end portion in the direction in which the loading plate 14 is provided.

The airtightness inspection apparatus 10 includes a cylinder unit 300 that moves the pressing member 400 to closely contact the loading plate 14 with the outer circumferential surface of the vacuum box 200 in which the communication hole 221 is formed, . The cylinder unit 300 is provided on the upper surface of the movement restricting plate 17 to provide power for moving the pressing member 400.

The reason why the communication holes 221 are formed on two opposite surfaces of the side walls of the vacuum box 200 is to inspect the two inspection objects 50 at the same time. Accordingly, depending on the design conditions, the communication holes 221 may be formed on a single surface, or three or four surfaces, of the four surfaces constituting the side wall of the vacuum box 200.

In the present embodiment, the communication holes 221 are formed on the box front surface 220 and the box rear surface 250 of the vacuum box 200, respectively.

Accordingly, the loading plate 14 and the pressing member 400, the movement restricting plate 17, and the cylinder unit 300 (not shown) provided outside the surface of the vacuum box 200 where the communication hole 221 is formed And related configurations are provided to be symmetrical from the center of the box front surface 220 and the center of the box rear surface 250.

Hereinafter, for the sake of convenience of description, only the contents of the front surface of the vacuum box 200 among the symmetrical configurations will be described.

In detail, the loading plate 14 is slidably mounted in front of the box front surface 220 on which the communication holes 221 are formed.

A plate pressing member 400 is provided in front of the loading plate 14 to selectively press the loading plate 14 to bring the loading plate 14 into close contact with the box front surface 220 .

That is, the box surface 220 and the pressing member 400 are spaced apart from each other, and the loading plate 14 is disposed between the box front surface 220 and the pressing member 400, And is slidable in the room. The rear surface of the loading plate 14 is brought into close contact with the box front surface 220 as the pressing member 400 moves.

The loading plate 14 has a rectangular plate body 141 having a predetermined thickness and a loading plate 14 having a predetermined width and height protruding from the left end of the upper surface of the plate body 141 of the plate body 141 A limiting part 143 and an insertion restricting part 142 protruding from the right end of the upper surface of the plate body 141 with a predetermined width and height, 144 and a target body inserting port 145 formed at a position somewhat biased to the left or right of the substantially central portion or the central portion of the plate body 141.

In detail, a target object receiving portion 146 for receiving the inspection target object 50 may be formed at the rear end of the target object insertion port 145. The object receiving portion 146 has a predetermined width in the center direction from the inner edge of the object insertion port 145 and has an inner diameter smaller than an inner diameter of the object insertion port 145. Therefore, it is possible to prevent the inspection object 50 from falling back to the object insertion port 145.

More specifically, the plate body 141 is formed in the shape of a rectangular plate having a width larger than the height in the direction in which the loading plate 14 slides, that is, in the lateral direction, and is formed at a height corresponding to the box front surface 220 .

The grip 144 is formed at the edge of the loading plate 14 opposite to the direction in which the loading plate 14 is slid to the inspection position so that when the user grips the loading plate 14, Can be easily moved to the inspection position. The handle 144 may be formed in the shape of a hole or a groove so that the handle 144 is prevented from being caught or interfered with the pressing member 400 during the movement of the loading plate 14 .

The object insertion port 145 is perforated at a point slightly offset from the center or center of the plate body 141 toward the left end or the right end.

In detail, the insertion restricting portion 142 functions to limit a distance at which the loading plate 14 is slidably inserted, that is, a distance that the loading plate 14 moves in the left direction in the drawing. The pull-out restricting portion 143 functions to limit the distance that the loading plate 14 is pulled out from the inspection position, that is, the distance to the right.

That is, the insertion restricting portion 142 and the pull-out restricting portion 143 are further protruded upward from the upper surface of the plate body 141 formed to correspond to the height of the box front surface 220, (17) is placed in the space between the insertion restricting portion (142) and the withdrawal restricting portion (143). In addition, the loading plate 14 is interfered with the movement restricting plate 17 to restrict the moving distance.

Accordingly, the insertion restriction portion 142 is brought into contact with one side surface, that is, the right side surface of the movement restricting plate 17, thereby limiting the insertion distance of the loading plate 14, .

The pulling restricting portion 143 is brought into contact with the other side surface, that is, the left side surface of the movement restricting plate 17, thereby limiting the distance that the loading plate 14 is pulled out. It becomes a drawn state. That is, the loading plate 14 is movable by a distance corresponding to the left and right width of the movement restricting plate 17.

The movement restricting plate 17 may be fastened to the upper surface of the vacuum box 200 by a fastening member or may be integrally formed with the vacuum box 200.

The pressing member 400 provided at the front of the loading plate 14 includes a pressing plate 410 pressing the loading plate 14 and a cylinder connecting the pressing plate 410 and the cylinder unit 300. [ And may include a connecting member 420. It is noted that the pressure plate 410 and the connecting member 420 may be provided as a single article while the independent member may be provided as a connected member by the fastening member as shown in the figure.

The pressing plate 410 is formed to have a height corresponding to the height of the plate body 141 constituting the loading plate 14, and is formed to extend in the left and right direction by a predetermined length.

The cylinder connecting member 420 is formed to protrude upward from the upper surface of the pressure plate 410 while being coupled to the left side surface of the pressure plate 410, Additional connections are made.

The cylinder connecting member 420 is formed to have a thickness corresponding to the thickness of the pressure plate 410 such that the same surface as the front and rear surfaces of the pressure plate 410 is formed while being coupled to the left side surface of the pressure plate 410. [ .

The cylinder unit 300 includes a cylinder body 310 and a cylinder shaft 320 which is drawn out from the cylinder body 310 or inserted into the cylinder body 310 and the cylinder body 310, And a cylinder bracket 330 fixedly mounted on the movement restricting plate 17. The end of the cylinder shaft 320 is connected to the cylinder connecting member 420 and moves together with the cylinder connecting member 420.

A movement limiting plate coupling hole 331 is formed in the cylinder bracket 330 and a bracket coupling hole 172 is formed in the movement limiting plate 17 so that the coupling hole 331, The cylinder bracket 330 is coupled to the movement restricting plate 17 by a member.

In order to connect the cylinder shaft 320 to the right side surface of the cylinder connecting member 420, the cylinder unit 300 is mounted on the movement restricting plate 17, Should be located. For this purpose, the front end of the movement restricting plate 17 may be further protruded forward than the front surface of the pressure plate 410.

The slide plate 222 may further extend forward from the lower end of the box front surface 220 and the pressing member 400 and the loading plate 140 may be placed on the upper surface of the slide plate 222. However, it is also possible that the loading plate 140 and the pressing member 400 are placed on the support plate 11 without the slide plate 222.

A guide groove 414 may be formed on the lower surface of the pressure plate 410 and a slide guide 18 may be mounted on the upper surface of the slide plate 222. The slide guide 18 is seated in the guide groove 414 to stably guide the movement of the pressing plate 410 in the left and right directions.

A vacuum gauge 15 may be provided on the top surface 210 of the box and the vacuum gauge 15 may include a gauge body 151 and an air pressure sensor And a display 152 for displaying to the user.

The box top surface 210 may be provided with an alarm member 16 for informing the user of the operation state of the airtightness testing device 10 or the inspection result of the inspection target object 50.

In the present embodiment, the alarm member 16 includes a cylindrical lamp body 161 formed in an elongated vertical direction, and a lamp body 163 surrounding the lamp body 161, And a plurality of lamps 162 formed along the periphery of the lamp body 161 so as to be divergent.

The plurality of lamps 162 may be divided into orange, green, and red, and the lamp may include an LED light source.

The plurality of lamps 162 may be separately turned on or off so that the lamp 162 that is turned on or off may be differently operated so that the user can easily grasp the operation state of the equipment or the inspection result of the inspection object 50. [ can do.

Here, the alarm member 16 is not limited to the three-color tower lamp, and various types of alarm members for informing the user of the inspection result in the form of light, sound, text, or moving picture can be proposed.

3 is a longitudinal sectional view showing a cross-sectional structure taken along line III-III of FIG.

Referring to FIG. 3, the communication hole 221 is formed substantially at the center of the box front surface 220.

The vacuum pump 13 is connected to the low-pressure chamber 270 to suck air in the low-pressure chamber 270.

The vacuum pump 13 and the low-pressure chamber 270 may communicate with each other by a connection pipe 12 forming an air flow path from the vacuum pump 13 to the low-pressure chamber 270.

The pump connection pipe 12 may be provided in the form of a pipe and is connected to the low pressure chamber 270 through the support plate 11 and the box bottom surface 260 below the support plate 11.

The vacuum gauge 15 communicates with the low-pressure chamber 270 to measure the air pressure of the low-pressure chamber 270.

When the vacuum gauge 15 is provided on the top surface 210 of the box, a gauge connection port 211 is formed at a position where the vacuum gauge 15 is provided on the top surface 210 of the box, And the low-pressure chamber 270 can communicate with each other.

4 is a perspective view showing the rear surface of the pressure plate.

4, the back surface of the pressure plate 410 is provided with a pressing portion 411 for pressing the loading plate 14 in contact with the front surface of the loading plate 14, The first depressed portion 412 is formed.

The first depressed portion 412 is recessed at a predetermined area and depth from the back surface of the pressure plate 410 and extends to the side end portion of the pressure plate 410. That is, when the pressing portion 411 contacts the loading plate 14, external air flows through the first depressed portion 412.

The second depressed portion 413 may be further formed inside the first depressed portion 412, but the number of depressed portions for introducing the air is not limited.

5 is a longitudinal section cutaway perspective view of a loading plate cut along V-V in Fig.

5, the inspection object 50 in the present embodiment includes a circular lens 52, a body 51 on which the lens 52 is seated, A pad 54 provided on the contact surface between the fixing block 53 and the lens 52 and a pad 54 provided on the front surface of the lens 52. [ And a sealing member 55 provided on the surface of the body part 51 which is made of a metal.

Here, in order to determine that the inspection object 50 is a good product in the state where the inspection object 50 is assembled, in a state where the inspection object 50 is mounted on the inspection apparatus 10, When the pressure inside the chamber 270 is lowered, the air outside the inspection object 50 should not flow into the interior of the low pressure chamber 270 through the portion where the components constituting the inspection object 50 are connected. That is, if air outside the inspection object 50 flows into the low-pressure chamber 270, it is determined that the airtightness of the inspection object 50 is defective.

On the other hand, a first sealing groove 147 for inserting the first sealing member 60 is formed on the rear surface of the plate body 141. The first sealing member 60 is in close contact with the edge of the communication hole 221 when the plate body 141 is in close contact with the side surface of the low pressure chamber 270, Pressure chamber 270. In order to prevent the air from entering between the plate body 141 and the side of the low-pressure chamber 270, Therefore, the first sealing groove 147 may have a diameter equal to or larger than the diameter of the communication hole 221.

 A second sealing groove 148 is formed on a surface of the object mounting part 146 on which the inspection object 50 is mounted and a second sealing member 70 is mounted on the second sealing groove 148 do. The second sealing member 70 prevents external air from flowing into the low pressure chamber 270 between the inspection object 50 and the object receiving portion 146.

FIG. 6 is a plan view of the airtightness inspection apparatus of FIG. 1, as viewed from above, and FIG. 7 is a partially enlarged view showing a structure in which A is enlarged in FIG.

Referring to FIGS. 6 and 7, the loading plate 14 is positioned between the box front surface 220 and the pressure plate 410.

The pressing plate 410 is moved in the left and right direction of the inspection apparatus by the operation of the cylinder unit 300 and presses the loading plate 14 in a state where the loading plate 14 is moved to the inspection position, So that the loading plate 14 and the box surface 220 are brought into close contact with each other. Here, the inspection position may be defined as a position where the center of the object insertion port 145 of the loading plate 14 coincides with the center of the communication hole 221 formed in the box front surface 220.

The pressure plate 410 and the loading plate 14 move in opposite directions to inspect the airtightness of the inspection object 50. The pressing portion 411 defined at the back surface of the pressing plate 410 is inclined to form an angle of less than 90 degrees with the front surface 410a of the pressing plate 410, The box surface 220 facing the box portion 220 is formed in a state parallel to the pressing portion 411. That is, the box front surface 220 is also inclined at a predetermined angle? With respect to the front surface 410a of the pressure plate 410.

In other words, the angle formed by the box front surface 220 and the box right surface 240 is equal to an angle obtained by subtracting an angle formed by the front surface 410a of the pressure plate 410 and the pressing portion 411 at 90 degrees .

In detail, when the airtightness testing apparatus 10 is viewed from above, the box front surface 220 is inclined forward from left to right, and is inclined at a predetermined angle? With the movement direction line of the pressure plate 410, Respectively.

Before the pressure plate 410 presses the loading plate 14 in a state where the loading plate 14 is moved to the inspection position, the box front surface 220 and the pressing portion 411 are separated from each other by the pre- D1 and the pressing distance D1 is larger than the thickness t of the loading plate 14. [

8 is a cross-sectionally cutaway perspective view taken along VIII-VIII in FIG.

8, the loading plate 14 is fully extended to the right in the initial state before the airtightness testing apparatus 10 is operated, and the object insertion port 145 is connected to the communication hole 221, To the right. The front and rear surfaces of the object insertion port 145 are exposed to the outside so that the inspection object 50 can be easily attached to or detached from the object insertion port 145.

The pressure plate 410 is drawn out to the maximum in the direction opposite to the direction in which the loading plate 14 is pulled out, that is, the left chamber. That is, the pressure plate 410 is farthest from the loading plate 14 in the left-right direction of the inspection apparatus 10.

7, since the pressure plate 410 does not press the loading plate 14, a gap may be formed between the box front surface 220 and the loading plate 14, The outside air can flow into the low-pressure chamber 270 through the communication hole 221.

In this state, in order to inspect the airtightness of the inspection object 50, the user mounts the inspection object 50 on the loading plate 14 and grasps the grip 144 of the loading plate 14 Thereby sliding the loading plate 14 to the left side.

Thereafter, the cylinder unit 300 is operated to move the pressure plate 410 in the right direction.

FIG. 9 is a perspective view showing the structure of the airtightness inspection apparatus according to the present invention in a state ready for inspection.

9, the loading plate 14 is moved in the leftward direction until the insertion restricting portion 142 comes into contact with the movement restricting plate 17 and reaches the inspection position do.

The cylinder unit 300 is operated to move the pressing member 400 to the right to press the pressing plate 411 of the pressing member 400.

The inspection object 50 mounted on the loading plate 14 is covered by the pressure plate 410.

FIG. 10 is a plan view of the airtightness testing apparatus of FIG. 9 viewed from the upper side, and FIG. 11 is a partially enlarged view showing a structure of FIG.

10 and 11, when the pressing plate 410 is moved to the right by the operation of the cylinder unit 300, a distance between the box front surface 220 and the pressing unit 411 is substantially equal to a distance between the loading plate (D2) corresponding to the thickness of the loading plate 14, and the back surface of the loading plate 14 is brought into close contact with the front surface 220 of the box.

The reason why the distance between the pressing portion 411 and the box surface 220 is narrowed due to the movement of the pressing plate 410 is that the back surface of the pressing plate 410 is inclined. That is, the pressure plate 410 is moved in the right direction orthogonal to the box left side surface 230 or the box right side surface 240 or in a direction parallel to the front surface of the pressure plate 410, So that the plate 14 is pushed toward the box front side 220.

Fig. 12 is a cross-sectional incisional view taken along the line XII-XII in Fig. 9;

12, the central axis of the inspection object 50, the object insertion port 145, and the communication hole 221 are located on the same line with the loading plate 14 fully inserted. In this state, when the loading plate 14 is pressed by the pressure plate 410, the first sealing member 60 is brought into close contact with the box front surface 220, 14 to prevent the outside air from flowing into the low-pressure chamber 270.

 When the vacuum pump 13 operates to suck air in the low-pressure chamber 270, the pressure inside the low-pressure chamber 270 becomes lower than the atmospheric pressure outside. As a result, a force for pulling the inspection object 50 toward the low-pressure chamber 270 is formed.

The inspection object 50 is pressed by the object seating portion 146 by the force due to the air pressure difference and the second sealing member 146 provided between the inspection object 50 and the object seating portion 146, (70) is squeezed. As a result, outside air is prevented from flowing into the low-pressure chamber 270 through the gap between the inspection object 50, the object insertion port 145, and the inspection object seating portion 146. That is, the low-pressure chamber 270 is sealed from the outside.

On the other hand, whether the airtightness between the body part 51 of the inspection object 50 and the lens 52 is good or not can be judged according to whether the pressure inside the low-pressure chamber 270 reaches the set pressure have.

In other words, the air outside the airtightness testing apparatus 10 flows into the test object 50 through the first depression 412 and the second depression 413 of the pressure plate 410, When the inflow air flows into the low-pressure chamber 270 through the gap between the body 51 of the inspection object 50 and the lens 52, it can not fall to the set pressure. Then, the inspection object 50 is determined to be a defective product.

When the pressure plate 410 is moved to the right to press the loading plate 14, the right side of the test object 50 and the pressure plate 410, which are incompletely inserted into the object insertion port 145, The first depressed portion 412 may be formed on the right end side of the pressure plate 410 to prevent interference with each other. In this case, not only the passage through which the outside air is introduced by the first depression 412 but also the collision between the inspection object 50 and the pressure plate 410 can be prevented.

On the other hand, the vacuum pump 13 is operated so that the pressure inside the low-pressure chamber 270 becomes the target pressure. At this time, the pressure inside the low-pressure chamber 270 is outputted through the vacuum gauge 15 and can be confirmed by the user.

Pressure chamber 270 through the inspection object 50 and the inspection object 50 of the good product is attached to the inspection object 50. When the inspection object 50 having a poor air-tightness is mounted, The time taken for the pressure inside the chamber 270 to reach the set pressure becomes longer.

When the vacuum pump 13 is stopped after the internal pressure of the low-pressure chamber 270 is lowered to a pressure lower than the set pressure, external air is continuously introduced into the low-pressure chamber 270, Will continue to rise.

Accordingly, it is possible to determine whether the inspection object 50 is defective by setting a time reference required for the pressure inside the low-pressure chamber 270 to drop to the set pressure after the vacuum pump 13 operates.

When the atmospheric pressure in the low-pressure chamber 270 becomes equal to or lower than the target atmospheric pressure, the vacuum pump 13 is stopped and the pressure inside the low-pressure chamber 270, It is possible to judge whether or not there is a defect in the optical fiber 50.

The user can easily grasp the operating state of the airtightness testing device 10 or the inspection result of the inspection target object 50 through the alarm member 16 provided with the lamp 162.

For example, when the vacuum pump 13 of the airtightness inspection apparatus 10 is operated and the inspection is in progress, the orange lamp is turned on, the green and red lamps are turned off, and the result of the leak inspection of the inspection object 50 The green lamp is turned on and the orange lamp and the red lamp are turned off. When the result of the leak test of the inspection object 50 is out of the normal range, the red lamp may be turned on and the orange lamp and green lamp may be turned off.

Claims (10)

A vacuum box in which a low-pressure chamber is formed, and a communication hole is formed on at least one surface of the vacuum box;
A vacuum pump for forcibly sucking air inside the vacuum box to lower the pressure inside the vacuum box to a set pressure;
A loading plate provided in front of a surface of the vacuum box in which the communication hole is formed and slidable in a horizontal direction along a surface of the vacuum box in which the communication hole is formed, ; And
And a pressing member provided so as to be slidable in a horizontal direction in front of the loading plate, for pressing the loading plate toward the surface of the vacuum box in which the communication hole is formed.
The method according to claim 1,
And a cylinder unit connected to the pressure member and providing power for movement of the pressure member.
The method according to claim 1,
The back surface of the pressing member is formed to be inclined so as to form an angle smaller than 90 degrees with the front surface of the pressing member,
Wherein the pressing member is formed to horizontally move in a direction parallel to the front surface of the pressing member.
The method of claim 3,
Wherein a surface of the vacuum box in which the communication hole is formed is formed parallel to a back surface of the pressing member.
The method according to claim 1,
Wherein the center of the insertion port of the object and the center of the communication hole are on the same line in a state in which the loading plate is moved to the inspection position for inspecting the airtight state of the inspection object.
3. The method of claim 2,
Wherein the loading plate comprises:
And a movement restricting part protruding from the upper surface of the plate body to limit a slide movement distance of the loading plate,
Wherein the movement restricting portion includes:
An insertion restricting portion protruding from one side edge of the plate body and restricting movement of the loading plate so that the loading plate stops at an accurate inspection position;
And a withdrawal restricting portion protruding from the other side edge of the plate body to limit a maximum distance that the loading plate is spaced apart from the inspection position.
The method according to claim 6,
Further comprising a movement restricting member that is interposed between the insertion restricting portion and the withdrawal restricting portion,
And the cylinder unit is seated on the upper surface of the movement restricting member.
The method of claim 3,
Wherein at least one depression for guiding outside air is formed on the back surface of the pressing member.
The method according to claim 1,
Further comprising a vacuum gauge provided at one side of the vacuum box for measuring a pressure of the low-pressure chamber.
10. The method of claim 9,
Further comprising an alarm member provided at one side of the vacuum box for indicating at least one of a failure of the inspection object or an operation of the vacuum pump based on a pressure value measured by the vacuum gauge, .


KR1020150138072A 2015-09-30 2015-09-30 Leakage test apparatus KR101823011B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117232750A (en) * 2023-11-14 2023-12-15 江苏金钰铭电子有限公司 Jet vacuumizing leak detection device
CN118010258A (en) * 2024-04-08 2024-05-10 东元科技有限公司 Clamping type furnace gas tank tightness detection equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005337906A (en) * 2004-05-27 2005-12-08 Toyota Motor Corp Leakage inspection device
JP2012141168A (en) * 2010-12-28 2012-07-26 Icom Inc Device for inspecting sealability of housing

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117232750A (en) * 2023-11-14 2023-12-15 江苏金钰铭电子有限公司 Jet vacuumizing leak detection device
CN117232750B (en) * 2023-11-14 2024-01-30 江苏金钰铭电子有限公司 Jet vacuumizing leak detection device
CN118010258A (en) * 2024-04-08 2024-05-10 东元科技有限公司 Clamping type furnace gas tank tightness detection equipment
CN118010258B (en) * 2024-04-08 2024-06-07 东元科技有限公司 Clamping type furnace gas tank tightness detection equipment

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