KR20170028526A - Ash Air Conveying System - Google Patents

Ash Air Conveying System Download PDF

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Publication number
KR20170028526A
KR20170028526A KR1020150125218A KR20150125218A KR20170028526A KR 20170028526 A KR20170028526 A KR 20170028526A KR 1020150125218 A KR1020150125218 A KR 1020150125218A KR 20150125218 A KR20150125218 A KR 20150125218A KR 20170028526 A KR20170028526 A KR 20170028526A
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KR
South Korea
Prior art keywords
dust
air
collected
automatic
valve
Prior art date
Application number
KR1020150125218A
Other languages
Korean (ko)
Inventor
김현규
Original Assignee
주식회사 에스씨티
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Publication date
Application filed by 주식회사 에스씨티 filed Critical 주식회사 에스씨티
Priority to KR1020150125218A priority Critical patent/KR20170028526A/en
Publication of KR20170028526A publication Critical patent/KR20170028526A/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
    • F24F13/082—Grilles, registers or guards
    • F24F13/085—Grilles, registers or guards including an air filter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/28—Arrangement or mounting of filters

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Filling Or Emptying Of Bunkers, Hoppers, And Tanks (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Abstract

In the present invention, dust collecting chambers are installed in the middle of the exhaust duct of a semiconductor factory in the middle of the exhaust duct to collect dust by gravity sorting. An automatic rotary valve is installed in the dust inlet at the dust inlet at the bottom of the collecting chamber, A dust collecting hopper is installed in which an automatic vent valve is installed so as to discharge the collected dust smoothly without affecting the flow in the exhaust duct and to be connected to an ejector capable of preventing backflow when the collected dust is discharged Dust is suctioned through the suction filter by the operation of the suction blower and the flow rate of the air is used to set the bag filter at the upper end and the load cell at the outer side bracket to measure the collected dust weight, A level sensor can be installed to measure the amount of dust collected, and the air hammer can be used to periodically Automatic knife valve and automatic rotary valve are installed in the inflow port where the dust is discharged from the dust reservoir and the dust outlet is automatically processed to prevent discharge and dust generation. This system is a system for transferring and discharging to a dust storage tank where a discharge hopper with a valve is installed
Dust collection chambers and collecting hoppers are installed in several places in the semiconductor factory, and dusts collected in the dust collecting hopper are connected to the piping line for transferring the dusts to the dust storage tank by using air pressure and flow rate according to the operation of the suction blower The facility that discharges the dust by using the quantitative packing device and discharges the air into the air by layering the dust and air, operates the automatic valve installed in each device by using the operation panel equipped with the PLC, And dust that can be accumulated in the exhaust duct is collected and transferred to the dust storage tank by the air to periodically discharge the dust.

Figure pat00001

Description

{Ash Air Conveying System} dust collection, transfer and discharge system from exhaust duct of semiconductor factory

The present invention relates to a system for collecting, transporting and discharging dust from a semiconductor factory exhaust duct. More particularly, the present invention relates to a system for installing a dust collecting chamber in the middle of an exhaust duct of a semiconductor factory, To a dust storage tank using pressure and flow rate.

In consideration of the characteristics of a semiconductor factory operating 24 hours a day and 24 hours a day, and the fact that semiconductor processing is performed in a clean room, in order to continuously transfer dust and odor generated in a semiconductor process to a post-treatment apparatus, There should be no accumulation of dust.

If dust accumulates in the exhaust duct, pressure and flow loss are caused in the exhaust duct, which makes it difficult to keep the cleanliness of the semiconductor manufacturing facility constant.

In order to prevent this, a semiconductor manufacturing factory has installed a T-shaped chamber in the middle of the exhaust duct to prevent accumulation of dust generated in the manufacturing process in the exhaust duct, thereby discharging dust collected at a predetermined interval by manpower, The robot is introduced into the exhaust duct to remove the dust accumulated in the duct.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide a dust collecting apparatus and a dust collecting hopper which are capable of removing dust by gravity sorting in the middle of an existing exhaust duct, It is possible to efficiently collect dust from the exhaust duct while periodically transferring and discharging the dust from the exhaust duct while preventing internal environment such as pressure and flow rate in the duct, The life of the exhaust duct is prolonged, and the state of the creel room is stably maintained, thereby preventing the semiconductor production from being hindered.

A dust collecting chamber is installed in the midway of the exhaust duct of the semiconductor factory, and the dust collected in the chamber is transferred to the dust storage tank by using the air pressure and flow rate generated by the suction blower and discharged.

One) A collection hopper equipped with an automatic knife valve, an automatic vent valve and an automatic rotary valve to periodically discharge the dust collected from the collection chamber

2) A suction filter for introducing air to suck and pressurize the collected dust, a suction blower, an ejector for smoothly discharging the dust collected from the collecting hoppers installed at various places, and a bag filter for removing fine dust contained in the exhaust air The dust transfer piping line and

3) A suction line for increasing the separation efficiency of air and dust, a load cell for measuring the weight of the collected dust, a level measuring device for measuring the amount of dust, and a level measuring device for measuring the amount of dust attached to the inside of the dust reservoir , An automatic knife valve for smooth discharge of dust, a dust reservoir designed to install a discharge hopper equipped with an automatic rotary valve at the bottom,

4) Packing system for packing the collected dust in a certain volume

5) An automatic rotary valve installed in a collecting chamber installed in the middle, and an operation panel for operating an automatic rotary valve installed at the lower end of the dust storing tank

The present invention relates to a vacuum cleaner which is installed in an exhaust duct of a semiconductor factory so as to obstruct a flow in an exhaust duct to prevent damage to the semiconductor production process and to automatically clean the interior of the duct by utilizing manpower or a robot, And clean room environment, and it is also applied to similar ducts other than semiconductor factories, so that convenience of maintenance is promoted.

1 shows a dust transfer piping line 300 composed of a dust collecting chamber 100, a collecting hopper 200 and an ejector 307, a suction blower 301, a bag filter 303 and the like in various places in an exhaust duct of a semiconductor factory FIG. 5 is a system conceptual diagram of a system according to the present invention, in which the air is sucked by the suction blower 301, and the pressure and flow rate of the air are transferred to the dust storage tank 400 and then packed and discharged using the automatic packaging apparatus 500.
2 is a schematic view of a dust collecting hopper 200 composed of an automatic knife valve 201, an automatic valve 202, an automatic rotary valve 203 and a sight glass 204 for visually observing the dust amount It is a detailed conceptual diagram.
3 is a schematic view showing a state in which the dust introduced into the ejector 307 is transferred to the dust storage tank 400 using the air sucked through the air suction filter 309 in operation of the suction fan 301, And a dust transfer pipe line 300 for discharging the air separated into layers to the atmosphere
FIG. 4 is a cross-sectional view of an apparatus for separating dust separated by dust and air, which is mixed with intake air through a dust transfer pipeline line 300 and separated therefrom, by an automatic knife valve 407, an automatic rotary valve 408, Is a detailed conceptual diagram of a dust storage tank 400 discharging through a discharge hopper having an automatic rotary valve 411
5 is a view showing a state in which the dust separated and stored in the dust storage tank 400 and then discharged through the dust discharge hopper 410 is packed using the automatic touch sensor 501 and the automatic bag opening device 503, (500) capable of collecting dust that can be generated through an exhaust hood and separately processing the dust
Explanation of symbols
100 dust collection chamber
200 collection hopper
201 Automatic knife valve
202 Automatic vent valve
203 Automatic rotary valve
204 Sight Glass
300 Dust transfer piping line
301 suction blower
302 Suction piping
303 bag filter
304 Suction transfer piping
305 Sight Glass
306 Suction transfer piping
307 Ejector
308 Suction piping
309 Suction filter
310 Exhaust Noise Eliminator
311 Vacuum Breaker Valve
312 Suction noise eliminator
313 Damper
314 Air pulse device
315 Pressure gauge
400 dust reservoir
401 Dust intake
402 Sight Glass
403 bracket
404 load cell
405 Dust Level Measuring Device
406 Air Hammer
407 automatic knife valve
408 Automatic Rotary Valve
409 Sight Glass
410 discharge hopper
411 Automatic valves
412 Dust outlet
500 dust exhaust system
501 automatic touch sensor
502 Moving Conveyor
503 Automatic opening device of bag
504 Battery Storage
505 automatic lapping device
506 Exhaust hood
600 Operators

In order to accomplish the above object, a system for collecting, transporting and discharging dust from an exhaust duct of a semiconductor factory according to the present invention includes a collecting chamber for collecting dust from an exhaust duct, a collecting hopper, dust collected from a dust collecting hopper, A piping line composed of an ejector and a bag filter for transferring the air to the dust storage tank by using the air pressure and the flow rate generated from the dust storage tank, a dust storage tank for separately storing and discharging the dust separated through the piping line, The collected dust is discharged in a certain volume of bag from the automatic packaging machine.

The automatic knife valve installed at the upper part of the collecting hopper is kept open during the dust collecting so as not to interfere with the internal environment such as the flow rate and pressure in the exhaust duct of the semiconductor factory and the dust collected in the dust collecting hopper is discharged The automatic knife valve installed at the upper part of the collection hopper is closed, the automatic rotary valve installed at the bottom part of the collection hopper is operated, and the automatic vent valve installed at the upper side of the collection hopper is opened to collect the dust in the collection hopper. The vacuum generated by the closure is broken and the dust collected in the collecting hopper can be smoothly moved to the dust transfer piping line through the ejector connected directly to the automatic rotary valve installed at the bottom of the collecting hopper.

In order to move the dust from the rotary valve installed at the lower part of the dust collecting hopper smoothly to the dust transfer pipeline, the dust suction part is moved to the dust transfer pipe line so that the collected dust can be moved to the dust transfer pipe line by using the flow of the suction air generated by the suction blower An ejector designed to be tilted in the intake air flow direction from the upper part to the lower part is installed to smoothly suck the dust collected from the dust collecting hopper and transfer the dust to the dust storage tank through the transfer pipeline.

The dust mixed with the air sucked in the process of being conveyed to the pressure and flow rate of the air sucked by the suction blower into the dust storage tank is separated into the solid dust and the gaseous air in the dust storage tank and the solid dust is separated into the dust storage tank The air is stored in the lower part of the packing device and discharged through the discharge hopper in a predetermined volume in the packaging device, and the air in the gaseous phase flows into the air blower through the bag filter and is discharged to the atmosphere.

According to the present invention, it is possible to smoothly remove the dust that can be accumulated in the exhaust duct without disturbing the flow of the pressure and the flow rate of the semiconductor exhaust duct, and to prevent the semiconductor manufacturing process that may occur in the clean room due to dust accumulation in the exhaust duct Can be prevented in advance.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings.

FIG. 1 illustrates a general concept of the present invention. The dust collecting chamber 100 is installed at various places where dust in the exhaust duct may exist in a semiconductor manufacturing factory, and a collecting hopper 200 is installed to move the dust collected from the collecting hopper 200 to the dust transfer piping line by using the air sucked due to the operation of the suction blower 301 so that the suction filter 309 and the plurality of ejectors 307 And a bag filter 303. The dust mixed with the air sucked in the process of transferring is separated into layers and stored while collecting certain dusts A dust storage container 400 for discharging dust collected through the discharge hopper 410, a dust packing device 500 for packing the dust collected from the dust discharge hopper 410 in a predetermined volume, The user can see the operation panel 600 for controlling the operation panel 600.

An automatic knife valve 201 installed in a dust collecting hopper 200 which is directly connected to a lower end of a collecting chamber 100 installed to collect dust from an exhaust duct of a semiconductor factory and includes an automatic rotary valve 203 and an automatic vent valve 202, The automatic knife valve 407, the automatic rotary valve 409 and the automatic rotary valve 411 installed on the discharge hopper 410 directly connected to the bottom dust discharge port of the dust storage tank 400, A PLC for recognizing the value of the level measuring device 405 installed in the dust storage tank 400 and outputting a control signal according to the result, and a communication for checking the operation state of the system in real time The respective automatic valves are independently operated by the operating unit 600 on which the system is installed so that each of the collecting hoppers 200 alternately moves in the collecting hopper 200 at regular intervals of time, When dust is stored in the dust storage tank 400, the dust is stored in the dust storage tank 400 at a convenient time by the administrator, (410).

2 shows the details of the collecting hopper 200. The dust collecting hopper 200 includes an automatic knife valve 201 installed at the dust inlet, an automatic rotary valve 203 installed at the dust outlet, and a collecting hopper 200 An automatic vent valve 201 installed at an upper end portion thereof, and a sight glass 204 capable of visually confirming the amount of dust.

When the dust collected in the dust collecting hopper 200 is discharged, the automatic knife valve 201, which is always installed except for the collected dust discharge time installed at the dust inlet of the collecting hopper 200 by the operation panel 600, The automatic rotary valve 203 installed at the discharge port of the collecting hopper 200 is operated to open the automatic vent valve 202 provided above the side surface of the dust collecting hopper 200 only during the operation of the automatic rotary valve 203 The vacuum generated in the dust collecting hopper 200 is broken by closing the automatic knife valve 201 installed on the dust collecting hopper 200 and the dust collected in the dust collecting hopper 200 is discharged to the ejector 307 To the dust storage tank 400 using the flow velocity of the air generated by the suction fan 301 and the suction pressure.

When the dust collected in the dust collecting hopper 200 is discharged, the vent valve 202 is closed by a control command of the operation panel 600 and the automatic rotary valve 203 installed in the dust outlet of the collecting hopper 200 is stopped And the automatic knife valve 201 installed on the upper part of the collecting hopper 200 is opened to collect the dust again. The dust collecting hopper 200 is provided with a sight glass 204 so that the amount of dust collected by the naked eye can be confirmed, thereby facilitating the operator's convenience.

3 shows a piping line 300 for dust transfer. When the suction blower 301 is operated, fine dust contained in the air flowing into the dust transfer pipeline 300 is removed, and only pure air is sucked in. The dust collected in the dust collecting hopper 200 is sucked by the suction air from the ejector 307 using the air sucked into the suction filter 309 to be sucked through the dust transfer pipe line 300 And is transferred to the dust storage tank 400.

The ejector 307 is configured to discharge the dust collected in the dust collecting hopper 200 smoothly and to prevent the backflow of the sucked compressed air made by the suction blower 301 from the upper side to the lower side in the inflow air flow direction And a vacuum is generated in the ejector 307 by the suction blower 301 at the flow rate of the air introduced through the suction filter 309 and the air suction pipe 308 to be collected from the dust collecting hopper 200 Allows the dust to flow smoothly.

The dust introduced into the dust transfer piping line 300 through the ejector 307 and the air introduced from the suction filter 309 are mixed at the rear end of the ejector 307, Passes through the glass 305 and is transported to the dust storage tank 400 through the pipe 304.

The transferred dust is separated into dust and air in the dust storage tank 400. The separated air passes through the bag filter 303 configured to remove fine dust contained in the separated air, And is discharged to the atmosphere through the exhaust port of the suction blower 301 through the exhaust port.

A suction noise eliminator 312 is installed to remove noise that may be generated in the process of being sucked into the pipeline 302 connected to the suction fan 301 from the bag filter 303. In the exhaust line of the suction fan 301, A noise eliminator 310 is installed to remove noise that may be generated from the exhaust port during operation of the suction fan 310.

An air pulse device 314 is installed in the bag filter 303 to periodically remove dusts adhering to the filter surface in the bag filter 303 using air pulses from the filter surface to extend the service life of the filter, A damper 313 is installed in the piping 302 between the bag filter 303 and the suction blower 301 to control the flow rate of the suction air sucked into the suction filter 309 and a pressure gauge 315 is provided A vacuum breaker valve 311 for breaking the vacuum that can be observed by the naked eye and allowing the suction blower 301 to stop or remain in the piping 302 when the suction blower 301 is stopped, So that safety can be achieved.

4 shows the dust storage tank 400. The dust storage tank 400 is collected through the dust collecting chamber 100 and the collecting hopper 200 installed at a plurality of places and is discharged through the suction filter 309 through the suction blower 301, The mixed air and dust are separated from each other by the transfer piping line 300, and the air is stored in the air through the bag filter 303 and the dust is stored in the lower part to be discharged using the dust automatic packing apparatus 500, The air containing the dust sucked and suctioned through the suction nozzle 401 is guided to the wall in the dust storage tank 400 to form a spiral turbulent flow naturally to efficiently separate the dust and air.

The separated dust weight is measured using a load cell 404 installed at the lower end of the bracket 403 attached to the side of the dust storage tank 400 and the collected dust volume is stored in a level And a sight glass 402 is installed on the body of the dust storage tank 400 so that the amount of dust separated by the naked eye can be confirmed.

An air hammer 406 is installed at the lower end of the dust storage tank 400 so as to generate vibration in the dust storage tank 400 periodically to prevent the separated dust from being stuck inside the dust storage tank 400, An automatic knife valve 407 and a discharge hopper 410 provided with a rotary valve 408, a sight glass 409 and an automatic rotary valve 411 are installed at an inlet for introducing dust from the nozzle The dust collected by the automatic packaging machine 500 is discharged.

When a predetermined amount of dust is stored in the dust storage tank 400, the dust is fed back to the control panel 600 through the load cell 404 or the dust level measuring device 405 to inform the manager of the discharge timing. 400 to be discharged.

The automatic knife valve 407 provided between the dust storage tank 400 and the discharge hopper 410 is opened and the automatic rotary valve 409 is operated to discharge a predetermined amount of dust to the discharge hopper 410 for a predetermined time, The automatic knife valve 407 is closed and the automatic rotary valve 408 is stopped. When the automatic rotary valve 408 is stopped, the automatic knife valve 407 is closed, The valve 411 is operated to discharge the dust.

Figure 5 shows a dust packaging apparatus 500. The dust packaging apparatus 500 includes an automatic touch sensor 501, an automatic transfer apparatus 502, a bag storage apparatus 504, a bag automatic opening apparatus 503 and an automatic lapping apparatus 505 and an exhaust hood 506 And collect dust that may be generated during the packaging process through the exhaust hood 506 during the discharge of the dust into the bag and in the lapping operation, and separately process the dust.

100 dust collection chamber
200 collection hopper
201 Automatic knife valve
202 Automatic vent valve
203 Automatic rotary valve
204 Sight Glass
300 Dust transfer piping line
301 suction blower
302 Suction piping
303 bag filter
304 Suction transfer piping
305 Sight Glass
306 Suction transfer piping
307 Ejector
308 Suction piping
309 Suction filter
310 Exhaust Noise Eliminator
311 Vacuum Breaker Valve
312 Suction noise eliminator
313 Damper
314 Air pulse device
315 Pressure gauge
400 dust reservoir
401 Dust intake
402 Sight Glass
403 bracket
404 load cell
405 Dust Level Measuring Device
406 Air Hammer
407 automatic knife valve
408 Automatic Rotary Valve
409 Sight Glass
410 discharge hopper
411 Automatic valves
412 Dust outlet
500 dust exhaust system
501 automatic touch sensor
502 Moving Conveyor
503 Automatic opening device of bag
504 Battery Storage
505 automatic lapping device
506 Exhaust hood
600 Operators

Claims (5)

A dust collecting chamber is installed in the midway of the exhaust duct of the semiconductor factory, and the dust collected in the chamber is transferred to the dust storage tank by using the air pressure and flow rate generated by the suction blower and discharged.
A collection hopper equipped with an automatic knife valve, an automatic vent valve and an automatic rotary valve to periodically discharge the dust collected from the collection chamber A suction filter for introducing air to suck and pressurize the collected dust, a suction blower, an ejector for smoothly discharging the dust collected from the collecting hoppers installed at various places, and a bag filter for removing fine dust contained in the exhaust air The dust transfer piping line and A suction line for increasing the separation efficiency of air and dust, a load cell for measuring the weight of the collected dust, a level measuring device for measuring the amount of dust, and a level measuring device for measuring the amount of dust attached to the inside of the dust reservoir , An automatic knife valve for smooth discharge of dust, a dust reservoir designed to install a discharge hopper equipped with an automatic rotary valve at the bottom, Packing system for packing the collected dust in a certain volume An automatic rotary valve installed in a collecting chamber installed in the middle, and an operation panel for operating an automatic rotary valve installed at the lower end of the dust storing tank
KR1020150125218A 2015-09-04 2015-09-04 Ash Air Conveying System KR20170028526A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150125218A KR20170028526A (en) 2015-09-04 2015-09-04 Ash Air Conveying System

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150125218A KR20170028526A (en) 2015-09-04 2015-09-04 Ash Air Conveying System

Publications (1)

Publication Number Publication Date
KR20170028526A true KR20170028526A (en) 2017-03-14

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150125218A KR20170028526A (en) 2015-09-04 2015-09-04 Ash Air Conveying System

Country Status (1)

Country Link
KR (1) KR20170028526A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200104057A (en) * 2019-02-26 2020-09-03 (주)엘오티씨이에스 Apparatus for monitoring state of powder deposition in gas exhausting line for semiconductor production facility
KR20230063124A (en) * 2021-11-01 2023-05-09 씨티피 코리아 주식회사 Double flap damper

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200104057A (en) * 2019-02-26 2020-09-03 (주)엘오티씨이에스 Apparatus for monitoring state of powder deposition in gas exhausting line for semiconductor production facility
KR20230063124A (en) * 2021-11-01 2023-05-09 씨티피 코리아 주식회사 Double flap damper

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