KR20170027408A - Pressure-gain controlled multi-way control valve - Google Patents

Pressure-gain controlled multi-way control valve Download PDF

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Publication number
KR20170027408A
KR20170027408A KR1020150123967A KR20150123967A KR20170027408A KR 20170027408 A KR20170027408 A KR 20170027408A KR 1020150123967 A KR1020150123967 A KR 1020150123967A KR 20150123967 A KR20150123967 A KR 20150123967A KR 20170027408 A KR20170027408 A KR 20170027408A
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South Korea
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valve
valve control
pressure
fluid
contact groove
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KR1020150123967A
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Korean (ko)
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KR101829021B1 (en
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정옥찬
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인제대학교 산학협력단
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Micromachines (AREA)
  • Multiple-Way Valves (AREA)

Abstract

The present invention relates to a multi-directional control valve of a pressure gain control type, and more particularly, to a multi-directional control valve of a pressure gain control type, comprising: a fluid channel network part having an inlet part connected to one side of a contact groove formed in the middle, And a plurality of fluid paths are connected to the plurality of fluid passages through at least two of the outflow portions individually or simultaneously so as to contact the plurality of fluid passages through the at least two outflow portions, It consists of three layers of simple PDMS material including two layers of fluid channel network part and valve control part or valve control film, and thus it is possible to manufacture PDMS only. It is possible to manufacture the valve easily, and the manufacturing cost is reduced, and the pressure Through the plurality of outlet according to the difference in the effect to discharge the fluid into or concurrently individually.

Description

[0001] The present invention relates to a pressure-gain control multi-way control valve,

The present invention relates to a multi-way control valve of a pressure gain control type, and more particularly to a multi-way control valve of a pressure gain control type, comprising a fluid channel network portion and a valve control portion, Directional control valve of the pressure gain control type in which the flow of fluid passing through the inflow portion and the plurality of outflow portions connected to the contact groove is appropriately controlled.

The valve for finely controlling the flow of the fluid has various forms and configurations. Among them, there is a fluid logic element that controls the discharge of the fluid through the opening and closing of the passage through which the fluid is discharged, like the control valve of the present invention.

1, a control layer 10, a membrane layer 20, an exit layer 30, and a supply layer (not shown) 40 are laminated in this order to form a four-layer structure of silicon and polydimethylsiloxane (PDMS) as a whole. The fluid control in the conventional multi-channel fluidic logic valve described above is performed by modifying the membrane layer 20 through the control layer 10. An orifice 50 formed in the discharge layer 30 serving as a passageway through which the fluid is passed through the supply layer 40 to the discharge layer 30 is formed in the region of the rigid disk 60 (Fig. 1 (a)), or the orifice 50 is opened (Fig. 1 (b)) by the membrane layer 20 in which the rigid disk 60 portion is not deformed, Respectively.

However, the conventional multichannel fluidic logic device valve as described above has problems such as the necessity of silicon processing and PDMS process for constituting silicon and PDMS materials, and complicated structure in which silicon and PDMS layers are stacked in four layers There is a problem.

In addition, the multichannel fluid logic investigation has a certain degree of operation and utilization as a valve, but the manufacturing process is very complicated and the flow of the fluid is controlled only through one path in which the inflow portion and the outflow portion are connected one to the other, There is a problem in that it can not be applied to a valve requiring various fluid paths due to the characteristics of the valve to be used.

Korean Patent Registration No. 10-0768443

SUMMARY OF THE INVENTION The present invention has been made in order to solve all of the above problems, and it is an object of the present invention to provide a fluid control device, Directional control valve in which a plurality of fluid passages are separately or simultaneously controlled by connecting a plurality of inlet portions to the contact grooves at intervals.

In order to achieve the above object, a multi-directional control valve of a pressure gain control type of the present invention includes a fluid channel network in which an inlet portion is connected to one side of a contact groove formed in the middle and at least two outlet portions are connected to the other side, And a plurality of fluid channels extending through at least two of the outflow ports and contacting the plurality of outflow ports, the plurality of outflow ports being disposed on one surface of the fluid channel network part, And a valve control unit for individually or simultaneously controlling the fluid paths of the fluid passages.

The fluid channel network is preferably connected to the other side of the contact groove in a vertical direction at intervals or at intervals in the vertical and horizontal directions.

And a valve control film disposed between the fluid channel network portion and the valve control portion and adapted to contact and deform a portion of the contact groove with the pressure supplied to the contact groove through the valve control portion desirable.

The valve control unit may further include a pressure passage and a pressure storage space formed on the valve control surface between the valve control unit and the valve control membrane in correspondence with the inlet and the contact groove.

The material of the fluid channel network portion, the valve control portion, and the valve control layer is a mixture of polydimethylsiloxane (PDMS) and a curing agent. The mixing ratio of the polydimethylsiloxane (PDMS) and the curing agent is preferably 10: 1.

The contact groove is preferably hemispherical or curved.

Further, it is preferable that the pressure supplied to the contact groove position through the valve control portion is pneumatic or hydraulic pressure supplied by a pneumatic actuator or a hydraulic actuator.

According to the multi-way control valve of the pressure gain control type of the present invention, the structure of the three-layer PDMS material including the fluid channel network portion and the valve control portion, The manufacturing process can be simplified and the manufacturing cost can be reduced.

In addition, according to the difference in pressure supplied by the valve control unit, the fluid can be discharged individually or simultaneously through a plurality of outflow ports.

In addition, the microvalve of the present invention has high reproducibility and facilitates accessibility of a novice user, contributing to popularization of the development of a fluid logic device, and can be manufactured by only a general replica molding and a joining process.

Therefore, the present invention can be effectively applied to valves which are intended to simultaneously or sequentially discharge fluids in various directions.

FIG. 1 is an operational state diagram of a conventional multichannel fluidic logic device, in which FIG. 1 (a) is a fluid path closure, (b)
FIG. 2 is a longitudinal sectional view of a multi-directional control valve of a pressure gain control type according to an embodiment of the present invention, in which (a) is a fluid passage closing, (b)
3 is a plan view of a multi-way control valve of a pressure gain control type according to an embodiment of the present invention.
FIG. 4 is an internal perspective view of a multi-directional control valve of a pressure gain control type according to another embodiment of the present invention,
FIG. 5 is a diagram showing the configuration of a multi-directional control valve of the pressure gain control type according to the present invention,
FIG. 6 is a flow chart of a valve control portion of a multi-directional control valve of a pressure gain control type according to the present invention,
FIG. 7 is a flowchart showing the entire manufacturing process of the multi-directional control valve of the pressure gain control type according to the present invention.
FIG. 8 is a photograph of a multi-directional control valve of the pressure gain control system according to the present invention, wherein (a) is a photograph of a valve portion, and (b)
FIG. 9 is a cross-sectional photograph of a multi-directional control valve of the pressure gain control type according to the present invention, wherein (a) is a cross-sectional photograph of the entire valve structure, (b)
10 is a device for testing characteristics of a valve operation by applying a pneumatic drive system to a multi-way control valve of a pressure gain control system according to the present invention
Figure 11 is a test picture of the operating characteristics of the pressure gain-controlled multi-directional control valve in accordance with the present invention, (a) is Pv = OFF, (b) is Pv = P Low, (c) is Pv = P High
12 is a graph showing the flow rates generated in the two outflow portions of the multi-directional control valve of the pressure gain control type according to the present invention
13 is a graph showing the flow characteristics according to pressure in the outlet of the multi-way control valve of the pressure gain control type according to the present invention

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of a multi-directional control valve of a pressure gain control type according to the present invention will be described in detail with reference to the accompanying drawings. It is to be understood that the present invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, It is provided to inform.

Fig. 2 is a longitudinal sectional view of a multi-directional control valve of a pressure gain control type according to an embodiment of the present invention. Fig. 2 (a) shows a fluid passage closing, FIG. 2 is a plan view of a multi-way control valve of a pressure gain control type according to an embodiment.

As shown in FIGS. 2 and 3, the multi-way control valve of the pressure gain control type according to an embodiment configured as a concept of the fluid logic device proposed in the present invention includes a fluid channel network unit of a polydimethylsiloxane (PDMS) (1) and a valve control unit (2).

 A supply passage 5 for supplying a pneumatic pressure or a hydraulic pressure is formed in the fluid channel network part 1 so that one part of the supply passage 5 faces the contact groove 6 of the valve control part 2 described later.

The valve control unit 2 is formed in a two-layer structure in close contact with one surface of the fluid channel network unit 1 and has a contact groove 6 facing the supply passage 5 at an intermediate portion thereof. Is connected to one side of the corresponding contact groove 6 and the outflow portion 4 is connected to the other side. 3, the outflow portion 4 includes an outflow portion 4a connected to the upper portion of the contact groove 6 and an outflow portion 4b connected to the lower portion of the contact groove 6, So that the two outflow portions 4a and 4b are connected to the contact groove 6 in the up-and-down direction or in the vertical direction in the up-and-down direction and in the horizontal direction. In the above-described embodiment, the outflow portions 4a and 4b are connected to each other. However, if necessary, three or more outflow portions 4a and 4b may be connected. Here, the portion of the outflow portion 4a at the top is denoted by Q1 in the entire drawing, and the portion of the outflow portion 4b at the bottom is denoted by Q2 in the entire drawing.

In the operation state of the multi-directional control valve of the pressure gain control system according to the embodiment of the present invention, the pneumatic pressure is supplied to the pneumatic actuator through the supply passage 5 of the valve control unit 2 or the pressure of the hydraulic pressure to the hydraulic actuator A portion of the valve control portion 2 facing the contact groove 6 of the fluid channel network portion 1 expands and contacts the space of the contact groove 6, The portion 3 and the outflow portion 4 are closed, and the discharge of the fluid is stopped (Fig. 2 (a)). When the pneumatic or hydraulic pressure is removed, part of the valve control part 2 in the part of the expanded contact groove 6 is returned to the original position, and the inflow part 3 and the outflow part 4 are connected to each other through the contact groove 6 And the fluid is discharged (Fig. 2 (b)). 3, since the outflow portions 4a and 4b are connected to the upper and lower portions of the contact groove 6, when the outflow portions 4a and 4b are closed by the pressure supply of pneumatic or hydraulic pressure, Depending on the degree of expansion of the valve control section 2, the upper outlet 4a is closed first and the lower outlet 4b is closed thereafter.

FIG. 4 is an internal perspective view and partial configuration views of a multi-directional control valve of a pressure gain control type according to another embodiment of the present invention.

4, the multi-directional control valve of the pressure gain control type according to another embodiment of the present invention includes the control valve configuration of the above-described embodiment, that is, the fluid channel network unit 1 and the valve control unit 2 And the valve control film 7 is disposed between the two-layer structure to have a three-layer structure.

As described above, the fluid channel network 1 is connected to one inflow portion 3 and two outflow portions 4a and 4b from both sides with the contact groove 6 therebetween, (4a) and (4b) are also vertically or vertically connected to each other in the contact groove 6 at intervals.

The valve control film 7 is composed of a simple film made of PDMS material.

The supply passage 5 formed in the valve control part 2 is extended from one side to the other in the shape of the contact groove 6 at a portion facing the intermediate contact groove 6, And when a pneumatic pressure or a hydraulic pressure is supplied to the pressure storage space, the corresponding portion of the valve control membrane 7 facing the contact groove 6 is expanded.

The operation state of the multi-directional control valve according to another embodiment of the present invention is substantially the same as the operation state of the multi-directional control valve of the pressure gain control system of the above embodiment, A portion of the valve control membrane 7 is expanded by the pressure supplied through the pressure storage space connected to the pressure passage 5 of the inlet portion 4 and the outlet portion 4a 4b are opened and closed.

Here, as in the control valve of the embodiment described above, the fluid introduced through the inlet portion 3 is subjected to ON / OFF control of the pressure of pneumatic or hydraulic pressure applied through the supply passage 5 of the valve control portion 2, The flow of the fluid can be selectively induced or completely blocked when the fluid flows out through the outflow portions 4a and 4b depending on the size.

The contact groove 6 of the fluid channel network portion 1 in the multi-directional control valve of the pressure gain control type of the embodiment and the other embodiment is configured such that the valve control portion 2 or the valve control film 7 is expanded, It is preferable to configure it to have a hemispherical shape or a curved surface because it should be in contact with the groove 6.

The following Table 1 shows the valve drive of Fig. 2 or Fig.

Whether or not the flow rate of the two outflow portions according to the pressure state supplied to the valve control portion is true The valve control signal (P) Flow rate Q1 Q2 OFF (or 0 kPa) ON ON P Low OFF ON P High OFF OFF

According to Table 1, when the fluid is applied from the inflow portion in the state where the external compressed air for driving the valve is not applied, the fluid flows to the two outflow portions because the control valve of the present invention is in the form of an ordinary open valve. If the external compressed air is introduced, the outlet of the upper part of the contact groove in the form of a hemispherical fluid chamber is closed first due to the deformation of the valve control part or the valve control membrane, and the flow rate flows to the outlet part located at the lower part. If the valve control or valve control membrane is fully pressurized enough to contact the contact surface of the bottom of the contact groove, the valve will eventually block the fluid flowing to the lower outlet. That is, it is possible to selectively block the fluid flowing to the two fluid channels according to the state of the pressure provided to the control valve of the present invention by pneumatic pressure.

FIG. 5 shows a configuration and a connection sequence of a multi-directional control valve of a pressure gain control type according to the present invention.

5, each of the constituent elements of the present invention, that is, the fluid channel network portion 1 in which the contact groove 6 is formed, the valve control film 7, and the respective required PDMS layers corresponding to the valve control portion 2, And then joining them sequentially to complete the control valve of the present invention. The respective processes are shown in detail in Figs. 6 and 7. At this time, the fluid channel network unit 1 and the base layer 8 are separately manufactured, and the channel network unit 1, the valve control film 7, and the valve control unit 2 are sequentially formed on the base layer 8 However, the base layer 8 and the fluid channel network portion 1 may be formed as a body other than a separate body.

FIG. 6 is a flow chart of a process of manufacturing a valve control portion, a valve control film, and a base layer of a multi-directional control valve of a pressure gain control type according to the present invention. In the drawing, the left side is a flow chart of the manufacturing process of the valve control portion, and the right side is a flow chart of the manufacturing process of the valve control film and the base layer.

As shown in FIG. 6, a mixture of the main material and the hardener ratio of PDMS was mixed at a ratio of 10: 1, and the mixture was coated on the prepared SU-8 mold and cured at 75 ° C for 30 minutes to prepare a valve control section. Since the SU-8 mold is not required in the case of the valve control membrane and the base layer, the mixed PDMS is applied and cured on the glass substrate. In the case of producing a valve control film, the thickness of the film is adjusted by a spin coater, and the two parts are joined together using an atmospheric pressure plasma and a valve control part prepared before curing, and the two bonded structures are peeled off from the glass substrate. In the case of a base layer without any special function, it should be manufactured by simple application and curing process, and kept in a state where it can be cut off contact with air after peeling.

FIG. 7 is a flowchart showing the overall manufacturing process of the multi-directional control valve of the pressure gain control method according to the present invention, and is shown together with the manufacturing process of the fluid channel network portion.

As shown in FIG. 9, PDMS mixed on the SU-8 mold is applied and cured to form a structure so as to have an upper fluid channel shape formed by the inlet portion, the contact groove and the outlet portion. The structure thus fabricated is bonded to the glass substrate by using atmospheric plasma to produce a thermal joint mold.

Subsequently, PDMS mixed on the SU-8 mold having a lower shape is applied, and then the previously prepared thermosetting mold is aligned using a microscope and cured on a heating plate. During the curing process of the liquid phase PDMS, air in the mold cavity is swollen and swollen like a balloon, and the reverse phase of this shape is transferred to the liquid phase PDMS coated on the SU-8. According to the manufacturing experience of the control valve of the present invention, if the operation is performed at 150 degrees for 30 minutes, the film of the hot-air pressure mold is sufficiently swollen and the reverse phase is sufficiently transferred. If the process is performed at a somewhat lower temperature and less time, the transfer and curing are not sufficiently performed.

After curing, natural cooling is performed, and the fluid channel network portion made from the hot press mold removal and the lower SU-8 mold structure is separated. After the separation, the base plate is bonded to the base layer, and finally the valve control part and the valve control film, which are finally manufactured, are jointed to each other to join together to complete the production of the control valve of the present invention.

FIG. 8 is a photograph of a multi-way control valve of the pressure gain control type according to the present invention, wherein (a) is a photograph of a valve portion, (b) is an enlarged view of a valve region, Sectional view of the multi-directional control valve, wherein (a) is a cross-sectional view of the entire valve structure, and (b) is a photograph of the upper inlet region of the fluid channel network portion. 8 and 9 illustrate the shape and internal structure of the control valve of the present invention manufactured through the above-described processes. 8 to 9, the inlet port is connected to the inlet 3, the valve control port and the valve control channel are connected to the pressure channel 5 of the valve control unit 2, the valve chamber is connected to the fluid channel network unit 1, The contact area corresponds to the bottom surface of the contact groove 6 and the valve diaphragm corresponds to the valve control film 7 (refer to FIGS. 1 to 5) .

The thicknesses and sizes of the respective main components of the control valve according to the present invention are as shown in Table 2 below.

The thickness and size of the main components of the control valve of the present invention manufactured division Thickness and height (measured) Diameter (2D mask placement) Valve control section 61.538 탆 1000 탆 Valve control membrane 51.282 탆 1000 탆 Fluid channel network 148.718 탆 700 탆 Contact area 26.923 탆 300 탆

Although it is well known that the thickness and size of each component of the control valve of the present invention is a microvalve for controlling the minute flow of the fluid, the concept of the present invention is not limited to the microvalve.

Next, a driving test for controlling the flow of the valve using the multi-way control valve of the pressure gain control type according to the present invention is described.

The operation characteristics shown in FIG. 11 were confirmed using the operation characteristic test apparatus shown in FIG. 10 by visualizing the operation characteristics, and it was confirmed that the results are the same as the results predicted in Table 1 above. That is, by using the Labview program and the DAQ, the external compressed air is controlled by the electromagnetic valve to generate the pneumatic signal necessary for driving the control valve of the present invention. In case of the flow rate, a hydraulic pressure was generated to inject the flow rate into the fluid channel network portion of the control valve of the present invention. The generated flow rate was measured by a flow rate sensor, and the operational characteristics of the valve were used to acquire moving image information by a digital microscope .

In the control valve of the present invention, fluid resistance and valve operating characteristics of a fluid channel composed of an inlet and an outlet are tested. 12 is a graph showing the flow rates of the two outlet portions of the control valve by using the head pressure in a state where the control valve of the present invention is not driven. As a result of calculating the ratio of the fluid resistance from the pressure (dP) and the flow rate (dQ) information, it was found that the fluid resistance of the outflow portion Q1 of the upper channel was 4.1 times larger than the fluid resistance of the lower channel outflow portion Q2 .

13 shows the flow characteristics according to the pressure during driving of the control valve of the present invention. When P Low (= 33 kPa) and P High (= 73 kPa) were sequentially applied, the changes in the flow rates were 6.8 and 21.1 μl / min, respectively. Considering the results of Figure 12, there was a flow rate difference caused by P Low found to be similar to the flow characteristics of the outlet (Q1) of the upper channel, the outlet (Q1) of the upper channel when therefrom is P Low and P High , it can be confirmed that all outflows Q2 of the upper and lower channels are closed.

As described above, the multi-way control valve of the pressure gain control type according to the present invention has been described with reference to the drawings. However, the present invention is not limited to the embodiments and the drawings disclosed herein, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention.

1: fluid channel network part 2: valve control part
3: inflow section 4, 4a, 4b:
5: feed passage 6: contact groove
7: valve control membrane 8: base layer

Claims (8)

A fluid channel network part having an inlet part connected to one side of the contact groove formed in the middle and connected to the other side with at least two outlet parts spaced apart,
And a plurality of fluid passages through at least two of the outflow ports, the plurality of fluid passages being disposed on one side of the fluid channel network part, the fluid channel network parts being deformed into a shape of the contact grooves by a pressure supplied to a position of the contact grooves through a supply passage, And a valve control unit for individually or simultaneously controlling the valve control unit and the multi-directional control valve. The method according to claim 1,
Wherein the fluid channel network is connected to the other side of the contact groove in a vertically spaced relationship or spaced apart in the vertical and horizontal directions. The method according to claim 1,
And a valve control film disposed between the fluid channel network portion and the valve control portion so that the valve control film is deformed into a shape of the contact groove by the pressure supplied to the position of the contact groove through the valve control portion, A multi-way control valve with pressure gain control. The method of claim 3,
Further comprising a pressure passage formed in the valve control surface between the valve control portion and the valve control membrane in correspondence with the inlet portion and the contact groove, and a pressure storage space. The method of claim 3,
Wherein the material of the fluid channel network portion, the valve control portion, and the valve control layer is a mixture of polydimethylsiloxane (PDMS) and a curing agent. 6. The method of claim 5,
Wherein the mixing ratio of the polydimethylsiloxane (PDMS) to the curing agent is 10: 1. 7. The method according to any one of claims 1 to 6,
Wherein the contact groove has a hemispherical shape or a curved shape. 7. The method according to any one of claims 1 to 6,
Wherein the pressure supplied to the contact groove through the valve control unit is pneumatic or hydraulic pressure supplied by a pneumatic actuator or a hydraulic actuator.
KR1020150123967A 2015-09-02 2015-09-02 Pressure-gain controlled multi-way control valve KR101829021B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102033385B1 (en) * 2018-04-11 2019-10-18 인제대학교 산학협력단 Micro Particle Concentrator of Pneumatically Driven
CN111616032A (en) * 2020-05-28 2020-09-04 郑州轻工业大学 Intelligent trace irrigation device utilizing membrane valve to control water

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100768443B1 (en) 2005-12-23 2007-10-22 주식회사 한국 종합엔지니어링 Diaphragm type control valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100768443B1 (en) 2005-12-23 2007-10-22 주식회사 한국 종합엔지니어링 Diaphragm type control valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102033385B1 (en) * 2018-04-11 2019-10-18 인제대학교 산학협력단 Micro Particle Concentrator of Pneumatically Driven
CN111616032A (en) * 2020-05-28 2020-09-04 郑州轻工业大学 Intelligent trace irrigation device utilizing membrane valve to control water

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