KR20170027000A - Image analysis device included high speed and precision method - Google Patents

Image analysis device included high speed and precision method Download PDF

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Publication number
KR20170027000A
KR20170027000A KR1020150123358A KR20150123358A KR20170027000A KR 20170027000 A KR20170027000 A KR 20170027000A KR 1020150123358 A KR1020150123358 A KR 1020150123358A KR 20150123358 A KR20150123358 A KR 20150123358A KR 20170027000 A KR20170027000 A KR 20170027000A
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KR
South Korea
Prior art keywords
image analysis
camera
magnification
low
analysis unit
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Application number
KR1020150123358A
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Korean (ko)
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이석준
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이석준
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Priority to KR1020150123358A priority Critical patent/KR20170027000A/en
Publication of KR20170027000A publication Critical patent/KR20170027000A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/10Scanning

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The present invention relates to a device and a method to analyze an image, capable of more quickly and precisely analyze an image. The image analysis device comprises: a low magnification image analysis part including low magnification object lenses, an operating part moving the low magnification object lenses, a substrate on which a subject is placed, an operating part moving the substrate in X and Y axes, a lighting part, and a line scan camera; a high magnification image analysis part including high magnification object lenses, an operating part operating the high magnification object lenses, a lighting part, and an area (CCD or CMOS) camera; and a control part controlling a movement of the substrate in accordance with a position on X and Y planes controlling an operating motor and an optical part, controlling lighting, and controlling data signal emitted from the camera. As such, the present invention is capable of enabling high speed and high precision.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0002] The present invention relates to a high-

The present invention relates to an image analysis apparatus, and more particularly, to an image analysis apparatus that includes a line scan module in an image analysis apparatus for observing a high magnification image at a point to be observed after an image analysis of a target object using a low- The present invention relates to an apparatus and a method for improving the performance of a high-speed and high-precision image analysis using a low-magnification image analysis unit.

An ordinary image analyzer forms an image of an object with an area camera (CCD camera, CMOS camera, etc.) using a low magnification optical system, analyzes the low magnification image, and grasps the basic characteristics and position of the object. The position information is used to move to the object position with a high magnification area camera, and the image is analyzed again with precision. In order to analyze an image of a target object with an area camera (CCD camera, CMOS camera, etc.) using a low magnification optical system, the image of the region to be analyzed is taken while moving the position as shown in the figure, . We will improve the structure and speed by using low-magnification optical system and area camera when the operation speed of image analyzer is desperately needed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems and has the following problems to be solved.

The present invention relates to an image analyzing apparatus for analyzing an image, and an analysis time is increased according to a transferring method and a scanning method of a material to be inspected. In order to minimize the analysis time, And a method thereof.

In order to solve the above problems, according to one embodiment of the present invention,

And a driving unit for moving the objective lenses at low magnification and a driving unit for moving the objective lenses at low magnification, comprising a substrate on which an object to be analyzed is mounted and a driving unit for moving the substrate in X and Y axes, There is. A high magnification objective lens and a driving unit for driving the high magnification objective lenses, and a high magnification image analysis unit including an illumination unit and an area (CCD or CMOS Camera) camera. And a control unit for controlling the substrate to move to the corresponding position according to the position on the X and Y planes, controlling the optical unit and the driving motor, controlling the illumination, and controlling the data signal from the camera. Is provided.

According to the image analyzing apparatus of the present invention as described above, the following effects can be obtained.

First, if a low-magnification image analyzing unit including a line scan module is used, the amount of scanning at one time increases relative to that of the conventional camera, so that the image can be implemented more precisely.

Second, the low-power image analysis unit including the line scan module analyzes the entire substrate area because the sensor is formed in a line shape, so that the image can be analyzed at a high speed regardless of the shape, compared with the conventional camera .

For example, image analysis equipment used in existing medical applications can achieve a reduction of 43 seconds at low magnification and 50 seconds at high magnification, which can be reduced to less than about 10 seconds.

Third, when the image analyzed in the low-magnification image analysis part including the line scan module is transferred to the high-magnification objective lens, a new sample is supplied to the low magnification image analysis part including the line scan module, It is possible to exert an effect of minimizing the size of the image.

1 illustrates a conventional image analysis apparatus;
2 is a schematic view of a front view of the configuration of an image analysis apparatus according to an embodiment of the present invention;
3 schematically illustrates aspects of the configuration of an image analysis apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic view illustrating an image analyzing apparatus having a high magnification image analyzing unit using left and right based on a driving unit such as a low magnification image analyzing unit using a line scan camera according to an embodiment of the present invention;
FIG. 5 schematically shows an image analysis apparatus in which a high magnification image analysis unit, which is based on a driving unit such as one low magnification image analysis unit using a line scan camera, is mounted in one direction;
FIG. 6 is a schematic view illustrating an image analysis apparatus having a low-magnification image analyzing unit using a line scan camera and a high magnification image analyzing unit using a driving unit independent from the high-magnification image analyzing unit;
FIG. 7 is a schematic view illustrating an image analysis apparatus having a high-magnification image analyzing unit, which is based on a driving unit such as one low-magnification image analyzing unit using a line scan camera, and which is composed of symmetry between north and south;
8 is a plan view of an image analysis apparatus according to an embodiment of the present invention;

Preferred embodiments of the present invention in which the object of the present invention can be specifically realized will be described with reference to the accompanying drawings. In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and further description thereof will be omitted.

2, an image analyzer according to an exemplary embodiment of the present invention includes an area camera 100, an objective lens 120, a substrate 140, an illumination unit 160, a controller 180, (200). The line scan module 200 is a component for scanning the substrate 140 at a low power. As shown in FIG. 2, the substrate 140 may move the X axis and the Y axis. As shown in FIG. 4, the high-magnification objective lens 120 analyzer can be configured in various directions such as up / down / left / right based on the line scan module 200. The substrate 140 scanned over the entire area in the line scan module 200 is moved to the analysis unit of the high magnification objective lens 120. The contents scanned in the entire area in the low-magnification image analysis unit including the line scan module 200 are inputted as a signal to the control unit 180. The control unit 180 again sends a signal to the area camera 100 and further analyzes the portion to be analyzed by the high magnification objective lens 120. [

At this time, when the substrate 140, which has scanned the entire area in the low magnification image analysis unit including the line scan module 200, moves to the analysis unit of the high magnification objective lens 120, the new substrate is moved to the low magnification image analysis unit .

It will be apparent to those skilled in the art that the present invention is not limited to the above-described embodiment, and that the present invention is not limited to the above description, but may be modified within the scope of the appended claims and equivalents thereof have.

100: Area Camera
120: Low magnification objective lens
140: substrate
160:
180:
200: line scan module
220: High magnification objective lens

Claims (6)

A low magnification image analyzer including a low magnification objective lens, a driving unit for moving the low magnification objective lenses, a substrate on which an object to be analyzed is mounted, a driving unit for moving the substrate in X and Y axes,
A high magnification objective lens, a driving unit for driving the high magnification objective lens, an illumination unit and an area (CCD or CMOS Camera) camera,
A controller for controlling the substrate to move to the corresponding position according to the position on the X and Y planes, controlling the optical unit and the driving motor, controlling the illumination, and controlling the data signal from the camera,
An image analyzing device
The method according to claim 1,
A low magnification image analysis unit using a line scan camera, and an image analysis unit composed of a high magnification image analysis unit using a driving unit such as one
The method according to claim 1,
Low-magnification image analysis unit using line scan camera Image analysis unit consisting of left and right high magnification image analysis unit based on driving unit such as one
The method according to claim 1,
Low-magnification image analysis unit using a line scan camera, and high-magnification image analysis unit based on a driving unit such as one.
The method according to claim 1,
A low magnification image analysis unit using a line scan camera, and a high magnification image analysis unit based on a driving unit such as one,
The method according to claim 1,
Low-magnification image analysis unit using line scan camera and high-magnification image analysis unit based on independent driving unit
KR1020150123358A 2015-09-01 2015-09-01 Image analysis device included high speed and precision method KR20170027000A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150123358A KR20170027000A (en) 2015-09-01 2015-09-01 Image analysis device included high speed and precision method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150123358A KR20170027000A (en) 2015-09-01 2015-09-01 Image analysis device included high speed and precision method

Publications (1)

Publication Number Publication Date
KR20170027000A true KR20170027000A (en) 2017-03-09

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KR (1) KR20170027000A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210085106A (en) * 2019-12-30 2021-07-08 세메스 주식회사 Method for correcting error of apparatus for discharging droplet
KR20220034279A (en) * 2020-09-10 2022-03-18 세메스 주식회사 Apparatus for treating substrate, inkjet apparatus and maintenance method
KR20230011592A (en) * 2021-07-14 2023-01-25 주식회사 야스 Substrate Inspetion System with Hybride Optical unit
KR20230160951A (en) * 2018-11-09 2023-11-24 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 Direct-current relay resistant to short-circuit current

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230160951A (en) * 2018-11-09 2023-11-24 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 Direct-current relay resistant to short-circuit current
KR20230160952A (en) * 2018-11-09 2023-11-24 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 Direct-current relay resistant to short-circuit current
KR20230160954A (en) * 2018-11-09 2023-11-24 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 Direct-current relay resistant to short-circuit current
KR20230160953A (en) * 2018-11-09 2023-11-24 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 Direct-current relay resistant to short-circuit current
KR20210085106A (en) * 2019-12-30 2021-07-08 세메스 주식회사 Method for correcting error of apparatus for discharging droplet
KR20220034279A (en) * 2020-09-10 2022-03-18 세메스 주식회사 Apparatus for treating substrate, inkjet apparatus and maintenance method
KR20230011592A (en) * 2021-07-14 2023-01-25 주식회사 야스 Substrate Inspetion System with Hybride Optical unit

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