KR20170027000A - Image analysis device included high speed and precision method - Google Patents
Image analysis device included high speed and precision method Download PDFInfo
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- KR20170027000A KR20170027000A KR1020150123358A KR20150123358A KR20170027000A KR 20170027000 A KR20170027000 A KR 20170027000A KR 1020150123358 A KR1020150123358 A KR 1020150123358A KR 20150123358 A KR20150123358 A KR 20150123358A KR 20170027000 A KR20170027000 A KR 20170027000A
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- image analysis
- camera
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- low
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
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- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Quality & Reliability (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
The present invention relates to an image analysis apparatus, and more particularly, to an image analysis apparatus that includes a line scan module in an image analysis apparatus for observing a high magnification image at a point to be observed after an image analysis of a target object using a low- The present invention relates to an apparatus and a method for improving the performance of a high-speed and high-precision image analysis using a low-magnification image analysis unit.
An ordinary image analyzer forms an image of an object with an area camera (CCD camera, CMOS camera, etc.) using a low magnification optical system, analyzes the low magnification image, and grasps the basic characteristics and position of the object. The position information is used to move to the object position with a high magnification area camera, and the image is analyzed again with precision. In order to analyze an image of a target object with an area camera (CCD camera, CMOS camera, etc.) using a low magnification optical system, the image of the region to be analyzed is taken while moving the position as shown in the figure, . We will improve the structure and speed by using low-magnification optical system and area camera when the operation speed of image analyzer is desperately needed.
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems and has the following problems to be solved.
The present invention relates to an image analyzing apparatus for analyzing an image, and an analysis time is increased according to a transferring method and a scanning method of a material to be inspected. In order to minimize the analysis time, And a method thereof.
In order to solve the above problems, according to one embodiment of the present invention,
And a driving unit for moving the objective lenses at low magnification and a driving unit for moving the objective lenses at low magnification, comprising a substrate on which an object to be analyzed is mounted and a driving unit for moving the substrate in X and Y axes, There is. A high magnification objective lens and a driving unit for driving the high magnification objective lenses, and a high magnification image analysis unit including an illumination unit and an area (CCD or CMOS Camera) camera. And a control unit for controlling the substrate to move to the corresponding position according to the position on the X and Y planes, controlling the optical unit and the driving motor, controlling the illumination, and controlling the data signal from the camera. Is provided.
According to the image analyzing apparatus of the present invention as described above, the following effects can be obtained.
First, if a low-magnification image analyzing unit including a line scan module is used, the amount of scanning at one time increases relative to that of the conventional camera, so that the image can be implemented more precisely.
Second, the low-power image analysis unit including the line scan module analyzes the entire substrate area because the sensor is formed in a line shape, so that the image can be analyzed at a high speed regardless of the shape, compared with the conventional camera .
For example, image analysis equipment used in existing medical applications can achieve a reduction of 43 seconds at low magnification and 50 seconds at high magnification, which can be reduced to less than about 10 seconds.
Third, when the image analyzed in the low-magnification image analysis part including the line scan module is transferred to the high-magnification objective lens, a new sample is supplied to the low magnification image analysis part including the line scan module, It is possible to exert an effect of minimizing the size of the image.
1 illustrates a conventional image analysis apparatus;
2 is a schematic view of a front view of the configuration of an image analysis apparatus according to an embodiment of the present invention;
3 schematically illustrates aspects of the configuration of an image analysis apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic view illustrating an image analyzing apparatus having a high magnification image analyzing unit using left and right based on a driving unit such as a low magnification image analyzing unit using a line scan camera according to an embodiment of the present invention;
FIG. 5 schematically shows an image analysis apparatus in which a high magnification image analysis unit, which is based on a driving unit such as one low magnification image analysis unit using a line scan camera, is mounted in one direction;
FIG. 6 is a schematic view illustrating an image analysis apparatus having a low-magnification image analyzing unit using a line scan camera and a high magnification image analyzing unit using a driving unit independent from the high-magnification image analyzing unit;
FIG. 7 is a schematic view illustrating an image analysis apparatus having a high-magnification image analyzing unit, which is based on a driving unit such as one low-magnification image analyzing unit using a line scan camera, and which is composed of symmetry between north and south;
8 is a plan view of an image analysis apparatus according to an embodiment of the present invention;
Preferred embodiments of the present invention in which the object of the present invention can be specifically realized will be described with reference to the accompanying drawings. In describing the present embodiment, the same designations and the same reference numerals are used for the same components, and further description thereof will be omitted.
2, an image analyzer according to an exemplary embodiment of the present invention includes an
At this time, when the
It will be apparent to those skilled in the art that the present invention is not limited to the above-described embodiment, and that the present invention is not limited to the above description, but may be modified within the scope of the appended claims and equivalents thereof have.
100: Area Camera
120: Low magnification objective lens
140: substrate
160:
180:
200: line scan module
220: High magnification objective lens
Claims (6)
A high magnification objective lens, a driving unit for driving the high magnification objective lens, an illumination unit and an area (CCD or CMOS Camera) camera,
A controller for controlling the substrate to move to the corresponding position according to the position on the X and Y planes, controlling the optical unit and the driving motor, controlling the illumination, and controlling the data signal from the camera,
An image analyzing device
A low magnification image analysis unit using a line scan camera, and an image analysis unit composed of a high magnification image analysis unit using a driving unit such as one
Low-magnification image analysis unit using line scan camera Image analysis unit consisting of left and right high magnification image analysis unit based on driving unit such as one
Low-magnification image analysis unit using a line scan camera, and high-magnification image analysis unit based on a driving unit such as one.
A low magnification image analysis unit using a line scan camera, and a high magnification image analysis unit based on a driving unit such as one,
Low-magnification image analysis unit using line scan camera and high-magnification image analysis unit based on independent driving unit
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KR1020150123358A KR20170027000A (en) | 2015-09-01 | 2015-09-01 | Image analysis device included high speed and precision method |
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KR1020150123358A KR20170027000A (en) | 2015-09-01 | 2015-09-01 | Image analysis device included high speed and precision method |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210085106A (en) * | 2019-12-30 | 2021-07-08 | 세메스 주식회사 | Method for correcting error of apparatus for discharging droplet |
KR20220034279A (en) * | 2020-09-10 | 2022-03-18 | 세메스 주식회사 | Apparatus for treating substrate, inkjet apparatus and maintenance method |
KR20230011592A (en) * | 2021-07-14 | 2023-01-25 | 주식회사 야스 | Substrate Inspetion System with Hybride Optical unit |
KR20230160951A (en) * | 2018-11-09 | 2023-11-24 | 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 | Direct-current relay resistant to short-circuit current |
-
2015
- 2015-09-01 KR KR1020150123358A patent/KR20170027000A/en not_active Application Discontinuation
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230160951A (en) * | 2018-11-09 | 2023-11-24 | 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 | Direct-current relay resistant to short-circuit current |
KR20230160952A (en) * | 2018-11-09 | 2023-11-24 | 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 | Direct-current relay resistant to short-circuit current |
KR20230160954A (en) * | 2018-11-09 | 2023-11-24 | 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 | Direct-current relay resistant to short-circuit current |
KR20230160953A (en) * | 2018-11-09 | 2023-11-24 | 샤먼 홍파 일렉트릭 파워 컨트롤즈 컴퍼니 리미티드 | Direct-current relay resistant to short-circuit current |
KR20210085106A (en) * | 2019-12-30 | 2021-07-08 | 세메스 주식회사 | Method for correcting error of apparatus for discharging droplet |
KR20220034279A (en) * | 2020-09-10 | 2022-03-18 | 세메스 주식회사 | Apparatus for treating substrate, inkjet apparatus and maintenance method |
KR20230011592A (en) * | 2021-07-14 | 2023-01-25 | 주식회사 야스 | Substrate Inspetion System with Hybride Optical unit |
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