KR20170021138A - Amplifier integrated leakage sensor - Google Patents

Amplifier integrated leakage sensor Download PDF

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Publication number
KR20170021138A
KR20170021138A KR1020150115570A KR20150115570A KR20170021138A KR 20170021138 A KR20170021138 A KR 20170021138A KR 1020150115570 A KR1020150115570 A KR 1020150115570A KR 20150115570 A KR20150115570 A KR 20150115570A KR 20170021138 A KR20170021138 A KR 20170021138A
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KR
South Korea
Prior art keywords
sensor
fixing
sensor unit
mounting surface
unit
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KR1020150115570A
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Korean (ko)
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KR101742558B1 (en
Inventor
이재희
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플로우닉스 주식회사
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

The present invention relates to a sensor comprising: a sensor layer having a base layer formed of a non-conductive material and a sensor layer formed by applying or printing a conductive material to the base layer according to a predetermined pattern; And a lid unit coupled to one end of the sensor unit for protecting the terminals of the sensor unit. Inside the lid unit, a power supply circuit for applying power to the sensor unit, an input / output circuit for inputting and outputting signals of the sensor unit, And a controller for determining whether or not to leak based on a signal of the input / output circuit. The present invention relates to an integrated-type leak detector for an integrated amplifier, and it is unnecessary to separately install an amplifier, And can be brought into close contact with each other.

Description

[0001] The present invention relates to an amplifier integrated leakage sensor,

The present invention relates to an amplifier-integrated leak detection sensor in which an amplifier and a sensor portion are integrally formed.

In general, many chemicals are used in the semiconductor manufacturing process. For example, a cleaning liquid used in a cleaning process after cutting and polishing the wafer, a photosensitive liquid used in the photosensitive process of the wafer, a developing solution used in the developing process of the wafer, an etching solution used in the wafer etching process, .

These chemicals are transported from inside and outside to the position where each process is performed through the transfer pipe (piping), and chemical substances may leak out of the transfer pipe due to defective or deteriorated transfer pipe. Leaked chemicals have an adverse effect on people and other devices or parts of the semiconductor manufacturing site. Therefore, it is necessary to detect leakage of the transfer pipe and take quick action.

Leak detection of a transfer tube is generally performed by placing positive (+) and negative (-) conductors side by side, placing a sorbent between these conductors, and then measuring the resistance change caused by the leaking chemical . The sensor using this method is called a normal line type leak detection sensor.

Here, the leakage detection method of a line-type leak detection sensor includes arranging a positive (+) wire and a negative (-) wire (or conductor) in a drain extended from a transfer pipe So that leakage is measured. An example of such a line-type leakage detection sensor is disclosed in Korean Patent Laid-Open Publication No. 10-2007-0005234.

On the other hand, there is an area type leak detection sensor in which the area subject to leak detection is wider than the line type leak detection sensor. In the area type sensing sensor, a plurality of (+) conductor lines and a pair of (-) conductor lines are arranged in a zigzag form, or a pair of (+) conductor lines and a (-) conductor line are arranged in a predetermined sensing area . An example of such an area type sensing sensor is disclosed in Japanese Utility Model Laid-Open Publication No. Hei 01-171340.

Here, the conventional leak detection sensors are connected to a separate amplifier having a power source, an input / output circuit, and a control unit to operate as a sensor. However, the amplifier connected to the sensor separately from the sensor requires a separate installation space from the sensor installation space.

In addition, conventional leak detection sensors can be placed on the floor surface where leakage is expected, in which case the sensors are placed in a separate drain housing or placed on the floor. However, conventional leak detecting apparatuses that are not separately fixed and disposed on the bottom surface may be displaced due to external force, and may not be in close contact with the bottom surface, so that leakage of the fluid flowing from the side surface may not be detected.

It is an object of the present invention to provide an amplifier-integrated leak sensor capable of easily fixing, disassembling, and coming into close contact with a mounting surface without the need to separately install an amplifier.

According to an aspect of the present invention, there is provided a semiconductor device comprising: a sensor unit having a base layer formed of a non-conductive material and a sensor layer formed by applying or printing a conductive material to the base layer according to a predetermined pattern; And a lid unit coupled to one end of the sensor unit for protecting the terminals of the sensor unit. Inside the lid unit, a power supply circuit for applying power to the sensor unit, an input / output circuit for inputting and outputting signals of the sensor unit, And a control unit for determining whether or not to leak the signal based on the signal of the input / output circuit.

Preferably, the apparatus further comprises first fixing means for fixing the sensor portion to the mounting surface, wherein the first fixing means is fixed on the mounting surface by an adhesive or double-sided tape on one side, A fixing member protruding from the upper portion of the sensor unit through the through hole; And a fastening member coupled to the fixing member at an upper portion of the sensor unit and pressing the sensor unit toward the mounting surface.

Here, the fixing member may include: a first fixing part inserted into the through hole of the sensor unit and fixed to the mounting surface using an adhesive or a double-sided tape; And a second fixing part formed to have a smaller width than the through hole and the first fixing part and protruding upward from the first fixing part and having a threaded part on the outer peripheral surface and integrally formed with the first fixing part And the fastening member includes a fastening portion having a threaded portion formed on an inner circumferential surface thereof so as to be screwed with the threaded portion of the second fixing portion; And a pressing portion extending radially outwardly and vertically downward from the fastening portion and pressing the sensor portion toward the mounting surface when the fastening portion and the second fastening portion are fastened.

Preferably, the pressing portion includes a plurality of insertion grooves spaced from each other in a circumferential direction at a bottom edge portion of the bottom surface portion; And a pressing piece which is installed inside the insertion groove so as to be slidable in a vertical direction and is supported by the elastic member.

In addition, the apparatus may further include second fixing means for fixing both ends of the sensor unit to the mounting surface to apply tension to the sensor unit, wherein the second fixing means is fixed to the mounting surface by an adhesive or double- A lower member; An upper member coupled to an upper portion of the lower member; And a fastening means for fastening the upper member, the sensor unit, and the lower member in a state where an end portion of the sensor unit is positioned between the upper member and the lower member.

The sensor layer may be divided into a plurality of regions on the base layer, and the plurality of regions may individually include input / output circuits so that the controller can determine a leakage position.

Preferably, the fixing unit further includes fixing means for fixing the sensor unit to the mounting surface, wherein the fixing unit is fixed to the mounting surface by an adhesive or double-sided tape on one side, and the through- A fixing member protruding upward from the sensor unit; And a fastening member coupled to the fixing member at an upper portion of the sensor portion and pressing the sensor portion toward the mounting surface, wherein the fixing means is disposed between a plurality of regions of the sensor layer.

According to the present invention, since the amplifier including the power supply circuit, the input / output circuit, and the control unit is incorporated in the lid unit, it is not necessary to provide the amplifier at a position separate from the sensor unit.

Further, according to the present invention, it is possible to easily install and disassemble the sensor portion by using the first fixing means, and to reliably detect the leakage of the fluid flowing laterally on the mounting surface.

Further, according to the present invention, by applying tension to the sensor portion using the second fixing means, the sensor portion can be brought into close contact with the mounting surface.

Also, according to the present invention, the sensor portion can be partitioned into a plurality of regions to determine an accurate leakage position.

FIG. 1 is a perspective view illustrating an amplifier-integrated leak sensor according to the present invention,
FIG. 2 is an exploded perspective view showing a first fixing means of the amplifier-integrated leak sensor according to the present invention,
FIG. 3 is an exploded perspective view of the first fixing means of the amplifier-integrated leak detecting sensor according to the present invention,
FIG. 4 is an exploded perspective view showing a second fixing means of the amplifier-integrated leak sensor according to the present invention,
5 is a perspective view showing another example of an amplifier-integrated leak sensor according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of an integrated-amplifier type leak detection sensor according to the present invention will be described with reference to the accompanying drawings. In the following description of the present invention, it is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the technical scope of the present invention. Will be.

Referring to FIG. 1, an integrated type leak detector of an integrated type according to the present invention includes a sensor unit 100 for detecting leakage by contact with a leakage liquid, and a sensor unit 100 coupled to one end of the sensor unit 100, And a cover unit 200 for protecting terminals of the sensor unit 100. Elements constituting an amplifier are built in the cover unit 200 so that the sensor unit 100 and the amplifier have.

Specifically, the sensor unit 100 is a sensor having a predetermined area including a base layer having corrosion resistance to chemicals and a sensor layer having corrosion resistance to chemicals and formed by applying or printing a conductive material on the upper surface of the base layer. The base layer and the sensor layer are formed by firing at a predetermined temperature for a predetermined time. The sensor unit 100 includes a through hole 110 into which the first fixing means 300, which will be described later, can be inserted.

The lid 200 is a housing for protecting electronic components such as a current application terminal, input and output signal terminals of the sensor unit 100 and is coupled to one end of the sensor unit 100. Inside the lid unit 200, a power source circuit for applying power to the sensor layer of the sensor unit 100, an input / output circuit for inputting and outputting signals of the sensor layer of the sensor unit 100, And a control unit for judging whether or not a leak occurs based on the signal of the circuit. That is, an amplifier is built in the lid part 200, and the sensor part 100 and the amplifier are integrally formed.

According to such an amplifier-integrated leak sensor, since the amplifier including the power supply circuit, the input / output circuit, and the control unit is built in the lid unit 200, it is not necessary to install the amplifier in a position separate from the sensor unit 100 .

2 to 3, the amplifier-integrated leak sensor according to the present invention further includes a first fixing means 300 for fixing the sensor unit 100 to the mounting surface 10. The first fixing means 300 not only fixes the sensor unit 100 to the mounting surface 10 but also functions to bring the sensor unit 100 into close contact with the mounting surface 10.

Specifically, the first fixing means 300 includes a fixing member 310 and a fastening member 320. One side of the fixing member 310 is fixed to the mounting surface 10 on which the sensor unit 100 is disposed by an adhesive or an adhesive means such as double-sided tape or the like. The other side of the fixing member 310 penetrates the through hole 110 of the sensor unit 100 and protrudes to the upper portion of the sensor unit 100. The fastening member 320 is engaged with the fixing member 320 at the upper portion of the sensor unit 100 to press the sensor unit 100 toward the mounting surface 10 so that the sensor unit 100 is pressed against the mounting surface 10, .

The fixing member 310 includes a disk-shaped first fixing part 311 inserted into the through hole 110 of the sensor part 100 and a second fixing part 311 protruding upward from the first fixing part 311 312). The first fixing part 311 may be fixed on the mounting surface 10 on which the sensor part 100 is disposed by applying an adhesive to the bottom surface or by attaching a double-sided tape. At this time, the first fixing part 311 is formed to be almost the same as the size of the through hole 110, and little gap is formed between the first fixing part 311 and the sensor part 100 when inserted into the through hole 110. The second fixing part 312 is provided with a smaller width than the through hole 110 and the first fixing part 311 and protrudes upward from the first fixing part 311 and is integrally formed with the first fixing part 311 . The second fixing portion 312 is not specifically shown in the figure but has a threaded portion on the outer peripheral surface.

The fastening member 320 includes a fastening portion 321 to be coupled with the second fixing portion 312 and a pressing portion 322 to press the sensor portion 100 against the mounting surface 10 to closely contact the mounting surface. The fastening portion 321 is a disc-shaped member and has a fastening groove 321a into which the second fastening portion 312 is inserted. Although not specifically shown in the drawing, a threaded portion is formed on the inner circumferential surface of the fastening groove 321a do. Accordingly, the second fixing portion 312 and the coupling portion 321 are screwed together, so that the fixing member 310 and the coupling member 320 are engaged. The pressing portion 322 is a member extending vertically downward from the rim of the fastening portion 321 and is disposed radially outward of the fastening portion 321. The pressing portion 322 is formed to have a width larger than that of the first fixing portion 311 and the through hole 110 so that the fixing member 310 is accommodated in the pressing portion 322 at the time of fastening. The pressing portion 322 contacts the upper surface of the sensor portion 100 when the fastening portion 321 and the second fixing portion 312 are fastened to press the sensor portion 100 toward the mounting surface 10, So that the portion 100 is brought into close contact with the mounting surface 10.

As described above, according to the present invention, the sensor unit 100 is fixed on the mounting surface 10 by coupling the first fixing unit 300, that is, the fixing member 310 and the coupling member 320, The sensor unit 100 can be brought into close contact with the mounting surface 10 by rotating the fastening member 320 and tightening the pressing unit 322 toward the sensor unit 100. [ Therefore, it is easy to install and disassemble the sensor unit 100, and it is possible to reliably detect the leakage of the fluid flowing laterally on the mounting surface 10.

Alternatively, the fixing member 310 may be provided with a coupling protrusion (not shown) instead of a screw on the outer circumferential surface thereof, and the coupling member 320 may be provided on the inner peripheral surface of the coupling portion 321, (Not shown) may be provided. The fixing member 310 and the fastening member 320 can be coupled to each other by a snap fitting method by the coupling protrusion and the coupling groove.

The pressing portion 322 includes a plurality of insertion grooves 322a spaced apart from each other in the circumferential direction at the bottom edge portion thereof and pressing pieces 322a slidable in the vertical direction within the insertion grooves 322a 322b. Here, the pressing pieces 322b are pin-shaped members and are elastically supported in a vertical direction by an elastic member (not shown) provided inside the insertion groove 322a.

With the configuration of the pressing portion 322, even when the mounting surface 10 on which the sensor portion 100 is disposed is not flat when the fastening member 320 is fastened to the fixing member 310, The sensor portion 322b can press the sensor portion 100 toward the mounting surface 10 at different heights by the elastic force of the elastic member. Accordingly, the sensor unit 100 can be disposed in close contact with the mounting surface 10 even when the sensor unit 100 is disposed on the mounting surface 10 which is not flat.

Referring to FIG. 4, the amplifier-integrated leakage detection sensor according to the present invention has a structure in which both ends of a sensor unit 100 are fixed on a mounting surface and tension is applied to the sensor unit 100 to stretch the sensor unit 100 The second fixing means 400 may be provided.

Specifically, the second fixing means 400 includes a lower member 410 fixed to the mounting surface 10, an upper member 420 coupled to the upper portion of the lower member 410, a lower member 410, 100 and a fastening means 430 for fastening the upper member 420. The lower member 410 is fixed to the mounting surface 10 by an adhesive or double-sided tape. The upper member 420 is coupled to the upper portion of the upper member 420 while the end of the sensor unit 100 is positioned between the upper member 420 and the lower member 410. At this time, the lid part 200 is received between the upper member 420 and the lower member 410 on the end side of the sensor part 100 provided with the lid part 200. The fastening means 430 may be a screw or a bolt for fastening the upper member 420, the sensor unit 100 (or the cover unit 200), and the lower member 410.

The sensor unit 100 is fixed to the mounting surface 10 in a state in which both ends of the sensor unit 100 are tightened and tensioned by using the second fixing unit 400. In this case, Tension can be applied to the sensor unit 100. [ Therefore, the sensor unit 100 is disposed on the mounting surface 10 in an expanded state, and in this state, the sensor unit 100 is brought into close contact with the mounting surface 10 by using the first fixing unit 300 .

Referring to FIG. 5, the sensor unit of the sensor unit 100 may be divided into a plurality of regions A, B, C, and D on the base layer, according to an embodiment of the present invention. A plurality of regions A, B, C, and D of the sensor layer are individually provided with input / output circuits. Accordingly, the control unit can detect an area of the plurality of areas A, B, C, and D of the sensor layer where the leakage is detected to determine an accurate leakage position.

The first fixing means 300 may be disposed on the base layer between the plurality of regions A, B, C, and D of the sensor layer to fix the sensor portion 100 to the mounting surface.

The embodiments of the present invention described above are merely illustrative of the technical idea of the present invention, and the scope of protection of the present invention should be interpreted according to the claims. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined by the appended claims. It should be interpreted that it is included in the scope of right.

Claims (7)

A sensor portion having a base layer formed of a non-conductive material and a sensor layer formed by applying or printing a conductive material to the base layer according to a predetermined pattern; And
And a cover unit coupled to one end of the sensor unit to protect the terminals of the sensor unit,
Inside the lid unit, a power supply circuit for applying power to the sensor unit, an input / output circuit for inputting and outputting signals of the sensor unit, and a control unit for determining leakage based on the signals of the input / The leak detector incorporates an integrated amplifier.
The method according to claim 1,
Further comprising first fixing means for fixing the sensor portion to the mounting surface,
A fixing member having one side fixed to the mounting surface by an adhesive or a double-sided tape and the other side protruding to the upper portion of the sensor portion through a through hole formed in the sensor portion; And
And a fastening member coupled to the fixing member at an upper portion of the sensor unit and pressing the sensor unit toward the mounting surface.
3. The method of claim 2,
Wherein:
A first fixing unit inserted into the through hole of the sensor unit and fixed to the mounting surface using an adhesive or a double-sided tape; And
And a second fixing part formed to have a smaller width than the through hole and the first fixing part and protruding upward from the first fixing part and having a screw part on the outer circumferential surface and integrally formed with the first fixing part ,
The fastening member
A fastening portion having a threaded portion formed on an inner circumferential surface thereof so as to be screwed with the threaded portion of the second fixing portion; And
And a pressing portion extending radially outwardly and vertically downwardly of the coupling portion and pressing the sensor portion toward the mounting surface when the coupling portion and the second fixing portion are engaged with each other.
The method of claim 3,
The pressing portion
A plurality of insertion grooves spaced apart from each other in a circumferential direction at a bottom edge portion; And
And a pressing piece that is slidable in a vertical direction inside the insertion groove and is supported by an elastic member.
The method according to claim 2 or 3,
And second fixing means for fixing both ends of the sensor portion to the mounting surface to apply tension to the sensor portion,
A lower member fixed to the mounting surface by an adhesive or a double-sided tape;
An upper member coupled to an upper portion of the lower member; And
And a fastening means for fastening the upper member, the sensor unit, and the lower member with the end of the sensor unit positioned between the upper member and the lower member.
The method according to claim 1,
Wherein the sensor layer is divided and arranged in a plurality of regions on the base layer and the plurality of regions are individually provided with input / output circuits so that the control portion can determine the leakage position. Detection sensor.
The method according to claim 6,
Further comprising fixing means for fixing the sensor portion to the mounting surface,
A fixing member having one side fixed to the mounting surface by an adhesive or a double-sided tape and the other side protruding to the upper portion of the sensor portion through a through hole formed in the sensor portion; And
And a fastening member coupled to the fixing member at an upper portion of the sensor unit and pressing the sensor unit toward the mounting surface,
Wherein the fixing means is disposed between a plurality of regions of the sensor layer.
KR1020150115570A 2015-08-17 2015-08-17 Amplifier integrated leakage sensor KR101742558B1 (en)

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KR101742558B1 KR101742558B1 (en) 2017-06-02

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102081261B1 (en) * 2019-11-04 2020-02-25 윤정희 Method and system for real time detecting leak of hazardous chemical material using ep network of enterprise
JPWO2019064331A1 (en) * 2017-09-26 2020-10-22 テルモ株式会社 Liquid detector

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005208018A (en) * 2004-01-26 2005-08-04 Asuzac Inc Rain and snow gage
KR101505439B1 (en) * 2014-06-26 2015-03-25 플로우닉스 주식회사 Leakage sensor and Manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019064331A1 (en) * 2017-09-26 2020-10-22 テルモ株式会社 Liquid detector
KR102081261B1 (en) * 2019-11-04 2020-02-25 윤정희 Method and system for real time detecting leak of hazardous chemical material using ep network of enterprise

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