KR20170013426A - Align apparatus for fabricating the oled and align method of using the same - Google Patents

Align apparatus for fabricating the oled and align method of using the same Download PDF

Info

Publication number
KR20170013426A
KR20170013426A KR1020150105591A KR20150105591A KR20170013426A KR 20170013426 A KR20170013426 A KR 20170013426A KR 1020150105591 A KR1020150105591 A KR 1020150105591A KR 20150105591 A KR20150105591 A KR 20150105591A KR 20170013426 A KR20170013426 A KR 20170013426A
Authority
KR
South Korea
Prior art keywords
substrate
mask
pusher
alignment
plate portion
Prior art date
Application number
KR1020150105591A
Other languages
Korean (ko)
Other versions
KR101757653B1 (en
Inventor
이명진
이재진
장정호
박희재
Original Assignee
에스엔유 프리시젼 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엔유 프리시젼 주식회사 filed Critical 에스엔유 프리시젼 주식회사
Priority to KR1020150105591A priority Critical patent/KR101757653B1/en
Publication of KR20170013426A publication Critical patent/KR20170013426A/en
Application granted granted Critical
Publication of KR101757653B1 publication Critical patent/KR101757653B1/en

Links

Images

Classifications

    • H01L51/56—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/682—Mask-wafer alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • H01L51/0012—
    • H01L2251/56—

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The present invention relates to an aligning apparatus for manufacturing an organic light emitting diode and an aligning method using the same. The aligning apparatus for manufacturing an organic light emitting diode according to the present invention can remarkably reduce the number of aligning operations by performing control to align a substrate on a mask while holding the mask and can prevent wrinkling of the substrate by bonding a cooling plate part while supporting one side of the substrate. The aligning apparatus for manufacturing an organic light emitting diode includes a base on which the mask is fixed, a receiving unit which is prepared to receive the edge bottom part of the substrate, a measuring unit which measures the alignment state of the mask, and a control unit to align the substrate on the mask.

Description

TECHNICAL FIELD [0001] The present invention relates to an alignment device for manufacturing an organic electroluminescent device, and an alignment method using the same. BACKGROUND ART [0002]

The present invention relates to an alignment device for manufacturing an organic electroluminescent device and an aligning method using the same, and more particularly, to a method for aligning a substrate and a mask by aligning and aligning a substrate and a mask, The present invention relates to an alignment device for manufacturing an organic electroluminescent device and an alignment method using the same, which can prevent the substrate from crying when a cooling plate is attached to one surface of the substrate.

In general, an organic electroluminescent device is formed by injecting electrons and holes into an organic light emitting layer interposed between a cathode for injecting electrons and an anode for injecting holes, , And emits light when an exciton in which electrons and holes are injected falls from an excited state to a ground state.

Since the organic electroluminescent device is driven by such a principle, a separate light source is not required unlike a conventional thin film liquid crystal display device. Therefore, the organic electroluminescent device is attracting attention as a flat panel display device because it has the advantage of reducing the volume and weight of the device.

Typically, an organic light emitting layer of an organic electroluminescent device includes a plurality of functional layers (a hole injecting layer, a hole transporting layer, a light emitting material layer, an electron transporting layer, an electron injecting layer, etc.) Performance is further enhanced.

In the production of an organic electroluminescent device having the above-described structure, the organic light emitting layer is generally formed by depositing an organic light emitting material on a substrate using a thermal vacuum deposition process.

1, the mask 200 is attached to one surface of the substrate 100, and the cooling plate 300 is attached to the other surface of the substrate 100 when the organic light emitting layer is formed using a conventional evaporation apparatus.

However, there has been a problem in that it is necessary to align the mask 200 a plurality of times in order to align the substrate 100 and the mask 200 accurately.

Further, when the substrate 100 and the cooling plate 300 are bonded together, there is a problem that the substrate 100 of a flexible glass material is crying.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems occurring in the prior art, and it is an object of the present invention to provide an organic electroluminescent device capable of significantly reducing the number of alignment times, And an alignment method using the same.

The present invention also provides an alignment device for manufacturing an organic electroluminescent device and a method of aligning the same, which can prevent the substrate from being cryped by attaching a cooling plate in a state where one side edge of the substrate is supported when the substrate and the cooling plate are bonded together have.

According to the present invention, the above object is achieved by a mask comprising: a base on which a mask is fixed; A seating part provided so as to be able to receive the bottom edge of the substrate and capable of being driven in the vertical direction, the x direction, the y direction and the planar direction of the plane; A measuring unit for measuring an alignment state of the substrate and the mask when the substrate is seated on the upper surface of the mask; And an alignment state of the substrate and the mask measured through the measurement unit is received and inspected. When the substrate and the mask are not aligned, the seating unit is spaced upward from the mask, And a controller for driving the substrate in at least one of a y-direction and a rotation direction of the plane to control the substrate to be aligned with the mask.

The apparatus may further include a pusher portion including a first pusher and a second pusher which are movable in the vertical direction and are respectively installed on the upper surface of the mask so as to press the one side and the upper side of the other side edge of the substrate, The control unit may inspect the alignment state of the substrate through the measurement unit while pressing the substrate through the first pusher and the second pusher.

The controller may further include a cooling plate portion disposed at an upper side of the substrate and movable in a vertical direction, wherein the first pusher presses and supports one side edge of the substrate, And the cooling plate portion is controlled so as to be attached to the upper surface of the substrate.

The mask may further include a metal plate having a lattice shape at a central portion thereof and a magnet plate portion disposed at an upper side of the cooling plate portion so as to be movable up and down, It is preferable that the magnet plate portion is moved downwardly so that the metal mesh is not deployed downward by the magnetic force of the magnet plate portion while controlling the pusher to release the pressure from the substrate.

Meanwhile, in the alignment method using an alignment device for manufacturing an organic electroluminescent device, the substrate is supplied to a seating portion for supporting a bottom surface of the substrate, Lowering the seating part to position the seating part in contact with the upper surface of the fixed mask; Measuring and inspecting an alignment state of the substrate and the mask; And controlling the substrate to be aligned with the mask when the substrate and the mask are not aligned, the substrate being driven in a direction of rotation of the substrate in the x, y, and planes of the plane.

Here, it is preferable to measure the alignment state of the substrate and the mask while pressing the edge of the substrate through the first pusher and the second pusher while measuring the alignment state of the substrate and the mask.

Further, after the alignment of the substrate and the mask is completed, the first pusher maintains a state of pressing the substrate, and the second pusher is released from the pressure, and the cooling plate portion is attached to the upper surface of the substrate .

The method further includes moving the magnet plate portion disposed above the cooling plate portion downward to prevent deflection of the metal mesh of the mask while releasing the first pusher from the substrate after the cooling plate portion is attached can do.

According to the present invention, there is provided an alignment device for manufacturing an organic electroluminescent device and a method of aligning using the same, which can significantly reduce the number of alignment times by aligning a substrate with a mask fixed by a mask when the mask is attached to the substrate .

Also, there is provided an aligning apparatus for manufacturing an organic electroluminescent device, and an aligning method using the same, which can prevent a phenomenon of crying of a substrate by attaching a cooling plate in a state of supporting one side edge of the substrate when the substrate and the cooling plate are attached .

1 is a state in which a substrate for forming an organic light emitting layer is bonded,
2 is a schematic view of an alignment device for manufacturing an organic electroluminescent device according to a first embodiment of the present invention,
FIGS. 3 to 7 are process drawings according to the alignment method using the alignment device for manufacturing an organic electroluminescent device according to the first embodiment of the present invention

Prior to the description, components having the same configuration are denoted by the same reference numerals as those in the first embodiment. In other embodiments, configurations different from those of the first embodiment will be described do.

Hereinafter, an alignment device for manufacturing an organic electroluminescent device according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

2 is a schematic view of an alignment device for manufacturing an organic electroluminescent device according to a first embodiment of the present invention. 2, the alignment apparatus for manufacturing an organic electroluminescent device according to the first embodiment of the present invention includes a base 10, a seating unit 20, a pusher unit 30, a measuring unit, and a control unit .

The base 10 is provided in a plate shape, and the mask 1 is seated and fixed on the upper surface.

The edge of the mask 1 is a surface on which the upper surface of the mask 1 comes into contact with the substrate A and the upper surface of the mask 1 is in contact with the mounting portion 20 And is formed at a lower height than the central portion so as to be seated.

The seat portion 20 is provided in an "? "Shape in which the bottom edge of the substrate A is seated, and is installed so as to be vertically drivable, and is moved to abut the edge portion of the mask 1.

The height of the portion where the substrate A is seated is formed to correspond to the interval t between the edge portion of the mask 1 and the center portion. That is, when the bottom surface of the mounting portion 20 is moved so as to abut the edge portion of the mask 1, the substrate A can come into contact with the upper surface of the mask 1 and be seated.

Also, the mounting portion 20 is provided so as to be movable in the x direction and the y direction so as to move the substrate A in the x direction and the y direction.

The mounting portion 20 is rotatably provided around the center of the mounted substrate A so that the mounting portion 20 is rotatable about the center of the substrate A as a center.

A cooling plate portion 2 formed to abut the substrate A is disposed above the seating portion 20 and a magnet plate portion 3 is disposed above the cooling plate portion 2.

The cooling plate portion 2 includes a predetermined water-cooled or air-cooled cooling plate, and the magnet plate portion 3 has a plurality of magnets arranged on the lower surface thereof.

Through holes are formed in the edges of the cooling plate portion 2 and the magnet plate portion 3 so that the respective pushers of the pusher portion 30 can penetrate.

The cooling plate portion 2 and the magnet plate portion 3 are individually drivable in a vertical direction by a predetermined driving portion.

The pusher portion 30 includes a first pusher 31 for pushing and supporting one side edge of the substrate A upwardly and a second pusher 32 for pressing and supporting the other side edge of the substrate A upwardly, And the first pusher 31 and the second pusher 32 are installed so as to be individually movable in the vertical direction.

The measurement unit (not shown) is installed to measure the alignment state of the substrate A and the mask 1 as an image and transmit the measurement to the control unit.

 The control unit (not shown) is installed to control the driving of the seating unit 20, the cooling plate unit 2, the magnet plate unit 3, and the pusher unit 30, (A) and the alignment state of the mask (1) are received and inspected.

If the alignment state of the substrate (A) and the mask (1) transferred from the measurement unit is not aligned, the substrate (A) is rotated in the x and y directions and the rotation direction And the substrate (A) is controlled to be aligned with the mask (1).

Hereinafter, an alignment method using the alignment device for manufacturing an organic electroluminescent device will be described. 3 to 7 are process drawings according to the alignment method using the alignment device for manufacturing an organic electroluminescent device according to the first embodiment of the present invention.

3, the substrate A is supplied to the mounting portion 20 supporting the bottom of the edge of the substrate A, and then the mounting portion 20 is lowered, (1).

Here, the substrate (A) to be supplied is a substrate (A) for an organic electroluminescence display device made of a flexible glass material.

4, the alignment state of the substrate A and the mask 1 is measured in a state in which the edge of the substrate A is pressed and supported through the first pusher 31 and the second pusher 32 , And the alignment state of the substrate (A) and the mask (1) is inspected.

When the substrate A and the mask 1 are not aligned at this time, as shown in Fig. 5, in a state in which the first pusher 31 and the second pusher 32 are released from pressure, is driven in the x-, y-, and plane rotational directions to align with the mask (1).

6, the first pusher 31 maintains the state in which the substrate A is pressed, and the second pusher 32 is kept in a state of pressing the substrate A, The cooling plate portion 2 is moved downward while being pressed down so as to be adhered to the upper surface of the substrate A.

When the cooling plate portion 2 is moved downward, the magnet plate portion 3 is controlled to move downward together.

7, after the first pusher 31 is released from the substrate A, the magnet plate portion 3 disposed above the cooling plate portion 2 is pressed against the substrate A, So that deflection of the metal mesh of the mask 1 is prevented.

By using the above-described method, it is possible to remarkably reduce the number of times the substrate A is aligned and prevent the phenomenon of the substrate A crying when the cooling plate portion 2 is attached.

The scope of the present invention is not limited to the above-described embodiments, but may be embodied in various forms of embodiments within the scope of the appended claims. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the appended claims.

[Description of Reference Numerals]
1: Mask
2: cooling plate portion
3: Magnet plate portion
10: Base
20:
30: pusher portion
31: First pusher
32: second pusher

Claims (8)

A base to which the mask is fixed;
A seating part provided so as to be able to receive the bottom edge of the substrate and capable of being driven in the vertical direction, the x direction, the y direction and the planar direction of the plane;
A measuring unit for measuring an alignment state of the substrate and the mask when the substrate is seated on the upper surface of the mask; And
And an alignment state of the substrate and the mask measured through the measurement unit is received and inspected. When the substrate and the mask are not aligned, the seating unit is spaced upward from the mask, and driving the substrate in at least one of a y-direction and a rotation direction of the plane to control the substrate to be aligned with the mask. The method according to claim 1,
Further comprising a pusher portion including a first pusher and a second pusher which are movably movable in the vertical direction and are respectively installed on the upper surface of the mask so as to press the one side and the other side edge of the substrate,
Wherein the control unit inspects an alignment state of the substrate through the measurement unit while pressing the substrate through the first pusher and the second pusher. 3. The method of claim 2,
Further comprising a cooling plate portion disposed upwardly of the substrate and installed to be movable in a vertical direction,
The control unit controls the first pusher to press-support one side edge of the substrate and the second pusher to release the pressure from the other side edge of the substrate, and controls the cooling plate unit to be attached to the upper surface of the substrate Alignment device for manufacturing an organic electroluminescent device. The method of claim 3,
The mask has a lattice-shaped metal mesh at the center thereof,
Further comprising a magnet plate portion disposed upwardly of the cooling plate portion and provided so as to be movable in a vertical direction,
Wherein the control unit controls the first pusher and the second pusher to release the pressure from the substrate while moving the magnet plate unit downward so that the metal mesh is not deployed downward by the magnetic force of the magnet plate unit Alignment device. In an alignment method using an alignment device for manufacturing an organic electroluminescent device,
Feeding and seating the substrate in a seating part for supporting a bottom surface of an edge of the substrate;
Lowering the seating part to position the seating part in contact with the upper surface of the fixed mask;
Measuring and inspecting an alignment state of the substrate and the mask; And
And driving the substrate in a rotational direction of the x and y directions and a plane of the plane to align the mask with the mask when the substrate and the mask are not aligned. 6. The method of claim 5,
Wherein the alignment state of the substrate and the mask is measured while pressing the edge of the substrate through the first pusher and the second pusher when the alignment state of the substrate and the mask is measured. The method according to claim 6,
And after the alignment of the substrate and the mask is completed, the first pusher maintains the state of pressing the substrate, and the second pusher is unpressurized and the cooling plate portion is attached to the upper surface of the substrate How to align. 8. The method of claim 7,
Further comprising moving the magnet plate portion disposed above the cooling plate portion downward so as to prevent deflection of the metal mesh of the mask after releasing the first pusher from the substrate after attaching the cooling plate portion, / RTI >
KR1020150105591A 2015-07-27 2015-07-27 Align apparatus for fabricating the oled and align method of using the same KR101757653B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150105591A KR101757653B1 (en) 2015-07-27 2015-07-27 Align apparatus for fabricating the oled and align method of using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150105591A KR101757653B1 (en) 2015-07-27 2015-07-27 Align apparatus for fabricating the oled and align method of using the same

Publications (2)

Publication Number Publication Date
KR20170013426A true KR20170013426A (en) 2017-02-07
KR101757653B1 KR101757653B1 (en) 2017-07-17

Family

ID=58108049

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150105591A KR101757653B1 (en) 2015-07-27 2015-07-27 Align apparatus for fabricating the oled and align method of using the same

Country Status (1)

Country Link
KR (1) KR101757653B1 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100672971B1 (en) * 2004-12-28 2007-01-22 두산디앤디 주식회사 Substrate align device

Also Published As

Publication number Publication date
KR101757653B1 (en) 2017-07-17

Similar Documents

Publication Publication Date Title
KR102520693B1 (en) Deposition Apparatus
KR200484209Y1 (en) Cvd mask alignment for oled processing
CN109837504B (en) Film forming apparatus, film forming method, and electronic device manufacturing method
CN106062990B (en) Aligner structure and alignment methods
KR100712953B1 (en) Substrate align device and align method using the same
JP2005158571A (en) Method of manufacturing organic electroluminescent panel, manufacturing apparatus of organic electroluminescent panel, and organic electroluminescent panel
KR20150077998A (en) Deposition device and depositing method
CN109848278B (en) iQC device and method for flattening metal mask sheet
KR101108012B1 (en) Aligner for Large Size Substrate
KR100672971B1 (en) Substrate align device
KR101561221B1 (en) Thin layers deposition apparatus
KR101757653B1 (en) Align apparatus for fabricating the oled and align method of using the same
KR101337491B1 (en) Apparatus for Aligning Substrates and Method thereof
JP2013110072A (en) Organic el light emitting device manufacturing method and manufacturing device
US20190352113A1 (en) Transport device
CN113571462A (en) Substrate bearing table and bearing device
KR20150072261A (en) Apparatus for rotating substrate
KR102591646B1 (en) Deposition apparatus and method of aligning magnet plate of deposition apparatus
KR20180000959A (en) Substrate alignment apparatus to prevent movement of the substrate and deposition device having the same
KR20110128578A (en) Thin layers deposition apparatus for manufacturing oled
KR100842182B1 (en) Substrate align appauatus and method using the same
KR101818421B1 (en) Apparatus for manufacturing OLED substrate and method for manufacturing OLED substrate
KR20240066103A (en) Carrier supporting apparatus, film forming apparatus, and carrier method
KR20230102104A (en) Substrate deposition apparatus and Method for uniform bonding of mask that can be checked in real time
CN219752411U (en) Metal mask strip net fixing structure

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant