KR20170011805A

KR20170011805A - Particle analysis system for manufacturing semiconductor and method using the same

Info

Publication number: KR20170011805A
Application number: KR1020150105099A
Authority: KR
Inventors: 전필권; 성용익
Original assignee: 엔비스아나(주)
Priority date: 2015-07-24
Filing date: 2015-07-24
Publication date: 2017-02-02

Abstract

According to exemplary embodiments of the present invention, in a particle analysis method, a sample is dispensed from an analysis material storage in real time by using a dispensing unit. The sample is provided from the dispensing unit and is quantified by an interface unit. A chemical element measuring mode or a particle size and distribution measuring mode is selected by the analysis unit. In a case that the chemical element measuring mode is selected, an element analysis is performed on an analysis material included in the sample. When the particle size and distribution measuring mode is selected, a particle size and distribution analysis is performed on the material to be analyzed included in the sample. According to the particle analysis method, a chemical element analysis and a particle size analysis can be simultaneously performed such that productivity in a manufacturing process is increased, and an analysis can be performed online.

Description

TECHNICAL FIELD [0001] The present invention relates to a particle analysis system for manufacturing semiconductors, and a method of using the same. [0002]

The present invention relates to a particle analysis system. More particularly, the present invention relates to a particle analysis system for analytes for semiconductor manufacturing and a method of using the same.

With the high integration of semiconductors, a nanoscale semiconductor manufacturing process is performed, and contaminating particles that are influenced greatly affect the efficiency of the semiconductor manufacturing process.

The measurement of the contaminant particles is divided into a chemical component analysis for the contaminant particles and an analysis of the size and distribution of the contaminant particles. For example, the chemical component analysis may be performed using an XRF (X-ray Fluorescence) apparatus or an EDX (Energy Dispersive X-ray) apparatus for a solid wafer, a GFAAS (Graphite Furnace Atomic Absorption Spectrometry) (Inductively Coupled Plasma-Atomic Emission Spectrometer), or ICP-MS (Inductively Coupled Plasma-Mass Spectrometer).

In addition, the size and distribution of the contaminant particles are analyzed using an electron microscope or a light scattering method. However, when the number of the contaminating particles is small or the size of the contaminating particles is small, the accuracy of measurement is low.

Specifically, when the contaminated particles are contained in a solution, the chemical component analysis is accurate, but the accuracy and reproducibility of analysis of the size and distribution of the polluted particles are poor.

Accordingly, there is a growing need for a system and method for increasing the accuracy of the chemical component analysis and size and distribution analysis of the contaminant particles, and simultaneously and simultaneously performing the analyzes online or in-line.

An object of the present invention is to provide a particle analysis system capable of performing chemical composition analysis, particle size distribution analysis, and accuracy simultaneously.

Another object of the present invention is to provide a particle analysis method capable of simultaneously performing chemical component analysis, particle size and distribution analysis, and simultaneously performing the same.

According to an aspect of the present invention, there is provided a particle analyzing system comprising: a take-out unit for taking out a sample in real time from an analyte reservoir; An interface unit including a calibration sample introduction unit for quantitatively measuring a chemical composition of the analyte contained in the sample sample and analyzing the size and distribution of the particles included in the analyte by receiving a predetermined amount of sample sample through the interface unit; And a chemical analysis unit and a particle analysis unit.

In exemplary embodiments, the chemical component and particle analysis unit may include a data processing unit for measuring a signal intensity value over time for the analyte, a particle processing unit for analyzing the particle intensity of the analyte based on the signal strength value over time, And a chemical component analyzing unit for performing qualitative and quantitative analysis on the analyte based on the signal intensity value and the predetermined calibration curve data over time have.

In exemplary embodiments, the particle size and distribution analyzer may measure the size and distribution of particles using a cyclic distribution method.

In exemplary embodiments, the particle size and distribution analyzer may measure the size and distribution of particles using a low concentration measurement method.

In the exemplary embodiments, the extraction unit comprises a trapping vessel for receiving a trapping solution and an analyte, and a purge gas into the trapping vessel, wherein the trapping solution, in which the analyte is mixed by the purge gas, To the analyzing unit via the analyzing unit.

In the exemplary embodiments, the take-out unit may include a spray that receives the trapping solution and the analytical sample and mixes the same in an aerosol state, a space for primarily collecting the analytes contained in the analytical sample in the aerosol- A trapping tube for providing an aerosol trapping solution and the analytical sample from the spray chamber, and trapping the unreacted analytes in the spray chamber by bringing the analytical sample into contact with the spraying chamber; A trapping vessel for receiving a trapping solution in which the material is trapped and a sample delivery system for providing a purge gas into the trapping vessel so that the trapping solution trapped by the purge gas is provided to the analysis unit via the sample delivery line Section.

In exemplary embodiments, the analytical sample may include process gases, exhaust gases, and contaminated air from a semiconductor or display.

In exemplary embodiments, the analytical sample may be a liquid.

In exemplary embodiments, the bubbler may further comprise a bubbler forming a trapping solution provided in the trapping vessel through the trapping tube.

In exemplary embodiments, the extraction unit may further comprise a cooling unit for cooling the trapping vessel and the trapping tube such that the analyte that is not captured in the trapping solution can be more easily captured.

In the exemplary embodiments, the take-out unit includes a cleaning liquid supply unit for supplying a cleaning liquid into the trapping container to clean contaminants remaining in the trapping container, and a discharge unit for discharging the cleaning liquid that has washed the trapping container to the outside And may further include a taxing authority.

In exemplary embodiments, the control unit controls the operation of the blowout unit, the interface unit, and the chemical component and particle analysis unit, and measures the level of the trapping solution provided inside the trapping container, And a level sensor for transmitting a signal.

In exemplary embodiments, the take-out unit comprises a first collection line for providing the spray with a trapping solution in which the analyte contained in the trapping container is captured, an analyte in the trapping coil after passing through the primary collection line A second collection line for providing a second trapped solution to the trapping vessel, and a circulation pump for concentrating and collecting the analyte by circulating the trapping solution, which is secondarily captured by the analyte, to the first collection line and the second collection line, As shown in FIG.

In the exemplary embodiments, the interface unit may include a sample accommodating portion for receiving a sample sample from the take-out unit and providing a space for primarily accommodating the sample sample, a sample container provided in the sample accommodating portion to be supplied with a predetermined amount A pressure providing unit for supplying a pressure to be introduced into the analyzing unit to a sample sample accommodated in the sample introducing unit or a pressure at which the sample sample is received in the sample introducing unit, A cleaning liquid supply part for supplying a cleaning liquid into the sample storage part for cleaning the sample storage part when the sample sample is injected into the analysis unit, and a cleaning liquid cleaning part for cleaning the sample storage part or a sample sample remaining in the cleaning liquid, And may include a cleaning section including a discharge section for discharging.

In the exemplary embodiments, the interface unit is connected to a lower discharge line connected to a lower portion of the sample storage part, and the concentration of the sample is measured by introducing the sample stored in the sample storage part through the lower discharge line And the like.

According to another aspect of the present invention, there is provided a particle analyzing method in accordance with exemplary embodiments of the present invention, which extracts a sample sample in real time from an analyte storage using a takeout unit. Receiving the sample sample from the extraction unit, and quantifying the sample sample using the interface unit. The analytical unit is used to select the chemical composition measurement mode or the particle size and distribution measurement mode. When the chemical component measurement mode is selected, component analysis is performed on the analyte contained in the sample. When the particle size and distribution measurement mode is selected, particle size and distribution analysis for the analyte contained in the sample sample is performed.

In exemplary embodiments, performing the size and distribution analysis of the particles may measure a signal intensity value over time for the analyte.

In exemplary embodiments, performing the size and distribution analysis of the particles may measure the size and distribution of the particles by a cyclic distribution method based on the signal intensity value over time and predetermined environment variables.

In the exemplary embodiments, performing particle size and distribution analysis of the particles may include determining particle size and distribution using a low-concentration measurement method based on the signal intensity value over time and a predetermined calibration curve and environment variables. &Lt; / RTI >

In exemplary embodiments, performing a component analysis on the analyte may measure a signal intensity value over time for the analyte. And qualitative and quantitative analysis of the analyte can be performed based on the signal intensity value over time.

In exemplary embodiments, performing quantitative analysis on the analyte may perform quantitative analysis on the analyte based on predetermined calibration curve data.

In an exemplary embodiment, the extraction of the analytes in real time may include injecting analytes contained in the analytical sample in an aerosol state using a spray of a predetermined amount of the trapping solution and the analytical sample, It can be primary collected in solution. The trapping solution in the form of an aerosol trapped by the analyte may be mixed with the undrawn analytical sample in the trapping tube to collect the analyte in the trapping solution. The analyte can collect the trapped solution of the secondary trapped in the trapping container. The analyte can finally provide the captured trapping solution to the analysis unit via the sample supply line.

In an exemplary embodiment, when the analytical sample is in a gaseous state, after the trapping of the second trapped solution in the trapping vessel, a new amount of the analytical sample and the analytical substance, The trapping solution may be mixed and sprayed in an aerosol state using spray to collect the analytes contained in the analytical sample in the aerosol trapping solution in a tertiary manner. The trapping solution in the aerosol state in which the analyte is captured in the third stage and the analytical sample are mixed and contacted in the trapping tube to collect the analytes in the trapping solution. The step of trapping the trapping solution, which is the fourtharily captured by the analyte, in the trapping container may be performed at least once.

In exemplary embodiments, a cleaning liquid may be provided into the trapping vessel to clean the trapping vessel to clean the contamination remaining in the trapping vessel. The cleaning liquid accommodated in the trapping vessel may be further discharged to the outside via the sample supply line.

According to another aspect of the present invention, there is provided a particle analysis method for extracting a sample in real time. Then, the extracted sample sample is received, and the analytes of the sample sample are quantitatively and qualitatively analyzed. Then, the concentration of the analyte by the qualitative analysis is confirmed, and the analysis of the analyte is confirmed. If particle analysis is deemed to be necessary, dilute the analyte with a solvent to prepare a diluted analytical sample. Analyze the particle size and distribution for the analyte using the diluted analytical sample.

According to the particle analysis system and method according to the exemplary embodiments, since the particle size and distribution can be measured using the signal intensity value with time in the mass spectrometry method, the accuracy of the particle size and distribution measurement can be improved .

Particularly, the particle analysis system and method have the advantage of improving the accuracy and reproducibility of particle size and distribution measurement for analyte in a solution state, and can simultaneously perform chemical analysis measurement and particle size and distribution measurement, Particle analysis measurements on the analyte can be performed.

In addition, since the particle analysis system and method can perform simultaneous measurement, there is no need to separately provide a chemical analysis apparatus or a separate particle size and distribution measurement apparatus, and the efficiency of the semiconductor manufacturing process can be increased, And convenience can be greatly increased.

However, the effects of the present invention are not limited to the above-mentioned effects, and may be variously expanded without departing from the spirit and scope of the present invention.

1 is a block diagram illustrating a particle analysis system in accordance with exemplary embodiments.
Fig. 2 is a process flow chart for explaining the take-out unit of Fig. 1. Fig.
Figs. 3 and 4 are process flow diagrams illustrating the interface unit of Fig.
FIG. 5 is a block diagram for explaining the analysis unit of FIG. 1; FIG.
6 is a flowchart for explaining a method of sampling a sample using the extraction unit.
7 is a flowchart for explaining a particle analysis method according to an embodiment using the analysis unit.
FIGS. 8 to 10 are graphs for explaining a method of analyzing a chemical component of an analyte using a periodic distribution method. FIG.
FIGS. 11 to 14 are graphs for explaining a method for analyzing the size and distribution of particles for analytes using the low-concentration measurement method.
15 is a flowchart for explaining a particle analysis method according to another embodiment of the present invention.

For the embodiments of the invention disclosed herein, specific structural and functional descriptions are set forth for the purpose of describing an embodiment of the invention only, and it is to be understood that the embodiments of the invention may be practiced in various forms, The present invention should not be construed as limited to the embodiments described in Figs.

The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms may be used for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between. Other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprise", "having", and the like are intended to specify the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, , Steps, operations, components, parts, or combinations thereof, as a matter of principle.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be construed as meaning consistent with meaning in the context of the relevant art and are not to be construed as ideal or overly formal in meaning unless expressly defined in the present application .

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The same reference numerals are used for the same constituent elements in the drawings and redundant explanations for the same constituent elements are omitted.

1 is a block diagram illustrating a particle analysis system in accordance with exemplary embodiments. Fig. 2 is a process flow chart for explaining the take-out unit of Fig. 1. Fig. Figs. 3 and 4 are process flow diagrams illustrating the interface unit of Fig. FIG. 5 is a block diagram for explaining the analysis unit of FIG. 1; FIG.

1 to 5, a particle analysis system according to exemplary embodiments includes a take-out unit 10 for taking out a sample sample in real time from an analyte reservoir S, (20) for analyzing the chemical components of the analyte contained in the sample and analyzing the size and the distribution of the particles contained in the analyte; and an interface unit And an analysis unit (30).

The analyte reservoir (S) stores the analyte used in the semiconductor manufacturing process. The analyte may be in solution. For example, the analyte may be distilled water, a washing solution, an etching solution, or other necessary solution for the manufacturing process. Alternatively, the analyte may be in a gaseous state.

The takeout unit 10 includes an analytical sample introducing portion 170 for providing an analytical sample, a trapping solution providing portion 160 for providing a trapping solution into the trapping container, and a mixing portion 160 for mixing the trapping solution and the analytical sample in an aerosol state A spraying chamber (130) for providing a space for allowing the analyte contained in the analytical sample to be primarily captured in the aerosol trapping solution, a trapping solution in the form of an aerosol from the spray chamber, A trapping tube (110) for receiving the trapping solution collected through the trapping tube through the trapping tube, and a trapping vessel (110) for trapping the trapping solution through the trapping tube, The trapping solution in which the analyte is captured is supplied to the sample transfer line 184 by the purge gas, And a sample transfer unit 180 for transferring the sample to the analysis unit via the sample transfer unit 180.

The analytical sample introducing unit 170 according to the present invention is a structure capable of providing an analytical sample containing an analyte to be analyzed as a spray through an analytical sample supply line 172 using a metering pump or a flow meter 171 . The analytical sample supply line 172 is provided with a gate valve V which is opened only when the analytical sample moves to the spray.

As an example, the analytical sample may be a semiconductor process gas, a semiconductor exhaust gas, or a polluted air, and the analyte contained in the analytical sample may include a metal, a metal ion, an organic compound, and the like. As another example, the analytical sample may be a liquid applied to a semiconductor process, a bio-field, and various industrial fields.

The trapping solution supplier 160 may provide the trapping solution contained in the reservoir to the interior of the cleaned trapping container 110 through the first trapping solution supply line 162 using the first pump 161 Structure. The trapping solution supply line 162 is provided with a gate valve V1 that is opened only when the trapping solution is supplied to the trapping solution receiving portion 110. [

The spray 120 is supplied with the trapping solution provided through the trapping solution supply part 160 and the analytical sample provided through the analytical sample introduction part 170 through the trapping solution supply part 160, . Here, the spray forms the trapping solution in a fine droplet state in the spray chamber so that the analyte contained in the analytical sample can be more easily mixed and absorbed into the aerosol state in the trapping solution. That is, the spray is characterized in that the analytes contained in the analytical sample are primarily collected in the aerosol-type trapping solution.

The spray chamber 130 is provided between the spray 120 and the trapping tube 140 and provides a space through which the analytical sample and the trapping solution injected through the spray can be injected in an aerosol state, Thereby providing a space for allowing the contained analytes to be primarily collected in the aerosol-type trapping solution.

The trapping tube 140 receives the aerosolized trapping solution and the analytical sample from the spray chamber 130 and mixes them while passing through the interior of the trapping tube, Is a micro-coil tube for secondary collection. The trapping tube 140 is formed with a nonlinear flow path to increase the chance of contact between the analyte and the trapping solution so that the analyte is better trapped in the trapping solution. Although it is shown in the form of the trapping coil in the drawing, it does not necessarily have to be formed in the form of a helical coil, but may be formed so as to more effectively meet the absorption liquid and the atmosphere. That is, the trapping tube 140 may have a non-linear shape even if it is not spiral or spiral, that is, the shape of the trapping tube 140 of the present invention is not limited to the figure.

The trapping tube 140 has a structure connected to the trapping vessel through the second trapping line 142. The trapping solution trapped by the analyte of the analytical sample is provided in the second trapping line. A gate valve V5 may be provided.

The trapping vessel 110 has a space for receiving the trapping solution, and has a space for receiving the spraying, the spraying chamber, and the trapping solution in which the analyte is collected through the trapping tube. In one example, the trapping vessel has a cap that seals the trapping vessel and has a structure physically connected to the spray through a first collection line 112 through the cap. The first collection line 112 may be provided with a circulation pump P3 that provides a trapping solution or a trapping solution in which analytes of the analysis sample are collected,

In addition, the trapping vessel has a structure connected to a second collection line 142 having one end near the bottom of the trapping vessel through the cap. The second trapping line 142 may be provided with a trap valve or a gate valve V5 to provide a trapping solution in which a trapping solution or an analyte of an analytical sample is trapped. As another example, the trapping vessel 110 may be coupled to a plurality of delivery lines, through which respective trapping solutions, cleaning liquid, purge gas, and trapping solution, . At this time, the flow rate of the materials provided to the trapping vessel can be adjusted by the selective open / close operation of the gate valve formed in each of the supply lines.

In one embodiment, the trapped sample 110 and the trapped sample 140 are introduced into the trapping vessel 110. In this case, when the analytical sample is a gas, 110), while the gaseous analytical sample is collected on top of the trapping vessel. The upper and lower portions of the trapping vessel are each provided with a line capable of discharging a gas analysis sample and a trapping solution, respectively. That is, the gas sample is discharged to the upper discharge line 114, and the trapping solution in which the analyte is absorbed is discharged via the lower sample transfer line.

Since the analyte (metal and metal compounds) in the analytical sample is trapped in the trapping solution while passing through the spray, the spray chamber, and the trapping tube 140, the analyzed analytical sample contains almost no analytes The trapping solution contains the analyte (metal and metal compound) originally contained in the analytical sample, is trapped in the trapping container, and is discharged outside the take-out unit 10 after the trapping is completed.

The sample transfer unit 180 supplies purge gas into the trapping vessel 110 through the purge gas providing line 180 so that trapping solution trapped by the purge gas is supplied to the sample transferring line 184 To an analysis unit (not shown). Here, the sample transfer portion is purge gas supply portion, and the sample transfer line 184 is physically connected to the analysis unit 30 at a lower portion of the trapping container. The purge gas allows the trapping solution to be fed together to the remote analysis unit 30 without loss of trapping solution when the trapping solution is provided to the analysis unit 30 via the sample supply line. The sample transfer line may be provided with a gate valve (V6) which is opened only when the trapping solution in which the analyte is collected is supplied to the analysis unit (30) together with the purge gas.

In one embodiment, the take-out unit 10 of the present invention includes a first collection line 112 connected to the trapping vessel and providing the trapping solution contained in the trapping vessel as the spray, A second collection line 142 for passing the trapping solution through the spray chamber and the trapping coil to the trapping vessel where the analyte has been trapped, and a second trapping line for trapping the trapped analyte, And a circulation pump P3 for allowing the analyte to be concentrated and collected by passing through the circulation pump P3.

At this time, the circulation pump is provided on the first collecting line, the gate valve V5 provided on the second collecting line 142 is open, and the gate valves V1-4 and V6 , v7) are in a closed state. Here, the number of circulation cycles of the trapping solution capable of concentrating and collecting the analyte can be appropriately determined by the experimenter according to the kind of the analyte to be collected, the average contained amount, and the like.

The take-out unit 10 according to the present invention may further include level sensors 115 measuring the level of the trapping solution provided inside the trapping vessel and sending an alarm signal to a control unit (not shown).

As another example, the extraction unit 10 of the present invention may cool the trapping vessel 110 and the trapping tube 140 to more easily trap the analytes trapped in the trapping solution in the trapping solution And a cooling unit (not shown). The cooling portion may be a cooling coil that encloses the outer periphery of the trapping vessel and the trapping tube.

As another example, the take-out unit 10 according to one embodiment of the present invention is provided at one end of a second collection line 142 connected to the trapping tube, and is provided to the inside of the trapping vessel through the second collection line And a bubbler for forming the trapping solution into a bubble state. Membranes having micropores formed in the bubbler may be used.

As another example, the take-out unit 10 according to one embodiment of the present invention may be provided with a cleaning liquid supply unit 152 for supplying a cleaning liquid through the cleaning liquid supply line 152 to clean the trapping container and the analytes remaining in the plurality of lines. And a discharge unit for discharging the cleaning liquid, which has been cleaned by the trapping vessel and the plurality of lines, to the outside through the discharge line 192. [

Specifically, the rinsing liquid supplied through the rinsing liquid supply unit passes through a trap line, a first collection line, a spray, a spray chamber, a trapping coil and a second collection line, a trapping vessel, and a sample transfer line 184, To the outside. The discharge line may be provided with a gate valve V7 which is open only when the cleaning liquid is discharged.

The take-out unit 10 having the above-described configuration can apply the spray and the trapping tube to more effectively collect the analytes from the analytical sample in the liquid state in a more effective manner and simultaneously supply the washer fluid into the trapping vessel after sampling of the analytical material, Can be sampled more efficiently without contamination of the analyte of the sampling field by draining the sample through the lines passing through the analyte of the extraction unit 10. [

That is, when the analytical sample is in a gaseous state, the trapping solution is circulated in the take-out unit 10 having the above-mentioned constituent elements to continuously collect and collect the analytes in the trapping solution so that the analytes can be measured in a long time Or concentration conditions can be carried out without being restricted by any environment or condition, unlike the case where pressurization conditions or the like are used. Therefore, the present invention can be used not only for general air but also for purity measurement of high purity gas or chemical gas.

In another embodiment, when the analytical sample to be analyzed is a liquid, the components of the spray 120, the spray chamber 130, and the trapping tube 140 may be omitted. Although not shown in the drawing, a take-out unit according to another embodiment of the present invention includes a trapping vessel for containing a trapping solution and an analyzing material, and a trapping vessel for supplying a purge gas into the trapping vessel, And a sample transfer section for allowing the solution to be supplied to the interface unit or the analysis unit via the sample transfer line.

In addition, the takeout unit 10 having the above-described configuration can dilute the highly concentrated sample to have a proper concentration and provide it to the analysis unit 30 in the opposite manner.

Furthermore, the takeout unit 10 having the above-described configuration can secure a sample at a wide range of analytical working points and can efficiently and cleanly transfer the sample to the remote interface unit 20 or the analysis unit 30.

3, the interface unit 20, which is applied to the particle analysis system, includes a sample sample storage unit 310 for receiving a sample sample from the extraction unit 10 and providing a space for first receiving the sample sample, A sample sample introduction part 320 having a space capable of receiving a predetermined amount of the sample sample so as to provide a predetermined amount of the sample sample provided in the sample sample accommodation part to the analysis unit 30; A pressure providing unit for providing a pressure to be introduced into the analyzing unit 30 and a sample sample accommodated in the sample introducing unit 310 when the sample sample is injected into the analyzing unit 30; (330) for supplying a cleaning liquid into the sample sample receiving portion (310) to clean the sample introduction portion, and a cleaning liquid supplier (330) for cleaning the sample sample receiving portion It has a configuration including a discharge unit 350 for discharging the test sample remaining on the inside to the outside.

The sample-sample accommodating portion 310 has a space for accommodating the sample sample provided from the take-out unit 10. As an example, the sample-receiving portion includes a cap for sealing the upper portion thereof, and has a structure connected to the extraction unit 10 through a first sample-providing line 302 passing through the cap. As another example, the sample-sample receiving portion may be connected to another take-out unit 10 through a second sample providing line 306 passing through the cap. The first sample providing line 302 may be provided with a gate valve 304 which is opened when the sample is transferred into the sample accommodating portion, A gate valve 307 may be provided. As another example, the sample accommodating unit may include at least one sample container and may be used in connection with each of the take-out units 10.

Specifically, a plurality of lines (upper discharge line 362, lower discharge line 352, cleaning liquid supply line 332, sample supply lines 302 and 306, sample injection lines 312, And the cleaning liquid is supplied to the inside of the respective lines through which the cleaning liquid is discharged, the cleaning liquid is discharged, the residual sample is discharged, or the sample is supplied to the sample introduction part. Or the movement of the rinse liquid may be effected by the selective open / close drive of the gate valves 307, 304, 333, 323 formed in the respective lines and the operation of the pumps 354, 325, 331 connected to the lines.

As an example, the sample sampling analysis system is mainly intended to monitor contaminants such as metal in a chemical liquid or gas, but it is also very important to understand changes in the concentration of a chemical liquid in a portion where problems occur during the process. Thus, the apparatus may further include a concentration analyzing unit (not shown) for measuring the concentration of the sample sample accommodated in the sample sample receiving portion 310 through the lower discharge line in connection with the interface lower discharge line 352 of the present invention . The concentration measuring method of the concentration analyzing unit may be optically, electrochemically, or the like.

The sample sample introducing portion 320 includes a sample loading portion (not shown) connected to the sample sample receiving portion through a sample injection line 312 and having a switching valve type having an injection position and a loading position, do. The sample loading portion includes a sample loop 322 having a space for receiving a sample sample. The sample loading at the sample sample inlet 320 may be performed by placing the switching valve type sample loop 322 in the loading position and then moving the sample loop 322). &Lt; / RTI > Conversely, injecting a sample loop of a switching valve type into a sample analysis unit 30 injects a carrier gas or solution into the sample loop 322 after positioning the sample loop of the switching valve type in the injection position, To the analysis unit (30).

The pressure providing portion includes a pump 325 connected to one end of the sample sample introducing portion 320 and lowering the pressure inside the sample loop when the sample loop 322 is located at the loading position to allow the sample to flow into the sample loop.

The cleaning section is provided with a cleaning liquid supply section (335) for supplying a cleaning liquid into the sample storage section through a cleaning liquid supply line (332) for cleaning the sample storage section, and a cleaning liquid supply section And a discharge pump 354 including a discharge pump 354 for discharging the sample through the lower discharge line 352 to the outside. The cleaning of the sample receptacle is performed to provide the next sample sample without contamination when the sample sample is injected into the analysis unit 30.

More specifically, the cleaning liquid supplier 330 for performing the cleaning of the sample accommodating portion is configured to remove the cleaning liquid contained in the cleaning tank 335 from the cleaning liquid supply pump 331 and the gate valve 333 And can be carried out by supplying it quantitatively. The supply amount of the cleaning liquid may be adjusted by a level sensor 315 provided at one side of the sample accommodating portion. Subsequently, when the cleaning liquid is supplied in a fixed amount, the operation of the cleaning liquid supply pump 335 is stopped and the gate valve 333 is closed. Subsequently, the cleaning liquid provided in the sample accommodating portion is operated to operate the discharge pump 354 connected to the lower discharge line 352, and at the same time, the gate valve 353 is opened and discharged to the outside. The supply and discharge of the rinsing liquid can be repeatedly performed until there is no contamination of the inside of the sample accommodating portion.

Although not shown in the drawings, the cleaning of the sample storage tank can provide a cleaning effect by providing the cleaning liquid continuously overflowing into the sample storage portion. At this time, the overflow cleaning liquid may escape to the separate discharge portion, and the cleaning liquid in the sample receiving portion may have a structure capable of discharging the discharge pump by operating the discharge pump.

4, the interface unit 20 having the calibration sample introduction part is configured such that the sample sample introduction part 320 and the pressure providing part 352 of the interface unit 20 shown in FIG. 3 are connected to the calibration sample introduction part 600, . &Lt; / RTI > The calibration sample introducing unit 600 applied to the interface unit 20 of the present invention is generated due to a failure to provide the sample to the analysis unit 30 in a predetermined amount when the sample introduction method is changed according to the type of the analysis unit 30 To correct the error.

For example, in the case of the ICP-MS, the analyzing unit 30 introduces a sample (sample) into the self aspiration through a nebulizer. The sample introduction speed varies depending on the characteristics of the nebulizer, and the change Big. This has a serious influence on the analysis result and serves as an element that lowers the stability of the analysis unit 30. [

The calibration sample introduction part 600 of the present invention includes a sample introduction part 610 and a standard solution introduction part 650 for calibrating the sample to always introduce the sample to the analysis unit 30 at a constant rate. .

The sample sample introducing unit 610 includes a first sample loop 612 having a space for loading a sample sample, a first pressure pump 614 for lowering pressure inside the first sample loop to introduce a sample into the sample loop, A first dosing pump (616) for allowing a sample sample loaded in the first sample loop to be provided to the analyzing unit (30) so as to be constant in length, a first measuring pump (616) for detecting the presence or absence of a sample in the first sample loop, Sensor 618 as shown in FIG. Examples of the first metering pump include a syringe pump, a diaphragm pump, a gear pump, and a piston pump. As an example, the first sample loop may be included in the sample loading portion of the injection valve type.

The standard solution introducing part 650 includes a second sample loop 652 having a space for loading and loading a standard solution for calibration, a second sample loop 652 for lowering pressure inside the second sample loop, A pressure pump 654, a second metering pump 656 that allows the standard solution loaded in the second sample loop to be provided to the analysis unit 30 at a constant rate, the presence or absence of a sample in the second sample loop And a second detection sensor 658 for detecting the second detection sensor 658.

Examples of the first metering pump or the second metering pump include a syringe pump, a diaphragm pump, a gear pump, and a piston pump. As an example, the second sample loop may be included in the loading portion of the injection valve type.

The sample introduction part 610 and the standard solution introduction part 650 of the calibration sample introduction part 600 have a structure connected to the analysis unit 30 via the T-shaped line 660. Therefore, the sample sample provided to the analysis unit 30 at the sample sample introduction portion and the standard solution provided to the analysis unit 30 through the standard solution introduction portion are mixed in the T-shaped line 660, ). &Lt; / RTI > At this time, the dilution ratio of the standard solution supplied to the analysis unit 30 may vary depending on the flow rate of the sample.

The standard solution used in the calibration of the analytical unit 30 is at a very low concentration, which causes the standard solution to deteriorate and cause measurement problems. In the present invention, the calibration sample introduction part 600 may be used to dilute a relatively high concentration of the standard solution to various concentrations to perform a calibration curve and the following method.

First, the standard solution is loaded into the second sample loop using the pressure provided by the second pressure pump 654.

Subsequently, the position of the second sample loop is adjusted through the switching of the loading section, and the standard solution loaded in the second sample loop is transferred to the T-shaped line 660 connected to the analysis unit 30 using the second dosing pump 656. [ Lt; / RTI > At this time, the sample sample loaded in the first sample loop is supplied together with a T-shaped line connected to the analysis unit 30 by the first dosing pump. The standard solution and the sample sample provided in this T-shaped line can be mixed in the T-shaped line and introduced into the analysis unit 30.

In the calibration sample introduction unit 600 having the above-described configuration, the mixed solution of the standard solution and the sample sample supplied to the analysis unit 30 is supplied to the analysis unit 30 ) Can be calibrated. The calibration of the analytical unit 30 allows the calibration curve of the standard solution to be generated using the analytical unit 30, allowing for more precise analysis of the sample sample.

The analysis unit (30) for analyzing chemical components and particles can simultaneously perform chemical composition measurement and analysis of the size and distribution of particles contained in the analyte with respect to the analyte provided.

5, the analysis unit 30 for analyzing the chemical components and the particles includes a data processing unit 400 for measuring a signal intensity value (cps value) over time for the sprayed analyte, A particle size and distribution analyzer 420 for measuring a particle size and a distribution on the basis of a signal intensity value according to the time and a predetermined environment variable, And a chemical component analysis unit 410 for performing qualitative and quantitative analysis on the analyte.

The data processing unit 400 may measure the cps value with time using a mass spectrometry method. In general, the mass spectrometric method can measure a signal intensity value generated with respect to the mass ratio of the analyte to the charge, but the data processing unit 400 can measure the signal intensity value with time. For example, the data processing unit 400 may measure the accumulated cps value for a predetermined time.

The particle size and distribution analyzing unit 420 may measure the size and distribution of the particles included in the analyte based on the signal intensity value over time and predetermined environment variables.

In exemplary embodiments, the particle size and distribution analyzer 420 may measure the size and distribution of particles included in the analyte using a periodic distribution method described below. Alternatively, the particle size and distribution analyzer 420 may measure the size and distribution of the particles included in the analyte using a low concentration measurement method described later.

In addition, the chemical analysis unit 410 may perform qualitative and quantitative analysis on the analyte based on the signal strength value (cps value) over time, the environmental parameter, and predetermined calibration curve data.

According to the particle analysis system according to the exemplary embodiments, since the particle size and distribution can be measured using the signal intensity value with time in the mass spectrometry method, the accuracy of the particle size and distribution measurement can be improved.

Particularly, the particle analysis system has an advantage of improving the accuracy and reproducibility of particle size and distribution measurement for solution and gaseous analytes.

In addition, since chemical analysis measurement and particle size and distribution measurement can be performed at the same time, it is possible to perform particle analysis measurement on an analyte in online or in-line.

In addition, since the particle analysis system can perform simultaneous measurement, there is no need to separately provide a chemical analysis apparatus or a separate particle size and distribution measurement apparatus, and it is possible to increase the efficiency of the semiconductor manufacturing process, Can be greatly increased.

6 is a flowchart for explaining a method of sampling a sample using the extraction unit. 7 is a flowchart for explaining a method of analyzing particles using an analysis unit.

Referring to Figures 2, 4, 5, and 6, a predetermined amount of trapping solution is provided to the trapping vessel (S110).

In operation S110, the trapping solution contained in the trapping solution storage part is operated through the first trapping solution 110 (FIG. 1) through the first trapping solution supply line 162 after the first pump P1 is operated and the gate valve V3 is opened. ).

Next, the analytical sample and the trapping solution are mixed and sprayed in an aerosol state using spray, and the analytes contained in the analytical sample are firstly collected in the aerosol trapping solution (S120).

In order to collect the analyte in the step S120, the trapping solution and the analytical sample are simultaneously sprayed. Here, the trapping solution is sprayed via the first collection line by operating the circulation pump with the trapping solution contained in the trapping vessel 110. The analytical sample contained in the analytical sample introduction portion is supplied as a spray through the analytical sample supply line 172 by the operation of the metering pump. The analytical sample and the trapping solution provided by the spray are sprayed in an aerosol state into the spray chamber by spraying, and the area of contact of the aerosol trapping solution with the analytical sample is increased so that the aerosol- Can be easily mixed and absorbed. That is, primary collection is performed in which the analyte is absorbed into the trapping solution in a short period of time.

Next, the trapping solution in the aerosol state in which the analyte is primarily captured and the analytical sample are mixed and contacted in the trapping tube to collect the analytes in the trapping solution (S130).

The trapping solution in the aerosol state is formed into a trapping solution in a liquid state while the analytical sample and the trapping solution pass through the nonlinear flow path of the trapping tube 140 in the secondary collection of the analytes in the step S130, The opportunity to contact and mix the contained analytes with the trapping solution is increased so that the analyte can be secondarily captured with the trapping solution.

Next, the analyte collects the trapped solution and the analytical sample, which are collected in the second step, into the trapping vessel and collects the collected trapping solution and the analytical sample (S140).

In step S140, the trapping solution and the analytical sample may be collected by providing the trapping solution and the analytical sample, which are secondarily captured by the analyte in the trapping tube, into the trapping vessel via the second collecting line.

In the sample sampling method according to one embodiment, when the analytical sample is in a gaseous state, a predetermined amount of analytical sample is separately provided through the analytical sample providing unit, and the analytical sample is collected using the trapping solution collected from the first step to the Step 3 is repeated at least once to maximize capture of the analyte in the trapping solution.

Specifically, when the analytical sample is in a gaseous state, a new analytical sample and a trapping solution of step S140 are mixed and sprayed in an aerosol state through the analytical sample providing unit after the step 3) Collecting the analytes contained in the trapping solution in the aerosol state by trapping the analytes in the aerosol trapping solution in a trapping tube; The fourth collecting step and the step of collecting the trapping solution collected in the fourth step in the trapping vessel by the analyte may be repeated at least once.

Further, in the sample sampling method according to one embodiment, it is possible to further perform the step of discharging the gaseous analytical sample provided as the trapping vessel through the trapping tube when the analytical sample is in a gaseous state.

Thereafter, the analyte collects the captured trapping solution through the sample supply line using the purge gas, and provides the interface unit to the interface unit (S150).

At this time, the purge gas enables the trapping solution to be supplied together with the sample supply line and the interface unit to the remote analysis unit 30 without loss of the trapping solution.

(S160) cleaning the trapping vessel by supplying a cleaning liquid into the trapping vessel to clean contaminants remaining in the trapping vessel after step S150, and supplying the cleaning liquid received in the trapping vessel to the sample supply line And then discharging it to the outside.

As another example, the cleaning of the trapping vessel and the discharge of the cleaning liquid can be performed prior to the step S110 of providing the trapping vessel with a predetermined amount of the trapping solution to secure the cleanliness of the take-out unit 10. [

Such a sample sampling method can more effectively collect the analyte from the analytical sample in the gas or liquid state in a more effective manner. In addition, after the sampling of the analyte, the washing liquid is supplied into the trapping container, By draining out through the lines, it is possible to perform secondary sampling without contamination of the analyte of the sampling field more effectively.

2, 4, 5 and 7, the analysis unit 30 receives the analyte through the extraction unit 10 and the interface unit 20 (S200).

4, an analytical sample is contained in the sample sample receiving portion 310, the gate valve 323 is opened, and the analytical sample is pumped by the pump P5 into the first sample loop 612 ).

Thereafter, the gate valve 323 is closed, the pump P5 is stopped, and the analytical sample is supplied to the analysis unit 30 by the first metering pump 616 at a constant flow rate.

Next, the chemical component measurement mode or the particle size and distribution measurement mode is selected (S210).

When the particle size and distribution measurement mode is selected, the size and distribution of particles included in the sprayed analyte are analyzed (S220).

5, the chemical component and particle analysis unit 30 includes a data processing unit 400 for measuring a signal intensity value (cps value) with respect to the sprayed analyte over time, a cps value and a predetermined environment A particle size and distribution analyzing unit 420 for measuring the size and distribution of the particles based on the cps value and the predetermined calibration curve data, and a chemical component for performing qualitative and quantitative analysis on the analyte based on the cps value and predetermined calibration curve data And an analysis unit 410.

For example, the chemical component and particle analysis unit 30 can proceed with analysis after a certain period of time (the time that the analysis sample is supplied to the analysis unit 30). Specifically, when the concentration of a specific species is detected to be equal to or higher than a set value, the analysis sample may be diluted to perform further analysis.

The data processing unit 400 may measure the cps value with time using a mass spectrometry method. In general, the mass spectrometric method can measure a value, which is a signal generated with respect to the mass ratio of the analyte to the charge, but the data processing unit 400 can measure the signal intensity value (cps) with time. For example, the data processing unit 400 may measure the accumulated cps value for a predetermined time.

The particle size and distribution analyzing unit 420 may measure the size and distribution of the particles included in the analyte based on the cps value and predetermined environment variables.

In exemplary embodiments, the particle size and distribution analyzer 420 may measure the size and distribution of particles included in the analyte using a periodic distribution method.

FIGS. 8 to 10 are graphs for explaining a method of analyzing a chemical component of an analyte using a periodic distribution method. FIG.

8, gold (Ag) particles having a diameter within a range of 18 nm to 20 nm are dispersed in distilled water so that 5.9 x 10 11 to 7.2 x 10 11 gold particles per milliliter are contained in distilled water, To the particle size and distribution analysis unit 30 to measure the accumulated cps value in units of time of 3 msec. In addition, the cps value can be corrected in consideration of the background intensity value.

Referring to FIG. 9, the result of FIG. 8 may be converted into a graph of a frequency for a count. For example, when the cps value is 26, the local maximum of the frequency is shown, which is due to the gold (Ag) particles having a diameter within the range of 18 nm to 20 nm.

Referring to FIG. 10, the relationship between the diameter of the particles and the frequency thereof can be graphically displayed based on the results of FIG. 9, taking into account the background intensity value and predetermined environment variables. For example, the environmental variable may be a predetermined variable such as density and temperature. It can be seen that particles having diameters in the range of 18 nm to 32 nm in diameter are detected.

FIGS. 11 to 14 are graphs for explaining a method for analyzing the size and distribution of particles for analytes using the low-concentration measurement method.

Referring to Figs. 11 to 14, the solution containing the gold particles is further diluted and dispersed in a solution of a single particle distribution level in the solution to be injected, and a signal distribution (cps) with respect to time is obtained for a single particle .

Subsequently, compared to the calibration curve data for the standard gold solution, the weight of gold nano-atoms for a single particle can be obtained under the conditions of the measured time, and the size of the particles can be obtained by further considering environmental variables.

As shown in FIGS. 11 and 12, more diluted gold nanoparticles (about 100 nm) can be provided to the chemical and particle analysis unit 30, and the integration time can be measured in terms of a cumulative cps value of 100 microseconds have.

As shown in FIG. 13, the weight of the gold nanoparticles can be determined from the results of FIG. 11, in comparison with the calibration curve data of the standard gold solution.

Through the above process, the size of gold nanoparticles corresponding to each peak can be calculated, and a size distribution can be obtained for all signals obtained.

As shown in FIG. 14, 53 gold nanoparticles having a diameter of 20 nm were provided to the chemical component and particle analyzer 30 to measure the size of the gold nanoparticles. As a result, the average diameter of the gold nanoparticles was about 17.45 (+/- 2.93) nm And it can be seen that it is measured relatively accurately in the error range.

Referring again to FIG. 7, when the chemical component measurement mode is selected, the component analysis for the sprayed analyte is performed (S230).

For example, the cps value for the analyte may be measured, and qualitative and quantitative analysis of the analyte may be performed based on the cps value. In addition, the quantitative analysis of the analyte may be performed on the basis of the predetermined calibration curve data.

According to the particle analysis method according to the exemplary embodiments, since the particle size and the distribution can be measured using the cps value over time in the mass spectrometry method, the accuracy of the particle size and distribution measurement can be improved.

Particularly, the particle analysis method has advantages of increasing the accuracy and reproducibility of particle size and distribution measurement for solution and gaseous analyte, and can perform chemical analysis measurement and particle size and distribution measurement at the same time, a particle analysis measurement on the analyte can be performed.

15 is a flowchart for explaining a particle analysis method according to another embodiment using the analysis unit.

The particle analyzing method according to FIG. 15 is a method for simultaneously measuring the concentration of the ultrafine contaminant and the particles of several tens of nanometers or less by changing the selection of the measuring mode in the analyzing unit without a large change of the concentration measuring apparatus of the analyzing unit.

First, a sample sample of the analyte is taken out in real time and provided to the analysis unit of the particle analysis system (S300)

Then, the sampled analyte provided to the analysis unit is qualitatively and quantitatively analyzed (S310)

In step S310, the qualitative and quantitative analysis is a step of measuring how much substance exists in the analyte and measuring the concentration of the analyte present in the target sample. The detailed description of the quantitative analysis and the qualitative analysis has been described in detail above and is omitted here.

Then, the concentration of the analyte is checked to determine whether to perform the particle analysis of the analyte or the other analyte (S310).

If the concentration of the analyte is higher than the specific concentration by confirming the concentration in step S320, it means that the particles contained in the analyte are present more than necessary, so that the particle analysis process of the analyte needs to be performed. On the other hand, having a specific concentration or less means that the possibility of the presence of a specific particle contained in the analyte is low, so that there is no need to carry out the particle analysis process of the analyte again.

Subsequently, when it is determined that particle analysis is required, the diluted analytical sample is prepared by diluting with the solvent of the analyte (S330)

The preparation of the diluted analytical sample in step S330 may be performed by determining the dilution ratio of the solvent according to the concentration of the analytical material and then mixing the analyte and the solvent.

The number of specific ions present in the analyte is then measured using the diluted analytical sample (S340)

Thereafter, a particle analysis method using the measured number of ions is performed to calculate the particle size and the distribution of particles present in the analyte (S350)

The calculation of the size of particles and the distribution of particles in S350 can be performed according to the method disclosed in Figs. 11 to 14, and a detailed description thereof will be omitted.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the following claims. It can be understood that it is possible.

S: analyte storage 10: extraction unit
20: Interface unit 30: Chemical component and particle analysis unit

Claims

A take-out unit for taking out and delivering a sample of the analyte in real time;
An interface unit including a calibration sample introduction unit for receiving and quantifying the extracted sample sample;
And a chemical component and particle analyzing unit for receiving a predetermined amount of a sample sample and measuring chemical components of the analyte contained in the sample sample and analyzing the size and distribution of the particles contained in the analyte.

The method according to claim 1,
Wherein the chemical component and particle analysis unit comprises:
A data processing unit for measuring a signal intensity value with respect to the analyte over time;
A particle size and distribution analyzer for measuring the particle size and distribution based on the signal intensity value according to the time and a predetermined environment variable; And
And a chemical component analyzing unit for performing qualitative and quantitative analysis on the analyte based on the signal intensity value according to the time and predetermined calibration line data.

3. The method of claim 2,
Wherein the particle size and distribution analyzer measures the size and distribution of particles using a cyclic distribution method.

3. The method of claim 2,
Wherein the particle size and distribution analyzer measures the size and distribution of the particles using a low concentration measurement method.

The apparatus according to claim 1, wherein the takeout unit
A trapping vessel for containing the trapping solution and the analyte; And
And a sample delivery unit for supplying a purge gas into the trapping container to allow the trapping solution mixed with the purifying gas to be supplied to the interface unit via the sample delivery line.

2. The particle analysis system according to claim 1, wherein said extraction unit extracts a quantity of analytes in real time from an analyte reservoir remote from the analysis unit.

The image forming apparatus according to claim 1,
A spray to which the trapping solution and the analytical sample are mixed and sprayed in an aerosol state;
A spray chamber for providing a space for primarily collecting the analyte contained in the analysis sample in the aerosol trapping solution;
A trapping tube for receiving an aerosolized trapping solution from the spray chamber and the analytical sample, and for trapping the unreacted analytical material in the spray chamber by bringing the analytical sample into contact with the trapping tube;
A trapping vessel receiving the trapping solution in which the analyte is collected through the trapping tube; And
And a sample delivery unit for providing a purge gas into the trapping vessel so that the trapping solution captured by the purge gas is provided to the interface unit via the sample delivery line.

8. The apparatus according to claim 7,
Further comprising a cooling section for cooling the trapping vessel and the trapping tube such that the analyte that is not captured in the trapping solution can be more easily captured.

8. The apparatus according to claim 7,
Further comprising a cleaning unit including a cleaning liquid supply unit for supplying a cleaning liquid into the trapping container to clean contaminants remaining in the trapping container, and a discharge unit for discharging the cleaning liquid to which the cleaning liquid has been discharged, to the outside Particle analysis system.

8. The apparatus according to claim 7, further comprising: a control unit for controlling operations of said take-out unit, said interface unit, and said chemical component and particle analysis unit; And
Further comprising a level sensor for measuring the level of the trapping solution provided to the inside of the trapping vessel and sending a warning signal to the control unit.

8. The apparatus according to claim 7,
A first collection line providing the spray with a trapping solution in which the analyte contained in the trapping container is captured;
A second collection line through which the analyte in the trapping coil passes through the primary collection line and provides the trapped solution secondary trapped to the trapping vessel; And
Further comprising a circulation pump for concentrating and collecting the analyte by circulating the trapped solution, which is secondarily captured by the analyte, to the first capture line and the second capture line.

2. The apparatus of claim 1,
A sample receiving unit for receiving a sample sample from the extraction unit and providing a space for receiving the sample sample;
A sample introducing portion having a space capable of receiving a predetermined amount of the sample sample to provide a predetermined amount of the sample sample provided in the sample accommodating portion to the analyzing unit;
A pressure providing unit that applies a pressure to the sample introducing unit to receive the sample sample or a sample sample accommodated in the sample introducing unit into the analyzing unit; And
A cleaning liquid supply part for supplying a cleaning liquid into the sample storage part for cleaning the sample storage part when the sample sample is injected into the analysis unit, and a cleaning liquid cleaning part for cleaning the sample storage part or a sample sample remaining in the cleaning liquid, And a cleaning part including a discharge part for discharging the particles.

13. The apparatus of claim 12,
Further comprising a concentration analyzer connected to a lower discharge line connected to a lower portion of the sample accommodating portion and configured to measure the concentration of the sample accommodated in the sample accommodating portion through the lower discharge line.

Extracting a sample sample in real time from the analyte reservoir;
Quantifying the sample sample by receiving the sampled sample sample;
Performing a component analysis on the analyte contained in the sample sample when the chemical component measurement mode is selected; And
And performing particle size and distribution analysis on the analyte contained in the sample sample when the particle size and distribution measurement mode is selected.

15. The method of claim 14, wherein performing particle size and distribution analysis comprises:
And measuring a signal intensity value with respect to the analyte over time.

16. The method of claim 15, wherein performing particle size and distribution analysis comprises:
Measuring a particle size and a distribution by a cyclic distribution method based on the signal intensity value according to the time and a predetermined environment variable.

17. The method of claim 16, wherein performing particle size and distribution analysis comprises:
And measuring the size and distribution of the particles by a low concentration measurement method based on the signal intensity value according to the time and a predetermined calibration curve and environment variables.

17. The method of claim 16, wherein performing the component analysis on the analyte comprises:
Measuring a signal intensity value with time for the analyte; And
And performing qualitative and quantitative analysis on the analyte based on the signal intensity value over time.

19. The method of claim 18,
Wherein performing the quantitative analysis on the analyte comprises performing quantitative analysis on the analyte on the basis of predetermined calibration curve data.

15. The particle analysis method according to claim 14, wherein the extraction of the sample in real time uses a extraction unit.

15. The particle analysis method according to claim 14, wherein the quantification of the sample sample uses an interface unit.

Extracting a sample sample in real time;
Performing quantitative and qualitative analysis of the analyte of the sample sample by receiving the sample sample taken out;
Confirming the concentration of the analyte by the qualitative analysis to confirm the analysis of the analyte;
Diluting the analyte with a solvent to prepare a diluted analytical sample when it is determined that particle analysis is necessary;
And analyzing the particle size and distribution for the analyte using the diluted analytical sample.

23. The method of claim 22, wherein particle size and distribution analysis for the analyte
Measuring the number of specific ions present in the analyte and performing a particle analysis method using the measured number of ions to calculate the particle size and the distribution of particles present in the analyte Particle analysis method.